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High Precision Linear Motion made Simple
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• Privately held company in Japan• Date of Incorporation was May 20, 1952• President & CEO, Hiroki Hashidate• Has 2 offices and 2 factories in Japan• Has 1 factory in China• Has 5 subsidiary companies &
1 sales office overseas• Quality System
– ISO 9001 year 2000 Certified
• Environmental Standards– ISO 14001 year 2004 certified
2
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• The customer is always first– We strive to achieve customer impression, more
than satisfaction.
• Employees are the biggest asset– Encourage each employee’s willingness to do their
best.
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Controllers
Motors
Mechatronic Systems
Drivers
Networking
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• ASIC Based Motion Control Chips– PCL series/PCD series
• PC Based Multi-axis Controllers– PPCI, NPMC series
• Simple Hand-held Unit (Motion Checker)– MCH series
5
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• Stepper Motors Driver Chips for Bipolar /Unipolar – NP series
• Stepper Motors Driver Modules– BD series
6
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• Tin-can Stepper Motors– PF/PFC series
• Linear Stepper Motors– PFL series
• Hybrid Stepper Motors– PJB series &
PR series
• Synchronous Timing Motors– PTM series
7
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• Linear Shaft Motors (brushless) – S series
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• Serial communication chips– G9000 series
• Networking modules– for Master modules– for local modules
• I/O device• Control device• CPU emulation
device
9
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• Per customer’s specifications– Various X-Y Stages for Bio and Medical
• Actuators (Motor + Electronics integration)
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• What is a Linear Shaft Motor?– (Theory and Structure)– What are their advantage over other linear motion
systems?– What is the True Cost of using the Linear Shaft
Motor?
• How to use / select • Applications
11
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• Linear Induction Motor (LIM)• Linear Pulse Motor (LPM)• Linear DC Motor (DCLM)
– Voice Coil Motor
• Linear Synchronous Motor (LSM)– Flat type, U type, and Cylindrical type
• With core• Coreless
13
---
Linear Shaft Motor
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14
0
1000
2000
3000
4000
5000
6000
7000
8000
0 0.5 1 1 .5 2 2.5 3 3.5 4
VEL OCIT Y (m/ sec )
FO
RC
E (
N)
0%
10%
20%
30%
40%
50%
60%
70%
80%
F- V定 格 推 力
出 力効 率
Output
Efficiency
F -
V
S605Q Specification Curve
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16
US Patent 06,040,642US Patent 2006162650A
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17
u w v u w v u w v
u w v u w v u w v
S
N N
S S
N N
S S
NN
S
Fleming’s right hand law
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18
Magnetic field distributionSimulated by FEM Actual
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• Linear motion design rule– Force = Current * Magnetic field
F = I x B– where
F = forces, measured in Newton's I = current in wire, measured in amperes B = magnetic field, measured in teslas
• Temperature increase = I(Current)2 x R
19
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• Coreless design
• No iron in forcer or shaft
• No cogging
• Stiff design– The coils themselves are the core, thus the stiffness of
an iron core design
20
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• Iron Core (Platen & Cylindrical)
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Current
Force
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• Coreless (U SHAPED)
22
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• Linear Shaft Motor
23
Current
Force
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Large Air Gap 0.5mm to 2.5mm nominal annular air gap (1 to 5mm total)
Non-critical No variation in force as gap varies over stroke of device
24
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(Coil)Ineffective use of flux
Cylindrical type
Effective use of flux
Magnets
Coil
Magnetic Flux
Magnets
Magnetic FluxCoil
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• Because of the non-contact design, – No lubrication– No adjustment necessary.
• Eco-friendly – No noise– No dust.
• Energy efficient• Very simple setup• Simple alignment
26
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Linear Motor Type
Flat & Cylindrical
type with coreCoreless Flat
Coreless Cylindrical
Linear Shaft Motor
Power Output High Low High
Stiffness High Low High
Absorption force Very High None None
Result of adsorption force
Need more space for assembly No effect No effect
Cogging Large None None ELECTROMATEToll Free Phone (877) SERVO98
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ELECTROMATEToll Free Phone (877) SERVO98
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ELECTROMATEToll Free Phone (877) SERVO98
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• Are published specs– “True” specs or – “If” specs
30
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• Linear motor specs are not always what they seem.
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• Continuous and Peak forces looks similar
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• Continuous current and Resistance looks similar
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• What is Peak Force based on?– U-motor 1 second
– LSM 40 second
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• What is continuous Force based on?– U-motor 75°C (100°C total)
– LSM 110°C (135°C total)
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Efficient Heat Dissipation
After 24 hours of operation @ 10lbs cont forceELECTROMATE
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• High Speed• Slow Speed• Acceleration• Velocity fluctuation• Nanometer step
37
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Motor:
S435QMaximum velocity: 6.3m/secAcceleration: 13.5GPayload: 20kg (44lbs)Stroke:
800mm 2’7”
Encoder: HeidenhainResolution: 1µmDriver: Servoland SVDM 40PGuide: LM guide
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39
0
0.005
0.01
0.015
0.02
0.025
0.03
0.035
0.04
0.045
0.05
0 50 100 150 200 2 50
Time (s)
Ve
loc
ity(
mm
/s)
Velocity fluctuation is
under 0.01%.Motor:
2-S160T in parallelMaximum velocity: 8 µm/secPayload: 25kg (55 lbs)
Encoder: HeidenhainResolution: 10 nmDriver: Delta Tau P-MacGuide: Air bearing
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Motor:
S435QMaximum velocity: 5m/secAcceleration: 20GPayload: 1.7kg (4 lbs)
Encoder: MitsutoyoResolution: 0.5 µmDriver: Servoland SVDM 40PGuide: LM guide
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41
Stage:
GTX 250Motor:
S200QVelocity:
100mm/secAcceleration: 1GPayload: 25kg (55 lbs)
2.5 3.0 3.5 4.0Time (Seconds)
99.990
99.995
100.000
100.005
100.010
100.015
Channel 1 Velocity (Millimeter/sec)
Velocity fluctuation is
under 0.006%.
Encoder: HeidenhainResolution: 0.1µmDriver: Servoland SVDM 5PGuide: Air bearing
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42
- 5
0
5
10
15
20
25
30
35
40
45
50
55
0 5 10 15 20 25 30 35
A ACT POS
B ACT POS
COMAND POS
[SEC]
[nm]
Motor:
2-
S320D in parallelPayload: 25kg (55 lbs)Guide: Air bearing
Encoder: HeidenhainResolution: 1 nmDriver: Delta Tau P-Mac
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• The savings really comes down to the number of parts needed to build the system and the complexities of these parts.
43
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• Rotary To Linear Systems
– Each part requires a PO
– Every part must be inspected to verify it’s quality
– All the parts need to be arranged and stocked to allow for an efficient build
44
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• Linear Shaft Motor– 1 part number (2 parts)
45
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• Ball and lead screws require true concentricity between the screw and the nut, and they require high levels of parallelism between these and the linear guide.
46
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• Linear Motor*
– Straightness - ±
381 microns (0.015 inch)– Flatness - ≤
889 microns (0.035 inch)
• Piezoelectric Motor†
– Straightness - ±
50 µ– Flatness - ≤
50 microns (0.0019 inch)
• Linear Shaft Motor– Straightness - ±
0.5mm to 2.5mm (0.02 to 0.1 inch)
– Flatness - ≤
1mm to 5mm (0.04 to 0.2 inch)
47
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• Cheaper components might later add to manufacturing cost– the total number of parts– time required to do alignments– required burn-in period– required tuning time
48
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• Ball / Lead Screw
49
Encoder
Rotary Motor
Flexible Coupling
Bearing Housing
Support Bearing
Ball / Lead Screw
Ballnut
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Encoder
Rotary Motor
Flexible Coupling
Bearing Housing
Support Bearing
Ball / Lead Screw
Ballnut• Ball / Lead Screw
– Every part must be inspected and installed– Adjustments required for concentricity between
the screw and the nut– And, high levels of parallelism between screw and
the linear guide– Rotary inertia of the screw can makes it difficult to
tune servo– Adjustments for screw longitudinal and torsional
deformation ELECTROMATEToll Free Phone (877) SERVO98
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• Linear Shaft Motor
51
Linear Shaft Motor Linear Encoder
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53
LSM vs Ball ScrewThis is for a system with a target of 50nm, 100mm usable stroke, and required continous force is 2N.Note: Prices in US$, Based on Qty 25 and current as of 11/17/06
Ball Screw LSMDescription Part Number Cost Description Part Number CostPrecision Ball Screw BSX0802-187 487.80$ Shaft Motor S160D-100 602.50$ Support Unit Fixed side BSWR8 106.00$ Shaft Support SHA16 13.40$ Support Unit Support side BUNR8 27.10$ Driver HAR2/100I 506.00$ Stopper BSTP8 11.30$ Encoder, AnalogRGH24B15L00A 420.00$ Bracket for Ball Screw BNFB304 31.50$ Total 1,541.90$ Screws CB4-8 0.60$ Coupling MCGS16 15.50$ Motor PJB42S41B14 70.00$ 256 Driver 150.00$
Sub-total 899.80$ Encoder 50nm RGH24H15D30A 795.00$
Total 1,694.80$ ELECTROMATEToll Free Phone (877) SERVO98
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• The ability to use commercially available servo drivers.• Higher speeds are able to be achieved while retaining
high precision.– At the same time, extremely high precision low speed uniformity
and high repeatability are possible.• Because of the non-contact design, no lubrication or
adjustment necessary. • Very simple setup and operation time. No need for
extended burn in.• Simple alignment and QC period. • Eco-friendly - no noise, no dust. • Energy efficient, - power requirements are lower then
that of ball screw systems.
54
(In comparison to types of liner motion)
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• Maximum force 36000N (S1150T)• Smallest motor S040D 25x10x10mm• Longest stroke 4.6m (15’ 1”)• Fastest speed 6.3m/sec (21ft/sec)• Slowest speed 8 µm/sec• Maximum acceleration 20G• Velocity fluctuation under 0.05%• Finest resolution 70pm
(0.00007µm)
55
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• What is a Linear Shaft Motor?– (Theory and Structure)– What are their advantage over other linear motion
systems?– What is the True Cost of using the Linear Shaft
Motor?
• How to use / select
56
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Operating Conditions
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Calculations
In these equations, “μ”
is the coefficient of friction on the guide. "g" is as the acceleration of gravity. g = 9.81 m/sec2
Continuous Force => FeffPeak Force => larger Fa
or Fd
-
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ELECTROMATEToll Free Phone (877) SERVO98
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• What is a Linear Shaft Motor?– (Theory and Structure)– What are their advantage over other linear motion
systems?– What is the True Cost of using the Linear Shaft
Motor?
• How to use / select • Applications
64
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Inspection machines
Machining
Other
Manufacturing equipment
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• HDD• LCD• PCB• 3D• Microscope• Semiconductor• Other
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• Milling Machine• Grinders• Press• EDM• Machining center• Laser machine• Wire cut EDM• Other
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• LCD• Boiling machine• Injection• Stage• Eject robot• Handling• Semiconductor before process• Semiconductor after process• Bonding• Surface mounter• Organic Electroluminescence (OEL) Display • Robot• Other
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• Office Automation• Medical• Printer• Machine parts• Health• Automatic sliding doors • Food handling• Fiber• Research• Other
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Linear Shaft Motor Part Number
▬ ▬ ▬┬ ┬ ▬ ▬ ▬├ ┤├ ┤ FO Forcer Only├ ┤ SO Shaft Only├ ┤ XX Two digit for custom motor├ ┤├ ┤ ST Standard├ ┤ WP Waterproof├ ┤ HA Digital Hall Effect├ ┤ CE CE type motor├ ┤└ ┘
S Single windingD Double (2) windingsT Triple (3) windingsQ Quadruple (4) windingsH Hextuple (6) windingsX Octuple (8) windings
S Linear Shaft MotorV Vacuum Linear Shaft Motor
Example:S160T-350-ST
OptionsXX
Forcer Size (A) Usable Stroke S
120160
040080
X XXXXShaft Size (D)
1000
200250320
435500
350427
A standard 16 mm Shaft Motor with a triple coil and a 350 mm usable stroke length.
XX
OptionsXX
usable stroke in millimeters
Shaft diameter in mm *10
XX
• Available Modifications– Waterproof IPX8– Shaft support
length– End Caps– CE type– Hall effects
• Digital
• Q & AELECTROMATE
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