Nippon pulse presentation what is nanopositioning

What is Nanopositioning ?

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Positioning ActivityRequired Precision

(Micrometers)

Approximate Comparative Dimension

Automobile Chassis Assembly 1000 Thickness of a dime

Electronic PCB Assembly 100 Thickness of paper

Typical Machining Tolerances 10 Diameter of small cell

Read/write heads in disk drives 1 Wavelength of light

Scanning Interferometers 0.100 (100 nm) Critical dimension of newest computer chips

Biological Cell micromanipulation Adaptive optics

Optical fiber alignment 0.100 (100 nm) Critical dimension of newest

computer chips

Microlithography Hubble Space Telescope

0.010 (10 nm) A Few Widths of a Molecule

Integrated Circuits Inspection 0.001 (1 nm) A Few Diameters Of Atoms

Thin-Film Surface Coating 0.0001 (100 pm) A Single Atomic Layer

Source: newscaletech.com

Precision In Applications



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Exactly what is a Nanometer?• One billionth of a meter - 1,000,000,000• Water molecule > 1 nanometer• Typical germ ~ 1000 nanometers• Human hair ~ 100,000 nanometer• Carbon Nanotube = 1 nanometer wide



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Nanopositioning RequirementsWhat is the Client’s understanding of

their Nanopositioning application?

1. Accuracy2. Precision3. Resolution4. Smoothness5. Constant Velocity Scanning6. Repeatability ELECTROMATE

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Nanopositioning RequirementsMotion Control Applications must be:1. Predictable2. Verifiable 3. Controllable

Design Considerations:• Accuracy

– Stiffness– Environment



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Design Considerations

•Accuracy



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Accuracy Accuracy vs. Precision

• Accuracy doesn’t mean Precision

• Accuracy represents the ability to get closest to a defined point.

• Precision is the ability to execute a move and return to the same point (regardless of accuracy). ELECTROMATE


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Accuracy Accuracy vs. Precision



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Accuracy ResolutionWhile Resolution is not Accuracy…

It is part of what makes up Accuracy

Two parts of Resolution1. Electrical Resolution2. Mechanical Resolution ELECTROMATE


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•Accuracy– Stiffness



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What Exactly is Stiffness?

SERVO

STIFFNESSMOTOR

MECHANICALELECTROMATE


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Stiffness

SERVO

STIFFNESSMOTOR



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Stiffness Six Degrees of Error FreedomEncoder Resolution doesn’t define the

Accuracy of a Complete Machine1. Pitch2. Roll3. Yaw4. Flatness5. Straightness 6. Scale

The combined interacting effects of all contributing factors must be analyzed before total system precision can be determined. ELECTROMATE


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Stiffness Six Degrees of Error Freedom



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Stiffness Mounting / Drive location



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Stiffness Mounting / Drive location



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Stiffness

SERVO

STIFFNESSMOTOR



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Stiffness Servo

• Servo Stiffness– Bandwidth

• Servo sampling rate for current & position loops

– Encoder resolution

– Mechanical Stiffness



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Stiffness

SERVO

STIFFNESSMOTOR



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Stiffness Motor

• Motor Stiffness– Mechanical stiffness

– Ability to respond to commanded motion

– Flux pattern (Magnetic Servo)



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•Accuracy–Stiffness–Environment



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Environment Other Error Causing Factors

• Thermal expansion errors • Abbé offsets• Feedback Position• Cosine errors• Lost motion• Orthogonality• External forces• Viberation ELECTROMATE


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Environment Thermal Expansion Errors

Thermal expansion coefficients of motion elements must be considered when selection high-precision platforms.



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Environment Abbé OffsetsAbbé errors result from a positioning measuring

device (typically a linear encoder) being offset from the point of work (end-effector)



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Environment Position Feedback Control Schemes



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Environment Cosine Errors

Cosine errors occur when a positioning feedback scale is not in perfect parallel alignment with the motion of the moving carriage.



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Environment Lost Motion (hysteresis)

• Any system that reacts and recovers differently when varying directional forces are applied will exhibit lost motion. – Ballscrew backlash



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Environment Orthogonality

Orthogonality – The degree to which stages are aligned with their motion at right angles to one another.



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Environment External forces

• Side Loading

• Motor resistance

• System harmonicsELECTROMATE


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Vibration – Nearby Conditions

• Other machinery

• Road traffic

• Building swayELECTROMATE


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Technology

Nippon pulse presentation what is nanopositioning