Embed Size (px)
DESCRIPTION
What is Nanopositioning ?
ELECTROMATEToll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099www.electromate.com
Sold & Serviced By:
2
Positioning ActivityRequired Precision
(Micrometers)
Approximate Comparative Dimension
Automobile Chassis Assembly 1000 Thickness of a dime
Electronic PCB Assembly 100 Thickness of paper
Typical Machining Tolerances 10 Diameter of small cell
Read/write heads in disk drives 1 Wavelength of light
Scanning Interferometers 0.100 (100 nm) Critical dimension of newest computer chips
Biological Cell micromanipulation Adaptive optics
Optical fiber alignment 0.100 (100 nm) Critical dimension of newest
computer chips
Microlithography Hubble Space Telescope
0.010 (10 nm) A Few Widths of a Molecule
Integrated Circuits Inspection 0.001 (1 nm) A Few Diameters Of Atoms
Thin-Film Surface Coating 0.0001 (100 pm) A Single Atomic Layer
Source: newscaletech.com
Precision In Applications
ELECTROMATEToll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099www.electromate.com
Sold & Serviced By:
3
Exactly what is a Nanometer?• One billionth of a meter - 1,000,000,000• Water molecule > 1 nanometer• Typical germ ~ 1000 nanometers• Human hair ~ 100,000 nanometer• Carbon Nanotube = 1 nanometer wide
ELECTROMATEToll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099www.electromate.com
Sold & Serviced By:
4
Nanopositioning RequirementsWhat is the Client’s understanding of
their Nanopositioning application?
1. Accuracy2. Precision3. Resolution4. Smoothness5. Constant Velocity Scanning6. Repeatability ELECTROMATE
Toll Free Phone (877) SERVO98Toll Free Fax (877) SERV099
Sold & Serviced By:
5
Nanopositioning RequirementsMotion Control Applications must be:1. Predictable2. Verifiable 3. Controllable
Design Considerations:• Accuracy
– Stiffness– Environment
ELECTROMATEToll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099www.electromate.com
Sold & Serviced By:
6
Design Considerations
•Accuracy
ELECTROMATEToll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099www.electromate.com
Sold & Serviced By:
7
Accuracy Accuracy vs. Precision
• Accuracy doesn’t mean Precision
• Accuracy represents the ability to get closest to a defined point.
• Precision is the ability to execute a move and return to the same point (regardless of accuracy). ELECTROMATE
Toll Free Phone (877) SERVO98Toll Free Fax (877) SERV099
Sold & Serviced By:
8
Accuracy Accuracy vs. Precision
ELECTROMATEToll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099www.electromate.com
Sold & Serviced By:
9
Accuracy ResolutionWhile Resolution is not Accuracy…
It is part of what makes up Accuracy
Two parts of Resolution1. Electrical Resolution2. Mechanical Resolution ELECTROMATE
Toll Free Phone (877) SERVO98Toll Free Fax (877) SERV099
Sold & Serviced By:
10
Design Considerations
•Accuracy– Stiffness
ELECTROMATEToll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099www.electromate.com
Sold & Serviced By:
11
What Exactly is Stiffness?
SERVO
STIFFNESSMOTOR
MECHANICALELECTROMATE
Toll Free Phone (877) SERVO98Toll Free Fax (877) SERV099
Sold & Serviced By:
12
Stiffness
SERVO
STIFFNESSMOTOR
MECHANICALELECTROMATE
Toll Free Phone (877) SERVO98Toll Free Fax (877) SERV099
Sold & Serviced By:
13
Stiffness Six Degrees of Error FreedomEncoder Resolution doesn’t define the
Accuracy of a Complete Machine1. Pitch2. Roll3. Yaw4. Flatness5. Straightness 6. Scale
The combined interacting effects of all contributing factors must be analyzed before total system precision can be determined. ELECTROMATE
Toll Free Phone (877) SERVO98Toll Free Fax (877) SERV099
Sold & Serviced By:
14
Stiffness Six Degrees of Error Freedom
ELECTROMATEToll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099www.electromate.com
Sold & Serviced By:
15
Stiffness Six Degrees of Error Freedom
ELECTROMATEToll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099www.electromate.com
Sold & Serviced By:
16
Stiffness Six Degrees of Error Freedom
ELECTROMATEToll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099www.electromate.com
Sold & Serviced By:
17
Stiffness Mounting / Drive location
ELECTROMATEToll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099www.electromate.com
Sold & Serviced By:
18
Stiffness Mounting / Drive location
ELECTROMATEToll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099www.electromate.com
Sold & Serviced By:
19
Stiffness
SERVO
STIFFNESSMOTOR
MECHANICALELECTROMATE
Toll Free Phone (877) SERVO98Toll Free Fax (877) SERV099
Sold & Serviced By:
20
Stiffness Servo
• Servo Stiffness– Bandwidth
• Servo sampling rate for current & position loops
– Encoder resolution
– Mechanical Stiffness
ELECTROMATEToll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099www.electromate.com
Sold & Serviced By:
21
Stiffness
SERVO
STIFFNESSMOTOR
MECHANICALELECTROMATE
Toll Free Phone (877) SERVO98Toll Free Fax (877) SERV099
Sold & Serviced By:
22
Stiffness Motor
• Motor Stiffness– Mechanical stiffness
– Ability to respond to commanded motion
– Flux pattern (Magnetic Servo)
ELECTROMATEToll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099www.electromate.com
Sold & Serviced By:
23
Design Considerations
•Accuracy–Stiffness–Environment
ELECTROMATEToll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099www.electromate.com
Sold & Serviced By:
24
Environment Other Error Causing Factors
• Thermal expansion errors • Abbé offsets• Feedback Position• Cosine errors• Lost motion• Orthogonality• External forces• Viberation ELECTROMATE
Toll Free Phone (877) SERVO98Toll Free Fax (877) SERV099
Sold & Serviced By:
25
Environment Thermal Expansion Errors
Thermal expansion coefficients of motion elements must be considered when selection high-precision platforms.
ELECTROMATEToll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099www.electromate.com
Sold & Serviced By:
26
Environment Abbé OffsetsAbbé errors result from a positioning measuring
device (typically a linear encoder) being offset from the point of work (end-effector)
ELECTROMATEToll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099www.electromate.com
Sold & Serviced By:
27
Environment Position Feedback Control Schemes
ELECTROMATEToll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099www.electromate.com
Sold & Serviced By:
28
Environment Position Feedback Control Schemes
ELECTROMATEToll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099www.electromate.com
Sold & Serviced By:
29
Environment Position Feedback Control Schemes
ELECTROMATEToll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099www.electromate.com
Sold & Serviced By:
30
Environment Position Feedback Control Schemes
ELECTROMATEToll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099www.electromate.com
Sold & Serviced By:
31
Environment Position Feedback Control Schemes
ELECTROMATEToll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099www.electromate.com
Sold & Serviced By:
32
Environment Cosine Errors
Cosine errors occur when a positioning feedback scale is not in perfect parallel alignment with the motion of the moving carriage.
ELECTROMATEToll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099www.electromate.com
Sold & Serviced By:
33
Environment Lost Motion (hysteresis)
• Any system that reacts and recovers differently when varying directional forces are applied will exhibit lost motion. – Ballscrew backlash
ELECTROMATEToll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099www.electromate.com
Sold & Serviced By:
34
Environment Orthogonality
Orthogonality – The degree to which stages are aligned with their motion at right angles to one another.
ELECTROMATEToll Free Phone (877) SERVO98
Toll Free Fax (877) SERV099www.electromate.com
Sold & Serviced By:
35
Environment External forces
• Side Loading
• Motor resistance
• System harmonicsELECTROMATE
Toll Free Phone (877) SERVO98Toll Free Fax (877) SERV099
Sold & Serviced By:
36
Vibration – Nearby Conditions
• Other machinery
• Road traffic
• Building swayELECTROMATE
Toll Free Phone (877) SERVO98Toll Free Fax (877) SERV099
Sold & Serviced By:
![IEEE/ASME TRANSACTIONS ON MECHATRONICS, VOL. 19, NO. 3 ... stage nanopositioning for high... · relies on nanopositioning is scanning probe microscopy ... [15], signal transformation](https://img.dokumen.tips/doc/110x75/5b6e5dbe7f8b9a180d8e8a82/ieeeasme-transactions-on-mechatronics-vol-19-no-3-stage-nanopositioning.jpg?t=1701776635)
