Nippon Pulse linear shaft motor product presentation 2011 in english and german

From Nippon Pulse and GMC HillstoneELECTROMATE

Toll Free Phone (877) SERVO98Toll Free Fax (877) SERV099

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Läufer Magnete Spulen Stator

Zwei Bauteile1. Stator ~ Spulen2. Läufer ~ Magnete

Two Parts1. Forcer ~ Coils2. Shaft ~ Magnets

ELECTROMATEToll Free Phone (877) SERVO98

Toll Free Fax (877) SERV099www.electromate.com

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• Luftspalt (nominal 0,5 bis 5 mm) möglich. Dieser Luftspalt ist unkritisch. (1 bis 10 mm total)

• Es treten keine Kraftschwankungen auf, wenn die Größe des Luftspalts im Verlauf des Arbeitsweges schwankt.

• Large Air Gap 0.5 mm to 5 mm nominal annular air gap (1 to 10mm total)

• Non-critical No variation in force as gap varies over stroke of device



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• Erster Linearmotor, der für Ultrapräzisions- anwendungen entwickelt wurde

• First linear motor designed for Ultra- High Precision market



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Key elements Ultra-High precision system



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Probleme bei Linearmotoren in Ultrapräzisionsanwendungen Issues with Linear Motors in Ultra-High precision systems• Kräfte (erzeugte und externe)• Steifigkeit des Antriebs• Wärme• Forces (Generated and External)• Stiffness of motor• Heat



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Eddy Currents create Heat and Generate non linear

force output

• Eisenkern (flache & zylindrisch• Iron Core (Platen & Cylindrical)

Back Yoke (Iron)

Eddy CurrentsCore (Iron)

Coil

Magnet

Cogging by concentration of flux

Current

Force

Absorption Force



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• Kernloses Design– Basiert auf dem

eisenlosen Prinzipo Keine Rastkräfte

– Keine Kühlungo Keine Wirbelströme

• Coreless design– No iron in forcer or shaft

o No cogging– No heat sinks

o No Eddy currents



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Coils sandwiched between magnets

restricting air flow and Heat dissipation.

The epoxy core design does not contribute to

the stiffness of the coils

• Eisenlos (U-Form)• Coreless (U-shape)

Coil

Back Yoke (Iron)

Magnet

Core (epoxy)



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Der Linear-Shaft-Motor übernimmt die kernlose Bauweise, erhöht durch die zylindrische Anordnung der Spulen jedoch die Steifheit um das 100-fache.

By forming the coils into a cylinder, stiffness is increased by a factor of 100.

-



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• Anordnung der Spulen– Spule umgibt den

Magneten– Optimiert Luftstrom und

Wärmeableitung• Coil Location

– Coil surrounds the magnet

– Maximizing air flow and heat dissipation

SpulenCoil

MagneteMagnet



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Wärme - Motordaten Heat – Motor ratings• Alle Linearmotoren auf dem Markt werden mit

ehrgeizigen Leistungsdaten angeboten• Every linear motor on the market is

aggressively rated.– Rated based on using the system as heat sink:

• Orientation of the motor• Large aluminum heat sink• Air flow• Water cooling• Heat exchangers

– They are designed and rated to direct heat to the work point. ELECTROMATE


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Wärme – Motordaten Heat – Motor ratings• Die Daten des Linear-Shaft-Motor sind

so ausgelegt, dass die Abwärme in die Luft abgegeben wird, und nicht in den Arbeitspunkt (ohne Kühlung)

• The Linear Shaft Motor is rated to direct heat to the air not to the work point.– It is rated with no heat sinking (except ambient

air).ELECTROMATE


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Coils are completely exposed allowing for

maximum air flow and Heat dissipation.

• Linear Shaft Motor

The Cylindrical design of the coils greatly

increases their stiffness

Current

Force

Coreless design with no Eddy

currents generated heat and a linear

force output ELECTROMATEToll Free Phone (877) SERVO98


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Lorentz force law

• F = I L × B– where

• F = Force, measured in newtons• I = current in wire, measured in amperes• B = magnetic field strength, measured in teslas• × = vector cross product• L = length of wire in coil, measured in metres



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Orientation of the current flow • Zylindrische Bauform erlaubt

– Das gesamte Kupfer in der Spule erzeugt lineare Kraft in eine Richtung.

– Der gesamte Strom in der Spule fließt im 90° Winkel zum Magnetfeld für maximale Effizienz.

– Dadurch ist der Luftspalt unkritisch• Cylindrical design allows

– All copper in coil to produce linear force in one direction.

– All current in the coil flow at a 90°angle to the magnetic field for maximum efficiency.

– For non-critical air gapELECTROMATE


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u w v u w v u w v

u w v u w v u w v

SpulenCoil

MagnetischerFlussFlux

AusflussFlux

KraftForce

StromCurrent

Fleming’s law of motion

LäuferShaft

N S N SN S S NS NS N

Drei-Finger-RegelELECTROMATE


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18

Magnetic field distributionSimulated by FEM Actual



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Wärme – Reduktion des Einlfusses auf den Arbeitspunkt Heat – Minimize effect of heat on the work point• Egal wie effektiv der Motor ist oder wie konservativ die Daten, jeder

Motor produziert Wärme• Oft ist eine Kühlung erforderlich• Es ist möglich, den Motor ausserhalb des Arbeitsbereichs zu plazieren

• No matter how efficient, or how conservative the ratings, all linear motors produce heat.

• Most common method is through heat sinking.• We can also move the motor.



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Parallel Drive• By moving the motors from the center of

the load to the edges of the load.– Heat source is moved as far away from the work point

as possible.– Since motors are in Parallel, effect of motor is still in

center of work point.

• The Linear Shaft Motor is designed to do this with one servo drive and one encoder.



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Parallel Motor Example



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Positionierungsgenauigkeit Positioning precision

Schrittweite 5 Nanometer 5 nanometer step motion ELECTROMATEToll Free Phone (877) SERVO98


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Positionierungsgenauigkeit Positioning precision

Folgefehler ist sehr klein. Maximaler Folgefehler ist unter 100nm. Following error is very small. Maximum following error is under 100nm.



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Chip Mounter



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High Speed and Precision Table Acceleration 4G, Positioning accuracy 5 micron (0.0002”)



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G8 TABLE S500Q 3,3METER STROKE PARALLEL DRIVE



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ItemVelocity & Acceleration Up to 1,600 mm/s - Up to 0,5GVelocity Stability Velocity = 100mm/sSettling time Condition Velocity : 400mm/s 0,15G ±5umJitter 20 SecondsPosition Difference Velocity : 100 mm/s Acceleration : 0,1G

Travel : 1000mmTest Stage : Robostar 8GEN Demo Stage



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Item YaskawaVelocity 1,600mm/sMaximum Acceleration

0,5G

Velocity Stability

±0,21%

PTP Move & Settling

400ms

Position Difference

n/a

Jitter at Stop n/a



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Item TrilogyVelocity 1,600mm/sMaximum Acceleration

0,5G

Velocity Stability

±0,08%

PTP Move & Settling

320ms

Position Difference

n/a

Jitter at Stop n/a



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Item TecnotionVelocity 1,600mm/sMaximum Acceleration

0,5G

Velocity Stability

±0,09%

PTP Move & Settling

320ms

Position Difference

n/a

Jitter at Stop n/a



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Item Linear Shaft Motor

Velocity 1,600mm/sMaximum Acceleration

0,5G

Velocity Stability

±0,06%

PTP Move & Settling

280ms

Position Difference

1,66um

Jitter at Stop 52,3nmELECTROMATE


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Item Linear Shaft Motor

Velocity 1,600mm/sMaximum Acceleration

0,5G

Velocity Stability

±0,06%

PTP Move & Settling

280ms

Position Difference

1,66um

Jitter at Stop 52,3nmELECTROMATE


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Technology

Nippon Pulse linear shaft motor product presentation 2011 in english and german