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Piezoelectric MEMS Energy Harvesters
Integrating MEMS piezoelectric energy harvesting
ELECTRONICSCENTRAL POLYECHNIC COLLEGE.
THIRUVANANTHAPURAM
In association with MCEA
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Introduction Let me describe
fabrication and characterization of a significantly improved version of a MEMS-based PZT/PZT thick film bimorph vibration energy harvester with an integrated silicon proof mass. The main advantage of bimorph vibration energy harvesters is that strain energy is not lost in mechanical support materials since only PZT is strained, and thus it has a potential for significantly higher
output power. An improved process scheme for the energy harvester resulted in a robust fabrication process with a record high fabrication yield of 98.6%. Moreover, the robust fabrication process allowed a high pressure treatment of the screen printed PZT thick films prior to sintering, improving the PZT thick film performance and harvester power output reaches 37.1 μW at 1 g.r description goes here
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Wireless sensor node anatomy
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MEMS piezoelectric energy harvesters
Silicon Chip is 1.3 cm square. Resonance Frequencies Of Devices Ranged From 31–232Hz10/14/2022 tangibility by ask™ 4
Printed energy storage materials
Used for printng Capacitors, baXeries, magnets, masses, & Thermoelectric materials
PolymerResin
Add ActiveParticles
Ink
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Printed energy storage materials
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Printing capacitor onto harvester
Piezoelectric beamPrinted capacitor
Electron leads &Bond pads
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Optimization: harvester resistive load
Volt
age of
harve
ster
P = Voltage2/Resistance,
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Power conditioning circuits
Energy harvester Power Conditioning
Load
VOLTAGE & CURRENT ARE OUT OF PHASE LOSS OF POWER
Voltage and Current are out of phase
Voltage and Current are in phase
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Optimization: harvester+power conditioning
THIS IS THE FULL COUPLED ELECTROMECHANICAL SYSTEM
INPUTS:FrequencyAccelerationAvailable volumeMaterial properties
OUTPUTS:Efficiency
Power outputOptimal harvester Geometry
Optimal Circuit component values
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Power supply module optimization results
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Power supply module optimization results
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Why print mass?1.Decrease freq.2.Increase power3.Customize freq.4.Integration
Successfully printed mass on 6 released beams with no ‘causalities'
2.5mm 1.5mm
1.5mm 1.5mm
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SummaryInitial proof of integration concept: could not electrically connect
Optimized harvester to improve power output
Optimized harvester + power conditioning: full coupled system
Optimization results tell us how to build full integrated power supply system
Energy storage can be printed onto harvester or package in novelways
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Thank You
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