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National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Phonons
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
google image
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Lattice vibration
http://socs.berkeley.edu/~murphy/Movies/movie.html
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
How to model this vibration...?
x
y
atomic displacement at time t
equilibrium position
Fourier Analysis!!
f x( ) = an cos2πLnx
!
"#
$
%&+bn sin
2πLnx
!
"#
$
%&
'
()
*
+,
n=−∞
∞
∑
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Flexural mode
http://socs.berkeley.edu/~murphy/Movies/movie.html
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Logitudinal mode
http://socs.berkeley.edu/~murphy/Movies/movie.html
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Torsional mode
http://socs.berkeley.edu/~murphy/Movies/movie.html
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Thermal Transport in a Crystal
atom
Electron (or hole)
Phonon (lattice vibration)
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Reciprocal Lattice and k-space
k-space
0 2π/a 4π/a 6π/a
K
First Brillouin zone
k-space in three dimensional representation
Reciprocal lattice vector
Class Note
φ x( ) = φn ⋅exp i2πanx
"
#$
%
&'
(
)*
+
,-
n∑ = φn ⋅exp iKnx( )(
)+,
n∑
φ x+ a( ) = φn ⋅exp i2πanx
"
#$
%
&'⋅exp i
2πana
"
#$
%
&'
(
)*
+
,-
n∑ = φ x( )
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Phonon Dispersion Relationhttp://www.ioffe.ru/SVA/NSM/Semicond/GaN/figs/fmd28_1.gif
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Electronic Band Structure
http://www.ioffe.ru/SVA/NSM/Semicond/GaN/figs/fmd28_1.gif
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Harmonic Approximation
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Dispersion Relation
Class Note
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Interatomic Bonding
1-D Array of Spring & Mass System
Equation of motion with the nearest neighbor interaction
Solution
Dispersion Relation
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
k = 2π/λ λmin = 2a kmax = π/a -π/a<k< π/a
2aλ: wavelength
Group velocity
Dispersion Relation
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Lattice Constant, a
xn ynyn-1 xn+1
Two Atoms Per Unit Cell
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Optical Branch: Electromagnetic Wave
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Freq
uenc
y, ω
Wave vector, K0 π/a
LA TA
LO
TO
Optical Vibrational Modes
LA & LO
TA & TO
Total 6 polarizations
Longitudinal and Transverse
Polarization
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
LA is higher than TA
Real Dispersion in GaAs
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Classical OscillatorFrictionlessm
• Displacement:
• Potential energy:
• The state of a particle at time t is specified by location x(t) and momentum p(t)
•Allowed energy states
n = 0, 1, 2,…
Quantum Oscillator
• The state of the particle is associated with a wave function ψ, whose modulus squared |ψ(x)|2 gives the probability of finding the particle at x
Energy is quantized, and ħω is a quantum of energy
•Schrodinger equation:
• Newton’s 2nd law:
En = n + 1
2!"#
$%&!ω
Classical vs Quantum Oscillator
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Total Energy of a Quantum Oscillator in a Parabolic Potential
n = 0, 1, 2, 3, 4…; !ω/2: zero point energy
Phonon: A quantum of vibrational energy, !ω, which travels through the lattice
Phonons follow Bose-Einstein statistics.
Phonon momentum
Phonon energy
Energy Quantization: Phonon
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
1s
2s
2p
Excited state
Phonon Hydrogen atom
nth excited state -> n phonons
Physically, this relation dictates that a normal mode with frequency ω is nth excited state. Another way of saying this, which is more widely used, is that there are n phonons in the normal mode.
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Equilibrium properties
• Specific heat
• Thermal expansion
• Melting
Transport properties
• Superconductivity
• Thermal conductivity
• Speed of sound
Equilibrium vs Transport Properties
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Specific heat (or heat capacity)
• Phonon density of states
• Debye vs. Einstein model
• Phonon heat capacity
Outline: Equilibrium Properties
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Phonon Density of States (DOS)
a
A linear chain of M atoms with two ends jointed (periodic boundary condition)
DOS: the number of phonon modes per unit frequency
m=1
m=2m=3
um
Solution
Allowed values of k This periodic boundary condition leads to one allowed mode per mobile atom
kL = 2nπ
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Phonon Density of States
Only M wavevectors (k) are allowed (one per mobile atom):
k= -Maπ/L -6π/L -4π/L -2π/L 0 2π/L 4π/L 6π/L π/a=Maπ/L
Only 1 k state lies within a dk interval of 2π/L
# of states between k and k + dk is: (L/2π)dk
N: total number of modes with wavevector less than k.
D(ω): density of states (# of k-vibrational modes between ω and ω+dω) :
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Phonon Density of States
1 dimensional
2 dimensional
3 dimensional
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Density of States
22
1.4 Thermoelectric Energy Conversion
Thermoelectric devices exploit the Seebeck coefficient to turn voltage
gradients into thermal gradients and vice versa. A schematic of a thermoelectric
device is shown in Figure 1.7. If one supplies a thermal current, a corresponding
electrical current is generated by the device (power generation). Similarly, if one
supplies an electrical current, a temperature gradient is generated by the device
(refrigeration). A thermoelectric device usually consists of many n-p couples that are
connected electrically in series and thermally in parallel. Thermoelectric devices have
F igure 1.6. Variations in the electronic and phononic densities of states in low-dimensional
structures.
R. Wang, Ph.D. dissertation
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Debye vs Einstein ApproximationEinstein approximation
ωD
Debye approximation
kD
ωD: cutoff frequency
ωE
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Phonon Density of States
DOS based on the Debye approximation
DOS based on the Einstein approximation
D ω( )
ωω E
D ω( )
ωωD
ω 2
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Phonon Density of States
Reddy et al. APL 87, 211908 (2005)
Real DOS DOS based on the Debye approximation
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Debye Model
Freq
uenc
y, ω
Wave vector, k0 π/a
Debye Approximation:
Debye Density of States
Number of Atoms:
Debye Wave Vector
Debye Cut-off Freq.
Debye Temperature: !Temperature where all phonon modes are excited Higher speed of sound -> higher Debye temperature
Debye Temperature [K]
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Mode Counting
Mode counting in D dimensions
M: number of unit cells
s: number of atoms per unit cell !1. Total number of modes: sMD
2. Number of branches (mode for each k): sD
3. Number of acoustic branches: D
4. Number of optical braches: Ds-D
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Total Energy of Lattice Vibration
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Total Energy of Lattice Vibration
Debye approximation: ω=csk
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Phonon Heat Capacity under Debye Approximation
Debye temperature
[J/K]
[J/m3-K]
cv =∂U∂T
"
#$%
&' v
= 9NkB
TθD
"
#$%
&'
3x4ex
ex −1( )2 dx0
xD
∫
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Phonon Heat Capacity
Heat capacity
When T << θD,
Quantum Regime
Classical Regime
When T >> θD,
Dulong-Petit’s law
D: dimensionality
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Principle of equipartition of energy
에너지는 자유도 사이에 똑같이 나누어지며, 자유도 한 개 당의 평균에너지는 1/2kT와 같다.
Monatomic molecule
x, y, z kinetic E
Diatomic molecule
2 rotational E vibrational E
(1 kinetic & 1 potential)
Crystal solid
x,y,z vibrational E (3) * (1 kinetic & 1 potential)
Dulong-Petit’s law
Dulong - Petit’s Law
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Phonon Radiation
For comparison, photon radiation
Stefan Boltzmann constant
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Photon Phonon
Distribution Bose-Einstein Bose-Einstein
Radiation !Under Debye
Dispersionω = 0 ~ k ~ ∞
ω = Under Debye
Polarization 2 transverse2 transverse 1 longitudinal
Scattering Photon-photon (no) Phonon-phonon (yes)
Wave Electromagnetic wave Elastic wave
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Wien’s Displacement Law
u(ω)
ω
Increasing T
ωmax
Blackbody Phonon Radiation
For comparison, photon
ωmax ≈3kBhT
λmaxT ≈hc3kB
clight = 3×108 ms
csound = 3−10 ×103 ms
λmaxT = 2898µm ⋅K
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Equilibrium properties
• Specific heat
• Thermal expansion
• Melting
Transport properties
• Superconductivity
• Thermal conductivity
• Speed of sound
Equilibrium vs Transport Properties
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Outline: Transport Properties
Ballistic transport
Diffusive transport
• Thermal conductivity
phonon heat capacity
phonon group velocity
phonon mean free path
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Scanning Thermal Microscopy
Pt-Cr Junction
10 µm
Pt Line
Cr Line
TipLaser Reflector
SiNx Cantilever
X-Y-Z Actuator
Sample
Temperature sensor
Laser
CantileverDeflectionSensing
Thermal
x
T
Shi, Kwon, Miner, Majumdar, JMEMS 10, 370 (2001)
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Ballistic versus Diffusive Transport
Topographic Thermal
1 µm
A B C D
Low bias:Ballistic
High bias:Dissipative
ΔTtip
2 K
0
Courtesy of Li Shi
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Wave Packet: Wave to Particle!!
http://www.astro.ucla.edu/~wright/anomalous-dispersion.html
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Phonon Thermal Conductivity
Atom Spring
A phonon is a quantum of crystal vibration energy.
Energy transport can be regarded as phonon transport
(Diffusive transport)
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Phonon Thermal Conductivity
k : Bond strength
m : Mass
Phonon Scattering
Mode counting in D dimensions
s: number of atoms per unit cell
Number of acoustic branches: D
Number of optical branches: Ds-D
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Phonon Thermal Conductivity
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
TC vs Temperature: Scattering Mechanisms
Boundary scattering
Defect scattering Phonon-phonon scattering
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Phonon Scattering
Phonon-Defect Scattering
Phonon-Phonon Scattering
Phonon-Electron Scattering
Phonon-Boundary Scattering
Λ = phonon mean free path
Vg = phonon group velocity
τ = phonon mean free time
Λ = Vg τ
Boundary (Interface) scattering important at small length scales!
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Phonon Boundary Scattering
Ashcroft & Mermin (text book)
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Heat Capacity (Boundary Scattering)
CVD SWCN
• An individual nanotube has a high k ~ 2000-11000 W/m-K at 300 K
• k of a CN bundle is reduced by thermal resistance at tube-tube junctions
• Potential applications as heat spreading materials for electronic packaging applications
CNT
Courtesy of C. Yu
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
the interfaces. These processes have been predicted to affect the kvalues of Si nanowires, but not to the extent observed here20,21. Thepeak k of the EE nanowires is shifted to a much higher temperaturethan that of VLS nanowires, and both are significantly higher thanthat of bulk Si, which peaks at around 25K (ref. 5). This shift suggeststhat the phonon mean free path is limited by boundary scattering asopposed to intrinsic Umklapp scattering.
While the above wires were etched from high-resistivity wafers, thepeak ZT of semiconductor materials is predicted to occur at highdopant concentrations (,13 1019 cm23; ref. 22). To optimize the
ZT of EE nanowires, lower resistivity nanowires were synthesizedfrom 1021V cm B-doped p-Si Æ111æ and 1022V cm As-doped n-SiÆ100æ wafers by the standard method outlined above. Nanowiresetched from the 1022V cm and less resistive wafers, however, didnot produce devices with reproducible electrical contacts, probablyowing to greater surface roughness, as observed in TEM analysis.Consequently, more optimally doped nanowires were obtained bypost-growth gas-phase B doping of wires etched from 1021V cmwafers (see Supplementary Information). The resulting nanowireshave an average r5 36 1.4mV cm (as compared to ,10V cm forwires from low-doped wafers).
Figure 2c shows the k of small-diameter nanowires etched from 10,1021, and 1022V cm wafers. The post-growth doped nanowire(52 nm diameter) etched from a 1021V cm wafer has a slightly lowerk than the lower-doped wire of the same diameter. This smalldecrease in k may be attributed to higher rates of phonon-impurityscattering. Studies of doped and isotopically purified bulk Si haverevealed a reduction of k as a result of impurity scattering6,23,24. Owingto the atomic nature of such defects, they are expected to predomi-nantly scatter short-wavelength phonons. On the other hand, nano-wires etched from a 1022V cm wafer have a much lower k than theother nanowires, probably as a result of the greater surface roughness.
In the case of the 52 nm nanowire, k is reduced to 1.660.13Wm21 K21 at room temperature. For comparison, the temper-ature-dependent k of amorphous bulk SiO2 (data points used fromhttp://users.mrl.uiuc.edu/cahill/tcdata/tcdata.html agree with mea-surement in ref. 25) is also plotted in Fig. 2c. As can be seen from theplot, k of these single-crystalline EE Si nanowires is comparable tothat of insulating glass. Indeed, k of the 52 nm nanowire approachesthe minimum k predicted and measured for Si: ,1Wm21 K21
(ref. 26). The resistivity of a single nanowire of comparable diameter(48 nm) was measured (see Supplementary Information) and theelectronic contribution to thermal conductivity (ke) can be estimatedfrom the Wiedemann–Franz law16. For measured r5 1.7mV cm,ke5 0.4Wm21 K21, meaning that the lattice thermal conductivity(kl5 k2 ke) is 1.2Wm21 K21.
By assuming the mean free path due to boundary scattering‘b~Fd, where F. 1 is a multiplier that accounts for the specularityof phonon scattering at the nanowire surface and d is the nanowirediameter, a model based on Boltzmann transport theory was able toexplain27 the diameter dependence of thermal conductivity in VLSnanowires, as observed in ref. 14. Because the thermal conductivity ofEE nanowires is lower and the surface is rougher than that of VLSones, it is natural to assume ‘b~d (F5 1), which is the smallestmeanfree path due to boundary scattering. However, this still cannotexplain why the phonon thermal conductivity approaches theamorphous limit for nanowires with diameters ,50 nm. In fact,theories that consider phonon backscattering, as recently proposedby ref. 21, cannot explain our observations either. The thermalconductivity in amorphous non-metals26 can be well explained by
50
b
a
40
30
20
10
0
0
4
8
0Temperature (K)
k (W
m–1
K–1
)
c
k (W
m–1
K–1
)
100 200
50 nm98 nm115 nm
115 nm
98 nm
50 nm
150 nm
75 nm52 nm
37 nm
10 Ω cm10–1 Ω cm
56 nm
115 nm
Vapour–liquid–solid nanowiresElectroless etching nanowires
300
0Temperature (K)
100 200 300
10–2 Ω cmAmorphous SiO2
Figure 2 | Thermal conductivity of the rough silicon nanowires. a, An SEMimage of a Pt-bonded EE Si nanowire (taken at 52u tilt angle). The Pt thinfilm loops near both ends of the bridgingwire are part of the resistive heatingand sensing coils on opposite suspendedmembranes. Scale bar, 2 mm. b, Thetemperature-dependent k of VLS (black squares; reproduced from ref. 14)and EE nanowires (red squares). The peak k of the VLS nanowires is175–200K, while that of the EE nanowires is above 250K. The data in thisgraph are from EE nanowires synthesized from low-doped wafers.c, Temperature-dependent k of EE Si nanowires etched from wafers ofdifferent resistivities: 10V cm (red squares), 1021V cm (green squares;arrays doped post-synthesis to 1023V cm), and1022V cm (blue squares).For the purpose of comparison, the k of bulk amorphous silica is plottedwithopen squares. The smaller highly doped EE Si nanowires have a kapproaching that of insulating glass, suggesting an extremely short phononmean free path. Error bars are shown near room temperature, and shoulddecrease with temperature. See Supplementary Information for kmeasurement calibration and error determination.
NATURE |Vol 451 | 10 January 2008 LETTERS
165Nature ©2007 Publishing Group
Phonon Boundary Scattering
Nature 451, 163 (2008)
the interfaces. These processes have been predicted to affect the kvalues of Si nanowires, but not to the extent observed here20,21. Thepeak k of the EE nanowires is shifted to a much higher temperaturethan that of VLS nanowires, and both are significantly higher thanthat of bulk Si, which peaks at around 25K (ref. 5). This shift suggeststhat the phonon mean free path is limited by boundary scattering asopposed to intrinsic Umklapp scattering.
While the above wires were etched from high-resistivity wafers, thepeak ZT of semiconductor materials is predicted to occur at highdopant concentrations (,13 1019 cm23; ref. 22). To optimize the
ZT of EE nanowires, lower resistivity nanowires were synthesizedfrom 1021V cm B-doped p-Si Æ111æ and 1022V cm As-doped n-SiÆ100æ wafers by the standard method outlined above. Nanowiresetched from the 1022V cm and less resistive wafers, however, didnot produce devices with reproducible electrical contacts, probablyowing to greater surface roughness, as observed in TEM analysis.Consequently, more optimally doped nanowires were obtained bypost-growth gas-phase B doping of wires etched from 1021V cmwafers (see Supplementary Information). The resulting nanowireshave an average r5 36 1.4mV cm (as compared to ,10V cm forwires from low-doped wafers).
Figure 2c shows the k of small-diameter nanowires etched from 10,1021, and 1022V cm wafers. The post-growth doped nanowire(52 nm diameter) etched from a 1021V cm wafer has a slightly lowerk than the lower-doped wire of the same diameter. This smalldecrease in k may be attributed to higher rates of phonon-impurityscattering. Studies of doped and isotopically purified bulk Si haverevealed a reduction of k as a result of impurity scattering6,23,24. Owingto the atomic nature of such defects, they are expected to predomi-nantly scatter short-wavelength phonons. On the other hand, nano-wires etched from a 1022V cm wafer have a much lower k than theother nanowires, probably as a result of the greater surface roughness.
In the case of the 52 nm nanowire, k is reduced to 1.660.13Wm21 K21 at room temperature. For comparison, the temper-ature-dependent k of amorphous bulk SiO2 (data points used fromhttp://users.mrl.uiuc.edu/cahill/tcdata/tcdata.html agree with mea-surement in ref. 25) is also plotted in Fig. 2c. As can be seen from theplot, k of these single-crystalline EE Si nanowires is comparable tothat of insulating glass. Indeed, k of the 52 nm nanowire approachesthe minimum k predicted and measured for Si: ,1Wm21 K21
(ref. 26). The resistivity of a single nanowire of comparable diameter(48 nm) was measured (see Supplementary Information) and theelectronic contribution to thermal conductivity (ke) can be estimatedfrom the Wiedemann–Franz law16. For measured r5 1.7mV cm,ke5 0.4Wm21 K21, meaning that the lattice thermal conductivity(kl5 k2 ke) is 1.2Wm21 K21.
By assuming the mean free path due to boundary scattering‘b~Fd, where F. 1 is a multiplier that accounts for the specularityof phonon scattering at the nanowire surface and d is the nanowirediameter, a model based on Boltzmann transport theory was able toexplain27 the diameter dependence of thermal conductivity in VLSnanowires, as observed in ref. 14. Because the thermal conductivity ofEE nanowires is lower and the surface is rougher than that of VLSones, it is natural to assume ‘b~d (F5 1), which is the smallestmeanfree path due to boundary scattering. However, this still cannotexplain why the phonon thermal conductivity approaches theamorphous limit for nanowires with diameters ,50 nm. In fact,theories that consider phonon backscattering, as recently proposedby ref. 21, cannot explain our observations either. The thermalconductivity in amorphous non-metals26 can be well explained by
50
b
a
40
30
20
10
0
0
4
8
0Temperature (K)
k (W
m–1
K–1
)c
k (W
m–1
K–1
)
100 200
50 nm98 nm115 nm
115 nm
98 nm
50 nm
150 nm
75 nm52 nm
37 nm
10 Ω cm10–1 Ω cm
56 nm
115 nm
Vapour–liquid–solid nanowiresElectroless etching nanowires
300
0Temperature (K)
100 200 300
10–2 Ω cmAmorphous SiO2
Figure 2 | Thermal conductivity of the rough silicon nanowires. a, An SEMimage of a Pt-bonded EE Si nanowire (taken at 52u tilt angle). The Pt thinfilm loops near both ends of the bridgingwire are part of the resistive heatingand sensing coils on opposite suspendedmembranes. Scale bar, 2 mm. b, Thetemperature-dependent k of VLS (black squares; reproduced from ref. 14)and EE nanowires (red squares). The peak k of the VLS nanowires is175–200K, while that of the EE nanowires is above 250K. The data in thisgraph are from EE nanowires synthesized from low-doped wafers.c, Temperature-dependent k of EE Si nanowires etched from wafers ofdifferent resistivities: 10V cm (red squares), 1021V cm (green squares;arrays doped post-synthesis to 1023V cm), and1022V cm (blue squares).For the purpose of comparison, the k of bulk amorphous silica is plottedwithopen squares. The smaller highly doped EE Si nanowires have a kapproaching that of insulating glass, suggesting an extremely short phononmean free path. Error bars are shown near room temperature, and shoulddecrease with temperature. See Supplementary Information for kmeasurement calibration and error determination.
NATURE |Vol 451 | 10 January 2008 LETTERS
165Nature ©2007 Publishing Group
Thermal conductivity of bulk Si at room temperature ~ 140 W/m-K
Phonon mean free path at room temperature ~ 300 nm (Goodson et al.)
Si Nanowires
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Phonon Defect Scattering
Temperature, T/θD
0.01 0.1 1.0
kl
BoundaryPhonon-phonon ScatteringDefect
Increasing DefectConcentration
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Phonon Defect Scattering: The Alloy Limit
The alloy limitk [W
/m-K
]
A BAxB1-x
Si GeSixGe1-x
~ 140 W/m-K
~ 60 W/m-K
~ 5 - 10 W/m-K
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
two suspended membranes. The details of the experimentalprocedure are available in the literature.15 Therefore, only abrief explanation is provided here. Essentially, this method isbased on the standard heat source and heat sink method,16
which was scaled down to measure the thermal conductivityof the NWs. The membrane consists of silicon nitride and aplatinum coil. An isopropyl alcohol !IPA" solution containingSi1−xGex NWs was dropped onto the membranes. A Si1−xGexNW was put across the membranes after IPA evaporation. Toenhance the thermal contacts between the NW and mem-branes, Pt/C was deposited by the FEI Quanta 3D dual fo-cused ion beam. Then, this device was packaged and placedon a variable temperature cryostat. One of the membraneswas heated by applying current to the Pt coil. The Pt coilworks as a heater and a thermometer. A fraction of the gen-erated heat was transported through the NW and reached theother membrane. The thermal conductivity of the NW wasdetermined by calculating the heat transported through theNW. The temperatures of the membranes were determinedby measuring the resistance of the Pt heater. All the thermal
conductivity measurements of the Si1−xGex NWs were car-ried out over the temperature range of 40–420 K and at#6!10−6 Torr.
Figure 3 shows the temperature dependence of the ther-mal conductivities of the Si1−xGex NWs with different Geconcentrations and diameters. The diameters, d, of the NWsamples were: d=140 and 147 nm for Si0.996Ge0.004, d=229,330, and 344 nm for Si0.96Ge0.04, and d=160 and 205 nm forSi0.91Ge0.09. The thermal conductivities of Si NWs and aSi0.85Ge0.15 thin film17 are shown for reference. As shown inthe figure, the thermal conductivity of the Si1−xGex NWsdecreases with decreasing NW diameter, which is consistentwith the results of a previous study by Li et al.12 However,based on the thermal conductivity of the Si0.96Ge0.04 andSi0.91Ge0.09 NWs, this diameter dependence is not as signifi-cant as in the case of Si NWs. We suspect that this is becausealloy scattering is more dominant in this case. For Si1−xGexNWs, alloy scattering and phonon boundary scatteringshould be two dominant scattering mechanisms in the tem-perature range of 40–400 K considering that the Debye tem-peratures of Si and Ge are 640 K and 374 K, respectively.18
FIG. 4. Thermal conductivities of the Si1−xGex NWs at 300 K at the differ-ent Ge concentrations. The thermal conductivities of Si NWs, a Si0.85Ge0.15thin film, and Si0.8Ge0.2 bulk !the thin film and bulk data was from Ref. 17"are shown for reference.
FIG. 1. !Color online" Structures and compositions of Si1−xGex NWs: !a"SEM image of Si1−xGex NWs grown on a Si !111" substrate, $!b" and !c"%HRTEM images of Si1−xGex NWs showing their single-crystalline anddefect-free nature, and !d" EDS spectra of Si0.91Ge0.09, Si0.96Ge0.04, andSi0.996Ge0.004 NWs. The inset in !c" is the SAED pattern taken along the$"111% zone axis showing the diamond structure of the NW with the &110'growth direction.
FIG. 2. A SEM image of individual Si1−xGex NWs placed on the suspendedMEMS device.
FIG. 3. Thermal conductivities of the Si1−xGex NWs with x=0.004, 0.04,and 0.09, Si NWs, and a Si0.85Ge0.15 thin film !the thin film data was fromRef. 17".
233106-2 Kim et al. Appl. Phys. Lett. 96, 233106 !2010"
Author complimentary copy. Redistribution subject to AIP license or copyright, see http://apl.aip.org/apl/copyright.jsp
Thin film & bulk
Kim et al, Appl. Phys. Lett. 96, 233106 (2010)
122nm
92nm
147nm
140nm 344nm330nm229nm
205nm160nm
k [W
/m-K
]
A BAxB1-x
Phonon Defect Scattering: Alloy Scattering
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Kim et al., Physical Review Letters 96, 045901 (2006)
In0.53Ga0.47AsIn0.53Ga0.47As
0.4 ML 40 nm
0.1 ML 10 nm
0.3 % ErAs/In0.53Ga0.47As0.3 % ErAs/In0.53Ga0.47As
In0.53Ga0.47As
0.3 % ErAs:In0.53Ga0.47As
In0.53Ga0.47As
0.3 % ErAs/In0.53Ga0.47As
In0.53Ga0.47As
0.3 % ErAs:In0.53Ga0.47As
3.0 % ErAs:In0.53Ga0.47As
Kim et al., Nano Letters 8, 2097 (2008)
In0.53Ga0.47AsIn0.53Ga0.47As
6.0 % ErAs:In0.53Ga0.47As
Phonon defect scattering: Nanoparticles
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Phonon Defect & Boundary Scattering
SiSi/Si0.95Ge0.05
Li et al., APL 83, 3186 (2003)
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Phonon Phonon Scattering (Anharmonic)
• The presence of one phonon causes a periodic elastic strain which modulates in space and time the elastic constant (E) of the crystal. A second phonon sees the modulation of E and is scattered to produce a third phonon. • By scattering, two phonons can combine into one, or one phonon breaks into two. These are inelastic scattering processes (as in a non-linear spring), as opposed to the elastic process of a linear spring (harmonic oscillator).
This is the only way that thermal conductivity of a crystal decreases with increasing temperature
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Phonon Phonon Scattering
Temperature, T/θD
0.01 0.1 1.0
kl
BoundaryPhonon-phononScatteringDefect
Increasing DefectConcentration Why high T???
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Phonon Phonon Scattering
Normal process Umklapp process
Umklapp process does not conserve crystal momentum and
restores equilibrium to Bose-Einstein distribution. It poses
resistance to phonon transport.
The propagating direction is changed.
The first Brillouin zoneUmklapp (in German): flipped over
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
U-Process & Dispersion Relation
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Phonon Thermal Conductivity
ℓl
Temperature, T/θD
BoundaryPhonon-phononScatteringDefect
Decreasing Boundary Separation
Increasing Defect Concentration
• Boundary Scattering • Defect Scattering • Phonon-Phonon Scattering
0.01 0.1 1.0Temperature, T/θD
0.01 0.1 1.0
kl
Boundary
Phonon-phononScatteringDefect
Increasing DefectConcentration
Phonon Scattering Mechanisms
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Elastic scattering: boundary & defect
Inelastic scattering: phonon-phonon scattering
Temperature, T/θD
0.01 0.1 1.0
kl
BoundaryPhonon-phononScatteringDefect
Increasing DefectConcentration
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Thin Film Superlattice
TEM of a thin film superlattice
S.T. Huxtable, Ph.D dissertation
Interfaces
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Interface Scattering
Acoustic Mismatch Model (AMM) Khalatnikov (1952)
Diffuse Mismatch Model (DMM) Swartz and Pohl (1989)
E. Swartz and R. O. Pohl, “Thermal Boundary Resistance,” Reviews of Modern Physics 61, 605 (1989). D. Cahill et al., “Nanoscale thermal transport,” J. Appl. Phys. 93, 793 (2003).
Courtesy of A. Majumdar
Specular Diffuse
National Leading Research Lab. Nanoengineered Energy Conversion Devices Lab.
Si/SixGe1-x SuperlatticeAIM = 1.15
Superlattice Period
Huxtable et al., APL 80, 1737 (2002).
Alloy limit
Acoustic impedance
E: elastic modulus
g: spring constant
Ther
mal
Con
duct
ivit
y [W
/m-K
]