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Page 1: MESFET Models - Keysightedadownload.software.keysight.com/.../2013_01/pdf/mesfet.pdf · 2014. 7. 23. · MESFET Models 1 IC-CAP 2013.01 January 2013 MESFET Models © Agilent Technologies,
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IC-CAP 2013.01January 2013

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© Agilent Technologies, Inc. 2000-20133501 Stevens Creek Blvd., Santa Clara, CA 95052 USANo part of this documentation may be reproduced in any form or by any means (includingelectronic storage and retrieval or translation into a foreign language) without prioragreement and written consent from Agilent Technologies, Inc. as governed by UnitedStates and international copyright laws.

Acknowledgments

UNIX ® is a registered trademark of the Open Group.MS-DOS ®, Windows ®, and MS Windows ® are U.S. registered trademarks of MicrosoftCorporation.Pentium ® is a U.S. registered trademark of Intel Corporation.PostScript® is a trademark of Adobe Systems Incorporated.Java™ is a U.S. trademark of Sun Microsystems, Inc.Mentor Graphics is a trademark of Mentor Graphics Corporation in the U.S. and othercountries.

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Qt Version 4.7.4Qt NoticeThe Qt code was modified. Used by permission.Qt CopyrightQt Version 4.7.4, Copyright (c) 2010 by Nokia Corporation. All Rights Reserved.Qt License Your use or distribution of Qt or any modified version of Qt implies that youagree to this License. This library is free software; you can redistribute it and/or modify itunder the terms of the GNU Lesser General Public License as published by the FreeSoftware Foundation; either version 2.1 of the License, or (at your option) any laterversion. This library is distributed in the hope that it will be useful, but WITHOUT ANYWARRANTY; without even the implied warranty of MERCHANTABILITY or FITNESS FOR APARTICULAR PURPOSE. See the GNU Lesser General Public License for more details. Youshould have received a copy of the GNU Lesser General Public License along with thislibrary; if not, write to the Free Software Foundation, Inc., 51 Franklin St, Fifth Floor,Boston, MA 02110-1301 USA Permission is hereby granted to use or copy this programunder the terms of the GNU LGPL, provided that the Copyright, this License, and theAvailability of the original version is retained on all copies. User documentation of anycode that uses this code or any modified version of this code must cite the Copyright, thisLicense, the Availability note, and "Used by permission." Permission to modify the codeand to distribute modified code is granted, provided the Copyright, this License, and theAvailability note are retained, and a notice that the code was modified is included.Qt Availability http://www.qtsoftware.com/downloadsPatches Applied to Qt can be found in the installation at:$HPEESOF_DIR/prod/licenses/thirdparty/qt/patches.You may also contact Brian Buchanan at Agilent Inc. at [email protected] formore information. For details see:http://bmaster.soco.agilent.com/mw/Qt_License_Information

PythonA. HISTORY OF THE SOFTWARE==========================Python was created in the early 1990s by Guido van Rossum at Stichting MathematischCentrum (CWI, see http://www.cwi.nl ) in the Netherlands as a successor of a languagecalled ABC. Guido remains Python's principal author, although it includes manycontributions from others.

In 1995, Guido continued his work on Python at the Corporation for National ResearchInitiatives (CNRI, see http://www.cnri.reston.va.us ) in Reston, Virginia where he releasedseveral versions of the software.

In May 2000, Guido and the Python core development team moved to BeOpen.com toform the BeOpen PythonLabs team. In October of the same year, the PythonLabs teammoved to Digital Creations (now Zope Corporation, see http://www.zope.com ). In 2001,the Python Software Foundation (PSF, see http://www.python.org/psf/ ) was formed, anon-profit organization created specifically to own Python-related Intellectual Property.Zope Corporation is a sponsoring member of the PSF.

All Python releases are Open Source (see http://www.opensource.org for the OpenSource Definition). Historically, most, but not all, Python releases have also been GPL-compatible; the table below summarizes the various releases.

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Footnotes:

(1) GPL-compatible doesn't mean that we're distributing Python under the GPL. All Pythonlicenses, unlike the GPL, let you distribute a modified version without making yourchanges open source. The GPL-compatible licenses make it possible to combine Pythonwith other software that is released under the GPL; the others don't.

(2) According to Richard Stallman, 1.6.1 is not GPL-compatible, because its license has achoice of law clause. According to CNRI, however, Stallman's lawyer has told CNRI'slawyer that 1.6.1 is "not incompatible" with the GPL.

Thanks to the many outside volunteers who have worked under Guido's direction to makethese releases possible.

B. TERMS AND CONDITIONS FOR ACCESSING OR OTHERWISE USING PYTHON===============================================================

PYTHON SOFTWARE FOUNDATION LICENSE VERSION 2

1. This LICENSE AGREEMENT is between the Python Software Foundation ("PSF"), and theIndividual or Organization ("Licensee") accessing and otherwise using this software("Python") in source or binary form and its associated documentation.

2. Subject to the terms and conditions of this License Agreement, PSF hereby grantsLicensee a nonexclusive, royalty-free, world-wide license to reproduce, analyze, test,perform and/or display publicly, prepare derivative works, distribute, and otherwise usePython alone or in any derivative version, provided, however, that PSF's LicenseAgreement and PSF's notice of copyright, i.e., "Copyright (c) 2001, 2002, 2003, 2004,2005, 2006, 2007, 2008, 2009, 2010 Python Software Foundation; All Rights Reserved"are retained in Python alone or in any derivative version prepared by Licensee.

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3. In the event Licensee prepares a derivative work that is based on or incorporatesPython or any part thereof, and wants to make the derivative work available to others asprovided herein, then Licensee hereby agrees to include in any such work a brief summaryof the changes made to Python.

4. PSF is making Python available to Licensee on an "AS IS" basis. PSF MAKES NOREPRESENTATIONS OR WARRANTIES, EXPRESS OR IMPLIED. BY WAY OF EXAMPLE, BUTNOT LIMITATION, PSF MAKES NO AND DISCLAIMS ANY REPRESENTATION OR WARRANTYOF MERCHANTABILITY OR FITNESS FOR ANY PARTICULAR PURPOSE OR THAT THE USE OFPYTHON WILL NOTINFRINGE ANY THIRD PARTY RIGHTS.

5. PSF SHALL NOT BE LIABLE TO LICENSEE OR ANY OTHER USERS OF PYTHON FOR ANYINCIDENTAL, SPECIAL, OR CONSEQUENTIAL DAMAGES OR LOSS AS A RESULT OFMODIFYING, DISTRIBUTING, OR OTHERWISE USING PYTHON, OR ANY DERIVATIVETHEREOF, EVEN IF ADVISED OF THE POSSIBILITY THEREOF.

6. This License Agreement will automatically terminate upon a material breach of its termsand conditions.

7. Nothing in this License Agreement shall be deemed to create any relationship ofagency, partnership, or joint venture between PSF and Licensee. This License Agreementdoes not grant permission to use PSF trademarks or trade name in a trademark sense toendorse or promote products or services of Licensee, or any third party.

8. By copying, installing or otherwise using Python, Licensee agrees to be bound by theterms and conditions of this License Agreement.

BEOPEN.COM LICENSE AGREEMENT FOR PYTHON 2.0-------------------------------------------

BEOPEN PYTHON OPEN SOURCE LICENSE AGREEMENT VERSION 1

1. This LICENSE AGREEMENT is between BeOpen.com ("BeOpen"), having an office at 160Saratoga Avenue, Santa Clara, CA 95051, and the Individual or Organization ("Licensee")accessing and otherwise using this software in source or binary form and its associateddocumentation ("the Software").

2. Subject to the terms and conditions of this BeOpen Python License Agreement, BeOpenhereby grants Licensee a non-exclusive, royalty-free, world-wide license to reproduce,analyze, test, perform and/or display publicly, prepare derivative works, distribute, andotherwise use the Software alone or in any derivative version, provided, however, that theBeOpen Python License is retained in the Software, alone or in any derivative versionprepared by Licensee.

3. BeOpen is making the Software available to Licensee on an "AS IS" basis. BEOPENMAKES NO REPRESENTATIONS OR WARRANTIES, EXPRESS OR IMPLIED. BY WAY OFEXAMPLE, BUT NOT LIMITATION, BEOPEN MAKES NO AND DISCLAIMS ANYREPRESENTATION OR WARRANTY OF MERCHANTABILITY OR FITNESS FOR ANYPARTICULAR PURPOSE OR THAT THE USE OF THE SOFTWARE WILL NOT INFRINGE ANYTHIRD PARTY RIGHTS.

4. BEOPEN SHALL NOT BE LIABLE TO LICENSEE OR ANY OTHER USERS OF THESOFTWARE FOR ANY INCIDENTAL, SPECIAL, OR CONSEQUENTIAL DAMAGES OR LOSS ASA RESULT OF USING, MODIFYING OR DISTRIBUTING THE SOFTWARE, OR ANYDERIVATIVE THEREOF, EVEN IF ADVISED OF THE POSSIBILITY THEREOF.

5. This License Agreement will automatically terminate upon a material breach of its termsand conditions.

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6. This License Agreement shall be governed by and interpreted in all respects by the lawof the State of California, excluding conflict of law provisions. Nothing in this LicenseAgreement shall be deemed to create any relationship of agency, partnership, or jointventure between BeOpen and Licensee. This License Agreement does not grant permissionto use BeOpen trademarks or trade names in a trademark sense to endorse or promoteproducts or services of Licensee, or anythird party. As an exception, the "BeOpen Python" logos available athttp://www.pythonlabs.com/logos.html may be used according to the permissionsgranted on that web page.

7. By copying, installing or otherwise using the software, Licensee agrees to be bound bythe terms and conditions of this License Agreement.

CNRI LICENSE AGREEMENT FOR PYTHON 1.6.1-----------------------------------------

1. This LICENSE AGREEMENT is between the Corporation for National Research Initiatives,having an office at 1895 Preston White Drive, Reston, VA 20191 ("CNRI"), and theIndividual or Organization ("Licensee") accessing and otherwise using Python 1.6.1software in source or binary form and its associated documentation.

2. Subject to the terms and conditions of this License Agreement, CNRI hereby grantsLicensee a nonexclusive, royalty-free, world-wide license to reproduce, analyze, test,perform and/or display publicly, prepare derivative works, distribute, and otherwise usePython 1.6.1 alone or in any derivative version, provided, however, that CNRI's LicenseAgreement and CNRI's notice of copyright, i.e., "Copyright (c) 1995-2001 Corporation forNational Research Initiatives; All Rights Reserved" are retained in Python 1.6.1 alone or inany derivative version prepared by Licensee. Alternately, in lieu of CNRI's LicenseAgreement, Licensee may substitute the following text (omitting the quotes): "Python1.6.1 is made available subject to the terms and conditions in CNRI's License Agreement.This Agreement together with Python 1.6.1 may be located on the Internet using thefollowing unique, persistent identifier (known as a handle): 1895.22/1013. ThisAgreement may also be obtained from a proxy server on the Internet using the followingURL: http://hdl.handle.net/1895.22/1013 ".

3. In the event Licensee prepares a derivative work that is based on or incorporatesPython 1.6.1 or any part thereof, and wants to make the derivative work available toothers as provided herein, then Licensee hereby agrees to include in any such work a briefsummary of the changes made to Python 1.6.1.

4. CNRI is making Python 1.6.1 available to Licensee on an "AS IS" basis. CNRI MAKESNO REPRESENTATIONS OR WARRANTIES, EXPRESS OR IMPLIED. BY WAY OF EXAMPLE,BUT NOT LIMITATION, CNRI MAKES NO AND DISCLAIMS ANY REPRESENTATION ORWARRANTY OF MERCHANTABILITY OR FITNESS FOR ANY PARTICULAR PURPOSE OR THATTHE USE OF PYTHON 1.6.1 WILL NOT INFRINGE ANY THIRD PARTY RIGHTS.

5. CNRI SHALL NOT BE LIABLE TO LICENSEE OR ANY OTHER USERS OF PYTHON 1.6.1FOR ANY INCIDENTAL, SPECIAL, OR CONSEQUENTIAL DAMAGES OR LOSS AS A RESULTOF MODIFYING, DISTRIBUTING, OR OTHERWISE USING PYTHON 1.6.1, OR ANYDERIVATIVE THEREOF, EVEN IF ADVISED OF THE POSSIBILITY THEREOF.

6. This License Agreement will automatically terminate upon a material breach of its termsand conditions.

7. This License Agreement shall be governed by the federal intellectual property law of theUnited States, including without limitation the federal copyright law, and, to the extentsuch U.S. federal law does not apply, by the law of the Commonwealth of Virginia,excluding Virginia's conflict of law provisions.Notwithstanding the foregoing, with regard to derivative works based on Python 1.6.1 thatincorporate non-separable material that was previously distributed under the GNU General

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Public License (GPL), the law of the Commonwealth of Virginia shall govern this LicenseAgreement only as to issues arising under or with respect to Paragraphs 4, 5, and 7 of thisLicense Agreement. Nothing in this License Agreement shall be deemed to create anyrelationship of agency, partnership, or joint venture between CNRI and Licensee. ThisLicense Agreement does not grant permission to use CNRI trademarks or trade name in atrademark sense to endorse or promote products or services of Licensee, or any thirdparty.

8. By clicking on the "ACCEPT" button where indicated, or by copying, installing orotherwise using Python 1.6.1, Licensee agrees to be bound by the terms and conditions ofthis License Agreement.

ACCEPT

CWI LICENSE AGREEMENT FOR PYTHON 0.9.0 THROUGH 1.2----------------------------------------------------

Copyright (c) 1991 - 1995, Stichting Mathematisch Centrum Amsterdam, TheNetherlands. All rights reserved.

Permission to use, copy, modify, and distribute this software and its documentation forany purpose and without fee is hereby granted, provided that the above copyright noticeappear in all copies and that both that copyright notice and this permission notice appearin supporting documentation, and that the name of Stichting Mathematisch Centrum orCWI not be used in advertising or publicity pertaining to distribution of the softwarewithout specific, written priorpermission.

STICHTING MATHEMATISCH CENTRUM DISCLAIMS ALL WARRANTIES WITH REGARD TOTHIS SOFTWARE, INCLUDING ALL IMPLIED WARRANTIES OF MERCHANTABILITY ANDFITNESS, IN NO EVENT SHALL STICHTING MATHEMATISCH CENTRUM BE LIABLE FOR ANYSPECIAL, INDIRECT OR CONSEQUENTIAL DAMAGES OR ANY DAMAGES WHATSOEVERRESULTING FROM LOSS OF USE, DATA OR PROFITS, WHETHER IN AN ACTION OFCONTRACT, NEGLIGENCE OR OTHER TORTIOUS ACTION, ARISING OUT OF OR INCONNECTION WITH THE USE OR PERFORMANCE OF THIS SOFTWARE.

bzip2

This copy of Python includes a copy of bzip2, which is licensed under the following terms:

This program, "bzip2", the associated library "libbzip2", and all documentation, arecopyright (C) 1996-2007 Julian R Seward. All rights reserved.

Redistribution and use in source and binary forms, with or without modification, arepermitted provided that the following conditions are met:

1. Redistributions of source code must retain the above copyright notice, this list ofconditions and the following disclaimer.

2. The origin of this software must not be misrepresented; you must not claim that youwrote the original software. If you use this software in a product, an acknowledgment inthe product documentation would be appreciated but is not required.

3. Altered source versions must be plainly marked as such, and must not bemisrepresented as being the original software.

4. The name of the author may not be used to endorse or promote products derived fromthis software without specific prior written permission.

THIS SOFTWARE IS PROVIDED BY THE AUTHOR ``AS IS'' AND ANY EXPRESS OR IMPLIED

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WARRANTIES, INCLUDING, BUT NOT LIMITED TO, THE IMPLIED WARRANTIES OFMERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE ARE DISCLAIMED. IN NOEVENT SHALL THE AUTHOR BE LIABLE FOR ANY DIRECT, INDIRECT, INCIDENTAL,SPECIAL, EXEMPLARY, OR CONSEQUENTIAL DAMAGES (INCLUDING, BUT NOT LIMITEDTO, PROCUREMENT OF SUBSTITUTE GOODS OR SERVICES; LOSS OF USE, DATA, ORPROFITS; OR BUSINESS INTERRUPTION) HOWEVER CAUSED AND ON ANY THEORY OFLIABILITY, WHETHER IN CONTRACT, STRICT LIABILITY, OR TORT (INCLUDINGNEGLIGENCE OR OTHERWISE) ARISING IN ANY WAY OUT OF THE USE OF THISSOFTWARE, EVEN IF ADVISED OF THE POSSIBILITY OF SUCH DAMAGE.

Julian Seward, [email protected]/libbzip2 version 1.0.5 of 10 December 2007

OpenSSL

This copy of Python includes a copy of openssl, which is licensed under the followingterms:

LICENSE ISSUES==============

The OpenSSL toolkit stays under a dual license, i.e. both the conditions of the OpenSSLLicense and the original SSLeay license apply to the toolkit.See below for the actual license texts. Actually both licenses are BSD-style Open Sourcelicenses. In case of any license issues related to OpenSSLplease contact [email protected].

OpenSSL License

Copyright (c) 1998-2008 The OpenSSL Project. All rights reserved.

Redistribution and use in source and binary forms, with or without modification, arepermitted provided that the following conditions are met:

1. Redistributions of source code must retain the above copyright notice, this list ofconditions and the following disclaimer.

2. Redistributions in binary form must reproduce the above copyright notice, this list ofconditions and the following disclaimer in the documentation and/or other materialsprovided with the distribution.

3. All advertising materials mentioning features or use of this software must display thefollowing acknowledgment:"This product includes software developed by the OpenSSL Project for use in the OpenSSLToolkit. (http://www.openssl.org/ )"

4. The names "OpenSSL Toolkit" and "OpenSSL Project" must not be used to endorse orpromote products derived from this software without prior written permission. For writtenpermission, please contact [email protected].

5. Products derived from this software may not be called "OpenSSL" nor may "OpenSSL"appear in their names without prior written permission of the OpenSSL Project.

6. Redistributions of any form whatsoever must retain the following acknowledgment:"This product includes software developed by the OpenSSL Project for use in the OpenSSLToolkit (http://www.openssl.org/ )"

THIS SOFTWARE IS PROVIDED BY THE OpenSSL PROJECT ``AS IS'' AND ANY EXPRESSEDOR IMPLIED WARRANTIES, INCLUDING, BUT NOT LIMITED TO, THE IMPLIEDWARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE ARE

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DISCLAIMED. IN NO EVENT SHALL THE OpenSSL PROJECT OR ITS CONTRIBUTORS BELIABLE FOR ANY DIRECT, INDIRECT, INCIDENTAL, SPECIAL, EXEMPLARY, ORCONSEQUENTIAL DAMAGES (INCLUDING, BUT NOT LIMITED TO, PROCUREMENT OFSUBSTITUTE GOODS OR SERVICES; LOSS OF USE, DATA, OR PROFITS; OR BUSINESSINTERRUPTION) HOWEVER CAUSED AND ON ANY THEORY OF LIABILITY, WHETHER INCONTRACT, STRICT LIABILITY, OR TORT (INCLUDING NEGLIGENCE OR OTHERWISE)ARISING IN ANY WAY OUT OF THE USE OF THIS SOFTWARE, EVEN IF ADVISED OF THEPOSSIBILITY OF SUCH DAMAGE.====================================================================

This product includes cryptographic software written by Eric Young ([email protected]).This product includes software written by Tim Hudson ([email protected]).

Original SSLeay License

Copyright (C) 1995-1998 Eric Young ([email protected])All rights reserved.

This package is an SSL implementation written by Eric Young ([email protected]).The implementation was written so as to conform with Netscapes SSL.

This library is free for commercial and non-commercial use as long as the followingconditions are adhered to. The following conditions apply to all code found in thisdistribution, be it the RC4, RSA, lhash, DES, etc., code; not just the SSL code. The SSLdocumentation included with this distribution is covered by the same copyright termsexcept that the holder is Tim Hudson ([email protected]).

Copyright remains Eric Young's, and as such any Copyright notices in the code are not tobe removed.If this package is used in a product, Eric Young should be given attribution as the authorof the parts of the library used. This can be in the form of a textual message at programstartup or in documentation (online or textual) provided with the package.

Redistribution and use in source and binary forms, with or without modification, arepermitted provided that the following conditions are met:1. Redistributions of source code must retain the copyright notice, this list of conditionsand the following disclaimer.2. Redistributions in binary form must reproduce the above copyright notice, this list ofconditions and the following disclaimer in the documentation and/or other materialsprovided with the distribution.3. All advertising materials mentioning features or use of this software must display thefollowing acknowledgement:"This product includes cryptographic software written byEric Young ([email protected])"The word 'cryptographic' can be left out if the rouines from the library being used are notcryptographic related.4. If you include any Windows specific code (or a derivative thereof) from the appsdirectory (application code) you must include an acknowledgement:"This product includes software written by Tim Hudson ([email protected])"

THIS SOFTWARE IS PROVIDED BY ERIC YOUNG ``AS IS'' AND ANY EXPRESS OR IMPLIEDWARRANTIES, INCLUDING, BUT NOT LIMITED TO, THE IMPLIED WARRANTIES OFMERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE ARE DISCLAIMED. IN NOEVENT SHALL THE AUTHOR OR CONTRIBUTORS BE LIABLE FOR ANY DIRECT, INDIRECT,INCIDENTAL, SPECIAL, EXEMPLARY, OR CONSEQUENTIAL DAMAGES (INCLUDING, BUTNOT LIMITED TO, PROCUREMENT OF SUBSTITUTE GOODS OR SERVICES; LOSS OF USE,DATA, OR PROFITS; OR BUSINESS INTERRUPTION) HOWEVER CAUSED AND ON ANYTHEORY OF LIABILITY, WHETHER IN CONTRACT, STRICT LIABILITY, OR TORT(INCLUDING NEGLIGENCE OR OTHERWISE) ARISING IN ANY WAYOUT OF THE USE OF THIS SOFTWARE, EVEN IF ADVISED OF THE POSSIBILITY OF SUCH

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DAMAGE.

The licence and distribution terms for any publically available version or derivative of thiscode cannot be changed. i.e. this code cannot simply be copied and put under anotherdistribution licence including the GNU Public Licence.

TclThis copy of Python includes a copy of Tcl, which is licensed under the following terms:

This software is copyrighted by the Regents of the University of California, SunMicrosystems, Inc., Scriptics Corporation, ActiveState Corporation and other parties. Thefollowing terms apply to all files associated with the software unless explicitly disclaimedin individual files.

The authors hereby grant permission to use, copy, modify, distribute, and license thissoftware and its documentation for any purpose, provided that existing copyright noticesare retained in all copies and that this notice is included verbatim in any distributions. Nowritten agreement, license, or royalty fee is required for any of the authorized uses.Modifications to this software may be copyrighted by their authors and need not follow thelicensing terms described here, provided that the new terms are clearly indicated on thefirst page of each file where they apply.

IN NO EVENT SHALL THE AUTHORS OR DISTRIBUTORS BE LIABLE TO ANY PARTY FORDIRECT, INDIRECT, SPECIAL, INCIDENTAL, OR CONSEQUENTIAL DAMAGES ARISING OUTOF THE USE OF THIS SOFTWARE, ITS DOCUMENTATION, OR ANY DERIVATIVES THEREOF,EVEN IF THE AUTHORS HAVE BEEN ADVISED OF THE POSSIBILITY OF SUCH DAMAGE.

THE AUTHORS AND DISTRIBUTORS SPECIFICALLY DISCLAIM ANY WARRANTIES,INCLUDING, BUT NOT LIMITED TO, THE IMPLIED WARRANTIES OF MERCHANTABILITY,FITNESS FOR A PARTICULAR PURPOSE, AND NON-INFRINGEMENT. THIS SOFTWARE ISPROVIDED ON AN "AS IS" BASIS, AND THE AUTHORS AND DISTRIBUTORS HAVE NOOBLIGATION TO PROVIDE MAINTENANCE, SUPPORT, UPDATES, ENHANCEMENTS, ORMODIFICATIONS.

GOVERNMENT USE: If you are acquiring this software on behalf of the U.S. government,the Government shall have only "Restricted Rights" in the software and relateddocumentation as defined in the Federal Acquisition Regulations (FARs) in Clause52.227.19 (c) (2). If you are acquiring the software on behalf of the Department ofDefense, the software shall be classified as "Commercial Computer Software" and theGovernment shall have only "Restricted Rights" as defined in Clause 252.227-7013 (c) (1)of DFARs. Notwithstanding the foregoing, the authors grant the U.S. Government andothers acting in its behalf permission to use and distribute the software in accordance withthe terms specified in this license.

TkThis copy of Python includes a copy of Tk, which is licensed under the following terms:

This software is copyrighted by the Regents of the University of California, SunMicrosystems, Inc., and other parties. The following terms apply to all files associated withthe software unless explicitly disclaimed in individual files.

The authors hereby grant permission to use, copy, modify, distribute, and license thissoftware and its documentation for any purpose, provided that existing copyright noticesare retained in all copies and that this notice is included verbatim in any distributions. Nowritten agreement, license, or royalty fee is required for any of the authorized uses.Modifications to this software may be copyrighted by their authors and need not follow thelicensing terms described here, provided that the new terms are clearly indicated on thefirst page of each file where they apply.

IN NO EVENT SHALL THE AUTHORS OR DISTRIBUTORS BE LIABLE TO ANY PARTY FOR

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DIRECT, INDIRECT, SPECIAL, INCIDENTAL, OR CONSEQUENTIAL DAMAGES ARISING OUTOF THE USE OF THIS SOFTWARE, ITS DOCUMENTATION, OR ANY DERIVATIVES THEREOF,EVEN IF THE AUTHORS HAVE BEEN ADVISED OF THE POSSIBILITY OF SUCH DAMAGE.

THE AUTHORS AND DISTRIBUTORS SPECIFICALLY DISCLAIM ANY WARRANTIES,INCLUDING, BUT NOT LIMITED TO, THE IMPLIED WARRANTIES OF MERCHANTABILITY,FITNESS FOR A PARTICULAR PURPOSE, AND NON-INFRINGEMENT. THIS SOFTWARE ISPROVIDED ON AN "AS IS" BASIS, AND THE AUTHORS AND DISTRIBUTORS HAVE NOOBLIGATION TO PROVIDE MAINTENANCE, SUPPORT, UPDATES, ENHANCEMENTS, ORMODIFICATIONS.

GOVERNMENT USE: If you are acquiring this software on behalf of the U.S. government,the Government shall have only "Restricted Rights" in the software and relateddocumentation as defined in the Federal Acquisition Regulations (FARs) in Clause52.227.19 (c) (2). If you are acquiring the software on behalf of the Department ofDefense, the software shall be classified as "Commercial Computer Software" and theGovernment shall have only "Restricted Rights" as defined in Clause 252.227-7013 (c) (1)of DFARs. Notwithstanding the foregoing, the authors grant the U.S. Government andothers acting in its behalf permission to use and distribute the software in accordance withthe terms specified in this license.

Mersenne TwisterThe _random module includes code based on a download fromhttp://www.math.keio.ac.jp/ matumoto/MT2002/emt19937ar.html. The following are theverbatim comments from the original code:

A C-program for MT19937, with initialization improved 2002/1/26. Coded by TakujiNishimura and Makoto Matsumoto.

Before using, initialize the state by using init_genrand(seed) or init_by_array(init_key,key_length).

Copyright (C) 1997 - 2002, Makoto Matsumoto and Takuji Nishimura, All rights reserved.

Redistribution and use in source and binary forms, with or without modification, arepermitted provided that the following conditions are met:

1. Redistributions of source code must retain the above copyright notice, this list ofconditions and the following disclaimer.

2. Redistributions in binary form must reproduce the above copyright notice, this list ofconditions and the following disclaimer in the documentation and/or other materialsprovided with the distribution.

3. The names of its contributors may not be used to endorse or promote products derivedfrom this software without specific prior written permission.

THIS SOFTWARE IS PROVIDED BY THE COPYRIGHT HOLDERS AND CONTRIBUTORS "ASIS" AND ANY EXPRESS OR IMPLIED WARRANTIES, INCLUDING, BUT NOT LIMITED TO,THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULARPURPOSE ARE DISCLAIMED. IN NO EVENT SHALL THE COPYRIGHT OWNER ORCONTRIBUTORS BE LIABLE FOR ANY DIRECT, INDIRECT, INCIDENTAL, SPECIAL,EXEMPLARY, OR CONSEQUENTIAL DAMAGES (INCLUDING, BUT NOT LIMITED TO,PROCUREMENT OF SUBSTITUTE GOODS OR SERVICES; LOSS OF USE, DATA, ORPROFITS; OR BUSINESS INTERRUPTION) HOWEVER CAUSED AND ON ANY THEORY OFLIABILITY, WHETHER IN CONTRACT, STRICT LIABILITY, OR TORT (INCLUDINGNEGLIGENCE OR OTHERWISE) ARISING IN ANY WAY OUT OF THE USE OF THISSOFTWARE, EVEN IF ADVISED OF THE POSSIBILITY OF SUCH DAMAGE.

Any feedback is very welcome.http://www.math.keio.ac.jp/matumoto/emt.html

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email: [email protected]

SocketsThe socket module uses the functions, getaddrinfo(), and getnameinfo(), which are codedin separate source files from the WIDE Project, http://www.wide.ad.jp/ .

Copyright (C) 1995, 1996, 1997, and 1998 WIDE Project.All rights reserved.

Redistribution and use in source and binary forms, with or without modification, arepermitted provided that the following conditions are met:1. Redistributions of source code must retain the above copyright notice, this list ofconditions and the following disclaimer.2. Redistributions in binary form must reproduce the above copyright notice, this list ofconditions and the following disclaimer in the documentation and/or other materialsprovided with the distribution.3. Neither the name of the project nor the names of its contributors may be used toendorse or promote products derived from this software without specific prior writtenpermission.

THIS SOFTWARE IS PROVIDED BY THE PROJECT AND CONTRIBUTORS ``AS IS'' ANDGAI_ANY EXPRESS OR IMPLIED WARRANTIES, INCLUDING, BUT NOT LIMITED TO, THEIMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSEARE DISCLAIMED. IN NO EVENT SHALL THE PROJECT OR CONTRIBUTORS BE LIABLE FORGAI_ANY DIRECT, INDIRECT, INCIDENTAL, SPECIAL, EXEMPLARY, OR CONSEQUENTIALDAMAGES (INCLUDING, BUT NOT LIMITED TO, PROCUREMENT OF SUBSTITUTE GOODSOR SERVICES; LOSS OF USE, DATA, OR PROFITS; OR BUSINESS INTERRUPTION)HOWEVER CAUSED AND ON GAI_ANY THEORY OF LIABILITY, WHETHER IN CONTRACT,STRICT LIABILITY, OR TORT (INCLUDING NEGLIGENCE OR OTHERWISE) ARISING INGAI_ANY WAY OUT OF THE USE OF THIS SOFTWARE, EVEN IF ADVISED OF THEPOSSIBILITY OF SUCH DAMAGE.

Floating point exception controlThe source for the fpectl module includes the following notice:

---------------------------------------------------------------------/ Copyright (c) 1996. \The Regents of the University of California.All rights reserved.

Permission to use, copy, modify, and distribute this software forany purpose without fee is hereby granted, provided that this en-tire notice is included in all copies of any software which is orincludes a copy or modification of this software and in allcopies of the supporting documentation for such software.

This work was produced at the University of California, LawrenceLivermore National Laboratory under contract no. W-7405-ENG-48between the U.S. Department of Energy and The Regents of theUniversity of California for the operation of UC LLNL.

DISCLAIMER

This software was prepared as an account of work sponsored by anagency of the United States Government. Neither the United StatesGovernment nor the University of California nor any of their em-ployees, makes any warranty, express or implied, or assumes anyliability or responsibility for the accuracy, completeness, orusefulness of any information, apparatus, product, or processdisclosed, or represents that its use would not infringe

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privately-owned rights. Reference herein to any specific commer-cial products, process, or service by trade name, trademark,manufacturer, or otherwise, does not necessarily constitute orimply its endorsement, recommendation, or favoring by the UnitedStates Government or the University of California. The views andopinions of authors expressed herein do not necessarily state orreflect those of the United States Government or the Universityof California, and shall not be used for advertising or product\ endorsement purposes. /---------------------------------------------------------------------

MD5 message digest algorithm----------------------------The source code for the md5 module contains the following notice:

Copyright (C) 1999, 2002 Aladdin Enterprises. All rights reserved.

This software is provided 'as-is', without any express or implied warranty. In no event willthe authors be held liable for any damages arising from the use of this software.

Permission is granted to anyone to use this software for any purpose, includingcommercial applications, and to alter it and redistribute it freely, subject to the followingrestrictions:

1. The origin of this software must not be misrepresented; you must not claim that youwrote the original software. If you use this software in a product, an acknowledgment inthe product documentation would be appreciated but is not required.2. Altered source versions must be plainly marked as such, and must not bemisrepresented as being the original software.3. This notice may not be removed or altered from any source distribution.

L. Peter [email protected]

Independent implementation of MD5 (RFC 1321).

This code implements the MD5 Algorithm defined in RFC 1321, whose text is available athttp://www.ietf.org/rfc/rfc1321.txtThe code is derived from the text of the RFC, including the test suite (section A.5) butexcluding the rest of Appendix A. It does not include any code or documentation that isidentified in the RFC as being copyrighted.

The original and principal author of md5.h is L. Peter Deutsch <[email protected]>.Other authors are noted in the change history that follows (in reverse chronologicalorder):

2002-04-13 lpd Removed support for non-ANSI compilers; removedreferences to Ghostscript; clarified derivation from RFC 1321;now handles byte order either statically or dynamically.1999-11-04 lpd Edited comments slightly for automatic TOC extraction.1999-10-18 lpd Fixed typo in header comment (ansi2knr rather than md5);added conditionalization for C++ compilation from MartinPurschke <[email protected]>.1999-05-03 lpd Original version.

Asynchronous socket services----------------------------The asynchat and asyncore modules contain the following notice:

Copyright 1996 by Sam Rushing

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All Rights Reserved

Permission to use, copy, modify, and distribute this software and its documentation forany purpose and without fee is hereby granted, provided that the above copyright noticeappear in all copies and that both that copyright notice and this permission notice appearin supporting documentation, and that the name of SamRushing not be used in advertising or publicity pertaining to distribution of the softwarewithout specific, written prior permission.

SAM RUSHING DISCLAIMS ALL WARRANTIES WITH REGARD TO THIS SOFTWARE,INCLUDING ALL IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS, IN NOEVENT SHALL SAM RUSHING BE LIABLE FOR ANY SPECIAL, INDIRECT ORCONSEQUENTIAL DAMAGES OR ANY DAMAGES WHATSOEVER RESULTING FROM LOSS OFUSE, DATA OR PROFITS, WHETHER IN AN ACTION OF CONTRACT, NEGLIGENCE OROTHER TORTIOUS ACTION, ARISING OUT OF OR IN CONNECTION WITH THE USE ORPERFORMANCE OF THIS SOFTWARE.

Cookie management-----------------The Cookie module contains the following notice:

Copyright 2000 by Timothy O'Malley <[email protected]>

All Rights Reserved

Permission to use, copy, modify, and distribute this software and its documentation forany purpose and without fee is hereby granted, provided that the above copyright noticeappear in all copies and that both that copyright notice and this permission notice appearin supporting documentation, and that the name ofTimothy O'Malley not be used in advertising or publicity pertaining to distribution of thesoftware without specific, written prior permission.

Timothy O'Malley DISCLAIMS ALL WARRANTIES WITH REGARD TO THIS SOFTWARE,INCLUDING ALL IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS, IN NOEVENT SHALL Timothy O'Malley BE LIABLE FOR ANY SPECIAL, INDIRECT ORCONSEQUENTIAL DAMAGES OR ANY DAMAGES WHATSOEVER RESULTING FROM LOSS OFUSE, DATA OR PROFITS,WHETHER IN AN ACTION OF CONTRACT, NEGLIGENCE OR OTHER TORTIOUS ACTION,ARISING OUT OF OR IN CONNECTION WITH THE USE OR PERFORMANCE OF THISSOFTWARE.

Profiling---------The profile and pstats modules contain the following notice:

Copyright 1994, by InfoSeek Corporation, all rights reserved.Written by James Roskind

Permission to use, copy, modify, and distribute this Python software and its associateddocumentation for any purpose (subject to the restriction in the following sentence)without fee is hereby granted, provided that the above copyright notice appears in allcopies, and that both that copyright notice and this permission notice appear in supportingdocumentation, and that the name of InfoSeek not be used in advertising or publicitypertaining to distribution of the software without specific, written prior permission. Thispermission is explicitly restricted to the copying and modification of the software to remainin Python, compiled Python, or other languages (such as C) wherein the modified orderived code is exclusively imported into a Python module.

INFOSEEK CORPORATION DISCLAIMS ALL WARRANTIES WITH REGARD TO THISSOFTWARE, INCLUDING ALL IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS.

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IN NO EVENT SHALL INFOSEEK CORPORATION BE LIABLE FOR ANY SPECIAL, INDIRECTOR CONSEQUENTIAL DAMAGES OR ANY DAMAGES WHATSOEVER RESULTING FROM LOSSOF USE, DATA OR PROFITS, WHETHER IN AN ACTION OF CONTRACT, NEGLIGENCE OROTHER TORTIOUS ACTION, ARISING OUT OF OR IN CONNECTION WITH THE USE ORPERFORMANCE OF THIS SOFTWARE.

Execution tracing-----------------The trace module contains the following notice:

portions copyright 2001, Autonomous Zones Industries, Inc., all rights...err... reserved and offered to the public under the terms of thePython 2.2 license.Author: Zooko O'Whielacronxhttp://zooko.com/ [email protected]

Copyright 2000, Mojam Media, Inc., all rights reserved.Author: Skip Montanaro

Copyright 1999, Bioreason, Inc., all rights reserved.Author: Andrew Dalke

Copyright 1995-1997, Automatrix, Inc., all rights reserved.Author: Skip Montanaro

Copyright 1991-1995, Stichting Mathematisch Centrum, all rights reserved.

Permission to use, copy, modify, and distribute this Python software and its associateddocumentation for any purpose without fee is hereby granted, provided that the abovecopyright notice appears in all copies, and that both that copyright notice and thispermission notice appear in supporting documentation, and that the name of neitherAutomatrix, Bioreason or Mojam Media be used in advertising or publicity pertaining todistribution of the software without specific, written prior permission.

UUencode and UUdecode functions-------------------------------The uu module contains the following notice:

Copyright 1994 by Lance EllinghouseCathedral City, California Republic, United States of America.All Rights ReservedPermission to use, copy, modify, and distribute this software and its documentation forany purpose and without fee is hereby granted, provided that the above copyright noticeappear in all copies and that both that copyright notice and this permission notice appearin supporting documentation, and that the name of Lance Ellinghouse not be used inadvertising or publicity pertaining to distribution of the software without specific, writtenprior permission.LANCE ELLINGHOUSE DISCLAIMS ALL WARRANTIES WITH REGARD TO THIS SOFTWARE,INCLUDING ALL IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS, IN NOEVENT SHALL LANCE ELLINGHOUSE CENTRUM BE LIABLE FOR ANY SPECIAL, INDIRECTOR CONSEQUENTIAL DAMAGES OR ANY DAMAGES WHATSOEVER RESULTING FROM LOSSOF USE, DATA OR PROFITS, WHETHER IN AN ACTION OF CONTRACT, NEGLIGENCE OROTHER TORTIOUS ACTION, ARISING OUT OF OR IN CONNECTION WITH THE USE ORPERFORMANCE OF THIS SOFTWARE.

Modified by Jack Jansen, CWI, July 1995:

Use binascii module to do the actual line-by-line conversion between ascii and binary.This results in a 1000-fold speedup. The C version is still 5 times faster, though.Arguments more compliant with Python standard

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XML Remote Procedure Calls--------------------------The xmlrpclib module contains the following notice:

The XML-RPC client interface is

Copyright (c) 1999-2002 by Secret Labs ABCopyright (c) 1999-2002 by Fredrik Lundh

By obtaining, using, and/or copying this software and/or its associated documentation,you agree that you have read, understood, and will comply with the following terms andconditions:

Permission to use, copy, modify, and distribute this software and its associateddocumentation for any purpose and without fee is hereby granted, provided that theabove copyright notice appears in all copies, and that both that copyright notice and thispermission notice appear in supporting documentation, and that the name of Secret LabsAB or the author not be used in advertising or publicity pertaining to distribution of thesoftware without specific, written prior permission.

SECRET LABS AB AND THE AUTHOR DISCLAIMS ALL WARRANTIES WITH REGARD TOTHIS SOFTWARE, INCLUDING ALL IMPLIED WARRANTIES OF MERCHANT-ABILITY ANDFITNESS. IN NO EVENT SHALL SECRET LABS AB OR THE AUTHOR BE LIABLE FOR ANYSPECIAL, INDIRECT OR CONSEQUENTIAL DAMAGES OR ANY DAMAGES WHATSOEVERRESULTING FROM LOSS OF USE, DATA OR PROFITS, WHETHER IN AN ACTION OFCONTRACT, NEGLIGENCE OR OTHER TORTIOUS ACTION, ARISING OUT OF OR INCONNECTION WITH THE USE OR PERFORMANCE OF THIS SOFTWARE.

test_epoll----------The test_epoll contains the following notice:

Copyright (c) 2001-2006 Twisted Matrix Laboratories.

Permission is hereby granted, free of charge, to any person obtaining a copy of thissoftware and associated documentation files (the "Software"), to deal in the Softwarewithout restriction, including without limitation the rights to use, copy, modify, merge,publish, distribute, sublicense, and/or sell copies of the Software, and to permit persons towhom the Software is furnished to do so, subject to the following conditions:

The above copyright notice and this permission notice shall be included in all copies orsubstantial portions of the Software.

THE SOFTWARE IS PROVIDED "AS IS", WITHOUT WARRANTY OF ANY KIND, EXPRESS ORIMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY,FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALLTHE AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OROTHER LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE,ARISING FROM, OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OROTHER DEALINGS IN THE SOFTWARE.

Select kqueue-------------The select and contains the following notice for the kqueue interface:

Copyright (c) 2000 Doug White, 2006 James Knight, 2007 Christian HeimesAll rights reserved.

Redistribution and use in source and binary forms, with or without modification, arepermitted provided that the following conditions are met:

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1. Redistributions of source code must retain the above copyright notice, this list ofconditions and the following disclaimer.2. Redistributions in binary form must reproduce the above copyright notice, this list ofconditions and the following disclaimer in the documentation and/or other materialsprovided with the distribution.

THIS SOFTWARE IS PROVIDED BY THE AUTHOR AND CONTRIBUTORS ``AS IS'' AND ANYEXPRESS OR IMPLIED WARRANTIES, INCLUDING, BUT NOT LIMITED TO, THE IMPLIEDWARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE AREDISCLAIMED. IN NO EVENT SHALL THE AUTHOR OR CONTRIBUTORS BE LIABLE FOR ANYDIRECT, INDIRECT, INCIDENTAL, SPECIAL, EXEMPLARY, OR CONSEQUENTIAL DAMAGES(INCLUDING, BUT NOT LIMITED TO, PROCUREMENT OF SUBSTITUTE GOODS ORSERVICES; LOSS OF USE, DATA, OR PROFITS; OR BUSINESS INTERRUPTION) HOWEVERCAUSED AND ON ANY THEORY OF LIABILITY, WHETHER IN CONTRACT, STRICT LIABILITY,OR TORT (INCLUDING NEGLIGENCE OR OTHERWISE) ARISING IN ANY WAY OUT OF THEUSE OF THIS SOFTWARE, EVEN IF ADVISED OF THE POSSIBILITY OF SUCH DAMAGE.

strtod and dtoa---------------The file Python/dtoa.c, which supplies C functions dtoa and strtod for conversion of Cdoubles to and from strings, is derived from the file of the same name by David M. Gay,currently available from http://www.netlib.org/fp/ . The original file, as retrieved on March16, 2009, contains the following copyright and licensing notice:

/****************************************************************

The author of this software is David M. Gay.

Copyright (c) 1991, 2000, 2001 by Lucent Technologies.

Permission to use, copy, modify, and distribute this software for any purpose without feeis hereby granted, provided that this entire notice is included in all copies of any softwarewhich is or includes a copy or modification of this software and in all copies of thesupporting documentation for such software.

THIS SOFTWARE IS BEING PROVIDED "AS IS", WITHOUT ANY EXPRESS OR IMPLIEDWARRANTY. IN PARTICULAR, NEITHER THE AUTHOR NOR LUCENT MAKES ANYREPRESENTATION OR WARRANTY OF ANY KIND CONCERNING THE MERCHANTABILITY OFTHIS SOFTWARE OR ITS FITNESS FOR ANY PARTICULAR PURPOSE.

***************************************************************/

expat

The pyexpat extension is built using an included copy of the expat sources unless the buildis configured --with-system-expat:

Copyright (c) 1998, 1999, 2000 Thai Open Source Software Center Ltdand Clark Cooper

Permission is hereby granted, free of charge, to any person obtaining a copy of thissoftware and associated documentation files (the "Software"), to deal in the Softwarewithout restriction, including without limitation the rights to use, copy, modify, merge,publish, distribute, sublicense, and/or sell copies of the Software, and to permit persons towhom the Software is furnished to do so, subject to the following conditions:

The above copyright notice and this permission notice shall be included in all copies orsubstantial portions of the Software.

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THE SOFTWARE IS PROVIDED "AS IS", WITHOUT WARRANTY OF ANY KIND, EXPRESS ORIMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY,FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALLTHE AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OROTHER LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE,ARISING FROM, OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OROTHER DEALINGS IN THE SOFTWARE.

libffi------The _ctypes extension is built using an included copy of the libffi sources unless the buildis configured --with-system-libffi:

Copyright (c) 1996-2008 Red Hat, Inc and others.

Permission is hereby granted, free of charge, to any person obtaining a copy of thissoftware and associated documentation files (the ``Software''), to deal in the Softwarewithout restriction, including without limitation the rights to use, copy, modify, merge,publish, distribute, sublicense, and/or sell copies of the Software, and to permit persons towhom the Software is furnished to do so, subject to the following conditions:

The above copyright notice and this permission notice shall be included in all copies orsubstantial portions of the Software.

THE SOFTWARE IS PROVIDED ``AS IS'', WITHOUT WARRANTY OF ANY KIND, EXPRESSOR IMPLIED, INCLUDING BUT NOT LIMITED TO THE WARRANTIES OF MERCHANTABILITY,FITNESS FOR A PARTICULAR PURPOSE AND NONINFRINGEMENT. IN NO EVENT SHALLTHE AUTHORS OR COPYRIGHT HOLDERS BE LIABLE FOR ANY CLAIM, DAMAGES OROTHER LIABILITY, WHETHER IN AN ACTION OF CONTRACT, TORT OR OTHERWISE,ARISING FROM, OUT OF OR IN CONNECTION WITH THE SOFTWARE OR THE USE OROTHER DEALINGS IN THE SOFTWARE.

zlib

The zlib extension is built using an included copy of the zlib sources unless the zlib versionfound on the system is too old to be used for the build:

Copyright (C) 1995-2010 Jean-loup Gailly and Mark Adler

This software is provided 'as-is', without any express or implied warranty. In no event willthe authors be held liable for any damages arising from the use of this software.

Permission is granted to anyone to use this software for any purpose, includingcommercial applications, and to alter it and redistribute it freely, subject to the followingrestrictions:

1. The origin of this software must not be misrepresented; you must not claim that youwrote the original software. If you use this software in a product, an acknowledgment inthe product documentation would be appreciated but is not required.

2. Altered source versions must be plainly marked as such, and must not bemisrepresented as being the original software.

3. This notice may not be removed or altered from any source distribution.

Jean-loup Gailly Mark [email protected] [email protected]

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pywin32-------Unless stated in the specfic source file, this work isCopyright (c) 1994-2008, Mark HammondAll rights reserved.

Redistribution and use in source and binary forms, with or without modification, arepermitted provided that the following conditions are met:

Redistributions of source code must retain the above copyright notice, this list ofconditions and the following disclaimer.

Redistributions in binary form must reproduce the above copyright notice, this list ofconditions and the following disclaimer in the documentation and/or other materialsprovided with the distribution.

Neither name of Mark Hammond nor the name of contributors may be used to endorse orpromote products derived from this software without specific prior written permission.

THIS SOFTWARE IS PROVIDED BY THE COPYRIGHT HOLDERS AND CONTRIBUTORS ``ASIS'' AND ANY EXPRESS OR IMPLIED WARRANTIES, INCLUDING, BUT NOT LIMITED TO,THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULARPURPOSE ARE DISCLAIMED. IN NO EVENT SHALL THE REGENTS OR CONTRIBUTORS BELIABLE FOR ANY DIRECT, INDIRECT, INCIDENTAL, SPECIAL, EXEMPLARY, ORCONSEQUENTIAL DAMAGES (INCLUDING, BUT NOT LIMITED TO, PROCUREMENT OFSUBSTITUTE GOODS OR SERVICES; LOSS OF USE, DATA, OR PROFITS; OR BUSINESSINTERRUPTION) HOWEVER CAUSED AND ON ANY THEORY OF LIABILITY, WHETHER INCONTRACT, STRICT LIABILITY, OR TORT (INCLUDINGNEGLIGENCE OR OTHERWISE) ARISING IN ANY WAY OUT OF THE USE OF THISSOFTWARE, EVEN IF ADVISED OF THE POSSIBILITY OF SUCH DAMAGE.

win32com--------Unless stated in the specfic source file, this work is Copyright (c) 1996-2008, Greg Steinand Mark Hammond.All rights reserved.

Redistribution and use in source and binary forms, with or without modification, arepermitted provided that the following conditions are met:

Redistributions of source code must retain the above copyright notice, this list ofconditions and the following disclaimer.

Redistributions in binary form must reproduce the above copyright notice, this list ofconditions and the following disclaimer in the documentation and/or other materialsprovided with the distribution.

Neither names of Greg Stein, Mark Hammond nor the name of contributors may be usedto endorse or promote products derived from this software without specific prior writtenpermission.

THIS SOFTWARE IS PROVIDED BY THE COPYRIGHT HOLDERS AND CONTRIBUTORS ``ASIS'' AND ANY EXPRESS OR IMPLIED WARRANTIES, INCLUDING, BUT NOT LIMITED TO,THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULARPURPOSE ARE DISCLAIMED. IN NO EVENT SHALL THE REGENTS OR CONTRIBUTORS BELIABLE FOR ANY DIRECT, INDIRECT, INCIDENTAL, SPECIAL, EXEMPLARY, ORCONSEQUENTIAL DAMAGES (INCLUDING, BUT NOT LIMITED TO, PROCUREMENT OFSUBSTITUTE GOODS OR SERVICES; LOSS OF USE, DATA, OR PROFITS; OR BUSINESSINTERRUPTION) HOWEVER CAUSED AND ON ANY THEORY OF LIABILITY, WHETHER INCONTRACT, STRICT LIABILITY, OR TORT (INCLUDING

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NEGLIGENCE OR OTHERWISE) ARISING IN ANY WAY OUT OF THE USE OF THISSOFTWARE, EVEN IF ADVISED OF THE POSSIBILITY OF SUCH DAMAGE.

adodbapi--------adodbapi - A python DB API 2.0 (PEP 249) interface to Microsoft ADO

Copyright (C) 2002 Henrik Ekelund, version 2.1 by Vernon Cole

http://sourceforge.net/projects/pywin32http://sourceforge.net/projects/adodbapi

This library is free software; you can redistribute it and/or modify it under the terms ofthe GNU Lesser General Public License as published by the Free Software Foundation;either version 2.1 of the License, or (at your option) any later version.

This library is distributed in the hope that it will be useful, but WITHOUT ANY WARRANTY;without even the implied warranty of MERCHANTABILITY or FITNESS FOR A PARTICULARPURPOSE. See the GNU Lesser General Public License for more details.

You should have received a copy of the GNU Lesser General Public License along with thislibrary; if not, write to the Free Software Foundation, Inc., 59 Temple Place, Suite 330,Boston, MA 02111-1307 USA

django adaptations and refactoring by Adam Vandenberg

isapi

Copyright 2002-2003 by Blackdog Software Pty Ltd.

All Rights Reserved

Permission to use, copy, modify, and distribute this software and its documentation forany purpose and without fee is hereby granted, provided that the above copyright noticeappear in all copies and that both that copyright notice and this permission notice appearin supporting documentation, and that the name of Blackdog Software not be used inadvertising or publicity pertaining to distribution of the software without specific, writtenprior permission.

BLACKDOG SOFTWARE DISCLAIMS ALL WARRANTIES WITH REGARD TO THIS SOFTWARE,INCLUDING ALL IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS, IN NOEVENT SHALL BLACKDOG SOFTWARE BE LIABLE FOR ANY SPECIAL, INDIRECT ORCONSEQUENTIAL DAMAGES OR ANY DAMAGES WHATSOEVER RESULTING FROM LOSS OFUSE, DATA OR PROFITS, WHETHER IN AN ACTION OF CONTRACT, NEGLIGENCE OROTHER TORTIOUS ACTION, ARISING OUT OF OR IN CONNECTION WITH THE USE ORPERFORMANCE OF THIS SOFTWARE.

Scintilla and SciTE-------------------Copyright 1998-2003 by Neil Hodgson <[email protected]>

All Rights Reserved

Permission to use, copy, modify, and distribute this software and its documentation forany purpose and without fee is hereby granted, provided that the above copyright noticeappear in all copies and that both that copyright notice and this permission notice appearin supporting documentation.

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NEIL HODGSON DISCLAIMS ALL WARRANTIES WITH REGARD TO THIS SOFTWARE,INCLUDING ALL IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS, IN NOEVENT SHALL NEIL HODGSON BE LIABLE FOR ANY SPECIAL, INDIRECT ORCONSEQUENTIAL DAMAGES OR ANY DAMAGES WHATSOEVER RESULTING FROM LOSS OFUSE, DATA OR PROFITS, WHETHER IN AN ACTION OF CONTRACT, NEGLIGENCE OROTHER TORTIOUS ACTION, ARISING OUT OF OR IN CONNECTION WITH THE USE ORPERFORMANCE OF THIS SOFTWARE.

Numpy

Numpy licenseCopyright ? 2005-2012, NumPy Developers.All rights reserved.Redistribution and use in source and binary forms, with or without modification, arepermitted provided that the following conditions are met:

Redistributions of source code must retain the above copyright notice, this list ofconditions and the following disclaimer.Redistributions in binary form must reproduce the above copyright notice, this list ofconditions and the following disclaimer in the documentation and/or other materialsprovided with the distribution.Neither the name of the NumPy Developers nor the names of any contributors may beused to endorse or promote products derived from this software without specific priorwritten permission.THIS SOFTWARE IS PROVIDED BY THE COPYRIGHT HOLDERS AND CONTRIBUTORS AS ISAND ANY EXPRESS OR IMPLIED WARRANTIES, INCLUDING, BUT NOT LIMITED TO, THEIMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSEARE DISCLAIMED. IN NO EVENT SHALL THE COPYRIGHT OWNER OR CONTRIBUTORS BELIABLE FOR ANY DIRECT, INDIRECT, INCIDENTAL, SPECIAL, EXEMPLARY, ORCONSEQUENTIAL DAMAGES (INCLUDING, BUT NOT LIMITED TO, PROCUREMENT OFSUBSTITUTE GOODS OR SERVICES; LOSS OF USE, DATA, OR PROFITS; OR BUSINESSINTERRUPTION) HOWEVER CAUSED AND ON ANY THEORY OF LIABILITY, WHETHER INCONTRACT, STRICT LIABILITY, OR TORT (INCLUDING NEGLIGENCE OR OTHERWISE)ARISING IN ANY WAY OUT OF THE USE OF THIS SOFTWARE, EVEN IF ADVISED OF THEPOSSIBILITY OF SUCH DAMAGE.

Errata The IC-CAP product may contain references to "HP" or "HPEESOF" such as in filenames and directory names. The business entity formerly known as "HP EEsof" is now partof Agilent Technologies and is known as "Agilent EEsof." To avoid broken functionality andto maintain backward compatibility for our customers, we did not change all the namesand labels that contain "HP" or "HPEESOF" references.

Warranty The material contained in this documentation is provided "as is", and is subjectto being changed, without notice, in future editions. Further, to the maximum extentpermitted by applicable law, Agilent disclaims all warranties, either express or implied,with regard to this manual and any information contained herein, including but not limitedto the implied warranties of merchantability and fitness for a particular purpose. Agilentshall not be liable for errors or for incidental or consequential damages in connection withthe furnishing, use, or performance of this document or of any information containedherein. Should Agilent and the user have a separate written agreement with warrantyterms covering the material in this document that conflict with these terms, the warrantyterms in the separate agreement shall control.

Technology Licenses The hardware and/or software described in this document arefurnished under a license and may be used or copied only in accordance with the terms ofsuch license.

Restricted Rights Legend U.S. Government Restricted Rights. Software and technical

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data rights granted to the federal government include only those rights customarilyprovided to end user customers. Agilent provides this customary commercial license inSoftware and technical data pursuant to FAR 12.211 (Technical Data) and 12.212(Computer Software) and, for the Department of Defense, DFARS 252.227-7015(Technical Data - Commercial Items) and DFARS 227.7202-3 (Rights in CommercialComputer Software or Computer Software Documentation).

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Agilent EEFET3/EEHEMT1 Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24 Using the EEFET3/EEHEMT1 Example Model Files . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25

Agilent EEFET3 Model Equations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71 Agilent EEHEMT1 Model Equations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83 Agilent Root FET Model Generator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 96

Introduction to Root FET Model Generator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 97 Using the Agilent Root FET Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 99 References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 120

Curtice GaAs MESFET Characterization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 121 Introduction to Curtice GaAs MESFET Characterization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 122 Curtice GaAs MESFET Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 123 Simulators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 124 Model Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 125 Test Instruments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 128 Measuring and Extracting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 129 Extraction Algorithms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 135 References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 136

High-Frequency FET (Curtice) Models . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 137 Introduction to High-Frequency FET (Curtice) Models . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 138 Using the Curtice Cubic Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 139

UCB GaAs MESFET Characterization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 160 Introduction to UCB GaAs MESFET Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 161 Simulators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 162 Model Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 164 Test Instruments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 165 Measuring and Extracting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 166 References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 172

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Agilent EEFET3/EEHEMT1 ModelIn this section:

Introduction to Agilent EEFET3-EEHEMT1 Model and Getting Started (mesfet)Using the EEFET3-EEHEMT1 Example Model Files (mesfet)

References

End Resistance Technique1.New Method to Measure the Source and Drain Resistance of the GaAs MESFET. LongYang and Stephen I. Long. IEEE Electron Device Letters Vol. EDL-7, No. 2, February1986.Contact Parasitic Resistance and Inductance Method2.A New Method for Determining the FET Small-Signal Equivalent Circuit. GillesDambrine, Alain Cappy, Frederic Heliodore, and Edouard Playez. IEEE Transactions onMicrowave Theory and Techniques, Vol. 36, No. 7, July 1988.Extraction of Package Parasitic and Intrinsic FET Equivalent Circuit Values3.Direct Extraction of GaAs MESFET Intrinsic Element and Parasitic Inductance Values.Eric Arnold, Michael Golio, Monte Miller, and Bill Beckwith. IEEE MTT-S Digest pp.359-362, 1990.

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IntroductionThe Agilent 85192B EEFET3/EEHEMT1 model is an empirical analytic model developed forthe purpose of fitting measured electrical behavior of GaAsFETs and HEMTs. The modelequations were developed concurrently with the parameter extraction techniques toensure the model contains only parameters that are extractable from measured data. Themodel can be automated with extraction macros, or the parameters can be extractedindividually from measured data.

The model includes the following features:

An accurate isothermal drain-source current model that fits virtually all processes.Self-heating correction for the drain-source current.A charge model that accurately tracks measured capacitance values.A dispersion model that permits simultaneous fitting of high-frequency conductancesand DC characteristics.A breakdown model that describes gate-drain current as a function of both Vgs andVds.The capability to extrapolate outside the measurement range used to extract themodel.

Getting Started

The starting point of this tutorial assumes the following:

The system has been set up and switched on.The calibration standards have been removed from their containers to allow them toreach ambient room temperature.The IC-CAP software has been properly installed on the computer.IC-CAP has been configured to recognize the system hardware, and the SMUs havebeen renamed as follows:

Rename SMU1 (for medium power)Rename SMU2 (for high power)

Then return to this section and continue with the procedures here.

/examples/model_files/mesfet/HPEEfet3.mdl

Before you continue with the IC-CAP procedures, make a new directory (using the mkdircommand), to store the data and model files that will be generated. Give the directory aname that will associate it with the devices you are going to model. Use the cd commandto change to the new directory in UNIX.

NoteThe model file HPEEhemt1.mdl is the same model as HPEEfet3.mdl. The only difference is thatHPEEfet3.mdl includes premeasured device data from a MESFET, and HPEEhemt1.mdl includespremeasured device data from a HEMT.

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Using the EEFET3/EEHEMT1 Example Model FilesThis section provides a sequence of example procedures that take you step-by-stepthrough a FET or HEMT measurement and extraction. The procedures are arranged in theproper sequence to allow earlier measured data or extracted parameters to be used as abasis for later measurements or extractions. The extraction is the same for a FET or aHEMT, except that the additional parameters used for a HEMT can be omitted in a FETextraction.

A series of different IC-CAP setups are used to measure current, voltage, or S-parametersvs. bias under different bias and frequency conditions. The model parameters are thenextracted from the various sets of measured data.

NoteThese procedures measure the device in a common-source configuration.

Macros automate the modeling procedure so that a series of similar devices can bemodeled quickly with minimal user intervention, although you can execute individualtransforms for specific measurement and parameter extractions.

The detailed procedures (executing individual transforms) in this section includeinstructions for the following:

Performing a set of device preview measurements and setting measurement variablevalues based on the results.Setting the hardware instrument states and input variables for each measurement.Making the parasitic, DC, and S-parameter measurements: qualifying the results.Extracting and optimizing the individual model parameters.Verifying the extraction results against the measured data.Storing the model.

Where appropriate, other sections are cross-referenced, so that all system hardwaresetups and calibrations are performed at the right times.

NoteMeasurement parameters and measured data are specific to individual devices. Information and data areprovided here as examples and guidelines, and are not intended to represent the only correct method orresults.

The procedures start with example values for the model variables. They provide guidelineson setting the values to measure your own devices. However, the values you use will bebased on your knowledge of your FET/HEMT devices or on information provided by thedevice vendors, as well as on the guidelines presented here: they may or may notcorrespond with the examples. In some cases, it may be necessary to set the variablevalues for the preview measurements, make a measurement, and then reset the variablesbased on the measurement results. The procedures give suggestions on judging theapplicability of the variable values and the measured data.

The illustrations of plotted data are provided as visual examples of possible measurementand simulation results. They are not intended to represent a sequential measurement andextraction of a single device, nor do they necessarily correspond with the examplemeasurement inputs and variable values in the procedures. The plots can be used tocheck the reasonableness of your own data, which should appear similar in shape but notnecessarily coincident in values.

In addition, the IC-CAP software itself includes measured data for some of the setups. Thisdata shows additional examples of possible results. Many, though not all, of the inputsettings for this measured data correspond with the example settings in thisdocumentation.

The DUTs and Setups

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The DUT/Setup panel is part of the Model window, which is the central access point for allthe individual measurement and modeling procedures.The Model window includes tabs toaccess the macros, the Model Parameters table, and other IC-CAP features. To open thismodel, click the Examples button on the toolbar and locate/model_files/mesfet/HPEEfet3.mdl.

Portion of the Agilent EEFET3/EEHEMT1 DUT/Setup Panel

In the DUT/Setup panel the DUTs (for example Preview)-indicated by the invertedtriangles-are groupings of similar measurement setups used for related measurementsand extractions. The setups (for example ig_vgs) contain the information used to definethe inputs and outputs for each measurement, as well as their measurement hardwareconfigurations and their associated transforms and plots.

The measurement and parameter extractions are most easily performed with macros. Ifyou use macros, you will not need to use the individual setups. However, if you want toextract individual parameters or "fine-tune" a parameter, you will use the individualsetups. (Note that you can also write macros to control other repetitive tasks, using IC-CAP's Parameter Extraction Language, PEL.)

ReadMe is not actually a macro, but an abbreviated version of the instructions in thissection. It is most appropriate for users who are somewhat familiar with the model. Youcan view the Readme file in a separate window by clicking Detach. You can then resizethe window and move it away from the central work area. Scroll through the text as youwork through the model.

Model Parameters

The tables in this section describe the various parameters and list their default values.

Drain-Source Current Parameters

The drain-source current model was developed through examination of Ids, as well asdrain-source conductance (Gds) and transconductance (Gm), vs. bias plots on a wide classof devices from various manufacturers. The model assumes the device is symmetrical, andtherefore is valid for values of Vds < 0.0 V as well as Vds > 0.0 V. The parameters in thefollowing table are extracted from drain-source current measurements:

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Drain-Source Current Parameters

Parameter Description Default (Units)

Vto Zero-bias threshold parameter. -1.5 (V)

Gamma Vds-dependent threshold parameter. 0.05 (1/V)

Vgo Gate-source voltage where transconductance is maximum. -0.5 (V)

Vdelt Parameter that controls linearization point for Gm characteristic. 0.0 (V)

Vch (Vchannel) Gate-source voltage where Gamma no longer affects the I-V curve. 1.0 (V)

Gmmax Peak transconductance parameter. 70.0e-3 (S)

Vdso Drain voltage where Vds dependency disappears from equations. 3.0 (V)

Vsat Drain-source current saturation parameter. 1.0 (V)

Kappa Output conductance parameter. 0.0 (1/V)

Peff Channel-to-backside self-heating parameter (effective power compression). 2.0 (W)

Vtso Subthreshold onset voltage. -10.0 (V)

Charge Parameters

The gate charge model was developed through examination of extracted devicecapacitances over bias. The capacitance data is obtained from measured Y-parameter datain the saturation region.

Charge Model Parameters

Parameter Description Default (Units)

C11o Maximum input capacitance for Vds=Vdso andVdso>Deltds.

0.3 (pF)

C11th Minimum (threshold) input capacitance for Vds=Vdso. 0.03 (pF)

Vinfl Inflection point in C11-Vgs characteristic. -1.0 (V)

Deltgs C11th to C11o transition voltage. 0.5 (V)

Deltds Linear region to saturation region transition parameter. 1.0 (V)

Lambda C11-Vds characteristic slope parameter. 0.05 (1/V)

C12sat Input transcapacitance for Vgs=Vinfl and Vds>Deltds. 0.03 (pF)

Cgdsat Gate-drain capacitance for Vds>Deltds. 0.05 (pF)

Ris Source-end channel resistance. 2.0 (ohms)

Rid Drain-end channel resistance. 0.0 (ohms)

Tau Source-to-drain charging delay. 1.0 (ps)

Cdso Drain-source inter-electrode capacitance. 80.0 (fF)

Dispersion Parameters

Dispersion parameters are extracted from measured S-parameter data, to provideadditional accuracy for dispersion effects at higher frequencies. The dispersion parameterslisted in the table below are optimized to measured transconductance (Gm) data to modelboth DC and RF dispersion characteristics. Similarly, the dispersion parameters areoptimized to measured output conductance (Gds) data.

Dispersion Model Parameters

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Parameter Description Default (Units)

Rdb Dispersion source output impedance. 1.0e9 (ohms)

Cbs Dispersion source capacitance. 1.6e-13 (F)

Gdbm Additional d-b branch conductance at Vds=Vdsm. 0.0 (S)

Kdb Parameter that controls Vds dependence of additional d-b branchconductance.

0.0(dimensionless)

Vdsm Voltage where additional d-b branch conductance becomes constant (Gdbm). 1.0 (V)

Gmmaxac Peak transconductance parameter (AC). 60.0e-3 (S)

Vdeltac Parameter that controls linearization point for Gm characteristic (AC). 0.0 (V)

Vtoac Zero-bias threshold parameter (AC). -1.5 (V)

Gammaac Vds-dependent threshold parameter (AC). 0.05 (1/V)

Kappaac Output conductance parameter (AC). 0.0 (1/V)

Peffac Channel-to-backside self-heating parameter (AC). 10.0 (W)

HEMT Gm Compression Parameters

Some FETs and almost all HEMTs exhibit transconductance compression in which Gmpeaks and then decreases. The following parameters model these compression effects.

Additional Parameters Used in EEHEMT1 for Gm Compression

Parameter Description Default (Units)

Vco Voltage where transconductance compression begins. 10.0 (V)

Mu Parameter that adds Vds dependence to transconductance compressiononset.

0.0(dimensionless)

Vba Transconductance compression "tail-off" parameter. 1.0 (V)

Vbc Transconductance roll-off to tail-off transition voltage. 1.0 (V)

Deltgm Slope of transconductance compression characteristic. 0.0 (S/V)

Alpha Transconductance saturation-to-compression transition parameter. 1.0e-3 (V)

Calibrating the Network Analyzer

All the EEFET3/EEHEMT1 S-parameter measurements require only one calibration: a sweptbroadband calibration across the operating frequency range of the device under test. Goodcalibration of the network analyzer is critical to a good measurement and extraction.

For step-by-step calibration procedures, refer to the instrument's documentation.

Make the following additional setting changes:

Set the frequency range for the calibration to the range you intend to use for yourmeasurements, at least as wide as the operating range of the device.Set the network analyzer START frequency to the lowest possible frequency in therange of the network analyzer and bias networks: low frequencies allow moreaccurate AC conductances to be extracted. The example procedure in the softwareuses 50 MHz.Set the STOP frequency to the upper limit of the frequency range for the deviceunder test. Frequencies up to Ft are useful but not required. Good package andcharge extractions require frequencies high enough to see roll-off and packageeffects clearly. The example procedure uses 3 GHz.Set the NUMBER of POINTS to 51 or 101 to provide clear and usable S-parameterplots: more points only add more time and memory requirements to themeasurement and extraction.

Remember these frequency values: you will also need to enter them in IC-CAP wheninstructed. If you do not set these values correspondingly, the calibration will be invalid.

All S-parameter measurements for the EEFET3/EEHEMT1 model are performed over thesame frequency range.

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NoteIf you set a MHz value in IC-CAP, write MEG in full. IC-CAP is not case-sensitive and assumes that m or Mcorresponds to milli. If an error message is displayed during the measurement that indicates a networkanalyzer frequency value is too low, you may have entered M only.

Remember the number of the network analyzer cal set or register where you store thecalibration. You will need to use this number in the instrument options of each S-parameter measurement setup when you define the instrument states.

Using Macros for Measurements and Extractions

Macros automate the modeling procedure so that a series of similar devices can bemodeled quickly with minimal user intervention. As a macro is run, it sets the control anddevice measurement variables in the model variable table usually needed for theextraction procedure being run. The control variables are explained in the next pages.These are the macros and their purposes:

Macro Descriptions

Macro Description

Set_Measurement_Ranges Execute the device preview (including Yang_Long_Preview) and initializationsteps, setting all the control variables.

Package_extraction_only Measure the data from which the package parasitics are extracted, and performthe extractions.

DC_extraction_only Makes the DC measurements and performs the DC extractions.

AC_extraction_only Makes the S-parameter measurements and performs the AC extractions.

Measure_all_data Executes all measurements

Extract_all_parameters Extracts model parameters based on existing data

Measure_and_Extract_ALL Performs a complete device measurement and extraction using the measurementranges recorded in the model variable table

Xtract Performs the parameter extraction procedure. Called by all the other macrosexcept Set_Measurement_Ranges.

Macro Sequence

One possible appropriate sequence for performing the macros is as follows:

Set_Measurement_Ranges1.Package_extraction_only2.DC_extraction_only (and study the results)3.AC_extraction_only (and study the results)4.

Control Variable Flags in the Macros

Control variable flags are set to 1 or 0 in the macros to simplify operation and customizethe macros. Each macro starts with default values for the control variables, so they can beused as is or modified to meet your needs. For details, refer to Running the Macros.

Macro Control Variables

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ControlVariable

Set to 1 Set to 0

control_view Displays the plots. Suppresses the plots.

control_measure Performs the measurements. Skips the measurement steps. Used withpreviously- stored data.

control_extract Executes the parameter extraction. Skips the parameter extraction.

control_package Executes the package extraction. Skips the package extraction.

control_dc_model Executes the DC measurement andextraction.

Skips the DC procedures.

control_ac_model Executes the AC measurement andextraction.

Skips the AC procedures.

control_save Saves a Series IV compatible file. Does not save a Series IV compatible file.

The control variables can also be set in the variable table, but control variable values setin the macros override variable table values.

To see more detail on the macro flags, you can select any macro to read the contents ofthe macro.

Running the Macros

In the Model window, select the macro of your choice.1.To change control variable flags (see the table below [#EEFET3/EEHEMT1 Model2.Variables), use Back Space or Delete and replace the current value with a differentvalue.

NoteIf you want to see the control variable values change when you execute the macro, Detach themodel variable table.

To start the macro, click Execute. The macro will start to run. You can see the3.control variable values change in the model variable table if you have modified themin the macro.If you select the Set_Measurement macro, you will be prompted to enter values for4.certain variables. Otherwise the variable table default values are used. Note that thevariable values must be appropriate to the particular device being modeled, or themacro results will not be valid.

NoteYou will need to know several things about the device under test to supply appropriate values. Forexample, you will be prompted for the device gate width and length. You also need to supply certainvoltage or current values. Some of these values can be found in the device manufacturer's datasheet. The list of device input variable values later in this section also lends insight into appropriatevalues for different variables. Default values are also available, and may be appropriate for use inmany cases.

The macro will set numerical values for the control and device measurementvariables (see the table below EEFET3/EEHEMT1 Model Variables) needed for themeasurement and extraction procedure being run. Then the macro will perform therequired measurement and extraction procedures.If you have the control_view flag set to 1, you will see the measured and extracteddata plotted on the screen.When the macro is complete, the results of the extraction are displayed in the Statuswindow.

Device Input Variable Values

One of the first requirements in performing the EEFET3/EEHEMT1 modeling procedures isto set numerical values for the model variables. When executing the macros, you areprompted for several variable values. Other variables are calculated by the software basedon your input. The Set_Measurement_Ranges macro is especially useful in establishinginitial settings in preparation for a complete extraction. We recommend that you use thismacro for initialization of the model variable table.

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Model Variables

The EEFET3/EEHEMT1 model variables are described in the following table.

EEFET3/EEHEMT1 Model Variables

Variable Description

CAP_FACTOR Used as a scaling factor in setting charge parameter optimzation limits.

CHECK_DATA Used in the macros to control extent of application/user interface. Typically opens plotsand performs transforms for visual inspections.

control_ac_model Used in the macros to control the AC measurement and extraction procedures. 1performs the procedures, 0 does not.

control_dc_model Used in the macros to control the DC measurement and extraction procedures. 1performs the procedures, 0 does not.

control_doc Not used in this Model.

control_expert Used to control the level of interaction between the application and the user. 1 nonverbose, 0 verbose.

control_extract Used in the macros to control the parameter extraction steps. 1 executes the extraction,0 skips the extraction.

control_frequency Used in Set_Measurement Macro to set input responses which guide the user indetermining whether or not to initialize Frequency settings and Instrument Options forNetwork Analyzer (NWA). 1 to guides the user through NWA settings, 0 does not.

control_hemt Determines whether the device will be modeled as a FET or a HEMT. It is normally set to1 for a HEMT, and 0 for a FET. However, the HEMT setting generally works well withstandard MESFETs also, providing a better Gm curve fit. In particular, it is suggested youuse the HEMT setting for a device where the Gm curve peaks and then rolls off as Vgsbecomes more positive.

control_measure Used in the macros to control the measurement steps. 1 performs the measurements, 0suppresses the measurements.

control_package Used in the macros to control the package parasitics measurement and extractionprocedures. 1 performs the procedures, 0 does not.

control_save Used in the macros to save a Series IV compatible file. 1 saves the file, 0 does not.

control_view Used in the macros to control display of the plots. 1 displays the plots, 0 suppresses theplots.

control_YL_method Used in Xtract macro to guide the extraction process. Also used in the method forselecting Rs. 1 selects Yang Long method, 0 does not.

FC The frequency at which the charge model is extracted. Use a frequency value that givesabout 90 degrees of rotation of the S-parameters measured.

FG The frequency at which device conductances are extracted. Experience has shown thatdata just above the trap effects is the best for extraction of conductances.

FREQ_POINTS The number of points for S-parameter measurements. This must be the same as thenumber of points set for the network analyzer calibration. 51 or 101 provides clear andusable S-parameter plots: more points only add more time and memory requirement tothe measurement and extraction.

FREQ_START The start frequency of the network analyzer for S-parameter measurements. Use thelowest possible frequency in the range of the network analyzer and bias networks: lowfrequencies allow more accurate AC conductances to be extracted. This must be the sameas the start frequency set for the network analyzer calibration. (See "Calibrating theNetwork Analyzer," later in this section.)

FREQ_STOP The stop frequency of the network analyzer for S-parameter measurements. This shouldbe the upper limit of the frequency range for the device under test, and must be thesame as the stop frequency set for the network analyzer calibration. Frequencies up to Ftare useful but not required. Good package and charge extractions require frequencieshigh enough to see rolloff and package effects clearly.

FS The frequency at which Tau and Ri are extracted. It must be about where S11 crosses thereal axis: this is the point where the impact of the device parasitics causes the leastproblem.

_I_RES_ The current resolution of the power supply being used. This value is used in macros tohelp truncate current limits to values that do not violate the resolution limits of the DCpower supplies in use.

Id_per_Wg_factor An empirical based scaling factor used for preliminary determination of Wg (gate Width)

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or IDSS, Set_Measurment Macro.

ID0_MAX_SUPPLY Used in determining if Power Supply limits have been or will be exceeded.

I D1_MAX_SUPPLY Used in determining if Power Supply limits have been or will be exceeded.

ID2_MAX_SUPPLY Used in determining if Power Supply limits have been or will be exceeded.

ID3_MAX_SUPPLY Used in determining if Power Supply limits have been or will be exceeded.

IDS_FACTOR Use as a scaling factor for setting the optimization range of DC-IV equation parameters:gmmax, vgo, vto etc.

IDS_MAX The compliance limit for Ids values. (The Agilent 41420A high-power SMU likely to beconnected to the device drain has a maximum output current of 1.0A. A standard Agilent11612A option K10/K20 bias network has a maximum input current of 0.5A.)

IDS_NOM The intended Ids of device operation.

IDS_VTO_FACTOR The fraction of the maximum drain current that will define the drain current at Vto.

IDS_VTO_MAX Calculated value of Ids a Vto. (2 * IDS_VTO_MAX )

IDS_VTO_MIN Calculated value of Ids at Vto.

IDS_YL_MAX The upper limit of Ids used to extract Rs. It also will be different for every transistor typeand size. You will select this value from the data plot presented by theYang_Long_Preview measurement. The value must be within 10% of IDS_YL_MIN.

IDS_YL_MIN The lower limit of Ids used to extract Rs. It will be different for every transistor type andsize. You will select this value from the data plot presented by the Yang_Long_Previewmeasurement. The value must be within 10% of IDS_YL_MAX. Remember to use valueswithin the settability limits of the DC source/monitor.

IDS_YL_PTS The Yang_Long method requires swept measurements of two slightly different values ofdrain current, therefore the standard number of Ids points is 2.

IDSS_ACTUAL Used to store value of Idss from measured data. Also used in calculations of othervariables. In some cases IDSS_ACTUAL is assigned the value IDSS_DATA_SHT.

IDSS_DATA_SHT The Idss value for the device. This may be specified in a manufacturer's data sheet. Ifyou do not know an expected value for Idss, you can use the default value.

Ig_density The gate current density of the device, typically 50x106 A/m2. The software uses the gatewidth and length values, in combination with the gate current density, to calculate safeforward gate bias levels.

IG_FWD_IV This is the maximum allowable DC gate current. This value is used to measureVG_FWD_IV, which in turn is used to set the value of VGS_MAX, the highest Vgs used inswept bias measurements.

IG_FWD_MAX This is the gate current at VG_FWD_MAX, and should be slightly less than the critical gatecurrent IFwd but high enough to reduce the gate diode's dynamic resistance to a fewohms. It is used in the ig_vgs device preview setup.

IG_FWD_MID This is a current about 95% of the value of IG_FWD_MAX. It is used to measureVG_FWD_MID.

IG_FWD_MIN This is a current about 95% of the value of IG_FWD_MID. It is used to measureVG_FWD_MIN.

IG_FWD_RATIO The percent reduction of Ig from IG_FWD_MAX to IG_FWD_MID to IG_FWD_MIN. It isusually approximately 92% to 98% as specified by Dambrine and Cappy for their methodof extracting Rg and Rd.

IG_MAX Not used in this model.

IGS_MAX The compliance limit for Igs values. The default value, 0.100A, is the maximum outputcurrent of the Agilent 41421B medium-power SMU likely to be connected to the devicegate. You provide compliance values to limit SMU output current or voltage and preventdamage to the device under test, as well as to the SMUs, bias networks, and probes ifused.

IGS_YL_MAX Select this value in the linear region of the Yang_Long_Preview plot, at the upper end ofthe region, and where the Igs value is between 50 and 100 times smaller than themaximum Ids value selected.

IGS_YL_MIN For the Rs extraction Vgs is measured between IGS_YL_MIN and _MAX. Like the Idsvalues, you will select the Igs values from the data plot presented by theYang_Long_Preview measurement. Select an IGS_YL_MIN value in the linear region ofthe plot, near the lower end, and where the Igs value is between 50 and 100 timessmaller than the minimum Ids value selected.

IGS_YL_PTS The number of Igs points used in the Rs extraction measurement. Remember in settingthese last three Igs values to use limits and number of points values that result in stepswithin the settability limits of the DC source/monitor: the steps will be within uA spacing.

Lg The gate length of the device, in microns.

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MEASURE_FAST Not used in this model.

model_file_name This is used to define the disk file name.

model_name Current name of model. Used in macro to specify iccap path (example: model_name >DUT > Setup > Plot)

Pdiss_MAX Maximum safe power dissipation of the device. This is used to check the VDS_MAX valueonce Idss is known.

RANGE_FACTOR Used to adjusts the limits of optimization for the dynamic IV parameter set.

Rch_factor Not used in this model.

SIMULATOR not used in this model.

TOL_VOLT Not used in this model.

TOL_FUNC Not used in this model.

TRACE_MAX This sets an upper limit for the optimization range of Vds for the gm_gds optimization inthe AC_all DUT.

TRACE_MIN This sets a lower limit for the optimization range of Vds for the gm_gds optimization inthe AC_all DUT.

_V_RES_ The voltage resolution of the power supply being used. This value is used in macros tohelp truncate voltage limits to values that do not violate the resolution limits of the DCpower supplies in use.

_V_RES_vto_ Used to set the correct resolution for Vgs.

VD1_MAX_SUPPLY Used in determining if Power Supply limits have been or will be exceeded.

VD2_MAX_SUPPLY Used in determining if Power Supply limits have been or will be exceeded.

VD3_MAX_SUPPLY Used in determining if Power Supply limits have been or will be exceeded.

VDELT_FACTOR Used as a scaling factor when scaling the parameter EEFET3.vdelt.

VDS_COARSE The number of Vds points used for making DC-biased S-parameter measurements. Anumber between 5 and 15 results in a good extraction.

VDS_FINE The number of Vds points used in gate characterization steps. 51 points is an adequatenumber.

VDS_MAX The largest safe Vds value for all Vgs values. Be aware of the power dissipation limits ofyour device at high Ids levels, to prevent damage to the device.

VDS_MIN The smallest value of Vds. This is usually 0.0V, but may be a negative value.

VDS_NOM The intended Vds of device operation.

VDS_YL_LMT The maximum allowable Vds for Rs measurement and extraction.

VDS_YL_MAX The Rs extraction must be done at Vds values less than 0.25V. This guarantees theextraction takes place in the region of linear transistor operation. Use a value at theupper end of the linear region. These Vds values generally will never have to be changedexcept in the case of a device with a very sharp knee.

VDS_YL_MIN This is the lower limit of the Vds range for the Rs extraction, which must be done at Vdsvalues less than 0.25V. Use a value in the linear region, near the low end of the region.

VDSO A Vds value just above the knee in full saturation. This is the point where the modelequations simplify, and is an important operating characteristic for most GaAs FETs.Manufacturers often specify Idss at values of Vds that generally work well as Vdsosettings. Vdso=3.0V is a good default that will nearly always work.

VG_FWD_IV A measured Vgs value where a normally small forward quiescent DC gate current flowsfor an active bias condition. It is used to help determine VGS_MAX for DC and ACmeasurements.

VG_FWD_MAX The upper limit of Vgs at VDS_ZERO for the rg_rd cold fet measurement.

VG_FWD_MID VG_FWD_MID is the gate voltage used to produce IG_FWD_MID.

VG_FWD_MIN This is the lower limit of Vgs with Vds at VDS_ZERO, used to measure S-parameters atforward gate bias in the parasitic resistance measurement.

VG_FWD_PTS The number of points for the rg_rd measurement. This is the number of measurementsyou wish to make between VG_FWD_MIN and VG_FWD_MAX, inclusively. Three pointsare sufficient. This following series of YL variables are all used in the Yang_Longmeasurements from which the parasitic source resistance Rs is extracted. It is highlyrecommended that the initialize transform be used to set these values once theYang_Long_Preview measurement is made. The preview measurement is based onvoltages that are nearly universally applicable. The initialize transform extracts the highlydevice-dependent currents needed to use this method of extracting RS. Refer to theprocedures later in the section.

VG_GML_MAX The largest Vgs value used for Gummel measurements. Since this data is not used toextract contact resistances, use values that yield Igs values ≤ IFwd/2.

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VG_GML_MIN The smallest gate characterization voltage, used for Gummel measurements. Data takenover this range is used in the gate diode and source resistance extractions. Values lowerthan about 0.2V to 0.3V result in Igs data that is indistinguishable from noise.

VG_GML_RANGE A minimum difference allowed between VG_GML_MAX and VG_GML_MIN, usually 0.5V. Ithelps to keep the gate characterization measurements within a linear, noise-free range.

VGO_FACTOR Used to initialize the parameter EEFET3.vgo.

VGS_COARSE The number of Vgs points used for making DC-biased S-parameter measurements. S-parameters will be measured at each of these bias points at every calibrated frequencypoint. If the VGS_COARSE number of points is specified too large, more data thannecessary will be taken and the measurement will take an excessive amount of time. Anumber between 5 and 15 results in a good extraction.

VGS_FINE The number of Vgs points used in gate characterization steps. 101 points is an adequatenumber. Remember that voltage steps in fractional mV increments do not work.

VGS_MAX The highest (most positive) Vgs value where the device can be operated quiescently atVDS_MAX.

VGS_MIN A Vgs value that gives even, easy-to-use steps and is more negative than the devicepinchoff voltage at VDS_NOM.

VGS_NOM The value of Vgs that gives an Ids value representative of actual device operation.

VGS_YL_MAX The Vgs compliance for the Yang_Long_Method. This protects the device from overdriveon the gate. A value of 0.6V will work for nearly all devices used, though occasionally itmay need to be set to 0.7V.

VTO_FACTOR Not used in this model.

Wg The gate width of the device, in microns.

YL_IdIg_RATIO The factor used to compute acceptable gate currents as a function of drain current inYang and Long's source resistance method. Usually between 50 and 100.

NoteRemember that the Agilent 4142 DC source/monitor and its SMUs are limited in the ability to set andresolve voltage steps. In all cases where a measurement will be stepped over a number of points, setvalues that will make the voltage step size equal to an integer multiple of the Agilent 4142 voltageresolution. Voltage steps in fractional mV settings are not valid and will not work. The "Getting Started"section of the Agilent 4142B Operation Manual has more information on the voltage resolution of Agilent4142B SMUs.

Executing Individual Measurement Transforms

While the macros are appropriate for measuring and modeling devices for which thedevice type is well known, you may prefer to set the variable values yourself rather thanhave them set by the macros. Or situations may occur where the device is not known andyou need to perform the device measurements separately and extract the parametersindividually from the measured data.

When executing individual transforms, you will sometimes be prompted to supply variablevalues. You will also input some variable values directly in the model variable table.

The rest of this section explains in detail how to:

Make preview device measurements and set the model variables from the resultsobtainedMake the measurements required for specific extractionsPerform the individual extractionsSave the resulting model

The Preview DUT

The Preview DUT contains three setups, as shown in the following illustration:

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These setups are used to obtain a good set of measured DC-IV curves on which most ofthe other measurements will be based. In performing these measurements, you set thevariable values to define the measurement limits. Some values are selected to protect adevice from damage. Other values cause data to be taken over a wide enough range toensure usable model results, or taken in specific regions of interest to you.

Begin with anticipated reasonable values depending on your knowledge of the deviceunder test. Then modify the values as necessary until you are satisfied with themeasurement results.

The validity of the later measurements and the accuracy of the model are dependent onobtaining a good set of preview measurements. Note, however, that when extractingmany devices of the same type, repeated device preview is not necessary.

NoteThe Set_Measurement_Ranges macro performs all the steps outlined here. A thorough understanding ofwhat is done in these steps and how it fits into the extraction methodology will make the extractionprocess go more smoothly.

Parameter extraction must determine the bounds of a transistor's operation withoutdistorting or destroying the part. You need some knowledge of the device's intendedregions of operation to perform the device preview steps. The most accurate modelperformance is achieved when the intended use of the model is accounted for duringmeasurement and extraction.

The EEFET3/EEHEMT1 model does not test the breakdown characteristic of the GaAs FET.That value can be obtained from the results of destructive testing. The value of breakdownvoltage is used by the model to establish the effects of large Vds values. It is assumedthis value is known.

The device preview measurement procedures following provide explanations of setting thenew values, and how the screen prompts, the variable table, and the input tables interact.

NoteWhen you input variable values in the software, in macros or in non-automated procedures, they must bein numerical form. If you input non-numeric text when IC-CAP is expecting a number, IC-CAP will interpretit with a value of 0.0.

Preview / ig_vgs

This setup measures gate and drain voltage as a function of gate current. Four specificvalues of forward gate current are applied, with the drain current set to a constant valueof 0.0A. The purpose of the setup is to use the gate current density of the device, and thegate width and length, to set the proper variable values for gate voltage.

This setup determines several gate voltages that will be used in later measurements, andsets their values in the variable table. These variables are VG_FWD_MAX, VG_FWD_MID,VG_FWD_MIN, and VG_FWD_IV.

The input variables you set in the following procedure will configure the FET as shown inthe following figure.

FET Bias Configuration for ig_vgs Measurement

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Initializing The Input Variable Values

The inputs control the measurement. The variables listed in the inputs use the numericalvalues from the variable table. You define the actual numerical values in response toprompts from the software. You generally do not need to change the inputs, but they areillustrated and explained for your information.

The values you use will be dependent on your knowledge of your device under test. Asyou observe the results of the preview measurements, you can change the variable tablevalues until you are satisfied with the measured results.

If you have not already connected the device, do so now. Observe antistatic1.precautions.

NoteRemove any high-intensity light sources such as microscope light before taking a measurement. Oneeasy method of blocking light is to place an opaque plastic box on the fixture directly above thedevice.

Select Preview > ig_vgs.2.Notice the inputs ig and id. These are used by the software to control themeasurement. Note that Mode is set to I to provide a current to both ig and id inputs.

Preview / ig_vgs inputs

The Unit names must conform to the names you set in the hardware window (see GettingStarted in IC-CAP (mesfet)). They must also correspond with the actual plug-in SMUconnections from the DC source/monitor. SMU1 is the gate supply and SMU2 is the drainsupply. Since the source is grounded, only the gate and drain inputs need to be set.Compliance values limit SMU output voltage or current and prevent damage to the deviceunder test, as well as to the SMUs, bias networks, and probes if used. With a currentinput, compliance refers to voltage. In the model variable table, set the Value ofVGS_YL_MAX to a low value that will protect the device from overdrive on the gate. Avalue of 0.6V will work for nearly all devices, though occasionally it may need to be set to0.7V or higher. Be sure to use a value within the resolution settability limits of the DCsource/monitor.

In the model variable table, set the value of VDS_MAX to the largest safe Vds value1.for all Vgs values. Be aware of the power dissipation limits of your device at high Idslevels, to prevent damage to the device.The Sweep Type for ig is set to List to allow four specific different gate current inputs.In list sweep mode, it is possible to specify up to 15 different bias inputs for the

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measurement. This measurement requires inputs of IG_FWD_MAX, IG_FWD_MID,IG_FWD_MIN, and IG_FWD_IV.In the variable table, locate the values for IG_FWD_MAX, IG_FWD_MIN, and2.IG_FWD_IV.From the Extract/Optimize folder, select the update_ranges transform and click3.Execute. The transform will check for data and then update the appropriatevariables.The updated variable values will be listed in the Status window.4.

Preview / id_vgs_at_vdso

This setup measures drain current as a function of swept gate voltage, with drain voltageset to a constant bias value equal to Vdso. The gate voltage is swept across the operatingrange from minimum to maximum. The measurement covers all regions of deviceoperation from subthreshold through threshold and high current regions.

Vdso is an important operating characteristic for most GaAs FETs. The model's IVequations simplify greatly at Vdso. Setting Vdso appropriately helps to ensure that therest of the IV and the dispersion parameters will extract efficiently.

This setup determines several gate and drain voltage and current variables, and sets theirvalues in the variable table.

The input variables you set in the following procedure configure the FET as shown in thefollowing figure.

FET Bias Configuration for id_vgs_at_vdso Measurement

NoteUse the same instrument option settings as you did for the ig_vgs measurement, except set Integ Time toL (long) for maximum averaging for this measurement.

Then return to this section and continue.

Initializing the Input Variable Values

Select Preview > id_vgs_at_vdso.1.Notice the inputs vg and vd (see the following figure). Note that Mode is set to V toprovide a voltage to both vg and vd inputs. With a voltage input, compliance refers tocurrent.

Preview / id_vgs_at_vdso inputs

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In the model variable table, set the Value of IGS_MAX no greater than the maximum1.allowable gate current for your device in amps. Be sure to use a value within theresolution settability limits of the DC source/monitor. Also note that the maximumoutput current of the Agilent 41421B medium-power SMU likely to be connected tothe device gate is 0.100 amp.In the model variable table, set the Value of IDS_MAX lower than the maximum2.current for your device. The maximum output current of the Agilent 41420A high-power SMU likely to be connected to the device drain is 1.0 amp.

In this model, the compliance for vg is always IGS_MAX and the compliance forvd is always IDS_MAX.The Sweep Type for vg is set to LIN to provide a linear voltage sweep from startto stop gate voltage values. The Sweep Type for vd is set to CON for a constantdrain voltage value equal to Vdso.

Set VGS_MAX to the highest (most positive) Vgs value where the device can be3.operated quiescently at VDS_MAX. (VDS_MAX is the largest safe Vds value for all Vgsvalues.)Set VGS_FINE to a fairly large number of points, sufficient to display the detail of the4.measurement across the trace. Typically, 101 points is an adequate number. Notethat voltage steps in fractional mV increments do not work.From the Extract/Optimize folder, select the initialize transform and click Execute.5.The plots will be displayed, and screen prompts will ask you to input values for othervariables needed in this measurement. Use values appropriate for your device.

VDSO is one of the most important operating characteristics set in the model. Usually atransistor's static IV curves will peak up a little just after the device enters the saturationregion. The value of Vds at this peak is a perfect value for Vdso. If the device shows nohump in the IV curves at about Vds=3.0V, select a Vdso value approximately 1V abovethe knee of the Vgs=0 curve. Vdso=3.0V is a good default and will nearly always work. Itis important that Ids is at its quiescently measured maximum at this point. Devicemanufacturers often specify Idss at a value of Vds that is ideal as a setting for Vdso.

When you have responded to all the prompts, the transform measures the device andupdates the plots. It sets appropriate numerical values for the relevant variables, and liststhem in the model variable table and the Status window. Preliminary values for some ofthe model parameters will also be listed.

Example dc_iv Plot in the id_vgs_at_vdso Setup

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The dc_iv plotted data should resemble the previous figure in shape, though the valueswill be specific to your device. It is most important to include data points in thesubthreshold region. Note that as Vds becomes more positive the device threshold willtend to become more negative. If the data indicates the device is not operating in thecorrect range, you will need to redo the initialization and change the input variable valuesyou set, particularly the VGS_MIN and/or VGS_MAX values.

If the measured data looks wrong for your device, check the probe contacts, the biasconnections, and the measuring instruments. Make sure the device is orientedproperly, with the right ports connected to the right terminals. If none of theseresolves the problem, the device may be defective.If you want to save the measured data for later comparison with data predicted bythe extracted model, choose File > Save As. Enter an appropriate filename (forexample id_vgs_at_vdso ), and click OK.

Preview / id_vds_vgs

This setup measures drain current with respect to drain voltage, at several values of gatevoltage. The drain voltage is swept from 0V to the upper limit of its operating range. Themeasurement covers the overall region of device operation, and plots the characteristic IVcurves vs. Vds.

The input variable values you set will configure the FET as shown in the following figure.

FET Bias Configuration for id_vds_vgs Measurement

Defining the DC Source/Monitor Instrument State

The instrument states need to be set independently for each setup. Use the same settingsas you did for the id_vgs_at_vdso setup, except that you can set Integ Time to M(medium) to allow a faster measurement time: this measurement does not requiremaximum averaging.

Initializing the Input Variable Values

Select Preview > id_vds_vgs setup and observe the inputs vg and vd (see the1.

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following figure).

Inputs for id_vds_vgs Measurement

#* Notice that for this measurement, both vg and vd are set with a Sweep Type of1.LIN to provide a linear sweep from minimum to maximum values.

Note that the Sweep Order for vd is set to 1, and for vg is set to 2.The Start and Stop values for vg are set to VGS_MIN and VGS_MAX as in theprevious measurement. However, # of Points is now set to VGS_COARSE. Thisrepresents the number of separate measurement traces that will be made of Idat evenly-stepped Vgs values. In the variable table, set the VGS_COARSE valueto a fairly low number, between 5 and 15, so that the separate traces will bedistinguishable. Remember that fractional mV step values will not work.

For VDS_COARSE, set a number sufficient to display the measurement clearly across2.the trace but without the need for detail: an arbitrarily large number of data pointsdoes not increase model accuracy. A VDS_COARSE value between 5 and 15 willprovide enough detail without unduly slowing the measurement.From the Plots folder, select the dc_iv plot and click Display Plot. A plot of the3.device characteristic curves will be displayed.Set VDS_MIN to the smallest value you will use for Vds. This is usually 0.0V, but may4.be a negative value.Set VDS_MAX to a value in saturation well above Vdso. This should be the largest5.safe Vds value for all Vgs values. Be aware of the power dissipation limits of yourdevice at high Ids levels, to prevent damage to the device: Pdiss_MAX must notexceed VDS_MAX*IDS_MAX.When you have input all the necessary values, click Measure. This measures thedevice and updates the plot. Review the plot and if needed change the necessaryvariables and re-measure.

Example Measured ids_vds_vgs Device Preview Data

The plotted data should resemble the previous figure. If it does not, you may need tochange the VDS and/or VGS variables. Continue until you have an appropriately nominalset of characteristic IV curves displayed, showing good coverage of the Vds and Vgsfeatures.

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Optionally, to save the measured data, choose File > Save As. Enter an appropriate1.filename and press Enter or click OK.Close the plot.2.

The Source_Resistance DUT

There are many different approaches to the measurement and extraction of the commonlead resistance in junction FET devices. Perhaps the most common is the "end resistance"measurement method where the unbiased drain terminal is used as a voltage probe tomeasure the voltage at the top end of Rs while a substantial current is forced into thegate. While that method is fairly good, it includes inaccuracy due to channel resistanceeffects. The method presented here overcomes the problem by correcting for the effect ofthe open channel resistance (see End Resistance Technique in References (mesfet)).

Modified End Resistance Measurement Technique

The Yang and Long method computes the value of Rs from the change in Vgs due to theapplication of two drain currents, which are 50 to 100 times greater than Ig. The two draincurrents are chosen to be within the drain's linear IV region (Vds < 0.25 volts).

The data for the computation of Rs is taken by sweeping Ig over a range that results inmeasured Vgs values in the range of 0.300V to 0.600V. Two separate Ig sweeps aremade, with current forced at the drain terminal at two levels. The smaller of the two Idcurrents is chosen to be within 10% of the larger.

The current values needed by this method are highly dependent on the voltage limitsspecified. The voltage limits, however, are nearly universal and will work with nearly anydevice. The process thus requires Preview to set the voltages, and then uses the voltagedata to provide the needed current ranges.

The authors provide derivations for the shift in Vgs that depend only on the gate diode'sactive resistance and Rs. The form of these expressions cannot be reduced to Rs=xxx, sothe measured and computed delta Vgs values are optimized until a suitable Rs is found.

In order for this method to work, the gate diode characteristics Is and N must first beknown. These are characterized in the gate_diode measurement. Thus three setups arerequired for this technique: the Yang_Long_Preview, the gate_diode, and theYang_Long_Method.

Source_Resistance / Yang_Long_Preview

This setup measures both Ig and Id as a function of Vg, and displays the results on a logscale. The setup is used to ensure that the current input values chosen fall within thelimits prescribed in the original paper by Yang and Long.

In this setup the values for several Yang_Long method variables will be determined andset in the model variable table.

The input variables configure the FET as shown in the following figure.

FET Bias Configuration for Yang_Long_Preview Measurement

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Defining the DC Source/Monitor Instrument State

Use the same instrument option settings as you did for the device preview measurements,except set Integ Time to L.

Initializing the Input Variable Values

Select Source_Resistance > Yang_Long_Preview. and observe the inputs vg and1.vd (see the following figure).

Inputs for Yang_Long_Preview Measurement

#* Both the vg and vd Sweep Type are set to LIN for a linear sweep from start to1.stop values.

The vg # of Points is set to VGS_FINE to allow clear and accurate definitionacross the trace.The vd # of Points is set to 2 to provide Vd measurements at two closely spacedvalues.

Select Extract/Optimize folder, select the initialize transform and click Execute.2.The transform selects the appropriate current values for the device under test andsaves them in the variable table.The VG_GML values should be set to voltages that comply with the methods definedby Yang and Long. Usually the defaults (0.3V for VG_GML_MIN and 0.6V forVG_GML_MAX) are adequate and you will probably not need to change them.The Rs extraction is done in the linear region of transistor operation. Therefore bothVDS_YL_MIN and VDS_YL_MAX are values in the linear region of Vds, at values lessthan 0.25V. Generally, these Vds default values never need to be changed except inthe case of a device with a very sharp knee.Select the log10ig_id_by_vg plot and Display Plot. The plot should resemble the3.following figure, with measured traces for both Ig and Id, plotted on a log scale.Sometimes the top end of the measured range may show some resistive effects: thiswill be windowed out in the extraction procedure later.

Example Yang_Long_Preview log10ig_id_by_vg Plot

The data on this plot is used to select current values to be used in the Yang_Long_Methodsetup. You will use the data to select the minimum and maximum values for IGS_YL and

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IDS_YL, which are used in the extraction of Rs.

Using the measured Ids traces, select lower and upper values for Ids that are within1.ten percent of each other, somewhere in the middle of the two traces. Select roundnumbers that are within the settability limits of the DC source/monitor. Enter yourchosen values in response to the prompts for IDS_YL_MIN and IDS_YL_MAX. (Thedefault value for IDS_YL_MIN is 0.058 amp, and for IDS_YL_MAX is 0.060 amp.)To select the values for Igs, pick values in the region of Igs where the trace is linear.2.Choose two values that are 50 to 100 times smaller than the Ids values you havechosen. Enter your chosen values in response to the prompts for IGS_YL_MIN andIGS_YL_MAX. (The default value for IGS_YL_MIN is 0.5E-4, and for IGS_YL_MAX is0.5E-5.)When you have input all the necessary values, the transform sets numerical valuesfor the relevant variables, and lists them in the model variable table and the UNIXstandard output window.To save the plotted data, choose File > Save As.3.

Source_Resistance / gate_diode

This setup measures swept gate current as a function of gate voltage, with Vds constantat zero, and displays the results on a log scale. This will be used for characterization of thegate diode forward conduction parameters Is and N. The dynamic resistance attributableto the gate diode formed by the Schottky contact is important to the extraction of allcontact resistances.

The FET configuration is illustrated in the following figure.

FET Bias Configuration for gate_diode Measurement

Defining the DC Source/Monitor Instrument State

Use the same instrument option settings as you did for the device preview measurements.

Setting the Input Variables

From the DUT/Setup panel select the gate_diode setup and observe the vg and vd1.inputs. The following figure illustrates the inputs used in this measurement.

Inputs for gate_diode Measurement

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#* The vg inputs are the same as in the Yang_Long_Preview measurement, with the1.gate voltage set to sweep over the voltage range from VG_GML_MIN toVG_GML_MAX.

vd is set to a CONstant voltage of 0.0.

Measuring and Plotting

Select the log_ig_vg plot, and Display Plot. then click Measure. The plot should1.resemble the following figure, with Ig plotted on a log scale vs. Vg.The transform to compute the value of Ig will be performed in the extraction part of2.the procedures.

Example gate_diode log_ig_vg Plot

Optionally, to save the plotted data, choose File > Save As.1.Close the plot.2.

Source_Resistance / Yang_Long_Method

This procedure uses Ids and Igs values derived from the results of the Yang_Long_Previewmeasurement. The setup drives two different relatively small amounts of drain currentinto the device. It sweeps Igs values that are 50 to 100 times smaller than Ids, to givemeasured Vgs values that differ slightly: the difference is due to the common leadresistance.

Device Configuration: The input variables configure the FET as shown in the followingfigure.

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FET Bias Configuration for Yang_Long_Method Measurement

Defining the DC Source/Monitor Instrument State

Use the same instrument settings as you did for the device preview measurements.

The Input Variables

To view the input variables for this measurement, from the DUT/Setup panel, select1.the Yang_Long_Method setup and observe the vg and vd inputs. The following figureillustrates the inputs used in this measurement.

Inputs for Yang_Long_Method Measurement

#* Note that for this current-controlled measurement, the Compliances are voltage1.values.

The ig Sweep Type is set to LIN for a linear gate current sweep fromIGS_YL_MIN to IGS_YL_MAX. These are the extremely small positive voltagevalues you selected from the measured Yang_Long_Preview data. TheIGS_YL_PTS default value of 11 is adequate.The id Sweep Type is set to LIN for a linear sweep measured at the IDS_YL_MINand IDS_YL_MAX values you selected from the measured Yang_Long_Previewdata. The IDS_YL_PTS value is always set to 2 for two swept traces.

Measuring and Plotting

From the Plots folder (for the Yang_Long_Method setup), select the delta_m_s plot,1.and Display Plot, then click Measure. The plot should resemble the following figure.

Example Yang_Long_Method delta_m_s Plot

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Select the opt_rs transform and Execute.1.Optionally, to save the plotted data, choose File > Save As.2.Close the plot.3.

Parasitics Measurements: The cold_fet and package DUTs

The extractions for intrinsic and extrinsic parasitics are performed on S-parameter datameasured with a calibrated network analyzer. These measurements are made in thefollowing setups:

cold_fet/rg_rdpackage/Arnold_Golio

The cold_fet/rg_rd setup

The Rg and Rd contact resistances are extracted from cold FET measurements made withthe device strongly forward-biased in both the gate-drain and gate-source regions. Themethod is similar to the work described by Dambrine, Cappy, et al.

Successful extraction of certain extrinsic parasitic elements is dependent on forcing theactive device under test to a bias condition where its linear equivalent circuit reduces to avery simple form. While the Curtice model uses the "cold FET" method (Vds=0.0V,Vgs=0.0V) to optimize the contact resistances and parasitic inductances of the bondwires, further simplification can be achieved by strongly forward biasing the gate-sourceand gate-drain regions of the FET. This procedure is based on this premise.

Under conditions of strong forward gate bias the intrinsic charge model of the FET isshunted by small resistances of the forward active diode in the gate and the fully openchannel between the drain and source. Under these circumstances the reactive behavior ofthe device is attributable to the lead inductances of the device. Both the drain and gateresistances are separable if the value of Rs is known.

This setup is substantially the same as the work of Dambrine and Cappy, though it doesnot exactly track their work (see Contact Parasitic Resistance and Inductance Method inReferences (mesfet)). The FET is forward-biased at three to five points. The extrinsicelements are constant while the gate and channel characteristics change.

Device Configuration: The following figure illustrates the device configuration for thismeasurement. For S-parameter measurements, a DC-biased RF signal is applied to thedevice gate from the network analyzer system source via the bias networks.

FET Bias Configuration for rg_rd Measurement

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Defining the Instrument States

You will need to set the instrument states for both the DC source/monitor and the networkanalyzer.

For the DC source/monitor, use the same settings as you did for the device previewmeasurements. Calibrate the network analyzer. In the instrument options for the networkanalyzer, be sure to set the Cal Set No to the cal set or register where you save yourcalibration.

You will use these instrument options in all the setups that make S-parametermeasurements with the network analyzer.

Setting the Input Variables

Select the rg_rd setup to view the inputs and outputs. Notice The frequency input is1.set to LIN for a linear sweep over the calibrated network analyzer frequency range.Click the Model Variables tab and set FREQ_START, FREQ_STOP, and2.FREQ_POINTS to the start frequency, stop frequency, and number of frequencypoints you used for your network analyzer calibration.Notice the input vg is set to sweep at three specific values that will heavily forwardbias the gate diode.Notice the input vd is set to CON for a constant value of VDS_ZERO.

Measuring and Plotting

In the rg_rd setup select the im_z12 plot, and Display Plot. then click Measure.1.The plot should resemble the following figure. The data plotted is the imaginary partof the intrinsic Z12, derived from S12, which will be used in the extractionprocedures to give preliminary values for the bond inductances, as well as the Rg andRd values.

Example im_z12 Plot in the rg_rd Setup

Close the plots.1.

Package Parasitics: the package DUT

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RF parameter extraction and large-signal model generation require the reduction of alarge number of S-parameter sets into an equivalent circuit format. Although numericaloptimization techniques have often been used for extracting these small-signal models,their problems with uniqueness and long execution times make them impractical here.Fast techniques for extracting complete small-signal models have been describedpreviously but all require the additional RF characterization of the cold FET in order toextract parasitic inductance. This offers preliminary inductance values, but the values arenot completely accurate since the model has not been derived solely from the data it isasked to model.

The method described here is derived from the work of Arnold and Golio et al (seeExtraction of Package Parasitic and Intrinsic FET Equivalent Circuit Values in References(mesfet)). It requires only RF characterization at the device operating point andknowledge of the parasitic resistances. The technique has been successfully applied toGaAs FETs and HEMTs. After determining the parasitic resistances from DCmeasurements, the remaining elements are computed directly from a single set ofmeasured S-parameters. The method is very fast, and its results provide an excellentmatch to measured S-parameters throughout the saturation region.

The package/Arnold_Golio setup

The package resistance and inductance parasitics are extracted from S-parameter datameasured across Vgs with Vds at the nominal operating point. It is particularly importantto make sure the nominal operating conditions are used for extractions of contactresistance and parasitic parameters, otherwise errors are caused by bias dependenciesthat are not modeled.

This setup measures S-parameters at values of Vgs from pinchoff to Idss at the nominalVds operating bias point. This large range of Vgs values allows the largest intrinsic modelvariations possible. Large variations in the FET element values increase the impact of thestatic package parasitics, making them easier to extract in the later procedures. Theaccuracy of this measurement is very dependent on a good network analyzer calibration.

Device configuration:

FET Bias Configuration for Arnold_Golio Measurement

Defining the Instrument States

Use the same instrument state settings for this procedure as you did for the rg_rdmeasurement, for both the DC source/monitor and the network analyzer. The instrumentstates need to be set independently for each setup.

Setting the Input Variables

Select the Arnold_Golio setup and observe the inputs. The following figure illustrates1.the inputs used in this measurement.

Inputs for Arnold_Golio Measurement

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#* The frequency inputs are set the same as for the rg_rd measurement.1.The vg value of VGS_MIN (which you set in the device preview measurements)is a value that is more negative than the device pinchoff voltage at the nominaloperating voltage of Vds.VGS_MAX (set in device preview) is the highest (most positive) Vgs value wherethe device can be operated quiescently at VDS_MAX.VGS_COARSE is a number of points between 5 and 15.Vd is set for a CONstant value of VDS_NOM, the nominal operating voltage ofthe device. VDS_NOM has not been used in any of the measurements so far, soyou may need to set the value in the variable table.

Measuring and Plotting

From the Arnold_Golio setup, open the Plots folder and Display Plots, then click1.Measure.Optionally, to save the plotted data, choose File > Save As.2.Close the plots.3.

The dc_iv DUT

The setups in the dc_iv DUT are used to obtain data for extracting DC-IV parameters. Thesetups used for these measurements are:

ig_Is_Nid_vgs_at_vdsoid_vgsid_vds

The measurement procedures are straightforward, and in most cases are duplicates ofmeasurements you have made in device preview or as part of the source resistancemeasurements. Therefore, in the majority of cases, you have already defined themeasurement input values in the model variable table or in response to prompts, and willnot need to modify the inputs. However, the inputs are illustrated and explained forclarification of how each measurement is made. You will need to define the instrumentstates in each setup.

To prevent possible bias oscillation, put the network analyzer in hold sweep mode.

dc_iv / ig_Is_N (Measuring)

This is the same measurement made in the gate_diode setup as part of the sourceresistance measurements. It measures swept gate current as a function of gate voltagewith Vds constant at zero, and displays the results on a log scale.

Defining the DC Source/Monitor Instrument State

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Use the same instrument option settings as you did for the device previewmeasurements.

The Input Variables

From the DUT/Setup panel, select the ig_Is_N setup and observe the inputs, as1.illustrated in the following figure.

Inputs for ig_Is_N Measurement

#* The gate voltage is set to sweep over the same Gummel range as in the1.gate_diode measurement.

The drain voltage is set to VDS_ZERO.

Measuring and Plotting

Select the log_ig_vg plot, and Display Plot and then click Measure. The plot1.should resemble the following figure, with Ig plotted on a log scale vs. Vg.

Example log_ig_vg Plot in the ig_Is_N Setup

Optionally, to save the plotted data, choose File > Save As.1.Close the plot.2.

dc_iv / id_vgs_at_vdso (Measuring)

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This is the same as the ids_vgs_at_vdso measurement you made as part of the devicepreview measurements. This measures all the values of Vg with Vds at a constant value ofVdso. It covers all regions of device operation from subthreshold up to the high currentregion.

Defining the DC Source/Monitor Instrument State

Use the same instrument option settings as you did for the device preview measurements.

The Input Variables

From the dc_iv DUT, select the id_vgs_at_vdso setup and observe the inputs as1.illustrated in the following figure.

Inputs for id_vgs_at_vdso Measurement

#* The gate voltage is set to sweep across the device operating range from minimum1.to maximum.

The drain voltage is set to a constant value equal to Vdso, the point where themodel equations simplify.

Measuring and Plotting

Select the id_vg plot, and Display Plot. then click Measure. The plot should1.resemble the following figure with a single curve IV plot.

Example id_vg Plot in the id_vgs_at_vdso Setup

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Optionally, to save the plotted data, choose File > Save As.1.Close the plot.2.

dc_iv / id_vgs (Measuring)

This procedure measures drain current with respect to drain voltage at several values ofgate voltage. The drain voltage is swept from 0V to the upper limit of its operating range.

Defining the DC Source/Monitor Instrument State

Use the same instrument settings as you did for the device preview measurements.

The Input Variables

Select the id_vgs setup and observe the inputs. The following figure illustratesthe inputs for this measurement.

Inputs for id_vgs Measurement

The gate voltage is set to sweep across the device operating range from minimum tomaximum.The drain voltage is set to sweep from its minimum value to its maximum safe value.

Measuring and Plotting

Select the id_vg plot, and Display Plot then click Measure. The plot should1.resemble the following figure.

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Example id_vg Plot in the id_vgs Setup

Optionally, to save the plotted data, choose File > Save As.1.Close the plots.2.

dc_iv / id_vds (Measuring)

This is the same as the ids_vds_vgs measurement you made as part of the device previewmeasurements. The drain voltage is swept from 0V to the upper limit of its operatingrange. The measurement covers the overall region of device operation, and plots thecharacteristic IV curves vs. Vds. It uses the same inputs as the id_vgs measurement,except with the sweep order for vg and vd reversed.

Defining the DC Source/Monitor Instrument State

Use the same instrument settings as you did for the device preview measurements.

The Input Variables

Select the id_vds setup and observe the inputs, as illustrated in the following figure.1.

Inputs for the id_vds Measurement

#* The gate and drain voltage values are set the same as for the id_vgs1.

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measurement.Note that the Sweep Order for vg is set to 2, and for vd is set to 1 to make thedrain voltage the primary sweep.

Measuring and Plotting

From the Plots folder select the id_vd plot, and Display Plot then click Measure.1.The plot should resemble the following figure, displaying the device characteristiccurves.

Example id_vd Plot in the id_vds Setup

Optionally, to save the plotted data, choose File > Save As.1.Close the plot.2.

The AC_at_VDSO DUT

This DUT is used for making AC charge and dispersion parameter measurements. Twodifferent S-parameter measurements are necessary for the extractions of the AC chargeand dispersion parameters. The first measurement is performed with Vds set to a constantbias value of Vdso. The second has Vds actively biased across the device operating range.It is essential that the measurements be performed in the order listed, and that theextractions listed in the same DUT groupings with the measurement setups be performedfrom those corresponding setups. The extraction procedures later in the section will makeclear which measurement setup is to be used for which extraction.

Make sure the network analyzer is in continuous sweep mode.

AC_at_VDSO / Meas_Spars

This setup measures S-parameters at values of Vgs from pinchoff to Vgs_max with Vds atVdso, the point where the model equations simplify. The large range of Vgs values allowsthe largest intrinsic model variations possible, increasing the impact of the chargeparameters and making them easier to extract. A good network analyzer calibration isimportant to the accuracy of this measurement and the subsequent charge parameterextractions.

Device Configuration: The following figure illustrates the device configuration for thismeasurement. A DC-biased RF signal is applied to the device gate from the networkanalyzer system source via the bias networks.

FET Bias Configuration for the First Meas_Spars Measurement

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Defining the Instrument States

You need to set the instrument options for both the DC source/monitor and the networkanalyzer.

Use the same instrument option settings for this procedure as you did for the rg_rd andArnold_Golio measurements.

The Input Variables

From the AC_at_VDSO DUT, select the Meas_Spars setup and observe theinputs. The following figure illustrates the inputs used in this measurement.

Inputs for the First Meas_Spars Measurement

The frequency inputs are set the same for all S-parameter measurements in thismodel, corresponding with the frequency settings of the network analyzer calibration.The gate voltage is set to sweep across the device operating range from minimum tomaximum.The vg # of Points is set to VGS_COARSE. This ensures that the data taken is theleast that will yield good measurement results with S-parameter plots that areunderstandable. Using too many measurement points causes the extractions to bevery time-consuming and the plots to be confusing.The drain voltage is set to a CONstant value equal to Vdso, the point where themodel equations simplify.

Measuring and Plotting

With the Meas_Spars setup selected, Display Plots then click Measure.1.Optionally, to save the plotted data, choose File > Save As.2.Close the plots.3.

About the Other Setups in the AC_at_VDSO DUT

Note that no measurements are performed in the other setups in this DUT. These setupswill be used later, in the extraction procedures, based on the data measured in this first

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Meas_Spars setup. However, it is important that the DC input variables for vg and vd beset exactly the same as in the first Meas_Spars setup, with one exception. The exceptionis that the vg Sweep Order is set to 1 instead of 2, because there is no frequency sweep.

AC_all / Meas_Spars

This setup measures S-parameters at values of Vgs from pinchoff to Vgs_max and valuesof Vds swept across the device operating range. Again, a good network analyzercalibration is essential: if the calibration is incorrect or has drifted, the modeled data willbe impossible to fit to the measured data.

Device Configuration:

FET Bias Configuration for the Second Meas_Spars Measurement

Defining the Instrument States

Use the same DC source/monitor and network analyzer instrument option settings as youdid for the first Meas_Spars and the other S-parameter measurements.

The Input Variables

From the AC_all DUT, select the Meas_Spars setup and observe the inputs. Thefollowing figure illustrates the inputs used in this measurement.

Inputs for the Second Meas_Spars Measurement

The frequency inputs are set the same as for the other S-parameter measurements.The gate voltage is set to sweep across the device operating range from minimum tomaximum.The drain voltage is set to sweep from its minimum value to its maximum safe value.The # of POINTS for both vg and vd is set to COARSE to allow good measurementresults without excessive data-taking.

Measuring and Plotting

With the Meas_Spars setup selected, Display Plots then click Measure.1.

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Optionally, to save the plotted data, choose File > Save As.2.Close the plots.3.

About the Other Setups in the AC_all DUT

Note that no measurements are performed in the other setups in this DUT. They will beused later, in the extraction procedures, based on the data measured in the secondMeas_Spars setup. However, it is important that the DC input variables for vg and vd beset exactly the same as in the second Meas_Spars setup, with one exception. Theexception is the Sweep Order, which is set to 1 for vg and 2 for vd, because there is noprimary frequency sweep.

Storing the Measured Data

This procedure stores the data you measured for this particular device. You can then usethe data to perform the extractions, to compare the simulated data with the measureddata, and as a measurement record for comparison with other devices.

If you will be measuring large numbers of devices, it is worthwhile to organize yourdirectory structure according to device type, geometry, and batch or wafer.

Decide where in your directory structure you intend to store this data file.1.From the IC-CAP/Main window select Model, then select File > Save As from the2.pulldown menu. A dialog box is displayed.Choose a filename that will clearly identify the measured device and the type of3.information stored, such as fet2_meas_12aug95. Type the directory path and thefilename into the dialog box.Click OK or press Enter to store the data and close the dialog box.4.When you want to use this data for an extraction at some future date, remember to5.change directories in IC-CAP by selecting Windows > Main Window and File >Change Directory... (See Accessing Data from a Previous Measurement(measurement).)

This concludes the measurement procedures. The extraction procedures follow.

Parameter Extractions

Once the measurements have been performed and a complete set of data collected for aparticular device, the extraction can proceed. If you saved the measured data, you canperform an extraction at any later time. The Xtract macro can be used for an unattendedextraction, or each extraction step can be processed individually to allow complete processcontrol. The procedures in the following pages explain how to extract the parametersindividually.

Displaying the Parameters Table

If the Parameters table is not already displayed on the screen, select Model Parametersfrom the Model window, and select Detach.... Move the Parameters table to a convenientcorner of the screen: you will be using it throughout the extractions.

Extracting the Source Parasitic Resistance Rs

The Yang and Long method computes the value of Rs from the change in Vgs due to theapplication of two drain currents, which are 50 to 100 times greater than Ig. The two draincurrents are within the drain's linear IV region (Vds < 0.25 volts). The smaller of the twoId currents is within 10% of the larger. The values were set in the source resistancemeasurement procedures.

The authors Yang and Long provide derivations for the shift in Vgs that depend only onthe gate diode's active resistance and Rs. The form of these expressions cannot bereduced to Rs=xxx, so the measured and computed delta Vgs values are optimized until a

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suitable Rs is found.

In order for this method to work, the gate diode characteristics Is and N must first beknown. These are extracted from the data measured in the gate_diode setup. Thus twosetups are required for this extraction: the gate_diode and the Yang_Long_Method setups.

Extracting Is and N

In the Parameters table, locate the values for EEFET3.rs, Is, and n.1.From the DUT/Setup panel, select the gate_diode setup, and select the Plots2.folder.From the Plots folder select log_ig_vg, and Display Plot. The plot shows Ig plotted3.on a log scale vs Vg.From the Extract/Optimize folder, select the opt_is_n transform.4.Click the Parameters tab to view the lower and upper optimization limits for5.EEFET3.Is and .n.Click the Inputs tab to view the upper and lower bounds for Vgs that should limit the6.optimization range to the linear portion of the IV curve. If for some reason theselimits are not sufficient, use the next step to establish more restrictive limits.Click the Options tab to view the X_LOW, X_HIGH, Y_LOW, and Y_HIGH functions.7.These are optimization limits you can set from the data plot to select a portion of thetrace for the optimization. The gate diode parameters should be optimized over onlythe linear portion of the trace, so use the X-low/X-high function as follows:

Select setup gate_diode, then select Setup Variables folder. A variable tablewill appear, with current values for X-LOW and X-HIGH.From the plotted data choose a linear portion of the trace, along the constantslope.

Log Plot of Ig vs. Vg, with X-Low/X-High Values Selected

#* Put the mouse pointer at the low end of the chosen portion and click left, then put1.the pointer at the high end and click left, to make a box on the trace, as shown in theprevious figure.

From the plot select Options > Copy to Variables. This changes the X_LOWand X_HIGH values to the lower and upper limits you selected on the trace.

Click Execute. The transform optimizes the plotted data, using the linear portion of2.the trace you defined with X-low/X-high, and enters the optimized values for Is and nin the Parameters table.Close the plot.3.

Optimizing Rs

Driving two different relatively small amounts of drain current into a FET and then makingswept Vgs measurements vs. Igs gives two sets of measured Vgs values that differslightly. The difference is due to the common lead resistance. Measured and simulated

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delta_Vgs values are optimized in this procedure to yield a reasonable value of thecommon lead resistance Rs.

NoteThis extraction generally uses current values within the limits prescribed in Yang and Long's originalpaper. (These are values you set in the Yang_Long_Preview measurement procedure.) If you chose valuesoutside these limits, warning messages in the extraction phase will alert you to that fact. However, thewarnings will not prevent the computations from completion, as you may have a valid reason not to usethe specified limits: in this case, ignore the warning messages and use the computed values.

Select the Yang_Long_Method setup, and Display Plots.1.

Example Yang_Long_Method by_vgs Plot

From the Extract/Optimize folder, select opt_rs, and Execute. Observe the plots as1.the traces converge. The by_vgs plot shows the difference between the measuredand simulated data.The opt_rs transform also calls the Vg_delta_m and Vg_delta_s transforms, so youneed not perform them separately. The transforms optimize the measured andsimulated Vgs shifts for the most accurate source resistance extraction.

The Computed Shift in Measured and Simulated Vgs Values

The difference in measured and simulated Vgs values is used for the calculation of Rs. Theprevious figure illustrates the results of the optimization. The difference in Vgs values iscaused by the common (source) lead resistance. Although the traces appear verydifferent, note that the scale is very small and the values result in differences of fractionsof an ohm.

Close the plots.1.

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Extracting the Contact Resistances Rd and Rg

This extraction uses a device setup with the gate-source and gate-drain junctions of theFET strongly forward biased. Under conditions of strong forward gate bias the intrinsiccharge model of the FET is shunted by small resistances of the forward active diode in thegate and the fully open channel between the drain and source. Under these circumstancesthe reactive behavior of the device is attributable to the lead inductances. Both the drainand gate resistances are separable if the value of Rs is known.

The FET is forward-biased at three to five points. The extrinsic elements are constantwhile the gate and channel characteristics change. In this extraction the extrinsicelements are optimized while the intrinsic device resistances are allowed to shift. Thevalues of the extrinsic inductance elements are only initial values that will be refined in alater procedure.

This extraction is based on the S-parameter data you measured in the rg_rd setup. Atransform in this extraction computes and saves a table of linear equivalent circuitparameters based on the measured S-parameters. It calculates the contact resistanceparameters directly from the measured data, and allows you to compare the linear modelextracted to the measured S-parameters.

In the Parameters table, locate the values for EEFET3.rg and rd.1.From the DUT/Setup panel, select the rg_rd setup.2.From the Plots folder, select the im_Z12 plot, and Display Plot. The data plotted is3.the imaginary part of the intrinsic Z12, derived from S12.From the Extract/Optimize folder, select the auto_extr transform and Execute. This4.computes the values for the parasitic resistances Rg and Rd. It also calculates initialvalues for the parasitic inductances Lg, Ld, and Ls, which will be refined in the nextprocedure. The pad capacitances are defaulted to 0.0 for this procedure, and will beextracted later.The calculated values for EEFET3.rg and rd will be entered in the Parameters table.Values for Rs, Rd, and Rg, as well as Ls, Lg, and Ld, will be displayed in the UNIXstandard output window. An example of the calculated Z-parameter data is illustratedin the following figure.

Example im_Z12 Data in the rg_rd Setup

Close the plot.1.

Extracting the Package Parasitics

This extraction is based on the S-parameter data you measured in the Arnold_Golio setup(S-parameters at values of Vgs from pinchoff to Idss at the nominal Vds operating biaspoint). As the device goes through this wide range of measurement variations the packageparasitic inductances remain constant, allowing them to be readily extracted.

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A transform in this extraction computes and saves a set of linear equivalent circuitparameters based on the measured S-parameters. A set of modeled S-parameters aresimulated based on the linear equivalent circuit. Any differences between the simulatedand measured S-parameters are due to the package parasitics or to defects in the networkanalyzer calibration. (This is why a good network analyzer calibration is essential forsuccess in this extraction.) A second transform optimizes the measured and simulated S-parameter data to extract the package parasitic inductances.

In the Parameters table, locate the values for lg.l, ld.l and ls.l.1.From the DUT/Setup panel, select the Arnold_Golio setup, and Display Plots.2.From the Extract/Optimize folder, select mdl, and Execute. This computes a set of3.linear equivalent circuit parameters based on the measured S-parameters, and usesthem to simulate a set of modeled S-parameters.Select the transform opt_pkg, and Execute. This calculates the values for the4.package parasitic inductances.

You will see the traces converge on the plots, and the new calculated values for lg.l, ld.l,and ls.l will be entered in the Parameters table. Note that these are final values for theinitial inductances calculated in the last procedure.

Optionally, you can change the optimization limits. Select Arnold_Golio setup, and1.Setup Variables. Modify values in the table as required.Close the plots.2.

Extracting DC-IV Parameters

The DC-IV extractions start with preliminary estimates of some parameters and begin toestablish firm values for some others. Four measurement setups and their measured dataare used. The fourth and last DC extraction finalizes the initial values determined in thethree previous setups.

Note that the thermal factor Peff has a major impact on the performance of nearly allmodel parameters. Therefore the initial value for Peff is set so high that it has no impacton model performance.

dc_iv / ig_Is_N (Extracting)

This procedure uses measured gate current data to extract final values for the gate diodecharacteristics Is and N. (Initial values were found in the source resistance extractionusing the gate_diode setup.)

Locate the value for EEFET3.peff in the Parameters table. Make sure the Value is set1.to a high number such as 100, high enough that it will have no effect on modelperformance.Locate the values for EEFET3.Is and n.2.From the DUT/Setup panel, select the ig_Is_N setup.3.From the Plots folder, select*log_ig_vg* plot, and Display Plot. The graph shows Ig4.plotted on a log scale vs. Vg.The parameters should be optimized over only the linear portion of the trace. Theinput table contains upper and lower bounds for Vgs that should limit theoptimization range to the linear portion of the IV curves. If for some reason theselimits are not sufficient, use the X-low/X-high function to define the limits for awindow of the linear trace.From the Extract/Optimize folder select opt_is_n, and Execute. The transform5.optimizes the plotted data, using the linear portion of the trace you defined with X-low/X-high, and enters the optimized values for Is and n in the Parameters table.Close the plot.6.

dc_iv / id_vgs_at_vdso (Extracting)

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This procedure uses measured Ids data with Vg swept across the device operating rangeand Vd set to a constant value of Vdso. Thus it covers all regions of device operation fromsubthreshold up to the high current region, and makes use of the fact that the modelequations simplify at Vdso.

This data is used to set the value of Vto and to plot a curve for Gm. From these values theprocedure extracts initial values for Vgo and Vdelt, as well as several other FET and HEMTparameters.

Leave EEFET3.peff set to a high value.1.Locate the values for EEFET3.vt and EEFET3.vdelt.2.From the dc-iv DUT, select the id_vgs_at_vdso setup, and Display Plots.3.From the Extract/Optimize folder, select the initialize transform and Execute. This4.sets up the software to extract the device-specific parameters.Select opt_vto_fet3 for a FET, or opt_vto_hemt1 for a HEMT, and Execute. The5.transform optimizes the plotted data, and enters the optimized values into theParameters table.

dc_iv / id_vgs (Extracting)

This procedure is used to calculate an initial value for gamma, the parameter that controlsthe amount Vto shifts with increasing Vds. The final value for gamma will be refined in thelast DC extraction.

The control range set for the data optimization is very important in this procedure.

Leave EEFET3.peff set to a high value.1.Locate the value for EEFET3.gamma.2.From the DUT/Setup panel select the id_vgs setup.3.From the Plots folder, select id_vg plot, and Display Plot.4.In the Model window select Setup Variables. Note the default values for Y_LOW and5.Y_HIGH. This control range for the data optimized is important: low values of Idsmust be used. Ids values have to be windowed so that only the first 5% to 10% ofthe Ids data is used, usually between 0.0 and a few milliamps for each trace. The Xvalues should be left at 0 to ensure that all the X-axis data is used in theoptimization.From Extract/Optimize folder, select opt_gamma and Execute. You will see the low6.end of the traces converge on the plot, and the new calculated value for gamma willbe entered in the Parameters table. The following figure shows an example of theinitial optimized gamma data.

Example Initial Optimized Gamma Data in the id_vgs Setup

Since this is an initial extraction step, the model fit is not ideal. Certain effects will bebetter modeled in subsequent stages.

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Close the plot.1.

dc_ic / id_vds (Extracting)

This procedure extracts final values for parameters initially extracted in the DC-IVextraction procedures. In addition to Vdelt and Gamma, this procedure extracts theparameters Kappa, Vsat, and Peff.

Locate the values for EEFET3.vdelt, vsat, and vgo in the Parameters table.1.From the DUT/Setup panel, select the id_vds setup and display the id_vd plot.2.From the Extract/Optimize folder, select opt_iv_fet3 or opt_iv_hemt1, and3.Execute. The transform optimizes the plotted data, and enters the optimizedparameter values in the Parameters table.Use the X-low/X-high function if desired, to select only a portion of the data for theoptimization. This is appropriate if any of the plotted data looks anomalous.Locate the optimized values for EEFET3.gamma, kappa, and peff in the Parameters4.table. You will notice that the value for EEFET3.peff has changed significantly. Thefollowing figure shows an example of the final optimized DC-IV curves.

Example Plot of Final Optimized DC-IV Data

If you decide to rework the DC-IV extraction phase, make sure to reset EEFET3.peff to ahigh value such as 100.

Close the plots.1.

Extracting Charge and Dispersion Parameters

Charge parameters are divided into two groups:

The gate charge parameter extraction is based on the S-parameter data measured atVdso in AC_at_VDSO/ Meas_Spars.The output charge and dispersion parameter extractions are based on the S-parameter data measured with active DC bias in AC_all/Meas_Spars.

It is important that the individual extractions are based on the correct set of S-parameterdata: the data from the same DUTs in which the extractions are grouped. If the setups aremixed within DUTs or performed in the wrong sequence, the results will be wrong.

A transform in each procedure computes a set of linear equivalent circuit parametersbased on the measured S-parameter data. The actual model parameters are extractedfrom this linear equivalent circuit data.

The dispersion parameters are grouped here together with the charge parameters becausethey also are extracted from the S-parameter data measured with active bias.

Extracting Gate Charge Parameters

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This procedure uses the S-parameter data you measured in the first Meas_Sparsprocedure. Since the model equations simplify at Vdso, the charge parameters C11o andC11th, Vinfl, and Deltgs can most accurately be extracted with Vds set to a constant valueof Vdso. These are initial values for C11o and C11th.

Extracting the Linear Equivalent Circuit

From the AC_at_VDSO DUT, select the Meas_Spars setup and Display Plots.1.

From Extract/Optimize folder, select mdl and Execute. This computes and saves a1.set of linear equivalent circuit parameters based on the measured S-parameters.Observe the changes in the plots.Close the plots.2.

Extracting C11 Capacitance with C11_vgs

This procedure extracts the C11 capacitance looking into the gate terminal.

Locate the values for EEFET3.c11o, c11th, vinfl, and deltgs (near the bottom of the1.table).Select the setup C11_vgs.2.From the Plots folder, select the C11 plot, and Display Plot.3.From the Extract/Optimize folder, select the initialize transform, and Execute to4.establish initial values.Select the transform opt_to_C11 and Execute to calculate the final values. You will5.see the traces converge on the plot, and the calculated values for the parameters willbe entered in the Parameters table. The following figure is a typical plot of the inputcapacitance of a GaAs FET over all Vgs values at Vdso.

Example Plot of Gate Input Capacitance Over Vgs at Vdso

Generally you will not need to change any of the optimization limits for these gate chargeparameters. However, the limits are very important to the correct functionality of theoptimizer.

Extracting Gm and Gds with ac_gm_gds

This is an initial extraction for Gm and Gds. These parameter values will be refined in alater procedure.

Locate the values for EEFET3.gmmaxac, gammaac, kappaac, peffac, and vtoac in the1.Parameters table.Select the setup ac_gm_gds, and Display Plots.2.From Extract/Optimize folder, select Init_dispersion and Execute.3.Select opt_gm_fet3 or opt_gm_hemt1, and Execute. Observe the changes in the4.

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plots and the Parameters table values. You probably will not need to change theoptimization limits.There may be a slight tradeoff in match between Gm and Gds. When the Gds data iswell-matched the Gm data may degrade. You may like to perform the optimizationagain to see if it improves the match of both Gm and Gds. Or you can repeat boththe Init_dispersion transform and the opt_gm transform.Note that Gm AC is lower than Gm DC because of trapping effects: this is notaccounted for in most industry standard models.Close the plots.5.

Extracting Output Charge Parameters

The extraction procedures in the following setups use the S-parameter data you measuredin the second Meas_Spars procedure. It is essential you use that S-parameter data, andnot jump directly to these extractions using the wrong set of S-parameter data.

These procedures start by extracting the C21 and C22 capacitances, and then fit Cdso andTau to the extracted C21/C22 data using optimization. The final procedure extracts thedispersion parameters.

Extracting the Linear Equivalent Circuit

From the AC_all DUT, select the Meas_Spars setup and Display Plots.1.From the Extract/Optimize folder, select mdl and Execute. This computes and saves2.a set of linear equivalent circuit parameters based on the S-parameters measuredwith bias. You will see the traces change on the plots, though a large amount of datais displayed and it is difficult to distinguish the convergence of individual traces.Close the plots.3.

Extracting Initial Capacitance with Cgd_vgs_vds

This procedure extracts an initial value for the gate-to-drain capacitance.

Locate the values for deltds, lambda, and c12sat in the Parameters table.1.Select the setup Cgd_vgs_vds.2.From the Plots folder, select the Cgd plot, and Display Plot.3.From the Extract/Optimize folder, select the transform opt_to_Cgd and Execute.4.Observe the changes in the plot and in the Parameters table values.Generally you will not need to change any of the optimization limits for these chargeparameters. However, the limits are very important to the correct functionality of theoptimizer.Close the plot.5.

Extracting Final Capacitance with Qg_vds_vgs

This procedures extracts final values for the capacitance parameters.

Locate the values for EEFET3.c11o and c11th in the Parameters table.1.Select the setup Qg_vds_vgs.2.From the Plots folder, select the C11 plot, and Display Plot.3.From the Extract/Optimize folder, select the transform opt_C11_Cgd and Execute.4.You will see the traces converge on the plot, and the parameter values may changein the table. You probably will not need to change any of the optimization limits. Thefollowing figure illustrates a typical C11 plot.

Example C11 Device Input Capacitance Plot

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The C11 plot shows how the input capacitance values trend upward vs. Vgs fromthreshold, spreading as they go toward the upper limits.

Note the values for EEFET3.c12sat and cgdsat in the Parameters table.1.Close the plot.2.

Extracting Tau and Ri with Tau_Ri

The extractions for Tau and Ri are grouped together, even though they are independent,because both parameters are dependent on good extraction of the extrinsic and packageparasitics. Tau is the time constant delay of S21. It is hard to separate from thetranscapacitance Cds, the output capacitance with a change in input voltage.

Locate the values for EEFET3.tau and cdso in the Parameters table.1.Select the setup Tau_Ri_Cds.2.From the Plots folder, select the Tau and Cds plots, and Display Plot.3.From the Extract/Optimize folder, select the opt_Tau transform and Execute. This4.optimizes both Tau and Cds. Observe the data change on the trace, and possibleparameter value changes for EEFET.tau and cdso. The following figure illustrates anexample of plotted Tau data. The spread in data is caused by capacitance effects.

Example Tau Plot

If the Tau extraction yields a parameter value of zero or less, the problem may be in theearlier parasitic extractions. If the parasitic extractions look good and the Tau extractionlooks bad, set a value for Tau manually. A good nominal value is 5.0 picoseconds for a 0.5um GaAs FET, scaled approximately linearly with gate length for other FETs.

Close the Tau and Cds plots. Display the Ri plot.1.Locate the value for EEFET3.ris in the Parameters table.2.Select the opt_ri transform and Execute. Observe the data change on the trace,3.

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and a possible parameter value change for EEFET3.ris. The following figure illustratesexample Ri data.

Example Ri Plot

If the Ri extraction yields a value of zero or less, it indicates that the contact resistance Rgwas extracted too high. If this is the case, you may wish to re-iterate the rg_rd extractionfor more accurate results. Ri is typically a value of only a few ohms, which mayerroneously be attributed to Rg. The effect may be unimportant if the total of the gateresistances is good. If the fit of total gate resistance to S11 is sufficiently good theiteration of the rg_rd contact resistance extraction is not necessary.You can also reset the value of EEFET3.rg in the Parameters table a little lower, forcing theremaining resistance to be attributed to Ri. If you do this, or if you re-iterate the rg_rdcontact resistance extraction, you must perform the mdl transform in the secondMeas_Spars setup again before performing the opt_ri transform in this setup. Then checkthe Parameters table values for Ri again.

Close the plot.1.

Extracting Dispersion Parameters

Both Gm and Gds change in GaAs devices due to traps and other effects. This procedureadjusts the dispersion parameters that model this behavior. The setup used in thisextraction is tied to the S-parameter measurement and linear equivalent model extractedin the second Meas_Spars setup. The mdl transform in that setup must be active (that is,no other S-parameters must be measured and no other mdl transform must be run sincethe one in the second Meas_Spars setup).

If the mdl transform in the second Meas_Spars setup has not been run, open that1.setup and Execute the transform.Scroll the Parameters table to show some of the following parameters:2.EEFET3.gmmaxac, gammaac, kappaac, peffac, vdeltac, gdbm, kdb, and vdsm. Youwill not be able to display them all at the same time.Select the setup ac_gm_gds.3.From the Plots folder, select Gm plot, and Display Plot.4.From the Extract/Optimize folder, select the transform opt_gm_fet3 or5.opt_gm_hemt1, and Execute. Observe the traces converge on the plot, and theparameter values change in the table. The following figure illustrates example Gmdata. Some dynamic thermal effects may be observed.

Example Gm Plot in the ac_gm_gds Setup

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You can use the X-low/X-high function if you want to optimize over only a portion of thetrace.

Scroll the Parameters table to show more of the relevant parameters.1.Display the Gds plot.2.Select the opt_gds transform, and Execute. Observe the traces converge on the3.plot, and the parameter values change in the table. The following figure illustratesexample Gds data.

Example Gds Plot in the ac_gm_gds Setup

In some cases there may be a tradeoff between a good data fit at threshold and in theactive region of operation.

Verifying the Model Against the Measured Data

This procedure uses the File_Validate setup to verify that modeled S-parameter data iscomparable to measured data. An S-parameter measurement is performed at one biasvalue-the specific bias of expected device operation. This allows a single bias condition tobe isolated for comparison purposes, which cannot be done with the multiple-biasconditions of earlier S-parameter measurements.

Defining the Instrument States

To define the DC Source/Monitor instrument state, follow these instructions:

Defining the DC Source/Monitor Instrument State (measurement) in Using IC-CAPwith an Agilent 85122A Precision Modeling System (measurement)" (for an Agilent8510-based system)Defining the DC Source/Monitor Instrument State (measurement) in Using IC-CAPwith an Agilent 85123A Device Modeling System (measurement)" (for an Agilent8753- or 8720-based system)

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Use the same DC source/monitor and network analyzer settings as you did for theMeas_Spars and other S-parameter measurements. Then return to this section andcontinue.

The Input Variables

From the Utilities DUT, select the File_Validate setup and observe the inputs. The1.following figure illustrates the inputs used in this measurement.

Inputs for Verification Data

#* The frequency inputs are set the same as for the other S-parameter1.measurements.

The gate voltage is set for a CONstant value of VGS_NOM, the value of Vgs thatgives an Ids value representative of actual device operation.The drain voltage is set for a CONstant value equal to the intended Vds of deviceoperation.

Measuring and Plotting

With the File_Validate setup selected, select Display Plots, then click Measure.1.From the Extract/Optimize folder, select mdl and Execute. This embeds the extrinsic2.elements and makes the model parameters comparable with the measured results.Observe the measured and modeled S-parameter data on the plots. The plot below3.illustrates typically well-converged data.

Measured and Modeled S11 and S22 Data

Storing the Model

This procedure stores the model in IC-CAP, including all the device-specific measured andsimulated data. Once you have developed the device model, it can be used as a

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component for circuit simulation, inserting it into circuits under design to emulate thecharacteristics of your device.

If you will be modeling large numbers of devices, it is worthwhile to organize yourdirectory structure according to device type, geometry, and batch or wafer.

Decide where in your directory structure you intend to store this model file.1.From the IC-CAP/Main window select Model, then select File > Save As from the2.pulldown menu. A dialog box is displayed.Select a new filename that associates this model with the device, for example3.eefet6_9jun95.mdl. Type the full directory pathname and the filename into the dialogbox.Select OK or press Return to store the data and close the dialog box.4.

Saving the Parameters for Series IV Compatibility

A transform in the File_Validate setup lets you save the model parameters in a format thatcan be used by the Series IV Design System.

From the DUT/Setup panel select the File_Validate setup.1.From the Extract/Optimize folder, select the transform SaveFile, and Execute.2.Type a filename for the parameters and click OK. The parameters will be saved in a3.Series IV-compatible format. The format is MDIF (measurement data interchangeformat). When the transform is run, a copy of the MDIF file is written to the UNIXstandard out window.

Saving the Parameters in SPICE Format

You can also save the list of individual model parameters in SPICE format for later access.

From the Model window choose File > Export Data > Extracted Deck. Select a1.new filename, for example fet6pars.mdl. Type the full pathname and your filenameinto the dialog box.Click OK or press Enter to store the parameters in SPICE format.2.

This completes the example high-frequency EEfet3 measurement and parameterextraction procedure.

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Agilent EEFET3 Model EquationsThis section describes the HPEEFET3 model equations used in IC-CAP.

Equations Index

Drain-Source Current

Dispersion Current (Idb)

Gate Charge Model

Output Charge and Delay

Gate Forward Conduction and Breakdown

Gate Forward Conduction and Breakdown

Scaling Relations

Drain-Source Current

The drain-source current model in Agilent EEFET3 is comprised of various analyticexpressions that were developed through examination of gm vs. bias plots on a wide class

of devices from various manufacturers. The expressions below are given for Vds > 0.0 V

although the model is equally valid for Vds < 0.0 V. The model assumes the device is

symmetrical, and one need only replace Vgs with Vgd and Vds with -Vds in order to obtain

the reverse region (Vds < 0.0 V) equations. The gm, gds and Ids equations take on 4

different forms depending on the value of Vgs relative to some of the model parameters.

The Ids expression is continuous through at least the second derivative everywhere.

if Vgs ≥ Vg and VDELT ≤ 0.0

else if VDELT > 0.0 and Vgs > Vgb

else if Vgs ≤ Vt

else

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where

The preceding relations for Idso, gmo and gdso can now be substituted in the following

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equations that model the current saturation and output conductance. This portion of themodel can be recognized from the work of Curtice [1].

These expressions do an excellent job of fitting GaAs FET I-V characteristics in regions oflow power dissipation; they will also fit pulsed (isothermal) I-V characteristics. To modelnegative conductance effects due to self-heating, the thermal model of Canfield wasincorporated [2]. With this final enhancement, the DC expressions for Ids and associated

conductances become:

where

Qualitatively, the operation of the drain-source model can be described as follows:

The Vds dependence of the equations is dominated by the parameters VSAT, GAMMA,

KAPA, and PEFF. Isothermal output conductance is controlled by GAMMA and KAPA. Theimpact of GAMMA on output conductance is more significant near threshold. At Vgs=VCH,

the output conductance is controlled only by KAPA. The parameter PEFF provides acorrection to the isothermal model for modeling the self-heating effects manifested as anegative resistance on the I-V curves. The parameter VSAT represents the drain-sourcevoltage at which the current saturates and output conductance becomes a constant(approximately).

The overall impact of VCH on the I-V characteristics is second order at best, and manydifferent values of VCH will provide good fits to I-V plots. For most applicationsencountered, it is our experience that the default value of 1.0V is an adequate value forVCH. Similar to VCH, VDSO is a parameter that should be set rather than optimized. At V

ds=VDSO, the drain-source model collapses to a single voltage dependency in Vgs. It is

recommended that the user set VDSO to a typical Vds operating point in saturation. At this

point, many of the parameters can be extracted right off a Ids-Vgs plot for Vds=VDSO or

preferably, a gm(DC)-Vgs plot at Vds=VDSO.

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When Vds=VDSO and PEFF is set large (to disable the self-heating model), the significance

of the parameters VTO, VGO, VDELT, GMMAX are easily understood from a plot of gm

(DC)-Vgs. GMMAX is the peak constant transconductance of the model that occurs at Vgs

=VGO. The parameter VTO represents the gate-source voltage where gm goes to zero. If

VDELT is set to a positive value, then it causes the transconductance to become linear atVgs= VGO - VDELT with a slope equal to that of the underlying cosine function at this

voltage. The parameter definitions are illustrated in the following figure.

Agilent EEFET3 gm-Vgs Parameters

Dispersion Current (Idb)

Dispersion in a GaAs MESFET drain-source current is evidenced by the observation thatthe output conductance and transconductance beyond some transition frequency is higherthan that inferred by the DC measurements. A physical explanation often attributed to thisphenomenon is that the channel carriers are subject to being trapped in the channel-substrate and channel-surface interfaces. Under slowly varying signal conditions, the rateat which electrons are trapped in these sites is equal to the rate at which they are emittedback into the channel. Under rapidly varying signals, the traps cannot follow the appliedsignal and the high-frequency output conductance results.

The circuit used to model conductance dispersion consists of the elements RDB, CBS(these linear elements are also parameters) and the nonlinear source Idb(Vgs, Vds). The

model is a large-signal generalization of the dispersion model proposed by Golio et al. [3].At DC, the drain-source current is just the current Ids. At high frequency (well above the

transition frequency), the drain source current will be equal to Ids(high frequency) = Ids

(DC) + Idb. Linearization of the drain-source model yields the following expressions for y21

and y22 of the intrinsic Agilent EEFET3 model.

where

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Evaluating these expressions at the frequencies ω=0 and ω=infinity produces thefollowing results for transconductance and output conductance:

For ω=0,

For ω=infinity,

Between these 2 extremes, the conductances make a smooth transition, the abruptness ofwhich is governed by the time constant Τdisp = RDB • CBS. The frequency f0 at which the

conductances are midway between these 2 extremes is defined as

The parameter RDB should be set large enough so that its contribution to the outputconductance is negligible. Unless you are specifically interested in simulating the devicenear f0, the default values of RDB and CBS will be adequate for most microwave

applications.

The Agilent EEFET3 Ids model can be extracted to fit either DC or AC characteristics. In

order to simultaneously fit both DC I-Vs and AC conductances, Agilent EEFET3 utilizes asimple scheme for modeling the Idb current source whereby different values of the same

parameters can be used in the Ids equations. The DC and AC drain-source currents can be

expressed as follows:

Parameters such as VGO that do not have an AC counterpart (i.e., there is no VGOACparameter) have been found not to vary significantly between extractions utilizing DCmeasurements versus those utilizing AC measurements. The difference between the ACand DC values of Ids, plus an additional term that is a function of Vds only, gives the value

of Idb for the dispersion model

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where Idbp and its associated conductance are given by:

For Vds > VDSM and ,

For Vds < -VDSM and ,

For or ,

By setting the 7 high-frequency parameters equal to their DC counterparts, the dispersionmodel reduces to Idb= Idbp. Examination of the Idbp expression reveals that the additional

setting of GDBM to zero disables the dispersion model entirely. Since the Idbp current is a

function of Vds only, it will impact output conductance only. However, the current function

will impact both gm and gds. For this reason, the model is primarily intended to utilized

gm data as a means for tuning . Once this fitting is accomplished, the parameters

GDBM, KDB and VDSM can be tuned to optimize the gds fit.

Gate Charge Model

The Agilent EEFET3 gate charge model was developed through careful examination ofextracted device capacitances over bias. The model consists of simple closed form chargeexpressions whose derivatives fit observed bias dependencies in capacitance data. Thiscapacitance data can be obtained directly from measured Y-parameter data.

The capacitance data is remarkably self-consistent. In other words, a single qg function's

derivatives will fit both C11 data and C12 data. The Agilent EEFET3 gate charge expression

is:

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where

This expression is valid for both positive and negative Vds. Symmetry is forced through

the following smoothing functions proposed by Statz [4]:

Differentiating the gate charge expression wrt Vgs yields the following expression for the

gate capacitance C11:

where

The gate transcapacitance C12 is defined as:

The Agilent EEFET3 topology requires that the gate charge be subdivided between therespective charge sources qgc and qgy. Although simulation could be performed directly

from the nodal gate charge qg, division of the charge into branches permits the inclusion

of the resistances RIS and RID that model charging delay between the depletion regionand the channel. Agilent EEFET3 assumes the following form for the gate-drain charge insaturation:

which gives rise to a constant gate-drain capacitance in saturation. The gate-sourcecharge qgc can now be obtained by subtracting the latter from the gate charge equation.

Smoothing functions can then be applied to these expressions in saturation in order toextend the model's applicable bias range to all Vds values.

These smoothing functions force symmetry on the qg and qgc charges such that

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at Vgc = Vgy. Under large negative Vds (saturation at the source end of the device), qgy

and qgc swap roles, i.e:

The following continuous charge equations satisfy these constraints and are specified interms of the gate charge:

where f1 and f2 are smoothing functions defined by

and

The capacitances associated with these branch charge sources can be obtainedthrough differentiation of the qgc and qgy equations and by application of the

chain rule to the capacitances C11 and C12. The gate charge derivatives re-

formulated in terms of Vgc and Vgy are:

The branch charge derivatives are:

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where

When Vds=VDSO and VDSO>>DELTDS, the gate capacitance C11 reduces to a single

voltage dependency in Vgs. Similar to the Ids model then, the majority of the important

gate charge parameters can be estimated from a single trace of a plot. In this case, theplot of interest is C11-Vgs at Vds = VDSO.

The parameter definitions are illustrated in the following figure. The parameter DELTDSmodels the gate capacitance transition from the linear region of the device into saturation.LAMBDA models the slope of the C11-Vds characteristic in saturation. C12SAT is used to fit

the gate transcapacitance (C12) in saturation.

Agilent EEFET3 C11-Vgs Parameters

Output Charge and Delay

Agilent EEFET3 uses a constant output capacitance specified with the parameter CDSO.

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This gives rise to a drain-source charge term of the form

The drain-source current previously described in this section is delayed with theparameter TAU according to the following equation:

In the frequency domain, only the transconductance is impacted by this delay and thefamiliar expression for transconductance is obtained:

ym = gm • exp(-j • ω • TAU)

Gate Forward Conduction and Breakdown

Forward conduction in the gate junction is modeled using a standard 2-parameter diodeexpression. The current for this gate-source current is:

where q is the charge on an electron, k is Boltzmann's constant and T is the junctiontemperature.

The Agilent EEFET3 breakdown model was developed from measured DC breakdown dataand includes the voltage dependency of both gate-drain and gate-source junctions. AgilentEEFET3 models breakdown for Vds>0V only, breakdown in the Vds<0V region is not

handled. The model consists of 4 parameters that are easily optimized to measured data.The breakdown current is given by:

For -Vgd > VBR

For

Some care must be exercised in setting IDSOC. This parameter should be set to themaximum value attainable by Ids. This precludes the possibility of the gate-drain current

flowing in the wrong direction.

Scaling Relations

Scaling of Agilent EEFET3 model parameters is accomplished through the use of the MDIFparameters UGW and NGF and the device parameters UGW (same name as the MDIFparameter) and N. From these 4 parameters, the following scaling relations can bedefined:

where UGWnew represents the device parameter UGW, the new unit gate width.

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Scaling will be disabled if any of the 4 scaling parameters are set to 0. The new AgilentEEFET3 parameters are computed internally by the simulator according to the followingequations:

Equivalent Circuit

References

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W. R Curtice. "A MESFET model for use in the design of GaAs integrated circuits,"1.IEEE Transactions of Microwave Theory and Techniques, Vol. MTT-28, pp. 448-456,May 1980.P. C. Canfield, "Modeling of frequency and temperature effects in GaAs MESFETs"2.IEEE Journal of Solid-State Circuits, Vol. 25, pp. 299-306,Feb. 1990.J.M. Golio, M. Miller, G. Maracus, D. Johnson, "Frequency dependent electrical3.characteristics of GaAs MESFETs," IEEE Trans. Elec. Devices, vol. ED-37, pp. 1217-1227, May 1990.H. Statz, P. Newman, I. Smith, R. Pucel, H. Haus, "GaAs FET device and circuit4.simulation in SPICE," IEEE Trans. Elec. Devices, vol. ED-34, pp. 160-169, Feb. 1987.

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Agilent EEHEMT1 Model EquationsThis section describes the Agilent EEHEMT model equations used in IC-CAP.

Equations Index

Drain-Source Current

Dispersion Current (Idb)

Gate Charge Model

Output Charge and Delay

Gate Forward Conduction and Breakdown

Scaling Relations

Drain-Source Current

The drain-source current model in Agilent EEHEMT1 is comprised of various analyticexpressions that were developed through examination of gm vs. bias plots on a wide class

of devices from various manufacturers. The expressions below are given for Vds > 0.0 V

although the model is equally valid for Vds < 0.0 V. The model assumes the device is

symmetrical, and one need only replace Vgs with Vgd and Vds with -Vds in order to obtain

the reverse region (Vds < 0.0 V) equations. The gm, gds and Ids equations take on 4

different forms depending on the value of Vgs relative to some of the model parameters.

The Ids expression is continuous through at least the second derivative everywhere.

if Vgs ≥ Vg

else if Vgs ≤ Vt

else

where

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The following voltages define regions of operation that are used in the gm compression

terms:

For Vgs > Vc, the basic Idso, gmo and gdso relations are modified as follows:

for Vgs < Vb,

for Vgs ≥ Vb and b ≠ -1,

for Vgs ≥ Vb and b = -1

where

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In order to prevent gm from becoming negative at high gate-source biases, the following

restriction is placed on the parameter DELTGM:

The preceding relations for , and can now be substituted in thefollowing equations that model the current saturation and output conductance. Thisportion of the model can be recognized from the work of Curtice [1].

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These expressions do an excellent job of fitting HEMT I-V characteristics in regions of lowpower dissipation. They will also fit pulsed (isothermal) I-V characteristics. In order tomodel negative conductance effects due to self-heating, the thermal model of Canfieldwas incorporated [2]. With this final enhancement, the DC expressions for Ids and its

associated conductances become:

where

Qualitatively, the operation of the drain-source model can be described as follows:

The Vds dependence of the equations is dominated by the parameters VSAT, GAMMA,

KAPA, and PEFF. Isothermal output conductance is controlled by GAMMA and KAPA. Theimpact of GAMMA on output conductance is more significant near threshold. At Vgs=VCH,

the output conductance is controlled only by KAPA. The parameter PEFF provides acorrection to the isothermal model for modeling the self-heating effects manifested as anegative resistance on the I-V curves. The parameter VSAT represents the drain-sourcevoltage at which the current saturates and output conductance becomes a constant(approximately). The parameter MU also impacts the I-V curves in the gm compression

region, but its effect is second order. In most cases, the gm fit is more sensitive to the

parameter MU.

The overall impact of VCH on the I-V characteristics is second order at best, and manydifferent values of VCH will provide good fits to I-V plots. For most applicationsencountered, it is our experience that the default value of 1.0V is an adequate value forVCH. Similar to VCH, VDSO is a parameter that should be set rather than optimized. At V

ds = VDSO, the drain-source model collapses to a single voltage dependency in Vgs. It is

recommended that the user set VDSO to a typical Vds operating point in saturation. At this

point, many of the parameters can be extracted right off a Ids-Vgs plot for Vds=VDSO or,

preferably, a gm(DC)-Vgs plot at Vds=VDSO.

When Vds=VDSO and PEFF is set large (to disable the self-heating model), the significance

of the parameters VTO, VGO, GMMAX, VCO, VBA, VBC, DELTGM and ALPHA are easilyunderstood from a plot of gm(DC)-Vgs. GMMAX is the peak transconductance of the model

that occurs at Vgs=VGO. The parameter VTO represents the gate-source voltage where gm

goes to zero. Transconductance compression begins at Vgs=VCO. ALPHA controls the

abruptness of this transition while DELTGM controls the slope of the gm characteristic in

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compression. At Vgs=VCO+VBC, the linear gm slope begins to tail-off and asymtotically

approach zero. The shape of this "tail-off" region is controlled by the parameter VBA. Theparameter definitions are illustrated in the following figure.

Agilent EEHEMT1 gm-Vgs Parameters

Dispersion Current (Idb)

Dispersion in a GaAs MESFET or HEMT drain-source current is evidenced by theobservation that the output conductance and transconductance beyond some transitionfrequency is higher than that inferred by the DC measurements. A physical explanationoften attributed to this phenomenon is that the channel carriers are subject to beingtrapped in the channel-substrate and channel-surface interfaces. Under slowly varyingsignal conditions, the rate at which electrons are trapped in these sites is equal to the rateat which they are emitted back into the channel. Under rapidly varying signals, the trapscannot follow the applied signal and the high-frequency output conductance results.

The circuit used to model conductance dispersion consists of the elements RDB, CBS(these linear elements are also parameters) and the nonlinear source Idb(Vgs, Vds). The

model is a large-signal generalization of the dispersion model proposed by Golio et al. [3].At DC, the drain-source current is just the current Ids. At high frequency (well above the

transition frequency), the drain source current will be equal to Ids(high frequency) = Ids

(DC) + Idb. Linearization of the drain-source model yields the following expressions for y21

and y22 of the intrinsic Agilent EEHEMT1 model:

where

Evaluating these expressions at the frequencies ω = 0 and ω = infinity, produces the

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following results for transconductance and output conductance:

for ω = 0,

for ω = infinity,

Between these 2 extremes, the conductances make a smooth transition, the abruptness ofwhich is governed by the time constant τdisp = RDB • CBS. The frequency f0 at which the

conductances are midway between these 2 extremes is defined as

The parameter RDB should be set large enough so that its contribution to the outputconductance is negligible. Unless the user is specifically interested in simulating the devicenear f0, the default values of RDB and CBS will be adequate for most microwave

applications.

The Agilent EEHEMT1 Ids model can be extracted to fit either DC or AC characteristics. In

order to simultaneously fit both DC I-V characteristics and AC conductances, AgilentEEHEMT1 utilizes a simple scheme for modeling the Idb current source whereby different

values of the same parameters can be used in the Ids equations. The DC and AC drain-

source currents can be expressed as follows:

Parameters such as VGO that do not have an AC counterpart (i.e., there is no VGOACparameter) have been found not to vary significantly between extractions utilizing DCmeasurements versus those utilizing AC measurements. The difference between the ACand DC values of Ids, plus an additional term that is a function of Vds only, gives thevalue of Idb for the dispersion model

where Idbp and its associated conductance are given by:

for Vds > VDSM and KDB ≠ 0,

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for Vds < -VDSM and KDB ≠ 0,

for -VDSM ≤ Vds ≤ VDSM or KDB = 0,

By setting the 8 high-frequency parameters equal to their DC counterparts, the dispersionmodel reduces to Idb= Idbp. Examination of the Idbp expression reveals that the additional

setting of GDBM to zero disables the dispersion model entirely. Since the Idbp current is a

function of Vds only, it will impact output conductance only. However, the current function

will impact both gm and gds. For this reason, the model is primarily intended to utilized gm

data as a means for tuning

Once this fitting is accomplished, the parameters GDBM, KDB and VDSM can be tuned tooptimize the gds fit.

Gate Charge Model

The Agilent EEHEMT1 gate charge model was developed through careful examination ofextracted device capacitances over bias. The model consists of simple closed form chargeexpressions whose derivatives fit observed bias dependencies in capacitance data. Thiscapacitance data can be obtained directly from measured Y-parameter data:

The capacitance data is remarkably self-consistent. In other words, a single qg function's

derivatives will fit both C11 data and C12 data. The Agilent EEHEMT1 gate charge

expression is:

where

This expression is valid for both positive and negative V . Symmetry is forced through

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ds

the following smoothing functions proposed by Statz [4]:

Differentiating the gate charge expression wrt Vgs yields the following expression for the

gate capacitance C11:

where

The gate transcapacitance C12 is defined as:

The Agilent EEHEMT1 topology requires that the gate charge be subdivided between therespective charge sources qgc and qgy. Although simulation could be performed directly

from the nodal gate charge qg, division of the charge into branches permits the inclusion

of the resistances RIS and RID that model charging delay between the depletion regionand the channel. Agilent EEHEMT1 assumes the following form for the gate-drain charge insaturation:

which gives rise to a constant gate-drain capacitance in saturation.

The gate-source charge qgc can now be obtained by subtracting the latter from the gate

charge equation. Smoothing functions can then be applied to these expressions insaturation in order to extend the model's applicable bias range to all Vds values. These

smoothing functions force symmetry on the qgy and qgc charges such that

at Vgc = Vgy. Under large negative Vds (saturation at the source end of the device), qgy

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and qgc swap roles, i.e:

The following continuous charge equations satisfy these constraints and are specified interms of the gate charge:

where f1 and f2 are smoothing functions defined by

and

The capacitances associated with these branch charge sources can be obtained throughdifferentiation of the qgc and qgy equations and by application of the chain rule to the

capacitances C11 and C12. The gate charge derivatives re-formulated in terms of Vgc and

Vgy are:

The branch charge derivatives are:

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where

When Vds=VDSO and VDSO>>DELTDS, the gate capacitance C11 reduces to a single

voltage dependency in Vgs. Similar to the Ids model, the majority of the important gate

charge parameters can then be estimated from a single trace of a plot. In this case, theplot of interest is C11-Vgs at Vds = VDSO. The parameter definitions are illustrated in the

following figure.

The parameter DELTDS models the gate capacitance transition from the linear region ofthe device into saturation. LAMBDA models the slope of the C11-Vds characteristic in

saturation. C12SAT is used to fit the gate transcapacitance (C12) in saturation.

Agilent EEHEMT1 C11-Vgs Parameters

Output Charge and Delay

Agilent EEHEMT1 uses a constant output capacitance specified with the parameter CDSO.This gives rise to a drain-source charge term of the form

The drain-source current described previously, is delayed with the parameter TAUaccording to the following equation:

In the frequency domain, only the transconductance is impacted by this delay and the

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familiar expression for transconductance is obtained

ym = gm • exp(-j • ω • TAU)

Gate Forward Conduction and Breakdown

Forward conduction in the gate junction is modeled using a standard 2-parameter diodeexpression. The current for this gate-source current is:

where q is the charge on an electron, k is Boltzmann's constant, and T is thejunction temperature.

The Agilent EEHEMT1 breakdown model was developed from measured DC breakdowndata and includes the voltage dependency of both gate-drain and gate-source junctions.Agilent EEHEMT1 models breakdown for Vds > 0V only, breakdown in the Vds < 0V regionis not handled. The model consists of 4 parameters that are easily optimized to measureddata. The breakdown current is given by:

for -Vgd > VBR

for -Vgd ≤ VBR

Some care must be exercised in setting IDSOC. This parameter should be set to themaximum value attainable by Ids. This precludes the possibility of the gate-drain current

flowing in the wrong direction.

Scaling Relations

Scaling of Agilent EEHEMT1 model parameters is accomplished through the use of theMDIF parameters UGW and NGF and the device parameters UGW (same name as theMDIF parameter) and N. From these 4 parameters, the following scaling relations can bedefined:

where UGWnew represents the device parameter UGW, the new unit gate width.

Scaling will be disabled if any of the 4 scaling parameters are set to 0. The new AgilentEEHEMT1 parameters are computed internally by the simulator according to the followingequations:

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Equivalent Circuit

References

W. R. Curtice, "A MESFET model for use in the design of GaAs integrated circuits,"1.IEEE Transactions of Microwave Theory and Techniques , Vol. MTT-28, pp. 448-456,

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May 1980.P. C. Canfield, "Modeling of frequency and temperature effects in GaAs MESFETs"2.IEEE Journal of Solid-State Circuits , Vol. 25, pp. 299-306, Feb. 1990.J. M. Golio, M. Miller, G. Maracus, D. Johnson, "Frequency dependent electrical3.characteristics of GaAs MESFETs," IEEE Trans. Elec. Devices, vol. ED-37, pp. 1217-1227, May 1990.H. Statz, P. Newman, I. Smith, R. Pucel, H. Haus. "GaAs FET device and circuit4.simulation in SPICE," IEEE Trans. Elec. Devices, vol. ED-34, pp. 160-169, Feb. 1987.

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Agilent Root FET Model GeneratorThis section describes the following topics:

Introduction to Root FET Model Generator (mesfet)Using the Agilent Root FET Model (mesfet)References (mesfet)

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Introduction to Root FET Model GeneratorThis section documents the Agilent 85191A Agilent Root FET model generator software. Itprovides an example procedure that takes you step-by-step through a complete dataacquisition and model generation.

The complete procedure includes all the instructions needed to generate a new devicemodel by modifying the variable values in factory default tables. After you have set thesevariables, subsequent procedures are much faster.

Model Description

The Agilent Root FET model is a data-based model, rather than a physical or empiricalmodel. It generates a device-specific large-signal model directly from measured DC andsmall-signal S-parameter data, that accurately represents the terminal characteristics ofthe device. The model is constructed without circuit simulation or optimization. Use of S-parameter as well as DC data results in a model that can accurately predict nonlineardevice performance with frequency dispersion, as a model simulated with a single set ofnonlinear current functions cannot. The Agilent Root FET model predicts the deviceperformance as a function of bias, power level, and frequency. It allows circuits containingdevices for which measured data exists-but for which there are no good physical orempirical models-to be simulated.

The Agilent Root FET model works for MESFETs and HEMTs (MODFETs). It is scalable toallow simulation of devices with different geometries based on the characterization of asingle device. The present implementation is used for positive drain-source bias (Vds ≥ 0),which corresponds to the typical operating region.

Based on gate-current and power-dissipation device compliances you provide in software,the data acquisition system calculates the safe operating range for the device. Within thisregion, the model takes data adaptively at multiple bias points, depending on the specificnonlinearities of the device under test. Measurements are densely spaced in the mostnonlinear regions, such as at the knees of the IV curves and the onset of breakdown, andless densely spaced in the linear saturation region.

The model data set of internodal nonlinear current and charge components at each biaspoint is then mathematically generated and stored. The model is thus generated withoutthe usual need for simulation and optimization as required by all previous empiricalmodels. The Root FET model may thus capture nonlinear device behavior for any MESFETdevice for which measured data can be taken but for which there are no good physical orempirical models.

The data acquisition system sets the DC bias levels and controls the system hardware totake the DC and S-parameter measurements, based on your inputs. The model generatorprocesses the measured data and generates the lookup tables required by a circuitsimulator. It produces data files that are directly readable by the Agilent RF andMicrowave Design System (MDS). Both IC-CAP and MDS can be run simultaneously in theX Windows environment. During a simulation, the tabular state-function data from thegenerated Agilent Root FET model is interpolated using multidimensional spline functionsto emulate the terminal characteristics of the device.

Getting Started in IC-CAP

This example procedure assumes the following:

The system hardware has been set up and switched on.The calibration standards have been removed from their containers to allow them toreach ambient room temperature.The IC-CAP software has been properly installed on the computer.IC-CAP has been configured to recognize the system hardware, and the SMUs have

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been renamed as follows:

Rename the SMUs to correspond with the FET terminals.

Rename a medium-power SMU such as MPSMU1 as VG (gate supply)

Rename a high-power SMU such as HPSMU3 as VD (drain supply)

Rename the GNDU unit (which must be connected to the device source) asGND.

Launch the IC-CAP software and open the model file you need. The Agilent Root FETmodel file is under:

/examples/model_files/mesfet/HPRootFet.mdl

Then return to this section and continue with the procedure.

NoteDo not install the device yet. The procedure will instruct you to install it after extracting themeasurement port resistances.

Before you continue with the IC-CAP procedures, make a new directory in anappropriate location to store the data and model files that will be generated. Give thedirectory a name that will associate it with the device you are going to model. Usethe cd command to change to the new directory.

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Using the Agilent Root FET ModelThis section provides an example procedure that takes you step-by-step through ameasurement and model generation. The device used in this example was a GaAsMESFET, and the device data sheet was used for information on device characteristics andcompliance values. Values you use in generating your own device model will depend onthe particular characteristics of your device: use its data sheet (if available) as areference.

This example is provided as a starting point. It is a straightforward procedure that usesonly a subset of IC-CAP's total capabilities. The complete procedure documented gives allthe steps necessary to configure IC-CAP with the values required for preverificationmeasurements, parasitic extractions, and the main data acquisition. Once a model hasbeen developed for a particular device type, the built-in scaling feature allows you toapply it to any device with the same geometry and process. The modeling procedure thenbecomes more simple, and can be accomplished in a few easy steps.

NoteAlthough you will modify the variable values in factory default files during this procedure, do not underany circumstances change the names of any variables or setups. These names are used by the software inthe data acquisition and model generation process.The example procedure measures the FET under test ina common-source configuration.

The example procedure gives detailed instructions on how to:

Initialize device parameters.Measure and extract the system measurement port series resistances.Make a DC measurement to preverify device DC performance (optional).Calibrate the network analyzer for both swept and CW measurements.Make an S-parameter measurement to preverify device performance at highfrequencies (optional).Measure and extract the ideality factor.Measure and extract the device parasitic resistances and inductances.Set up and initiate the main data acquisition. Plot the measured data.Set up and initiate the model generation, first selecting a starting point for contourintegration. Plot the calculated state functions.Verify the model against measured data.Store the data and model files for circuit simulation in Agilent MDS.

Where necessary, other sections are cross-referenced at appropriate points in theprocedure, so that you will have the information you need for system hardware setup andcalibration at the proper times.

NoteMeasurement values and measured data are specific to individual devices. Information and data areprovided here as examples and guidelines, and are not intended to represent the only correct results.

The procedure provides guidelines on setting values to measure your device. However, thevalues you use will be based on your knowledge of your device and on information in itsdata sheet, as well as on the guidelines presented here: they may or may not correspondwith the example values.

The illustrations of plotted data are provided as visual examples of possible results. Theyare not intended to represent a single device, nor do they necessarily correspond with thevalues given in the procedure. The plots can be used to check the reasonableness of yourown data, which should appear similar in shape but not necessarily coincident in values.

The DUTs and Setups

The Model window is the central access point for the measurement and model generationprocedures. The Model window includes the DUT/Setup panel and the file tabs to access

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the Model Parameters table, the Model Variables table, and other IC-CAP features.

The illustration shows the DUT/Setup panel for this model. The DUTs (for examplepre_verify), indicated by the inverted triangles, are groupings of similar measurementsetups used to extract related model parameters. The setups (for example idvd_vg)contain the information used to define the inputs and outputs for each measurement, aswell as their measurement hardware configurations and their associated transforms andplots.

The DUT/Setup Panel

The MACRO list provides access to functions that combine certain groups of IC-CAPoperations into single operations.

Initializing Device Parameters

You begin the procedure by entering certain key values for the device and the modelgeneration, and giving the device an identifying name. For this you use theinit_parameters macro. When this macro is executed, it also initializes internal programfunctions that are essential in the model generation process, and it provides annotationsfor the data plots.

Click the Macros tab, and a list of macros is displayed.1.In the Select Macro list, select init_parameters, and Execute.2.A series of dialog boxes is displayed, asking you to input appropriate values for your3.device under test. Each time you enter a value, click OK or press Enter.Enter the extraction frequency. This is the CW frequency you will use for the data4.acquisition, and must be the same as the frequency of your CW calibration. If youknow the fundamental frequency of anticipated operation, use that. If not, a goodrule of thumb is to use a value such that fT/5 ≤ fextract ≤ fT/2.

fT of a device is given by the equation:

Enter the forward conducting gate current in amps. This is typically 200 mA per mm5.of gate width.Enter the reverse gate breakdown current in amps. This is typically 20 mA per mm of6.gate width.Enter the number of gate fingers.7.Enter the width of the device gate, in meters.8.Enter a name to identify the device under test.9.When you finish responding to the questions in the dialog boxes, the macro will close.10.

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CautionDo not edit the init_parameters macro. Especially, do not make any changes below the line (asinstructed in the macro). The information below the line is executable code; modifying it can causeproblems in the program.

Parameters Table

The illustration shows the Model Parameters table, with initial values for the extrinsicparasitic capacitances and inductances. The table is presented so that you can entervalues for these extrinsic parasitics based on your knowledge of the device, or onestimates, or on measurements of the open fixture. In addition, you can set limits byentering minimum and maximum values for each parameter. Parameter values that areoutside their limits are clamped to their minimum or maximum values.

Model Parameters Table

To change a value in the Parameters table, move the mouse pointer over the currententry and click left to highlight it, then type in a new value.

The default for all the c values is 0.000. A reasonable capacitance value to enter for a padon a wafer might be 50 fF.

The _l_ext.1_ values are the bond inductances for the three terminals. The default valuefor all three is 0.000. If you know or can estimate the bond inductances for your devicebased on wire length or grid size, enter appropriate values.

Extracting the Measurement Port Series Resistances

This procedure need be performed only following initial installation of the system and ifchanges are made in the system hardware.

The procedure measures a short circuit at the normal device measurement interfaceplane. IC-CAP controls the DC source/monitor to force a gate current and monitor the gatevoltage. The primary measurement is at port 1, and the port 2 measurement issynchronized to the port 1 measurement. You set the measurement parameters bydefining the instrument states and the DC input values, as explained in the next pages.

The software calculates the series resistances from the outputs of the bias networks to theinputs of the device under test. The resistance values are then incorporated into themodel file, and their effects are removed from the device response during the modelingprocess. (The default port resistance for both port 1 and port 2 is 0Ω.)

Note that the first part of the procedure differs for probe station and in-fixturemeasurements.

Setting Up for the Measurement

If you are using a probe station, position an impedance standard substrate (ISS) on1.the chuck. Place both the port 1 and port 2 probes on a short circuit standard.If you are using a fixture, insert the short from the in-fixture calibration kit.2.From the DUT/Setup panel select the r_series setup.3.

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Defining the DC Source/Monitor Instrument State

Set the instrument option Integ Time to M (medium) for this measurement.

Setting the r_series Inputs

Use the following guidelines for setting the ig and id inputs (in most cases, the defaultsettings should suffice):

For the ig input

Set To

Mode I

To Node G (gate)

From Node GROUND

range Start and Stop current values that define a current range within the limits of the bias network(see Caution below)

of Points sufficient to make several measurements across the current range1.

Compliance As high as 5 to 10V. With a current input, compliance refers to voltage. You can set thecompliance as high as 5 to 10V because the device is not yet connected.

The Step Size will be set automatically.

For the id input

Set To

To Node D

Unit VD

Compliance same as ig

SweepType SYNC

MasterSweep

ig (so that the id sweep is synchronized to the ig sweep, with a 0.0 Offset)

Ratio 1.000 (so that the id sweep is synchronized to the ig sweep)

CautionThe bias networks can be destroyed if IC-CAP measurement current values are set too high! Be sure youknow the maximum current ratings of your bias networks, and do not set current values beyond theselimits. (Standard Agilent bias networks are rated at 0.5 amp.)

The Unit name must match the name of the SMU connected to the device gate(probably VG). This is also the SMU unit name set in the Hardware window. The default settings for the Outputs should not be changed.

Measuring and Extracting

Select Measure/Simulate > Measure.1.When the measurement is complete, the Measuring light on the DC source/monitor2.goes out and the IC-CAP wristwatch icon goes away.Select the Extract/Optimize tab.3.Select compute_rseries > Execute. The transform calculates the port series4.resistances from the measured data and inserts the values into the model variabletable as r1s and r2s.

Installing the Device

CautionGround yourself with an antistatic wrist strap to reduce the chance of electrostatic discharge.

Install the device carefully on the probe chuck or in the fixture. Be sure to handle thedevice as little as possible, to avoid damaging it. Once the device is in place, avoidbumping the test station.

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CautionRemove any high-intensity light sources such as microscope light before taking a measurement. Onesimple method of blocking light is to place an opaque box on the fixture directly above the device.

Preverifying the Device DC Data

This procedure uses the idvd_vg setup to measure drain current with respect to drainvoltage, at several values of gate voltage. The drain voltage is swept from 0V to the upperlimit of its normal operating range. This is an opportunity to take a first look at the deviceperformance and explore its characteristics. This also lets you select the most appropriatemeasurement range for the main data acquisition and other measurements.

In addition, this is a quick way to verify that the device DC characteristics are good,before starting a complete data acquisition and model generation. The data from thismeasurement can also be used for later comparison with data predicted by the generatedmodel. It is not necessary to do the preverification measurement every time you performa model generation, especially if you are using a data sheet.

NoteIf you do not wish to preverify either the DC or S-parameter performance of the device, you can skipahead to the section Measuring and Extracting the Ideality Factor.

Defining the DC Source/Monitor Instrument State

Use the same instrument option settings as you used for the r_series measurement.

Setting the idvd_vg Inputs

This procedure defines the input signals to be applied to the device under test for the DCpreverification measurement. The actual settings you use will be dependent on thecompliance limits for both the device and the SMUs/bias networks, and on the range ofmeasurements you wish to take. Since this measurement is intended only to preverify thedevice, the values can be quite conservative and need not stress the device to theboundaries of its performance.

If you are measuring a series of devices of the same type and have already set the inputs,go directly to Measuring and Plotting. Otherwise, perform the following steps:

Select the idvd_vg setup.

For the vd input

Set To

Mode V (voltage)

Compliance No greater than the maximum breakdown current value for the device.(You set compliancevalues to limit SMU output voltage or current and thus prevent damage to the device under test,as well as to the SMUs, bias networks, and probes if used. With a voltage input, compliancerefers to current)

SweepType

LIN (to provide a linear voltage sweep from start to stop voltage values)

range Start at 0.0

Stop at or below the upper limit of the device's normal operating range

# of Points to a value sufficient to clearly display the results

Note: The Step Size is calculated automatically in software from the start/stop values andnumber of points

For the vg input

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Set To

Mode V (voltage)

Compliance No greater than the maximum allowable gate current value (You set compliance values to limitSMU output voltage or current and thus prevent damage to the device under test, as well as tothe SMUs, bias networks, and probes if used. With a voltage input, compliance refers to current)

SweepType

LIN (to provide a linear voltage sweep from start to stop voltage values)

range Such that Start, Stop, and # of Points will yield three to five measured values (points), in a rangefrom approximately Vgs=Vpinchoff to Vgs=0V. Set Start at a value close to Vpinchoff, but not soclose that the curve will be difficult to discern. Set Stop to 0.

The Unit names must conform to the names set in the Hardware window.

They must also correspond with the actual SMU connections from the Agilent4142. Since the source is grounded, only the drain and gate inputs need to beset.

CautionDo not set the value of Vg high enough to damage the device.

The default settings for the Outputs should not be changed.

Measuring and Plotting

This procedure triggers the DC source/monitor measurement and monitors the results.

NoteBefore making the DC measurement, manually put the network analyzer in hold sweep mode by pressingSTIMULUS > MENU > MORE > HOLD.

Select the Plots tab.1.Select Display All (to the left of the setup window). Two plots are displayed.2.Select the Measure/Simulate tab, then select Measure. When the measurement is3.complete, the Measuring light on the DC source/monitor goes out, the IC-CAPwristwatch icon goes away, and the measured data is displayed in the plot windows.

Example Measured pre_verify id_vd Data

Check the id_vd plot. The data displayed should resemble the previous figure, with1.the lowest curve close to the X-axis to show the pinch-off characteristics. If the dataindicates the device is not operating in its normal range, go back to the inputs andchange the gate voltage values. (If more than one curve is low, change vg Start to ahigher value. Or if all the curves are high, change vg Start to a lower value.) Thenrepeat the measurement.Check the ig_vd plot. The data should resemble the following figure, with smooth2.curves and no significant spikes present on the traces.

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Example Measured pre_verify ig_vd Data

If the measured data looks wrong for your device, check the probe contacts, the bias1.connections, and the measuring instruments. Make sure the device is orientedproperly, with the right ports connected to the right terminals. If none of theseresolves the problem, the device may be defective. For example, if all the curves aresuperimposed, the gate may be shorted.You can save the measured data for later comparison with data predicted by the2.extracted model. To do so, select File > Save As and a filename with the suffix .set(for example dc_test.set). Then click OK.Close the plots.3.

Calibrating the Network Analyzer

It is important to calibrate the network analyzer before you perform any S-parametermeasurements. Good calibration of the network analyzer is critical to a good measurementand model generation. Without a good calibration, the model will be inaccurate.

The Agilent Root FET measurement procedure requires two network analyzer calibrationsets, a swept broadband cal and a CW cal. The broadband cal is used for the S-parameterpreverification measurement. The CW cal is used for the parasitics extraction and themain data acquisition.

Preverifying the Device S-Parameter (AC) Data

This procedure uses the s_vgvdf setup to measure S-parameters across a calibratedfrequency range, with the drain bias voltage swept from 0V to the upper limit of thenormal device operating range, and several values of gate bias.

The procedure can be used as a quick check that the device performance is good at higherfrequencies, before you do a complete data acquisition and model generation. It is notnecessary to do the preverification every time you generate a model, especially if you areusing data sheet values.

NoteThe frequency range and number of points set for the Input must correspond with the swept broadbandcalibration of the network analyzer, or the calibration will be invalid.

Defining the Instrument States

Select the Instrument Options tab and follow the steps described in the sectionInstrument States for Swept Measurements (measurement) (for an Agilent 8510-basedsystem), with the exceptions noted below.

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Because you used a frequency list cal rather than a swept frequency cal, note thesedifferences:

Be sure the instrument states you set for the network analyzer correspond with thevalues you set in your calibration.Set Use Fast CW to No.Be sure to set the averaging factor the same as in your calibration.Set Cal Type (SHN) to H for hardware.Set Cal Set No to the cal set where you stored your broadband frequency listcalibration.Set Use Linear List to Yes.

Setting the s_vgvdf Inputs

This procedure defines the input signals from both the DC source/monitor and the networkanalyzer for this measurement.

Since this measurement is intended only to preverify the device, the values can be quiteconservative and need not stress the device to the boundaries of its performance.

Select the s_vgvdf setup.1.Set the vd Compliance no greater than the maximum breakdown current value for2.the device.Set the vg Compliance no greater than the maximum allowable gate current value.3.Set the vd range with a Start value of 0.0, and a Stop value ≤ the upper limit of the4.device's normal operating range. For # of Points, 3 is sufficient to display the datawhile giving fast results.Set the vg range (Start, Stop, and # of Points) to measure at about three different5.bias points, in a range from approximately Vgs=Vpinchoff to Vgs=0V.Set the freq Mode to F, Sweep Type to LIN, and Sweep Order to 1.6.Set the freq Start and Stop values to correspond with the frequency range of the7.broadband frequency list calibration you performed.Set the # of Points to correspond with the calibration.8.

NoteIf you set a MHz value, use MEG not M, because IC-CAP is not case-sensitive and interprets both mand M as milli.

Measuring and Plotting

NoteBefore performing the S-parameter measurements, manually take the network analyzer out of hold sweepmode. Press STIMULUS > MENU > MORE > CONTINUAL on an Agilent 8510, or MENU > TRIGGER MENU >CONTINUOUS on an Agilent 8753, to initiate continuous sweep.

Select the Plots tab.1.Select Display All. Two S-parameter plots are displayed.2.Select Measure/Simulate > Measure.3.Check the S-parameter plots. The data displayed should be typical for your device.4.If the results are unexpected, recheck the values you set in the inputs andinstrument options. In particular, be sure the instrument states and input stimulussignals match the values set in the network analyzer calibration.If you change the inputs or instrument states, repeat the measurement. If the datastill looks abnormal, the device may be defective and may need to be replaced withan acceptable one.To save the measured data if you wish, select File > Save As, type in an appropriate5.filename (for example spar_test), and click OK.

If you are satisfied with the measured data for your device, continue with the procedures.

Measuring and Extracting the Ideality Factor

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It is necessary to extract the ideality factor so that the model generator can use it tocalculate and de-embed the gate diode resistance, Rg, where n is the coefficient thatmultiplies Vthermal in the ideal diode equation. The diode resistance is approximated by the

equation:

where n is the ideality factor, Vth is Vthermal (0.025V at room temperature), and Ig is the

gate current.

In this setup, the FET is configured with both the gate-source and gate-drain diodejunctions strongly forward biased and intrinsic Vds=0. The drain current is set to exactlyone-half the gate current, to force Is=Id, and the drain current is synchronized to the gatecurrent. This makes the intrinsic Vds equal to zero, removing the channel resistance, andthe device can thus be modeled as a T-network. The gate current is swept from zero tomaximum, and Ig is measured as a function of Vg.

The inputs you set in the following procedure configure the FET as shown.

FET Bias Configuration for Ideality Measurement

Defining the DC Source/Monitor Instrument State

Follow the same process you used in the r_series and idvd_vg measurements. Use thesame settings.

Setting the ideality Inputs

Most of the input parameters for this measurement are factory preset and should not bechanged.

Select the ideality setup.1.The voltage Compliance can be set quite high for both ig and id, because the current2.will be forced only up to the maximum gate current limits set in the init_parametersmacro.The ig Sweep Type must be set to LOG scale, to allow measurement of the inherently3.exponential distribution of points.The id Sweep Type must be set to SYNC, to synchronize the drain current to the gate4.current.The purpose of the Start and Stop settings for ig is to force current from 0 amps to5.maximum, exercising the diode junction to include the region of its exponentialbehavior. Stop must be set to IFwd, which is the forward conducting gate currentcompliance. Start must be set equal to IFwd divided by some large number between1000 and 100000.When the ig Sweep Type is set to LOG, the input table automatically adds the fieldsDec or Oct and Total Pts in place of Step Size.Dec or Oct refers to a decade or octave log scale for the plotted data. The correct6.

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setting for this measurement is Dec.To set the number of points, you can enter either a # of Points per decade, or a Total7.Pts across the sweep.When the id Sweep Type is set to SYNC, the input table automatically adds fields forRatio, Offset, and Master Sweep.The id Ratio must be set to -500.0m to make the drain current exactly -1/2 the gate8.current.Offset must be set to 0.000.9.The id Master Sweep must be set to ig to synchronize Id to Ig.10.The Outputs are factory set, and should not be changed.11.

Measuring, Extracting, and Interpreting the Results

This procedure makes the measurement and computes the ideality factor from the results.The procedure explains how to check the measured data and computed ideality, andoverride the computed value if appropriate.

Select the Plots tab.1.Select the n_vs_vg plot, and Display Plot.2.Select Measure/Simulate > Measure. Check the plot of n (ideality) as a function3.of Vg. The displayed trace should resemble the following figure. Note that n iscomputed as the minimum value along the linear region of the logarithmicallydisplayed curve, and should be a value between 1 and 2.

Example n_vs_vg Ideality Plot

Select the Extract/Optimize tab.1.Select compute_N > Execute. The transform calculates the ideality factor from the2.measured data, and puts the value into the extr_para DUT variable table. You canview the DUT variable table by selecting extr_para > DUT Variables.You can check the ideality factor in the variable table against a measured value on3.the trace. Put the mouse pointer at a selected point on the linear portion of the trace,click the middle mouse button, and a readout of the Y-axis value at that point will bedisplayed. (Note that the linear region of the measurement is the region where the R

diode equation given under Measuring and Extracting the Ideality Factor applies.)

If the n_vs_vg plot looks significantly different from the illustration, it may benecessary to modify the transform or the computed value, as explained in thefollowing steps.If noise is present on the trace below the linear region of the curve, n may have been4.computed as the minimum value of the noise. In this case, go back to Inputs andchange the ig Start value from IFwd/10000 to IFwd/1000 to start the measurementat a value of current above the noise level. Execute the compute_N transform again,observing the change in the plot and in the ideality value in the variable table.If no measured linear region is shown on the trace, a good ideality factor cannot be5.computed from it. In this case, you will need to manually enter a value of 1 or 0 for

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ideality. (In the Rdiode equation, the nVth term is relatively small compared with Ig. If

a good ideality factor cannot be computed, it is best to eliminate the contribution ofthe nVth term by using an n value of 0.)

To change the ideality factor in the variable table, move the mouse pointer over the6.value and click left to highlight it, then type in the new value.The illustration below is a typical ig_vs_vg Plot.7.

Example ig_vs_vg Ideality Plot

Measuring and Extracting Parasitic R and L Values

This procedure performs an S-parameter measurement at a single CW frequency, with theFET in the same configuration as for the ideality measurement. Drain current is set to onehalf gate current, to force Is = Id = -1/2 Ig. This measurement is performed at the sameCW frequency as the main data acquisition, using the same network analyzer CWcalibration.

FET Bias Configuration for parasitics Measurement

Defining the Instrument States

Set the Cal Set No to the cal set or register where you saved your broadband calibration.The procedures in this manual use cal set #1.

Setting the parasitics Inputs

Most of the input values for this measurement are factory preset and should not bechanged.

Select the parasitics setup.1.Set the voltage Compliance for both ig and id to any reasonable values. The values2.can be quite high because the current is limited by the forward conducting gatecurrent value you set in the init_parameters macro.The Sweep Type is set to CON (constant) for both ig and id.3.The ig Value must be set to IFwd, (the forward conducting gate current value you set4.in the init_parameters macro).The id Value must be set to -IFwd/2, to force Is = Id.5.

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Under freq, the Mode must be set to F and the Sweep Type to LIN (linear).6.Set the freq Start, Stop, and # of Points to correspond with the swept frequency7.calibration you performed.

Measuring and Extracting

In the parasitics setup select Measure.1.When the measurement is complete, select the Extract/Optimize tab.2.Select extract_parasitics > Execute. The transform calculates the parasitic R and3.L values from the measured data.

Setting Up the Main Data Acquisition

This sets up the values for the main measurement procedure, which takes the data fromwhich the model is generated. The procedure measures S-parameters at a calibrated CWfrequency, across a range of drain and gate bias voltages, with the gate forward biasedand intrinsic Vds = 0. It takes adaptive measurements, densely spaced in the mostnonlinear regions such as at the knees of the I-V curves and at the onset of breakdown,and less densely spaced in the linear saturation region. The number of data pointsmeasured depends on the nonlinear behavior of the device and on the measurementconditions you set up.

Some knowledge of the device characteristics is needed in order to enter validparameters. The data you measured in the DC and S-parameter preverifications may beuseful in determining appropriate values for your device. Do not exceed maximumallowable values. Perform the steps in the following paragraphs.

Once you have initiated the transform, the data acquisition procedure takes approximately1 to 2 hours to run before your interaction is needed again. The data acquisition rate isapproximately 700 points per hour.

Defining the Instrument States

The instrument states for the main data acquisition are set in the dc_bias and ac_biassetups.

CautionDo not change the Inputs in the dc_bias, ac_bias, or create_mdl setups. Their function is not the same asin the other setups. They contain factory-set information essential to the program, and they must not bechanged.

Select the dc_bias setup.1.Select the Instrument Options tab to display the DC source/monitor instrument2.states.Set instrument options to the same as for the DC preverification. 3.Set Use User Sweep to No.4.Select the ac_bias setup.5.Set the instrument states the same as for the parasitics measurement, using the6.same network analyzer CW frequency calibration.Set Use User Sweep to Yes and Use Linear List to Yes.7.Set the Cal Set No to the cal set where you stored your CW calibration.8.

Setting the data_acquisition Variables

You set the values that define the measurement and model generation in thedata_acquisition and model_generator transforms in the create_mdl setup. Based on yourinformation, IC-CAP characterizes the device within a subset range of the bias plane (Vd-Vg plane). This range is typically larger than the normal safe range for long-term DCdevice operation specified in the data sheet. In other words, the device is briefly pushedbeyond its long-term normal DC operating range. This is required by the model for

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simulating large-signal AC and transient pulsed operation, where the instantaneousvoltages can temporarily exceed the boundaries of long-term safe DC operation.

Select the create_mdl setup.1.Select the Extract/Optimize tab, and the create_mdl transforms are listed.2.Select data_acquisition to display the table of variables used in the data acquisition3.transform (figure below).

Variables in the data_acquisition Transform*

Follow the steps below to enter variable values appropriate for your device.1.For Power level, enter the total maximum power dissipation value. Typically this2.should be 2 watts per mm of gate width for devices up to 1 mm.For I_Brk, enter the reverse gate current breakdown value, typically 20 mA per mm3.of gate width.For I_Fwd, enter the forward conducting gate current, typically 200 mA per mm of4.gate width.The next four voltage values define hard limits to the measurement domain. The5.voltage values are set well beyond the normal device operating range to explore thedevice's boundary response. If the values are set too conservatively, data will not bemeasured in the nonlinear areas of breakdown and maximum forward conduction. Ifthis occurs in the measurement, return to this table and change the voltage values.Reduce the minimum values and increase the maximum values.Min Vd should typically be slightly negative, to allow data to be taken slightly beyond6.the bounds of the model so that it possible to properly extrapolate beyond the data.Max Vd should typically be slightly higher than any anticipated breakdown voltage.7.Min Vg should typically be several volts lower than Vpinchoff.8.Max Vg should typically be greater than the voltage required to achieve the9.maximum fundamental gate current.For Min step, enter a value to define the step size between densely-spaced10.measurements.For Max step, enter a value to define the measurement step size where you expect11.the data to be relatively linear and you do not need densely-spaced measurements.For Vp, enter the gate pinch-off voltage where drain voltage = 0V.12.Delta defines a voltage range below Vpinchoff, where a high density of Vgs13.measurements is needed due to the nonlinear decrease in drain current at pinch-off.A typical value for Delta is 2 volts.Vdiode defines a voltage above which high-density measurements are needed,14.because of nonlinearities caused by the increase of gate current in diode junctionforward conduction mode. A typical value for Vdiode is between 0V and the diodejunction turn-on voltage.Eps (Epsilon) is used to predict the next point to be measured, and thus control15.automatic data acquisition step size. Increasing the value of epsilon decreases thesensitivity of the automatic data acquisition.For Noise thresh, enter a current threshold value for both drain current and gate16.

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current below which you do not need closely-spaced measurements. The automaticstep-size algorithm is not used below the Noise thresh value, where measuredcurrents are sampled at the maximum step size.Do not make Noise thresh so small that it measures numerous points below pinch-off, wasting measurement time and storage capacity. On the other hand, do notmake it too large. A typical value is 5.0x10^-7^ amps per mm.For SMU Compl, enter the drain SMU maximum current compliance value in amps.17.This is the maximum output current capability of the Agilent 4142B plug-insource/monitor unit (SMU) supplying the drain terminal. In the example procedure,this is VD. For the Agilent 41420A high-power SMU, the compliance is 1A; for theAgilent 41421B medium-power SMU, the compliance is 100 mA.

CautionAlso be aware of the current ratings of your bias networks, and do not set current values beyondtheir specified maximum limits. It is quite possible to destroy the bias networks, and the probes, byapplying current values beyond the specified limits. (The standard bias networks for the Agilent85122A/85123A parameter extraction systems are rated at 0.5 amp.)

You can save the values in the data_acquisition transform. Choose File > Save As18.and select Transform as the File Type. Type an appropriate filename, and click OK.The file is saved with the suffix .xfm for transform.

Performing the Data Acquisition Measurement

This procedure performs the measurement you defined. Once you initiate the transform,the data acquisition takes approximately 1 to 2 hours to run before your interaction isneeded again. The data acquisition rate is approximately 700 points per hour. The numberof data points measured depends on the nonlinear behavior of the device and on themeasurement conditions you set up.

In the create_mdl setup select the Extract/Optimize tab.1.Select the data_acquisition transform, and Execute.2.

CautionDo not perform data acquisition more than once. This will write over the existing data, and will usemore time and memory.

If you do attempt to perform data acquisition after the measurement has already3.been done, a dialog box will alert you that a measurement file exists. You then haveseveral choices: If you do not need the data in the current file you can click OK orpress Enter to overwrite it. Or you can abort your new measurement by selectingCancel. Or if you wish to save the measured data and perform another dataacquisition, go to a UNIX window, change directories if necessary, find the fileMeasured.data, and rename it with another appropriate name, then continue with thedata acquisition.Ignore this message if it occurs: CAUTION: CALSET X STATE MAY BE INVALID.During the data acquisition, a running message in the Status window indicates the4.approximate percentage of completion.When the process is complete, a message similar to the following is displayed:5.

INITIAL Extraction Results

Max_num = 66.00

Max_row = 49.00

The numbers are part of the internal function of the program, and irrelevant inuser interaction with the program. They are associated with the maximumnumber of points for a given Vgs, and the number of Vgs steps.

Plotting the Measured Data

The plots in the create_mdl setup provide graphical outputs of the data acquisition andmodel generation. For hardcopy output, black and white can be reversed for fasterprinting and easier reading on paper, as explained here.

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If you wish to plot data from a previously stored data set, you will need to perform thesteps explained under To Plot an Earlier Data Acquisition. Otherwise, follow these steps.

Viewing and Printing the Plots

Select the plots tab.1.Select the plot of your choice, and Display Plot.2.You can augment the annotation of a plot by specifying header and footer labels you3.wish to print with the data. However, it is essential not to change the Y data inputfields.To change a plot's annotation, go to the Header or Footer lines in the plot definition.4.You can type a label of your choice in the header or footer input field (right side ofthe definition table). Then select Options > Update Annotation, and your label isadded to the plot.

NoteChanging the Y Data n input fields can cause anomalies in the measurement and modeling results.

If you wish to exchange the black and white in a plot for better hardcopy quality,5.select Options from the plot menu, and Exchange Black_White from the pull-downmenu. You can also change from colored traces to all black by selecting Options >Color. This is particularly useful if one of the traces is a light color such as yellow,which may not show well against a white background.To get a hardcopy of a plot, from the plot menu select File > Print Setup. Enter the6.name of a printer and make any other changes to the printer/plotter setup you wish,then click OK.If you have your printer setup completed, select File > Print.7.

To Plot an Earlier Data Acquisition

If you wish to view data from a previously stored Agilent RootFET data acquisition, youwill need to perform these additional steps to bring the data into this model file anddisplay the plots.

From the IC-CAP main menu select File > Change Directory. Type in the pathname1.of the file where your data is stored, and click OK.Select the create_mdl setup.2.From the Plots tab, select the plot of your choice, and Display Plot. The displayed3.plot window will be blank and an error message will be displayed. This is not aproblem. Click OK in the error message window and the error will be erased.Now select Display Plot again, and the plotted data will be properly displayed. (The4.first time you selected Display Plot, an internal function re-initialized the data fromthe changed directory.)

The following figures illustrate the data measured by the data_acquisition transform for anexample device.

Id_vd plots the DC measurement of drain current Id as a function of Vds for differentvalues of Vgs (figure below).

Example Id_vd Data

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If you are not satisfied with the bias range of the measurement, make the necessarychanges to the values of Min Vd, Max Vd, Min Vg, and Max Vg.

Ig_vd plots the DC measurement of gate current Ig as a function of Vds for differentvalues of Vgs. The following figure illustrates an example of this data. Theconcentration of traces around Vgstart may be unfamiliar but is correct for the verystrongly forward-biased conditions.

Example Ig_vd Data

Y11i plots the imaginary data for Y11.Y12i plots the imaginary data for Y12.Y21r plots the real data for Y21.Y22r plots the real data for Y22.Vd_Vg plots the distribution of test data in the Vgs-Vds plane. It shows how the datais taken adaptively depending on the device nonlinearities. More test data is takenwhere the device characteristics change rapidly such as at the knees of the I-Vcurves and the onset of breakdown, and less in the linear saturation region. Thefollowing figure illustrates an example of this data.

Example Vd_Vg Data

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If you are satisfied with the measured data for your device, proceed to the modelgeneration. Be sure the limits of the measurement domain are adequate: the domainshould extend beyond the normal operating range of the device. If the measured datadoes not show the limits of device behavior, you may wish to redefine the voltage rangesyou set in the init_parameters macro, using values that are less conservative.

Generating the Model

This procedure calculates the model parameters from the measured data, and generates acorresponding model for the device. The model nonlinear functions are calculated bycontour integration, therefore you must provide the program with a starting point for thecontour integration.

If you are generating a model from a previously stored data set, perform the steps listedlater in this procedure under "To Generate a Model Using Data from an EarlierMeasurement."

Computing the Parasitics for the Model Generation

An earlier part of the procedure calculated the intrinsic parasitic resistances of the deviceand entered them in the file Para.data. Now this procedure updates the data and givesyou the opportunity to override the calculated values and enter values of your own if youbelieve they are more appropriate.

Select the main DUT, and the DUT Variables tab. A variable table is displayed,1.showing current values for the intrinsic parasitic resistances and inductances, as wellas other variable values. The figure on the next page illustrates the DUT variablestable.If you have reason to change any of the parasitic values, you can change them in this2.variable table. For example, if you have calculated the parasitic values by anothermethod, such as from material measurements of by using a different algorithm, youmay prefer to use those values.Or based on the model generation results plotted later in the procedure, you may3.wish to return to this step and modify values, then perform the transforms again.To change a parasitic value in the variable table, move the mouse pointer over the4.current entry and click left to highlight it, then type in a new value.Do not change any of the other variable values in the table besides the R and L5.values. The other variables listed are internal functions necessary to the program,and can be ignored. Do not change them.If you make any changes to the parasitic values in the table, do not execute the6.compute_parasitic transform.

Variables Table in the main DUT

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If you do not wish to make changes to the parasitic values in the table, select the1.compute_parasitic transform, and Execute. You will probably observe changes inthe parasitic values in the table.

NoteYou can copy the variable table by selecting Detach to display it in a separate window. Resize thewindow and move it to a convenient place away from the central work area.

Setting the Starting Point for Contour Integration

NoteFor the modeled nonlinear functions to be valid, contour integration must be done in the normal operatingrange of the device. Outside the range, the results will be very different and less accurate. The furtherfrom the operating range, the less accurate the model will be.

Use these guidelines to set the starting point of contour integration:

The starting point should be set at an intersect of Vd and Vg that is within the1.saturated class A operating range of the device, where drain voltage is beyond theknee and less than breakdown, and gate voltage is between zero and Vpinchoff.If you know Vpinchoff and Vbreakdown, set:2.

Vpinchoff < Vg_start < 0and0 < Vd_start < Vbreakdown

orVg_start = Vpinchoff/2andVd_start = Vbreakdown/2

NoteTo generate a good model, make sure sufficient data points are available around the Vg,Vdpoints chosen for the starting point of the contour integration. Before running the modelgenerator, look at the Id_Vd plot under the create_mdl setup. Use data markers to see thediscrete points at which data was taken. The values you choose for the Vg,Vd values forcontour integration should be well within the data space over which data was taken. Note thatthis will be bias value at which the best fits are achieved for the Root Model.

Setting the model_generator Variables

Select the create_mdl setup.1.Select the Extract/Optimize tab to display the list of transforms.2.

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Select model_generator to display the table of variables used in the model3.generator transform (see illustration).

Variables in the model_generator Transform

In the variable table, click left on the vd_start value to highlight it, then type in an1.appropriate value for your device.Similarly, set an appropriate vg_start value for your device.2.Enter an appropriate value for t_dispersion. This is the dispersion time constant, and3.its default value is 1e-7 or 100 nanoseconds, 100.0n. In most cases, t_dispersion isnot a significant factor although it is used in the model generation calculations.However, in a case where you wish to add time dispersion effects, you can increasethe value.

Executing the Model Generator Transform

Select model_generator > Execute to start generating the model for the device1.under test.A dialog box asks you for an MDS file name. The standard file generated by the2.model is State.mds. This file can be used with both ADS and MDS. If you want toretain this filename click OK or you can define a different filename.

NoteIf you plan to do a verification, retain the filename State.mds for now, as the verification processrequires this filename. You will have another opportunity to change the filename after theverification process.

The model generation takes a few seconds. When the model generation is complete,a message is displayed.

Generating a Model Using Data from an Earlier Measurement

If you wish to generate a model from a previously stored measurement, you will need toperform these additional steps to bring the data into this model file in the correct form.

From the IC-CAP main menu select File > Change Directory. Enter the path of the1.file where your data is stored, and press Return.Select the create_mdl setup.2.Select the Extract/Optimize tab.3.Select the compute_parasitics transform, and Execute.4.Now perform the standard procedures Setting the Starting Point for Contour5.Integration and Executing the Model Generator Transform.

NoteTo plot the data, note the extra steps described in To Plot an Earlier Data Acquisition.

Plotting the Generated Data

In the create_mdl setup, the Idh, Qg and Qd plots show the calculated state function datagenerated by the model_generator transform.

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NoteThe modeled state function data will not be plotted unless the init_parameters macro has been executed(see the instructions near the beginning of this section). The icplotnotes file generated by theinit_parameters macro provides the x-axis information needed to plot the modeled data. IC-CAP willdisplay an error message if you have not executed the init_parameters macro.

To view a specific plot:

Select the plot and click Display Plot. * Idh plots the high-frequency draincurrent Id as a function of Vds for different values of Vgs.

Qg is the distribution of charge current under the gate.Qd is the distribution of charge current under the drain.

Other Outputs of the Model Generation Process

The model generation process results in a number of different output files to be used fordifferent purposes. These include the model file for MDS interface, data on variousmodeled parameters, measured device data, and files for internal use by the program.

Some files have default filenames assigned by the program. Others may be files youcreated during the procedure to save device-specific information.

CautionIn general, the files should NOT be modified, because changing them can cause problems that mayinvalidate the model. It is also important that you do not change the names of files created by the modelgenerator, with the exception of State.mds.

The following list of files will be (or may be) created during the modeling process:

icplotnotes. This is the only file you can safely edit or add to. The program appends itas a label to any graphical outputs, to identify the device. It includes a device IDstring and any additional information you choose to have added to graphs when theyare plotted.icplotnumbers. This is an internal file used by the program to generate a graphicalinterface. It is related to the Max_num and Max_row messages that appear in theparasitics variable table of the main DUT and in the UNIX window at the end of thedata acquisition. While these parameters are irrelevant to user interaction with theprogram, they are essential to its function, and they must appear on-screen. Do notchange this file.Measured.data. This is the raw measured S-parameter data as a function of bias andfrequency, produced by the create_mdl data acquisition process.Para.data. This is the S-parameter data with forward bias current used by theprogram to calculate parasitic resistance and inductance values.State.data. This file is used by the program in plotting nonlinear functions such as Qgand Idh. Do not change this file.State.mds. This is the model file used by the Agilent RF and Microwave DesignSystem (MDS) in a circuit simulation. It is also used in verifying the model, andneeds to retain the name State.mds in the verification process in order to maintainthe MNS simulator link. However, since every Agilent RootFET model initially has thisname, you change the name to identify the device, either when you initiate thetransform to generate the model (if you are not performing a verification), or at alater time as described at the end of this section.Y.data. This file contains the Y-parameters as a function of bias, to examine throughgraphical interface. NO changes can be made to the Y.data file, except for addingheader and footer labels as explained under Plotting the Measured Data.dc_test.set (or some other name designated by you). If you decided to save it, this isthe measured DC data generated in the DC preverification procedure.spar_test.set (or some other name designated by you). If you decided to save it, thisis the measured S-parameter data generated in the S-parameter (AC) preverification.

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Storing the Model

Use the UNIX directory you created at the beginning of the procedure, when you first1.opened the model file.From the IC-CAP/Main window select File > Save As.2.A dialog box is displayed. Select the File Type (.mdl for a complete model) by clicking3.the corresponding radio button.Select a new filename that associates this model with the device.4.Use the UNIX copy (cp) or move (mv) command to copy the file State.mds to the5.new filename, including the pathname of the designated directory. Click OK.

This completes the example Agilent Root FET measurement and model generationprocedure.

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ReferencesPrinciples Of Nonlinear Active Device Modeling For Circuit Simulation. David E. Root1.and Brian Hughes, Hewlett-Packard Company. Procedings 32nd ARFTG Conference,Tempe, AZ, pp. 3-26, 1988.Automated Data Acquisition System For FET Measurement and Its Application. Sigi2.Fan, David E. Root, and Jeff Meyer, Hewlett-Packard Company. Proceedings 38thIEEE MTT ARFTG Conference, San Diego, CA, December 1991.Measurement-Based Active Device Modeling For Circuit Simulation, European3.Microwave Conference, 1993.A Measurement-Based FET Model Improves CAE Accuracy. David E. Root, Hewlett-4.Packard Company. Microwave Journal, September 1991.Measurement-Based Large Signal Diode Model, Automated Data Acquisition System.5.MTT Digest, 1993.Analysis and Exact Solutions of Relaxation-Time Differential Equations Describing Non6.Quasi-Static Large Signal FET Models. David E. Root, Hewlett-Packard Company.European Microwave Conference. Cannes, France, 1994.Experimental Evaluation of Large-Signal Modeling Assumptions Based On Vector7.Analysis of Bias-Dependent S-Parameter Data from MESFETs and HEMTs. David E.Root and Sigi Fan, Hewlett-Packard. IEEE MTT-S Digest, 1992.Measurement-Based Active Device Modeling For Circuit Simulation. David E. Root,8.Hewlett-Packard Company. European Microwave Conference, Madrid, Spain, 1993.Technology-Independent Large-Signal FET Models: A Measurement-Based Approach9.to Active Device Modeling. David E. Root, Sigi Fan, and Jeff Meyer, Hewlett-PackardCompany. 15th ARMMS Conference, 1991.Accurate Large-Signal GaAs MESFET Modeling for a Power MMIC Amplifier Design. J.10.M. Dortu and J. E. Muller, Siemens AG, Munich, Germany. Microwave Journal, April1993.The Extraction Of Terminal Charges From Two-Dimensional Device Simulations Of11.MOS Transistors. E. J. Predeergast and P. Lloyd, AT&T Bell Laboratories, Allentown,PA. COMPEL - The International Journal for Computation and Mathematics inElectrical and Electronic Engineering, Vol. 6, No. 2, 107-114. Boole Press Limited,1987.Direct Extraction Of GaAs Mesfet Intrinsic Element And Parasitic Inductance Values.12.Eric Arnold, Michael Golio, Monte Miller, and Bill Beckwith, Motorola Inc., StrategicElectronic Division, Chandler, AZ. IEEE MTT-S Digest, 1990.A New Method for Determining the FET Small-Signal Equivalent Circuit. Gilles13.Dambrine, Alain Cappy, Frederic Heliodore, and Edouard Playez. IEEE Transactions onMicrowave Theory and Techniques, Vol. 36, No. 7, July 1998.

(Additional references are listed in the bibliography at the end of some of thesepublications.)

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Curtice GaAs MESFET CharacterizationThis section provides information on the following topics:

Introduction to Curtice GaAs MESFET Characterization (mesfet)Curtice GaAs MESFET Model (mesfet)Simulators (mesfet)Model Parameters (mesfet)Test Instruments (mesfet)Measuring and Extracting (mesfet)Extraction Algorithms (mesfet)References (mesfet)

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Introduction to Curtice GaAs MESFETCharacterizationThis section describes the Curtice GaAs MESFET transistor supported by HPSPICE.Descriptions of model setup, instrument connections, and model parameters are includedas well as test instrument information. Procedures for extracting AC and DC modelparameters from GaAs MESFET transistors using the Curtice GaAs MESFET model are alsoincluded. These model parameters describe the operating characteristics of the deviceunder test (DUT), and can be derived from either simulated or direct measurements of theDUT.

The IC-CAP Curtice GaAs modeling module provides setups that can be used for generalmeasurement and model extraction for GaAs technology. Two example files are providedfor the Curtice GaAs MESFET transistor:

CGaas1.mdl extracts parameters for the quadratic modelCGaas2.mdl extracts parameters for the cubic model

The IC-CAP system offers the flexibility to modify any measurement or simulationspecification.

The model extractions provided are also intended for general GaAs IC processes. If youhave another method of extracting specific model parameters, you can do so with theProgram function or by writing a function in C and linking it to the function list. Details onthe Program transform and writing user-defined C language routines are explained inTransforms and Functions (extractionandprog).

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Curtice GaAs MESFET ModelThe Curtice GaAs MESFET model is contained in the IC-CAP example files CGaas1.mdl andCGaas2.mdl. These files consist of two levels of models that are based on a modeldeveloped at RCA and implemented in many SPICE versions. In level 1 (quadratic) model(CGaas1.mdl), drain current is proportional to the square of the gate to source voltagemultiplied by the hyperbolic tangent of the drain to source voltage [1]. Level 2 (Cubic)model (CGaas2.mdl), relates the drain current to the third-order polynomial of the gateand drain voltages times the hyperbolic tangent of the drain voltage [2].

The IC-CAP implementation of the model also includes voltage-dependent capacitances,gate-to-source and gate-to-drain junction diodes, and the series resistances andinductances at the gate, source, and drain.

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SimulatorsThis model is supported only by the HPSPICE simulator in IC-CAP.

NoteSimulators are provided as a courtesy to IC-CAP users; they are not supported by Agilent Technologies.

The default nominal temperature for SPICE3 is 25°C. To force another nominaltemperature, set the TNOM variable to the desired value.

The HPSPICE syntax for the Curtice GaAs MESFET element statement is:

JXXXXXXX ND NG NS MNAME

where:

JXXXXXXX indicates Curtice MESFET device name (any name that begins with J)

ND indicates drain node number

NG indicates gate node number

NS indicates source node number

MNAME indicates model name

An example of the Curtice GaAs MESFET device model call is:

J2 1 2 3 CMES

The HPSPICE syntax for the .MODEL definition is

.MODEL MNAME RCAY TYPE PNAME1=PVAL1 PNAME2=PVAL2 ...

where:

MNAME indicates model name

RCAY key word specifying a GaAs MESFET model

TYPE indicates NJF (N-channel MESFET) or PJF (P-channelMESFET)

PNAME# indicates Curtice GaAs MESFET parameter name

PVAL# indicates parameter value of PNAME#

The parameter MODEL in the .MODEL description must be set:

MODEL = 1 indicates Curtice level 1 quadratic modelMODEL = 2 indicates Curtice level 2 cubic model

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Model ParametersCurtice GaAs MESFET model parameters are summarized in the following table. The tableCurtice GaAs MESFET Model Parameters lists the parameters with descriptions and defaultvalues. Setup attributes are listed in the table Setup Attributes for the Curtice GaAs Model.

Summary of Curtice GaAs MESFET Model Parameters

Parameter Type Controlling Model Parameters

Inductance and Resistance LD, LG, LS, RD, RG, RS

Diode IS, VBI, N

Threshold Level 1: VTOLevel 2: A0, A1, A2, A3

Linear and Saturation Level 1: BETA, LAMBDA, ALPHALevel 2: BETA, GAMMA

Capacitance and AC CGDO, CGSO, CDS, RDSO, RIN, A5

optionally: CGD, CGS, TAU Curtice GaAs MESFET Model Parameters

Name Description Default

Inductance andResistanceParameters

LD Drain Inductance. Specifies external drain inductance. 0 Henry

LG Gate Inductance. Specifies external gate inductance. 0 Henry

LS Source Inductance. Specifies external source inductance. 0 Henry

RD Drain Resistance. Specifies external drain resistance. 0 Ohm

RG Gate Resistance. Specifies external gate resistance. 0 Ohm

RS Source Resistance. Specifies external source resistance. 0 Ohm

Diode Parameters

IS Diode Reverse Saturation Current. Models gate-drain and gate-sourcecurrent.

1 x 10-14

Amp

VBI Gate Junction Potential. Models built-in potentials of gate-source and gate-drain regions.

0.8 Volt

N Diode Emission Coefficient. Models emission coefficient of an ideal diode. InTECAP and some simulators this parameter is called XN.

1.0

XTI Diode Saturation Current. Temperature Coefficient. 3.0

EG Diode Energy Gap 1.11 EV

DC Parameters:Level 1 (Quadratic)

ALPHA Coefficient of VDS. It is the Vds coefficient in the tanh function of thequadratic equation.

2.0 V-1

BETA Transconductance Parameter. Defines transconductance in the saturation orlinear operating regions. Same as JFET model. In TECAP and somesimulators this parameter is called BETA1 for level 1, and BETA2 for level 2.

1 x 10-4

A·V-2

LAMBDA Channel Length Modulation Parameter. Models the finite outputconductance of a MESFET in the saturation region.

0V-1

VTO Threshold Voltage. Models gate turn-on voltage. Same as JFET model. 0V

DC Parameters:Level 2 (Cubic)

GAMMA Coefficient of VDS. It is the Vds coefficient in the tanh function of the cubicequation.

0.5V-1

BETA Coefficient for pinchoff. Defines change with respect to VDS In TECAP andsome simulators this parameter is called BETA1 for level 1, and BETA2 forlevel 2.

1 x 10-4

A·V-1

A0 0-Order Coefficient for V1 in IDS cubic equation. 1 x 10-2

Amp

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A1 1st-Order Coefficient for V1 in IDS cubic equation. 1 x 10-3

A·V-1

A2 2nd-Order Coefficient for V1 in IDS cubic equation. -1 x 10-3

A·V-2

A3 3rd-Order Coefficient for V1 in IDS cubic equation. -1 x 10-4

A·V-3

VDSO Value of VDS at which A0 through A3 are determined 5.0 Volt

RDSO Internal Resistance. Drain to Source AC Leakage Path. In TECAP and somesimulators this parameter is called RDS

1 x 1012

Ohm

VDSDC VDS Bias at which RDSO, CGD and CGS are determined 0V

AC and OtherCommonParameters

A5 Proportionality Constant. Varies TAU as a function of VDS. Use TAU forconstant time delay or A5 to vary delay as a function of VDS.

0 S·V-1

TAU Internal Time Delay. Constant internal time delay from drain to source. 0 Sec

VBR Reverse Breakdown Voltage. From gate to drain. 100V

RIN Series Resistance. In series with CGS. Used to model the change in inputimpedance with frequency.

0 Ohm

Piecewise LinearCurrent Parameters

R1 Approximate Breakdown Resistance. R1 is the breakdown resistance fromdrain to gate.

0 Ohm

R2 Resistance Relating Breakdown Voltage. R2 is the resistance relatingbreakdown voltage to channel current.

0 Ohm

RF Effective Value. RF if the effective value of forward-bias resistance gate tosource.

0 Ohm

ConstantCapacitanceParameters

CGD Gate to Drain Capacitance 0 Farad

CGS Gate to Source Capacitance 0 Farad

CDS Drain to Source Capacitance 0 Farad

FC Coefficient for forward-bias depletion capacitance 0.5

Non-LinearCapacitanceParameters

CGDO Zero bias Junction Capacitance. Non-linear Gate to Drain Capacitance atzero DC bias.

0 Farad

CGSO Zero bias Junction Capacitance. Non-linear Gate to Source Capacitance atzero DC bias.

0 Farad

Setup Attributes for the Curtice GaAs Model

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DUT/ Setup Inputs Outputs Transform Function Extractions

ac/ s_at_f vg, vd, vs,freq

s extract_L_and_R GAASAC_l_and_r LD, LG, LS, RD, RG, RS

dc/igvg_0v[sd]

vg, v[sd] ig extract GAASDC_lev1 VBI, IS, N

optim1 Optimize VBI, IS, N

dc/ idvg_hi_vd vg, vd, vs id, ig extract GAASDC_cur1 Level 1: VTOLevel 2: A0, A1, A2, A3

optim Optimize Level 1: VTOLevel 2: A0, A1, A2, A3

dc vd, vg, vs id, ig extract GAASDC_cur2 Level 1: BETA, ALPHA, LAMBDALevel 2: BETA, GAMMA

optim Optimize Level 1: BETA, ALPHA, LAMBDALevel 2: BETA, GAMMA

ac vg, vd, vs,freq

s extract_CV GAASC_cur CGDO, CGSO, CDS, RDSO, RIN,A5optionally: CGS, CGD,TAU

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Test InstrumentsThe HP 4141, Agilent 4142, or HP 4145 can be used to derive DC model parameters frommeasured DC voltage and current characteristics.

The Agilent 8510, Agilent 8753, or HP 8702 (with an HP 41xx instrument) can be used toderive capacitance and inductance model parameters from S-parameter measurements.

Instrument-to-Device Connections

When the device is installed in a test fixture, verify the identity of device nodes bychecking the inputs and outputs for the appropriate DUTs. The following table is a crossreference of the connections between the terminals of a typical MESFET device andvarious measurement units. These connections and measurement units are defined inCGaas1.mdl and CGaas2.mdl example files.

Input and output tables in the various setups use abbreviations D (drain), G (gate), and S(source) for the MESFET device nodes. These nodes are defined in the Circuit folder.

Measurement units (abbreviated as follows) are defined in Hardware Setup.

SMU# for DC measurement unitsNWA for network analyzer units

Instrument-to-Device Connections

DUT Source Gate Drain Comments

dc SMU3 SMU2 SMU1

ac Ground SMU2NWA (port 1)

SMU1NWA (port 2)

Calibrate for reference plane

Notes:

DUT is the name of the DUT as specified in DUT-Setup. Source, Gate, and Drain are1.the names of the transistor terminals.As an example of how to read the table, the first line indicates that the DUT named2.dc has the DC measurement instruments SMU1 connected to its drain, SMU2connected to its gate, and SMU3 connected to its source.

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Measuring and ExtractingThis section includes general information as well as procedures for performingmeasurements and extractions of MESFET devices.

Measurement and Extraction Guidelines

The following guidelines are provided to help you achieve more successful modelmeasurements and extractions.

Setting Instrument Options

Before starting a measurement, you can quickly verify instrument options settings. Savethe current instrument option settings by saving the model file to <file_name>.mdl fromthe model window. Some of the Instrument Options specify instrument calibration. For themost accurate results, calibrate the instruments before taking IC-CAP measurements.

DC measurements are generally taken with Integration Time = Medium.CV measurements in the femtofarad region usually require High Resolution = Yes andMeasurement Freq (kHz) = 1000.When taking AC measurements with a network analyzer, several instrument settingsare critical. In addition, the calibration must be performed on structures that havesimilar impedances as the stray parasitics of the DUT.Input power to the device is typically -10 to -30dBm (after port attenuation).Setting the averaging factor to the 2-to-4 range reduces measurement noise.Because IC-CAP requires the instrument to perform error correction, set Use InternalCalibration to Yes.

Experiment with the other network analyzer options to obtain the best results with specificdevices.

Measuring Instruments

Ensure that the measuring instruments (specified by unit names in the input and outputtables) are correctly connected to the DUT. Refer to the table Instrument-to-DeviceConnections (mesfet) for a list of nodes and corresponding measurement units. Thequality of the measuring equipment (instruments, cables, test fixture, transistor sockets,and probes) can influence the noise level in the measurements.

Ensure that all characteristics of the measurement stimulus and corresponding measuredresponse are specified in the respective input and output tables.

Calibration

For some measurements the instruments or test hardware must be calibrated to removenon-device parasitics from the DUT. For MESFET devices, stray capacitance due to probesystems, bond pads, and so on should be calibrated out prior to each measurement.

For high-frequency 2-port measurements with a network analyzer, the reference plane ofthe instrument must be calibrated out to the DUT. IC-CAP relies on the internal calibrationof the instruments for full error-corrected data. It is critical that calibration using OPEN,SHORT, THRU, and 50 ohm loads be properly done.

Extracting Model Parameters

IC-CAP's extraction algorithms exist as transforms in the function list, under Extractions.Extraction transforms for a given setup are listed in the transform tile for the setup.

When the extract command is issued from the setup level, all extractions in the setup are

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performed in the order listed in the setup; this order is usually critical to proper extractionperformance. The extractions are typically completed instantly and the newly extractedparameter values are placed in Model Parameters.

The configuration file supplied with IC-CAP contains the setups for two different extractionmethods, and two different sets of model parameters (level 1 and 2). In general only oneset of these parameters is important, and you need to perform only one of the methods inorder to extract model parameters. Set the parameter MODEL to the desired number (1 or2) before starting the extraction.

Simulating Device Response

Simulation uses model parameter values currently in the Parameters table. A SPICE deckis created and the simulation performed. The output of the SPICE simulation is then readinto IC-CAP as simulated data.

HPSPICE is the only simulator fully compatible with the IC-CAP Curtice GaAs modelconfiguration file. This simulator uses the JFET convention for calling the model. The figurebelow is an example of the circuit definition for the Curtice GaAs MESFET model to beused with this simulator. JCGAAS is the device name; NMF1 is the model name; RCAYspecifies to use the Curtice GaAs model; NJF specifies the N type FET, which is the onlytype supported in this model. MODEL = 1 specifies the level 1 model.

Simulations vary in the amount of time they take to complete. DC simulations generallyrun much faster than cv and AC simulations.

If simulated results are not as expected, use the simulation debugger (in the Tools menu)to examine the input and output simulation files. The output of manual simulations is notavailable for further processing by IC-CAP functions such as transforms and plots.

Example of the circuit definition for HPSPICE

.SUBCKT CGAAS 1=D 2=G 3=S

JCGASS 11 22 33 NMF1

LD 1 11 1n

LG 2 22 1n

LS 3 33 1n

.MODEL NMF1 RCAY NJF

+ MODEL = 1

+ BETA = 100u

+ VBI = 0.7

+ .....

+ .....

.ENDS

Displaying Plots

The Display Plot function displays all graphical plots defined in a setup. The currentlyactive graphs are listed under the Plots folder in each setup. View the plots for agreementbetween measured and simulated data. Measured data is displayed as a solid line;simulated data is displayed as a dashed or dotted line.

Optimizing Model Parameters

Optimization of model parameters improves the agreement between measured andsimulated data. An optimize transform whose Extract Flag is set to Yes is automaticallycalled after any extraction that precedes it in the transform list.

Optimizing AC parameters can be very time consuming because of the number of SPICEsimulations required.

Extraction Procedure Overview

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This section describes the general procedure for extracting model parameter data from theCurtice GaAs MESFET. The procedure applies to all types of parameters. The differencesbetween extracting one type and another lie primarily in the types of instruments, setups,and transforms used.

Parameters can be extracted from measured or simulated data. Measured data is datataken directly from instruments connected to the DUT inputs and outputs. Simulated dataare results from the simulator. Once measured and simulated data have been obtained,both data sets can be plotted and compared.

The general extraction procedure is summarized next, starting with the measurementprocess.

Install the device to test in a test fixture and connect the test instruments.1.Ensure the test fixture, signal source and measuring instruments, and workstation2.are physically and logically configured for the IC-CAP system.Choose File > Open > Examples. Select CGaas2.mdl and choose OK. Select Open3.to load the file and open the model window. Choose OK.When the CGaas2 model window opens you are ready to begin measurement andextraction operations.Enter the variable name EXTR_PAR at the model level and enter NMF1 as its value. This4.allows the extractions to find the model parameters for the model name NMF1 withinthe subcircuit of the model file. This concept is covered in more detail in DefiningCircuits (definingcircuits).Select the DUT and Setup.5.Execute the Measure command.6.Execute the Extract command.7.Execute the Simulate command.8.Display the results.9.Fine tune the extracted parameters if needed by optimizing.10.

Parameter Measurement and Extraction

The recommended method for extracting Curtice GaAs model parameters is presentednext. In this extraction, external resistances are extracted from AC data.

NoteIf AC data is not available, an alternative method (described in Alternate Extraction Method) uses theFukui technique [3] for extracting the resistances from DC data. Use the alternative method only if ACdata is not available; the recommended method produces parameters that are more precise.

The Curtice GaAs MESFET model is a 2-level model. IC-CAP supports and extractsparameters for both levels of this model. The following procedure extracts parameters forlevel 1 or 2 depending on the value of the parameter MODEL.

Parameter extractions are dependent on each other; to ensure accuracy extractions mustbe done in this order:

Inductance and resistance parameters (AC)

External inductance and resistance parameters are extracted from an S-parametermeasurement at a single bias setting. The gate of the device is strongly forward biased tomake the device look like a short circuit. The s_at_f setup is used to take themeasurements and extract the parameters LD, LG, LS, RD, RG, and RS.

Diode parameters (DC)

Diode parameters VBI, IS, and N are extracted from data produced by the measurementof Id versus Vg measured at zero drain voltage, with the source floating. The igvg_0vs origvg_0vd setup is used to make the measurements and extractions, depending onwhether the gate-source or gate-drain junction is preferred.

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Threshold parameters (DC)

Parameters that describe the threshold characteristics are extracted using Id versus Vgmeasurement at a high drain voltage. The idvg_hi_vd setup is used for this extraction. Forthe level 1 model, VTO will be extracted; for the level 2 model, A0, A1, A2 and A3 will beextracted.

Linear and saturation parameters (DC)

Parameters that control the linear and saturation regions of device operation are extractedusing Id versus Vd measurement at different gate voltages. The idvd_vg setup is used forthis extraction. BETA, LAMBDA and ALPHA are extracted for the level 1 model; BETA andGAMMA are extracted for the level 2 model.

Capacitance parameters (AC)

Capacitance parameters CGDO and CGSO, and AC parameters A5, CDS, RDSO and RINare extracted from an S-parameter measurement using the s_vs_f setup. Measured datais corrected using the inductances and resistances extracted in the initial step;capacitance and other AC parameters are then extracted from corrected data.

By defining IC-CAP system variables LINEAR_CGS, LINEAR_CGD, and CONSTANT_TAUand setting their values to true, CGS, CGD, and TAU, respectively, can be extracted.

Use a network analyzer to make the next set of measurements. S-parametermeasurements are highly sensitive-it is important that the instrument be properlycalibrated.

Place the device to be measured in the test fixture.1.

NoteFor the ac/s_at_f and s_vs_f measurements, the SMUs connected to the network analyzer's portbias connections must correspond to the SMUs in the table Instrument-to-Device Connections(mesfet).

Select the ac/s_at_f __ DUT/Setup and choose Measure.2.In the ac/s_at_f DUT/Setup select Extract to extract the inductance and resistance3.parameters.Select the ac/s_vs_f DUT/Setup and choose Measure. Do not extract the4.parameters for this setup yet.Disconnect the device from the network analyzer and directly connect it to the5.appropriate units for DC measurements.Select the dc/ igvg_0vs or igvg_0vd DUT/Setup and choose Measure.6.Repeat Step 6, but choose Extract to extract the diode parameters.7.Repeat Step 6, but choose Optimize.8.Select the dc/idvg_hi_vd DUT/Setup and choose Measure to measure Id versus Vg9.at a constant Vd.Select the dc/idvd_vg DUT/Setup and repeat the Measure and Extract steps to10.measure and extract the other DC parameters.Repeat Step 10, but choose Optimize.11.Select the ac/s_vs_f DUT/Setup and choose Extract to extract the capacitances12.from the data that was measured in step 4.

All model parameters are extracted and their values added to the Parameters table; theycan be viewed in the Model Parameters folder.

Alternate Extraction Method

If AC data is not available, IC-CAP supports an alternate method for extracting CurticeMESFET model parameters. This procedure uses the Fukui technique [3]; externalresistances are extracted along with the diode parameters from DC data-this differs fromthe recommended method. Use this method only if the AC data is not available-this

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alternate method produces parameters that are less precise than those of therecommended method.

Resistance and diode parameters (DC)

Using DC measurements only, this procedure uses the Fukui algorithm to extractresistance parameters RD, RG, and RS from DC data. Diode parameters VBI, IS, and Nare also extracted. The extraction requires the setups listed in the following table.

Resistance and Diode Measurement and Extraction Setups

igvg_0vd Ig versus Vg Vd=0, with Source floating

idvg_low_vd Id versus Vg Small Vd

gvg_0vs Ig versus Vg Vs=0, with Drain floating

This extraction is located in the igvg_0vd setup. To use the Fukui algorithm, add thefollowing inputs to the function GAASDC_lev1.

VG (low Vds) idvg_low_vd/vgVD (low Vds) idvg_low_vd/vdID (low Vds) idvg_low_vd/id.mVG (D Flt) igvg_0vs/vgIG (D Flt) igvg_0vs/ig.m

Threshold Parameters ( )

Use the recommended method for measuring and extracting threshold parameters.

Linear & Saturation Parameters ( )

Use the recommended method for measuring and extracting linear & saturationparameters.

Inductance Parameters (AC)

Use the recommended method for measuring and extracting inductances. The parametersLD, LG, and LS are extracted from the S-parameter measurement. In addition, theTransform also extracts and overwrites the resistance parameters.

Capacitance Parameters ( )

Use the recommended method for measuring and extracting capacitance parameters.

The alternate extraction procedure follows.

Connect the NWA to extract inductances and capacitances.1.Place the device to be measured in the test fixture.2.

NoteFor the ac/s_at_f and s_vs_f measurements, the SMUs connected to the network analyzer's portbias connections must correspond to the same SMUs in the table Instrument-to-Device Connections(mesfet).

Select the ac/s_at_f DUT/Setup and choose Measure.3.Repeat Step 2, but select Extract to extract the inductance and resistance4.parametersSelect the ac/s_vs_f DUT/Setup and choose Measure. Do not extract the5.parameters for this setup yet.Select the ac/s_vs_f DUT/Setup and choose Extract to extract the capacitances6.from the data that was measured in step 3.Select dc/igvg_0vs DUT/Setup and choose Measure.7.Repeat Step 7 for dc/idvg_low_vd and dc/igvg_0vd.8.In the dc/igvg_0vd DUT/Setup, choose Extract to extract the resistance and diode9.parameters from the measured data for the three DC Setups.

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Repeat Step 9 but choose Optimize.10.Select the dc/idvg_hi_vd DUT/Setup and choose Measure to measure Id versus Vg11.at a constant Vd.Select the dc/idvd_vg DUT/Setup and repeat the Measure and Extract steps to12.measure and extract the other DC parameters.Repeat Step 12, but choose Optimize.13.Select the dc/idvd_vg DUT/Setup and repeat the Measure and Extract steps to14.measure and extract the other DC parameters.Repeat Step 14, but choose Optimize.15.

Simulating

To simulate any individual setup, choose Simulate with that setup active. Simulations canbe performed in any order after all of the model parameters have been extracted. Formore information on simulation, refer to Simulation (simulation).

Displaying Plots

To display plots of measured and simulated data issue the Display Plots command from aDUT to display the plots for all setups contained in that DUT.

Viewing plots is an ideal way to compare measured and simulated data to determine iffurther optimization would be useful. For more information on displaying plots, refer toPrinting and Plotting (printandplot).

Optimizing

The optimization operation uses a numerical approach to minimizing errors betweenmeasured and simulated data. As with the other IC-CAP commands, optimization can beperformed at either the DUT or setup level. Optimization is more commonly performedfrom setups-optimization for all setups under a DUT is rarely required.

Optimization is typically interactive in nature, with the best results obtained when youspecify the characteristics of the desired results.

For more information on optimization, refer to Optimization (optimization).

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Extraction AlgorithmsThis section describes the extraction algorithms used for inductance, capacitance, DC, andseries resistance parameters of the Curtice GaAs MESFET. Setups for the Curtice MESFETmodel are similar to the UCB GaAs MESFET model and their extraction algorithms aresimilar. The Curtice model has more model parameters than the UCB model.

Inductance and Resistance Extraction

Inductors and resistors that are in series with each terminal of the MESFET are measuredwith a network analyzer at a high frequency and with the gate strongly forward-biased.Under these conditions the AC model for each terminal is reduced to a series R-L circuit.Inductors LD, LG, and LS and resistors RD, RG, and RS are extracted simultaneously fromthe measured impedance at the gate and drain ports.

DC Parameter Extractions

DC extractions are separated between the diode and forward active controllingparameters. Diode parameters VBI, IS, and N are extracted using a method similar to themethod used for a silicon diode. The diode is swept over a forward bias and linear least-squares curve fits will produce the built-in potential and forward conduction properties.

The forward active region is extracted from measurements of the MESFET in both thelinear and saturated modes of operation.

If the MODEL parameter is set to 1, BETA, VTO, ALPHA, and LAMBDA are extracted.If the MODEL parameter is set to 2, A0, A1, A2, A3, BETA, and GAMMA are extracted.

(Note that for MODEL=1, BETA is a transconductance and for MODEL=2, BETA is acoefficient for pinchoff.)

Capacitance Parameter Extractions

The capacitance of the gate-to-drain CGDO and gate-to-source CGSO is measured with S-parameters over typical operating frequencies. Because the inductances and seriesresistance are already known, these capacitances can be extracted from the correctedimpedances measured at the gate and drain ports.

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ReferencesWalter Curtice. A MESFET Model For Use in the Design of GaAs Integrated Circuits,1.IEEE Transactions on Microwave Theory & Techniques, Vol. MTT-28, No. 5, May 1980.Walter Curtice and M. Ettenberg. A Nonlinear GaAs FET Model for Use in the Design2.of Output Circuits for Power Amplifiers, IEEE Transactions on Microwave Theory &Techniques, Vol. MTT-33, No. 12, December 1985.H. Fukui. Determination of the Basic Device Parameters of a GaAs MESFET, The Bell3.System Technical Journal, Vol. 58, No. 3, March 1979.

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High-Frequency FET (Curtice) ModelsThis section provides information on the following topics:

Introduction to High-Frequency FET (Curtice) Models (mesfet)Using the Curtice Cubic Model (mesfet)

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Introduction to High-Frequency FET (Curtice) ModelsThis section documents the Agilent 85192A high-frequency FET modeling software whichincludes three models:

Curtice quadraticCurtice cubicStatz (Raytheon)

While these models are well known for use with DC and low-frequency devices, theextraction methodology used here is specific to high-frequency devices. The measurementand extraction software and procedures have been developed to ensure accurate modelingresults that are constant, rather than a function of frequency.

The example procedures here focus on the Curtice cubic model. Some differences betweenthe Curtice cubic and Curtice quadratic models are documented in Curtice GaAs MESFETCharacterization (mesfet).

The software performs a series of DC and S-parameter measurements, based onpredefined measurement configurations and on variables you define during theprocedures. The measured values are then used to extract individual device parameters,through software conversion of the S-parameters to admittance or impedance parameters.The resulting model can be used to simulate the performance of any similar device in acircuit under design. Its data files can be read directly into datasets in the Agilent RF andMicrowave Design System (MDS). The model can also be used as a standard forquantitative performance measures in process and material control.

Getting Started

The procedures in this section assume the following:

The system has been set up and switched on.The calibration standards have been removed from their containers to allow them toreach ambient room temperature.The IC-CAP software has been properly installed on the computer.IC-CAP has been configured to recognize the system hardware, and the SMUs havebeen renamed as follows:

Rename a medium-power SMU connected to the device gate as VGRename a high-power SMU connected to the device drain as VDRename the GNDU unit (which must be connected to the source) as GND.

Launch the IC-CAP software and open the model file you need. The Curtice FET model fileis under:

/examples/model_files/mesfet/CGaashf.mdl

Then return to this section and continue with the procedures here.

Before you continue with the IC-CAP procedures, make a new directory in an appropriatelocation in the UNIX structure, using the mkdir command, to store the data and modelfiles that will be generated. Give the directory a name that will associate it with thedevices you are going to model. Use the cd command to change to the new directory inUNIX.

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Using the Curtice Cubic ModelThis section provides example procedures that take you step-by-step through a FETmeasurement and parameter extraction. The procedures are arranged in the most logicalsequence to allow earlier measured data or extracted parameters to be used as a basis forlater measurements or extractions.

The device used in this example was a GaAs MESFET, and its data sheet was used forinformation on device characteristics and compliance values. Values you use in your ownparameter extraction procedures will depend on the particular characteristics of yourdevice: use its data sheet (if available) as a reference.

This example is provided as a starting point. It is a set of straightforward procedures thatuse only a subset of IC-CAP's total capabilities. The complete procedures documented giveall the steps necessary to set up and perform the measurements and extract deviceparameters from the resulting data. Once the measurement setups have been defined,they can be used for measurement and extraction of any device of the same type andgeometry. The modeling procedure then becomes more simple, and can be accomplishedin a few steps.

The procedures use a series of different setups to measure current or voltage vs biasunder different bias conditions. The purpose of the different measurement setups is todecouple the model equations as much as possible and effectively isolate the individualFET parameters.

NoteAlthough you will modify the variable values in factory default files during this procedure, do not underany circumstances change the names of any variables or setups. These names are used by the software inthe parameter extraction process.

NoteThese example procedures assume that in-fixture measurements are made with the FET under testmounted in the fixture in a common-source configuration.

The procedures in this section include detailed instructions for the following:

Setting the input parameters for each measurement.Making the DC and S-parameter measurements: qualifying the results.Extracting the individual model parameters.Verifying the extraction results against the measured data.Storing the model and individual parameters.

Where necessary, other sections are cross-referenced at appropriate points in theprocedures, so that all system hardware setups and calibrations are performed at the righttimes.

NoteMeasurement parameters and measured data are specific to individual devices. Information and data areprovided here as examples and guidelines, and are not intended to represent the only correct method orresults.

The procedures start with example values for IC-CAP measurement inputs. They provideguidelines on setting the values to measure your device. However, the values you use willbe based on your knowledge of your device and on information provided in its data sheetas well as on the guidelines provided here: they may or may not correspond with theexamples. In some cases, it may be necessary to set the input values, make ameasurement, and then reset the inputs based on the measurement results. Theprocedures give suggestions on judging the applicability of the input values and measureddata.

The illustrations of plotted data are provided as visual examples of possible measurement

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results. They are not intended to represent a sequential measurement of one device, nordo they necessarily correspond with the example measurement inputs described in theprocedures. The plots can be used to check the reasonableness of your own measureddata, which should appear similar in shape but not necessarily coincident in values.

In addition, the IC-CAP software itself includes measured data for some of the setups. Thisdata is from the measurement of a single device, and shows another example of possibleresults. Many, though not all, of the input settings for this measurement correspond withthe example settings. In looking for information on preferred values, or on how themeasured data should look, refer to the documantation as a guide.

The DUTs and Setups

The DUT/Setup panel is the central access point for the measurement and extractionprocedures. The DUTs (for example DC), indicated by the inverted triangles, are groupingsof similar measurement setups used to extract related model parameters. The setupscontain the information used to define the inputs and outputs for each measurement, aswell as their measurement hardware configurations and their associated transforms andplots.

The CGaashf DUT/Setup Panel

Making the DC Measurements

The DC measurement procedures measure DC current or voltage vs bias under differentbias conditions. Setting up the measurement conditions involves two main processes foreach measurement setup: defining the instrument state for the DC source/monitor, andsetting the input values for the device measurement.

Leave the network analyzer disconnected from the bias networks while you perform theDC measurements, with the RF IN connectors of the bias networks terminated to preventpossible bias oscillation.

Defining the Instrument States

For each of the measurement setups, it is necessary to define the instrument states(options) for the measurement instruments that will be used in that setup. The instrumentstates need to be defined individually for each setup. Different setups use differentmeasurement instruments. However, with minor exceptions that will be explained, theinstrument states for the same measurement type must be used for all the setups thatuse that measurement type.

After you have selected a setup, for example idvd_vg, the setup window tabs are1.displayed.Select the Instrument Options tab, and a window is displayed showing the2.instrument states for all instruments used in that measurement. In the DCmeasurement setups, the instrument states for the DC source/monitor are displayed.In the S-parameter measurement setups, the instrument states for both the DCsource/monitor and the network analyzer are displayed.

The instrument state settings are explained in this section with their corresponding

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setups.

Measuring the Characteristic Curves (idvd_vg)

This procedure measures drain current with respect to drain voltage, at several values ofgate voltage. The drain voltage is swept from 0V to the upper limit of its normal operatingrange.

FET Configuration: The input values you set in the following procedure configure the FETas shown in the following figure.

FET Bias Configuration for idvd_vg Measurement

Parameters to Be Extracted

This procedure is done first to determine whether or not the device is good. The data fromthis measurement will be used to extract beta2 and gamma2, the Curtice Cubicparameters that control the linear and saturation regions of device operation. RDS0(intrinsic output resistance) is also extracted from this measurement through optimization.(In a Curtice quadratic model, this data would be used to extract the beta, gamma, andalpha coefficients.)

This data can also be used for later comparison with predicted data provided by theextracted model.

Defining the DC Source/Monitor Instrument State

Set the instrument option Integ Time to M (Med.

Setting the idvd_vg Input Values

This procedure defines the input signals to be applied to the device under test for thismeasurement. The actual settings you use will be dependent on the compliance limits forboth the device and the SMUs/bias networks, and on the range of measurements youwant to take.

If you are measuring a series of devices of the same type and have already set the inputvalues, go directly to the section Measuring and Plotting. Otherwise, select the idvd_vgsetup (from the DC DUT) and use the following instructions as a starting point to set upthe measurement for your particular device. Refer to your device data sheet as needed forspecifications and compliances.

For the vd input

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Set To

Mode V (voltage)

Compliance no greater than the maximum breakdown current value in the device data sheet. With a voltageinput, compliance refers to current. Compliance values limit SMU output voltage or current andprevent damage to the device under test, as well as to the SMUs, bias networks, and probes ifused.

SweepType

LIN to provide a linear voltage sweep from start to stop voltage values

Start 0.0

Stop Referring to the data sheet for your device, set the Stop value ≤ the upper limit of the device'snormal operating range.

# of Points Set the # of Points to 21 or less.

Step Size Calculated automatically in software from the start/stop values and number of points.(Alternatively you can set the Step Size and the # of Points is calculated automatically.) Note,however, that the step size must be an integer multiple of the minimum step size of the SMU(refer to the Agilent 4142 Operation Manual for the SMU specifications).

For the vg input

Set To

Mode V (voltage)

Compliance no greater than the maximum allowable gate current value in the data sheet. With a voltageinput, compliance refers to current. Compliance values limit SMU output voltage or currentand prevent damage to the device under test, as well as to the SMUs, bias networks, andprobes if used.

Sweep Type LIN to provide a linear voltage sweep from start to stop voltage values

Start, Stop,and # of Points

Set such that three to five values (points) will be measured, in a range from approximatelyVgs=Vpinchoff to Vgs=0V. Set Start to a value close to Vpinchoff, but not so close that thecurve will be difficult to discern. (Since the data sheet is likely to provide a range of values,these settings may need to be changed after the first measurement.)

CautionIn setting vg, be careful not to set gate voltage values high enough to damage the device.

The Outputs are factory set, and should not be changed, with the exception of Type.This is the type of data to be plotted, M for measured, S for simulated, or B for both.There is a tradeoff in making this choice: if the measurement will be a slow onebecause of long integration time or large number of points, you can save time bysetting Type to M. If the measurement will be fast, you can save the need to changethe plot Type later during extraction by setting B. Set it to M for now, to save time inplotting the measured values.The Unit names must conform to the names set in the hardware window.

Measuring and Plotting

This procedure triggers the device measurement, controlling the DC source/monitor tosupply the signals you defined in the instrument options and the inputs, and monitors theresults.

NoteRemove any high-intensity light sources such as microscope light before taking a measurement. Onesimple method of blocking light is to place an opaque plastic box on the fixture directly above the device.

From the idvd_vg setup select the Plots tab.1.Select the id_vs_vd plot, and Display Plot.2.If you have not already connected the DUT, do so now. Observe antistatic3.precautions.Select Measure/Simulate > Measure. Do not touch the fixture or the bias4.networks while the system is measuring. When the measurement is complete, theyellow MEASURING light on the DC source/monitor goes out, the IC-CAP wristwatchicon goes away, and the measured data is displayed in the plot window.The plotted data should resemble the following figure, with the lowest curve close to5.

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the X-axis to show the pinchoff characteristics. If the data indicates the device is notoperating in its normal range, you may need to change the gate voltage values youset in the inputs. (If more than one curve is low, change vg Start to a higher value.Or if all the curves are high, change vg Start to a lower value.) Then select Measureagain.

Example idvd_vg Measurement of FET Characteristic Curves

If the measured data looks wrong for your device, check the probe contacts, the bias6.connections, and the measuring instruments. Make sure the device is orientedproperly, with the right ports connected to the right terminals. If none of theseresolves the problem, the device may be defective. For example, if all the curves aresuperimposed, the gate may be shorted.If you wish, you can save the measured data for later comparison with data predicted7.by the extracted model. To do so, from the Main window, select File > Save As. Usethe File Type suffix .set. Enter an appropriate filename (for example dc_test ), andpress Return or click OK to save the file.Close the plot.8.

Measuring Drain Current vs Gate Voltage (idvg_vd)

This procedure measures drain current as a function of swept gate voltage, at a singledrain voltage bias point in the typical operating range of the device. Values of gate voltageare selected to take the device from pinchoff to IDSS.

FET Configuration: The input values you set in the following procedure configure the FETas shown in the following figure.

FET Bias Configuration for idvg_vd Measurement

Parameters to Be Extracted

This is a very important measurement, because the A coefficients will be determined fromit. The A coefficients form the core of a Curtice cubic model, and therefore must becarefully extracted. Poor measurement and extraction can result in a device model inwhich the DC performance appears reasonable while the AC performance, specifically S21,

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is suspect.

Defining the DC Source/Monitor Instrument State

Use the same instrument option settings for the idvg_vd setup as you did for the idvd_vg,except set Integ Time to L (long) for maximum averaging, because this measurementuses a derivative process. Note: The instrument states need to be set independently foreach setup.

Setting the idvg_vd Input Values

Select the idvg_vd setup and use these guidelines for setting the vd and vg inputs.

For the vd input

Set To

Sweep Type CON (constant) to provide a constant voltage at one bias value

Value at or near the typical operating region of the device. For the vg input

Set To

SweepType

LIN (linear)

StartandStop

Set such that the gate voltage takes the device from pinchoff to IDSS. It is best to set a start valuebelow 0.0V to avoid contaminating lesser values of drain current with the heat generated at IDSS.The Curtice model does not compensate for heating effects, which would cause a downslope in themeasured data at the higher values of drain current.

# ofPoints

Set fairly large (>100) to ensure an adequate set of measurements across the voltage range.

Measuring and Plotting

From the Plots tab, select the id_vs_vg plot, and Display Plot.1.Select Measure/Simulate > Measure. The plot will be updated with the measured2.data, which should resemble the following illustration. Typically Id increasesparabolically with the increase in Vg. If not, there may be a problem with the device.

Example idvg_vd Measured Data

Save the data using File > Save As and a filename with the suffix .set.3.Close the plot.4.

Measuring Ideality

This setup forces the FET into a forward-biased diode configuration (gate-source junction),by applying a swept voltage at the gate and opening the drain. Gate-source current is

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measured as the gate voltage is swept.

FET Configuration: The input values you set in the following ideality procedure configurethe FET as shown in the following figure.

FET Bias Configuration for the Ideality Measurement

Parameters

The data from this DC measurement will be used to extract the diode parameters VBI(built-in voltage), IS (junction saturation current), and N (ideality factor).

Defining the DC Source/Monitor Instrument State

Use the same settings for ideality that you did for the idvg_vd setup, and set Integ Timeto L (long).

Setting the ideality Input Values

CautionSince the gate-source junction is forward-biased in this configuration, be particularly careful in settingcompliance values.

Select the ideality setup and use these guidelines for setting the vg and id inputs.

For the id input

Set To

Mode I

Value 0.0 to float the drain

SweepType

CON (constant)

Compliance In current mode, compliance refers to voltage. If the device data sheet specifies a maximumdrain voltage, use that value for Compliance.

For the vg input

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Set To

Compliance A good rule of thumb is to use 0.1 mA gate current per micron of gate width (for example 50 mAfor a 500 µm device). Allowing too high a current compliance can overstress the device anddegrade its performance, even though the results may not be obvious.

SweepType

LIN (linear) for a swept voltage from Start to Stop values

Start andStop

Start with conservative values for gate voltage to prevent possible damage to the device. Theycan quickly be changed after the first measurement if necessary. The FET data sheet is unlikelyto specify diode characteristics, so start with best-guess values. Begin by setting a vg Stop valueof 500.0m, and increase it if appropriate until the measured data shows the characteristicsexplained under Measuring and Plotting (The increase must be an integer multiple of the SMUstep size.) A typical gate voltage range is from 100 mV to 800 mV.

# of points Use a large enough # of points to ensure distribution of measurements across the exponentialregion of the diode characteristics.

Measuring and Plotting

From the Plots tab, select the ig_vs_vg plot, and Display Plot.1.

Example Measured ideality Data

Select Measure/Simulate > Measure. The plotted data should be similar to the2.illustration. (Note that Ig is plotted on a log scale to show the exponential behavior ofthe diode junction.) The current should be very low at the low end, and the curveshould bend at the high end where the parasitic gate and drain resistances arehaving an effect. The trace should be smooth and noise-free if a long integration timewas used. Noise at the low end occurs if a shorter integration time is used.The bend at the high end of the curve defines where the parasitics start dominating,3.and sets the bounds for extraction. If the displayed data does not show this bend, goback to the inputs and increase the Vg Stop value slightly (perhaps by 100 mV).Repeat the measurement. Iterate as necessary, gradually increasing Vg Stop untilthe bend in the trace does appear.The other plot is used later, in the extraction process.4.Close the plot.5.

Measuring Breakdown Characteristics (Optional)

Breakdown is not normally a factor in small-signal device operation, typically onlyoccurring if the device is driven hard. The usefulness of this measurement is limited, sincethe model's extraction of VBR (breakdown voltage) defines a hard breakdown point, whileMESFETs typically have a soft breakdown characteristic. However, breakdown is onesource of nonlinearity, so you may want to measure and model it. Be aware, however,that it may cause prediction of false harmonic values when the model is used in asimulation.

In this measurement, the source is open and the drain grounded. The gate current ismonitored as gate voltage is swept from a positive voltage in the saturation region to anegative voltage beyond the expected reverse breakdown point. If you have a standard

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system with two SMUs, either disconnect the GNDU SMU from the source and leave itopen, or reverse the source and drain connections (GNDU at the drain and SMU2 at thesource).

FET Bias Configuration for breakdown Measurement

Defining the DC Source/Monitor Instrument State

Use the same settings for breakdown as you did for ideality. Integ Time can be set to M(medium).

Setting the breakdown Input Values

Select the breakdown setup and use these guidelines for setting the vg and vd inputs.

For the vg input

Set To

Compliance Set a small value to prevent damage to the device in the reverse breakdown region. 500A isappropriate

SweepType

LIN for a linear voltage sweep from Start to Stop

Start a positive value in the saturation region

Stop a negative voltage beyond the expected reverse breakdown point For the vd input

Set To

Compliance small

SweepType

If you disconnected the source and left it open, set Sweep Type to CON (constant), with a valueof 0.0. (Alternatively, connect the GNDU SMU to the drain.)

Measuring and Plotting

From the Plots tab, select the ig_vg plot, and Display Plot.1.Select Measure/Simulate > Measure. The measured data should be similar to that2.shown in the following figure. VBR (breakdown voltage) is the gate voltage Vg valueat which gate current Ig stops increasing.

Example breakdown Measurement Data

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Close the plot.3.

Calibrating the Network Analyzer

It is important to calibrate the network analyzer before you perform the S-parametermeasurements. Good calibration of the network analyzer is critical to a good measurementand extraction.

For this procedure, the network analyzer must be calibrated over a broadband frequencyrange at least equal to the operating range of the device. No subset calibration isrequired.

NoteIC-CAP requires values to be entered into the software regarding calibrations, instrument states, andmeasurement values. It is important that values entered in software correspond with actual instrumentsettings.

Making the S-Parameter Measurements

The swept S-parameter measurements in the next two setups provide the data that allowsextraction of parameters related specifically to the high-frequency performance of thedevice. A swept-frequency signal is applied to the gate, and the device S-parameters aremeasured at the drain.

Setting up the measurement conditions involves processes similar to those for the DCmeasurements: defining the instrument states and setting the input values for eachmeasurement.

Measuring S-Parameters vs Frequency

This procedure measures S-parameters across a calibrated microwave frequency range,with a fixed bias value in the typical linear operating region of the device.

FET Configuration: The input values you set in the following s_vs_f procedure configurethe FET as shown in the following figure.

FET Bias Configuration for the s_vs_f Measurement

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Parameters

The data from this measurement will be used to extract RIN, RDG, CDGN, RDGN, CDG,CGS0, A5, and RC.

Defining the Instrument States

Set the Cal Set No to the cal set or register where you stored the broadband calibrationyou performed earlier. The procedures in this documentation use cal set #1.

Setting the s_vs_f Input Values

Connect the network analyzer RF input cables to the RF IN ports of the bias networks andselect the s_vs_f setup.

For the freq input

Set To

Mode F

Sweep Type LIN (linear) for a linear measurement sweep across the frequency range.

SweepOrder

1

Start, Stop Set the Start and Stop values to correspond with the frequency you defined in your broadbandcalibration.

# of Points The same as in the calibration. For the vd input

Set To

Mode F

Sweep Type CON (constant), to provide fixed bias values of both gate and drain voltage

Compliance no greater than the maximum breakdown current value in the device datasheet

Value bias the device in a typical linear operating region of the device For the vg input

Set To

Compliance no greater than the maximum allowable gate current value

Sweep Type CON (constant), to provide fixed bias values of both gate and drain voltage

Value bias the device in a typical linear operating region of the device

The Outputs are factory set, and should not be changed, except for Type. To reducetime in plotting all four S-parameters, you can set Type to M (medium) for now.

Measuring and Plotting

Select Plots > Display All. This displays all the plots at the same time.1.Alternatively, you can display them one-by-one using the method explained in theother measurement procedures.Select Measure/Simulate > Measure. The plotted data should be typical for your2.device. The illustrations below show measured S-parameter data for an exampledevice. If the results are unexpected, recheck the values you set in the inputs andinstrument options. In particular, be sure the instrument states and input stimulussignals match the values set in the network analyzer calibration.If you change the inputs or instrument states, repeat the measurement. If the data3.still looks abnormal, the device may be defective.Save the measured data using File > Save As and a filename with the suffix .set.4.Close the plots.5.

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Measuring Parasitic Resistances and Inductances

This procedure uses S-parameter measurements to determine the device parasiticresistance and inductance values. It measures S-parameters vs frequency, with both thegate-source and gate-drain junctions strongly forward biased, and fixed values of gateand drain current. Drain current is set to one half gate current, to force Is = Id: thismakes the intrinsic Vds zero, removing the channel resistance. The device can thus bemodeled as a T-network.

FET Configuration: The input values you set in the following parasitics procedure configurethe FET as shown in the following figure.

FET Bias Configuration for parasitics Measurement

This measurement is done last because of the high gate current applied to the device.However, this high current should not be a problem because the power dissipation is notcorrespondingly high with Vds forced to zero. Theoretically, if the parasitic resistance werelarge enough for heat to be generated, the device could be damaged, but this situation ishighly unlikely.

Parameters

The data from this measurement will be used to extract all the parasitic resistance andinductance values: RG, RD, RS, LG, LD, and LS.

Defining the Instrument States

Use the same instrument option settings you used in the s_vs_f measurement.

Setting the parasitics Input Values

Select the parasitics setup.1.Set the input values under freq the same as for the s_vs_f measurement, as you will2.be using the same network analyzer calibration.Set the id Compliance as high as the device maximum Vds value or higher. The3.voltage compliance should not be so low as to inhibit current flow in thismeasurement.Set the ig Compliance as high as the device maximum Vgs value or higher.4.Set the Sweep Type to {{CON}}stant for both id and ig to provide fixed current5.values.Set the id current Value to ID and the ig Value to IG. Numerical values are assigned6.to these variables as follows:

To ensure that the Is = Id = Ig/2 relationship is maintained, the ratio betweengate current and drain current is defined in the setup variable table. This allowsthe gate current to be set to a numerical value and the drain current to bespecified with respect to the gate current.Select the Setup Variables tab. A variable table is displayed where you candefine Ig and Id.Set the IG current value based on gate width: 0.1 to 0.2 mA per micron. Thusfor a device with 500 µm gate width, Ig would be 100 mA. This may seem like a

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lot of gate current, but the larger Ig is, the smaller the dynamic impedancebecomes.Set the ID current to -IG/2, to force Is = Id.

Measuring and Plotting

From the Plots tab, select the R_data plot, and Display Plot.1.Select Measure/Simulate > Measure.2.To make sure the SMUs did not compliance-limit during this measurement, check the3.UNIX window for an error message to that effect. If the SMUs did reach compliancelimit, the current may not have been balanced in the drain and source, which willcause misleading extraction results. In this case, go back to the inputs and increasethe ig and id Compliance values by as much as 10 to 20%.The measured data should resemble the following illustration. The annotation shows4.the resistance data as the real part of the device impedance Z. The displayed tracesare the measured values for Rs, Rd, and Rg.

Example Parasitic Resistances

Select the L_data plot, and Display Plot. The plotted data should resemble the5.illustration. The annotation shows the inductance data as the imaginary part of thedevice impedance Z. The displayed traces are the measured values for Ld, Lg, andLs.

Example Parasitic Inductances

Leave the parasitics setup open, as it is the first setup used in the extraction process.6.

Parameter Extraction

Now that all the measurements have been made, the extraction process can begin. Thereis no single clear and exact procedure for extracting parameters: the process is very

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iterative and subjective. The goal is to create a list of device parameters that can be usedin a model to accurately predict performance. A key to success is that the parametersmust be realistic. Because of the inherent coupling of the model equations, a variety ofparameter value combinations will result in a good match between simulated andmeasured data.

The specific measurement setups are defined for the purpose of decoupling the modelequations as much as possible. In this way, the effects of individual parameters or smallgroups of related parameters can be isolated, and their values determined with reasonablecertainty. However, no matter how good the measurement setup, there is always someinteraction between parameters. Therefore, during the extraction process, the validity ofthe extracted parameters must be constantly scrutinized.

The ability to discern reasonable values from questionable ones comes from knowledge ofdevice physics, knowledge of the particular device, and individual experience. Parameterextraction is still very much an art.

Parasitic Extraction

In all the equations governing the behavior of the model, the voltages are assumed to beintrinsic. There is no direct way to measure or set the intrinsic voltages, so they must bedetermined indirectly. To accomplish this, the parasitic resistances and inductances mustfirst be very accurately determined. Once these are known, the intrinsic voltages can becalculated from these parasitic values and the known currents, using the followingequations:

DC:

VGSint = VGSext - Ig - RG - Is - RS

VDSint = VDSext - Id - RD - Is - RS

AC:

vgsint = vgsext - ig(RG + jωLG) - is(RS + jωLS)

vdsint = vdsext - id(RD + jωLD) - is(RS + jωLS)

These intrinsic voltages are used by the Curtice cubic model to predict deviceperformance, so they must be known before any other parameters can be extracted.

Selecting the Simulator

One last step remains before the actual extractions: to check that the selected simulator iscompatible with the model. The only simulator that supports the Curtice GaAs model ishpspice.

Select the Model Variables tab. A variable table is displayed, showing thename of the currently selected simulator. If the SIMULATOR name is nothpspice, then type hpspice.

Displaying the Parameters Table

The CGaashf Model Parameters table lists all the parameters that will be extracted, andinitially displays default values. As you perform the individual extractions, the defaultvalues change to extracted values. Throughout the extraction process, you will use theParameters table to read extracted values, and to enter or modify values to adjustinteractive parameters for best agreement of simulated with measured data. In addition,you can set limits by entering minimum and maximum values for each parameter.Parameter values that are outside their limits are clamped to their minimum or maximum

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values. To view the parameters, click the Model Parameters tab.

Extracting Parasitic Resistances and Inductances

This procedure extracts the parasitic gate, drain, and source resistances (RG, RD, RS) andgate, drain, and source inductances (LG, LD, LS). These parameters are extracted fromthe S-parameter data measured with the parasitics setup.

Locate the default values for RG, RD, RS, LG, LD, and LS in the Parameters table.1.Select the parasitics setup from the DUT/Setup panel.2.From the Plots tab, select R_data > Display Plot, and L_data > Display Plot.3.From the Extract/Optimize tab, select the autoextract transform and Execute. The4.transform calculates the parasitic values with frequency and enters them in theParameters table. In the plots, the resistance data displayed is the real part of thedevice impedance Z, and the inductance data is the imaginary part of the impedance.Select the zg transform and Execute. The transform data is added to the R_data and5.L_data plots.To verify the RG and LG data values in the Parameters table against the values6.plotted, position the pointer at a frequency of interest or on some approximatelymedian point on the trace, and click middle. A readout of the trace value (Y) at thatpoint is listed above the plot: compare this value with the value in the Parameterstable.If the trace value you selected and the Parameters table value do not closely7.correspond, it may be because a portion of the trace is noisy. In particular, theinductance values at the lower frequencies are likely to be noisy and less valid. Youmay wish to change the Parameters table value to more closely represent a linearportion of the trace. The parasitic values calculated by autoextract are averagedacross the entire frequency range of the measurement by default. To average acrossonly a portion of the trace you can use the X-low/X-high function.

Select the Setup Variables tab. A variable table will appear, listing X_LOW andX_HIGH with their default or current frequency values.From the plotted data choose a linear portion of the trace. Put the mousepointer at the low end of that portion and click left, then put the pointer at thehigh end and click left to make a box on the trace, as shown in the illustration.

Selecting a Linear Portion of the L_data Trace

From the plot menu select Options > Copy to Variables. This changes theX_LOW and X_HIGH values in the table to the values you selected on the trace.Repeat autoextract > Execute. The transform recalculates the parasitic valuesusing the new X-low/X-high values.

Select Extract/Optimize > zd > Execute. To verify the drain resistance and8.inductance values (RD and LD) in the Parameters table, follow the same steps as forthe gate parasitics.Select zs > Execute. To verify the source resistance and inductance values (RS and9.LS) in the Parameters table, follow the same steps as for the gate parasitics.Close the plots.10.

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Extracting the Gate Diode Parameters

This procedure extracts the parameters N (ideality factor), VBI (built-in voltage), and IS(junction saturation current). These parameters are extracted from the DC data measuredwith the ideality setup.

N (Ideality Factor)

Scroll the Parameters table until it shows the value for ideality, represented as1.NMF1.N.

NoteSeveral of the parameter names in the table are preceded by NMF1.

Select DUTs/Setups > ideality.2.Select Plots > n_vs_vg > Display Plot.3.Select Extract/Optimize > extract > Execute.4.Select the n transform, and Execute. This calculates the ideality factor and enters it5.into the Parameters table.The data displayed in the n_vs_vg plot should resemble the figure below. N is6.computed as the minimum value along the linear region of the logarithmic curve(shown in the box in the figure below). Beyond the linear region, the parasitic valuesbegin to dominate, and N is no longer identifiable.To check the N value in the Parameters table against a value on the trace, put the7.mouse pointer on the linear portion of the trace and click middle for a readout of theY-axis value at that point.If the n_vs_vg plot looks significantly different from the following figure, the N value8.in the Parameters table may not be valid. For example, if noise is present on thetrace below the linear region of the curve, N may have been computed as theminimum value of the noise. In this case, use the X-low/X-high function to get amore valid value.

Linear Portion of the n_vs_vg Plot

To compute N over only the linear portion of the trace using X-high/X-low:9.Select Setup Variables to open the X-high/X-low variable table.In the Value field (right side of the table) for OVERRIDE_LIMITS, change FALSEto TRUE, to set override limits to true.Make a box on the trace by clicking left on the ends of the linear portion.From the plot menu select Options > Copy to Variables to change the X-low/X-high values to the trace limits you selected.Select Extract/Optimize > extract > Execute to recalculate the N valueusing the new X-low/X-high values.Check the value of NMF1.N in the Parameters table.

If no linear region is shown on the trace, a valid ideality factor cannot be computed10.from it. In this case, you will need to manually enter a value of 1 or 0. Since thecontribution of N to the gate current is relatively small, it is best when the data is

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very nonlinear to eliminate the contribution of the N factor by using a value of 0. Tochange the NMF1.N value in the Parameters table, move the mouse pointer over thecurrent entry and click left to highlight it, then type in the new value and pressReturn.

IS (Saturation Current)

Select Plots > ig_vs_vg > Display Plot. The data displayed should resemble the1.following figure, with two plotted functions of gate current Ig vs gate voltage Vg. Thesolid line is the measured data, and the dashed line is the simulation.

Measured and Simulated Saturation Current (IS) Data

Scroll the Parameters table until it shows the value for NMF1.RF.2.Select DUTs/Setups > Extract/Optimize > rf_off > Execute. The value of3.NMF1.RF in the Parameters table will change to 0.Scroll the Parameters table until it shows the value for NMF1.IS.4.Select Extract/Optimize > opt_is > Execute. Observe the plot and see the5.simulated data converge on the measured data as the value for IS is optimized.(Note that the opt_is transform optimizes the linear data for which the ideality factoris valid.)Observe the change in the Parameters table value for IS.6.The parameter value for VBI is also changed.7.Close the plots.8.

Extracting the A Parameters and VDS0

This procedure extracts and optimizes the A0, A1, A2, and A3 coefficients that describethe threshold characteristics of the device. VDS0 is the value of VDS at which A0 throughA3 are determined; its default value is the value of Vd specified in the idvg_vd inputs.

These parameters are extracted from the DC data measured with the idvg_vd setup.

Scroll the Parameters table until it shows the default values for A0, A1, A2, and A3.1.Select DUTs/Setups > idvg_vd.2.Select Plots > id_vs_vg > Display Plot.3.

A Parameter Data After Optimization

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Select Extract/Optimize > extract > Execute.4.The transform calculates the values of A0, A1, A2, A3, and VDS0 and enters them5.into the Parameters table.Scroll the Parameters table until you find the value for NMF1.VDS0. Manually enter6.this same value into the Parameters table for VDSDC (you will need to scroll theParameters table again to find it).Select Measure/Simulate > Simulate. The plot should now display a solid-line7.measured curve and a dashed-line simulated curve.Select Extract/Optimize > opt_cubic > Execute. Watch the simulated data8.converge on the measured data as the values for the A coefficients are optimized (asin the figure above).Select Model Parameters, and observe the new Parameters table values for the A9.coefficients and VDS0.Close the plot.10.

Extracting Beta and Gamma Parameters and RDS0

This procedure extracts beta2 and gamma2, the Curtice cubic parameters that control thelinear and saturation regions of device operation. Gamma2 dominates in the linear regionand determines the transition from linear to saturation; beta2 dominates in the saturationregion.

Also extracted through optimization is RDS0, the intrinsic output resistance. RDS0dominates at both the low and high values of Vds relative to VDS0 (that is, Vds ≤ VDS0and VDS0 ≤ Vds).

These parameters are extracted from the DC data measured with the idvd_vg setup.

Scroll the Parameters table until you find RDS0. Manually set an RDS0 value of 1K1.ohms, as the initial value to be used in the optimization.Select the idvd_vg setup.2.Select Plots > id_vs_vd > Display Plot.3.Select Extract/Optimize > extract > Execute.4.Select Measure/Simulate > Simulate.5.The plot should now display a family of solid-line measured curves and dashed-line6.simulated curves, as in the following figure.

Measured and Simulated Data for Beta, Gamma, and RDS0 Extraction

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Select Extract/Optimize > opt_cubic > Execute. Watch the simulated curves7.converge on the measured curves as the beta and gamma coefficients are optimized.Scroll the Parameters table and observe the new values for BETA, GAMMA, and8.RDS0.Close the plot.9.

Extracting the AC and Capacitance Parameters

This extracts the parameters RIN, RGDN, CGDN, CDS, CGS0, A5, and RC. Theseparameters are extracted from the S-parameter data measured with the s_vs_f setup. Thetransforms calculate the intrinsic admittances vs frequency.

In an extraction of admittances vs frequency, the linear region of the data may bebounded by nonlinearities at the ends of the frequency range. Capacitance tends todominate at lower frequencies, and inductance at higher frequencies. The mostappropriate values for the extracted parameters occur in the linear resistive region of thedata. The X-low/X-high function lets you define the boundaries of the linear region andperform the transform over only that region.

Select the s_vs_f setup.1.Select the Plots tab, then select and display the following plots: Rs, Cs, tau_a5, and2.CGS0.Select the Extract/Optimize tab, then select and execute the following transforms:3.ygs, ygd, yds, a5, cgs0, and ygm.Examine the plots and use the X-low/X-high function if necessary to limit the range4.of the extractions that will follow:

Select Setup Variables to open the X-high/X-low variable table.Click left at the ends of the linear region to make a box on the trace.From the plot menu select Options > Copy to Variables to change the X-low/X-high values to the trace limits you selected.Select Extract/Optimize > extract > Execute to recalculate the parametervalues using the new X-low/X-high values.

Select extract_RC > Execute. This transform optimizes RC to minimize the5.difference between the measured real yds and the simulated real yds.Verify the values of the extracted parameters listed in the Parameters table against6.the measured data in the plots.

The Cs plot shows the value for CGDN as imag(ygd), the imaginary part of themeasured gate admittance; and CDS as imag(yds), the imaginary part of themeasured drain admittance.The Rs plot shows RIN as real(ygs), the real part of the measured gateadmittance; and RGDN as real(ygd), the real part of the measured drainadmittance.The CGS0 plot shows CGS0 as real(cgs0).The tau_a5 plot shows A5 as imag(a5).

Verifying the AC and Capacitance Extractions

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Select Plots > S11 > Display Plot. Repeat this for S12, S21, and S22.1.The plots show the measured and simulated S-parameter values. If the extraction is2.good, the simulated traces should converge toward the measured traces, as in the S-parameter plots below.If the simulated traces do not match the measured traces well, recheck the extracted3.R, C, and L values.Close the plots.4.

This ends the extraction process.

Storing the Model

This procedure stores the model in IC-CAP, including all the device-specific measured andsimulated data. Once you have developed the device model, it can be used as acomponent in the Agilent RF and Microwave Design System (MDS). You can use it forcircuit simulation, inserting it into circuits under design to emulate the characteristics ofyour device.

If you will be modeling large numbers of devices, it is worthwhile to organize yourdirectory structure according to device type, geometry, and batch or wafer.

Use the UNIX directory you created at the beginning of the procedure, when you first1.opened the CGaashf.mdl file.From the CGaashf:1 main menu select File > Save As.2.A dialog box is displayed, as illustrated.3.

Save As Dialog Box

Select the File Type (.mdl for a complete model) by clicking the corresponding radio4.button.Select a new filename that associates this model with the device, for example5.fet5.mdl. Type the full directory pathname and the filename into the dialog box.Select OK to store the data and close the dialog box.

Storing the Parameters Table

The Parameters table lists all the parameters extracted for a device model. You can savethe Parameters table for a specific device. The illustration shows a portion of the table.

Top Portion of the Model Parameters Table

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To save the Parameters table select File > Save As.1.In the dialog box, select the File Type .mps for model parameter set.2.Type in a filename or use the one in the File Name field.3.Select OK.4.

You can now recall the same set of device parameters any time you wish.

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UCB GaAs MESFET CharacterizationThis section provides information on the following topics:

Introduction to UCB GaAs MESFET Model (mesfet)Simulators (mesfet)Model Parameters (mesfet)Test Instruments (mesfet)Measuring and Extracting (mesfet)References (mesfet)

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Introduction to UCB GaAs MESFET ModelThis section describes the UCB GaAs MESFET transistor model supported by SPICE.Descriptions of model setup, instrument connections, and model parameters are includedas well as test instrument information. Procedures are included for extracting AC and DCmodel parameters from GaAs MESFET transistors using the UCB GaAs MESFET Model.These model parameters describe the operating characteristics of the device under test(DUT) and can be derived from either simulated or direct measurements of the DUT.

The IC-CAP UCB GaAs MESFET modeling module provides setups that can be used forgeneral measurement and model extraction for GaAs technology. The IC-CAP systemoffers the flexibility to modify any measurement or simulation specification.

The model extractions provided are also intended for general GaAs IC processes. If youhave another method of extracting specific model parameters, you can do so with theProgram function or by writing a function in C and linking it to the Function List. Details onthe Program transform and writing user-defined C language routines are explained inTransforms and Functions (extractionandprog).

The model presented here has been enhanced with the inclusion of the series inductorsand the gate resistor. Both of these are implemented as circuit elements of the overallsubcircuit. This is an example of one method you might use to customize your own model.

UCB GaAs MESFET Model

The UCB GaAs MESFET model is contained in an IC-CAP example file UCBGaas.mdl. Thefile consists of a single level model that is based on a model developed at Raytheon andimplemented in UCB's SPICE3 simulator [1][2]. In this model, drain current is proportionalto the square of the gate-to-source voltage multiplied by the expansion series of thehyperbolic tangent of the drain-to-source voltage.

The model defines total gate junction capacitance and takes into account the FETsymmetry and carrier velocity saturation. Unlike the SPICE3 version, the IC-CAP modelincludes gate, source, and drain inductances, and gate resistance. These components areextracted in IC-CAP as external resistance and inductances to improve the accuracy of themodel.

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SimulatorsThis model is supported by SPICE3. HPSPICE provides only DC analysis capability for thismodel.

NoteSimulators are provided as a courtesy to IC-CAP users; they are not supported by Agilent Technologies.

The SPICE3 default nominal temperature is 27°C. Set the TNOM variable under theUtilities menu to force another temperature.

SPICE3 Simulators

The general form for the SPICE3 statement that calls the UCB GaAs MESFET model is

ZXXXXXXX ND NG NS MNAME

where

ZXXXXXXX indicates MESFET device name (any name that begins with Z)

ND indicates drain node number

NG indicates gate node number

NS indicates source node number

MNAME indicates model name

An example of this call is

Z1 7 2 3 ZM1 OFF

The SPICE3 syntax of the .MODEL definition is

.MODEL MNAME TYPE PNAME1=PVAL1 PNAME2=PVAL2 ...

where

MNAME indicates model name

TYPE indicates NMF (N-channel MESFET) or PMF (P-channel MESFET)

PNAME# indicates UCB GaAs MESFET parameter name

PVAL# indicates parameter value of PNAME#

HPSPICE Simulators

The general form for the HPSPICE statement that calls the UCB GaAs MESFET model is

JXXXXXXX ND NG NS MNAME

where

JXXXXXXX indicates MESFET device name (any name that begins with J)

ND indicates drain node number

NG indicates gate node number

NS indicates source node number

MNAME indicates model name

An example of this statement is

J1 5 1 2 MODJ

The HPSPICE syntax for the .MODEL definition is

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.MODEL MNAME RCAY TYPE PNAME1=PVAL1 PNAME2=PVAL2 ...

where

MNAME indicates model name

RCAY key word specifying a GaAs MESFET model

TYPE indicates NJF (N-channel MESFET) or PJF (P-channel MESFET)

PNAME# indicates UCB GaAs MESFET parameter name

PVAL# indicates parameter value of PNAME#

The parameter MODEL in the .MODEL description must be set.

MODEL = 3 indicates UCB GaAs MESFET model

IC-CAP allows you to assign node names to node numbers, simplifying references to nodes(by a meaningful name). For more information, refer to Assigning Node Names(simulation).

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Model ParametersUCB GaAs MESFET model parameters are described in the following table. Setup attributesare listed in UCB GaAs Model Setup Attributes.

UCB GaAs MESFET Model Parameter

Name Description Default

Inductance andResistance Parameters

LD Drain inductance. Specifies external drain inductance. 0 Henry

LG Gate inductance. Specifies external gate inductance. 0 Henry

LS Source inductance. Specifies external source inductance. 0 Henry

RD Drain resistance. Specifies external drain resistance. 0 Ohm

Diode Parameters

IS Diode reverse saturation current. Models gate-drain and gate-sourcecurrent.

1 × 10-14

Amp

PB Gate junction potential. Models built-in potentials of gate-source andgate-drain regions.

1V

XN Diode emission coefficient. Models emission coefficient of an idealdiode.

1

DC Parameters

ALPHA Saturation voltage parameter. Specifies voltage at which draincurrent reaches saturation. The Vds coefficient in the tanh function.

2.0V-1

B Doping profile parameter. Models intrusion of doping profile into theinsulating substrate.

0.3V -1

BETA Transconductance parameter. Defines transconductance in thesaturation or linear operating regions.

1 × 10-4

A·V-2

LAMBDA Channel length modulation parameter. Models finite outputconductance of a MESFET in the saturation region.

0V-1

VTO Zero bias threshold voltage. Models gate turn-on voltage. 0V

Capacitance Parameters

CGD Zero bias gate-drain capacitance 0 Farad

CGS Zero bias gate-source capacitance 0 Farad UCB GaAs Model Setup Attributes

DUT/ Setup Inputs Outputs Transform Function Extractions

ac/ s_at_f vg, vd, vs,freq

s extract_L_and_R GAASAC_l_and_r LD, LG, LS, RD, RG, RS

ac/ s_vs_f vg, vd, vs,freq

s extract_CV GAASCV_cgs_cgd CGD,CGS

dc/igvg_0v[sd]

vg, v[sd] ig extract GAASDC_lev1 PB, IS, XN

optim1 PB, IS, XN

dc/ idvg_hi_vd vg, vd, vs id, ig none

dc/ idvd_vg vd, vg, vs id, ig extract GAASDC_lev2 VTO, BETA, ALPHA, LAMBDA, B

optim1 Optimize VTO, BETA, ALPHA, LAMBDA

optim2 Optimize VTO, BETA, B

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Test InstrumentsThe HP 4141, Agilent 4142, HP 4145, Agilent 4155, or Agilent 4156 can be used to deriveDC model parameters from measured DC voltage and current characteristics.

The Agilent 8510, Agilent 8753, or HP 8702 (with an HP 41xx instrument) can be used toderive capacitance and inductance model parameters from S-parameter measurements.

Instrument-to-Device Connections

When the device is installed in a test fixture, verify the correct connection of device nodesby checking the specifications in the setup tables. The following table is a cross-referenceof the connections between the terminals of a typical MESFET device and variousmeasurement units. These connections and measurement units are defined in theUCBGaas.mdl example file.

Input and output tables in the various setups use abbreviations D (drain), G (gate), and S(source) for the MESFET device nodes. These nodes are defined in the Circuit folder.

Measurement units (abbreviated as follows) are defined in Hardware Setup.

SMU# for DC measurement unitsNWA for network analyzer units

Instrument-to-Device Connections

DUT Source Gate Drain Comments

dc SMU3 SMU2 SMU1

ac Ground SMU2 NWA (port 1) SMU1 NWA (port 2) Calibrate for reference plane

Notes:

DUT is the name of the DUT as specified in DUT-Setup.1.Example: DUT dc has the DC measurement unit SMU1 connected to its drain, SMU22.connected to its gate, and SMU3 connected to its source.

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Measuring and ExtractingThis section provides general information as well as procedures for performingmeasurements and extractions of MESFET devices.

Measurement and Extraction Guidelines

The following guidelines are provided to help you achieve more successful modelmeasurements and extractions.

Setting Instrument Options

Before starting a measurement, you can quickly verify instrument option settings. Savethe current instrument option settings by saving the example file to <file_name>.mdlfrom the model window. Some of the Instrument Options specify instrument calibration.For the most accurate results, calibrate the instruments before taking IC-CAPmeasurements.

DC measurements are generally taken with Integration Time = Medium.CV measurements in the femtofarad region usually require High Resolution = Yes andMeasurement Freq (kHz) = 1000.When taking AC measurements with a network analyzer, several instrument settingsare critical. In addition, the calibration must be performed on structures that havesimilar impedances as the stray parasitics of the DUT.Input power to the device is typically -10 to -30dBm (after port attenuation).Setting the averaging factor to the 2-to-4 range reduces measurement noise.Because IC-CAP requires the instrument to perform error correction, set Use InternalCalibration to Yes.

Experiment with the other network analyzer options to obtain the best results with specificdevices.

Measuring Instruments

Ensure that the measuring instruments (specified by unit names in the input and outputtables) are correctly connected to the DUT. Refer to Instrument-to-Device Connections(mesfet) for a list of nodes and corresponding measurement units. The quality of themeasuring equipment (instruments, cables, test fixture, transistor sockets, and probes)can influence the noise level in the measurements.

Ensure that all characteristics of the measurement stimulus and corresponding measuredresponse are specified in the respective input and output tables.

Calibration

For some measurements the instruments or test hardware must be calibrated to removenon-device parasitics from the DUT. For MESFET devices, stray capacitance due to probesystems, bond pads, and so on should be calibrated out prior to each measurement.

For high-frequency 2-port measurements with a network analyzer, the reference plane ofthe instrument must be calibrated out to the DUT. IC-CAP relies on the internal calibrationof the instruments for full error-corrected data. It is critical that calibration using OPEN,SHORT, THRU, and 50 ohm loads be properly done.

Extracting Model Parameters

For a given setup, you can find the extraction transforms in the Extract/Optimize folder.IC-CAP's extraction algorithms exist as functions; choose Browse to list the functionsavailable for a setup.

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When the extract command is selected from the setup, all extractions in the setup areperformed in the order listed in the setup. This order is usually critical to proper extractionperformance. Extractions are typically completed instantly and the newly extracted modelparameter values are placed in Model Parameters.

IC-CAP provides setups for two extraction methods. In general, you only need to performone of the methods in order to extract parameters.

Simulating Device Response

Simulation uses model parameter values currently in the Parameters table. A SPICE deckis created and the simulation performed. The output of the SPICE simulation is then readinto IC-CAP as simulated data.

SPICE3 is the only simulator fully compatible with the IC-CAP UCBGaas.mdl configurationfile is. You can also use the HPSPICE simulator if you modify the parameter names tomatch it. DC simulations generally run much faster than cv and AC simulations.

If simulated results are not as expected, use the simulation debugger (in the Tools menu)to examine the input and output simulation files. The output of manual simulations is notavailable for further processing by IC-CAP functions such as transforms and plots.

Displaying Plots

The Display Plot function displays all graphical plots defined in a setup. The currentlyactive graphs are listed under the Plots folder in each setup. View the plots for agreementbetween measured and simulated data. Measured data is displayed as a solid line;simulated data is displayed as a dashed or dotted line.

Optimizing Model Parameters

Optimization of model parameters improves the agreement between measured andsimulated data. An optimize transform whose Extract Flag is set to Yes is automaticallycalled after any extraction that precedes it in the transform list.

Optimizing AC parameters can be very time consuming because of the number of SPICEsimulations required.

Extraction Procedure Overview

This section describes the general procedure for extracting model parameter data from theUCB GaAs MESFET. The general procedure applies to all types of parameters. Differencesbetween extracting one type and another are primarily in the types of instruments, testsetups, and transforms used.

Parameters are extracted from measured or simulated data. Measured data is data takendirectly from instruments connected to the DUT inputs and outputs. Simulated data areresults from the simulator. Once measured and simulated data have been obtained, eachdata set can be plotted and compared in the Plot window.

The general extraction procedure is summarized next, starting with the measurementprocess.

Install the device to test in a test fixture and connect the test instruments.1.Ensure the test fixture, signal source and measuring instruments, and workstation2.are physically and logically configured for the IC-CAP system.Choose File > Open > Examples. Select UCBGaas.mdl and choose OK. Select3.Open to load the file and open the model window. Choose OK.When the UCBGaas model window opens you are ready to begin measurement and

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extraction operations.Enter the variable name EXTR_PAR at the Model level and enter NMF1 as its value. This4.allows the extractions to find the model parameters for the model name NMF1 withinthe subcircuit of the model file. This concept is covered in more detail in DefiningCircuits (definingcircuits).Select the DUT and setup.5.Issue the Measure command.6.Issue the Extract command.7.Issue the Simulate command.8.Display the results.9.Fine tune the extracted parameters if needed by optimizing.10.

Parameter Measurement and Extraction

The recommended method for extracting UCB GaAs model parameters is presented next.In this extraction, external resistances are extracted from AC data.

NoteIf AC data is not available, an alternative method (described in Alternate Extraction Method) uses theFukui technique [3] for extracting the resistances from DC data. Use the alternative method only if ACdata is not available; the recommended method produces parameters that are more precise.

NoteThe UCB GaAs MESFET model extractions and Special Functions in IC-CAP only support the model asdefined by the UCB SPICE3 implementation. There is a difference in several model parameter names fromthe Curtice model and the UCB model as they are implemented in the HPSPICE simulator. Valid modelparameter names are listed in UCB GaAs MESFET Model Parameter (mesfet).

Parameter extractions are dependent on each other; to ensure accuracy extractions mustbe done in this order:

Inductances and resistances (AC)

External inductance and resistance parameters are extracted from an S-parameter measurement at a single bias setting. The gate of the device isstrongly forward-biased to make the device look like a short circuit. The setups_at_f is used to take the measurements and extract the parameters LD, LG, LS,RD, RG, and RS.

Diode parameters (DC)

Diode parameters PB, IS, and XN are extracted from data produced by themeasurement of Ig versus Vg measured at zero drain voltage, with the sourcefloating. The setup igvg_0vs or igvg_0vd is used to make the measurementsand extractions, depending on whether the gate-source or gate-drain junction ispreferred.

Other DC parameters (DC)

The remaining DC parameters are extracted using two setups: idvd_vg andidvg_hi_vd. Use idvd_vg to measure Id versus Vg at different gate voltages,then use idvg_hi_vd to measure Id versus Vg at a constant drain voltage.Parameters VTO, BETA, ALPHA, LAMBDA, and B are then extracted from theresulting data.

AC (capacitance parameters)

The capacitance parameters CGD and CGS are extracted from an S-parametermeasurement using the setup s_vs_f. The measured data is first corrected usingthe inductances and resistances extracted in the initial step, then thecapacitances are extracted from the corrected data.

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Use a network analyzer to make the next set of measurements. S-parametermeasurements are highly sensitive-the instrument must be properly calibrated.

Place the device to be measured in the test fixture.1.

NoteFor the ac/s_at_f and s_vs_f measurements, the SMUs connected to the network analyzer's portbias connections must correspond to the SMUs in Instrument-to-Device Connections (mesfet).

Select the ac/s_at_f DUT/setup and choose Measure.2.In the ac/s_at_f DUT/setup choose Extract to extract inductance and resistance3.parameters.Select the ac/s_vs_f DUT/setup and choose Measure. Do not extract the4.parameters for this setup yet.Disconnect the device from the network analyzer and directly connect it to the5.appropriate units for DC measurements.Select the dc/ igvg_0vs or igvg_0vd DUT/setup and choose Measure.6.Repeat Step 6, but choose Extract to extract diode parameters.7.Repeat Step 6, but choose Optimize.8.Select the dc/idvg_hi_vd DUT/setup and choose Measure to measure Id versus Vg9.at a constant Vd.Select the dc/idvd_vg DUT/setup and perform the measure and extract steps to10.measure and extract the other DC parameters.Repeat Step 10, but choose Optimize.11.Select the ac/s_vs_f DUT/setup and choose Extract to extract the capacitances12.from the data that was measured in step 4.

All model parameters are extracted and their values added to the Parameters table; theycan be viewed in the Model Parameters folder.

Alternate Extraction Method

If AC data is not available, IC-CAP supports an alternate method for extracting UCBMESFET model parameters. This procedure uses the Fukui technique [3]; externalresistances are extracted along with the diode parameters from DC data-this differs fromthe recommended method. Use this method only if the AC data is not available-thisalternate method produces parameters that are less precise than those of therecommended method.

Parameter extractions are dependent on each other; to ensure accuracy extractions mustbe done in the following order.

Resistance and diode parameters (DC)

Using DC measurements only, this procedure uses the Fukui algorithm to extract theresistance parameters RD, RG, and RS from DC data (refer to UCB GaAs MESFET ModelParameter (mesfet)). Diode parameters PB, IS, and XN are also extracted. The extractionrequires the setups listed in the following table.

Resistance and Diode Measurement and Extraction Setups for the Alternative Method

idvg_low_vd Id versus Vg Small Vd

igvg_0vs Ig versus Vg Vs=0, with Drain floating

igvg_0vd Ig versus Vg Vd=0, with Source floating

The extraction is performed from the setup igvg_0vd. To use the Fukui algorithm, thefollowing inputs must be added to the function GAASDC_lev1 (extract transform).

VG (low Vds) idvg_low_vd/vgVD (low Vds) idvg_low_vd/vdID (low Vds) idvg_low_vd/id.m

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VG (D Flt) igvg_0vs/vgIG (D Flt) igvg_0vd/ig.m

Other DC parameters (DC)

Use the recommended method described previously.

Inductance parameters (AC)

Use the recommended method described previously. Parameters LD, LG, and LS areextracted from the S-parameter measurement. The same transform also extracts theresistance parameters, overwriting the existing ones as it does so.

Capacitance parameters (AC )

Use the recommended method described previously.

The alternate extraction procedure follows.

Connect the NWA to extract inductances and capacitances.1.Place the device to be measured in the test fixture.2.

NoteFor the ac/s_at_f and s_vs_f measurements, the SMUs connected to the network analyzer's portbias connections must correspond to the same SMUs in Instrument-to-Device Connections (mesfet).

Select the ac/s_at_f DUT/setup and choose Measure.3.In the ac/s_at_f DUT/setup, choose Extract to extract inductance and resistance4.parameters.Select the ac/s_vs_f DUT/setup and choose Measure.5.In the ac/s_vs_f DUT/setup, choose Extract to extract the capacitances from the6.data that was measured in step 3.Select dc/igvg_0vs DUT/setup and choose Measure.7.Repeat Step 7 for dc/idvg_low_vd and dc/igvg_0vd.8.In the dc/igvg_0vd DUT/setup, choose Extract to extract the resistance and diode9.parameters from the measured data for the three DC setups.Repeat Step 9 but choose Optimize.10.Select the dc/idvg_hi_vd DUT/setup and choose Measure to measure Id versus Vg11.at a constant Vd.In the dc/idvd_vg DUT/setup, repeat the Measure and Extract steps to measure and12.extract the other DC parameters.Repeat step 12 but choose Optimize.13.

Simulating

To simulate any individual setup, choose Simulate with that setup active. Simulations canbe performed in any order once all of the model parameters have been extracted.

For more information on simulation, refer to Simulation (simulation).

Displaying Plots

To display plots issue the Display Plot command from a DUT to display the plots for allsetups in that DUT. The Plots use the most recent set of measured and simulated data.Viewing plots is an ideal way to compare measured and simulated data to determine iffurther optimization would be useful. For more information on Plots, refer to Printing andPlotting (printandplot).

Optimizing

The optimization operation uses a numerical approach to minimize errors between

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measured and simulated data. As with the other IC-CAP commands, optimization can beperformed at either the DUT or setup level. Optimization is more commonly performedfrom setups-optimization for all setups under a DUT is rarely required.

Optimization is typically interactive in nature, with the best results obtained when youspecify the characteristics of the desired results.

For more information on optimization, refer to Optimization (optimization).

Extraction Algorithms

This section describes the extraction algorithms used for inductance, capacitance, DC, andseries resistance parameters of the UCB GaAs MESFET.

Inductance and Resistance Extraction

Inductors and resistors that are in series with each terminal of the MESFET are measuredwith a network analyzer at a high frequency and with the gate strongly forward-biased.Under these conditions the AC model for each terminal is reduced to a series R-L circuit.Inductors LD, LG, and LS and resistors RD, RG, and RS are extracted simultaneously fromthe measured impedance at the gate and drain ports.

DC Parameter Extractions

DC extractions are separated between the diode and forward active controllingparameters. Diode parameters PB, IS, and XN are extracted using a method similar to themethod used for a silicon diode. The diode is swept over a forward bias and linear least-squares curve fits will produce the built-in potential and forward conduction properties.

The forward active region is extracted from measurements of the MESFET in both thelinear and saturated modes of operation. The difference between the equations definingthese two regions is a tanh(ALPHA · Vds) multiplier in the linear mode. The threshold canbe obtained from a least-squares fit to the linear region. These equations are solved toproduce ALPHA, B, BETA, LAMDA, and VTO.

Capacitance Parameter Extractions

The capacitance of the gate-to-drain (CGD) and gate-to-source (CGS) is measured with S-parameters over typical operating frequencies. Because the inductances and seriesresistance are already known, these capacitances can be extracted from the correctedimpedances measured at the gate and drain ports.

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ReferencesHermann Statz, Paul Newman, Irl W. Smith, Robert A. Pucel, & Hermann A. Haus.1.GaAs FET Device and Circuit Simulation in SPICE, IEEE Transactions on ElectronDevices, Vol. ED-34, No. 2, February 1987.Tom Quarles et al. SPICE Version 3A7 User's Guide, University of California, Berkeley.2.H. Fukui, Determination of the Basic Device Parameters of a GaAs MESFET, The Bell3.System Technical Journal, Vol. 58, No. 3, March 1979.