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DEVELOPMENT OF CLOSED-LOOP INTERFACE CIRCUITS FOR CAPACITIVETRANSDUCERS WITH APPLICATION TO A MEMS CAPACITIVE MICROPHONE
By
KARTHIK KADIRVEL
A DISSERTATION PRESENTED TO THE GRADUATE SCHOOLOF THE UNIVERSITY OF FLORIDA IN PARTIAL FULFILLMENT
OF THE REQUIREMENTS FOR THE DEGREE OFDOCTOR OF PHILOSOPHY
UNIVERSITY OF FLORIDA
2007
1
c© 2007 Karthik Kadirvel
2
To my parents, sister and Sona
3
ACKNOWLEDGMENTS
I would like to thank my advisor and mentor Dr. Toshikazu Nishida for his constant
motivation and encouragement to bring out the best in me. This research would not have
been possible without his logical approach to problem solving and emphasis on fundamental
principles. Dr. Mark Sheplak and Dr. Robert Fox provided indispensable help on MEMS
processing and circuit design respectively at various points during this research . The many
discussions with Dr. Louis N. Cattafesta on control theory provided valuable information at
crucial junctures of this research.
I would like to thank my project colleagues David Martin for providing me with a MEMS
microphone to use as a test vehicle for the circuit development, Jian Liu for the help in modeling
using Matlab and Joel Fuster for the various board level circuit design ideas.
I would like to thank all my friends at the Interdisciplinary Microsystems Group for their
friendship and support during the course of my graduate program. Special mention goes to
Robert Taylor, Erin Patrick, and Stephen Horowitz for all their help.
Mr. T.K Sundaram, my high school mathematics and physics instructor, deserves special
mention here. I would like to extend my heartfelt thanks and gratitude for providing me with the
strong foundation on which all my achievements stand.
The help provided by Al Ogden, Ivan Kravachenko and Bill Lewis of the UF Nano
fabrication facilities and Ken Reed of TMR Engineering is gratefully acknowledged.
Finally, and most important I would like to thank my family and my wife for believing in
all my goals and aspirations and, for their love, encouragement, and constant support in all my
endeavors.
4
TABLE OF CONTENTS
page
ACKNOWLEDGMENTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
LIST OF TABLES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
LIST OF FIGURES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
ABSTRACT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
CHAPTER
1 INTRODUCTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
1.1 Background . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 181.2 Research Objectives . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 201.3 Dissertation Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
2 CAPACITANCE TRANSDUCERS . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
2.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 232.2 Canonical Capacitive Transducers . . . . . . . . . . . . . . . . . . . . . . . . . 23
2.2.1 Single Backplate Capacitive Transducers . . . . . . . . . . . . . . . . . . 242.2.2 Canonical Dual Backplate Capacitive Transducer . . . . . . . . . . . . . 33
2.3 Structure of Microphone . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 392.4 Lumped Element Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 412.5 Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
3 INTERFACE CIRCUITS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
3.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 463.2 Performance Metrics of Capacitive Transducers . . . . . . . . . . . . . . . . . . 463.3 Analog Open Loop Sense Techniques . . . . . . . . . . . . . . . . . . . . . . . 51
3.3.1 Sensing Using A Voltage Amplifier . . . . . . . . . . . . . . . . . . . . . 523.3.2 Sensing Using A Charge Amplifier . . . . . . . . . . . . . . . . . . . . . 653.3.3 Sensing Using Synchronous Modulation/Demodulation . . . . . . . . . . 72
3.4 Digital Open Loop Sense Techniques . . . . . . . . . . . . . . . . . . . . . . . . 803.5 Closed-Loop Sense Techniques . . . . . . . . . . . . . . . . . . . . . . . . . . . 85
3.5.1 Sensing Using Closed-Loop Analog Interface Circuit . . . . . . . . . . . 863.5.2 Sensing Using Digital closed-loop Interface Technique . . . . . . . . . . 91
3.6 Scaling Analysis of ∆Σ Interface Techniques . . . . . . . . . . . . . . . . . . . 933.7 Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 96
4 DESIGN OF ANALOG INTERFACE CIRCUIT . . . . . . . . . . . . . . . . . . . . 97
4.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 974.2 Simulation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 97
4.2.1 Simulink Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 984.2.2 Simulation Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102
4.3 Design of Analog Interface Circuit . . . . . . . . . . . . . . . . . . . . . . . . . 1034.3.1 Design of Amplifier for Top and Bottom Plate Voltage Generation . . . . 1034.3.2 Input Buffer Amplifier Design . . . . . . . . . . . . . . . . . . . . . . . 105
5
4.3.3 Demodulator Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1064.3.4 Compensator Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . 106
4.4 Integration of Interface Circuit Components on a PCB . . . . . . . . . . . . . . . 1084.5 Noise model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1094.6 Limitations of the Current Implementation of the Interface Circuit . . . . . . . . 1124.7 Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 112
5 DESIGN OF DIGITAL CLOSED LOOP INTERFACE CIRCUIT . . . . . . . . . . . 113
5.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1135.2 Design of ∆Σ Interface Circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . 1135.3 Component Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 116
5.3.1 Switched Capacitor Amplifier . . . . . . . . . . . . . . . . . . . . . . . . 1165.3.2 Compensator Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1205.3.3 Comparator Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1235.3.4 Bias Network Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . 124
5.4 System Level Timing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1245.5 System Level Simulation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1275.6 Circuit Implementation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1295.7 Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 130
6 EXPERIMENTAL SETUP AND RESULTS . . . . . . . . . . . . . . . . . . . . . . . 131
6.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1316.2 Acoustic Pressure Coupler . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 131
6.2.1 Design of Acoustic Pressure Coupler . . . . . . . . . . . . . . . . . . . . 1326.3 Experimental Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 133
6.3.1 Characterization of Pressure Coupler . . . . . . . . . . . . . . . . . . . . 1336.3.2 Open Loop Frequency Response of Microphone with dc Bias . . . . . . . 1366.3.3 Open Loop Frequency Response of Microphone with dc+ac Bias . . . . . 1376.3.4 Linearity of Open Loop Microphone . . . . . . . . . . . . . . . . . . . . 1396.3.5 Noise Floor of Open Loop Microphone . . . . . . . . . . . . . . . . . . . 1406.3.6 Compensator Characterization . . . . . . . . . . . . . . . . . . . . . . . 1416.3.7 Closed Loop Frequency Response . . . . . . . . . . . . . . . . . . . . . 1426.3.8 Closed Loop Linearity . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1446.3.9 Closed Loop Noise Floor . . . . . . . . . . . . . . . . . . . . . . . . . . 145
6.4 Discussion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1466.5 Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 149
7 CONCLUSION AND FUTURE WORK . . . . . . . . . . . . . . . . . . . . . . . . . 150
7.1 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1507.2 Future Work . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 150
7.2.1 Simulation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1517.2.2 Hardware Implementation . . . . . . . . . . . . . . . . . . . . . . . . . . 151
A PERFORMANCE METRICS FORMULATION . . . . . . . . . . . . . . . . . . . . . 152
A.1 Derivation of Sensitivity for a Voltage Follower . . . . . . . . . . . . . . . . . . 152A.2 Noise Analysis for a Capacitive Microphone with a Voltage Follower . . . . . . . 154A.3 Derivation of Sensitivity for a Charge Amplifier . . . . . . . . . . . . . . . . . . 156
6
A.4 Noise Analysis for a Capacitive Microphone with a Charge Amplifier . . . . . . 157A.5 Sensitivity for Synchronous Modulation and Demodulation Interface Circuit . . 158
B FORMULATION USED IN SWITCHED CAPACITOR CIRCUITS . . . . . . . . . . 162
B.1 Bandwidth Considerations for Amplifiers in Switched Capacitor Amplifiers . . . 162B.2 Analysis of Noise in a Switched Capacitor Amplifier . . . . . . . . . . . . . . . 162
B.2.1 Switch Resistance Noise . . . . . . . . . . . . . . . . . . . . . . . . . . 163B.2.2 Wideband Amplifier Noise . . . . . . . . . . . . . . . . . . . . . . . . . 163
REFERENCES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 164
BIOGRAPHICAL SKETCH . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 173
7
LIST OF TABLES
Table page
1-1 Comparison of audio and aeroacoustic microphone specifications . . . . . . . . . . . . 21
2-1 Dimensions of aeroacoustic and audio microphone[64]. . . . . . . . . . . . . . . . . . 40
2-2 Material properties of microphone structure. . . . . . . . . . . . . . . . . . . . . . . . 40
2-3 Theoretical formulation for lumped element model parameters. . . . . . . . . . . . . . 43
2-4 Lumped element model parameters of aeroacoustic and audio microphone. . . . . . . . 43
2-5 Second order system parameters of microphones. . . . . . . . . . . . . . . . . . . . . 44
3-1 Parasitic capacitance for various packaging technologies. . . . . . . . . . . . . . . . . 54
3-2 Specification of Voltage Amplifiers for Bruel and Kjaer Microphones. . . . . . . . . . 61
3-3 Review of interface circuits used in MEMS microphones published in literature. . . . . 63
3-4 Specification of a representative sample of operational amplifiers recommended bymanufacturers for use as voltage followers for capacitive transducers. . . . . . . . . . . 65
3-5 Review of charge amplifier interface circuits used in capacitive microphones. . . . . . 72
3-6 Specification of a representative sample of general purpose operational amplifiersrecommended by the manufacturer for use as charge amplifiers using a feedback resistorand capacitor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
3-7 Summary of previous synchronous modulation/demodulation based open loop capacitivetransducer interface circuit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79
3-8 Summary of previous synchronous modulation/demodulation based closed-loop capacitivetransducer interface circuit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89
3-9 Frequency requirements of ∆Σ interface circuits with increasing resonant frequency. . 94
3-10 Feedback voltage requirements of ∆Σ interface circuits with increasing dynamic range. 94
3-11 Summary of previous ∆Σ based closed-loop capacitive transducer interface circuit. . . 95
4-1 Feedback voltage requirements of aeroacoustic and audio microphone for force balancingmaximum input pressure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105
4-2 Element values for resistors and capacitors used in compensator. . . . . . . . . . . . . 107
4-3 Magnitude of parameters used in noise analysis . . . . . . . . . . . . . . . . . . . . . 110
5-1 Clock signals used in the various components of the ∆Σ modulator. . . . . . . . . . . 125
5-2 Function performed during each time interval. . . . . . . . . . . . . . . . . . . . . . . 127
5-3 Parameters used in closed loop simulation. . . . . . . . . . . . . . . . . . . . . . . . . 128
5-4 Frequency requirements of ∆Σ interface circuits with increasing resonant frequency. . 129
8
5-5 Feedback voltage requirements of ∆Σ interface circuits with increasing dynamic range. 129
6-1 Comparison of simulated and experimental sensitivity. . . . . . . . . . . . . . . . . . 139
6-2 Characterization results of microphone in open and closed loop mode of operation. . . 148
9
LIST OF FIGURES
Figure page
1-1 Microphone classification based on sensor structure. . . . . . . . . . . . . . . . . . . . 19
1-2 Common condenser microphone structures. . . . . . . . . . . . . . . . . . . . . . . . 20
1-3 Microphone classification based on sense technique. . . . . . . . . . . . . . . . . . . . 21
2-1 Overview of Chapter 2. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
2-2 Schematic of a single backplate capacitive transducer. . . . . . . . . . . . . . . . . . . 24
2-3 Schematic of a single backplate capacitive transducer connected to a voltage buffer. . . 26
2-4 Schematic of a single backplate capacitive transducer connected to a charge amplifier. . 28
2-5 Schematic of a single backplate capacitive transducer showing electrostatic force andrestoring force. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
2-6 Schematic of a differential capacitive transducer. . . . . . . . . . . . . . . . . . . . . . 33
2-7 Schematic of a dual backplate capacitive transducer connected to a voltage amplifier. . 36
2-8 Schematic of a dual backplate capacitive transducer connected to a charge amplifier. . . 36
2-9 Schematic of a dual backplate capacitive transducer showing forces on the movableplate. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
2-10 Cross section view of dual backplate microphone [64]. . . . . . . . . . . . . . . . . . 40
2-11 Low frequency LEM of dual backplate microphone. . . . . . . . . . . . . . . . . . . . 43
2-12 Theoretical normalized frequency response of audio microphone. . . . . . . . . . . . . 44
2-13 Theoretical normalized frequency response of aeroacoustic microphone. . . . . . . . . 45
3-1 Overview of Chapter 3. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
3-2 Characteristic frequency response of a capacitive transducer. . . . . . . . . . . . . . . 48
3-3 Characteristic ideal and actual response of a capacitive transducer. . . . . . . . . . . . 48
3-4 Characteristic noise floor of a capacitive transducer using a voltage amplifier interfacecircuit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
3-5 Noise model of resistor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
3-6 Noise model of opamp showing voltage and current noise source. . . . . . . . . . . . . 51
3-7 Plot of noise PSD of amplifier. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
3-8 Organization of each interface circuit discussed in Chapter 3. . . . . . . . . . . . . . . 53
3-9 Schematic of a dual backplate microphone connected to voltage buffer. . . . . . . . . . 53
3-10 Noise model of dual backplate microphone connected to voltage buffer. . . . . . . . . 55
10
3-11 Variation of sensitivity as a function of total parasitic capacitance for various sensecapacitances . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57
3-12 Power spectral density of individual noise contributors and total output noise in a voltageamplifier based interface circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
3-13 Plot of output noise for voltage amplifier with a fixed bias resistor (10MΩ) . . . . . . 59
3-14 Plot of output noise for voltage amplifier with a fixed parasitic capacitance of (10pF ). . 60
3-15 Schematic of dual backplate microphone connected to a charge amplifier. . . . . . . . 66
3-16 Noise model of dual backplate microphone connected to charge amplifier. . . . . . . . 66
3-17 Power spectral density of individual noise contributors and total output noise in a chargeamplifier based interface circuit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
3-18 Plot of output noise for charge amplifier with a fixed bias resistor (10MΩ) . . . . . . . 70
3-19 Plot of output noise for charge amplifier with a fixed parasitic capacitance of (10pF ). . 71
3-20 Schematic of capacitive microphone with a synchronous modulation and demodulationtechnique using a voltage amplifier based circuit. . . . . . . . . . . . . . . . . . . . . 73
3-21 Schematic of a capacitive microphone with a synchronous modulation and demodulationtechnique using a charge amplifier based circuit. . . . . . . . . . . . . . . . . . . . . . 73
3-22 Plot of spectrum at various nodes of Figure 3-21 . . . . . . . . . . . . . . . . . . . . . 74
3-23 Noise model of synchronous modulator and demodulator using voltage amplifier. . . . 77
3-24 Noise model of synchronous modulator and demodulator using charge amplifier. . . . . 77
3-25 Switched capacitor implementation of correlated double sampling. . . . . . . . . . . . 81
3-26 Equivalent circuit of switched capacitor amplifier during amplify and reset phase. . . . 82
3-27 Noise model of switched capacitor amplifier during amplify phase. . . . . . . . . . . . 82
3-28 Schematic of analog closed-loop force feedback scheme. . . . . . . . . . . . . . . . . 87
3-29 Schematic of first order ∆Σ modulator. . . . . . . . . . . . . . . . . . . . . . . . . . . 92
3-30 Schematic of second order mechanical ∆Σ modulator. . . . . . . . . . . . . . . . . . 92
4-1 Overview of Chapter 4. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 97
4-2 Block diagram of analog closed-loop system showing microphone and interface circuit. 98
4-3 Bode plot of compensator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101
4-4 Bode plot of loop gain with and without compensator. . . . . . . . . . . . . . . . . . . 102
4-5 Simulink model of analog closed-loop control system. . . . . . . . . . . . . . . . . . . 102
4-6 Subsystems used in Simulink model. . . . . . . . . . . . . . . . . . . . . . . . . . . . 103
11
4-7 Diaphragm displacement with and without feedback. . . . . . . . . . . . . . . . . . . 104
4-8 Diaphragm displacement with and without feedback. . . . . . . . . . . . . . . . . . . 104
4-9 Schematic of summing amplifier that generates top and bottom plate voltages. . . . . . 105
4-10 Schematic of voltage amplifier. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 106
4-11 Schematic of analog multiplier (AD835) showing relevant pins. . . . . . . . . . . . . . 106
4-12 Schematic of two stage compensator. . . . . . . . . . . . . . . . . . . . . . . . . . . . 107
4-13 Annotated photograph of PCB1 showing buffer amplifier, breakout headers and opticalport. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 108
4-14 Annotated photograph of PCB2. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 108
4-15 Schematic of forward path of the closed loop system . . . . . . . . . . . . . . . . . . 109
4-16 Plot of theoretical noise floor of the open loop system and forward path system . . . . 111
5-1 Overview of Chapter 5. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 113
5-2 Flow chart for design of ∆Σ modulator component parameters from system levelspecification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 114
5-3 Schematic of second order mechanical ∆Σ modulator. . . . . . . . . . . . . . . . . . 115
5-4 Transistor level schematic of amplifier. . . . . . . . . . . . . . . . . . . . . . . . . . . 117
5-5 Schematic of amplifier during amplify phase. . . . . . . . . . . . . . . . . . . . . . . 118
5-6 Transistor level schematic of compensator. . . . . . . . . . . . . . . . . . . . . . . . . 121
5-7 Compensator schematic during the two phases of operation. . . . . . . . . . . . . . . . 122
5-8 Transistor level schematic of comparator . . . . . . . . . . . . . . . . . . . . . . . . . 123
5-9 Schematic of bias network. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 124
5-10 Flowchart showing the sequence of operation of the overall ∆Σ modulation basedinterface circuit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 125
5-11 Schematic of ∆Σ modulator circuit. . . . . . . . . . . . . . . . . . . . . . . . . . . . 126
5-12 System level timing diagram over one complete cycle. . . . . . . . . . . . . . . . . . . 127
5-13 Simulink Model of the ∆Σ modulator based interface circuit. . . . . . . . . . . . . . . 128
5-14 Power spectral density of output ∆Σ modulated bitstream. . . . . . . . . . . . . . . . 129
6-1 Overview of Chapter 6. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 131
6-2 Photograph of acoustic pressure coupler. . . . . . . . . . . . . . . . . . . . . . . . . . 132
6-3 Plot of input pressure signal as a function of frequency. . . . . . . . . . . . . . . . . . 134
12
6-4 Comparison of frequency response of pressure coupler with air as medium and withhelium as medium. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 135
6-5 Block diagram describing characterization procedure used. . . . . . . . . . . . . . . . 135
6-6 Frequency response with dc bias (5V ) with air medium. . . . . . . . . . . . . . . . . . 136
6-7 Frequency response with dc bias (5V ) with helium medium. . . . . . . . . . . . . . . 137
6-8 Schematic of capacitive microphone with a synchronous modulation and demodulationtechnique using a voltage amplifier based circuit. . . . . . . . . . . . . . . . . . . . . 137
6-9 Open loop frequency response measured at the output of low pass filter. . . . . . . . . 138
6-10 Open loop frequency response normalized to the peak ac voltage measured at the outputof low pass filter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 138
6-11 Open loop linearity of the open loop system. . . . . . . . . . . . . . . . . . . . . . . 139
6-12 Linearity of the open loop system normalized to peak ac bias voltage measured at theoutput of the demodulator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 140
6-13 Noise floor of microphone for two different ac bias voltages measured at the outputof the demodulator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 141
6-14 Theoretical and experimental frequency response of compensator. . . . . . . . . . . . 142
6-15 Block diagram of analog closed-loop system showing microphone and interface circuit. 142
6-16 Closed loop frequency response measured at the output of demodulator . . . . . . . . 143
6-17 Closed loop frequency response measured at the output of demodulator with ac biasof 6Vpp. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 144
6-18 Closed loop frequency response measured at the output of demodulator with ac biasof 9Vpp. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 145
6-19 Closed loop frequency response measured at the output of compensator. . . . . . . . . 146
6-20 Linear range of system in closed loop configuration as measured at the output of thecompensator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 146
6-21 Linearity of the closed loop system normalized to peak ac bias voltage measured atthe output of the compensator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 147
6-22 Closed loop noise floor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 147
A-1 Noise model of dual backplate microphone connected to voltage buffer. . . . . . . . . 152
A-2 Noise model of dual backplate microphone connected to voltage buffer. . . . . . . . . 155
A-3 Noise model of dual backplate microphone connected to charge amplifier. . . . . . . . 157
B-1 Noise model of switched capacitor amplifier during amplify phase. . . . . . . . . . . . 162
13
Abstract of Dissertation Presented to the Graduate Schoolof the University of Florida in Partial Fulfillment of theRequirements for the Degree of Doctor of Philosophy
DEVELOPMENT OF CLOSED-LOOP INTERFACE CIRCUITS FOR CAPACITIVETRANSDUCERS WITH APPLICATION TO A MEMS CAPACITIVE MICROPHONE
By
Karthik Kadirvel
December 2007
Chair: Toshikazu NishidaMajor: Electrical and Computer Engineering
There has been a trend towards miniaturization and batch fabrication of sensors inspired
by a similar trend in the electronics industry using novel fabrication techniques used in micro
electromechanical system (MEMS) fabrication. Capacitive microphones, whose common
applications include aeroacoustic measurement and cell phones, is one such sensor whose
dimensions are being aggressively scaled down. In measurement microphones, miniaturization
will facilitate improved measurement precision, and in cell phones, miniaturization will reduce
printer circuit board space and complexity. Both applications will benefit from the potential cost
reduction brought by the batch fabrication of sensors.
As sensor geometry is scaled down, improved circuit techniques are required to measure the
sensor output. This is because at small geometries sensor capacitance is comparable to unwanted
parasitic capacitance which reduces the transducer sensitivity. Also, at reduced sensor geometry,
the voltage required to bias the microphone could cause the microphone plates to pull in. The
goal of this work is to design and characterize interface circuits that are suitable for miniature
capacitive transducers. To achieve this goal, the performance of existing open and closed-loop
interface circuits are investigated. Scaling of the performance metrics of the microphone and
interface circuit as sensor geometry decreases is also investigated.
A proof of concept closed-loop analog controller for a MEMS capacitive microphone
is designed. A test apparatus is developed to characterize the system over the audio range
by operating the microphone in a helium medium which increases the bandwidth of the test
apparatus. Characterization of the microphone in open and closed loop mode of operation is
14
presented. Results show that stable closed loop operation of the microphone is feasible with
increased sensitivity and the potential to address pull-in issues.
15
CHAPTER 1INTRODUCTION
There has a been a major trend towards miniaturization and batch fabrication of transducers
inspired by a similar trend in the electronics industry. With the advent of micromachining [1]
techniques used in microelectromechanical system, (MEMS) manufacturing, fabrication of
transducers with very small sizes have been made possible. Micromachining also facilitates the
batch fabrication of devices which possess nearly matched structural and electrical properties.
Batch fabrication of devices also can reduce the cost of manufacturing if the volume is large
enough.
One key transducer leading the way in this trend are capacitive transducers. Capacitive
transducers are devices that respond to physical phenomenon via a change in capacitance
that is measured using various interface circuits. Commercially successful applications that
utilize capacitive transducers include accelerometers used in air bag deployment system for
cars and laptop hard drives by Analog Devices [2], projection technology for large screen TVs
using Texas Instruments Digital Light Processing (DLP) processors [3], pressure sensors by
Freescale Semiconductors [4], and audio microphones for cell phones by Knowles Acoustics
[5]. Other capacitive transducers published in the literature include accelerometers [2],[6] –[11],
micro-mirrors [12], microphones [13] – [21], pressure sensors [22] – [25], oscillators [26] –
[31], and gyroscopes [32] – [35]. In all these applications, the capacitance change of the sensor
is converted into a usable voltage using interface circuits [36] such as the voltage buffer [37] –
[40], charge amplifier [41], ac bridge [6], force balancing circuits [6, 8, 42], and oscillator based
circuits[43] – [45].
The miniaturization of capacitive transducers results in new challenges for the design of the
interface circuits. Some of the issues that are exacerbated at small sensor geometries that make
the design of interface circuits more challenging include a parasitic capacitance comparable to
the sensor capacitance, reduced sensitivity, and pull in [46]. All of these factors can degrade the
performance of micromachined capacitive transducers. As we scale down aggressively from
micro scale devices in MEMS systems to nano scale devices, an understanding of the tradeoffs of
interface circuits is important to obtain the full performance benefits of the miniature capacitive
transducer.
16
The overall topic of my work is the study of interface circuits for a specific class of
capacitive transducers namely capacitive microphones. Traditionally, capacitive microphone
interface circuitry consisted primarily of voltage amplifiers . For example, commonly used
instrumentation grade capacitive microphones for aeroacoustic applications, the Bruel and
KjærType 4134 and Type 4138 series of microphones [38], use a voltage buffer amplifier as the
interface circuit. Capacitive microphones used over the audio bandwidth (20Hz − 20kHz) such
as the Bruel and KjærType 4135 microphone also use a voltage buffer as the interface circuit.
Commercial MEMS microphones that use voltage buffers include the SiSonic microphones [5]
manufactured by Knowles acoustics and DigiSiMic microphones [47] by Sonion Technologies.
Though voltage amplifier interface circuits are commonly used, there exist other interface
techniques that may possess advantages for high performance capacitive transducers in certain
applications. For example, since capacitive accelerometers are similar in operating principle and
structure as compared to capacitive microphones circuits used for accelerometers may be adapted
for use in capacitive microphones. A closed-loop interface interface circuit technique used in
some accelerometers, [2], may provide benefits such as improved pull-in performance, higher
sensitivity, and direct digital output. This provides the motivation for investigating the potential
advantages and disadvantages for closed-loop interface circuits for capacitive microphones.
To achieve these goals, a thorough understanding of the theoretical performance of existing
capacitive interface techniques is required. Although previous work [48], [49], review interface
techniques such as voltage buffer, charge amplifier, synchronous modulation and demodulation,
they do not provide detailed theoretical formulations to compare the various techniques. In
addition, closed loop interface circuits are not discussed in detail.
The goal of my work is to design and evaluate capacitive interface circuits with an emphasis
on closed-loop interface circuits for MEMS capacitive microphones. To achieve this goal, the
performance of existing open and closed-loop interface circuits are investigated. Theoretical
formulations for the performance metrics of the interface circuits are derived and compiled
into a common framework for comparison. Using the information obtained, a proof of concept
closed-loop analog controller for a MEMS capacitive microphone is designed.
17
1.1 Background
This section begins a brief introduction to the operating principle of a capacitive microphone.
Various commonly used microphone structures are then described. A preliminary overview and
a brief literature review of the microphone interface circuits is presented in this section. This
section concludes with a flow chart showing the various interface circuits which forms the
framework for Chapter 2. A detailed literature review along with theoretical formulations for
each of the interface circuits is presented in Chapter 2.
A microphone is a transducer that converts input acoustical energy into corresponding
electrical energy. Capacitive microphones consist of a flexible diaphragm that is exposed to
the pressure fluctuations of the acoustic field of interest and one or more fixed backplates. The
pressure induced structural deflection of the diaphragm causes a variation in the capacitance
between the vibrating diaphragm and the fixed backplates which is detected and measured.
There are two main ways of measuring the capacitance change. The two approaches are
based on the fundamental equation that relates the charge Q stored on the capacitor plates to the
capacitance C and the voltage V across the plates of the capacitor,
Q = CV. (1–1)
In the fixed charge scheme [14], [50] – [52] the, charge is held constant and the voltage change
associated with the capacitance change is measured. The charge is held constant by using
a dc voltage source to bias the capacitor or by using a special dielectric material (electret)
such as polypropylene, mylar, or silicon dioxide that can hold charge for long periods of time
measured in years. The electret material is bonded either to the movable diaphragm or to the
fixed backplate which is charged with a high potential of hundreds of volts using an external
dc source. The main advantage of electret microphones is that they do not require an external
power supply and are thus useful for portable applications [53]. The fixed voltage that can be
generated by the charge on the electret is much higher than what can be achieved via a battery
which leads to a higher sensitivity. The main disadvantages of micromachined electrets are that
the micromachined electret materials lose their charge over time when exposed to humidity [16].
In the fixed voltage scheme, a fixed voltage is maintained using an external voltage source while
18
the charge transfer associated with the capacitance change is measured. The externally applied
voltage is known as the ’polarization voltage’.
Capacitive microphones can be broadly classified based on the structure and on the detection
mechanism. Figure 1-1 shows a classification tree of the common capacitive microphone
structure. Based on the structure, they can be classified as single back plate and dual backplate
microphones. Various authors have reported single backplate microphones [17, 21], [54] – [60]
and dual back plate microphones [19],[61] – [64] in the literature. A schematic of the common
microphone structures is shown in Figure 1-2.
Most commercial MEMS [5, 47] and non-MEMS [38] microphones use a single backplate
design. In these microphones, a single variable capacitor is formed between the fixed backplate
and the movable plate that is measured by the interface circuit. In dual backplate and dual
diaphragm microphones, two capacitors that vary differentially are formed. Dual backplate and
dual diaphragm microphones have certain advantages such as increased sensitivity as compared
to single backplate microphones, a higher bias voltage which increases the sensitivity, improved
pull in performance, and increased linearity but are more complex to fabricate and have higher
cost. SingleBackplate DualBackplateSingleDiaphragm DualDiaphragmCondenserMicrophone
Figure 1-1. Microphone classification based on sensor structure.
Figure 1-3 shows a classification tree of the various capacitive microphone interface
techniques. Based on the sensing scheme, microphones can be broadly divided into open
loop [41, 59, 65, 66] and closed loop [6] – [8],[10, 60], [67] – [69] categories. Both of these
categories can be further divided into analog and digital techniques based on the presence or
19
Backplate
Pressure Equalization Vent
Backchamber Acoustic Hole
Air Gap
Diaphragm
(a) Schematic of single backplate single diaphragmmicrophone[55].
Bottom Diaphragm
Top Diaphragm
Pressure Equalization Vent
Backchamber Acoustic Hole
Air Gap
Backplate
(b) Schematic of single backplate dual diaphragmmicrophone[55].
Bottom Backplate
Top Backplate
Pressure Equalization Vent
Backchamber Acoustic Hole
Air Gap
Diaphragm
(c) Schematic of dual backplate single diaphragmmicrophone[55].
Figure 1-2. Common condenser microphone structures.
absence of a clock signal, respectively. A detailed literature review, principle of operation, and
performance metrics of each of these circuits is discussed in Section 2.2 to Section 2.5.
1.2 Research Objectives
The goal of this work is to design a closed-loop force feedback interface circuit for a MEMS
capacitive microphone. Capacitive microphones with two different target applications namely,
aeroacoustic applications and audio applications, are the theoretical testbeds for characterizing
these circuits. The target specification for the two microphones are listed in Table 1-1. These
specifications provide typical values for the various parameters. The actual values depend
upon the application. For example, telephony applications require audio microphones with
20
CondenserMicrophoneOpenLoop ClosedLoopSwitchedCapacitor SynchronousMod/DemodAnalog Digital DigitalAnalog SigmaDeltaSynchronousMod/DemodVoltageBuffer ChargeAmplifierFigure 1-3. Microphone classification based on sense technique.
a bandwidth of 300Hz − 3.4kHz while hearing aid microphones have a bandwidth of
20 Hz-20 kHz. Also, in the table, it is assumed that the dynamic range is 100dB. To aid in
Table 1-1. Comparison of audio and aeroacoustic microphone specificationsProperty Audio Microphone Aeroacoustic
MicrophoneMax Pressure 120 dB 160 dB
Bandwidth∗ 20 Hz-20 kHz 45 Hz-160 kHz
Noise Floor 20 dB 60 dB∗100dB dynamicrange is assumed
the design of the overall system, a detailed model of the microphone and the interface circuit has
been developed. Theoretical formulations for the sensitivity, frequency response, and minimum
detectable signal (MDS) of the microphone along with the interface circuit system have been
derived. The theoretical parameters are compared with simulation and experimental results by
characterizing the microphone and interface circuit in a acoustic pressure coupler.
1.3 Dissertation Overview
This dissertation is divided into seven chapters. Chapter 2 is an in-depth study of the
various capacitive transducer interface circuits. For each of the interface circuit techniques, the
literature is reviewed and the principle of operation and performance metrics are explained. Since
the design of the circuit depends on the characteristics of the capacitive transducer, Chapter 2
21
discusses the structure and specifications of two capacitive microphones used as the test vehicles
to theoretically evaluate the performance of the interface circuit. To aid in design and prediction
of the performance specifications, an electrical model of the overall system consisting of the
sensor along with the interface circuit is described. Furthermore, a reduced order lumped element
model of the microphone is described for use in multi-domain simulations.
Chapter 3 discusses various open and closed loop interface circuits for capacitive
transducers with an emphasis on capacitive microphones. Theoretical formulations for the
performance metrics of the interface circuits are developed.
Chapter 4 and Chapter 5 detail the design and simulation of the analog and digital
closed-loop interface circuits respectively. The two interface circuits are compared in terms
of performance specifications, design complexity, ease of implementation, and cost. Chapter 5
concludes by presenting the reason for implementing an analog closed-loop interface circuit over
a digital closed-loop interface circuit.
In Chapter 6, the test apparatus used to characterize the performance of the interface circuit
is explained. Results of the characterization of the test apparatus is presented first followed by the
characterization results of the microphone with the analog open and closed loop interface circuit.
Chapter 7 discusses the results obtained along with the future work.
22
CHAPTER 2CAPACITANCE TRANSDUCERS
2.1 Introduction
In this chapter, canonical capacitive transducers are discussed followed by a discussion
of the microphone under consideration. Lumped element modeling of the sensor to facilitate
multi-domain simulation of the sensor along with the interface circuitry in the following chapter
is also discussed.
This chapter begins with a discussion of a canonical single backplate and dual backplate
capacitive transducer. Theoretic formulation of the voltage, charge, capacitance, and force
relations for the two canonical transducers are derived. Linearization of the formulation is also
presented. A discussion of the performance metrics of capacitive transducers is then presented.
The structural and material properties of the microphone under consideration are discussed
next. A lumped element model (LEM) is then developed for the microphone. Using the LEM, a
reduced second order system is developed which is used to extract the sensor resonant frequency
and damping coefficient. This chapter concludes with MATLAB simulations of the reduced order
models. A graphical overview of this chapter is shown in Figure 2-1.
Lumped elementmodellingStructural andmaterial propertiesof microphoneCanonicalcapacitivetransducersSummaryIntroduction
Audio microphoneAeroacousticmicrophoneSingle backplateDual backplate
Figure 2-1. Overview of Chapter 2.
2.2 Canonical Capacitive Transducers
In this section, the principle of operation of a single backplate and dual backplate capacitive
transducer is presented.
23
2.2.1 Single Backplate Capacitive Transducers
Structure and Principle of Operation. Figure 2-2 shows a simple single backplate
capacitive transducer. It consists of two plates that are at a nominal gap x0 between them. One
plate is fixed and the other plate is free to move in response to an input physical phenomenon.Fixed PlateMovable Plate x0 x'0 xxxFigure 2-2. Schematic of a single backplate capacitive transducer.
The plates are so arranged such that only the distance x between the plates can vary and not the
area of overlap A between the two plates. Under the application of an external pressure signal,
the diaphragm moves from its equilibrium position.
The distance between the plates can be expressed in terms of the nominal gap distance, x0,
and the instantaneous displacement from the nominal position, x′, by the equation
x = x0 − x′. (2–1)
The instantaneous capacitance C, between the plates is given in terms of the permitivity of free
space ε0, relative permitivity εr, area of overalap A, and the distance between the plates x, by
C =ε0εrA
x. (2–2)
For air gap, the relative permitivity is approximately unity. Substituting Equation 2–1 into the
previous equation, we obtain
C =ε0εrA
x0
[1
1− x′x0
]. (2–3)
Defining the nominal capacitance C0 as
C0 =ε0εrA
x0
, (2–4)
24
the instantaneous capacitance C can be rewritten as
C = C0
[1
1− x′x0
], (2–5)
i.e.,
C ∝[
1
1− x′x0
]. (2–6)
From Equation 2–5, it can be observed that there exists a non-linear relationship between the
capacitance and the distance between the plates. For small displacements (x′ << x0), using a
Taylor’s series expansion, Equation 2–5 can be linearized as
C = C0
[1 +
x′
x0
]. (2–7)
If the change in capacitance is denoted by ∆C, then
C = C0 + ∆C. (2–8)
Substituting for C from Equation 2–2 and C0 from Equation 2–4 in Equation 2–8, we obtain
∆C = C0x′
x0
. (2–9)
This shows that for small displacements, the change in capacitance is a linear function of the
change in gap distance. The next equation to consider is the relationship between the voltage V
across the plates of the capacitor and the charge Q stored across the plates of the capacitor which
is given by
V =Q
C. (2–10)
Substituting Equation 2–5 in the previous equation, we obtain
V =Q
C0
[1− x′
x0
]. (2–11)
From Equation 2–11, it can be seen that
V ∝ Qx′. (2–12)
This shows that the voltage across the plates of a capacitor is a product of two time dependent
variables. Hence, the voltage across the plates of the capacitor is a non-linear function of the
25
displacement and charge stored on the plates of the capacitor. Equation 2–12 equation can
be linearized by using either a fixed charge or a fixed voltage to measure the displacement.
These two linearization methods determine the choice of interface circuit. For the fixed charge
technique, a voltage amplifier is used. This is because for the fixed charge technique
V ∝ x′. (2–13)
For the fixed voltage technique, a charge amplifier is used. This is because for the fixed voltage
technique, the output is charge which will be shown to be linear with displacement after
integration by a charge amplifier. A preliminary discussion of the two interface techniques is
presented next. A detailed review of these two techniques along with detailed performance
metrics and a literature review is given in Section 3.3 and Section 3.3.2.
Linearization Using Fixed Charge (Voltage Amplifier Interface Circuit). In this
technique, a fixed charge is stored on the plates of the capacitor. The fixed charge can be
provided by a dc voltage source to bias the capacitor or by using a special material known as
an electret. An electret is a material that can store charge for long periods of time (measured
in years). The charge is applied onto the electret material using a technique called polarization
whereby a large (few 100s of volts) is applied to the electret material. Figure 2-3 shows a single
backplate capacitive transducer linearized using a fixed charge technique by connecting to a dc
voltage source Vdc. Vdc is connected to one end of the capacitive transducer. A bias resistor Rdc
Rdc -+ VoutC+VdcFigure 2-3. Schematic of a single backplate capacitive transducer connected to a voltage buffer.
is connected between the other end of the capacitive transducer and ground and is used to set the
dc operating point. A unity gain voltage amplifier is connected to the common point between the
26
resistor and the capacitor as shown in Figure 2-3. The fixed charge on the transducer is given by
the relation
Qdc = VdcC0. (2–14)
The RC network consisting of Rdc and C sets up a high pass filter with a cut in frequency of
12πRdcC
. For all frequencies above the cut in frequency, the voltage on the plate is free to change
which is buffered by the voltage amplifier and can be measured. Substituting Q with Qdc in
Equation 2–11, the voltage across the plates of the capacitor is given by
V =Qdc
C0
[1− x′
x0
]. (2–15)
The small signal output voltage Vout is given by
Vout = Vdcx′
x0
. (2–16)
From Equation 2–15, it can be seen that
Vout ∝ x′, (2–17)
which is a linear relation between the voltage and the change in gap distance. It should be
noted that in this discussion, the parasitic capacitances are neglected. The effect of parasitic
capacitances are discussed in Chapter 3.
Linearization Using Fixed Voltage (Charge Amplifier Interface Circuit). Figure 2-4
shows a single backplate capacitive transducer connected to a charge amplifier. In this technique,
the fixed voltage is provided by a DC voltage source Vdc which is connected to one end of the
capacitive transducer. The other end is connected to the inverting input of an inverting amplifier.
The inverting terminal of the amplifier is held at virtual ground due to negative feedback. A
feedback capacitor Cint is connected between the output of the amplifier and the inverting input.
This circuit integrates the charge flowing out of the transducer. A bias resistor Rdc is connected
in parallel to the feedback capacitor and is used to set the DC operating point. The RC network
consisting of Rdc and Cint sets up a high pass filter with a cut in frequency of 12πRdcCint
. For all
frequencies above the cut in frequency, the charge flowing from the transducer is integrated by
the feedback capacitor. The relation between the input and output of a charge amplifier above the
27
Cint+-RdcC+Vdc VoutFigure 2-4. Schematic of a single backplate capacitive transducer connected to a charge amplifier.
cut in frequency is given by
Vout = − C
Cint
Vdc (2–18)
Substituting for C from Equation 2–8 and Equation 2–9, Vout can be expressed as
Vout = − C0
Cint
Vdc − C0x′
x0
Vdc (2–19)
From Equation 2–19 it can be seen that
Vout ∝ x′, (2–20)
which is a linear relation between the output voltage and the change in gap distance. The effect
of parasitic capacitance on the output voltage is discussed in Chapter 3.
Force Relations. We now consider the force between the plates of the capacitor. By the
law of conservation of energy, the sum of the incremental change in electrical potential energy
dEe and the incremental change in mechanical potential energy dEm is zero, i.e.
dEe + dEm = 0. (2–21)
The incremental change in mechanical potential energy is given in terms of the force between the
two plates F and the incremental change in gap distance dx′ by
dEm = −Fdx′. (2–22)
28
The negative sign denotes that the force increases as gap distance decreases. Rewriting
Equation 2–22, we obtain
F = −dEe
dx′. (2–23)
Substituting Equation 2–21 in Equation 2–22, we obtain
Fe =dEe
dx′. (2–24)
The electrical potential energy stored across the plates of the capacitor Ee, is dependent on the
biasing technique used. If the capacitor is biased with a fixed voltage Vdc, then the energy stored
is given by the relation
Ee =1
2CV 2
dc. (2–25)
Substituting for C from Equation 2–2 and using Equation 2–25 in Equation 2–24, we obtain an
expression for the magnitude of the electrostatic force acting on the movable plate biased at Vdc
F∣∣∣Vdc
=1
2V 2
dc
εA
(x0 − x′)2 (2–26)
i.e.,
| Felectrostatic |∝ 1
(x0 − x′)2 . (2–27)
From Equation 2–27, it can be seen that the force between the plates of a capacitor is non-linearly
related to the gap. The direction of the electrostatic force is towards the fixed plate. The movable
plate comes closer to the fixed plate, the force will increase and approach infinity as gap distance
decreases. The force relation can be linearized for small displacements (x′ << xo) using a
Taylor series expansion as
~Felectrostatic
∣∣∣Vdc
∼= 1
2V 2
dc
εA
x20
(1 + 2
x′
x0
)(−x). (2–28)
If the plates are biased with a fixed charge, then the energy stored is given by the relation
Ee =Q2
dc
2C. (2–29)
Substituting for C from from Equation 2–2 and substituting Equation 2–29 in Equation 2–24 we
obtain
F∣∣∣Qdc
=Q2
dc
2εA(−x) (2–30)
29
This can be rewritten in terms of Vdc as
~Felectrostatic
∣∣∣Qdc
=1
2V 2
dc
εA
x20
(2–31)
From this equation, it can be seen that the force is independent of the displacement of the
movable plate for the fixed charge technique.
Quasistatic Pull-in. When the plates of a capacitive transducer are biased with a fixed
bias, it is possible for the plates of the transducer to collapse into each other if the potential
between them is large enough [46]. The reason for this is as follows. When a voltage is applied
to the plates, an electrostatic force attracts the movable plate towards the fixed plate. At small
voltages, this is balanced by the restoring force of the diaphragm. As the voltage is increased,
the electrostatic force between the plates keeps increasing. At some critical voltage, known as
the pull-in voltage VPI , the two plates will snap in. The study of the pull-in characteristics if
important to determine the maximum voltage Vdc that can be applied on the transducer plates.
The actual voltage used is much lower than the pull in limit to ensure stable operation of the
transducer. There are two main types of pull in.
1. Quasistatic Pull-in: In this type of pull-in the movable plate is initially at rest. No time
varying external force is applied on the movable plate.
2. Dynamic Pull-in : In this type of pull-in, a time varying external force is acting on the
movable plate and/or a time varying bias voltage [70].
In this discussion, only the quasi static case is considered. The pull-in voltage and the critical gap
at which pull-in occurs is derived next for the constant voltage and constant charge techniques.
Quasistatic Pull-in for Single Backplate Transducer with Fixed Voltage Biasing.
Figure 2-5 shows the fixed plate and movable plate along with the direction of forces. It can
be seen that the force due to electrostatic attraction Felectrostatic and the restoring spring force
Fspring oppose each other. The electrostatic force is always attractive and tries to bring both
plates together. The restoring force always tries to bring the movable plate back to its equilibrium
position. Based on the sign convention shown in the figure an increase in the electrostatic force
causes a decrease in gap distance.
30
Fixed PlateMovable Plate x0 x'0 x xxFelectrostaticFspringFigure 2-5. Schematic of a single backplate capacitive transducer showing electrostatic force and
restoring force.
The restoring force in the diaphragm Fr is given in terms of the mechanical compliance
Cm,d of the diaphragm by
~Fspring = (1/Cm,d) x′(x). (2–32)
Using Equation 2–1 Fspring can be expressed as a function of the gap distance, x as
~Fspring = +1
Cm,d
(x0 − x) (x). (2–33)
The Felectrostatic due to the electrostatic attraction between the plates is given by Equation 2–25
which is repeated below.
~Felectrostatic = −1
2Vdc
2 εA
x2(x). (2–34)
The net force acting on the diaphragm Fnet is thus given by the sum of the restoring spring force
given by Equation2–33 and the electrostatic force given by Equation 2–25
| ~Fnet |= −1
2Vdc
2 ε0A
x2+
1
Cm,d
(x0 − x) = 0. (2–35)
Initially, when the bias voltage is small, the movable plate will be displaced by a small
amount from its equilibrium position. As the voltage increases, the gap distance decreases. At
any given voltage, the stability is determined by applying a small perturbation to the diaphragm
and analyzing the subsequent diaphragm motion. If a small perturbation causes the diaphragm
to start moving towards the fixed back plate the equilibrium is unstable, else the equilibrium is
stable. To determine the critical gap distance and critical voltage at which the system transforms
from stable to unstable, we partially differentiate the net force Fnet with respect to the gap
31
distance x. When the plates are biased with a fixed voltage Vdc, ∂Fnet is given by
∂Fnet =
(− 1
Cm,d
+ε0AVdc
2
x3
)∂x. (2–36)
If the diaphragm is perturbed towards the backplate, i.e., ∂x < 0, then to ensure stable operation
the quantity in parenthesis must be positive so that ∂Fnet is also negative. Thus,
− 1
Cm,d
+εAVdc
2
x3< 0. (2–37)
Denoting the critical gap distance by xPI and the critical voltage by VPI , Equation 2–37 becomes
− 1
Cm,d
+εVPI
2
xPI3
= 0. (2–38)
By substituting Equation 2–38 into Equation 2–36 and evaluating at xPI and VPI , the critical gap
distance is
xPI =2
3x0, (2–39)
and the pull-in voltage is
VPI =
√8x0
3
27Cm,dεA. (2–40)
Quasistatic Pull-in for Single Backplate Transducer with Fixed Charge Biasing. Now
we derive the critical gap distance and pull in voltage for a single backplate capacitive transducer
biased with a fixed charge biasing technique. For this technique, the electrostatic force if given
by Equation 2–31 which is repeated below
~Felectrostatic = −1
2V 2
dc
εA
x20
((x)). (2–41)
It should be noted that the electrostatic force due to a fixed charge does not depend on the
position of the movable plate. The net force is given by
| ~Fnet |= 1
2Vdc
2 εA
x02
+1
Cm,d
(x0 − x) = 0. (2–42)
Differentiating the net force,
∂Fnet = − 1
Cm,d
∂x. (2–43)
32
If the diaphragm is perturbed towards the backplate, i.e. ∂x < 0, there is an opposite restoring
force ensuring that the equilibrium point is always stable. To determine the equilibrium position
xeq, we set Fnet = 0. The equilibrium position is thus given by
xeq = x0 − 1
2Cm,dVdc
2 εA
x02. (2–44)
If too large a voltage is chosen, then xeq < 0 which implies that the two plates are touching each
other. Furthermore if Vdc is too large then the initial deflection of the movable plate will be too
large and the transducer might operate in the non-linear region. To determine the pull-in voltage
we set xeq = 0 and solve for the voltage. This is given by
VPI =
√2x0
3
Cm,dεA. (2–45)
Comparing the pull-in voltage between the constant charge and constant voltage biasing
techniques, it can be seen that the pull-in voltage limit is higher for the constant charge
technique.
2.2.2 Canonical Dual Backplate Capacitive Transducer
Another commonly used structure in capacitive sensors is a a dual backplate structure [71]
as shown in Figure 2-6. The need for a differential structure is motivated by a need to linearizeFixed PlateMovable Plate x0Fixed Plate x0C2=C20 -C1=C10 + x'C1C2 xxFigure 2-6. Schematic of a differential capacitive transducer.
the system using structural modification. Also the differential structure has twice the change
in capacitance of the single backplate structure. The improvement in sensitivity and linearity is
discussed later in this section.
This structure consists of a movable plate sandwiched between two fixed plates. Two
capacitances C1 and C2 are formed, one between the top backplate and the movable plate and
the other between the bottom back plate and the movable plate. Under the application of an input
33
force on the movable plate, one of the capacitances increases while the other one decreases from
the nominal value. Under zero input force, the nominal capacitance of the two capacitors are
denoted by C10 and C20. If the change in capacitance of capacitor C1 is denoted by ∆C1 and the
change in capacitance of capacitor C2 is denoted by ∆C2, then
C1 = C10 + ∆C1 (2–46)
C2 = C20 −∆C2.
It is assumed for the initial discussion that the nominal capacitance and change in capacitance are
matched i.e.
C10 = C20 = C0 (2–47)
and
∆C1 = ∆C2 = ∆C. (2–48)
The effects of capacitance mismatch will be discussed later in this chapter. From the geometry,
C1 and C2 is given by
C1 =ε0A
x0 − x′(2–49)
C2 =ε0A
x0 + x′
The total capacitance change ∆C is given by
∆C = C1 − C2. (2–50)
Substituting for C1 and C2, we obtain
C1 − C2 =ε0εrA
x0 − x′− ε0εrA
x0 + x′. (2–51)
This can be simplified to
C1 − C2 =2ε0εrA
x20 − x′2
x′. (2–52)
For small displacements i.e [x′ ¿ x0], x′2 can be neglected and the above equation can be
simplified as
C1 − C2 ' 2ε0εrA
x20
x′. (2–53)
34
Using Equation 2–4, Equation 2–53 can be simplified to
C1 − C2 = 2C0x0
x′. (2–54)
From Equation 2–54, it can be observed that the capacitance change is a linear function of the
change in gap distance for small displacements. Comparing Equation 2–54 with Equation2–9 it
can be observed that the change in capacitance for the dual back plate structure is twice that of
the structure with a single backplate.
We now consider the voltage across the plates of the two capacitors. If the voltage across
capacitors C1 and C2 is denoted by V1 and V2, respectively, and the charge stored is Q1 and Q2,
respectively, then
V1 =x0 − x′
ε0AQ1 (2–55)
V2 =x0 + x′
ε0AQ2,
Equation 2–56 show that the voltages across the plates of a capacitor are a non-linear function of
the displacement and charge stored in the plates of the capacitor. Similar to the case with a single
backplate, the above equations can be linearized using either a fixed charge or a fixed voltage.
This is discussed next. i.e,
V1 ∝ Q1x′ (2–56)
V2 ∝ Q2x′.
Fixed Charge Technique (Voltage Amplifier Interface Circuit). In the fixed charge
technique, the top and bottom backplates of the microphone with top and bottom capacitances
given by C1 and C2 are biased at a DC potential of +Vdc and −Vdc volts as shown in Figure 2-7.
A unity gain voltage amplifier is connected to the middle plate. Rdc is a bias resistor that sets the
DC operating point. The linearized relation between the input and output of a charge amplifier
above the cut-in frequency is given by
Vout =2Vdc
x0
x′. (2–57)
The detailed derivation of this equation is provided in Appendix B.
35
VxRDC -+ VoutC1C2-Vdc+Vdc
Figure 2-7. Schematic of a dual backplate capacitive transducer connected to a voltage amplifier.
Fixed Voltage Technique (Charge Amplifier Interface Circuit). In this technique, the
top and bottom backplates of the microphone with top and bottom capacitances given by C1
and C2 are biased at a DC potential of +Vdc and −Vdc volts. Figure 2-8 shows a dual backplate
capacitive transducer connected to a charge amplifier. A feedback capacitor Cint is connectedCint+-RDCC1C2-Vdc+Vdc Cp VoutCL
Figure 2-8. Schematic of a dual backplate capacitive transducer connected to a charge amplifier.
between the output of the amplifier and the inverting input. This capacitor integrates the charge
flowing out of the transducer. A bias resistor Rdc is connected in parallel to the feedback
capacitor and is used to set the DC operating point. The RC network consisting of Rdc and Cint
sets up a high pass filter with a cut-in frequency, of 12πRdcCint
. For all frequencies above the cut
in frequency the charge flowing from the transducer is integrated by the feedback capacitor. The
linearized relation between the input and output of a charge amplifier above the cut in frequency
is given by
Vout = −2C0Vdc
x0Cint
x′. (2–58)
36
The detailed derivation of this equation is provided in Appendix B.
Force Relations. We now consider the force on the movable plate for the differential
structure. Figure 2-9 shows the schematic of the dual backplate capacitive transducer and the
force acting on the movable plate. The force on the movable plate depends on the type of biasingF1F2 x'x0x0Fixed PlateMovable PlateFixed Plate +Vdc-Vdc xxFigure 2-9. Schematic of a dual backplate capacitive transducer showing forces on the movable
plate.
technique used. We first consider the fixed voltage biasing technique. The net electrostatic force,
Felectrostatic, on the movable plate can be expressed in terms of the individual forces ~F1 and ~F2 by
~Felectrostatic = ~F1 + ~F2. (2–59)
Using Equation 2–26, ~F1 and ~F2 are given by
~F1 =1
2V 2
dc
εA
(x0 − x′)2 (−x) (2–60)
~F2 =1
2V 2
dc
εA
(x0 + x′)2 (x). (2–61)
The two forces operating on the movable plate are acting in opposition. This is because the
force between the movable plate and each of the fixed plates is attractive. ~F1 is acting in the
negative x direction. The total force ~Felectrostatic is given by the sum of ~F1 and ~F2. Substituting
Equation 2–60 and Equation 2–61 in Equation 2–59 and simplifying, Felectrostatic is given by
~Felectrostatic
∣∣∣Vdc
= 2Vdc2 εAx0x
′(x0
2 − x′2)2 (−x). (2–62)
Comparing Equation 2–62 with Equation 2–26, it can be seen that the net electrostatic force with
a constant voltage bias is lower for a dual backplate capacitive transducer as compared to a single
37
backplate capacitive transducer. The force will still tend towards infinity as the fixed plates starts
moving towards the movable plate. At rest, there is no net force acting on the movable plate.
We now consider the case when the two plates are biased with a fixed charge. In this
case there are two components to the force. They are the force between the top backplate and
the movable plate and the force between the bottom backplate and the movable plate. Using
Equation 2–30, the two forces on the diaphragm are
~F1 =Q2
dc
2εA(−x) (2–63)
~F2 =Q2
dc
2εA(x).
The total force ~Felectrostatic |Qdcis given by the sum of the two forces given by Equation 2–63 i.e
~Felectrostatic |Qdc= ~F1 + ~F2 = 0 (2–64)
which is zero for constant charge case for matched dual backplates.
Quasistatic Pull-in. We now derive the pull in voltage and gap distance for the dual
backplate capacitive transducer structure.
Quasistatic Pull-in for Dual Backplate Transducer with Fixed Voltage Biasing. The
derivation of the pull-in voltage and pull-in gap distance for a dual backplate microphone with
fixed voltage biasing is similar to that of the single backplate case. The net electrostatic force is
given by Equation 2–62 and the restoring force is given by Equation 2–32. The net force is given
by
~Fnet =
(−2Vdc
2 εx0x′
(x0
2 − x′2)2 −
x′
Cm,d
)x. (2–65)
In the case of a dual backplate structure, there are two gap distances. Hence, we analyze the net
force by differentiating it with respect to the distance moved from the nominal gap x′ instead of
the gap distance. Differentiating Fnet with respect to x′, we obtain
∂Fnet =
[(2Vdc
2εAx0(x2
0 − x′2)2
) (x2
0 + 3x′2
x20 − x′2
)− 1
Cm,d
]∂x′. (2–66)
For the system to be stable, a small perturbation in the change in gap distance, i.e ∂x′ > 0, must
cause a decrease in net force i.e. ∂Fnet < 0.
38
This implies (2Vdc
2ε0Ax0(x2
0 − x′PI2)2
) (x2
0 + 3x′PI2
x20 − x′PI
2
)− 1
Cm,d
< 0. (2–67)
Defining the voltage at the transition point from stable to unstable region of operation by VPI and
the displacement from equilibrium position by x′PI , we have(
2VPI2ε0Ax0(
x20 − x′2
)2
)(x2
0 + 3x′2
x20 − x′2
)− 1
Cm,d
= 0. (2–68)
Substituting Equation 2–68 in Equation 2–65 and solving for x′PI , we have
x′PI = 0. (2–69)
This shows that the equilibrium position for a dual backplate structure biased with a fixed voltage
is at the rest position of the diaphragm. The pull in voltage is given by
VPI =
√x0
3
2Cm,dεA. (2–70)
Quasistatic Pull-in for Dual Backplate Transducer with Fixed Charge Biasing. The
net force on the dual backplate transducer with a fixed charge biasing as given by Equation 2–64
is zero. Hence the equilibrium position is x′ = 0. Based on the model used, there is no upper
bound on the charge that can be placed on the transducer plates. This is not practically true as
the model did not account for non-idealities such as curvature of the plates, or other dynamic
conditions. Based on the physical realization of the transducer, there will be limits on the
maximum charge that can be applied on the plates.
2.3 Structure of Microphone Used as Test Vehicle for Open and Closed Loop InterfaceCircuit Design
The overall goal of this work is to investigate open loop and closed loop interface circuits
for capacitive microphones. A dual backplate capacitive microphone was used as the test vehicle
to characterize various interface circuits. To facilitate the design of the interface circuit, a
model of the microphone that accurately captures the dynamics is required. In this section, the
microphone structure and material properties are described from which a model can be developed
. The actual model development is discussed in the next section.
39
The microphone consists of a solid diaphragm sandwiched between two porous backplates
over a large cavity. A vent is provided to equalize the pressure on both sides of the diaphragm.
The cross section of the microphone is shown in Figure 2-10. The microphones were fabricated
using the Sandia SUMMiT V process [64]. This five-layer poly process allows the fabrication of
ultra-planar poly layers with low in-plane stress. Two microphone structures were designed for
use in aeroacoustic application and for audio application. The material properties and dimensions
of the two microphone structures are listed in Table 2-1.Top backplateDiaphragm BottombackplateSubstrateCavityAcoustic holes 1C
2C
Figure 2-10. Cross section view of dual backplate microphone [64].
Table 2-1. Dimensions of aeroacoustic and audio microphone[64].
Property Aeroacoustic AudioRadius of Top Backplate 256µm 756µm
Thickness of Top Backplate 2.25µm 2.25µm
Radius of Bottom Backplate 213µm 713µm
Thickness of Bottom Backplate 2.5µm 2.5µm
Radius of Diaphragm 230µm 730µm
Thickness of Diaphragm 2.25µm 2.25µm
Thickness of Top Gap 2µm 2µm
Thickness of Bottom Gap 2µm 2µm
Radius of Holes 5µm 5µm
No. of holes in Top Backplate 557 5030
No. of holes in Bottom Backplate 367 4361
Depth of Cavity 650µm 650µm
Radius of Cavity 186µm 686µm
Table 2-2. Material properties of microphone structure.
Property MagnitudeYoung’s modulus of polysilicon (e) 1.6× 1011Pa
Poisson’s ratio of polysilicon (ν) 0.22
Density of polysilicon (ρp) 2.2× 103kg/m3
40
2.4 Lumped Element Model
In order to develop an interface circuit that will meet the overall system level specifications,
we need to develop a model that accurately captures the dynamics of the microphone as a
function of the dimensions and material properties. We use the technique of lumped element
modelling (LEM) to achieve this goal. LEM is valid when the length scale of interest is much
smaller than the characteristic wavelength of the physical phenomenon [46]. In this case, the
length scale of interest is the diaphragm diameter and the characteristic wavelength is the
acoustic wavelength, λ. Using LEM, a theoretical formulation for the resonant frequency and
damping coefficient is developed. The general technique for developing the LEM for a transducer
will be discussed next followed by the application of the technique to the microphone under
consideration.
To develop the LEM, we consider the power flow between the various mechanical elements
using the principle of conjugate power variables. In this technique, power is denoted as the
product of two generalized quantities, effort and flow. In the electrical domain, the effort variable
is the applied voltage and the flow variable is the electric current. The product of these two
quantities is the power. In the acoustic domain, the effort variable is pressure, and the flow
variable is volume velocity. Using the effort and flow variables in the system, we next discuss the
energy storage and dissipative elements in the system.
The ratio of the effort variable to the flow variable represents the generalized impedance in
the system. In the electrical domain, the ratio of the applied voltage to the current is equal to the
impedance which if in phase represents the electrical losses in the electrical domain. Similarly,
the ratio of the input pressure to the volume velocity is the acoustic impedance. A real acoustic
impedance is denoted by a resistor and it represents the energy loss mechanisms in the acoustic
domain. The physical cause of the energy loss in the acoustic domain is viscous damping and
radiation resistance.
The energy storage elements are discussed next. In the electrical domain, the capacitor
stores potential energy (energy associated with the effort variable) and the inductor stores kinetic
energy (energy associated with the flow variable). In the acoustic domain, the kinetic energy
and potential are stored by the motion and deflection of the elastic diaphragm respectively. The
41
distributed elastic deflection of the diaphragm is lumped into a rectilinear piston having the
same deflection as the center of the diaphragm and a spring. The equivalent mass of the piston is
determined by equating the kinetic energy of the distributed diaphragm motion into the kinetic
energy of the lumped piston motion. Similarly, the compliance of the spring is found by equating
the potential energy stored in the distributed diaphragm deflection to the potential energy in the
lumped compliance.
Finally, we discuss the rules that govern the interconnection of the various elements. In the
impedance analogy, elements that share the same flow and displacement variable are connected
in series while elements that share the same effort variable are connected in parallel. Also, for the
impedance analogy, by Kirchoff’s laws, the sum of all the efforts around a closed loop is zero,
and the sum of all the flows entering a node is zero.
The LEM of the dual backplate microphone structure is discussed next. All the LEM
parameters discussed are in the acoustic domain. Ideally, the top and bottom backplates are
rigid. However, physically they do deflect by a small amount. Hence, they are modelled as
capacitors Cbp1, Cbp2 which represents the storage of potential energy. The main loss mechanism
in the backplates is the viscous damping loss [72]. These are represented by Rbp1, Rbp2 which
are connected in parallel to the corresponding compliance as they both share the same effort
variable. The diaphragm responds to the input pressure Pin and deflects storing potential
energy and is modelled as a capacitor Cd. The diaphragm motion stores kinetic energy and
is modelled as an inductor Md. These elements share the same volume displacement (flow
variable) and are thus connected in series. Viscous losses associated with the diaphragm are
neglected. The cavity impedes the motion of the diaphragm by storing potential energy and
is modelled as a compliance Ccav. The cavity between the top and bottom back plates and the
diaphragm is neglected. The resistance of the vent is modelled by as a resistor Rv. Theoretical
formulation for each of the model parameters is listed in Table 2-3 [73, 74, 75]. Using the
formulation in Table 2-3, and the structural and material properties listed in Table 2-1 and
Table 2-2 respectively, the model parameters for the two microphones are calculated. The results
are listed in Table 2-4.
The LEM of the microphone with approximations discussed is shown in Figure ??. In the
frequency range of interest, the top and bottom plate compliances and the vent resistances can be
42
Table 2-3. Theoretical formulation for lumped element model parameters.Parameter Symbol ExpressionDiaphragm Mass Mma
9ρph
5πr2
Diaphragm Compliance Cmaπr6(1−ν2)
16Eh3
Cavity Compliance CcavV
ρairc2
Backplate Hole Resistance Ra12ηairB(A)
π2r2nx30
Vent Resistance Rv128ηairLeff
πD2vent
Table 2-4. Lumped element model parameters of aeroacoustic and audio microphone.
Parameter Symbol AeroacousticMicrophone
AudioMicrophone
Top backplate compliance (m4s2/kg) Cbp1 2.8× 10−17 1.9× 10−14
Bottom backplate compliance (m4s2/kg) Cbp2 6.9× 10−18 9.8× 10−15
Diaphragm Compliance (m4s2/kg) Cd 1.5× 10−17 1.6× 10−16
Cavity Compliance (m4s2/kg) Ccav 5.0× 10−16 6.8× 10−15
Top backplate hole resistance (kg/m4s2) Rbp1 1.6× 109 1.7× 108
Bottom backplate hole resistance (kg/m4s2) Rbp2 1.3× 109 1.6× 108
Vent Resistance (kg/m4s2) Rv 7.5× 1012 7.5× 1012
Diaphragm mass (kg/m4) Md 5.7× 104 5.6× 103
neglected. Under this condition, the microphone model can be simplified into a simple second
order LCR circuit as shown in Figure 2-11. The LCR system can be described by a second orderCdMdRbp1 CcavRbp2PinFigure 2-11. Low frequency LEM of dual backplate microphone.
displacement to pressure transfer function H(s) [76]
H(s) =1/Md
s2 + 2× ζ × 2πfres × s + (2πfres)2 , (2–71)
where the resonant frequency fres of the system is given by the expression
fres =1
2π
√1
MdCcavCd
Ccav+Cd
, (2–72)
43
and the damping coefficient ζ by the expression
ζ =1
Rbp1 + Rbp2
√Md
CcavCd
Ccav+Cd
. (2–73)
Substituting for the various parameters in Equation 2–72 and Equation 2–73, we obtain the
Table 2-5. Second order system parameters of microphones.Quantity Aeroacoustic (Theoretical) Audio (Theoretical) Aeroacoustic (Experimental)[76]fres 174kHz 31kHz 230kHzζ 0.018 0.15 0.025
100
102
104
106
108
−100
−80
−60
−40
−20
0
20
Mag
nitu
de (
dB)
100
102
104
106
108
−150
−100
−50
0
Pha
se (
deg)
Frequency (Hz)
Figure 2-12. Theoretical normalized frequency response of audio microphone.
resonant frequency and damping coefficient for the two microphone designs. The results are
listed in Table 2-5. A plot of the normalized theoretical transfer function of the audio and
aeroacoustic microphone is shown in Figure 2-13 and Figure 2-13 [76].
2.5 Summary
In this chapter, canonical capacitive transducers were introduced. The charge, voltage,
capacitance, and force relations for the single and dual backplate microphone were derived.
The structure and material properties of the microphone that are used as the test vehicle to
characterize the open and closed loop circuit described in Chapter 3 were presented. A lumped
element model of the microphone was then developed. A reduced second order model of the
microphone was derived from the general lumped element model from which the resonant
frequency and damping coefficient were extracted. Simulations results of the frequency response
of the microphone model were also presented.
44
100
102
104
106
108
−100
−50
0
Mag
nitu
de (
dB)
100
102
104
106
108
−150
−100
−50
0P
hase
(de
g)
Frequency (Hz)
Figure 2-13. Theoretical normalized frequency response of aeroacoustic microphone.
To design the closed loop circuit, a model of the interface circuit is required. Chapter 3
presents an overview of the various capacitive transducer interface circuits along with models
that will be used in Chapter 4 and Chapter 5 for the development of the overall closed loop
system.
45
CHAPTER 3INTERFACE CIRCUITS
3.1 Introduction
This chapter discusses the various open-loop and closed-loop capacitive transducer interface
circuits with an emphasis on circuits for capacitive microphones. For each technique, the
principle of operation is first explained. Then theoretical formulations for the input/output
characteristics, sensitivity, dynamic range, bandwidth, and minimum detectable signal are
developed. A review of commercial transducers and research prototype transducers reportedIntroduction tointerface circuitsOpen loop interfacecircuitsVoltage bufferCharge amplifierSynchronousmodulation/demodulationSwitched capacitoramplifier SummaryComparisonbetween thetechniques
Closed loopinterface circuits Analog techniqueDigital techniqueComparisonbetween thetechniquesPerformancemetrics
Figure 3-1. Overview of Chapter 3.
in the published literature using these interface circuits is presented. This chapter concludes
with a summary of the various techniques. A graphical overview of this chapter is provided in
Figure 3-1.
3.2 Performance Metrics of Capacitive Transducers
In this section, the main performance metrics [77] of capacitive transducers with an
emphasis on capacitive microphones is introduced. The sensitivity, S, of a capacitive transducer
is defined as the change in the output voltage for an input physical phenomenon-derived change
46
in capacitance. For capacitive microphones, the input phenomenon is a time varying pressure
signal, and the microphone sensitivity is measured in V olts/Pascal. Similarly, for a capacitive
accelerometer, the input is an acceleration commonly measured in g. Therefore, the units of
sensitivity for an accelerometer is V olts/g. The sensitivity of the transducer can be expressed
as the product of the mechanical sensitivity (Sm) and electrical sensitivity (Se). The mechanical
sensitivity denotes the transfer function between the change in capacitance for an input change
in physical phenomenon. The electrical sensitivity refers to the change in output voltage for an
input capacitance change.
The emphasis of this chapter is on interface circuits which measure capacitance. Hence,
the electrical sensitivity of the interface circuit is expressed in V/F . It should be noted that the
sensitivity is defined as the magnitude of the flat region of the frequency dependent transfer
function. For a linear transducer, the transfer function H(ω) is defined as the ratio of the Fourier
transform of the output of transducer Y (ω) to the Fourier transform of the input of the transducer
X(ω), i.e.
H(ω) =Y (ω)
X(ω). (3–1)
The transfer function is in general a complex quantity. Hence, the complete description includes
both the magnitude |H(ω)| and phase ∠H(ω)| as a function of frequency. The magnitude of the
transfer function, as defined in Equation 3–1, is thus a plot of the sensitivity of the transducer as a
function of frequency. For an ideal transducer, the phase must be constant and zero.
The typical frequency response of a capacitive transducer is shown in Figure 3-2. It can
be seen that over a certain frequency range, the frequency response magnitude is flat within
a given tolerance, say 3dB. For a transducer, this is the range of frequencies over which it
can be used and is defined as the bandwidth of the sensor. The lower and higher roll off of
the transfer function is caused by both the transducer structure and the interface electronics.
For a microphone, the lower end of frequency range (denoted by fl), also known as the cut on
frequency, is determined by either the biasing resistor of the interface circuit or the acoustic
resistance of the vent channel and cavity compliance [53]. Similarly, the higher end of the
frequency range (denoted by fh), also known as the cut off frequency, is determined by the
47
FrequencyMagnitude (dB)Frequency (Hz)Phase (deg) 900-180-90 Flat frequency response(bandwidth)fl fh Resonance Peak
Figure 3-2. Characteristic frequency response of a capacitive transducer.
bandwidth of the interface circuit or the mechanical resonance of the sensor structure which in
turn is determined by the diaphragm mass and compliance.
The next performance metric to be considered is the linearity of the sensor. The linearity
of the sensor is a measure of how close the output versus input calibration curve approximates
a straight line at a given frequency. A plot of the ideal and actual linearity of a transducer is
shown in Figure 3-3. The slope of the straight line provides the sensitivity of the transducer at
Input PressureOutput Voltage Ideal responseActual responseFigure 3-3. Characteristic ideal and actual response of a capacitive transducer.
that frequency. It can be seen that at high input amplitudes, the output of the transducer deviates
from the ideal straight line curve. The lower and higher ends of the linear range are determined
by both the sensor interface circuit and the sensor. The lower end is limited by system noise
such as thermal noise, 1/f noise, and mechanical noise. The higher end of the linear range is
determined by structural non-linearities such as spring stiffening [78] or by circuit non-linearities
48
such as clipping [79]. The dynamic range of a capacitive transducer is defined as the ratio of the
maximum and minimum input signal of the linear range.
The deviation of the output from the ideal linear curve causes distortion in the microphone
output. Distortion can be defined in two different ways based on the input signal. When the
system is excited at a single frequency, distortion is defined as the minimum input amplitude that
causes the output to deviate from linearity by a fixed percentage. For a measurement microphone,
the deviation is usually chosen to be 3%. When the transducer is characterized over a frequency
range, the distortion is defined in terms of the total harmonic distortion (THD). THD is defined
as the ratio of the sum of the power in all the harmonic frequencies (ωn) to the fundamental
frequency (ω0).
THD =
∑∞n=0 P 2(ωn)
P 2(ω0). (3–2)
The output noise floor of a transducer is the noise mechanism generated output for zero
input signal. Referred to the input, the input noise floor represents the minimum detectable signal
(MDS). The output referred noise voltage power spectral density (PSD) of the interface circuit
denoted by SVout is expressed in V 2/Hz. The electrical noise at the output of the interface circuit
can be referred to the interface circuit input by dividing the output noise by the square of the
electrical sensitivity. The input signal PSD of the interface circuit is expressed in F 2/Hz. Thus,
the output noise power in a system is dependent on the bandwidth of operation. The total output
noise power or mean square output noise voltage is obtained by integrating the output noise
voltage PSD over the measurement bandwidth i.e.
v2no =
∫ fh
fl
SVoutdf. (3–3)
and the rms output noise voltage is vn,rms =√
v2no. A characteristic noise PSD curve is shown
in Figure 3-4. The overall system noise includes noise contributions from both the sensor and
the interface circuit. At low frequencies, the noise PSD is dominated by the flicker noise [80]
of the interface circuit which has a 1/f spectral shape. It should be noted that flicker noise is
present only when a dc current flows. At high frequencies, the noise is dominated by the thermal
noise [80] above a corner frequency. The corner frequency is the point at which the asymptote of
the 1/f noise region meets the thermal noise floor. Thermal noise is present in all systems that
49
Frequency (Hz)Noise PSD (V2/Hz) 1/f Noise regionThermal1/f Noise regionCorner frequencyFigure 3-4. Characteristic noise floor of a capacitive transducer using a voltage amplifier
interface circuit.
are in thermodynamic equilibrium. The magnitude of the thermal noise PSD is proportional to
the dissipation in the system.
To study the effect of the interface circuit noise on overall system performance, the noise
models developed in this chapter consider only the electronics noise of the interface circuit
elements and the spectral shaping of these noise sources by the interface circuit elements.
The commonly used elements in the interface circuit are resistors, capacitors and operational
amplifiers (opamps).
The noise model of the resistor is considered first. The 1/f noise of a resistor is dependent
on the fabrication method used to manufacture the resistor. Metal film resistors have the lowest
1/f noise and have a flat frequency response across the entire spectrum. Figure 3-22 shows the
voltage and current noise representations of a resistor. The PSD of resistor voltage and current
noise representations is given by
SvR = 4kTR (3–4)
and
SiR =4kT
R(3–5)
respectively.
Ideally, capacitors do not have any noise associated with them. In practical applications,
capacitors have an equivalent series resistor (ESR) which has a noise associated with it. The
ESR of a capacitor is small in comparison with other physical resistors present in the system.
Hence the noise of the physical resistor dominates over the noise due to the ESR. Hence, noise in
capacitors are not considered in the discussions in this chapter.
50
R SvR(a) Voltage noise model
of resistor.
RSiR(b) Current noise
model of resistor.
Figure 3-5. Noise model of resistor.
The noise model for the opamp is discussed next. Figure 3-6 shows the noise model of an
opamp consisting of a voltage and current noise voltage source at the non-inverting input of
the amplifier. The fundamental physical phenomena which cause noise in the opamp are the
thermal noise, shot noise, and 1/f noise in the transistors and resistors inside the opamp. The
typical noise voltage PSD (Sv) and current noise PSD (Si) is shown in Figure 3-7. It can be
seen that at low frequency the PSD has a 1/f shape and at large frequency, the PSD is constant.
The point at which the asymptote of the 1/f noise meets the thermal noise floor is the corner
frequency and is denoted by fcv and fci for the voltage and current noise PSDs respectively. At
any given frequency, the voltage and current noise PSD, Sv(f) and Si(f) respectively, can be
approximately expressed in terms of the corresponding voltage and current thermal noise limits,
Svo and Sio by
Sv(f) = Sv0
[1 +
fcv
f
](3–6)
and
Si(f) = Si0
[1 +
fci
f
]. (3–7)-+ VoutSva Sia
Figure 3-6. Noise model of opamp showing voltage and current noise source.
3.3 Analog Open Loop Sense Techniques
The function of the sense electronics is to measure the capacitance change associated with
the deflection of the diaphragm and provide a corresponding voltage signal . In the open-loop
scheme, the change in capacitance is measured directly by voltage or charge biasing either the
51
backplates or the diaphragm and measuring the voltage or charge signal generated on the other
plate. No feedback signal based on the measured output signal is applied to the microphone
plates to null the deflection caused by the input phenomenon. The open-loop techniques can be
further classified into analog and digital schemes which are discussed next.
Frequency (Hz)Noise PSD (V2/Hz) 1/f Noise region Thermal Noise regionCorner frequencyfcvSv
fSv0(a) Plot of voltage noise PSD of
amplifier.
Frequency (Hz)Noise PSD (A2/Hz) 1/f Noise region Thermal Noise regionCorner frequencyfci fSiSi0
(b) Plot of current noise PSD ofamplifier.
Figure 3-7. Plot of noise PSD of amplifier.
The performance metrics discussed so far will be derived for the various open and
closed-loop interface techniques. The analog open-loop sense schemes are characterized by the
absence of a clock signal as compared to the digital open loop sense techniques. The commonly
used analog open-loop techniques sense the voltage change using a voltage amplifier under a
constant charge bias, sense the charge using a charge amplifier under a constant voltage bias,
and sense using synchronous modulation/demodulation. Each of these techniques is discussed
in detail. For each of these interface techniques, the principle of operation, formulation for
performance metrics, tradeoffs, and a literature review is presented. Figure 3-8 shows a flow
diagram for each section. The derivation of the equations for each of the interface techniques is
presented in Appendix B.
3.3.1 Sensing Using A Voltage Amplifier
Operating Principle. In the simplest case, the top and bottom backplates of the
microphone with top and bottom capacitances given by C1 and C2 are biased at a dc potential
of +Vdc and −Vdc volts. A unity gain voltage amplifier is connected to the middle plate. Rdc is
a bias resistor that sets the dc operating point. Figure 3-9 shows a schematic of a dual backplate
capacitive microphone connected to a voltage buffer including parasitics. Cp represents the
total parasitic capacitance at the input to the amplifier due to the packaging. The parasitic
capacitance of commonly used packaging techniques is presented in Table 3-1. For a single chip
52
Interface circuitPrinciple ofoperationPerformancemetricsTradeoffsLiterature reviewFigure 3-8. Organization of each interface circuit discussed in Chapter 3.VxRDC -+ VoutCLC1C2-Vdc
+Vdc Cp CiFigure 3-9. Schematic of a dual backplate microphone connected to voltage buffer.
solution in which both the microphone and interface circuitry are on the same die, the sensor and
interface circuitry are electrically connected using metal or poly lines and the parasitic or input
capacitance is < 1pF . For two chip solutions, the parasitic capacitance is on the order of a few
pF depending on the interconnect used such as bond wires or PCB tracks. Ci represents the total
input capacitance of the amplifier. For an ideal interface circuit with no parasitic capacitance, the
output of the circuit, for a given change in capacitance, ∆C, is given by,
Vout =Vdc
C0
∆C, (3–8)
53
Table 3-1. Parasitic capacitance for various packaging technologies.Technique Packaging Parasitic CapacitancePolysilicon or metallines
On die interconnect < 10fF/um (Layoutdependent)
Wire bond [81] Interconnect between unpackageddies
30fF/mm
PCB Trace (FR4 PCB) Interconnect between packaged dies 1− 2pF/cm (Layoutdependent)
BNC cable(RG164[82]])
Interconnect between differentboards
20.6pF/ft
which is the same as a single backplate microphone. The derivation of all the equations is
provided in Appendix B. For a real interface circuit with parasitic capacitances, the output
voltage is given by
Vout =Vdc
2C0 + Cp + Ci
2∆C. (3–9)
Equation 3–9 can be rewritten as
Vout =Vdc
C0
[2C0
2C0 + Cp + Ci
]∆C. (3–10)
Defining the overall voltage attenuation factor Hc as
Hc =
[2C0
2C0 + Cp + Ci
], (3–11)
Equation 3–10 can be written as
Vout = HcVdc
C0
∆C. (3–12)
Comparing Equation 3–12 and Equation 3–8, it can be seen that the output voltage is attenuated
by the factor Hc that is dependent on the parasitic capacitance.
Performance Metrics. The first performance metric that will be derived is the sensitivity
of the circuit. Using the definition of sensitivity discussed in Section 3.2 and using Equation 3–9,
the electrical sensitivity Se of the circuit is given by
Se =2Vdc
2C0 + Cp + Ci
. (3–13)
From this equation, it can be seen that the sensitivity of the circuit is reduced with increased
parasitic capacitance.
To determine the total output noise, the noise model shown in Figure 3-10 is used. The PSD
54
C2 -+ VoutCLC1 Zi RDCCp Ci Sva SiaSvRFigure 3-10. Noise model of dual backplate microphone connected to voltage buffer.
of the circuit SVout is determined by the amplifier noise and the thermal noise of the bias resistor
and is given by
SVout = Sva + Sia
∣∣∣∣ZiRdc
Zi + Rdc
∣∣∣∣2
+
∣∣∣∣Zi
Zi + Rdc
∣∣∣∣2
SvR, (3–14)
where Zi = 1jω(2C0+Cp+Ci)
.
To obtain the minimum detectable capacitance per√
Hz, the noise PSD equation is divided
by the square of the electrical sensitivity Se followed by a square root. The minimum detectable
capacitance Cmin is given by
Cmin =
(2C0 + Cp + Ci
2Vdc
) √Sva + Sia
∣∣∣∣ZiRdc
Zi + Rdc
∣∣∣∣2
+
∣∣∣∣Zi
Zi + Rdc
∣∣∣∣2
SvR [F/√
Hz] (3–15)
From the equation for Cmin, it can be seen that the minimum detectable capacitance can be
decreased by increasing the bias voltage. It can also be seen that the parasitic capacitance
increases the minimum detectable capacitance.
The upper end of the circuit dynamic range is limited by the maximum output voltage of the
amplifier and is dependent on the topology of the amplifier used. For a given power supply Vdd,
the maximum output voltage Vomax is determined by a circuit dependent voltage drop Vdrop below
the supply rails Vdd and is given by the expression
Vomax = Vdd − Vdrop. (3–16)
For example, for an actively loaded single stage amplifier, the minimum Vdrop is given by
the overdrive voltage across the load transistor. Dividing the above equation by the electrical
55
sensitivity, the maximum input capacitance Cmax that can be measured is
Cmax =2C0 + Cp + Ci
2Vdc
[Vdd − Vdrop] . (3–17)
This shows that the upper end of the dynamic range can be increased by decreasing the top and
bottom plate voltage and increasing the sense capacitance.
The next performance metric that we derive is the circuit bandwidth. The lower limit of the
frequency response is set by the total capacitance at the inverting node and the bias resistor. [83].
It is given by the expression
fl =1
2πRdc (Cp + Ci + 2C0). (3–18)
The upper limit of the bandwidth fh of this circuit is determined by the amplifier. For a folded
cascode amplifier, the bandwidth is determined by the unity gain frequency , and is expressed in
terms of the load capacitance CL and transconductance gm by the expression [79]
fh =1
2π
gm
CL
. (3–19)
Tradeoffs. The main advantage of this circuit is its simplicity. It has very small
component count and can be easily implemented on an IC or on a PCB. However, the circuit
has some cons which are discussed. The overall sensor sensitivity is reduced by the parasitic
capacitance which is not easily controllable. A plot of the electrical sensitivity as a function of
parasitic capacitance is shown in Figure 3-11 for different sensor capacitances. It can be seen
that as sensor capacitance is scaled down, the effect of parasitic capacitance is exacerbated. The
noise floor of the interface circuit given by Equation 3–14 is dependent on the filtering of the
amplifier and resistor noise by the sense and parasitic capacitance. Furthermore, the choice of
amplifiers also makes a difference as amplifiers are optimized for either low current noise or low
voltage noise and not both. Figure 3-12 shows a plot of the noise contributions by the various
noise sources and the total output noise.
To understand the effect of the various circuit elements, on the output noise PSD,
Figure 3-13 and Figure 3-14 are plotted. Figure 3-13 shows a set of plots of the output noise
PSD as the sensor capacitance is scaled from 100pF to 1pF for various parasitic capacitances
assuming a fixed bias resistor of 10MΩ.
56
0 5 10 15 20 25 30 35 40 45 50
10−1
100
Parasitic Capacitance (pF)
Sen
sitiv
ity N
orm
aliz
ed
with
Bia
s V
olta
ge (
V/V
/pF
)
Decreasing Sense Capacitance
1pF5pF10pF50pF100pF
Figure 3-11. Variation of sensitivity as a function of total parasitic capacitance for various sensecapacitances
Figure 3-13(a), Figure 3-13(c), and Figure 3-13(e) show these plots for an amplifier with
low voltage noise and Figure 3-13(b), Figure 3-13(d), and Figure 3-13(f) show these plots for a
low current noise amplifier. It can be seen that for a fixed bias resistor, an amplifier optimized for
low current noise has a lower noise floor as compared to an amplifier with low voltage noise. It
can also be seen that this is true for all combinations of sensor and parasitic capacitance.
Figure 3-14 shows a set of plots of the output noise PSD capacitances as the sensor
capacitance is scaled from 1pF to 100pF for various bias resistors assuming a fixed parasitic
capacitor of 10pFΩ. In Figure 3-14(a), Figure 3-14(c), Figure 3-14(f) show these plots for
an amplifier with low voltage noise and Figure 3-14(b),Figure 3-14(d), Figure 3-14(e) show
the plots for low current noise. It can be seen that for a fixed parasitic capacitor, an amplifier
optimized for low current noise has a lower noise floor as compared to an amplifier with low
voltage noise. It can also be seen that this is true for all combinations of sensor capacitance and
bias resistor.
Literature Review. The voltage amplifier is the most common interface circuit used
in measurement microphones and audio microphones both for commercial and research
57
10−2
100
102
104
106
108
1010
10−30
10−25
10−20
10−15
10−10
10−5
Frequency (Hz)
Noi
se (
V2 /H
z)
Voltage NoiseCurrent NoiseResistor NoiseTotal Noise
Figure 3-12. Power spectral density of individual noise contributors and total output noise in avoltage amplifier based interface circuit. (Low Voltage Noise Amplifier (OP471)Sv0 = 10nV/
√Hz, Si0 = 1.6pA/
√Hz, fcv = 10Hz, fci = 10Hz, Rdc = 44MΩ,
Cp = 10pF ,Ci = 2.6pF , 2C0 = 1.7pF )
applications. Table 3-2, Table 3-3, and Table 3-4 list the properties of commercial and research
prototype voltage amplifiers used for capacitive microphones. One of the commonly used
commercial measurement microphone for aeroacoustic applications is the Bruel and Kjaer Type
4138 microphone [38].The nominal capacitance of this microphone is 6.2pF . The interface
circuit used is the Type 2670 voltage amplifier.
One of the commonly used commercial measurement microphone for aeroacoustic
applications is the Bruel and Kjaer Type 4138 microphone [38].The nominal capacitance of
this microphone is 6.2pF . The interface circuit used is the Type 2670 voltage amplifier. The Type
2670 amplifier has a flat frequency response from 15Hz − 200kHz and a noise level of 14µV
integrated over a 30Hz to 300kHz. The input capacitance of the preamplifier is 0.5pF . These
microphone are biased with 200V using a Bruel and Kjaer Type 2804 microphone power supply
unit.
58
10−2
100
102
104
106
108
1010
10−18
10−16
10−14
10−12
10−10
10−8
10−6
Frequency (Hz)
Noi
se (
V2 /H
z)
Cs = 1pFCs = 10pFCs = 100pF
(a) Low Voltage Noise (Cp + Ci = 1pF )
10−2
100
102
104
106
108
1010
10−18
10−16
10−14
10−12
10−10
10−8
Frequency (Hz)
Noi
se (
V2 /H
z)
Cs = 1pFCs = 10pFCs = 100pF
(b) Low Current Noise (Cp + Ci = 1pF )
10−2
100
102
104
106
108
1010
10−18
10−16
10−14
10−12
10−10
10−8
10−6
Frequency (Hz)
Noi
se (
V2 /H
z)
Cs = 1pFCs = 10pFCs = 100pF
(c) Low Voltage Noise (Cp + Ci = 10pF )
10−2
100
102
104
106
108
1010
10−18
10−16
10−14
10−12
10−10
10−8
Frequency (Hz)
Noi
se (
V2 /H
z)Cs = 1pFCs = 10pFCs = 100pF
(d) Low Current Noise (Cp + Ci = 10pF )
10−2
100
102
104
106
108
1010
10−18
10−16
10−14
10−12
10−10
10−8
10−6
Frequency (Hz)
Noi
se (
V2 /H
z)
Cs = 1pFCs = 10pFCs = 100pF
(e) Low Voltage Noise (Cp + Ci = 100pF )
10−2
100
102
104
106
108
1010
10−18
10−16
10−14
10−12
10−10
10−8
Frequency (Hz)
Noi
se (
V2 /H
z)
Cs = 1pFCs = 10pFCs = 100pF
(f) Low Current Noise (Cp + Ci = 100pF )
Figure 3-13. Plot of output noise for voltage amplifier with a fixed bias resistor (10MΩ).(Low Voltage Noise Amplifier (OP471) Sv0 = 10nV/
√Hz, Si0 =
1.6pA/√
Hz, fcv = 10Hz, fci = 10Hz, Low Current Noise Amplifier (TL2274)Sv0 = 10nV/
√Hz, Si0 = 0.01pA/
√Hz, fcv = 10Hz, fci = 10Hz)
59
10−2
100
102
104
106
108
1010
10−15
10−10
10−5
Frequency (Hz)
Noi
se (
V2 /H
z)
Cs = 1pFCs = 10pFCs = 100pF
(a) Low Voltage Noise (Rdc = 100kΩ)
10−2
100
102
104
106
108
1010
10−15
10−10
10−5
Frequency (Hz)
Noi
se (
V2 /H
z)
Cs = 1pFCs = 10pFCs = 100pF
(b) Low Current Noise (Rdc = 100kΩ)
10−2
100
102
104
106
108
1010
10−15
10−10
10−5
Frequency (Hz)
Noi
se (
V2 /H
z)
Cs = 1pFCs = 10pFCs = 100pF
(c) Low Voltage Noise (Rdc = 10MΩ)
10−2
100
102
104
106
108
1010
10−15
10−10
10−5
Frequency (Hz)
Noi
se (
V2 /H
z)Cs = 1pFCs = 10pFCs = 100pF
(d) Low Current Noise (Rdc = 10MΩ)
10−2
100
102
104
106
108
1010
10−15
10−10
10−5
Frequency (Hz)
Noi
se (
V2 /H
z)
Cs = 1pFCs = 10pFCs = 100pF
(e) Low Voltage Noise (Rdc = 1GΩ)
10−2
100
102
104
106
108
1010
10−15
10−10
10−5
Frequency (Hz)
Noi
se (
V2 /H
z)
Cs = 1pFCs = 10pFCs = 100pF
(f) Low Current Noise (Rdc = 1GΩ)
Figure 3-14. Plot of output noise for voltage amplifier with a fixed parasitic capacitance of(10pF ). (Low Voltage Noise Amplifier (OP471) Sv0 = 10nV/
√Hz, Si0 =
1.6pA/√
Hz, fcv = 10Hz, fci = 10Hz, Low Current Noise Amplifier (TL2274)Sv0 = 10nV/
√Hz, Si0 = 0.01pA/
√Hz, fcv = 10Hz, fci = 10Hz)
60
Table 3-2 shows a list of commonly used Bruel and Kjær amplifiers suitable for aeroacoustic
measurement and their characteristics.
Table 3-2. Specification of Voltage Amplifiers for Bruel and Kjaer Microphones.Model Number Input Capacitance Noise Floor
(A-weighted)Bandwidth
Type 2660 0.3pF 0.8µV 20Hz-200kHz
Type 2669B 0.3pF 1.9µV 20Hz-200kHz
Type 2670 0.3pF 4.0µV 30Hz-300kHz
Commercial MEMS capacitive microphones are now available from Knowles acoustics and
Sonion Technologies. These microphone use an integrated voltage buffer along with an analog to
digital converter (ADC) to provide a digital output. The target application for these microphone
is in the high volume cell phone market where price is the important metric. Also for integration
with the rest of the system, a digital output is an important feature.
Knowles Acoustics sells commercial MEMS based microphones for audio applications
namely, the SiSonic series of microphones [5]. They consist of a MEMS microphone wirebonded
to a voltage amplifier. The interface circuitry operates on a 1.5V source. The high voltage (11V )
required for biasing the microphone is obtained by an on-chip charge pump. The circuit has a
bandwidth in excess of 10kHz. The performance metrics of the amplifier itself are not provided.
Sonion Technologies sells MEMS microphones for cell phone applications namely the
TC100 series microphones [47, 84]. It consists of a PMOS buffer amplifier cascaded with
a NMOS gain stage. The chip is powered by a 1.8V supply. The output of the amplifier is
processed via a ADC and thus the microphone has a digital output.
The National Semiconductors LV 10XX series of amplifiers [85] is specially designed
for electret condenser microphones and consists of a high gain, low input capacitance stage
followed by an optional sigma delta based analog to digital converter thus providing both analog
and digital outputs. The circuit runs on a 1.8 to 5V supply. The input capacitance is 2pF over
the entire power supply range. The gain variation is 8V/V to 25V/V over the entire product
family and power supply options. These amplifiers have a flat frequency response from 100Hz
to 110kHz. The input noise of these amplifiers is approximately 500nV/√
Hz. The primary
application of these interface circuits is for microphones used in cell phones.
61
Table 3-3 presents an overview of voltage amplifier circuits used in research prototype
capacitive microphones. It has been observed that in these publications, the overall microphone
sensitivity in V/Pa is reported and not the electrical sensitivity (V/F ). Hence, the gain reported
in Table 3-3 is the sensitivity of the amplifier alone and is expressed in V/V . The general trend
in the input stage of voltage amplifier implementation using custom ICs is the use of unity gain
single transistor CMOS stages . This is done to minimize input parasitic capacitance and input
current noise.
In the published literature, one of the earliest semiconductor voltage follower based
capacitive microphone interface circuit was reported in a patent by Killion et al. in 1970 [86].
The circuit consisted of a JFET voltage follower. Back-to-back diodes were used for biasing the
microphone capacitance.
In 1989, Murphy et al, [87] presented a silicon electret microphone that uses a CMOS
preamplifer. The amplifier had a reported gain of 0.9V/V . The overall device had a bandwidth
of 15kHz. The bias voltage used was not reported. In 1991, Bergqvist et al presented a single
backplate microphone with a perforated backplate. The microphone capacitance was 5pF and
was biased with a 5V dc battery. A modified Bruel and KjærType 2619 was used as the interface
circuit. The input parasitic capacitance of the interface circuit was 2pF , and the bandwidth was
from 20Hz to 20kHz. In 1995, Ning et al. [88], presented a voltage buffer based interface circuit
for a micromachined capacitive microphone to be used in cell phones.
In 1995, Ning et al. [88], presented a voltage buffer based interface circuit for a micromachined
capacitive microphone to be used in cell phones.The nominal capacitance of the sensor was
9.1pF . The input parasitic capacitance of the cables and the interface circuit was 12pF with the
amplifier contributing 2pF . The microphone was biased at a dc potential of 6V .
In 1996, Bernstein and Borenstein presented the first MEMS microphone with onchip
interface circuitry [18] in 1996. It consisted of a JFET source follower with an input parasitic
capacitance of 0.5pF .
In 1998, Pedersen and Bergveld reported a MEMS amplifier [59] with integrated CMOS
amplifier and dc-dc converter. The amplifier input consisted of a p-MOSFET based voltage
follower. A p-MOSFET was used because of its lower noise floor as compared to an n-MOSFET.
62
Table 3-3. Review of interface circuits used in MEMS microphones published in literature.Author Microphone
CapacitanceParasitic
Capacitance αGain Bandwidth Comments
Killion,1970[86]∗
NR NR, NR NR NR JFET input custom amplifier,Back-to-back diodes to bias
microphone plateMurphy etal,1989[87]
NR NR, NR 0.9 15kHz Custom CMOS amplifier
Sprenkelset al.,1991[89]
3pF 1pF , NR 0.9 NR JFET input amplifier
Kuhnel etal.,1992[90]
1pF 0.25pF , NR 1 20kHz Commercial Bruel andKjærType 2633 preamplifier
Bergqvistet al,1994[91]
5pF 2pF , NR 1 20Hz −20kHz
COTS∗∗ Bruel and KjærType2619 amplifier
Ning et al,1994[88]
9.1pF 2pF , 10pF 1 NR Custom amplifier.Microphone used in cell
phones.Bernstein etal, 1996[?]
NR 0.5pF , NR NR NR Custom JFET sourcefollower.
Hsu al,1997[14]
16.2pF 2pF , 10pF 1 NR COTS∗∗ HPA-COP4012amplifier. Input impedance is
10GΩ.Kabir al,1999[14]
2.4pF NR, NR < 1 100Hz−9kHz
Custom JFET sourcefollower.
Baker et al,2003[92]
NR NR, NR NR upto10kHz
Uses the current output of aJFET follower. Used formicrophones in cochlear
implantsKern et al,2004[93]∗
NR NR, NR NR NR Large back to back diodes areused to bias amplifier
Furst et al,2005[84]∗
NR < 10pF , NR NR NR PMOS unity gain stagedriving a NMOS gain stage
Loeppert etal,2006 [94]
0.5pF < 1pF ,0.25pF
1 NR Unity gain buffer with an0− 20dB gain opamp in
cascade. The output of thefirst stage drives the shield.
α Input Capacitances, Interconnect Capacitance∗ Patent
In 1998, Hsu et al reported a single backplate polysilicon condenser microphone [95]. The
device had a zero bias capacitance of 16.2pF . The interface circuit used was a HPACOP4012
preamplifier. It had an input impendance of 2.5GΩ. The input capacitance is not reported. The
microphone was polarized at 10V .
In 1999, Kabir et al. reported a MEMS microphone that used a doped p+ poly as the
membrane and gold backplates. The device had a zero bias capacitance of 2.4pF . During
63
normal operation, the amplifier was biased with a 9V dc supply. The bias resistor was a 16GΩ
poly resistor. The microphone output was buffered by a JFET input voltage follower that was
fabricated on the same chip. The microphone had a flat frequency response from 100Hz to
9kHz.
In 2003, Baker et al reported a JFET input preamplifier that used the current output of a
source follower as opposed to the traditional output voltage [92]. The amplifier was designed
for microphones used in cochlear implants. The amplifier was optimized for high power supply
rejection ratio (PSRR) which is a requirement for low noise design. The circuit operated on a 3V
power supply and had a flat frequency response up to 10kHz.
In 2004, Kern et al obtained a patent for a microphone interface circuit. The circuit biases
the microphone using large resistors from back-to-back diodes. Other performance metrics of the
circuit were not disclosed in the patent.
In 2005, Furst et al [84] of Sonion Technology obtained a patent for a two stage preamplifier
for an electret condenser microphone. It consists of a PMOS unity gain source follower driving
a NMOS gain stage. The circuit has an input capacitance of less than 10pF . Using a two stage
topology allows the independent tuning of the amplifier gain and the input capacitance. The
preamplifier is designed for use in telephony applications.
In 2006, Loeppert et al [94] presented the first commercial MEMS microphone. The
interface circuit consists of a voltage buffer with a 0.25pF input capacitance followed by a gain
stage. The microphone is biased by a 11V dc signal that is generated by a charge pump that is on
the same die as the amplifier.
General purpose operational amplifiers can also be used as interface circuits for capacitive
microphones using any of the packaging techniques listed in Table 3-1. Compared to custom
ICs, the input parasitic capacitance of these amplifiers are comparatively higher and is further
increased by the packaging technology used to connect the amplifier to the microphone. These
amplifiers are usually provided in open loop configuration. Thus, careful circuit design, which
may result in adding more components such as resistors and capacitors is required for the proper
operation of these amplifiers. These extra components may introduce parasitic capacitance
that have to be taken into consideration during the interface circuit design. A set operational
64
amplifiers recommended by the manufacturer for use as a voltage amplifier for microphones is
listed in Table 3-4 along with their performance specifications.
Table 3-4. Specification of a representative sample of operational amplifiers recommended bymanufacturers for use as voltage followers for capacitive transducers.
Model Number InputStage
Capacitance
Voltage Noise(Sv, fcv)
CurrentNoise
(Si, fci)
Bandwidth
AD8079(AnalogDevices)
1.5pF 3.2nV/√
Hz,2kHz
NR 20MHz
LM6211(NationalSemiconductors)
5.5pF 5.5nV/√
Hz,400Hz
NR 20MHz
TL2274 (TexasInstruments)
8pF 50nV/√
Hz ,200Hz
0.5fA/√
Hz,10Hz
2.25 MHz
OP285(AnalogDevices)
2.6pF 11nV/√
Hz ,10Hz
1.7pA/√
Hz,10Hz
6.5 MHz
3.3.2 Sensing Using A Charge Amplifier
Operating Principle. A charge amplifier consists of a opamp circuit with a capacitor in
the feedback path as shown in Figure 3-15. The inverting input is connected to the middle plate
of the microphone and the non-inverting input is grounded. RDC is a bias resistor that sets the dc
operating point of the amplifier input. The middle plate is biased at 0V by the principle of virtual
short between the non-inverting terminal and inverting terminal of the amplifier. The charge
flowing through the middle plate is integrated by the feedback capacitor Cint. The top and bottom
plates are biased at +Vdc and −Vdc respectively. The input-output relation of the circuit for a
capacitance change is given by the equation
Vout = −[
Vdc
Cint
]2∆C. (3–20)
Performance Metrics. From the input-output relationship given by Equation 3–20, the
electrical sensitivity of the circuit is given by the equation
Se =2Vdc
Cint
, (3–21)
which is twice that of a single backplate microphone. From the sensitivity equation, it can be
inferred that the sensitivity can be increased by increasing the bias voltage or decreasing the
65
Cint+-RDCC1C2-Vdc+Vdc Cp Ci VoutCL
Figure 3-15. Schematic of dual backplate microphone connected to a charge amplifier.
integrating capacitor. To determine the total output voltage noise PSD SVout , the noise modelC1 Cp Ci Cint +-RDC VoutCLC2 Zi SiRSva SiaFigure 3-16. Noise model of dual backplate microphone connected to charge amplifier.
shown in Figure 3-16 is used. Defining Ctot = 2C0 + Cp + Ci Zi = 1jω(2C0+Cp+Ci)
and
Zf = Rdc‖ 1jω Cint
, the total output noise PSD is given by
SVout = Sva
[1 +
(Zf
Zi
)]2
+ (SiR + Sia) Z2f . (3–22)
For frequencies above the cut on frequency i.e.(ω > 1
Rf Cint
), the output voltage noise PSD
equation can be simplified to
SVout = Sva
[1 +
(Ctot
Cint
)]2
+ (Sia + SiR)1
(ωCint)2 . (3–23)
66
Dividing SVout by the electrical sensitivity of the charge amplifier squared and taking the square
root, we obtain the minimum detectable capacitance per√
Hz is given by the equation
Cmin =Cint
2Vdc
√Sva
[1 +
(Ctot
Cint
)]2
+ (Sia + SiR)1
(ωCint)2 . (3–24)
From the equation for Cmin, it can be seen that the noise floor is increased by the parasitic
capacitance. Furthermore, the current noise PSD due to the bias resistor and the current noise of
the amplifier is shaped as 1/ω2 which increases the noise at low frequencies considerably.
The upper end of the dynamic range is limited by the maximum output voltage of the
amplifier and is dependent on the topology of the amplifier used. For a given power supply Vdd,
the maximum output voltage Vomax is determined by a circuit dependent voltage drop Vdrop below
the supply rails Vdd and is given by the expression
Vomax = Vdd − Vdrop. (3–25)
Dividing the above equation by the electrical sensitivity, the maximum input capacitance that can
be measured is
Cmax =Cint
2Vdc
[Vdd − Vdrop] . (3–26)
This shows that the upper end of the circuit dynamic range can be increased by decreasing the
top and bottom plate voltage and increasing the integrating capacitance.
The lower limit of the frequency response is set by the feedback capacitance and the
feedback resistor [83]. It is given by the expression
fl =1
2πRdcCint
. (3–27)
The upper end of frequency response of this circuit is determined by the bandwidth of the
amplifier and is dependent on the amplifier topology. For example, for a single stage folded
cascode amplifier with a transconductance gm, the bandwidth is given by the expression
fh =1
2π
gm
CL + Cint
. (3–28)
From the equation for fh, it can be inferred that the bandwidth is also increased when the Cint is
decreased.
67
Tradeoffs. The main advantage of the charge amplifier based circuit is the immunity of
the sensitivity to parasitic capacitance. The circuit sensitivity can be increased by reducing Cint
without increase in the noise floor. However, another consideration when reducing Cint is that
the bandwidth of the amplifier must be increased to ensure that there is sufficient loop gain for
the stable operation of the amplifier. Decreasing Cint to increase the sensitivity also reduces the
upper end of the dynamic range.
The main disadvantage of this circuit is the need for a large dc bias resistor Rdc because
the noise PSD due to this resistor is 1/f 2 shaped which considerably increases the noise at
low frequency. Choosing Rdc is a trade off between noise and the lower end of the frequency
response fl. Implementing a large Rdc resistor is non-trivial in an integrated circuit process.
Options include thick film resistors, back-to-back diodes, or low resistance poly resistors. Each
of these techniques has its own advantages and disadvantages[8]. Figure 3-17 shows a plot
10−5
100
105
1010
1015
1020
10−35
10−30
10−25
10−20
10−15
10−10
10−5
Frequency (Hz)
Noi
se (
V2 /H
z)
Amplifier Voltage NoiseAmplifier Current NoiseResistor Current NoiseTotal Noise
Figure 3-17. Power spectral density of individual noise contributors and total output noise in acharge amplifier based interface circuit. (Low Voltage Noise Amplifier (OP471)Sv0 = 10nV/
√Hz, Si0 = 1.6pA/
√Hz, fcv = 10Hz, fci = 10Hz, Rdc = 44MΩ,
Cp = 10pF ,Ci = 2.6pF , 2C0 = 1.7pF )
of the PSD of various noise contributors in a charge amplifier and the total output referred
noise. It can be inferred that at low frequencies the resistor current noise is the dominant
noise mechanism and at higher frequencies the amplifier voltage noise is the dominant noise
mechanism. Figure 3-18 and Figure 3-19 plot the effect of scaling various circuit elements, on
68
the output noise PSD. Figure 3-18 shows a set of plots of the output noise PSD as the sensor
capacitance is scaled from 100pF to 1pF for various parasitic capacitance assuming a fixed bias
resistor of 10MΩ. Figure 3-18(a), Figure 3-18(c), and Figure 3-18(e) show these plots for a low
voltage noise amplifier and Figure 3-18(b), Figure 3-18(d), and Figure 3-18(f) show these plots
for a low current noise amplifier . It can be seen that, for a large fixed bias resistor(10MΩ), an
amplifier optimized for low current noise has a lower noise floor as compared to an amplifier
with low voltage noise. It can also be seen that this is true for all combinations of sensor and
parasitic capacitances. Figure 3-19 shows a set of plots of the output noise PSD as the sensor
capacitance is scaled from 100pF to 1pF for various bias resistors assuming a fixed parasitic
capacitor of 10pF . Figure 3-19(a), Figure 3-19(c), and Figure 3-19(f) show these plots for an
amplifier with low voltage noise and Figure 3-19(b), Figure 3-19(d), and Figure 3-19(e) show
the plots for a low current noise amplifier. It can be seen that, for a fixed parasitic capacitance,
an amplifier optimized for low current noise has a lower noise floor as compared to an amplifier
with low voltage noise where the difference in large for a large bias resistor.
Literature Review. Charge amplifiers are commonly used for capacitive accelerometers,
gyroscopes, and pressure sensors when the sensor is located at a distance far away from the
circuitry. To overcome the parasitics of the long parasitic leads, a charge amplifier is used.
Traditionally, in microphones, the output of the amplifier is buffered as close as physically
possible to the sensor. Therefore, very few capacitive microphones use a charge amplifier
interface circuit. Another common reason for the usage of voltage amplifiers over charge
amplifiers is the increased noise at low frequencies due to the 1/f 2 shaping of the current noise.
A summary of the literature survey is given in Table 3-5.
In 1999, Amendola et al. [96] reported a charge amplifier-based interface circuit for a
capacitive microphone.
The target applications for the microphone was measurements inside a resonant cavity
which had a narrow bandwidth centered at 25kHz. The amplifier had a simulated bandwidth
from 19Hz to 1.4MHz. The simulated sensitivity of the circuit was 2V/pC and a measured
sensitivity of 0.3V/pC.
69
10−2
100
102
104
106
108
10−15
10−10
10−5
Frequency (Hz)
Noi
se (
V2 /H
z)
Cs = 1pFCs = 10pFCs = 100pF
(a) Low Voltage Noise (Cp + Ci = 1pF )
10−2
100
102
104
106
108
10−15
10−10
10−5
Frequency (Hz)
Noi
se (
V2 /H
z)
Cs = 1pFCs = 10pFCs = 100pF
(b) Low Current Noise (Cp + Ci = 1pF )
10−2
100
102
104
106
108
10−15
10−10
10−5
Frequency (Hz)
Noi
se (
V2 /H
z)
Cs = 1pFCs = 10pFCs = 100pF
(c) Low Voltage Noise (Cp + Ci = 10pF )
10−2
100
102
104
106
108
10−15
10−10
10−5
Frequency (Hz)
Noi
se (
V2 /H
z)Cs = 1pFCs = 10pFCs = 100pF
(d) Low Current Noise (Cp + Ci = 10pF )
10−2
100
102
104
106
108
10−15
10−10
10−5
Frequency (Hz)
Noi
se (
V2 /H
z)
Cs = 1pFCs = 10pFCs = 100pF
(e) Low Voltage Noise (Cp + Ci = 100pF )
10−2
100
102
104
106
108
10−15
10−10
10−5
Frequency (Hz)
Noi
se (
V2 /H
z)
Cs = 1pFCs = 10pFCs = 100pF
(f) Low Current Noise (Cp + Ci = 100pF )
Figure 3-18. Plot of output noise for charge amplifier with a fixed bias resistor (10MΩ).(Low Voltage Noise Amplifier (OP471) Sv0 = 10nV/
√Hz, Si0 =
1.6pA/√
Hz, fcv = 10Hz, fci = 10Hz, Low Current Noise Amplifier (TL2274)Sv0 = 10nV/
√Hz, Si0 = 0.01pA/
√Hz, fcv = 10Hz, fci = 10Hz)
70
10−2
100
102
104
106
108
10−15
10−10
10−5
Frequency (Hz)
Noi
se (
V2 /H
z)
Cs = 1pFCs = 10pFCs = 100pF
(a) Low Voltage Noise (Rdc = 100kΩ)
10−2
100
102
104
106
108
10−15
10−10
10−5
Frequency (Hz)
Noi
se (
V2 /H
z)
Cs = 1pFCs = 10pFCs = 100pF
(b) Low Current Noise (Rdc = 100kΩ)
10−2
100
102
104
106
108
10−15
10−10
10−5
Frequency (Hz)
Noi
se (
V2 /H
z)
Cs = 1pFCs = 10pFCs = 100pF
(c) Low Voltage Noise (Rdc = 10MΩ)
10−2
100
102
104
106
108
10−15
10−10
10−5
Frequency (Hz)
Noi
se (
V2 /H
z)Cs = 1pFCs = 10pFCs = 100pF
(d) Low Current Noise (Rdc = 10MΩ)
10−2
100
102
104
106
108
10−15
10−10
10−5
Frequency (Hz)
Noi
se (
V2 /H
z)
Cs = 1pFCs = 10pFCs = 100pF
(e) Low Voltage Noise (Rdc = 1GΩ)
10−2
100
102
104
106
108
10−15
10−10
10−5
Frequency (Hz)
Noi
se (
V2 /H
z)
Cs = 1pFCs = 10pFCs = 100pF
(f) Low Current Noise (Rdc = 1GΩ)
Figure 3-19. Plot of output noise for charge amplifier with a fixed parasitic capacitance of(10pF ).(Low Voltage Noise Amplifier (OP471) Sv0 = 10nV/
√Hz, Si0 =
1.6pA/√
Hz, fcv = 10Hz, fci = 10Hz, Low Current Noise Amplifier (TL2274)Sv0 = 10nV/
√Hz, Si0 = 0.01pA/
√Hz, fcv = 10Hz, fci = 10Hz)
71
In 2005, Martin et al. [97] reported a dual backplate MEMS capacitive microphone for use
in aeroacoustic applications that used a commercial-off-the-shelf (COTS) Thermoptics DN620
charge amplifier which has a sensitivity of 1V/pC and a bandwidth of 100kHz. The feedback
elements consisted of a 1pF capacitor in parallel with a 1GΩ resistor.
Table 3-5. Review of charge amplifier interface circuits used in capacitive microphones.Author Type of
Sensor/SensorCapacitance
Sensitivity Feedbackcapacitor
Bandwidth Comments
Amendolaet al. 1999[96]
Microphone0.7pF
0.3V/pC witha 10V bias,
NR 19Hz −1.5MHz
JFET input custom amplifier.Uses a switched capacitortechnique to obtain stable
operationMartin etal. 2005[97]
Microphonedifferential
capacitor with1pF ,0.7pF
nominalcapacitance
1V/pC with a9V bias
1pF 300Hz−20kHz
COTS Thermoptics DN620[98] charge amplifier
Commercially available general purpose operational amplifiers can be used as a charge
amplifier by employing a feedback resistor and capacitor. A representative sample of general
purpose amplifiers that are recommended by the manufacturer for use as a charge amplifier by
using a feedback resistor and capacitor is listed in Table 3-6.
Table 3-6. Specification of a representative sample of general purpose operational amplifiersrecommended by the manufacturer for use as charge amplifiers using a feedbackresistor and capacitor.
Model Number Input Stage Noise Floor CornerFrequency
Bandwidth
OPA128 (TexasInstruments) [99]
DiFET 27nV/√
Hz 300Hz 1MHz
OPA111 (TexasInstruments) [100]
DiFET 8nV/√
Hz 300Hz 800kHz
AD745 (Analog Devices)[101]
FET 3.2nV/√
Hz 2kHz 20MHz
3.3.3 Sensing Using Synchronous Modulation/Demodulation
Operating Principle. The fundamental idea behind this technique is to improve the
noise performance [65, 46] of the circuit by modulating the capacitive signal to a high carrier
frequency above the low 1/f corner frequency of the amplifier. This high frequency signal is
then amplified and demodulated. During the demodulation and subsequent low pass filtering
process, the original signal is recovered and the noise is filtered out.
72
MultiplierVac sin(wct) Vout(Demod) Lowpass Filter+Vac sin(wct)
-Vac sin(wct) Cp CiC1C2 -+RDC vmod vdemodFigure 3-20. Schematic of capacitive microphone with a synchronous modulation and
demodulation technique using a voltage amplifier based circuit.
In this technique, the top and bottom plates are excited by a sinusoidal signal of equal
magnitude (Vac) but 180 degrees out of phase. The excitation frequency (ωc) is chosen to be
much higher ( 100×) than the resonant frequency of the sensor. This is done so as to prevent the
electrostatic excitation of the sensor by the ac waveform. The interface circuit used can be either
a voltage amplifier or a charge amplifier. A schematic of the system using a voltage amplifier and
charge amplifier interface circuit is shown in Figure 3-20 and Figure 3-21 respectively.
Charge Amp MultiplierVac sin(wct) Vout(Demod) Lowpass FilterCintVx+Vac sin(wct)-Vac sin(wct)
RdcCp CiC1C2 -+
Figure 3-21. Schematic of a capacitive microphone with a synchronous modulation anddemodulation technique using a charge amplifier based circuit.
The amplitude modulated (AM) signal is converted back to a baseband signal using a
synchronous demodulator. The carrier frequency used to demodulate the output of the charge
amplifier is phase locked to the modulating a signal applied to the top and bottom backplate. The
73
Frequency (Hz)Voltage (V) ffm fc(a) Spectrum of various signals involved in
synchronous modulation/demodulationtechnique
Frequency (Hz)Voltage (V) ffm fcfc-fm fc+fm(b) Spectrum of signals at the middle plate
of the microphone.
Frequency (Hz)Voltage (V) ffm fc(c) Spectrum of signal at output of demodulator
Frequency (Hz)Voltage (V) fm(d) Spectrum of signal at output of
low pass filter.
Figure 3-22. Plot of spectrum at various nodes of Figure 3-21
synchronous demodulator consists of an analog multiplier followed by a low pass filter. This
circuit overcomes the noise due to amplifier 1/f noise and the 1/f 2 shaped current noise of the
bias resistor and current noise of the amplifier by modulating high frequency carrier frequency
with the low frequency acoustic signal. This signal is then amplified, demodulated, and low pass
filtered to obtain the original signal. During the demodulation process the low frequency 1/f and
1/f 2 noise are modulated to the carrier frequency which is then filtered out while the acoustic
signal at the carrier frequency is translated to the baseband and passes through. The relation
between the capacitance input and the low pass filtered output of this technique is given by [46]
Vout = Hc
[V 2
ac
C0
]∆C. (3–29)
for a voltage amplifier and by
Vout =
[V 2
ac
Cint
]∆C. (3–30)
for a charge amplifier where U = 1V is a scale factor. The dimension of Equation 3–29 and
Equation 3–30 needs consideration. In practice, the demodulator [102] is implemented as an an
74
analog multiplier with a transfer function given by
Z =XY
U, (3–31)
where Z is the output of the multiplier measured in V olts, X and Y are the inputs to the
multiplier measured in V olts and U is a scale factor also measured in V olts. Thus, the output
of the demodulator has the dimension of V olts and Equations 3–29 and 3–30 are dimensionally
consistent.
Performance Metrics. From the input output relationship given by Equation 3–29 and
Equation 3–30, the electrical sensitivity of the circuit is given by the equation
Se =Hc
U
V 2ac
C0
[V/F ] . (3–32)
for a voltage amplifier and by
Se =V 2
ac
UCint
[V/F ] . (3–33)
for a charge amplifier.
From the above equation, it can be inferred that the sensitivity can be increased for both
interface circuits by increasing the peak ac bias voltage, Vac. The bias voltage can not be
increased without bound. There are two main factors that determine the maximum value of
the ac signal. They are the electrostatic pull-in limit which was discussed in Chapter 2 and the
actuation of the microphone plates by the electrical ac voltage instead of the input acoustic
signal. Although the frequency of excitation is 100× higher than the resonant the resonant
frequency, if the input amplitude is large, the diaphragm can vibrate at the high carrier frequency.
For the charge amplifier based interface circuit, the sensitivity can also be increased by
decreasing the value of the integrating capacitor. The minimum value of the integrating capacitor
is determined by the limitations of the fabrication process and the overall bandwidth of the
circuit.
For illustration, the sensitivity of a voltage amplifier based interface circuit using square
waves for modulation and demodulation is derived. Let the top plate voltage vtp and bottom plate
75
voltage vtp be given by
vtp = +Vdc − vac(t)
vbp = −Vdc + vac(t), (3–34)
where
vac(t) = Vac 0 < t <1
2
2π
ωc
vac(t) = 01
2
2π
ωc
< t <2π
ωc
. (3–35)
Also, let us assume that the demodulator voltage Vc(t), is given by
Vc(t) = Vc 0 < t <1
2
2π
ωc
Vc(t) = 01
2
2π
ωc
< t <2π
ωc
. (3–36)
The output of the demodulator, vdemod(t), is given by the expression
Vdemod(t) = vmod(t)× Vc(t). (3–37)
The output of the demodulator is low pass filtered. From Equation 4–4, it can be seen that
demodulation is a non-linear operation. The entire process of demodulation and low pass filtering
can be linearized by ignoring the harmonics at the output of the low pass filter as they will be
attenuated by the filter. Thus, ignoring the harmonics which are attenuated by the low pass filter,
the output of the filter can be shown to be
Vout(t) =∆C
C0
Hc
U
(Vc
2
(Vdc +
Vac
2
)+
2Vc
π
2Vac
π
), (3–38)
for a voltage amplifier and
Vout(t) =∆C
Cint
1
U
(Vc
2
(Vdc +
Vac
2
)+
2Vc
π
2Vac
π
). (3–39)
for a charge amplifier. The derivation of the above equation is provided in Appendix A.5. Thus,
the sensitivity is given by
Se =Hc
C0
1
U
(Vc
2
(Vdc +
Vac
2
)+
2Vc
π
2Vac
π
), (3–40)
76
for a voltage amplifier and
Se =1
Cint
1
U
(Vc
2
(Vdc +
Vac
2
)+
2Vc
π
2Vac
π
). (3–41)
For the reminder of this section, we use the simplified sensitivity. To determine the
total output noise, the noise model shown in Figure 3-23 is used for a voltage amplifier and
Figure 3-24 is used for a charge amplifier. For the voltage amplifier interface circuit, the totalCp CiC1C2 MultiplierVac sin(wct) Vout(Demod) Lowpass Filter-+RdcZi Sva SiaSvR Voltage Buffer SmultiplierFigure 3-23. Noise model of synchronous modulator and demodulator using voltage amplifier.
Cint +-RDC CLCp CiC1C2 MultiplierVac sin(wct) Vout(Demod) Lowpass FilterCharge AmpSiaSiRSva Smultiplier
Figure 3-24. Noise model of synchronous modulator and demodulator using charge amplifier.
input noise is given by
SVout = Sva + Sia (Zi ‖ Rdc)2 +
∣∣∣∣Zi
Zi + Rdc
∣∣∣∣2
SvR + Smultiplier, (3–42)
where Zi = 1jω(2C0+Cp+Ci)
and Smultiplier is the output referred noise PSD of the multiplier. For
the charge amplifier interface circuit, the total output noise is given by
SVout = SV a
[1 +
(Ctot
Cint
)]2
+ Smultiplier. (3–43)
77
Dividing the total output noise, Equation 3–42 and Equation 3–43, by the corresponding
electrical sensitivity, we obtain the minimum detectable capacitance and is given by the equation
Cmin =(2C0 + Cp + Ci) U
V 2ac
√SV a + Sia (Zi ‖ Rdc)
2 +
∣∣∣∣Zi
Zi + Rdc
∣∣∣∣2
SvR + Smultiplier. (3–44)
for a voltage amplifier and
Cmin =CintU
V 2ac
√Sva
[1 +
(Ctot
Cint
)]2
+ Smultiplier. (3–45)
for a charge amplifier. The upper end of the dynamic range is the same for both interface circuits
and is given by
Vomax = Vdd − Vdrop. (3–46)
Dividing the maximum output voltage equation by the corresponding electrical sensitivity, the
maximum input capacitance that can be measured is given by
Cmax =(2C0 + Cp + Ci) U
V 2ac
[Vdd − Vdrop] . (3–47)
for a voltage amplifier and
Cmax =CintU
V 2ac
[Vdd − Vdrop] . (3–48)
for a charge amplifier. This shows that the upper end of the dynamic range can be increased by
decreasing the peak ac bias voltage, Vac for both interface techniques.
The lower limit of the frequency response is the same as the dc voltage amplifier and charge
amplifier techniques considered previously. It is given by the expression
fl =1
2πRdc (2C0 + Cp + Ci). (3–49)
for a voltage amplifier and
fl =1
2πRdcCint
. (3–50)
for a charge amplifier. The upper limit of the frequency response of this circuit is determined by
the cutoff frequency flpf of the low pass filter and is given by the expression
fh = flpf . (3–51)
78
Tradeoffs. This technique has all the advantages of the voltage and charge amplifier
techniques with the additional benefit that the 1/f and 1/f 2 noise components are attenuated. It
does not suffer from the problem of aliasing of the broadband white noise of the amplifier to the
baseband as is the case in switched capacitor based circuits. The circuit is purely analog in nature
and reduces the demands placed on layouts as routing mixed signal circuits is avoided.
There are two main disadvantages with this technique. A large bias resistor is needed for the
operation of the circuit. Implementing this resistor is a non-trivial problem. For example, in the
ADXL-50, a 3MΩ resistor was used and was fabricated using a special resistor layer. Another
solution is to use back-to-back diodes. The issues in using back to back diodes are leakage
currents and poor transient performance. The second major disadvantage of this technique
is the use of the low pass filter. The low pass filter will cause phase delay which needs to be
compensated when used in closed-loop operation as will be shown in Section 3.5.1. Furthermore,
the multiplier noise, increases the output noise.
Literature Review. In this section, a review of capacitive transducers, especially
capacitive microphones and accelerometers, that utilize synchronous modulation and demodulation-based
interface circuits is presented. A summary of the literature survey is provided in Table 3-7.
Table 3-7. Summary of previous synchronous modulation/demodulation based open loopcapacitive transducer interface circuit.
Author / Type ofTransducer
TransducerBandwidthOpen Loop
NominalCapacitance
CarrierSignal
Sensitivity Comments
Kraft et al.1998 [104](accelerometer)
56 7.2pF 5Vpp
1MHz700mV/g Charge amplifier
interface circuitLi et al. 2000 [103] NR NR NR 75V/g Charge amplifier
interface circuitYakabe et al.2006 [105] (patent)
NR NR NR NR Charge amplifiercircuit using a two
opamps.
In 2000, Li et al. 2000 [103] reported an open loop accelerometer using synchronous
modulation/demodulation as the interface circuit. They reported a sensitivity of 75V/g when
the input was in ±0.1g range. The characteristics of the carrier signal and the bandwidth of the
device was not reported.
79
Kraft et al.[104] reported an analog open loop accelerometer that used 2Vp−p 1MHz carrier
signal. The device had a reported sensitivity of 0.7V/g and a bandwidth of 300Hz. The open
loop bandwidth of the device was 56Hz.
Yakabe et al. [105] obtained a patent for a modified form of a voltage amplifier synchronous
modulation based interface circuit that allows for reduced sensitivity to parasitic capacitance.
This is accomplished by placing the sensor output signal, an extra feedback capacitor, and an
auxiliary opamp in the feedback path of a primary amplifier. No details of the performance
specifications are presented.
3.4 Digital Open Loop Sense Techniques
Digital sense techniques are interface circuits in which the continuous time output of the
sensor is converted to discrete time signals by sampling the sensor output and then processing
the sampled data. These circuits are implemented using switched capacitor circuits [79]. In these
circuits, a resistor is replaced with appropriately connected MOSFET switches and capacitors
and driven by non-overlapping clock waveforms that simulate a resistor. Switched capacitors
thus eliminate the need for large resistors. Switched capacitors using the technique of correlated
double sampling (CDS) [106] can attenuate dc offsets and 1/f noise from the interface circuit.
The fundamental idea in the CDS scheme is to measure the noise dc offset voltage at some
instant of time and subtract it from the measured signal during the next instant. This is performed
in two phases which are time multiplexed. During the sampling phase, the noise and offsets are
measured and stored. Afterwards, during the signal processing phase the offset free amplifier is
available for operation. The operation performed by the system can be expressed in terms of the
output signal y[n], the input signal x[n], and the 1/2 period previous input signal x[n− 12] by the
equation
y[n] = x[n]− x[n− 1/2]. (3–52)
Using the z-transform, the transfer function H(z) of the above system can be expressed as
H(z) = 1− z−12 . (3–53)
80
Substituting z = ejwT and simplifying, we can obtain the magnitude transfer function as
∣∣H(ejw)∣∣ = 2sin
(ωT
4
). (3–54)
It can be seen from this transfer function that the CDS operation puts a zero at dc (i.e ω = 0)
and has a high pass response for increasing frequencies up to the Nyquist frequency. Thus,
theoretically, CDS eliminates dc offsets and high pass filters the input signal.
Sensing Using Switched Capacitor Amplifier. Figure 3-25 shows one implementation
of a switched capacitor amplifier that implements CDS. The switched capacitor amplifier
VoutCLC1C2+ V Cp Ci +-CresetCgain0 V 0 V Vcm
- VFigure 3-25. Switched capacitor implementation of correlated double sampling.
consists of two capacitors Cgain and Creset and four switches arranged as shown in Figure 3-25.
The output common mode voltage, Vcm, is chosen so as to maximize the output range. For a
circuit with 0 − 5V supply rail, Vcm is chosen to be 2.5V. The switches are driven with two non
overlapping clocks φ1 and φ2.
The equivalent circuit during each clock phase is shown in Figure 3-26. During the reset
phase (φ1), the noise voltages are measured and stored on the integrating capacitor. During the
amplify phase (φ2), the circuit performs the actual measurement. To perform the measurement,
step voltages of equal magnitude ∆V but opposite in sign are applied to the top and bottom
plates respectively. The input output relation during the amplify phase is given by [79],
Vout =
[∆V
Cgain
]2∆C. (3–55)
81
-+CresetCgain Vcm-+0 CLVout(a) Reset Phase φ1.
-CgainCreset-CgainCreset0 +0
CL Vout(b) Amplify Phase φ2.
Figure 3-26. Equivalent circuit of switched capacitor amplifier during amplify and reset phase.
Performance Metrics. From the input output relationship given by the above equation,
the electrical sensitivity of the circuit is given by the equation,
Se =2∆V
Cgain
. (3–56)
From the above equation, it can be inferred that the sensitivity can be increased by varying the
height of the sampling pulse or decreasing the integrating capacitor.
The noise analysis of the switched capacitor network is done using a simplified model for
the amplifier noise based on the work by Gobet et al [107]. The complete noise model is shown
in Figure 3-27. The detailed derivation of the noise sources is in Appendix B. The noise analysisC1=C0C2=C0 -CgainCreset-CgainCreset+V+
CL Voutv2nCp 4kTRonRonFigure 3-27. Noise model of switched capacitor amplifier during amplify phase.
82
of this technique is based on the work by Wongkomet [108]. The switched capacitor interface
circuit is an oversampled system. The main sources of noise are the kT/C noise associated with
the switches and the wide band white noise of the amplifier that is aliased to the baseband. The
total capacitance CT at the input of the amplifier that is sampled by the switches is
CT = 2C0 + Cp + Cgain. (3–57)
The total kT/C noise at the output can be expressed in terms of the sampling frequency, fs, the
total capacitance, CT , and the gain capacitance Cgain, and is given by
SkT/C =1
fs
[CT
Cgain
]2kT
CT
. (3–58)
The total sampled wide band noise at the output v2opamp noise at the output can be expressed
in terms of the sampling frequency, fs, the total capacitance, CT , the gain capacitance Cgain, and
the unity gain bandwidth fu of the amplifier by
Svopamp =
[CT
Cgain
]2
Svnfu
fs
π
2. (3–59)
Adding Equation 3–58 and Equation 3–59 we obtain the total output noise as
Svo =1
fs
[CT
Cgain
]2kT
CT
+
[CT
Cgain
]2
Svnfu
fs
π
2. (3–60)
Equation 3–60 can be divided by the sensitivity to determine the minimum detectable
capacitance per√
Hz and is given by the expression
Cmin =
√1
fs
[CT
2∆V
]2kT
CT
+
[CT
2∆V
]2
Svnfu
fs
π
2. (3–61)
The upper end of the circuit dynamic range is limited by the maximum output voltage of the
amplifier and is dependent on the topology of the amplifier used. It is given by the expression
Vomax = Vdd − Vdrop. (3–62)
Dividing the above equation by the electrical sensitivity the maximum input capacitance that can
be measured is given by
Cmax =Cint
∆V[Vdd − Vdrop] . (3–63)
83
This shows that the upper end of the circuit dynamic range can be increased by decreasing the
height of the sense pulse and increasing the integrating capacitor.
The bandwidth of this circuit is determined by the closed-loop bandwidth of the amplifier.
Based on the discussion in Appendix B, for a switched capacitor amplifier, the closed-loop
bandwidth fu can be expressed in terms of the duty cycle of the sense phase m(< 1), number of
settling time constants nτ , and the sampling frequency fs, [41]
fu =1
2π
[m
nτfs
]−1
. (3–64)
The amplifier core is made of a folded cascode amplifier whose open-loop bandwidth famp is
given in terms of the total output capacitance CLT ,
CLT = CL + Cgain||(Cp + 2C0), (3–65)
by the expression
famp =1
2π
gm
CLT
. (3–66)
The closed-loop bandwidth fu is related to the open-loop bandwidth famp by the feedback factor
β,
β =CT
Cgain + CT
, (3–67)
by the expression
fu = βfamp. (3–68)
Tradeoffs. The main advantage of this technique is that it eliminates the need for the
bias resistor, making this technique easily amenable for standard IC processes. It has the
advantage of the synchronous modulation/demodulationtechnique in that it reduces the 1/f
noise components. Furthermore, it removes the dc offset which is not done by the synchronous
modulation/demodulation technique.
The main disadvantages are as follows. Being a sampled data system, the wideband noise
of the amplifier is aliased into the baseband thus increasing the noise floor in the bandwidth of
interest. This problem is not present in the synchronous modulation/demodulation technique.
To mitigate this effect, the minimum allowable closed-loop bandwidth must be chosen for the
amplifier. Based on the discussion in Appendix B, the minimum closed-loop bandwidth is given
84
by
fu =1
2π
[m
nτfs
]−1
. (3–69)
Literature Review. In 2001, Yamada et al. [66] reported a switched capacitor interface
circuit for capacitive pressure sensors with a sense capacitor of 1nF .. The interface circuit was
implemented using discrete components. The clock frequency used was 10kHz with a reset
capacitor of 3.9nF and a reset capacitor of 101.2pF .
In 2004, Potter et al. of Knowles Acoustics received a patent [109] for a switched capacitor
based interface circuit for a capacitive microphone. It is designed so as to reduce the input offset
voltage and 1/f noise. Performance specifications were not specified in the patent.
In 2006, Jawed et al [110] presented the simulation results of a switched capacitor based
interface circuit for a single backplate capacitive microphone. The nominal capacitance of the
microphone was 4.5pF and the pull in voltage was equal to 3.5V . The parasitic capacitance was
on the order of a few pF . The microphone had a bandwidth extending from 50Hz to 20kHz.
The circuit is a simpler version than the structure shown in Figure 3-25. It has only one feedback
capacitor and uses a fixed on-chip poly-poly dummy capacitor to form a pseudo-differential
structure.
3.5 Closed-Loop Sense Techniques
The fundamental concept behind the closed-loop schemes in capacitive sensors is to use an
external force to balance the force due to the input phenomenon. In capacitive microphones, a
voltage source generates an electrostatic force which counters the pressure induced deflection and
restores the diaphragm to its equilibrium position. The voltage used to generate the electrostatic
force is thus a measure of the input acoustic signal. This section is based on the work developed
by Hunt [111].
In closed-loop schemes, there are two phases of operation, namely sense and feedback.
During the sense phase, the capacitance change is measured and during the feedback phase, an
electrostatic force is applied using a voltage to either the backplate or the diaphragm to null the
deflection. These two phases are separated in time in the case of digital closed-loop schemes
and in frequency in the case of analog closed-loop schemes. This separation is essential and is
done to prevent the excitation signal used to the measure the capacitance change from interfering
85
with the feedback signal [69]. To implement the force feedback scheme, there are two common
approaches. In one approach, a separate set of plates for sense and force feedback [68, 67, 11] are
used while for another approach, the same plates can be multiplexed for the sense and feedback
phase [2, 112].
The main advantages of the closed-loop approach is increased linearity and dynamic range
[11, 42, 113]. Bandwidth improvement beyond the resonant frequency is also predicted for the
analog closed-loop interface circuit approach. Since the feedback electrostatic force keeps the
plate at the center position, the diaphragm becomes much stiffer than the simple open-loop case
which results in increased bandwidth. Force feedback also allows one to use higher voltages by
reducing instability due to pull-in voltage and thereby increasing the sensitivity.
The advantages provided by the closed-loop schemes come with their own limitations
and constraints. Since the sensor is a feedback loop, the stability of the loop must be carefully
considered during the design of the electronics. Large voltages, which might not be easily
available in current CMOS technologies, may be required to balance large input sound pressure
levels. For example, to force balance a 160dB acoustic signal, approximately 45V is required
which is not a commonly available voltage in standard IC processes.
The detailed operating principle of the various closed-loop techniques and their performance
metrics are discussed next.
3.5.1 Sensing Using Closed-Loop Analog Interface Circuit
In the closed-loop analog force feedback technique, the sense and feedback signal are
separated in frequency. In this technique, the sense phase is similar to the open-loop synchronous
modulation and demodulation technique discussed earlier. Thus, for the sense phase the top
and bottom plate are biased with a high frequency ac modulation signal Vacsin(wct) of equal
magnitude but of opposite polarity. For the feedback phase, a low pass filtered version of the
demodulated output signal denoted by vf is used. The voltage required to produce a net feedback
force is generated by summing vf to a dc bias voltage Vdc of equal magnitude but of opposite
polarity applied to the top and bottom electrode respectively.
The design of the dc bias voltage is discussed later in this section. Thus, three different
voltages are summed and applied to the top and bottom plates. The top and bottom plate voltages
86
vtp and vbp is thus given by
vtp = +Vacsin(wct)− Vdc + vf (3–70)
vbp = −Vacsin(wct) + Vdc + vf .
Figure 3-28 shows a schematic of the analog closed-loop technique.
MultiplierVc (t) Vout(Demod) Lowpass Filtervmod-Vdc+vac (t)+vfVdc-vac (t)+vf Cp CiC1C2 Feedback signal at base bandCompensatorvf -+ vdemodRDC
Figure 3-28. Schematic of analog closed-loop force feedback scheme.
The net force acting on the movable plate ∆F can be expressed as the difference between
the force, Ftp, acting between the top plate and the middle plate and the force, Fbp, acting
between the bottom plate and the middle plate and is given by the expression
∆F = Ftp − Fbp. (3–71)
Assuming that the middle plate is kept at ground potential because of negative feedback of the
amplifier and using Equation 2–61, Ftp and Ftp are given by the expressions
Ftp =1
2εA
v2tp
[x0 − x′]2, and (3–72)
Fbp =1
2εA
v2bp
[x0 − x′]2.
Substituting Equation 3–70 and Equation 3–72 in Equation 3–71, neglecting high frequency
terms as they will be filtered by the low pass filter, and assuming x′ << x0, we obtain
∆F = 2εAx0x
′((
2πVac
)2+
(Vdc + Vac
2
)2+ v2
f
)− (
Vdc + Vac
2
)x2
0vf
x40
. (3–73)
87
During steady state operation, the displacement of the middle plate is highly attenuated i.e.
x′ ≈ 0. (3–74)
Substituting Equation 3–74 in Equation 3–73, for small displacements we obtain
∆F = 2εAVdc + Vac
2
x20
vf . (3–75)
Equation 3–75 shows that for small displacements (i.e. x′ << x0), the net electrostatic force on
the middle plate is a linear function of the feedback voltage.
The design of the bias voltage is based on the force corresponding to the maximum pressure
Pmax that the sensor has to balance. By equating the work done by the electrostatic force
between the plates of a capacitor to the mechanical work done for an applied pressure Pmax, we
obtain the voltage required Vdc
Vdc =
√2Pmaxx2
0
ε0
. (3–76)
Performance Metrics. The sensitivity of this technique is the same as that of the
synchronous modulation/demodulation technique using a voltage amplifier. It is given by
Se =Hc
C0
(2Vc
π
2Vac
π
). (3–77)
The noise floor is given by
SVout = Sva + Sia |(Zi ‖ Rdc)|2 +
∣∣∣∣Zi
Zi + Rdc
∣∣∣∣2
SvR. (3–78)
The low frequency cut off is the same as that of a voltage buffer based interface circuit and is
given by
fl =1
2πRdc (2C0 + Cp + Ci). (3–79)
The upper end of the bandwidth is determined by the closed loop response of the system. As the
closed loop system is non-linear, a closed form expression is not available. An estimate of the
system bandwidth can be determined graphically by plotting the magnitude frequency response
of the linearized closed loop system.
Literature Review. Table 3.5.1 provides a review of microphones and accelerometers
that use a synchronous modulation and demodulation based interface circuit. It can be seen that
88
this technique is commonly used for low bandwidth applications i.e. mainly accelerometers.
The reason for this is that simultaneously meeting carrier frequency requirements and feedback
voltage requirements is a challenging problem with current semiconductor technology. One way
in which the high frequency required for sensing can be overcome is to sense the diaphragm
position using optical techniques [114] and use electrostatics only for the feedback phase.
Commercially the synchronous modulaiton/demodulation technique has been used in the Analog
Devices (ADXL-50) accelerometer.
Table 3-8. Summary of previous synchronous modulation/demodulation based closed-loopcapacitive transducer interface circuit.
Author / Type ofTransducer
TransducerBandwidth
Open Loop /closed-loop
NominalCapacitance
CarrierSignal α
Sense /Feedbackcapacitors
Comments
van der Donk et al1992 [115] (singlebackplatemicrophone) (Design1)
30Hz /400Hz
NR NR1MHz
Commonplates
van der Donk et al1992 [115] (singlebackplatemicrophone) (Design2)
400Hz /7kHz
NR NR1MHz
Commonplates
Hadjiloucas et al.,1995 [116] (singlebackplatemicrophone)
NR / 50kHz(Theoretical)
NR NR NR Commonplates
Optical sensingusing Fabry-Perot
interferometer.
Hall et al.,2005 [114](singlebackplatemicrophone)
Diaphragmresonance at44.8kHz
(Theoretical)
NR NR NR Commonplates
Optical sensingusing Michaelson
interferometer.
Analog Devices1993 [2](accelerometer)
14kHz /1kHz
NR 5Vpp
2.5MHzCommon
platesCommercially
available
Kampen et al 1994 [7](accelerometer)
NR / NR NR 2Vpp
1MHzCommon
platesPark et al. 1998 [112](accelerometer)
NR / 350Hz 0.4pF 1Vpp
50kHzCommon
platesSensitivity is
39mV/g
Kraft et al.1998 [104](accelerometer)
56 / 300Hz 7.2pF 5Vpp
1MHzCommon
platesSensitivity is700mV/g
Luo et al.2002 [117](accelerometer)
8.9kHz /400Hz
0.064pF 1V pp2MHz
Separateplates
Sensitivity is2.2mV/g Noise
Floor is 1mg/√
Hzα Peak to Peak Voltage,Frequency
In 1992, van der Donk et al. [115] reported analog closed loop control for a single backplate
microphone. The microphone consisted of interdigitated electrodes with acoustic holes on the
89
backplate. Two different microphone designs were tested. One of the microphones consisted of
a two fingers with 16 acoustic holes and an open loop −3dB frequency of 30Hz. The second
microphone consisted of 10 fingers with 81 acoustic holes and an open loop −3dB frequency
of 400Hz For both microphones, a bias voltage of 7V were used. A 1MHz carrier signal used.
In closed-loop operation, the bandwidth of the two microphones increased to 400Hz and 7kHz
respectively. The feedback loop was compensated using a simple proportional gain controller.
In 1995, Hadjiloucas et al. [116] reported a force feedback microphone that uses optical
sensing and electrostatic force feedback. The movement of the microphone diaphragm is
detected using a Fabry-Perot interferometer. Since the diaphragm position is detected optically,
no ac signal is required for the operation of this sensor.
In 2005, Hall et al. [114] reported a measurement microphone that uses optical sensing with
electrostatic force feedback. The sensing is done using a Michaelson interferometer. The laser
required for sensing is integrated on the sensor itself using a vertical cavity surface emitting laser.
The backplate of the microphone is perforated and integrates the diffraction gratings. The paper
does not report any closed-loop results.
Next, closed loop accelerometers are discussed. In 1993, Analog Devices ADXL-50 [2]
produced a commercial accelerometer that uses closed-loop control with a 2Vp−p, 1MHz carrier
signal. It uses the same plates for both sense and feedback.
In 1994, Kampen et al. [7] reported a closed-loop accelerometer that uses a 2Vp−p 1MHz
carrier signal. In this design, the same capacitor was used for both sense and feedback. No
performance metrics of the accelerometer is provided.
In 1998, Kraft et al. [104] reported a analog closed-loop accelerometer that uses a 2Vp−p
1MHz carrier signal. The device has a reported sensitivity of 0.7V/g and a bandwidth of
300Hz. The open loop bandwidth of the device is 56Hz.
In 1998, Park et al. [112] reported a closed loop accelerometer that uses a 1Vp−p 50kHz
carrier signal. The sensitivity of the accelerometer is 39mV/g and the closed-loop bandwidth is
350Hz. This sensor uses the same plates for sensing and feedback.
In 2002, Luo et al. [117] reported a lateral accelerometer with a linear range of ±13g and
a noise floor of 1mg/√
Hz. The carrier signal used was a 1Vp−p 2MHz signal. The sense and
demodulation circuitry is on the same die as the sensor. In this sensor, separate capacitors are
90
used for sense and force feedback. The sensor resonant frequency is 8.9kHz. A compensator
consisting of a single pole low pass filter at 400Hz is introduced in the forward path after the
demodulator which limits the bandwidth.
In 1990 Joyce et al. [118] reported a capacitive force for atomic force microscopy that
uses analog closed-loop force feedback. The nominal capacitance of the sensor is 0.4pF and
the resonant frequency is 30kHz. The sensor was excited with a 2.5MHz carrier signal. They
report a minimum detectable force of 10−8N which corresponds to a displacement of 0.5nm for
a bandwidth of 1kHz.
3.5.2 Sensing Using Digital closed-loop Interface Technique
In the digital technique for closed-loop force feedback, the sense and feedback signals are
time-multiplexed. The ∆Σ modulation based force feedback technique is used. In this section,
the general operating principle of a first order ∆Σ modulator is first explained. This principle is
then extended to a case study of a ∆Σ modulator interface technique for the microphone.
∆Σ modulation is a technique used in high precision analog-to-digital converters (ADC).
∆Σ modulators are inherently oversampled systems and trade precision in time for precision
in amplitude. This allows one to use coarse analog circuitry with precise digital circuitry for
analog to digital conversion. The principle of operation of the ∆Σ modulation is illustrated in
the block diagram of a first order ∆Σ modulator shown in Figure 3-29. It consists of a discrete
time integrator whose output is quantized using a one-bit quantizer. The input to the integrator
is the error between the analog input signal and the quantizer output. The system is operated at
a sampling frequency, fs, that is much higher than the Nyquist frequency fN of the input signal.
Over many periods, the average error signal e is driven to zero by the feedback loop assuming
that the loop is properly compensated. The input information can be recovered from the output
bitstream by low pass principle is used as an interface technique, the discrete time integrator is
replaced by the microphone which is modelled as a second order system. Figure 3-30 shows
a schematic of the mechanical ∆Σ modulator. The forward path is represented via three
physical blocks namely, the microphone, a charge amplifier, a discrete time compensator and a
comparator. The feedback path is represented via two functional blocks (digital to analog (D/A)
converter and voltage to force (V/F) block) which represent the electrostatic feedback force
91
+ - Decimationand Lowpass filterIntegrator QuantizerFirst Order DeltaSigma Loop 1 >1AnalogInput 11-z-1e
Figure 3-29. Schematic of first order ∆Σ modulator.
applied on the plates at an instant of time. The summing node computes the difference between
the force corresponding to the input acoustic pressure signal and the electrostatic feedback force.
A feedback force is applied over time that nulls this error signal.Sensor+-InputPressure Area 2-z-1CompensatorComparator DigitalBitstreamx/C D/AAmpMechanicalDomain ElectricalDomainV/FFigure 3-30. Schematic of second order mechanical ∆Σ modulator.
Operating Principle. The operation of the system is divided into the sense phase during
which time the capacitance is measured and the feedback phase when an electrostatic force
is applied to the backplates to null the diaphragm deflection. During the sense phase, the
displacement of the diaphragm is first converted into a capacitance change by appropriately
biasing the top and bottom plates. This capacitance change is measured using the switched
capacitor technique discussed earlier in the open-loop techniques. The output of the charge
amplifier is given as the input to a two tap finite impulse response (FIR) filter. The compensator
is used to stabilize the second order loop. The output of the filter is quantized via a comparator
which produces a high speed single bit output signal at the over sampling frequency. The one bit
output is used during the feedback phase. This signal drives the logic that generates the feedback
92
signal which is then applied to the top and bottom plate. This one bit signal is decimated and low
pass filtered to obtain a multibit word that represents the input acoustic signal.
Performance Metrics. The noise floor of the ∆Σ modulation based interface is
determined by the quantization noise. Assuming that the noise floor Pe is dominated by the
quantization noise, it can be expressed in terms of the oversampling ratio M by [79]
Pe ' ∆2π4
60M−5 (3–80)
The ∆Σ modulator is a non-linear closed-loop system. Linear systems theory cannot be
applied for the analysis of these systems. Some of the existing work in the literature [119, 6]
do not discuss the bandwidth variation with closed-loop ∆Σ techniques. Kraft [69] discusses
an analytic method using the describing function technique [120] to qualitatively predict the
bandwidth improvement. The conclusion based on his work is that the feedback voltage increases
the sensor bandwidth as long as the input signal frequency is below the limit cycle frequency
predicted by the describing function analysis.
Tradeoffs. The main advantage of this technique is that the time averaged feedback force
is derived from the number of fixed height, fixed width pulses applied to the top and bottom
plates and not the amplitude of the feedback voltage. This provides a linear feedback voltage to
force relationship which was not possible with the analog closed-loop technique.
The main disadvantage of this technique is the complexity of the circuit. The other
disadvantages of this technique as we scale device geometries down are discussed in the next
section on scaling.
3.6 Scaling Analysis of ∆Σ Interface Techniques
In this section, the circuit requirements for the ∆Σ modulator as we scale device geometry
is analyzed. In general, for a given material, as the size of the mechanical element is reduced,
the resonant frequency increases. Therefore, to obtain the same performance using the ∆Σ
based interface technique, the oversampling frequency must be increased. With the increased
oversampling frequency, high bandwidth amplifiers are required to meet the settling time
constraints. High bandwidth amplifiers imply larger device geometry which in turn leads to large
parasitics that increase the noise floor.
93
To get an understanding of the frequency consideration, Table 3-9 shows a comparison of
the sampling frequencies required for sensors with increasing resonant frequencies. The target
dynamic range is 120dB. To achieve the target dynamic range, a second order modulator needs
an oversampling ratio of approximately 725. This is rounded up to 1000X to provide a margin
of safety. To determine the closed-loop bandwidth fu, we use Equation 3–69 with nτ = 7 (i.e.
0.1% settling), and m = 0.25 (i.e. 25% of time spent in sense phase). The next issue to consider
Table 3-9. Frequency requirements of ∆Σ interface circuits with increasing resonant frequency.Property Accelerometer Audio microphone Aeroacoustic
microphonefres 1kHz[8] 20kHz 200kHzfs 1MHz[8] 20MHz 200MHzfu 4.5MHz 90MHz 900Mhz
for high dynamic range capacitive sensors using feedback techniques is the voltage required
to balance the input at maximum input signal level. Table 3-10 shows the voltage required to
balance the maximum pressure for audio grade and aeroacoustic microphones. From Table 3-9
Table 3-10. Feedback voltage requirements of ∆Σ interface circuits with increasing dynamicrange.
Property Audio microphone Aeroacoustic microphoneMaximum input 120dB 160dB
Feedback voltage 6V 45V
and Table 3-10, it can be seen that designing a ∆Σ modulation based controller for aero acoustic
application is a non-trivial problem. This is because current semiconductor manufacturing
process technologies do not have 45V processes which support amplifiers with a 900Mhz gain
bandwidth product. One method to overcome this problem is to use separate voltages for sensing
and feedback using off chip drivers.
Literature Review. Table 3.6 provides a review of capacitive transducers using ∆Σ
based closed-loop techniques. This technique has been reported extensively for capacitive
accelerometers. The use of this technique for closed loop force feedback in high bandwidth
operations is very challenging due to the large simultaneous gain bandwidth and voltage
requirements for these applications.
The first digital closed-loop accelerometer was reported by Henrion et al.[42] in 1990. The
system operates at a clock frequency of 512kHz. The reported system sensitivity is 1V/g. The
94
Table 3-11. Summary of previous ∆Σ based closed-loop capacitive transducer interface circuit.Author / Type ofTransducer
TransducerBandwidth
Open-Loop /Closed-loop
NominalCapacitance
ClockFrequency
Sense /Feedbackcapacitors
Comments
Henrion et al.,1990 [42](accelerometer)
266 Hz /350 Hz
NR 512kHz Commonplates
Sensitivity is 1V/g
Yun et al., 1992 [6](accelerometer)
Theoreticalresonant
frequency ofsensor15kHz
NR 1MHz Separateplates
Only open loopmode of operationwas tested thought
the chip has theelectronics forclosed-loop.
Wu et al., 1992 [121](microphone)theoretical paper
25kHz NR 5MHz Commonplates
Kraft et al.,1998 [104](accelerometer)
NR 7.2pF 500kHz Commonplates
Lemkin et al.,1998 [122](accelerometer)
Theoreticalresonant
frequency ofsensor
3.4kHz
101fF 500kHz Commonplates
Sensitivity is 1V/g,Noise floor is
110µg/√
Hz (Onlyx-axis data is
presented)Moon et al.,2000 [123, 10](accelerometer)
Theoreticalresonant
frequency ofsensor15kHz
0.1pF 1MHz Separateplates
Edelson 2001 [124](microphone)
NR / NR NR NR NR NR
resonant frequency of the sensor was 266Hz and the measured resonant frequency with the
electronics use 350Hz.
In 1992, Yun el al. [6] reported the design of a digital closed-loop accelerometer. In this
design separate capacitors was used for sense and feedback. The fabricated device was tested
only in the self test open loop mode using electrical excitation.
In 1994, Wu et al. [121] presented a theoretical paper on the design of a ∆Σ based
closed-loop controller. The proposed interface circuit uses interferometric optical sensing to
determine the diaphragm position of a dual backplate microphone and electrostatic feedback. The
circuit is designed to have a overall system bandwidth of 25kHz. The oversampling frequency
used is 5MHz.
95
In 1998, Kraft et al. [104] reported a digital closed-loop accelerometer that uses a10kHz
clock signal. The open loop bandwidth of the device is 56Hz and the closed-loop bandwidth is
300Hz.
In 1998, Lemkin et al. [122] presented a three axis MEMS accelerometer. It uses a switch
capacitor amplifier for detecting the capacitance change. The circuit was characterized at a clock
frequency of 500kHz. The x-axis accelerometer has a sensitivity of 1V/g with a noise floor of
110µg/√
Hz.
In 2001, Edelson et al [124] of Borealis Technical Limited obtained a patent for a
∆Σ modulation based force balanced microphone. The microphone described is of the
electrodynamic type but the patent covers electrostatic devices also. In this patent, the same
plates are used for both sensing and for feedback.
3.7 Summary
In this chapter, the commonly used open and closed-loop interface techniques were
reviewed. Theoretical formulation for the performance metrics of the various techniques were
developed. Tradeoffs for each of the techniques was explained. Requirements of ∆Σ modulation
based interface circuits as device geometry is scaled was then addressed. Chapter 4 and Chapter
5 present a detailed design procedure for the design of the analog and digital closed-loop
controller, respectively.
96
CHAPTER 4DESIGN OF ANALOG INTERFACE CIRCUIT
4.1 Introduction
In this chapter, the design and simulation of an analog closed-loop interface circuit is
presented. This chapter begins with the development of a model for the closed-loop system. This
model is based on the lumped element model of the microphone developed in Chapter 2 and
the model of the synchronous modulator/demodulator developed in Chapter 3. Open and closed
loop time domain simulation of the model for sinusoidal and step input is presented next. This is
followed by the details of the circuit implementation . This includes the design of the interface
circuit components namely the amplifier, demodulator and compensator. This chapter concludes
with a discussion of the limitations of the circuit. A graphical overview of this chapter is shown
in Figure 4-1.
Implementation ofinterface circuitIntroduction
Limitations of theinterface circuitSummaryDesign of interfacecircuitAmplifier designDemodulatordesignCompensatordesign
Simulation Open loopsimulationClosed loopsimulationMatlab model
Figure 4-1. Overview of Chapter 4.
4.2 Simulation
The simulation of the complete system involves the development of a model that accurately
captures the non-linearities of the demodulator and voltage to force transfer function in Simulink.
This model is then simulated for both open-loop and closed-loop mode of operation. A block
diagram of a closed-loop microphone is shown in Figure 4-2. The input to the system is a
97
Sensor(Force todisplacement) InterfacecircuitPressure CompensatorArea Displacementto voltageVoltage toForceElectrostaticforceNetforce+-Inputforce
Figure 4-2. Block diagram of analog closed-loop system showing microphone and interfacecircuit.
time varying pressure signal generated by the acoustic source. The input pressure acting on the
constant area of the microphone diaphragm produces an input force. The net force acting on
the diaphragm is the difference between the input force and the electrostatic feedback force.
The diaphragm displacement is electrostatically transduced as a change in capacitance by
appropriately biasing the microphone plates [37]. Synchronous modulation/demodulation [125]
is used as the interface circuit to detect the capacitance change. The output of the circuit after
compensation provides the feedback voltage. This voltage causes an electrostatic force which
opposes the input force and acts to reduce the diaphragm displacement.
4.2.1 Simulink Model
The second order model of the microphone in the acoustic domain developed in Chapter 2
is used for the microphone model. A linear model for the interface circuit and voltage-to-force
block is developed using the small displacement approximation. Using the lumped element
microphone model, interface circuit model, and voltage-to-force transfer function model, the
compensator is designed.
The microphone is modeled as a second order system given by the equation
Hsensor =1/m
s2 + 2ζ (2πfres) s + (2πfres)2 , (4–1)
developed in Chapter 2.
The interface circuit measures the change in capacitances C1 and C2 induced by the input
pressure acting on the diaphragm. The top and bottom plates of the microphone are excited
by a dc voltage (Vdc) superimposed on a square wave ac carrier (vac) of opposite polarity. The
excitation frequency (ωc) is chosen to be much higher than the resonant frequency of the sensor
98
to prevent the ac signal from exciting the microphone diaphragm. The top and bottom plate
voltage, vtp and vbp, with no feedback is given by
vtp = +Vdc − vac(t) ; vbp = −Vdc + vac(t). (4–2)
Cp represents the parasitic capacitances due to the interconnection between the microphone and
interface circuit, and Ci is the amplifier input capacitance. Rdc is a bias resistor that sets the dc
operating point at 0V . A unity gain amplifier is connected to the middle plate of the microphone.
The output of the unity gain amplifier vmod is given by
vmod =C10 + C20
C10 + C20 + Cp + Ci
x′
x0
vtp, (4–3)
where x0 is the nominal gap distance between the plates of the microphone, x′ is the displacement
of the diaphragm from its equilibrium position, and C10 and C20 are the equilibrium microphone
capacitances. In Equation 4–3, the ratio C10+C20
C10+C20+Cp+Ciis defined as the attenuation factor and is
denoted by Hc. The output of the amplifier is connected to a demodulator which multiplies the
modulated middle plate voltage with a carrier signal (vc(t)) which is in phase with the top plate
voltage. The output of the demodulator, vdemod, is given by the expression
vdemod = vmod × vc(t), (4–4)
and has signals at the base band, carrier frequency, and multiples of the carrier frequency. The
output of the demodulator is low pass filtered and is given by
Vout =x′
x0
Hc
[2
π
Vc
2
2
π
Vac
2
]. (4–5)
Using Equation 4–5, the transfer function of the interface circuit, Hint is given by
Hint =x′
Vout
=Hc
x0
[2
π
Vc
2
2
π
Vac
2
]. (4–6)
The voltage-to-force block models the transduction of the feedback voltage vf to an
electrostatic force acting on the diaphragm. The forces between the top plate and the diaphragm,
Ftp, and between the bottom plate and the diaphragm, Fbp, are given by
Ftp =1
2εA
v2tp
[x0 − x′]2; Fbp =
1
2εA
v2bp
[x0 − x′]2, (4–7)
99
where the top and bottom plate voltages vtp and vbp are expressed in terms of the feedback
voltage vf by the expression
vtp = +Vdc − vac(t) + vf ; vbp = −Vdc + vac(t) + vf . (4–8)
The feedback voltage vf is generated by the compensator. The design of the compensator is
discussed in the next section. The net electrostatic feedback force on the diaphragm Fe is given
by the difference of Ftp and Fbp i.e.,
Fe = Ftp − Fbp. (4–9)
For small displacements (x′ ≈ 0), Fe can be linearized to
Fe = 2εAVdc
x20
vf . (4–10)
Equation 4–10 represents the linearized input-output relation between the feedback voltage and
the force on the microphone diaphragm. Using Equation 4–10, the feedback transfer function,
Hfb is given by
Hfb =Fe
vf
= 2εAVdc
x20
. (4–11)
The function of the compensator is to filter the high frequency modulating signal and
provide appropriate gain and phase so that the resultant closed loop system is stable. The
compensator consists of two stages. The first stage is a high-gain low-pass filter that sets a
dominant pole at low frequency. The second stage consists of a lead-lag section that provides
primarily phase lead to obtain sufficient phase margin. The loop gain of the system without the
compensator, Tnc(s), is given by
Tnc(s) = Hmic ×Hint ×Hfb. (4–12)
From the uncompensated system Bode plot in Figure 4-4, it can be seen that the system has
very low loop gain at dc and a high Q resonant peak due to the complex conjugate poles of
the microphone. To improve the loop gain and provide sufficient phase margin, a two stage
compensator given by the transfer function H(s)
H(s) =
[750
2π · 1 · 103
s + 2π · 1 · 103
] [s + 2π · 230 · 103
s + 2π · 30 · 103
], (4–13)
100
is used. The bode plot of the compensator is shown in Figure 4-3. It can be seen that the
100
102
104
106
108
−100
0
100
200
Mag
nitu
de (
dB)
100
102
104
106
108
−100
0
100
Pha
se (
deg)
Frequency (Hz)
Figure 4-3. Bode plot of compensator.
compensator has a high gain low frequency pole at 1kHz. A high frequency zero at 230kHz is
used to provide phase margin. The loop gain of the system with compensator, T (s), is given by
T (s) =1/m
s2 + 2ζ(2πfres) + (2πfres)2(4–14)
×Hc
x0
(2
π
Vc
2
2
π
Vac
2
)
×2εAVdc
x20
(4–15)
×[750
2π · 1 · 103
s + 2π · 1 · 103
] [s + 2π · 230 · 103
s + 2π · 30 · 103
].
A Bode plot of the compensated loop gain is also shown in Figure 4-4. It can be seen that the
system has a phase margin of 42 and a dc loop gain of 87.
The complete closed loop Simulink model is shown in Figure 4-5. The microphone
and compensator are modeled using a “s-domain” transfer function block which implements
Equation 4–1 and Equation 4–13 respectively. The synchronous modulator/demodulator interface
circuit model and voltage-to-force subsystem model implement Equation 4–4 and Equation 4–9
respectively using multipliers and gain blocks. Thus, a time domain model of the closed loop
system has been developed. Open and closed loop operation for step and sinusoidal inputs were
simulated and is presented next.
101
100
102
104
106
108
−100
−50
0
50
100
Frequency HzM
agni
tude
(dB
)
without compensatorwith compensator
100
102
104
106
108
−300
−200
−100
0
Pha
se (
deg)
Frequency (Hz)
without compensatorwith compensator
Figure 4-4. Bode plot of loop gain with and without compensator.
Input
FeedbackForce
Demodulated Output
Net
Force
Displace−ment Middle Plate
Voltage
displacement
Top_plate_voltage
feedback_voltage
Force
Voltage to Force
Hc/d0
Voltage Buffer Sensitivity
vtp
Top Plate Voltage
PulseGenerator
ProductPressure
1/m
s +2*zeta*wns+wn*wn2
Microphonenumlpf
denlpf
Low Pass FilterA
1Effective Area
X
YZ
Demodulator(AD734)
numcomp
dencomp
Compensator
Kamp
Amplifier
Force
Figure 4-5. Simulink model of analog closed-loop control system.
4.2.2 Simulation Results
In this section, the open and closed loop simulation results of the capacitive microphone are
presented. To demonstrate closed loop operation, a 2Pa (100dB re. 20µPa), 2kHz sinusoidal
pressure input is used as the test signal. From linear control theory [126], during closed loop
operation, the diaphragm displacement at a given frequency will be attenuated by the loop gain
evaluated at that frequency. From the time domain simulation (Figure 4-7), it can be seen that the
output displacement for a 2kHz input is reduced by a factor of 40 which matches the attenuation
in diaphragm displacement predicted by the loop gain (Figure 4-4). To further examine closed
loop operation, a 1m drop test was simulated. The pressure corresponding to a 1m drop acting
on the diaphragm is simulated by a 1ms, 0.029Pa(63dB) pulse. The diaphragm displacement is
102
1
vtp
vdc
vdc
vac
(a) Simulink model oftop plate voltagesubsystem.
1Z
1/Kmul
mutliplier attenuation
multiplier2Y
1X
(b) Simulink model of demodulator.
Bottom Plate Voltage
1
Force
u(1)*u(1)
vol_squared2
u(1)*u(1)
vol_squared1
0.5*e0*A/((d0+u(1))^2)
function2
0.5*e0*A/((d0−u(1))^2)
function1
Product2
Product1
−1
Gain
3
feedback_voltage
2
top_plate_voltage
1
displacement
(c) Simulink model of voltage-to-force subsystem
Figure 4-6. Subsystems used in Simulink model.
attenuated from 6.2pm to 7.1 × 10−2pm during the pulse (Figure 4-8). This matches the dc loop
gain of 87(38dB) obtained from the loop gain Bode plot (Figure 4-4).
4.3 Design of Analog Interface Circuit
The design of the analog closed-loop controller circuit involves the design of the summing
amplifier for top and bottom plate voltage generation, input buffer amplifier, demodulator, low
pass filter, and compensator. The design of each of these circuits is discussed next.
4.3.1 Design of Amplifier for Top and Bottom Plate Voltage Generation
The top and bottom plate voltages are generated using a matched pair of summing amplifier.
The two main requirements of this amplifier are as follows. First, the unity gain bandwidth of
the amplifier must be higher than the modulation frequency. For the aeroacoustic microphone
with a measured resonant frequency of 230kHz, the modulation frequency was chosen to be
one decade above the resonant frequency at 2MHz. Second, the amplifier must accept a dc input
greater than the voltage required for force balancing at the maximum input sound pressure level.
The voltage required for the two microphone structures discussed in Chapter 2 is repeated
in Table 4-1. Based on the table, it can be seen that we need an amplifier operating at a voltage
103
0 0.5 1 1.5 2
x 10−3
−2
0
2
Inpu
t P
ress
ure
(Pa)
0 0.5 1 1.5 2
x 10−3
−0.5
0
0.5
Time (s)
Dia
phra
gm
Dis
plac
emen
t (nm
)
Without feedback
0 0.5 1 1.5 2
x 10−3
−0.5
0
0.5
Time (s)
Dia
phra
gm
Dis
plac
emen
t (nm
)
With feedback
Figure 4-7. Diaphragm displacement with and without feedback.
0 0.5 1 1.5 2 2.5 3
x 10−3
0
0.05
Time (s)
Inpu
t Pre
ssur
e (P
a)
0 0.5 1 1.5 2 2.5 3
x 10−3
−0.01
0
0.01
Time (s)
Dia
phra
gm
Dis
plac
emen
t (nm
)
Without Feedback
0 0.5 1 1.5 2 2.5 3
x 10−3
−0.01
0
0.01
Time (s)
Dia
phra
gm
Dis
plac
emen
t (nm
)
With Feedback
Figure 4-8. Diaphragm displacement with and without feedback.
greater than 45V with a unity gain bandwidth of at least 2MHz. Such amplifiers are not
available commercially. The maximum operating voltage of high bandwidth commercially
available amplifiers is ±15V . An OP275 dual operational amplifier which has two matched
amplifiers with a unity gain bandwidth of 11MHz at an operating voltage of ±15V is used. To
prevent power supply noise from entering the system, the top and bottom plate dc voltages are
provided by batteries regulated using a linear regulator. The maximum pressure that can be force
balanced is approximately 134dB.
The schematic of the summing amplifier circuit that generates the top and bottom plate
voltages is shown in Figure 4-9. In this figure Vdc and −Vdc represent the dc voltages used
104
Table 4-1. Feedback voltage requirements of aeroacoustic and audio microphone for forcebalancing maximum input pressure.
Property Audio microphone Aeroacoustic microphoneMaximum input 120dB(20Pa) 160dB(2000Pa)
Feedback voltage 5V 45V
for force balancing, vac(t) and −vac(t) are the voltages required for synchronous modulation
and demodulation, and vf is the feedback signal generated by the circuit. The ac voltages are
generated by two Agilent 33014 signal generators that are exactly phase shifted by 180 degrees.
The amplitude of the ac signal is 5Vpp. +- RRRRVdc-Vacsin(wt)vf Vtp+- RRRR-VdcVacsin(wt)vf Vbp
Figure 4-9. Schematic of summing amplifier that generates top and bottom plate voltages.
4.3.2 Input Buffer Amplifier Design
The input amplifier is a simple unity gain follower and is shown in Figure 4-10. The
unity gain amplifier was implemented using a low noise, high bandwidth amplifier, TLE2074
[127] configured for unity gain. A quad opamp was chosen so that the four aeroacoustic
microphones on each sensor die could be interfaced using a single chip. This amplifier
operates on a ±15V power supply, has an input capacitance of 10.6pF , an input referred
noise voltage of 11nV/(Hz)12 , and an input referred noise current of 1.6 fA/(Hz)
12 . The
middle plate of the microphone is biased using two surface mount 22MΩ resistors in a
105
1210 (3.2mm× 2.5mm× 0.6mm) package wired in series, i.e,
Rdc = 44MΩ. (4–16)
The total parasitic capacitance at the input node is given by the sum of the PCB trace capacitance
and the input capacitance of the amplifier. The total parasitic capacitance is approximately 20pF .
4.3.3 Demodulator Design
The output of the interface circuit is demodulated by the the Analog Devices AD835 four
quadrant analog multiplier IC [102]. This IC is powered with a ±5 power supply and has a
200MHz full power bandwidth. If the two input signals to the multiplier are X and YRDC -+ VoutFigure 4-10. Schematic of voltage amplifier.
respectively and the output signal is W , then the transfer function of the multiplier is given
by
W =XY
1. (4–17)
A schematic of the demodulator IC is show in Figure 4-11.AD 734 10111267 X1X2Y2Y1 W2W1InputSignalCarrierSignal DemodulatedOutputFigure 4-11. Schematic of analog multiplier (AD835) showing relevant pins.
4.3.4 Compensator Design
The compensator was implemented using two opamps. The schematic of the compensator
for the first stage and second stage is shown in Figure 4-12. The transfer function of the circuit
106
shown in Figure 4-12(a), Hc1, is
Hc1 =Rf1
R11
[1
1 + Rf1Cf1s
], (4–18)
and the transfer function of the schematic shown in Figure 4-12(b), Hc2, is
Hc2 =Rf2
R12
[1 + sR12C12
1 + sRf2Cf2
]. (4–19)
For the transfer function given in Equation 4–18 and Equation 4–19, the component values used
are listed in Table 4-2. The various circuitry used in the closed loop operation are soldered on
two different PCBs. This is discussed in the next section.
Table 4-2. Element values for resistors and capacitors used in compensator.Element Value Element ValueR11 1kΩ C11 680pFRf1 5.1kΩ Cf1 1000pFR12 1kΩRf2 1590kΩ Cf2 100pFR11 +- Cf1Rf1 VoutVin
(a) Schematic of first stage of compensator.R12 +- Cf2Rf2C12 VoutVin(b) Schematic of second stage of
compensator.
Figure 4-12. Schematic of two stage compensator.
107
4.4 Integration of Interface Circuit Components on a PCB
Buffer amplifiersOptical portBreakout headersBias resistorsFigure 4-13. Annotated photograph of PCB1 showing buffer amplifier, breakout headers and
optical port. Summing amplifierfor top and bottomplate voltage Demodulator CompensatorFigure 4-14. Annotated photograph of PCB2.
The complete system consisting of the microphone and interface circuit is characterized
in an acoustic pressure coupler (APC). The details of the APC are provided in Chapter 6. To
facilitate mounting of the microphone in the APC, the circuitry is divided into two separate
printed circuit boards (PCBs). The microphone and buffer amplifier are soldered onto the
microphone PCB (denoted as PCB1) which is mounted onto the APC while the remainder of
the circuitry consisting of the demodulator, compensator, and top and bottom plate voltage
generation circuitry PCB are mounted on another PCB (denoted as PCB2). The two boards
are electrically connected with each other using a ribbon cable. This cable couples the top and
bottom plate voltages generated by the PCB2 to the microphone plates on PCB1. This cable also
108
connects the buffer amplifier output from PCB1 to the PCB2. Figure 4-13 and Figure 4-14 shows
an annotated picture of the PCB1 and PCB2. The headers for the ribbon cable are shown in the
figures.
4.5 Noise model
In this section, the noise model of the interface circuit is developed using the noise
parameters of the components used in the system. The noise floor of the forward path system
is determined by the the buffer amplifier, gain amplifier, demodulator, and compensator and
is shown in Figure 4-16. The total output referred noise of the forward path is determined byvmod-+ MultiplierVref(Demod)vdemodR1 +-RfCc0 R12 +- Cf2Rf2VoutR11 +-Cf1Rf1C11 Cc1BufferAmplifier GainAmplifier CompensatorStage 1 CompensatorStage 2Figure 4-15. Schematic of forward path of the closed loop system
summing the noise at the output of each stage of the forward path with the appropriate gain. This
noise model is valid in the bandwidth of operation of the closed loop system which extends from
300Hz to 20kHz. In the bandwidth of interest, the noise spectrum is determined y the thermal
noise of the various components and is flat over the spectrum. Hence in this analysis, the shaping
of the noise by the various components is not considered.
Noise at the output of the buffer amplifier. The noise PSD at the output of the buffer
amplifier, S1, is determined by the voltage noise PSD of the buffer amplifier, Sva1, and is given
by
S1 = Sva1. (4–20)
Noise at the output of the gain amplifier. The noise PSD at the output of the gain
amplifier, S2, is determined by the output noise PDS of the previous stage, S1, voltage noise PSD
of the input resistor R1, voltage noise PSD of the feedback resistor, Rf , and voltage noise PSD,
Sva2, and current noise PSD, Sia2, of the amplifier and is given by
S2 = S1
(Rf
R1
)2
+ 4kTR1
(Rf
R1
)2
+ 4kTRf + Sva2
(Rf
R1
)2
+ Sia2 (Rf )2 . (4–21)
109
Table 4-3. Magnitude of parameters used in noise analysisParameter Magnitude UnitsVoltage noise of inputamplifier (Sva1)
18 nV/√
Hz
Voltage noise of gainamplifier (Sva2)
3.8 nV/√
Hz
Current noise of gainamplifier (Sia2)
0.6 pA/√
Hz
Voltage noise of multiplier(Smultiplier)
50 nV/√
Hz
Voltage noise of compensatorfirst stage amplifier (Sva3)
7 nV/√
Hz
Current noise of compensatorfirst stage amplifier (Sia3)
1.5 pA/√
Hz
Voltage noise of compensatorsecond stage amplifier (Sva4)
7 nV/√
Hz
Current noise of compensatorsecond stage amplifier (Sia4)
1.5 pA/√
Hz
Input resistance of gainamplifier (R1)
1 kΩ
Feedback resistance of gainamplifier (Rf )
4 kΩ
Input resistance ofcompensator first stageamplifier (R11)
1 kΩ
Feedback resistance ofcompensator first stageamplifier (Rf1)
5.5 kΩ
Input resistance ofcompensator second stageamplifier (R12)
1 kΩ
Feedback resistance ofcompensator second stageamplifier (Rf2)
1590 kΩ
Sfwdpath 1 mV√
Hz
SOL 5 uV√
Hz
Noise at the output of the multiplier. The noise PSD at the output of the multiplier, S3, is
determined by the output noise PSD of the previous stage, S2, the internal voltage noise PSD of
the multiplier, Smultiplier, and the demodulator voltage Vref ,and is given by
S3 = S2 × (Vref )2 + Smultiplier. (4–22)
110
Noise at the output of the first stage of compensator. The noise PSD at the output of
the compensator first stage, S4, is determined by the output voltage noise PSD from the previous
stage, S3, voltage noise PSD of the input resistor R11, voltage noise PSD of the feedback resistor
Rf1, and voltage noise PSD Sva3 and current noise PSD Sia3 of the amplifier and is given by
S4 = S3
(Rf1
R11
)2
+ Sva3
(Rf1
R11
)2
+ 4kTR11
(Rf1
R11
)2
+ 4kTRf1 + Sva3
(Rf1
R11
)2
+ Sia3 (Rf1)2 .
(4–23)
Noise at the output of the second stage of compensator. The voltage noise PSD at the
output of the compensator second stage, S5, is determined by the voltage noise PSD from the
output of the previous stage, S4, voltage noise PSD of the input resistor R12 amplifier, voltage
noise PSD of the feedback resistor Rf2, and voltage noise PSD Sv43 and current noise PSD Sia4
of the amplifier and is given by
S5 = S4
(Rf2
R12
)2
+ Sva4
(Rf2
R12
)2
+ 4kTR12
(Rf2
R12
)2
+ 4kTRf2 + Sva4
(Rf2
R12
)2
+ Sia4 (Rf2)2 .
(4–24)
Theoretical noise floor. The magnitude of the various components in the above equation
listed in Table 4-3. Substituting the values in the Equation 4–24 we obtain
102
103
104
105
10−3
10−2
10−1
100
101
Frequency
rms
nois
e vo
ltage
(m
V)
Forward path noiseOpen loop noise
Figure 4-16. Plot of theoretical noise floor of the open loop system and forward path system
111
SOL = S3 = 5uV/√
(Hz) (4–25)
and
Sfwdpath = S5 = 1mV/√
(Hz) (4–26)
Thus, the noise at the output of forward path of the demodulator is high due to the components
that are required to generate the large gain in the forward path. It can be seen that the forward
path noise is very high. The reason for the high noise floor is the need for large gain in the
forward path to achieve a large loop gain. One solution to reduce the noise and still maintain the
large gain would be to use amplifiers with lower noise. In this work, all the ICs utilize the same
±15V power supply whereas lower noise ICs usually are single ended and operate at 3.3V and
1.8V . Hence, to use these lower noise components, multiple power supply rails are required.
Also, as the ICs are single ended, appropriate level shifting needs to be performed to obtain
stable operation.
4.6 Limitations of the Current Implementation of the Interface Circuit
In this section, the two main limitations of the interface circuit designed in this chapter
are reiterated. The interface circuit was designed to meet the dynamic range and bandwidth
specifications of an aeroacoustic microphone of 60dB − 160dB and a bandwidth in excess of
160kHz.
The voltage required to force balance the maximum input pressure of 160dB as shown in
Table 4-1 is 45V . This cannot be met due to power supply limitations of ±15 for the commercial
off the shelf operational amplifiers that are used in the design. The bandwidth of the overall
system is determined by the compensator. The compensator design was limited to an overall
bandwidth of only 20kHz because of the gain bandwidth constraints of the amplifiers used.
4.7 Summary
In this chapter the design, simulation and implementation details of the analog interface
circuit was presented. Some of the limitations of the current design was discussed. The
characterization results of the complete system is presented in Chapter 6. Chapter 5 discusses the
design and simulation of the digital closed-loop interface circuit
112
CHAPTER 5DESIGN OF DIGITAL CLOSED LOOP INTERFACE CIRCUIT
5.1 Introduction
In this chapter, the design procedure for a ∆Σ modulation based interface circuitry is
presented. This chapter begins with a top down design methodology for determining system
level ∆Σ interface circuit parameters starting from microphone system specification. This is
followed by the design of the interface circuit components, namely the amplifier, compensator
and comparator. Closed loop time domain simulation of the model using the Simulink tool in
MATLAB is presented next. A graphical overview of this chapter is shown in Figure 5-1.
SummarySimulationComponent designDesign procedureAmplifier designCompensatordesignComparator design Matlab modelClosed loopsimulationIntroduction
Figure 5-1. Overview of Chapter 5.
5.2 Design of ∆Σ Interface Circuit
In this section, the design of the complete ∆Σ interface circuit is discussed. The design
procedure for the key parameters of each of the blocks of the ∆Σ modulator from overall system
level specification is also explained. The transistor level design of each of the components is
presented in Section 5.3. The sequence of operation of the various blocks and the overall system
level timing is explained in Section 5.4. Section 5.5 describes the system level simulation of the
microphone and ∆Σ system using Matlab.
113
The system level block diagram of the ∆Σ modulator is repeated in Figure 5-3. The design
of the interface circuitry involves the design of the components inside the box labeled “electrical
domain”. The ∆Σ modulator based interface technique is a sampled data system. Hence, all the
blocks need a clock signal for their operation. Therefore, the first step in the design procedure
of the interface circuit is to determine the sampling frequency fs. The sampling frequency is a
function of the resonant frequency of the mechanical system and the dynamic range specification
of the overall system. This is illustrated in Figure 5-2. The blocks in ellipsoidal boxes represent
the system level input specification and rectangular boxes represent the assumptions used for the
design and the parameters derived from the design procedure. The dynamic range is determined
SamplingfrequencySettling time(Closed loop BW)
Percentage of timefor sense/feedback+
BandwidthDynamic RangeEffective feedbackvoltage
+Noiseconsideration+Amplifier gmand W/LCompensatordesign
Figure 5-2. Flow chart for design of ∆Σ modulator component parameters from system levelspecification.
by the noise sources in the system. The main sources of noise are the sampled thermal noise of
the amplifier, kT/C noise of the switches, and quantization noise. For an ideal ∆Σ modulator,
the noise floor is dominated by the quantization noise. The sampled thermal noise and kT/C
noise is assumed to be below the quantization noise floor. Assuming that the noise floor is
dominated by the quantization noise, the dynamic range DR, in dB, of a one-bit second order
∆Σ modulator can be expressed in terms of the oversampling ratio M(= fs/2fres) by the
relation [79]
DR = −7 + 50log10(M). (5–1)
114
Using the above relation, the sampling frequency of the system is determined.Sensor+-InputPressure Area 2-z-1CompensatorComparator DigitalBitstreamx/C D/AAmpMechanicalDomain ElectricalDomainV/FFigure 5-3. Schematic of second order mechanical ∆Σ modulator.
Once the sampling frequency is determined, the next step is the partitioning of the time
available during one clock cycle T (= 1/fs) into the sense and feedback phase. To maximize
the dynamic range and bandwidth, the time spent in the sense phase must be minimized and the
time spent in the feedback phase must be maximized. The time spent in feedback is determined
by the maximum pressure that must be force balanced and the maximum voltage Vmax available
in the system. The voltage required to force balance the maximum input pressure Pmax can be
expressed in terms of the nominal capacitance C0, the capacitance area A, and the nominal gap
distance of the capacitor x0 by the expression
Vfb,max '√
2PmaxAx0
C0
. (5–2)
This voltage must be available during the fraction of time τfb spent in feedback. If the maximum
voltage available in the system is Vmax, then
τfb
T=
Vfb,max
Vmax
. (5–3)
Using the above relation, the time spent in feedback can be determined. Then, the time spent in
sense τsense is given by
τsense = T − τfb. (5–4)
Next, we consider the partitioning of the time spent in the sense phase. The time spent during
sense τsense is determined by the settling time requirements of the amplifier τamp, compensator
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τcompen, and comparator τcompar and is related by the expression
τsense = τamp + τcompen + τcompar. (5–5)
The individual blocks must to satisfy two conflicting criteria, namely high speed (settling time
requirements) and low noise. To achieve this, the circuit is first designed for low noise and
then tested for settling time requirements. If the low noise design does not satisfy the speed
requirements, the circuit design is reiterated by changing the gain capacitor to meet the settling
time requirements, and the noise performance is reevaluated. Theoretical formulation for the
noise and settling time for each of the components are described in Section 5.3.
Once the individual components are designed, the sequence of operation of the individual
parts of the sense and feedback phase is designed. This is explained in Section 5.4. For this
work, the timing signals are generated off chip using a Alter EPM7128 [128] complex
programmable logic device (CPLD). This allows one to have better control of the sense and
feedback phase during the initial testing phase. Based on this information the system level
simulations (Subsection 5.4) are performed.
5.3 Component Design
In this section, the transistor level design of the amplifier, compensator, and comparator
is explained. For each component, the procedure to design the component with low noise is
described. A theoretical formulation for the noise and the settling time is also developed.
5.3.1 Switched Capacitor Amplifier
The design of the switched capacitor amplifier involves the design of the amplifier core so as
to reduce the thermal noise. A folded cascode topology with a PMOS input stage was chosen so
as to reduce the noise of the input amplifiers and improve the output voltage swing. The switches
are arranged such that the output common mode is centered around 2.5V while the input is at
ground. Centering the output voltage at the midpoint of the power supply rails allows one to
maximize the output dynamic range of the amplifier. Similarly, setting the input common mode
voltage of the amplifier at ground maximizes the voltage that can be applied across the top and
bottom capacitors during the sense and feedback phase. An input common mode voltage of zero
(ground) is within the common mode voltage range of the PMOS input folded cascode amplifier.
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The schematic of the amplifier core and the switched capacitor amplifier is shown in Figure 5-11.
CresetV+ -+Cgain0 V0 V
(a) Switched capacitor amplifier.
VcpVcnV+V- VoutM1 M2M11M3 M6M5 M8M7
M10M9 M4VbnVbp
(b) Amplifier core.
Figure 5-4. Transistor level schematic of amplifier.
The design of the amplifier closely follows the work by Wongkomet [108]. The following
assumptions are made:
• The amplifier core is a simple single stage amplifier that can be treated as single pole
system which is common in switched capacitor circuits.
• The gain capacitor Cgain is arbitrarily chosen to provide a closed-loop gain of 10 − 20dB.
This value may be changed to optimize the noise performance.
• The total parasitic capacitance at the input node is fixed and can be estimated.
• The amplifier closed-loop bandwidth is designed to be at the minimum value required
based on the settling time constraints. This prevents excess noise from aliasing into the
baseband.
The amplifier schematic during the amplify phase used for the rest of the analysis is shown
in Figure 5-5. The thermal noise of the amplifier can be expressed in terms of the amplifier
transconductance gm and the ratio of the total transistor noise to the input transistor noise nf by
the expression[79]
Svn = 4kT2
3gm
nf . (5–6)
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Creset-+Cgain0 V0 VC0 CLCp,ampCp,extC0 CLTFigure 5-5. Schematic of amplifier during amplify phase.
For a well designed amplifier, only the input transistors contribute noise, and nf is equal to two.
In practice it can be greater. From the discussion in the previous chapter, the total output thermal
noise of the amplifier is
Svopamp =
[CT
Cgain
]2
Svnfu
fs
π
2. (5–7)
In the above equation, CT is given by
CT = 2C0 + Cp + Cgain. (5–8)
The parasitic capacitance, Cp, can be split into the input capacitance of the amplifier, Cp,amp and
other external parasitics Cp,ext. Therefore, CT can be expressed as
CT = 2C0 + Cp,amp + Cp,ext + Cgain. (5–9)
For any transistor, the transconductance gm, can be expressed in terms of the input capacitance
Cp,amp, and the unity gain frequency, fT , as
gm = 2πfT Cp,amp. (5–10)
Substituting, Equation 5–6 and Equation 5–9 in Equation 5–7, we obtain
Svopamp =
[2C0 + Cp,amp + Cp,ext + Cgain
Cgain
]28kT
3
1
2πfT Cp,amp
fu
fs
π
2. (5–11)
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This equation is optimized for noise by varying the input capacitance of the amplifier.
Differentiating the above equation with respect to Cp,amp and equating to zero we obtain
Cp,amp = 2C0 + Cp,ext + Cgain. (5–12)
From the previous equation, it can be inferred that to minimize the noise of the amplifier,
the input capacitance must be equal to the total capacitance at the amplifier summing node.
Substituting Equation 5–12 in Equation 5–10, gm can be designed. From the transconductance,
the W/L of the transistors of the amplifier can be calculated.
Once the transconductance is designed, the load capacitor is designed to meet the bandwidth
requirement. As discussed in the previous chapter, the closed-loop bandwidth of the switched
capacitor amplifier is given by
fu =1
2π
[m
nτfs
]−1
. (5–13)
The closed-loop bandwidth fu is related to the open-loop bandwidth famp by the feedback factor
β,
β =CT
Cgain + CT
, (5–14)
and the open-loop gain,
famp =1
2π
gm
CLT
, (5–15)
by the expression
fu = βfamp. (5–16)
The total load capacitance CLT , is given by the expression
CLT = CL + Creset + Cgain|| [2C0+Cp,amp + Cp,ext] (5–17)
Substituting Equation 5–16 in Equation 5–15, we obtain
fu =1
2π
gm
CLT
(5–18)
=1
2π
gmβ
CL + Creset +Cgain[2C0+Cp,amp+Cp,ext]
Cgain+2C0+Cp,amp+Cp,ext
.
119
Rearranging the above equation, we obtain
CL =Cgain
2C0 + Cgain + Cp,amp + Cp,ext
[gm
2πfu
− (2C0 + Cgain + Cp,amp + Cp,ext)
]− Creset.
(5–19)
Substituting for Cp,amp from Equation 5–12 and fu from Equation 5–13 into the previous
equation, we obtain
CL =Cgain
2
[fT
12π
nτ fs
m
− 1
]− Creset. (5–20)
This can be simplified to
CL ' πmCgainfT
nτfs
− Creset. (5–21)
This is the load capacitance required to satisfy the low noise requirements and settling time
constraints. If the actual load capacitance which is formed by the compensator is larger, then a
larger integrating capacitor can be used and the procedure is reiterated. Thus, the amplifier has
been designed to meet the settling time constraints and minimize noise.
5.3.2 Compensator Design
The function of the compensator is to provide feedback to stabilize the second order
feedback loop. One of the proposed solutions in the literature [119] for compensating a ∆Σ
modulation based capacitive sensor is to use a two tap discrete time finite impulse response
(FIR) filter. The filter transfer function can be expressed in terms of a design parameter α by the
general z-domain transfer function,
K(z) =α− z−1
α + 1. (5–22)
The design parameter α is designed so as to reduce the total system noise and provide stable
compensation. For the initial design, α was chosen to be 2 using [119] and verified via simulation
and not via analytical methods. The settling time of the compensator is determined by the RC
time constant of the compensator capacitance and the on-resistance of the switches.
The actual transistor level implementation of the compensator is shown in Figure 5-6. The
circuit consists of only switches and capacitors, and the transfer function is determined by the
principle of charge sharing. Since this circuit does not have any amplifiers, the settling time is
considerably reduced. It consists of three capacitors C1, C2, and C3 connected to switches that
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are driven by the clock signals generated from the Sampl, Eval, and Chop signals. Capacitor C1
always holds the current information while capacitors C2 and C3 hold the information from the
previous clock cycle alternatively. The Chop signal which runs at a clock frequency equal to half
the system frequency is used to alternate between C2 and C3 for storing the information from the
previous cycle. The compensator has two phases of operation namely, Sample and EvaluationVinSampl*Chop Sampl*ChopEval*ChopSampl EvalC1C2 Vout- -++ -- Eval*ChopC3++ --
++Sampl*ChopSampl*Chop
VcmVcm VcmVcm VcmEval*Chop Eval*Chop
EvalChopSamplFigure 5-6. Transistor level schematic of compensator.
phase. During the Sample phase, the output of the amplifier is sampled on to capacitors C1 and
one of the two capacitors C2 and C3 as determined by the chop signal. The derivation of the
transfer function of the circuit is done by analyzing the two half cycles of this circuit as shown in
Figure 5-7. Figure 5-7(a) shows the case when capacitor C1 and C3 are being charged with the
information from the current cycle while C2 holds the amplifier output from the previous cycle.
The charge on the three capacitors during the sampling phase at some instant of time k is given
by
Q1 = C1 [Vin(k)− Vcm] , (5–23)
Q2 = C2 [Vin(k − 1)− Vcm] , (5–24)
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and
Q3 = C3 [Vin(k)− Vcm] . (5–25)VinSampl*Chop Sampl*ChopEval*ChopSampl EvalC1C2 Vout- -++ -- Eval*ChopC3++ --
++Sampl*ChopSampl*Chop
VcmVcm VcmVcm VcmEval*Chop Eval*Chop
(a) Sample phase.
VinSampl*Chop Sampl*ChopEval*ChopSampl EvalC1C2 Vout- -++ -- Eval*ChopC3++ --
++Sampl*ChopSampl*Chop
VcmVcm VcmVcm VcmEval*Chop Eval*Chop
(b) Evaluation phase.
Figure 5-7. Compensator schematic during the two phases of operation.
During the Evaluation phase of the same cycle, shown in Figure 5-7(b), the plates of
capacitor C2 are reversed and connected to the output. Applying charge conservation, we equate
the final charge on the capacitors connected to the output node to their respective initial charges.
This can be expressed as
(C1 + C2) [Vout(k)− Vcm] = C1 [Vin(k)− Vcm]− C2 [Vin(k − 1)− Vcm] . (5–26)
Taking the z-transform of the previous equation and rearranging the terms, we obtain,
Vout(k) =C1 − C2z
−1
C1 + C2
Vin(k)− C1
C1 + C2
Vcm. (5–27)
From Equation 5–27, it can be seen that the transfer function of the compensator has a DC
offset. When this compensator is used in closed-loop, this offset will cause the center plate to
be displaced from the center position. This does not affect the operation of the circuit or its
performance metrics. Neglecting the offset, Equation 5–27 can be simplified as
Vout(k) =C2
C1 + C2
[C1
C2
− z−1
]Vin(k). (5–28)
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The compensator is followed by the comparator. Therefore, the term C2
C1+C2is not important.
Comparing Equation 5–28 with Equation 5–22, we obtain
α =C1
C2
. (5–29)
5.3.3 Comparator Design
The comparator used in the ∆Σ modulator consists of a open-loop amplifier followed
by a positive feedback stage. The net feedback of the comparator is determined by the Latch
signal. The comparator has two phases of operation namely “Track” and “Latch”. During the
track phase (Latch = 0), the negative feedback in the comparator is greater than the positive
feedback, and the comparator functions as an open-loop amplifier. During the latch phase
(Latch = 1), the positive feedback is greater than the negative feedback, and the comparator
output goes high or low corresponding to whether the the input signal is greater or less than the
reference voltage. In this system, the reference voltage is 2.5V . The schematic of the comparator
is shown in Figure 5-8. The latch mode time constant is given in terms of the load capacitance
Vbn LatchM1 M2 Vout+Vout-V+V-M3 M4M5 M6M7 M11M8M8 M9 M10
Figure 5-8. Transistor level schematic of comparator
CL, transconductance gm, change in input signal ∆V0, and the change in the output logic signal
∆Vlogic by the equation [79]
τcompar =CL
gm
ln∆V0
∆Vlogic
(5–30)
123
The time constant of the comparator stage is much lower than the amplifier and compensator
stages and can be neglected.
5.3.4 Bias Network Design
The currents and voltages required to set the operating points of the amplifier, comparator,
and compensator is generated via the on-chip bias generation network shown in Figure 5-11.
This network designs the bias voltages (Vbn, Vcn, Vbp, Vcp) and the bias currents.VbpVcpVbn VcnM1 M4M2 M3
M8 M7M9 M6 M11M10 M13M12M14 M18
M17M15 M16M5RbFigure 5-9. Schematic of bias network.
5.4 System Level Timing
In the previous section, the various building blocks of the ∆Σ interface technique was
explained. For the proper operation of the circuit, the various building blocks must operate in a
correct sequence. This section describes the sequence of operation of the various blocks and the
timing consideration required for the sequencing. The various time intervals discussed in this
section are related to the settling times discussed in Section 5.3.
The overall sequence of operation of the microphone system is shown in Figure 5-10.
The clock signals involved in each phase of operation are shown inside the block. The various
components of the ∆Σ modulator, namely switched capacitor amplifier, compensator, and
comparator have two phases of operation. The two phases of operation of the amplifier are the
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reset phase and the amplify phase and is controlled by clocks φ1 and φ2 respectively. The two
phases of operation of the compensator are sample and evaluate and is controlled by three clock
signals namely Sampl, Eval, and Chop. The two phases of operation of the comparator are
track and latch and is controlled by one clock signal, namely Latch. The various phases of the
building blocks of the ∆Σ modulator and the clock signals used to control them are listed in
Table 5-1. The complete interface circuit is shown in Figure 5-11.
Table 5-1. Clock signals used in the various components of the ∆Σ modulator.
Component Phases ClockAmplifier Reset, Amplify φ1, φ2
Compensator Sample, Eval Sampl, Eval, Eval
Comparator Track, Latch Latch
Sense(Reset, Amplify)Compensate(Sampl, Eval, Chop)Compare(Track, Latch)Feedback(TP, BP)Digital Output
InputPressure
Figure 5-10. Flowchart showing the sequence of operation of the overall ∆Σ modulation basedinterface circuit.
The timing diagram begins at the reset phase of the amplifier during the sensing operation.
At instant denoted by 1, the reset phase ends and the amplifier is prepared to enter the amplify
phase. The time from 1 to 2 is the non overlap period of the switched capacitor amplifier. At the
instant 2, the amplifier comes into the amplify phase. The time from 2 to 3 is the time required
for the amplifier to settle before starting a new measurement. At instant 3, the top (TP ) and
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bottom (BP ) plates voltages make a step equal in magnitude but opposite in sign to perform
the measurement. During this period, the Sampl clock is high and the compensator is in the
Sampling phase. The sampling capacitors form the load capacitance of the amplifier. The time
from 1 to 4 is the time required for the amplifier to settle, τamp, discussed earlier.
Once the amplifier has settled and the output of the amplifier has been sampled on to the
compensator capacitors, the compensator enters the evaluation mode. The period from 4 to 5 is
the non-overlap time for this to occur. Once the amplifier enters the evaluation mode, it takes
some time to settle and this is the time from 5 to 6. This is the settling period of the compensator
and is denoted by τcompen. Once the comparator settles, the comparator needs to make a decision.
At instant 6, the comparator goes from the track mode to the latch mode. The output of the
comparator goes high or low depending on the compensator input as compared to the reference
voltage. Based on the output of the comparator, an external circuitry changes the top and bottom
plate voltages to null the diaphragm deflection.Creset Vcm-+Cgain0 V0 V
Sampl*Chop Sampl*ChopSampl*EvalSampl*Eval Sampl*ChopEval*ChopSampl EvalC1C2- -++ --
Sampl*Chop Eval*ChopC3++ --++
VcmV+ Vout+-LatchSwitched CapacitorAmplifier Compensator Comparator
VcmVcm VcmVcm VcmFigure 5-11. Schematic of ∆Σ modulator circuit.
The time period from 6 to 8 is the latch mode time constant, τcompar. The period from 6 to
7 is the non overlap period during which the amplifier goes to the reset phase and prepares for
another measurement. Finally, the time from the end of the feedback phase to the time instant 1
is adjusted so that the top and bottom plate voltages during the sense phase is spent equally high
and low. The function performed by the system during the various time intervals are given in
Table 5.4.
126
Figure 5-12. System level timing diagram over one complete cycle.
Table 5-2. Function performed during each time interval.Time Interval FunctionT01 Time for equalizationT12 Non-overlap time of amplifierT23 Amplifier settling before measurementT34 Amplifier settling timeT45 Non overlap time of compensatorT56 Settling time of compensatorT67 Non-overlap time of amplifierT78 Latching time of comparator
5.5 System Level Simulation
The system level simulation of the closed-loop system was carried out using the Simulink
tool in Matlab 7.0. Figure 5-13 shows the Simulink model of the microphone system. The
microphone was modelled using a “s-domain transfer function” block with a second order
transfer function given by
H(s) =1/Md
s2 + 2ζ(2πfn)s + (2πfn)2. (5–31)
The input to the microphone system block is the “summing” block which computes the
difference between the force corresponding to the input pressure signal modeled using a “signal
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Feedback Force
Displacement Output
Zero-OrderHold
netforce
fbforceb
disp
fbforce
input
fbforcet
pdm
Switch
SignalGenerator
6e9
den(s)
Microphone
Manual Switch
-1
Gain
1-0.5z -1
1
Compensator
Band-LimitedWhite Noise
1-bitquantizer
f(u)
0.5*8.854e-12*(pi*(230e-6)^2)*(D*5)^2/(2e-6-u(1))^2
Figure 5-13. Simulink Model of the ∆Σ modulator based interface circuit.
generator” block and the electrostatic feedback force. This error signal forms the input to the
microphone which is represented by a “s-domain transfer function” block. The output of the
microphone block is inputted to the compensator which is modeled using the “z-domain transfer
function” block. The comparator is modeled as a “zero order hold” and “one-bit quantizer”
block. The magnitude of the feedback force is computed using the “equation” block whose inputs
are the current displacement and a predetermined feedback voltage . The sign of the force is
determined by a “2 to 1 multiplexer” block which is driven by the output of the comparator. The
output of the multiplexer forms the electrostatic feedback signal. The simulation parameters
are as listed in Table 5.5. Preliminary simulation results of the voice grade microphone are
Table 5-3. Parameters used in closed loop simulation.Parameter MagnitudeResonant Frequency fres 30 kHzDamping Coefficient ζ 0.15Sampling Frequency fs 2.56MhzInput frequency 5kHzOversampling Ratio M 256Solver Type Fixed point (ODE45)Step Size 1/fs
Length of FFT 5120Frequency Resolution 500Hz
presented here. The voice grade microphone was excited with a 5kHz size wave pressure source
with an amplitude corresponding to 2000Pa. The power spectral density of the output signal ∆Σ
modulated bitstream is shown in Figure 5-14. From Figure 5-14, it can be seen that the output
128
bitstream has a signal spike at the input frequency of 5kHz. At higher frequencies, the rising
noise shape of the output bitstream can be seen.
102
104
106
108
10-8
10-6
10-4
10-2
100
Frequency
Pow
er S
pect
ral D
ensi
ty o
f Sig
ma
Del
ta M
odul
ated
Sig
nal
Figure 5-14. Power spectral density of output ∆Σ modulated bitstream.
5.6 Circuit Implementation
Circuit requirements for the implementation of ∆Σ modulation based controller, as a
function of resonant frequency and dynamic range, presented in Chapter 3 is repeated below in
Table 5-4 and Table 5-5 respectively.
Table 5-4. Frequency requirements of ∆Σ interface circuits with increasing resonant frequency.Property Accelerometer Audio microphone Aeroacoustic
microphonefres 1kHz[8] 20kHz 200kHzfs 1MHz[8] 20MHz 200MHzfu 4.5MHz 90MHz 900Mhz
Table 5-5. Feedback voltage requirements of ∆Σ interface circuits with increasing dynamicrange.
Property Audio microphone Aeroacoustic microphoneMaximum input 120dB 160dB
Feedback voltage 6V 45V
From Table 5-4 and Table 5-5 it can be seen that to implement a digital closed loop
controller for an aeroacoustic microphone the process technology must support voltages in excess
129
of 45V with a gain bandwidth of 900MHz. This is not feasible with current IC technology.
Hence, in this work, only a closed loop analog controller was implemented.
5.7 Summary
In this chapter, a design procedure for the development of a ∆Σ modulator for a capacitive
microphone based on the system level specification was developed. A system level simulation
was performed to verify the functionality of the approach. The requirements of the IC fabrication
technology to implement the controller was discussed. Based on this discussion, it was concluded
that a digital closed loop controller was not feasible with current process technology.
In the next chapter, the experimental setup and experimental results to characterize an
analog closed loop controller are presented.
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CHAPTER 6EXPERIMENTAL SETUP AND RESULTS
6.1 Introduction
In this chapter, the experimental setup and experimental results for characterizing the
capacitive microphone using an analog controller is presented. The chapter begins with a
literature review of test apparatus that can perform simultaneous acoustic, electrical and optical
measurement. This is followed by the design and characterization of the acoustic pressure
coupler. Experimental results of open loop and closed loop measurements of the microphone
are presented next. The experimental results are compared to simulation results. The simulation
results presented include modeling of circuit phenomena such as saturation of amplifiers and
thermal noise. This chapter concludes with a summary of the various results. A graphical
overview of this chapter is provided in Figure 6-1.
SummaryExperimentalresultsExperimental setupIntroductionPressure coupler Pressure couplercharacterizationOpen loopcharacterizationClosed loopcharacterization
Literature reviewDesignFigure 6-1. Overview of Chapter 6.
6.2 Acoustic Pressure Coupler
The acoustic characterization of the microphone involves performing experiments to
determine the sensitivity, dynamic range, noise floor, and frequency response of the microphone.
As part of the characterization, the performance of the microphone with and without a feedback
131
controller is evaluated. To study the effect of feedback, a test setup that allows measurement of
the electrical output of the microphone and the input acoustic signal is required.
6.2.1 Design of Acoustic Pressure Coupler
The pressure coupler consists of a rigid-walled duct with a square cross section (8.5mm ×8.5mm). On one end, a BMS4590P compression driver is used to excite the duct using a Techron
7450 power amplifier controlled by the PULSE multi-analyzer system. A cut away section of the
pressure coupler is shown in Figure 6-2.Inlet for helium Rectangular duct Plug for referencemicrophone(a) Photograph of cutaway section of pressure coupler showing
rectangular duct with 8.5mm square cross section.Optical portPlug for referencemicrophone Inlet for heliumPCB
(b) Photograph of assembled pressure coupler showing PCB,plug for reference microphone and optical port.
Figure 6-2. Photograph of acoustic pressure coupler.
On the opposite face of the duct, a Bruel and Kjaer Type 4138 microphone is mounted at
normal incidence to the acoustic waves and serves as the reference microphone. The device
under test (DUT) is mounted at grazing incidence to the acoustic waves close to the reference
microphone. The distance between the DUT and reference microphone d is 2.4mm. This
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determines the bandwidth over which the pressure coupler can be used. The frequency f at
which the pressure seen by the DUT and reference microphone are 90 degrees out of phase is
related to the velocity of sound in air c by
f =d/4
c. (6–1)
An inlet and exit port is machined in the duct to allow the chamber to be filled with helium.
Up to the maximum frequency of operation, the DUT and the reference microphone are
exposed to the same pressure. This is ensured by making the distance from the DUT and the
reference microphone less than a quarter wavelength at the maximum frequency of operation.
Also to ensure that the higher order modes are sufficiently attenuated at the end of the test
section, the cross section dimensions are established such that the cut on frequency is higher
than the maximum frequency of interest. To increase the operating frequency range, the duct is
filled with helium as the isentropic speed of sound in helium is 2.7 times as that in air. Since the
distance between the DUT and the reference microphone is fixed, this will increase the maximum
frequency by approximately 2.7X . The minimum frequency of operation of the pressure coupler
is 300Hz and is determined by the speaker. The maximum frequency of operation of the pressure
coupler filled with helium is 18.3kHz and is determined by the duct dimensions. Without
helium, the pressure coupler can be operated up to a frequency of 6.7kHz.
6.3 Experimental Results
6.3.1 Characterization of Pressure Coupler
The pressure coupler was characterized by mounting a Bruel and KjærType 4138
microphone at the location where the DUT is to be mounted. The pressure coupler was excited
with a periodic random bandlimited white noise signal from 100Hz to 25.6kHz with 4 periods
using the PULSE system. Since the speaker has a built in bandpass filter with a low frequency
cut in of 300Hz, all the data plotted is shown from 300Hz. The spectrum of the microphone
output was measured using an FFT analyzer with 800 lines. A plot of the input pressure signal as
a function of frequency is shown in Figure 6-3.
The frequency response between the reference microphone and the second Bruel and
Kjaer Type 4138 microphone is shown in Figure 6-4 with air and helium as the medium in the
133
duct respectively. It can be seen that magnitude and phase frequency response between the
microphones is flat within 3dB from 300Hz to 5.6kHz in air and from 300Hz to 14.2kHz in
helium respectively. The frequency response shows that the two microphones are exposed to the
same acoustic field. Furthermore, it can be seen that the bandwidth of the system with helium is
approximately 2.7 times as that of the system with air.
102
103
104
105
110
115
120
125
130
135
140
Pre
ssur
e (d
B)
Frequency
Figure 6-3. Plot of input pressure signal as a function of frequency.
The roll-off of the magnitude frequency response plot is because of the relative position of
the reference microphone and DUT. In the acoustic pressure coupler, the reference microphone
is placed at normal incidence to the acoustic source and the DUT is placed at grazing incidence
to the acoustic source. At low frequencies (large wavelength), both the reference microphone
and the DUT are subjected to the same acoustic pressure amplitude. With increasing frequency
(smaller wavelength), the pressure amplitude on the reference microphone remains constant
whereas the pressure amplitude on the DUT keeps on decreasing and reaches a minimum based
on the duct dimension and then increases. In the open and closed loop frequency response plots
shown later in this chapter, this effect has been mitigated by multiplying the magnitude frequency
response between the DUT and the reference microphone by the inverse of the magnitude
frequency response shown in Figure 6-4.
Once the pressure coupler was characterized, open loop and closed loop characterization
of the microphone are performed. Figure 6-5 shows a block diagram of the characterization
134
102
103
104
105
0
0.5
1
1.5
2
2.5
Frequency (Hz)
Gai
n (V
/V)
AirHelium
102
103
104
105
−100
0
100
200
300
Frequency (Hz)
Pha
se (
Deg
rees
)
AirHelium
Figure 6-4. Comparison of frequency response of pressure coupler with air as medium and withhelium as medium.
procedure used. The first experiment performed on the microphone is to obtain the frequencyOpen loopcharacterizationFrequency responsewith dc biasClosed loopcharacterizationCompensatorcharacterization
Figure 6-5. Block diagram describing characterization procedure used.
response of the microphone with only a dc bias and a unity gain follower. This experiment is
performed to characterize the microphone and ensure that a working microphone is available
for further tests. The next set of experiments consists of characterizing the microphone with
a dc and ac bias. A synchronous modulation/demodulation interface circuit is used in these
experiments. These experiments provide the frequency response, linearity and noise floor of the
microphone in open loop configuration. To facilitate stable closed loop operation, a compensator
is required. The compensator, independent of the rest of the system, is characterized next. This is
135
accomplished by exciting the compensator with a swept sine signal and measuring the frequency
response. Finally, the closed loop configuration is characterized. The closed frequency response,
linearity, and noise floor is measured. The results of the experiments described are presented
next.
6.3.2 Open Loop Frequency Response of Microphone with Voltage Amplifier (dc bias)
The first test performed on the microphone is to obtain the frequency response of the
microphone with only a dc bias and a unity gain follower. For this test, the PCB consisting of
the microphone and buffer amplifier, is mounted in the acoustic pressure coupler. A Bruel and
KjærType 4138 microphone is used as the reference microphone. The microphone is excited
with a periodic random bandlimited white noise signal going from 100Hz to 25.6kHz with 4
periods using the PULSE system. The interface circuit used for this test is a voltage buffer.
102
103
104
10−2
100
102
Sen
sitiv
ity (
µV/P
a)
Corrected DataRaw Data
102
103
104
−100
0
100
200
300
Frequency (Hz)
Pha
se (
Deg
.)
Figure 6-6. Frequency response with dc bias (5V ) with air medium.
The top and bottom plate of the microphone is biased with a regulated ±5V dc bias. Since the
speaker has a built in bandpass filter with a low frequency cut in of 300Hz, all the data plotted is
shown from 300Hz. The spectrum of the DUT and reference microphone output was measured
using an FFT analyzer with a 4Hz bin width and 1000 averages and is shown in Figure 6-6. The
roll-off of the microphone magnitude frequency response is due to the relative placement of the
reference microphone and DUT which was discussed earlier in this chapter in Section 6.3.1. The
frequency response corrected for the placement of DUT and reference microphone is also shown.
136
102
103
104
10−1
100
101
Sen
sitiv
ity (
µV/P
a)
102
103
104
−100
0
100
Frequency (Hz)
Pha
se (
Deg
.)
Figure 6-7. Frequency response with dc bias (5V ) with helium medium.
The magnitude and phase frequency response is shown in Figure 6-6. It can be seen that the
microphone has a flat frequency response from 300Hz to 5.6kHz with a sensitivity of 3.8uV/Pa
at 1kHz. Over this frequency range the phase varies from 39 deg to 9 deg.The acoustic pressure
coupler is then filled with helium and the experiment is repeated. The magnitude and phase
frequency response of the microphone in helium medium is shown in Figure 6-7. The system has
a flat frequency response from 300Hz to 13.4kHz and a sensitivity of 3.9uV/Pa.
6.3.3 Open Loop Frequency Response of Microphone with Synchronous Modulator /Demodulator (dc + ac bias)
In this section, the open loop characterization of the microphone is presented. The block
diagram of the open loop system described in Chapter 2 is repeated in Figure 6-8. The top
Charge Amp MultiplierVac sin(wct) Vout(Demod) Lowpass FilterCintVxVdc+Vac sin(wct)-Vdc-Vac sin(wct)
RDCCp CiC1C2 AFigure 6-8. Schematic of capacitive microphone with a synchronous modulation and
demodulation technique using a voltage amplifier based circuit.
137
and bottom plate 1MHz sine wave voltages are generated using two Agilent 33014C function
generator that are 180 deg out of phase. Two different ac voltage amplitudes are used, 6Vpp and
9Vpp. The reference input to the demodulator is obtained from another Agilent 33014C function
generator that is phase locked to the top plate voltage with a 5Vpp signal. The test setup used is
similar to the previous experiment.
102
103
104
101
102
Sen
sitiv
ity (
µV/P
a)
9V
pp
6Vpp
Theoretical (6Vpp
)
Theoretical (9Vpp
)
102
103
104
−200
−100
0
100
200
Frequency (Hz)
Pha
se (
Deg
.)
Figure 6-9. Open loop frequency response measured at the output of low pass filter (Node A,Figure 6-8) with dc (5V ) and ac bias voltages (6Vpp and 9Vpp and demodulator at5Vpp) after compensating for magnitude frequency response slope introduced by theacoustic pressure coupler.
102
103
104
100
101
102
Sen
sitiv
ity (
µV/V
/Pa)
9V
pp
6Vpp
102
103
104
−200
−100
0
100
200
Frequency (Hz)
Pha
se (
Deg
.)
Figure 6-10. Open loop frequency response normalized to the peak ac voltage measured at theoutput of low pass filter (Node A, Figure 6-8) with dc (5V ) and ac bias voltages(6Vpp and 9Vpp and demodulator at 5Vpp) after compensating for magnitudefrequency response slope introduced by the acoustic pressure coupler.
138
0 50 100 150 200 250 300 3500
500
1000
1500
2000
2500
3000
3500
Input pressure (Pa)
Out
put v
olta
ge (
µV)
9V
pp
6Vpp
Figure 6-11. Open loop linearity of the open loop system as measured at the output of thedemodulator (Node A,Figure 6-8 ) for two different ac bias voltage at an inputfrequency of 2kHz. The straight line fit has a regression value, R2, of 0.98
A dc bias of 5V is used. The microphone is excited with a periodic random bandlimited
white noise signal going from 100Hz to 6.4kHz with 4 periods using the PULSE system. The
spectrum of the DUT and reference microphone output was measured using an FFT analyzer
with a 4Hz bin width and 1000 averages. The open loop frequency response of the system after
accounting for the acoustic pressure coupler is shown in Figure 6-9 along with the theoretical
sensitivity. At 2kHz, the microphone has a sensitivity of 7.3uV/Pa for a 6Vpp ac bias and
10.47uV/Pa for a 9Vpp ac bias. Table 6-1 shows a comparison between the theoretical and
simulated values for the sensitivity. A plot of the sensitivity of the system normalized to the peak
ac bias voltage is shown in Figure 6-10. It can be seen that both the curves coincide with each
other. This shows that the sensitivity is linearly related to the peak ac voltage.
Table 6-1. Comparison of simulated and experimental sensitivity.BiasingTechnique
Bias Voltages Simulation Experimental
dc dc voltage : 5V 4µV/Pa 3.9µV/Pa
dc + ac dc voltage : 5V , Top and bottom plate acvoltage 6Vpp, Demodulator : 5Vpp
7µV/Pa 7.3µV/Pa
6.3.4 Linearity of Open Loop Microphone
The linear range of the open loop system with ac bias is presented next. The microphone is
excited with a 2kHz acoustic wave of increasing amplitude. A plot of the rms output voltage as a
139
0 50 100 150 200 250 300 3500
50
100
150
200
250
300
350
400
Input pressure (Pa)
Out
put v
olta
ge (
µV/V
)
9V
pp
6Vpp
Figure 6-12. Linearity of the open loop system normalized to peak ac bias voltage as measured atthe output of the demodulator (Node A,Figure 6-8 ) for two different ac bias voltageat an input frequency of 2kHz. The straight line fit has a regression value, R2, of0.98
function of increasing input pressure is shown in Figure 6-11. It can be seen that the microphone
has a linear response up to 315Pa(143dB) for 6Vpp and 9Vpp ac bias. The maximum applied
pressure was stopped at 143dB to prevent possible damage to the device. The slope of the line
in the linearity plot is a measure of the sensitivity of the system at 2kHz. The microphone
itself has been shown to be linear up to 166dB [64]. The circuit operates with a ±15 power
supply and hence will be linear up to this pressure input. The slope of the input pressure versus
output voltage curve is 7.29uV/Pa for a 6Vpp ac bias and 10.3uV/Pa for a 9Vpp ac bias. This
corresponds to the sensitivity of the microphone at 2kHz discussed in Section 6.3.3. A plot of
the open loop linearity of the microphone normalized to the peak ac bias voltage is shown in
Figure 6-12. It can be seen that the curves for ac bias voltages of 6Vpp and 9Vpp approximately
coincide with each other.
6.3.5 Noise Floor of Open Loop Microphone
The noise floor of the system is obtained by measuring the output for no acoustic input.
In this experiment, the input to the amplifier driving the speaker was disconnected. A plot
of the power spectral density at the output of the demodulator for two different ac bias
voltages (6Vpp and 9Vpp is shown in Figure 6-13. From Figure 6-13, the noise floor at 2kHz
is 1.76uV . Dividing the noise floor with the sensitivity, the minimum detectable signal (MDS) is
140
101
102
103
104
100
101
102
Frequency (Hz)
rms
nois
e vo
ltage
(µV
)
9V
pp
6Vpp
Theory
Figure 6-13. Noise floor of microphone for two different ac bias voltages measured at the outputof the demodulator.
obtained. The MDS at 2kHz for 6Vpp and 9Vpp ac bias is 0.24Pa(81.6dB) and 0.17Pa(78.5dB)
respectively. The theoretical noise floor derived in Chapter 4 is also superimposed on the plot.
It is seen that the experimental noise is lower than the theoretical noise. One possible reason for
this could because the amplifier noise specification used are the typical values. The actual noise
values could be lower than the typical values provided in the data sheet.
6.3.6 Compensator Characterization
For stable closed loop operation, a compensator is required to provide adequate gain and
phase margin. In this section, the results of the compensator characterization independent of
the system is presented. For this experiment, a 1uV swept sine signal was used as the input
to the compensator circuitry. The output of the compensator was measured, and a magnitude
and phase frequency response plot of the compensator is shown in Figure 6-14. A plot of the
theoretical compensator response discussed in Chapter 4 is overlaid on the experimental plot in
Figure 6-14. From Figure 6-14, it can be seen that the compensator has a dc gain of 77.8dB. It
can also be seen that the compensator has a dominant pole at 1kHz and a non-dominant pole at
30kHz. The zero of the system is at 230kHz and is not captured in Figure 6-14. This is because
the spectrum analyzer (SRS785) has a bandwidth of 101.3kHz. It can be observed from the
phase frequency plot that the phase does not continue reducing after the second pole but starts to
141
increase indicating the presence of a high frequency pole. It can be seen that the location of the
pole and zero positions are the same between simulation and experiment.
100
102
104
106
108
−100
−50
0
50
100
Mag
nitu
de (
dB)
TheoryExperiment
100
102
104
106
108
−100
0
100
Pha
se (
deg)
Frequency (Hz)
Figure 6-14. Theoretical and experimental frequency response of compensator.
6.3.7 Closed Loop Frequency Response
In this section, the results of closed loop operation of the system is presented. The block
diagram of the closed loop system described in Chapter 4 is repeated in Figure 6-15. FromSensor(Force todisplacement) IntefacecircuitPressure CompensatorArea Displacementto voltageVoltage toForceElectrostaticforceNetforce+-Inputforce A B
Figure 6-15. Block diagram of analog closed-loop system showing microphone and interfacecircuit.
linear control theory [126], during closed loop operation, if the forward path of the system has
a high gain, the signal at any point in the forward path of a closed loop system is attenuated by
the loop gain. Thus, to demonstrate closed loop operation, the frequency response of the system
measured at the output of the interface circuit (Node A in Figure 6-15) is compared to the open
loop response shown in Figure 6-9. The frequency response of the closed loop system measured
142
at the output of the interface circuit (Node A in Figure 6-15) is shown in Figure 6-16 along with
the theoretical curve for ac bias voltages of 6Vpp and 9Vpp. This frequency response is compared
to the frequency response of the open loop system shown in Figure 6-17 and Figure 6-18 for 6Vpp
and 9Vpp ac bias. The magnitude frequency response at 2kHz is 1.27uV/Pa with a 6Vpp ac bias
102
103
104
10−1
100
101
102
Sen
sitiv
ity(u
V/P
a)
6Vpp
9Vpp
Theoretical 6Vpp
Theoretical 9Vpp
102
103
104
−200
−150
−100
−50
0
50
100
150
200
Pha
se (
deg)
Frequency
Figure 6-16. Closed loop frequency response measured at the output of demodulator with dcbias of 5V , ac bias of 9Vpp, and demodulator at 5Vpp (Node A in Figure 6-15).Frequency response corrected for reference microphone and DUT location.
voltage and 1.89uV/Pa with a 9Vpp ac bias voltage. An increase in phase was observed in closed
loop response at the output of the demodulator which was not observed in open loop. The cause
of this phase increase is not clear but may be due to the coupling capacitors used between the
stages. Compared with the open loop magnitude frequency response measured at 2kHz, with the
same bias voltage, this represents a 5× reduction in diaphragm displacement. Thus the system
operates in a stable fashion in closed loop. The experimental loop gain of the system, T evaluated
at 2kHz, is given by the product of the system sensitivity , H1, expressed in uV/N evaluated
at 2kHz, compensator gain H2, evaluated at 2kHz, and voltage to force transfer function, H3,
evaluated at 2kHz , i.e.
T = H1 ×H2 ×H3 (6–2)
It should be noted that in this work, the voltage to force transfer function was not experimentally
evaluated. Therefore, H3 is calculated using Equation 4–10. Also, the sensitivity of the system
in uV/Pa obtained from Figure 6-9 is converted to uV/N by dividing the sensitivity by the
143
102
103
104
10−1
100
101
102
Sen
sitiv
ity(µ
V)
Open LoopClosed Loop
102
103
104
−200
−100
0
100
200
Pha
se (
deg)
Frequency
Figure 6-17. Closed loop frequency response measured at the output of demodulator (Node A inFigure 6-15) with dc bias of 5V , ac bias of 6Vpp, and demodulator at 5Vpp in openand closed loop operation. Frequency response corrected for reference microphoneand DUT location.
effective area of the diaphragm. Using Equation 6–2, the experimental loop gain of the system
is 5.28. From linear control theory, the diaphragm displacement is attenuated by 1 + T . This
implies that the diaphragm displacement should be attenuated by 6.28×. The actual diaphragm
displacement is only 5×. This discrepancy can be attributed to the modeling errors used in
the voltage to force transfer function. Figure 6-17 and Figure 6-18 show a comparison of the
magnitude and phase frequency response in open and closed loop operation with an ac bias of
6Vpp and 9Vpp respectively compensated for the reference microphone and DUT location.
The frequency response of the closed loop system at the output of the compensator (Node
B, Figure 6-15) after compensating for the transfer function of the pressure coupler is shown
in Figure 6-19. The magnitude frequency response at 2kHz is 2.63mV/Pa with a 6Vpp ac bias
voltage and 3.56mV/Pa with a 9Vpp ac bias voltage.
6.3.8 Closed Loop Linearity
A plot of the closed loop linearity measured at the output of the compensator (Node B,
Figure 6-15) for 6Vpp and 9Vpp ac bias voltages ac bias voltages is shown in Figure 6-20. It can
be seen that the system has a linear response upto an input pressure of 315Pa(144dB). Further
144
102
103
104
10−1
100
101
102
Sen
sitiv
ity(µ
V)
Open LoopClosed Loop
102
103
104
−200
−100
0
100
200
Pha
se (
deg)
Frequency
Figure 6-18. Closed loop frequency response measured at the output of demodulator (Node A inFigure 6-15) with dc bias of 5V , ac bias of 9Vpp, and demodulator at 5Vpp in openand closed loop operation. Frequency response corrected for reference microphoneand DUT location.
increase in input pressure was not carried out to prevent possible damage to the microphone
diaphragm. The slope of the input pressure versus output voltage curve is 2.63mV/Pa for
a 6Vpp ac bias and 3.56mV/Pa for a 9Vpp ac bias. This corresponds to the sensitivity of the
microphone at 2kHz in Figure 6-19. A plot of the open loop linearity of the microphone
normalized to the peak ac bias voltage is shown in Figure 6-21. It can be seen the plots for for ac
bias voltages of 6Vpp and 9Vpp approximately coincide with each other.
6.3.9 Closed Loop Noise Floor
The noise floor of the system is obtained by measuring the output of the compensator
for no acoustic input. In this experiment, the input to the amplifier driving the speaker was
disconnected. A plot of the power spectral density at the output of the demodulator for 6Vpp and
9Vpp ac bias voltages is shown in Figure 6-22. From Figure 6-22, the noise floor at 2kHz is
1.11mV . Dividing the noise floor with the sensitivity, the minimum detectable signal (MDS) is
obtained. The MDS at 2kHz for 6Vpp and 9Vpp ac bias is 106.5dB and 103.8dB respectively.
The large noise floor is discussed in the next section.
145
102
103
104
10−1
100
101
102
Sen
sitiv
ity(m
V)
6V
pp
9Vpp
102
103
104
−200
−100
0
100
200P
hase
(de
g)
Frequency
Figure 6-19. Closed loop frequency response measured at the output of compensator (NodeB in Figure 6-15) with dc bias of 5V ac bias of 9Vpp, and demodulator at 5Vpp.Frequency response corrected for reference microphone and DUT location.
0 50 100 150 200 250 300 3500
200
400
600
800
1000
1200
Input pressure (Pa)
Out
put v
olta
ge (
mV
)
9V
pp
6Vpp
Figure 6-20. Linear range of system in closed loop configuration as measured at the output ofthe compensator (Node B in Figure 6-15) with 6Vpp and 9Vpp ac bias voltages for aninput frequency of 2kHz. The straight line fit has a regression value, R2, of 0.97
6.4 Discussion
A closed loop analog controller for a MEMS dual backplate capacitive microphone
has been characterized in terms of frequency response, noise floor, and linear range. The
performance characteristics of the system in open and closed loop operation is listed in Table 6.4.
The reduction in the output of the demodulator is approximately 5× which is approximately
consistent with that predicted to the reduction of loop gain.
146
0 50 100 150 200 250 300 3500
20
40
60
80
100
120
140
Input pressure (Pa)
Out
put v
olta
ge (
mV
/V)
9V
pp
6Vpp
Figure 6-21. Linearity of the closed loop system normalized to peak ac bias voltage as measuredat the output of the compensator (Node B in Figure 6-15 ) for two different ac biasvoltage at an input frequency of 2kHz. The straight line fit has a regression value,R2, of 0.98
101
102
103
104
102
103
104
105
Frequency (Hz)
rms
nois
e vo
ltage
(µV
)
9V
pp
6Vpp
Figure 6-22. Noise floor of the circuit in closed loop operation as measured at the output of thecompensator (Node B in Figure 6-15) with 6Vpp and 9Vpp ac bias voltages.
The performance metrics of the open loop microphone using synchronous modulation
and demodulation interface circuit is compared to the performance metrics of the microphone
using a low noise voltage amplifier and a charge amplifier [64]. Martin reports a sensitivity
of 166uV/Pa and 368uV/Pa with a 9.3V bias using a voltage amplifier and charge amplifier
respectively. The reported interface circuits have a noise floor of 22.7dB and 41.5dB with a
voltage and charge amplifier respectively. The linear range of the interface circuit extends up
to an input pressure of 166dB. Based on this information, the dynamic range reported in this
147
Table 6-2. Characterization results of microphone in open and closed loop mode of operation.Bias condition Sensitivity at
2kHzNoise floor Linear range
Open loop (ac 6Vpp) 7.3uV/Pa 81.6 81.6dB−143dB
Open loop (ac 9Vpp) 10.47uV/Pa 78.5 78.5dB−143dB
Closed loop (ac 6Vpp) 2.63mV/Pa 106.5 106.5dB −143dB
Closed loop (ac 9Vpp) 3.56mV/Pa 103.8 103.8dB −143dB
work is considerably lower. The reasons are as follows. In this work, the amplifiers are chosen
to have a large bandwidth to be used in synchronous modulation and demodulation and a high
operating voltage and slew rate to support the feedback voltage requirements whereas in the work
published by Martin only open loop operation was investigated. Amplifiers which simultaneously
satisfy the high voltage, bandwidth and slew rate conditions have higher noise than amplifiers
with lower bandwidth and lower power supply voltages. This is because the transistors used to
implement the amplifiers must have larger size to support the increased current required for the
high frequency operation and the high voltage requirement. The closed loop interface circuit
also has increased component count due to the need for a high gain compensation network.
All these factors increase the noise floor of the closed loop microphone system. In closed loop
accelerometers, the bandwidth of the sensor is lower (approximately 1kHz). This reduces the
bandwidth requirement of the amplifiers used to implement closed loop control. Hence closed
loop accelerometers can potentially be implemented with a lower noise floor.
Closed loop capacitive interface circuits have primarily been used for low bandwidth
(1 − 2kHz) application such as accelerometers [68, 67, 11, 2, 112]. The main advantage
of a closed loop interface circuit is the possibility of increased bandwidth and linear range.
Also closed loop interface circuits have the potential to address pull in issues as the diaphragm
deflection is reduced. In this work, a proof of concept closed loop interface circuit has been
presented for a comparatively higher bandwidth ( 20kHz) application compared to potential
closed loop accelerometer applications. Closed loop control was demonstrated by showing that
the diaphragm deflection was reduced during closed loop operation. This was verified for two
different voltage bias conditions. The disadvantages of closed loop interface circuits is a higher
148
noise floor because of the increased number of components needed and the requirement of a high
gain stage due to the small voltage-to-force factor.
6.5 Summary
In this section, the experimental results were presented. The design and characterization of
the test setup was first presented. This was followed by open and closed loop characterization
of the microphone. A comparison of the interface circuit performance was compared to other
interface circuits for the same device and with interface circuits for other capacitive transducers.
149
CHAPTER 7CONCLUSION AND FUTURE WORK
In this chapter, the key goals of the work and the results are summarized. Key contributions
of this research are highlighted. This chapter concludes with a discussion on the avenues for
further research in this area.
7.1 Conclusion
The goal of this work is to design and characterize interface circuits that are optimized
for miniature capacitive transducers. As transducer geometry is scaled down, improved circuit
techniques are required to measure the sensor output. This is because at small geometries sensor
capacitance is comparable to unwanted parasitic capacitance which reduces the transducer
sensitivity. Also, at reduced sensor geometry, the voltage required to bias the microphone could
cause the microphone plates to pull in.
In this work, an extensive study of open loop and closed interface techniques for capacitive
sensors has been presented along with theoretical formulations for key performance metrics.
An analog closed loop controller for a dual backplate MEMS capacitive microphone was
designed. A detailed MATLAB model which captures key dynamics of the sensor and controller
was developed. Noise models of the closed loop system was also developed. Open and closed
loop simulations were performed for step and sinusoidal excitations. From these simulations, it
can be seen that in closed loop operation, the diaphragm displacement is attenuated which can
potentially address pull in issues.
A proof of concept closed-loop analog controller for a MEMS capacitive microphone was
developed and characterized. A test apparatus was developed to characterize the system over the
audio range by operating the microphone in a helium medium which increases the bandwidth of
the test apparatus. Characterization of the microphone in open and closed loop mode of operation
is presented. Results show that stable closed loop operation of the microphone is feasible with
increased sensitivity and the potential to address pull-in issues.
7.2 Future Work
The future areas of research in this project can be partitioned into simulation related and
hardware implementation related future work. These two topics are discussed next.
150
7.2.1 Simulation
In the open and closed loop Matlab simulations presented in this work, a 2nd order linear
model of the microphone was used. This can be expanded to include a detailed non-linear model
of the microphone which incorporates pull-in effects and mechanical non-linearities of the
microphone.
Another area of research is detailed transistor level simulations using SPICE. Transistor
level simulations allows noise analysis of the system which is not possible with MATLAB
simulations. To successfully perform these simulations, the microphone must also be modeled in
SPICE using analog modeling blocks. Furthermore noise models for the circuit elements must be
available.
7.2.2 Hardware Implementation
A number of improvements can be suggested for the next version of the closed loop
controller. In the current work, a two PCB approach wherein the microphone and buffer amplifier
is mounted on one PCB and the controller is mounted on a different PCB and connected using
ribbon connectors is used. This increased the 60Hz pick-up of the circuit. In future versions
of the controller, a single PCB which incorporates both the microphone and the controller can
be used. In the current work, dual in-line package (DIP) components were used to allow easy
testing and debugging. The downside of using DIP components is increased parasitics and noise.
Future versions of the controller may use surface mount components in order to reduce parasitic
capacitance and electromagnetic coupling.
It was also noticed that 60Hz noise in both the input channels of the demodulator caused
120Hz noise signals at the output of the demodulator. One of the sources of 60Hz pick up is the
cables connecting the function generator output to the controller PCB. This source of noise pick
up can be reduced by generating the clock signal on the PCB itself using oscillator ICs.
Another avenue for research could be to monolithically integrate the interface circuit and
controller using a high voltage, high frequency, and low noise process. This will greatly improve
circuit performance because of the reduced parasitics which will improve the sensitivity. Also
monolithic integration will eliminate the need for cables that are used for clock generation as the
clock signal can be generated on chip.
151
APPENDIX A
A.1 Derivation of Sensitivity for a Voltage Follower
In this technique the top and bottom backplate of the microphone with top and bottom
capacitances given by C1 and C2 are biased at a dc potential of +Vdc and −Vdc volts. A unity
gain voltage amplifier is connected to the middle plate as shown in Figure A-1 This resultsVxRDC -+ VoutCLC1C2-Vdc+Vdc Cp Ci
Figure A-1. Noise model of dual backplate microphone connected to voltage buffer.
in fixed charge of +Qdc and −Qdc on the top and bottom capacitor respectively. Cp and Ci
represent the interconnect parasitic capacitance and the input capacitance of the amplifier
respectively. The top and bottom plate capacitance is given by
C1 =ε0A
x0 − x′(A–1)
C2 =ε0A
x0 + x′
The nominal capacitance C0 is given by the expression
C0 =ε0A
x0
(A–2)
Equation A–2 can be expressed in terms of the nominal capacitance C0 and a varying capacitance
∆C using the relation
C1 = C0 + ∆C1 (A–3)
C2 = C0 −∆C2
152
Using Equation A–1 the voltage across the top and bottom capacitor V1 and V2 respectively is
given by
V1 =x0 − x′
ε0A(A–4)
V2 =x0 + x′
ε0A
This shows that the voltage varies linearly with gap distance. The voltage across each capacitor
can also be expressed in terms of the fixed charge Qdc as
V1 =Qdc
C0 + ∆C(A–5)
V2 =Qdc
C0 −∆C.
Substituting Equation A–1, Equation A–2 in Equation A–6 we obtain
εA
x0 − x′= ∆C1 +
x′
x0
(A–6)
εA
x0 + x′= ∆C2 − x′
x0
Solving Equation A–6 for ∆C1 and ∆C2
∆C1 =x′
x0
εA
x0 − x′(A–7)
∆C2 =x′
x0
εA
x0 + x′
To obtain the output voltage we solve for the voltage at the inverting node using the
principle of superposition. Initially we consider only the output due to the top capacitance. This
implies that the bottom plate is grounded. The initial charge on the top capacitor Q1i system is
given by
Q1i = C0Vdc (A–8)
The final charge is given by
Q1f = C1V1 − C2VoutC1 (A–9)
Equating Equation A–8 and Equation A–9 we obtain
C0Vdc = C1V1 − C2VoutC1 (A–10)
153
Substituting for C1 as C0 + ∆C and V1 as Vdc − VoutC1 in Equation A–10 we obtain
C0Vdc = (C0 + ∆C) V1 − C2VoutC1 . (A–11)
Solving for VoutC1 we obtain
VoutC1 =∆C1
C1 + C2
Vdc. (A–12)
Similarly for VoutC2 we obtain
VoutC2 =∆C2
C1 + C2
Vdc. (A–13)
The total output of the amplifier Vout is the sum of outputs given by Equation A–12 and
Equation A–13,
Vout =∆C1 + ∆C2
C1 + C2
Vdc (A–14)
If the capacitance change ∆C1 and ∆C2 are equal, i.e,
∆C1 = ∆C2 = ∆C (A–15)
and using Equation A–1, in Equation A–14 we obtain
Vout =∆C
C0
Vdc. (A–16)
From the input output relation given by Equation A–16, the electrical sensitivity of the circuit is
given by the equation
Se =Vdc
C0
. (A–17)
A.2 Noise Analysis for a Capacitive Microphone with a Voltage Follower
The complete noise model of the circuit with all the noise generators of the interface circuit
is shown in Figure A-2. The current and voltage noise spectral density (PSD) of the amplifier are
denoted by Sia and Sva respectively. The current and voltage noise PSD Si(f) and Se(f) can be
expressed as a function of the current and voltage noise corner frequency fci and fce by
Se(f) = v2ia(f) = v2
ia
(1 +
fce
f
)(A–18)
Si(f) = i2
ia(f) = i2
ia
(1 +
fci
f
)
154
C2 -+ VoutCLC1 Zi RDCCp Ci Sva SiaSvRFigure A-2. Noise model of dual backplate microphone connected to voltage buffer.
The power spectral density of the noise of the resistor is denoted by SvR. It is given by
SvR = 4kTRdc. (A–19)
The impedance of the parasitic capacitances and sense capacitor denoted by Zi is given by
Zi =1
jω (2C0 + Cp + Ci). (A–20)
We now use superposition to calculate the output voltage noise power spectral density. We
first consider only the noise generator Sva. With only the Sva noise generator, no current flow in
Zi or Rdc. The noise at the output Svo1 is given by
Svo1 = Sva. (A–21)
Next we consider only the noise generator Sia. It can be seen that the total impedance seen by
this noise generator is is the parallel combination of Zi and Rdc. Thus the noise generated at the
output Svo2 is given by
Svo2 = Sia
∣∣∣∣ZiRdc
Zi + Rdc
∣∣∣∣2
. (A–22)
Finally we consider the noise due to the resistor. It can be seen from the circuit that noise due to
the resistor is shaped by the voltage divider consisting of the of Rdc and Zi. Hence the noise at
the output Svo3 due to the resistor is given by
Svo3 = SvR
∣∣∣∣Zi
Zi + Rdc
∣∣∣∣2
. (A–23)
155
Using superposition the power spectral density of the output noise voltage v2no of the circuit is
given by the sum of Equation A–21, Equation A–22, Equation A–23
Svo = Sva + Sia
∣∣∣∣ZiRdc
Zi + Rdc
∣∣∣∣2
+ SvR
∣∣∣∣Zi
Zi + Rdc
∣∣∣∣2
. (A–24)
It should be noted that the noise analysis presented here considers only the noise sources
due to the electrical interface circuit. The thermo-mechanical sources of noise associated with the
sensor itself are not considered in this analysis.
A.3 Derivation of Sensitivity for a Charge Amplifier
The top and bottom plate capacitor is given by
C1 = C0
[1 +
x′
x0
](A–25)
C2 = C0
[1− x′
x0
]
The charge on each capacitor is given by
Q1 = C1Vdc (A–26)
and
Q2 = −C2Vdc
The net charge transferred is given by
∆Q = Q1 + Q2 (A–27)
The output voltage for a charge amplifier is given by
Vout = Cint∆Q (A–28)
Substituting for Q1 and Q2 in Equation A–28 and simplifying
Vout =
[Vdc
Cint
]∆C. (A–29)
From the input-output relationship given by Equation A–29 the electrical sensitivity of the circuit
is given by the equation
Se =2Vdc
Cint
. (A–30)
156
A.4 Noise Analysis for a Capacitive Microphone with a Charge Amplifier
The complete noise model of the circuit with all the noise generators is shown in
Figure A-3. The current and voltage noise power spectral density of the amplifier are denoted by
Sva and Sia respectively. The power spectral density of the current noise of the resistor is denoted
by SiR. It is given by
SiR = 4kT1
Rdc
∆f. (A–31)
The impedance of the parasitic capacitances and sense capacitor which is denoted by Zi is given
by ma
Zi =1
jω (2C0 + Cp + Ci). (A–32)
The impedance of the feedback network denoted by Zf is given by
Zf = Rdc‖ 1
jω Cint
. (A–33)
now use superposition to calculate to the output voltage noise power spectral density. We firstC1 Cp Ci Cint +-RDC VoutCLC2 Zi SiRSva SiaFigure A-3. Noise model of dual backplate microphone connected to charge amplifier.
consider only the noise generator Sva. The noise at the output Svo1 due to Sva noise generator is
given by
Svo1 = Sva
(1 +
Zf
Zi
)2
(A–34)
157
Next we consider only the noise generator Sia. It can be seen that the total impedance seen by
this noise generator is Zf . the noise at the output Svo2 due to Sia noise generator is given by
Svo2 = SiaZ2f . (A–35)
Similarly the output voltage noise due to the resistor current noise, Svo3, is given by the relation
Svo3 = SiaZ2f . (A–36)
Using superposition the power spectral density of the output noise voltage Svo is given by the
sum of Equation A–34, Equation A–35, and Equation A–36 and is given by the expression,
Svo1 = Sva
(Zf
Zi
)2
+ SiaZ2f + SiRZ2
f (A–37)
Since we are interested in the noise PSD after the cut in frequency i.e.,
ω >>1
CintRdc
, (A–38)
Simplifying
SVout = Sva
[1 +
(Ctot
Cint
)]2
+ (Sia + SiR)1
(ωCint)2 . (A–39)
Equation A–39 shows that both the resistor current noise and the amplifier current noise are 1/f 2
shaped.
A.5 Sensitivity for Synchronous Modulation and Demodulation Interface Circuit
In this section the linearized sensitivity of a synchronous modulation and demodulation
based interface circuit is derived. In this technique, the top plate is biased with a a square wave
with 50% duty cycle of amplitude Vac at a frequency of ωc on a dc voltage Vdc. The bottom plate
is biased with signal with the same magnitude as the top plate but 180deg out of phase.
The carrier wave input r(t) to the demodulator also consists of a square wave at a frequency
of ωc but with an amplitude of Vc. The fourier series representation x(t) of a square wave of
amplitude A with 50% duty cycle is given by
x(t) =A
2+
2A
πcos(ωt) +
1
3
2A
πcos(3ωt) +
1
5
2A
πcos(5ωt)... (A–40)
158
To reduce the movement of microphone diaphragm due to the applied AC voltage, Vac is
kept small. Since we are doing a linearized analysis, the higher order harmonics are neglected.
The top plate voltage vtp is given by
vtp(t) = Vdc +Vac
2+
2Vac
πcos(ωct). (A–41)
The carrier wave applied to the demodulator is given by
r(t) =Vc
2+
2Vc
πcos(ωct). (A–42)
The output of the buffer amplifier vmod(t) is given by Equation 3–13 as
vmod(t) =x′
x0
vtp(t). (A–43)
If the input acoustic signal is at a frequency ωm, and the maximum displacement of the
diaphragm is x′0 then
x′ = x′0cos(ωmt). (A–44)
Therefore
vmod(t) =x′0x0
cos(ωmt)vtp(t). (A–45)
Substituting for vtp
vmod(t) =
[x′0x0
cos(ωmt)
]×
[Vdc +
Vac
2+
2Vac
πcos(ωct)
]. (A–46)
Using the trigonometric identity cosAcosB = 1/2(cos(A + B) − cos(A − b)), vmod(t) can be
expressed as
vmod(t) =x′0x0
(Vdc +
Vac
2
)cos(ωmt) (A–47)
+x′0x0
2Vac
πcos(ωm + ωc)t
+x′0x0
2Vac
πcos(ωm − ωc)t
The output of the buffer amplifier vdemod(t) is given by as
vdemod(t) = vmod(t)× r(t). (A–48)
159
Substituting for , vmod(t) and r(t)
vdemod(t) =x′0x0
(Vdc +
Vac
2
)cos(ωmt)×
[Vc
2+
2Vc
πcos(ωct)
](A–49)
+x′0x0
2Vac
πcos(ωm + ωc)t×
[Vc
2+
2Vc
πcos(ωct)
]
+x′0x0
2Vac
πcos(ωm − ωc)t×
[Vc
2+
2Vc
πcos(ωct)
]
(A–50)
Expanding the above equation
vdemod(t) =x′0x0
× (A–51)[(
Vdc +Vac
2
)Vc
2
]cos(ωmt) +
(Vdc +
Vac
2
)cos(ωmt)
2Vc
πcos(ωct) +
2Vac
πcos(ωm + ωc)t
Vc
2+
2Vac
πcos(ωm + ωc)t
2Vc
πcos(ωct)
2Vac
πcos(ωm − ωc)t
Vc
2+
2Vac
πcos(ωm − ωc)t
2Vc
πcos(ωct)
Using trigonometric identity vdemod(t) can be expressed as
vdemod(t) =x′0x0
× (A–52)[(
Vdc + Vac
2
)Vc
2
]cos(ωmt) +
(Vdc + Vac
2
)2Vc
π(((((((((cos(ωm + ωc)t +((((((((
cos(ωm − ωc)t)
+(((((((((((2Vac
πcos(ωm + ωc)t
Vc
2+ 2Vac
π2Vc
π12[cos(ωm)t +((((((((
cos(ωm + 2ωc)t]
+(((((((((((2Vac
πcos(ωm + ωc)t
Vc
2+ 2Vac
π2Vc
π12[((((((((cos(ωm − 2ωc)t + cos(ωm)t]
The low pass filtered signal vout(t) can be expressed as
vout(t) =x′0x0
× (A–53)[(
Vdc + Vac
2
)Vc
2
]cos(ωmt)
+2Vac
π2Vc
π12[cos(ωm)t]
+2Vac
π2Vc
π12[cos(ωm)t]
160
which reduces to
vout(t) =x′0x0
×[(
Vdc +Vac
2
)Vc
2cos(ωmt) +
2Vac
π
2Vc
π[cos(ωm)t]
](A–54)
Substituting for x′0cos(ωm)t as x′ we obtain
vout(t) =x′
x0
×[(
Vdc +Vac
2
)Vc
2+
2Vac
π
2Vc
π
](A–55)
The linearized sensitivity of this interface technique is
vout(t)
x′=
1
x0
×[(
Vdc +Vac
2
)Vc
2+
2Vac
π
2Vc
π
](A–56)
161
APPENDIX B
B.1 Bandwidth Considerations for Amplifiers in Switched Capacitor Amplifiers
This derivation is based on the work presented in Wongkomet’s doctoral dissertation [108].
The time constant τ of a single pole amplifier is related to its closed loop bandwidth fu by the
relation
fu =1
2πτ. (B–1)
Let the number of time constants required for the amplifier to settle be denoted by nτ , sampling
frequency by fs and the fraction of time spent in the amplify phase by m(< 1). The time
available for the switched capacitor amplifier to settle is thus m× 1
fs
. The time required for the
amplifier to settle within a given error criteria is nτ × τ . For example, for 0.1% settling, nτ must
be equal to seven. Equating the time required and time available for settling, we obtain
m× 1
fs
= nτ × τ (B–2)
Substituting for τ and rearranging the equation, we obtain
fu =1
2π
[m
nτfs
]−1
(B–3)
B.2 Analysis of Noise in a Switched Capacitor Amplifier
This derivation is based on the work presented in Wongkomet’s doctoral dissertation [108].
The noise model of the amplifier during the amplification phase is shown in Figure B-1C1=C0C2=C0 -CgainCreset-CgainCreset+V+
CL Voutv2nCp 4kTRonRonFigure B-1. Noise model of switched capacitor amplifier during amplify phase.
162
The noise of the amplifier is modeled as a wide band white noise v2n at the inverting terminal
of the amplifier. The total capacitance at the input of the amplifier is given by
CT = 2C0 + Cp + Cgain. (B–4)
We shall now derive the total noise at the output due to kT/C noise and due to the wideband
amplifier noise.
B.2.1 Switch Resistance Noise
In this section the total output noise due to the on resistance of the switches is derived.
When the switches are closed, the noise due to on resistance of the switches is low pass filtered
by the total capacitance CT
v2kT/Cinput
=kT
CT
. (B–5)
Referring this noise to the output by multiplying the previous equation by the square of the gain
we obtain the total output kT/C noise The total noise at the output of the amplifier is given by
v2kT/C =
[CT
Cgain
]2kT
CT
. (B–6)
B.2.2 Wideband Amplifier Noise
In this section the total output noise due to the wideband amplifier noise is presented. The
noise at the input of the amplifier is
v2opampinput
= v2n. (B–7)
The total output noise voltage is
v2opamp =
∫ ∞
0
[CT
Cgain
]2
v2ndf. (B–8)
For a single pole system, the equivalent noise bandwidth is π/2 times the bandwidth[79].
Therefore the total output noise for an amplifier with a closed loop bandwidth of fu
v2opamp =
[CT
Cgain
]2
v2nfu
π
2. (B–9)
163
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BIOGRAPHICAL SKETCH
Karthik Kadirvel was in Chennai, Tamil Nadu, India. He moved to the United Arab
Emirates in 1989 and graduated from Our Own English High School in Dubai, United Arab
Emirates in 1996. He went back to India for his Bachelors degree and obtained his Bachelor of
Engineering degree specializing in Electronics and Instrumentation from Annamalai University,
Tamil Nadu, India in May 2000. He obtained his Master’s degree at the University of Florida in
2002. His thesis was on the design and characterization of a MEMS optical microphone. He is
currently pursuing his doctoral degree at Interdisciplinary Microsystem Group at the University
of Florida.
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