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MEMS and Matlab Metrology

MetroloGT for Matlab – Joe CeremugaMetroloGT++ – Austin Chen

2-D Edge Inspection with Matlab – Meghan Shilling

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MetroloGT Toolbox for Matlab

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Purpose

Input 2-D and 3-D coordinate point cloudsAllow the user to manipulate the point cloudFit primitive shapes to the dataAnalyze fit and then refine the data for further fitting

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Procedure

part is manufactured

inspection

point cloud

select/loadpoints initial guess minimize

Software

shapeparameters

fit analysis

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Software Layout

Fit Parametersand

Options

Post-ProcessWindow

Point CloudEditor

FitResults

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Features

Point Cloud Editor

SelectionBox

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Features

Initial Guessing (Bounding box)

BoundingBox

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Features

Fit Analysis

Histogram

Standard Deviationof Errors

Mean of Errors

Optimized FitParameters

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Features

N-Sigma eliminationPoint

EliminationInfo

N-SigmaAdjustment

Control

Points Eliminated(red)

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Features

Quantile-Quantile (QQ) Plotting

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Features

Cloud options– Multiple clouds per session

Load (2-D, 3-D, Veeco ™ format)Create (Editor and N-Sigma)EraseSave

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MetroloGT++

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MetroloGT++

shape parameters

outputwindow

visualizationwindow

histogram

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1) start

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2) load and select points

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3a) initial guess

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3b) minimum bounding box (hidden)

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4) fit primitive

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2-D Edge Detection

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Two Dimensional Analysis

Fit two dimensional data to lines, circles and ellipsesIf data was taken from the surface of an object, edges need to be found

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Edge Location

Filtering

Edge Point Location: Sweeping

Edge Point Location: Contour Tracking

Edge Detection

Binarization

Edge Analysis

Image Creation

Thresholding

Filtering

Edge Point Location: Sweeping

Edge Point Location: Contour Tracking

Edge Detection

Binarization

Edge Analysis

Image Creation

Thresholding

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Initial Point Cloud

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Filtered Image

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Edges from Edge Detector

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Resulting Edge Points