Introduction to MEMS and MEMS PRO

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Introduction to MEMS and MEMS PRO simulating tool

Text of Introduction to MEMS and MEMS PRO

  • 1. MEMS & MEMS PROPresenter: Abdelrahman Samy El-Tamawy
  • 2. AGENDA MEMS Overview Modeling and Simulating MEMS Finite Element Method MEMS PRO Tool
  • 3. MEMS OVERVIEWDefinition Micro Systems Electro Mechanical
  • 4. MEMS OVERVIEW Size
  • 5. MEMS OVERVIEWAPPLICATIONS Biotechnology Vehicles Smart devices Printers Projectors
  • 6. MEMS OVERVIEWAPPLICATIONS Vehicles VIDEO
  • 7. MEMS OVERVIEWFABRICATION MATERIAL Silicon Polymers Metals Ceramic
  • 8. MEMS OVERVIEWFABRICATION PROCESS Deposition Lithography Etching
  • 9. MEMS OVERVIEWFABRICATION PROCESS
  • 10. MODELING AND SIMULATING MEMS Real experiments cost Physical model Mathematical models numerical models FEM (Finite Element Method) BEM (Boundary Element Method)
  • 11. MODELING AND SIMULATING MEMSFINITE ELEMENT METHOD Approximate solution Dividing Simpler approximation Global approximate solution Tools (COMSOL/ANSYS)
  • 12. MEMS PRO
  • 13. MEMS PROWHAT IS MEMS PRO Set of CAD tools Allow data sharing Design and Analysis 3D model generation Powerful optimization algorithms For MEMS and IC devices
  • 14. MEMS PROMODELING TOOLS Behavioral model from FEA Different formats 3D Modeling w.r.t Fab sequence Cross section viewer
  • 15. MEMS PROS-EDIT (SCHEMATIC-EDIT) Cell view Symbol Mode Schematic Mode Objects Primitives Instance
  • 16. MEMS PROS-EDIT
  • 17. MEMS PROS-EDIT Mechanical elements
  • 18. MEMS PROS-EDIT Optical elements
  • 19. MEMS PROW-EDIT (WAVE-EDIT) Functionality Tracing specific node Collapsing charts
  • 20. MEMS PROW-EDIT
  • 21. MEMS PROL-EDIT (LAYOUT-EDIT) Functionality Library Palette
  • 22. MEMS PROL-EDIT Library palette
  • 23. MEMS PROL-EDIT Plate Comb drive
  • 24. MEMS PROL-EDIT
  • 25. MEMS PROL-EDIT Technology manager
  • 26. MEMS PROL-EDIT 2D/3D Model view
  • 27. MEMS PROL-EDIT 2D/3D Model view
  • 28. MEMS PROL-EDIT Running simulation
  • 29. MEMS PRODESIGN RULE CHECKER Layout vs. Fabrication Flexible DRC
  • 30. MEMS PRODRC Complete set of DRC
  • 31. MEMS PRODRC Specific DRC command
  • 32. MEMS PRODRC Min Distance Min Overlap Min spacing Min surround
  • 33. MEMS PRODRC Run Verification Error Navigator
  • 34. MEMS PRODRC Current distance: 2um. Rule distance: > 4um.
  • 35. MEMS PROOPTIMIZATION
  • 36. MEMS PROEXPORTING MODEL
  • 37. MEMS PROWHAT NEXT? Analysis (FEM BEM) Pre-Fabrication Fabrication
  • 38. MEMS PROANSYS
  • 39. MEMS PRO ENDNEXT: ANSYS TOOL WITH IBRAHIM AWAD

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