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BIOMEMS

MEMS for biomedical applications

Guided by: Presented by:Prof. R. M. Patrikar Prachi Gadge

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What is MEMS?? Micro-Electro-Mechanical Systems (MEMS) Also known as Micro Systems Technology (MST) MEMS are made up of components between 1 to 100 micrometres in size (i.e. 0.001 to 0.1 mm) Integration of mechanical elements, sensors,

actuators, and electronics on a common silicon substrate through microfabrication technology.

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Biomems

Biomedical or Biological Micro Electromechanical Systems.

These are MEMS for biomedical applications

Heavily researched area with a wide variety of important biomedical applications.

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Definition

‘‘Devices or systems, constructed using techniques inspired from micro/nano-scale fabrication, that are used for processing, delivery, manipulation, analysis, or construction of biological and chemical entities’’.

-Bashir, Purdue univ, 2004

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Challenges for using biomems

Biocompatibility : suitability with living system should be analysed.

Testing : real life testing can’t be done without permission of government authorities

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Biomems fabrication

Conventional IC processes and materials.

Additional processes and materials used in MEMS

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Conventional IC processes

Photolithography Thermal oxidation, dopant diffusion

ion implantation LPCVD, PECVD Evaporation, sputtering, wet etching, Plasma etching, reactive-ion etching, ion milling

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Conventional materials.

Silicon silicon dioxide silicon nitride aluminum

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Additional Fabrication Processes

Anisotropic wet etching of single-crystal silicon; deep reactive-ion etching or DRIE x-ray lithography Electroplating low-stress LPCVD films thick-film resist (SU-8) spin casting and micromolding batch microassembly

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Additional Materials

Piezoelectric films such as PZT; Magnetic films such as Ni, Fe, Co, and rare

earth alloys High temperature materials such as SiC and

ceramics; Mechanically robust aluminum alloys; stainless Steel; platinum; gold; sheet glass; Plastics such as PVC and PDMS

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MEMS Integration

The following methods are used to integrate multiple patterned materials together to fabricate a completed MEMS device:

1. Surface micromachining

2. Bulk micromachining

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Surface Micromachining

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Bulk Micromachining

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Biomedical Microsensors

The majority of MEMS used in biomedical

applications act as sensors:

– Microsensors for Biomechanics – Microsensors for Pneumatic Biosystems– Microsensors for Chemical Biosystems– Microsensors for Electrical Biosystems

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Biomedical Microactuators

Micromanipulators Surgical Microinstruments Micropumps Microneedles Microvalves Microfilters

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Micromanipulators

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Surgical Microinstruments

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Microneedles

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Microvalves

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Micropumps

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Microfilters

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Future Directions

Integrated device for analysis of single cells.

Building cell by cell/tissue engineering using micro and nano fabrication techniques

Integrated diagnostics and therapeutics (drug delivery)

Tools for genetic manipulation of microorganisms and viruses – synthetic biology

Thank you!!

Questions???