The Role of Technology Clusters in the Successful Commercialization of MEMS

© 2006 ROGER GRACE ASSOCIATES

Technology Clusters and Their Role in the Technology Clusters and Their Role in the Development of the Micro and Nanosystems Development of the Micro and Nanosystems IndustryIndustry

33rdrd. Ibero American. Ibero AmericanMEMS ConferenceMEMS ConferencePuebla, MexicoPuebla, MexicoOctober 1-4, 2006October 1-4, 2006

Roger H. GraceRoger H. Grace

President, Roger Grace AssociatesPresident, Roger Grace Associates

Past President, Co-Founder, Past President, Co-Founder, Micro and Nanotechnology Micro and Nanotechnology Commercialization Education Commercialization Education Foundation (MANCEF)Foundation (MANCEF)


OutlineOutline

DefinitionDefinition BenefitsBenefits Requisite ConstituentsRequisite Constituents Industry Situational AnalysisIndustry Situational Analysis Technology Cluster OverviewTechnology Cluster Overview Summary of Microsystems ClustersSummary of Microsystems Clusters Critical Success FactorsCritical Success Factors Summary/ConclusionSummary/Conclusion The Mexican MEMS Cluster…RecommendationsThe Mexican MEMS Cluster…Recommendations Case StudiesCase Studies


Roger Grace Associates BackgroundRoger Grace Associates Background

Founded in 1982Founded in 1982 Focus on semiconductors, sensors, Focus on semiconductors, sensors, microsystems, microsystems, semiconductor capital equipmentsemiconductor capital equipment Expertise in strategic marketingExpertise in strategic marketing market researchmarket research product planningproduct planning company positioningcompany positioning brandingbranding


DefinitionDefinition

A cluster is:A cluster is:

a geographical concentration of firms, supplies a geographical concentration of firms, supplies and related industries and specialized and related industries and specialized institutions that occur in a particular field in a institutions that occur in a particular field in a nation, state, city (or region).nation, state, city (or region). (Ref: M. Porter, On Competition)(Ref: M. Porter, On Competition)


Cluster BenefitsCluster Benefits

Enhance the competitive stature of the region and the Enhance the competitive stature of the region and the organizations withinorganizations within

Help create an environment that will foster economic growth in Help create an environment that will foster economic growth in the regionthe region

Create jobs vis-à-vis startups and increased business at existing Create jobs vis-à-vis startups and increased business at existing organizationsorganizations

Create an enhanced tax baseCreate an enhanced tax base Retain existing employeesRetain existing employees Attract qualified employees from other regionsAttract qualified employees from other regions


Requisite ConstituentsRequisite Constituents

For a successful technology cluster, all three of For a successful technology cluster, all three of the following must exist:the following must exist:

Intellectual propertyIntellectual property Universities and research labs patentsUniversities and research labs patents Individual know how of designs and processesIndividual know how of designs and processes

InfrastructureInfrastructure Fab facilities (from R&D through production)Fab facilities (from R&D through production) People (engineers, technicians, production, marketing/sales, finance, People (engineers, technicians, production, marketing/sales, finance,

administration, consultants)administration, consultants) Suppliers (services and materials)Suppliers (services and materials)

FinancingFinancing VCsVCs Angel InvestorsAngel Investors Industrial PartnersIndustrial Partners State/local/federal government tax incentives and/or grantsState/local/federal government tax incentives and/or grants


Industry Situational AnalysisIndustry Situational Analysis

Over 35 MNT clusters exist worldwide, all with a fabOver 35 MNT clusters exist worldwide, all with a fab

Some have a technology focus e.g. Michigan-bioSome have a technology focus e.g. Michigan-bio

Over 60 silicon foundries worldwide with more to comeOver 60 silicon foundries worldwide with more to come

Large volume production requirements are limited due to Large volume production requirements are limited due to limited number of “killer applications”limited number of “killer applications”

Significant need for low-cost manufacture favors AsiaSignificant need for low-cost manufacture favors Asia

Packaging and testing (P&T) are major cost factors in MSTPackaging and testing (P&T) are major cost factors in MST

Limited expertise exists in P&T vs. wafer fabrication due to Limited expertise exists in P&T vs. wafer fabrication due to similarity/dissimilarity of MST vs. Semiconductor technologysimilarity/dissimilarity of MST vs. Semiconductor technology

P&T can be a product competitive advantageP&T can be a product competitive advantage

Nanotechnology is the new tech “darling”…especially in public Nanotechnology is the new tech “darling”…especially in public fundingfunding


Technology Cluster OverviewTechnology Cluster Overview

Technology Clusters have been around since the late fifties in Technology Clusters have been around since the late fifties in Silicon Valley and Boston Route 128Silicon Valley and Boston Route 128

Technology clusters were formed in these areas largely Technology clusters were formed in these areas largely because because

The IP of Stanford (Silicon Valley) and MIT (Boston Route 128)The IP of Stanford (Silicon Valley) and MIT (Boston Route 128)

Silicon Valley and Boston Route 128 companies had no Silicon Valley and Boston Route 128 companies had no “formal”“formal”

federal or state funding other than through military contracts federal or state funding other than through military contracts (Ref: A. Saxenian, Regional Advantage) (Ref: A. Saxenian, Regional Advantage)

The first MEMS/Microsystems cluster was formed in 1989 in The first MEMS/Microsystems cluster was formed in 1989 in Dortmund, Germany. Steag Micropacts and HK PlanertechnikDortmund, Germany. Steag Micropacts and HK Planertechnik were successful startups created by thiswere successful startups created by this

continuedcontinued


Technology Cluster Overview, Technology Cluster Overview, continuedcontinued

Although a number of US states have attempted to create Although a number of US states have attempted to create MEMS/Microsystems/Nano clusters over the past five years, MEMS/Microsystems/Nano clusters over the past five years, only a few have succeeded to date:only a few have succeeded to date:

New YorkNew York WashingtonWashington DortmundDortmund

Other states/countries are currently attempting to develop Other states/countries are currently attempting to develop MEMS/Microsystems /Nano clusters but it is premature to judge MEMS/Microsystems /Nano clusters but it is premature to judge their level of successtheir level of success

FloridaFlorida GeorgiaGeorgia TexasTexas Four Corners (New Mexico, Colorado, Utah, Arizona)Four Corners (New Mexico, Colorado, Utah, Arizona) New JerseyNew Jersey MichiganMichigan CaliforniaCalifornia Amazon BrazilAmazon Brazil MexicoMexico


Summary of Microsystems Clusters Summary of Microsystems Clusters (Partial List)(Partial List)

MINATEC - Grenoble, FranceMINATEC - Grenoble, France Dortmund - GermanyDortmund - Germany Bremen - GermanyBremen - Germany Thuringia - GermanyThuringia - Germany Rheinland Palatinate - GermanyRheinland Palatinate - Germany Aachen - GermanyJena - GermanyAachen - GermanyJena - Germany Leuven - BelgiumLeuven - Belgium Neuchatel - SwitzerlandNeuchatel - Switzerland Lausanne - SwitzerlandLausanne - Switzerland Twente - NetherlandsTwente - Netherlands Gothenberg – SwedenGothenberg – Sweden Hsinchu, TaiwanHsinchu, Taiwan Amazon, BrazilAmazon, Brazil MexicoMexico ItalyItaly Victoria, AustraliaVictoria, Australia KoreaKorea

SUNY - Albany, New YorkSUNY - Albany, New York Washington StateWashington State 4 - corners4 - corners California - NanotechnologyCalifornia - Nanotechnology FloridaFlorida TexasTexas New JerseyNew Jersey MichiganMichigan Glennan – OhioGlennan – Ohio GeorgiaGeorgia


Critical Success FactorsCritical Success Factors

Sufficient regional/national government funding commitment Sufficient regional/national government funding commitment over timeover time

Product offering(s) must be unique and differentiated to create Product offering(s) must be unique and differentiated to create a market positiona market position

There must be a market needThere must be a market need

Promotion is a critical item-must develop and integrated Promotion is a critical item-must develop and integrated strategy/position/brandstrategy/position/brand

Scotland-Silicon Glen (Semiconductors)Scotland-Silicon Glen (Semiconductors) Albany-Nanotechnology,300mm/ConferenceAlbany-Nanotechnology,300mm/Conference Michigan-bio/Ad programMichigan-bio/Ad program IVAM-Dortmund/Integrated programIVAM-Dortmund/Integrated program

Need “flagship” organization to join cluster as “anchor”;Marks Need “flagship” organization to join cluster as “anchor”;Marks and Spencer , Saks …at the local mall analogyand Spencer , Saks …at the local mall analogy

Need attraction for people/organizations to commit vs. “build it Need attraction for people/organizations to commit vs. “build it and they shall come”and they shall come”


Critical Success Factors,continuedCritical Success Factors,continued

Significant drawing factors include:Significant drawing factors include: tax incentivestax incentives educated and skilled labor pooleducated and skilled labor pool quality of life of regionquality of life of region

Educating the current/future work force is imperativeEducating the current/future work force is imperative Michigan WIMS/NSF K-12 programMichigan WIMS/NSF K-12 program

Current and near-term economic issuesCurrent and near-term economic issues Venture CapitalVenture Capital CorporationsCorporations Private Investors (angels)Private Investors (angels)


Summary/ConclusionsSummary/Conclusions

Clusters have had an important role in the creation of the Clusters have had an important role in the creation of the microsystems industry since the first cluster in Dortmund, microsystems industry since the first cluster in Dortmund, Germany in 1989Germany in 1989

Clusters tend to emerge from R&D-centric regions, vis-à-vis, Clusters tend to emerge from R&D-centric regions, vis-à-vis, universities and/or research labsuniversities and/or research labs

Clusters provide many financial and market competitive Clusters provide many financial and market competitive advantagesadvantages

Microsystems/Nanosystems clusters are proliferating - Microsystems/Nanosystems clusters are proliferating - approximately 35 worldwide to date with Nanotechnology approximately 35 worldwide to date with Nanotechnology Clusters dominating recentlyClusters dominating recently

Over 100 companies and thousands of high skill jobs have been Over 100 companies and thousands of high skill jobs have been created thus farcreated thus far


..

TRADITIONAL COMMERCIAL TRADITIONAL COMMERCIAL CLUSTERSCLUSTERS


Champagne France…ChampagneChampagne France…Champagne

Resources: exceptional climate, chalky soil create Resources: exceptional climate, chalky soil create great chardonnay and pinot noir grapesgreat chardonnay and pinot noir grapes

Infrastructure:Infrastructure: many processing facilities to many processing facilities to create and store wine, wine making knowledge create and store wine, wine making knowledge traditionally passed down; transportation system traditionally passed down; transportation system to deliver grapes to the wineriesto deliver grapes to the wineries

Funding: self Funding: self funded and funded and large large company buy outscompany buy outs


Talavera Ornamental Pottery-Puebla, Talavera Ornamental Pottery-Puebla, MexicoMexico

Originated in mid 16 th. Originated in mid 16 th. Century by Dominican Century by Dominican priests who emigrated priests who emigrated from Spain and brought from Spain and brought the artthe art

Resources: two types of Resources: two types of clay nearby, large labor clay nearby, large labor poolpool

Infrastructure: over 150 Infrastructure: over 150 companies currently companies currently producing, 7 “certified”producing, 7 “certified”

Funding: R C Church Funding: R C Church “seed funds”“seed funds”


““MEMS” Cluster in Puebla…1565 MEMS” Cluster in Puebla…1565 A.D.???A.D.???

There is a shocking similarity to the processing of There is a shocking similarity to the processing of silicon wafers and the creation of Talevera silicon wafers and the creation of Talevera pottery…could it be that a MEMS Cluster has been pottery…could it be that a MEMS Cluster has been alive and well in Puebla since the mid 16alive and well in Puebla since the mid 16thth. . Century?Century?

MEMSMEMS TaleveraTalevera

OriginatedOriginated 19551955 1616thth. Century. CenturyBase material Sand (Silicon)Base material Sand (Silicon) ClayClayFormationFormation Hand/machineHand/machine Chem./gas etching,Chem./gas etching,

molding/spinningmolding/spinning depositiondepositionPatterningPatterning paper templatepaper template photo masksphoto masksSurfaceSurface high temp glazinghigh temp glazingannealing,oxidationannealing,oxidationStabilationStabilationStandards Standards limited numberlimited number extensiveextensive


Mexican MEMS Cluster Mexican MEMS Cluster RecommendationsRecommendations

Great progress has been made over the past three Great progress has been made over the past three years: years:

in expanding MEMS teaching in Mexican in expanding MEMS teaching in Mexican Univ.Univ.

creation of a s moderate budgetcreation of a s moderate budgetcreation of the Northern Mexico MEMS creation of the Northern Mexico MEMS

PackagingPackagingClusterCluster

Need to take one step at a time and build up Need to take one step at a time and build up infrastructure infrastructure (labs) for device development in conjunction with (labs) for device development in conjunction with establishingestablishing

packaging/interconnect/testing capabilitiespackaging/interconnect/testing capabilitiesMEMS-based module developmentMEMS-based module development

Ing. Humberto Rebolledo Diaz approach…build Ing. Humberto Rebolledo Diaz approach…build systems/buy parts to minmize time to profitsystems/buy parts to minmize time to profitInvestigate alternative cluster opportunites Investigate alternative cluster opportunites including “Micromanufacturing” e.g. precision including “Micromanufacturing” e.g. precision injection molding, LIGA, nanoimprint lithographyinjection molding, LIGA, nanoimprint lithographyPlan and execute major marketing outreach Plan and execute major marketing outreach program to enhance awareness in the market for program to enhance awareness in the market for investors in Mexico MEMS…trade shows, PR, investors in Mexico MEMS…trade shows, PR, advertisingadvertising


Case Studies of Current Case Studies of Current MEMS/Microsystems /Nanotechnology MEMS/Microsystems /Nanotechnology Cluster Activities in U.S. and EuropeCluster Activities in U.S. and Europe


IVAM/Dortmund, GermanyIVAM/Dortmund, Germany

FoundedFounded 19891989

Number of EmployeesNumber of Employees 11 (IVAM) There are approximately 1200 people employed in the 13 11 (IVAM) There are approximately 1200 people employed in the 13

participating companies in the Dortmund Microsystems Regional Cluster.participating companies in the Dortmund Microsystems Regional Cluster.

Technical FocusTechnical Focus Microsystem desices, software, packagingMicrosystem desices, software, packaging

Mission PlanMission Plan To commercialize microsystem-based products and services of its member To commercialize microsystem-based products and services of its member

organizations by building a bridge between suppliers and industry users organizations by building a bridge between suppliers and industry users using marketing and publics relations tacticsusing marketing and publics relations tactics

continuedcontinued


IVAM/Dortmund, Germany, IVAM/Dortmund, Germany, continuedcontinued

Number of Jobs CreatedNumber of Jobs Created

12001200

FundingFunding Funded by Ministry of Labor and Technology North Rhine, WesphaliaFunded by Ministry of Labor and Technology North Rhine, Wesphalia

Number of Companies CatalyzedNumber of Companies Catalyzed 13; most significant are: 13; most significant are:

Steag Microparts - medical devices (nebulator) and gas chromatographSteag Microparts - medical devices (nebulator) and gas chromatograph

ETR - air quality sensingETR - air quality sensing

H.L. Planartechnik - tilt sensors, humidity sensors, pressure sensors, H.L. Planartechnik - tilt sensors, humidity sensors, pressure sensors,

accelerometersaccelerometers

continuedcontinued


IVAM/Dortmund, Germany, IVAM/Dortmund, Germany, continuedcontinued

Membership Fees/DuesMembership Fees/Dues Annual turnover 50,000 Euros, fee 500 EurosAnnual turnover 50,000 Euros, fee 500 Euros Annual turnover 100,000 Euros, fee 2,000 EurosAnnual turnover 100,000 Euros, fee 2,000 Euros

Wafer CapabilityWafer Capability Raithg, Micropacts and H.L. Planartechnik have their own clean rooms, a Raithg, Micropacts and H.L. Planartechnik have their own clean rooms, a

common clean room is shared by all 13 participating companiescommon clean room is shared by all 13 participating companies

WebsiteWebsite www.ivamnrw.comwww.ivamnrw.com

Additional CommentsAdditional Comments The organization IVAM provides marketing and public relations services to The organization IVAM provides marketing and public relations services to

the Dortmund Microsystem Cluster of 13 companies plus supports a number the Dortmund Microsystem Cluster of 13 companies plus supports a number of other German regional clusters (Bremen, Thuringla, Rhineland Palatinate). of other German regional clusters (Bremen, Thuringla, Rhineland Palatinate). There are 85 companies that are affiliated with IVAM and 30 membersThere are 85 companies that are affiliated with IVAM and 30 members

Publishes “INNO” magazine on a quarterly basis with circulation of 6,000 in Publishes “INNO” magazine on a quarterly basis with circulation of 6,000 in Germany, Switzerland, Netherlands, Austria (e-mail newsletter)Germany, Switzerland, Netherlands, Austria (e-mail newsletter)


University at Albany’s College of University at Albany’s College of Nanoscale Science and EngineeringNanoscale Science and Engineering

Total Space at CNSE’s Albany NanoTech complexTotal Space at CNSE’s Albany NanoTech complex 470,000 square feet (current)470,000 square feet (current) 720,000 square feet (2008)720,000 square feet (2008)

Total AssetsTotal Assets More than $3 billionMore than $3 billion

Number of Global Corporate PartnersNumber of Global Corporate Partners More than 250More than 250

Facilities/CapabilityFacilities/Capability 71,000 square feet cleanroom class 100 or better (current)71,000 square feet cleanroom class 100 or better (current) 86,000 square feet cleanroom class 100 or better (2008)86,000 square feet cleanroom class 100 or better (2008)

Technical FocusTechnical Focus Opto, bio, fluidics - MEMSOpto, bio, fluidics - MEMS Nanotechnology materialsNanotechnology materials Metrology semiconductor processingMetrology semiconductor processing Interconnects, stacked IcsInterconnects, stacked Ics

continuedcontinued


University at Albany’s College of Nanoscale University at Albany’s College of Nanoscale Science and EngineeringScience and Engineering.. continued.. continued

Mission PlanMission Plan To create a global powerhouse for research, development, workforce education and economic To create a global powerhouse for research, development, workforce education and economic

outreach in nanotechnology and nanotechnology-enabled high-tech industries of the 21st outreach in nanotechnology and nanotechnology-enabled high-tech industries of the 21st century century

On-site job growthOn-site job growth 2002- 1082002- 108 2003- 1602003- 160 2004- 5002004- 500 2005- 7002005- 700 2006- 13502006- 1350 2008 (projected)- 20002008 (projected)- 2000

Funding to dateFunding to date State funding: $675MState funding: $675M Federal funding: $30 MFederal funding: $30 M Industry funding: $2.5BIndustry funding: $2.5B

College of Nanoscale Science and EngineeringCollege of Nanoscale Science and Engineering Founded in 2004 as world’s first college devoted to nanotechnologyFounded in 2004 as world’s first college devoted to nanotechnology 4 Constellations: Nanoscience, Nanoengineering, Nanoeconomics, Nanobioscience4 Constellations: Nanoscience, Nanoengineering, Nanoeconomics, Nanobioscience 35 professors35 professors 125 students 125 students Named nation’s number one college for nanotechnology by Small Times magazine (May 2006)Named nation’s number one college for nanotechnology by Small Times magazine (May 2006)

continuedcontinued


University at Albany’s College of Nanoscale University at Albany’s College of Nanoscale Science and Engineering Science and Engineering .. continued.. continued

Member Fees/DuesMember Fees/Dues NoneNone

Wafer CapabilityWafer Capability 200 MM200 MM 300 MM300 MM


MichiganMichigan

Michigan has a strong IP position vis-à-vis universities UM is Michigan has a strong IP position vis-à-vis universities UM is considered one of the top five MEMS/MST research universities considered one of the top five MEMS/MST research universities in the USin the US

Peer reviewed papers per yearPeer reviewed papers per year Total number of enrolled graduate students in MEMSTotal number of enrolled graduate students in MEMS Quality of teaching/research staff/industry reputationQuality of teaching/research staff/industry reputation Annual R&D contract dollarsAnnual R&D contract dollars

Michigan State and Wayne State have demonstrated Michigan State and Wayne State have demonstrated competencies in MEMS materials (diamond, aluminum nitrite)competencies in MEMS materials (diamond, aluminum nitrite)

Small number of Michigan MEMS/MST companies to dateSmall number of Michigan MEMS/MST companies to date Dexter ResearchDexter Research IssysIssys Handy LabHandy Lab SensicoreSensicore DisceraDiscera Advanced Sensor TechnologyAdvanced Sensor Technology

continuedcontinued


Michigan, continuedMichigan, continued

Commercial manufacturing infrastructure available through Commercial manufacturing infrastructure available through IssysIssys

Early VC/financial support (Ardesta)Early VC/financial support (Ardesta)

New fab at Wayne State (June 2002) may provide well needed New fab at Wayne State (June 2002) may provide well needed R&D/prototype/production capabilityR&D/prototype/production capability

Extensive University of Michigan R&D facilitiesExtensive University of Michigan R&D facilities

Creation of Wireless Integrated Microsystems (WIMS) facilityCreation of Wireless Integrated Microsystems (WIMS) facility

Major support of media promotional programs and regional Major support of media promotional programs and regional organizations…Small Times, Business Weekorganizations…Small Times, Business Week


Washington Technology Center Washington Technology Center (WTC)(WTC)


Number of EmployeesNumber of Employees 2525

Number of Current ClientsNumber of Current Clients 17 companies17 companies 39 university research groups39 university research groups 160 total registered users (University of Washington)160 total registered users (University of Washington)

Facilities/CapabilitiesFacilities/Capabilities 14,400 square feet total14,400 square feet total 8,000 square feet of class 10,000 or better8,000 square feet of class 10,000 or better Surface and bulk micromachining capability, DRIE machineSurface and bulk micromachining capability, DRIE machine

continuedcontinued


Washington Technology Center (WTC),Washington Technology Center (WTC), continuedcontinued

Technical FocusTechnical Focus Silicon nitrideSilicon nitride Photonics MEMS/MicrosystemsPhotonics MEMS/Microsystems Bio MEMS/MicrosystemsBio MEMS/Microsystems

Mission PlanMission Plan To positively affect the creation and retention of jobs in Washington-based To positively affect the creation and retention of jobs in Washington-based

companies by increasing the effectiveness and ability of those companies to companies by increasing the effectiveness and ability of those companies to adopt and deploy technology that leverages the investment made in research adopt and deploy technology that leverages the investment made in research at the state universitiesat the state universities

To support research at the state’s two research universities (University of To support research at the state’s two research universities (University of Washington, Washington State University) as well as at the three regional Washington, Washington State University) as well as at the three regional universityies (Eastern, Western and Central Washington Universities)universityies (Eastern, Western and Central Washington Universities)

Number of Jobs CreatedNumber of Jobs Created 50-7550-75

continuedcontinued


Washington Technology Center (WTC), Washington Technology Center (WTC), continuedcontinued

Companies CatalyzedCompanies Catalyzed Micronics - light photonicsMicronics - light photonics Neah Power - MesosystemsNeah Power - Mesosystems NuElement - MEMSTekNuElement - MEMSTek

Also, facilities have been used by numerous local companies including Also, facilities have been used by numerous local companies including Microvision, Honeywell/Allied Signal, Eldec, AculightMicrovision, Honeywell/Allied Signal, Eldec, Aculight

Membership Fees/DuesMembership Fees/Dues Each individual user is charged at a $125.00 per hour rateEach individual user is charged at a $125.00 per hour rate

Wafer Capability…4’ and 6”Wafer Capability…4’ and 6”

Funding…$6.5 million 19995-1999Funding…$6.5 million 19995-1999

continuedcontinued


Washington Technology Center (WTC), Washington Technology Center (WTC), continuedcontinued

WebsiteWebsite http://www.watechcenter.orghttp://www.watechcenter.org

Additional CommentsAdditional Comments WTC provides a quarterly newsletter and conducts yearly WTC provides a quarterly newsletter and conducts yearly

MEMS/Microsystems all-day conferenceMEMS/Microsystems all-day conference


MINATEC (Grenoble, France)MINATEC (Grenoble, France)

FoundedFounded 2000 (Although CEA/LETI, the “father of MINATEC” was started in 1967)2000 (Although CEA/LETI, the “father of MINATEC” was started in 1967)

Number of EmployeesNumber of Employees 10 (MINATEC)10 (MINATEC) 700 (CEA/LETI)700 (CEA/LETI)

Number of Current ClientsNumber of Current Clients None (MINATEC)None (MINATEC) 300 (CEA/LETI)300 (CEA/LETI)

Facilities/CapabilitiesFacilities/Capabilities None as of yet, planned facilities include:None as of yet, planned facilities include:

A large campus of 120,000 square meters is planned for completion by A large campus of 120,000 square meters is planned for completion by

the end of 2003the end of 2003

continuedcontinued


MINATEC (Grenoble, France), MINATEC (Grenoble, France), continuedcontinued

Technical FocusTechnical Focus Multidisciplinary approach to creating biochips, microsystems for medical Multidisciplinary approach to creating biochips, microsystems for medical

applications, medical imaging; hardware/software integration, communication applications, medical imaging; hardware/software integration, communication systems; nanotech materials; polymer science, nanomagnetism; electron systems; nanotech materials; polymer science, nanomagnetism; electron microscopymicroscopy

Mission PlanMission Plan To create a central organization for the design, development and To create a central organization for the design, development and

commercialization of a broad spectrum of micro and nano technologies commercialization of a broad spectrum of micro and nano technologies through an integrated approach and education, research and industrial through an integrated approach and education, research and industrial transfertransfer

Number of Jobs (to be) CreatedNumber of Jobs (to be) Created Approximately 3,500 at full capacityApproximately 3,500 at full capacity

Two engineering schoolsTwo engineering schools

Joint laboratoriesJoint laboratories

continuedcontinued



FundingFundingCity of GrenobleCity of Grenoble

French DepartmentFrench Department

Regional Government… Regional Government… 50 - 60M Euros ($45.4 - $54.5M 50 - 60M Euros ($45.4 - $54.5M U.S.)U.S.)

CEA (French Government…CEA (French Government… 25 - 40M Euros ($22.7 - $36.4M U.S.)25 - 40M Euros ($22.7 - $36.4M U.S.)

VC, Industry, Private Funds… VC, Industry, Private Funds… 50M Euros ($45.4M U.S.)50M Euros ($45.4M U.S.)

No direct European Community fundingNo direct European Community funding Over the past 20 years, 1.3B FF ($186M U.S.) have been invested in CEA/LETI Over the past 20 years, 1.3B FF ($186M U.S.) have been invested in CEA/LETI

by the French Governmentby the French Government

Membership FeesMembership Fees MINATEC created companies will provide equity to the MINATEC organizationMINATEC created companies will provide equity to the MINATEC organization

Wafer CapabilityWafer Capability CEA/LETI has 200 MM (8”) wafersCEA/LETI has 200 MM (8”) wafers

continuedcontinued



Companies Catalyzed (CEA/LETI)Companies Catalyzed (CEA/LETI) 23 including:23 including:

STMicroelectronic - integrated circuitsSTMicroelectronic - integrated circuits

SOITECH - silicon-on-insulator wafersSOITECH - silicon-on-insulator wafers

Tronics - pressure sensorsTronics - pressure sensors

PHS MEMS - photonic and R.F. MEMS/MicrosystemsPHS MEMS - photonic and R.F. MEMS/Microsystems

MEMSCAP - MEMS software, photonic and R.F. MEMSMEMSCAP - MEMS software, photonic and R.F. MEMS


Glennan Microsystems Initiative - Glennan Microsystems Initiative - OhioOhio


Objective Objective Provide for reseach, development and commercialization of silicon carbide-Provide for reseach, development and commercialization of silicon carbide-

based technology for NASA and the merchant market communitybased technology for NASA and the merchant market community

Number of Current ClientsNumber of Current Clients 2222

Facilities/CapabilityFacilities/Capability NASANASA

4,000 square feet of class 1000 or better4,000 square feet of class 1000 or better

2” silicon carbine wafer capability bulk micromachining process, DRIE machine2” silicon carbine wafer capability bulk micromachining process, DRIE machine

continuedcontinued


Glennan Microsystems Initiative - Glennan Microsystems Initiative - Ohio.. Ohio.. continuedcontinued

Microfabrication Lab (at Case Western Reserve)Microfabrication Lab (at Case Western Reserve) 5,000 square feet of class 100 or better5,000 square feet of class 100 or better 4” and 6” silicon wafer capability 4” and 6” silicon wafer capability 4” silicon carbide4” silicon carbide Surface micromachining processSurface micromachining process Bulk micromaching process capability planning to be installedBulk micromaching process capability planning to be installed Semiconductor electronics capability used for prototyping onlySemiconductor electronics capability used for prototyping only

Technical FocusTechnical Focus Silicon carbide material-based sensors for extreme environment applications Silicon carbide material-based sensors for extreme environment applications

(e.g. media, temperature)(e.g. media, temperature) Availability of “MUSIC” (multi-user silicon carbide) process in August, 2001 Availability of “MUSIC” (multi-user silicon carbide) process in August, 2001

(similar to “MUMPS”)(similar to “MUMPS”)

Provides convenient and cost-effective means to develop silicon carbide-based Provides convenient and cost-effective means to develop silicon carbide-based

products to the merchant marketproducts to the merchant market

First run December 17, 2001First run December 17, 2001

12 designs for 12 different companies12 designs for 12 different companies

continuedcontinued


Glennan Microsystems Initiative - Ohio.. Glennan Microsystems Initiative - Ohio.. continuedcontinued

Mission PlanMission Plan To be the leading provider of NASA and CASE developed silicon carbide-To be the leading provider of NASA and CASE developed silicon carbide-

based technology to NASA and to the commercial market and to help based technology to NASA and to the commercial market and to help accelerate the development of silicon carbide sensors and electronic for accelerate the development of silicon carbide sensors and electronic for extreme environmentsextreme environments

Long-term vision is to create a volume production facility, however at this Long-term vision is to create a volume production facility, however at this time a detailed plan has not been developed.time a detailed plan has not been developed.

FundingFunding1998 $1.5M1998 $1.5M 2001 $4.3M2001 $4.3M

1999 $4.2M1999 $4.2M 2002 $3.8M2002 $3.8M

2000 $5.0M2000 $5.0M

NASA’s contribution was $16.5MNASA’s contribution was $16.5M

State of Ohio contribution was $4.8MState of Ohio contribution was $4.8M

Companies CatalyzedCompanies Catalyzed Orbital - high temperature pressue sensorsOrbital - high temperature pressue sensors Movaz - optical MEMS componentsMovaz - optical MEMS components Fiberlead - optical MEMS packagingFiberlead - optical MEMS packaging Makel - chemical sensorsMakel - chemical sensors

continuedcontinued


Membership Fees/DuesMembership Fees/Dues $25K for large companies (SBA definition)$25K for large companies (SBA definition) $2.5K for not large companies$2.5K for not large companies

Additional CommentsAdditional Comments Nine Sigma responsible and under contract for administering the MUSIC Nine Sigma responsible and under contract for administering the MUSIC

programprogram

Glennan Microsystems Initiative - Ohio.. Glennan Microsystems Initiative - Ohio.. continuedcontinued


..

THANK YOU / MUCHAS THANK YOU / MUCHAS GRACIASGRACIAS


For More InformationFor More Information

Copies of the entire Power Point can be obtained Copies of the entire Power Point can be obtained by visitingby visiting……www.rgrace.com/pueblaclusters2006www.rgrace.com/pueblaclusters2006

Please feel free to contact me by emailPlease feel free to contact me by email……[email protected]@rgrace.com

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The Role of Technology Clusters in the Successful Commercialization of MEMS