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TEI of Piraeus – Dept. of Electronics Eng. Sensors & Optoelectronics Group & IMEL Collaboration in SENSORS-I Pressure Sensor Fabrication – Read-out Electronics f x,r Frequency out C x Capacitive sensing element C r Reference capacitor V c Control signal which switches between C x and C r

TEI of Piraeus – Dept. of Electronics Eng

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TEI of Piraeus – Dept. of Electronics Eng. Sensors & Optoelectronics Group & IMEL Collaboration in SENSORS-I. Pressure Sensor Fabrication – Read-out Electronics. TEI of Piraeus – Dept. of Electronics Eng. Sensors & Optoelectronics Group & IMEL Collaboration in SENSORS-II. - PowerPoint PPT Presentation

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Page 1: TEI of Piraeus –  Dept. of Electronics Eng

TEI of Piraeus – Dept. of Electronics Eng.Sensors & Optoelectronics Group & IMEL

Collaboration in SENSORS-IPressure Sensor Fabrication – Read-out Electronics

fx,r Frequency outCx Capacitive sensing element Cr Reference capacitorVc Control signal which switches between Cx and Cr

Vh Hysterisis of the Schmitt trigger

Page 2: TEI of Piraeus –  Dept. of Electronics Eng

TEI of Piraeus – Dept. of Electronics Eng.Sensors & Optoelectronics Group & IMEL

Collaboration in SENSORS-IIChemical Sensors – Electronic ‘nose’

Development of Methodology, Development of electric characterization station, Sensor fabrication, Development of Read-out electronics, Sensor packaging, Sensor optimization and characterization

Fabrication on Si SubstrateFabrication on Quartz SubstrateSchematic

(interacting electrodes)

Page 3: TEI of Piraeus –  Dept. of Electronics Eng

TEI of Piraeus – Dept. of Electronics Eng.Sensors & Optoelectronics Group & IMEL

Collaboration in SENSORS-IIChemical Sensors – Electronic ‘nose’

Sensor characterization station (diagram)

Page 4: TEI of Piraeus –  Dept. of Electronics Eng

TEI of Piraeus – Dept. of Electronics Eng.Sensors & Optoelectronics Group & IMEL

Collaboration in SENSORS-IIChemical Sensors – Electronic ‘nose’

Sensor characterization station (actual)

Page 5: TEI of Piraeus –  Dept. of Electronics Eng

CAV 414 AD7708

Sensor Array

Flow in

Sensors & Optoelectronics Group & IMELCollaboration in SENSORS-II

Chemical Sensors – Electronic ‘nose’The Read-out Electronic station developed

TEI of Piraeus – Dept. of Electronics Eng.

CAV 414

AD7708

Page 6: TEI of Piraeus –  Dept. of Electronics Eng

TEI of Piraeus – Dept. of Electronics Eng.Sensors & Optoelectronics Group & IMEL

Collaboration in SENSORS-IIIAcceleration Sensors

100 μm100 μm100 μm

Acceleration directionPorous Silicon

Silicon

HeaterThermopiles

Development of Methodology and Electric Characterization Station,

Sensor Packaging, Development of Read-out

Electronics,Sensor Optimization and

characterization

Page 7: TEI of Piraeus –  Dept. of Electronics Eng

TEI of Piraeus – Dept. of Electronics Eng.Sensors & Optoelectronics Group & IMEL

Collaboration in SENSORS-IIIAcceleration Sensors

Electronics for the Accelerometer Control System

Sensor

Heater

S1S2

D

Multiplexer

DAC16-bit

IN-AMP

Low Noise OP-AMP

Low-PassPassive Filter

Rs

IN-AMP

Low-PassButterworth Filter

ADC16-bit

1.6Mhz Clock

R2R1

SP

I

UA

RT

DATA ACQUISITION CIRCUIT

CONTROL & SUPPLY CIRCUIT

SERIALCOMMUNICATION

Optocoupler

Micro-controller

Thermopiles

Page 8: TEI of Piraeus –  Dept. of Electronics Eng

TEI of Piraeus – Dept. of Electronics Eng.Sensors & Optoelectronics Group & IMEL

Collaboration in SENSORS-IIIAcceleration Sensors

Accelerometer characterization station I : 2-200 Hz (Electromagnetic)

Page 9: TEI of Piraeus –  Dept. of Electronics Eng

TEI of Piraeus – Dept. of Electronics Eng.Sensors & Optoelectronics Group & IMEL

Collaboration in SENSORS-IIIAcceleration Sensors

Accelerometer characterization station II : 0-5 Hz (Electromechanical)

Motion PlatformDC Motor

Motor Controller Manual control

Encoder

Page 10: TEI of Piraeus –  Dept. of Electronics Eng

TEI of Piraeus – Dept. of Electronics Eng.Sensors & Optoelectronics Group & IMEL

Future research plans Design and development of

station for sensors measurement, for research and for student training,

Design and development of sensor read-out electronics based on commercially available devices, such as AD7755, FPGA (digital & mixed signal)

Use of micro-controllers for the development of applications such as RFIDs

Further development of sensor networks for telemetry / telecontrol / environmental monitoring applications

Development of autonomous systems