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Stefano Lagomarsino

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Simulazione 1-dimensionale a elementi finiti del riscaldamento dell’interfaccia diamante-silicio in esperimenti di laser-bonding. Stefano Lagomarsino. a-Si. p-SiC. Al momento è stato sviluppato un modello quantitativo del danneggiamento. Diamond. Silicon. - PowerPoint PPT Presentation

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  • Simulazione 1-dimensionale a elementi finiti del riscaldamento dellinterfaccia diamante-silicio in esperimenti di laser-bondingStefano Lagomarsino

  • Si voluto eseguire uno studio della dinamica del trasferimento di energia e delle trasformazioni di fase allinterfaccia Diamante-Silicio, al duplice scopo di:Comprendere le caratteristiche del legame Carbonio-SilicioMettere in relazione lo spessore dello strato danneggiato con le caratteristiche del fascioAl momento stato sviluppato un modello quantitativo del danneggiamentoDiamondSiliconChe servir come base per lo studio della dinamica della formazione del SiCRassegna dei fenomeni che intervengono allinterfaccia fra Diamante e SilicioModello numericoRisultati delle simulazioni.

  • Linteresse per gli effetti di un rapido riscaldamento del silicio da parte di un laser impulsato datano dalla seconda met degli anni 70*:c-SiG.A. Kachurin et al. Fiz. Tekh. Poluprov. 9 (1975) 1429cit. in P.Baeri, E. Rimini Materials chemistry and physics 46 (1996) 169Q-switched ruby laser=694nm10ns Alternative: dopante depositato in superficie, impiantato nel monoscristallo400nmVariet di tecniche sperimentali time resolved per lo studio del processo:Riflettivit e trasmittanzaRaman scatteringX-ray Bragg scatteringTOF velocity distribution of evaporated atomsRassegna fenomeni

  • Alcune di queste tecniche fornivano risultati ambigui* D. Von der Linde, N.Fabricius Appl. Phys. Lett. 41 (1982) 991*Rassegna fenomeni

    Grafico2

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    0.3178389756

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    0.8718070172

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    0.8725213043

    0.8726620469

    0.8727605809

    0.8728201752

    0.8728437653

    0.8728339951

    0.872793253

    0.8727237024

    0.8726273079

    0.8725058582

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    0.8688872884

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    0.8621819918

    0.8617093923

    0.8612320118

    0.8607500429

    0.8602636686

    0.8597730632

    0.8592783925

    freq plasma/freq radiaz.

    riflectivity

    Foglio1

    gammankR

    01.700.0672153635n01.7

    0.021.69988234890.00011764710.0671986292alpha0.02

    0.041.69952934660.00023529410.0671484229

    0.061.69894084670.00035294120.0670647353

    0.081.69811660420.00047058820.0669475503

    0.11.69705627590.00058823530.0667968458

    0.121.6957594190.00070588240.0666125936

    0.141.69422549070.00082352940.0663947594

    0.161.69245384660.00094117650.066143303

    0.181.69044373960.00105882350.0658581788

    0.21.68819431820.00117647060.0655393355

    0.221.68570462490.00129411760.065186717

    0.241.68297359370.00141176470.0648002623

    0.261.68000004820.00152941180.0643799061

    0.281.67678269870.00164705880.063925579

    0.31.67332013950.00176470590.0634372084

    0.321.66961084570.00188235290.0629147186

    0.341.66565316970.0020.0623580319

    0.361.66144533720.00211764710.061767069

    0.381.65698544330.00223529410.0611417499

    0.41.6522714480.00235294120.0604819948

    0.421.64730117060.00247058820.0597877252

    0.441.64207228530.00258823530.0590588652

    0.461.63658231440.00270588240.0582953424

    0.481.63082862250.00282352940.0574970899

    0.51.62480840950.00294117650.0566640475

    0.521.61851870270.00305882350.0557961639

    0.541.61195634940.00317647060.0548933986

    0.561.60511800720.00329411760.0539557244

    0.581.5980001350.00341176470.0529831302

    0.61.59059898230.00352941180.0519756238

    0.621.58291057780.00364705880.0509332355

    0.641.57493071720.00376470590.0498560218

    0.661.56665494950.00388235290.0487440701

    0.681.55807856270.0040.0475975033

    0.71.54919656730.00411764710.0464164859

    0.721.5400036790.00423529410.04520123

    0.741.53049429980.00435294120.043952003

    0.761.52066249620.00447058820.0426691355

    0.781.51050197720.00458823530.0413530314

    0.81.50000606810.00470588240.0400041782

    0.821.48916768290.00482352940.0386231599

    0.841.47797929350.00494117650.0372106711

    0.861.46643289560.00505882350.0357675334

    0.881.4545199710.00517647060.0342947148

    0.91.44223144560.00529411760.0327933511

    0.921.42955764310.00541176470.0312647714

    0.941.41648823230.00552941180.0297105279

    0.961.40301216960.00564705880.0281324298

    0.981.38911763350.00576470590.0265325833

    11.3747919510.00588235290.0249134388

    1.021.36002151480.0060.0232778457

    1.041.34479168940.00611764710.0216291171

    1.061.32908670480.00623529410.0199711067

    1.081.31288953430.00635294120.0183083

    1.11.29618175590.00647058820.0166459223

    1.121.27894339150.00658823530.0149900695

    1.141.26115272280.00670588240.0133478638

    1.161.24278607580.00682352940.0117276431

    1.181.22381757130.00694117650.0101391911

    1.21.20421883090.00705882350.008594018

    1.221.18395863090.00717647060.0071057067

    1.241.16300249080.00729411760.0056903408

    1.261.14131218190.00741176470.0043670394

    1.281.11884513540.00752941180.0031586289

    1.31.09555372350.00764705880.0020924952

    1.321.0713843790.00776470590.0012016752

    1.341.04627650640.00788235290.0005262679

    1.361.02016112150.0080.00011528

    1.380.99295913080.00811764710.0000290714

    1.40.96457912690.00823529410.0003426378

    1.420.93491452430.00835294120.0011500887

    1.440.90383977610.00847058820.0025708602

    1.460.87120528380.00858823530.0047585086

    1.480.8368304060.00870588240.0079134371

    1.50.80049362290.00882352940.0123017986

    1.520.76191831080.00894117650.0182844272

    1.540.72075148910.00905882350.0263627177

    1.560.67653083230.00917647060.0372545275

    1.580.62863106670.00929411760.0520263664

    1.60.57617196190.00941176470.0723387165

    1.620.51784972750.00952941180.1009391812

    1.640.45160488810.00964705880.1427596586

    1.660.37393901530.00976470590.2076739717

    1.680.27898828970.00988235290.3178389756

    1.70.170.010.5032870709

    1.720.1049764330.01011764710.6561180647

    1.740.0797934120.01023529410.7262799183

    1.760.06725600650.01035294120.7638363856

    1.780.05966861930.01047058820.7874684385

    1.80.05453478750.01058823530.8038591679

    1.820.05081098720.01070588240.8159552911

    1.840.04798037740.01082352940.8252685718

    1.860.04575559770.01094117650.8326613382

    1.880.04396303010.01105882350.8386649829

    1.90.04249101570.01117647060.8436267192

    1.920.04126416480.01129411760.8477840667

    1.940.04022955570.01141176470.8513056096

    1.960.03934883660.01152941180.8543146835

    1.980.03859346690.01164705880.8569038338

    20.03794172420.01176470590.8591440097

    2.020.03737675480.01188235290.861090617

    2.040.03688526150.0120.8627876219

    2.060.03645659960.01211764710.8642704067

    2.080.03608213640.01223529410.8655678013

    2.10.03575479060.01235294120.8667035575

    2.120.03546869370.01247058820.8676974386

    2.140.03521893690.01258823530.8685660362

    2.160.03500137960.01270588240.8693233926

    2.180.03481250290.01282352940.8699814801

    2.20.03464929510.01294117650.8705505751

    2.220.03450916240.01305882350.8710395532

    2.240.03438985740.01317647060.8714561234

    2.260.03428942260.01329411760.8718070172

    2.280.03420614430.01341176470.872098141

    2.30.03413851540.01352941180.8723347007

    2.320.03408520430.01364705880.8725213043

    2.340.03404503030.01376470590.8726620469

    2.360.0340169420.01388235290.8727605809

    2.380.0340.0140.8728201752

    2.40.03399336230.01411764710.8728437653

    2.420.03399627150.01423529410.8728339951

    2.440.03400804460.01435294120.872793253

    2.460.03402806380.01447058820.8727237024

    2.480.03405576880.01458823530.8726273079

    2.50.03409065010.01470588240.8725058582

    2.520.03413224350.01482352940.8723609855

    2.540.03418012480.01494117650.8721941825

    2.560.03423390590.01505882350.8720068172

    2.580.03429323060.01517647060.871800146

    2.60.03435777150.01529411760.8715753247

    2.620.03442722740.01541176470.8713334189

    2.640.03450132010.01552941180.8710754126

    2.660.03457979270.01564705880.8708022158

    2.680.03466240740.01576470590.8705146717

    2.70.03474894360.01588235290.8702135628

    2.720.03483919680.0160.8698996161

    2.740.03493297650.01611764710.8695735082

    2.760.03503010560.01623529410.8692358695

    2.780.03513041870.01635294120.8688872884

    2.80.03523376160.01647058820.8685283147

    2.820.03533999010.01658823530.8681594623

    2.840.03544896920.01670588240.867781213

    2.860.03556057250.01682352940.8673940183

    2.880.03567468140.01694117650.8669983019

    2.90.03579118440.01705882350.866594462

    2.920.03590997690.01717647060.8661828733

    2.940.03603096030.01729411760.8657638885

    2.960.03615404180.01741176470.8653378398

    2.980.0362791340.01752941180.8649050409

    30.03640615430.01764705880.8644657879

    3.020.03653502460.01776470590.8640203604

    3.040.03666567130.01788235290.8635690231

    3.060.03679802470.0180.8631120264

    3.080.03693201860.01811764710.8626496077

    3.10.03706759050.01823529410.8621819918

    3.120.03720468110.01835294120.8617093923

    3.140.0373432340.01847058820.8612320118

    3.160.03748319570.01858823530.8607500429

    3.180.03762451530.01870588240.8602636686

    3.20.03776714460.01882352940.8597730632

    3.220.03791103750.01894117650.8592783925

    Foglio1

    freq plasma/freq radiaz.

    riflectivity

    Foglio2

    Foglio3

  • Il complesso dei dati fa propendere per una combinazione di questi fenomeni:TfusTnxxQuando per il materiale arriva alla temperatura di fusione, la lunghezza di diffusione del plasma diminuisce drasticamente ed il riscaldamento avviene sostanzialmente in uno spessore pari alla lunghezza di assorbimento (metallo liquido)Allinizio dellirraggiamento viene creato un plasma di elettroni e lacune che diffonde nel materiale e rilascia energia al reticolo con una costante di tempo 1ps, ma su una distanza molto maggiore della lunghezza di penetrazione della radiazione.Rassegna fenomeni

  • La comprensione di ci che accade nelle fasi successive stata approfondita in studi di laser ablation del Silicio** J.H. Yoo et al. Appl. Phys. Lett. 76 (2000) 783 J.H. Yoo et al. Journ. Appl. Phys. 78 (2000) 1638Un ruolo chiave, in questo tipo di studi, stato svolto dallipotesi della trasparenza indottaRassegna fenomeni

  • un fenomeno predetto teoricamente gi dal Landau nel 45*, rivelato nel mercurio nel 67**, comune presumibilmente a tutti i metalli liquidi***, compreso il silicio.*cit in V.A. Batanov et al. Sov. Phys. JEPT 30 (1973) 311** I.K. Kikoin, P.P. Senchenckov, cit da Batanov (prec.).***Stepan N Andreev et al 2003 Quantum Electron. 33 771-776 Si tratta di un fenomeno per il quale la variazione di densit di un metallo nei pressi della temperatura critica determina un abbassamento della sua conducibilit (e quindi dellassorbanza) di vari ordini di grandezza.Si forma nel liquido un fronte di trasparenza che determina lavanzamento del fronte di fusione senza incrementare ulteriormente la temperatura del liquido dielettrico.********J.H. Yoo et al. Journ. Appl. Phys. 78 (2000) 1638Rassegna fenomeni

  • Terminata la fase di riscaldamento il silicio ritorna a temperatura ambiente in un tempo che dipende strettamente dai gradienti termici instaurati durante la prima fase.La fase del silicio risolidificato dipende strettamente dalla velocit del fronte di ricristallizzazione** P.Baeri, E. Rimini Materials chemistry and physics 46 (1996) 169DiamondSiliconRassegna fenomeni

  • 0.05 GPa0.08 GPa5000 K300 KIl modello numerico deve quindi descrivere i fenomeni pi importanti che hanno luogo durante le quattro fasi attraversate dal sistema:Fase del plasmaFase del liquido metallicoFase del liquido dielettricoFase di raffreddamentoModello numerico

  • * A. Lietoila, J. F. Gibbons J. Appl. Phys. 53 (1982) 3207** D. Agassi J. Appl. Phys. 55 (1984) 4376Modello numerico

  • T=TfusT>TfusModello numerico

  • Modello numerico

    Grafico1

    0.6171102367

    0.6312905047

    0.6362874209

    0.6338335627

    0.6264569482

    0.6165584636

    0.6059730627

    0.5958897154

    0.5869539937

    0.5794243521

    0.5733159632

    0.568509611

    0.5648250548

    0.5620661642

    0.5600461973

    0.5586001629

    0.5575893055

    0.5569010945

    0.556446884

    0.5561585667

    0.555984994

    0.5558885861

    0.5558423368

    0.5558272875

    0.5558304701

    0.5558432794

    0.5558602164

    0.5558779406

    0.5558945701

    0.5559091767

    0.5559214301

    0.5559313528

    0.5559391573

    0.555945141

    0.5559496216

    0.5559529009

    0.5559552461

    0.5559568824

    0.5559579931

    0.5559587229

    0.5559591831

    0.5559594574

    0.5559596071

    0.5559596762

    0.5559596957

    0.5559596865

    0.5559596626

    0.5559596326

    0.555959602

    0.5559595737

    0.555959549

    0.5559595284

    0.5559595119

    0.5559594989

    0.555959489

    0.5559594816

    0.5559594762

    0.5559594724

    0.5559594697

    0.5559594679

    0.5559594667

    0.555959466

    0.5559594656

    0.5559594653

    0.5559594652

    0.5559594652

    0.5559594652

    0.5559594653

    0.5559594653

    0.5559594654

    0.5559594654

    0.5559594655

    0.5559594655

    0.5559594655

    0.5559594655

    0.5559594656

    0.5559594656

    0.5559594656

    0.5559594656

    0.5559594656

    0.5559594656

    0.5559594656

    0.5559594656

    0.5559594656

    0.5559594656

    0.5559594656

    0.5559594656

    0.5559594656

    0.5559594656

    0.5559594656

    0.5559594656

    0.5559594656

    0.5559594656

    0.5559594656

    0.5559594656

    0.5559594656

    0.5559594656

    spessore strato (cm)

    R

    Foglio1

    n_eff2.132.37

    n_dia2.41

    k_eff4.31

    n_vuoto1

    T_room

    refl_dia_si0.4760294684refl_dia_si0.1667844041

    refl_vuoto_si0.6997145173refl_vuoto_si0.4888178914

    refl_dia_vuoto0.1709737618refl_dia_vuoto0.1709737618

    refl eff0.5656146813refl eff0.309242409

    T_fus

    refl_dia_si0.5408586186

    refl_vuoto_si0.7681304177

    refl_dia_vuoto0.1709737618

    refl eff0.6193597478

    melted

    refl_dia_si0.4760294684

    refl_vuoto_si0.6997145173

    refl_dia_vuoto0.1709737618

    refl eff0.5656146813

    Foglio2

    Re(nS+nM)Im(nS+nM)Delta xreFImFRe 1/Fim 1/FRe Num1Im Num1Re Num2Im Num2Re NumIm NumRe Den1Im Den1Re Den2Im Den2Re DenIm Denriflrifl eff

    x7.3311.471.00E-079.26E-013.49E-021.08E+00-4.07E-025.54E+01-3.13E+01-9.47E-01-2.46E+015.44E+01-5.59E+01-1.30E+019.23E+01-1.29E+011.07E+01-2.60E+011.03E+025.39E-010.61711023675.29E-01d1.00E-06

    Re(nM-nS)Im(nM-nS)3.00E-077.90E-018.98E-021.25E+00-1.42E-016.16E+01-4.12E+017.81E-01-2.11E+016.24E+01-6.23E+01-7.02E+001.08E+02-1.18E+018.34E+00-1.88E+011.17E+025.56E-010.63129050474.05E-016.26E-01

    -3.07-2.855.00E-076.71E-011.28E-011.44E+00-2.74E-016.79E+01-5.32E+012.04E+00-1.80E+017.00E+01-7.13E+011.36E+001.27E+02-1.06E+016.38E+00-9.25E+001.33E+025.62E-010.63628742093.00E-01a0.06

    Re(nD+nM)Im(nD+nM)7.00E-075.66E-011.53E-011.65E+00-4.45E-017.42E+01-6.78E+012.91E+00-1.53E+017.71E+01-8.31E+011.27E+011.47E+02-9.50E+004.78E+003.18E+001.52E+025.59E-010.63383356272.66E-01b2.30E+05

    xx4.664.319.00E-074.75E-011.68E-011.87E+00-6.61E-018.03E+01-8.52E+013.48E+00-1.29E+018.37E+01-9.81E+012.76E+011.69E+02-8.44E+003.48E+001.92E+011.73E+025.50E-010.62645694823.22E-01alpha1.60E+06

    Re(nD-nM)Im(nD-nM)1.10E-063.95E-011.74E-012.12E+00-9.32E-018.57E+01-1.06E+023.82E+00-1.08E+018.96E+01-1.17E+024.69E+011.94E+02-7.45E+002.43E+003.95E+011.97E+025.38E-010.61655846364.37E-01

    x0.4-4.311.30E-063.27E-011.75E-012.38E+00-1.27E+009.03E+01-1.31E+023.97E+00-9.03E+009.43E+01-1.40E+027.16E+012.22E+02-6.53E+001.60E+006.50E+012.23E+025.25E-010.60597306275.57E-01A0.5

    1.50E-062.69E-011.71E-012.65E+00-1.68E+009.34E+01-1.60E+023.98E+00-7.47E+009.74E+01-1.67E+021.03E+022.51E+02-5.70E+009.46E-019.69E+012.52E+025.13E-010.59588971546.47E-01B0.235

    1.70E-062.19E-011.63E-012.93E+00-2.19E+009.45E+01-1.94E+023.89E+00-6.14E+009.84E+01-2.00E+021.41E+022.83E+02-4.94E+004.41E-011.36E+022.83E+025.02E-010.58695399377.00E-01C-0.5

    1.90E-061.77E-011.54E-013.21E+00-2.80E+009.27E+01-2.33E+023.73E+00-5.01E+009.65E+01-2.38E+021.89E+023.16E+02-4.26E+005.84E-021.85E+023.16E+024.93E-010.57942435217.26E-01lambda2.95E-06

    re nDim nD2.10E-061.42E-011.43E-013.49E+00-3.53E+008.73E+01-2.79E+023.51E+00-4.04E+009.08E+01-2.83E+022.47E+023.50E+02-3.65E+00-2.25E-012.43E+023.50E+024.86E-010.57331596327.35E-01z02.15E-06

    2.532.30E-061.12E-011.32E-013.74E+00-4.41E+007.69E+01-3.32E+023.27E+00-3.23E+008.01E+01-3.35E+023.18E+023.85E+02-3.11E+00-4.29E-013.15E+023.85E+024.80E-010.5685096117.32E-01

    re nMIm nM2.50E-068.73E-021.20E-013.96E+00-5.45E+006.02E+01-3.92E+023.01E+00-2.56E+006.32E+01-3.95E+024.03E+024.20E+02-2.63E+00-5.68E-014.00E+024.19E+024.76E-010.56482505487.16E-01

    2.134.312.70E-066.70E-021.09E-014.12E+00-6.67E+003.55E+01-4.61E+022.74E+00-1.99E+003.82E+01-4.63E+025.05E+024.52E+02-2.22E+00-6.56E-015.02E+024.52E+024.72E-010.56206616426.78E-01

    re nSIm nS2.90E-065.03E-029.72E-024.20E+00-8.11E+007.64E-01-5.38E+022.48E+00-1.53E+003.24E+00-5.40E+026.26E+024.81E+02-1.86E+00-7.05E-016.24E+024.80E+024.70E-010.56004619736.07E-010.47

    5.27.163.10E-063.68E-028.65E-024.16E+00-9.79E+00-4.63E+01-6.25E+022.22E+00-1.15E+00-4.41E+01-6.26E+027.69E+025.04E+02-1.54E+00-7.24E-017.68E+025.03E+024.68E-010.55860016294.99E-012.77E-01

    3.30E-062.59E-027.64E-023.98E+00-1.17E+01-1.09E+02-7.22E+021.97E+00-8.41E-01-1.07E+02-7.23E+029.38E+025.18E+02-1.27E+00-7.19E-019.36E+025.17E+024.67E-010.55758930553.75E-01

    k01.77E+053.50E-061.72E-026.71E-023.59E+00-1.40E+01-1.90E+02-8.29E+021.74E+00-5.92E-01-1.88E+02-8.30E+021.13E+035.19E+02-1.04E+00-6.98E-011.13E+035.18E+024.66E-010.55690109452.83E-01

    lambda3.55E-053.70E-061.04E-025.85E-022.94E+00-1.66E+01-2.93E+02-9.47E+021.53E+00-3.94E-01-2.91E+02-9.47E+021.36E+035.03E+02-8.48E-01-6.65E-011.36E+035.03E+024.66E-010.5564468842.72E-0128

    3.90E-065.12E-035.08E-021.97E+00-1.95E+01-4.23E+02-1.07E+031.34E+00-2.39E-01-4.22E+02-1.07E+031.63E+034.65E+02-6.83E-01-6.24E-011.63E+034.64E+024.65E-010.55615856673.47E-01

    4.10E-061.10E-034.38E-025.73E-01-2.28E+01-5.86E+02-1.21E+031.16E+00-1.18E-01-5.85E+02-1.21E+031.93E+033.97E+02-5.45E-01-5.79E-011.93E+033.97E+024.65E-010.5559849944.68E-01

    re nDim nD4.30E-06-1.89E-033.76E-02-1.34E+00-2.65E+01-7.87E+02-1.35E+031.00E+00-2.59E-02-7.86E+02-1.35E+032.28E+032.92E+02-4.29E-01-5.31E-012.28E+032.91E+024.65E-010.55588858615.83E-01

    2.534.50E-06-4.05E-033.20E-02-3.88E+00-3.07E+01-1.03E+03-1.50E+038.58E-014.25E-02-1.03E+03-1.50E+032.67E+031.39E+02-3.33E-01-4.82E-012.67E+031.39E+024.65E-010.55584233686.64E-01

    re nMIm nM4.70E-06-5.54E-032.72E-02-7.20E+00-3.53E+01-1.33E+03-1.66E+037.32E-019.19E-02-1.33E+03-1.66E+033.12E+03-7.26E+01-2.54E-01-4.34E-013.12E+03-7.31E+014.65E-010.55582728757.09E-01

    2.134.314.90E-06-6.50E-032.29E-02-1.15E+01-4.04E+01-1.69E+03-1.81E+036.20E-011.26E-01-1.69E+03-1.81E+033.61E+03-3.58E+02-1.89E-01-3.88E-013.61E+03-3.58E+024.65E-010.55583047017.29E-01

    re nSIm nS5.10E-06-7.04E-031.92E-02-1.69E+01-4.59E+01-2.12E+03-1.95E+035.23E-011.48E-01-2.12E+03-1.95E+034.16E+03-7.32E+02-1.37E-01-3.44E-014.16E+03-7.33E+024.65E-010.55584327947.35E-01

    5.27.165.30E-06-7.27E-031.60E-02-2.36E+01-5.19E+01-2.64E+03-2.08E+034.38E-011.60E-01-2.64E+03-2.08E+034.77E+03-1.22E+03-9.48E-02-3.04E-014.77E+03-1.22E+034.65E-010.55586021647.29E-01

    5.50E-06-7.26E-031.32E-02-3.20E+01-5.82E+01-3.25E+03-2.18E+033.65E-011.66E-01-3.25E+03-2.18E+035.44E+03-1.83E+03-6.16E-02-2.66E-015.44E+03-1.83E+034.65E-010.55587794067.09E-01

    k01.77E+055.70E-06-7.07E-031.08E-02-4.23E+01-6.48E+01-3.96E+03-2.25E+033.01E-011.65E-01-3.96E+03-2.25E+036.15E+03-2.60E+03-3.55E-02-2.32E-016.15E+03-2.60E+034.65E-010.55589457016.64E-01

    lambda3.55E-055.90E-06-6.75E-038.81E-03-5.48E+01-7.15E+01-4.80E+03-2.27E+032.47E-011.61E-01-4.80E+03-2.27E+036.92E+03-3.56E+03-1.54E-02-2.01E-016.92E+03-3.56E+034.65E-010.55590917675.83E-01

    6.10E-06-6.35E-037.11E-03-6.99E+01-7.83E+01-5.77E+03-2.21E+032.01E-011.54E-01-5.77E+03-2.21E+037.72E+03-4.75E+03-1.99E-04-1.73E-017.72E+03-4.75E+034.65E-010.55592143014.68E-01

    re nDim nD6.30E-06-5.89E-035.68E-03-8.80E+01-8.48E+01-6.90E+03-2.06E+031.62E-011.45E-01-6.90E+03-2.06E+038.55E+03-6.19E+031.10E-02-1.48E-018.55E+03-6.19E+034.65E-010.55593135283.47E-01

    2.536.50E-06-5.41E-034.48E-03-1.10E+02-9.07E+01-8.20E+03-1.79E+031.30E-011.34E-01-8.19E+03-1.79E+039.39E+03-7.94E+031.90E-02-1.26E-019.39E+03-7.94E+034.65E-010.55593915732.72E-01

    re nMIm nM6.70E-06-4.92E-033.48E-03-1.35E+02-9.58E+01-9.68E+03-1.36E+031.02E-011.23E-01-9.68E+03-1.36E+031.02E+04-1.00E+042.44E-02-1.07E-011.02E+04-1.00E+044.65E-010.5559451412.83E-01

    606.90E-06-4.44E-032.66E-03-1.66E+02-9.94E+01-1.14E+04-7.31E+027.96E-021.12E-01-1.14E+04-7.31E+021.10E+04-1.26E+042.78E-02-8.97E-021.10E+04-1.26E+044.65E-010.55594962163.75E-01

    re nSIm nS7.10E-06-3.97E-031.99E-03-2.01E+02-1.01E+02-1.33E+041.48E+026.09E-021.01E-01-1.33E+041.48E+021.17E+04-1.56E+042.96E-02-7.50E-021.17E+04-1.56E+044.65E-010.55595290094.99E-01

    2.134.317.30E-06-3.53E-031.45E-03-2.42E+02-9.95E+01-1.54E+041.33E+034.56E-029.07E-02-1.54E+041.33E+031.22E+04-1.91E+043.02E-02-6.23E-021.22E+04-1.91E+044.65E-010.55595524616.07E-01

    7.50E-06-3.12E-031.01E-03-2.90E+02-9.43E+01-1.78E+042.90E+033.31E-028.05E-02-1.78E+042.90E+031.25E+04-2.33E+042.99E-02-5.13E-021.25E+04-2.33E+044.65E-010.55595688246.78E-01

    7.70E-06-2.73E-036.65E-04-3.46E+02-8.41E+01-2.04E+044.93E+032.32E-027.11E-02-2.04E+044.93E+031.24E+04-2.81E+042.89E-02-4.20E-021.24E+04-2.81E+044.65E-010.55595799317.16E-01

    7.90E-06-2.38E-033.93E-04-4.09E+02-6.74E+01-2.32E+047.51E+031.52E-026.24E-02-2.32E+047.51E+031.20E+04-3.37E+042.74E-02-3.41E-021.20E+04-3.37E+044.65E-010.55595872297.32E-01

    8.10E-06-2.06E-031.82E-04-4.81E+02-4.24E+01-2.63E+041.08E+049.00E-035.44E-02-2.63E+041.08E+041.09E+04-4.02E+042.57E-02-2.74E-021.09E+04-4.02E+044.65E-010.55595918317.35E-01

    8.30E-06-1.78E-032.24E-05-5.62E+02-7.06E+00-2.96E+041.48E+044.19E-034.71E-02-2.96E+041.48E+049.19E+03-4.77E+042.38E-02-2.18E-029.19E+03-4.77E+044.65E-010.55595945747.26E-01

    8.50E-06-1.52E-03-9.59E-05-6.53E+024.11E+01-3.31E+041.98E+045.41E-044.06E-02-3.31E+041.98E+046.49E+03-5.62E+042.18E-02-1.71E-026.49E+03-5.62E+044.65E-010.55595960717.00E-01

    8.70E-06-1.30E-03-1.81E-04-7.55E+021.05E+02-3.67E+042.59E+04-2.16E-033.48E-02-3.67E+042.59E+042.60E+03-6.58E+041.97E-02-1.33E-022.60E+03-6.58E+044.65E-010.55595967626.47E-01

    8.90E-06-1.10E-03-2.39E-04-8.68E+021.88E+02-4.04E+043.33E+04-4.10E-032.97E-02-4.04E+043.33E+04-2.75E+03-7.67E+041.78E-02-1.01E-02-2.75E+03-7.67E+044.65E-010.55595969575.57E-01

    9.10E-06-9.26E-04-2.75E-04-9.92E+022.95E+02-4.40E+044.22E+04-5.43E-032.51E-02-4.40E+044.22E+04-9.93E+03-8.88E+041.58E-02-7.48E-03-9.93E+03-8.88E+044.65E-010.55595968654.37E-01

    9.30E-06-7.75E-04-2.96E-04-1.13E+034.30E+02-4.74E+045.29E+04-6.27E-032.12E-02-4.74E+045.29E+04-1.93E+04-1.02E+051.41E-02-5.38E-03-1.93E+04-1.02E+054.65E-010.55595966263.22E-01

    9.50E-06-6.45E-04-3.03E-04-1.27E+035.98E+02-5.04E+046.56E+04-6.74E-031.77E-02-5.04E+046.56E+04-3.14E+04-1.17E+051.24E-02-3.70E-03-3.14E+04-1.17E+054.65E-010.55595963262.66E-01

    9.70E-06-5.32E-04-3.01E-04-1.42E+038.06E+02-5.28E+048.06E+04-6.91E-031.47E-02-5.28E+048.06E+04-4.68E+04-1.33E+051.08E-02-2.36E-03-4.68E+04-1.33E+054.65E-010.5559596023.00E-01

    9.90E-06-4.36E-04-2.92E-04-1.58E+031.06E+03-5.42E+049.83E+04-6.87E-031.22E-02-5.42E+049.83E+04-6.60E+04-1.51E+059.43E-03-1.32E-03-6.60E+04-1.51E+054.65E-010.55595957374.05E-01

    1.01E-05-3.54E-04-2.78E-04-1.74E+031.37E+03-5.43E+041.19E+05-6.67E-039.96E-03-5.43E+041.19E+05-8.99E+04-1.69E+058.16E-03-5.23E-04-8.99E+04-1.69E+054.65E-010.5559595495.29E-01

    1.03E-05-2.85E-04-2.61E-04-1.91E+031.75E+03-5.27E+041.43E+05-6.35E-038.10E-03-5.27E+041.43E+05-1.19E+05-1.89E+057.02E-038.01E-05-1.19E+05-1.89E+054.65E-010.55595952846.28E-01

    1.05E-05-2.27E-04-2.42E-04-2.06E+032.19E+03-4.87E+041.71E+05-5.96E-036.52E-03-4.87E+041.71E+05-1.55E+05-2.09E+056.00E-035.22E-04-1.55E+05-2.09E+054.65E-010.55595951196.90E-01

    1.07E-05-1.79E-04-2.22E-04-2.20E+032.73E+03-4.15E+042.02E+05-5.52E-035.20E-03-4.15E+042.02E+05-1.98E+05-2.29E+055.10E-038.35E-04-1.98E+05-2.29E+054.65E-010.55595949897.21E-01

    1.09E-05-1.39E-04-2.02E-04-2.32E+033.36E+03-3.05E+042.39E+05-5.07E-034.09E-03-3.05E+042.39E+05-2.51E+05-2.48E+054.31E-031.04E-03-2.51E+05-2.48E+054.65E-010.5559594897.34E-01

    1.11E-05-1.06E-04-1.82E-04-2.40E+034.11E+03-1.45E+042.80E+05-4.60E-033.17E-03-1.45E+042.80E+05-3.13E+05-2.67E+053.63E-031.17E-03-3.13E+05-2.67E+054.65E-010.55595948167.34E-01

    1.13E-05-7.89E-05-1.62E-04-2.42E+034.98E+037.74E+033.26E+05-4.14E-032.42E-037.74E+033.26E+05-3.87E+05-2.82E+053.03E-031.24E-03-3.87E+05-2.82E+054.65E-010.55595947627.21E-01

    1.15E-05-5.70E-05-1.44E-04-2.38E+036.00E+033.76E+043.78E+05-3.70E-031.80E-033.76E+043.78E+05-4.74E+05-2.94E+052.51E-031.26E-03-4.74E+05-2.94E+054.65E-010.55595947246.90E-01

    1.17E-05-3.95E-05-1.27E-04-2.23E+037.18E+037.69E+044.36E+05-3.29E-031.30E-037.69E+044.36E+05-5.76E+05-3.00E+052.07E-031.24E-03-5.76E+05-3.00E+054.65E-010.55595946976.28E-01

    1.19E-05-2.56E-05-1.11E-04-1.96E+038.53E+031.28E+055.00E+05-2.90E-039.04E-041.28E+055.00E+05-6.96E+05-2.97E+051.69E-031.19E-03-6.96E+05-2.97E+054.65E-010.55595946795.29E-01

    1.21E-05-1.47E-05-9.69E-05-1.53E+031.01E+041.92E+055.70E+05-2.54E-035.86E-041.92E+055.70E+05-8.34E+05-2.84E+051.37E-031.13E-03-8.34E+05-2.84E+054.65E-010.55595946674.05E-01

    1.23E-05-6.34E-06-8.39E-05-8.95E+021.18E+042.73E+056.45E+05-2.21E-033.38E-042.73E+056.45E+05-9.94E+05-2.57E+051.10E-031.06E-03-9.94E+05-2.57E+054.65E-010.5559594663.00E-01

    1.25E-05-1.33E-20-7.22E-05-2.54E-121.38E+043.74E+057.25E+05-1.92E-031.46E-043.74E+057.25E+05-1.18E+06-2.11E+058.74E-049.76E-04-1.18E+06-2.11E+054.65E-010.55595946562.66E-01

    1.27E-054.67E-06-6.18E-051.21E+031.61E+044.98E+058.09E+05-1.65E-031.23E-064.98E+058.09E+05-1.39E+06-1.42E+056.85E-048.92E-04-1.39E+06-1.42E+054.65E-010.55595946533.22E-01

    1.29E-058.00E-06-5.26E-052.82E+031.86E+046.49E+058.96E+05-1.41E-03-1.06E-046.49E+058.96E+05-1.62E+06-4.37E+045.28E-048.08E-04-1.62E+06-4.37E+044.65E-010.55595946524.37E-01

    1.31E-051.03E-05-4.45E-054.91E+032.13E+048.33E+059.84E+05-1.20E-03-1.82E-048.33E+059.84E+05-1.89E+069.15E+044.00E-047.26E-04-1.89E+069.15E+044.65E-010.55595946525.57E-01

    1.33E-051.17E-05-3.75E-057.57E+032.43E+041.05E+061.07E+06-1.02E-03-2.33E-041.05E+061.07E+06-2.18E+062.72E+052.96E-046.47E-04-2.18E+062.72E+054.65E-010.55595946526.47E-01

    1.35E-051.24E-05-3.13E-051.09E+042.76E+041.32E+061.15E+06-8.56E-04-2.65E-041.32E+061.15E+06-2.51E+065.08E+052.11E-045.73E-04-2.51E+065.08E+054.65E-010.55595946537.00E-01

    1.37E-051.26E-05-2.60E-051.51E+043.11E+041.63E+061.22E+06-7.15E-04-2.83E-041.63E+061.22E+06-2.88E+068.10E+051.44E-045.04E-04-2.88E+068.10E+054.65E-010.55595946537.26E-01

    1.39E-051.25E-05-2.15E-052.03E+043.48E+042.00E+061.27E+06-5.94E-04-2.88E-042.00E+061.27E+06-3.27E+061.19E+069.04E-054.41E-04-3.27E+061.19E+064.65E-010.55595946547.35E-01

    1.41E-051.21E-05-1.76E-052.66E+043.86E+042.44E+061.30E+06-4.90E-04-2.85E-042.44E+061.30E+06-3.69E+061.67E+064.89E-053.83E-04-3.69E+061.67E+064.65E-010.55595946547.32E-01

    1.43E-051.15E-05-1.42E-053.43E+044.25E+042.94E+061.30E+06-4.01E-04-2.76E-042.94E+061.30E+06-4.14E+062.27E+061.71E-053.31E-04-4.14E+062.27E+064.65E-010.55595946557.16E-01

    1.45E-051.08E-05-1.15E-054.36E+044.64E+043.53E+061.25E+06-3.25E-04-2.62E-043.53E+061.25E+06-4.61E+063.00E+06-6.83E-062.85E-04-4.61E+063.00E+064.65E-010.55595946556.78E-01

    1.47E-059.95E-06-9.11E-065.47E+045.01E+044.22E+061.15E+06-2.62E-04-2.45E-044.22E+061.15E+06-5.09E+063.88E+06-2.43E-052.43E-04-5.09E+063.88E+064.65E-010.55595946556.07E-01

    1.49E-059.11E-06-7.16E-066.79E+045.34E+045.00E+069.60E+05-2.08E-04-2.27E-045.00E+069.60E+05-5.57E+064.96E+06-3.65E-052.07E-04-5.57E+064.96E+064.65E-010.55595946554.99E-01

    1.51E-058.26E-06-5.54E-068.35E+045.60E+045.89E+066.77E+05-1.63E-04-2.08E-045.89E+066.77E+05-6.04E+066.25E+06-4.46E-051.75E-04-6.04E+066.25E+064.65E-010.55595946563.75E-01

    1.53E-057.43E-06-4.21E-061.02E+055.77E+046.90E+062.70E+05-1.27E-04-1.88E-046.90E+062.70E+05-6.47E+067.79E+06-4.95E-051.47E-04-6.47E+067.79E+064.65E-010.55595946562.83E-01

    1.55E-056.63E-06-3.12E-061.23E+055.81E+048.04E+06-2.92E+05-9.61E-05-1.69E-048.04E+06-2.92E+05-6.83E+069.61E+06-5.19E-051.22E-04-6.83E+069.61E+064.65E-010.55595946562.72E-01

    1.57E-055.88E-06-2.24E-061.49E+055.67E+049.31E+06-1.04E+06-7.13E-05-1.51E-049.31E+06-1.04E+06-7.09E+061.18E+07-5.23E-051.01E-04-7.09E+061.18E+074.65E-010.55595946563.47E-01

    1.59E-055.18E-06-1.54E-061.77E+055.28E+041.07E+07-2.03E+06-5.13E-05-1.34E-041.07E+07-2.03E+06-7.20E+061.43E+07-5.13E-058.34E-05-7.20E+061.43E+074.65E-010.55595946564.68E-01

    1.61E-054.53E-06-9.83E-072.11E+054.57E+041.23E+07-3.30E+06-3.52E-05-1.18E-041.23E+07-3.30E+06-7.11E+061.72E+07-4.93E-056.81E-05-7.11E+061.72E+074.65E-010.55595946565.83E-01

    1.63E-053.94E-06-5.48E-072.49E+053.46E+041.40E+07-4.91E+06-2.25E-05-1.03E-041.40E+07-4.91E+06-6.75E+062.06E+07-4.66E-055.51E-05-6.75E+062.06E+074.65E-010.55595946566.64E-01

    1.65E-053.41E-06-2.15E-072.92E+051.84E+041.58E+07-6.92E+06-1.26E-05-9.00E-051.58E+07-6.92E+06-6.02E+062.46E+07-4.35E-054.41E-05-6.02E+062.46E+074.65E-010.55595946567.09E-01

    1.67E-052.93E-063.69E-083.41E+05-4.28E+031.77E+07-9.43E+06-4.96E-06-7.78E-051.77E+07-9.43E+06-4.84E+062.91E+07-4.01E-053.50E-05-4.84E+062.91E+074.65E-010.55595946567.29E-01

    1.69E-052.51E-062.21E-073.96E+05-3.49E+041.98E+07-1.25E+077.92E-07-6.70E-051.98E+07-1.25E+07-3.08E+063.42E+07-3.66E-052.73E-05-3.08E+063.42E+074.65E-010.55595946567.35E-01

    1.71E-052.13E-063.52E-074.56E+05-7.52E+042.19E+07-1.63E+075.01E-06-5.73E-052.19E+07-1.63E+07-5.75E+054.00E+07-3.31E-052.10E-05-5.75E+054.00E+074.65E-010.55595946567.29E-01

    1.73E-051.80E-064.39E-075.23E+05-1.27E+052.40E+07-2.08E+077.99E-06-4.87E-052.40E+07-2.08E+072.84E+064.65E+07-2.97E-051.59E-052.84E+064.65E+074.65E-010.55595946567.09E-01

    1.75E-051.52E-064.92E-075.97E+05-1.94E+052.60E+07-2.63E+079.99E-06-4.12E-052.60E+07-2.63E+077.37E+065.37E+07-2.64E-051.17E-057.37E+065.37E+074.65E-010.55595946566.64E-01

    1.77E-051.27E-065.20E-076.76E+05-2.78E+052.79E+07-3.28E+071.12E-05-3.46E-052.79E+07-3.28E+071.33E+076.17E+07-2.34E-058.28E-061.33E+076.17E+074.65E-010.55595946565.83E-01

    1.79E-051.05E-065.27E-077.61E+05-3.82E+052.95E+07-4.05E+071.18E-05-2.89E-052.95E+07-4.05E+072.08E+077.06E+07-2.06E-055.58E-062.08E+077.06E+074.65E-010.55595946564.68E-01

    1.81E-058.65E-075.19E-078.50E+05-5.10E+053.08E+07-4.97E+071.20E-05-2.40E-053.08E+07-4.97E+073.04E+078.01E+07-1.80E-053.45E-063.04E+078.01E+074.65E-010.55595946563.47E-01

    1.83E-057.07E-075.00E-079.43E+05-6.67E+053.14E+07-6.04E+071.18E-05-1.97E-053.14E+07-6.04E+074.23E+079.04E+07-1.56E-051.79E-064.23E+079.04E+074.65E-010.55595946562.72E-01

    1.85E-055.73E-074.74E-071.04E+06-8.58E+053.11E+07-7.29E+071.14E-05-1.61E-053.11E+07-7.29E+075.71E+071.01E+08-1.35E-055.23E-075.71E+071.01E+084.65E-010.55595946562.83E-01

    1.87E-054.60E-074.43E-071.13E+06-1.09E+062.98E+07-8.74E+071.08E-05-1.31E-052.98E+07-8.74E+077.52E+071.13E+08-1.16E-05-4.23E-077.52E+071.13E+084.65E-010.55595946563.75E-01

    1.89E-053.65E-074.09E-071.22E+06-1.36E+062.69E+07-1.04E+081.01E-05-1.05E-052.69E+07-1.04E+089.72E+071.24E+08-9.87E-06-1.11E-069.72E+071.24E+084.65E-010.55595946564.99E-01

    1.91E-052.86E-073.73E-071.29E+06-1.69E+062.21E+07-1.23E+089.32E-06-8.33E-062.21E+07-1.23E+081.24E+081.36E+08-8.38E-06-1.59E-061.24E+081.36E+084.65E-010.55595946566.07E-01

    1.93E-052.21E-073.38E-071.35E+06-2.07E+061.49E+07-1.45E+088.52E-06-6.53E-061.49E+07-1.45E+081.56E+081.47E+08-7.07E-06-1.90E-061.56E+081.47E+084.65E-010.55595946566.78E-01

    Foglio2

    spessore strato (cm)

    R

    Foglio3

    rho2.30E+03

    M2.80E-02

    NA6.02E+23

    e1.60E-19

    eps08.85E-12

    m9.11E-31

    Nv2.00E+00

    omegaP177199018129666003.3372484582-14.0392

    11.137227271425.1764272714

    omega53097340624052805.0176117099

    2.134.310.6065829696

    0

    2.134.31

    Grafico2

    0.5020386648

    0.3762235119

    0.2679661646

    0.2532203649

    0.345125788

    0.4726956169

    0.5801322419

    0.654762071

    0.7014462588

    0.7267745895

    0.7349496146

    0.7273773626

    0.7027548935

    0.656985931

    0.5835375088

    0.4773007335

    0.3497977505

    0.2550484457

    0.2652855182

    0.371373568

    0.4976473971

    0.5983278258

    0.666551203

    0.7083021329

    0.7298048864

    0.7346736044

    0.7237473285

    0.6951516716

    0.6442080213

    0.564135496

    0.4514758441

    0.3246591019

    0.2470549813

    0.2817915028

    0.398323195

    0.5213462483

    0.6150797779

    0.6771945504

    0.7142890737

    0.7321228082

    0.7337212985

    0.7193602748

    0.6865874268

    0.6301605134

    0.5432522346

    0.4248498288

    0.3015971621

    0.244379562

    0.3020071845

    0.4253564003

    0.5436590736

    0.6304371719

    0.6867579186

    0.7194500656

    0.7337455137

    0.7320856289

    0.7141840934

    0.6770043099

    0.614777389

    0.5209124806

    0.3978131873

    0.2814439446

    0.2471572282

    0.3251158639

    0.4519705902

    0.564514543

    0.6444601506

    0.6953035477

    0.7238225848

    0.7346850351

    0.7297544675

    0.7081812046

    0.6663400042

    0.5979986617

    0.4971885886

    0.3708707102

    0.2650152151

    0.2552478108

    0.3502858333

    0.4777773445

    0.58388867

    0.6572148058

    0.7028891961

    0.7274386369

    0.7349483458

    0.7267105581

    0.7013085202

    0.6545286485

    0.5797755255

    0.4722149666

    0.3446427851

    0.2530397833

    0.2682530106

    0.3767287514

    0.5024926748

    0.6017923449

    0.6687693878

    spessore strato (cm)

    R

    Foglio1

    n_eff2.132.37

    n_dia2.41

    k_eff4.31

    n_vuoto1

    T_room

    refl_dia_si0.4760294684refl_dia_si0.1667844041

    refl_vuoto_si0.6997145173refl_vuoto_si0.4888178914

    refl_dia_vuoto0.1709737618refl_dia_vuoto0.1709737618

    refl eff0.5656146813refl eff0.309242409

    T_fus

    refl_dia_si0.5408586186

    refl_vuoto_si0.7681304177

    refl_dia_vuoto0.1709737618

    refl eff0.6193597478

    melted

    refl_dia_si0.4760294684

    refl_vuoto_si0.6997145173

    refl_dia_vuoto0.1709737618

    refl eff0.5656146813

    Foglio2

    Re(nS+nM)Im(nS+nM)Delta xreFImFRe 1/Fim 1/FRe Num1Im Num1Re Num2Im Num2Re NumIm NumRe Den1Im Den1Re Den2Im Den2Re DenIm Denriflrifl eff

    x8.134.311.00E-079.94E-011.06E-019.94E-01-1.06E-01-2.96E+01-1.19E+013.67E+01-3.31E+017.08E+00-4.49E+017.29E+012.92E+01-1.49E+011.34E+015.79E+014.27E+014.00E-010.50203866485.29E-01d1.00E-06

    Re(nM-nS)Im(nM-nS)3.00E-079.50E-013.13E-019.50E-01-3.13E-01-3.15E+01-5.37E+004.29E+01-2.46E+011.14E+01-2.99E+017.74E+011.32E+01-1.74E+011.00E+015.99E+012.32E+012.48E-010.37622351194.05E-016.26E-01

    3.87-4.315.00E-078.62E-015.06E-018.62E-01-5.06E-01-3.19E+011.39E+004.71E+01-1.50E+011.52E+01-1.36E+017.84E+01-3.41E+00-1.92E+016.10E+005.93E+012.68E+001.18E-010.26796616463.00E-01a0.06

    Re(nD+nM)Im(nD+nM)7.00E-077.36E-016.77E-017.36E-01-6.77E-01-3.09E+018.08E+004.92E+01-4.72E+001.83E+013.36E+007.59E+01-1.99E+01-2.00E+011.92E+005.59E+01-1.79E+011.00E-010.25322036492.66E-01b2.30E+05

    xx8.5309.00E-075.77E-018.17E-015.77E-01-8.17E-01-2.85E+011.44E+014.91E+015.75E+002.06E+012.02E+017.00E+01-3.54E+01-2.00E+01-2.34E+005.01E+01-3.78E+012.11E-010.3451257883.22E-01alpha1.60E+06

    Re(nD-nM)Im(nD-nM)1.10E-063.92E-019.20E-013.92E-01-9.20E-01-2.48E+012.01E+014.68E+011.60E+012.19E+013.61E+016.10E+01-4.94E+01-1.90E+01-6.49E+004.20E+01-5.59E+013.65E-010.47269561694.37E-01

    x-3.4701.30E-061.89E-019.82E-011.89E-01-9.82E-01-2.00E+012.49E+014.23E+012.55E+012.23E+015.03E+014.92E+01-6.11E+01-1.72E+01-1.04E+013.20E+01-7.15E+014.94E-010.58013224195.57E-01A0.5

    1.50E-06-2.21E-021.00E+00-2.21E-02-1.00E+00-1.43E+012.85E+013.60E+013.38E+012.17E+016.24E+013.52E+01-7.01E+01-1.47E+01-1.38E+012.06E+01-8.39E+015.84E-010.6547620716.47E-01B0.235

    1.70E-06-2.32E-019.73E-01-2.32E-01-9.73E-01-7.99E+003.09E+012.81E+014.07E+012.01E+017.16E+011.96E+01-7.60E+01-1.14E+01-1.65E+018.22E+00-9.25E+016.40E-010.70144625887.00E-01C-0.5

    1.90E-06-4.32E-019.02E-01-4.32E-01-9.02E-01-1.29E+003.19E+011.89E+014.57E+011.76E+017.76E+013.18E+00-7.84E+01-7.68E+00-1.86E+01-4.50E+00-9.70E+016.71E-010.72677458957.26E-01lambda2.95E-06

    re nDim nD2.10E-06-6.13E-017.90E-01-6.13E-01-7.90E-015.46E+003.15E+018.84E+004.86E+011.43E+018.01E+01-1.34E+01-7.73E+01-3.60E+00-1.98E+01-1.70E+01-9.71E+016.81E-010.73494961467.35E-01z02.15E-06

    2.532.30E-06-7.65E-016.44E-01-7.65E-01-6.44E-011.20E+012.96E+01-1.61E+004.94E+011.04E+017.90E+01-2.94E+01-7.28E+016.54E-01-2.01E+01-2.88E+01-9.29E+016.72E-010.72737736267.32E-01

    re nMIm nM2.50E-06-8.84E-014.68E-01-8.84E-01-4.68E-011.79E+012.64E+01-1.20E+014.79E+015.96E+007.43E+01-4.41E+01-6.49E+014.87E+00-1.95E+01-3.92E+01-8.44E+016.42E-010.70275489357.16E-01

    602.70E-06-9.63E-012.71E-01-9.63E-01-2.71E-012.31E+012.20E+01-2.18E+014.43E+011.29E+006.64E+01-5.68E+01-5.42E+018.88E+00-1.80E+01-4.79E+01-7.22E+015.87E-010.6569859316.78E-01

    re nSIm nS2.90E-06-9.98E-016.19E-02-9.98E-01-6.19E-022.72E+011.67E+01-3.07E+013.87E+01-3.44E+005.54E+01-6.69E+01-4.10E+011.25E+01-1.58E+01-5.45E+01-5.67E+014.98E-010.58353750886.07E-010.47

    2.134.313.10E-06-9.89E-01-1.50E-01-9.89E-011.50E-013.01E+011.06E+01-3.81E+013.14E+01-8.01E+004.20E+01-7.41E+01-2.60E+011.55E+01-1.28E+01-5.86E+01-3.87E+013.70E-010.47730073354.99E-012.77E-01

    3.30E-06-9.35E-01-3.55E-01-9.35E-013.55E-013.17E+013.97E+00-4.39E+012.27E+01-1.22E+012.66E+01-7.79E+01-9.76E+001.79E+01-9.22E+00-6.00E+01-1.90E+012.17E-010.34979775053.75E-01

    k01.77E+053.50E-06-8.39E-01-5.44E-01-8.39E-015.44E-013.18E+01-2.80E+00-4.77E+011.29E+01-1.59E+011.01E+01-7.82E+016.88E+001.94E+01-5.24E+00-5.88E+011.64E+001.02E-010.25504844572.83E-01

    lambda3.55E-053.70E-06-7.06E-01-7.09E-01-7.06E-017.09E-013.05E+01-9.44E+00-4.93E+012.54E+00-1.88E+01-6.90E+00-7.50E+012.32E+012.01E+01-1.04E+00-5.49E+012.22E+011.15E-010.26528551822.72E-0128

    3.90E-06-5.40E-01-8.41E-01-5.40E-018.41E-012.78E+01-1.57E+01-4.88E+01-7.91E+00-2.09E+01-2.36E+01-6.84E+013.85E+011.98E+013.22E+00-4.86E+014.17E+012.43E-010.3713735683.47E-01

    4.10E-06-3.51E-01-9.36E-01-3.51E-019.36E-012.39E+01-2.12E+01-4.60E+01-1.80E+01-2.21E+01-3.92E+01-5.88E+015.20E+011.87E+017.33E+00-4.00E+015.94E+013.95E-010.49764739714.68E-01

    re nDim nD4.30E-06-1.45E-01-9.89E-01-1.45E-019.89E-011.89E+01-2.57E+01-4.12E+01-2.73E+01-2.23E+01-5.30E+01-4.65E+016.33E+011.68E+011.11E+01-2.97E+017.44E+015.16E-010.59832782585.83E-01

    2.534.50E-066.63E-02-9.98E-016.63E-029.98E-011.31E+01-2.91E+01-3.45E+01-3.54E+01-2.14E+01-6.45E+01-3.21E+017.16E+011.40E+011.44E+01-1.81E+018.60E+015.98E-010.6665512036.64E-01

    re nMIm nM4.70E-062.75E-01-9.61E-012.75E-019.61E-016.62E+00-3.12E+01-2.63E+01-4.19E+01-1.96E+01-7.31E+01-1.63E+017.68E+011.07E+011.70E+01-5.58E+009.38E+016.49E-010.70830213297.09E-01

    2.134.314.90E-064.72E-01-8.82E-014.72E-018.82E-01-1.18E-01-3.19E+01-1.68E+01-4.64E+01-1.70E+01-7.84E+012.89E-017.85E+016.85E+001.89E+017.14E+009.74E+016.74E-010.72980488647.29E-01

    re nSIm nS5.10E-066.47E-01-7.63E-016.47E-017.63E-01-6.85E+00-3.12E+01-6.68E+00-4.90E+01-1.35E+01-8.01E+011.68E+017.67E+012.72E+001.99E+011.95E+019.66E+016.80E-010.73467360447.35E-01

    5.27.165.30E-067.93E-01-6.09E-017.93E-016.09E-01-1.33E+01-2.90E+013.79E+00-4.93E+01-9.48E+00-7.83E+013.26E+017.14E+01-1.54E+002.00E+013.11E+019.14E+016.67E-010.72374732857.29E-01

    5.50E-069.04E-01-4.28E-019.04E-014.28E-01-1.91E+01-2.56E+011.41E+01-4.74E+01-5.00E+00-7.30E+014.69E+016.29E+01-5.73E+001.93E+014.12E+018.22E+016.33E-010.69515167167.09E-01

    k01.77E+055.70E-069.74E-01-2.28E-019.74E-012.28E-01-2.41E+01-2.10E+012.38E+01-4.33E+01-3.00E-01-6.43E+015.91E+015.16E+01-9.66E+001.76E+014.95E+016.92E+015.71E-010.64420802136.64E-01

    lambda3.55E-055.90E-061.00E+00-1.77E-021.00E+001.77E-02-2.79E+01-1.55E+013.24E+01-3.73E+014.41E+00-5.28E+016.87E+013.80E+01-1.32E+011.52E+015.55E+015.32E+014.75E-010.5641354965.83E-01

    6.10E-069.81E-011.93E-019.81E-01-1.93E-01-3.06E+01-9.22E+003.95E+01-2.97E+018.93E+00-3.89E+017.52E+012.27E+01-1.61E+011.21E+015.91E+013.47E+013.39E-010.45147584414.68E-01

    re nDim nD6.30E-069.18E-013.96E-019.18E-01-3.96E-01-3.18E+01-2.56E+004.49E+01-2.07E+011.30E+01-2.33E+017.82E+016.30E+00-1.83E+018.42E+006.00E+011.47E+011.86E-010.32465910193.47E-01

    2.536.50E-068.14E-015.81E-018.14E-01-5.81E-01-3.17E+014.20E+004.82E+01-1.08E+011.66E+01-6.56E+007.78E+01-1.03E+01-1.96E+014.38E+005.82E+01-5.95E+009.28E-020.24705498132.72E-01

    re nMIm nM6.70E-066.74E-017.39E-016.74E-01-7.39E-01-3.01E+011.08E+014.94E+01-3.60E-011.94E+011.04E+017.39E+01-2.65E+01-2.01E+011.46E-015.38E+01-2.64E+011.35E-010.28179150282.83E-01

    606.90E-065.03E-018.65E-015.03E-01-8.65E-01-2.71E+011.69E+014.84E+011.01E+012.13E+012.69E+016.66E+01-4.15E+01-1.97E+01-4.09E+004.70E+01-4.56E+012.75E-010.3983231953.75E-01

    re nSIm nS7.10E-063.09E-019.51E-013.09E-01-9.51E-01-2.29E+012.22E+014.52E+012.00E+012.22E+014.22E+015.64E+01-5.46E+01-1.84E+01-8.15E+003.80E+01-6.27E+014.23E-010.52134624834.99E-01

    2.134.317.30E-061.02E-019.95E-011.02E-01-9.95E-01-1.77E+012.65E+013.99E+012.91E+012.22E+015.57E+014.36E+01-6.53E+01-1.62E+01-1.18E+012.74E+01-7.71E+015.36E-010.61507977796.07E-01

    7.50E-06-1.10E-019.94E-01-1.10E-01-9.94E-01-1.17E+012.97E+013.29E+013.69E+012.11E+016.66E+012.89E+01-7.30E+01-1.34E+01-1.50E+011.55E+01-8.80E+016.11E-010.67719455046.78E-01

    7.70E-06-3.17E-019.48E-01-3.17E-01-9.48E-01-5.23E+003.15E+012.44E+014.30E+011.92E+017.45E+011.29E+01-7.74E+01-9.92E+00-1.75E+012.93E+00-9.49E+016.56E-010.71428907377.16E-01

    7.90E-06-5.10E-018.60E-01-5.10E-01-8.60E-011.53E+003.19E+011.48E+014.71E+011.63E+017.90E+01-3.76E+00-7.84E+01-6.01E+00-1.92E+01-9.77E+00-9.76E+016.77E-010.73212280827.32E-01

    8.10E-06-6.80E-017.33E-01-6.80E-01-7.33E-018.22E+003.09E+014.51E+004.92E+011.27E+018.01E+01-2.02E+01-7.58E+01-1.83E+00-2.00E+01-2.20E+01-9.59E+016.79E-010.73372129857.35E-01

    8.30E-06-8.19E-015.73E-01-8.19E-01-5.73E-011.45E+012.84E+01-5.97E+004.90E+018.57E+007.75E+01-3.57E+01-6.99E+012.43E+00-2.00E+01-3.33E+01-8.98E+016.62E-010.71936027487.26E-01

    8.50E-06-9.22E-013.88E-01-9.22E-01-3.88E-012.02E+012.47E+01-1.62E+014.67E+014.03E+007.14E+01-4.97E+01-6.08E+016.58E+00-1.90E+01-4.31E+01-7.98E+016.22E-010.68658742687.00E-01

    8.70E-06-9.83E-011.85E-01-9.83E-01-1.85E-012.50E+011.99E+01-2.56E+014.22E+01-6.88E-016.21E+01-6.14E+01-4.89E+011.04E+01-1.72E+01-5.09E+01-6.61E+015.54E-010.63016051346.47E-01

    8.90E-06-1.00E+00-2.65E-02-1.00E+002.65E-022.86E+011.42E+01-3.40E+013.59E+01-5.38E+005.01E+01-7.03E+01-3.49E+011.38E+01-1.46E+01-5.65E+01-4.95E+014.50E-010.54325223465.57E-01

    9.10E-06-9.72E-01-2.37E-01-9.72E-012.37E-013.09E+017.85E+00-4.08E+012.79E+01-9.83E+003.58E+01-7.61E+01-1.93E+011.66E+01-1.14E+01-5.95E+01-3.07E+013.07E-010.42484982884.37E-01

    9.30E-06-9.00E-01-4.36E-01-9.00E-014.36E-013.19E+011.15E+00-4.57E+011.87E+01-1.38E+011.98E+01-7.84E+01-2.84E+001.86E+01-7.60E+00-5.98E+01-1.04E+011.59E-010.30159716213.22E-01

    9.50E-06-7.88E-01-6.16E-01-7.88E-016.16E-013.14E+01-5.60E+00-4.87E+018.62E+00-1.72E+013.02E+00-7.73E+011.38E+011.98E+01-3.51E+00-5.75E+011.03E+018.96E-020.2443795622.66E-01

    9.70E-06-6.40E-01-7.68E-01-6.40E-017.68E-012.95E+01-1.21E+01-4.94E+01-1.83E+00-1.98E+01-1.39E+01-7.26E+012.97E+012.01E+017.43E-01-5.26E+013.05E+011.59E-010.30200718453.00E-01

    9.90E-06-4.64E-01-8.86E-01-4.64E-018.86E-012.63E+01-1.81E+01-4.79E+01-1.22E+01-2.15E+01-3.02E+01-6.47E+014.44E+011.95E+014.96E+00-4.53E+014.93E+013.08E-010.42535640034.05E-01

    1.01E-05-2.67E-01-9.64E-01-2.67E-019.64E-012.19E+01-2.32E+01-4.42E+01-2.20E+01-2.23E+01-4.52E+01-5.39E+015.70E+011.80E+018.95E+00-3.59E+016.60E+014.50E-010.54365907365.29E-01

    1.03E-05-5.75E-02-9.98E-01-5.75E-029.98E-011.66E+01-2.73E+01-3.86E+01-3.08E+01-2.20E+01-5.81E+01-4.07E+016.71E+011.57E+011.25E+01-2.50E+017.97E+015.55E-010.63043717196.28E-01

    1.05E-051.54E-01-9.88E-011.54E-019.88E-011.04E+01-3.02E+01-3.12E+01-3.83E+01-2.08E+01-6.85E+01-2.56E+017.42E+011.27E+011.56E+01-1.29E+018.98E+016.23E-010.68675791866.90E-01

    1.07E-053.59E-01-9.33E-013.59E-019.33E-013.83E+00-3.17E+01-2.25E+01-4.40E+01-1.86E+01-7.57E+01-9.41E+007.79E+019.14E+001.79E+01-2.76E-019.58E+016.62E-010.71945006567.21E-01

    1.09E-055.48E-01-8.37E-015.48E-018.37E-01-2.94E+00-3.18E+01-1.27E+01-4.78E+01-1.56E+01-7.96E+017.23E+007.82E+015.16E+001.94E+011.24E+019.76E+016.79E-010.73374551377.34E-01

    1.11E-057.12E-01-7.02E-017.12E-017.02E-01-9.58E+00-3.05E+01-2.33E+00-4.94E+01-1.19E+01-7.98E+012.35E+017.49E+019.46E-012.01E+012.45E+019.50E+016.77E-010.73208562897.34E-01

    1.13E-058.44E-01-5.37E-018.44E-015.37E-01-1.58E+01-2.78E+018.13E+00-4.87E+01-7.65E+00-7.65E+013.88E+016.82E+01-3.31E+001.98E+013.55E+018.81E+016.56E-010.71418409347.21E-01

    1.15E-059.38E-01-3.47E-019.38E-013.47E-01-2.13E+01-2.38E+011.82E+01-4.59E+01-3.06E+00-6.97E+015.23E+015.85E+01-7.41E+001.87E+014.49E+017.72E+016.11E-010.67700430996.90E-01

    1.17E-059.90E-01-1.41E-019.90E-011.41E-01-2.58E+01-1.88E+012.75E+01-4.11E+011.67E+00-5.98E+016.35E+014.62E+01-1.12E+011.67E+015.23E+016.29E+015.36E-010.6147773896.28E-01

    1.19E-059.97E-017.07E-029.97E-01-7.07E-02-2.92E+01-1.29E+013.55E+01-3.43E+016.33E+00-4.73E+017.18E+013.18E+01-1.45E+011.40E+015.73E+014.57E+014.23E-010.52091248065.29E-01

    1.21E-059.60E-012.79E-019.60E-01-2.79E-01-3.13E+01-6.48E+004.20E+01-2.61E+011.07E+01-3.26E+017.69E+011.59E+01-1.71E+011.06E+015.98E+012.65E+012.74E-010.39781318734.05E-01

    1.23E-058.80E-014.76E-018.80E-01-4.76E-01-3.19E+012.59E-014.65E+01-1.66E+011.46E+01-1.64E+017.85E+01-6.37E-01-1.89E+016.77E+005.96E+016.13E+001.34E-010.28144394463.00E-01

    1.25E-057.60E-016.50E-017.60E-01-6.50E-01-3.12E+016.98E+004.90E+01-6.46E+001.78E+015.21E-017.66E+01-1.72E+01-1.99E+012.63E+005.67E+01-1.45E+019.30E-020.24715722822.66E-01

    1.27E-056.06E-017.96E-016.06E-01-7.96E-01-2.90E+011.34E+014.92E+014.01E+002.03E+011.74E+017.13E+01-3.29E+01-2.00E+01-1.63E+005.12E+01-3.46E+011.87E-010.32511586393.22E-01

    1.29E-054.24E-019.06E-014.24E-01-9.06E-01-2.55E+011.92E+014.73E+011.43E+012.18E+013.35E+016.27E+01-4.72E+01-1.92E+01-5.82E+004.35E+01-5.30E+013.40E-010.45197059024.37E-01

    1.31E-052.24E-019.75E-012.24E-01-9.75E-01-2.09E+012.41E+014.32E+012.39E+012.23E+014.81E+015.13E+01-5.94E+01-1.76E+01-9.74E+003.38E+01-6.91E+014.75E-010.5645145435.57E-01

    1.33E-051.33E-021.00E+001.33E-02-1.00E+00-1.53E+012.80E+013.72E+013.25E+012.19E+016.05E+013.77E+01-6.89E+01-1.51E+01-1.32E+012.25E+01-8.21E+015.72E-010.64446015066.47E-01

    1.35E-05-1.98E-019.80E-01-1.98E-01-9.80E-01-9.08E+003.06E+012.95E+013.96E+012.04E+017.02E+012.23E+01-7.53E+01-1.20E+01-1.61E+011.03E+01-9.14E+016.33E-010.69530354777.00E-01

    1.37E-05-4.00E-019.17E-01-4.00E-01-9.17E-01-2.42E+003.18E+012.05E+014.50E+011.81E+017.68E+015.96E+00-7.83E+01-8.34E+00-1.83E+01-2.38E+00-9.66E+016.67E-010.72382258487.26E-01

    1.39E-05-5.84E-018.12E-01-5.84E-01-8.12E-014.34E+003.16E+011.06E+014.83E+011.49E+017.99E+01-1.07E+01-7.78E+01-4.29E+00-1.96E+01-1.50E+01-9.74E+016.80E-010.73468503517.35E-01

    1.41E-05-7.42E-016.70E-01-7.42E-01-6.70E-011.09E+013.00E+011.41E-014.94E+011.11E+017.94E+01-2.68E+01-7.38E+01-5.73E-02-2.01E+01-2.69E+01-9.39E+016.74E-010.72975446757.32E-01

    1.43E-05-8.67E-014.99E-01-8.67E-01-4.99E-011.70E+012.70E+01-1.03E+014.83E+016.72E+007.54E+01-4.18E+01-6.65E+014.18E+00-1.97E+01-3.76E+01-8.61E+016.48E-010.70818120467.16E-01

    1.45E-05-9.52E-013.05E-01-9.52E-01-3.05E-012.23E+012.28E+01-2.02E+014.51E+012.08E+006.79E+01-5.48E+01-5.62E+018.23E+00-1.83E+01-4.66E+01-7.45E+015.98E-010.66634000426.78E-01

    1.47E-05-9.95E-019.72E-02-9.95E-01-9.72E-022.66E+011.76E+01-2.93E+013.98E+01-2.66E+005.74E+01-6.54E+01-4.33E+011.19E+01-1.62E+01-5.35E+01-5.95E+015.16E-010.59799866176.07E-01

    1.49E-05-9.93E-01-1.15E-01-9.93E-011.15E-012.97E+011.16E+01-3.70E+013.27E+01-7.27E+004.44E+01-7.31E+01-2.86E+011.51E+01-1.33E+01-5.81E+01-4.19E+013.94E-010.49718858864.99E-01

    1.51E-05-9.47E-01-3.22E-01-9.47E-013.22E-013.15E+015.09E+00-4.31E+012.42E+01-1.16E+012.93E+01-7.75E+01-1.25E+011.75E+01-9.84E+00-6.00E+01-2.23E+012.42E-010.37087071023.75E-01

    1.53E-05-8.58E-01-5.14E-01-8.58E-015.14E-013.19E+01-1.67E+00-4.72E+011.46E+01-1.53E+011.29E+01-7.84E+014.11E+001.92E+01-5.93E+00-5.92E+01-1.82E+001.14E-010.26501521512.83E-01

    1.55E-05-7.30E-01-6.83E-01-7.30E-016.83E-013.08E+01-8.36E+00-4.92E+014.29E+00-1.84E+01-4.07E+00-7.58E+012.05E+012.00E+01-1.74E+00-5.57E+011.88E+011.03E-010.25524781082.72E-01

    1.57E-05-5.70E-01-8.22E-01-5.70E-018.22E-012.84E+01-1.47E+01-4.90E+01-6.18E+00-2.07E+01-2.08E+01-6.97E+013.60E+011.99E+012.52E+00-4.98E+013.86E+012.17E-010.35028583333.47E-01

    1.59E-05-3.84E-01-9.23E-01-3.84E-019.23E-012.46E+01-2.03E+01-4.66E+01-1.64E+01-2.20E+01-3.67E+01-6.06E+014.99E+011.90E+016.66E+00-4.16E+015.66E+013.71E-010.47777734454.68E-01

    1.61E-05-1.80E-01-9.84E-01-1.80E-019.84E-011.98E+01-2.50E+01-4.21E+01-2.58E+01-2.23E+01-5.09E+01-4.87E+016.16E+011.71E+011.05E+01-3.15E+017.21E+014.99E-010.583888675.83E-01

    1.63E-053.10E-02-1.00E+003.10E-021.00E+001.41E+01-2.87E+01-3.57E+01-3.41E+01-2.16E+01-6.28E+01-3.46E+017.05E+011.45E+011.39E+01-2.01E+018.43E+015.87E-010.65721480586.64E-01

    1.65E-052.41E-01-9.71E-012.41E-019.71E-017.72E+00-3.10E+01-2.77E+01-4.09E+01-2.00E+01-7.19E+01-1.90E+017.62E+011.13E+011.66E+01-7.69E+009.28E+016.42E-010.70288919617.09E-01

    1.67E-054.40E-01-8.98E-014.40E-018.98E-011.01E+00-3.19E+01-1.85E+01-4.58E+01-1.75E+01-7.77E+01-2.49E+007.85E+017.52E+001.86E+015.03E+009.71E+016.72E-010.72743863697.29E-01

    1.69E-056.20E-01-7.85E-016.20E-017.85E-01-5.74E+00-3.14E+01-8.41E+00-4.87E+01-1.41E+01-8.01E+011.41E+017.72E+013.42E+001.98E+011.75E+019.70E+016.81E-010.73494834587.35E-01

    1.71E-057.71E-01-6.37E-017.71E-016.37E-01-1.22E+01-2.95E+012.04E+00-4.94E+01-1.02E+01-7.89E+013.01E+017.25E+01-8.32E-012.01E+012.92E+019.26E+016.71E-010.72671055817.29E-01

    1.73E-058.88E-01-4.60E-018.88E-014.60E-01-1.82E+01-2.63E+011.24E+01-4.78E+01-5.77E+00-7.41E+014.47E+016.45E+01-5.05E+001.95E+013.96E+018.40E+016.40E-010.70130852027.09E-01

    1.75E-059.65E-01-2.62E-019.65E-012.62E-01-2.33E+01-2.18E+012.22E+01-4.41E+01-1.09E+00-6.60E+015.73E+015.37E+01-9.03E+001.80E+014.82E+017.16E+015.84E-010.65452864856.64E-01

    1.77E-059.99E-01-5.31E-029.99E-015.31E-02-2.74E+01-1.64E+013.10E+01-3.85E+013.64E+00-5.49E+016.73E+014.04E+01-1.26E+011.56E+015.47E+015.60E+014.94E-010.57977552555.83E-01

    1.79E-059.87E-011.59E-019.87E-01-1.59E-01-3.02E+01-1.03E+013.84E+01-3.11E+018.20E+00-4.14E+017.43E+012.53E+01-1.56E+011.26E+015.87E+013.79E+013.64E-010.47221496664.68E-01

    1.81E-059.32E-013.63E-019.32E-01-3.63E-01-3.17E+01-3.69E+004.41E+01-2.23E+011.24E+01-2.60E+017.80E+019.07E+00-1.79E+019.06E+006.00E+011.81E+012.10E-010.34464278513.47E-01

    1.83E-058.34E-015.51E-018.34E-01-5.51E-01-3.18E+013.08E+004.78E+01-1.25E+011.60E+01-9.39E+007.81E+01-7.57E+00-1.94E+015.07E+005.87E+01-2.50E+001.00E-010.25303978332.72E-01

    1.85E-056.99E-017.15E-016.99E-01-7.15E-01-3.04E+019.71E+004.94E+01-2.11E+001.89E+017.60E+007.48E+01-2.39E+01-2.01E+018.58E-015.47E+01-2.30E+011.18E-010.26825301062.83E-01

    1.87E-055.33E-018.46E-015.33E-01-8.46E-01-2.77E+011.59E+014.87E+018.35E+002.10E+012.42E+016.81E+01-3.91E+01-1.98E+01-3.39E+004.83E+01-4.25E+012.49E-010.37672875143.75E-01

    1.89E-053.42E-019.40E-013.42E-01-9.40E-01-2.37E+012.14E+014.58E+011.84E+012.21E+013.98E+015.83E+01-5.26E+01-1.87E+01-7.49E+003.96E+01-6.01E+014.01E-010.50249267484.99E-01

    1.91E-051.37E-019.91E-011.37E-01-9.91E-01-1.87E+012.59E+014.09E+012.77E+012.23E+015.36E+014.59E+01-6.37E+01-1.67E+01-1.13E+012.93E+01-7.49E+015.20E-010.60179234496.07E-01

    1.93E-05-7.52E-029.97E-01-7.52E-02-9.97E-01-1.28E+012.93E+013.42E+013.57E+012.14E+016.49E+013.14E+01-7.19E+01-1.39E+01-1.45E+011.75E+01-8.64E+016.01E-010.66876938786.78E-01

    Foglio2

    spessore strato (cm)

    R

    Foglio3

    rho2.30E+03

    M2.80E-02

    NA6.02E+23

    e1.60E-19

    eps08.85E-12

    m9.11E-31

    Nv2.00E+00

    omegaP177199018129666003.3372484582-14.0392

    11.137227271425.1764272714

    omega53097340624052805.0176117099

    2.134.310.6065829696

    0

    2.134.31

  • T = TfusT TfusModello numerico

  • Modello numericoDi tutti i parametri in gioco stata considerata la dipendenza dalla temperatura del reticolo e del plasma, dalla densit del plasma stesso, e dalla fase solida o liquida (o mista) del materiale, ovveroIl coefficiente di assorbimento della radiazioneLampiezza del band-gapLindice di rifrazione (e quindi la riflettivit)La conducibilit termica del reticoloLa conducibilit termica del plasmaIl calore specificoLe mobilit (e-h)Il tempo di ricombinazioneIl tempo di rilassamento della temperatura elettronica

  • Risultati delle simulazioniIl fronte di fusione tende ad avanzare a gradini a causa dellinterferenza nello strato dielettricoIl fronte di risolidificazione ha una velocit tale da determinare la formazione di una fase amorfa.

  • Anche cambiando energia, le velocit dei fronti di ricristallizzazione tendono ad essere pi alte di quelle di amorfizzazione del silicio.Si deve quindi ritenere che lo strato danneggiato sia pari allestensione massima del fronte di fusione.0.5 J/cm21 J/cm2200 m/s70 m/spsnmRisultati delle simulazioniNel prossimo periodo verr eseguito uno studio sistematico dellandamento dello spessore danneggiato conLa densit di energiaLa lunghezza donda della radiazioneLa durata dellimpulso.

    Grafico1

    4.11936630499.2911568639

    2.510.5628894219

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