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Scanning Electron Microscopy
The Scanning Electron Microscope is an instrument that investigates the surfaces
of solid samples.
The Scanning Electron Microscope is an instrument that investigates the surfaces
of solid samples.
Magnification range ~ 5x-500,000x
The Scanning Electron Microscope is an instrument that investigates the surfaces
of solid samples.
Magnification range ~ 5x-500,000xSensitive to:
•Topography
The Scanning Electron Microscope is an instrument that investigates the surfaces
of solid samples.
Magnification range ~ 5x-500,000xSensitive to:
•Topography•Chemistry
The Scanning Electron Microscope is an instrument that investigates the surfaces
of solid samples.
Magnification range ~ 5x-500,000xSensitive to:
•Topography•Chemistry•Crystallography
The Scanning Electron Microscope is an instrument that investigates the surfaces
of solid samples.
Magnification range ~ 5x-500,000xSensitive to:
•Topography•Chemistry•Crystallography•Etc.
The Scanning Electron Microscope is an instrument that investigates the surfaces
of solid samples.
Magnification range ~ 5x-500,000xSensitive to:
•Topography•Chemistry•Crystallography•Etc.Resolution down to 1nm. point-to-point
Products of interaction of electrons with matter:
Products of interaction of electrons with matter:
Secondary Electrons (Low energy)
Products of interaction of electrons with matter:
Secondary Electrons (Low energy)
Back-scattered electrons (High energy)
Products of interaction of electrons with matter:
Secondary Electrons (Low energy)
Back-scattered electrons (High energy)
X-rays
Products of interaction of electrons with matter:
Secondary Electrons (Low energy)
Back-scattered electrons (High energy)
X-rays
Auger electrons (Medium energy)
Products of interaction of electrons with matter:
Secondary Electrons (Low energy)
Back-scattered electrons (High energy)
X-rays
Auger electrons (Medium energy)
Light
Products of interaction of electrons with matter:
Secondary Electrons (Low energy)
Back-scattered electrons (High energy)
X-rays
Auger electrons (Medium energy)
Light
Etc
JEOL 5910 General-Purpose SEM
FEI XL30 FEG-ESEM
JEOL 6320 High-resolution SEM
Features of our SEMs
Features of our SEMs
•Large sample chambers (6320 more restricted)
Features of our SEMs
•Large sample chambers (6320 more restricted)
•Secondary detectors
Features of our SEMs
•Large sample chambers (6320 more restricted)
•Secondary and Backscatter detectors
Features of our SEMs
•Large sample chambers (6320 more restricted)
•Secondary and Backscatter detectors
•Energy-dispersive X-ray detectors
SE Cu
Pb Sn
BSE Cu
Pb Sn
Features of our SEMs
•Large sample chambers (6320 more restricted)
•Secondary and Backscatter detectors
•Energy-dispersive X-ray detectors
•Backscatter diffraction patterns
Electron Backscatter Diffraction (EBSD) analysis:
•Define different grains (~0.5m)
Electron Backscatter Diffraction (EBSD) analysis:
•Define different grains (~0.5m)
•Detect Preferred orientations (texture)
Electron Backscatter Diffraction (EBSD) analysis:
•Define different grains (~0.5m)
•Detect Preferred orientations (texture)
•Measure misorientations (~1o)
Electron Backscatter Diffraction (EBSD) analysis:
•Define different grains (~0.5m)
•Detect Preferred orientations (texture)
•Measure misorientations (~1o)
•Detect different phases
Electron Backscatter Diffraction (EBSD) analysis:
•Define different grains (~0.5m)
•Detect Preferred orientations (texture)
•Measure misorientations (~1o)
•Detect different phases
•BUT – Needs VERY well prepared samples!
What else can we do?
•Stereo Imaging
What else can we do?
•Stereo Imaging
•Height Mapping (Using MeX software)
What else can we do?
•Stereo Imaging
•Height Mapping (Using MeX software)
•Feature analysis (Using Image Analysis software)
Introduction to Scanning Electron Microscopy
Patrick Boisvert
Thu Jan 25, 10-11:00am, 13-2137
The lecture will provide an introduction to the basic principles of Scanning Electron Microscopy with an approach to EDX, EBSD,
and BSE.
Contact: Patrick Boisvert, 13-1018, x3-3317, [email protected]
