Research Infrastructure Overview - CEN

Research Infrastructure Overview

Anil KottantharayilAssociate Professor

Department of of Electrical Engineering and Centre of Excellence in Nanoelectronics, IIT Bombay, Powai, Mumbai -76, India.

E-mail: [email protected]

Executive Summary

2AIM 2011, Anil Kottantharayil

• Activities in all aspects of nanoelectronic device physics, technology, characterization, TCAD, modeling and VLSI design• 41 faculty members, 70 Ph. D. students and 60 M. Tech & DD students from 8 departments across the institute use the facility• CEN is a national facility being used by 67 entities, including industry users• Total funding to the tune of 150 cr. in the last 6 years• Applied Materials Inc. (AMAT) donated equipment ~ 41 cr.• Funding in the pipeline ~ 95 cr.• Total lab space of 35000 sq. ft. • Facilities in the institute on high performance computing and materials characterization (SAIF, and Central facilities)

Fabrication facility

AIM 2011, Anil Kottantharayil 3

Fabrication facility (2)


Fabrication facility (3)


• 41 pieces of high end fabrication equipment• thin film growth & deposition (oxidation, CVD, sputter,….)• lithography (optical aligner, direct laser writer, e-beam)• reactive ion etch• doping (diffusion and PIII)• wet processes

• 11 pieces of material characterization equipment• scanning probe microscopes• optical microscopes• SEM• spectrometers, ellipsometer, …..

• 11 more fabrication equipment in the pipeline (MBE, glove boxes…)• 8 more material characterization equipment in the pipeline (XRD, XPS, XRR, PL, …..)

Electrical Characterization


40 GHz, 4 Probe SUSS Microtec pm5

Semiconductor parametric measurement system

Electrical Characterization (2)


• Parametric and low frequency device characterization• Parametric IV & CV measurement systems – 7• Low frequency noise, charge pumping• Device reliability tests like HCE, NBTI, dielectric wear out

• Analog, Mixed-Signal and RF IC/System Test• 40 GHz, 4 Probe SUSS Microtec pm5• Network analyzer (40 GHz), Signal generator (6 GHz), DSO (2 GHz), Spectrum analyzer (6 GHz)

• 5 more electrical characterization equipment in the pipeline (cryo probe station, transient high speed opto-electronic measurement system, ….)

Computational Nanoelectronics


• Microelectronics Computation Lab– 25 state-of-the-art Xeon/Opteron workstations– Sentaurus TCAD (process & device modeling: 25 licenses

for R&D + education)– Materials Studio (materials modeling)– COMSOL (multiphysics)– MEMS (Coventor ware, Intellisuite)

• EE Department Labs– MATLAB (numerical computing platform)

• IITB HPC Cluster “Space-Time”– Several materials modeling tools

• Proposal for Computational Nano Centre in concept stage

VLSI Design Lab• Design Environments (Complete Flow)

• Cadence Virtuso Custome IC Design Flow (Anlaog/Mixed-Signal/RF Design, Simulation and Layout and Verification Environment)• MentorGraphics ICflow 2006.1

• Logic Synthesis Tools (ASIC)• Cadence Encounter• Synopsys Design Compiler

• Hardware Accelarator• IMAGE Hardware Emulator - IMAGE, Powailabs


Indian Nanoelectronics Users’ Program (INUP)

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• INUP is a vehicle for making the CEN facilities available toresearchers from other academic institutions, R&Dlaboratories and industry

• Manpower training in nanoelectronics beyond IIT-B and IISc– Disseminate knowledge in nanoelectronics– Generate wide-spread “hands-on” expertise by short term hands-on

workshops and enabling execution of research projects• A well considered IP policy is in place• A pool of expertise in nanoelectronics for

sponsored/collaborative research and consultancy

AIM 2011, Anil Kottantharayil

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Pondicherry University,

NISER,Bhubaneswar

IITG,Guwahati

IIT Kanpur(5)

IIT Roorkee(2)

Haryana College of Technology &management)

Punjab UniversityGuru Nanak Dev University(4)

CEERI Pilani(3),BITS,PilaniLMNIIT, Jaipur(2)

Nirma University of S&TSVNIT,Surat(2), Gujarat University,Pandit Deendayal Petroleum University, Gandhinagar.(2)Visvakarma Govt Engg CollegePhysical Research Laboratory

BARC(3),NCL Pune,CMET PuneIISER Pune(2), University Pune,TECVNIT Nagpur(7),SRKNEC Nagpur,North Maharastra University(3),DIAT,D.M.College of Engg,Larsen & Toubro,Piranhal Healthcare, Crompton Greaves, Applied Materials,Battelle India

IISc Banglore, Tata BP, Siddaganga Institute of Technology, Tumkur

Anna University,Chennai(2),IIT Madras(2)KSR College Engg & TechVIT Vellore,Bharathiyar University, Sona College of Technolgy, Salem, K.S.Rangasamy College of Technology, Tiruchengode

IIT Hyderabad(2),CBIT Engg CollegeSri Kalahasteeswara Insitute of Technology, Sri Vidyanikethan college of Engineering and Technology,Tirupathi ,BITS Plani,Hyderabad Campus

Bengal Engineering and Science University,Howrah(3),Vidyasagar College for Woman,IIT Kharagpur,University of Calcutta(2)Jadapur University

IIT Delhi(2),NPL,

Total No of Insitutions:68Academic:54

R & D:8Industries:6

Amirtha School of Engg,CUSAT(2), CSIR-NIIST

CEN Calling - INUP

AIM 2011, Anil Kottantharayil

INUP: 3 year Status Summary

12

Medium term projects(3 to 24 months)

Short term projects

(< 3 months)Completed 9 13

On-going/approved 26 26Total # of projects 35 39

Total number of published papers Journal 22Conference

proceedings/presentations

42

Number of patents filed 2Number of Ph. D. thesis 10

Number of M. Tech/M. Phil thesis 19Manpower trained L1 (424), L2 (136), L3 (114)

Familiarization workshops 5Hands-on training workshops 6AIM 2011, Anil Kottantharayil

Questions?


Chirutha

IMAGE: Hardware Acceleration

IMAGE 4 FPGA Board

Capacity: 5 to 100 million gate Acceleration: From 100X to 1000X acceleration over pure simulation for [Verilog, VHDL, mixed] language designs.


Documents

Research Infrastructure Overview - CEN