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1 Recent Examples of Recent Examples of Numerical Simulation of Semiconductor Optoelectronic Devices (NUSOD!) Numerical Simulation of Semiconductor Optoelectronic Devices (NUSOD!) By Simon Li

Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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Page 1: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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Recent Examples ofRecent Examples of

Numerical Simulation of Semiconductor Optoelectronic

Devices (NUSOD!)

Numerical Simulation of Semiconductor Optoelectronic

Devices (NUSOD!)By Simon Li

Page 2: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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AcknowledgementAcknowledgementAcknowledgement

Credit goes to all research scientists / engineers in Crosslight.Especially, Drs. Peter Mensz, Kentaro Uehara, Oleksiy Shmatov, Zhisheng Piao, Zhiqiang Li, …Thanks go to all customers who contributed material parameters and proposed interesting device structures.

Credit goes to all research scientists / engineers in Crosslight.Especially, Drs. Peter Mensz, Kentaro Uehara, Oleksiy Shmatov, Zhisheng Piao, Zhiqiang Li, …Thanks go to all customers who contributed material parameters and proposed interesting device structures.

Page 3: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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ContentsContentsContents

Multiple section tunable DFB/DBR laser.Multiple lateral/longitudinal mode simulation.Lateral mode competition in VCSEL.Different k.p theories.

Multiple section tunable DFB/DBR laser.Multiple lateral/longitudinal mode simulation.Lateral mode competition in VCSEL.Different k.p theories.

Page 4: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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3-section DBR laser33--section DBR lasersection DBR laser

Physical model required:

•Current injection (drift-diffusion model) for allsegments.

•MQW gain model in segment 1.•Index change model in

segment 2 & 3.•DBR grating model in segment3 (coupled mode theory).•Lateral optical mode solver for

all segments.•Longitudinal mode model

(Green’s function theory)for all segments.

Page 5: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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Round trip gain (RTG)Round trip gain (RTG)Round trip gain (RTG)

RTG left RTG right

Page 6: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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Carrier conc. distributionCarrier conc. distributionCarrier conc. distribution

•Drift-diffusion equation solver finds 3D distribution of electron/hole carrier concentrations.

•Carrier conc. change Refractive index distributionchange in lateral/longitudinal modes

Page 7: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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Carrier conc. around MQWCarrier conc. around MQWCarrier conc. around MQW

•Quantum drift-diffusion model finds 3D distribution of electron/hole at MQW regions.

•Optical gain peak of the MQW and DBR spectrum determines lasing wavelength.

Page 8: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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Longitudinal mode distributionLongitudinal mode distributionLongitudinal mode distribution

Modeling/Design Issues:

•Segments 2 & 3 shouldbe close to but below bandgapto avoid optical loss but alsoto provide change of index.

•Both waveguide and DBRgrating should vary withinjection current.

Page 9: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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Tuning behaviorTuning behaviorTuning behaviorConclusion Possible to integrate many

modules to describe complex laser behaviorin 3D spatial and spectral dimensions.

Page 10: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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ContentsContentsContents

Multiple section tunable DFB/DBR laser.Multiple lateral/longitudinal mode simulation.Lateral mode competition in VCSEL.Different k.p theories.

Multiple section tunable DFB/DBR laser.Multiple lateral/longitudinal mode simulation.Lateral mode competition in VCSEL.Different k.p theories.

Page 11: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

11Broad-area laser with adjustable stripe

BroadBroad--area laser with area laser with adjustable stripeadjustable stripe

GRIN-SQW

Adjustable twin-stripe for lateral mode control

Symmetric axis

Page 12: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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Pumping of different modesPumping of different modesPumping of different modesInjection current magnitude (current spreading)

Lateral mode No. 2Lateral mode No. 1

Page 13: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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Multi-mode considerationsMultiMulti--mode considerationsmode considerations

Different longitudinal modesFor lateral mode No. 1

Different lateral modesFor longitudinal No. 1

•Must solve a whole different set of longitudinal modes using modalindices of different lateral modes.

•Each longitudinal mode is always associated with a particular lateral mode.

•Must consider longitudinal and lateral spatial hole burning effectsfor different lateral/longitudinal modes.

Page 14: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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Multi-lateral mode spectrumMultiMulti--lateral mode spectrumlateral mode spectrum

•Different peaks for different lateral modes.•May be used to monitor suppression of lateral modes.

Page 15: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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ContentsContentsContents

Multiple section tunable DFB/DBR laser.Multiple lateral/longitudinal mode simulation.Lateral mode competition in VCSEL.Different k.p theories.

Multiple section tunable DFB/DBR laser.Multiple lateral/longitudinal mode simulation.Lateral mode competition in VCSEL.Different k.p theories.

Page 16: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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Symmetric v. asymmetric VCSELSymmetric v. asymmetric VCSELSymmetric v. asymmetric VCSELTop contact

Bottom contact

Top DBR

MQW layers

Reflection symmetryaxis

Bottom DBR

Models required:•Full 3D drift-diffusion model: cylindrical symmetry no longer available.•Lateral mode model with both phi and theta dependence.•MQW gain model as usual.•Transfer matrix model for longitudinal modes as usual.

Page 17: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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Asymmetric VCSEL injectionAsymmetric VCSEL injectionAsymmetric VCSEL injectionCurrent magnitude Contact

Fundamental mode 2nd order mode

QW’s QW’s

QW’s

Page 18: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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Within the quantum wellWithin the quantum wellWithin the quantum well

Contact

Contact

Page 19: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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Different modes Different modes Different modes

Fundamental mode

2nd order mode

Page 20: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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Symmetric VCSEL injectionSymmetric VCSEL injectionSymmetric VCSEL injectionCurrent magnitude

QW’s

QW’s QW’sFundamental mode 2nd order mode

Page 21: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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Different symmetric modesDifferent symmetric modesDifferent symmetric modes

Fundamental mode

2nd order mode

Page 22: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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Mode competition behavorMode competition Mode competition behavorbehavor

Asymmetric VCSEL

Total

Fundamental

2nd order

Symmetric VCSEL

Total

Fundamental

2nd order

Conclusions•a) VCSEL has similar

lateral mode competition behavior as edge laser;

•b) Asymmetric VCSEL mode is necessary to simulate multi-lateralmode behavior.

Page 23: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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ContentsContentsContents

Multiple section tunable DFB/DBR laser.Multiple lateral/longitudinal mode simulation.Lateral mode competition in VCSEL.Different k.p theories.

Multiple section tunable DFB/DBR laser.Multiple lateral/longitudinal mode simulation.Lateral mode competition in VCSEL.Different k.p theories.

Page 24: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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k.p theories for zinc-blendek.p theories for zinck.p theories for zinc--blendeblende

Subbands from 8x8 k.p theoryFor GaAs/AlGaAs

Motivations:•When conventional parabolic gain

model does not fit experiment, we need to try something else.

•Need to determine whether it is worththe trouble to go to higher order k.ptheories.

Page 25: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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Comparison for GaAs/AlGaAs QWComparison for Comparison for GaAsGaAs//AlGaAs AlGaAs QWQW

QW=GaAs/Al(0.33)Ga(0.67)As (t=76A)

Page 26: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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Spontaneous em. spectrumSpontaneous Spontaneous emem. spectrum. spectrum

QW=GaAs/Al(0.33)Ga(0.67)As (t=76A)

Page 27: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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Light v. currentLight v. currentLight v. current

QW=GaAs/Al(0.33)Ga(0.67)As (t=76A)

Page 28: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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Comparison for InGaAsP QWComparison for Comparison for InGaAsPInGaAsP QWQW

QW=InGa(.47)As/In(.74)Ga(.26)As(.57)P(.43) t=60A

Page 29: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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InGaAsP QW PLInGaAsP InGaAsP QW PLQW PL

QW=InGa(.47)As/In(.74)Ga(.26)As(.57)P(.43) t=60A

Page 30: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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InGaAsP QW L-I curveInGaAsP InGaAsP QW LQW L--I curveI curve

QW=InGa(.47)As/In(.74)Ga(.26)As(.57)P(.43) t=60A

Page 31: Numerical Simulation of Semiconductor …AlGaAs AlGaAs QWQW QW=GaAs/Al(0.33)Ga(0.67)As (t=76A) 26 Spontaneous Spontaneous Spontaneous em. spectrumemem. spectrum QW=GaAs/Al(0.33)Ga(0.67)As

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Conclusions on k.p modelsConclusions on k.p modelsConclusions on k.p models

For wide bandgap system such as GaAs, no need to go to 8x8.For smaller bandgap system such as InGaAsP at 1.55 um, 8x8 may improveaccuracy. 8x8 does not make fundamental difference to PL/gain spectrum shape.JDOS and/or manybody effects morelikely to results in better fit to experiments.

For wide bandgap system such as GaAs, no need to go to 8x8.For smaller bandgap system such as InGaAsP at 1.55 um, 8x8 may improveaccuracy. 8x8 does not make fundamental difference to PL/gain spectrum shape.JDOS and/or manybody effects morelikely to results in better fit to experiments.