Motion and Automation for Test, Measurement and Inspection...The Old Brick Kiln Ramsdell, Tadley Hampshire RG26 5PR United Kingdom Ph: +44 (0)1256 855055 ... • Mounted to a gear-drive

A e r o t e c h W o r l d w i d eUnited States • Germany • United Kingdom • Japan • China • Taiwan • France

Semiconductor Inspection and Metrology

Cleanroom and High Vacuum Systems

Integrated Automation and Data Acquisition

Sensor Testing

Surface Profiling

www.aerotech.comDedicated to the Science of Motion

Motion and Automation for Test, Measurement and Inspection

Capabilities in Test, Measurement and InspectionSince 1970, Aerotech has been dedicated to developing solutions for the test, measurement and inspection industry. Our expertise includes systems for shop floor, R&D, vacuum and cleanroom environments. Our ability to provide custom-engineered products and systems to end users, integrators and high-volume OEMs is unmatched, and our products deliver quality, performance, flexibility and the highest return on investment.

2

5•Single-andmulti-axisrate

tables

•Motionsimulatorsoftware

•Advancedcontroltechniques

•Excellentrateandin-positionstability

Sensor Testing

•Compactsurfacemeasurementplatform(SMP)

•Linearamplifiers

•Integratedsystemsupport

•Measurewafers,opticsandcylindricalshapes

•X-rayinspection

•Ultrasonictesting

•Largeselectionofcomponents

•Linearamplifiers

•Linearandrotarymotors

Nondestructive Test 19

Surface Profiling 15

3

23•Ellipsometry,scanningwhitelight

interferometry,stylusmeasurements

•Highperformancelinearmotorstages

•Lowprofiledirect-driveverticalandrotarystages

•Vacuumchuckoptionswithintegratedlevelingmechanisms

•LinearandPWMdigitalcontrollers


41•Stand-aloneand

PC-basedcontrollers

•PLCandmotionintegrationwithMotionPAC

•Operatorinterface

•Dataacquisition–SensorFusion

•Advancedtuningandcontrolsfeatures

Integrated Automation and Data Acquisition

•Satelliteinertialnavigationsystemtesting

•Scanningelectronmicroscopy

•Opticspolishing

•Vacuumoptionfor10-3to10-8

•Experiencewithvacuumapplications

35Cleanroom and High Vacuum Systems

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ContentsCapabilities in Test, Measurement and Inspection ........................................................... 2

Sensor TestingInertial Sensor Testing and Calibration ........................................................................... 6Motion Simulators ........................................................................................................... 8General Sensor Testing ................................................................................................... 12

Surface ProfilingSurface Measurement Motion Platform (SMP) ................................................................ 16Traditional Profiling and Measurement Solutions ............................................................ 18

Nondestructive TestX-Ray Inspection .............................................................................................................. 20Ultrasonic Testing ............................................................................................................ 22

Semiconductor Inspection and MetrologyThin Film Measurement ................................................................................................... 24Wafer Inspection ............................................................................................................. 26Atomic Force Microscopes .............................................................................................. 28Defect Detection/Particle Scanning ................................................................................. 30Electrical and Magnetic Characterization ....................................................................... 32Reticle Inspection ............................................................................................................ 33SEM, TEM, FIB ................................................................................................................ 34

Cleanroom SystemsCleanroom Capabilities .................................................................................................. 36

High-Vacuum SystemsVacuum Applications ...................................................................................................... 38Rotary Test Platform ........................................................................................................ 40

Integrated Automation and Data AcquisitionAerotech Integrated Automation Solutions ..................................................................... 42Standard Controls ........................................................................................................... 44Advanced Controls ......................................................................................................... 45Data Acquisition Solutions – Sensor Fusion ..................................................................... 46MotionPAC ..................................................................................................................... 48A Wide Variety of Amplifier Options .............................................................................. 50

Rotary and Linear MotionRotary Motion Solutions .................................................................................................. 52Linear Motion Solutions .................................................................................................. 56Planar Air-Bearing Stages ............................................................................................... 58Nanopositioners ............................................................................................................. 60Components to Integrated Solutions ............................................................................... 64

Bringing Value and Convenience to our Customers ...........65

Engineered Systems ...........................................................................66

Capabilities in Other Markets .......................................................68

Worldwide Training and Support ...............................................70

Awards and Recognition .................................................................71

Copyright © 2012, Aerotech, Inc. Information in this brochure is subject to change without notice.

WORLD HEADQUARTERS Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238 Ph: 412-963-7470 Fax: 412-963-7459 Email: [email protected]

Aerotech France 91280 Saint Pierre du Perray France Ph: +33 1 64 93 58 67 Fax: +44 (0)1256 855649 Email: [email protected]

Aerotech Germany Süd-West-Park 90 D-90449 Nürnberg, Germany Ph: +49-911-9679370 Fax: +49-911-96793720 Email: [email protected]

Aerotech United Kingdom The Old Brick Kiln Ramsdell, Tadley Hampshire RG26 5PR United Kingdom Ph: +44 (0)1256 855055 Fax: +44 (0)1256 855649 Email: [email protected]

Aerotech China Room 101, No. 28 Building Tianlin Road 140 Xuhui District Shanghai, China 200234 Ph: +86 (21) 3319 7715 Email: [email protected]

Aerotech Japan WBG Marive East 22F 2-6-1 Nakase Mihama Ward, Chiba Japan 261-7122 Ph: +81 (0)50 5830 6821 Fax: +81 (0)43 306 3773 Email: [email protected]

Aerotech Taiwan 5F., No.32, Aly. 18, Ln. 478 Ruiguang Road Neihu District, Taipei City Taiwan R.O.C. Ph: +886 (0)2 8751 6690 Email: [email protected]

Sensor Testing

Inertial Sensor Testing and CalibrationRegardless of the size, composition, degrees of freedom or quantity of sensors, Aerotech has a solution for the testing and calibration of today’s inertial sensors. Our solutions are designed to induce sinusoidal excitations, accelerations and positions for the testing and calibration of accelerometers, gyroscopes, inertial navigation systems, fiber optic gyros, inertial measurement units and stabilized systems. When coupled with our state of the art controllers containing Harmonic Cancellation, Motion Simulator Software, Motion Designer Software, Command Shaping and various other advanced control techniques, precise and highly-repeatable testing and calibration are assured.

Applications•Accelerometers

•Gyroscopes

•MEMScalibration

•Inertialmeasurementunits

6 www.aerotech.com

Features and Benefits•Highaccuracy,direct-drive

motionsimulators

•Nocogging

•Hightorque

•Mechanicalorairbearings

•Real-timedatacollection

•Position,rateandoscillationmodes

•User-profileimporting

•Easy-to-useprogrammingtools

•Slip-ringsortwistcablesfeedUUTsignals/power

•Solutionsrangefromeconomicalsingle-axissystemstohigh-performancethree-axissystems

ChallengeMany times a sinusoidal excitation is needed in the testing or calibration procedure of an inertia device. The very nature of this test introduces errors in the motion at the excitation frequency and other higher order harmonics. Left uncorrected, these errors can skew test results, lead to poor calibration or trigger unnecessary failures in quality assurance.

SolutionUsing Harmonic Cancellation, which is part of our Dynamic Controls Toolbox, you can easily cancel out any disturbances caused by the excitation frequency or an imbalanced load. This feature adapts to magnitude and frequency of error source. An easy-to-use setup wizard is provided through the Digital Scope and the Motion Simulator. Aerotech understands that disturbances are unacceptable and has developed Harmonic Cancellation for all of our controller lines to eliminate these errors, resulting in the most accurate testing and calibration results available.

Positionerrorwithoutharmoniccancellation

Positionerrorwithharmoniccancellation

AdvancedControl:HarmonicCancellation

7

Precision Direct-Drive Rotary Position and Rate Tables•Highcapacityangularcontact

bearingsorairbearings

•Highlyaccurateclosed-loopcontrol

•Brushless,slotlessmotorforsmoothmotionwithnocogging

•Largeselectionofintegrated,low-noiseslipringsforcustomersignalsandpower

•Multiplemotortypesforhighspeedorhigh-torqueconfigurations

•Excellenterrormotionperformance

•Dualliquidorgasports

•Lowmaintenancedesign

•Positionresolutionto0.000006°(0.1µrad)(0.02arcsec)

ARMS-260

ARMS-200

ARMS-150

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Motion Simulators – GUIKey Features:

•Operate1,2,3axismotionsimulators

•User-friendlygraphicaluserinterface

•GraphicalmotionprofilePVAT(Position,Velocity,Acceleration,Time)importing

•PositionSynchronizedOutputforreal-timeeventtriggering

•TrajectorytrackingfromEthernet,analogorprograminputs

•FrequencyresponsemodeallowsinputsinesweepandUUTperformancetestsoncustomerdevice

•IterativeLearningminimizespositionerror

•GUIremoteclient-servermodeallowsparallelprocessingcapabilitiesandcontrolviaEthernetnetwork

•HarmonicCancellationoptimizesmotionpositionerrorsgeneratedbysinusoidalmotion

MotionDesigner

FrequencyResponse

DataAnalysis

MainScreen

Program

Trackscreenallowsexternalsignalselectionfortracking

9

Motion Simulators – Single Axis

PCandNpaqorHLerack-mountcontroloperationviaAerotechMotionSimulationpackage

TiltMotion

UUTpowerandsignalsroutethroughsliprings

AreaformountingmultipleUUTs(UnitUnderTest)onourlargetabletopsforsimultaneoustesting

HighSpeedRotationorOscillation

ARMS-260•500lb(227kg)payloadcapacity

•Unloadedacceleration>20,000°/s2

•Minimumrate0.001°/s

Single-Axis ARMS Series Rate Tables•Single-axisconfigurationsincludeoptional

freestanding,highstiffnesspostwithlevelingfeet

•Reconfigurableforcontinuousorlimitedtravel

•Customslip-ringoptionsavailable

•Verticalorhorizontalorientationoptions

•Differenttabletopsizeoptions

High Accuracy Single-Axis Rate Table with Tilt Table•Allowsratetableperformanceat

multipleinclinationangles

•Mountedtoagear-driverotarytablefortiltmotion

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Motion Simulators – Two AxisTwo-axis motion simulators are useful for simultaneous axis testing of position, rate and acceleration sensors.

Two-Axis Rate Table with Integrated Electronics•Continuousrotationofbothaxes

•Smoothmotionfromnon-coggingbrushless,slotlessmotors

•Powerandsignalsliprings

•Tworotatinggas/liquidports

•Machinebaseincludesmotioncontroller,lineardigitalampsandESTOPsafetycontrols

Accuracyplotshowingbetterthan±1arc-secaccuracy(±4.85µrad)

ContinuousYaw

ContinuousRoll

ESTOPremoteforflexiblesafetylocations

LinearamplifiersandESTOPcontrolintegratedintorack-mountshelftominimizefloorspacerequirement

RemoteorintegratedPCoptions

Gyroandinertialdevicetesting

Motion Simulators – Three AxisThree-axis motion simulators provide roll, pitch and yaw simultaneous motion for real-world angular velocity profiles.

•Smallerthantraditionalthree-axissimulatorstoaccommodatetoday’sminiatureMEMSgyrosinamuchsmallerfootprint

•ModulardesignbasedontheARMSratetables

•Continuousorlimitedtraveloptions

•Pedestaloptions

•Single-axisratetablesintegratedwithaheatchamber

•Verticalandhorizontalmountavailable

•Lowcycletimesfortemperaturetests

Each motion simulator is tested for accuracy and tilt errors. Typical tilt error is below 10 µrad. Typical accuracy is ±5-10 µrad.

ContinuousRoll,PitchandYaw

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General Sensor TestingSensors of all shapes and sizes can be found in virtually every product that is manufactured. Sensors allow the products we use to work smarter and safer. The testing of these devices is critical to ensure safe and accurate operation. Regardless of the sensor type, Aerotech has a solution to meet your testing needs.

Applications•Positionsensors

•Infrareddetectors

•Automotivesensors

•Pressuresensors

Features and Benefits•Superiorvelocitystability

•Lowsettlingtime

•Highthroughput

•Highaccuracy

•Componentleveltoturnkeysystemcapabilities

•Numerousstageofferings

•Customizableuserinterface

•IntegratedDevelopmentEnvironment(IDE)

•Advancedcontrolstechniques

Products•APR

•ADRT/ADRS

•PROseries(ballscrewandlinearmotor)

•AGC

•ACS

•AGS1500

•Customsolutions APR

A3200andEnsemblemulti-axismotioncontrollers

ADRS

PRO165LM

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Variety of Linear Motion Stages for Every Application

ACT115:Lowcost,low-lead-timeactuators

PRO165LM-XY:StandardXY,XYZ,XYqcombinationsANT130-L:

Highresolutionlinearmotorstage

MPS75SL:Miniaturegear-drivenlinearstage

EnsembleSeries

SoloistSeries

Broad Selection of Integrated Controllers

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ChallengeToday’s sensors can come in many different shapes and sizes with even more variations in functionality. Developing and manufacturing devices is your area of expertise, and testing and inspecting those devices is very important. Aerotech understands that many times these highly specific devices require customized testing and calibration solutions.

SolutionOur highly skilled Mechanical, Electrical and System engineers will work with you to design a custom solution to meet your specific testing needs. We are capable of providing customization on all levels. From special motors to custom stages to complete machines with enclosures, safety and consoles, Aerotech is your one stop shop for all of your custom automation needs.

AGC Goniometers•Goniometersforuniquetesting

environments

•Linearamplifiersfordelicatetestingenvironments

•Integratedsolutionstominimizestartuptime

General Sensor Testing

NdriveLinearAmplifiers(ML,CL,HLe)

Surface Profiling

16 www.aerotech.com

Surface Measurement Motion Platform (SMP)Aerotech’s Surface Measurement Motion Platform (SMP) is a unique solution for surface profiling needs. The SMP is particularly effective when measuring or testing rotation symmetric objects but smaller non-rotation symmetric objects can also be measured. With the small mechanical footprint, integrated controls and flexible sensor options, the SMP can be easily added to any laboratory, testing facility or manufacturing floor. With the R and Theta axes available as air bearings or mechanical bearings there is a solution for every budget.

Features and Benefits•Idealforrotationallysymmetricobjects

•Includesuptofouraxesofmotioninacompactpackage -Availableasamechanical bearingorairbearingsolution

•Flexibilitytomeasuretopandsidesurfacesaswellasflatorsphericalparts

•Mechanicaldesignallowsforvarioussensoroptions -WhiteLightInterferometer -Multi-WavelengthInterferometer -VisionSystem -TouchProbes

•Compactdesignis60%smallerthantraditionalCartesiansystems

•High-speeddesignis40%fasterthantraditionalCartesiansystems

•Superiorpositionrepeatabilityinthenmrange

•Linearamplifiertechnology

•Versatilesoftwarearchitectureallowsforeasyintegration

•Advancedcontroltechniquestoeliminateenvironmentaldisturbances

•Availableoperatorinterfaceallowsforashortertimetomarket

Z

TT

C

RR

17

ChallengeThe mechanics and controls are only part of a complete profiling or inspection machine. Sensor integration, process development and data acquisition are many times a much larger part of the overall machine. Many times, coordinating the mechanical system position with the sensor values can be difficult and time consuming. Incorporating the results into a polished user interface is also necessary in order to bring the final product to market.

IncreaseratestabilityanddecreasesettletimesinthepresenceofvibrationwithAerotech’sEnhancedThroughputModule(ETM)

SolutionAerotech offers a suite of powerful software tools that allow for fast development of a custom interface.

•C#

•VB.NET®

•ManagedC++

•LabVIEW®(VIsprovided)

•CLibrary

•EPICS

•IEC61131-3

Time

Posi

tion

MotionDesigner–Graphicaltrajectorygenerationanddataanalysis

UsetheAerotechOperatorInterface(OI)forfastdeploymentLabVIEW™VIsforbuildingacustominterface

18 www.aerotech.com

Traditional Profiling and Measurement SolutionsSurface profiling applications challenge current motion control technology on a number of fronts. Extremely high probe sensitivity is required for state-of-the-art systems, mandating the smallest possible parasitic motion (such as flatness), while high-speed data collection must not be hampered by the automation controller. Aerotech’s integrated scanning platforms offer key features to increase both throughput and performance.

Products•AGS10000andAGS15000linearmotorgantries

•ANT130-XYmulti-axisnanopositioner

•ANT130-L-Zverticalnanopositioner

•Componentsforcustomsolutions

Features and Benefits•In-positionstability

•Highaccuracy

•Lowtotalcostofownership

•Component-to-turnkeysystemcapabilities

•Solutionsforalllevelsofaccuracy

-Ball-screwstages -Linearmotorstages -Air-bearingstages

AGS15000seriesCartesiangantry

ANT130-XYandANT130-Lmountedtoagranitebase/bridgeassembly

Nondestructive Test

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X-Ray InspectionAerotech understands the challenges behind today’s X-ray technology and has the components and stages to support all areas of X-ray inspection. As the tolerances for inspection get better and better, then so must the precision of the axes involved in the test procedure. This is why it is important to choose your products from a vendor that can supply not only what you need today, but also what you will need in the future.

Features and Benefits•Accuratelow-speedoperation

•Highvelocitystability

•Controlssolutionsforallaxes

•Largeselectionofcomponents

Products•PRO115andPRO165ball-screwstages

•AGRgear-driverotarystage

•ADRSmechanicalbearing,direct-driverotarystage

•ABRSandABRTair-bearing,direct-driverotarystages

•Customsolutions

AGR-50gear-driverotarystage

ABRS-200MPair-bearing,direct-driverotarystage

PRO165ball-screwlinearstage

21

SolutionAt Aerotech we have a wide range of stages and components to meet all of the needs of X-ray inspection machines. At the component level we have our linear motors, rotary motors and control solutions. Our PRO Series ball-screw stages and AGR Series gear-driven rotaries are the perfect choices for those non-testing axes. For test axes we have a large selection of direct drive and air-bearing options to meet any requirement.

ABL1500ZwithABRTrotarystage

ABRTseriesair-bearing,direct-driverotarystages

Linearamplifiersolutionsfornoiseimmunityandsmoothvelocitycontrol

ChallengeX-ray inspection machines require different axes of varying degrees of precision. Many times the axes not used during testing only require ball screw or gear-driven technology, while the test axes can require direct-drive motion or even air-bearing-level precision.

22 www.aerotech.com

Ultrasonic TestingWhether you are in search of a complete ultrasonic testing machine or just the components to build your own system, Aerotech has a solution. Our large selection of ball-screw stages, gear-driven rotaries and linear motor actuators are complemented nicely by our extensive controls in order to provide you with the best solution, all from a single vendor.

Products•PRO115ball-screwlinearstage

•ACTlinearactuator

•Linearamplifiers

•Rack-mountedamplifiers

•Linearmotors

•Rotarymotors

•Fullinspectionmachines

CustomXYZgantrysystembuiltfromPROserieslinearstages

Features and Benefits•Costeffective

•Noradiatedelectricalnoise

•Flexiblesolutions

•Componentstocompletesystems

Completelineoflinearamplifiersandmotors


Applications•Ellipsometry

•Reflectometry

•ScanningWhiteLightInterferometry(SWLI)

•Stylusmeasurements

Features and Benefits•Highlyaccurateclosed-loopcontrol

•Digitaloutputencoderoptions


•LowprofileZandthetastageoptions

•Rotarystageoptionswithintegralrotaryunionforvacuumchuckoperation

•Vacuumchuckoptionswithintegrallevelingmechanism

Thin Film MeasurementAerotech has a multitude of linear, rotary and Z stage options for two-, three- and four-axis thin film thickness and profile measurement tools. Each system has been designed to optimize throughput while minimizing thickness/profile direction geometric errors. All mechanics are designed to be fully cleanroom compatible by utilizing strict manufacturing methods, careful material selection and thoughtful cable management designs. Aerotech’s Ensemble controller, utilizing the ultra-compact Ensemble MP drive, provides a high-performance motion platform that requires minimal space.

Products•EnsembleMPPWMcontroller/drive

•Highperformancelinearmotorstages(ALS20000,PRO225LM)

•Lowprofiledirect-driveZandrotarystages(WaferMaxZ,WaferMaxT,ADRS)

350mmtravelALS20000XYstagewithWaferMaxthetastage

300mmwaferchuckwithintegral3-pointlevelingmount

EnsembleMPPWMdrives

24 www.aerotech.com

25

ChallengeFab floor-space is at a premium, which forces tool manufacturers to provide the smallest machine footprint possible. In addition, a variety of machine safety standards must be satisfied. Compact drive electronics that can run on non-lethal voltages (48 VDC and below) and can be mounted just about anywhere in the tool are highly valuable when attempting to pass regulatory standards like Semi S2.

SolutionAerotech’s MP and ML drive options are compact, DC input compatible drives that provide nearly all of the control functionality of other drives but take up less than one-fourth the volume. Their compact size allows them to be mounted just about anywhere and they are compatible with readily available 24 and 48 VDC supplies.

EnsembleML10-40-IOMXH(linear)andEnsembleMP10-IO-MXU(PWM)drives

41.1mm107m

m

14

1.2

mm

26 www.aerotech.com

Wafer InspectionAn integral element of every wafer fabrication facility is its optical (lightfield and darkfield) inspection systems. These surface characterization tools detect a wide variety of defects including voids, pits and scratches in the wafer surface. Smooth, high-speed raster scanning is required to meet the needs of today’s fabrication facility. Aerotech’s ABL9000 has long been the standard for this type of inspection by providing superior dynamic performance characteristics.

ABL9000motionplatformwithgranitebridge/Zaxis,optimizedisolationsystemandmachinebase

Features and Benefits•Aerotechdirect-drivelinearmotorsallowfor

high-speedscanningandfastturnaround,thusmaximizinginspectiontoolthroughput

•AerotechoffersawidevarietyofaxesthatcanbemountedonanXYstage,includingthetaaxesforpatternalignmentandZaxesforfocusadjustment

•Open-framestageformicroscopeapplications

•Aerotech-suppliedmachinebaseandisolationsystemminimizeintegrationtime

•Aerotech’sexperiencedengineeringgroupcanassistindevelopingacustomsystemtomeetyourspecificneeds

Aerotechoffersawidevarietyoflinearandrotarystagecombinationstofitnearlyanyinspection/defectdetectionapplication.

ABL1500WB/ABL1500XYwithpneumaticallycounter-balancedABL1500Z

ABL1500WB/ABL1500XYwithWaferMaxZq

Products•Highdynamicstages(PlanarHD,ABL9000,

ABL1500,ALS3600)

•Direct-driverotaryandZ-axisstages

(WaferMaxZandT)

•HighperformanceA3200controlplatform

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TheSlice(rasterscanning)commandblendsascanningandsteppingmovetogethertoformasinglecontouredmoveforhigherthroughput

Aerotechhasmultipleopenframestageconfigurationsincludingairandmechanicalbearingsystemsideallysuitedtoopticalwaferinspectionapplications.

Automation3200(A3200)multi-axismachinecontroller

HighthroughputcustomALS3600openframestage

ChallengeThe key to optical wafer measurement systems is their ability to accurately identify and measure defects while running at production line rates. This requires exceptionally stiff mechanical structures, motion profile generation and responsive isolation systems. The system’s ability to settle to a target scan velocity is key to meeting wafer per hour (wph) throughput requirements.

SolutionBoth Aerotech’s air and mechanical bearing stages are developed to be the highest stiffness structures possible. This design philosophy forces throughput reducing natural frequencies as high as possible. In addition, Aerotech has developed move profile optimization routines that allow for faster settling after acceleration. The Slice command smooths the stage turnaround during raster scanning, and Directional Gain Scheduling reduces settling time by automatically adjusting gains based on error motions.

Dynamic Position Error, Circle XY - Gain Scheduled Kpos

Time (seconds)

Pos

Erro

r x

(µm

)Po

s Er

ror

y (µ

m)

Vec

tor

Pos

Erro

r (µ

m)

Time (seconds)

Time (seconds)

Normal

Gain Scheduled Kpos

Normal

Gain Scheduled Kpos

Normal

Gain Scheduled Kpos

Thissystemfeaturesair-bearingstagesandtwo-axislaserinterferometerfeedbacktoprovidesub-nanometerresolution.

28 www.aerotech.com

Atomic Force MicroscopesMany inspection applications require tight positional stability, but few are as stringent as that for Atomic Force Microscopes (AFMs). Aerotech has multiple motion platform solutions that directly address the needs of Atomic Force Microscopy by providing nanometer step sizes to single-digit nanometer positional stability. The recommended platforms are all direct-drive, direct-feedback devices that undergo extensive testing to ensure top-notch accuracy and stability performance.

Products•Ultra-stablemulti-axismotionplatforms

(ABL9000,ANT95-XY,ANT130-XY)

•Lownoise,highresolutioncontrolelectronics(NdriveHLe,Npaq/DL4010,NdriveML)

•Alternativeconstructionmaterialstominimizethermalissues

Features and Benefits•A3200motioncontrollerwithrackmountor

discretelinearamplifiers

•HighperformanceintegratedXYlinearmotorstages–airbearingandmechanicalbearing

•Ultra-stablemotionplatformprovidesverytightin-positionstabilityandminimaldrift

300mmwaferclassABL9000planarair-bearing

SolutionAerotech’s ABL9000 can be “locked” in both X and Y to dramatically increase positional stability over time. Specially designed methods are used to control the locking procedure while maintaining positional information. This ensures that the user always knows where the sample is positioned regardless of the locking condition.

Special calibration methods can be used to increase both the unlocked and locked accuracy at the workplane of an XY stage system. These methods are designed to not only reduce the positional errors but also X and Y direction errors caused by rotations in theta X, theta Y and theta Z directions.

ChallengeAFMs produce exceptionally high-resolution images of very complex geometric features. The challenge is finding a motion platform that provides very accurate positioning as well as no motion when settling in position. Positional instability is a parasitic motion that AFMs cannot tolerate.

InvarALS130-XYwithpneumaticallycounterbalancedZaxisisspecificallydesignedtodramaticallyincreasethermalstability.

ANT180-XYstagesystem

ANT130-XY ANT95-XY-ULTRADiscreteorrack-mountlinearamplifieroptions

0 5 10 15 20 25 301

0

1

2

3

4

5

6

7

8

9

10

11

Time (s)

Pos

ition

(nm

)

1 nm Best-in-Class Resolution

1nmstepplotforANT95-XY-ULTRA

29

30 www.aerotech.com

Defect Detection/ Particle ScanningAerotech’s ultra-smooth linear air-bearing motion systems and high performance rotary stages are an excellent choice for macro-defect, particle contamination and general defect measurements. High speed linear and matched rotary stages coupled with a state-of-the-art motion controller provide accurate, high-throughput measurements. Whether it is simple “spokes-of-the-wheel” motions or tightly controlled helical inspection profiles, Aerotech has the optimum stage combination.

Products•A3200motioncontrollerwithrack-

mountordiscretelinearamplifiers

•HarmonicCancellationadvancedcontrolsminimizeparasiticcouplingbetweenrotaryandlinearaxes

•Highperformanceair-bearing,linearmotorstages(ABL1500/ABL2000)

•Direct-drivehigh-speedspindleortraditionalrotarystages(ABS2000/ASR2000/ABRS/ADRS)

CustomABL2000linearair-bearingwithcustomlow-profilerotarystage

Dependingonaxisorientationandpackagingrequirements,Aerotechcandesignacustom,high-performanceR-thetasolutiontosuit.

ASR2000seriesmechanical-bearingspindle

Aerotechhasbothmechanicalandair-bearingspindleoptionsforrotationalspeedsupto6000rpm.

ABS2000seriesair-bearingspindle

31

ChallengeWhen incorporating high-speed rotary axes into a multi-axis motion platform, chuck balancing becomes an important concern. Proper balancing of the payload increases accuracy by reducing machine vibration and increases throughput by allowing for higher spindle speeds.

Features and Benefits•Aerotechadvancedcontrols–

HarmonicCancellation

•Reducepositionerroronperiodictrajectories

•Rejectperiodicdisturbances

•Adaptstomagnitudeandfrequencyoferrorsource

•Built-insetupwizards

SolutionFor applications utilizing a high-speed spindle, Aerotech can perform chuck centering/balancing to reduce integration time. In addition, Aerotech’s advanced control suite incorporates “Harmonic Cancellation,” a control method specifically designed to dramatically reduce cross-talk between rotary axes with residual imbalance and linear axes.

High-powerlinearamplifiercontrolsystem

PositionerrorwithoutHarmonicCancellation

PositionerrorwithHarmonicCancellation

AdvancedControl:HarmonicCancellation

32 www.aerotech.com

Products•EpaqrackmountorEnsembleCP/MP

discretedrives

•PROseries,AGS1000,side-driveXY

•AVS/AVSIseries,ATS100forfocusing

•AGRseries

Electrical and Magnetic CharacterizationFrom traditional four-axis stage stacks to small footprint gantry systems, Aerotech has a multitude of options for electrical and magnetic measurements. For magnetic measurements, Aerotech can also supply custom structures that increase the distance between magnetic materials and the work area or can provide specially designed shielding solutions.

Features and Benefits•TraditionalXYorgantryconfigurations

•Rotaryencoder,linearencoderor“dual-loop”feedback

•Highaccuracyandtightin-positionstability

•Customdesignsavailable

AGS1000Cartesiangantry

CustomXYcrossed-rollerstage

Ensemblemulti-axisstand-alonecontroller

Reticle InspectionReticle inspection requires a unique combination of mechanics that provides both ultra-high accuracy and a large clear aperture. The combination of high stiffness air bearings and dual linear-motor-driven axes provides an XY open-frame stage with exceptional performance characteristics. The ABL3600 represents a major upgrade in performance over traditional mechanical-bearing open-frame stages.

Features and Benefits•Largeclearapertureprovides

completeaccessforinspectionandillumination

•Duallinear-motor-drivenXandYaxesprovideexcellentyawperformance(0.5arcsec)

•Allairbearingsarefullypreloadedtoprovideexceptionalsystemstiffness


•Linearencoderorlaserinterferometerfeedbackprovideshighlyaccuratepositioning

Products•ABL3600

•ALS3600

•Customtip-tilt

•A3200controller

•Npaqdrivechassis

Automation3200(A3200)multi-axismachinecontroller

ABL3600open-frameair-bearingwith250mmXYtravel

33

SolutionAerotech has a long history of supplying vacuum compatible motion systems for a variety of applications including semiconductor inspection, satellite testing and ion beam profiling. Our application, engineering and production staff are highly skilled and experienced with custom vacuum system solutions designed to meet specific testing needs of vacuum inspection systems.

SEM, TEM, FIBElectron/ion microscopy including transmission electron, scanning electron and focused ion beam microscopes provide exceptionally high resolution images with large depths of field and have many other advantages over traditional microscopy. Strikingly clear images are obtained from samples ranging from biological samples to semiconductor wafers. Regardless of the component under test, Aerotech has a variety of high vacuum, low magnetic field electromechanical solutions.

ApplicationsToday’s electron- and ion-beam microscopes require very high throughput motion systems that utilize high vacuum compatible materials and incorporate careful magnetic field management. All of these features ensure fast, accurate measurements with little contamination.

•BGAcomponents

•Biologicalsamples

•Materialsqualification

•Semiconductorwafers

Features and Benefits•Customsolutions

•Highthroughput

•Lowsettlingtime

•Highaccuracy

•Componentturnkeysystemcapabilities

•IntegratedDevelopmentEnvironment

•Advancedcontroltechniques

34

XYvacuumstagewithspecialshieldedmagnets

Cleanroom Systems

Cleanroom CapabilitiesAerotech manufactures the widest variety of cleanroom compatible motion solutions for high performance applications such as wafer inspection and metrology.

Aerotech Cleanroom-Ready Motion Systems Feature:•Lowparticulategeneratingcablemanagement

systems

•Cleanroomcompatible,hydrocarbon-freelubricants

•Specialmaterialsurfacetreatments

•Manufacturingprocessesthatarespecificallydesignedtomaximizesystem-levelcleanliness

•Cleanroompackaging

Cleanroom Facility•ISOClass6

•CellspecificISOclass5areas

•Temperaturecontrolto±0.1degreeC

•Dedicatedproducttransferandlargemainproductassemblyareas

•Actively-isolatedgranitesurfaceplatesfortestingpurposes

36 www.aerotech.com

ALS20000XYlinearmotorstage

ABL9000planarair-bearingwithcustomisolationsystem

High-throughputopen-framesystem

High-Vacuum Systems

38

Vacuum ApplicationsAerotech’s vast application experience, unmatched product scope, and extensive engineering capabilities make us the partner of choice for vacuum compatible motion systems. Since our inception, Aerotech has designed and manufactured the highest-performance motion control and positioning systems available, and our vacuum-compatible platforms are no exception. Aerotech’s precision motion control products provide the critical performance for today’s demanding vacuum applications in markets such as semiconductor manufacturing and inspection, optics fabrication and military/aerospace. Always guiding our vacuum system development effort is Aerotech’s motto: “DedicatedtotheScienceofMotion.”

Aerotech Has Specific Experience with Vacuum-Compatible Motion Platforms•Materialselection

•Surfacepreparation

•Hardwareventingandeliminationoftrappedvolumes

•Lubricantselection

•Thermalmanagement

•Magneticfieldcontrol

•Cleaning

•Bake-out

•Handlingandpackaging

Vacuum Options Available from Aerotech•Lowvacuumoption(10-3torr)

•Standardvacuumoption(10-6torr)

•Highvacuumoption(10-8torr)

Aerotech’s Vacuum Experience Includes a Wide Variety of Applications•Satellitecomponenttesting

•Scanningelectronmicroscopy(SEM)

•E-beaminspection

•EUVlithography

•Ion-beamprofiling

•Ionimplantation

•Deposition

•Opticspolishing

XYvacuumsystempreparedfor10-8torroperation

A wide variety of standard Aerotech motion products are available in vacuum-prepared versions. In addition to standard platforms, Aerotech routinely manufactures custom systems designed to meet application-specific needs. All of Aerotech’s vacuum compatible motion platforms minimize pump down time, chamber contamination and thermal issues. In addition, these systems can incorporate key application considerations like reduction of magnetic fields.

ShieldedlinearservomotorAerotechcleanroom

Actualmagneticfieldmeasurementovera300mmdiametertargetzone

ActualRGAplotfromanXYsystem

39

Multipleconfigurationsavailable

40 www.aerotech.com

The Aerotech Rotary Calibrator (ARC) sets a new industry standard of performance for angle and rotary table calibrations. At the heart of the Calibrator is a large rotary air-bearing axis with nanometer-level error motion performance. This high-accuracy air-bearing master axis is constructed of steel to closely match the CTE

of the surrounding granite structure. The air-bearing acts as the master angle generator to generate angles as small as 0.015 arc-seconds to over 360° (continuous rotation).

The Calibrator is equipped with a high-resolution, high-accuracy electronic autocollimator for measurement feedback on optical surfaces. The entire instrument is built on a precision granite machine structure that is isolated from the machine base and floor through passive air isolation. A custom enclosure isolates the system from air turbulence, high-frequency thermal fluctuations and ambient light. System electronics are housed in a separate enclosure from the instrument to isolate any electrical noise and heat from the instrument. Custom calibration software provides the operator with easy control of the angular step, test procedure (such as circle closure) and plot/report generation.

Rotary Test Platform

1. Angular measurement uncertainty analysis performed according to ANSI/NCSL Z540-2-1997: Guide to the Expression of Uncertainty in Measurement while calibration of a rotary table over 360º with 10º steps using a modified circle closure technique. The temperature of the lab was controlled to 20ºC +/- 0.25ºC.

Specifications• Master-axis accuracy:

<0.15 arc-seconds (<727 nano-radians)

• Minimum incremental step (min. angle): 0.015 arc-seconds (73 nano-radians)

• Electronic system resolution: 0.0069 arc-seconds (34 nano-radians)

• Angular measurement uncertainty: <0.2 arc-seconds expanded uncertainty, k=2 (<970 nano-radians, k=2)1.

• Customized software for automated test execution and report generation

• Built-in control and plot utilities

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Position (Degrees)0� 50� 100� 150� 200� 250 300 350

0.2

0.15

0.1

0.05

0

-0.05

-0.1

-0.15

-0.2

Data Taken 5-May-2010

Data Taken 11-May-2010Data Taken 6-May-2010

Pos

ition

Err

or (A

rc S

econ

ds)

Aerotech Rotary Calibrator (ARC) master axis error – calibrated repeatability over multiple days.

Integrated Automationand Data Acquisition

42 www.aerotech.com

•Highperformance

•Easytouse

•Flexible

•Scalable

•Networked

•Lowestcostofownership

•Advancedcontroltechnology

Linear and Rotary Servomotors

Automation 3200 Ensemble

Network and Fieldbus Connectivity•Ethernet/IP™

•Modbus®/TCP

•DeviceNET

•EthernetTCP/IP

•USB

•RS-232

•GPIB

•PC-based

•1to32axesofcoordinatedmotion

•Upto32tasks

•RS-274(G-code)

•Advancedfeaturesfordemandingapplications

•PWMorlineardrives(upto150amp)

•Scannercontrolformarking

•Tightlyintegratedlaserfunctionality

•Retrofitpackageforoldcontrols

•IntegratedPLC–MotionPAC

•Stand-alone

•1to10axiscontroller

•Upto4tasks

•Versatile,cost-effective,coordinatedmotion

Aerotech Integrated Automation Solutions

Configure Your Automation Solution with Aerotech

• Common Software Platform: Tools, Powerful Programming Environment, Calculators, Diagnostics

ProgrammingInterface Autotune LoopTransmission

43

Soloist

Accessories•Linearamps

•ESTOP

•Rack-mountconfiguration

•Rack-mountPCs

Data Acquisition

•Stand-alone

•1to10axiscontroller

•Upto4tasks

•Versatile,cost-effective,coordinatedmotion

•PWMorlineardrives(10-150amppeak)

•Drivesbrushless,linear,rotary,DCbrushorsteppermotors

•Desktop,rackmountorpanelmount

•Stand-alone

•Networkupto1,024singleaxes

•Upto4tasks

•Elegant,economical,versatilecontroller

•PWMorlineardrives(10-150amppeak)

•Drivesbrushless,linear,rotary,DCbrushorsteppermotors

• Common Software Platform: Tools, Powerful Programming Environment, Calculators, Diagnostics • Use the libraries and SDK to develop your own applications with .NET, C#, VB.NET, C, or LabVIEW®

MotionPACParameterEditor DigitalScope

SensorFusion

44 www.aerotech.com

Standard Controls

Slice Move

Aerotech controllers offer the broadest array of programming interfaces and core motion capabilities of any automation system available today for both OEMs and end-users alike.

Increasescanningthroughputbyblendingstepandscanintoacontouredmove

Axis Calibration

Compensateforrepeatablemechanicalerrorsinapositioningsystem

Gantry Mode

Complexgantrycontrolisreducedtoafewsimplecommandstohandledualmotorand/ordualfeedbackconfigurations

Parts Rotation

Usewhenatwo-dimensionalpartmustberepeatedindifferentorientationswithouttranslatingthepartprogrammanytimesover

3D Error Correction

MeasureXYZerrorsandthecontrollercancorrectthecommandedpositiontoaccuratelymovetoalllocationsinthe3Dspace

Dual-Loop Control

Dual-loopcontrolisusedtoeliminatetheeffectsofbacklashandothersourcesoferror

Laser Interferometer

Systemsrequiringultra-highresolutionandfeedbackstabilityuseinterferometerfeedback

Velocity Blending

Thevelocitychangestothenextvelocitycommand,accelerationlimited,withoutstopping

Orthogonality Correction

ImproveX-Yplanaraccuracybysimplyenteringtheknownorthogonalityerrorandthecontrollerwillcompensate

45

Advanced Controls

Directional Gain Scheduling

Decreasesettletimeandincreasein-positionstability

Friction Compensation

Reducesettletimeandreduceerroratdirectionreversals

Position Synchronized Output (PSO)

Triggerexternaleventspreciselyatdesiredpositionwhileinmotion

Motion Designer

Graphicaltrajectorygenerationanddataanalysis

Command Shaping

Reducevibrationattheworkpoint

Loop Transmission

Tuninganddiagnosticutilitythatgreatlyenhancessystemperformance

Harmonic Cancellation

Reducepositionerroronperiodictrajectoriesandrejectperiodicdisturbances

Iterative Learning Control

Reducefollowingerroronrepeatedmovesequencesthatcanbelearnedandoptimized

Enhanced Throughput Module (ETM)

Increaseratestabilityanddecreasesettletimesinthepresenceofvibration

46 www.aerotech.com

Data Acquisition Solutions – Sensor FusionThe Sensor Fusion desktop, rack mount or panel mount system allows you to record sensor I/O precisely aligned with encoder positions, and to retrieve the results through one easy to use software interface. The Sensor Fusion, when used with PSO and the Digital Scope, is Aerotech’s answer for all of your data acquisition needs. The Sensor Fusion can have up to four of the following card options:

With a variety of analog, digital, encoder and PSO cards available, the Sensor Fusion allows you to record sensor data and position data in ways that have never been possible. Its modular design allows for additional cards such as vision and serial data acquisition. With desktop, rack mount and panel mount options available, there is a Sensor Fusion for every application. As an integrated member of the A3200 motion controller family, the Sensor Fusion allows you to collect position data as well as sensor data in concert with one another.

•AnalogInput

•AnalogOutput

•DigitalInput

•DigitalOutput

•EncoderInputandPSOOutput

Features and Benefits•Dataacquisitionprecisely

integratedwithmotioncontrol

•SensorI/Oeasilyalignedwithencoderposition

•Datarecordingandplayback

•Combinesensorinputsinrealtime

•5MHzcollectionrates

•Oneeasy-to-usesoftwareinterface

•Noadditionalsoftwarerequired

•Desktop,rackmountandpanel-mountoptions

SensorFusion

47

SF-DO-01SF-DO-02•32digitaloutputs

•5MHzplayback

•32mAat5V

•Highpoweroption:325mAat5-24V

Digital Input Digital Output

Encoder Input and PSO Output

Digital Input:SF-DI-01•32digitalinputs

•5MHzcollectionrate

•5Vor24V

•Activehighoractivelow

SF-ENC-01•4encoderinputs

(TTL)

•1PSOoutputs

•1.0MHzcollection

Analog OutputAnalog Input

SF-AI-01SF-AI-02•16analoginputs

•Upto400kHzcollection

•18-bitresolution

•Selectableinputrange

SF-AO-01SF-AO-02•8or16outputs

•500kHzplayback

•16-bitresolution

•5V,10Vorexternalreferencevoltage

SF-AO-03SF-AO-04•4or8outputs

•750kHzplayback

•20-bitresolution

•5V,10Vorexternalreferencevoltage

48 www.aerotech.com

MotionPAC – PLC Integrated With Motion•30%to50%reductionindevelopmenttime

•High-performancemotionfullyintegratedwithstandardPLCenvironment

•Easy-to-usediagnosticsandtools

•Standards&flexibility:IEC61131-3,.NET,PLCopen,PC-based

•IntegratedwiththeA3200motioncontroller

Program in IEC6 1131-3: LD, FBD, ST

Define hardwareOnline mode displays all Tag values

Axis manager Standard LDCreate libraries

Combine LD and FD on same program

Completely integrated motion blocks

Tag database

LD, FBD or ST programs

49

Integrated Automation: MotionPAC

MotionPAC•IEC61131-3•PLCopen•Aerotechmotionblocks•Axismanager•Extensivedevelopment&debugenvironment•Simulateprogram

Motion Composer•Axismanager•Low-levelmotiondiagnostics•Motionprogramming•Advancedcontrolalgorithms

Scope•Signalcapture&analysis•Autotuning•Looptransmission•Encodertuning•Advancedcontrols

HMI•Programselectionandrun•Jogpanel•Machinecontrol•Customizablebuttons•Axismanager

I/O & Data Acquisition•High-speeddataacquisitionsynchronized

withmotionandPLC•High-speedregistration•PositionSynchronizedOutput•Machineinterlocks•FieldbusI/O

Central Machine Tag Database•Tagsavailableinallapplicationsbyname•DefinebothlocalorglobalmachineTags•DefineTagsinI/Odefinition,ST,LD,FBDor

motionprogram

50 www.aerotech.com

A Wide Variety of Amplifier Options

MP

1 1 1 11 6 6

10 A

10-80 VDC (Output)

1-AI6-DI/4-DO

1-AI/1-AO

8-DI/8-DO

1-AI/1-AO

All units capable of sinusoidal commutation, dual-loop control and drive brushless, brush or stepper motor

16-DI/16-DO

1-AI/1-AO

16-DI/16-DO

1-AI/1-AO

16-DI/16-DO

4-AI/4-AO

16-DI/16-DO

4-AI/4-AO

6-DI/4-DO

1-AI/1-AO

6-DI/4-DO

1-AI/1-AO

6-DI/4-DO

1-AI/1-AO

10-320 VDC 10-320 VDC ±40-80 VDC±40 VDC

10 A

N/A

Npaq®: 10-30 A

Npaq®: 10-320 VDC

Multiple Configurations

Available

Multiple Configurations

Available

1-AI per axis

8-DI/8-DO per Axis

1-AI/1-AO per Axis

Epaq: 24-90 VDC

Epaq: 10 A10-30 A 10-150 A 10-20 A

PWMPWM PWM LinearLinearNpaq®: Both

PWM and Linear Available

Epaq: Both PWM and

Linear Available

A3200Drives

Ensemble Controls

Soloist Controls

Output Type

Axes

Peak Current Output

DC Bus Voltage

Standard I/O

Optional I/O

Incremental Encoder

Absolute Encoder

Resolver/ InductosynCapacitive

ProbesLaser

Interferometer

CP HPe HLe MLCL Integrated Drive Racks

Npaq® or Npaq® MR drive chassis

Epaq or Epaq MR drive chassis and motion controller

1

16-DI/16-DO

1-AI/1-AO

6-DI/4-DO

1-AI/1-AO

±40 VDC

10 A

Linear

Rotary and Linear Motion

52 www.aerotech.com

Rotary Motion Solutions

•100mm,150mm,200mm,250mmand325mmapertures

•Axialloadcapacityto595kg

•Excellentaccuracyandrepeatability

•Cog-freemotorprovidessmoothmotion

•Nogearbacklash

ALAR•Noaccuracychangeovertime

fromgearwear

•45-300rpmcontinuousrotationspeed

•Vac10-6torrcompatibleversions

•Highresolutiongivesexcellentsteppingandin-positionstability

TheALAR-LPseriesisdesignedtobemountedwiththeverticalaxiscoincidentwithgravity.TheLPislowerprofilethantheSPforapplicationsthathavelessspaceavailable.

In-positionstabilityof±0.05µrad Highresolutiongivessmallstepcapability

TheALAR-SPseriesisdesignedtobemountedinanyconfiguration–verticalorhorizontal.

53

Ultra-Precise, Low Profile, Direct-Drive Rotary Air-Bearings•Excellentradial,axialandtilt

errormotions

•Directcoupled,high-accuracyrotaryencoder

•Lowprofile,planardesign


•Magneticpreload

Ultra-Precise, High Accuracy, Direct-Drive Rotary Air-Bearings•Hightorqueoutput,direct-drive

slotless,brushlessservomotor

•Zero-coggingmotorforoutstandingvelocitystability

•Excellentradial,axialandtilterrormotions


•Large-diameterclearaperture

•Nomechanicalcontact

•Fullyconstrainedair-bearingcanberunupsidedownoronitsside


ABRSSeries

ABRTSeries

54 www.aerotech.com

High Accuracy Rotary Stage

•Accuraciesupto1.1arcsecond

•Axialloadcapacityupto450kg

•Incrementalorabsoluteencoders

•Largebearingsprovidehighpayloadandmomentloadcapacity

•375-800rpmcontinuousrotationspeed

•Sevenmodelsareavailable,eachwitheither50,75or100mmclearaperture

Low Profile, Direct-Drive Rotary Stages•Hightorqueoutput,direct-drive

brushlessservomotor

•Cogfree,slotlessmotordesignforsuperiorvelocitystability


•Ultra-low-profileminimizesworkingheight

ADRSSeries

APRSeries

55

Large Aperture, Gear-Drive Rotary Stage

AGRSeries

•Enhancedspeedandloadcapacity

•Largeapertureaddressesawiderangeofapplications

•Usefulforheavyandunbalancedloads

•Non-back-drivinggear

•Vacuumratedoptionsto10-6torr

ADRTSeries

High Torque Output, Direct-Drive Rotary Stages•Cog-freebrushlessservomotor

designforoutstandingvelocitystability

•Large-diameterclearaperture

•Highloadcapacityandhighspeed

•5-60arcsecondaccuracy

56 www.aerotech.com

ALS Series•Direct-drivelinearmotorstages

•Hardcoverandside-sealdesignforyearsofmaintenance-freeoperation

•Highaccuracylinearencoderoptionforapplicationsthatrequireexcellentvelocityregulation

•Multipleframesizesandtravellengthsprovidesystemconfigurationflexibility

•IntegratedcablemanagementforXY,XYZconfigurationsandcustomerinterfaces

AGS Series•Optimizeddesignforprecisecontouring

•Velocityto3m/sandaccelerationto5g

•Highpowerbrushlesslinearservomotorsforsmoothmotion

•Travelsupto1.5mx1.5m

•CustomizableZandthetaaxesforflexibleconfigurations

•Noncontactlinearencoders

•Configurablecablemanagementsystemallowsforintegrationoffiberlasers,cameras,airlines,etc.formultipleapplications

ABL Series•Exceptionalgeometricair-bearingperformance

•Travelto1.2meter

•Linearencoderorlaserinterferometerfeedback

•Submicronaccuracy

•IntegratedXYandXYZsystems

•Non-coggingdirect-drivemotors

ALS5000WB

AGS15000

ABL1500

ABL8000

Linear Motion Solutions

57

PRO Series•Precisiongroundball-screwdrive

•Ruggedconstruction

•Long-lifelinearmotionbearing

•Side-sealdesignwithhardcoverprotectsfromdebrisbetterthantop-sealdesign

•Lowcost,highperformance

•50to1500mmtravel

ATS Series•Precisiongroundball-screwdrive

•Ruggedconstruction

•Highaccuracy,noncontactlinearencoder

•Long-lifelinearmotionguidebearingsystem

•Travelsfrom25mmto1000mm

•Heavyloadoptionsavailable

•10-6torrvacuumcompatible

•Hard-coatedtabletopandcover

•Low-bearingerrorsforexcellentgeometricperformance

MPS Series•50and75mmwidths

•Travelto100mm

•Precisiongroundball-screworlead-screwdrive

•DCservoorsteppermotor

•Crossed-rollerbearings

•Compactmulti-axisconfigurations

PRO LM Series•Direct-drivelinearmotorfor

ultra-precisemotion

•Long-lifelinearmotionguidebearingsystem

•Travelsfrom100mmto1500mm

•Low-cost,high-performancestage

MPS50SL/MPS75SLXY

PRO165

PRO165LM

ATS5000WB

58 www.aerotech.com

Planar Air-bearing StagesABL9000•Fullpreloadonallaxes

•Duallinear-motor-drivenYaxis

•Travelto1.2mx1.2m


PlanarHD

•Maximizethroughputwith2m/sscanvelocityand5gacceleration

•Fasterturnaroundandminimizedsettlingtimes

•Activeyawcontrol


•Travelto1.2mx1.2mDynamicstraightness,center270mmoftravelat500.0mm/smaxvelocity

ABL9000

PlanarHD

59

AHL9000•Air-bearingscanaxis;mechanical-bearingstepaxis

•Duallinear-motor-drivenstepaxis

•Travelto1.2mx1.2m


ABG10000•Airbearingsforultra-smoothmotion

•Allaxesarefullypreloaded

•Duallinear-motor-drivenloweraxis

•Travelto1mx1m

•Optionsinclude:Zaxis,vibrationisolation,machinebaseandcontrolenclosure

AHL9000

ABG10000

60 www.aerotech.com

NanopositionersANT95-L Single-Axis Linear Stage•Noncontact,non-cogging,frictionless

direct-drive–zerobacklashorhysteresis

•Highresolution(1nm),repeatability(75nm)andaccuracy(250nm)

•In-positionstabilityof<1nm

•Anti-creepcrossed-rollerbearings

•Highdynamicperformance

•AvailableinX,XY,XYZandmanyothercombinations

ANT95-XY Dual-Axis Linear Stage•IntegratedlowprofileXYlinearmotorstage

•Noncontact,non-cogging,frictionlessdirect-drive–zerobacklashorhysteresis

•Highresolution(1nm),repeatability(75nm)andaccuracy(250nm)peraxis




-25-12.5

012.5

25

-25-12.5

012.5

25-3-2-10123

Position (mm)

Position (mm)

Acc

urac

y E

rror

(µm

)

ANT95-50-L-PLUS1nmstepplot

TheANT95-Lseriesoffers25,50,75and100mmtravels

ANT95-50-XY-ULTRA2Dsystemaccuracy

TheANT95-XYseriesoffers25x25mmor50x50mmtravel

61

ANT130-L Single-Axis Linear Stage•Noncontact,non-cogging,frictionlessdirect-

drive–zerobacklashorhysteresis





•Largeselection–4differenttraveloptions

ANT130-XY Dual-Axis Linear Stage•IntegratedlowprofileXYlinearmotorstage

•Noncontact,non-cogging,frictionlessdirect-drive–zerobacklashorhysteresis





AWARDS

-80-40

040

80

-80-40

040

80-3-2-10123

Position (mm)

Position (mm)

Acc

ura

cy E

rro

r (µ

m)

TheANT130-Lseriesoffers35,60,110or160mmtravel

ANT130-060-L-PLUS1nmstepplot

TheANT130-XYseriesoffers60x60,110x110or160x160mmtravel

ANT130-160-XY-ULTRA2Dsystemaccuracy

62 www.aerotech.com

ANT95-R and ANT130-R Rotary Stages•Highresolution(0.01arcsec)

•Highperformanceinlargetravels

•Outstandingerrormotionspecifications

•0.005arc-secin-positionstability

•3arc-secaccuracy

•1.5arc-secbi-directionalrepeatability

•Multi-axisconfigurations

ANT-20G Goniometers•Noncontact,non-cogging,frictionless

direct-driveforzerobacklashorhysteresis

•Highspeed(150°/s)

•Highresolution(0.05arcsecond)

•Excellentin-positionstability

•Largeangularrange;20°oftravel

•Orthogonalmountingoftwocradlesprovidesrotationaboutthesamepoint

•Nomaintenance

•Compactdesign

ANT95-R0.01arc-secstepplot

ANT-20G-900.05arc-secstepplot

63

0 5 10 15 20 25 302

0

2

4

6

8

10

12

14

16

18

20

22

Time (s)

Pos

ition

(nm

)

ANT95-L-Z and ANT130-L-Z•Nanometerperformanceinalarge

travelformat

•Highresolution(2nm),repeatability(75nm),andaccuracy(300nm)




ANT95-50-L-Z-PLUS2nmstepplot

0 5 10 15 20 25 302

0

2

4

6

8

10

12

14

16

18

20

22

Time (s)

Pos

ition

(nm

)

ANT130-5-V2nmstepplot

ANT95-3-V and ANT130-5-V•Nanometerperformancewitheither

3or5mmtravel


•200nmaccuracy

64

ChallengeThere can be drastic differences in requirements from one measurement system to the next depending on its intended use. As an integrator or OEM, this can be frustrating as it requires constant evaluation of new motion equipment to satisfy ever changing requirements. This can lead to inconsistent solutions and support challenges.

SolutionAerotech offers solutions for all levels of performance and component needs. At the very simplest level we have controls and motors that users can buy to incorporate into their own designs. If more complete components are desired we offer a large selection of rotary and linear stages utilizing ball screw, gear drive, linear motor, mechanical bearing and air-bearing technology. If a complete system is needed Aerotech can provide a machine base, isolation systems, integrated controls, safety and enclosures. We can provide a solution that requires nothing more than adding a sensor and implementing the process.

BMS60brushlessslotlessrotarymotor

CustomZ-axisassembly

BLMserieslinearmotor

A3200softwaremachinecontroller

Npaqrackmountservoamplifier

Components to Integrated Solutions...

www.aerotech.com

Bringing Value and Convenience to Our Customers

Vertical IntegrationOur expertise in motors, amps, controls and stages enables us to provide a complete optimized solution.

InterconnectabilityAerotech systems are designed to work together. This allows you to spend time and resources on your process, not on system integration.

System CheckoutPrior to shipment, all systems are fully assembled and checked out. All system parameters are factory-set based on your specifications.

DocumentationAll systems are fully documented. System interconnect-drawings, specification sheets and stage certification plots are included with every system.

Aerotech offers its customers a number of important advantages as a single-source provider:

R&DOur engineering teams are dedicated to product development and continuous improvement.

Technology LeaderAerotech engineers are continuously updating existing products and introducing new products. We are truly “Dedicated to the Science of Motion.”

QualityAerotech is an ISO 9001 certified supplier with a rigorous quality program.

Worldwide PresenceAerotech is committed to supporting customers worldwide. We operate full sales and service facilities in the United Kingdom, Germany, Japan, Taiwan and China. We also maintain a growing number of direct field sales and application engineering offices throughput North America, and work with representatives across the globe.

Support & ServiceBecause all system elements are designed and manufactured by Aerotech, we provide the highest level of technical knowledge available. Unlike companies that only manufacture part of the system, Aerotech manufactures all of the system components, minimizing service time.

Single-Source SolutionAerotech designs and manufactures precision stages, motors, drives and controllers giving you all of the components needed for a complete system.

Application ExperienceSince 1970, Aerotech has completed thousands of motion control projects, spanning an extensive range of applications.

Corporate Headquarters • Pittsburgh, PA • USA

Aerotech United Kingdom

Aerotech Germany

Aerotech Japan

Aerotech China

Aerotech Taiwan 65

66 www.aerotech.com

Engineered SystemsAerotech engineers and manufactures specialty high-performance subsystems. Our highly-trained staff of experienced software and hardware engineers enables our customers to get to production readiness faster. Aerotech provides real-time collaborative support — either at your facility, at our facility or on the web.

Ion Beam Profiling in Vacuum Liquid-Cooled, Vacuum-Prepped System

Precision Optical Production Two-Side Optical Inspection

Rapid Prototyping Advanced Pick-Place-Inspect Station

Optical Inspection

High-Volume Production Inspection Station

4-Axis Coordinate Measuring Machine

Experimental Lithography Printhead Inspection Station High-Accuracy Laser Machining

Drum Writing High-Speed Optical Indexer

Direct-Write Lithography Magnetic Characterization

67

Discrete Part Manufacturing Memory RepairComponent Inspection PCB Inspection

Lithography Thin-Film Measurement

Drum Writing

Large-Substrate Inspection High-Throughput Wafer Inspection

Rotary Test StandSolar Module Inspection Pick and Place

Vacuum Inspection System Microscopy

Vacuum ProcessingFPD Processing

Photovoltaic, Fuel Cell and Alternative Energy

Extensive application experience and a broad array of motion products make Aerotech the perfect partner for your photovoltaic (solar cell), fuel cell and other alternative energy manufacturing and testing platforms. Our worldwide operation has engineered and manufactured a multitude of motion platforms for these markets and we continue to provide innovative solutions.

Control Systems

Aerotech motion controllers, motors and drives are utilized in our own positioning systems and by end users and OEMs worldwide. From our Automation 3200 software-based motion controller that can control up to 32 axes, to the Soloist single-axis servo controller, to the Ensemble multi-axis stand-alone motion controller, we provide a variety of options to suit your application.

General Automation

Since 1970 Aerotech has been a manufacturer of top-quality automation products. The breadth of the our product line, including automated nanopositioners, planar air-bearing systems, high-speed gantries, linear and rotary and lift stages, brushless linear and rotary servomotors and drives, single- and multi-axis motion controllers, goniometers and gimbals/optical mounts makes Aerotech unique among motion control manufacturers. Aerotech is DedicatedtotheScienceofMotion.

Laser Processing

Aerotech has extensive experience in providing motion components and subsystems for laser processes such as cutting, welding, marking, etching and micromachining. These processes are the key to advancing technology in markets such as photovoltaic manufacturing, aerospace and medical device manufacturing.

Capabilities in Other Markets

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Defense and Aerospace

Aerotech has manufactured hundreds of high-accuracy systems including many for high vacuum (10-6 torr) and cleanroom environments. Our equipment is used for testing electro-optic systems, high-performance laser processing, materials testing and manufacturing, target tracking, satellite sensor calibration and verification, inertial guidance testing, scanning, optical pointing, repeatability and life-cycle testing for quality control. Custom systems are available with minimal development time.

Medical Device Manufacturing and Life Sciences

Aerotech manufactures high-performance motion systems and components for medical and life sciences applications including stent cutting, medical laser welding systems for cardiac pacemakers and catheters, IOL and contact lens manufacturing, DNA sequencing, blood sequencing, haptic mills and drills, x-ray machines, magnetic resonance scanners and CAT scanners. We can customize a medical laser welding system for any need.

Government and Educational Research and Development

The breadth of Aerotech’s product line offers solutions for the wide-ranging requirements of academic and government R&D. Our nanopositioners provide the accuracy required not only for photonics experiments, but also for micro- and nano-machining workstations. Aerotech’s multi-axis rotary positioners and gimbals offer the high precision needed for defense, satellite and space science research. Unique applications call for unique solutions, and Aerotech can provide custom-engineered systems to meet your needs.

Electronics Manufacturing and AssemblySpeed, accuracy and reliability are the key requirements for pick-and-place machines, stencil cutting machines, printed circuit board assembly and other electronic manufacturing and assembly equipment. Since 1970 Aerotech has exceeded the most stringent criteria used to judge electronic manufacturing and assembly equipment, and we continue to raise the standard with our advanced motion technologies by addressing industry-specific challenges in pick-and-place machines, stencil cutting machines and printed circuit board assembly systems.

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Aerotech offers comprehensive worldwide training and customer service either at customer facilities or at one of our Aerotech training centers.

Our Training Program Features:

•Standardandcustomizedcourses

•Hands-ontrainingwithAerotechpositioningsystems

•Interactivetrainingwithexperiencedinstructors

•Comfortable,spaciousfacilities

Installation and Start up (Commissioning)

Startup and commissioning services minimize startup times, reduce cost and accelerate time-to-production. By combining our product knowledge with your process and application expertise, new systems and applications can be completed faster at a reduced overall cost.

Engineering Support

Aerotech provides complete engineering support for our products, including on-site support and maintenance, and remote support via phone, fax, website and/or WebEx® software. As a manufacturer staffed by engineers, we understand the unacceptability of downtime.

Training

Comprehensive training classes are designed to help our customers realize the full potential of our products. By demonstrating all of a product’s features and how to use them, customers have been able to reduce startup time and quickly optimize their applications. Our classes have been developed, and continually upgraded, using feedback from our customers.

Since 1970, Aerotech has designed motion control and positioning systems and components with an unsurpassed track record of reliability. When you make the choice to purchase from Aerotech, we urge you to learn how to get the most from your new products. We provides both on-site (your facility) and/or in-house (our facility) training for our customers’ convenience.

AerotechLtd(UnitedKingdom)

AerotechGmbH(Germany)

AerotechKK(Japan)

AerotechInc(U.S.A.)

Worldwide Training and Support

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SemiconductorInternational2007Editors’ChoiceBestProduct–

WaferMaxT™

SemiconductorInternational2008

Editors’ChoiceBestProduct–

Ensemble™

2008ControlEngineeringEngineers’ChoiceAward

–LaserTurn®1

2011ControlEngineeringEngineers’ChoiceAward

–ANT130-XY

2012ControlEngineeringEngineers’ChoiceAwardFinalistProduct–

MotionPAC

DesignNews2008GoldenMousetrapFinalistProduct–

Nmark™SSaM

DesignNews2009GoldenMousetrapFinalistProduct–LaserTurn®1,AGS15000,ANT95-XY

DesignNews2010GoldenMousetrapWinner–

ANT130-XY

EuroAsiaIC2006IndustryAward–WaferMaxZ™

LightwaveOFC2001Attendees’ChoiceAward–

FiberAlign®130

DesignNews2002BestProductNominee–

Automation3200

MachineDesignExcellenceinManufacturingTechnology–Slides/Ways1998and2000

Aandrijftechniek2002Award–

FiberMax®

ProductDesignandDevelopment2002Top50Product–

Automation3200

LightwaveNFOEC2002Attendees’ChoiceAward–

FiberMax®

Awards and Recognition

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H - Aerotech Headquarters l - Direct Field Sales Office s - Aerotech Subsidiary n - Representative

Dedicated to the Science of Motion

www.aerotech.com CA0312A

Aerotech’s Worldwide Sales and Service Locations

Documents

Motion and Automation for Test, Measurement and Inspection...The Old Brick Kiln Ramsdell, Tadley Hampshire RG26 5PR United Kingdom Ph: +44 (0)1256 855055 ... • Mounted to a gear-drive