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115910-P1 Rev C, 12/98 Instruction Manual MKS Type 1249A Solenoid Valve Driver Six Shattuck Road Andover, MA 01810-2449 (800) 227-8766 or (978) 975-2350 Fax: (978) 975-0093 E-mail: [email protected] Web site: http://www.mksinst.com

MKS Type 1249A Solenoid Valve Driver - CCR Process Products

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Page 1: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

115910-P1Rev C, 12/98

Instruction Manual

MKS Type 1249ASolenoid Valve

Driver

Six Shattuck RoadAndover, MA 01810-2449(800) 227-8766 or (978) 975-2350

Fax: (978) 975-0093E-mail: [email protected]

Web site: http://www.mksinst.com

Page 2: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

WARRANTYType 1249A Equipment

MKS Instruments, Inc. (MKS) warrants that the equipment described above (the

“equipment”) manufactured by MKS shall be free from defects in materials and

workmanship for a period of one year from date of shipment and will for a period of two

years from the date of shipment, correctly perform all date-related operations, including

without limitation accepting data entry, sequencing, sorting, comparing, and reporting,

regardless of the date the operation is performed or the date involved in the operation,

provided that, if the equipment exchanges data or is otherwise used with equipment,

software, or other products of others, such products of others themselves correctly

perform all date-related operations and store and transmit dates and date-related data

in a format compatible with MKS equipment. THIS WARRANTY IS MKS’ SOLE

WARRANTY CONCERNING DATE-RELATED OPERATIONS.

For the period commencing with the date of shipment of this equipment and ending one

year later in the case of defects in materials and workmanship, but two years later in the

case of failure to comply with the date-related operations warranty, MKS will, at its

option, either repair or replace any part which is defective in materials or workmanship

or with respect to the date-related operations warranty without charge to the purchaser.

The foregoing shall constitute the exclusive and sole remedy of the purchaser for any

breach by MKS of this warranty.

The purchaser, before returning any equipment covered by this warranty, which is

asserted to be defective by the purchaser, shall make specific written arrangements

with respect to the responsibility for shipping the equipment and handling any other

incidental charges with the MKS sales representative or distributor from which the

equipment was purchased or, in the case of a direct purchase from MKS, with the MKShome office in Andover, Massachusetts, USA.

This warranty does not apply to any equipment which has not been installed and used

in accordance with the specifications recommended by MKS for the proper and normal

use of the equipment. MKS shall not be liable under any circumstances for indirect,

special, consequential, or incidental damages in connection with, or arising out of, the

sale, performance, or use of the equipment covered by this warranty.

MKS recommends that all MKS pressure and flow products be calibrated periodically

(typically every 6 to 12 months) to ensure accurate readings. When a product is

returned to MKS for this periodic re-calibration it is considered normal preventative

maintenance not covered by any warranty.

THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES,

EXPRESSED OR IMPLIED, INCLUDING THE IMPLIED WARRANTY OF

MERCHANTABILITY AND THE IMPLIED WARRANTY OF FITNESS FOR A

PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST INFRINGEMENT OF

ANY PATENT.

11-98 115910-P1

Page 3: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

115910-P1Rev C, 12/98

MKS Type 1249ASolenoid Valve Driver

Page 4: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

Copyright © 1998 by MKS Instruments, Inc.

All rights reserved. No part of this work may be reproduced or transmitted in any form or byany means, electronic or mechanical, including photocopying and recording, or by anyinformation storage or retrieval system, except as may be expressly permitted in writing by MKSInstruments, Inc.

Printed in the United States of America.

Page 5: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

Table of Contents

iii

Table of Contents

Valve Safety Information ....................................................................................................... 1

Symbols Used in This Instruction Manual.................................................................. 1

Symbols Found on the Unit ....................................................................................... 2

Safety Procedures and Precautions ............................................................................. 3

Sicherheitshinweise für das Ventil .......................................................................................... 5

In dieser Betriebsanleitung vorkommende Symbole ................................................... 5

Erklärung der am Gerät angebrachten Symbole .......................................................... 6

Sicherheitsvorschriften und Vorsichtsmaßnahmen...................................................... 7

Informations relatives à la sécurité pour la valve..................................................................... 9

Symboles utilisés dans ce manuel d'utilisation ........................................................... 9

Symboles apparaissant sur l'unité ............................................................................... 10

Mesures de sécurité et précautions ............................................................................. 11

Medidas de seguridad de la válvula ........................................................................................ 13

Símbolos usados en este manual de instrucciones....................................................... 13

Símbolos hallados en la unidad .................................................................................. 14

Procedimientos y precauciones de seguridad .............................................................. 15

Chapter One: General Information......................................................................................... 17

Introduction ............................................................................................................... 17

How This Manual is Organized.................................................................................. 18

Manual Conventions ..................................................................................... 18

Customer Support ...................................................................................................... 18

Chapter Two: Installation ...................................................................................................... 19

How To Unpack the Type 1249 Unit.......................................................................... 19

Unpacking Checklist ..................................................................................... 19

Interface Cables ......................................................................................................... 20

Generic Shielded Cable Guidelines................................................................ 21

Product Location and Requirements........................................................................... 23

Ambient Operating Temperature ................................................................... 23

Page 6: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

Table of Contents

iv

Power Requirements ......................................................................................23

Setup..........................................................................................................................24

Dimensions....................................................................................................24

Mounting Instructions....................................................................................25

Electrical Information.................................................................................................26

Grounding .....................................................................................................26

Connectors.....................................................................................................26

Chapter Three: Overview .......................................................................................................29

General Information ...................................................................................................29

Instrument Components..............................................................................................30

Interface Connector........................................................................................30

Valve Connector ............................................................................................30

Bias Adjust Potentiometer .............................................................................31

Valve Position Indicator LED ........................................................................31

On-Board Jumpers......................................................................................................32

Jumper J3 - Input Type ..................................................................................33

Jumper J4 - Full Scale Voltage.......................................................................33

Jumper J5 - Digital Input Control...................................................................33

Labels ........................................................................................................................34

Serial Number Label ......................................................................................34

Chapter Four: Operation ........................................................................................................35

How To Set the Jumpers.............................................................................................35

How To Change the Bias Adjust Setting.....................................................................36

Appendix A: Product Specifications.......................................................................................37

Performance Specifications ........................................................................................37

Electrical Specifications .............................................................................................38

Physical Specifications...............................................................................................38

Environmental Specifications .....................................................................................38

Appendix B: Model Code Explanation...................................................................................39

Model Code ...............................................................................................................39

Index ......................................................................................................................................41

Page 7: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

List of Figures and Tables

v

List of Figures and Tables

Figures

Figure 1: Preferred Method To Connect an Overall Metal Braided Shielded Cable ................ 22

Figure 2: Alternate Method To Connect an Overall Metal Braided Shielded Cable ................ 22

Figure 3: Top View Dimensions of the 1249 Unit ................................................................. 24

Figure 4: Front View Dimensions of the 1249 Unit ............................................................... 25

Figure 5: Side View Dimensions of the 1249 Unit................................................................. 25

Figure 6: Instrument Components.......................................................................................... 30

Figure 7: Jumper Locations on the PC Board......................................................................... 32

Figure 8: Serial Number Label .............................................................................................. 34

Tables

Table 1: Definition of Symbols Found on the Unit .....................................................................2

Tabelle 2: Bedeutung der am Gerät angebrachten Symbole.........................................................6

Tableau 3: Définition des symboles apparaissant sur l'unité ......................................................10

Tabla 4: Definición de los símbolos hallados en la unidad ........................................................14

Table 5: Interface Cables ..........................................................................................................20

Table 6: Interface Connector Pinout .........................................................................................27

Table 7: Valve Connector Pinout..............................................................................................28

Table 8: Valve Position Indicator Colors ..................................................................................31

Table 9: Jumper Assignments...................................................................................................33

Table 10: Jumper Summary......................................................................................................34

Page 8: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

List of Figures and Tables

vi

Page 9: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

Valve Safety Information Symbols Used in This Instruction Manual

1

Valve Safety Information

Symbols Used in This Instruction Manual

Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.

Warning The WARNING sign denotes a hazard to personnel. It callsattention to a procedure, practice, condition, or the like,which, if not correctly performed or adhered to, could resultin injury to personnel.

Caution The CAUTION sign denotes a hazard to equipment. It callsattention to an operating procedure, practice, or the like, which, ifnot correctly performed or adhered to, could result in damage to ordestruction of all or part of the product.

Note The NOTE sign denotes important information. It calls attention to aprocedure, practice, condition, or the like, which is essential to highlight.

Page 10: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

Symbols Found on the Unit Valve Safety Information

2

Symbols Found on the Unit

The following table describes symbols that may be found on the unit.

Definition of Symbols Found on the Unit

|

On (Supply) IEC 417, No.5007

Off (Supply)IEC 417, No.5008

Earth (ground) IEC 417, No.5017

Protective earth (ground)

IEC 417, No.5019

Frame or chassis IEC 417, No.5020

Equipotentiality IEC 417, No.5021

Direct current IEC 417, No.5031

Alternating currentIEC 417, No.5032

Both direct andalternating current

IEC 417, No.5033-aClass ll equipment

IEC 417, No.5172-a

Three phasealternating current

IEC 617-2 No.020206

Caution, refer toaccompanying

documentsISO 3864, No.B.3.1

Caution, risk ofelectric shock

ISO 3864, No.B.3.6Caution, hot surfaceIEC 417, No.5041

Table 1: Definition of Symbols Found on the Unit

Page 11: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

Valve Safety Information Safety Procedures and Precautions

3

Safety Procedures and Precautions

Observe the following general safety precautions during all phases of valve operation. Failureto comply with these precautions or with specific warnings elsewhere in this manual violatessafety standards of intended use of the valve and may impair the protection provided by theequipment. MKS Instruments, Inc. assumes no liability for the customer’s failure to complywith these requirements.

Warning Moving parts in the valve create a risk of personal injury untilthe valve is securely incorporated into a system. To avoidinjury, keep all bodily parts away from any valve opening.

1. Do not insert objects into openings where contact withmoving parts is possible.

2. Isolate the valve from any electrical or pneumatic powersupply before handling the valve.

DO NOT SUBSTITUTE PARTS OR MODIFY VALVE

Do not install substitute parts or perform any unauthorized modification to the valve. Return thevalve to an MKS Calibration and Service Center for service and repair to ensure that all safetyfeatures are maintained.

SERVICE BY QUALIFIED PERSONNEL ONLY

Operating personnel must not attempt component replacement and internal adjustments. Anyservice must be performed by qualified service personnel only.

USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS

If hazardous materials are used, observe the proper safety precautions, completely purge thevalve when necessary, and ensure that the material used is compatible with the wetted materialsin this product, including any sealing materials.

PURGE THE VALVE

After installing the unit, or before removing it from a system, purge the unit completely with aclean, dry gas to eliminate all traces of the previously used flow material.

USE PROPER PROCEDURES WHEN PURGING

This valve must be purged under a ventilation hood, and gloves must be worn for protection.

Page 12: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

Safety Procedures and Precautions Valve Safety Information

4

DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT

To avoid explosion, do not operate this product in an explosive environment unless it has beenspecifically certified for such operation.

USE PROPER FITTINGS AND TIGHTENING PROCEDURES

All valve fittings must be consistent with valve specifications, and compatible with the intendeduse of the valve. Assemble and tighten fittings according to manufacturer’s directions.

CHECK FOR LEAK-TIGHT FITTINGS

Carefully check all vacuum component connections to ensure leak-tight installation.

OPERATE AT SAFE INLET PRESSURES

Never operate the valve at pressures higher than the rated maximum pressure (refer to the productspecifications for the maximum allowable pressure).

INSTALL A SUITABLE BURST DISC

When operating from a pressurized gas source, install a suitable burst disc in the vacuum systemto prevent system explosion should the system pressure rise.

KEEP THE UNIT FREE OF CONTAMINANTS

Do not allow contaminants to enter the unit before or during use. Contamination such as dust,dirt, lint, glass chips, and metal chips may permanently damage the unit or contaminate theprocess.

KEEP AWAY FROM VALVE OPENING

Keep fingers, other body parts, and other materials away from the valve opening when the valveis in operation.

Page 13: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

Sicherheitshinweise für das Ventil In dieser Betriebsanleitung vorkommende Symbole

5

Sicherheitshinweise für das Ventil

In dieser Betriebsanleitung vorkommende Symbole

Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze indieser Betriebsanleitung.

Warnung! Das Symbol WARNUNG! weist auf eine Gefahr für dasBedienpersonal hin. Es macht auf einen Arbeitsablauf, eineArbeitsweise, einen Zustand oder eine sonstige Gegebenheitaufmerksam, deren unsachgemäße Ausführung bzw.ungenügende Berücksichtigung zu Verletzungen führen kann.

Vorsicht! Das Symbol VORSICHT! weist auf eine Gefahr für das Gerät hin. Esmacht auf einen Bedienungsablauf, eine Arbeitsweise oder einesonstige Gegebenheit aufmerksam, deren unsachgemäße Ausführungbzw. ungenügende Berücksichtigung zu einer Beschädigung oderZerstörung des Gerätes oder von Teilen des Gerätes führen kann.

Hinweis Das Symbol HINWEIS macht auf wichtige Informationen bezüglich einesArbeitsablaufs, einer Arbeitsweise, eines Zustands oder einer sonstigeGegebenheit aufmerksam.

Page 14: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

Erklärung der am Gerät angebrachten Symbole Sicherheitshinweise für das Ventil

6

Erklärung der am Gerät angebrachten Symbole

Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen, die am Gerätangebracht sein können.

Bedeutung der am Gerät angebrachten Symbole

|Ein (Energie)

IEC 417, No.5007Aus (Energie)

IEC 417, No.5008Erdanschluß

IEC 417, No.5017Schutzleiteranschluß

IEC 417, No.5019

MasseanschlußIEC 417, No.5020

Aquipotential-anschluß

IEC 417, No.5021Gleichstrom

IEC 417, No.5031Wechselstrom

IEC 417, No.5032

Gleich- oderWechselstrom

IEC 417, No.5033-a

Durchgängigedoppelte oder

verstärkte IsolierungIEC 417, No.5172-a

Dreileiter-Wechselstrom(Drehstrom)

IEC 617-2, No.020206

Warnung vor einerGefahrenstelle

(Achtung, Dokumen-tation beachten)

ISO 3864, No.B.3.1

Warnung vorgefährlicher

elektrischer SpannungISO 3864, No.B.3.6

Höhere Temperaturan leicht

zugänglichen TeilenIEC 417, No.5041

Tabelle 2: Bedeutung der am Gerät angebrachten Symbole

Page 15: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

Sicherheitshinweise für das Ventil Sicherheitsvorschriften und Vorsichtsmaßnahmen

7

Sicherheitsvorschriften und Vorsichtsmaßnahmen

Folgende allgemeine Sicherheitsvorschriften sind während allen Betriebsphasen dieses Ventilszu befolgen. Eine Mißachtung der Sicherheitsvorschriften und sonstiger Warnhinweise indieser Betriebsanleitung verletzt die für dieses Ventil und seine Bedienung geltendenSicherheits-standards, und kann die eingebauten Schutzvorrichtungen wirkungslos machen.MKS Instruments, Inc. haftet nicht für Mißachtung dieser Sicherheitsvorschriften seitens desKunden.

Warnung! Solange das Ventil nicht fest in ein System eingebaut ist,besteht Verletzungsgefahr aufgrund von beweglichen Teilen.Daher Finger und andere Körperteile unbedingt von allenVentilöffnungen fernhalten

1. Niemals Fremdkörper in Öffnungen einführen, in denen einKontakt mit beweglichen Teilen möglich ist.

2. Das Ventil vor dem Hantieren stets von allen elektrischenund pneumatischen Kraftquellen trennen.

Niemals Teile austauschen oder Änderungen am Ventil vornehmen!

Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keineeigenmächtigen Änderungen am Ventil vor. Schicken Sie das Ventil zwecks Wartung undReparatur an den MKS-Kalibrierungs- und -Kundendienst ein. Nur so wird sichergestellt, daßalle Schutzvorrichtungen voll funktionsfähig bleiben.

Wartung nur durch qualifizierte Fachleute!

Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nurvon qualifizierten Fachleuten durchgeführt werden, niemals vom Bedienpersonal.

Vorsicht beim Arbeiten mit gefährlichen Stoffen!

Wenn gefährliche Stoffe verwendet werden, muß der Bediener die entsprechendenSicherheitsvorschriften genauestens einhalten, das Ventil, falls erforderlich, vollständig spülen,sowie sicherstellen, daß der Gefahrstoff die von ihm benetzten, im Ventil verwendetenMaterialien, insbesondere Dichtungen, nicht angreift.

Spülen des Ventils mit Gas!

Nach dem Installieren oder vor dem Ausbau aus einem System muß das Ventil unter Einsatzeines reinen Trockengases vollständig gespült werden, um alle Rückstände desVorgängermediums zu entfernen.

Page 16: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

Sicherheitsvorschriften und Vorsichtsmaßnahmen Sicherheitshinweise für das Ventil

8

Anweisungen zum Spülen des Ventils!

Das Ventil darf nur unter einer Ablufthaube gespült werden. Schutzhandschuhe sind zu tragen.

Nicht zusammmen mit explosiven Stoffen, Gasen oder Dämpfen benutzen!

Um der Gefahr einer Explosion vorzubeugen, darf dieses Produkt niemals zusammen mitexplosiven Stoffe aller Art eingesetzt werden, sofern es nicht ausdrücklich für diesen Zweckzugelassen ist.

Anweisungen zum Installieren der Armaturen!

Alle Ventilanschlußstücke und Armaturenteile müssen mit den Ventilspezifikationenübereinstimmen, und mit dem geplanten Einsatz des Ventils kompatibel sein. Der Einbau,insbesondere das Anziehen und Abdichten, muß gemäß den Anweisungen des Herstellersvorgenommen werden.

Ventil auf Undichtigkeiten prüfen!

Überprüfen Sie sorgfältig alle Verbindungen auf undichte Stellen.

Nur unter zulässigen Anschlußdrücken betreiben!

Betreiben Sie das Ventil niemals unter Drücken, die den maximal zulässigen Druck (sieheProduktspezifikationen) übersteigen.

Geeignete Berstscheibe installieren!

Wenn mit einer unter Druck stehenden Gasquelle gearbeitet wird, sollte eine geeigneteBerstscheibe in das Vakuumsystem installiert werden, um eine Explosionsgefahr aufgrund vonsteigendem Systemdruck zu vermeiden.

Verunreinigungen vermeiden!

Stellen Sie sicher, daß Verunreinigungen jeglicher Art weder vor dem Einsatz noch während desBetriebs in das Innere gelangen können. Staub- und Schmutzpartikel, Glassplitter oderMetallspäne können das Produkt dauerhaft beschädigen oder Prozeß und Meßwerte verfälschen.

Hände weg von der Ventilöffnung!

Körperteile, insbesondere Finger, sowie Fremdobjekte während des Betriebes von derVentilöffnung fernhalten.

Page 17: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

Informations relatives à la sécurité pour la valve Symboles utilisés dans ce manuel d'utilisation

9

Informations relatives à la sécurité pour la valve

Symboles utilisés dans ce manuel d'utilisation

Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dansce manuel.

Avertissement L'indication AVERTISSEMENT signale un danger pour lepersonnel. Elle attire l'attention sur une procédure, unepratique, une condition, ou toute autre situationprésentant un risque d'accident pour le personnel, encas d'exécution incorrecte ou de non respect desconsignes.

Attention L'indication ATTENTION signale un danger pour l'appareil.Elle attire l'attention sur une procédure d'exploitation, unepratique, ou toute autre situation, présentant un risqued'endommagement ou de destruction d'une partie ou de latotalité de l'appareil, en cas d'exécution incorrecte ou de nonrespect des consignes.

Remarque L'indication REMARQUE signale une information importante. Elleattire l'attention sur une procédure, une pratique, une condition, outoute autre situation, présentant un intérêt particulier.

Page 18: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

Symboles apparaissant sur l'unité Informations relatives à la sécurité pour la valve

10

Symboles apparaissant sur l'unité

Le tableau suivant décrit les symboles pouvant apparaître sur l'unité.

Définition des symboles apparaissant sur l'unité

|Marche

(sous tension)IEC 417, No.5007

Arrêt (hors tension)IEC 417, No.5008

Terre (masse)IEC 417, No.5017

Terre de protection(masse)

IEC 417, No.5019

MasseIEC 417, No.5020

EquipotentialitéIEC 417, No.5021

Courant continuIEC 417, No.5031

Courant alternatifIEC 417, No.5032

Courant continu etalternatif

IEC 417, No.5033-aMatériel de classe IIIEC 417, No.5172-a

Courant alternatiftriphasé

IEC 617-2, No.020206

Attention : se reporterà la documentationISO 3864, No.B.3.1

Attention : risque dechoc électrique

ISO 3864, No.B.3.6

Attention : surfacebrûlante

IEC 417, No.5041

Tableau 3: Définition des symboles apparaissant sur l'unité

Page 19: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

Informations relatives à la sécurité pour la valve Mesures de sécurité et précautions

11

Mesures de sécurité et précautions

Prendre les précautions générales de sécurité suivantes pendant toutes les phases d'exploitationde la valve. Le non respect des ces précautions ou des avertissements contenus dans ce manuelconstitue une violation des normes de sécurité relatives à l'utilisation de la valve et peutdiminuer la protection fournie par l'appareil. MKS Instruments, Inc. n'assume aucuneresponsabilité concernant le non respect des consignes par les clients.

Avertissement Les pièces mobiles de la valve peuvent être une caused'accident tant que la valve n'est pas solidementincorporée dans un système. Pour éviter tout accident,tenir toute partie du corps à distance de toute ouverturede la valve.

1. Ne pas insérer des objets dans les ouvertures où lecontact avec des pièces mobiles est possible.

2. Isoler la valve de toute source d'alimentationélectrique ou pneumatique pendant la manipulation dela valve.

PAS DE SUBSTITUTION DE PIÈCES OU DE MODIFICATION DE LA VALVE

Ne pas installer des pièces de substitution ou effectuer des modifications non autorisées sur lavalve. Renvoyer la valve à un centre de service et de calibrage MKS pour tout dépannage ouréparation afin de garantir le l'intégrité des dispositifs de sécurité.

DÉPANNAGE UNIQUEMENT PAR DU PERSONNEL QUALIFIÉ

Le personnel d'exploitation ne doit pas essayer de remplacer des composants ou de faire desréglages internes. Tout dépannage doit être uniquement effectué par du personnel qualifié.

PRÉCAUTION EN CAS D'UTILISATION AVEC DES PRODUITS DANGEREUX

Si des produits dangereux sont utilisés, prendre les mesures de précaution appropriées, purgercomplètement la valve quand cela est nécessaire, et s'assurer que les produits utilisés sontcompatibles avec les composants liquides de l'appareil, y compris les matériaux d'étanchéité.

PURGE DE LA VALVE

Après l'installation de l'unité, ou avant son enlèvement d'un système, purger l'unité complètementavec un gaz propre et sec afin d'éliminer toute trace du produit de flux utilisé précédemment.

UTILISATION DES PROCÉDURES APPROPRIÉES POUR LA PURGE

Cette valve doit être purgée sous une hotte de ventilation, et il faut porter des gants de protection.

Page 20: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

Mesures de sécurité et précautions Informations relatives à la sécurité pour la valve

12

PAS D'EXPLOITATION DANS UN ENVIRONNEMENT EXPLOSIF

Pour éviter toute explosion, ne pas utiliser cet appareil dans un environnement explosif, sauf encas d'homologation spécifique pour une telle exploitation.

UTILISATION D'ÉQUIPEMENTS APPROPRIÉS ET PROCÉDURES DE SERRAGE

Tous les équipements de la valve doivent être cohérents avec ses spécifications, et compatiblesavec l'utilisation prévue de la valve. Assembler et serrer les équipements conformément auxdirectives du fabricant.

VÉRIFICATION DE L'ÉTANCHÉITÉ DES CONNEXIONS

Vérifier attentivement toutes les connexions des composants pour le vide afin de garantirl'étanchéité de l'installation.

EXPLOITATION AVEC DES PRESSIONS D'ENTRÉE NON DANGEREUSES

Ne jamais utiliser la valve avec des pressions supérieures à la pression nominale maximum (sereporter aux spécifications de l'unité pour la pression maximum admissible).

INSTALLATION D'UN DISQUE D'ÉCHAPPEMENT ADAPTÉ

En cas d'exploitation avec une source de gaz pressurisé, installer un disque d'échappement adaptédans le système à vide afin d'éviter une explosion du système en cas d'augmentation de lapression.

MAINTIEN DE L'UNITÉ À L'ABRI DES CONTAMINATIONS

Ne pas laisser des produits contaminants pénétrer dans l'unité avant ou pendant l'utilisation. Desproduits contaminants tels que des poussières et des fragments de tissu, de glace et de métalpeuvent endommager l'unité d'une manière permanente ou contaminer le processus.

PRÉCAUTION AVEC L'OUVERTURE DE LA VALVE

Éviter tout contact des mains, toute autre partie du corps, ou tout autre matériel avec l'ouverturede la valve quand celle-ci est en fonctionnement.

Page 21: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

Medidas de seguridad de la válvula Símbolos usados en este manual de instrucciones

13

Medidas de seguridad de la válvula

Símbolos usados en este manual de instrucciones

Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual.

Advertencia El símbolo de advertencia indica la posibilidad de que seproduzcan daños personales. Pone de relieve unprocedimiento, práctica, estado, etc. que en caso de norealizarse u observarse correctamente puede causardaños personales.

Precaución El símbolo de precaución indica la posibilidad de producir dañosal equipo. Pone de relieve un procedimiento operativo, práctica,estado, etc. que en caso de no realizarse u observarsecorrectamente puede causar daños o la destrucción total o parcialdel equipo.

Nota El símbolo de notas indica información de importancia. Este símbolopone de relieve un procedimiento, práctica o condición cuyoconocimiento es esencial destacar.

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Símbolos hallados en la unidad Medidas de seguridad de la válvula

14

Símbolos hallados en la unidad

La tabla siguiente contiene los símbolos que puede hallar en la unidad.

Definición de los símbolos hallados en la unidad

|Encendido

(alimentación eléctrica)IEC 417, N° 5007

Apagado(alimentación eléctrica)

IEC 417, N° 5008Puesta a tierra

IEC 417, N° 5017Protección a tierraIEC 417, N° 5019

Caja o chasisIEC 417, N° 5020

EquipotencialidadIEC 417, N° 5021

Corriente continuaIEC 417, N° 5031

Corriente alternaIEC 417, N° 5032

Corriente continua yalterna

IEC 417, N° 5033-aEquipo de clase II

IEC 417, N° 5172-a

Corriente alternatrifásica

IEC 617-2, N° 020206

Precaución. Consultelos documentos

adjuntosISO 3864, N° B.3.1

Precaución. Riesgode descarga eléctricaISO 3864, N° B.3.6

Precaución.Superficiecaliente

IEC 417, N° 5041

Tabla 4: Definición de los símbolos hallados en la unidad

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Medidas de seguridad de la válvula Procedimientos y precauciones de seguridad

15

Procedimientos y precauciones de seguridad

Las precauciones generales de seguridad descritas a continuación deben observarse durantetodas las etapas de funcionamiento de la válvula. La falta de cumplimiento de dichasprecauciones o de las advertencias específicas a las que se hace referencia en el manual,constituye una violación de las normas de seguridad establecidas para el uso previsto de laválvula y podría anular la protección proporcionada por el equipo. Si el cliente no cumple dichasprecauciones y advertencias, MKS Instruments, Inc. no asume responsabilidad legal alguna.

Advertencia Hasta que la válvula sea incorporada en forma segura alsistema, las piezas en movimiento presentes en la mismapueden causar daños personales. Para evitarlo, mantengatodo el cuerpo alejado de la abertura de válvula.

1. No introduzca por las aberturas objetos que puedanentrar en contacto con piezas en movimiento.

2. Antes de tocar la válvula, aíslela de toda fuente dealimentación neumática o eléctrica.

NO UTILICE PIEZAS NO ORIGINALES O MODIFIQUE LA VÁLVULA

No instale piezas que no sean originales o modifique la válvula sin autorización. Para asegurar elcorrecto funcionamiento de todos los dispositivos de seguridad, envíe la válvula al Centro deservicio y calibración de MKS toda vez que sea necesario efectuar reparaciones o tareas demantenimiento.

LAS REPARACIONES DEBEN SER EFECTUADAS ÚNICAMENTE POR TÉCNICOSAUTORIZADOS

Los operarios no deben intentar reemplazar los componentes o realizar tareas de ajuste en el interior.Las tareas de mantenimiento o reparación deben ser realizadas únicamente por personal autorizado.

TENGA CUIDADO CUANDO TRABAJE CON MATERIALES TÓXICOS

Cuando se utilicen materiales tóxicos, los operarios deberán cumplir las medidas de seguridadcorrespondientes, purgar totalmente la válvula cuando sea necesario y comprobar que el materialutilizado sea compatible con los materiales humedecidos del instrumento e inclusive, con losmateriales de sellado.

PURGUE LA VÁLVULA

Una vez instalada la unidad o antes de retirarla del sistema, purgue completamente la unidad congas limpio y seco para eliminar todo resto de la sustancia líquida empleada anteriormente.

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Procedimientos y precauciones de seguridad Medidas de seguridad de la válvula

16

USE PROCEDIMIENTOS ADECUADOS PARA REALIZAR LA PURGA

La válvula debe purgarse debajo de una campana de ventilación y deben utilizarse guantesprotectores.

NO HAGA FUNCIONAR LA VÁLVULA EN UN AMBIENTE CON RIESGO DEEXPLOSIONES

Para evitar que se produzcan explosiones, no haga funcionar este producto en un ambiente conriesgo de explosiones, excepto cuando el mismo haya sido certificado específicamente para tal uso.

USE ACCESORIOS ADECUADOS Y REALICE CORRECTAMENTE LOSPROCEDIMIENTOS DE AJUSTE

Todos los accesorios de la válvula deben cumplir las especificaciones de la misma y sercompatibles con el uso que se debe dar a la válvula. Arme y ajuste los accesorios de acuerdo conlas instrucciones del fabricante.

COMPRUEBE QUE LAS CONEXIONES SEAN A PRUEBA DE FUGAS

Inspeccione cuidadosamente las conexiones de los componentes de vacío para comprobar quehayan sido instalados a prueba de fugas.

HAGA FUNCIONAR LA VÁLVULA CON PRESIONES DE ENTRADA SEGURAS

No haga funcionar nunca la válvula con presiones superiores a la máxima presión nominal (en lasespecificaciones del instrumento hallará la presión máxima permitida).

INSTALE UNA CÁPSULA DE SEGURIDAD ADECUADA

Cuando el instrumento funcione con una fuente de gas presurizado, instale una cápsula deseguridad adecuada en el sistema de vacío para evitar que se produzcan explosiones cuando subala presión del sistema.

MANTENGA LA UNIDAD LIBRE DE CONTAMINANTES

No permita el ingreso de contaminantes en la unidad antes o durante su uso. Los productoscontaminantes tales como polvo, suciedad, pelusa, lascas de vidrio o virutas de metal puedendañar irreparablemente la unidad o contaminar el proceso.

MANTÉNGASE ALEJADO DE LA ABERTURA DE LA VÁLVULA

Cuando la válvula esté funcionando, mantenga los dedos, otras partes del cuerpo y otrosmateriales alejados de la abertura.

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Chapter One: General Information Introduction

17

Chapter One: General Information

Introduction

The MKS Type 1249A Solenoid Valve Driver positions a solenoid valve to achieve the desiredpressure in a system. The 1249 unit is designed to work with solenoid control valves such as theMKS Type 148 and 248 valves, which are located upstream of the process. The small size of the1249 unit enables it to fit into virtually any process control system.

The 1249 unit accepts an analog input signal as either a voltage (0 to 5 VDC or 0 to 10 VDC) ora current (4 to 20 mA). Typically, the analog signal is sent from a computer or another device,such as a programmable logic controller (PLC), equipped with a Proportional-Integral-Derivative(PID) control algorithm. The external control device monitors the pressure of the system, using apressure transducer, and compares the pressure reading to a predetermined set point. The PIDcontrol algorithm (in the PC or PLC) calculates the amount of valve control necessary to achieveor maintain the process pressure at the set point value, and sends an analog signal, proportional tothe amount of change required to adjust the pressure of the process, to the 1249 unit. The 1249module then controls the valve position accordingly.

The 1249 unit has a two digital inputs available on the Interface connector. The digital inputscan use either TTL compatible logic or Open Collector control. The digital input signalsoverride the analog signal and position the valve in either the full open or full close position.

Note The references to valve position (open or closed) relate to a normallyclosed valve. The action will be reversed for a normally open valve.

If both digital inputs (OPEN and CLOSE) are activated, the CLOSE signal takes precedence andthe valve is fully closed. (For a normally open valve, the valve is fully opened.)

Protection from RF interference and noisy electrical environments is increased by the use of ametal case, by internal design elements, and by the use of surge and ESD suppression networksand RFI filtering on all inputs and outputs. The 1249 unit meets the testing standards requiredfor the European CE Mark when used with an overall metal braided shielded cable, properlygrounded at both ends.

The 1249 unit requires an external power supply of ±15 VDC ±5% @ 50 mA (excluding thevalve) or a +24 VDC ±5% @ 50 mA (excluding the valve).

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How This Manual is Organized Chapter One: General Information

18

How This Manual is Organized

This manual is designed to provide instructions on how to set up and install a Type 1249 unit.

Before installing your Type 1249 unit in a system and/or operating it, carefully read andfamiliarize yourself with all precautionary notes in the Safety Messages and Proceduressection at the front of this manual. In addition, observe and obey all WARNING andCAUTION notes provided throughout the manual.

Chapter One, General Information, (this chapter) introduces the product and describes theorganization of the manual.

Chapter Two, Installation, explains the environmental requirements and describes how to mountthe instrument in your system.

Chapter Three, Overview, gives a brief description of the instrument and its functionality.

Chapter Four, Operation, describes how to use the instrument and explains all the functions andfeatures.

Appendix A, Product Specifications, lists the specifications of the instrument.

Appendix B, Model Code Explanation, describes the model code used to order the instrument.

Manual Conventions

The following conventions apply throughout this manual:

XXXXXX For inputs: Indicates that the line must be pulled low to activate the function.

XXXXXX For outputs: Indicates that the output is active low.

Customer Support

Standard maintenance and repair services are available at all of our regional MKS Calibrationand Service Centers, listed on the back cover. In addition, MKS accepts the instruments of othermanufacturers for recalibration using the Primary and Transfer Standard calibration equipmentlocated at all of our regional service centers. Should any difficulties arise in the use of your Type1249 instrument, or to obtain information about companion products MKS offers, contact anyauthorized MKS Calibration and Service Center. If it is necessary to return the instrument toMKS, please obtain an ERA Number (Equipment Return Authorization Number) from the MKSCalibration and Service Center before shipping. The ERA Number expedites handling andensures proper servicing of your instrument.

Please refer to the inside of the back cover of this manual for a list of MKS Calibration andService Centers.

Warning All returns to MKS Instruments must be free of harmful,corrosive, radioactive, or toxic materials.

Page 27: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

Chapter Two: Installation How To Unpack the Type 1249 Unit

19

Chapter Two: Installation

How To Unpack the Type 1249 Unit

MKS has carefully packed the Type 1249 unit so that it will reach you in perfect operating order.Upon receiving the unit, however, you should check for defects, cracks, broken connectors, etc.,to be certain that damage has not occurred during shipment.

Note Do not discard any packing materials until you have completed yourinspection and are sure the unit arrived safely.

If you find any damage, notify your carrier and MKS immediately. If it is necessary to return theunit to MKS, obtain an ERA Number (Equipment Return Authorization Number) from the MKSService Center before shipping. Please refer to the inside of the back cover of this manual for alist of MKS Calibration and Service Centers.

Unpacking Checklist

Standard Equipment:

• Type 1249 Solenoid Valve Driver

• Type 1249 Solenoid Valve Driver Instruction Manual (this book)

Optional Equipment:

• Electrical Connector Accessories Kit, 1249A-K1(includes mating connectors for the Valve and Interface connectors)

• Type 148 or 248 solenoid valve

• Interface Cables (refer to Table 5, page 20)

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Interface Cables Chapter Two: Installation

20

Interface Cables

As of January 1, 1996, most products shipped to the European Community must comply with theEMC Directive 89/336/EEC, which covers radio frequency emissions and immunity tests. Inaddition, as of January 1, 1997, some products shipped to the European Community must alsocomply with the Product Safety Directive 92/59/EEC and Low Voltage Directive 73/23/EEC,which cover general safety practices for design and workmanship. MKS products that meetthese requirements are identified by application of the CE Mark.

To ensure compliance with EMC Directive 89/336/EEC, an overall metal braided shielded cable,properly grounded at both ends, is required during use. No additional installation requirementsare necessary to ensure compliance with Directives 92/59/EEC and 73/23/EEC.

Note 1. An overall metal braided, shielded cable, properly grounded at bothends, is required during use to meet CE specifications.

2. To order an overall metal braided shielded cable, add an “S” after thecable type designation. For example, to order a cable to connect a1249 unit to a 248 valve, use part number CB251-2-10; for a braidedshielded cable use part number CB251S-2-10.

Interface Cables

To Connect the 1249 Unit to . . . Use the MKS Cable . . .

Standard Shielded

148, 248 control valves CB251-2-10 CB251S-2-10

Table 5: Interface Cables

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Chapter Two: Installation Interface Cables

21

Generic Shielded Cable Guidelines

Should you choose to manufacture your own cables, follow the guidelines listed below:

1. The cable must have an overall metal braided shield, covering all wires. Neither aluminumfoil nor spiral shielding will be as effective; using either may nullify regulatory compliance.

2. The connectors must have a metal case which has direct contact to the cable’s shield on thewhole circumference of the cable. The inductance of a flying lead or wire from the shield tothe connector will seriously degrade the shield’s effectiveness. The shield should begrounded to the connector before its internal wires exit.

3. With very few exceptions, the connector(s) must make good contact to the device’s case(ground). “Good contact” is about 0.01 ohms; and the ground should surround all wires.Contact to ground at just one point may not suffice.

4. For shielded cables with flying leads at one or both ends; it is important at each such end, toground the shield before the wires exit. Make this ground with absolute minimum length.Refer to Figures 1 and 2, page 22. (A ¼ inch piece of #22 wire may be undesirably longsince it has approximately 5 nH of inductance, equivalent to 31 ohms at 1000 MHz). Afterpicking up the braid’s ground, keep wires and braid flat against the case. With very fewexceptions, grounded metal covers are not required over terminal strips. If one is required, itwill be stated in the Declaration of Conformity or in the instruction manual.

5. In selecting the appropriate type and wire size for cables, consider:

A. The voltage ratings.

B. The cumulative I2R heating of all the conductors (keep them safely cool).

C. The IR drop of the conductors, so that adequate power or signal voltage gets to thedevice.

D. The capacitance and inductance of cables which are handling fast signals, (such asdata lines or stepper motor drive cables).

E. That some cables may need internal shielding from specific wires to others; pleasesee the instruction manual for details regarding this matter.

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Interface Cables Chapter Two: Installation

22

Example 1: Preferred Method To Connect Cable(shown on a transducer)

Transducer

Overall Insulation(if present)

Bare Metal Cable ClampMaking Firm Contact To Braid

Braid Here Is Desirable(but not usually necessary)

Keep Wires and BraidFlat Against Case

Metal Cable Clamp

Screw

Split Lock Washer

External Tooth Lock Washer

Transducer Housing

Optional Plastic or Metal CableClamp (For Physical Strain Relief)

Figure 1: Preferred Method To Connect an Overall Metal Braided Shielded Cable

Example 2: Alternate Method To Connect Cable(shown on a transducer)

Transducer

Overall Insulation(if present)

Braid Strands TwistedUnder Washer

Keep Wires Flat Against Case

Optional Plastic or Metal CableClamp (For Physical Strain Relief)

ScrewSplit Lock Washer

Flat WashersExternal Tooth Lock Washer

Transducer Housing

Figure 2: Alternate Method To Connect an Overall Metal Braided Shielded CableUse this method when cable clamp is not available

Page 31: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

Chapter Two: Installation Product Location and Requirements

23

Product Location and Requirements

Ambient Operating Temperature

The acceptable ambient operating temperature range for the 1249 unit is 0° to 50° C (32° to122° F).

Power Requirements

The 1249 unit requires an external power supply of ±15 VDC ±5% @ 50 mA (excluding thevalve) or a +24 VDC ±5% @ 50 mA (excluding the valve). The power is introduced to the unitthrough the Interface connector located on the front of the unit. Refer to Table 6, page 27, for theInterface connector pinout.

Page 32: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

Setup Chapter Two: Installation

24

Setup

Dimensions

Note All dimensions are listed in inches with millimeters referenced inparentheses. The tolerances for the dimensions are ±0.01 inches (X.X)and ±0.01 inches (X.XX).

3.69(93.7)

2.69(68.3)

3.28(83.3)

Mounting Hole4 x 0.16 (4.06) DIA

1249A

Serial #:

Model #:

0123456789

MKS Instruments, Inc. Made in the USA

Figure 3: Top View Dimensions of the 1249 Unit

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Chapter Two: Installation Setup

25

1.13(28.7)

Figure 4: Front View Dimensions of the 1249 Unit

3.12(79.2)

4.12(104.6)

1.13(28.7)

Figure 5: Side View Dimensions of the 1249 Unit

Mounting Instructions

The 1249 unit has four predrilled holes for mounting screws. Refer to Figure 3, page 24, for thelocation and size of the mounting screw holes.

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Electrical Information Chapter Two: Installation

26

Electrical Information

Grounding

For protective earthing, plug the power cord into a properly grounded outlet.

Connectors

There are two connectors on the 1249 valve driver, as shown in Figure 6, page 30:

• 15-Pin Type “D” Male Interface Connector

• 9-Pin Type “D” Female Valve Connector

Caution To prevent damage from electrostatic discharge (ESD) to thesensitive connector pins, they must be covered with an ESDprotective cover when not in use.

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Chapter Two: Installation Electrical Information

27

Interface Connector

The 15-pin Type “D” male Interface connector, located on the front of the unit, provides accessto the power and signal input pins.

Interface Connector Pinout

Pin Number Assignment

1 Valve Test Point

2 + Voltage or Current Input

3 CLOSE Input*

4 OPEN Input*

5 Power Common (±15 VDC Input)

6 Power Common (+24 VDC Input)

or

-15 VDC for the ±15 VDC supply

7 24 VDC for +24 VDC supply

or

+15 VDC for the ±15 VDC supply

8 No Connection

9 No Connection

10 No Connection

11 No Connection

12 - Voltage or Current Input

13 No Connection

14 +5 VDC Input for TTL Open or Close compatiblelogic*

15 Chassis

* The valve position refers to the a normally closed valve. The actionwill be reversed on a normally open valve.

Table 6: Interface Connector Pinout

Note The “No Connection” pin assignment refers to a pin with no internalconnection.

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Electrical Information Chapter Two: Installation

28

Valve Connector

The 9-pin Type “D” female Valve connector, located on the back of the unit, allows you connectthe 1249 unit to the 148 or 248 solenoid valves and provides access to the output signals.

Valve Connector Pinout

Pin Number Assignment

1 No Connection

2 No Connection

3 No Connection

4 No Connection

5 No Connection

6 Valve (+)

7 Valve (-)

8 No Connection

9 Chassis

Table 7: Valve Connector Pinout

Note The “No Connection” pin assignment refers to a pin with no internalconnection.

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Chapter Three: Overview General Information

29

Chapter Three: Overview

General Information

MKS products are designed and tested to provide the highest degree of safety attainable. To useyour MKS valve safely, you must always conform to the following instructions:

• Refer to the valve instruction manual for directions on installation and operation of thevalve.

Warning

!The moving parts in the valve create a risk of personal injuryuntil the valve is securely incorporated into a system. Toavoid injury keep all objects away from any valve opening.

• Do not insert objects into openings where contact with moving parts is possible.

• Isolate the equipment from any electrical or pneumatic power supply before handling thevalve.

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Instrument Components Chapter Three: Overview

30

Instrument Components

The instrument components are shown in Figure 6.

Valve Connector

InterfaceConnector

Bias AdjustPotentiometer

Valve Position Indicator LED

TOP PANEL

FRONT PANEL

1249A

Serial #:

Model #:

0123456789

MKS Instruments, Inc. Made in the USA

Figure 6: Instrument Components

Interface Connector

The 15-pin Type “D” male Interface connector (J1), located on the front of the unit, providesaccess to the power and signal input pins. Refer to Table 6, page 27, for the Interface connectorpinout.

Valve Connector

The 9-pin Type “D” female Valve connector (J2) connector, located on the back of the unit,allows you connect the 1249 unit to the 148 or 248 solenoid valves and provides access to theoutput signals. Refer to Table 7, page 28, for the Valve connector pinout.

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Chapter Three: Overview Instrument Components

31

Bias Adjust Potentiometer

The bias adjust potentiometer establishes a valve position offset. Since each valve requires aslightly different voltage level to move from the fully closed to slightly open position, the biasadjust allows the 1249 unit to compensate for the difference.

Use the bas adjust pot to determine the minimum voltage required to move your valve from thefully closed to the slightly open position. Refer to How To Change the Bias Adjust Setting, page36, for more information.

Valve Position Indicator LED

The valve position indicator LED illuminates with different colors to indicate the approximateposition of the valve (refer to Table 8). When the valve is fully closed, the color of the LED isred. When the valve is fully open, the color of the LED is green. When the valve is inintermediate positions, the color of the LED varies from orange to yellow.

Valve Position Indicator Colors

Color Valve Position

Red Fully Closed

Orange to Yellow Partially Open

Green Open

Table 8: Valve Position Indicator Colors

Only the valve position commands will definitely result in a red or green color. When the valveis being driven by a set point, the full red and green colors may not be shown since the actualvoltage required to fully close or open a valve varies with each valve.

For example, if 9 V fully positions the valve (either open or closed) the LED will look orange oryellow (since 9 V < 10 V), however, the valve is already in the fully open or closed position.

Page 40: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

On-Board Jumpers Chapter Three: Overview

32

On-Board Jumpers

The PC board, located inside the 1249 unit, contains three user-settable jumpers. Figure 7 showsthe location of the jumpers.

Jumper J4(set for 0 to 5 V

FS voltage)

Jumper J5(set for open collector

digital inputs)

Jumper J3(set for voltage

input)

Interface Connector

Valve Connector

Figure 7: Jumper Locations on the PC Board

The jumpers and their assignments are listed in Table 9, page 33. To change the jumper settings,refer to How To Set the Jumpers, page 35.

The jumper settings for various system configurations are listed in Table 10, page 34.

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Chapter Three: Overview On-Board Jumpers

33

Jumper Assignments

Jumper Assignment Options

J3 Input Type Voltage* or Current

J4 Full Scale Voltage 0 to 5 V* or 0 to 10 V

J5 Digital Input Control TTL or Open Collector*

* Factory default setting.

Table 9: Jumper Assignments

Jumper J3 - Input Type

The position of jumper J3 determines whether the input will be a voltage or current. Place thejumper over the position labeled “VIN” for voltage input, or over the position labeled “4 - 20”for current input. The unit is configured at the factory for voltage input (“VIN”).

Jumper J4 - Full Scale Voltage

The position of jumper J4 determines the full scale (FS) setting for the voltage input, either5 VDC or 10 VDC. The unit is configured at the factory for 0 to 5 V full scale voltage.

Place the jumper over the position labeled “0 – 5 V” for 5 VDC FS voltage input, or over theposition labeled “0 – 10 V” for 10 VDC FS voltage input.

The current input must always be a 4 to 20 mA signal. The input impedance for the 4 to 20 mAinput is 250 ohms. To configure the unit for current input, set jumper J3 for current input andposition the jumper on J4 for 0 to 5 V.

Jumper J5 - Digital Input Control

The position of jumper J5 sets the type of control for the digital input signals, either TTLcompatible logic or Open Collector. Place the jumper over the position labeled “5 VDC” forTTL compatible logic, or over the position labeled “OPEN COL” for Open Collector control.The unit is configured at the factory for open collector control (“OPEN COL”).

To configure the unit for TTL compatible logic, place the J5 jumper in the 5 VDC position andconnect a 5 VDC supply to pin 14 on the Interface connector (refer to Table 6, page 27). Theinputs are pulled-up to the supply with 10K ohms. The OPEN and CLOSE pins are activated bya TTL low ≤ 0.8 VDC sinking a minimum of 1.6 mA.

To configure the unit for Open Collector control, place the jumper on J5 to the “OPEN COL”position. The OPEN and CLOSE pins are activated by an open collector (or switch) low ≤ 0.8VDC sinking a minimum of 4 mA.

Note When using Open Collector control, the leakage current on the outputmust not exceed 200 µA when in the high state.

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Labels Chapter Three: Overview

34

The jumper settings for various system configurations are listed in Table 10.

Jumper Summary

Desired Settings Jumper Position

J3 J4 J5

0 to 5 VDC, TTL Logic VIN 0 to 5 V 5 VDC*

0 to 10 VDC, TTL Logic VIN 0 to 10 V 5 VDC*

0 to 5 VDC, Open Collector VIN 0 to 5 V O.C.

0 to 10 VDC, Open Collector VIN 0 to 10 V O.C.

4 to 20 mA, TTL Logic 4 - 20 0 to 5 V 5 VDC*

4 to 20 mA, Open Collector 4 - 20 0 to 5 V O.C.

* Connect a 5 VDC supply to pin 14 on the Interface connector (refer toTable 6, page 27).

Table 10: Jumper Summary

Labels

Serial Number Label

The serial number label lists the serial number and the product model code. The label alsodisplays the CE mark signifying compliance with the European CE regulations.

1249A

Serial #:

Model #:

0123456789

MKS Instruments, Inc. Made in the USA

Figure 8: Serial Number Label

Page 43: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

Chapter Four: Operation How To Set the Jumpers

35

Chapter Four: Operation

How To Set the Jumpers

The 1249 unit contains three user-settable jumpers on its PC board; refer to On-Board Jumpers,page 32, for more information. These jumpers determine the:

• Input type (voltage or current)

• Full scale voltage (0 to 5 V or 0 to 10 V)

• Digital input control (TTL or open collector)

To change the jumper settings:

1. Remove power and the cables from the 1249 unit.

Warning To avoid an electrical shock, be sure to disconnect thepower before proceeding.

2. Remove the four (4) Phillips head screws that secure the case.

3. Carefully remove the case to expose the PC board.

4. Change the position of the appropriate jumpers.

Refer to Figure 7, page 32, for the location of the jumpers.

5. Slide the case back over the PC board.

6. Replace the four (4) Phillips head screws removed in step 2 to secure the case in place.

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How To Change the Bias Adjust Setting Chapter Four: Operation

36

How To Change the Bias Adjust Setting

The bias adjust potentiometer establishes a valve position offset by setting the minimum voltagerequired to move your valve from the fully closed to the slightly open position. Refer to BiasAdjust Potentiometer, page 31, for more information.

To change the bias adjust setting:

1. Connect a signal equivalent to 0 VDC or 4 mA to pin 2 on the Interface connector.

Refer to Table 6, page 27, for the Interface connector pinout.

2. Adjust the bias adjust pot.

• If there is flow through the valve, turn the bias adjust pot counterclockwise until theflow stops and then continue for two additional turns

• If there is no flow through the valve, turn the bias adjust pot clockwise until the flowjust appears and then back off counterclockwise two turns.

Note 1. If the 1249 unit cannot turn the valve off completely, the bias adjustmay be set too high.

2. If you change valves, you must configure the 1249 unit to controlyour new valve by readjusting the bias adjust pot.

Page 45: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

Appendix A: Product Specifications Performance Specifications

37

Appendix A: Product Specifications

Performance SpecificationsBias Adjust Potentiometer Adjustable to fully Close valve with 4 mA or

1 VDC input

Adjustable to fully Open valve with a 0 VDC input

Control Lines

TTL Logic Level

Open Collector

OPEN and CLOSE - jumper selectable TTL logic levelor Open Collector

User must supply a 5 VDC ±5% @ 10 mA source

OPEN and CLOSE inputs are pulled to supply with10K ohms

OPEN and CLOSE inputs can be activated by a TTLlow ≤ 0.8 VDC, sinking a minimum of 1.6 mA

OPEN and CLOSE inputs are pulled to supply with10K ohms

OPEN and CLOSE inputs can be activated by an opencollector or switch low ≤ 0.8 VDC, sinking a minimumof 4 mA

Note: The leakage current on the output must notexceed 200 µA when in the high state.

Set Point Input

0 to 5 VDC

0 to 10 VDC

4 to 20 mA

Jumper selectable:

200K ohm input impedance

200K ohm input impedance

250 ohm input impedance

Valve Drive

148 or 248 valves 0 to 120 mA

Page 46: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

Electrical Specifications Appendix A: Product Specifications

38

Electrical SpecificationsCE Compliance

Electromagnetic Compatibility1

Product Safety Requirements

EMC Directive 89/336/EEC

Product Safety Directive 92/59/EEC

Input Power ±15 VDC ±5% @ 50 mA, excluding valveor+ 24 VDC ±5% @ 50 mA, excluding valve

Physical SpecificationsConnectors

Interface

Valve

15-pin Type “D” male connector for the power andinput signals

9-pin Type “D” female connector for the output signal

Housing Material Aluminum

Weight 7 oz. (198 g)

Environmental SpecificationsAmbient Operating Temperature Range 0° to 50° C (32° to 122° F)

Storage Humidity Range 0 to 95% Relative Humidity, non-condensing

Due to continuing research and development activities, these product specifications are subject to change without notice.

1 An overall metal braided shielded cable, properly grounded at both ends, is required during use.

Page 47: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

Appendix B: Model Code Explanation Model Code

39

Appendix B: Model Code Explanation

Model Code

The options of your unit are identified in the model code. The model code is identifiedas follows:

1249A

Type Number (1249A)

The type number 1249A designates the model number of the instrument. There are no optionsavailable with this unit.

Page 48: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

Model Code Appendix B: Model Code Explanation

40

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Page 49: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

Index

41

Index

A

Ambient operating temperature, 23, 38

B

Bias adjust pot

description of, 31

how to adjust, 36

C

Cables, 20–22

CE Mark, 17, 20, 38

Connectors

Interface connector, 27, 30

Valve connector, 28, 30

Customer support, 18

D

Dimensions, 24–25

G

Grounding, 26

I

Interface connector, 27, 30

J

Jumpers

description of, 32–34

how to set, 35

location of, 32

M

Manual conventions, 18

Manual organization, 18

Model code, 39

P

Power requirements, 17, 23, 38

S

Safety information, 1–16, 29

Serial number label, 34

V

Valve connector, 28, 30

Valve position indicator, 31

Page 50: MKS Type 1249A Solenoid Valve Driver - CCR Process Products

Index

42