MEMS$ULTRASONIC$RANGE/FINDING$SOLUTION$FOR$3D/GESTURE$HUMAN$MACHINE$INTERFACE$

Presenta;on$at$MEPTEC$MEMS$2014$$Michelle$Meng/Hsiung$Kiang,$Ph.D.$CEO$and$Co/Founder$Chirp$Microsystems,$Inc.$$May$22,$2014$

7/18/14$ MEPTEC$MEMS$2014$ 2"

Chirp$Microsystems$Company$Background$

• Fabless$Startup$Providing$Low/Power$MEMS$Ultrasonic$3D/Sensing$Solu;ons$for$IoT$

• Founded$in$2013$• Technology$Developed$at$Berkeley$Sensor$and$Actuator$Center$(BSAC)$at$UC$Berkeley/Davis$

• Part$of$the$UC$Berkeley$Startup$Accelerator$Program,$SkyDeck,$in$Berkeley,$CA$

•  Introduc;on$• Piezoelectric$Micromachined$Ultrasonic$Transducers$(PMUTs)$for$Ranging$and$Gesture/Input$Solu;ons$• Market$and$Applica;on$Requirements$

•  Compe;ng$Technologies$

•  Air/coupled$PMUT$Arrays$Design$and$Manufacturing$Considera;ons$

• Demo$

• Summary$

7/18/14$ MEPTEC$MEMS$2014$ 3"

Outline$

7/18/14$ MEPTEC$MEMS$2014$ 4"

•  Avago$Produces$1$Billion$AlN$FBARs$Per$Year$

7/18/14$ MEPTEC$MEMS$2014$ 5"

Film$Bulk$Acous;c$Resonator$(FBAR):$LTE$Band$Duplexer$

Source:(Avago(

• Medical$Imaging$

•  Ranging/Obstacle$Avoidance$•  Robo;cs/UAVs$

•  Automo;ve$

• Non/Destruc;ve$Tes;ng$

•  Flow$Rate$Senor$•  Paper$Detec;on$

• Gesture$Recogni;on$for$HMI$

7/18/14$ MEPTEC$MEMS$2014$ 6"

Ultrasound$Applica;ons$

Cost"/Size"/Power"

•  Decreasing$Power,$Size$and$Cost$to$Enable$High$Volume$Applica;ons$

7/18/14$ MEPTEC$MEMS$2014$ 7"

Gesture$Input$for$HMI$

Samsung"S4"

Microso;"Kinect"

PointGrab"

LEAP"MoBon"

Today$

Volum

e$

Future$

•  Illumina;on$+$Camera$(Kinect,$LEAP$mo;on)$12W,"2W$

•  Camera$only$(pointgrab)$>>250mW$

•  Capaci;ve$Sensing$(Microchip,$STMicro)"~100mW$

•  Infrared$sensors$(Maxim)">100mW"from"IR"source$$

7/18/14$ MEPTEC$MEMS$2014$ 8"

Gesture$Recogni;on$Approaches$

Low$Power$

Small$Size$

Low$Cost$High$Res$

Long$Range$

Mobile/Wearable$

PC/Tablet$

Set/top/Game$Box$

•  Speed$of$Sound$is$6$Orders$of$Magnitude$Smaller$Than$Light$$

! $High$Speed$Electronics$Not$Required$

7/18/14$ MEPTEC$MEMS$2014$ 9"

Ultrasonic$Ranging$Solu;on$

• Very$Low$Power$(μW$…$mW)$• Always/on$opera;on$possible$

• Small$Size$(Comparable$to$Microphone)$• Fits$devices$too$small$to$accommodate$a$display$

• Good$Depth$Resolu;on$• ASIC/Enabled$Smart$Sensor$

7/18/14$ MEPTEC$MEMS$2014$ 10"

Chirp$Ultrasonic$Gesture$Recogni;on$Technology$

ASIC" PMUT"

• Advantages$•  Large$output$pressure$

• Direc;onal,$if$desired$

• Disadvantages$•  Inefficient$coupling$to$air$

• Matching$layers$required$

•  Too$big$for$consumer$electronics$

• Dumb$sensor.$Lots$of$external$electronics$required$

7/18/14$ MEPTEC$MEMS$2014$ 11"

Bulk$Ultrasound$Transducers$

10$mm$

senscomp.com" 5.2$mm$

muratamericas.com"

maxboBx.com"

20$mm$

•  2D$Array$of$Transducers$•  Output$power$on/axis:$N2$

•  Number$of$elements$sets$beam$width$•  Beam$width$~180○/N$for$linear$array$

•  Individual$electrodes$enable$electrical$beam$steering$

•  Spacing$~λ/2$for$180○ beam$steering$

7/18/14$ MEPTEC$MEMS$2014$ 12"

Chip$Scale$Array$Enable$3D$Ranging$

3D$Sensing$Image$of$Head$and$Hands$

7/18/14$ MEPTEC$MEMS$2014$ 13"

x-angle [deg]

Ran

ge [m

]Echo from user's head and hands

-40 -30 -20 -10 0 10 20 30 400

0.1

0.2

0.3

0.4

0.5

0.6

0.7

0.8

y-an

gle

[deg

]

-15

-10

-5

0

5

10

15

20

25

Head$

Right$Hand$

Leh$Hand$

Distance$from

$Sen

sor$(m

)$

X/axis/Lateral$Angle$from$Center$(degree)$

Y/axis/Ver;cal$A

ngle$from

$Cen

ter$(degree)$

For$1$m$max$range$design,$@50$cm:$$

Z/axis:$0.4$mm$rms$$X/axis:$0.2o$rms$$Y/axis:$0.8o$rms$

•  Several$piezo/MEMS$devices$are$now$in$high$volume$produc;on,$with$growing$maturity$of$manufacturing$base$to$enable$new$devices.$

• While$the$exis;ng$ultrasound$sensors$lack$capabili;es$to$meet$the$requirement$of$consumer$electronics$applica;ons,$PMUTs$represent$a$disrup;ve$technology$for$gesture$sensing$and$other$applica;ons$especially$in$energy$constrained$environment.$

•  Chirp$is$commercializing$PMUT$technology$to$provide$smart$sensing$solu;ons$for$consumer$electronics,$industrial,$home$automa;on,$and$beyond$(IoT).$

7/18/14$ MEPTEC$MEMS$2014$ 14"

Summary$

THANK$YOU$Michelle$Meng/Hsiung$Kiang,$Ph.D.$Co/Founder$&$CEO$Chirp$Microsystems,$Inc.$www.chirpmicro.com$

7/18/14$ Chirp$Microsystems$Proprietary$&$Confiden;al$ 15"