Högupplöst Röntgen-tomografi för materialforskning ... · •Bently Nevada •Control Solutions ... • flat panel with 2300 x 2300 px, 50 µm pixel size • three-fold detector

GE Measurement & Control

Högupplöst Röntgen-tomografi för materialforskning, felsökning och metrologi (mätteknik)

William Gren Sales Manager

GE Inspection Technologies

2 / GE /

• 130+ years

• > 300,000 employees

• 2011 $147B Rev

• 160 countries

• 4 Business Segments:

• Energy • Healthcare • Capital • Technology Enterprises

2009 GE: A company with global reach

3 / GE /

•Oil & Gas

• Power & Water

• Energy Management

Capital

Technology Enterprises

Energy

Healthcare

GE: Main business segments

Measurement & Control

• Inspection Technologies

• Bently Nevada

• Control Solutions

• Flow & Process Technologies

• Measuring & Sensing

• Wayne

• Radiography (CR/DR, X-Ray, CT)

• Ultrasonic

• Eddy current

• Remote Visual

• Software

4 / GE /

X-ray Sources

3D Metrology

• Portable and mobile X-ray systems

• Stationary systems

• Micro- and nanofocus tubes and generators

• Reproducible 3D coordinate measurement with X-ray CT

• Fully automated CT data acquisition and volume processing

3D CT

Digital Radiography Film & Equipment

• 3D industrial failure analysis with CT

• 3D CT systems for materi-als research, bio- and geosciences

• Computed Radiography

• Reusable Phosphor plates

• Digital Detector Arrays

• Image processing and storage software

• Complete range of Agfa X-ray films

• State-of-the-art processing equipment

• Film Scanning

2010 2D Systems

• Stationary manual and automated digital X-ray inspection systems

• Fully automated defect recognition software

Electronics Inspection

• 2D micro- and nanofocus X-ray

• Software for high resolu-tion electronics inspection

• CAD-based programming

X-ray Diffraction

• Quantitative and qualitative phase analysis, structure and tension measurement

• Single crystal materials orientation analysis

The Radiography Product Range

5 / GE /

Product line phoenix|x-ray

• A leading manufacturer of high-resolution 2D X-ray inspection and 3D computed tomography systems for non-destructive testing and 3D metrology

• Founded 1999 in Wunstorf / Germany

• 2007 acquired by GE Sensing & Inspection Technologies

• More than 1800 installations

• Development and production in Germany

6 / GE /

Högupplöst datortomografi

• Oförstörande defektanalys för kvalitetssäkring och produktions-kontroll i 3D

Exakt kvantitativ analys av position, storlek och frekvens av defekter

Multi-positionella 2D tvärsnittsplan eller 3D-volym

• Brett utbud av nanoCT® för materialvetenskapliga applikationer

180 kV hög effekt nanofocus röntgenteknik

• phoenix v|tome|x s / m / L • phoenix nanotom s / m

7 / GE /

3D Metrologi med CT

• CT = precision jämförbar med koordinatmätmaskiner (CMM)

– “Reverse Engineering”

– Nominell / verklig jämförelse

– Dimensionell mätning (t.ex. invändig väggtjocklek, avstånd, hål, fasningar, vinklar osv)

– Automatiserad processning av CT, rekonstruktion, analys och generering av inspektionsrapport inom en timme

8 / GE /

X-ray Electronics Inspection

• Leading edge 180 kV micro- and nanofocus X-ray tube technology

• Live imaging with GE´s unique DXR digital detector technology

• Efficient CAD programming with minimized setup time

• Easy and fully automated X-ray inspection of PCB assemblies

• Live 3D CAD data and inspection result overlay in the X-ray live image

• Extremely high defect coverage with high magnification and repeatability

• phoenix inspector • phoenix x|aminer • phoenix microme|x • phoenix nanome|x

GE Measurement & Control CT basics

10 / GE /

The X-ray shadow microscope

11 / GE /

X-ray tubes Directional - Transmission

Transmission Target Directional Target

higher magnification higher power

12 / GE /

X-ray tubes Microfocus vs. nanofocus®

13 / GE /

Resolution

2 µm bars

2 µm bars

Ø 2.5 µm

Focal Spot size influence:

Ø 1.5 µm Ø 0.8 µm

0.6 µm bars

14 / GE /

Principle of computed tomography Acquisition: cone beam

of 2D projections under step-by-step rotation steps< 1°

15 / GE /

Principle of computed tomography Acquisition: fan beam

of line projections under step-by-step Rotation and shift steps< 1°

16 / GE /

Three contributions from apparatus: • voxel size V=P/M • focal spot size F • mechanics

The focal spot size F is the ultimate limit of resolution.

Principle of Operation: CT resolution

M=FDD/FOD

17 / GE /

microCT

Image resolution: nanoCT: < 1 µm microCT: ~ 4 µm

nanoCT®

20 µm

microfocus CT Vs.

nanofocus CT

20 µm

500 nm voxel size in both scans.

18 / GE /

DXR250RT-E

• active area 20 cm x 20 cm (8“ x 8“)

• 1 MP (1024 x 1024 pixel)

• good resolution (200 µm pitch)

• up to 30 fps (full resolution!)

• temperature stabilised

• CsI scintillator, high DQE (85%)

• according to new USASTM E2597-07 standard

• v|tome|x s,m: 2 x detector shift (2000 pixel detector width)

High-resolution flatpanel detector

19 / GE /

Detectors

Digital flat panel detector

Scintillator på GE: s detektorer är tillverkad av Cesiumiodide (CsI) som växer i nål-liknande struktur på ”amorphous silicon plate” (array). Dessa ”nålar” styr ljuset och minskar spridningen.

Scintillator

a-Si Array

Optical Reflector

glass substrate

graphite cover

epoxy seal

GE Measurement & Control CT system overview

21 / GE /

X-ray CT systems phoenix|x-ray product line

nanotom s

nanome|x CT

v|tome|x L 450

v|tome|x L 300

v|tome|x s

nanotom m

v|tome|x m 300

22 / GE /

• 180 kV / 15 W high power

nanofocus tube

• voxel size down to 0.5 µm

• flat panel with 2300 x 2300 px,

50 µm pixel size

• three-fold detector shift

• max. sample size 120 x 150 mm

• sample weight up to 2kg

phoenix nanotom s

Ultra-high resolution nanoCT system

23 / GE /

• 180 kV / 15 W high power

nanofocus tube

• voxel size down to 0.3 µm

• DXR flat panel with 3000 x 2400 pixel,

100 µm pixel size

• 1.5-fold detector shift

• max. sample size 250 x 240 mm

• sample weight up to 3 kg

phoenix nanotom m

Ultra-high resolution nanoCT system

24 / GE /

phoenix v|tome|x s 240 Compact X-ray system for high resolution CT and 2D inspection

• 240 kV / 320 W microfocus tube

• opt. additional 180 kV nanofocus tube

• 5-axis manipulation system

• DXR250RT flat panel, 1024 x 1024 pixel,

200 µm pixel size, up to 30 fps

• two-fold detector shift

• max. sample size: 300 mm x 400 mm

• max. 3D scan size: 260 mm x 400 mm

• 10 kg max. sample weight

25 / GE /

phoenix v|tome|x m 300 Most compact 300 kV microfocus CT system



• granite-based setup

• 5 (6)-axis manipulation system

• DXR250RT flat panel, 1 MP, 200 µm,30 fps


• max. sample size: 600 mm x 600 mm



26 / GE /

phoenix v|tome|x L 300

300 kV CT system with walk-in cabinet





• DXR250 flat panel, 4 MP, 200 µm px




• optional LDA or MLD

27 / GE /

Additional features

• Collision protection (X-ray tubes, detector)

• Air conditioning, lighting

• Active anti-vibration system

• Automatic sliding door

• Video monitoring

28 / GE /

phoenix v|tome|x L 450

very large scale versatile CT system


• opt. additional 450 kV minifocus tube



• DXR250 flat panel, 4 MP, 200 µm px

• three-fold detector shift



• optional LDA or MLD

29 / GE /

30 / GE /

31 / GE /

Two X-ray tubes!

#1: Microfocus X-ray tube • Unipolar, open design • Up to 300 kV • Up to 500 W • Focal spot size 3 – 200 µm • Min. FOD < 5 mm

#2: Minifocus X-ray tube • Bipolar, closed design • Up to 450 kV • Up to 1500 W • Focus 1: 1 mm @ 1500 W • Focus 2: 0.4 mm @ 700 W (other minifocus X-ray tubes available)

GE Measurement & Control CT for material science & failure analysis

33 / GE /

• 2D: Endast den genomsnittliga tätheten är synlig

• 2D: Hålrum skulle vara synliga

Glas fibre reinforced material 2D X-ray image

Bild fehlt

noch

34 / GE /

• Orientering och fördelning av 10 µm tunna fibrer

• Ansamlingar av fyllnadsmaterial

Bild fehlt

noch

Glass fibres with particles nanoCT®

35 / GE /

Latex foam nanoCT - 3D view Molybdenum target Courtesy of Hutchinson R&D Centre, Chalette/F

• Different internal material phases are visible

• The exterior tube shows fine porosities

36 / GE /

• Diameter, orientation of fibres can be analysed, fiber diameter: 7-14 µm

• Orientation of the stitch yarn can be analysed

Stiched CFRP CT Volume data 3 µm voxelsize RW TH Aachen Institut für Textiltechnik

37 / GE /

• Carbon fibres and pores in polymer matrix • Diameter of single fibres ca. 1-5 µm • Texture of fibres clearly visible

Carbon fibre in polymer matrix 3D Visualisation

0.5 µm voxelsize nanoCT with Molybdenum target

0.5 mm

38 / GE /

• Carbon fibres and pores in polymer matrix • Diameter of single fibres ca. 1-5 µm • Texture of fibres clearly visible

Carbon fibre in polymer matrix Animated Volume data Molybdenum target nanoCT

39 / GE /

Hoverfly 35 kV Molybdenum target

• 3 µm voxelsize • even eye facet structures are clearly visible

40 / GE /

Slice through the 3D volume of a shell limestone with microfossils (Ø 0.7 mm) Courtesy of

O. Rozenbaum,

ISTO France

Vx = 1.2 µm

1 mm

• Zoom into a tomographic slice to measure the wall thickness (~3µm) of a small ammonite

41 / GE /

Virtual flight through the 3D volume of a shell limestone with microfossils (Ø 1.8 mm)

Courtesy of

O. Rozenbaum,

ISTO France

Vx = 1.25 µm

• Movie: Flying around the sample, slicing and fading out

42 / GE /

• 3D: wetting conditions and void positions are visible, lead phases are visible

• Solder joints with 400 µm diameter

BGA/CSP solder joints 3D movie

43 / GE /

• Detektering av brister, såsom krympning, sprickor, inneslutningar

Aluminum casting 2D X-ray image

44 / GE /

• Klassificering av hålrumsstorleken med färger

Aluminum casting CT volume

GE Measurement & Control 3D metrology with CT

46 / GE /

Metrology Process flow 1. CT Volume data

2. Surface

3. CAD Data

4. Alignment

5. Comparison / Measurements

47 / GE /


2. Surface

3. CAD Data

4. Alignment


48 / GE /


2. Surface

3. CAD Data

4. Alignment


49 / GE /


2. Surface

3. CAD Data

4. Alignment


50 / GE /

Process flow 1. CT Volume data

2. Surface

3. CAD Data

4. Alignment

5. Comparison, Measurements

Metrology

-300µm below CAD

+300µm above CAD

51 / GE /

GE Measurement & Control Snabb portalbaserad ”at-line” och ”in-line” CT

53 / GE /

GE speed|scan: portalbaserade CT för snabb 3D inspektion

54 / GE /

GE speed|scan atlineCT Overview Inspection volume: 400mm width x 300mm height x 800mm length, up to 50kg sample weight

Scan and inspection times: 5-10mm/s -> 10-90s for typical castings

Detail detectability: 300µm -> min. detectable defect size: >0.5 mm

Penetration length: up to 300mm Al -> allows inspection of large light metal castings

GE 3D automatic defect analysis and -classification

Designed for operation in harsh environments (foundries)

Belt conveying system

55 / GE /

Comparison to conventional CT technology

comparison of spatial resolution

High Resolution CT:

(1) Cylinder head scan with

voids, several hours

(2) 450kVp, cone beam CT

with digt . Flat panel in

Multiline Mode (8 Rows)

(3) Orig. 150µm voxel size

(12GB) here 4x Binning

V|tome|x image data binned to 600µm

Prototype Scan:

(1) “Standard” inline Scans:

helical, < 100 seconds

(2) 140kVp, 25mA

(3) 0,6mm voxel size

Prototype with 600µm voxel size

56 / GE /

GE 3D Automatic Defect Detection

Result on a die casting, 5 s defect detection time

57 / GE /

Hardware

Software

Application

System comparison overview speed|scan atlineCT

High-speed gantry-based CT in industrialised cabinet

GE 3D Defected Recognition System for NDT for assisted defect Recognition & part classification, 3D Metrology Software

Semi-automated NDT and metrology for statistical production process control for immediate response and feedback

High-speed gantry-based CT in industrialized cabinet designed for inline, 24/7, unmanned operation

Completely automated NDT and metrology for up to 100% production process control

speed|scan inlineCT

GE 3D fully automated defect recognition System for NDT, 3D Metrology Software

58 / GE /

Outlook: GE speed|scan inlineCT setup

X-ray cabinet

Roller conveyor

with lift

Inspection part

Roller conveyor

customer

X-ray sliding gates

Belt conveyor

Dust protection cover

Gantry

Shock absorber

3D-ADR Image Processing

Automatic workflow for unmanned operation

60 / GE /

Documents

Högupplöst Röntgen-tomografi för materialforskning ... · •Bently Nevada •Control Solutions ... • flat panel with 2300 x 2300 px, 50 µm pixel size • three-fold detector