www.iunet.eu 1

Italian Universities NanoElectronics

Team

ConsorzioNazionale

Interuniversitarioper la

Nanoelettronica

www.iunet.eu 2

Members of IU.net

Politecnico di Milano

Università di UdineUniversità di PadovaUniversità di

Modena

Università di Pisa

Università di Ferrara

Università di Roma “La Sapienza”

Università di Bologna

www.iunet.eu 3

Permanent scientific staffBologna: 5Ferrara: 2Milano: 4Modena: 2Padova: 2Pisa: 5Roma: 2Udine: 5Total: 27 (plus ~ 30 Ph.D. students)

www.iunet.eu 4

Mission of the ConsortiumDevelop collaborative research between associate Universities and other public and private Research centersFoster collaboration with industry to jointly develop new ideas and concepts, and prove them at demonstrator levelPerform studies and research commissioned by private or public entities, by exploiting the means and the know-how of the associate members of IU.netDisseminate and valorize the Consortium know-how and competences by promoting the participation of associate members to national and international research projects

www.iunet.eu 5

Governance• Cor Claeys

IMEC, Leuven, Belgio

• Andrea LacaitaPolitecnico di Milano

• Alessandro PaccagnellaUniversità di Padova

• Luca SelmiUniversità di Udine

• Università di Bologna –Massimo Rudan

• Università di Ferrara –Piero Olivo

• Politecnico di Milano –Alessandro Spinelli

• Università di Modena –Paolo Pavan (Chairman)

• Università di Padova –Andrea Cester

• Università di Pisa –Giuseppe Iannaccone

• Università di Roma LS –Fernanda Irrera

• Università di Udine –David Esseni

Scientific Committee

Enrico Sangiorgi

Director

Assembly

location: via Toffano 2, Bologna

www.iunet.eu 6

Main research lines

Nano-transistors: CMOS and post-CMOSNanoelectronic non-volatile Memories

Providing support to the development of technology platforms for micro- and nano-electronics

www.iunet.eu 7

Nanometric transistors

Specific activities:Architectures for nanoMOSFETSimulation of nanowire devicesMonte Carlo simulation of transport in nanoMOSFETNanowires and nanotubes transport

Physical understanding, analysis and optimization of device architectures for 32 nm node and beyond

www.iunet.eu 8

Quasi-ballistic transport in nanoMOSFET

Lucci et al., IEDM 2005

www.iunet.eu 9

Electrical performance of CNT-FETsbased on atomistic simulations

Fiori et al., IEDM 2005

Efs

Efd

www.iunet.eu 10

Nanoelectronic NV Memories

Specific activities:Flash memoriesPhase-change memoriesNROM and SONOS MemoriesCharacterization and reliability assessmentRadiation effects on NVM performancesTechnology optimization

Assessment of innovative technologies for non-volatile nanoelectronic memories

www.iunet.eu 11

Phase-change memories

2001 2003 2005 2007 2009 2011 201310-3

10-2

10-1

100

32 nm

32 nm

180 nm

180 nm

130 nm

90 nm65 nm

45 nm

130 nm

90 nm

65 nm

45 nm

45 nm

65 nm

90 nm

demonstrator FLASH NOR FLASH NAND PCM

Cel

l siz

e (μ

m2 )

Year

I

V

Lacaita, EPCOS 2005

www.iunet.eu 12

SONOS and NROM memories

Drain Source

NO

Ohe

Gate

Channel

+-

ONO2F

Planar NROM

Larcher et al., TED 2004Arreghini et al.,INFOS 2005

www.iunet.eu 13

Ongoing projects

EC Project PULLNANOEC Project EMMANational Project PNR

www.iunet.eu 14

PULLing the limits of NANOcmos electronicsEC Contract N. 26828Period: 06/2006 - 05/2009Four companies (ST, Freescale, Philips, Infineon, ), four research institution (IMEC, CEA, Fraunhofer, CNRS), seventeen universities/consortia, three SMEsUniBO, UniUD, UniPI and PoliMI participating for IUNET (approx €660 000)Purpose: pulling forward CMOS Technologies: exploratory research; characterization; modelling and advance simulation; demonstration of feasibility of concepts; process modules integration; definition of specifications of advanced new equipment; demonstration of feasibility of a 32nm CMOS logic technology; exploratory action towards the 22nm node

EC Project PULLNANO

www.iunet.eu 15

IU.NET in PULLNANO

Role of IU.NETcoordination of WP/Cluster 6.4 «Advanced modelling and simulation»

Partners of the Cluster:IU.NETETHZTechnical University of WarsawCNRS

www.iunet.eu 16

PULLNANO WP6.4 Objectives

Develop advanced physical models addressing the needs foreseen for the 22nm technology node:

strained siliconadoption of different crystal orientations for the channelhigh-k gate dielectricsfluctuations of dopants, dielectric and silicon layer thickness and effects of line-edge roughness

Implement the developed models in device simulators and compare different device architectures and technological options

www.iunet.eu 17

EC Project EMMAEmerging Materials for Mass-storage ApplicationsPeriod: 09/2006 – 08/2009Two companies (ST, IMEC), two research institution (CNR-MDM, CNRS-L2MP) and two universities/consortia (RWTH Aachen, IUNET)PoliMI, UniPD and UniMORE participating for IUNETPurpose: demonstrating the feasibility of non volatile memories based on resistive switching for mass storage

www.iunet.eu 18

The EMMA conceptReversible change of resistance within a dielectric material:

Binary metal oxides (NiO, Al2O3, Nb2O5, etc.)Polymer-based materials (CuTCNQ)

Advantages:Resistivity change at the atomic scale promising for high-density and scalabilityBack-end materials 3D cross-point architectures suitable to mass storageTarget: beyond 32-nmCuTCNQ nanowires 100nm2

active cell area feasible

www.iunet.eu 19

National project PNRProgramma Nazionale di RicercaPeriod: 36 monthsTwo joint projects: FIRB (basic research) + FAR (industrial research)One company (STMicroelectronics), twouniversities/consortia (IUNET, UniPV), one researchinstitution (CNR)Purpose: assess and develop technologies forNVMs at the 45-32 nm nodes:

Floating-gate cells with high-K as interpoly dielectricsPhase-change memoriesNitride-based memories

www.iunet.eu 20

IU.NET scientific achievements

Patents: 4European Projects: 11National Projects: 10Scientific Publications

International Journals: 219International Conferences: 169

www.iunet.eu 21

CONCLUSIONSIU.NET has been devised to foster academic research collaboration and promote the participation of academic Partners to large European technology-oriented ProgramsThe goal of IU.NET is to leverage on high quality teams which cover a large spectrum of expertiseIf the funding scheme is successful, IU.NET nodes will define “ad hoc” laboratory facilities