20080701-077-TFT LCD Process and Fab Design

8/14/2019 20080701-077-TFT LCD Process and Fab Design

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What is TFT-LCD? What is TFT-LCD?

Thin-Film Transistor (TFT) Liquid Crystal Display (LCD)


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LCD applicationLCD application

1950s niche research Multi-Billion industry today!!!


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Application of TFT-LCD Application of TFT-LCD

Monitor Notebook PC

TV Other application


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How TFT-LCD worksHow TFT-LCD works


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~ ~ TFT

TFT Turn OFFTFT Turn ON

90

LCD Display Theory LCD Display Theory


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Basic Components of TFT-LCDBasic Components of TFT-LCD

(BACK LIGHT)(DOWN POLARIZER)

(TFT SUBSTRATE)(LIQUID CRYSTAL)

(COLOR FILTER )(UP POLARIZER)


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TFT-LCD ProcessTFT-LCD Process

TFT(Array)Thin-Film Transistor

LC(Cell)Liquid Crystal

LCMModule

Array:( )TFT

Cell:

(Panel)

Module:


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TFT-LCD ProcessTFT-LCD Process

Thin Film

Photo

ColorFilter

OK

Etch

Array Test

Substrate

CELL

TFT Process


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TFT ProcessTFT Process

BOX

55

GlassSubstrate

TFT


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TFT ProcessTFT Process

(sputter,cvd)

(coater)

(reticle)

(developer), (stepper)

(etch)

stripper

,


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TFT Process (1)TFT Process (1)

(coating)

,

, (stepping)(developing)(etching)


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(striping)

,

,


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,

,


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CELL Process (1)CELL Process (1)

TFT (TFT Substrate)

(Color Filter)


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CELL Process (2)CELL Process (2)

PIPI Coating

PIPI Coating

Rubbing

RubbingSpacer Spacer Spray

SealantDispenser

Ag Dispenser

MisalignmentHot press

Scribe & Break LC injection

End sealing

Isotropic Polarizer Attachment

Auto Clave

CellCell test

TFT

CF


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Color Filter in TFT-LCD

(TFT)


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TFT-LCD SectionTFT-LCD Section

TFT Array

Color Filter


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What is Pixel? What is Pixel?


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Pixel and Color FilterPixel and Color Filter

610 mm

720mm

(PIXEL)

( )

Color Filter


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RGB-RGB- 33 Basic colorsBasic colors


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Sub-Pixel TypesSub-Pixel Types

Mosaic Triangle Strip

AVpanel

Monitor

NB Panel


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CF ProcessCF Process

Black Matrix R/G/B

ITO /

UnPacker INC BM RGB

Polish ITO Cutting Packer


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CF ProcessCF ProcessCr Glass Input

Color Filter Output

Black Matrix

R sub-pixel

G sub-pixel

B sub-pixel

and then ITO

Positive resist Coating, Dosing,Developing, Post-baking, Etching,Stripping.

R Negative resist Coating, Dosing,Developing, Post-baking.

G Negative resist Coating, Dosing,Developing, Post-baking.

B Negative resist Coating,Dosing, Developing, Post-

baking.

Cutting Final Inspection


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CF ProfileCF Profile


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CF Process and Material Flow CF Process and Material Flow

Black Matrix R/G/B

ITO /

UnPacker INCCr BM RGB


STK STK

STK STK

STK

Backup LineResin BM


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CF Process and QC Flow CF Process and QC Flow

Black Matrix R/G/B

ITO /

UnPacker INC BM RGB


BMI RGI

ITI OQC


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What is a TFT-LCD Fab? What is a TFT-LCD Fab?

Fab is the abbreviation of Fabrication

TFT-LCD Fab is a fabrication plant thatfabricate the TFT-LCD panel.

Usually a TFT-LCD Fab is thecombination of Main Fab, Supporting

Area and Central Utility Building (CUB).


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What make a Fab? What make a Fab?

Building

Main Process System

Facility System


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33 Major Process GroupsMajor Process Groups

Array (TFT) ProcessThe Array Process is similar to the semiconductor manufacturing process,except that transistors are fabricated on a glass substrate instead of a siliconwafer.

Cell (LC) or (Panel) Process

The Cell Process joins the arrayed back substrate and the front substrate thatis fitted with a color filter. The space between the two substrates is filled withliquid crystal.

Module (LCM) Assembly ProcessThe Module Assembly Process involved connecting additional components,such as driver integrated circuits and backlight units, to the fabricated glasspanel.

Some Fabs are CF in-house; Some manufacturers have LCM in differentFab.


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TFT Process PlanTFT Process Plan


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CF Process PlanCF Process Plan


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Module Process PlanModule Process Plan


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A Fab Project includes A Fab Project includes C/S/A (Civil, Structure and Architecture

MEP ( Mechanical, Electrical and Plumbing)

Process Utility Systems

UPW&WWT

Chemical Distribution Systems

Bulk & Specialty Gas Systems

Clean Room System

I.E.

S.M. (Space Management)

Utility Hook-Up


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Typical Fab Design ProcessTypical Fab Design Process


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Integrating Design ProcessIntegrating Design Process


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Flat Panel Fab Design TeamFlat Panel Fab Design Team


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Flat Panel Factory Flat Panel Factory


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Manufacturing Flow OptimizationManufacturing Flow Optimization


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Cleanroom Cost SavingCleanroom Cost Saving


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Determine Utility RequirementDetermine Utility Requirement


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Space CoordinationSpace Coordination


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Space ManagementSpace Management


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CleanroomCleanroom


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Cleanroom Air SystemCleanroom Air System


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Air Flow in Cleanroom Air Flow in Cleanroom

3.80

3.26

2.71

2.17

1.63

1.08

0.54

0

Velocity, m/s

Laminarity < 10 Small vortices at the ceiling between FFUs

Laminarity in main airstream < 10

Large slow moving vortices between FFUs

Partial Coverage Cleanroom Airflow without Diffusion Device

Partial Coverage Cleanroom Airflow with Diffusion Device


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Building SectionBuilding Section


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Chilled Water System of a FABChilled Water System of a FAB


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Conventional LayoutConventional Layout


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New Fab LayoutNew Fab Layout


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Documents

20080701-077-TFT LCD Process and Fab Design