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Mattson AST2900, Single Chamber RTP, S/N 2005111091, Vintage 2005 Page1/6
1.Front 2.Side
3.Back 4.Front inner
5.Robot 6.Casette
Mattson AST2900, Single Chamber RTP, S/N 2005111091, Vintage 2005 Page2/6
7.Plate 8.Wafer Enterance
9.Front_Under 10.Card Rack
11.Monitor 12.Side inner
Mattson AST2900, Single Chamber RTP, S/N 2005111091, Vintage 2005 Page3/6
13.Side inner#1 14.Side inner#2
15.Back 16.Back_left#1
17.Back_left#2 18.Back_right#1
Mattson AST2900, Single Chamber RTP, S/N 2005111091, Vintage 2005 Page4/6
19.Back_right#2 20.Back Inner
21.Back_under 21.Back_under_left
21.Back_under_right(UPS) 22.Right Side Inner
Mattson AST2900, Single Chamber RTP, S/N 2005111091, Vintage 2005 Page5/6
23.Serial No_2005111091 24.MainBody & Operation panel
25.Operation Panel 26.Operation Panel tag
Mattson-Steag-AST2900_Power-on Test_01 Mattson-Steag-AST2900_Power-on Test_02
Mattson AST2900, Single Chamber RTP, S/N 2005111091, Vintage 2005 Page6/6
Mattson-Steag-AST2900_Power-on Test_03 Mattson-Steag-AST2900_Power-on Test_04
Mattson-Steag-AST2900_Power-on Test_05 Mattson-Steag-AST2900_Power-on Test_06
Mattson-Steag-AST2900_Power-on Test_07