NanoFocus Applications

12.04.23 · Verfasser: Rouven Lenz · Workshop 20091

Gf gf

Optical Surface-Measurement Solutions

for Micro and Nano Range

12.04.23 · Verfasser: Rouven Lenz · Workshop 2009

Roughness

(Ra, Rz, Sa, Sz)

2D-Profile, 3D-Form Flatness

Co-planarityWear

Volume

Applications

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12.04.23 · Verfasser: Rouven Lenz · Workshop 2009

Life Science

MEMS/MOEMS Tools Electronics

Automotive Optics

Typical Applications

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12.04.23 · Verfasser: Rouven Lenz · Workshop 2009

Design Intent of Engineered Surface: • Reduce engine wear• High Efficiency (Oil and Fuel Consuption)

AluSil® Surface after acid etchHoned Surfaceµsurf®, 320 X 320 X 1 µm µsurf®, 320 X 320 X 1 µm

Application: Engine Cylinder Surface

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12.04.23 · Verfasser: Rouven Lenz · Workshop 2009

3D-Measurement with Extracted Profile

Resistence Paste printed on Ceramic Substrte

•Thickness, Width• Warpage• Roughness• Process Control SPC

Application: Hybrid Boards

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12.04.23 · Verfasser: Rouven Lenz · Workshop 2009

Geometry measurement of Fresnel lens

Application: Optics

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Glass surfaces with steep flanks

12.04.23 · Verfasser: Rouven Lenz · Workshop 2009

Application examples:

- Tool blades

- membranes, films, wires

Cutting edge of a razor blade

Motivation: Acquisition of steep slopes(because of the limitation of aperture)

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Application: Tools

12.04.23 · Verfasser: Rouven Lenz · Workshop 2009

3D geometry and roughness on steep edges

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Application: Tools

12.04.23 · Verfasser: Rouven Lenz · Workshop 2009

High aspect ratio Steep Edges

Pressure sensors

Modulator

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Application: MEMS/MOEMS

12.04.23 · Verfasser: Rouven Lenz · Workshop 2009

Medical Device

Safety Print Woodworking

Building Material Solar

Application Trends

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12.04.23 · Verfasser: Rouven Lenz · Workshop 2009

Application Trend: Building materials

ISO 25178Height ParametersSp 1.16 mm Maximum Peak Height of the SurfaceSv 2.69 mm Maximum Valley Depth of the SurfaceSz 3.85 mm Maximum Height of the SurfaceSa 0.454 mm Arithmetic Mean Height of Surface

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Extremely rough Surfaces with high dynamic reflectivity

12.04.23 · Verfasser: Rouven Lenz · Workshop 2009

PrintMaster analysis Treshold for reference

Laser engraved surface

Application Trend: Print

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12.04.23 · Verfasser: Rouven Lenz · Workshop 2009

Roughness measurement conform to DIN EN ISO (Stitching)

0.0 2000.0 4000.0 6000.0 8000.0 10000.0[µm]

4.00 µm

-24.00

-16.00

-8.00

0.00

8.00

16.00

[µm]

Nanofocus AG

RoughnessWavyness

ra=3.75µm

Application Trend: Print

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12.04.23 · Verfasser: Rouven Lenz · Workshop 2009

Forensic analyses (BKA, FBI etc.)

Crime tools

Bullets

Application Trend: Safety

100% match needed for legal evidences

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12.04.23 · Verfasser: Rouven Lenz · Workshop 2009

Application Trend: Safety

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12.04.23 · Verfasser: Rouven Lenz · Workshop 2009

Application Trend: Medical

Laser surgery

Measurement of abrasion behavior through height and

volume measurements

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12.04.23 · Verfasser: Rouven Lenz · Workshop 2009

Height DataMicroscopy Image

Surfaces for blood transport

Application Trend: Medical

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12.04.23 · Verfasser: Rouven Lenz · Workshop 2009

20

10

µm

30

0

µm

Coating Thickness

Topography

0,3 mm

Simultaneous measurement of 3D roughness and layer

thickness

Application Trend: Medical

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12.04.23 · Verfasser: Rouven Lenz · Workshop 2009

Position X

Höhe

Reflexion

Application Trend: Medical

Layer thickness measurement on a stent

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12.04.23 · Verfasser: Rouven Lenz · Workshop 2009

Application Trend: Medical

Joint implants

Automatic detection of defects, particles and

isotropy

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12.04.23 · Verfasser: Rouven Lenz · Workshop 2009

Dental implant

Latest 2d and 3D ISO parameters

Application Trend: Medical

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12.04.23 · Verfasser: Rouven Lenz · Workshop 2009

Mono and multi cristalline solar cells

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Application Trend: Solar

12.04.23 · Verfasser: Rouven Lenz · Workshop 2009

Number of grains: 36Total area occupied by the grains: 611 µm2 (0.87 %)Density of grains: 0.000513 grains / µm2.

Area = 17 µm2 +/- 14 µm2Mean diameter = 4829 nm +/- 1773 nm

Defect analysis

Automated detection of holes and particles

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Application Trend: Solar

12.04.23 · Verfasser: Rouven Lenz · Workshop 2009

0 25 50 75 100 125 150 175 200 225 250 275 300 µm

µm

-2

-1.5

-1

-0.5

0

0.5

L R

1

Maximum height 1.31 µm

Mean height 1.21 µm

Width 43.2 µm

Extracted profi le

Laser scribes on molybdenum

Quality control of laser trenches

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Application Trend: Solar