NanoFocus Applications

12.04.23 · Verfasser: Rouven Lenz · Workshop 20091

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Optical Surface-Measurement Solutions

for Micro and Nano Range


Roughness

(Ra, Rz, Sa, Sz)

2D-Profile, 3D-Form Flatness

Co-planarityWear

Volume

Applications

2


Life Science

MEMS/MOEMS Tools Electronics

Automotive Optics

Typical Applications

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Design Intent of Engineered Surface: • Reduce engine wear• High Efficiency (Oil and Fuel Consuption)

AluSil® Surface after acid etchHoned Surfaceµsurf®, 320 X 320 X 1 µm µsurf®, 320 X 320 X 1 µm

Application: Engine Cylinder Surface

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3D-Measurement with Extracted Profile

Resistence Paste printed on Ceramic Substrte

•Thickness, Width• Warpage• Roughness• Process Control SPC

Application: Hybrid Boards

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Geometry measurement of Fresnel lens

Application: Optics

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Glass surfaces with steep flanks


Application examples:

- Tool blades

- membranes, films, wires

Cutting edge of a razor blade

Motivation: Acquisition of steep slopes(because of the limitation of aperture)

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Application: Tools


3D geometry and roughness on steep edges

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Application: Tools


High aspect ratio Steep Edges

Pressure sensors

Modulator

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Application: MEMS/MOEMS


Medical Device

Safety Print Woodworking

Building Material Solar

Application Trends

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Application Trend: Building materials

ISO 25178Height ParametersSp 1.16 mm Maximum Peak Height of the SurfaceSv 2.69 mm Maximum Valley Depth of the SurfaceSz 3.85 mm Maximum Height of the SurfaceSa 0.454 mm Arithmetic Mean Height of Surface

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Extremely rough Surfaces with high dynamic reflectivity


PrintMaster analysis Treshold for reference

Laser engraved surface

Application Trend: Print

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Roughness measurement conform to DIN EN ISO (Stitching)

0.0 2000.0 4000.0 6000.0 8000.0 10000.0[µm]

4.00 µm

-24.00

-16.00

-8.00

0.00

8.00

16.00

[µm]

Nanofocus AG

RoughnessWavyness

ra=3.75µm

Application Trend: Print

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Forensic analyses (BKA, FBI etc.)

Crime tools

Bullets

Application Trend: Safety

100% match needed for legal evidences

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Application Trend: Safety

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Application Trend: Medical

Laser surgery

Measurement of abrasion behavior through height and

volume measurements

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Height DataMicroscopy Image

Surfaces for blood transport


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20

10

µm

30

0

µm

Coating Thickness

Topography

0,3 mm

Simultaneous measurement of 3D roughness and layer

thickness


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Position X

Höhe

Reflexion


Layer thickness measurement on a stent

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Joint implants

Automatic detection of defects, particles and

isotropy

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Dental implant

Latest 2d and 3D ISO parameters


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Mono and multi cristalline solar cells

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Application Trend: Solar


Number of grains: 36Total area occupied by the grains: 611 µm2 (0.87 %)Density of grains: 0.000513 grains / µm2.

Area = 17 µm2 +/- 14 µm2Mean diameter = 4829 nm +/- 1773 nm

Defect analysis

Automated detection of holes and particles

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0 25 50 75 100 125 150 175 200 225 250 275 300 µm

µm

-2

-1.5

-1

-0.5

0

0.5

L R

1

Maximum height 1.31 µm

Mean height 1.21 µm

Width 43.2 µm

Extracted profi le

Laser scribes on molybdenum

Quality control of laser trenches

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Technology

NanoFocus Applications