Presented by: Jung Cho Flex-e Materials - AIMCAL€¦ · Flex-e Materials . Introduction. Curved...

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AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

Contents

Introduction

Markets

OLED Structures

Technology

Fabrication Process

Evaluation (Microstructure & etc)

Summary

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

Foldable Rollable

[OLED Display : Rigid Flexible ]

• Light & unbreakable materials

• Easy to handle (folding & rolling)

• Free shape (rounding type)

Introduction

[Merit of Rigid OLED Display]

• Cheap product cost

• Mass production

• Free size & Large area display

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

Introduction

Curved & Bendable Foldable & Rollable Stretchable

Terms

Applications

Benefits

- Simple structure- Large area shaping

- Periodically transformation- Easy displacement

- Random change- Bio-medical insertion

- Exclusive design- Increased visible immersion- High reslolution

- High portability- Unlimit from phone to tablet- Simple installation (rollable)

- Realized free form-factor- Multi-folding - Customized display

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

Market trends of Display Type

• Galaxy X series : 8.94 inch out-folding type

• Huawei Mate X : 8.4 inch 4K in-folding type

(dual display, fingerprint)

• Apple : plastic display (under testing)

Y2016 ~ Launch to Curved (LG signature TV)

Y2020 ~ Dominant market to Foldable Display (12 ~ 14 inch Tablet)

Y2025 ~ established to Rollable Display (Signage & Public Display)

(Citation : HIS Market 2016)

Foldable

Markets

Rollable

Market size of foldable phone

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

[Requirements of Products]

• Degrees of Water vapor transport ratio as same as glass(OLED+O2 = Degradation) : 10-4 ~ 10-6 g∙cm/day

• Degrees of transmittance as same as glass : PET 90% ↑, COP 92% ↑

• Degrees of Anti-reflection ratio : reflectance 1.0% ↓

Anti-reflection

Film Substrate

Sputter layer

Sputter layer

Monomer layer

Protection layer

Encapsulation Barrier Film

WOLED + MOx TFT

Flexible Color Filter

Touch Film

Substrate (PI Film)

Cover Plastic

Carrier Film

FEMFront Glass

OLED (RGB)

Color Filter

Oxide TFT

Cover Plastic

Back Glass

Flexible OLED Structure

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

Barrier Encapsulation

Glass

Polyimide

Oxide TFT

OLED

PET

Adhesive (weak)

PC, COP or PET film

SiO2ITO

- Curl protection films before lift off glass- 188 micro PET film - 3 ~ 10 g adhesive properties

- Enhanced barrier properties after glass remove- Transparent EMI shield properties- Properly adhesiveness between PI and ITO layer

weak to attack from water vapor or oxygen

Flexible OLED Process

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

[R2R sputter system]

▶ Main : SIO2 and other various oxides sputtering of single or mulyi-layer using plasma & vacuum technology

▶ Key technology :

- Low temperature sputtering (Polymer Film base)

- Gas distribution system (Optical & electrical properties decides)

- Detail thickness Uniformity Controls (Max 1,600mm width within 3%)

- Roll to Roll tension control (minimize film damage )

- Adhesion promotion between substrate film and coating layer

- Optical design and simulation technology by Mclaud

Key Technology

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

Conventional Process FEM Process

CoatingDrying

Repeat

Vacuum

wetInclusion

Defect

Scratch

Under coatingPET film

Oxide/Nitride

Under coatingPET film

Oxide/Nitridemonomer

Under coatingPET film

Oxide/Nitridemonomer

Oxide/Nitride

Vacuum

Cover coat

Key process

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

High Barrier structure

Over-all Structure

Layer 1

Layer 2

Layer 3

Layer 4

Layer 5H/C

PET

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

High Barrier Structure

FEM Inorg./Org./Inorg. Competitor Barrier Film

Structure(SEM)

OTR*(cc/㎡day) below 5 X 10-5 5 X 10-3

WVTR*(g/㎡day) 5 X 10-4 5 X 10-2

PET(12㎛)+Al(30㎚)

PET(12㎛)+Al(30㎚)

PET(12㎛)+Al(30㎚)

LLDPE (50㎛)

K-PET (12.5㎛)

AL foil (7㎛)

Ny (25㎛)

LLDPE (50㎛)

* OTR (Oxygen Transmission Rate), WVTR (Water Vapour Transmission Rate)

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

1. Spikes : plastic & handling2. Scratches : handling3. Pits – arcing, possible contamination

of plastics4. Barrier cracking : local adhesion

issues (pre-contamination

Reliability Test Results

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials A

R

TOUCH

SUBSTRATE

BARRIER

Out

Structure of multi-functional barrier

encapsulation films

PETOxide layer

Nanostructuredoxide

oxide

multi layer barrier film

polymer

Transparent Flexible OLED (under development)

Permeation barrier degree : 10-2~10-5 g/m2/day (encapsulation properties)

Silver nanowire type capacitive touch panel systems with COP substrates

Anti-reflection layers by multi-layer sputter coating (5 or 7-layers)T: 94.5%, R: 0.13%, Haze 0.65% (substrates : PET)

Additional anti-finger, anti-smuggles or anti-corrosion coatings

Functional Layers for Flexible OLED

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

Water or Oxygen transportation mechanism

Vacuum coating

Environmental Test

50 nm

Inorganic

Inorganicmonomer

Monomer

Wet coating

Inorganic

Inorganic

Inorganic

Inorganic

Competitor

FEM

<Competitor> <FEM>

Water penetration

Permeation Blocking Mechanism

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

Slide HeaderPET PC/PMMA COP

T

T (%) 90.2 89.46 91.6L* 96.1 95.77 96.6a* -0.02 -0.01 0.01b* 0.26 0.49 0.13

Haze 0.46 0.14 0.32

R

R (%) 9.41 10.93 9.21L* 36.7 39.46 36.3a* -0.78 -0.5 -0.49b* 0.43 -1.7 -0.7

WVTR (g/m2·day) OTR (g/m2·day)

PET 5.6 14.1

PC/PMMA 4.2 13.6

COP 2.1 12.0

400 450 500 550 600 650 7005

10

15

80

90

Tran

smitta

nce &

Refl

ectan

ce (%

)

Wavelength (nm)

PET Isotropic PC COP

Optical properties

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

Barrier Properties

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

Slide HeaderFlexibility & Mechanical properties

Tensile strength : 231 MPaElongation : 65 %

Tensile strength : 159.3 MPaElongation : 82 %

ITO Film

Bending/Rolling Axis

ITO Film

Bending Axis

ITO Film

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

Inorganic layer Configuration

Sample No. SiOx (1) SiOx (2) SiOx (3)

투과율

T (%) 90.04 90.77 89.15L* 96.01 96.32 95.64a* 0.49 1.07 0.91b* 0.41 1.22 2.33

반사율

R (%) 10.45 9.57 9.86L* 38.64 37.06 37.6a* -2.51 -5.49 -5.39b* 1.57 -0.5 2.74

400 450 500 550 600 650 700

5

10

15

70

80

90

Tran

smitt

ance

& R

eflec

tanc

e (%

)

Wavelength (nm)

SiOx (1) SiOx (2) SiOx (3)

< SiOx (1) > < SiOx (2) > < SiOx (3) >

Thickness Control od Silicone Oxide for low surface roughness

Optical Properties of Silicone Oxide

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

Surface roughness

Surface Characteristics : Normal

Surface Characteristics : After Treatment

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

Summary

1. Roll-to-Roll coating Barrier Film by 500 mm wet & dry coating systems

- Formation of Inorganic / Organic / Inorganic multi-layer with vacuum conditions

- Surface roughness control and hydrophilic multi-layer condition of substrate to enhance moisture barrier property

2. Improvement of transmittance and optical characteristics

- Since it is difficult to secure the optical characteristics as a basic process, it is possible to lower the reflectance

Improved transmittance and other optical properties by coating the optical control layer on the opposite side of the

barrier film

- Developed non-yellowish barrier film by improving colors such as a * and b *

3. Development of multi-layer process technology

- Monolayer high density thin film conditions to replace common wet organic coatings

- Development of facility concept to coat wet and dry on-line at one time

- Establishment of process to impregnate nano-particles finally after implementing multilayer film by dry process

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