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AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
Contents
Introduction
Markets
OLED Structures
Technology
Fabrication Process
Evaluation (Microstructure & etc)
Summary
AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
Foldable Rollable
[OLED Display : Rigid Flexible ]
• Light & unbreakable materials
• Easy to handle (folding & rolling)
• Free shape (rounding type)
Introduction
[Merit of Rigid OLED Display]
• Cheap product cost
• Mass production
• Free size & Large area display
AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
Introduction
Curved & Bendable Foldable & Rollable Stretchable
Terms
Applications
Benefits
- Simple structure- Large area shaping
- Periodically transformation- Easy displacement
- Random change- Bio-medical insertion
- Exclusive design- Increased visible immersion- High reslolution
- High portability- Unlimit from phone to tablet- Simple installation (rollable)
- Realized free form-factor- Multi-folding - Customized display
AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
Market trends of Display Type
• Galaxy X series : 8.94 inch out-folding type
• Huawei Mate X : 8.4 inch 4K in-folding type
(dual display, fingerprint)
• Apple : plastic display (under testing)
Y2016 ~ Launch to Curved (LG signature TV)
Y2020 ~ Dominant market to Foldable Display (12 ~ 14 inch Tablet)
Y2025 ~ established to Rollable Display (Signage & Public Display)
(Citation : HIS Market 2016)
Foldable
Markets
Rollable
Market size of foldable phone
AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
[Requirements of Products]
• Degrees of Water vapor transport ratio as same as glass(OLED+O2 = Degradation) : 10-4 ~ 10-6 g∙cm/day
• Degrees of transmittance as same as glass : PET 90% ↑, COP 92% ↑
• Degrees of Anti-reflection ratio : reflectance 1.0% ↓
Anti-reflection
Film Substrate
Sputter layer
Sputter layer
Monomer layer
Protection layer
Encapsulation Barrier Film
WOLED + MOx TFT
Flexible Color Filter
Touch Film
Substrate (PI Film)
Cover Plastic
Carrier Film
FEMFront Glass
OLED (RGB)
Color Filter
Oxide TFT
Cover Plastic
Back Glass
Flexible OLED Structure
AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
Barrier Encapsulation
Glass
Polyimide
Oxide TFT
OLED
PET
Adhesive (weak)
PC, COP or PET film
SiO2ITO
- Curl protection films before lift off glass- 188 micro PET film - 3 ~ 10 g adhesive properties
- Enhanced barrier properties after glass remove- Transparent EMI shield properties- Properly adhesiveness between PI and ITO layer
weak to attack from water vapor or oxygen
Flexible OLED Process
AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
[R2R sputter system]
▶ Main : SIO2 and other various oxides sputtering of single or mulyi-layer using plasma & vacuum technology
▶ Key technology :
- Low temperature sputtering (Polymer Film base)
- Gas distribution system (Optical & electrical properties decides)
- Detail thickness Uniformity Controls (Max 1,600mm width within 3%)
- Roll to Roll tension control (minimize film damage )
- Adhesion promotion between substrate film and coating layer
- Optical design and simulation technology by Mclaud
Key Technology
AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
Conventional Process FEM Process
CoatingDrying
Repeat
Vacuum
wetInclusion
Defect
Scratch
Under coatingPET film
Oxide/Nitride
Under coatingPET film
Oxide/Nitridemonomer
Under coatingPET film
Oxide/Nitridemonomer
Oxide/Nitride
Vacuum
Cover coat
Key process
AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
High Barrier structure
Over-all Structure
Layer 1
Layer 2
Layer 3
Layer 4
Layer 5H/C
PET
AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
High Barrier Structure
FEM Inorg./Org./Inorg. Competitor Barrier Film
Structure(SEM)
OTR*(cc/㎡day) below 5 X 10-5 5 X 10-3
WVTR*(g/㎡day) 5 X 10-4 5 X 10-2
PET(12㎛)+Al(30㎚)
PET(12㎛)+Al(30㎚)
PET(12㎛)+Al(30㎚)
LLDPE (50㎛)
K-PET (12.5㎛)
AL foil (7㎛)
Ny (25㎛)
LLDPE (50㎛)
* OTR (Oxygen Transmission Rate), WVTR (Water Vapour Transmission Rate)
AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
1. Spikes : plastic & handling2. Scratches : handling3. Pits – arcing, possible contamination
of plastics4. Barrier cracking : local adhesion
issues (pre-contamination
Reliability Test Results
AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials A
R
TOUCH
SUBSTRATE
BARRIER
Out
Structure of multi-functional barrier
encapsulation films
PETOxide layer
Nanostructuredoxide
oxide
multi layer barrier film
polymer
Transparent Flexible OLED (under development)
Permeation barrier degree : 10-2~10-5 g/m2/day (encapsulation properties)
Silver nanowire type capacitive touch panel systems with COP substrates
Anti-reflection layers by multi-layer sputter coating (5 or 7-layers)T: 94.5%, R: 0.13%, Haze 0.65% (substrates : PET)
Additional anti-finger, anti-smuggles or anti-corrosion coatings
Functional Layers for Flexible OLED
AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
Water or Oxygen transportation mechanism
Vacuum coating
Environmental Test
50 nm
Inorganic
Inorganicmonomer
Monomer
Wet coating
Inorganic
Inorganic
Inorganic
Inorganic
Competitor
FEM
<Competitor> <FEM>
Water penetration
Permeation Blocking Mechanism
AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
Slide HeaderPET PC/PMMA COP
T
T (%) 90.2 89.46 91.6L* 96.1 95.77 96.6a* -0.02 -0.01 0.01b* 0.26 0.49 0.13
Haze 0.46 0.14 0.32
R
R (%) 9.41 10.93 9.21L* 36.7 39.46 36.3a* -0.78 -0.5 -0.49b* 0.43 -1.7 -0.7
WVTR (g/m2·day) OTR (g/m2·day)
PET 5.6 14.1
PC/PMMA 4.2 13.6
COP 2.1 12.0
400 450 500 550 600 650 7005
10
15
80
90
Tran
smitta
nce &
Refl
ectan
ce (%
)
Wavelength (nm)
PET Isotropic PC COP
Optical properties
AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
Barrier Properties
AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
Slide HeaderFlexibility & Mechanical properties
Tensile strength : 231 MPaElongation : 65 %
Tensile strength : 159.3 MPaElongation : 82 %
ITO Film
Bending/Rolling Axis
ITO Film
Bending Axis
ITO Film
AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
Inorganic layer Configuration
Sample No. SiOx (1) SiOx (2) SiOx (3)
투과율
T (%) 90.04 90.77 89.15L* 96.01 96.32 95.64a* 0.49 1.07 0.91b* 0.41 1.22 2.33
반사율
R (%) 10.45 9.57 9.86L* 38.64 37.06 37.6a* -2.51 -5.49 -5.39b* 1.57 -0.5 2.74
400 450 500 550 600 650 700
5
10
15
70
80
90
Tran
smitt
ance
& R
eflec
tanc
e (%
)
Wavelength (nm)
SiOx (1) SiOx (2) SiOx (3)
< SiOx (1) > < SiOx (2) > < SiOx (3) >
Thickness Control od Silicone Oxide for low surface roughness
Optical Properties of Silicone Oxide
AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
Surface roughness
Surface Characteristics : Normal
Surface Characteristics : After Treatment
AIMCAL R2R Conference
Organic/Inorganic thin film multi-layer on polymer films for rollable OLED
• Presented by: Jung ChoFlex-e Materials
Summary
1. Roll-to-Roll coating Barrier Film by 500 mm wet & dry coating systems
- Formation of Inorganic / Organic / Inorganic multi-layer with vacuum conditions
- Surface roughness control and hydrophilic multi-layer condition of substrate to enhance moisture barrier property
2. Improvement of transmittance and optical characteristics
- Since it is difficult to secure the optical characteristics as a basic process, it is possible to lower the reflectance
Improved transmittance and other optical properties by coating the optical control layer on the opposite side of the
barrier film
- Developed non-yellowish barrier film by improving colors such as a * and b *
3. Development of multi-layer process technology
- Monolayer high density thin film conditions to replace common wet organic coatings
- Development of facility concept to coat wet and dry on-line at one time
- Establishment of process to impregnate nano-particles finally after implementing multilayer film by dry process