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AIMCAL R2R Conference Organic/Inorganic thin film multi-layer on polymer films for rollable OLED Presented by: Jung Cho Flex-e Materials

Presented by: Jung Cho Flex-e Materials - AIMCAL€¦ · Flex-e Materials . Introduction. Curved & Bendable. Foldable & Rollable. Stretchable. Terms. Applications. Benefits - Simple

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Page 1: Presented by: Jung Cho Flex-e Materials - AIMCAL€¦ · Flex-e Materials . Introduction. Curved & Bendable. Foldable & Rollable. Stretchable. Terms. Applications. Benefits - Simple

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

Page 2: Presented by: Jung Cho Flex-e Materials - AIMCAL€¦ · Flex-e Materials . Introduction. Curved & Bendable. Foldable & Rollable. Stretchable. Terms. Applications. Benefits - Simple

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

Contents

Introduction

Markets

OLED Structures

Technology

Fabrication Process

Evaluation (Microstructure & etc)

Summary

Page 3: Presented by: Jung Cho Flex-e Materials - AIMCAL€¦ · Flex-e Materials . Introduction. Curved & Bendable. Foldable & Rollable. Stretchable. Terms. Applications. Benefits - Simple

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

Foldable Rollable

[OLED Display : Rigid Flexible ]

• Light & unbreakable materials

• Easy to handle (folding & rolling)

• Free shape (rounding type)

Introduction

[Merit of Rigid OLED Display]

• Cheap product cost

• Mass production

• Free size & Large area display

Page 4: Presented by: Jung Cho Flex-e Materials - AIMCAL€¦ · Flex-e Materials . Introduction. Curved & Bendable. Foldable & Rollable. Stretchable. Terms. Applications. Benefits - Simple

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

Introduction

Curved & Bendable Foldable & Rollable Stretchable

Terms

Applications

Benefits

- Simple structure- Large area shaping

- Periodically transformation- Easy displacement

- Random change- Bio-medical insertion

- Exclusive design- Increased visible immersion- High reslolution

- High portability- Unlimit from phone to tablet- Simple installation (rollable)

- Realized free form-factor- Multi-folding - Customized display

Page 5: Presented by: Jung Cho Flex-e Materials - AIMCAL€¦ · Flex-e Materials . Introduction. Curved & Bendable. Foldable & Rollable. Stretchable. Terms. Applications. Benefits - Simple

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

Market trends of Display Type

• Galaxy X series : 8.94 inch out-folding type

• Huawei Mate X : 8.4 inch 4K in-folding type

(dual display, fingerprint)

• Apple : plastic display (under testing)

Y2016 ~ Launch to Curved (LG signature TV)

Y2020 ~ Dominant market to Foldable Display (12 ~ 14 inch Tablet)

Y2025 ~ established to Rollable Display (Signage & Public Display)

(Citation : HIS Market 2016)

Foldable

Markets

Rollable

Market size of foldable phone

Page 6: Presented by: Jung Cho Flex-e Materials - AIMCAL€¦ · Flex-e Materials . Introduction. Curved & Bendable. Foldable & Rollable. Stretchable. Terms. Applications. Benefits - Simple

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

[Requirements of Products]

• Degrees of Water vapor transport ratio as same as glass(OLED+O2 = Degradation) : 10-4 ~ 10-6 g∙cm/day

• Degrees of transmittance as same as glass : PET 90% ↑, COP 92% ↑

• Degrees of Anti-reflection ratio : reflectance 1.0% ↓

Anti-reflection

Film Substrate

Sputter layer

Sputter layer

Monomer layer

Protection layer

Encapsulation Barrier Film

WOLED + MOx TFT

Flexible Color Filter

Touch Film

Substrate (PI Film)

Cover Plastic

Carrier Film

FEMFront Glass

OLED (RGB)

Color Filter

Oxide TFT

Cover Plastic

Back Glass

Flexible OLED Structure

Page 7: Presented by: Jung Cho Flex-e Materials - AIMCAL€¦ · Flex-e Materials . Introduction. Curved & Bendable. Foldable & Rollable. Stretchable. Terms. Applications. Benefits - Simple

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

Barrier Encapsulation

Glass

Polyimide

Oxide TFT

OLED

PET

Adhesive (weak)

PC, COP or PET film

SiO2ITO

- Curl protection films before lift off glass- 188 micro PET film - 3 ~ 10 g adhesive properties

- Enhanced barrier properties after glass remove- Transparent EMI shield properties- Properly adhesiveness between PI and ITO layer

weak to attack from water vapor or oxygen

Flexible OLED Process

Page 8: Presented by: Jung Cho Flex-e Materials - AIMCAL€¦ · Flex-e Materials . Introduction. Curved & Bendable. Foldable & Rollable. Stretchable. Terms. Applications. Benefits - Simple

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

[R2R sputter system]

▶ Main : SIO2 and other various oxides sputtering of single or mulyi-layer using plasma & vacuum technology

▶ Key technology :

- Low temperature sputtering (Polymer Film base)

- Gas distribution system (Optical & electrical properties decides)

- Detail thickness Uniformity Controls (Max 1,600mm width within 3%)

- Roll to Roll tension control (minimize film damage )

- Adhesion promotion between substrate film and coating layer

- Optical design and simulation technology by Mclaud

Key Technology

Page 9: Presented by: Jung Cho Flex-e Materials - AIMCAL€¦ · Flex-e Materials . Introduction. Curved & Bendable. Foldable & Rollable. Stretchable. Terms. Applications. Benefits - Simple

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

Conventional Process FEM Process

CoatingDrying

Repeat

Vacuum

wetInclusion

Defect

Scratch

Under coatingPET film

Oxide/Nitride

Under coatingPET film

Oxide/Nitridemonomer

Under coatingPET film

Oxide/Nitridemonomer

Oxide/Nitride

Vacuum

Cover coat

Key process

Page 10: Presented by: Jung Cho Flex-e Materials - AIMCAL€¦ · Flex-e Materials . Introduction. Curved & Bendable. Foldable & Rollable. Stretchable. Terms. Applications. Benefits - Simple

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

High Barrier structure

Over-all Structure

Layer 1

Layer 2

Layer 3

Layer 4

Layer 5H/C

PET

Page 11: Presented by: Jung Cho Flex-e Materials - AIMCAL€¦ · Flex-e Materials . Introduction. Curved & Bendable. Foldable & Rollable. Stretchable. Terms. Applications. Benefits - Simple

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

High Barrier Structure

FEM Inorg./Org./Inorg. Competitor Barrier Film

Structure(SEM)

OTR*(cc/㎡day) below 5 X 10-5 5 X 10-3

WVTR*(g/㎡day) 5 X 10-4 5 X 10-2

PET(12㎛)+Al(30㎚)

PET(12㎛)+Al(30㎚)

PET(12㎛)+Al(30㎚)

LLDPE (50㎛)

K-PET (12.5㎛)

AL foil (7㎛)

Ny (25㎛)

LLDPE (50㎛)

* OTR (Oxygen Transmission Rate), WVTR (Water Vapour Transmission Rate)

Page 12: Presented by: Jung Cho Flex-e Materials - AIMCAL€¦ · Flex-e Materials . Introduction. Curved & Bendable. Foldable & Rollable. Stretchable. Terms. Applications. Benefits - Simple

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

1. Spikes : plastic & handling2. Scratches : handling3. Pits – arcing, possible contamination

of plastics4. Barrier cracking : local adhesion

issues (pre-contamination

Reliability Test Results

Page 13: Presented by: Jung Cho Flex-e Materials - AIMCAL€¦ · Flex-e Materials . Introduction. Curved & Bendable. Foldable & Rollable. Stretchable. Terms. Applications. Benefits - Simple

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials A

R

TOUCH

SUBSTRATE

BARRIER

Out

Structure of multi-functional barrier

encapsulation films

PETOxide layer

Nanostructuredoxide

oxide

multi layer barrier film

polymer

Transparent Flexible OLED (under development)

Permeation barrier degree : 10-2~10-5 g/m2/day (encapsulation properties)

Silver nanowire type capacitive touch panel systems with COP substrates

Anti-reflection layers by multi-layer sputter coating (5 or 7-layers)T: 94.5%, R: 0.13%, Haze 0.65% (substrates : PET)

Additional anti-finger, anti-smuggles or anti-corrosion coatings

Functional Layers for Flexible OLED

Page 14: Presented by: Jung Cho Flex-e Materials - AIMCAL€¦ · Flex-e Materials . Introduction. Curved & Bendable. Foldable & Rollable. Stretchable. Terms. Applications. Benefits - Simple

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

Water or Oxygen transportation mechanism

Vacuum coating

Environmental Test

50 nm

Inorganic

Inorganicmonomer

Monomer

Wet coating

Inorganic

Inorganic

Inorganic

Inorganic

Competitor

FEM

<Competitor> <FEM>

Water penetration

Permeation Blocking Mechanism

Page 15: Presented by: Jung Cho Flex-e Materials - AIMCAL€¦ · Flex-e Materials . Introduction. Curved & Bendable. Foldable & Rollable. Stretchable. Terms. Applications. Benefits - Simple

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

Slide HeaderPET PC/PMMA COP

T

T (%) 90.2 89.46 91.6L* 96.1 95.77 96.6a* -0.02 -0.01 0.01b* 0.26 0.49 0.13

Haze 0.46 0.14 0.32

R

R (%) 9.41 10.93 9.21L* 36.7 39.46 36.3a* -0.78 -0.5 -0.49b* 0.43 -1.7 -0.7

WVTR (g/m2·day) OTR (g/m2·day)

PET 5.6 14.1

PC/PMMA 4.2 13.6

COP 2.1 12.0

400 450 500 550 600 650 7005

10

15

80

90

Tran

smitta

nce &

Refl

ectan

ce (%

)

Wavelength (nm)

PET Isotropic PC COP

Optical properties

Page 16: Presented by: Jung Cho Flex-e Materials - AIMCAL€¦ · Flex-e Materials . Introduction. Curved & Bendable. Foldable & Rollable. Stretchable. Terms. Applications. Benefits - Simple

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

Barrier Properties

Page 17: Presented by: Jung Cho Flex-e Materials - AIMCAL€¦ · Flex-e Materials . Introduction. Curved & Bendable. Foldable & Rollable. Stretchable. Terms. Applications. Benefits - Simple

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

Slide HeaderFlexibility & Mechanical properties

Tensile strength : 231 MPaElongation : 65 %

Tensile strength : 159.3 MPaElongation : 82 %

ITO Film

Bending/Rolling Axis

ITO Film

Bending Axis

ITO Film

Page 18: Presented by: Jung Cho Flex-e Materials - AIMCAL€¦ · Flex-e Materials . Introduction. Curved & Bendable. Foldable & Rollable. Stretchable. Terms. Applications. Benefits - Simple

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

Inorganic layer Configuration

Sample No. SiOx (1) SiOx (2) SiOx (3)

투과율

T (%) 90.04 90.77 89.15L* 96.01 96.32 95.64a* 0.49 1.07 0.91b* 0.41 1.22 2.33

반사율

R (%) 10.45 9.57 9.86L* 38.64 37.06 37.6a* -2.51 -5.49 -5.39b* 1.57 -0.5 2.74

400 450 500 550 600 650 700

5

10

15

70

80

90

Tran

smitt

ance

& R

eflec

tanc

e (%

)

Wavelength (nm)

SiOx (1) SiOx (2) SiOx (3)

< SiOx (1) > < SiOx (2) > < SiOx (3) >

Thickness Control od Silicone Oxide for low surface roughness

Optical Properties of Silicone Oxide

Page 19: Presented by: Jung Cho Flex-e Materials - AIMCAL€¦ · Flex-e Materials . Introduction. Curved & Bendable. Foldable & Rollable. Stretchable. Terms. Applications. Benefits - Simple

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

Surface roughness

Surface Characteristics : Normal

Surface Characteristics : After Treatment

Page 20: Presented by: Jung Cho Flex-e Materials - AIMCAL€¦ · Flex-e Materials . Introduction. Curved & Bendable. Foldable & Rollable. Stretchable. Terms. Applications. Benefits - Simple

AIMCAL R2R Conference

Organic/Inorganic thin film multi-layer on polymer films for rollable OLED

• Presented by: Jung ChoFlex-e Materials

Summary

1. Roll-to-Roll coating Barrier Film by 500 mm wet & dry coating systems

- Formation of Inorganic / Organic / Inorganic multi-layer with vacuum conditions

- Surface roughness control and hydrophilic multi-layer condition of substrate to enhance moisture barrier property

2. Improvement of transmittance and optical characteristics

- Since it is difficult to secure the optical characteristics as a basic process, it is possible to lower the reflectance

Improved transmittance and other optical properties by coating the optical control layer on the opposite side of the

barrier film

- Developed non-yellowish barrier film by improving colors such as a * and b *

3. Development of multi-layer process technology

- Monolayer high density thin film conditions to replace common wet organic coatings

- Development of facility concept to coat wet and dry on-line at one time

- Establishment of process to impregnate nano-particles finally after implementing multilayer film by dry process