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Copyright 2011. Advanced Materials Research Center, AMRC, International SEMATECH Manufacturing Initiative, and ISMI are servicemarks of SEMATECH, Inc. SEMATECH, and the SEMATECH logo are registered servicemarks of SEMATECH, Inc. All other servicemarks and trademarks are the property of their respective owners.
Metadata Conformance Analyzer
(MCA)Lance RistAutomation ConsultantAustin, TXlance.rist@risttex.net512-814-1134
18 July 2011 2
Metadata Conformance AnalyzerMetadata Conformance Analyzer
• MCA is a stand-alone application It operates off-line – no link to the equipment Metadata is put in a standard format
Seven files, one per E125 service response These files are the input to the MCA tool
• MCA has only the metadata It has no knowledge about the equipment It has no knowledge about the SECS interface
• The power of MCA is in the details Checking links & references Looking for expected constructs Many of the checks involve thousands of elements
This would be impractical for manual analysis• MCA is a valuable supplement to human analysis
XML Log
Equipment Metadata(7 File Format)
18 July 2011 3
ISMI/NIST Joint DevelopmentISMI/NIST Joint Development
• Approach: Use freely available tools:
Java Drools rules engine (http://www.jboss.org/drools)
Develop rules to test Standards and ISMI Guidelines Off-line evaluation of Metadata Metadata often harvested from communication log excerpts
Test on ISMI TrackSys and supplier metadata Common Metadata defines “known good” metadata set Many suppliers provided metadata for evaluation Some provided to NIST, balance used to confirm results
18 July 2011 4
MCA ReleasesMCA Releases
• MCA Releases MCA 1105 V1.0 – Sept. 2010 (ISMI members only)
Provided initial feedback
MCA 1105 V1.1 – March 2011 (public release) V1.0 was an internal ISMI release for initial feedback V1.1 updated to latest ISMI EDA 1105 Guidance
MCA 0710 V1.0 release in June Capability comparable to MCA 1105 V1.1 Reflects ISMI EDA 0710 Guidance
• MCA is freely available http://ismi.sematech.org/emanufacturing/mca/
18 July 2011 5
MCA Install and RunMCA Install and Run• MCA11.exe – install package for MCA• jre-6u16-windows-i586-s.exe – Java install
Required to run MCA• MCAGuide11.pdf – included in MCA11.exe
How-to guide
18 July 2011 6
MCA RulesMCA Rules
• MCA implements 112 rules 28 rules from EDA standards
Stated and inferred requirements 84 rules from ISMI EDA Guidance
Some presented as warnings only These rules are now included in the proposed
Common Metadata standard
• Rules may result in errors or warnings Errors denote clear problems in the metadata Warnings highlight areas where problems might
exist Requires the user to investigate and analyze
18 July 2011 7
Example Inferred RequirementsExample Inferred Requirements• Metadata delivered in
7 separate messages• Message responses
reference one another NodeDescriptions
reference Nameables, Objects, StateMachines, Exceptions, and Units
Broken references are a problem
StateMachineInstance
stateMachineInstances
EquipmentNodeDescription CEM:Nameable
SEMIObjType ExceptionReference SimpleEvent Parameter
0..* 0..* 0..* 0..*
0..* 11
1..*
node
parameterssimpleEventsexceptionsobjTypes
GetUnits( ) : Unit[ ]GetTypeDefinitions( ) : TypeDefinition[ ]GetStateMachines( ) : StateMachine[ ]GetSEMIObjTypes( ) : ObjType[ ]GetExceptions( ) : Exception[ ]GetEquipmentStructure( ) : Equipment[ ]GetEquipmentNodeDescriptions(in : EquipmentNodeId) : NodeDescription[ ]GetLatestRevision( ) : RevisionNotifyOnRevisions (in : enable)
<<interface>>EquipmentMetadataManager
• Broken references are a problem
• Unreferenced entries indicate probable issues
18 July 2011 8
MCA Rules DetailMCA Rules Detail• MCAGuide11.pdf – included in MCA11.exe
18 July 2011 9
MCA Monitor WindowMCA Monitor Window
• Shows: Metadata location Parsing of the
metadata files Any validation errors
show here Total errors found
• “File Generated” = done• Monitor information
captured to log.txt File saved to
installation directory If an execution error
occurs, send this file to us for debugging
18 July 2011 10
Main MCA ScreenMain MCA Screen
18 July 2011 11
Results SummaryResults Summary
• # Validation errors Validation against the standard E125 XML schema
• # Rules with errors Count of rules with non-zero #Errors results
• Avg Rule Score Each rule give a % result #Errors/Elements #Elements is the number of chances to make an error Avg Rule Score averages the % result for all the rules
18 July 2011 12
Avg Rule ScoreAvg Rule Score
• The goal of the MCA is to help the supplier reach 100% conformance AVG Rule Score is provided to show progress
toward that goal• The MCA is not intended to show:
Degree of completion Some rules are more difficult to implement than others
Comparison of two suppliers Some rules are more important than others
18 July 2011 13
Schema Validation ErrorsSchema Validation Errors• MCA checks each metadata file against the
standard XML schemas The schema contains rules that must be followed
for content and structure of the metadata Where validation errors exist, the MCA results may
not be accurate Correct the validation errors and re-execute the MCA
18 July 2011 14
Equipment Counter SummaryEquipment Counter Summary
• The counter summary give the user a feel for the size and detail of the metadata model This can help point to areas of focus for the
manual analysis of the metadata
18 July 2011 15
Equipment Structure TabEquipment Structure Tab
18 July 2011 16
MCA Errors TabMCA Errors Tab
18 July 2011 17
Detail Behind The ErrorsDetail Behind The Errors
18 July 2011 18
GetEquipmentNodeDescriptionsResponse.xml Investigating Errors
Investigating Errors
• Filename and line number help locate the problem
GetEquipmentStructureResponse.xml
18 July 2011 19
Metadata WarningsMetadata Warnings• Warnings alert the user to areas where
problems might exist In many cases, warnings are acceptable
18 July 2011 20
EDA Evaluation MethodEDA Evaluation Method
• ISMI developed the EDA Evaluation Method as a companion to the ECCE Goal: Provide a simple method for a user to perform basic
happy-path testing for EDA EDA metadata evaluation was added later
• Metadata Evaluation was based on experience Samsung assignee Taihyung Kim performed extensive ad hoc
evaluation on early EDA implementations The resulting process was captured in the Evaluation Method
This is a manual process The MCA tool can now perform most of these steps Some steps must still be performed manually
18 July 2011 21
Beyond the MCABeyond the MCA• Manual evaluation must answer questions such as:
Does the equipment structure match the actual equipment? Are the major components clearly identified Are the descriptions included sufficient to understand the purpose of
each node/parameter/state machine/etc. ? Are the parameters your engineers need included in EDA?
Is all the key SECS variable data available in EDA? Are the parameters defined on the appropriate nodes? Are the data types and units appropriate?
Are the tool specific state machines adequate/useful? Are the metadata definitions reflected via data collected in the actual
operation of the tool? Events reported, data valid, object instances created, etc.
• There are also many details that must be manually reviewed The MCA highlights some of these in the Warnings tab
18 July 2011 22
MCA ReleasesMCA Releases
• MCA Releases MCA 1105 V1.0 – Sept. 2010 (ISMI members only)
Provided initial feedback
MCA 1105 V1.1 – March 2011 (public release) V1.0 was an internal ISMI release for initial feedback V1.1 updated to latest ISMI EDA 1105 Guidance
MCA 0710 V1.0 release in June Capability comparable to MCA 1105 V1.1 Reflects ISMI EDA 0710 Guidance
• MCA is freely available http://ismi.sematech.org/emanufacturing/mca/
Copyright 2011. Advanced Materials Research Center, AMRC, International SEMATECH Manufacturing Initiative, and ISMI are servicemarks of SEMATECH, Inc. SEMATECH, and the SEMATECH logo are registered servicemarks of SEMATECH, Inc. All other servicemarks and trademarks are the property of their respective owners.
Thank You
Metadata Conformance Analyzer
RistTex.net
Lance Rist Automation Consultant
5004 Flaming Oak Cove Austin, TX 78749 Phone: 512-814-1184 Mobile: 512-782-5382 lance.rist@risttex.net
18 July 2011 24
Your PresenterYour Presenter• Lance Rist / Independent Consultant
BS/MS in Chemical Engineering Working in factory automation for 25+ years
Digital Equipment Corporation SEMATECH (Assignee) Motorola ISMI for the last 10 years
• Factory Systems SEMATECH CIM Framework State-machine based reticle tracking Next Generation Factory System requirements
• Equipment Control and AMHS One of the first automated photo bays AMHS control system specification and configuration SEMI Communication Standards
SEMI E30 GEM Standard SEMI E120 Common Equipment Model (1st EDA std) SEMI E139 Recipe and Parameter Management SEMI E157 Module Process Tracking Wait Time Measurement (on-going)
• Process Control Circuit board manufacturing factory-wide process control
RistTex.net
Lance Rist Automation Consultant
5004 Flaming Oak Cove Austin, TX 78749 Phone: 512-814-1184 Mobile: 512-782-5382 lance.rist@risttex.net
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