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Let me describe fabrication and characterization of a significantly improved version of a MEMS-based PZT/PZT thick film bimorph vibration energy harvester with an integrated silicon proof mass. The main advantage of bimorph vibration energy harvesters is that strain energy is not lost in mechanical support materials since only PZT is strained, and thus it has a potential for significantly higher output power. An improved process scheme for the energy harvester resulted in a robust fabrication process with a record high fabrication yield of 98.6%. Moreover, the robust fabrication process allowed a high pressure treatment of the screen printed PZT thick films prior to sintering, improving the PZT thick film performance and harvester power output reaches 37.1 μW at 1 g.r description goes here
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Piezoelectric MEMS Energy Harvesters
Integrating MEMS piezoelectric energy Integrating MEMS piezoelectric energy harvestingharvesting
[email protected] POLYECHNIC COLLEGE.THIRUVANANTHAPURAM
In association with MCEAIn association with MCEA
©ask creative’s™
IntroductionIntroduction
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Wireless sensor node anatomyWireless sensor node anatomy
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MEMS piezoelectric energy MEMS piezoelectric energy harvestersharvesters
Silicon Chip is 1.3 cm square. Resonance Frequencies Of Devices Ranged From 31–232Hz
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Printed energy storage materialsPrinted energy storage materials
Used for printng Capacitors, baXeries, magnets, masses, & Thermoelectric materials
PolymerResin
Add ActiveParticles
Ink
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Printed energy storage materialsPrinted energy storage materials
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Printing capacitor onto harvesterPrinting capacitor onto harvester
Piezoelectric beamPrinted capacitor
Electron leads &Bond pads
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Optimization: harvester resistive Optimization: harvester resistive loadload
Vol
tage
of h
arve
ster
P = Voltage2/Resistance,
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Power conditioning circuitsPower conditioning circuits
Energy harvesterEnergy harvester Power ConditioningPower Conditioning
LoadLoad
VOLTAGE & CURRENT ARE OUT OF PHASE LOSS OF POWER
Voltage and Current are out of phaseVoltage and Current are out of phase
Voltage and Current are in phaseVoltage and Current are in phase
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Optimization: harvester+power Optimization: harvester+power conditioningconditioning
THIS IS THE FULL COUPLED ELECTROMECHANICAL SYSTEM
INPUTS:FrequencyAccelerationAvailable volumeMaterial properties
OUTPUTS:Efficiency
Power outputOptimal harvester Geometry
Optimal Circuit component values
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Power supply module optimization Power supply module optimization resultsresults
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Power supply module optimization Power supply module optimization resultsresults
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Why print mass?1.Decrease freq.2.Increase power3.Customize freq.4.Integration
Successfully printed mass on 6 released beams with no ‘causalities'
2.5mm 1.5mm
1.5mm 1.5mm
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SummarySummary
Initial proof of integration concept: could not electrically connectInitial proof of integration concept: could not electrically connect
Optimized harvester to improve power outputOptimized harvester to improve power output
Optimized harvester + power conditioning: full coupled systemOptimized harvester + power conditioning: full coupled system
Optimization results tell us how to build full integrated power supply systemOptimization results tell us how to build full integrated power supply system
Energy storage can be printed onto harvester or package in novelwaysEnergy storage can be printed onto harvester or package in novelways
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Thank YouThank You
04/11/23 tangibility by ask™ 15©ask creative’s™
![Power Enhancement for Piezoelectric Energy Harvester · General schematic of piezoelectric energy harvester [4] ... piezo = m. MFC. Fig. 4 ... the shaker is excited by an amplifier](https://img.dokumen.tips/doc/110x75/5b0a02fc7f8b9a0c4b8b536d/power-enhancement-for-piezoelectric-energy-schematic-of-piezoelectric-energy-harvester.jpg)
