Ibex engineering high precision linear motion made easy presentation 2009

High Precision Made Easy

Sub-Micron PositioningHosted by Electromate

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Agenda

• About Ibex • Considerations In Sub

Micron Position System• Projects

The Science Of Precision Motion



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Ibex Engineering Introduction

• Precision Stage Manufacturer• Forte

– Micron and under– Cross roller stages

• We make Nano technology easy

The Science Of Precision Motion



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Ibex History

• Founded By Andre Perrin in 1999

• Background – Metrology System

• Formed the company to fill a gap In Industry by providing non-standard precision motion control platforms



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The Markets We Serve

• Biomedical/Pharmaceutical• Life Sciences

– Cell Imaging…..• Medical Device • Semi Conductor Fab• Data Storage• National Lab/Research• Metrology• Photonics/Telecom• Aerospace and Defense….



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What We Look For When Designing A High Precision System



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When Reviewing a Sub-Micron Application• Basic Engineering

– Project scope– Specification review– Engineering challenges relative to

the specification– Motor Type – Stiffness (Nanomotion)– Component sizing– Materials– Control (Galil)

• Stiffness• Feedback compatibility• Capability• Who, what, where, and how

The Process



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The Main Decision Drivers

• Accuracy and Repeatability– Length of Travel

• Straightness/Flatness • Roll, Pitch and Yaw

– Envelope– Load and load position– Multi-axis Compounding– Environment

• Materials• Finish

– Feedback Type

Basic Engineering



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Concept Review

Accuracy• The closeness of agreement between the

results of a measurement and the true value of the object being measured

Repeatability• Under Identical conditions how well a

system can return to one commanded location– Unidirectional– Bi-Directional

Basic Engineering



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Resolution

Resolution• Smallest possible movement of a system• Resolution of the Encoder• Step size

Encoder Resolution doesn’t define the Accuracy of a Complete System

• Many Factors Determine Accuracy

Mechanical Concepts



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Concept Review• Straightness/Flatness – Run out• Not The Same As Running Parallelism

Straightness

FlatnessELECTROMATE

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Basic Engineering

• Roll, Pitch and Yaw – Arc-sec

RollPitch

Yaw



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Basic Engineering

• Pitch – Arc-sec



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Basic Engineering

• Yaw – Arc-sec



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Basic Engineering

• Roll – Arc-sec



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What will the stage be mounted on???

• If accuracy is critical to the application– Roll, Pitch and Yaw– Straightness/Flatness

• It doesn’t matter how good the stage is if you mount to a potato chip….

Basic Engineering

1 mm shim can twist the entire structure

4 M wide, 1.5 M tall

All Granite

Compensate for Sag



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Concept Review

• Envelope

Basic Engineering

Nothing is for freeELECTROMATE


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Determine position and state of the load

• Orientation of the Load– Bearings– Materials– Abbe Error

• Load Vibration - Work• Speed - CG

– Settling

Basic Engineering



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Specifications Drive The Choice of Bearing

• Bearing type– Crossed Roller

• Anti-Creep considerations– Profile Rails

• Precision/preload– Air bearing

• Size • Orientation• Cost

Basic Engineering



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Contact Area• Bearing Stiffness review

Ball versus Crossed Roller

Basic Engineering



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Crossed Roller Review

• Bearing– Anti-Creep Considerations– Materials

Basic Engineering



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Air Bearings Review

• Air Bearings– More surface area = High Stiffness – High pressure = less deformation– No friction = no heat– Precision parts– Control Flatness and Straightness

Basic Engineering



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Velocity Control Considerations• Ball Screws

• Lead Error• Ball entering and exiting the return tube

• Profile Rails• Ball entering and exiting the return tube• Seal Drag• Preload

• Best – Linear Servo

• (Piezo - NanoMotion or Ironless)– Air Bearing or Crossed Rollers

Basic Engineering



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Environment other Error Causing Factors

• Thermal expansion errors • Feedback • Cosine errors• Abbé offsets

Basic Engineering



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Environment

Basic Engineering

Temperature

Thermal Expansion• Stainless Screw = 12ppm/deg C• Aluminum = 23 ppm/deg. C• 3 degree rise makes a 100mm screw grow ~7

microns

• Areas of concern– Type of motor and associated duty– Temperature swings of the environment– Adjacent equipment ELECTROMATE


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Environment

Basic Engineering

Materials• Granite

– Hardness – good for lapping– Best commercially available flatness spec’s– Size = Thermal inertia

• Stainless Steel– Good stiffness – 3 times that of Aluminum– Half the expansion of Aluminum

• Aluminum – Stiffness to weight ratio– Rapidly adjusts to temp change

Stiffness

F= KX

F= Force

K = Modulus of elasticity

X= DeflectionELECTROMATE


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Feedback

• Feedback type– Linear

• Digital vs Analog– Scale Type – Typically

20um grating

• Tape• Glass 1.8 µm/m/°C • Invar 0.6 µm/m/°C

– Rotary– Interferometer

Basic Engineering



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Feedback – Cosine Error

Cosine errors occur when a positioning feedback scale is not in perfect parallel alignment with the motion of the moving carriage.

Basic Engineering



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Abbé errors– Encoder Measurement vs. Actual Position

• Mechanical Errors

Basic Engineering

Control thinks you are

moving in a straight line

The encoder head doesn’t care or know that there is

a shift

The work is really out

here

Control thinks the work is

here



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Concept Review

Other Considerations• Structural Stiffness

– What are we mounting too– Mechanical Vibration dampening– The building and traffic

• Wire Management• Controls

– Features based relative to the end goal– Mapping, Notch filtering, Adaptive tuning for

variable inertias, Sin-Cosine inputs….

Basic Engineering



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Natural Frequencies and Gain Control

Basic Engineering

• All mechanical systems have a natural frequency • Sometimes the system frequency can be in a range that causes

instability issues• Advanced Gain controls such as FRF (Frequency Response

Function) can be used to improve your mechanical system stability when applications demand– Velocity control– Short/fast settling times– Crisp Movements



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Basic Engineering

• DSA (Digital Signal Analyzers) included in today’s controls make it possible to Characterize the system dynamics with FRF

• The Idea is Analyze and Monitor the resonance so that you can enhance the stability of the system through the optimization of Gains and System bandwidth.

• A perfect world is you get back what you put in - unity



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Basic Engineering

• Through the use of FRF and Notch filters one can effectively dampen out some of the resonance.

• There are various levels of filters offered by many different control companies

•• Example show cause and effect

of a notch at 140Hz…thin line is the result thick line is the first analysis

• From here gains can be optimized for desired results



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A World Of Choice

Custom and OEM Built Motion Platforms



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System Technologies and Configurations

• Positioning stages– X,Y,Z, Theta– Z-Wedges– Goniometer– Gantries– Various compound stages– Granite Stages– Assemblies



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• Bearing Technologies– Air Bearings– Crossed Roller– Recirculating Ball

• Round and Profile– Cam Rollers

• Screw Technologies– Precision Ground – Precision Rolled / Standard Rolled– Lead/acme



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• Controls– Galil– Yaskawa– Trio– ACS– Elmo– PLC….



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–Motor Technologies– Nano Motion– Rotary

• Stepper • Servo / Frameless

– Linear Servo• Nippon Pulse• Yaskawa• Technotion

– Integrated Lead/acme motors– Voice Coil ELECTROMATE


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Product and Capabilities Review



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National Labs / Research



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Kinematics Systems

5 and 6 Degrees of freedomMultiple sizes and configurations.



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Multi Pod Systems

6 Degrees of freedomMultiple sizes and configurations.



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High and Ultra High VacuumIbex has the Vacuum solutions with years of experience building stages in a range atmospheres from 10-3 to 10-10. We’ve built an array of precision stage configurations using multiple combinations of bearing and motors.



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Semi Conductor Research



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The Sciences



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Gantry and Granite



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Gantry and Granite



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Metrology

Metrology Platforms



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Metrology



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Semiconductor



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Semiconductor



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Nano Positioning



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Medical OEM’s



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Medical OEM’sLaser Based Scan Scopes



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Custom OEM Screw Applications



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Precision Screw Platforms



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Life Sciences - OEM Builds



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Life Sciences - OEM Builds



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Linear Crossed Roller Screw Stage



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Multi Axis Screw Stages



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Multi Axis Microscope Screw Stages



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Precision Screw Stage



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Vacuum Screw Stages



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Standard Screw Stages

• Configurable stages– Acme, Ball and Linear

Servo– Open or closed loop

• 10nm to 5um– Sizes

• 300,200,150,100 and 50mm



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Screw Driven Actuator



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Custom Screw Stages



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Stainless Screw Stages



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Linear Servo Applications



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500mm x 500mm Precision Linear Servo stage



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Always Developing New Products



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Voice Coil Linear Applications



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Custom Applications



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Custom Applications



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Exotic Platforms



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Custom Applications



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Aerospace - Gimbal



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Aerospace - Gimbal



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Exotic Nano Platforms



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Multi Axis Nano Stages



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Counter Balance Configurations



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Miscellaneous Assemblies



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Rotary Stages and Goniometers



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Rotary – Nano Direct Drive



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Rotary –Direct Drive Servo



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Rotary – Worm Gear



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Multiple Z-Wedge Configurations



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What’s New?



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All mechanical designs are created in 3D

IBEX is a Fully Integrated Company –

From 3D Design

Design To MFG



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Fully Integrated Manufacturing From SolidWorks

To Master Cam CAD/CAM

From 3D Design – To Mastercam

Design To MFG



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5 Fully Integrated CNC Mills

Mastercam to Machine Centers



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From Assembly to QA

In House Measuring Systems• Laser Interferometer – 1nm res• Auto Collimator• Laser Rotary Calibrator



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Thank You!

• For allowing our organization to present today

• We look forward to the partnership



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Ibex engineering high precision linear motion made easy presentation 2009

Text of Ibex engineering high precision linear motion made easy presentation 2009

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Ibex engineering high precision linear motion made easy presentation 2009

Text of Ibex engineering high precision linear motion made easy presentation 2009