Diamond films

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Diamond films measurement A set of diamond films on Si and freestanding films were measured using MProbe

spectroscopic reflectometer system. Films on Si were measured using spectral reflectance. Freestanding films were measured using transmittance (optional fixture). Two spectrometer were used:

a) Vis spectrometer 400-1000nm (~ 1.5nm spectral resolution) for thinner films b) High-resolution Vis spectrometer 700-1000nm (0.35nm resolution) for thicker

films (> 20um films) Measurement site ~ 2 mm (reflectance measurement was done without focusing lens, transmittance measurement were done using collimating lens) Sample Measured

thickness,um Comments

1- square 0.329 Diamond film on Si Large square

2 - square 0.441 Diamond film on Si Large square

3 - square 1.019 Diamond film on Si Large square

4 - small square 0.697 Diamond film on Si Small square

5 - small square

1.019 Diamond film on Si Small square

6 - small square 0.892 Free standing 1 46.965 Diamond film piece



Details of the measurement.

I. Free standing diamond film. Spectral transmittance measurement was done in 700-1000nm range using high-resolution spectrometer. The thickness was found using thick film algorithm (based on FFT)

Fig, 1. Raw/uncalibrated transmittance data (free standing 1) oscillation indicate interference due to ~ 40um thickness.

Fig. 2 Same data as Fig. 1 only calibrated to show real transmittance spectrum



Fig. 3 Free standing 1 sample - thickness is determined using thick film algorithm (peak indicates the thickness value). Thickness 469468 Angstroms is displayed is parameters table. II. Sample 1 (Si square with diamond film)

Fig. 4 Measurement results of the diamond film thickness (sample 1). Thickness is inferred from the best fit to measured data. Thickness=3290 Angstroms



III. Sample 2 (Si square with diamond film)

Fig. 5 Measurement results of the diamond film thickness(sample 2). Thickness is inferred from the best fit to measured data. Thickness=4411 Angstroms. This sample shows significantly high surface roughness (than sample 1). Effective surface roughness of ~ 490A was inferred from the best fit. IV. Sample 3 (Si square with diamond film)

Fig. 6 Measurement results of the diamond film thickness(sample 3). Thickness is determined using thick film algorithm. Thickness = 10190Angstroms



Fig. 7. Measurement results of the diamond film thickness(sample 3). Thickness is inferred from the best fit to measured data. Thickness=10190 Angstroms. This sample shows significantly high surface roughness (than sample 2). Effective surface roughness of ~ 900A was inferred from the best fit. The quality of the fit is decreased because of surface roughness – it is easier to use thick film algorithm (Fig. 6)



V Sample 4 (small square)

Fig. 8 Measurement results of the diamond film thickness (sample 4). Thickness is inferred from the best fit to measured data. Thickness=6971 Angstroms. This sample shows low surface roughness. Effective surface roughness of ~ 200A was inferred from the best fit.

VI. Sample 5 (small square)

Fig. 9 Measurement results of the diamond film thickness(sample 5). Thickness is determined using thick film algorithm. Thickness = 10190 Angstroms



VII Sample 6 (small square)

Fig. 10. Measurement results of the diamond film thickness (sample 6). Thickness is determined using thick film algorithm. Thickness = 8960 Angstroms

Science

Diamond films