SolidWorks Simulation Dimensions
WsWb
LxWg
L
100µm25µm10µm200µm2mm5
10µm25µm10µm200µm2mm6
300µm25µm10µm200µm2mm2
300µm10µm10µm200µm2mm3
200µm25µm10µm200µm2mm4
7
1
25µm
50µm
Ws
300µm100µm200µm2mm
300µm10µm200µm2mm
LxWgWbL
All simulations performed with small arm at 400C
Summary
0.000448
-
0.000498
0.000467
-
0.000446
0.000563
Scale
4.577e-1
-
3.681e-1
4.125e-1
-
4.54e-1
3.611e-1
Max. Disp.
300µm
10µm
100µm
200µm
300µm
300µm
300µm
Lx
183.325µm10µm200µm2mm5
25µm10µm200µm2mm6
202.525µm10µm200µm2mm2
10µm10µm200µm2mm3
192.725µm10µm200µm2mm4
7
1
25µm
50µm
Ws
205.1100µm200µm2mm
203.310µm200µm2mm
Microns
WgWbL
WsWb
LxWg
L
To obtain max. displacements Lx has to be maintained at 300µm. Wg does not affect the max. displacement much but needs to be >10µm to maintain structure integrity.Max. displacement of 300µm obtained in next page.