Phys

ical

Sec

urity

Tes

ting

Wor

ksho

p, H

awai

i, 26

-29

Sept

embe

r 200

5

Stud

ying

LSI

Tam

per R

esis

tanc

e W

ith R

espe

ct to

Tec

hniq

ues

Dev

elop

ed fo

r Fai

lure

Ana

lysi

s

Tsut

omu

Mat

sum

oto

Shig

eru

Nak

ajim

a Yo

koha

ma

Nat

iona

l Uni

vers

ity　

Van

Partn

ers

Cor

pora

tion

Tada

shi S

hiba

ta

Ats

uhiro

Yam

agis

hiU

nive

rsity

of T

okyo

In

form

atio

n-te

chno

logy

P

rom

otio

n A

genc

y, J

apan

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

2

Con

tent

s1.

Intro

duct

ion

Tam

per r

esis

tanc

e of

LS

I chi

ps a

gain

st p

hysi

cala

ttack

s is

stu

died

fro

m th

e vi

ewpo

int o

f LS

I fai

lure

ana

lysi

s.2.

Bas

ic P

hysi

cal P

heno

men

a in

LS

I Chi

ps3.

Failu

re A

naly

sis

Tech

niqu

esLa

ying

stre

ss o

n th

e ba

sic

phys

ical

phe

nom

ena

gene

rate

d in

LS

I ch

ips

unde

r ope

ratin

g co

nditi

ons,

we

outli

ne to

day’

s fa

ilure

an

alys

is te

chni

ques

with

app

licat

ion

to e

valu

atin

g or

test

ing

tam

per

resi

stan

ce o

f LS

I chi

ps.

4.A

Cas

e S

tudy

of T

ampe

ring

Sen

sor C

ircui

tsW

e gi

ve s

ome

resu

lts fr

om o

ur c

ase

stud

y on

inac

tivat

ion

of s

enso

r ci

rcui

ts w

here

em

issi

on m

icro

scop

y pl

ays

an im

porta

nt ro

ll.5.

A T

enta

tive

Cla

ssifi

catio

n of

Sec

urity

Lev

els

Fina

lly w

e sh

ow a

n at

tem

pt to

cla

ssify

the

secu

rity

leve

ls fo

r LS

I ch

ips

with

resp

ect t

o th

e re

quire

d eq

uipm

ent a

nd th

e re

quire

d sk

ills

of a

ttack

ers.

6.S

umm

ary

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

3

2. B

asic

Phy

sica

l Phe

nom

ena

in L

SI C

hips

Two

Cla

sses

; “G

ener

ated

”and

“Stim

ulat

ed”

1.G

ener

ated

Phy

sica

l Phe

nom

ena

–ar

e th

ose

gene

rate

d in

ope

ratin

g LS

I chi

ps a

nd h

ave

thre

e ty

pes.

–Th

e fir

st ty

pe is

ban

d-ga

p na

rrow

ing

in d

eple

tion

regi

on w

hen

high

re

vers

e vo

ltage

is a

pplie

d to

p-n

junc

tion

at d

rain

regi

ons.

–

The

seco

nd ty

pe is

pho

ton

emis

sion

from

MO

SFE

Tsan

d bi

pola

r tra

nsis

tors

by

aval

anch

e br

eakd

own

at th

e dr

ain

edge

and

re

com

bina

tion

of h

oles

and

ele

ctro

ns a

t the

bas

e re

gion

, re

spec

tivel

y.

–Th

e th

ird ty

pe is

term

inal

vol

tage

cha

nge

acco

rdin

g to

inpu

t sig

nals

.

2.S

timul

ated

Phy

sica

l Phe

nom

ena

–ar

e th

ose

indu

ced

in L

SI c

hips

by

som

e ph

ysic

al s

timul

atio

n.–

One

suc

h ph

ysic

al p

heno

men

on is

exc

itatio

n of

car

riers

in

depl

etio

n re

gion

by

lase

r bea

m ir

radi

atio

n an

d it

resu

lts in

ge

nera

tion

and

reco

mbi

natio

n (g

r) c

urre

nt fl

ow.

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

4

Phys

ical

Phe

nom

ena

in O

pera

ting

LSI

nMO

SFET

Bip

olar

Tr

sour

cedr

ain

gate

pn+

n+

OFF ON

base

colle

ctor

emitt

erp

nn+

EC EV

Ban

d-G

apC

hang

e

EC EV

Ava

lanc

heB

reak

dow

nEm

issi

onEm

issi

on

Rec

ombi

natio

n

Term

inal

Vol

tage

Cha

nge

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

5

Gen

erat

ion-

Rec

ombi

natio

n C

urre

nt F

low

by

Las

er B

eam

Irra

diat

ion

VG>

0

Dep

letio

nR

egio

n

g-r C

urre

ntLa

ser B

eam

Inve

rsio

nLa

yer

p-ty

pe

MO

S D

iode

pn-J

unct

ion

Dio

deR

ever

se B

iase

d

Dep

letio

n R

egio

n

EC EVEFg-

rC

urre

nt

Lase

r Bea

m

Ref

lect

edLa

ser B

eam

VG>

0

EC EF EV

g-r C

urre

nt

Dep

letio

n R

egio

n

Lase

r Bea

mIn

vers

ion　

Laye

r

p-ty

pen-

type

Dep

letio

n R

egio

ng-

r Cur

rent

Lase

r Bea

m

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

6

Typi

cal D

etec

tion

Met

hods

for P

hysi

cal P

heno

men

a in

LSI

AID

D

VDD

Prob

ing

Pad

Con

tact

or N

on-c

onta

ct P

robi

ng

Phot

on E

mis

sion

Si-S

ubst

rate

Phot

on D

etec

tion

G-r

cur

rent

mea

sure

men

tD

etec

tion

of re

flect

ed

lase

r bea

m

Irrad

iate

dLa

ser B

eam

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

7

Sam

ple

Prep

arat

ion

Tech

niqu

es fo

r Obs

erva

tion

Bit

Line

Cro

ss-S

ectio

ning

Phys

ical

Lay

er R

emov

alG

ate

ML6

ML5

ML4

ML3

ML2

ML1

Wet

Etc

hing

ML1

Laye

r

DR

AM

Flas

hM

emor

y

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

8

Sam

ple

Prep

arat

ion

Tech

niqu

es

for W

avef

orm

Mea

sure

men

ts

Fron

t-sid

ePa

d fo

rmat

ion

Die

lect

ric fi

lm

Bac

ksid

eSi

-sub

thin

ning

Si im

mer

sion

rem

oval

lens

form

atio

n

RM

S <

30nm

Si -s

ub40

0µm

R

R ～

300µ

mD

evic

e ar

ea

Bac

ksid

e

R/n

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

9

Mea

sure

men

t Met

hods

for E

lect

rical

Cha

ract

eris

tics

OB

IC

EBT

LVP

TRE

EOS

Nan

o-Pr

ober

Met

hod

Feat

ures

Mea

sure

men

t of “

H”

or “

L”st

ate

of n

odes

by

dete

ctin

g su

bstr

ate

curr

ent g

ener

ated

by

lase

r bea

m e

xpos

ure.

Wav

efor

m m

easu

rem

ent b

y de

tect

ing

amou

nt o

f sec

onda

ryel

ectr

ons

emitt

ed fr

om o

pera

ting

inte

rcon

nect

ions

.

Wav

efor

m m

easu

rem

ent b

y de

tect

ing

inte

nsity

of l

aser

be

am re

flect

ed a

t rev

erse

bia

sed

p-n

junc

tion

in d

evic

es.

Wav

efor

m m

easu

rem

ent b

y de

tect

ing

inte

nsity

of p

hoto

nem

issi

on fr

om o

pera

ting

devi

ces.

Wav

efor

m m

easu

rem

ent b

y de

tect

ing

pola

rizat

ion

of la

ser

beam

afte

r pas

s-th

roug

h a

bias

ed e

lect

ro-o

ptic

cry

stal

. M

easu

rem

ent o

f sta

tic d

evic

e ch

arac

teris

tics

usin

g fin

e m

echa

nica

l pro

bes

in v

acuu

m c

ham

ber w

ith S

EM.

OB

IC: O

ptic

al B

eam

Indu

ced

Cur

rent

, EB

T: E

lect

ron

Bea

m T

estin

g, L

VP: L

aser

Vol

tage

Pro

bing

,TR

E: T

ime

Res

olve

d Em

issi

on, E

OS:

Ele

ctro

-Opt

ic S

ampl

ing,

SEM

: Sca

nnin

g El

ectr

on M

icro

scop

y

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

10

p-w

ell

nMO

S

pMO

S

CLO

CK

OU

T

P-w

ell

pMO

S

VDD

nMO

S

GN

D

©

p+p+

n-Su

b

Dep

letio

n R

egio

n

Igr-

3Igr-

2Ig

r-1

n+p-

wel

l

(nM

OS)

(pM

OS)

Lase

r

GN

DVo

utVi

nVD

D

n+n+

p+

Lase

r

Nod

e St

ate

Obs

erva

tion

by O

BIC

(O

ptic

al B

eam

Indu

ced

Cur

rent

)

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

11

Wav

efor

m M

easu

rem

ent b

y EB

T (E

lect

ron

Bea

m T

estin

g)

Det

ecto

r

3V0V

Inci

dent

ele

ctro

nbe

am

Seco

ndar

y el

ectr

on

Inte

rcon

nect

ion

Rea

ctiv

e Io

n Et

ched

Sur

face

Mea

sure

d W

avef

orm

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

12

Wav

efor

m M

easu

rem

ent f

rom

bac

ksid

e by

LVP

(L

aser

Vol

tage

Pro

bing

)

Mea

sure

men

tpo

int

Bac

ksid

e Po

lishi

ng

Chi

p

Inne

r Lea

d

1 ps

Wav

efor

m

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

13

Det

ectio

n of

Pho

ton

Emis

sion

by

TRE

(Tim

e R

esol

ved

Emis

sion

)

VO

UT

VIN

VDD nM

OSF

ET

pMO

SFET

Emis

sion

Emis

sion

VIN

VOU

T

Tim

e (a

.u.)

IntensitynM

OSF

ETpM

OSF

ETPhoton

from

from

CM

OS

Inve

rter

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

14

Wav

efor

m M

easu

rem

ent b

y EO

-Sam

plin

gLa

ser

Elec

tric

Fiel

dEO C

ryst

alPa

d

Mirr

or

1µｍ

Wid

e ba

nd w

idth：～

60 G

Hz

EOC

ryst

alPola

rizat

ion

Cha

nge

Lase

r

Inte

nsity

Cha

nge

Pola

rizer

(Poc

kels

effe

ct)

～

Tim

e

Voltage

1 ns

60 mV

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

15

I-V C

hara

cter

istic

s M

easu

rem

ent b

y N

ano-

prob

er

Prob

e 2

Prob

e 1

Prob

e 3

Prob

e 4

5μm

Subs

trat

eG

ate

Dra

inSo

urce

Phot

ogra

ph o

f pro

bes

cont

actin

g to

via

plu

gsM

easu

red

I-V c

hara

cter

istic

s(A

: nor

mal

, B: f

ail)

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

16

Tam

perin

g Te

chni

ques

and

Rel

ated

Equ

ipm

ent

Dat

a re

adin

g fr

om R

OM

and

fla

sh m

emor

ies

FIB

, EB

T,LV

P,TR

E, E

OS

FIB

, OB

IC, S

EM

Cat

egor

ies

of a

ttack

Atta

ck T

echn

ique

s

Phys

ical

Str

uctu

re A

naly

sis

Chi

p re

mov

al fr

om IC

car

dsM

echa

nica

l sam

ple

trea

tmen

t

Cro

ss-s

ectio

nal a

naly

sis

Mem

ory

cell

stru

ctur

e an

alys

is

Circ

uit d

iagr

am a

naly

sis

Inte

rcon

nect

ion

laye

r lap

ping

w

ith s

tep

by s

tep

man

ner

Obs

erva

tion

of la

yout

pat

tern

sA

naly

sis

of c

ircui

t dia

gram

sfr

om la

yout

pat

tern

s

Ope

ratio

nal a

naly

sis

Pack

agin

g of

a re

mov

ed c

hip

Circ

uit r

erou

ting

base

d on

op

erat

iona

l circ

uit a

naly

sis

Sam

ple

prep

arat

ion

Ana

lysi

s of

chi

p ar

chite

ctur

e

Chi

p ar

chite

ctur

e an

alys

is

Equi

pmen

tH

ot p

late

,

FIB

, SEM

,

Cle

an b

ench

Lapp

ing

mac

hine

Mic

rosc

ope

(Eng

inee

rs)

Wire

bon

der,

Nan

o-pr

ober

Wav

efor

m m

easu

rem

ent

Mic

rosc

ope,

Cle

an b

ench

NC

-Grin

der,

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

17

4. A

Cas

e St

udy

of T

ampe

ring

Sens

or C

ircui

ts

–To

des

crib

e ho

w fa

ilure

ana

lysi

s te

chni

ques

can

be

used

for t

ampe

ring

IC c

ard

chip

s, w

e gi

ve s

ome

resu

lts

of a

n ex

perim

enta

l phy

sica

l atta

ck.

–In

gen

eral

, phy

sica

l atta

cks

may

hav

e tw

o ob

ject

ives

:

1.To

read

out

sec

ret d

ata

such

as

Crit

ical

Se

curit

y Pa

ram

eter

s fr

om th

e ch

ip.

2.To

alte

r the

func

tion

or d

ata

for s

ecur

ity

mec

hani

sms

impl

emen

ted

in th

e ch

ip.

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

18

Typi

cal F

unct

iona

l Blo

ck D

iagr

am o

f IC

Car

d C

hip

I/O CLK

RST VD

DG

ND

CPU

RO

M

Non

vola

tile

Mem

ory

RA

MSe

nsor

Cry

ptog

raph

icC

ircui

ts

Pow

er C

ontr

ol C

ircui

ts

I/OC

ircui

ts

Circ

uits

Stor

age

of G

loba

l

Stor

age

of A

ttack

Cry

ptog

raph

icD

ata

Proc

essi

ng

Mas

ter K

ey

His

tory

Prev

entio

n of

Ope

ratio

nU

nder

Irre

gula

r Con

ditio

n

: gen

eral

targ

et b

lock

s fo

r phy

sica

l atta

cks

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

19

An

Obs

erva

tion

on a

Tar

get C

hip

The

Shm

oo-P

lot

1.Th

e op

erat

iona

l ran

ge o

f su

pply

vol

tage

and

clo

ck

freq

uenc

yof

a ta

rget

IC c

ard

chip

was

mea

sure

d.

It is

som

ewha

t nar

row

erth

an

thos

e fo

r con

vent

iona

l LSI

ch

ips

fabr

icat

ed w

ith th

e sa

me

patte

rn ru

le.

Pass

Reg

ion

Fail

Reg

ion

Supp

ly V

olta

ge

Clock Frequency2.

Thi

s fa

ct s

tron

gly

sugg

ests

that

the

chip

is e

quip

ped

with

som

e se

nsin

g ci

rcui

try

for s

uppl

y vo

ltage

and

cl

ock

freq

uenc

yas

suc

h a

chip

ofte

n is

.

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

20

The

Ass

umpt

ion

–Th

e ta

rget

IC c

ard

chip

con

tain

s a

user

’s

pass

wor

d.

–A

n at

tack

er tr

ies

to fi

nd it

, by

exha

ustiv

e se

arch

, na

mel

y by

inpu

tting

eve

ry c

andi

date

pas

swor

d.

–H

owev

er, t

he h

isto

ry o

f bei

ng in

put w

rong

pa

ssw

ord

is re

cord

ed in

EEP

RO

M s

o th

at

the

IC c

ard

chip

may

be

forc

ed to

be

inac

tive

if th

e nu

mbe

r of a

ttack

tria

ls re

cord

ed in

EEP

RO

M

exce

eds

the

initi

ally

def

ined

thre

shol

d va

lue.

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

21

The

Atta

ck S

cena

rio

–Th

us a

pro

mis

ing

chal

leng

e of

the

atta

cker

may

be

dest

royi

ng th

e m

echa

nism

of w

ritin

g da

ta in

to

EEPR

OM

.

–If

the

supp

ly v

olta

ge m

ay b

e re

duce

d to

low

eno

ugh,

w

ritin

g da

ta in

to E

EPR

OM

may

no

long

er w

ork

and

the

atta

cks,

suc

h as

pas

swor

d ex

haus

tion,

cr

ypta

naly

sis,

or s

oftw

are

atta

cks,

can

be

done

re

peat

edly

.

–A

ttack

er tr

ies

to m

ake

the

supp

ly v

olta

ge s

enso

r ci

rcui

t ina

ctiv

e.

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

22

The

Flow

of E

xper

imen

tal P

hysi

cal A

ttack

Iden

tific

atio

n of

Tar

get S

enso

r Circ

uit P

ositi

ons

Targ

et S

enso

r Circ

uit D

iagr

am A

naly

sis

Inac

tivat

ion

of T

arge

t Sen

sor C

ircui

t by

Rer

outin

g

Ope

ratio

nal C

hara

cter

izat

ion

of IC

Car

d C

hip

Rea

d Se

cret

Dat

a

Rem

oval

and

Pac

kagi

ng o

f IC

Car

d C

hip

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

23

Rem

oval

and

Pac

kagi

ng o

f IC

Car

d C

hip

Chi

p

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

24

Iden

tific

atio

n of

Tar

get S

enso

r Circ

uit P

ositi

ons

Nor

mal

ope

ratio

n co

nditi

onEm

issi

on s

ites

incr

ease

due

tofa

ilure

. Em

issi

on M

icro

scop

y is

use

ful t

o id

entif

y se

nsor

circ

uits

.

(To

keep

the

secu

rity

of th

e re

al ta

rget

chi

p, th

e ab

ove

and

next

illus

trat

ive

pict

ures

are

the

resu

lts o

btai

ned

by e

xper

imen

ts o

n ot

her c

hips

.)

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

25

Targ

et S

enso

r Circ

uit D

iagr

am A

naly

sis

ML2

ML1

Gat

e la

yer

Out

put

Obs

erva

tion

Con

stru

ctio

nof

circ

uit

diag

ram

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

26

Rer

outin

g to

Mak

e Se

nsor

Circ

uit I

nact

ive

Out

put l

ine

Cut

poi

nt

Out

put l

ine

was

cut

and

con

nect

ed to

Vss

line

.

New

ly fo

rmed

line

by F

IBC

ut p

oint

New

ly fo

rmed

Line

by

FIB

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

27

Shm

oo-P

loto

f IC

Car

d C

hip

Bef

ore

and

Afte

rA

ltera

tion

of S

enso

r Circ

uits

for

Low

Sup

ply

Volta

ge a

nd L

ow C

lock

Fre

quen

cy

Pass

Reg

ion

Fail

Reg

ion

Supp

ly V

olta

ge

Clock Frequency

(Initi

al)

Afte

r alte

ratio

n

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

28

Supe

riorit

y th

e Li

ght E

mis

sion

Imag

e (L

EI) o

ver

the

Volta

ge C

ontr

ast I

mag

e (V

CI)

of E

B T

estin

g

Con

tras

t im

age

diffe

renc

ebe

twee

n op

erat

ing

cond

ition

of A

and

B.

(IFA

: Im

age

Faul

t Ana

lysi

s)

Emis

sion

imag

e di

ffere

nce

betw

een

oper

atin

g co

nditi

onof

A a

nd B

.

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

29

Ana

lyze

d C

ircui

ts A

rea

is L

ess

Than

2%

of

the

Are

a of

the

Chi

p Ex

clud

ing

the

Mem

ory

Ana

log

and

Dig

ital C

ircui

t Are

a

Ana

lyze

d Se

nsor

Circ

uit A

rea

Mem

ory

Are

a

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

30

5. A

Ten

tativ

e C

lass

ifica

tion

of S

ecur

ity L

evel

s

–Ba

sed

on o

ur e

xper

ienc

e in

failu

re a

naly

sis,

we

sugg

est

a te

ntat

ive

way

of c

lass

ifyin

g se

curit

y le

vels

of L

SI c

hips

.

–Th

e se

curit

y le

vels

may

be

clas

sifie

d by

usi

ng

(1)t

he re

quire

d sk

ill ra

nk o

f the

atta

cker

s or

an

alys

ts,

and

(2)t

he n

eces

sary

failu

re a

naly

sis

equi

pmen

t an

d its

cos

t to

atta

ck th

e ch

ips.

–O

ur a

ttem

pt o

f suc

h a

clas

sific

atio

n is

not

yet

mat

ured

an

d sh

ould

be

impr

oved

bas

ed o

n m

uch

disc

ussi

on.

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

31

Def

initi

on o

f Ski

ll R

anks

LSI a

rchi

tect

ure

Logi

c an

d an

alog

circ

uit

oper

atio

n

Mem

ory

circ

uit o

pera

tion

Mem

ory

cell

stru

ctur

e

Proc

ess

tech

nolo

gy

Mea

sure

men

t tec

hnol

ogy

Expe

rienc

e (m

inim

um y

ears

)

Skill

Ran

kSk

ill c

ompo

nent

Failu

re a

naly

sis

tech

nolo

gy

Expe

rtcl

ass

clas

scl

ass

clas

scl

ass

1st

2nd

3rd

4th

5th 3

58

10

13

15

clas

s

α: e

xper

t, β

: pro

ficie

nt, γ

: suf

ficie

nt

α α α α α α

α

α

α ααα α

α α α α

ββ β β

β β β ββ

β β β

γ

γγ

γ

γ γ γ γ

α> β

> γ

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

32

Tent

ativ

e C

andi

date

of F

ive

Secu

rity

Leve

ls o

f LSI

Chi

ps

Bas

ed o

n Fa

ilure

Ana

lysi

s Eq

uipm

ent a

nd S

kills

of A

naly

st

“Bey

ond”

mea

ns th

e le

vel n

on-a

ttack

able

by

toda

y’s

FA

tech

nolo

gies

.

Skill

rank

Nec

essa

ry F

A e

quip

men

tSe

curit

yle

vel

tota

l cos

t[M

$]

A (

+2)

C (

0 )

D (

-1)

E (-

2)

B (

+1)

Expe

rt

1st

2nd

3rd

4th,

5th

6.5+

3.5

10+6

2.5+

4

Nan

o-pr

ober

LVP

TRE

Cle

an b

ench

EOS

LEM

/CC

D

LEM

/MC

T

EBT

SEM

OB

IC

Hot

-pla

te

Wire

-bon

derFI

BLa

ppin

g M

achi

ne

Elec

tric

al m

easu

rem

ent

syst

em

Rev

erse

eng

inee

ring

softw

are

0.5+

2

0.5

Equi

pmen

t

Bey

ond

Unk

now

n (to

day)

??

Cur

rent

ave

rage

failu

re

anal

ysis

cap

abili

ty m

ay

corr

espo

nd to

“le

vel C

”.

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

33

6. S

umm

ary

–W

e ha

ve d

escr

ibed

rela

tions

hips

bet

wee

n LS

I tam

per

resi

stan

ce a

nd F

A te

chni

ques

.

–Ta

mpe

r res

ista

nce

of L

SI c

hips

aga

inst

phy

sica

lat

tack

s sh

ould

be

eval

uate

d or

test

ed o

n th

e ba

sis

of

late

st te

chno

logi

es.

–To

faci

litat

e an

und

erst

andi

ng o

f the

leve

l of t

oday

’s

failu

re a

naly

sis

tech

niqu

es w

e ha

ve d

emon

stra

ted

an

inac

tivat

ion

of s

enso

r circ

uits

whe

re e

mis

sion

m

icro

scop

y pl

ays

an im

porta

nt ro

ll.

–Th

en w

e ha

ve g

iven

a te

ntat

ive

way

of c

lass

ifyin

g th

e se

curit

y le

vels

for L

SI c

hips

with

resp

ect t

o th

e re

quire

d eq

uipm

ent a

nd th

e re

quire

d sk

ills o

f atta

cker

s.

Mat

sum

oto-

Nak

ajim

a-Sh

ibat

a-Ya

mag

ishi

, Phy

sica

l Sec

urity

Tes

ting

Wor

ksho

p, S

ept.

2005

34

Ref

eren

ces

[1] S

. Nak

ajim

a an

d T.

Tak

eda,

"Fa

ilure

ana

lysi

s in

hal

fmic

ron

and

quar

term

icro

ner

as, "

Pr

ocee

ding

of t

he 6

th E

urop

ean

Sym

posi

um o

n R

elia

bilit

y of

Ele

ctro

n D

evic

es,

Failu

re P

hysi

cs a

nd A

naly

sis

(ESR

EF 9

5), p

p. 2

73-2

80, 1

995.

[2] S

. Nak

ajim

a, T

. Uek

i, Y.

Shio

noya

, K.M

afun

e, N

.Kuj

i, S.

Nak

amur

a, Y

.Kom

ine

and

T. T

aked

a, "

Cur

rent

sta

tus

of fa

ilure

ana

lysi

s fo

rULS

Is, "

Mic

roel

ectr

onic

s R

elia

bilit

y,Vo

l. 38

, pp.

136

9-13

77, 1

998.

[3] S

. Nak

ajim

a, S

. Nak

amur

a, K

.Kuj

i, T.

Uek

i, T.

Ajio

kaan

d T.

Sak

ai, "

Con

stru

ctio

n of

a

cost

-effe

ctiv

e fa

ilure

ana

lysi

s se

rvic

e ne

twor

k ---

Mic

roel

ectr

onic

failu

re

anal

ysis

ser

vice

in J

apan

," M

icro

elec

tron

ics

Rel

iabi

lity,

Vol

. 42,

pp.

511-

521,

200

2.

[4] Y

. Mits

ui, e

t al,

"Phy

sica

l and

che

mic

al a

naly

tical

inst

rum

ent f

or fa

ilure

ana

lyse

sin

G-B

it de

vice

s, "

Tech

nica

l Dig

est o

f Int

erna

tiona

l Ele

ctro

n D

evic

es M

eetin

g,

pp.3

29-3

32, 1

998.

[5] C

. Has

him

oto,

T. T

akiz

awa,

S. N

akaj

ima,

M. S

hina

gaw

a an

d T.

Nag

atsu

ma,

"O

bser

vatio

n of

the

inte

rnal

wav

efor

ms

in h

igh-

spee

d hi

gh-d

ensi

tyLS

Isus

ing

an E

OS

prob

er, "

Mic

roel

ectr

onic

s R

elia

bilit

y, V

ol. 4

1, p

p. 1

203-

1209

, 200

1.[6

] M. K

. Mc

Man

us, J

. A.K

ash,

S. E

. Ste

en, S

.Pol

onsk

y, J

. C. T

sang

, D. R

.Kne

bela

nd

W.H

uott,

"PIC

A: B

acks

ide

failu

re a

naly

sis

of C

MO

S ci

rcui

ts u

sing

Pic

osec

ond

Imag

ing

Circ

uit A

naly

sis,

" M

icro

elec

tron

ics

Rel

iabi

lity,

Vol

. 40,

pp.

135

3-13

58, 2

000.

[7

] A.T

osi,

F.St

ella

ri, F

.Zap

paan

d S.

Cov

a, "

Bac

ksid

e Fl

ip-C

hip

test

ing

by m

eans

of

high

-ban

dwid

th lu

min

esce

nce

dete

ctio

n,"

Mic

roel

ectr

onic

s R

elia

bilit

y,Vo

l. 43

, pp

. 166

9-16

74, 2

003.