Transcript

Defense and Aerospace Screening Flows

Joe [email protected]

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A Little History

The following slides show what military and aerospace flows were available from Xilinx for many yearsFeedback from the space industry and recent military satilitte failures indicated the need for more intensive screening for some applicationsOur currently proposed full-V flow will follow this brief history

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Manufacturing Flows: Serving the needs from “Space to Base”

R, V, H, SMD

C, I, N, M, SMD

C, I, N, M, SMD

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Rad Tolerant

Most Select

M&SMD Grade

More Select

N-Grade

Select Products

C&I-Grade

All Xilinx Products

Controlled environments Plastic packages

Supporting the Aerospace and Defense Market

Space environmentRadiation hardened

Harsh environments requiring hermeticity Ceramic packages

Wider temperature range required Plastic packages

(Mil Temp)

(Mil Temp, SMDs)

PLUS

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Manufacturing Flows

“C and I” grade- Commercial or Industrial Temp, Plastic“M” grade

- Military Temp, Ceramic“N” grade

- Military Temp, Plastic“R” grade (for space)

- Radiation tolerant, Military Temp, Plastic, Extended Flow“V” grade (for space)

- Radiation tolerant, Military Temp, Ceramic, Similar to Class-V“H” grade (for space)

- Radiation Tolerant, Military Temp, non-hermetic ceramicStandard Microcircuit Drawing (SMD)

- Military and Radiation Tolerant, DSCC part number

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Extended Flows for Space

Extended burn-in (up to 240 hours)

XRAY

DPA

PIND for hermetic packages

CSAM for plastic packages

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Product Grade ComparisonsFor Critical Supply Chain Issues

C I N M SMD V R/H

Reliability Data Y Y Y Y Y Y YExtended Product Life Cycle N N Y Y Y Y YPCN/PDN Notification Y Y Y Y Y Y YCertificate of Conformance Y Y Y Y Y Y YConfiguration Control N N Y Y Y Y YExtended Temperature N N Y Y Y Y YProcess Baseline N N Y Y Y Y YMask Set Control N N Y Y Y Y Y

Product Grade

Full documentation and controlled extended product life cycle

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Product Grade Summary

Hermetic PlasticMask

Control

Grade Temp Process

C 85°C (T j) Comm X X

I 100°C (T j) Comm X X

IQ 125oC (T j) Automotive N/A X X

N 125°C (T j) QML N/A X X

M 125°C (T c) QML X N/A X

B 125°C (T c) QML X N/A X

V (space) 125°C (T c) QML X N/A X

H (space) 125°C (T c) QML N/A N/A X

R (space) 125°C (T j) QML N/A X X

Hermetic PlasticMask

Control

Grade Temp Process

C 85°C (T j) Comm X X

I 100°C (T j) Comm X X

IQ 125oC (T j) Automotive N/A X X

N 125°C (T j) QML N/A X X

M 125°C (T c) QML X N/A X

B 125°C (T c) QML X N/A X

V (space) 125°C (T c) QML X N/A X

H (space) 125°C (T c) QML N/A N/A X

R (space) 125°C (T j) QML N/A X X

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Where we are going

Many changes are coming from what I will call “acquisition reform II”.Xilinx response to customer needs was to work with industry and customer experts and with DSCC to define screening flows that will satisfy future customer needs in the space and military markets.BUT, an issue arose in that technology developed packages to which traditional full class-S/V flows did not seem to apply.The solution was to work with our partners to develop screening flows for these devices which would demonstrate and the ensure equivalent reliability as standard military screening flows provided.

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CG560 - Ceramic Column Array

Package Attributes

Cavity Down, 42.5mm x 42.5 mm

Ceramic substrate

Interconnect: 90/10 hard solder column, 0.2mm tall attached with 63/37 soft solder.

Column Pitch = 1.27 mm

Thermal Resistance: Theta JA = 14.3 C/Watt, Theta JC = 1.6 C/Watt

Hermetic Product

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CG717-Ceramic Column Array

In Process Configuration - LGA Post Group D & Burn-in Configuration

Package Attributes

Cavity Up, 35mm x 35mm, 1.27 mm pitch, Ceramic Substrate

Interconnect: 90/10 hard solder column 0.2mm tall attached with 63/37 soft solder

Pin Compatible with the Virtex-II BG728

Thermal Resistance: Theta JA = 12 deg C/Watt

Hermetically sealed with Au-Sn Lid

60 microns Bonding Pad Pitch

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CG717 Package X-Section

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CG717 Package Qualification Data

Results/ Due Date

Time FrameResults/

Due DateTime Frame

Results/ Due Date

Time Frame

85/85 (Unbiased) 15 0/15 168 hrs 0/15 600 hrs 0/15 1000 hrs

TC (Condition C) 15 0/15 200 cycles 0/15 500 cycles 0/15 1000 cycles

Bake 15 0/15 168 hrs 0/15 500 hrs 0/15 1000 hrs

Physical Dimension D1 3 0/3

Thermal Shock+Temp Cycle+Moisture Resistance D3

15 0/15

Mechanical Sock+Vibration+ Constant Acceleration D4

15 0/15

Salt Atmosphere D5 15 0/15

Internal Water vapor Content D6 3 0/3

Xilinx CG717 Package Qualification SummaryCum Hours or Cycle Readout Date/Data

Reliability TestSample

Size

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CF1144 - Ceramic Flip Chip

Package Attributes

35mm x 35mm, 1.0 mm pitch, Multi Layer Ceramic Substrate

90Pb/10Sn flip chip solder

90Pb/10Sn hard solder column

Thermal Resistance: Theta JA =10 deg C/Watt, Theta JC = 0.5 deg C/Watt

MSL1 (Non-hermetic) –

IBM technology with 30 years experience (Column)

Lid strength = 1200psi

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CF1144 Outgassing Data CF1144 Outgassing Data

Epoxy ComponentsEpoxy ComponentsUnderfill (0.56% of package weight)

TML%: 0.13

CVCM %: 0.00

Lid attach material (0.31% of package weight) TML%: 0.28

CVCM %: 0.16

Total package weight: 19.3g

Tested by NASA.

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CF1144 Package Qualification Data

Results/ Due Date

Time FrameResults/ Due Date

Time FrameResults/ Due Date

Time FrameResults/ Due Date

Time Frame

High Temperature Storage 22 0/22 168 hrs 0/22 576 hrs 0/22 1013 hrs

TC (Condition B) 22 0/22 300 cycles 0/22 500 cycles 0/22 814 cycles 0/22 1000 cycles

85/85 19 0/19 168 hrs 0/19 600 hrs 0/19 1009 hrs

Physical Dimension D1 3 0/3

Thermal Shock+Temp Cycle+Moisture Resistance D3

15 0/15

Mechanical Sock+Vibration+ Constant Acceleration D4

15 0/15

Lid Torque D8 3 0/3

Reliability TestSample

Size

Xilinx CF1144 Package Qualification SummaryCum Hours or Cycles and Results

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Xilinx/Aerospace full class V flowMil-STD Test Method and Condition

Ceramic, Hermetic Packages Ceramic, Flip-Chip Packages

1Mask Set Revision

ControlMIL-PRF-38535 MIL-PRF-38535

2 Traceability MIL-STD-38535 Appendix B MIL-STD-38535 Appendix B

3Wafer Lot Acceptance

Testing

MIL-STD-883 TM 2018 (App A), TM 5004

(App A), TM 5007

MIL-STD-883 TM 2018 (App A), TM 5004

(App A), TM 5007

4Non-Destructive Bond

PullMIL-STD-883

TM 2023 N/A

4a Package/Die Integrity N/A

In accordance with IBM Specifications:

29L5772 ES70P7830 ES20P3693

J78236 ES06N9026

and Xilinx Specifications:

MAC0123 MAC0117 MAC0120 MAC0118 MAC0108

For Flip-Chip packages, due to package construction, the following tests have replaced non-destructive bond pull:1. Internal visual prior to die attach.2. Die pull, post die attach and prior to underfill. 3. Post underfill CSAM and visual.4. Post lid attach lid shear.

Step # Process Flow Step/Test Comments

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5Internal Visual

InspectionMIL-STD-883

TM 2010A

In accordance with IBM Specifications:

29L5772 ES70P7830 ES20P3693

J78236 ES06N9026

and Xilinx Specification MAC0123

For Flip-Chip packages, a procedure was developed that complies with the allowed SEM and internal visual alternate procedures to address wafer fabrication related defects.TM2018 Appendix A is for the SEM alternate and TM5004 Appendix A is for the internal visual alternate.

6 Temperature Cycling

MIL-STD-883 TM 1010

Condition C (10 cycles)

MIL-STD-883 TM 1010

Condition B (20 cycles)

For Flip-Chip packages Temperature Cycling, Condition B, 20 cycles will be used. Using the Coffin Manson Inverse Power Law with a Beta of 3 shows 20 cycles is acceptable.Note: Condition C will be performed for Group D testing.

7 Constant AccelerationMIL-STD-883

TM 2001 Condition D

N/A

7a Lid Shear N/A

MIL-STD-883 TM 2001 Condition C

and in accordance with IBM

Specification: 2113144

and Xilinx Specification MAC0118

For Flip-Chip packages, due to package construction, an in-line non-destructive lid shear test will be performed on 3 devices per production lot. The minimum shear force shall be 180 lbs. This minimum test force will satisfy TM2001 Condition C.The estimated force on the lid (mass = 4.74 grams) for TM2001 Conditions A thru E is as follows:A: 5000gs: 52 lbsB: 10000gs: 104 lbsC: 15000gs: 156 lbsD: 20000gs: 208 lbsE: 30000gs: 312 lbs

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8 Visual Inspection MIL-STD-883

TM 2009In accordance with IBM

Specification PN 67F4333

9Particle Impact Noise

Detection (PIND)MIL-STD-883

TM 2020N/A

For Flip-Chip packages, due to package construction, this test is not applicable

10 Serialization

11Pre Burn-in Electrical

Test @ 25°C

In accordance with applicable Xilinx Device Test

Specification

In accordance with applicable Xilinx Device Test

Specification

Read & Record all parameters as specified in the applicable Xilinx Test Specification

12 Dynamic Burn-in

MIL-STD-883 TM 1015 Condition D

MIL-STD-883 TM 1015 Condition D

240 hours of dynamic burn-in will be performed at TJ=125°C.

13Post Dynamic Burn-in

Electrical Test @25°C

In accordance with applicable Xilinx Device Test

Specification

In accordance with applicable Xilinx Device Test

Specification

Read & Record all parameters as specified in the applicable Xilinx Test Specification

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14Delta Calculation

(Post Dynamic Burn-in)

15Percent Defective Allowable (PDA)

5% maximum for all tests

16 Static Burn-inMIL-STD-883

TM 1015 Condition CMIL-STD-883

TM 1015 Condition C

144 hours of static burn-in will be performed at TJ=125°C

17Post Static

Burn-in Electrical Testing @25°C

In accordance with applicable Xilinx Device Test

Specification

In accordance with applicable Xilinx Device Test

Specification

Read & Record all parameters as specified in the applicable Xilinx Test Specification

18Delta Calculation

(Post Static Burn-in)

19Final Percent Defective

Allowable (PDA)

Final PDA of 5% includes both Dynamic and Static burn-ins.

20 Final Electrical Test

MIL-STD-883 TM 5005

and in accordance with applicable

Xilinx Device Test Specification

MIL-STD-883 TM 5005

and in accordance with applicable

Xilinx Device Test Specification

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21 Fine & Gross Leak TestMIL-STD-883

TM 1014N/A

For Flip-Chip packages, due to package construction, this test is not applicable

22Radiography

(X-Ray)MIL-STD-883

TM 2012N/A

For Flip-Chip packages, due to package construction, this test is not applicable

23External Visual

InspectionMIL-STD-883

TM 2009MIL-STD-883

TM 2009

For the Flip-Chip packages, the external visual will be performed at the LGA level. There will also be an additional visual inspection after column attach.

24QML V Group A

TestingMIL-STD-883 MIL-STD-883

The Group A tests will be specified in the DSCC SMD or Xilinx document.

25Package Inspection after

Column AttachN/A

In accordance with IBM Specification 67F4333

and Xilinx Specification MAC0121

For ceramic, hermetic packages, due to package construction, this test is not applicable

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26QML V Group B

TestingMIL-STD-883 MIL-STD-883

For the Flip-Chip packages the following Group B tests will be performed:1. Group B, subgroup 12.The in-line tests specified in step #43. DPA

26-B1Sub 1: Resistance to

SolventsMIL-STD-883

TM 2015MIL-STD-883

TM 2015

26-B2aSub 2a:

Bond StrengthMIL-STD-883

TM 2011N/A

For Flip-Chip packages, due to package construction, this test is not applicable. For the Flip-Chip packages, the in-line tests specified in Step #4 and the DPA will be performed.

26-B2b

Sub 2b: Die Shear

or Stud Pull

MIL-STD-883 TM 2019

or TM2027

N/A

For Flip-Chip packages, due to package construction, this test is not applicable. For the Flip-Chip packages, the in-line tests specified in Step #4 and the DPA will be performed.

26-B3 Sub 3: SolderabilityMIL-STD-883

TM 2003

N/A In accordance with Xilinx

Specification MAC0122

For Flip-Chip packages, due to package construction, this test is not applicable. For the Flip-Chip packages, will perform a quarterly monitor.

Note: Removal from the sealed dry pack will initiate oxidation. The solderability is preserved for at least 2 years in a dry pack. Program users should consider storage in dry nitrogen.

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26-DPA DPAMIL-STD-883

TM 1580MIL-STD-883

TM 1580

27QML V Group C

Testing

MIL-STD-883 TM 1005

Condition D

MIL-STD-883 TM 1005

Condition D

1000 hours Dynamic Burn-in @ TJ=125°C will be performed on each wafer lot. The sample quantity # (accept #) = 22 (0). and parameters will be read and recorded before and after the life test.

28QML V Group D

TestingMIL-STD-883 MIL-STD-883

28-D1Sub 1:

Physical DimensionsMIL-STD-883

TM 2021MIL-STD-883

TM 2021

28-D2aSub 2a:

Lead IntegrityMIL-STD-883

TM 2004

In accordance with IBM Specification 10G9252

and JESD22

and Xilinx Specification MAC0119

Will perform a column shear test (3 devices, 15 columns per device, every 26 weeks per the Group D package QCI schedule).

28-D2bSub 2b:

Seal (Fine and Gross Leak)

MIL-STD-883 TM 1014

N/A

For Flip-Chip packages, due to package construction, this test is not applicable

28-D3aSub 3a:

Thermal ShockMIL-STD-883

TM 1011 Condition BMIL-STD-883

TM 1011 Condition B

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28-D3bSub 3b:

Temp CycleMIL-STD-883

TM 1010 Condition CMIL-STD-883

TM 1010 Condition C

The hermetic package shall receive 100 cycles and the non-hermetic shall receive 500 cycles.

28-D3cSub 3c:

Moisture ResistanceMIL-STD-883

TM 1004MIL-STD-883

TM 1004

28-D3dSub 3d:

Seal (Fine and GrossLeak)

MIL-STD-883 TM 1014

N/A

For Flip-Chip packages, due to package construction, this test is not applicable

28-D3eSub 3e: Visual

MIL-STD-883 TM 1004

and TM 1010

MIL-STD-883 TM 1004

and TM 1010

28-D3fSub 3f:

End-Point Electricals

In accordance with applicable Xilinx Device Test

Specification

In accordance with applicable Xilinx Device Test

Specification

28-D4aSub 4a: Mechanical

ShockMIL-STD-883

TM 2002 Condition BMIL-STD-883

TM 2002 Condition BThis test will be performed as a Group D3 test

28-D4bSub 4b:

VibrationMIL-STD-883

TM 2007 Condition AMIL-STD-883

TM 2007 Condition AThis test will be performed as a Group D3 test

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28-D4cSub 4c:

Constant AccelerationMIL-STD-883

TM 2001 Condition E, Y1 N/A

28-D4c1 Lid Shear N/A

MIL-STD-883 TM 2001 Condition C

and in accordance with IBM

Specification: 2113144

and Xilinx Specification MAC0118

For Flip-Chip packages, due to package construction, an in-line non-destructive lid shear test will be performed on 3 devices per production lot. The minimum shear force shall be 180 lbs. This minimum test force will satisfy TM2001 Condition C.The estimated force on the lid (mass = 4.74 grams) for TM2001 Conditions A thru E is as follows:A: 5000gs: 52 lbsB: 10000gs: 104 lbsC: 15000gs: 156 lbsD: 20000gs: 208 lbsE: 30000gs: 312 lbs

28-D4dSub 4d: Seal (Fine and

Gross)(TM1014, 15/0)

MIL-STD-883 TM 1014

N/A

For Flip-Chip packages, due to package construction, this test is not applicable

28-D4eSub 4e: Visual

MIL-STD-883 TM 2009

MIL-STD-883 TM 2009

28-D4fSub 4f:

End-Point Electricals

In accordance with applicable Xilinx Device Test

Specification

In accordance with applicable Xilinx Device Test

Specification

28-D5aSub 5a:

Salt Atmosphere

MIL-STD-883 TM 2009 Condition

AN/A

For Flip-Chip packages, due to package construction, this test is not applicable

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28-D5bSub 5b:

Seal (Fine and Gross Leak)

MIL-STD-883 TM 1014

N/A

For Flip-Chip packages, due to package construction, this test is not applicable

28-D5cSub 5c: Visual

MIL-STD-883 TM 1009

N/A

For Flip-Chip packages, due to package construction, this test is not applicable

28-D6Sub 6:

Internal Water VaporMIL-STD-883

TM 1018N/A

For Flip-Chip packages, due to package construction, this test is not applicable

28-D7Sub 7:

Adhesion of Lead Finish

MIL-STD-883 TM 2025

N/A

For Flip-Chip packages, due to package construction, this test is not applicable

28-D8Sub 8:

Lid TorqueN/A

MIL-STD-883 TM 2001 Condition C

and in accordance with IBM

Specification: 2113144

and Xilinx Specification MAC0118

For the CF1144, Xilinx does perform a head spreader shear testing as a in-line group B test and a Group D, Subgroup 4 test.

28-D9 HAST with Bias N/A JESD22-A110

29Group E Testing for

RHAMIL-STD-883 TM1019 MIL-STD-883 TM1019

30 TCI Data Summary