VPort TM RevC - Tistory

Tool Picture

Rev. C Date: 6/12/2007 Printed on Cleanroom Paper P/N: 2000-1252-01

Copyright © 2007 Asyst Technologies, Incorporated All rights reserved.

VersaPort 2200 Technical Manual

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Disclaimers
This manual may not be reproduced, either wholly or in part, for any reason whatsoever, without prior written permission from Asyst Technologies, Inc. (“Asyst”). Material contained in this manual is provided for informational purposes and is subject to change without notice.

If this manual is marked “Preliminary” or “Draft,” then Asyst has not yet released a final version of the manual and the manual is likely to be incomplete and will be revised. Contact Asyst at the address below to obtain a final copy of the manual.

Manual InformationPCN: 08479Part Number: 2000-1252-01Date: 6/12/2007Release: Rev. CPrinting Description: Printed on Cleanroom Paper.

Asyst Technologies, Inc.46897 Bayside ParkwayFremont, California 94538Telephone: (510) 661-5000FAX: (510) 661-5166Technical Support: 1-800-342-SMIF

TrademarksAsyst, the Asyst logo(s), and MANUAFACTURING CONNECTIVITY are registered trademarks ® of Asyst Technologies, Inc.

VERSAPORT, INX, LINK MANAGER, SMART-TAG, SMART-TRAVELER, SMART-COMM, are trademarksTM of Asyst Technologies, Inc.

All other product and company names mentioned herein may be trademarks and/or service marks of their respective owners.

Equipment ModificationAny change, alteration, or modification to this equipment, as well as use of this equipment in a manner inconsistent with its intended use will void this equipment’s warranty and may render this equipment unsafe for use or unfit for its intended purposes.

Training and LanguagesUser training for equipment operation and maintenance is conducted in English. Translators are available on an as needed basis. English versions of the manuals and other technical materials are provided and reviewed during the training. Please contact the Asyst Training department or http://www.asyst.com for the training schedule and signup requirements.

WarrantyFor warranty information, see Asyst’s Standard Terms and Conditions.

Released Rev. C 2000-1252-01 Page iii

VersaPort 2200 Technical Manual Reader Comments a
Reader Comments
We welcome your comments of this manual. Your comments and suggestions help us improve our publications.

Please copy and return to:

Asyst Technologies, Inc.Technical Publications Manager46897 Bayside Parkway.Fremont CA 94538

Or fax: Attention—Tech Pubs Manager at 1-510-661-5157

Or E-mail: [email protected]

Name:

Company:

Contact Phone # (in case we have questions):

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Comments: (The more specific the comments, the more useful they are to us.)

Thank you for helping us to make the manuals better and to maintain accuracy.

Page iv 2000-1252-01 Released Rev. C

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Revision History
Date Author Version Revision Information

6/12/2007 R. Tonomura/ S. Sondergaard/ K. Kellerman

C Release ECN 08479Updated content with engineering changes, and reviewer comments, and similar material.Added procedure for replacing Printed Circuit BoardAdded notes on removing VersaPort from Host Tool.

Released Rev. C 2000-1252-01 Page v

VersaPort 2200 Technical Manual a

Page vi 2000-1252-01 Released Rev. C

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Acronyms
BOM Bill of Materials

CAP Corrective Action Procedure

CSP Corrective Service Procedure

ECN Engineering Change Notice

IR Infrared

ISIM Indexer Simulation Software

MCBF Mean Cycles Between Failures

MRP Multiple Reticle Pod

MSC Micro Station Controller

PIO Parallel Input/Output

P/N (or PN) Part Number

PSP Preventive Service Procedure

RFID Radio Frequency Identification

SAM Smart Arm Master

Released Rev. C 2000-1252-01 Page vii


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Page viii 2000-1252-01 Released Rev. C

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Table of Contents
Disclaimers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iiiManual Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iiiTrademarks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iiiEquipment Modification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iiiTraining and Languages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iiiWarranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iiiReader Comments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iv

Revision History . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .v

Acronyms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vii

Table Of Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ix

List Of Figures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . xv

List Of Tables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . xvii

Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1

Core Products . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1Options. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1

Audience . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1About this Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3

Chapter 1: Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5General Safety Identifiers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5Responsibility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7ESD/EMI Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7EMO & Electrical Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

Equipment Lockout/Tagout Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8Laser Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

User . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9Service Technician . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

Safety Interlocks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9Laser Interlock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

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Seismic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10Pinch Points. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

Labeling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12Description of Labels used on the VersaPort . . . . . . . . . . . . . . . . . . . . . . . . 12Location of Labels used on VersaPort Models . . . . . . . . . . . . . . . . . . . . . . 15

Chapter 2: Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17Operating Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20

Staging Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20Self Test. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20

VersaPort Components. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21Mechanical. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

Port Door . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21Electronics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

Electrical Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21CPU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22Program Memory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22SRAM. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22Quad-Serial I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22Interlocks, Parallel, I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23Digital I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23Interrupt Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23Laser Detector System. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24Excessive Wafer Protrusion Sensor, Vertical View . . . . . . . . . . . . . . . . . 26

Motor Controls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26Port Plate Elevator and Cassette Shuttle Motors . . . . . . . . . . . . . . . . . . . 27Pod Latch and Wafer Seater Motors . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27Pod-Door Lock/Unlock Motor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27Air Exhaust Motor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28

Status Indicators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28Power Indicator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28Ready Indicator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28Pod-in-Place Indicator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28

Communications Interface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28Serial Communications Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28Parallel Communications Interface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

NOVRAM. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

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History . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Specifications and Outline Drawing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33

Chapter 3: Diagnostics and Troubleshooting . . . . . . . . . . . . . . . . . . . 43Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43Using Indexer Simulator (ISIM) Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43Problem Identification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45Self-Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47Error Types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48

Alarm Report Send . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48Error Messages. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50Jumper Post Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52

Chapter 4: Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57Safety Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57

General Safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57Electrical Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58Mechanical Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58Chemical Safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58

Tool Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58Notes on Removing and Replacing VersaPort . . . . . . . . . . . . . . . . . . . . . . . . . . 59Preventive Service Procedures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60PSP1 – Verify Laser Sensor DAC Values. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61

Verify DAC Values and Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61Calibration/Alignment Procedures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63CAP1 – Align Laser Detector System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64

Pre-Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64Remove Minienvironment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65Adjust Laser Beam Orientation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65Adjust Wafer Sensor Beam . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67Adjust Slot Sensor Beam . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69Adjust Corner Mirror . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70Adjust Wafer Protrusion Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71Adjust Mirrors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72Adjust Protrusion Mirror . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73Verify DAC Values and Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73Post-Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75

CAP2 – Align Excessive Wafer Protrusion Sensor, Vertical View . . . . . . . . . . . 76

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Pre-Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76Remove minienvironment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78Post-Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79

CAP3 – Align Wafer Seater Mechanism . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81Pre-Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81Remove minienvironment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82Post-Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 86

CAP4 – Calibrate Shuttle Homing Offset . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87Pre-Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87Adjust Cassette Shuttle Home Position . . . . . . . . . . . . . . . . . . . . . . . . . . 89Post-Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91

CAP5 – Align Pod Hold Down Latches . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92Pre-Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92Post-Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93

CAP6 – Align Pod-In-Place Switch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94Corrective Service Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 98CSP1 – Pod Latch Motor Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 99

Pre-Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 99Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 99Post-Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101

CSP2 – Pod Door Lock Motor Replacement. . . . . . . . . . . . . . . . . . . . . . . . . . . 102Pre-Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102Remove minienvironment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103Post-Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 106

CSP3 – Laser Diode Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 107Pre-Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 107Post-Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 108

CSP4 – Cassette Shuttle Motor Replacement . . . . . . . . . . . . . . . . . . . . . . . . . 109Remove minienvironment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 109Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 110Post-Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 111

CSP5 – Vertical Drive Motor Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . 113Pre-Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 113Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 113

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Post-Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 115
CSP6 – Replace Printed Circuit Board . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 116

Appendix A: ISIM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 123Indexer Simulator (ISIM) Menu List. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 123

Appendix B: Communications Software . . . . . . . . . . . . . . . . . . . . . . 137Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 137

Software Configuration of the VersaPort . . . . . . . . . . . . . . . . . . . . . . . . . . . 137SECS Communication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 138

SECS Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 138Serial Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 138Communications Protocol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 138

SECS Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 140Stream and Function Codes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 142

Data Dictionary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 150ECID Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 161

External Host (ECID 4). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 161PIO Interlock (ECID 6) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 162 MSC INTERLOCK (ECID 13) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 162SORT MODE (ECID 16). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 163MIN WAFER POS (ECID 32) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 163STAGE POS (ECID 33) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 163SLOT COUNT (ECID 34) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 163SLOT PITCH (ECID 35) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 163SINGLE PORT (ECID 37) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 163HOST OPTION (ECID 38) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 164Cassette Size Option (ECID 39). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 165DEVICE I.D. (ECID 40) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 165BAUD RATE (ECID 41) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 165SECS Communication Timeout T1 (ECID 50) . . . . . . . . . . . . . . . . . . . . 165SECS Communication Timeout T2 (ECID 51) . . . . . . . . . . . . . . . . . . . . 165SECS Communication Timeout T3 (ECID 52) . . . . . . . . . . . . . . . . . . . . 166Cassette Present Confirmation (ECID 63) . . . . . . . . . . . . . . . . . . . . . . . 166MRP Type (ECID 166) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 166

Microstation Controller (MSC) Communications Specification . . . . . . . . . . 167Tracking Lots through the Tag Reader. . . . . . . . . . . . . . . . . . . . . . . . . . 167Controlling Lots through the MSC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 167

Example of Data Exchange for a Simple "Are You There" Request . . . . . . 168Sample SECS Messages between Host Tool and VPort . . . . . . . . . . . . 169

Released Rev. C 2000-1252-01 Page xiii


ASCII Serial Text Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 180ASCII Port Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 180

Communication port: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 180 Communication parameters: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 180 Syntax: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 181

Message Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 182Quick Reference. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 182ASCII Details . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 183

Parallel Communication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 197Summary of Control Signals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 197

Control Signal Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 197Event Flow . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 200

Appendix C: Material Safety Data Sheets . . . . . . . . . . . . . . . . . . . . . 203Loctite 222 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 203Loctite 242 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 203Loctite 290 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 204Loctite 680 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 204Krytox GPL-20X and 50X Fluorinated Grease. . . . . . . . . . . . . . . . . . . . . . . 205

Appendix D: Wiring Diagrams and Drawings . . . . . . . . . . . . . . . . . . 207

Index. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 269

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List of Figures
Figure 1 VersaPort Label Placement (BOLTS model, user side) . . . . . . . . . . . . 15Figure 2 VersaPort Label Placement (BOLTS model, process tool side) . . . . . . 15Figure 3 VersaPort Label Placement (Standard model) . . . . . . . . . . . . . . . . . . . 16Figure 4 VersaPort components (with BOLTS interface) . . . . . . . . . . . . . . . . . . 18Figure 5 VersaPort components (standard) . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19Figure 6 VersaPort Connector Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23Figure 7 Laser Detector System. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25Figure 8 Laser Detector Example (viewed through port plate). . . . . . . . . . . . . . 26Figure 9 Status Indicators. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28Figure 10 Outline Drawing, Side View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34Figure 11 Outline Drawing, Rear View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35Figure 12 Outline Drawing, Front View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36Figure 13 Outline Drawing, Overhead View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37Figure 14 Outline Drawing, I/O Panel Detail . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38Figure 15 Recommended Mounting Method . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39Figure 16 BOLTS Interface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40Figure 17 VersaPort Mounted on BOLTS Interface in Free Standing Position . . . 41Figure 18 VersaPort Terms. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42Figure 19 Laser Detector System (bottom view) . . . . . . . . . . . . . . . . . . . . . . . . . 66Figure 20 Laser Beam Orientation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66Figure 21 Laser Bracket Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67Figure 22 Spring Tension . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68Figure 23 Mirror adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70Figure 24 Wafer Excessive Protrusion Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . 78Figure 25 Excessive Protrusion Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79Figure 26 Wafer Seater Mechanism, top view . . . . . . . . . . . . . . . . . . . . . . . . . . . 82Figure 27 Wafer Seater Mechanism, side view . . . . . . . . . . . . . . . . . . . . . . . . . . 83Figure 28 Wafer Seater Mechanism, bottom view . . . . . . . . . . . . . . . . . . . . . . . . 84Figure 29 200mm Port Door (Bottom View), Pod in Place Switch . . . . . . . . . . . . 95Figure 30 200mm Port Plate Pod-In-Place Switch (side and top views) . . . . . . . 96Figure 31 Gasket Inside Port Door Cover . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105Figure 32 Routing Cable Through Opening in Port Door Cover. . . . . . . . . . . . . 105Figure 33 VersaPort Base, Connector Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . .116Figure 34 VersaPort Bottom Plate, Screw Locations . . . . . . . . . . . . . . . . . . . . . .117Figure 35 VersaPort Circuit Board . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .119Figure 36 ISIM Main Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 123Figure 37 F1 – AUTO Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 124Figure 38 F2 – MANUAL Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 126Figure 39 F3 – MSC (SAM) Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 128Figure 40 F5 – STATUS Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 129Figure 41 F6 - CONFIG Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 131Figure 42 F7 - Tag8400 Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 134Figure 43 F9 - SMIF OPTION Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 135Figure 44 SECS Message Block . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 138Figure 45 OPEN Cycle Event Diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 200Figure 46 CLOSE Cycle Event Diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 201

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VersaPort 2200 Technical Manual List of Figures a

Page xvi 2000-1252-01 Released Rev. C

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List of Tables
Table 1 List of VersaPort Labels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12Table 2 Serial Port Pin Usage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29Table 3 Parallel Communications Interface - Asyst Compatible . . . . . . . . . . . . 30Table 4 VersaPort Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33Table 5 General Problems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45Table 6 Recoverable Errors (ALCD =6) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50Table 7 Non-Recoverable Errors (ALCD =5) . . . . . . . . . . . . . . . . . . . . . . . . . . 50Table 8 VersaPort Control Interface Circuit Board - Dual PCB Style . . . . . . . . 52Table 9 VersaPort Piggyback Circuit Board Jumper Post. . . . . . . . . . . . . . . . . 54Table 10 Versaport Control Interface Circuit Board - Single PCB Style . . . . . . . 54Table 11 Auto Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 124Table 12 Manual Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 126Table 13 MSC (SAM) Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 128Table 14 Status Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 129Table 15 Configuration Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 131Table 16 Tag8400 Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 134Table 17 SMIF Option Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 135Table 18 List of Control Characters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 138Table 19 SECS Message Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 140Table 20 Data Dictionary. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 150Table 21 ASCII Command Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 182Table 22 Event Messages. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 183Table 23 Equipment Constant Acknowledgments. . . . . . . . . . . . . . . . . . . . . . . 185Table 24 Equipment Constant Codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 187Table 25 Formatted Status Data (Form Code 0) . . . . . . . . . . . . . . . . . . . . . . . . 189Table 26 FSD Message List, Form Code = 0 . . . . . . . . . . . . . . . . . . . . . . . . . . 190Table 27 Host Command Replies . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 192Table 28 HCS Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 193Table 29 RCS Reply Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 195Table 30 RCS Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 196Table 31 Input Signals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 197Table 32 Output Signals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 197Table 33 VersaPort Wiring Diagrams and Drawings. . . . . . . . . . . . . . . . . . . . . 207

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Page xviii 2000-1252-01 Released Rev. C

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Preface
IntroductionThis manual describes the Asyst VersaPort 2200 product line, which includes the following:

Core Products• VersaPort Platform Mount Standard. This version of the VersaPort can be

configured for operation mounted to a Process Tool platform or mounted to a SEMI-standard BOLTS interface frame. The Standard VersaPort has a fixed port door.

• VersaPort Platform Mount Shuttle. This version can be configured for operation mounted to a Process Tool platform or mounted to a SEMI-standard BOLTS interface frame. The Shuttle VersaPort has a horizontal shuttle.

Options• BOLTS Interface. The SEMI-standard BOLTS interface frame can be used with

either of the core products above and, optionally, one of the options below.

• Reticle option

• RFID option

• MOCA

NOTE . . .

THE RETICLE, RFID, AND MOCA OPTIONS CAN BE USED WITH EITHER PLATFORM MOUNT—STANDARD OR SHUTTLE—OR WITH THE VERSAPORT MOUNTED TO A BOLTS INTERFACE. THE OPTIONS, HOWEVER, CANNOT BE USED SIMULTANEOUSLY WITH EACH OTHER (I.E., THE RETICLE OPTION CANNOT BE USED WITH THE MOCA, AND SO FORTH).

The VersaPort port door has provisions to support a copper interlock with the use of kit P/N 9700-5836-01, sold separately.

AudienceThis manual should be used by trained operators, service technicians and engineers to set up, operate, and perform service and maintenance on the Asyst VersaPort 2200.

Released Rev. C 2000-1252-01 Page 1

VersaPort 2200 Technical Manual About this Manual a
About this Manual
The VersaPort Technical Manual is organized as follows:

Chapter 1, Safety and Labeling, provides descriptions of all safety related information and labeling.

Chapter 2, Theory of Operation, describes the VersaPort operating sequence, its components, motor controls, and status indicators, and an overview of the communications interface. Also provided are detailed technical specifications and outline drawings.

Chapter 3, Diagnostics and Troubleshooting, provides diagnostic fault isolation for troubleshooting operation errors and malfunctions.

Chapter 4, Service, describes service requirements and procedures.

Appendix A, ISIM, provides information on the indexer simulator.

Appendix B, Communications Software, describes the VersaPort software configuration, SECS communication protocol and messages, and the ASCII serial text interface.

Appendix C, Material Safety Data Sheets, lists manufacturing data on materials used, such as Loctite.

Appendix D, Assembly Drawings, includes all wiring diagrams and drawings of the VersaPort.

Page 2 2000-1252-01 Released Rev. C


Conventionsa
Conventions
The following keyboard conventions and terminology are used.

Example Meaning

Bold User action on keyboard keys or other objects are bold.

Choose The word choose is used for menu choices. Submenus are separated by a >.For example: Choose File > Import > File...

Click Refers to mouse actions. For example: Click the hand icon.

Courier New Font Text displayed on the screen uses Courier New.DOS and windows path names are displayed in Courier New. For example: Use the C:\Folder\SubFolder\SubFolder2 to access this file.Source code or DOS commands use courier new.Hexidecimal streams and examples.

Double quotes Used when discussing or describing an action, functional word, or definition.

Folder Used instead of Directory, unless discussing DOS movement commands.

Italic Italics are used to show computer entry from the user’s keyboard.

Press Shows action by a user on a key or physical button. For example: Press PF1, then type the file name.

Select Used if the user is to pick from several choices. For example: Select the lot number from the list supplies.

Type Shows entry. For example: Type the Product Name and Model Number at the top of the page. Press Enter.


VersaPort 2200 Technical Manual Conventions a


a
Chapter 1: Safety
Before attempting any operation or service, it is essential to read and thoroughly understand the information presented in this section. This chapter provides important information regarding safety hazards that you may encounter while working with this system.

General Safety Identifiers

NOTE . . .

THE FOLLOWING ARE ONLY EXAMPLES; THEY DO NOT INDICATE A SPECIFIC HAZARD ASSOCIATED WITH THE VERSAPORT.

Danger flags, warnings and cautions are used throughout this manual to identify potential hazards to personnel and equipment. Examples are provided below.

MECHANICAL HAZARD

DANGER

DANGER FLAGS INDICATE AN IMMINENTLY HAZARDOUS SITUATION WHICH, IF NOT AVOIDED, WILL RESULT IN DEATH OR SERIOUS PERSONAL INJURY. DANGER FLAGS ARE LIMITED TO THE MOST EXTREME SITUATIONS. THE DANGER FLAGS SPECIFY THE TYPE OF HAZARD, THE STEPS TO TAKE TO AVOID INJURY, AND THE CONSEQUENCES FOR FAILING TO TAKE THOSE PRESCRIBED STEPS.

ELECTRICAL HAZARD

WARNING

WARNING FLAGS INDICATE A POTENTIALLY HAZARDOUS SITUATION WHICH, IF NOT AVOIDED, COULD RESULT IN DEATH OR SERIOUS INJURY. THE WARNING FLAGS SPECIFY THE TYPE OF HAZARD, THE STEPS TO TAKE TO AVOID INJURY, AND THE CONSEQUENCES FOR FAILING TO TAKE THOSE PRESCRIBED STEPS.


VersaPort 2200 Technical ManualChapter 1: SafetyGeneral Safety Identifiers a

GENERAL HAZARD

CAUTION

CAUTION FLAGS INDICATE A POTENTIALLY HAZARDOUS SITUATION WHICH, IF NOT AVOIDED, MAY RESULT IN MINOR OR MODERATE INJURY. CAUTION TAGS MAY ALSO BE USED TO ALERT AGAINST UNSAFE PRACTICES. THE CAUTION FLAGS SPECIFY THE TYPE OF HAZARD, THE STEPS TO TAKE TO AVOID INJURY, AND THE CONSEQUENCES FOR FAILING TO TAKE THOSE PRESCRIBED STEPS.

CAUTIONCAUTIONS ALERT PERSONNEL TO ACTIONS THAT MAY DAMAGE THE VERSAPORT OR THE MATERIAL BEING PROCESSED. THE CAUTION SPECIFIES THE TYPE OF DAMAGE, THE STEPS TO TAKE TO AVOID THE DAMAGE, AND THE RISK IN FAILING TO TAKE THOSE PRESCRIBED STEPS.

All warnings and cautions precede the step or operation in which the hazardous condition may be encountered. All personnel operating or performing service on Asyst equipment must fully understand warnings, cautions, and all general safety regulations associated with electromechanical equipment.

Personnel should become thoroughly familiar with all aspects of safety for individuals and equipment prior to operating or performing service on this equipment.


VersaPort 2200 Technical ManualChapter 1: Safety

Responsibilitya
Responsibility
It is the responsibility of the Customer to comply with all local, state/province, and federal/national ordinances, regulations, and laws applicable to the installation and operation of this equipment.

Asyst Technologies, Inc. assumes no liability, whatsoever, for any personal injuries or damages resulting from the operation or service of this equipment in any manner inconsistent or contrary to the methods supplied in Asyst Technologies, Inc. literature including, but not limited to, manuals, instructions, bulletins, communications, and recommendations.

For emergencies and for product safety related matters, contact:

Asyst Technologies, Inc.46897 Bayside Parkway

Fremont, California, 94538 (510) 661-5000 or (800) 342-7643

ESD/EMI PrecautionsThe service technician must follow these instructions to provide ESD protection and reduced EMI emissions:

• A braided copper ground wire (minimum 12 gauge) with ring-lug connectors (sized for No. 8 screw) must be connected between the VersaPort ground connection and the Process Tool power supply earth ground point.

• Communications cables to be constructed with shielded cable and provided with metal connector backshells (DB 9 and DB 25 where necessary).

• The VersaPort power cable and communications cables must use ferrite cores. The cores are to be located approximately two inches from the connector shell at the VersaPort end of the cable.

EMO & Electrical Power All electronics are fully enclosed in the lower portion of the VersaPort. Electrical power for the VersaPort is supplied by the Process Tool. Power to the VersaPort should be connected through the process tool EMO circuitry such that in an emergency, all power can be removed from the VersaPort by depressing the red mushroom shaped EMO switch mounted on the Process Tool chassis.


VersaPort 2200 Technical ManualChapter 1: SafetyEMO & Electrical Power a

Equipment Lockout/Tagout ProcedureLockout/tagout procedures must be followed during installation or when service is performed on the VersaPort to prevent injury or equipment damage. Where no company procedures exist, follow the guidelines below:

1. Notify all affected employees and users that service is to be performed and that the equipment needs to be shut down and locked out.

2. The Process Tool must be powered down, or the circuit that provides power to the VersaPort must be switched off.

3. Lock out the circuit with an assigned lock.

4. Test to make sure the VersaPort cannot be turned on accidentally.

5. Tag the locked circuit with a statement indicating:

• Unauthorized operation of the equipment or removal of tag is prohibited

• Date of service performed

• Names of the persons performing the service



Laser Safetya
Laser Safety
UserUnder normal operation (auto mode) using a SMIF-Pod, the user is never exposed to direct or collateral radiation in excess of the accessible emission limits of Class I. The laser beam is on whenever the VersaPort is in motion.

WARNING

LASER HAZARDTHE VERSAPORT CONTAINS A CLASS II LASER DIODE WITH A 1MW POWER AT 670 NM. THE VERSAPORT IS CLASSIFIED AS A CLASS I LASER PRODUCT UNDER THE CDRH LASER SAFETY REGULATIONS AND THE IEC 825-1 STANDARD ONLY IF THE VERSAPORT IS INSTALLED ONTO A PROCESS TOOL. THE LASER RADIATION MUST BE CONTAINED INSIDE THE TOOL, OTHERWISE THE VERSAPORT IS A CLASS II LASER PRODUCT. COVERS AND/OR ENCLOSURES AND A SMIF-POD MUST BE USED WITH THE VERSAPORT TO PREVENT EXPOSURE TO THE OPERATOR. COVERS MUST NEVER BE REMOVED BY THE OPERATOR.IF COVERS AND A SMIF-POD ARE NOT USED, THE VERSAPORT IS A CLASS II, NOT A CLASS I LASER PRODUCT. FAILURE TO COMPLY MAY RESULT IN INJURY.

Service Technician During installation, there are no requirements for cleaning, servicing, or electro-optical inspections of the laser system. Service procedures for laser replacement and alignment are included in the Technical Manual.

When operating the VersaPort using ISIM software in Manual mode, the laser interlock will be disabled. During service alignment of the laser system the technician will be exposed to the laser beam. When power is removed from the VersaPort, the laser is inoperative.

Safety InterlocksLaser InterlockThe VersaPort is designed to prevent the user from exposure to the laser beam. During normal operation, the laser is enabled only while the port plate is in motion with a Pod locked to the port plate. With a SMIF-Pod locked to the port plate the user cannot be exposed to the laser beam.


VersaPort 2200 Technical ManualChapter 1: SafetyLaser Safety a

WARNING

LASER HAZARDTHE LASER INTERLOCK IS BYPASSED WHEN USING ISIM SOFTWARE IN MANUAL (SERVICE) MODE. DO NOT STARE INTO LASER BEAM. STARING INTO THE LASER BEAM MAY RESULT IN EYE INJURY OR BLINDNESS.

WARNING

MECHANICAL HAZARDUSAGE OF ISIM CAN PUT THE LOAD PORT IN AN UNSAFE MODE FOR OPERATORS, AS INTERLOCKS CAN BE DISABLED. LASER EXPOSURE HAZARDS AND PINCH HAZARDS MAY BE PRESENT. PERSONNEL SHOULD BECOME THOROUGHLY FAMILIAR WITH ALL ASPECTS OF SAFETY FOR INDIVIDUALS AND EQUIPMENT PRIOR TO USING ISIM TO OPERATE THIS EQUIPMENT. FAILURE TO COMPLY MAY RESULT IN INJURY OR MECHANICAL DAMAGE.

SeismicFollow all installation procedures to ensure compliance with S2-0200; Safety Guidelines For Semiconductor Manufacturing Equipment, Seismic Requirements.

Pinch PointsA pinch hazard exists at the port plate when the VersaPort is being serviced and the minienvironment is removed—or when no Pod is present. Pinch points are identified by labels near the pinch-point hazard. See Figure 1 on page 15 or Figure 3 on page 16 for the location of the pinch hazard labels.

WARNING

MECHANICAL HAZARDTHE USER MUST NEVER PLACE FINGERS OR HANDS ON ANY PART OF THE VERSAPORT WHILE IT IS OPERATING. FAILURE TO COMPLY MAY RESULT IN BODILY INJURY.



Laser Safetya

MECHANICAL HAZARD

DANGER

THE VERSAPORT SHOULD BE OPERATED ONLY WITH A SMIF-POD. USE OF AN OPEN CASSETTE ADAPTER CREATES A PINCH HAZARD AT THE PORT PLATE. FAILURE TO USE A SMIF-POD MAY RESULT IN SEVER INJURY.


VersaPort 2200 Technical ManualChapter 1: SafetyLabeling a
Labeling
Description of Labels used on the VersaPortTABLE 1 List of VersaPort Labels

No. Label Description / Location

1

Laser Interlock The interlock label warns users that an eye hazard exists if the safety interlock of the laser system is defeated. The label is located on the shield for the port opening. (4001-9361-01)

2

Laser Label

The laser manufacturer’s caution label is attached to the laser bracket cover on the Process Tool-edge of the VersaPort port plate. (7500-3204-01)

3

CE This label identifies equipment that conforms to testing and certification requirements of the European Community. The CE label is located at the user-side of the Versaport, behind the minienvironment shield. (4001-8750-01)

4

Model & Serial Number

The model and serial number label for the VersaPort is located on the Process Tool-side of the interface frame. This number is required when contacting Asyst Technologies for any matter concerning the equipment. (9600-1194-01)

CAUTIONLASER RADIATION WHEN OPENAND INTERLOCK DEFEATEDDO NOT STARE INTO BEAM

46897 BAYSIDE PKWY



Labelinga

5

Input Voltage and I/O- BOLTS interfaceThe input voltage and I/O label for the BOLTS interface model is located below the VersaPort at the interface frame. (Silkscreen)

6

Input Voltage and I/O - Standard model

The labeling of the Standard model is at the connector panel, located at the user-side of the tool behind the minienvironment shield. (Silkscreen)

7

Handle at Corners The “Handle at Corners” label is attached only to the BOLTS model. It is an alert to handle the VersaPort only by the upper corners during movement and installation. It is located on the Process Tool-side of the interface frame. (4002-0207-01)

8

Pinch Warning

The pinch hazard label is located at the outer edges of the port plate, behind the minienvironment shield and warns of a pinch hazard when the shield is removed. (4001-7570-01)

9

Seismic The seismic label is mounted on the BOLTS model only. It is located in two places on the Process Tool-side of the interface frame, next to each alignment plate opening. (4002-0262-01)

TABLE 1 List of VersaPort Labels (Continued)


NOTICEHANDLE CORNERS TO

MOVE AND INSTALL

DANGERPINCH HAZARD

Do Not Insert Fingers IntoVertical Opening. FailureTo Comply May Result InFinger Injury.

SEISMICATTACHMENT

POINT



10

Ground The ground point label indicates the location where a ground cable from the Process Tool supply is attached to the VersaPort. The ground point label is located at the VersaPort platform mount connector panel, and on the Process Tool-side of the BOLTS frame. (4001-8359-01)

11

Power The power panel contains these indicators:POWER: When this indicator is lighted, power is being applied to the VersaPort.READY: When this indicator is lighted, the VersaPort is ready to accept a new command from the Host.POD IN PLACE: When this indicator is lighted, a Pod has been properly placed on the port. When it is off, either a Pod is missing or it is improperly seated on the port. (4001-6930-01)

TABLE 1 List of VersaPort Labels (Continued)


POWER READYPOD INPLACE

TECHNOLOGIES



Labelinga
Location of Labels used on VersaPort Models
FIGURE 1 VersaPort Label Placement (BOLTS model, user side)

FIGURE 2 VersaPort Label Placement (BOLTS model, process tool side)

CAUTIONLASER RADIATION WHEN OPENAND INTERLOCK DEFEATEDDO NOT STARE INTO BEAM

DANGERPINCH HAZARD

Do Not Insert Fingers IntoVertical Opening. FailureTo Comply May Result InFinger Injury.

NOTE-CE label and Pinch label behind shield

ASCII

SECS MSC

46897 BAYSIDE PKWY

SEISMICATTACHMENT

POINT

NOTICEHANDLE CORNERS TO

MOVE AND INSTALL

MODEL/SERIAL NO

46897 BAYSIDE PKWY



FIGURE 3 VersaPort Label Placement (Standard model)

Model/Serial number label Laser interlock label

Pinch hazard labelsCE label Ground label

Laser label (located onbracket cover, Tool side)


a
Chapter 2: Theory of Operation
This chapter provides an operational overview of the VersaPort 2200 System. The VersaPort can be supplied as a platform mounted tool or integrated to a BOLTS interface frame.

The VersaPort positions the cassette to a fixed plane for a Z-axis-robotic wafer/reticle handler. Each substrate is extracted from the cassette, processed, and returned to the cassette by the Process Tool. The fixed stage position places the center of wafer number one at 45.97 mm (1.81 inches) above the port plate, which is mounted at the SEMI standard of 900 mm (35.43 inches) with the BOLTS interface.

The cassette shuttle option moves the port door and attached cassette toward the Process Tool wafer transfer mechanism. The movement is programmable to a maximum distance of four-and-one-half inches, to position 200mm wafers at the proper location for transfer.

A laser-based sensing system on the VersaPort provides precision cassette slot location and wafer mapping. The laser beam also detects cross-slotted wafers. It senses protruding wafers (horizontal view) so a built-in wafer seater can reseat them in the cassette. A vertical view retro-reflective infrared sensor (excessive wafer protrusion sensor) detects wafers exceeding the maximum protrusion point and will halt VersaPort movement to prevent wafer damage.

A fan is located in the base to exhaust possible particle contamination from the VersaPort vertical drive system.

The software and hardware provide integrated self-test and diagnostics. A watchdog timer and non-volatile memory provide power-failure recovery.

The VersaPort operates on 24vdc (+10%, -5%) supplied by the Process Tool. Communication is through three RS232 serial connectors or one standard 25-pin parallel connector.


VersaPort 2200 Technical ManualChapter 2: Theory of Operation a

The VersaPort is mounted to the Process Tool with a customer-supplied standard mounting platform or with an Asyst-supplied SEMI standard (E 63) BOLTS interface frame.

FIGURE 4 VersaPort components (with BOLTS interface)

Smart-Probe embedded in port plate

Cassette shuttle and motor in base

Fan motor in base

Port plate assembly

Vertical drive column (lead screw) with motor in base

Connector panel behind minienvironment shield (routed below base on BOLTS model)

Rear shroud


VersaPort 2200 Technical ManualChapter 2: Theory of Operationa

FIGURE 5 VersaPort components (standard)

Cassette shuttle and motor in base Fan motor

in base

Connector panel behind minienvironment shield

Rear shroud

Vertical drive column (lead screw) with motor in base

Smart-Probe embedded in port plate

Port plate assembly


VersaPort 2200 Technical ManualChapter 2: Theory of OperationOperating Sequence a
Operating Sequence
The following section describes the VersaPort operating sequence. The operation starts from the Home position. The VersaPort is at the Home position when the following criteria are met.

Home Position Criteria:

• The port door is seated to the port plate (Pod-door closed interlock and elevator limit switches are closed).

• The Pod latches are retracted.

• The wafer seater is retracted.

• The READY indicator is lighted.

Staging Sequence

CAUTIONDURING NORMAL OPERATION, ONCE A CYCLE IS STARTED, THE POD TOP IS LOCKED TO THE PORT PLATE AND CANNOT BE REMOVED. DO NOT TRY TO REMOVE IT. FAILURE TO COMPLY MAY RESULT IN DAMAGE TO THE PORT PLATE AND/OR POD, POSSIBLE LASER EXPOSURE, AND CREATE A PINCH HAZARD.

1. The Process Tool sends a OPEN (Stage) command to the VersaPort. The VersaPort raises the port plate and Pod top to the configured Stage position, exposing the cassette. While the port plate is rising, the attached laser system maps the wafers in the cassette, so they can be extracted by the Process Tool’s Z-axis robot.

2. If the optional cassette shuttle is installed, the port door with cassette attached moves horizontally toward the Process Tool to position the cassette for wafer transfer.

3. When the wafer transfer sequence is complete, a CLOSE (Home) command is sent to the VersaPort. The port door retracts to its Home position (if shuttle installed) and the elevator lowers the port plate and Pod top over the cassette. The Pod is unlocked from the port plate.

Self TestVerify that the VersaPort can perform a complete self-test without any errors.

1. With ISIM, use F10 (Main), F2 (Manual), F3 (Self-Test) keys to start the self-test.

Upon completion of a successful self-test, the following message appears: ERRORS FOUND DURING SELF-TEST: NONE


VersaPort 2200 Technical ManualChapter 2: Theory of Operation

VersaPort Componentsa
2. If an error is found, an error message is displayed on the screen. Correct the failure,
and use the F8 and ARROW keys to clear the alarm.

3. Press F2 to return home and repeat step 2.

VersaPort Components

MechanicalThe VersaPort incorporates an Asyst Standard Mechanical InterFace (SMIF)-Port (complies with SEMI standards E19.4) that consists of the port plate assembly and port door.

The port plate assembly is supported off of the base assembly by one side extrusion which contains a precision vertical lead screw. The lead screw is ball-bearing supported and driven through a single timing belt by a servo motor. The lead screw provides vertical movement for the port plate, Pod top and telescoping minienvironment.

The port plate houses the Pod latch/unlatch mechanism. The wafer seater mechanism is mounted to the bottom of the port plate. The wafer seater rotates toward the cassette to push an extended wafer back into its slot.

The rear shroud covers the Process Tool opening when the VersaPort is at the Home (closed) position.

Port DoorStandard VersaPort (no shuttle): The port door is fixed to the base assembly. The port door contains the Pod door lock/unlock mechanism and Pod-in-Place switch.

VersaPort with shuttle: The port door is mounted to the base assembly on a horizontal lead screw and track. The port door is driven with a timing belt by a servo motor and is programmable to a maximum of four-and-one-half inches of travel. The port door contains the Pod door lock/unlock mechanism and Pod-in-Place switch.

Electronics The VersaPort’s central processing unit (CPU) circuit board is integrated into the Main VersaPort Control Interface board. The Interface board controls the operation of the VersaPort and is enclosed in the base of the VersaPort.

Electrical PowerThe +24 vdc (+10%, -5%) input power is applied through external connector J27 to the Main Control PCB. The power cable pin configuration is shown in the Installation Instructions. The input voltage is sent to a reverse-voltage-protection diode that ensures only the correct polarity 24 vdc is accepted. A circuit monitors over/under voltage and over-current situations to control the +24 vdc transistor power switch. An acceptable band of +19.5v to +30.0v (nominal) input voltage is required to allow the transistor switch to turn on. Outside this voltage band, the transistor switch will be off.


VersaPort 2200 Technical ManualChapter 2: Theory of OperationVersaPort Components a

Any over-current situation is detected via a sense resistor. If a 24v current greater than 5.0 amps nominal is detected, the transistor power switch will turn off or will be tripped. If the switch is tripped, 24v power must be shut off and then turned on to reset the VersaPort.

A second over/under voltage circuit is used to detect a power failure and signal the CPU. The acceptable range for this circuit is from +22.8v to +26.4v (nominal). This voltage is within the range of the first over/under voltage circuit, described above. Voltage outside the acceptable range gives a power fail signal, which allows for orderly shutdown of motors and the saving of certain run-time parameters and data to the battery-backed static random access memory (SRAM). Data is saved before transistor power is switched off, as described in the previous paragraph.

The +24v switch voltage from the transistor power switch provides power for the motor-driver circuits and the dc-to-dc converter. The converter provides +5v to the digital circuitry and ±12v for analog and interface circuitry.

CPUThe CPU microprocessor is the 80C188. This processor provides a 16-bit internal and 8-bit external data transfer bus running at 16 MHz.

Program MemoryThe program memory is contained in an erasable-programmable random access memory (EPROM).

SRAMThe SRAM is battery backed to provide a long-term non-volatile random-access memory (NOVRAM). This is a readable-writeable memory source for the storage of equipment configuration data and history. The battery (Lithium type) is self contained in the NOVRAM socket device and has an estimated shelf life of ten years.

Quad-Serial I/OThe quad-serial I/O device is a universal asynchronous receiver transmitter (UART) used to process three channels of bi-directional RS-232 data.

• ASCII Host Equipment. A 9-pin D-subminiature type connector is for external RS-232 connection of the Host computer or the Process Tool controlling the system using ASCII communication.

• SECS Host. A 9-pin D-subminiature type connector for connection to the Host computer or Process Tool using SECS I/II communication.

• MSC. A 9-pin D-subminiature type connector for external RS-232 connection of a MicroStation Controller, for communication with an external computerized system to control and/or monitor SMIF and SMART-Traveler components.

• RFID (Optional). A 9-pin D-subminiature type connector is for external RS-232 connection to the Master Controller for the RFID system.




Interlocks, Parallel, I/OThe parallel I/O external connector provides for seven optically isolated inputs and seven outputs. These I/Os are for Host interlock data going to or coming from the Process Tool. See Table 3, “Parallel Communications Interface - Asyst Compatible,” on page 30 for a list of inputs and outputs. This connector may be used for parallel communications with the Process Tool under certain limited circumstances.

Digital I/OThe digital I/O block communicates with the CPU via the computer data bus. Digital I/O latched output lines are for control and annunciation by LED indicators. Inputs for interlocks/parallel communications, limit switches, and sensors are read into the CPU via the input lines of the digital I/O.

Watchdog Timer. The watchdog timer resets the CPU on powerup. If the watchdog timer fails to receive a pulse from the CPU via the digital I/O every 600 msec., the CPU will be reset. The watchdog timer will halt the CPU if the CPU voltage falls below 4.5 vdc. This ensures that the CPU is properly executing instructions and no associated failure has occurred.

Interrupt ControllerThe interrupt controller accepts inputs from the quad-serial UART, elevator servo-motor controller, digital I/O, and the horizontal view and slot sensors to provide interrupt data to the CPU.

SensorsThe VersaPort uses optical sensors; either break-the-beam type or beam intensity threshold type.

FIGURE 6 VersaPort Connector Panel

VersaPort BOLTS connector panel

VersaPort Standard mount connector panel



Optical-Limit Switches. The optical-limit switches (break-the-beam type) are small electronic devices that provide an off/on signal via the digital I/O and an interrupt to the processor when actuated. Their functional applications are:

• Pod-in-place

• Pod lock – lock/unlock (dual)

• Pod latch – latched/unlatched (dual)

• Wafer seater – Home/out (dual)

• Elevator home sensor

• Cassette Shuttle home sensor

• Excessive wafer protrusion

Laser Detector Sensors. The laser beam is detected by the following beam-intensity threshold optical sensors:

• Wafer protrusion sensor

• Wafer present sensor

• Cassette slot sensor

These sensors feed intensity information from the sensor, as a voltage level, to the comparators which have a programmable threshold. This voltage level is detected by a comparator whose reference is set by a digital-to-analog converter (DAC). Here, a 0v to 5.0v input level will equal a 0 to 255 count from the CPU to the DAC. The outputs of the comparator are processed via the digital I/O.

Laser Detector SystemThe laser system incorporates a laser diode emitter which produces a beam at 670 nanometers wavelength, integrated with a regulated power supply circuit. When the VersaPort is in motion, power is applied to the laser circuitry. The laser turns off whenever the elevator is not in motion, such as when at the Home or Stage position or if the elevator stalls due to a malfunction.

NOTE . . .

THE LASER CAN REMAIN ON WHEN IN SERVICE MODE.

The laser detector system uses mirrors, beam splitters, and sensors to verify proper wafer position within the Pod and provide wafer mapping. The laser beam is sent through two beam splitters and reflected off two mirrors to strike three horizontal view sensors. The sensors are:

• Cassette slot sensor

• Wafer present sensor

• Wafer protrusion sensor



The laser diode, beam splitters, and mirrors are mounted on a laser bracket assembly that is installed to the bottom of the port plate assembly.
• Wafer Present Sensor, Horizontal View

The laser beam is first directed to a precision beam splitter that reflects a portion and transmits a portion of the beam. The reflected beam travels across the mid point of the port opening. On the opposite side of the port door opening, the beam is directed through an aperture and strikes the wafer sensor. This sensor is used to furnish positional information about individual wafers. The information is stored into memory as internal data collected for cassette wafer mapping. The mapping information is available for use by the Host system to direct the pick and place arm to accurately retrieve wafers from the VersaPort. This sensor is also used to determine cross-slotted errors.

• Cassette Slot Sensor

The transmitted laser beam from the first beam splitter is directed at a second beam splitter. This beam splitter evenly splits the light into two beams. The reflected beam travels at an angle across the port opening. The beam angle is aligned to pass on one side of the cassette slot opening as the port plate travels up or down on the elevator. The beam is projected to the other side of the port door opening and through an aperture to the cassette slot sensor. The slot information is available for use by the Host system to direct the pick and place arm to accurately place wafers back into the cassette.

FIGURE 7 Laser Detector System

WAFERPROTRUSION SENSOR

SILICON WAFER

CASSETTE SLOT SENSOR

WAFER PRESENT SENSOR

PARTIAL VIEW OF CASSETTE SLOTSBEAMSPLITTER

BEAMSPLITTER

10 mmFIRST SURFACEMIRRORS

2

WAFER AT ANEXCESSIVELY PROTRUDEDPOSITION

<1 mWLASER DIODE67O NM VISIBLE RED

BREAK-THE-BEAMINFRARED SENSOR FOREXCESSIVE WAFERPROTRUSION(Vertical view)



• Wafer Protrusion, Horizontal View Sensor

The laser beam transmitted from the second beam splitter is reflected off two mirrors at the corners of the laser assembly and back across the cassette opening and through an aperture onto the wafer protrusion sensor. This sensor detects any wafers protruding beyond the front of the cassette. A protruding wafer could be damaged as the elevator is returning the Pod top to the cassette. Activation of the wafer protrusion sensor causes the elevator to halt and the wafer seater mechanism to seat the out-of-position wafer.

Excessive Wafer Protrusion Sensor, Vertical ViewThe excessive wafer protrusion sensor, vertical view, uses one IR emitter and one IR receiver to create a break-the-beam sensor system. If a wafer is positioned too far out of the cassette for the wafer seater to correct, the wafer will interrupt the beam sent from the emitter to the receiver, causing the VersaPort to immediately stop so the wafer can be manually reseated into the cassette slot.

Motor ControlsThe VersaPort contains six motors (five if the cassette shuttle option is not present); two dc servo motor (one port plate elevator and one cassette shuttle), two dc stepper motors (one Pod latch and one wafer seater), one dc motor (Pod door lock/unlock mechanism), and one single speed motor (air exhaust).

FIGURE 8 Laser Detector Example (viewed through port plate)

200 mmCASSETTESLOT SENSOR

WAFERPOSITIONSENSOR

WAFER PROTRUSION SENSOR

BEAM APERTURE

PORT DOOR

MIRRORS

(MIRROR BRACKETSSET AT 45 DEG)

CASSETTE SLOTBEAMSPLITTERS

WAFER POSITIONBEAMSPLITTER

(BRACKET SETAT 37 DEG)

BEAMSPLITTER(BRACKET SETAT 45 DEG )

LASER DIODE670 NMVISIBLE RED@<1.0mW CW

BEAMPATH

SILICON WAFER OUTLINE

(200mm)

(ALIGNED FOR 200mm WAFER)

200mm



Three sets of circuits control the operation of the elevator motor, Pod latch and Pod door motors, and wafer seater motor. The air exhaust motor is powered directly from the INX Control PCB at 24vdc.
NOTE . . .

OPTICAL LIMIT SWITCHES ASSOCIATED WITH THE ACTUATOR MOTORS AND ELEVATOR MOTOR HAVE SOFTWARE GENERATED TIME LIMITS FOR ACTUATION. FAILURE TO ACTUATE IN A GIVEN PERIOD OF TIME WILL CAUSE THE DC-MOTOR TO STOP MOTION.

Port Plate Elevator and Cassette Shuttle Motors

(DC Servo motor) The port plate and cassette shuttle are controlled by a servo loop consisting of: servo-motion controller, amplifier-driver, dc-drive motor, digital encoder, and position capture circuit. The controller is programmable by the CPU. The forward and reverse drive information is provided to the amplifier/driver that provides pulse-width modulated (PWM) voltage to the motor. The encoder produces the equivalent of 2000 counts per lead screw revolution for feed back to the servo-controller. This produces control and position data for the CPU. Motor current is sensed through the driver circuit to prevent motor or circuit burnout due to a stalled motor or shorted winding. The over-current trip-point is set at 3.0 amps nominal. The overcurrent condition is resettable via the software.

The port plate/elevator and cassette shuttle both use limit switches to confirm they are at the Home position. The encoder is used to indicate an over-travel condition. The port plate/elevator motor includes a brake, which engages when power is removed to prevent back-travel of the port plate.

Pod Latch and Wafer Seater Motors(DC stepper motors) The Pod latch and the wafer seater share common circuitry. Each motor has its own stepper-motor driver, but they share a step sequencer, since these motors will never be energized at the same time. A current limiter is provided should an overcurrent or short circuit occur in the wiring of one of the motors.

Each motor has limit switches that will cause the motor to stop when the desired position is reached.

Pod-Door Lock/Unlock Motor(DC motor) The Pod-door lock/unlock motor is driven by an amplifier-driver. When the motor runs the Pod-lock mechanism to its locked position, the lock-limit (switch) is detected, thus turning off the motor. This is the same procedure for the motor and the unlock-limit switch. Motor current is sensed through the driver circuit. If the motor were to stall, current would be limited until the condition was cleared. If a shorted motor winding or some other type of short circuit were to occur, the over-current would be tripped. The trip condition can be reset by powering down the VersaPort and then reapplying power.

The Pod-lock motor has the Pod-open and Pod-closed limit switches that ensure that the motor is de-energized when it has reached the desired position.



Air Exhaust MotorA single speed 24vdc fan connected to the Main Control board, J12.

Status IndicatorsThe indicators are located on the top of the port plate to indicate the operational status of the VersaPort.

Power IndicatorThe POWER indicator, when lighted, indicates that +24vdc power is applied to the VersaPort. The indicator is powered from +5vdc which is derived from the +24vdc input power.

Ready IndicatorThe READY indicator, when lighted, indicates the readiness of the VersaPort. When the indicator is lighted, the VersaPort is idle and ready to accept a new command from the Host. When it is off, the VersaPort is busy and cannot accept any more action commands until all motions in progress are completed. The state of this indicator, however, has no affect on commands initiated by the MSD (SAM) or commands interrogating the VersaPort status.

Pod-in-Place IndicatorThe POD-IN-PLACE indicator, when lighted, indicates the presence of a Pod on the port. When the indicator is lighted, a Pod has been properly placed on the port. When it is off, either a Pod is missing or it is improperly seated on the port.

Communications InterfaceTable 2, “Serial Port Pin Usage,” on page 29 displays the PIN connections for the three serial communications interfaces available for the VersaPort. Table 3, “Parallel Communications Interface - Asyst Compatible,” on page 30 displays the 25-pin parallel connections.

Serial Communications InterfaceThe VersaPort has three ports for serial-computer-communications interfaces. All are 9-pin D-subminiature RS232 interface. Each has a transmit (TX) and a receive (RX) line and four control lines.

• SECS Host Port

The SECS Host port interface is used with SECS protocol.

FIGURE 9 Status Indicators

POWER READYPOD INPLACE

TECHNOLOGIES



• ASCII Host Port
The ASCII Host port interface is used with ASCII terminal communications.

• Microstation Controller (MSC) Port

The MSC, if connected to the VersaPort, will keep track of product lots through the Smart-Tag. The MSC serial port connects the Probe (Tag reader) on the VersaPort port assembly to the Host processor via the MSC/Smart-Comm/Link Manager.

NOTE . . .

1. SERIAL CABLES MUST BE WIRED AS NULL-MODEM CABLES.2. CABLES CANNOT BE DAISY-CHAINED.3. IF A 5-WIRE CABLE IS USED FOR HOST CONTROL ONLY (NO SMART TAG READ/WRITE), THEN THE CTS LINE MUST NOT BE ACTIVE. THE VERSAPORT WILL INTERPRET A SIGNAL ON THE CTS LINE AS INDICATING TAG DATA BEING SENT.

Parallel Communications InterfaceThe parallel I/O communication interface supports a single mode of operation: OPEN and CLOSE.

The OPEN function opens the Pod and raises the port plate to a fixed stage position. The CLOSE function returns the port plate/Pod top to the Home position.

TABLE 2 Serial Port Pin Usage

PinNumber Name Serial Comm (SECS/ASCII)

without Tag.Serial Comm (SECS/ASCII)

with Tag, or Tag only.1 (N/C) not used not used2 RX X X3 TX X X4 (N/C) not used not used5 Ground X X6 (N/C) not used not used7 RTS not used X8 CTS not used X9 (N/C) not used not used


NOTE . . .
THE PARALLEL INTERFACE ALLOWS LIMITED FUNCTIONALITY TO THE VERSAPORT. THE SOURCE OF ANY ERRORS ENCOUNTERED IS NOT DISPLAYED AND ERRORS CAN ONLY BE RESOLVED WITH THE CLEAR ERROR-HOMING CAL COMMAND. ASYST RECOMMENDS PARALLEL INTERFACE BE USED FOR INTERLOCK PURPOSES ONLY.

One 25-pin male D-subminiature connection is available. Parallel control is limited to OPEN and CLOSE commands. The parallel port cannot be used for configuration control. Configuration modifications must be made through the serial connection. (If the Process Tool does not have serial capabilities, an external Host PC can be used to set up configuration data using Asyst ISIM software.)

The inputs and outputs use optical isolation, therefore electrical isolation is maintained only as long as a separate Host +5 VDC and ground is used to drive the outputs. The VersaPort internal +5 VDC and Ground can be used, but will not provide electrical isolation of I/O pins. See Table 3 for the function of each pin.

TABLE 3 Parallel Communications Interface - Asyst Compatible

Pin No. Type Configuration

ON Current Requirement

Min. Max.

OFF Current Requirement

Max.

2 Input ENABLE / DISABLE 3 20 mA 0.40 mA

4 Input OPEN / CLOSE 3 20 mA 0.40 mA

6 Input Not used 3 20 mA 0.40 mA

8 Input READY TO CLOSE 3 20 mA 0.40 mA

10 Input READY TO OPEN 3 20 mA 0.40 mA

12 Input Not used 3 20 mA 0.40 mA

19 Input CLEAR ERROR / HOMING CAL 3 20 mA 0.40 mA

Pin No. Type Configuration Minimum sinking current capability

5 Output READY TO XFER 8 mA @ 0.4V

7 Output HOME 8 mA @ 0.4V

9 Output POD IN PLACE 8 mA @ 0.4V

11 Output READY 8 mA @ 0.4V

15 Output Not used 8 mA @ 0.4V

16 Output Not used 8 mA @ 0.4V




1. I/O signals with shared labels (such as OPEN/CLOSE) are multi-purpose, with the specific function depending on the status of other signals.2. All I/O signals are active low. 3. Input signals are strobed. Minimum effective strobe length is 50 milliseconds.4. Minimum time from one transition signal to another is 20 milliseconds.5. To ensure complete electrical isolation (recommended) between the host and the VersaPort I/O, the input/output power must be provided by the Host at J10 pins 1&13, and the output signal ground also provided by the Host at J10- pins 14 & 25. W22 pins 1 &2 on the I/O board must be jumpered and no jumper on W26 installed.6. To use the VersaPort DC power and ground for input/output voltage and output signal return, jumper W22 pins 2 & 3 and jumper W26. Connect J10 pins 20 &21 to pins 14 & 15.

NOVRAMThere are two sets of data (configuration and history) that are written to and retrieved from the NOVRAM during VersaPort operation. The NOVRAM data is updated whenever changes have occurred.

ConfigurationThe configuration data, Equipment Constant Identification (ECID), is written to the NOVRAM and updated as necessary to provide repeatable VersaPort operation parameters. A complete description of ECID values and default settings is provided in the Communications Software section of this manual.

HistoryThe history file contains information that is incremented at each event and stored for the life of the NOVRAM. The data stored is:

• Power up. The number of times the VersaPort has had power applied to it.

24 Output ERROR 8 mA @ 0.4V

3 Connected internally to chassis ground.

17 Factory test usage; Do not connect to these pins.



Pin No.

To use external Host DC voltage and ensure electrical isolation

(see note 5)

To Use VersaPort DC Voltage(see Note 6)

1 & 13 Connect to Host +5 VDC Do not connect.

14 & 25 Connect to Host signal return. Connect to pin(s) 20 and/or 21

20 & 21 Do not connect. Connect to pin(s) 14 and/or 15

TABLE 3 Parallel Communications Interface - Asyst Compatible (Continued)



• Stage. The number of times the VersaPort elevator has been driven to the stage position.

• Home. The number of times the VersaPort elevator has been driven to the Home position.

• Map. As the port plate moves to Stage, the cassette is mapped. Mapping performs three functions:

a. Wafer status (presence or absence of wafers).

b. Cassette slot positions.

c. Wafer positions.

• Recoverable errors. This is the total number of recoverable errors recorded.

• Non-recoverable errors. This is the total number of non-recoverable errors recorded.

• Last Error. This is the error code of the most recently occurring error condition in the VersaPort. The value of the Last Error cannot be cleared by cycling power to the VersaPort. It can only be over-written by the error code of a new error condition.

• Elevator motor position. This is the current position of the elevator, in case of power failure, at any moment in time.

• Elevator motion status. This indicates, in case of power failure, whether the elevator was in motion at the moment when the power was interrupted.



Specifications and Outline Drawinga
Specifications and Outline Drawing
TABLE 4 VersaPort Specifications

Platform Mount BOLTS ConfigurationWafer Size 200mm 200mm

Height

19.25 inchesNOTE- Does not include 0.75 inch mounting hardware requirement.

1385mm (54.53 in.)

Width 370.84mm (14.60 in.) BOLTS interface = 470mm (18.50 in.)

Depth 396.24mm (15.60 in.) 415.3mm (16.35 in.)Weight (without SMIF-Pod) ~15.87 Kg (~35 lbs.) ~56.70 Kg (~125 lbs.)

Port Plate Height while operating (at Stage position)

448.31mm (17.65 in.) from baseNOTE- Height requirements for rear shroud and Pod are shown in Outline drawings.

1188.5mm (46.79 in.)NOTE- Height requirements for rear shroud and Pod are shown in Outline drawings.

Port Plate Height at Home position 158.75mm (6.25 in.) 900mm (35.43 in.)

Speed ~76.2mm (~3.0 in.) per second (constant velocity)

Mounting

Customer-supplied mounting platform.See Outline drawing for specifications.

Direct mount to Process Tool using a SEMI E63 BOLTS interface frame.

Power24 vdc (+10%, -5%) from external source1.5 Amps standby; 3.0 Amps typical during operation; 4.0 Amps maximum

Laser

Diode laser; Wavelength = 670nmLaser Power <1mW (Class II)NOTE- VersaPort is a Class I laser product when used with a SMIF-Pod.See “Laser Safety” on page 9 for a complete description.

Communications Serial RS-233C, SECSI/II, ASCII, Parallel

Environmental

Operating Temperature 10°to 40° C Operating Humidity 10%- 75%Storage Temperature -10° to +55° CStorage Humidity 5%- 90%

CleanlinessPerforms better-than-Class 1 (in accordance with FED-STD-209E)Maximum allowable particle concentration = 1 particle/cu.ft at 0.5µ, or 35 particles/cu.ft. at 0.1µ.

Agency Approvals CE Mark, SEMI S2


VersaPort 2200 Technical ManualChapter 2: Theory of OperationSpecifications and Outline Drawing a

FIGURE 10 Outline Drawing, Side View




FIGURE 11 Outline Drawing, Rear View



FIGURE 12 Outline Drawing, Front View

I/O Panel




FIGURE 13 Outline Drawing, Overhead View



FIGURE 14 Outline Drawing, I/O Panel Detail

I/O PANEL DETAIL

( )

GROUND POINT




FIGURE 15 Recommended Mounting Method

TOOL SIDE

OPERATOR SIDE



FIGURE 16 BOLTS Interface




FIGURE 17 VersaPort Mounted on BOLTS Interface in Free Standing Position



FIGURE 18 VersaPort Terms

Port Door

User/operator side

Vertical Drive Column

Port Plate

Connector Panel (behind minienviron-ment shield)

Process-Tool Side (front)

Minienvironment

Copper Interlock Pin Provisions


VersaPort 2200 Technical ManualChapter 3: Diagnostics and Troubleshooting

Overviewa
Chapter 3: Diagnostics and
Troubleshooting

OverviewThis chapter provides diagnostic fault isolation for troubleshooting possible VersaPort operating errors or actual VersaPort malfunctions.

It provides step-by-step troubleshooting of symptoms found in the operation of the VersaPort. The user may fix some problems. Refer other problems to the Service Organization.

Using Indexer Simulator (ISIM) Software

MECHANICAL HAZARD

WARNING

USAGE OF ISIM CAN PUT THE VERSAPORT IN AN UNSAFE MODE FOR OPERATORS, AS INTERLOCKS CAN BE DISABLED. PINCH HAZARDS MAY BE PRESENT. PERSONNEL SHOULD BECOME THOROUGHLY FAMILIAR WITH ALL ASPECTS OF SAFETY FOR INDIVIDUALS AND EQUIPMENT PRIOR TO USING ISIM TO OPERATE THIS EQUIPMENT.

NOTE . . .

ISIM IS ONLY TO BE USED BY APPROPRIATELY TRAINED OPERATORS AND TECHNICIANS. CONTACT ASYST TECHNOLOGIES FOR TRAINING.

Asyst simulator (ISIM) software is provided with the installation. The software runs on a PC-type computer to control the VersaPort when performing service or to locally perform the configuration setup. Appendix A: “ISIM” on page 123 of this manual outlines ISIM usage.

If the Process Tool uses either COM1 or COM2 serial ports to communicate with the VersaPort, then ISIM software can be run directly from the Process Tool. Otherwise, it is important to know which port, what I/O address, and what interrupt scheme is being used on the Process Tool side to determine whether or not it is compatible with ISIM software.


VersaPort 2200 Technical ManualChapter 3: Diagnostics and TroubleshootingUsing Indexer Simulator (ISIM) Software a

The VersaPort retains the most recent mode-setting (Manual or Auto) in which it was operated. In Manual mode, the VersaPort rejects high level commands such as "Stage" and "Home". In Auto mode, the VersaPort rejects low level commands, such as individual motor diagnostic commands.

If configuring or servicing the VersaPort, operation may be switched into Manual mode. If not switched back to Auto mode after completing the service work and power is not reset, the VersaPort may reject commands from the Process Tool when placed in operation.

In general, while in Manual mode, the VersaPort will reject any command that requires an Auto mode setting, regardless of the command that is issued through SECS, ASCII, or parallel Host control signals.

Either ISIM or the Process Tool can issue an "Auto" command to return the VersaPort operation to Auto mode. This command is available through both SECS and ASCII interfaces, provided that the Host software has included the command in its implementation. Resetting power to the VersaPort also automatically places it back in Auto mode. A "Reset" command, however, only clears any pending error and does not return the VersaPort to Auto mode.

After performing service work on the VersaPort, it should be returned to Auto mode and exercised a few times with the Auto mode "STAGE" and "HOME" commands to confirm proper operation. If the debug option had been enabled earlier during trouble-shooting, disable the debug prior to returning operation back to the Process Tool.



Problem Identificationa
Problem Identification
NOTE . . .

ISIM IS ONLY TO BE USED BY TRAINED OPERATORS AND TECHNICIANS. CONTACT ASYST TECHNOLOGY FOR TRAINING.

TABLE 5 General Problems

Indication/Problem Possible Causes Solutions

Indication: No indicator lights on the port plate.

The VersaPort is not connected to power.The Process Tool is not turned on.Malfunction on the VersaPort printed circuit board. (Ensure Process Tool has power and VersaPort power cord is attached.)

Connect the 24 VDC power.Apply power to the Process Tool.Check the 24 V on the VersaPort board.Check status cable,Perform CSP6 – “Replace Printed Circuit Board” on page 116

Indication: The POWER light is lighted, but the READY light will not light.

The VersaPort is busy processing a command.VersaPort not at Home position.

Wait for the VersaPort to perform the command.Check to ensure that VersaPort is fully in Home position.

Indication: The POD-IN-PLACE light will not light when a Pod is placed on the VersaPort port plate.

The Pod is not properly seated on the port plate.Electronic problem.Pod-in-Place switch is not properly aligned.

Ensure that the Pod is sitting flat on the port plate in the proper orientation.Check signal cables.Perform CAP6 – “Align Pod-In-Place Switch” on page 94

Indication: VersaPort halts and alarms.

1. Position Following Error caused by any of the following:Loose elevator drive beltBad elevator motor bearingsBad pulley bearingsDefective elevator motorDefective encoder assemblyIntermittent encoder cableDefective Inx/Control interface boardBrake engagedLimit Sensors defective2. Laser, Mirror or sensor is loose and moves while VersaPort is in motion.3. Wafer protrusion sensor tripped.

1. Solution:

Replace or tighten belt.Replace elevator motor.Replace pulley.Replace elevator motor.Replace encoder.Replace encoder cable.Replace VersaPort/Control interface board.Replace brake.Replace limit sensors.

2. Laser system needs alignment. Perform Laser Alignment.3. Verify that the wafers are properly seated in the cassette.


VersaPort 2200 Technical ManualChapter 3: Diagnostics and TroubleshootingProblem Identification a

Indication: During an unload operation, the VersaPort halts and alarms. The VersaPort is halted and no reticles appear to be over-extended.

Excessive wafer protrusion sensor needs adjustment or replacement.

Refer to CAP2 – “Align Excessive Wafer Protrusion Sensor, Vertical View” on page 76.

Indication: The VersaPort has power, but nothing happens.

1. The communications cable is missing or not plugged into the proper connector on the VersaPort.

2. VersaPort is not properly configured for use with a computer.

3. During servicing, the VersaPort was placed in MANUAL mode and was not returned to AUTO mode prior to operation.

4. The VersaPort PCB needs replacement.

5. Software is locked.

1. Attach the communication cable to the proper VersaPort connector and tighten the connector hold-down screws.

2. Using ISIM software, from the Main Menu, select Config Menu. Select Read Configuration.Verify correct configuration for VersaPort to communicate. (Refer to “ECID Descriptions” on page 161.)

3. Using ISIM software or commands from the Host tool, place the VersaPort in AUTO mode.

4. Perform CSP6 – “Replace Printed Circuit Board” on page 116.

5. Cycle the power to reset the unit.

TABLE 5 General Problems (Continued)

Indication/Problem Possible Causes Solutions



Self-Testa
Self-Test
Perform the self-test to determine proper operation of the VersaPort. When activated, the self-test feature checks motors, sensors, and IRQs.

WARNING

MECHANICAL HAZARDUSAGE OF ISIM CAN PUT THE VERSAPORT IN AN UNSAFE MODE FOR OPERATORS, AS INTERLOCKS CAN BE DISABLED. PINCH HAZARDS MAY BE PRESENT. PERSONNEL SHOULD BECOME THOROUGHLY FAMILIAR WITH ALL ASPECTS OF SAFETY FOR INDIVIDUALS AND EQUIPMENT PRIOR TO USING ISIM TO OPERATE THIS EQUIPMENT.

NOTE . . .


Self-test can be run using ISIM software:

From the MAIN Menu, press F2 (MANUAL).

From the MANUAL Menu, press F3 (SELF TEST).

The VersaPort performs the test and returns a screen message. If no errors were encountered the screen display will read:

Errors detected during self test: None.

The screen will display any Errors detected. Refer to appropriate service procedure to resolve the errors.

Return VersaPort to AUTO mode for communication.

Press F10 to go to the MAIN Menu.

Press F1 to enter AUTO mode.


VersaPort 2200 Technical ManualChapter 3: Diagnostics and TroubleshootingError Types a
Error Types
There are two types of errors encountered in the VersaPort; recoverable and non-recoverable. The recoverable errors require no special message to clear the error and the elevator may automatically go to the Home position.

A non-recoverable error will halt the VersaPort. After the occurrence of any non-recoverable error, the VersaPort will enter into an error state which inhibits acceptance of any action command until the error is cleared.

To rest a non-recoverable alarm report using SECS messages:

S2, F41 RCMD = 16 (HCS_RESET_ERROR)

Errors can also be reset using ISIM software:

NOTE . . .


WARNING

MECHANICAL HAZARDUSAGE OF ISIM CAN PUT THE VERSAPORT IN AN UNSAFE MODE FOR OPERATORS, AS INTERLOCKS CAN BE DISABLED. PINCH HAZARDS MAY BE PRESENT. PERSONNEL SHOULD BECOME THOROUGHLY FAMILIAR WITH ALL ASPECTS OF SAFETY FOR INDIVIDUALS AND EQUIPMENT PRIOR TO USING ISIM TO OPERATE THIS EQUIPMENT.

From the MAIN Menu, press F2 (MANUAL).

From the MANUAL Menu, press F8 (CLEAR ERROR).

Alarm Report SendIn the SECS messages, the Alarm Report Send (S5,F1) contains three variables: ALCD (Alarm Code), ALID (Alarm I.D.), and ALTX (Alarm Message Text).

• Alarm Code is an indication of whether the alarm condition is recoverable.

• Alarm I.D. is an indication of the type of instruction that the VersaPort was performing when the error occurred.

• Alarm message text provides specific error messages. See Table 6 on page 50 and Table 7 on page 50 for a description of error messages.



Error Typesa
Alarm Code S5,F1
5 = Fatal (non-recoverable)

6 = Warning (recoverable)

Alarm ID, alarm occurs during S5,F1

1 = Move to stage

2 = Return Home

4 = Tweek up or down

8 = Get reticle map

32 = Port lock or unlock

34 = Move to a specified position

35 = Move to the next reticle

36 = Move to the next slot

37 = Others

Error Messages

See Table 6 on page 50 and Table 7 on page 50 for a description of error messages.


VersaPort 2200 Technical ManualChapter 3: Diagnostics and TroubleshootingError Messages a
Error Messages
This section provides a list of error messages, which a terminal or computer displays, where the ISIM software program is running, assuming that the VersaPort has a computer connected to it. If a problem occurs Table 6 and Table 7 shows the displayed messages.

NOTE . . .

THE MESSAGE TEXT LISTED IN Table 6 and Table 7 MAY NOT BE THE EXACT TEXT THAT THE COMPUTER MONITOR OR TERMINAL DISPLAYS.

TABLE 6 Recoverable Errors (ALCD =6)

Error Message Cause (Recovery)

“Indexer Busy” VersaPort is performing or attempting to perform some command. (Wait for busy condition to clear.)

"Pod removed" The Pod-In-Place switch is not depressed.

"Aborted by user" User sent a command to abort the Load or Unload process. (Re-send command.)

"Cassette not present" As the Pod is opened during a load cycle:a) The laser slot sensor did not detect the cassette (if the sensor is turned on).b) The reticle sensor did not detect any cassette on the Pod door (if the slot sensor isturned off). (Auto return to Home)

"Cassette present" The Pod is opened during an unload cycle and a cassette was detected by either theslot sensor or the reticle sensor

TABLE 7 Non-Recoverable Errors (ALCD =5)


“Port Door failed to open” After the Port Open command is sent, the elevator down-limit switch is not activated within the allowable time limit.

"Port door failed to close" After the Port Close command was sent, the elevator up limit switch was not activated within the allowable time

"Port hold-down failed to open" After an Unlatch Pod command is sent, the Pod hold-down unlatched limit switch is not activated within the allowable time.

"Port hold-down failed to open" After an Unlatch Pod command is sent, the Pod hold-down unlatched limit switch is not activated within the allowable time.



Error Messagesa

"Port hold-down failed to close" After a Pod is placed on the port and a Latch Pod command is sent, the Pod hold-down latched limit switch is not activated within the allowable time.

"Elevator fails to reach target position"

Elevator did not reach the commanded position.

"Wafer protrusion sensor malfunction"

The reticle protrusion sensor either:Did not detect the Pod door.It was blocked for a period of time that is not consistent with the thickness of a reticle.

"Slot sensor malfunction" The slot sensor failed to detect the port plate during self-test.

"Tripping of elevator over-travel limit"

Either:The elevator has lost its position memory and drifted out of its normal traveling range.The elevator over-travel limit was not adjusted correctly.

"Excessive wafer out error" Either:The gain of the vertical protrusion sensor amplifier was too high.An obstacle was blocking the vertical protrusion sensor.

“Wafer sensor malfunction or misaligned”

Either:a) The reticle sensor mirror has been misaligned.b) The reticle sensor is in a constant block state.

"Position following error" After a motion command is sent, the instantaneous position of the elevator deviates from the programmed position profile by more than the allowable value.

"System error" The requested internal action is not found in the action list.

“Pod Removed” The Pod-In-Place switch is not depressed when the vertical drive position is more than 2” away from home.

"EL home sensor failure" (For VersaPort only)

The elevator home sensor signal does not change its state.

TABLE 7 Non-Recoverable Errors (ALCD =5) (Continued)



VersaPort 2200 Technical ManualChapter 3: Diagnostics and TroubleshootingJumper Post Configurations a
Jumper Post Configurations
Table 8 shows the main circuit board and integrated circuit board jumper post configurations.

NOTE . . .

FEATURES SELECTED BY JUMPERS FOR RS485 MAY NOT BE AVAILABLE DUE TO SOFTWARE IMPLEMENTATION.

TABLE 8 VersaPort Control Interface Circuit Board - Dual PCB Style

Function Jumpers as Shipped

W1 Ties +24v GND to Chassis GND Removed

W2 Connects DTRC output to RS232 Port C, no jumper = High True Removed

W3 Fan voltage: direct from +24v input (1 to 2), direct from +24v SW, switched output (2 to 3)

(1 to 2) *Hardwired*

W4 TxD- output: 1 to 2 selects RS232, 2 to 3 selects RS485 1 to 2

W5 When installed, connects TxD- output to RxD- input for RS485 half duplex Removed

W6 CTSD input: 1 to 2 allows RS232, 2 to 3 allows RS485 1 to 2

W7 RxD input: 1 to 2 allows RS232, 2 to 3 allows RS485 1 to 2

W8 RxD- input: 1 to 2 selects RS232, 2 to 3 selects RS485 1 to 2

W9 When installed, provides RxD- and RxD+ terminator for RS485 1Removed

W10 When installed, connects TxD+ to RxD+ input for RS485 half duplex Removed

W11 When installed, allows RS485 TxD+ output Removed

W12 1 to 2 enables RS485 outputs RTSD+ / RTSD- and TxD+ / TxD-, 2 to 3 allows enabling by RTSD output

Removed

W13 When installed, provides RTSD- and RTSD+ RS485 terminator 1Removed

W14 Installed it provides RTSD+ output to CTSD+ input for RS485 half duplex Removed

W15 Installed only where laser is not used for Horiz. Wafer Protrude Sensor Removed

W16 RTSD- output: 1 to 2 selects RS232, 2 to 3 selects RS485 1 to 2

W17 CTSD- input: 1 to 2 selects RS485, 2 to 3 selects RS232 2 to 3

W18 Installed it connects RTSD- output to CTSD+ input for RS485 half duplex Removed

W19 When installed, allows RTSD+ output for RS485 Removed



Jumper Post Configurationsa

W20 When installed, provides TxD- and TxD+ terminator for RS485 1Removed

W21 When installed, provides CTSD- and CTSD+ terminator for RS485 1Removed

W22 When installed, selects voltage for J10 opto-receivers: 1 to 2 selects external dc voltage, 2 to 3 selects internal +5v

1 to 2

W23 When installed, selects polarity for Encoder Channel A signal 2 to 3 *(Hardwired)*

W24 When installed, selects polarity for Encoder Channel B signal 2 to 3 *(Hardwired)*

W25 When installed, selects polarity for Encoder Index signal 2 to 3 *(Hardwired)*

W26 When installed, connects Indexer Digital GND to J10 pins 20 & 21 NOTE: Only required if W22 installed is across 2 and 3

Removed

W27 1 to 2 selects spare opto input, 2 to 3 selects spare SW3 input NOTE: Future system feature and presently not functional

1 to 2 *(Hardwired)*

W28 1 to 2 selects Horiz. Reflective Sensor, 2 to 3 enables spare debounce input. NOTE: Future system feature and presently not functional

1 to 2 *(Hardwired)*

W29 1 to 2 allows one time brake selection, 2 to 3 allows brake selection any time 1 to 2

W30 When jumpered, +5vdc supplied to parallel port (J10) on pins 1 and 13 Removed

W33 1 to 2 controls laser via software, 2 to 3 laser is on continually 1 to 2

W34 Ties together “Power Fault” with “Over current” lines Removed

W35 Connects “Power Fault” LED lamp 1 to 2

W36 Selects over current limit for Pod lock motor. 2 to 3

W37 Over current/temp sensing. 1 to 2 for digital logic, 2 to 3 for analog signal 1 to 2

W38 Selects over current limit for Pod lock motor. Jumper is removed for VersaPort.

Removed

W101 Connects address line A18 to EPROM. If OPEN 256K bytes are addressable. When SHORTED 512K bytes are addressable.

Open

W102 Connects address line A17 to SRAM. If OPEN 128K bytes are addressable. When SHORTED 256K bytes are addressable.

Open

W103 For flash PROMs. Open

W104 Watchdog strobe line. OPEN only during ICT. Shorted

W105 Watchdog timer delay. OPEN provides 600ms delay. SHORTED provides 150ms delay.

Open

W106 Overcurrent disable for pod lock motor. When OPEN overcurrent protection is enabled. When SHORTED overcurrent protection is disabled.

Open

W107 Fan tachometer. OPEN disables pull up resistor. SHORTED enables 20K ohm resistor.

Open

TABLE 8 VersaPort Control Interface Circuit Board - Dual PCB Style (Continued)




TABLE 9 VersaPort Piggyback Circuit Board Jumper Post

TABLE 10 Versaport Control Interface Circuit Board - Single PCB Style

W108 IR Sensor ON/OFF circuit. Connecting 1 to 2 will turn on/off 24V devices. Connecting 2 to 3 will turn on/off 5V devices.

1 to 2

W109 Internal/External photoelectric sensor input. Connecting 1 to 2 uses remote sensor. Connecting 2 to 3 uses on board Banner MPC3 amplifier unit.

2 to 3

J1 Remote sensor. Connecting 1 to 2 disables sensor input. If sensor is connected all three pins are used.

1 to 2

1. Install the terminator for RS485 if VersaPort is the first or last device on the network chain.

Function Jumpers As Shipped

W1 No function Removed

W2 Install only for 256K byte RAM at U11 Removed

W3 Install 1 to 2 for 128K/ 256K byte (+5v) FLASH Memory, otherwise leave jumper off

Removed

W4 Installed for normal operation. Removed only for troubleshooting Installed

W5 Removed for 600 msec. Watchdog Timer delay. Installed for 150 msec. Watchdog timer delay

Removed (Not User Selectable)

Function Jumpers As Shipped

W101 Connects address line A18 to EPOM. If open, 256k bytes are addressable. When shorted, 512k bytes are addressable.

Removed

W102 Connects address line A17 to SRAM. If open, 128k bytes are addressable. When shorted, 256K bites are addressable.

Removed

W103 For use with flash proms. Connecting 1 and 2 allows address line A18 to be used for a 512k byte flash prom. Connecting 2 and 3 allows the flash to be written to (programmed).

Removed

W104 Watchdog strobe line. Installed for normal operation. Removed only for troubleshooting

Installed

W105 Watchdog timer delay. Open provides 600 msec. Installed provides 150 msec delay.

Removed

W108 Laser on/off circuit for remote sensor heads. Connecting 1 and 2 provides turn on/off for 24V devices. Connecting 2 and 3 provides turn on/off for 5V devices.

Installed on pins 1and 2

TABLE 8 VersaPort Control Interface Circuit Board - Dual PCB Style (Continued)




Jumper Post Configurationsa
W109 Internal/external photoelectric sensor input. Connecting 1 and 2 uses
remote sensor. Connecting 2 and 3 uses on board banner MPC3 amplifier unit.

Installed on pins 2 and 3

W22 Shorted for E-84 applications, for parallel port communications or for interlock applications. It is also shorted if the host does not supply power to J10 pins 1 or 13.It is open if the host does supply power to J10 pins 1 or 13.

See note

W28 Input signal 2pa7. when connecting 1 and 2, input signal comes from DAC3 and this signal is used for IRQ3. Connecting 2 and 3 uses the input from J26-J28. This input is debounced and can be used for connecting mechanical switches.


W106 Over current disable for Pod Lock Motor. When open, over current protection is enabled. When shorted, current protection is disabled.

Removed

W36 Works in conjunction with W38 to provide current limit protection to the Pod Lock Motor. When connecting 1 and 2, the motor is limited for 700ma current. When connecting 2 and 4, the motor is limited to 1.4 amps current.


W38 Works in conjunction with W36 to provide current limit protection to the pod lock motor. When open, the motor is limited to 700ma current. When shorted the motor is limited to 1.4 amps current.

Removed

W107 Fan Tachometer input. Open disables pull up resistor, shorted enables 20k ohm pull up resistor.

Removed

J1 Remote sensor. Connecting 1 and 2 disables sensor input. If remote sensor is used, all three pins would be connected to the external cable.





a
Chapter 4: Service
This chapter describes service requirements and procedures for the Asyst Technologies VersaPort.

Service procedures are step-by-step actions taken to perform a particular service routine. The service routines discussed in this section fall within three categories:

• Preventive service procedures (PSP).

• Calibration/Alignment procedures (CAP).

• Corrective service procedures (CSP).

Safety RequirementsWarnings and cautions are used throughout PSPs, CAPs and CSPs to identify potential hazards to personnel and equipment respectively.

NOTE . . .

BEFORE PERFORMING ANY SERVICE OR ADJUSTMENTS TO THE VERSAPORT, TECHNICIANS SHOULD BE FAMILIAR WITH ALL SAFETY INFORMATION PROVIDED IN THE SAFETY SECTION AT THE BEGINNING OF THIS MANUAL.

All warnings and cautions immediately precede the step or operation in which the hazardous condition may be encountered. All personnel involved in service on Asyst equipment must fully understand warnings, cautions, and all general safety regulations associated with electromechanical equipment. The following general precautions should be observed by all personnel when working with any electro-mechanical equipment:

General Safety• Do not allow unauthorized or inexperienced personnel to operate the VersaPort.

• Ensure that another person, aware of work in progress, is in the area to provide assistance in event of injury.

• Remove any spilled materials immediately to prevent accidents.

GENERAL HAZARD

CAUTION

USAGE OF ISIM CAN PUT THE LOAD PORT IN AN UNSAFE MODE FOR OPERATORS, AS INTERLOCKS CAN BE DISABLED. LASER EXPOSURE HAZARDS AND PINCH HAZARDS MAY BE


VersaPort 2200 Technical ManualChapter 4: ServiceTool Requirements a

PRESENT. PERSONNEL SHOULD BECOME THOROUGHLY FAMILIAR WITH ALL ASPECTS OF SAFETY FOR INDIVIDUALS AND EQUIPMENT PRIOR TO USING ISIM TO OPERATE THIS EQUIPMENT.

Electrical Safety• Do not bypass electrical interlocks or safety devices unless specifically required

within a procedure.

• Remove power from the VersaPort prior to performing any service procedure.

• Remove power from the VersaPort prior to removing or inserting electrical connectors.

• Remove metal jewelry such as rings, chains, and watches.

• Stand on dry insulating mats when working with energized electrical equipment.

• Ensure that all test equipment and accessory electrical units are grounded to facility ground.

Mechanical Safety• Pinch hazards exist when the VersaPort is in service mode. Ensure that fingers

are not placed in the path of moving mechanical components when the VersaPort is operating.

• If the VersaPort is removed from the Process Tool, make sure the VersaPort is placed in a stable condition before servicing.

Chemical SafetyEnsure that any cleaning chemicals with vapors are used in a well-ventilated area. Avoid skin contact with chemicals and avoid inhaling vapors.

ESD Precautions

When working with electronic circuit boards, ensure that ESD safety precautions be followed to prevent component malfunction or loss of data.

Tool RequirementsService tasks require commonly available tools in order to be performed. A list of the tools required is included with each procedure.

Some service tasks require special tools which may be purchased from Asyst Technologies. Contact Asyst customer support for any special tool requirements defined in procedures.


VersaPort 2200 Technical ManualChapter 4: Service

Notes on Removing and Replacing VersaPorta
Notes on Removing and Replacing VersaPort
It is not always necessary to remove the VersaPort from the Host Tool for servicing. See specific procedure for details. When removing the VersaPort from the Host Tool, the Host Tool owner should be involved with the removal process, as he/she will be familiar with the configuration of the Tool.

The removal process for a Platform Mount VersaPort will vary depending on the Tool’s configuration, but will include removing mounting hardware from the leveling rods and moving the VersaPort away from the Host Tool to disengage the Block Guide from the Guide Pin.

The removal process for a BOLTS Interface VersaPort will vary depending on the Tool’s configuration, but will include removing the clamping knobs and disengaging the mounting socket from the mounting ball of the Host Tool.

For replacing the VersaPort to the Host Tool, refer to the appropriate VersaPort Installation Manual (PN 2000-1253-XX for Platform Mount, 2000-1276-XX for BOLTS Interface).


VersaPort 2200 Technical ManualChapter 4: ServicePreventive Service Procedures a
Preventive Service Procedures
Verify the DAC values of the port plate laser system every three to six months (depending on cycles) to ensure the system is properly aligned. Perform Verify DAC Values procedure beginning next page.

At the same time, visually inspect the VersaPort to ensure no components are out of alignment and there is no sign of undue wear. If adjustments are required, refer to the applicable Calibration/Alignment Procedure to resolve the problem.

This section lists the VersaPort preventative maintenance tasks.

Description

“PSP1 – Verify Laser Sensor DAC Values” on page 61



PSP1 – Verify Laser Sensor DAC Valuesa
PSP1 – Verify Laser Sensor DAC Values
NOTE . . .

THIS PROCEDURE MUST ONLY BE PERFORMED BY A SERVICE ENGINEER QUALIFIED TO ALIGN LASER SYSTEMS AND AWARE OF LASER SAFETY PRACTICES.

WARNING

LASER HAZARDLASER RADIATION IS PRESENT WHEN POWER IS APPLIED AND INTERLOCK DEFEATED. ISIM MANUAL MODE OPERATION WILL EXPOSE THE SERVICE TECHNICIAN TO LASER RADIATION. AVOID DIRECT EYE EXPOSURE TO BEAM.

Verify DAC Values and Operation_____1. Connect a PC with null modem cable to the Host port of the VersaPort.

Connect 24vdc power. Use ISIM software to test the operation of the VersaPort. For information on using the software, see “Appendix A: ISIM” on page 123.

_____a. From the Main menu select F9 (SMIF OPTION). Use the arrow keys to select LPO/VersaPort and press Enter.

_____b. From the Main menu select F2 (MANUAL).

_____2. Check the DAC values for all three sensors individually. Verify they are all less than or equal to 30.

_____a. Press F4 (DAC). Use the arrow keys to select Sensor Alignment and press Enter. Use the arrow keys to select Wafer Sensor and press Enter. A window will display the DAC value. Press F4 to stop calibration.

_____b. Repeat Step 2a process to choose F4, Sensor Alignment, then select Slot Sensor and read DAC value. Press F4 to stop calibration.

Other MaterialPC compatible computer running ISIMNull-modem communications cable


VersaPort 2200 Technical ManualChapter 4: ServicePSP1 – Verify Laser Sensor DAC Values a

_____c. Repeat Step 2a to choose F4, Sensor Alignment, then select Protrude Sensor and read DAC value. Press F4 to stop calibration.

If all DAC values are less than 30, the laser system is properly aligned. If values are not less than or equal to 30, perform CAP “CAP1 – Align Laser Detector System” on page 64.

_____3. With all DAC values less than or equal to 30, return the VersaPort to the Home position.

WARNING

MECHANICAL HAZARDA PINCH HAZARD EXISTS AT THE PORT PLATE AS IT LOWERS TO THE PORT DOOR. KEEP HANDS AWAY FROM THE PORT PLATE PATH.

A PINCH HAZARD MAY EXIST AT THE BOTTOM OF THE MINIENVIRONMENT WHEN THE PORT PLATE REACHES THE HOME POSITION. KEEPS HANDS AWAY FROM THE MINIENVIRONMENT PATH.

_____a. Place the Alignment Tool back on the port door.

_____b. Select F10 (MAIN) Menu

_____c. From the MAIN Menu select F1 (AUTO).

_____d. From the AUTO menu select F2 (HOME). The port plate returns to the Home position

_____4. Close the ISIM software program;

_____a. From the Main menu select F8 (EXIT)

_____b. Use the arrow keys to select Yes and press Enter.

_____5. Remove the Alignment Tool from the port door.

_____6. Remove 24 vdc power and communications cable from the VersaPort.

_____7. Replace the Host communication cable and 24vdc power.

_____8. Replace the connector panel cover.



PSP1 – Calibration/Alignment Proceduresa
Calibration/Alignment Procedures
Calibration and Alignment is regularly scheduled service or service required after corrective service procedures have been performed.

This section lists procedures to be performed on an as-needed basis.

Description

“CAP1 – Align Laser Detector System” on page 64

“CAP2 – Align Excessive Wafer Protrusion Sensor, Vertical View” on page 76

“CAP3 – Align Wafer Seater Mechanism” on page 81

“CAP4 – Calibrate Shuttle Homing Offset” on page 87

“CAP5 – Align Pod Hold Down Latches” on page 92

“CAP6 – Align Pod-In-Place Switch” on page 94


VersaPort 2200 Technical ManualChapter 4: ServiceCAP1 – Align Laser Detector System a
CAP1 – Align Laser Detector System
Pre-Service

NOTE . . .

1. THIS PROCEDURE MUST ONLY BE PERFORMED BY A SERVICE ENGINEER QUALIFIED TO ALIGN LASER SYSTEMS AND AWARE OF LASER SAFETY PRACTICES.2. LASER BEAM ALIGNMENT MAY BE PERFORMED WITH THE VERSAPORT MOUNTED TO THE PROCESS TOOL. IF THERE IS NOT ENOUGH ACCESS TO THE VERSAPORT, THE VERSAPORT SHOULD BE REMOVED TO A SUITABLE SERVICE LOCATION. OTHERWISE, SIMPLY REMOVE THE MINIENVIRONMENT SHIELD.

Remove Minienvironment_____1. Remove the outer shields of the minienvironment by loosening the four screws

at the top of the port plate. Do not remove screws.

CAUTIONTHE MINIENVIRONMENT CAN BE EASILY DAMAGED BY MIS-HANDLING. USE CAUTION WHEN REMOVING AND REPLACING THE MINIENVIRONMENT.

_____2. The minienvironment is attached to the port plate in a track just below the plate’s top edge. Grab the minienvironment at both sides and gently pull away from the port plate. Hold both pieces of the shield to avoid the inner shield falling as the minienvironment is removed. Set the minienvironment aside.

_____3. Loosen the two captive Phillips screws securing the connector cover panel to the VersaPort base. Set cover aside. Disconnect power, communications, and ground cable from the VersaPort.

ToolsAllen wrench (or hex driver), 0.050 inchAllen wrench (or hex driver), 5/64 inchScrewdriver, Phillips, No. 1 tip




CAP1 – Align Laser Detector Systema
Service
WARNING

LASER HAZARDLASER RADIATION IS PRESENT WHEN POWER IS APPLIED AND INTERLOCK DEFEATED. ISIM MANUAL MODE OPERATION WILL EXPOSE THE SERVICE TECHNICIAN TO LASER RADIATION. AVOID DIRECT EYE EXPOSURE TO BEAM.

Adjust Laser Beam Orientation_____1. Connect a PC with null modem cable to the Host port of the VersaPort.



_____2. The VersaPort should be at a height that allows access to the laser bracket mounted to the bottom of the port plate. Raise the port plate;

_____a. From the Main menu select F2 (MANUAL).

_____b. From the Manual menu select F5 (GOTO POS)

_____c. At the dialog box, enter “10” on the Target Pos (inch) line. Press Enter three times to accept Speed and Acceleration values and raise the port plate ten inches.

_____3. Verify the laser beam is properly oriented to the sensor:

_____a. From the MANUAL Menu select F4 (DAC).

_____b. From the DAC Menu, use the arrow key to select Sensor Alignment.

_____c. From the SENSOR ALIGNMENT Menu, use the arrow key to select Wafer Sensor.



_____4. Insert a white sheet of paper into the laser beam path in front of the cassette slot and wafer sensor apertures (See Figure 19). Observe the beam orientation. The beam emitted from the laser is oval. The elongated part of the beam must be parallel with the orientation of the wafers (see Figure 20).

_____5. If the laser beam is not parallel to the wafers, continue with the next step to align the beam. If the laser is properly orientated, proceed to Wafer Sensor Beam Adjustment.

FIGURE 19 Laser Detector System (bottom view)

FIGURE 20 Laser Beam Orientation

Laser Diode

Wafer Protrusion Sensor

Mirrors and Beamsplitters (inside cover)

Wafer Excessive Protrusion Sensor

Wafer Seater Mechanism

Laser Bracket Cover

Wafer Presence Sensor

Cassette Slot Sensor

Beam Oval-shaped



_____6. At the laser diode, use a 5/64 Allen wrench to loosen the screw securing the
laser clamping bracket.

_____7. Gently grip the rear portion of the laser diode body. Insert the paper into the laser beam path in front of the cassette slot and wafer sensor apertures and rotate the laser diode in the clamping bracket until beam is parallel to the wafer slot.

_____8. With the beam correctly orientated, secure laser by tightening the clamping bracket Allen screw. Verify that the parting line on the laser diode is visible at the clamping bracket.

Adjust Wafer Sensor Beam

WARNING

LASER HAZARDLASER RADIATION PRESENT WHEN POWER APPLIED AND INTERLOCK DEFEATED. AVOID DIRECT EYE EXPOSURE.

_____1. Using ISIM software, at the PC (if not already done):

_____a. From the MANUAL Menu select F4 (DAC).


_____c. From the SENSOR ALIGNMENT Menu, use the arrow key to select Wafer Sensor.

_____2. Wait for the software message from the VersaPort. The message should read:Sensor calibration in progress: WAFERAdjust sensor by turning the hex screw until threshold is <30Press F4 key to stop calibrationDAC #0 threshold = xx

(where xx is the DAC threshold value of the sensor and it could range anywhere from 0 to 255. Where 0 is the theoretical best signal and 255 is no signal).

FIGURE 21 Laser Bracket Assembly

AdjustmentScrews (2)

Position laser flushwith edge of bracket

Beam splitter Clamping BracketCorner Mirror

Wafer ProtrusionMirror

Screws w/springs (2)Adjustment Screws (2)

SlideBracket



WARNING

LASER HAZARDLASER ADJUSTMENT SCREWS ARE LOCATED CLOSE TO CRITICAL MIRRORS AND BEAM SPLITTERS. USE CAUTION. DO NOT SCRATCH OR MIS-ALIGN MIRRORS OR BEAM SPLITTERS.

The DAC threshold value (xx) needs to be as small as possible. If the displayed value is less than or equal to 30, proceed to the Slot Sensor Beam Adjustment.

If the displayed DAC threshold value is greater than 30, align the angle of the beam splitter which directs the laser beam onto the wafer-position sensor aperture.

_____3. Use a 0.050 inch Allen wrench to adjust the beam by slightly turning the adjustment screws- not the screws with spring (See Figure 21 for correct screw). Visually verify that the laser beam is hitting directly on the center of the wafer sensor aperture.

NOTE . . .

IF THE ADJUSTMENT SCREWS ARE TIGHT AND THE BEAM DOES NOT MOVE, LOOSEN THE TWO SCREWS WITH SPRINGS ATTACHED APPROXIMATELY ONE-QUARTER TURN.

_____4. Adjust the beam until the PC displays a threshold value less than or equal to 30.

_____5. Tighten the bottom screw with spring until the spring coils touch, as shown in the center image of Figure 22. Do not over-tighten screw.

_____6. Check the DAC value again. If it is greater than 30, readjust the beam position using the adjustment screws.

FIGURE 22 Spring Tension

Spring coils crushedand bulging. Screw too tight.

Spring coils touching.Screw snug.

Spring coils open.Screw too loose.

Wrong WrongCorrect



_____7. When the DAC value is less than or equal to 30 (and the bottom screw with
spring is tight) tighten the top screw with spring. Check the DAC value again and verify it is less than or equal to 30.

_____8. At the PC, press the F4 key to stop calibration.

Adjust Slot Sensor Beam

WARNING


_____1. At the PC:

_____a. From the MANUAL Menu select F4 (DAC)


_____c. From the SENSOR ALIGNMENT Menu, use the arrow key to select Slot Sensor.

_____2. Wait for the message from the VersaPort. The message should read:Sensor calibration in progress: SLOTAdjust sensor until threshold is <30Press F4 key to stop calibrationDAC #1 threshold = xx

(where xx is the DAC threshold value of the sensor and it could range anywhere from 0 to 255.)

The DAC threshold value (xx) needs to be as small as possible. If the displayed value is less than or equal to 30, proceed to Wafer Protrusion Sensor Adjustment.

If the displayed DAC threshold value is greater than 30, adjust the angle of the beam splitter which directs the laser beam onto the cassette slot-sensor aperture (see Figure 19 on page 66).

_____3. Use a 0.050 inch Allen wrench to adjust the beam by slightly turning the adjustment screws (See Figure 21 on page 67 for correct screw). Visually verify that the laser beam center is hitting directly on the center of the slot sensor aperture.

NOTE . . .




_____4. Adjust the beam until the PC displays a threshold value less than or equal to 30.

_____5. Tighten the lower screw with spring until the spring coils touch, as shown in the center image of Figure 22 on page 68. Do not over-tighten screw.

_____6. Check the DAC value again. If it is greater than 30, readjust the beam position using the adjustment screws.

_____7. When the DAC value is less than or equal to 30 (and the bottom screw with spring is tight) tighten the top screw with spring. Check the DAC value again and verify it is less than or equal to 30.

_____8. At the PC, press the F4 key to stop calibration.

Adjust Corner Mirror

WARNING


_____1. If the laser beam is properly aligned as in Figure 23 below, proceed to “ Adjust Wafer Protrusion Sensor” on page 71. Otherwise, proceed to Step 2.

_____2. Use a 0.050-inch Allen wrench to turn the corner mirror adjustment screws so the laser beam is visually centered in the Wafer Protrusion Mirror as shown in Figure 23. If the adjustment screws are tight and the beam does not move, loosen the springs with screws one-quarter turn.

NOTE . . .


FIGURE 23 Mirror adjustment

LaserBeam

Wrong WrongCorrect

LaserBeam

LaserBeam

Protrusion Mirror Bracket



_____3. When the beam is centered in the wafer protrusion mirror, tighten the bottom
screw with spring until the coils just touch (see Figure 21 on page 67). Do not over-tighten.

_____4. Check to see that the beam is still centered on the protrusion mirror. If necessary, adjust the beam again using the two adjustment screws- not the screws with spring.

_____5. Tighten the top screw with springs until the coils just touch.

_____6. Check again to verify the beam is still centered on the protrusion mirror. If necessary, make any small adjustments with the two adjustment (non-springed) screws. Loosen the springed screws and repeat the adjustment if beam is not centered on wafer protrusion mirror.

_____7. Verify both bottom and top screws with springs are tight.

Adjust Wafer Protrusion Sensor

WARNING


_____1. At the PC:

_____a. From the MANUAL Menu select F5 (GOTO POS).

WARNING

MECHANICAL HAZARDA PINCH HAZARD EXISTS AT THE PORT PLATE AS IT LOWERS TO THE PORT DOOR. KEEP HANDS AWAY FROM THE PORT PLATE PATH

_____b. At the Target Pos (inch) line, enter 2.8. Press Enter three times to accept the Speed and Acceleration values and move the port plate to a position 2.8 inches above the port door.

_____2. Select F4 (DAC menu). Use the arrow keys to select Sensor Alignment and press Enter.

_____3. From the SENSOR ALIGNMENT Menu, use the arrow key to select Protrude Sensor.



_____4. Wait for the message from the VersaPort. The message should read:Sensor calibration in progress: PROTRUDEAdjust sensor until threshold is <30Press F4 key to stop calibrationDAC #2 threshold = xx

(where xx is the DAC threshold value of the sensor and can range anywhere from 0 to 255.)

_____5. If the displayed value is less than 30, no further adjustment of the wafer protrusion sensor is necessary.

_____6. If the displayed DAC threshold value is 30 or greater, the beam is not contacting the wafer protrusion sensor. Continue with the steps below.

Adjust Mirrors_____1. Verify the Laser Beam is approximately centered in the Protrusion Mirror, as

shown in Figure 23 on page 70.

NOTE . . .


_____2. Tighten bottom screw with spring until the screw is tight and the spring coils touch. Do not over-tighten.

_____3. Verify that the beam is still aligned to the wafer protrusion sensor. Turn the adjustment screws if required.

_____4. With the beam centered and the bottom screw with spring tight, tighten the top screw with spring until the screw is tight and the spring coils touch. Do not over-tighten.

_____5. Verify again that the beam is still aligned to the wafer protrusion sensor. If it is not, make any small adjustments necessary by turning the adjustment screws only.



Adjust Protrusion Mirror _____1. Use a 0.050-inch Allen wrench to adjust Wafer Protrusion Mirror adjustment
screws. Visually verify that the laser beam is hitting directly on the center of the wafer protrusion sensor.

NOTE . . .


_____2. Adjust the Wafer Protrusion Mirror screws to align the beam onto the Protrusion Sensor. The DAC value displayed must be less than 30.

_____3. When the beam is centered on the Alignment Tool slot nearest to the Protrusion Mirror and the Wafer Protrusion DAC value is less than 30, tighten bottom screw with spring until the screw is tight and the spring coils touch. Do not over-tighten.

_____4. Check DAC value again. If it is 255, repeat the mirror adjustments.

_____5. If the DAC value is less than 30 and the beam is centered on the Alignment Tool, tighten the top screw with spring until the screw is tight and the spring coils touch. Do not over-tighten.

_____6. Check DAC value again. If the DAC value is less than 30 and both screws with springs are tight, continue.

_____7. If the DAC value is 255, loosen the top springed screw and use the adjustment screws to lower the DAC value below 30. Tighten the top springed screw after adjustment.

Verify DAC Values and Operation

NOTE . . .

REPLACE THE LASER BRACKET COVER IF IT WAS REMOVED TO ADJUST THE MIRRORS. ALL DAC VALUES MUST BE VERIFIED AFTER COVER IS MOUNTED.

_____1. With the Alignment Tool removed, check the DAC values for all three sensors individually. Verify they are all less than 30. If necessary, use adjustment screws to align beamsplitters or mirrors as described previously while the DAC value is displayed. It should not be necessary to adjust screws with springs.

_____2. Press F4 (DAC). Use the arrow keys to select Sensor Alignment and press Enter. Use the arrow keys to select Wafer Sensor and press Enter. A window will display the DAC value. Press F4 to stop calibration.



_____3. Repeat Step 2 process to choose F4, Sensor Alignment, then select Slot Sensor and read DAC value. Press F4 to stop calibration.

_____4. Repeat Step 2 to choose F4, Sensor Alignment, then select Protrude Sensor and read DAC value. Press F4 to stop calibration.

_____5. With all DAC values less than or equal to 30, return the VersaPort to the Home position.

WARNING

MECHANICAL HAZARDA PINCH HAZARD EXISTS AT THE PORT PLATE AS IT LOWERS TO THE PORT DOOR. KEEP HANDS AWAY FROM THE PORT PLATE PATH.

A PINCH HAZARD MAY EXIST AT THE BOTTOM OF THE MINIENVIRONMENT WHEN THE PORT PLATE REACHES THE HOME POSITION. KEEPS HANDS AWAY FROM THE MINIENVIRONMENT PATH.

_____a. Select F10 (MAIN) Menu

_____b. From the MAIN Menu select F1 (AUTO).

_____c. From the AUTO menu select F2 (HOME). The port plate returns to the Home position

_____6. Place a Pod with cassette on the port and Autocycle the VersaPort to verify operation;

_____a. From the MAIN Menu select F1 (AUTO).

_____b. From the AUTO menu select F9 (AUTOCYCLE).

_____c. If the VersaPort cycles properly, stop the Autocycle function by pressing F9 again. The VersaPort will complete a cycle and stop at Home.

_____d. Remove the Pod. Press F10 to return to the MAIN Menu.

_____7. Raise the VersaPort a minimum of four inches to allow access to the connector panel cover after the VersaPort is mounted to the Process Tool.

_____a. From the MAIN Menu select F2 (MANUAL).

_____b. From the MANUAL Menu select F5 (GOTO POS).

_____c. At the dialog box, select the Target Pos (inch) line and type 4, then press Enter three times, to accept Speed and Acceleration values and raise the port plate.

_____8. Close the ISIM software program;

_____a. From the Main menu select F8 (EXIT)

_____b. Use the arrow keys to select Yes and press Enter.



_____9. Remove 24 vdc power and communications cable from the VersaPort.
Post-Service_____1. If necessary, return the VersaPort to the Process Tool.

_____2. Reinstall the minienvironment shield.

_____3. The procedure is complete when the VersaPort has been remounted to the Process Tool—with the minienvironment reinstalled—and has been Autocycled ten times.


VersaPort 2200 Technical ManualChapter 4: ServiceCAP2 – Align Excessive Wafer Protrusion Sensor, Vertical View a
CAP2 – Align Excessive Wafer Protrusion Sensor,
Vertical View

Pre-Service

NOTE . . .

THE EXCESSIVE WAFER PROTRUSION SENSOR POTENTIOMETER IS PROPERLY ADJUSTED WHEN THE LED ON THE CONNECTOR PANEL BLINKS APPROXIMATELY TWO TIMES PER SECOND AT THE STAGE POSITION.

NOTE . . .

1. THIS PROCEDURE MUST ONLY BE PERFORMED BY A SERVICE ENGINEER QUALIFIED TO ALIGN LASER SYSTEMS AND AWARE OF LASER SAFETY PRACTICES.2. EXCESSIVE WAFER PROTRUSION SENSOR ALIGNMENT MAY BE PERFORMED WITH THE VERSAPORT MOUNTED TO THE PROCESS TOOL. IF THERE IS NOT ENOUGH ACCESS TO THE VERSAPORT, THE VERSAPORT SHOULD BE REMOVED TO A SUITABLE SERVICE LOCATION. OTHERWISE, SIMPLY REMOVE THE MINIENVIRONMENT SHIELD.

Remove minienvironment_____1. Remove the outer shields of the minienvironment by loosening the four screws


ToolsAllen wrench (or hex driver), 0.050 inchAllen wrench (or hex driver), 5/64 inchScrewdriver, Phillips, No. 1 tip




CAP2 – Align Excessive Wafer Protrusion Sensor, Vertical Viewa




Service_____1. Connect a PC with null modem cable to the Host port of the VersaPort.



_____2. Place a SMIF-Pod and cassette with at least one product-type test on the VersaPort port plate.

_____3. Command the VersaPort to raise to the Stage position to allow sensor adjustment:

NOTE . . .

THE VERSAPORT SOFTWARE MAY PERFORM A HOMING CALIBRATION BEFORE MOVING THE VERSAPORT TO THE STAGE POSITION.


_____b. From the AUTO Menu select F1 (STAGE).



_____4. Place a wafer by hand directly under the excessive protrusion sensor (see Figure 24).

_____5. Command the VersaPort to return Home, select F2 (Home) from the AUTO Menu.

The wafer should block the receiver sensor and the VersaPort should halt. An Excessive Wafer Out error message should be displayed on the PC.

_____6. Reset the error. Select F10 (MAIN Menu), then F2 (MANUAL) and F8 to (CLEAR ERROR)

_____7. If the VersaPort detected the wafer, no alignment is necessary. Select F10 (MAIN Menu), then F1 (AUTO) and F2 (HOME) to return the VersaPort to home. Disconnect the PC. If the VersaPort did not halt, proceed with the Service section below.

ServiceThe potentiometer is properly adjusted when the LED on the connector panel blinks approximately two times per second at the stage position.

FIGURE 24 Wafer Excessive Protrusion Sensor

Wafer Excessive Protrusion Sensor



CAP2 – Align Excessive Wafer Protrusion Sensor, Vertical Viewa
_____1. Check the LED at the connector panel to determine the blink rate.
If the light is blinking more than two times per second, decrease amplifier sensitivity by turning the potentiometer screw counter-clockwise. Increase sensitivity by turning screw clockwise

_____2. Adjust the screw until the light blinks approximately two times per second.

_____3. With a Pod on the port door, slide a wafer out of the cassette far enough to block the excessive protrusion sensor. The LED should be off.

_____4. Repeat Pre-service Steps 3 and 4 to test the sensor. Adjust the potentiometer screw if necessary.

_____5. If screw adjustment does not correct the problem, troubleshoot the sensor circuitry or sensor placement (alignment).

_____6. Autocycle the VersaPort to verify operation;


_____b. From the AUTO menu select F9 (AUTOCYCLE).

_____c. If the VersaPort cycles properly, stop the Autocycle function by pressing F9 again. The VersaPort will complete a cycle and stop at Home.

_____d. Press F10 to return to the MAIN Menu.

_____7. Remove the SMIF-Pod. Raise the VersaPort ten inches to allow cable connection when remounting to the Process Tool:

_____a. At the Main Menu, select F2 (MANUAL).

_____b. From the Manual menu, select F5 (GOTOPOS).

_____c. At the dialog box, enter “10” on the Target Pos (inch) line. Press Enter three times to accept Speed and Acceleration values and raise the port plate ten inches.



FIGURE 25 Excessive Protrusion Sensor

Adjustment Screw






CAP3 – Align Wafer Seater Mechanisma
CAP3 – Align Wafer Seater Mechanism
Pre-Service

NOTE . . .

WAFER SEATER MECHANISM ALIGNMENT MAY BE PERFORMED WITH THE VERSAPORT MOUNTED TO THE PROCESS TOOL. IF THERE IS NOT ENOUGH ACCESS TO THE VERSAPORT, THE VERSAPORT SHOULD BE REMOVED TO A SUITABLE SERVICE LOCATION. OTHERWISE, SIMPLY REMOVE THE MINIENVIRONMENT SHIELD.






Tools

Allen wrench (or hex driver), 1/16 inchAllen wrench (or hex driver), 5/64 inchAllen wrench (or hex driver), 3/32 inchScrewdriver, Phillips, No. 2

Other Material

Loctite 222 adhesiveSMIF Pod with cassette and test waferPC compatible computer running ISIMNull-modem communications cable


VersaPort 2200 Technical ManualChapter 4: ServiceCAP3 – Align Wafer Seater Mechanism a

Service_____1. Use a 3/32 inch Allen wrench to remove the two screws that secure the

Process Tool shroud and port plate cover. Remove the shroud, cover and screws and set aside.

_____2. Connect a PC with null modem cable to the Host port of the VersaPort. Connect 24vdc power. Use ISIM software to test the operation of the VersaPort. For information on using the software, see “Appendix A: ISIM” on page 123.


_____3. Place a Pod with cassette and test wafer in slot 25 on the port plate. Raise the port plate nine inches to position slot 25 in front of the wafer seater;

_____a. From MAIN menu select F2 (MANUAL)

_____b. From MANUAL menu select F5 (Goto Pos)

_____c. At the dialog box, in Target Pos” field, type 9 and press Enter three times to raise the port plate.

_____4. At the top, Process Tool side of the port plate, ensure Sensor PC board is positioned with edge parallel to port plate (see Figure 26). Adjust, if necessary by loosening two Phillips screws and aligning PC board. Tighten screws.

FIGURE 26 Wafer Seater Mechanism, top view

PORT PLATECOVER

SENSOR PC BOARD(with Allen screws)

EDGES PARALLEL

MOTOR LEADSCREW(Points to tapped holein port plate)

TAPPED HOLE



_____5. Use a 5/64 inch Allen wrench to loosen- but not remove- two actuator arm set
screws (see Figure 27).

_____6. Use ISIM to move the wafer seater mechanism out, then back to Home to ensure that the seater motor is at the Home position;

_____a. From MAIN MENU, select F2 (MANUAL).

_____b. From MANUAL Menu select F6 (DC MOTOR).

_____c. From the DC Motor submenu, use arrow keys select SEATER OUT and press Enter.

_____d. From MANUAL Menu select F6 (DC MOTOR).

_____e. From the DC Motor submenu, use arrow keys to select SEATER IN and press Enter.

_____7. Use a Phillips screwdriver to loosen- but not remove- the two screws securing the wafer seater motor to the port plate. Rotate the motor counter-clockwise until resistance is felt, then move back clockwise a few degrees. Tighten screws.

_____8. Repeat the Seater Out / Seater In step above to establish new motor Home position.

_____9. At the bottom of the port plate, push the wafer seater arm into the laser bracket cover until it contacts the back of the port plate. Pull seater arm away from port plate to provide 0.30 to 0.50 clearance between the seater roller and

FIGURE 27 Wafer Seater Mechanism, side view

SHAFT ON ACTUATOR ARMACTUATOR ARM

WAVY WASHER UNDER ACTUATOR ARM

LASER BRACKET

Push up on seater arm so arm is notrubbing on laser bracket.WAFER SEATER ARM

Push down on actuator arm slightly while alsopushing up on seater arm to preload wavy washer



port plate (see Figure 28). The gap ensures roller will not jam against port plate during operation. While holding the seater arm at the desired position, use a 5/64 inch Allen wrench to tighten the two screws on the actuator arm.

_____10. Repeat Seater Out / Seater In step again. As seater arm is moving, inspect arm for vibration and noise. Ensure arm does not contact laser bracket cover or bottom of port plate as it returns Home.

_____11. Verify there is play in the seater arm movement by gently gripping the actuator arm (on the vertical shaft) and moving it back and forth (see Figure 27 on page 83). There should be a small amount of movement in the arm (0.030 to 0.050 inch) allowing the wafer seater to move slightly.

_____12. If seater arm functions properly, proceed to Step 13. To adjust seater arm, proceed to next step.

FIGURE 28 Wafer Seater Mechanism, bottom view

.03 / .05 GAPREQUIRED

LASER BRACKET

WAFERSEATERROLLER

WAFERSEATERARM

WAFEREXCESSIVEPROTRUSIONSENSOR



_____13. Loosen the two actuator arm set screws. If vibration was observed, push down
slightly on the actuator arm to increase preload (approximately 1 to 2 pounds) on the wavy washer. Tighten one of the set screws. Ensure the position of the wafer seater arm still provides 0.30 to 0.50 clearance as described in Step 10. Tighten the second set screw.

NOTE . . .

INCREASING PRELOAD WILL CAUSE THE SEATER ARM TO RAISE VERY SLIGHTLY WAY FROM THE LASER BRACKET COVER. REDUCING PRELOAD WILL CAUSE SEATER ARM TO MOVE AWAY FROM BOTTOM OF PORT PLATE.

There should be approximately 1 to 2 pounds of preload on the wave washer to eliminate vibration and noise, and to keep the wafer seater arm away from the laser bracket cover.

If the gap is too big between the seater roller and the laser bracket, the excessive wafer protrusion sensor will be actuated during self test.

If the actuator arm does not move, the wafer seater mechanism is jammed against the port plate and must be adjusted. At the sensor PC board, using a No. 0 Phillips screwdriver, loosen the screws securing the board to the port plate. Rotate the sensor board very slightly toward the port door. Tighten screws. This will cause the actuator arm flag to contact the PC board sensor sooner and limit wafer seater mechanism movement.

If sensor PC board required adjustment, repeat Step 5 and check that roller end of wafer seater arm is not contacting laser bracket and wafer seater has slight amount of play.

_____14. Verify the wafer seater arm is not obstructing the Excessive Wafer Protrusion Sensor. Grasp the actuator arm and rotate it slightly inward toward the sensor. There should be a small amount of play. Lower the minienvironment. Using ISIM;

_____a. From MANUAL menu select F5 (Goto Pos)

_____b. At the dialog box, in “Target Pos (inch):___” field, type 8 and press Enter key three) times to raise the port plate.

_____c. If the port plate rises, the sensor has not been obstructed. Proceed to next step. If port plate did not move, adjust sensor PC board as described in Step 12, paragraph 3 and 4. Move sensor PC board very slightly away from port door to increase seater arm travel.

_____d. Clear ISIM error condition by pressing F8, and repeat this step.

_____15. Return port plate to previous position with test wafer in front of wafer seater;

_____a. From MANUAL menu select F5 (Goto Pos)

_____b. At the dialog box, in “Target Pos (inch):___” field, type 9 and press Enter three times to raise the port plate.



_____16. At the wafer cassette, slide the test wafer out of the slot approximately one inch. Use ISIM to move the wafer seater mechanism out to reseat the protruding wafer;

_____a. From MANUAL Menu select F6 (DC MOTOR).

_____b. From the DC Motor submenu, use arrow keys select SEATER OUT and press Enter.

_____c. The wafer seater will move out and reseat the wafer.

_____d. From MANUAL Menu select F6 (DC MOTOR).

_____e. From the DC Motor submenu, use arrow keys to select SEATER IN and press Enter.

_____17. Push the wafer into the cassette. It should move approximately 1/16 inch before contacting the back of the cassette. If wafer seater positioned the wafer properly in cassette, proceed to Step 19. If seater needs adjustment, proceed to next step.

_____18. Wafer seater outward travel is controlled by adjusting wafer seater flag screw at the top of the actuator arm. Use a Phillips screwdriver to loosen screw in middle of actuator arm. Move the sensor flag away from the port door to increase the travel (and position wafer deeper in cassette). Move sensor flag toward the port door to reduce travel. Tighten the sensor flag screw.

_____19. Repeat step 16. Verify the gap between the wafer seater roller and the edge of the port plate is maintained at 0.30 - 0.50 inch. If not, repeat Step 12, paragraph 3 and 4.

_____20. When adjustment is satisfactory, with the seater at IN position, remove one set screw from the actuator arm and place a small drop of Loctite on the threads and reinstall. Repeat for the second set screw. Repeat step 16 to ensure wafer is seated properly into cassette.

_____21. Autocycle the VersaPort to ensure proper operation;

_____a. From the AUTO Menu select F9 (AUTOCYCLE).The VersaPort will move to Stage position and return Home, while exercising all motors. Press F9 to stop the Autocycle function.


_____2. Reinstall minienvironment shield.




CAP4 – Calibrate Shuttle Homing Offseta
CAP4 – Calibrate Shuttle Homing Offset
Pre-ServiceThis procedure may be performed with the VersaPort mounted to the Process Tool. If there is not enough access to the VersaPort, remove it to an area suitable for service.

NOTE . . .

ERROR MESSAGE- “NOT AT HOME, ABORT CALIBRATION”;

THIS MESSAGE MAY APPEAR IF THE CASSETTE SHUTTLE SERVO MOTOR IS DISABLED. CHECK SERVO STATUS BY USING ISIM. FROM THE MAIN MENU, SELECT F6 (CONFIG). SELECT F3 (READ CONFIG) AND USE ARROW KEYS TO MOVE DOWN TO “SHUTTLE OPTION”. VERIFY SHUTTLE IS ENABLED. MODIFY CONFIG WITH THE F4 COMMAND IF NECESSARY.

THIS MESSAGE MAY APPEAR IF THE CASSETTE SHUTTLE SENSOR CANNOT DETECT THE HOME POSITION AS A RESULT OF ONE OF TWO SITUATIONS; THE SENSOR IS POSITIONED TOO FAR BACK FROM THE PROCESS TOOL OPENING TO DETECT THE PORT, OR THE “CASS OFFSET” VALUE IN THE CONFIGURATION IS SET TOO FAR FORWARD. CHECK SENSOR POSITION IF PORT DOOR IS PROPERLY CENTERED IN PORT PLATE OPENING (SEE STEP 8 IN THE ADJUST CASSETTE SHUTTLE HOME POSITION PROCEDURE).

Service_____1. Connect a PC with null modem cable to the Host port of the VersaPort.



_____2. Perform servo calibration for the vertical drive (elevator) motor:

_____a. At the Main Menu, select F1 (AUTO).

_____b. From the Auto menu, select F8 (MISC).

ToolsAllen wrench (or hex driver), 5/64 inchScrewdriver, Phillips, No. 1 tip



VersaPort 2200 Technical ManualChapter 4: ServiceCAP4 – Calibrate Shuttle Homing Offset a

_____c. From the Misc menu, select Calibrate Homing. The elevator (port plate) servo will calibrate its Home position.

_____3. Visually inspect the way the port door is aligned with the port plate. Spacing around the port door should be even at all four sides. The port door and port plate should be level relative to each other.

_____4. Align Port Door. The port door can be adjusted to even the spacing at all four sides by loosening the four hex screws on the port door and moving the door position slightly. Retighten screws and check spacing. If the port door cannot be positioned properly in forward or back positions, proceed to adjust cassette shuttle.

_____5. Perform servo calibration for the cassette shuttle motor:

_____a. Raise the port plate six inches to allow the shuttle to move toward the front of the opening.

_____b. At the Main Menu, select F2 (MANUAL).

_____c. From the Manual Menu, select F5 (GO TO POS).

_____d. A dialog box appears. At the Distance line, enter 6 to raise the port plate six inches. Press ENTER three times to activate the elevator.

_____e. From the Manual Menu, select F6 (DC MOTOR).

_____f. A dialog box appears. Use the arrow keys to move down to Calib Shuttle. Press ENTER. The shuttle will move out slightly and then retract and calibrate its Home position.

_____6. When the cassette shuttle Home position has been calibrated, recalibrate the port plate to its Home position, as in Step 2.

_____7. Visually inspect the way the port door is aligned with the port plate. Spacing around the port door should be even at all four sides. The port door and port plate should be level relative to each other. If the port door and port plate are aligned, proceed to Autocycle the VersaPort.

_____8. If adjustment is required, continue with this procedure.


_____9. Remove the minienvironment shields. Remove the outer two shields by removing the four screws at the top (two each side). Grasp the minienvironment shields at the sides and slide away from the VersaPort. Lift them slightly and rack gently front to rear if there is resistance when removing.



_____10. Remove the inner-most shield by removing the six screws (two each side, two
at connector panel) and lifting slightly and sliding the shield away from the VersaPort.

Adjust Cassette Shuttle Home Position

NOTE . . .

THIS PROCESS SHOULD BE DONE ONLY WHEN NEITHER THE PORT DOOR NOR THE PORT PLATE CAN BE POSITIONED PROPERLY TO THEIR HOME POSITIONS, OR AFTER RECEIVING A “CANNOT CALIBRATE HOME” COMMAND FROM THE ISIM SOFTWARE.

_____1. Remove the cassette shuttle motor cover by removing the two button head screws on the top of the cover.

_____2. Disable the servo motor controls for the elevator and cassette shuttle to allow manual movement:

_____a. From the Manual Menu, select F1 (SERVO CTRL)

_____b. At the dialog box, use arrow keys to select DISABLE SERVO and press ENTER.

_____3. Release the brake:

_____a. From the Manual Menu, select F6 (DC MOTOR)

_____b. At the dialog box, use arrow keys to select RELEASE BRAKE and press ENTER.

_____4. At the shuttle motor, verify the shuttle sensor is pushed as far toward the Process Tool opening as possible. Loosen the screws on the sensor and slide toward the opening. Tighten screws.

_____5. Remove the vertical lead screw cover by removing the two hex screws securing it to the enclosure.

_____6. Begin to lower the port plate toward the port door by rotating the vertical lead screw pulley by hand. As the port plate nears the port door, adjust the position of the port door to center it relative to the port plate by rotating the shuttle lead screw pulley by hand.

_____7. When the port door is centered in the port plate, read the current cassette shuttle position:

_____a. From the Main Menu, select F5 (STATUS)

_____b. From the Status Menu, select F9 (MOTOR STATUS)

_____c. A dialog box appears. Read down the list to the line containing the “SERVO AXIS 1” value. Use the right arrow key if necessary to see the value on the line. The value is expressed in mils (thousandths of inches). Write down the value. Press ESC to clear the dialog box.


VersaPort 2200 Technical ManualChapter 4: ServiceCAP4 – Calibrate Shuttle Homing Offset a

_____8. Change the cassette shuttle offset value to adjust the Home position for the shuttle:

_____a. At the Main Menu, select F6 (CONFIG)

_____b. From the Config Menu, select F4 (MODIFY CONFIG)

_____c. A dialog box appears. Use the Enter key (not the arrow keys) to move to the Cass Offset line. Enter the value from the Axis 1 line in the previous step.

_____d. When prompted to “Confirm, Yes or No” select Yes and press Enter.

_____9. Restore control to the servo motors and reset the brake:

NOTE . . .

THE DISABLE SERVO COMMAND DISABLES BOTH SERVO MOTORS (VERTICAL DRIVE AND CASSETTE SHUTTLE). THE ENABLE SERVO COMMAND ENABLES ONLY THE VERTICAL DRIVE SERVO. USE THE F2 (MANUAL), F8 (CLEAR ERROR) COMMAND TO RESET BOTH SERVO MOTOR CONTROLS

_____a. From the Main Menu, select F2 (MANUAL).

_____b. From the Manual Menu, select F8 (CLEAR ERROR).

_____10. Recalibrate cassette shuttle Home position:

_____a. At the Main Menu, select F2 (MANUAL)

_____b. From the Manual Menu, select F5 (GO TO POS)

_____c. A dialog box appears. At the Distance line, enter 6 to raise the port plate six inches. Press ENTER three times to activate the elevator.

_____d. From the Manual Menu, select F6 (DC MOTOR)

_____e. A dialog box appears. Use the arrow keys to move down to Calib Shuttle. Press ENTER. The shuttle retracts and moves to the new Home position. Visually inspect the port plate/ port door alignment. Adjust port door with four hex screws if necessary.

_____11. When the Home position has been properly calibrated, replace the cassette shuttle motor cover with two screws.

_____12. Replace the vertical drive cover.


_____14. Place a SMIF-Pod with cassette on the VersaPort port plate.

_____a. From the AUTO menu select F9 (AUTOCYCLE).



Observe the operation of the VersaPort. When several Open and Close cycles have been completed, select F9 to stop the Autocycle.
NOTE . . .

IF ERRORS ARE ENCOUNTERED DURING THE AUTOCYCLE FUNCTION, CLEAR THE ERROR BY SELECTING F10 TO RETURN TO THE MAIN MENU, THEN SELECT F2 (MANUAL) AND F8 (CLEAR ERROR).

_____15. If no errors were encountered, select F10 to return to the Main menu. If errors persist, repeat necessary steps.


_____2. The procedure is complete when the VersaPort has been remounted to the Process Tool and has been Autocycled ten times.


VersaPort 2200 Technical ManualChapter 4: ServiceCAP5 – Align Pod Hold Down Latches a
CAP5 – Align Pod Hold Down Latches
Pre-Service

NOTE . . .

WAFER SEATER MECHANISM ALIGNMENT MAY BE PERFORMED WITH THE VERSAPORT MOUNTED TO THE PROCESS TOOL. IF THERE IS NOT ENOUGH ACCESS TO THE VERSAPORT, THE VERSAPORT SHOULD BE REMOVED TO A SUITABLE SERVICE LOCATION.

Service_____1. Use a 3/32 inch hex wrench to remove the two screws securing shroud to the

top of the port plate. Set shroud and screws aside.

_____2. Use a 3/32 inch hex wrench to remove the two flathead screws securing the Tool-side port plate cover and the two screws securing the user-side port plate cover. The Pod hold-down latch and the slide assemblies will be visible. Place the front cover to the side and lay the rear cover onto the port door. Set the hardware aside



_____b. From the MAIN menu select F2 (MANUAL).

_____c. From the MANUAL menu select F6 (DC MOTOR).

_____d. From the DC MOTOR menu select Close Latch.

_____4. The Pod hold-down latches are aligned when they both move out and stop perpendicular (or nearly perpendicular) to the port opening and retract nearly parallel to the port opening when in the open position. Pod hold-down latches are synchronized by adjusting the Flag Sensor.

Conditions that would require this adjustment are:

ToolsAllen wrench (or hex driver), 3/32 inchAllen wrench (or hex driver), 1/8 inch




CAP5 – Align Pod Hold Down Latchesa
• The Pod hold-down motor has been replaced.
• The actuator cable became loose and the rear latch is not nearly perpendicular when in the locked position.

• The actuator cable has been replaced.

• The Flag Sensor has been bent and requires adjustment.

• The Pod hold down latch shoulder screw contains excessive adhesive.

_____5. Adjust the hold-down latch synchronization:

_____a. Visually verify that the angle of the latch is less that one tooth off of optimum adjustment (perpendicular to port plate opening in Close Latch position). If the angle indicates an excess of one tooth, remove the screw in center of latch using a 1/8 inch hex wrench. Lift the latch and carefully reseat one tooth over. Replace the screw and tighten.

_____b. If necessary, to fine tune the latch angle, use needle nose pliers to bend the angle of the vertical rise portion of the Flag Sensor. Bending the flag toward the sensor circuit board will cause the motor to run longer and will advance the hold-down latch position. Ensure that the top portion of the flag remains horizontal to the sensor board.

_____c. From the DC MOTOR menu select Open Latch.

_____d. From the DC MOTOR menu select Close Latch followed by Open Latch.

_____6. Repeat Close Latch / Open Latch to ensure that the latches function properly.

_____7. Replace the port plate rear cover, front cover and shroud. Secure with 3/32 hex screws.

_____8. Place a Pod with cassette on port plate. Verify Pod latch operation:

_____a. From the DC MOTOR menu select Close Latch.

_____b. From the DC MOTOR menu select Open Latch.

The latches should slide over the top of the Pod door and rotate 90 degrees.

_____9. Remove 24vdc power from the VersaPort. Remove null modem communications cable.


_____2. The procedure is complete when the VersaPort has been remounted to the Process Tool—with the minienvironment in place—and has been Autocycled ten times.


VersaPort 2200 Technical ManualChapter 4: ServiceCAP6 – Align Pod-In-Place Switch a
CAP6 – Align Pod-In-Place Switch
Step 1 Pre-Service_____1. Raise the port plate to provide easier access to the port door.

_____a. At the Main Menu, select F1 (Auto).

_____b. From the Manual Menu, select F1 (Stage).

Before performing service on VersaPort, service personnel should obtain from the Host Tool owner, permission to remove the VersaPort from the Host Tool or to work on the VersaPort at the tool. It is NEVER implied that if the Host Tool owner grants such permission, a lockout/tagout procedure has already been performed on the Host Tool. The operator performing the service MUST confirm that Lockout/Tagout of the host tool has been performed before beginning the service.

_____1. Verify the VersaPort is under lockout/tagout conditions. This procedure may be performed while mounted on the host tool, or after it has been removed.

_____2. Remove the Minienvironment shields.


_____a. Remove the minienvironment shields. Remove the outer two shields by removing the four screws at the top (two each side). Grasp the minienvironment shields at the sides and slide away from the VersaPort. Lift them slightly and rack gently front to rear if there is resistance when removing.

Tools/Required Equipment

Tool, Pod-in-place sensor adjustment (Asyst PN 1000-0211-01

Screwdriver, Phillips, No. 1 and 2

Scale or measuring device graduated in thousandths on an inch

+24VDC power supply

Test SMIF Pod



CAP6 – Align Pod-In-Place Switcha
Step 2 Adjust Pod in Place Switch_____1. Set VersaPort on a work surface. Place VersaPort on its side for access to port
door bottom.

_____2. At the port door bottom, using a No. 2 Phillips screwdriver, remove four (4) screws and lock washers securing the port door cover to the bottom of the port door. Remove the cover, exposing the Pod door lock/unlock mechanism and Pod-in-Place switch. See Figure 29. Set the cover with gasket attached and hardware aside.

_____3. Connect a 24VDC power supply to the VersaPort.

FIGURE 29 200mm Port Door (Bottom View), Pod in Place Switch

_____4. Using a measuring device, or Pod-in-Place Sensor Tool “Go” side (Asyst PN 1000-0211-01), depress switch plunger on the port door top 0.045 to 0.060 inches. See Figure 30 on page 96.

_____5. With the plunger depressed 0.045 to 0.060 inches, on the underside of the port door, using a No. 1 Phillips screwdriver, slowly and alternately turn the two Pod-in-Place switch screws clockwise. Ensure that the switch base remains parallel to the port plate. Continue to turn the screws until the POD-IN-PLACE LED lights.

_____6. Test the switch by depressing the plunger several times to see if the LED lights when the plunger is depressed 0.045 to 0.060 inches. Repeat adjusting as instructed in number 5 until the adjustment is complete.

-

+

S1 1 2 3

R1R2

4 5 6

R3

S2

PORT DOOR COVERSCREWS AT CORNERS(4 TOTAL)

POD-IN-PLACESWITCH & SENSORADJUSTMENT SCREWS


VersaPort 2200 Technical ManualChapter 4: ServiceCAP6 – Align Pod-In-Place Switch a

FIGURE 30 200mm Port Plate Pod-In-Place Switch (side and top views)

_____7. Depress the plunger until it is flush with the port door. Verify that the LED is still lighted. If not, adjust pod-in-place switch screws until it lights.

_____8. Continue adjusting (See 4 through 7 above) until you can verify proper switch function.

Step 3 Switch Verification with Pod_____1. Place an empty 200mm Pod on the VersaPort and observe the

POD-IN-PLACE LED light.

_____2. If LED lights properly, remove 24 VDC power from the VersaPort.

_____3. If adjustment was not successful, readjust. See “Step 2 Adjust Pod in Place Switch” on page 95.

_____4. Replace the port door cover and secure with the four (4) washers and screws.



CAP6 – Align Pod-In-Place Switcha
Step 4 Postservice
ELECTRICAL HAZARD

WARNING

POTENTIAL ACCESS TO HIGH VOLTAGES REQUIRES THAT THE HOST TOOL BE DE-ENERGIZED PER LOCKOUT/TAGOUT PROCEDURES PRIOR TO REPLACING THE VERSAPORT. LOCKOUT/TAGOUT IS REQUIRED TO PREVENT OPERATOR EXPOSURE TO SHOCK HAZARDS AND CRUSH/PINCH HAZARDS AS WELL.

_____1. Replace the VersaPort in the Host Tool according to the VersaPort Installation Instructions (PN 2000-1253-xx (Platform Mount) or 2000-1276-xx (with BOLTS Interface).

_____2. Verify communications with the Host Tool per Host Tool guidelines.


VersaPort 2200 Technical ManualChapter 4: ServiceCAP6 – Corrective Service Procedures a
Corrective Service Procedures
Corrective service is non-scheduled service. It consists of procedures for replacing electrical or mechanical components in the VersaPort that have failed or no longer meet the adjustment criteria. Following the replacement procedure, calibration may have to be performed.

This section lists procedures to be performed on an as-needed basis.

Description

“CSP1 – Pod Latch Motor Replacement” on page 99

“CSP2 – Pod Door Lock Motor Replacement” on page 102

“CSP3 – Laser Diode Replacement” on page 107

“CSP4 – Cassette Shuttle Motor Replacement” on page 109

“CSP5 – Vertical Drive Motor Replacement” on page 113

“CSP6 – Replace Printed Circuit Board” on page 116



CSP1 – Pod Latch Motor Replacementa
CSP1 – Pod Latch Motor Replacement
Pre-ServiceIt may be possible to replace the Pod Latch Motor without removing the VersaPort from the mounting platform. Skip to the Service section if the VersaPort does not need to be removed from the Process Tool.

If possible, use the Process Tool to raise the VersaPort nine inches to access the connector panel cover and remove the two screws at the connector panel cover.

Remove 24vdc power and communications cables. Connect a PC with ISIM installed to the Host port of the VersaPort. Restore 24vdc power.

Service_____1. To ensure that the motor needs replacement, test port plate connector with the

new motor before removing old motor. Use a 3/32 inch hex wrench to remove four flathead screws securing top rear (user-side) port plate cover. Remove cover, exposing pod hold-down latch/unlatch motor. Let cover rest on port door and set hardware aside.

_____2. Unplug connector P15 from connector J15.

_____3. Take replacement motor and plug motor connector into J15. Use ISIM software program to test the motor. Refer to “Appendix A: ISIM” on page 123 for instructions on using the software;

_____a. From Main menu select F2 (MANUAL)

_____b. From MANUAL Menu elect F6 (DC MOTOR)

_____c. From DC MOTOR Menu select OPEN LATCH and Enter to actuate.

_____d. From DC MOTOR Menu select CLOSE LATCH and Enter to actuate.

_____4. If new motor operates, proceed with this replacement procedure. If new motor did not function, stop procedure and determine problem. Check circuit board connections.

_____5. Unplug the new motor assembly from J15 and set aside.

Tools

Allen wrench (or hex driver), 3/32 inchScrewdriver, Phillips No. 1Motor Assy, Asyst PN 9700-3263-01Loctite 222 Adhesive, Asyst PN 7500-0716-01

Other MaterialSMIF Pod with cassettePC compatible computer running ISIMNull-modem communications cable


VersaPort 2200 Technical ManualChapter 4: ServiceCSP1 – Pod Latch Motor Replacement a

_____6. Remove 24vdc power. Gently move the flat ribbon cables that run over the top of the motor body out of the way, exposing motor. Use a 3/32 inch Allen wrench to remove two screws holding motor bracket to port plate and remove two screws holding threaded actuator bracket to the slide.

_____7. Remove motor and actuator assembly. Use a 3/32 inch hex wrench to remove two screws holding motor bracket to port plate. Take the motor bracket and rotate U-shaped link screw toward outside of port plate to release screw from actuator bracket.

_____8. If new motor does not have replacement mounting bracket, use a Phillips screwdriver to remove two screws securing motor bracket to old motor. Take the new motor and secure to motor bracket with two screws.

_____9. If not already mounted to slide assembly, take new actuator bracket and attach to slide with two hex screws. Take the motor assembly and turn the lead screw to fully extend screw toward the link clip side of motor. When lead screw is fully extended, twist screw the opposite direction three full turns to retract screws slightly.

_____10. At the port plate, position U-shaped link screw into actuator bracket clip. Attach motor bracket to port plate with two hex screws. Plug P15 connector into J15 connector and reroute ribbon cables over motor.

_____11. Restore 24vdc power. Use ISIM program and observe the Pod latch/unlatch motor operation while sending commands;

_____a. From the Manual Menu select F6 (DC MOTOR)

_____b. From DC MOTOR Menu select CLOSE LATCH and press Enter. Latch should rotate 90° toward port door.

_____c. From DC MOTOR Menu select OPEN LATCH and press Enter. Latch should rotate 90° away from port door and stop parallel to port door opening.

_____12. If operation was smooth with no problems noted, proceed with this procedure. If problem is observed, recheck these procedure steps. If latch did not move to proper location during latch/unlatch movements, perform “CAP5 – Align Pod Hold Down Latches” on page 92 at this time.

_____13. When the latches move to the proper locations, re-route the ribbon cables at the rear top cover. Secure cover with four hex screws.

_____14. Place a Pod with cassette on the port plate and perform several cycles of the VersaPort.

_____a. From the Main Menu select F1 (AUTO)

_____b. From the Auto menu select F9 (AUTOCYCLE). The VersaPort will raise to the Stage position, move the shuttle forward, retract the shuttle and return to the Home position.



CSP1 – Pod Latch Motor Replacementa
_____c. The VersaPort will continue to cycle until F9 is pressed to stop the
Autocycle function. After several cycles, press F9 (STOP CYCLES). The VersaPort will complete the current cycle and return to the Home position. Remove the Pod from the port plate.

_____15. Raise the VersaPort ten inches to allow connection of cables when returned to the Process Tool.

_____a. From the MAIN menu select F2 (Manual)

_____b. From the MANUAL menu select F5 (Goto Pos)

_____c. At the Target Pos/Distance (inch) line, type 10 and press Enter three times to raise the minienvironment ten inches.

_____16. Remove 24vdc power from the VersaPort. Remove communications cable.


_____2. If necessary, reinstall the minienvironment shield.



VersaPort 2200 Technical ManualChapter 4: ServiceCSP2 – Pod Door Lock Motor Replacement a
CSP2 – Pod Door Lock Motor Replacement
Pre-Service

NOTE . . .

POD DOOR LOCK MOTOR REPLACEMENT MAY BE PERFORMED WITH THE VERSAPORT MOUNTED TO THE PROCESS TOOL. IF THERE IS NOT ENOUGH ACCESS TO THE VERSAPORT, THE VERSAPORT SHOULD BE REMOVED TO A SUITABLE SERVICE LOCATION. OTHERWISE, SIMPLY REMOVE THE MINIENVIRONMENT SHIELD.

NOTE . . .

POD DOOR LOCK MOTOR REPLACEMENT REQUIRES SOLDERING. THEREFORE, IT MAY BE PREFERABLE TO PERFORM THIS PROCEDURE OUTSIDE OF A CLEANROOM.



Tools

Motor w/gearhead, Asyst PN 7500-0373-01Screwdriver, Phillips No. 1Allen wrench, 9/64 inchSoldering iron and solderShrink tube, 1/8 inchHeat gun (for shrink tubing)Wire cutterWire stripperKnife




CSP2 – Pod Door Lock Motor Replacementa




Service_____1. Attach a PC computer running ISIM software to the SECS host port. Replace

24vdc power.

WARNING

LASER HAZARDLASER RADIATION IS PRESENT WHEN POWER APPLIED AND INTERLOCK DEFEATED. AVOID DIRECT EYE EXPOSURE.

_____2. Use ISIM to raise the port plate to access the bottom of the port door;

_____a. From the MAIN menu select F2 (Manual)

_____b. From the MANUAL menu select F5 (Goto Pos)

_____c. At the Target Pos/Distance (inch) line, type 10 and press Enter three times to raise the minienvironment ten inches.

_____3. Remove 24 vdc power from the VersaPort.

_____4. Use a 9/64 inch Allen wrench to remove the four Allen screws securing the port door to the standoffs.

_____5. Lift the port door off the standoffs and turn it over to access the bottom cover.

_____6. Use a 9/64 inch Allen wrench to remove four screws and lock washers securing port door cover. Set cover with gasket and hardware aside.

_____7. Ensure that the sensor flag is either in the fully locked or fully unlocked position.



_____8. Note color of wires in relation to plus (+) and minus (–) signs on motor body. Use a small sharp knife to remove shrink tube covering the solder connections on end of motor. Cut wire connections close to motor terminal.

_____9. Use a Phillips screwdriver to loosen two screws securing motor to motor bracket. Maneuver motor with grommets and attached pulley free of belt. Remove rubber grommets from each end of the motor and set aside. Discard motor according to appropriate local guidelines.

_____10. Use a wire stripper to strip back harness wires 3/16 inch. Use a soldering iron and solder to tin wires. Slip a 1/4 inch long piece of 1/8 inch diameter shrink tube onto each wire and slide back beyond bare wire section.

_____11. Take the replacement motor and place a rubber grommet onto each end of the motor.

CAUTIONPRIOR TO SOLDERING WIRES TO MOTOR, IF NECESSARY, BEND SOLDER TABS, BUT ONLY BEND ONE (1) TIME. FAILURE TO COMPLY MAY RESULT IN A BROKEN TAB AND REQUIRE NEW MOTOR REPLACEMENT.

_____12. Identify the motor electrical leads and solder each wire to the proper motor terminal. Slide shrink tube down over soldered section and shrink into place.

_____13. Place timing belt around motor pulley. Slide motor into position on motor bracket, aligning grommets with curved ends of bracket. (Ensure that motor power polarity markings are visible and that sensor flag has not changed location.) Push the motor out to place tension on belt and tighten motor-bracket screws to secure the motor.

_____14. Rotate port door back to normal position. Do not replace bottom cover yet. Set on four standoffs to test pod door lock movement.

_____15. Restore power to the VersaPort. Use ISIM and observe Pod door lock/unlock motor operation while sending commands:

_____a. From Main menu select F2 (MANUAL)

_____b. From MANUAL Menu select F6 (DC MOTOR)

_____c. From DC MOTOR Menu select LOCK POD DOOR and press Enter to actuate.

_____d. Observe on top of door that pod door lock/unlock pins move fully from one end of curved slot location to the other end.

_____e. From DC MOTOR Menu select UNLOCK POD DOOR and press Enter to actuate.



CSP2 – Pod Door Lock Motor Replacementa
_____f. Observe that timing belt does not skip teeth when a load is applied to the
lock/unlock pins as they are moving.

_____16. If operation was smooth with no problems noted, proceed with this procedure. If problem is observed, adjust tension to motor pulley.

_____17. Remove power from the VersaPort. Rotate the port door and replace port door cover and gasket. Ensure gasket is flat inside the cover (see Figure 31). Ensure that the cable fits in the opening in the cover (see Figure 32). Secure with four screws.

FIGURE 31 Gasket Inside Port Door Cover

FIGURE 32 Routing Cable Through Opening in Port Door Cover

_____18. Rotate the port door to the normal position and place on standoffs. Secure port door with four Allen screws.

_____19. Return VersaPort to the Home position:

_____a. From the Main menu select F2 (Manual)

_____b. From the Manual menu select F5 (Goto Pos)

_____c. At the Target Pos/Distance (inch) line, type 0 and press Enter three times to lower the port plate to the Home position.

Gasket should be flat inside cover

Cable should fit in opening in Port Door Cover



_____d. From the Manual menu select F6 (DC MOTOR). Use the arrow keys to select Unlock Port and press Enter.

_____20. Place a Pod on the port plate and test the lock/unlock sequence following ISIM commands in Step 14. If door locks properly, proceed. If ISIM errors are encountered, repeat necessary adjustments.

_____21. Ensure pod door is in Unlock position. Remove Pod from the VersaPort. Remove PC null modem cable connection. Remove 24vdc power.






CSP3 – Laser Diode Replacementa
CSP3 – Laser Diode Replacement
Pre-Service

WARNING

LASER HAZARDTHIS PROCEDURE MUST ONLY BE PERFORMED BY A SERVICE ENGINEER QUALIFIED TO ALIGN LASER SYSTEMS AND AWARE OF LASER SAFETY PRACTICES

NOTE . . .

LASER DIODE REPLACEMENT MAY BE PERFORMED WITH THE VERSAPORT MOUNTED TO THE PROCESS TOOL. IF THERE IS NOT ENOUGH ACCESS TO THE VERSAPORT, THE VERSAPORT SHOULD BE REMOVED TO A SUITABLE SERVICE LOCATION.

Service

_____1. Remove 24vdc power. Remove the five Phillips screws securing the laser bracket cover at the Process Tool-side bottom of the port plate. Carefully remove cover to gain access to laser diode tube. Set cover and screws aside.

_____2. Remove the two Phillips screws securing laser cable cover to expose laser wires. Set cover and screws aside.

_____3. At the laser diode, cut the two wires leading from the port plate. Leave enough wire to make new connections.

_____4. At the laser diode, use a 5/64 inch Allen wrench and loosen the screw securing the laser bracket. Remove old laser diode with wires and discard.

_____5. From the Laser Diode Kit, locate the two 0.062-inch male connector pins provided. At the port plate, strip and clean the two laser wires coming from port plate to attach connector pins. Use the proper crimp tool and crimp the pins to the laser wires coming from the port plate.

Tools Kit, Laser Diode, 1mW- Asyst PN 9700-4863-01



VersaPort 2200 Technical ManualChapter 4: ServiceCSP3 – Laser Diode Replacement a

_____6. Take the new laser diode assembly with cable and disconnect the two connector plug halves.

_____7. Take the connector plug that is not connected to the laser. Use an extraction tool to remove the two pins from the plug. Discard the wire with pins. Keep the plug.

_____8. Insert the wires with new male crimp pins into plug. Ensure correct wire color placement in plug pins to align with laser half of plug- Brown laser wire to black port plate wire, violet laser wire to red port plate wire.

_____9. Take the new laser diode assembly and slide the diode into laser bracket on bottom of port plate. Insert laser diode until front of diode is even with laser bracket (see figure CSP-4-2). Use a 5/64 inch Allen wrench to tighten screw, but do not tighten fully.

_____10. From the Laser Diode Kit, locate the “CAUTION” label. Write the date and serial number as printed on replacement laser wire on the “CAUTION” label. Remove adhesive back and attach the label to laser bracket assembly cover. Place over existing “CAUTION” label, if one is present.

_____11. Connect the two plug halves. Insert wires and connector into port plate slot.

_____12. Replace laser wire cover and secure with two Phillips screws

_____13. Attach +24vdc power connector.

_____14. Perform calibration procedure “CAP1 – Align Laser Detector System” on page 64 to verify that the laser system is operating properly.

_____15. Return to this procedure when the laser system is adjusted. Ensure the laser diode mounting screw is tightened and the laser bracket cover is secured with five screws before proceeding to Post-Service.





CSP4 – Cassette Shuttle Motor Replacementa
CSP4 – Cassette Shuttle Motor Replacement
Pre-Service

NOTE . . .

CASSETTE SHUTTLE MOTOR REPLACEMENT MAY BE PERFORMED WITH THE VERSAPORT MOUNTED TO THE PROCESS TOOL. IF THERE IS NOT ENOUGH ACCESS TO THE VERSAPORT, THE VERSAPORT SHOULD BE REMOVED TO A SUITABLE SERVICE LOCATION. OTHERWISE, SIMPLY REMOVE THE MINIENVIRONMENT SHIELD.

NOTE . . .

THE PORT PLATE CAN BE RAISED MANUALLY BY REMOVING THE VERTICAL DRIVE COLUMN COVER AND TURNING THE VERTICAL DRIVE MOTOR PULLEY TO TURN THE LEAD SCREW AND RAISE THE PORT PLATE.





ToolsMotor, Cassette Shuttle, Asyst PN 9700-5727-01Allen wrench (or hex driver), 1/16 inch


VersaPort 2200 Technical ManualChapter 4: ServiceCSP4 – Cassette Shuttle Motor Replacement a

_____3. Loosen the two captive Phillips screws securing the connector cover panel to the VersaPort base. Set cover and screws aside. Disconnect power, communications, and ground cable from the VersaPort.

Service_____1. Remove the shuttle motor cover by removing the two button head screws at

the top of the cover. Set cover and screws aside.

_____2. Lay the VersaPort on a clean flat surface with the front (Process Tool-side) down. Remove the bottom cover of the VersaPort by removing the four Phillips screws. Set the bottom cover and screws aside.

_____3. At the circuit board, locate the P2 connector at the left side of the board that runs through the cutout at the bottom left portion of the VersaPort base plate. Disconnect P2 and push the cable up through the base assembly cutout so it will be accessible from the top. Cut cable ties as necessary, noting the location for replacement later.

_____4. Grasp the VersaPort at the sides and rotate it back to its normal position.

_____5. At the cassette shuttle motor, use a 1/16 inch Allen wrench to remove the three button head screws securing the motor to the mount. Remove the pulley belt. Remove the two screws for the resistor mount and the one screw for the wiring clamp. Cut the cable ties leading to the base assembly cutout, where the P2 connector should be visible.

_____6. Turn the shuttle lead screw pulley to advance the port door forward and move the black plastic cable guide away from the motor. Grasp the motor and slide it out of the mounting position. Remove the motor, resistor and cable.

_____7. Route the new motor cable to follow the path of the old cable. Position the new motor to the mount. Ensure that the wires from the motor are pointing toward the lead screw as the screw holes are aligned with the mounting plate.

_____8. Replace the pulley belt and insert the three screws through the mount and into the motor. Tighten the screws.

_____9. Secure the resistor to the VersaPort base. Secure the cable clamp where the cable turns at the edge of the VersaPort. Push the P2 connector through the cutout.

_____10. At the shuttle lead screw, turn the pulley to retract the port door to the Home position. Grasp the VersaPort at the sides and lay it on its front side.

_____11. Re-attach the P2 connector to the jumper on the circuit board. Replace any cable ties removed earlier. Replace the bottom cover of the VersaPort. Pick up the VersaPort and rotate back to normal position.

_____12. Replace the cassette shuttle motor cover with the two button head screws.



CSP4 – Cassette Shuttle Motor Replacementa
_____13. Connect a PC with null modem cable to the Host port of the VersaPort.



WARNING

MECHANICAL HAZARDA PINCH HAZARD EXISTS AT THE PORT PLATE WHEN THE MINIENVIRONMENT IS REMOVED. DO NOT PLACE FINGERS OR HANDS IN THE PATH OF THE PORT PLATE.

_____c. From the Manual menu select F8 (MISC), then select CALIBRATE HOMING. The VersaPort will perform a homing calibration to verify home position. Observe the spacing around the port door and port plate. The gap should be even around the port door. If necessary, perform “CAP4 – Calibrate Shuttle Homing Offset” on page 87 to adjust the shuttle position.

_____d. Place a Pod with cassette on the port door. Perform an autocycle to verify operation of the VersaPort.

_____e. From the Auto menu select F9 (AUTOCYCLE). The VersaPort will raise to the Stage position, move the shuttle forward, retract the shuttle and return to the Home position.

_____f. The VersaPort will continue to cycle until F9 is pressed to stop the Autocycle function. Press F9 (STOP CYCLES). The VersaPort will complete the current cycle and return to the Home position. Remove the Pod from the port plate.

_____g. Close the ISIM program. Press F10 (MAIN) to select the Main menu.

_____h. From the Main menu select F8 (EXIT). Use the arrow keys to select Yes and press Enter to close the program.

_____14. Remove 24vdc power and communications cables from the VersaPort.

Post-Service_____1. Replace the minienvironment inner shield to the port plate with the four

screws, two at each side.

_____2. Replace the two outer shields of the minienvironment. Grasp the inner (lower) section slightly below the upper section so it does not restrict the top edge of the minienvironment from sliding into the track on the port plate. Pus the minienvironment evenly along the edge of the port plate.


VersaPort 2200 Technical ManualChapter 4: ServiceCSP4 – Cassette Shuttle Motor Replacement a

_____3. At one side of the minienvironment, hold the inner and outer shields so the inner shield’s guide wheel will align with the vertical track in the VersaPort and the outer shield’s detent will insert into the slot on the VersaPort. Push the minienvironment securely into the VersaPort. Repeat the alignment for the other side of the minienvironment. Tighten the four hex screws on the top of the port plate to secure the minienvironment.

_____4. If necessary, re-install the VersaPort to the Process Tool.

_____5. The procedure is complete when the VersaPort is mounted and autocycled by the Process Tool.



CSP5 – Vertical Drive Motor Replacementa
CSP5 – Vertical Drive Motor Replacement
Pre-Service

NOTE . . .

VERTICAL DRIVE MOTOR REPLACEMENT MAY BE PERFORMED WITH THE VERSAPORT MOUNTED TO THE PROCESS TOOL. IF THERE IS NOT ENOUGH ACCESS TO THE VERSAPORT, THE VERSAPORT SHOULD BE REMOVED TO A SUITABLE SERVICE LOCATION.

WARNING

MECHANICAL HAZARDTHE VERSAPORT MUST BE AT THE HOME POSITION WHEN THE VERTICAL DRIVE MOTOR IS REPLACED. THE MOTOR CONTAINS A BRAKE THAT LOCKS THE PORT PLATE WHEN POWER IS REMOVED FROM THE MOTOR. A SEVERE PINCH HAZARD EXISTS IF THE MOTOR IS REMOVED WHEN THE PORT PLATE IS RAISED.

IF THE VERSAPORT CANNOT BE POSITIONED AT HOME, PERFORM THIS PROCEDURE WITH THE VERSAPORT ROTATED ON ITS PROCESS TOOL-SIDE TO REMOVE THE PINCH HAZARD.

The minienvironment does not need to be removed to replace the vertical drive motor. Raise the port plate at least four inches to access the connector panel cover to remove the VersaPort from the Process Tool mounting platform.

Service_____1. Remove 24 vdc power. At the top of the vertical drive column, loosen the two

screws slightly and remove the top cover. Grasp the vertical column side cover and slide it out of the track. Set both covers aside.

_____2. Disconnect the P55 cable connector. Remove the two mounting screws at the base of the vertical drive motor. Slide the pulley belt away and remove the motor.

Tools Phillips screwdriver



VersaPort 2200 Technical ManualChapter 4: ServiceCSP5 – Vertical Drive Motor Replacement a

_____3. Remove the two screws securing the mounting bracket to the base of the motor. Discard the old motor. Take the two screws and secure the mounting bracket on the base of the new motor. Ensure motor cables are aligned away from lead screw.

_____4. Align the bracket to the mounting pins and insert- but do not tighten- the two mounting screws. Replace the pulley belt and push the motor away from the lead screw to tension the pulley belt. Tighten the mounting screws. Attach the P55 cable connector.

GENERAL HAZARD

CAUTION

A CLICKING OR TICKING NOISE INDICATES EXCESSIVE TENSIONING OF THE PULLEY BELT. RE-TENSION THE BELT UNTIL THERE IS NO CLICKING, TICKING, OR SKIPPING. FAILURE TO COMPLY MAY LEAD TO IMPROPER OPERATION OF THE VERTICAL DRIVE SYSTEM.

_____5. Replace the vertical drive column cover into the track. Replace the top cover and secure the two screws. If necessary, rotate the VersaPort back to normal operating position.




WARNING

MECHANICAL HAZARDA PINCH HAZARD EXISTS AT THE PORT PLATE WHEN THE MINIENVIRONMENT IS REMOVED. DO NOT PLACE FINGERS OR HANDS IN THE PATH OF THE PORT PLATE.

_____c. From the Manual menu select F8 (MISC), then select CALIBRATE HOMING. The VersaPort will perform a homing calibration to verify home position. The port plate should stop level to the port door.

_____d. Place a Pod with cassette on the port door. Perform an autocycle to verify operation of the VersaPort.

_____e. From the Auto menu select F9 (AUTOCYCLE). The VersaPort will raise to the Stage position, move the shuttle forward, retract the shuttle and return to the Home position.



CSP5 – Vertical Drive Motor Replacementa
_____f. The VersaPort will continue to cycle until F9 is pressed to stop the
Autocycle function. Press F9 (STOP CYCLES). The VersaPort will complete the current cycle and return to the Home position. Remove the Pod from the port plate.

_____g. Close the ISIM program. Press F10 (MAIN) to select the Main menu.

_____h. From the Main menu select F8 (EXIT). Use the arrow keys to select Yes and press Enter to close the program.

_____7. Remove 24vdc power and communications cables from the VersaPort.

Post-Service_____1. If necessary, re-install the VersaPort to the Process Tool.

_____2. The procedure is complete when the VersaPort is mounted and autocycled by the Process Tool.


VersaPort 2200 Technical ManualChapter 4: ServiceCSP6 – Replace Printed Circuit Board a
CSP6 – Replace Printed Circuit Board
This procedure describes the replacement of the VersaPort printed circuit board.

Step 1 Remove VersaPort from Host ToolBefore performing service on VersaPort, service personnel should obtain from the Host Tool owner, permission to remove the VersaPort from the Host Tool. It is NEVER implied that if the Host Tool owner grants such permission, a lockout/tagout procedure has already been performed on the Host Tool. The operator performing the service MUST confirm that Lockout/Tagout of the host tool has been performed before beginning the service.

Verify that Lockout/Tagout of the host tool has been performed by attempting to start or operate the VersaPort. Remove the VersaPort from the Host Tool per tool specifications.

Step 2 Remove Existing Boards1. On VersaPort base assembly, using a Phillips screwdriver, remove four (4) screws on

the power connector. See Figure 33. Set hardware aside.

FIGURE 33 VersaPort Base, Connector Panel

Tools

PC type computer with DOS OS running ISIM software

Screwdriver, Phillips #1 and 2

Standard set Allen Wrenches or Hex Drivers

Null-modem cable, Asyst P/N 9700-3584-01 or equivalent

SMIF-Pod with cassette

Standard set of Nut Drivers

Printed Circuit Board, Asyst P/N 9701-1083-01 (standard VersaPort) or9701-1083-02 (VersaPort with MOCA)

24 VDC Power Supply

Remove these four screws



CSP6 – Replace Printed Circuit Boarda
2. Set VersaPort on its side with the servo motor located at the upper right corner and
the bottom cover visible, observe four (4) screws securing bottom cover that are not filled with red paint. See Figure 34. While holding cover in place, remove nine (9)-No. 6 flat-head Phillips screws. Remove and set hardware aside.

FIGURE 34 VersaPort Bottom Plate, Screw Locations

3. Gently pull bottom cover out. Remove bottom cover and set aside.

4. If applicable, using a 5/32 inch nut driver, on base next to power connector, remove one nut securing ground wire to base. Lift ground wire free and set nut aside.

5. Using a Phillips screwdriver, remove three (3) screws securing circuit board to base assembly. In addition, it may be necessary to loosen the screw on the clamp securing the circuit board. Remove circuit board and set aside screws. Place circuit board on flat surface.

6. At circuit board, using a 3/16 inch nut driver, remove ten (10) jack screws holding connector plate to connectors. Set plate and screws aside.

7. If applicable, using a Phillips screwdriver, on CPU circuit board attached to main circuit board, remove two (2) screws and lock washers securing CPU board to main board. Set screws and washers aside.

8. Separate circuit boards to configure jumper settings on new circuit board to match existing board.

Step 3 Compare Existing and New Boards1. Grasp CPU circuit board and pull slowly and firmly away from main board to separate

50-pin connectors on two boards. Set CPU circuit board aside.

2. At new circuit board, repeat separation steps 7 and 8 above to separate boards and expose jumper posts on main circuit board.

3. Compare all jumper settings on new main board with those on existing main board. Configure new board to match existing board. There are 14 possible jumper connections.



4. Using a 3/32 inch Allen wrench, on existing main circuit board, remove two (2) screws holding heat sink to motor drivers.

Step 4 Install New Board1. Take new replacement main board and secure heat sink to motor with two (2) screws.

2. Take connector plate and place over connectors on new circuit board and secure with ten (10) jack screws.

3. Set main circuit board onto bottom cover. Replace three (3) screws securing main circuit board. Using a 3/32 inch Allen wrench, tighten screws. Ensure that fish-paper insulator is in place under heat sink.



4. On existing CPU circuit board, locate EPROM and remove from socket. On new
circuit board, firmly mount EPROM in proper socket. See Figure 35.

FIGURE 35 VersaPort Circuit Board

NOTE . . .

NOVRAM MUST REMAIN ATTACHED TO BATTERY. REMOVAL FROM BATTERY COULD ERASE VERSAPORT CONFIGURATION DATA.

5. On existing CPU circuit board, locate NOVRAM/battery and remove from socket by pulling up on battery. Do not remove NOVRAM only. On new circuit board, firmly mount NOVRAM/battery in proper socket.

EPROM

NOVRAM (MOUNTEDON BATTERY)

NOVRAM

EPROM

“OLD” Board

“NEW” Board



6. Secure bottom cover to base with four (4) screws.

7. Return VersaPort to upright position with base sitting flat on work surface.

8. On base assembly, replace two (2) screws securing power connector to base.

Step 5 Test

1. Connect 24 VDC power and null modem cable from PC computer using ISIM software.

2. Place SMIF-Pod with cassette on VersaPort and command VersaPort to run several complete unload and load cycles to ensure that VersaPort is functioning properly.

3. At the PC, using ISIM software:

a. From the MAIN Menu select F1 (AUTO).

b. From AUTO Menu select F1 (STAGE). The VersaPort lowers to the Stage position.

c. From AUTO Menu select F2 (HOME). The VersaPort returns to Home.

d. Repeat F1 and F2 commands several times. Ensure VersaPort is returned to HOME position. Remove SMIF-Pod.

4. Remove 24 VDC power and null modem connection from VersaPort.

Step 6 Postservice

ELECTRICAL HAZARD

WARNING

POTENTIAL ACCESS TO HIGH VOLTAGES REQUIRES THAT THE HOST TOOL BE DE-ENERGIZED PER LOCKOUT/TAGOUT PROCEDURES PRIOR TO REPLACING THE VERSAPORT. LOCKOUT/TAGOUT IS REQUIRED TO PREVENT OPERATOR

WARNING

LASER HAZARDUSE OF SIMULATION SOFTWARE (ISIM) CAN PUT THE VERSAPORT IN AN UNSAFE MODE FOR OPERATORS, AS INTERLOCKS CAN BE DISABLED. SEVERAL HAZARDS, INCLUDING LASER EXPOSURE HAZARDS AND PINCH HAZARDS, MAY BE PRESENT. PERSONNEL SHOULD BECOME THOROUGHLY FAMILIAR WITH ALL ASPECTS OF SAFETY FOR INDIVIDUALS AND EQUIPMENT PRIOR TO OPERATING THIS EQUIPMENT. REFER TO SAFETY SECTION AT THE BEGINNING OF THE TECHNICAL MANUAL.



EXPOSURE TO SHOCK HAZARDS AND CRUSH/PINCH HAZARDS AS WELL.
1. Replace the VersaPort according to the VersaPort Installation Instructions; see (PN 2000-1253-xx (Platform Mount) or 2000-1276-xx (with BOLTS Interface).

2. Verify Host Tool communications according to Host Tool guidelines.




a
Appendix A: ISIM
Only ISIM Rev D is suitable for use on the VersaPort.

NOTE . . .

ISIM IS ONLY TO BE USED BY APPROPRIATELY TRAINED OPERATORS AND TECHNICIANS. CONTACT ASYST TECHNOLOGY FOR TRAINING.

Indexer Simulator (ISIM) Menu List

FIGURE 36 ISIM Main Menu

F Key Function

F1 AUTO mode menu screen

F2 MANUAL mode menu screen

F3 MSC menu screen

F4 DEMO mode menu screen (DEMO mode is not supported for the VersaPort)

F5 STATUS menu screen

F6 CONFIGuration menu screen

F7 Tag8400 menu screen

F8 EXIT (for leaving ISIM program)

F9 SMIF OPTION menu screen


VersaPort 2200 Technical ManualAppendix A: ISIMIndexer Simulator (ISIM) Menu List a

FIGURE 37 F1 – AUTO Menu

TABLE 11 Auto Mode

F Key Main Menu F Key Sub Menu Menu Options Explanation

F1 AUTO F1 STAGE (OPEN)

Directs elevator to open stage from current position.

F2 HOME Directs VersaPort (elevator) to HOME.

F3 FIND WAFER Next Moves elevator down to next reticle/wafer.

Previous Moves elevator up to previous reticle/wafer.

Get Wafer Map Directs open stage from any position.

F4 FIND SLOT Next Moves elevator down to next empty slot.

Previous Moves elevator up to previous empty slot.

Specify Slot Moves elevator to specified slot.

F5 GOTO POS Absolute Position

Moves elevator down to entered position from port plate.

Relative Distance

Moves elevator up or down a relative distance from current position.

F6 DC MOTOR Lock Port Locks port door.

Unlock Port Unlocks port door.

Reseat Wafer Disabled for reticles.

F7 TWEEK Tweek up Moves elevator up 10 mils.


VersaPort 2200 Technical ManualAppendix A: ISIM

Indexer Simulator (ISIM) Menu Lista

Tweek down Moves elevator down 10 mils.

F8 MISC Clear Alarm Resets alarms.

Calibrate Homing

Calibrates HOME position.

Abort Indexer Abort VersaPort operation.

Stop Indexer Stops the VersaPort operation.

F9 AUTO CYCLE Performs continuous Stage and HOME cycles. F9 toggles between stop auto cycle and returning to HOME.

F10 MAIN Returns to Main menu.

TABLE 11 Auto Mode (Continued)




FIGURE 38 F2 – MANUAL Menu

GENERAL HAZARD

CAUTION

F6 DC MOTOR PERFORMS THE SELECTED FUNCTION WITH NO COLLISION CHECKS. EXERCISE CARE TO ENSURE THAT PRODUCT WILL NOT BE LOST OR DAMAGE THE VERSAPORT WHEN ACTIVATING THIS FUNCTION.

TABLE 12 Manual Mode


F2 MANUAL F1 SERVO CRTL Enable Servo. Enables servo motor chip.

Disable Servo. Disables servo motor chip

F2 IO IO Channel ? Channel a, b, or c.

IO Bit No. ?

On/Off ?

F3 SELF TEST Self test of servo, DC motors, sensors, and IRQs.

F4 DAC DAC Calibration Calibrates DACs and gives thresholds.

Sensor Alignment Allows sensor alignment.

Modify Threshold Modifies threshold values.

F4 ends alignment




F5 GOTO POS Target Pos. (inch) ? Moves elevator to entered position:Target (0 to 11.9 inches)

Speed (in/sec) ? Speed (0.1 to 2.5 inch/sec)

Accel (in/sec2) ? Acceleration (0.1 to 2.5 inch/sec2)

F6 DC MOTOR Lock Port

Unlock Port

Lock Pod Door

Unlock Pod Door

Open Latch

Close Latch

Seater In Reticle VersaPort takes no action in response to these commands.

Seater Out Reticle VersaPort takes no action in response to these commands.

F7 MOTOR STATUS

Gives: Controller status,Current position,Desired position,Fan count.

F8 CLEAR ERROR

Resets all errors.

F9 AUTO CYCLE /STOPS CYCLE

Top position during auto cycle?

Performs up/down auto cycle to entered values of top and bottom position plus speed and acceleration. F9 stops auto cycle mode, but does not Home VersaPort

Bottom Position?

Speed (in/sec) ?

Accel (in/sec2) ?


TABLE 12 Manual Mode (Continued)




FIGURE 39 F3 – MSC (SAM) Menu

TABLE 13 MSC (SAM) Menu


F3 MSC Keep Port Lock Performs MSC originated commands

Port Immaterial

Enable Indexer

Disable Indexer

Blink STS LED




FIGURE 40 F5 – STATUS Menu

TABLE 14 Status Menu


F5 STATUS F1 ARE YOU THERE

Sends S1, F1, message and gives S1, F2 reply.

F2 LOOPBCK DIAG Sends S2, F25 message and gives S2, F26 reply.

F3 INDEX STATUS Sensor Status

Software Part No.

Wafer Map Status

History data

F4 READ PIO Sends S2, F41, gives status of PIO 1C, 2A, 2B

F5 SERVO TUNING RP? Not available in released versions

kd?

Si?

Ri?

Il?



F6 IRQ COUNTS Sends S2, F41, gives back interrupt counts

F8 REVIEW MSG Displays last messages in hex format.

F9 MOTOR STATUS Displays all motor parameters

F10 MAIN Returns to MAIN menu.

TABLE 14 Status Menu (Continued)





FIGURE 41 F6 - CONFIG Menu

TABLE 15 Configuration Menu


F6 CONFIG F1 DEVICE ID Device = Enter Host device identity code

F2 COMM PORT COM1 COM2

Select COM1 or COM2 of Host computer

F3 READ CONFIG Displays VersaPort configuration: External HostPIO Interlock ModeMSC (SAM) Interlock ModeSend/Receive ModeSlot OffsetWafer OffsetMin Wafer PositionOpen PositionSlot CountSlot WidthTweek DistancePort AssignmentComm ProtocolCassette SizeINX Device ID



Comm Baud rateWafer Blk Time§Secs T1 §Secs T2 §Secs T3 §MIN FAN SPEED§CASSETTE TEST §AUTOCYCLE CNT §LAST_WAFER NO§FAN CONTROL §ENABLE FAN§EL HM Cal Offset §Tag Baud Rate §Reticle Height §Slot opening §RCS PortEvent §Cass Offset §Indexer Type§

F4 MODIFY CONFIG

MODIFY CONFIG

Modifies VersaPort configurations listed above.

F5 PC BAUD RATE PC BAUD RATE

Modify Host simulator baud rate.

2400

4800

9600

19200

28800

38400

57000

F6 EVENT OPTION Enable All

Disable All

Select Event

F7 DEBUG Debug Msg On

Debug Msg Off

Comm Msg On

Comm Msg Off

F9 FILE Enable File

Suspend File

Close File




F10 MAIN Returns to Main menu



FIGURE 42 F7 - Tag8400 Menu

TABLE 16 Tag8400 Menu


F7 Tag8400 F1 ARE YOU THERE

F2 LCD FILE Tag Serial Number:

F3 TAG STATUS Status of the Tag.





FIGURE 43 F9 - SMIF OPTION Menu

TABLE 17 SMIF Option Menu


F9 SMIF OPTION

Indexer

LPO

Ext Height INX

150 mm Reticle INX

Used for VersaPort also

200 mm Reticle INX

Versaport

VPO

Versaport Reticle




VersaPort 2200 Technical ManualAppendix B: Communications Software

Introductiona
Appendix B: Communications
Software

IntroductionThe VersaPort can be configured to communicate with a host via serial (SECS and ASCII) and/or parallel communication. This chapter is divided into three sections providing information on communications between the Host system and the VersaPort.

“SECS Communication” on page 138

This section gives a brief description of the SECS guidelines, the VersaPort SECS message formats, types, and variables, and detailed VersaPort configuration information.

“ASCII Serial Text Interface” on page 180

This section gives a brief description of the ASCII Serial Text Interface guidelines, VersaPort message format, types, and variables, and detailed VersaPort configuration information.

“Parallel Communication” on page 197

This section describes parallel communications, and the commands available for the VersaPort.

NOTE . . .

INFORMATION IN THIS MANUAL APPLIES TO ASYST TECHNOLOGIES F/W P/N 6005-1030-10.

Software Configuration of the VersaPortVersaPort configuration is controlled by accessing the ECID parameters and setting the value (ECV) in SECS or ASCII.

• To see the list of available SECS ECID parameters and ECV values, refer to“ECID Descriptions” on page 161.

• To see the list of available ASCII ECID parameters and ECV values, refer to Table 24, Equipment Constant Codes, on page 187.


VersaPort 2200 Technical ManualAppendix B: Communications SoftwareSECS Communication a
SECS Communication
SECS GuidelinesSerial ParametersCommunications parameters must be set up prior to utilizing the serial port:

• Baud Rate:9600 (default)

• Parity:None

• Stop Bits:1

• Data Bits:8

NOTE . . .

BAUD RATES OF 2400, 4800, AND 19200 BAUD ARE ALSO SUPPORTED IN THE VERSAPORT FIRMWARE.

Communications ProtocolInformation is transmitted within formatted message blocks, preceded by control characters. Table 18 gives a list of control characters, and Figure 44 shows the format of the message block.

The protocol for sending a single block of data is as follows:

TABLE 18 List of Control Characters

Control Character

HEX Value Meaning

ENQ 05 Line Bid EOT 04 Accept Bid ACK 06 Positive Acknowledge NAK 15 Negative Acknowledge

FIGURE 44 SECS Message Block

1 2 3 4 5 6 7 8 9 10

DEVICE ID STREAMANDFUNCTION

BLOCKNUMBER

SYSTEMBYTES

LENGTHBYTE HEADER DATA (0-244 BYTES) CHECKSUM

0A 0001 810180 0100 000000 0104



SECS Communicationa
1. The sender bids for the use of the line by sending the ENQ control character.
2. The receiver accepts the bid by sending the EOT control character.

3. The sender sends the message block, consisting of the length byte, header, text, and checksum. See Figure 44 on page 138.

4. The receiver verifies the checksum and acknowledges receipt by sending the ACK character. The ACK message terminates the operation.

5. The next transmission must start again with ENQ.

Message Block. A SECS message block consists of the following elements:

• Length byte

A length byte is in unsigned binary format, and specifies the combined number of bytes in the header (10 bytes) plus the length of the text (244 bytes). (It does not include the length byte itself or the checksum.

NOTE . . .

THE LENGTH BYTE SHOULD NEVER CONTAIN A VALUE LOWER THAN 10 NOR HIGHER THAN 254.

• Header (10 bytes)

Every SECS block has a header. The SECS block header is always 10 bytes in length and has a fixed format (see Figure 44 on page 138). The following fields, in the following order, are always present in the header:

Device ID (2 bytes). The device I.D. uniquely identifies which piece of equipment the message originated from or is destined for. The device I.D. always refers to the equipment (the Host has no device I.D.). The high-order bit (bit 15) of the field is called the R-bit. This bit indicates the direction of the message. The direction of the message dictates whether the device I.D., shown in the header, is the sender or the destination of the message. If the R-bit is 0, the message direction is Host to equipment. If the R-bit is 1, the direction is equipment to Host.

NOTE . . .

THE DEFAULT DEVICE I.D. FOR THE VERSAPORT IS SET TO 251.

Stream and Function (2 bytes). Stream (1 byte) and Function (1 byte) define the message meaning. Together, they comprise a SECS message code for summary of information transfer between the VersaPort and Process Tool or Measurement Tool. Stream defines the major topic of the SECS message. Function defines the sub-topic within the stream. The same function code may have different meanings in different streams (see Table 19, SECS Message Summary, on page 140). The



high-order bit (bit 15) of the field is called the W-bit. This bit defines whether a reply is expected. If the W-bit is 0, a reply is not expected. If the W-bit is 1, a reply is expected.

Block number (2 bytes). A sequence field specifies a particular block within a multi-block series.

System bytes (4 bytes). System bytes are reserved for bookkeeping information by the message originator. For the case where a reply is required from the VersaPort, the same system bytes will be used in the reply header.

Checksum Bytes. The checksum is calculated as a simple 16-bit unsigned sum of all the bytes in the header and text. The checksum is initialized to zero. Any overflows are ignored. The checksum is transmitted as two bytes, with the more significant byte first.

• Text (0 to 244 bytes)

• Checksum (2 bytes)

The minimum size block consists of a header and no text. With the length byte and checksum, the block has 13 bytes.

The maximum size block consists of a header (10 bytes) and text. The length byte specifies 254 bytes (text + 10). With the length byte (1 byte) and checksum (2 bytes), the block has a total of 257 bytes.

SECS Messages

NOTE . . .

IN THE FOLLOWING MESSAGES, S_,F_ INDICATES STREAM AND FUNCTION. *S INDICATES A SINGLE BLOCK, H SIGNIFIES THE HOST/PROCESS TOOL, E SIGNIFIES THE EQUIPMENT/VERSAPORT, AND THE ARROW SIGNIFIES THE DIRECTION OF THE COMMUNICATION.

TABLE 19 SECS Message Summary

Stream & Function Code Description

Direction of communication

S1, F0 Abort Transaction *S,H ↔S1,F1 Are you there request (R) *S,H → E, replyS1,F2 On line Data (D) *S,H ←ES1,F5 Formatted Status Request (FSR) *S,H → E, replyS1,F6 Formatted Status Data (FSD) *S,H ← ES2,F13 Equipment Constant Request (ECR) *S,H → E, replyS2,F14 Equipment Constant Data (ECD) *S,H ← E



SECS Communicationa

S2,F15 New Equipment Constant Send (ECS) *S,H → E, replyS2,F16 New Equipment Constant Acknowledge (ECA) *S,H ← ES2,F21 Remote Command Send (RCS) *S,H → ES2,F22 Remote Command Acknowledge (RCA) *S,H ← ES2,F25 Loopback Diag. Request (LDR) *S,H → E, replyS2,F26 Loopback Diag. Data (LDD) *S,H ← ES2,F33 Define Report (DR) *S,H → E, replyS2,F34 Define Report Acknowledge (DRA) *S,H ← ES2,F35 Link Event Report (LER) *S,H → E, replyS2,F36 Link Event Report Acknowledge (LERA) *S,H ← ES2,F37 Enable/Disable Event (EDER) *S,H → E, reply

S2,F38 Enable/Disable Event Report Acknowledge (EERA) *S,H ← E

S2,F41 Host Command Send (HCS) *S,H → E, replyS2,F42 Host Command Acknowledge (HCA) *S,H ← ES5,F1 Alarm Report Send (ARS) *S,H ← ES5,F3 Enable/Disable Alarm Send (EAN) *S,H → E, replyS5,F4 Enable/Disable Alarm ACK (EAA) *S,H ← ES6,F13 Annotated Event Report Send (AERS) *S,H ← E, (reply)

S6,F14 Annotated Event Report Send Acknowledge (AERA) *S,H → E

S10,F3 Terminal Display Single (VTN) *S,H ← E, (reply)S10,F4 Terminal Display Single Acknowledge (VTA) *S,H → E

(reply)=reply is optional

TABLE 19 SECS Message Summary

Stream & Function Code Description

Direction of communication



Stream and Function Codes(See “Data Dictionary” on page 150 for an explanation of all message variables.)

S1,F0: Abort Transaction (S1F0) *S,H<-> EDescription: This may occur in a multi-block message or in a reply to a primary message. This code

terminates and aborts further work on the transaction. Function 0 has the same meaning and is defined in every stream.

Structure: Header only.

Exceptions: None.

S1,F1: Are You There Request (R) *S,H → E, replyDescription: This code establishes if the Process Tool or Host is on-line. A function 0 response to this

message means the communication is inoperative.

Structure: Header only.

Exceptions: None.

S1,F2: On Line Data (D) *S,H← EDescription: This code signifies that the equipment is alive.

Structure: L, 21.<MDLN>2.<SOFTREV>.

S1,F5: Formatted Status Request (FSR) *S,H →E, replyDescription This is a request for the VersaPort to report the status according to a predefined fixed for-

mat.

Structure: <SFCD>.

Exceptions: None.

S1,F6: Formatted Status Data (FSD) *S,H←EDescription: This data message is sent upon Host request for current VersaPort status.

Structure: One of the following structures is used for the VersaPort data, based on the Form Code <SFCD> of the request (S1,F5).

For response to Form Code = 0L, 4

1. <SFCD> Echoes Form Code = 02. L, 12

1) <PIO_MODE> Parallel interlock ON/OFF2) <PIP> Pod-in-place status3) <INXOPS> Operation status (Ready / Busy)4) <HOMEST> All VersaPort axes at Home / not Home5) <LFUNC> Last function completed6) <PRTST> Port Status 7) <ELDN> Port lifter at over-travel limit8) <ELUP> Port lifter at Up limit



SECS Communicationa
9) <ELSTAGE> Port lifter at Stage position10) <SEATER_ST>Wafer seater status 11) <INXMODE> Normal mode / Service mode12) <SLOTPOS> Port lifter slot position
3. <EVPOS> Current port lifter position in mils.4. L, 6

1) <PIO_1> PIO status 2) <PIO_2> PIO status3) <PIO_3> PIO status4) <PIO_4> PIO status5) <PIO_5> PIO status6) <PIO_ENABLE> PIO status, enable to move

For response to From Code = 1L, 3

1. <SFCD> Echoes Form Code = 12. <INDEX_REV> VersaPort software part number|3. L, 3

1) <EED> Event report On/Off2) <ALED> Alarm enable/disable3) <SORTMODE> Send/receive/both

For response to From Code = 2L, 2

1. <SFCD> Echoes Form Code =22. L, n

1) <SLOT 1STAT> Slot #1 status, empty/full/unlk...n) <SLOT n STAT> Slot n status

For response to From Code = 3L,3

1. <SFCD> Echoes From Code =3.2. L, 8

1) <TOTAL_PU> PIO status 2) <TOTAL_STAGE> PIO status3) <TOTAL_HOME> PIO status4) <TOTAL_MAP> PIO status5) <TOTAL_WSEARCH> PIO status6) <TOTAL_SSEARCH>PIO status, enable to move7) <TOTAL_RECERR>8) <TOTAL_NRECERR>

3. <LAST_ERROR>

Exceptions: None.

S2, F13: Equipment Constant Request (ECR) *S,H→ E, replyDescription: The Host uses this message to read the configuration parameters in the VersaPort such

as the precise Stage location for pick and place access.

Structure: L, n



1. <ECID1>. . .n. <ECIDn>.

Exceptions: If n = 0, then no response exists.

S2,F14: Equipment Constant Data (ECD) *S,H← EDescription: This code is the response to S2,F13 in the order requested.

Structure: L, n1. L, 2

1. <ECID1>2. <ECV1>

. . .n. L, 2

1. <ECIDn>2. <ECVn>

S2,F15: New Equipment Constant Send (ECS) *S,H→ E, replyDescription: The Host uses this message to set VersaPort configuration parameters, such as

Host-interface mode and Stage-access position.

Structure: L, n1. L, 2

1. <ECID1> 2. <ECV1>

. . .n. L, 2

1. <ECIDn>2. <ECVn>.

Exceptions: If n = 0, then no response exists.

S2,F16: New Equipment Constant Acknowledge (ECA) *S,H← EDescription: Acknowledge or Error.

Structure: <EAC>

S2,F21: Remote command Send (RCS) *S,H→ E, reply

Description: Simplified message for internal Host material-tracking control. Primarily used in conjunc-tion with the MSC/STS. Available on the Host secondary interface connector labeled MSC, if the SINGLE_PORT option is disabled.

Structure: <RCMD>RCS RCMD can be as follows;

Variables always available;22 = RCS_BLINK_STS27 = RCS_STOP_BLINKIf EXT_HOST (ECID 4) = 1(enabled);20 = RCS_KEEP_PORT_LOCK21 = RCS_PORT_LOCK_IMMATERIAL



SECS Communicationa
If MSC_INTLK (ECID 13) = 1 (enabled);23 = RCS_ENABLE_OPEN24 = RCS_DISABLE_OPEN
S2,F22: Remote Command Acknowledge (RCA) *S,H← E

Description: Acknowledge or error.

Structure: <HCACK>

S2,F25: Loopback Diag. Request (LDR) *S,H→ E, replyDescription: A diagnostic message for checkout of protocol and communication circuits. The binary

string is echoed back.

Structure: <ABS>.

Exceptions: None.

S2,F26: Loopback Diag. Data (LDD) *S,H← EDescription: The echoed binary string.

Structure: <ABS>.

Exceptions: None.

S2,F33: Define Report (DR) *S,H→ E, replyDescription: This code defines a set of event reports (S6,F13) to be sent by the VersaPort to the Host.

First, the Host defines reports (VID list of data items) using this message. These reports are linked to events by the LER message (S2, F35). When the event actually occurs, the annotated report is sent (S6,F13), including all items defined in this report.

Structure: L, 21. <Dataid>2. L, a

1. L, 21) <RPT1> 2) L, b

1) <VID1>. . .b) <VIDb>

. . .a. L, 2

1) <RPTa>2) L, c

1) <VID1>. . .c) <VIDc>.

Exception: A list with zero length, following <DATAID>, deletes all report definitions and associated links. See S2,F35 (Link Event Report).



S2,F34: Define Report Acknowledge (DRA) *S,H← EDescription: Acknowledge or Error.

Structure: <DRACK>.

S2,F35: Link Event Report (LER) *S,H→ E, replyDescription: This message is used to link data reports defined by S2,F33 to real events such as the

VersaPort reaching the Stage/open position.

Structure: L, 21. <Dataid>2. L, a

1. L, 21) <CEID1>2) L, b

1) <RPT1>. . .b) <RPTb>

. . .a. L, 2

1) <CEIDa>2) L, c

1) <RPT1>. . .c) <RPTc>.

Exception: A list of zero length following CEID deletes all report links to that event.

S2,F36: Link Event Report Acknowledge (LERA) *S,H← EDescription: Acknowledge or Error.

Structure: <LRACK>.

S2,F37: Enable/Disable Event (EDER) *S,H→ E, replyDescription: This code allows the Host to enable or disable an event report (AERS S6, F13) for any or

all events. Some events are enabled by default upon VersaPort power up (see message detail section).

Structure: L, 21. <CEED> Enable/Disable2. L, n

<CEID1> . . .<CEIDn>.

Exceptions: Item 2 (L, 0) means disable or enable all events. If item 2 is a zero length list, all events will be enabled or disabled.

S2,F38: Enable/Disable Event Report Acknowledge (EERA) *S,H← EDescription: Acknowledge or Error.

Structure: <ERACK>.



SECS Communicationa
S2,F41: Host Command Send (HCS) *S,H→ E, reply
Description: The Host requests the equipment to perform the specified remote command with the associated parameters.

Structure: L, 21. <RCMD>2. L, n

1. <CPAL1> Value of Parameter 1. . .n. <CPALn> Value of parameter n.

S2,F42: Host Command Acknowledge (HCA) *S,H← EDescription: This code acknowledges the Host command or error. If command is not accepted, the

HCACK code contains the reason for denial of the command.

Structure: <HCACK>.

S5,F1: Alarm Report Send (ARS) *S,H← EDescription: Upon occurrence of an error, the VersaPort will notify the Host using this message.

Structure: L, 31. <ALCD> Alarm code (5 = Fatal, 6 = Warning)2. <ALID> Alarm I.D. Identifies when error occurred3. <ALTX> Alarm message Specific error message text.

Exception: After any non-recoverable error has occurred, the VersaPort will enter into an error state which inhibits acceptance of any action command until after an error reset command has been issued by the Host. The reset command to be issued is:

S2, F41: (Host command send (HCS)) 1. <RCMD = 16> HCS_RESET_ERROR.

S5,F3: Enable/Disable Alarm Send (EAN) *S,H→ E, replyDescription: The Host can use this message to enable or disable the alarm notification messages

(S5,F1) from the VersaPort.

Structure: L, 21. <ALED>2. <0>.

S5,F4: Enable/Disable Alarm Acknowledge (EAA) *S,H← EDescription: Acknowledge or error.

Structure: <ACKC5>.

S6,F13: Annotated Event Report Send (AERS) *S,H← E, (reply)Description: The VersaPort will notify the Host of the occurrence of an event and send any data that

the Host requires in the same message. The structure of each report is defined by S2,F33 (DR) and is linked to the event using S2,F35 (LER). These messages can be enabled or disabled using S2,F37 (EDER). If no report is linked to an event and the event is enabled,



then item 3 will be a zero-length list. The reply message, S6,F14, is optional (the W-bit is not set).

Structure: L, 31. <Dataid>2. <CEID>3. L, a

1. L, 21) <RPT1>2) L, b

1) L, 21) <VID1>2) <V1>

. . .b) L, 2

1) <VIDb>2) <Vb>

. . .a. L, 2

1) <RPTa>2) L,c

1) L, 21) <VID1>2) <V1>

. . .c) L, 2

1) <VIDc>2) <Vc>

Exception: A zero length list for the number of reports means that there are no reports linked to the given CEID.

S6,F14: Annotated Event Report Send Acknowledge (AERA) *S,H→ EDescription: Acknowledge or error

Structure: <ACKC6>.

S9,F1: Unrecognized Device ID (UDN) *S,H← EDescription: The device ID in the message block header did not correspond to any known device ID in

the node detecting the error.

Structure: <MHEAD>

S9,F3 Unrecognized Stream Type (USN) *S,H← EDescription: The equipment does not recognize the stream type in the message block header.

Structure: <MHEAD>



SECS Communicationa
S10,F3: Terminal Display, Single (VTN) *S,H← E, (reply)
Description: This is the terminal services for the VersaPort diagnostic messages. The data is to be dis-played on the Host terminal. The reply message, S10,F4, is optional (the W-bit is not set).

Structure: L,21. <TID>2. <TEXT>.

S10,F4: Terminal Display, Single Acknowledge (VTA) *S,H→ EDescription: Acknowledge or error.

Structure: <ACKC10>.



Data Dictionary

NOTE . . .

REFER TO THE FORMAT COLUMN TO EACH ENTRY IN THE DATA DICTIONARYFORMAT: 01 = LISTFORMAT: 21 = BINARYFORMAT: 41 = ASCIIFORMAT: 71 = 4-BYTE SIGNED INTEGERFORMAT: A5 = 1-BYTE UNSIGNED INTEGERFORMAT: A9 = 2-BYTE UNSIGNED INTEGER

TABLE 20 Data Dictionary

Variable Definition Where Used

Format

ACKC5Acknowledge Code, 1 Byte0 = Accepted1 = Denied

S5,F4 21

ACKC6Acknowledge Code:0 = Accepted1 = Error

S6, F14 21

ACKC10

Acknowledge Code, 1 byte0 = Accepted for display1 = Message will be displayed2 = Terminal not available

S10, F4 21

ALCDAlarm Code5 = Non-recoverable6 = Warning

S5,F1 21

ABSAny binary string, n-bytes Bit 8 = 1 enable alarmBit 8 = 0 disable alarm

S2,F25S2,F26

21

ALEDAlarm Enable/Disable, 1 byteBit 8 = 1 enable alarmBit 8 = 0 disable alarm

S1,F6S5,F3

21

ALID

Alarm ID, alarm occurs during1 = Move to Stage2 = Return Home8 = Wafer Map32 = Port lock or unlock34 = Move to a specified position37 = Others38 = X Move (shuttle failure)

S5,F1 A9



SECS Communicationa

ALTX

Alarm message texta) For recoverable errors ALCD = 6"Not home”“LPO (Versaport) busy”“Pod removed”“Aborted by user”“Cassette not present”“Cassette present”

b) For non-recoverable errors ALCD = 5"Position following error""“Shuttle following error”“Encoder error”“Port door failed to open”“Port door failed to close”“Port hold-down failed to open”“Port hold-down failed to close”“Seater failed to move in”“Wafer protruding and seater failed to move out”“Elevator fails to reach target pos” “Wafer protrusion sensor malfunction”“Slot sensor malfunction”“Wafer sensor malfunction or misaligned”“Flash sensor malfunction”“Tripping of elev over-travel limit”“Missing pod door”“System internal time out”“Excessive wafer out error”“Servo controller command error”“System error”“Loss of configuration data”“Inadequate fan flow”“Motion error, not at target pos”“Cassette shuttle not home”“Wafer protrusion error”“El home sensor failure”“Shuttle home sensor failure”

S5,F1 41

CASSETTESIZEOPTION

0 = 200mm4 = Disables slot sensor, 200mm

S2,F13S2,F15 A5

CEEDCollection event enable/disable code0 = Disable1 = Enable

S2,F37 21

TABLE 20 Data Dictionary (Continued)


Format



CEID

Collected Event I.D.1 = Pod removed event *2 = Pod arrived event *3 = Enter auto mode *4 = Enter manual mode *5 = Power up *18 = End home *20 = Failed home *21 = Exit home *31 = Cmpl Port Lock 32 = Cmpl Port Unlock 33 = Failed Port Lock 34 = Failed Port Unlock 49 = End Home Calibration *50 = Failed Home Calibration *53 = Reach Stage *54 = Failed Reach Stage *55 = Reach pos56 = Failed Reach pos57 = Map completed *58 = Failed get map *59 = End sensor calibration *60 = Failed sensor calibration61 = End self-test62 = Failed self-test63 = MSC interlock enable64 = MSC interlock disable65 = PIO interlock enable66 = PIO interlock disable142= Latch Locked143= Abort Latch Lock144= Latch Unlocked145= Abort Unlock Latch168= Shuttle Config Chng169= End home calibration170= Failed Home Calibration171= Shuttle Advanced172= Failed Shuttle Advance173= Retracted Shuttle174= Failed Retracted Shuttle175= Tag Comm Timeout

* DENOTES EVENTS ENABLED BY DEFAULT ON POWER UP.

S2,F35S2,F37S6,F13

A5



Format



SECS Communicationa

CMDA

0 = Command accepted1 = Command does not exist. VersaPort in service mode, or rejected for other reason2 = Command rejected. Configuration of port wrong6 = Command rejected. Versaport busy7 = Command rejected. Versaport in alarm state64= Command does not exist. VersaPort in service mode, or rejected for other reason65= command rejected. No pod on VersaPort

S2,F42

CPALiCommand Parameter. Value of parameters are to be sent along with the Host command in S2,F41. Refer to <RCMD> for parameters list

S2,F41 A9

DATAID Data I.D. = 0S2,F33S2,F35S6,F13

A5

DEVICE_ID ID number of the VersaPort unit. Available value = 1 – 32767

S2,F13S2,F15 A9

DRACK

Define Report Acknowledge code.0 = Accepted1 = Denied, insufficient space2 = Denied, invalid format3 = Denied, at least one RPID already defined4 = Denied, at least one VID does not exist>4 = Other errors

S2, F34 21

EAC

Equipment Acknowledge Code. Reply for Host request to change equipment constants.0 = Acknowledge1 = Denied, at least one constant does not exist.2 = Denied, busy3 = Denied, at least one constant out of range4 = Command unavailable>4 = Other error

S2,F16 21



Format



ECIDNOTE-Equipment Constant ID descriptions are provided in “ECID Descriptions” on page 161.

Equipment Constant I.D. 4 = EXT_HOST Default = 1 6 = PIO_MODE Default = 013 = MSC_INTLK Default = 032 = MIN_WAFER_POS Default = 2990 33 = STAGE_POS Default = 11.40034 = SLOT_CNT Default = 25(No. of cassette slots)35 = SLOT_PITCH Default = 0.25 inch (Pitch from slot-to-slot in cassette)37 = SINGLE_PORT Default = 038 = HOST_OPTION Default = 0(use Serial SECS interface to control an VersaPort)39 = CASSETTE_SIZE_ Default = 0OPTION (standard: 200mm)40 = DEVICE I.D. Default = 25141 = BAUD_RATE. Default = 960042 = DEDICATED TAG Default = offPROTOCOL50 = SECS TIMEOUT T1 Default = 1 sec51 = SECS TIMEOUT T2 Default = 2 sec 52 = SECS TIMEOUT T3 Default = 0(0 means 6 sec) 59 = SUBSTRATE HGT Default 3061 = ELEV HOME OFFSET Default = 063 = DEFAULT CASSETTE Default = 0PRESENT CONFIRMATION67 = CASSETTE BASE OFFSET Default = 085 = FSD ASCII OPTION Default = 086 = STAGE SEATER OUT Default = 087 = SHUTTLE ADV POS Default = 410089 = SHUTTLE OPTION Default = 090 = SHUTTLE HOME OFFSET Default = 091 = FRONTLOAD COMPATIBLE Default = 092 = TAG_PROBE_BAUD Default = 960098 = BRAKE OPTION Default = 0

S2,F13S2,F14S2,F15

A5

ECV Equipment Constant Value S2,F14S2,F15

Based on ECID

EEDEvent Enable / Disable 0 = Disable 1 = Enable

S1,F6S2,F38 A5

ELDNPort lifter at top limit0= Not at top limit1= At top limit

S1,F6S2,F33 A5

ELSTAGEPort lifter at Stage, variable0 = False1 = True

S1,F6 A5



Format



SECS Communicationa

ELUPPort lifter Up, variable0 = False1 = True

S1,F6S2,F33 A5

ERACKEnable/Disable Event Report Acknowledge code0 = Accepted1 = Denied

S2, F38 21

EVPORTS Port lifter position from home, in mils S1, F6S2, F33 A5

EXT_HOST

MSC Pod lock control1 = Enabled. Allows MSC to lock the Pod in place independently0 = Disabled

S2,F13S2,F15S2,F33

A5

HCACK

Host Command Acknowledge code0 = Acknowledge. 1 = Command does not exist2 = Cannot perform now3 = At least one parameter invalid5 = Seater not home6 = VersaPort busy7 = Pending alarm not cleared8 = Home calibration pending9 = Fan flow error10 = Cannot perform, manual mode required11 = Cannot perform, Host in parallel host control mode64 = In manual service mode65 = Pod missing66 = Host not ready68 = Already done69 = MSC not ready

S2,F42 21

HOMESTVersaPort Home status0 = Versa not at Home1 = VersaPort home

S1,F6S2,F33 A5

HOST_OPTION

0 = Serial SECS interface (no Parallel host support)1 = Open/close parallel interface3 = Serial ASCII interface4 = Serial ASCII interface with echo5 = Serial ASCII interface with checksum

S2,F13S2,F15 A5

INDEX_REV VersaPort software part number S1,F6 41

INXOPSVersaPort operational status0 = VersaPort busy1 = ready for new command

S1,F6S2,F33 A5



Format



LAST_ERROR

Last Error encountered1 = Position following error2 = VersaPort not Home3 = VersaPort busy4 = Pod removed/missing 5 = Abort by user6 = Wafer Seating7 = Protrusion sensor failure8 = Slot sensor failure9 = Wafer presence sensor failure10 = Flash sensor failure11 = Position limit over-travel limit trip12 = Missing door13 = Excessive wafer protrusion14 = System internal time-out15 = Servo command error16 = Pod door open time-out17 = Pod door close time-out18 = Pod hold-down open time-out19 = Pod hold-down close time-out20 = Wafer seater failed to move toward wafer21 = Wafer seater failed to return home22 = Port failed to reach target position24 = System error27 = Loss of configuration data28 = Cassette not present29 = Loss of air flow30 = Fatal pod removed35 = Cassette present37 = User soft abort38 = Fatal wafer seating39 = Encoder error40 = Shuttle following error49 = Failed reach target50 = Shuttle not home51 = No port door pos52 = Missing shuttle home sensor53 = Missing elevator home sensor59 = Tag communications error60 = Failed to reach shuttle target position.

S1,F6 A9

LFUNC

Last Function done, 1 byte0 = Power up1 = Open/reach stage2 = Close/autohome8 = Map16= Homing calibration34= Move command

S1,F6S2,F33 A5



Format



SECS Communicationa

LRACK

Link Report Acknowledge code, 1 byte 0 = Accepted 1 = Denied, insufficient space 2 = Denied, invalid format 3 = Denied, at least one CEID link already defined 4 = Denied, at least one CEID link does not exist>4 = Other errors

S2, F36 21

MDLN Equipment Model type, 6 bytes max. S1,F2 41

MIN_WAFER_POS Minimum distance from port lifter to first wafer position in cassette

S2,F13S2,F15 A9

MSC_ENABLEMSC control status:0 = Disable 1 = Enable (VersaPort control available via MSC port)

S2,F13S2,F15S2,F33

A5

MSC_INTLK

MSC interlock option:0 = Disables interlock1 = Enable interlock (MSC enable required for Pod opening)

S2,33 A5

PIO_ENABLEValue of parallel interlock0 = Interlock off1 = Interlock on (enabled)

S1,F6S2,F33 A5

PIO_MODE 1 = Parallel interlocks required0 = Parallel interlocks disabled (default)

S1,F6S2,F13S2,F15S2,F33

A5

PIO_1PIO_2 PIO_3PIO_4PIO_5

Reserved for future useReserved for future useReserved for future useReserved for future useReserved for future use

S1,F6 A5

PIPPod in place status, one byte0 = No Pod present1 = Pod present

S1,F6S2,F33 A5

PRST

Port status, one byte 0 = Port unlocked 1 = Port locked2 = None of the above

S1,F6S2,F33 A5



Format



RCMD

NOTE . . .

THE RCMD MESSAGES ARE ACCEPTED ONLY AFTER THE VERSAPORT HAS BEEN PLACED IN SERVICE MODE. SERVICE MODE CAN BE ENTERED BY ISSUING AN HCS COMMAND (S2,F41) AND RCMD = 18.

Remote Command, Send Parameter Required1 = (A) Host to unlock port None2 = (A) Host to lock port None9 = (A) Go to stage position None11 = (A) Get wafer map None12 = Go to specified position Position in mils13 = (A) Go Home None14 = Reseat wafer None15 = (A-M) Self-Test None16 = Reset VersaPort error None17 = Move a relative (1)Direction: up = 1 distance from the down = 0 current position (2)Relative Distance in mils18 = (A-M) Switch out of normal operation mode and into service mode None19 = (A) Home position calibration None20 = (A-M) Emergency stop None83 = (A-M) Soft stop None84 = Verify cassette 0 = Do not care1 = Confirm cassette present2 = Confirm cassette not present90 = Stage seater out128 = (A-M) Get motor status None129 = (M) Close port-lifter servo loop None130 = (M) Open port-lifter servo loop None131 = (M) Reset servo driver circuit None133 = (A-M) Return operation to normal mode None134 = (A-M) Get IO port status None135 = (M) Modify individual IO bit (1) IO port no. 0 to 2 (format A9)(2) IO bit no. 0 to 7 (format A9)136 = (A-M) Get system IRQ count report None137 = (M) Wafer sensor align.:(1) Sensor type (format A9):0 = Wafer sensor1 = Slot sensor2 = Wafer protrude sensor138 = (M) Modify DAC threshold: (1) number (0 to 2)(2) New value 0 to 255

S2,F41 A5



Format



SECS Communicationa

RCMD

Remote Command, Send Parameter Required140 = (A-M) Get wafer map report: (1) Map type (format A9): 0=Wafer map pos 1=Slot map pos 2=Not determined 3=Raw data 4=Raw data 5=Raw data(2) First data point to report (format A9):1 to 25 for wafer- or slot-map 0 to 99 for raw data(3) Last data point to report (format A9). should not be greater than first data point plus 10 (Ex. first=1, last=11): 1 to 25 for map data 0 to 99 for raw data141 = (M) Lock Pod door None142 = (M) Unlock Pod door None143 = Lock Pod hold-down latch None144 = Unlock Pod hold-down latch None145 = Move wafer seater toward cassette None146 = Return wafer seater to Home None147 = Lock hold-down latch, unlock door None148 = Lock door, unlock hold-down latch None151 = Reserved for future use154 = Brake off155 = Brake on161 = Advance shuttle162 = Retract shuttle170 = Calibrate shuttle171 to 190 Reserved for future use191 = Modify system debug option (format A9)(1) 0 = Communication message 1 = VersaPort msg.(2) 0 = Disable debug

NOTE . . .

PF PARAMETER FORMAT** DURING NORMAL OPERATION, THE DEBUG OPTION SHOULD BE DISABLED.

*** IN RESPONSE TO HOST COMMAND, THE VERSAPORT REPORTS REQUESTED DATA WITH A TERMINAL MESSAGE (S10,F3).

S2,F41



Format



RPTn Report Number, defined for S6,F13 must start at 1 and increment consecutively within each list

S2,F33S2,F35S6,F13

A5

SEATER_ST

Seater state:0 = Seater at home1 = Seater out2 = None of the above

S1,F6S2.F33 5

SFCD

Status Form Code, 1 byte(Echo of form code)0 = General status data1 = Software revision, event data2 = Wafer map3 = Count data

S1,F5 21

SINGLE_PORT

Option to combine Host and MSC control through a single port0 = Disabled1 = Enabled 2 = MSC for Tag only

S2,F13S2,F15 A5

SLOT_CNT Slot Count. Total number of slots in cassette (Default = 25)

S2,F13S2,F15 A9

SLOT_N

Wafer present status in cassette slot (1 to 25)0 = Do not know1 = Wafer present2 = Empty4 = Cross slotted wafer

S1,F6S2,F33 A5

SLOT_PITCH Distance from slot to slot in cassette (mils). Default: 250 mils

S2,F13S2,F15 A9

SLOT_POS

Current port lifter slot position, one byte0 = Home1 = 25 slot number255= Beyond slot number 25

S2,F13S2,F33 A5

SOFTREV Software Revision code, 6 bytes maximum S1,F2 41

STAGE_POS Stage position in thousandths of inch from top(default = 10150 mils)

S2,F13S2,F15 A9

TEXTID

A single line of characters. Terminal number, 1 byte 0 = Single or main terminal>0 = Additional terminals at the same equipment

S10,F3S10.F3

41A5

TOTAL_HOME Total number of autohome operations since install S1,F6 71TOTAL_MAP Total number of wafer map operations since install S1,F6 71TOTAL_PU Total number of power-up operations since install S1,F6 71TOTAL_NRECERR Total number of non-recoverable errors since install S1,F6 71



Format



SECS Communicationa

ECID DescriptionsThe available ECID and default value of ECV for the VersaPort are listed below.

External Host (ECID 4)When this option is turned on, the MSC Host will be given access to lock and unlock the Pod. With the ability to keep the Pod locked, the MSC host can prevent a Pod from being removed from the VersaPort when it is in the middle of reading or updating information in the Tag.

0: Disable S2,F21 commands from External Host. The commands RCMD 20: RCS_KEEP_PORT_LOCK and RCMD 21: RCS_PORT_LOCK_IMMATERIAL will not be accepted from the External Host.

1: Enable S2,F21 commands from External Host. The commandsRCMD 20: RCS_KEEP_PORT_LOCK and RCMD 21: RCS_PORT_LOCK_IMMATERIAL will be accepted from External Host.

TOTAL_RECERR Total number of recoverable errors that have occurred since install S1,F6 71

TOTAL_STAGE Total number of stage operations since installation S1,F6 71TOTAL_SSEARCH Total number of slot search operations since installation S1,F6 71

TOTAL_WSEARCH Total number of wafer search operations since installation S1,F6 71

VID

Variable I.D.1 = <ELDN> 2 = <EVPORTS>3 = <ELUP>4 = <EXT_HOST>5 = <HOMEST> 6 = <PIO_MODE> 7 = <INXOPS> 8 = <LFUNC> 9 = <PIO_ENABLE>10 = <PIP>11 = <PRTST> 12 = <MSC_ENABLE>13 = <MSC_INTLK>14 = <SEATER_ST>15 = <SLOTPOS>16 = <SORTMODE>17 = <WAFER_MAP>

S2,F33S6,F13 A5

WAFER_MAP

List of cassette slot status, list n:1. <SLOT 1> Slot #1 status. . .N. <SLOT N> Slot #N status

S1,F6S2,F33 01



Format



Default: 1.

NOTE . . .

OTHER COMMANDS UNDER S2,F21 SUCH AS RCMD 22: RCS_BLINK_STS_LED AND RCMD 27: RCS_STOP_BLINK_STS_LED CAN ALWAYS BE ACCEPTED FROM THE EXTERNAL HOST REGARDLESS OF THE VALUE OF ECID 4.

PIO INTERLOCK (ECID 6)This option provides a safety interlock to protect the Process Tool from being damaged by unauthorized VersaPort motion. When this option is enabled, an explicit enable signal is required from the Process Tool, through its parallel-host interface, to make the VersaPort active. Otherwise, the port-lifter motion of the VersaPort is inhibited from moving. The Process Tool can use this signal to indicate the readiness of the Tool to permit VersaPort motion.

This is useful to a serial host that lacks the means to synchronize with the process tool.

0: Disable the interlock with the Parallel port.

1: Enable the interlock with the Parallel port. The meaning is: If the signal coming from the Parallel port pin 2 is high, any motion commands coming from the Host (S2,F41 commands or ASCII commands) will be denied. Otherwise, the VersaPort is active.

Default: 0.

MSC INTERLOCK (ECID 13)This option provides an interlock between multiple Hosts that control the VersaPort wafer transfer function and SMART-Tag material tracking. If a Tag is attached to the Pod, the MSC can access the information on the Tag and verify that the product lot is the proper lot that is to be processed by this particular Process Tool at this particular time. If yes, then the lot is validated and an RCS command can be sent to the VersaPort. If no, MSC can send another RCS command to lock-out the VersaPort and prevent mis-processing of the product. This option should only be used when an VersaPort is connected to both an MSC Host computer and an equipment-process-host computer.

0: Disable the interlock with the CIM Host. The S2,F21 commandsRCMD 23: RCS_ENABLE_OPEN and RCMD 24: RCS_DISABLE_OPENwill not be accepted from External Host and therefore the External Host will not affect theacceptance of commands from the Host.

1: Enable the interlock with External Host. The meaning is: the VersaPort would not accept any motion commands from the Host (S2,F41 commands or ASCII commands, thereby not releasing the Pod materials to the Tool) until it has first received an RCS_ENABLE_OPEN command from the External Host. After being enabled, the VersaPort would respond to any Host command until a Return Home command is executed. After returning Home, a new RCS_ENABLE_OPEN command from the External Host is needed before another motion command can be accepted.



SECS Communicationa
Default: 0.
SORT MODE (ECID 16)Send or receive or both. The choice of this item does not affect the VersaPort.

MIN WAFER POS (ECID 32)Default value for the beginning of wafer number one position (reference: bottom of port plate).

Default: 3100 mils.

STAGE POS (ECID 33)In response to a go to stage command from the Host, the VersaPort uses this configuration data to lift the Pod top to expose a cassette so that a Z-axis moving robot can pick and place wafers into and out of the cassette. The default value is also the maximum acceptable value.

Default: 11350 mils.

SLOT COUNT (ECID 34)This is the number of slots in the cassette (typically 25), with a maximum of 30 slots.

Default: 25.

SLOT PITCH (ECID 35)This is the pitch from slot-to-slot in a cassette, which is the distance between the center of one slot to the center of an adjacent slot.

Default: 250 mils.

SINGLE PORT (ECID 37)This option allows the Host to combine the control of the motion function and SMART-Traveler System material tracking through a single RS-232 port. Normally (with the Single Port option set to value 0), the motion function is controlled through the Host port, while the STS function is controlled through the MSC port. With this option set to value 1, all communication between the Host and the VersaPort (for both motion control and SMART-Tag information access) are consolidated to the HOST port.

0: MSC port -- access STS commands/reports such as RCS (S2,F21) and Smart Tag 8200 read/write commands. Host port -- access HCS (S2,F41) commands/reports.

ASCII port – Standard ASCII commands and protocol.

1: MSC port -- not supported. Host port -- access HCS (S2,F41), STS commands/reports such as RCS (S2,F21) and Smart Tag 8200 read/write commands.


2: MSC port -- read/write Smart Tag 8200 only, with either 3-wire or 5-wire RS232 cable.Host port -- access HCS (S2,F41) commands/reports.




3: MSC port – not supported.

Host port -- access HCS (S2,F41) commands/reports.

ASCII port – Standard ASCII commands and protocol and Smart Tag 8200 capability.

4: MSC port – access STS commands/reports such as RCS (S2, F21) and Smart Tag 8400 read/write.

Host port – access HCS (S2,F41) commands/reports.


5: MSC port – access Smart Tag 8400 read/write.

Host port -- access HCS (S2,F41), STS commands/reports such as RCS (S2,F21).


6: MSC port – Smart Tag 8400 read/write.

Host port -- access HCS (S2,F41), RCS (S2,F21) and other commands/reports.


7: MSC port – not supported.

Host port -- access HCS (S2,F41)and other commands/reports and Smart Tag 8400 read/write.

ASCII port – STS commands/reports such as RCS.

Default = 0

NOTE . . .

IF OPTION 2 IS CHOSEN, ALL INCOMING DATA ARRIVING THROUGH THE MSC PORT WILL BE PASSED THROUGH TO THE SMART-TAG PROBE, REGARDLESS OF WHETHER THE RTS LINE IS PULLED HIGH OR NOT. THE USER SHOULD AVOID ISSUING ANY SECS COMMANDS THROUGH THE MSC PORT.

HOST OPTION (ECID 38)This option allows the Host to select the proper type of interface for controlling a VersaPort. This option is used for choosing the use of SECS, ASCII, or Parallel communication.

0: Use SECS serial communication (via the Host/Equip port), parallel host is not supported

1: Use parallel communication (via the Parallel port), Open/Close Host interface

3: Use ASCII serial communication, echo mode

4: Use ASCII serial communication, non-echo mode



SECS Communicationa
5: Use ASCII serial communication, checksum mode.
Default: 0.

CASSETTE SIZE OPTION (ECID 39)This option configures the VersaPort to operate as a 200mm Pod. Default value of the cassette size option is 0 (200mm Pod). The value must be set in accordance with the actual cassette being used.

0: Standard 200mm

Default: 0.

DEVICE I.D. (ECID 40)The VersaPort device I.D. is used in the SECS message to identify the source of the message. When multiple VersaPorts are controlled by a single Host, it is necessary to assign a unique device I.D. to each VersaPort for identifying from which VersaPort a SECS message was originated. The device I.D. of an VersaPort can be configured to any value between 1 to 65535.

Default: 251.

BAUD RATE (ECID 41)This option allows a Host to modify the VersaPort serial communication baud rate through the HOST/Equip port and ASCII port. Four baud rates are available:

2400 baud

4800 baud

9600 baud

19200 baud.

Default: 9600 baud.

SECS COMMUNICATION TIMEOUT T1 (ECID 50)This option specifies the maximum time delay tolerated between characters within a SECS data block. If the SECS message receiver fails to receive an expected character within T1, it will respond with a NAK (Hex 15) and the data received so far will be discarded.

Acceptable range: 0 – 3 (sec). 0 means 0.1 sec (specified in ACOMLIB).

Default: 1 (sec).

SECS COMMUNICATION TIMEOUT T2 (ECID 51)This option specifies the maximum time delay tolerated between sending an ENQ (Hex 05) and receiving the EOT (Hex 04) response, or between sending a data block and receiving the ACK (Hex 06) or NAK (Hex 15) response, or between sending an EOT and receiving the first message character. When T2 expires, it is assumed that nothing is received.

Acceptable range: 0 – 25 (sec). 0 means 0.4 sec (specified in ACOMLIB).



Default: 2 (sec).

SECS COMMUNICATION TIMEOUT T3 (ECID 52)If a communication reply is expected (the w-bit in the header is set to 1), this option specifies the maximum time delay tolerated between sending a primary message to the Host and receiving the secondary message (reply) from the Host. When T3 expires, the VersaPort aborts the transaction.

Acceptable range: 0 -- 60 (sec). 0 means 6 sec (specified in ACOMLIB).

Default: 0 (6 sec).

CASSETTE PRESENT CONFIRMATION (ECID 63)During Stage (Open) operation, if no cassette is on the pod door and ECID 63 is 0, the elevator will return Home and send an alarm “Cassette not present”. If there is a cassette on the pod door and ECID 63 is 2, the elevator will return Home and send an alarm “Cassette present”.

0: Confirm cassette present (during Pod opening)

1: Do not care

2: Confirm cassette not present (for cassette unload only)

Default: 0 (Confirm cassette present).

MRP TYPE (ECID 166)The 8-slot reticle cassette has a specified tab located in the rear of the cassette for laser identification. The VersaPort auto-detects the type of cassette when switching from a single reticle pod to a multiple reticle pod during upward movement of the port plate.

0: 4-slot reticle cassette

1: 8-slot reticle cassette

Default: 0

Range: 0~1



SECS Communicationa
Microstation Controller (MSC) Communications Specification
Tracking Lots through the Tag ReaderWafer lot I.D.s are stored electronically on a “Tag” affixed to the Pod. The information is used to track lots through the process and validate Lot and Process Tool identification. An infrared-based Tag reader mounted on the VersaPort is used to access the information for use by an external host (separate from the Process Tool).

Controlling Lots through the MSCThe Asyst Technologies MicroStation Controller (MSC) provides the means for a host to track one or more processes. There is a limited set of SECS commands that the external host can send to the VersaPort through the MSC. These commands are as follows:

S2,F21: Remote command Send (RCS) *S,H→ E, replyDescription: Simplified message for the internal Host material tracking control. This is available on the

Host secondary interface (i.e. connector labeled MSC), if the SINGLE_PORT option is disabled. Primarily used in conjunction with the SMART-Traveler System.

Structure: <RCMD>

Data Format A5

S2,F22: Remote Command Acknowledge (RCA) *S,H← EDescription: Acknowledge or error.

Structure: <CMDA>

Data Format: 21



Example of Data Exchange for a Simple "Are You There" Request1. Host sends: 05

ENQ

2. VPORT replies:04EOT

3. Host sends: 0ALength Byte

10 Bytes, i.e., header only00 FB 81 01 80 01 F8 02 00 00Header

Device ID: 251S1, F1Block number 1System bytes F8 02 00 00

02 64Check Sum

4. VPORT replies:06ACK

5. VPORT sends: 05ENQ

6. Host replies: 04EOT

7. VPORT sends: 1CLength Byte

28 Bytes; i.e., header plus 18 bytes of data80 FB 01 02 80 01 F8 02 00 00Header

Device ID: 251S1, F2Block number 1System bytes F8 02 00 00

01 02 41 06 49 4E 44 58 20 20 41 06 30 30 31 2E 32 30Data

List of 2 itemsEquipment Model Type, ASCII 6 bytes: 49 4E 44 58 20 20

"I N D X _ _"Software Rev. Code, ASCII 6 bytes: 30 30 31 2E 32 30

"0 0 1 . 2 0" 05 8ACheck Sum

8. Host replies: 06ACK



SECS Communicationa
Sample SECS Messages between Host Tool and VPort
(1a) Host issues a command to enter Normal (AUTO) operation (default) mode.Host: 05 ENQVPORT: 04 EOT

Host: 11 00 FB 82 29 80 01 1200 00 00 01 02 A5 01 8501 00 02 D4

Stream = 2, Function = 41RCMD = 133

VPORT: 06 ACK

(1b) VPORT accepts AUTO mode command.VPORT: 05Host: 04

VPORT: 0D 80 FB 02 2A 80 01 1200 00 00 21 01 00 01 C8

Stream = 2, Function = 42HCACK = 0 (accept)

Host: 06

(2a) Host issues command to move to stage position.Host: 05VPORT: 04

Host:11 00 FB 82 29 80 01 1400 00 00 01 02 A5 01 0901 00 02 5A


VPORT: 06

(2b) VPORT accepts the stage command. VPORT: 05Host: 04

VPORT: 0D 80 FB 02 2A 80 01 1400 00 00 21 01 00 01 CA

Stream = 2, Function = 42HCACK = 0 (accept)

Host: 06

(2c) VPORT sends exit Home event message.VPORT: 05Host: 04

VPORT:14 80 FB 06 0D 80 01 6300 00 00 01 03 A5 01 00A5 01 15 01 00 03 D8

Stream = 6, Function = 13CEID = 21 (exit Home),link report list = 0 (none)

Host: 06

(2d) VPORT sends the reach stage event message.VPORT: 05Host: 04



VPORT:14 80 FB 06 0D 80 01 6800 00 00 01 03 A5 01 00A5 01 35 01 00 03 FD

Stream = 6, Function = 13

CEID = 53 (Reach stage)Host: 06

(3a) Host issues a command to return VPORT Home.Host: 05VPORT: 04

Host:11 00 FB 82 29 80 01 1700 00 00 01 02 A5 01 0D01 00 02 61


VPORT: 06

(3b) VPORT accepts the return home command.VPORT: 05Host: 04

VPORT: 0D 80 FB 02 2A 80 01 1700 00 00 21 01 00 01 CD

Stream = 2, Function = 42HCACK = 0

Host: 06

(3c) VPORT has reached Home and sends event message.VPORT: 05Host: 04

VPORT:14 80 FB 06 0D 80 01 7500 00 00 01 03 A5 01 00A5 01 12 01 00 03 E7


CEID = 18 (End home)Host: 06

(4a) Host issues a command to move VPORT's port-plate lifter four inches above Home.Host: 05VPORT: 04

Host:15 00 FB 82 29 80 01 2800 00 00 01 02 A5 01 0C01 01 A9 02 0F A0 03 CC

Stream = 2, Function = 41RCMD = 12Parameter 1 = 4000 (mils)

VPORT: 06

(4b) VPORT accepts the command to move port-plate lifter.VPORT: 05Host: 04

VPORT: 0D 80 FB 02 2A 80 01 2800 00 00 21 01 00 01 DE


Host: 06



SECS Communicationa
(4c) VPORT reached the specified position and reports with an event message*.VPORT: 05Host: 04
VPORT:14 80 FB 06 0D 80 01 7500 00 00 01 03 A5 01 00A5 01 37 01 00 04 0C


CEID = 55 (Reach pos)Host: 06

* These event messages will not be reported by the VPORT unless an EDER command has been sent by the Host during power-up. The EDER command will either specifically enable the referenced events or globally enable all events with a list of zero (see example 18a).

(5a) Host issues the command to place VPORT to service mode.Host: 05VPORT: 04

Host:11 00 FB 82 29 80 01 2C00 00 00 01 02 A5 01 1201 00 02 7B


VPORT: 06

(5b) VPORT accepts the command to be placed in service mode.VPORT: 05Host: 04

VPORT: 0D 80 FB 02 2A 80 01 2C00 00 00 21 01 00 01 E2


Host: 06

(5c) VPORT sends an event message to report entering service mode. VPORT: 05Host: 04

VPORT:14 80 FB 06 0D 80 01 CC00 00 00 01 03 A5 01 00A5 01 04 01 00 04 30


`CEID = 4Host: 06

(6a) Host issues a self-test command.Host: 05VPORT: 04

Host:11 00 FB 82 29 80 01 3500 00 00 01 02 A5 01 0F01 00 02 81


VPORT: 06

(6b) VPORT accepts the command to perform a self-test.VPORT: 05



Host: 04

VPORT: 0D 80 FB 02 2A 80 01 3500 00 00 21 01 00 01 EB


Host: 06

(6c) VPORT sends an exit Home event message.VPORT: 05Host: 04

VPORT:14 80 FB 06 0D 80 01 F600 00 00 01 03 A5 01 00A5 01 15 01 00 04 6B


CEID = 21Host: 06

(6d) VPORT sends a terminal message to indicate self-test is done.VPORT: 05Host: 04

VPORT:

24 80 FB 0A 03 80 01 1401 00 00 01 02 A5 01 0141 13 53 65 6C 66 2D 7465 73 74 20 63 6F 6D 706C 65 74 65 64 0A 70


message = "SELF-TEST COMPLETED"

Host: 06

(6e) VPORT multiple terminal messages to report the results of self-test.VPORT: 05Host: 04

VPORT:

44 80 FB 0A 03 80 01 1501 00 00 01 02 A5 01 0141 33 54 68 65 20 66 6F6C 6C 6F 77 69 6E 67 2065 72 72 6F 72 73 20 6172 65 20 65 6E 63 6F 756E 74 65 64 20 64 75 7269 6E 67 20 73 65 6C 662D 74 65 73 74 16 A9


message = "THE FOLLOWING ERRORS ARE ENCOUNTERED DURING SELF-TEST"

Host: 06

VPORT: 05Host: 04



SECS Communicationa

VPORT:

30 80 FB 0A 03 80 01 1601 00 00 01 02 A5 01 0141 1F 20 20 57 41 46 4552 20 50 52 4F 54 52 5553 49 4F 4E 20 53 45 4E53 4F 52 20 45 52 52 4F52 08 5E


message = "WAFER PROTRUSION SENSOR ERROR"

Host: 06

(7a) Host issues a command to clear the VPORT error.Host: 05VPORT: 04

Host:11 00 FB 82 29 80 01 3600 00 00 01 02 A5 01 1001 00 02 83


VPORT: 06

(7b) VPORT accepts the command to clear error.VPORT: 05Host: 04

VPORT: 0D 80 FB 02 2A 80 01 3600 00 00 21 01 00 01 EC


Host: 06

(8a) Host issues a command to read VPORT configuration data.Host: 05VPORT: 04

Host:

2A 00 FB 82 0D 80 01 3700 00 00 01 0A A5 01 04A5 01 06 A5 01 0D A5 0120 A5 01 21 A5 01 22 A501 23 A5 01 25 A5 01 26A5 01 27 09 44

Stream = 2, Function = 13request data for the followingECIDs: 4, 6, 13, 32, 33, 34, 35, 37, 38 and 39

VPORT: 06

(8b) VPORT reports the requested configuration data.VPORT: 05Host: 04



VPORT:

60 80 FB 02 0E 80 01 3700 00 00 01 0A 01 02 A501 04 A5 01 01 01 02 A501 06 A5 01 00 01 02 A501 0D A5 01 00 0102 A5 01 20 A9 02 0B 9F01 02 A5 01 21 A9 02 283C 01 02 A5 01 22 A9 0200 19 01 02 A5 01 23 A902 00 FA 01 02 A5 0125 A5 01 00 01 02 A5 0126 A5 01 00 01 02 A5 0127 A5 01 00 11 1B

Stream = 2, Function = 14Reported configuration data:Ext_host (ECID 4) = 1 (Enable)PIO mode (ECID 6) = 0 (Disable)MSC Intlk (ECID 13) = 0 (Disable)Min Wafer pos (ECID 32) = 2975 (mils)Stage pos (ECID 33) = 13400 (mils)Slot cnt (ECID 34) = 25Slot pitch (ECID 35) = 250 (mils)Single port option (ECID 37) = 0 (Disable)Parallel host option (ECID 38) = 0 (Disable)Cassette size option (ECID 39) = 0 (Std 200mm)

Host: 06

(9a) Host issues a command to modify the VPORT equipment constant (Changing slope position to 10.2 inches below Home position).Host: 05VPORT: 04

Host:15 00 FB 82 0F 80 01 3C00 00 00 01 01 01 02 A501 21 A9 02 27 D8 04 2B

Stream = 2, Function = 15ECID = 33 (Stage pos),New pos = 10200 (mils)

VPORT: 06

(9b) VPORT accepts the command to modify the VPORT equipment constant.VPORT: 05Host: 04

VPORT: 0D 80 FB 02 10 80 01 3C00 00 00 21 01 00 01 D8


Host: 06

(10a) Host issues a command to request the VPORT status.Host: 05VPORT: 04

Host: 0D 00 FB 81 05 80 01 0400 00 00 21 01 00 01 94

Stream = 1, Function = 5Form code = 0

VPORT: 06

(10b) VPORT reports status.VPORT: 05Host: 04



SECS Communicationa

VPORT:

4D 80 FB 01 06 80 01 0400 00 00 01 04 21 01 0001 0C A5 01 00 A5 01 01A5 01 01 A5 01 01 A5 0102 A5 01 00 A5 01 00 A501 01 A5 01 00 A5 01 00A5 01 01 A5 01 00 A9 0200 00 01 06 A5 01 01 A501 00 A5 01 00 A5 01 01A5 01 00 A5 01 00 0E 0E


PIO_mode = 0, PIP = 1,inxops = 1, homest = 1,lfunc = 2, prtst = 0, eldn = 0,elup = 1, elstage = 0, seater_st = 0,inxmode = 1, slotpos = 0, eVPORTs = 0,pio_1 = 1, pio_2 = 0, pio_3 = 0,pio_4 = 1, pio_5 = 0, pio_6 = 0

Host: 06

(11a) Host issues an HCS command to find a new DAC threshold.Host: 05VPORT: 04

Host:15 00 FB 82 29 80 01 0C00 00 00 01 02 A5 01 8901 01 A9 02 00 01 03 7F

Stream = 2, Function = 41RCMD = 137, Parameter 1 = 1(slot sensor)

VPORT: 06

(11b) VPORT accepts the HCS command.VPORT: 05Host: 04

VPORT: 0D 80 FB 02 2A 80 01 0C00 00 00 21 01 00 01 C2


Host: 06

(11c) VPORT reports the value of the DAC threshold for the requested sensor.VPORT: 05Host: 04

VPORT:

27 80 FB 0A 03 80 01 3E01 00 00 01 02 A5 01 0141 16 44 41 43 20 23 322C 20 74 68 72 65 73 686F 6C 64 20 3D 20 33 3609 85

Stream = 10, Function = 3Message = "DAC #2, THRESHOLD = 36"

Host: 06

(11d) VPORT sends an event message to indicate the end of sensor calibration.VPORT: 05Host: 04

VPORT:14 80 FB 06 0D 80 01 4101 00 00 01 03 A5 01 00A5 01 3B 01 00 03 DD

Stream = 6, Function = 13CEID = 59

Host: 06



The following examples illustrate how the default event report option can be modified by the Host to have the VPORT automatically report additional information following certain events of interest. After completing messages 18 to 22, the VPORT will be configured to:

1. Enable all event up dates.

2. Attach cassette map status with the following event reports:

a. Reach stage

b. Return Home

c. Complete map

NOTE . . .

THE MODIFIED REPORT OPTIONS ARE NOT SAVED IN A PERMANENT FILE AND MESSAGES 18 TO 22 MUST BE RESENT AFTER EACH POWER CYCLE FOR THE EXPANDED EVENT REPORTS TO TAKE EFFECT.

3. Attach port-lifter position and current slot number at transfer height with the following event reports:

a. Reach new wafer

(12a) Host issues a command to inquire about the VPORT cassette map statusHost: 05VPORT: 04

Host: 0D 00 FB 81 05 80 01 0D00 00 00 21 01 02 01 9F

Stream = 1, Function = 5Form code = 2

VPORT: 06

(12b) VPORT reports the VPORT cassette wafer map statusVPORT: 05Host: 04

VPORT:

5C 80 FB 01 06 80 01 0D00 00 00 01 02 21 01 0201 19 A5 01 02 A5 01 01A5 01 01 A5 01 02 A5 0102 A5 01 02 A5 01 01 A501 02 A5 01 01 A5 01 02A5 01 01 A5 01 02 A5 0102 A5 01 01 A5 01 02 A501 02 A5 01 02 A5 01 02A5 01 02 A5 01 02 A5 0102 A5 01 02 A5 01 02 A501 02 A5 01 02 12 1F

Stream = 2, Function = 16Echoes Form Code = 2, slot 1to 25 status are: 2(empty),1(full), 1(full), 2(empty),2(empty), 2(empty), 1(full),2(empty), 1(full), 2(empty),1(full), 2(empty), 2(empty),1(full), 2(empty), 2(empty),2(empty), 2(empty), 2(empty),2(empty), 2(empty), 2(empty),2(empty), 2(empty), 2(empty)

Host: 06



SECS Communicationa
b. Reach new empty slot
c. Reach specified slot.

(13a) Host issues an EDER command to enable all CEID event messages.Host: 05VPORT: 04Host: 11 00 FB 82 25 80 01 05 Stream = 2, Function = 37

00 00 00 01 02 21 01 01 CEED = 1 (enable)01 00 01 BB List = 0 (All events)

VPORT: 06

(13b) VPORT accepts the EDER command.VPORT: 05Host: 04

VPORT: 0D 80 FB 02 26 80 01 0500 00 00 21 01 00 01 B7

Stream = 2, Function = 38ERACK = 0

Host: 06

(14a) Host issues a DR command to clear all defined reports.Host: 05VPORT: 04

Host:11 00 FB 82 21 80 01 0400 00 00 01 02 A5 01 0001 00 02 39


List = 0 (Clears all report)VPORT: 06

(14b) VPORT accepts the DR command.VPORT: 05Host: 04

VPORT: 0D 80 FB 02 22 80 01 0400 00 00 21 01 00 01 B2

Stream = 2, Function = 34DRACK = 0 (Accepted)

Host: 06

(15a) Host issues an LER command to clear all link event reports.Host: 05VPORT: 04

Host:11 00 FB 82 23 80 01 0600 00 00 01 02 A5 01 0001 00

Stream = 2, Function = 35List = 0 (clears all link event reports)

VPORT: 06

(15b) VPORT accepts the LER command.VPORT: 05



Host: 04

VPORT: 0D 80 FB 02 24 80 01 0600 00 00 21 01 00 01 B6

Stream = 2, Function = 36LRACK = 0 (accepted)

Host: 06

(16a) Host issues a DR command to define new reports. Host: 05VPORT: 04

Host:

28 00 FB 82 21 80 01 0800 00 00 01 02 A5 01 0001 02 01 02 A5 01 01 0102 A5 01 02 A5 01 0E 0102 A5 01 02 01 01 A5 010A 05 A5


For report #1:Vid 1 = 2 (EVPORTS), Vid 2 = 14 (SEATER_ST)For report #2:Vid 1 = 10 (PIP)

VPORT: 06

(16b) VPORT accepts the DR command.VPORT: 05Host: 04

VPORT: 0D 80 FB 02 22 80 01 0800 00 00 21 01 00 01 B6

Stream = 2, Function = 34DRACK = 0

Host: 06

(17a) Host issues an LER command to link new data reports with an event message.Host: 05VPORT: 04

Host:

4D 00 FB 82 23 80 01 0A00 00 00 01 02 A5 01 0001 06 01 02 A5 01 35 0101 A5 01 02 01 02 A5 0112 01 01 A5 01 02 01 02A5 01 39 01 01 A5 01 0201 02 A5 01 2D 01 01 A501 01 01 02 A5 01 33 0101 A5 01 01 01 02 A5 012F 01 01 A5 01 01 0B 45


For CEID 53, include report #2,

For CEID 18, include report #2,For CEID 57, include report #2,For CEID 45, include report #1,For CEID 51, include report #1,

For CEID 47, include report #1VPORT: 06

(17b) VPORT accepts the LER command.VPORT: 05Host: 04

VPORT: 0D 80 FB 02 24 80 01 0A00 00 00 21 01 00 01 BA

Stream = 2, Function = 36LRACK = 0

Host: 06



SECS Communicationa
(18a) For the case where event reports are initialized with messages 18 to 22 during power up, the VPORT will send an annotated report message similar to below after completing a stage operation.VPORT: 05Host: 04
VPORT:

23 80 FB 06 0D 80 01 3100 00 00 01 03 A5 01 00A5 01 35 01 01 01 02 A501 02 01 01 01 02 A5 010A A5 01 01 05 BC


CEID = 53 (Reach stage position), attachedreport #2, VID 1 = 10 (Pod in place), 1 (True)

Host 06


VersaPort 2200 Technical ManualAppendix B: Communications SoftwareASCII Serial Text Interface a
ASCII Serial Text Interface
An ASCII serial text interface is provided to the Host as an alternative to the SECS format for communication with a Load Port. This text interface is made up of ASCII commands specifically designed for Hosts that do not support SECS protocol. With this interface, a Host can have access to more than eighty percent of the available Load Port commands, including status inquiry, event/alarm reporting, and read/write of Load Port configuration data.

ASCII protocol is set up through the COMM_PROTOCOL option (ECID 38) in the Load Port, with the following modes:

• 3 (text interface with echo on),

• 4 (text interface without echo), or

• 5 (text interface with echo off, and a two byte checksum on the text message).

If the value of COMM_PROTOCOL is 0 or 1, the mode will be the same as 4 (non-echo).

The COMM_PROTOCOL data is stored in the Load Port's battery-backed NOVRAM and the data is retained even after power is removed from the Load Port.

ASCII Port Parameters Communication port:The serial text interface is available through the ASCII host port by configuring ECID 37. See Table 20, Data Dictionary, on page 150 for the description of possible values for ECID 37.

Communication parameters:• 9600 bauds

• 8 Data bits

• No parity

• 1 Stop bit



ASCII Serial Text Interfacea
Syntax:
NOTE . . .

ASYST RECOMMENDS ADDING AN “ESC” CHARACTER (27 IN DECIMAL, OR HEX 1B) IN FRONT OF EACH ASCII COMMAND SENT TO ELIMINATE LINE NOISE INTERRUPTION BETWEEN THE HOST AND THE ASYST TOOL. COMMANDS SENT TO THE ASYST TOOL WILL NOT BE TRUNCATED OR CASCADED WITH UNWANTED GARBAGE PRECEDING THE “ESC” CHARACTER.

AN EXAMPLE OF THE FORMAT: <ESC>HCS HOME<CR><LF>

• All messages are made up of ASCII characters (exceptions: CR, LF and BELL).

• Command and data fields are separated by a space or comma. Redundant spaces are ignored.

• All messages are terminated by a carriage return and line feed.

• If the echo option is turned on (Host communication option = 3), the Load Port will echo every character received from the Host port for a Host to perform data integrity check. This is a one-way echo that is applicable to messages initiated by the Host only.

NOTE . . .

THE HOST SHOULD NOT ATTEMPT TO ECHO MESSAGES INITIATED BY THE LOAD PORT REGARDLESS OF WHETHER THE ECHO OPTION IS TURNED ON OR NOT.

• All unrecognizable commands or format will be rejected with a bell (07).

• All commands and data are case sensitive. Only upper case characters are allowed.

• An Escape character can be used to abort a command.

• There are no header or length bytes associated with a serial text message. Checksum is available only if the checksum option (Host communication option = 5) is selected.

• With the text-checksum option interface, the checksum is two-byte binary data in INTEL format (low byte first, then high byte) that operates on every character in the message up to the line feed. The checksum should be placed after CR and LF in the message.

Example: HCS AUTO (CR)(LF)(0x6E)(2)where (0x6E) is the low order byte of the checksum, and (2) is the high order byte of the checksum



Exception: A command rejected with a BELL would not have checksum. (Bell)

Message SummaryQuick ReferenceUse Table 21 to determine the ASCII code that corresponds to a particular action. By utilizing variables associated with each main code, the full number of possible commands is expanded. A detailed explanation of the ASCII command, along with the variables, is given in the next section.

TABLE 21 ASCII Command Summary

Category / Action Direction ASCII ref. SECS

STATUSRequest the current status from the Load Port Send current Load port status to the Host

Host => EHost <= E

FSRFSD

S1F5S1F6

CONFIGURATIONRequest to read the Load Port configuration parameters. Send Load Port configuration parameters to the Host.

Host => EHost < = E

ECRECD S2F13

S2F14

Set Load Port configuration parameters Reply to request to set configuration parameters.

Host => EHost <= E

ECSECA

S2F15S2F16

MOTION COMMANDSSend command to the Load Port from an external Host(If ECID 37 is set to 2, 3, 6, or 7.) Reply to command from external Host (If ECID 37 is set to 2, 3, 6, or 7.)

Host => E

Host <= E

RCS

RCAS2F21

S2F22

Send commands to the Load Port Reply to command from the Host

Host => EHost <= E

HCSHCA

S2F41S2F42

EVENT REPORTINGEnable or disable Load Port event reports Reply to request to enable or disable event reports.

Host => EHost <= E

EDEREERA S2F37

S2F38




ASCII DetailsThe ASCII commands are list in alphabetical order by the mnemonic.

(AERS) Annotated Event Report Send Host <− Load PortDescription: The Load Port uses this message to notify the Host of the occurrence of an event. Equiv-

alent SECS: S6F13.

Structure: AERS<space>XX<CR><LF>where XX = Multi-character event message.

MESSAGES

Alarm message issued by the Load Port Host < = E ARS S5F1

Event message issued by the Load Port Host < = E AERS S6F13

TABLE 22 Event Messages

(XX) Description (ref. SECS CEID)

POD_REMOVED Operator removed Pod, for VersaPort with P91=0 1

CARRIER_REMOVED Operator removed Pod, (for VersaPort with P91=1) 1

POD_ARRIVED Operator placed Pod, for VersaPort with P91=0 2

CARRIER_ARRIVED Operator placed Pod, (for VersaPort with P91=1) 2

AUTO_MODE VersaPort entered auto mode 3MANUAL_MODE VersaPort entered manual mode 4POWER_UP VersaPort powered up 5

REACH_HOME VersaPort returned Home (for VersaPort with P91=0) 18

END_CLOSE VersaPort returned Home (for VersaPort with P91=1) 18

ABORT_HOME VersaPort failed to reach Home (for VersaPort with P91=0) 20

ABORT_CLOSE VersaPort failed to return HOME (for VersaPort with P91=1) 20

EXIT_HOME VersaPort left Home state 21

CMPL_LOCK Completed port lock (for VersaPort with P91=0) 31

CARRIER_AT_PORT Completed port lock (for VersaPort with P91=1) 31

TABLE 21 ASCII Command Summary (Continued)

Category / Action Direction ASCII ref. SECS



Example:

(ARS) Alarm Report Send Host <− Load PortDescription: The Load Port uses this message to notify the Host of the occurrence of an alarm condi-

tion. Equivalent SECS: S5F1.

Structure: ARS<space>YY<space>XXXXXXXXXX<CR><LF>

CMPL_UNLOCK Completed port unlock (for VersaPort with P91=0) 32

CARRIER_RELEASED Completed port unlock (for VersaPort with P91=1) 32

ABORT_LOCK Failed port lock (for VersaPort with P91=0) 33ABORT_ADVANCE Failed port lock (for VersaPort with P91=1) 33ABORT_UNLOCK Failed port unlock (for VersaPort with P91=1) 34ABORT_HM_POD Failed port unlock (for VersaPort with P91=1) 34CMPL_CAL Completed the Homing calibration 49ABORT_CAL Failed the Homing calibration 50

REACH_STAGE Reached the stage position (for VersaPort with P91=0) 53

ABORT_STAGE Failed to reach stage position 54REACH_POS Reached position 55ABORT_POS Failed to reach position 56CMPL_MAP Map completed 57ABORT_MAP Failed to get map 58CMPL_SELF-TEST End self-test 61FAILED_SELF-TEST Failed self-test 62MSC_ENABLE_OPEN MSC interlock enable 63MSC_DISABLE_OPEN MSC interlock disable 64PIO_ENABLED_MOVE PIO interlock enable 65PIO_DISABLED_MOVE PIO interlock disable 66SHUTTLE_CONFIG_CHG Shuttle config change 168SHUTTLE_ADVANCED Shuttle advanced 171ABORT_SHUTTLE_ADV Failed shuttle advance 172SHUTTLE_RETRACTED Retracted shuttle 173ABORT_SHUTTLE_RET Failed to retract shuttle 174TAG_TIMEOUT Tag comm timeout 175

Action ASCII CodeLoad Port powered up: AERS POWER_UP(CR)(LF)

TABLE 22 Event Messages (Continued)

(XX) Description (ref. SECS CEID)



where: YY = WARNING or FATAL,Fatal error is non-recoverableWarning is recoverableXXXXXXXXXX = alarm ASCII text, 60 chars. maximum
For a complete listing of alarm messages, please see the definition of ALTX in “Table 20Data Dictionary” on page 150.

Examples:

(ECA) New Equipment Constant Acknowledge Host <− Load PortDescription: The Load Port uses this message to either acknowledge or deny the Host's request

for a new equipment constant. Equivalent SECS: S2F16.

Primary/Secondary: Secondary; this is a response to an ECS message.

Structure: ECA<space>XX<CR><LF>Where XX = Equipment acknowledge code

Alarm message received Motion aborted becauseARS WARNING Cassette not present (CR)(LF) Cassette is missing

ARS FATAL Port door failed to open (CR)(LF)

Either pod-door motor failed to move or pod-door sensor has failed

ARS FATAL Wafer protrusion sensor malfunction (CR)(LF)

Wafer protrusion sensor is mis-aligned or not functioning

TABLE 23 Equipment Constant Acknowledgments

(XX) Description (ref. SECS EAC)OK New equipment data is accepted 0UNKNOWN_DATA New data is rejected, data value does not exist 1BUSY New data is rejected, Load Port is busy 2OUT_OF_RANGE New data is rejected, data out of range 3UNKNOWN_ECID New data is rejected, equipment ID is unknown 4ALARM Load Port in alarm state 7DENIED New data is rejected for other reasons Others



Examples:

(ECD) Equipment Constant Data Host <− Load PortDescription: The Load Port uses this message to return the equipment data requested by the

Host in an ECR message. Equivalent SECS: S2F14.

Primary/Secondary: Secondary; this is a response to an ECR message.

Structure: ECD<space>XX=data<CR><LF>Where: XX = equipment constant ID as defined in the “(ECS) New Equipment Con-stant Send Host -> Load Port” on page 186.data = equipment constant (numeric text)

Examples:

(ECR) Equipment Constant Request Host −> Load PortDescription: Host uses this message to read the configuration parameters in the Load Port such

as the Host interface mode and stage access position. Equivalent SECS: S2F13.

Primary/Secondary: Primary; the response will be an ECD message.

Structure: ECR<space>XX<CR><LF>Where: XX = Equipment constant ID as defined in the “(ECS) New Equipment Con-stant Send Host -> Load Port” on page 186.

Examples:

(ECS) New Equipment Constant Send Host −> Load PortDescription: This message is used by the Host to set Load Port configuration parameters such as

Host interface mode and stage access position. Equivalent SECS: S2F15.

Primary/Secondary: Primary; the response will be an ECA message.

Action ASCII CodeHost sends to Load Port: Modify Host option to echo text interface ECS<space>P38=3<CR><LF>

Load Port replies to Host: Host command is accepted: ECA<space>OK<CR><LF> Load Port replies to Host: Command rejected, VersaPort in alarm state: ECA<space>ALARM(CR)(LF)

Action ASCII CodeHost sends to Load Port: Request stage position ECR<space>P33(CR)(LF)Load Port replies to Host: Stage position is 10000 mils from Home ECD<space>P33=10000(CR)(LF)

Action ASCII CodeHost sends to Load Port: Request stage position ECR<space>P33(CR)(LF)Load Port replies to Host: Stage position is 10000 mils from Home ECD<space>P33=10000(CR)(LF)



Structure: ECS<space>XX=Data<CR><LF>
Where: XX = Equipment constant IDData = new data value

TABLE 24 Equipment Constant Codes

Equipment Con-stant ID(XX)

Description Equivalent SECS ECID

P4 ON or OFF EXT_HOSTP6 ON or OFF PIO_MODEP13 ON or OFF MSC_INTLKP32 Default 2990 MIN_WAFER_POSP33 Default 11.350 STAGE_POSP34 Default 25 SLOT_CNTP35 Default 0.25 inch SLOT_PITCHP37 0 – 7 SINGLE_PORTP38 0, 1, 3, 4, or 5 (Note 4) HOST_COMMUNICATION_OPTIONP39 0, 2, 4, 5, 7, or 8 (Note 5) CASSETTE_SIZE_OPTIONP40 0 TO 65535 (default 251) DEVICE_ID

P41 2400, 4800, 9600, or19200 baud COMMUNICATION BAUD RATE

P61 -126 to 126 (default = 0) Elevator homing calibration offsetP63 0, 1, OR 2 DEFAULT CASSETTE PRESENTP67 -126 to 126 (default = 0) CASSETTE BASE OFFSETP85 0 or 1 FSD ASCII OPTIONP86 0 or 1 STAGE SEATER OUTP87 0 to 4500 (default = 4000) Shuttle advance Position P89 0 or 1 (default = 0) Shuttle Option P90 -126 to 126 (default = 0) Shuttle homing calibration offset P91 0 or 1 (default = 0) FL-compatible host interface

P92 2400, 4800, 9600, or19200 baud (default 9600). TAG BAUD RATE

P98 0 or 1 BRAKE_OPTION



Examples:

(EDER) Enable/Disable Event Request Host −> Load PortDescriptions: The Host uses this message to enable/disable the event report option in the Load

Port. Equivalent SECS: S2F37.

Primary/Secondary: Primary; the response will be an EERA message.

Structure: EDER<space>XX<CR><LF>Where XX can be either ON or OFFON = Enable all event reportsOFF = Disable all event reports

Examples:

(EERA) Enable/Disable Event Report Acknowledge Host <− Load PortDescription: The Load Port uses this message to either acknowledge or deny the Host's request

to enable/disable the Load Port event report option. Equivalent SECS: S2F38.

Primary/Secondary: Secondary; this is a response to an EDER message.

Structure: EERA<space>XX<CR><LF>Where XX can be either OK or DENIED

Action ASCII CodeHost sends to Load Port: Modify Host option to echo text interface ECS<space>P38=3<CR><LF>

Load Port replies to Host: Host command is accepted: ECA<space>OK<CR><LF> Load Port replies to Host: Command rejected, VersaPort in alarm state: ECA<space>ALARM(CR)(LF)

Action ASCII CodeHost sends to Load Port: Disable all event reports EDER<space>OFF<CR><LF>Host sends to Load Port: Enable all event reports EDER<space>ON<CR><LF>Load Port replies to Host: EDER command is accepted EERA<space>OK<CR><LF>

Load Port replies to Host: EDER command is denied EERA<space>DENIED<CR><LF>



Examples:
(FSD) Formatted Status Data Host <− Load PortDescription: The Load Port uses this message to return the Load Port status as requested by the

Host in an FSR message. Equivalent SECS: S1F6.

Primary/Secondary: Secondary; this is a response to an FSR message.

Structure:A) For Form Code = 0: (For VersaPort with P91=0)“FSD0<space>PIO=data<space>PIP=data<space>READY=data<space>HOME=dataPRTST=data<space>ELDN=data<space>ELUP=data<space>ELSTAGE=data<space>SEATER=dataMODE=data<space>SLOTPOS=data<space>ELPOS=data(CR)(LF)”

Action ASCII CodeHost sends to Load Port: Disable all event reports EDER<space>OFF<CR><LF>Host sends to Load Port: Enable all event reports EDER<space>ON<CR><LF>Load Port replies to Host: EDER command is accepted EERA<space>OK<CR><LF>Load Port replies to Host: EDER command is denied EERA<space>DENIED<CR><LF>

TABLE 25 Formatted Status Data (Form Code 0)

Variable Description

PIO OFF = Parallel interlocks not requiredON = Parallel interlocks required

PIP FALSE = No Pod presentTRUE = Pod present

READY FALSE = VersaPort is busyTRUE = VersaPort ready for new command

HOME FALSE = VersaPort not HomeTRUE = VersaPort Home

PRTSTUNLK = Port unlockedLOCK = Port lockedOTHER = None of the above

ELDN FALSE = Port-lifter not at down limitTRUE = Port-lifter at up limit

ELUP FALSE = Port-lifter not at up limitTRUE = Port-lifter at up limit

ELSTAGE FALSE = Port-lifter not at stage positionTRUE = Port-lifter at stage position

SEATERHOME = Seater at HomeOUT = Seater is outOTHER = None of the above



B) For Form Code = 0 : (for VersaPort with P91=1)“FSD0<space>PIO=data<space>CIP=data<space>READY=data<space>HOME=dataPOD-POS=data<space>ELOPEN=data<space>ELDN=data<space>ELUP=data<space>SEATER=dataMODE=data<space>PAP=data<space>ELPOS=data(CR)(LF)”

MODE AUTO = Normal operationMANUAL = Service mode

SLOTPOS Current port-lifter slot position (numeric characters 0 to 255)0 = below slot 1, 255=above slot 25

ELPOS Current port-lifter position (in mils from Home)

TABLE 26 FSD Message List, Form Code = 0

Variable( ref. E84 signal) Data

PIO OFF = Parallel interlocks not requiredON = Parallel interlocks required

CIP FALSE = No Carrier (Pod) presentTRUE = Carrier (Pod) present

READY FALSE = VersaPort is busyTRUE = VersaPort ready for new command

HOME FALSE = VersaPort not HomeTRUE = VersaPort Home

PODPOSHOME = Port unlockedPORT = Port lockedOTHER = None of the above

ELOPENFALSE = Port-lifter not at stage position or shuttle not at forward position.TRUE = Port-lifter at stage position and shuttle at forward position.

ELDN FALSE = Port-lifter not at down limitTRUE = Port-lifter at up limit

ELUP FALSE = Port-lifter not at up limitTRUE = Port-lifter at up limit

SEATERHOME = Seater at HomeOUT = Seater is outOTHER = None of the above

MODE AUTO = Normal operationMANUAL = Service mode

PAP TRUE = Pod latch not open (similar to pod at port in FL)FALSE = Pod latch open

ELPOS Current port-lifter position (in mils from Home)

TABLE 25 Formatted Status Data (Form Code 0) (Continued)

Variable Description



Example of FSD messages:
(1) Reply from VersaPort for a status request (FSR, form code = 0)“FSD0<space>PIO=OFF<space>PIP=TRUE<space>READY=TRUE<space>HOME=TRUEPRTST=UNLK<space>ELDN=FALSE<space>ELUP=TRUE<space>ELSTAGE=FALSESEATER=HOME<space>MODE=AUTO<space>SLOT-POS=0<space>EVPORTS=0(CR)(LF)”

Interpretation of message:

Parallel interlocks disabled, Pod is present, VersaPort ready for new command, VersaPort at Home, port is unlocked, port-lifter not at down limit, port-lifter at up limit, port-lifter not at stage position, seater at Home port-lifter is below slot number 1, port-lifter position is 0 mil below Home.

(2) Reply from VersaPort for status request (FSR, form code = 1)FSD1<space>“6005-1030-10<space>REV<space>?(CR)(LF)”

3) Reply to cassette map status request (FSR, form code = 2)“FSD2<space>S1=E<space>S2=E<space>S3=E<space>S4=E<space>S5=E<space>S6=E<space>S7=E<space>S8=E<space>S9=ES10=E<space>S11=F<space>S12=F<space>S13=F<space>S14=F<space>S15=F<space>S16=F<space>S17=F<space>S18=FS19=C<space>S20=C<space>S21=U<space>S22=U<space>S23=U<space>S24=U<space>S25=U(CR)(LF)”

Interpretation of message:

Slots 1 to 10 are empty, slots 11 to 18 are filled with wafers, slots 19 and 20 have a crossed wafer, and the status of slots 21 to 25 are unknown at the moment (those slot positions have not yet gone past the sensors).

(FSR) Formatted Status Request Host −> Load PortDescriptions: Host uses this message to find out the current Load Port status. Equivalent SECS:

S1F5.

Primary/Secondary: Primary; the response will be an FSD message.

Structure: FSR<space>FC=XX<CR><LF>Where: XX = form code, can be either 0 or 2FC=0: Load Port status request.FC=1: software revision.FC=2: cassette map status request.



Examples:

(HCA) Host Command Acknowledge Host <− Load PortDescription: Reply to Host command. Acknowledge Host command or return error code. Equiva-

lent SECS: S2F42.

Primary/Secondary: Secondary; this is a response to an HCS message.

Structure: HCA<space>XX<CR><LF>Where XX = Multi-character reply message.

Action ASCII CodeRequest for Load Port status FSR<space>FC=0<CR><LF>Request for cassette map FSR<space>FC=2<CR><LF>)

Load Port replies to Host’s status request (FSR, form code = 0): Parallel interlocks disabled, Pod is present, VersaPort ready for new command, VersaPort at Home, port is unlocked, port-lifter not at down limit, port-lifter at up limit, port-lifter not at stage position, seater at Home port-lifter is below slot number 1, port-lifter position is 0 mil below Home.

“FSD0<space>PIO=OFF<space>PIP=TRUE<space>READY=TRUE<space>HOME=TRUEPRTST=UNLK<space>ELDN=FALSE<space>ELUP=TRUE<space>ELSTAGE=FALSESEATER=HOME<space>MODE=AUTO<space>SLOTPOS=0<space>EVPORTS=0(CR)(LF)”

Load Port replies to Host’s status request (FSR, form code =1):

FSD1<space>“6005-1030-10<space>REV<space>?(CR)(LF)”

Load Port replies to Host’s status request (FSR, form code =2): Slots 1 to 10 are empty, slots 11 to 18 are filled with wafers, slots 19 and 20 have a crossed wafer, and the status of slots 21 to 25 are unknown at the moment (those slot positions have not yet gone past the sensors).

“FSD2<space>S1=E<space>S2=E<space>S3=E<space>S4=E<space>S5=E<space>S6=E<space>S7=E<space>S8=E<space>S9=ES10=E<space>S11=F<space>S12=F<space>S13=F<space>S14=F<space>S15=F<space>S16=F<space>S17=F<space>S18=FS19=C<space>S20=C<space>S21=U<space>S22=U<space>S23=U<space>S24=U<space>S25=U(CR)(LF)”

TABLE 27 Host Command Replies

(XX) Description (ref. SECS HCACK)

ALARM Command rejected, Load Port in alarm state 7BUSY Command rejected, Load Port is busy 6

CANNOT_PERFORM Command rejected. Configuration of serial port is wrong. 2

DENIED Command rejected for other reason(s) 1, 5, 8, 9, 10, 11, 64, 68, 69

INVALID_ARG Command rejected, at least one invalid parameter 3




Examples:

(HCS) Host Command Send Host -> Load PortDescription: The Host uses this message to request a Load Port to perform a specified remote

command with the associated parameters. Equivalent SECS: S2F41.

Primary/Secondary: Primary; the response will be an HCA message.

Structure: HCS<space>XX<space>D1<space>D2<CR><LF>Where XX = Multi-character Host commandD1 = Argument # 1 (optional for some commands)D2 = Argument # 2 (optional for some commands)(CR)(LF) = Carriage return and line feed, command terminators.

NO_POD Command rejected, FOUP not on Load Port 65NOT_READY Command rejected, Host interlock not enabled 66OK Comment accepted 0

Action ASCII CodeHost sends to Load Port: Move port-lifter 4 inches (abs pos) above port door: HCS<space>GOTO<space>4000(CR)(LF)

Load Port replies to Host: Host command is accepted: HCA<space>OK<CR><LF>)

Load Port replies to Host: Command rejected, Load Port in alarm state: HCA<space>ALARM<CR><LF>)

Load Port replies to Host: Unrecognizable Host command (Bell)

TABLE 28 HCS Commands

(XX) Description (ref. SECS RCMD)

UNLK Unlock port 1CLOSE_PORT Close port 1LOCK Lock port 2OPEN_PORT Open port 2STAGE Go to stage position 9OPEN Same as STAGE 9

MAP* Run port-lifter to rescan cassette map 11

GOTO *new pos Go to the specified (absolute) position 12

HOME Return VersaPort to Home 13

TABLE 27 Host Command Replies (Continued)

(XX) Description (ref. SECS HCACK)



CLOSE Same as HOME 13RESEAT Run wafer seater to reseat wafer 14SELF-TEST Perform self-test 15RESET Clear alarm in VersaPort 16MOVE UP **distance Move VersaPort up a specified distance 17

MOVE DOWN **distance Move VersaPort down a specified distance 17

MANUAL Switch VersaPort into MANUAL mode 18CALIB Calibrate port-lifter Home position 19STOP Abort current operation 20

SOFT_STOP Stop vertical drive motion (decelerated stop) 83

CASSETTE LD Confirm cassette present 84CASSETTE UNLD Confirm cassette not present 84CASSETTE NA Do not care 84CLEAR_SLOT_STATUS Clear slot status 85ENABLE_SERVO Manual Enable the Servo motors 129DISABLE_SERVO Manual Disable the Servo motors 130RESET_SERVO Manual Reset the Servo motors 131AUTO Switch VersaPort into AUTO mode 133MAN_UNLK Manual Unlock command 148

MAN_GOTOMove port door to specified absolute position while the Load Port is in MANUAL mode

149

BRAKE_OFF Turn the Brake off 154BRAKE_ON Turn the Brake on 155ADV_SHUTTLE Advance the Shuttle in Manual mode 161RET_SHUTTLE Retract the Shuttle in Manual mode 162

TABLE 28 HCS Commands (Continued)




Examples:
(RCA) Remote Command Acknowledge Host <− Load PortDescription: Acknowledge RCS command or return error code. Equivalent SECS: S2F22.

Primary/Secondary: Secondary; this is a response to an RCS message.

Structure: RCA<space>XX<CR><LF>where XX = Multi-character reply message.(CR)(LF) = Carriage return and line feed, command terminators.

Examples:

(RCS) Remote Command Send Host −> Load PortDescriptions: The external host uses this message for internal host material-tracking control. Pri-

marily used in conjunction with the STS. Equivalent SECS: S2F21.

Action ASCII CodeHost sends to Load Port: Move port-lifter 4 inches (abs pos) above port door: HCS<space>GOTO<space>4000(CR)(LF)

Load Port replies to Host: Host command is accepted: HCA<space>OK<CR><LF>)

Load Port replies to Host: Command rejected, Load Port in alarm state: HCA<space>ALARM<CR><LF>)

Load Port replies to Host: Unrecognizable Host command (Bell)

TABLE 29 RCS Reply Messages

(XX) Description (ref. SECS CMDA

ALARM Command rejected, Load Port in alarm state 7BUSY Command rejected, Load Port is busy 6CANNOT_PERFORM Command rejected, configuration of serial port is wrong. 2DENIED Command rejected for other reason(s) 1, 64NO_POD Command rejected, FOUP not on Load Port 65OK Command accepted 0

Action ASCII CodeHost sends to Load Port: Advance FOUP to port and hold-down FOUP

RCS<space>KEEP_LOCK<CR><LF>

Load Port replies to Host : Host command is accepted: RCA<space>OK<CR><LF>

Load Port replies to Host : Command rejected, Load Port in alarm state: RCA<space>ALARM<CR><LF>)

Load Port replies to Host : Unrecognizable Host command (Bell)



Primary/Secondary: Primary; the response will be an RCA message.

Structure: RCS<space>XX<CR><LF>where XX = Multi-character command.(CR)(LF) = Carriage return and line feed, command terminators.

Example:

Equivalent SECS message: S2 F38 (Enable/Disable Event Report Acknowledge)

TABLE 30 RCS Commands


KEEP_LOCK Advance FOUP to port and hold-down FOUP 20NC_LOCK Return FOUP to Home and release hold-down 21ENABLE_OPEN Enable open motion initiated by Host 23DISABLE_OPEN Disable open motion initiated by Host 24BLINK_STS Blink CARRIER light 22STOP_BLINK Stop blink CARRIER light 27

Action ASCII CodeHost sends to Load Port: Advance FOUP to port and hold-down FOUP

RCS<space>KEEP_LOCK<CR><LF>

Load Port replies to Host : Host command is accepted: RCA<space>OK<CR><LF>

Load Port replies to Host : Command rejected, Load Port in alarm state: RCA<space>ALARM<CR><LF>)

Load Port replies to Host : Unrecognizable Host command (Bell)



Parallel Communicationa
Parallel Communication
The VersaPort can be configured for parallel communications and will support Open and Close commands issued by a parallel host in Auto mode. Figure 45, OPEN Cycle Event Diagram, on page 200 and Figure 46, CLOSE Cycle Event Diagram, on page 201 depict the communication between the Host and the VersaPort.

Summary of Control Signals

Control Signal Descriptions

(HOST) *READY to OPEN (INPUT)This signal instructs the VersaPort that the Host is ready to receive a cassette. If both the *Ready to Open and the *Ready to Close signal are inactive, the remote *Open/Close command issued by the Host through the parallel communication interface will be ignored. When the parallel-host-communication lines are connected, the Host must set this line to active before an open command could be accepted by the VersaPort. This signal does not affect the status of any output signal from the VersaPort to the Host. Both the *Ready to Open and *Ready to Close signals should never be active at the same time.

TABLE 31 Input Signals

Input Effect In Manual Mode Effect In Alarm State*ENABLE/DISABLE Do not care Do not care

*READY to OPEN Do not care Do not care*READY to CLOSE Do not care Do not care*OPEN/*CLOSE Do not care Do not care*CLEAR ERROR/*HOMING CAL Do not care Required active for

clearing alarm

TABLE 32 Output Signals

OutputSignal Level In Manual Mode

Signal Level In Alarm State

*READY Inactive Active*POD IN PLACE Inactive Shows Pod status*HOME Inactive Shows Home status*ERROR Shows error status Active*AT OPEN POSITION Inactive Shows open status


VersaPort 2200 Technical ManualAppendix B: Communications SoftwareParallel Communication a

(HOST) *READY to CLOSE (INPUT)This signal instructs the VersaPort that the Host has completed all wafer transfers between the VersaPort and the Process Tool, and a clear path is available for the VersaPort to return to Home position when the *Open/Close command is issued. Unless this command is active, the VersaPort will not accept any command to perform a close cycle. Both the *Ready to Open and *Ready to Close signals should never be active at the same time.

*OPEN/CLOSE (INPUT)This signal is used by the Host to initiate a remote open or close operation on the VersaPort. The VersaPort interprets this line in conjunction with the two host-ready lines –*READY to OPEN and *READY to CLOSE.

OPEN. When the Host sets the *OPEN/CLOSE line active, the VersaPort performs an OPEN operation if all of the following conditions are met:

• VersaPort is powered ON.

• VersaPort is configured for parallel communication.

• VersaPort is in AUTO mode.

• Pod is in place on the port plate.

• VersaPort is idle.

• VersaPort is not in the alarm state.

• *Ready to Open line is active.

• *Ready to Close line is inactive.

CLOSE. When the Host sets the *OPEN/CLOSE line active, the VersaPort performs a CLOSE operation if all of the following conditions are met:

• VersaPort is powered ON.

• VersaPort is configured for parallel communication.

• VersaPort is in AUTO mode.

• Pod is in place on the port door.

• VersaPort is idle.

• VersaPort is not in the alarm state.

• (Host) *Ready to Open line is inactive.

• (Host) *Ready to Close line is active.



NOTE . . .
THE EXECUTION OF THE *OPEN/CLOSE COMMAND DOES NOT DEPEND ON THE STATUS OF THE *ENABLE LINE, AS OPPOSED TO THE SECS COMMAND THAT REQUIRES AN ACTIVE *ENABLE SIGNAL IF THE PIO INTERLOCK OPTION IS ON.

*CLEAR ERROR-HOMING CAL (INPUT) When this signal is set to active by the Host, the VersaPort will clear any pending alarm in the VersaPort.

The VersaPort will perform a port door-homing calibration when the VersaPort is configured for parallel communication.

*READY (OUTPUT) This signal (when active) indicates that the VersaPort is idle and is ready to accept a new command (Open or Close).

To be ready, the unit's power must be ON, in automatic operation mode, and idle. When an action command is issued by the Host and accepted by the VersaPort, the *READY signal goes inactive until the command has been completed. If a serial host is also connected to the VersaPort, and the serial host has issued a SECS command to change the operation of the VersaPort to MANUAL mode, the unit will not accept any commands from a parallel host. The *READY signal will remain inactive until either the serial host has returned the VersaPort to AUTO mode, with an automatic mode command, or the VersaPort unit is power-cycled.

NOTE . . .

THE DEFINITION OF THE *READY I/O SIGNAL IS SLIGHTLY DIFFERENT THAN THAT FOR THE READY LIGHT ON THE VERSAPORT STATUS INDICATOR PANEL. THE RESTRICTION ON AUTOMATIC MODE DOES NOT APPLY TO THE READY LIGHT.

*POD IN PLACE (OUTPUT) The *POD IN PLACE signal is set to active when the VersaPort is powered ON, in AUTO mode, and a Pod is placed on the port door.

The line remains inactive when the VersaPort is powered OFF or in MANUAL mode, or when there is no Pod on the port door.



*ERROR (OUTPUT)This signal indicates the occurrence of an error in the VersaPort. The *ERROR signal is set to active regardless of the VersaPort’s operating mode. When the *ERROR signal is on, the VersaPort will not accept any new action command until it has been cleared by either a serial or parallel host. For a recoverable error, such as “Pod not at port”, the *ERROR signal is set to active when the error occurs and is reset to inactive when the recovery action (return home) is completed.

*HOME (OUTPUT)This signal is set to active whenever the VersaPort is in AUTO mode and is at the Home position (ready to load or unload). A Host can use this signal to determine what (OPEN or CLOSE) cycle to perform next.

*AT OPEN POSITION (Pin 5 on parallel communications port) (OUTPUT).

This signal is set to active when the vertical drive is at the open position and reset to inactive when the vertical drive is not at the open position.

Event Flow

OPEN Cycle

A. A Pod is placed on the VersaPort.

B. Host has confirmed that the VersaPort is at Home and idle and it enables the READY to OPEN signal.

C. Host issues an OPEN command.

FIGURE 45 OPEN Cycle Event Diagram

H

Load PortLoad Port



D. VersaPort accepts the OPEN command and acknowledges by de-activating the
READY signal. VersaPort then starts an open cycle.

E. Host can remove the active OPEN/CLOSE signal as soon as the READY signal is inactive.

F. Host removes the READY TO OPEN signal.

G. VersaPort reaches the open position.

H. It is now idle and ready to accept a new command.

CLOSE Cycle

A. Host has confirmed that the VersaPort is not Home and ready to accept a new command, it then enables the READY to CLOSE signal

B. Host issues a OPEN/CLOSE command.

C. VersaPort accepts the CLOSE command and acknowledges by de-activating the READY signal. The VersaPort then starts a close cycle.

D. Host can remove the active OPEN/CLOSE signal as soon as the READY signal is inactive.

E. Host removes the READY TO CLOSE signal.

F. VersaPort has reached the Home position.

VersaPort is now idle and ready to accept a new command.

FIGURE 46 CLOSE Cycle Event Diagram

Load Port




a
Appendix C: Material Safety Data
Sheets

Loctite 222

Loctite 242

Product Name or Number:Loctite 222

Formula:

Generic/Chemical Name:Threadlocker Low Strength

USDA Authorization:

Manufacturer’s Name:HENKEL CORPORATION

Emergency Telephone Number:(860) 571-5100

Address:

1001 Trout Brook CrossingROCKY HILL, CONNECTICUT 06067

Telephone Number for Information:(860) 571-5100

For Current MSDS data, please visit the manufacturer’s website:http://www.loctite.com


Formula:

Generic/Chemical Name:Removable Threadlocker

USDA Authorization:



Address:





VersaPort 2200 Technical ManualAppendix C: Material Safety Data Sheets a

Loctite 290

Loctite 680


Formula:

Generic/Chemical Name:Adhesive/Sealant Threadlocker

USDA Authorization:



Address:





Formula:

Generic/Chemical Name:Retaining Compound High Strength

USDA Authorization:



Address:





VersaPort 2200 Technical ManualAppendix C: Material Safety Data Sheetsa

Krytox GPL-20X and 50X Fluorinated Grease

Product Name or Number:Krytox GPL-20X and 50X

Formula:

Generic/Chemical Name:Fluorinated Grease

USDA Authorization:

Manufacturer’s Name:DuPont

Emergency Telephone Number:(800) 441-3637 (Outside US 302-774-1000)

Address:1007 Market Street

Wilmington, DE 19898

Telephone Number for Information:(800) 441-7515 (Outside US 302-774-1000)

For Current MSDS data, please visit the manufacturer’s website:http://www.krytox.com


VersaPort 2200 Technical ManualAppendix C: Material Safety Data Sheets a


a
Appendix D: Wiring Diagrams and
Drawings

NOTE . . .

THESE DOCUMENTS ARE SUBJECT TO REVISION AND SHOULD BE USED FOR REFERENCE ONLY. PLEASE CHECK WITH ASYST CUSTOMER SUPPORT FOR THE LATEST VERSIONS.

The Wiring Diagram and Drawings are located at the end of the manual sorted by part number.

TABLE 33 VersaPort Wiring Diagrams and Drawings

Part Number Description Pages

3400-0089-XX, Rev 005 Wiring Diagram, VersaPort 6

9700-5219-XX, Rev A Port Door Assembly 2

9700-5384-01, Rev A Final Assembly, VersaPort 2200 Standard 9

9700-5384-02, Rev A Final Assembly, VersaPort 2200 Cassette Advance (Shuttle) 10

9700-5551-XX, Rev A Base Assembly, Standard and Cassette Advance (Shuttle) 9

9700-5552-01, Rev G Port Plate Assembly 8

9700-5553-01, Rev 008 Vertical Drive Assembly 7

9700-5554-01, Rev A Minienvironment Assembly 3

9700-5812-XX, Rev B Base Electronics Chassis 4

9701-3377-01, Rev A Kit, Assembly Vertical Drive Bearing Block 1

9701-3376-01, Rev A Kit, Leadscrew Assembly 1

Draft Rev. C 2000-1252-01 Page 207

VersaPort 2200 Technical ManualAppendix D: Wiring Diagrams and Drawings a

Page 208 2000-1252-01 Draft Rev. C

a
Index
AASCII

connector panel, location 23ESC character, use of 181message summary 182, 197

audience 1

CCE label, description 12CEID, list 152comments, reader ivcommunications software 123, 137conventions 3copper interlock 42

Ddisclaimers iii

EEMI emissions, reducing 7EMO, requirement 7equipment modification iiiESD protection 7

Ffan, location 17Front-Load

command flow 197

II/O

label 13ISIM MENU LIST 123ISIM Menu List

Auto 124Manual 126SMIF Option 135Tag8400 134

Llabeling 12languages iiilaser

classification 9interlock 9

lockout/tagout procedures 8

Mmechanical components 18, 21MicroStation Controller, communications 167motor controls 26

NNOVRAM

ECID storage 31history data storage 31

Ooperation sequence 20outline drawing 33

Pparallel communication 197

event flow 200parallel port

input signals, description 197output signals, description 197

pinch hazards 10pinch points, location 10port door

description 21location 42

port platedescription 21location 42

procedurescalibration/alignment 63corrective service 98lockout/tagout 8preventive service 60

RRFID 22RSIM Menu List

Config 131Demo 128Status 129

Ssafety

customer responsibility 7



a
interlocks 9
SECS 138CEID, list 152message summary 140stream and function codes 142

seismic, information 10sensors 23

cassette slot 25excessive wafer protrusion 26list of 23wafer present 25wafer protrusion 26

serial communicationconfiguring 137

servicecalibration/alignment procedures (CAP) 63corrective service procedures (CSP) 98preventive service procedures (PSP) 60

softwarecommunications 123, 137see also ASCII, SECS, FLSIM

specifications 33stream and function codes, SECS 142

Ttrademarks iiitraining iii


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