User Manual - Delta Electronics Manual... · 435 7.4 μs 440 7.3 μs 445 7.3 μs 450 7.2 μs 455 7.1 μs 460 7 μs 465 6.9 μs 470 6.9 μs 475 6.8 μs 480 6.7 μs 485 6.7 μs 490

User Manual

PULSED DC Power Supply Continuous 325 – 1000VDC Model: HPP-1K5A01KAT A

Version: Rev.S.00

I.

Copyright

All rights reserved. The contents either of manual and design of power supply may not be reproduced or used in any manner whatsoever without admittance by Delta Electronics Inc.

Warranty

This product Delta “HPP-1K5A01KAT” Model is been warranted against defect in material and workmanship for a period of “1” year after date of shipment. Delta agrees to repair or replace the fault unit free-of-charge which fails to perform with specification and under normal use during this period.

This warranty shall not apply to the following items and will be billed of cost:

1. To exceed the warranty period.

2. Subject to misuse, negligence, accident or natural disaster.

3. Used in a hazardous or dangerous manner either alone or in conjunction with other equipment.

4. Repaired or altered by person who was not authorized by Delta.

5. Appearance change with environment factor

Delta will be the sole arbiter for those circumstances

To make a warranty claim please contact Delta at telephone number in the table or support at delta.com, the fault unit transportation to Delta to be prepaid and responsibility by purchaser, and Delta will take responsibility for ship it back.

Delta Electronics, Inc.

3 Tungyuan Road, Chungli Industrial Zone

Taoyuan County 32063, Taiwan, ROC

Tel: 886-3-4526107

Fax: 886-3-4331706

Web Site: www.deltaww.com

http://www.deltaww.com/

II.

INDEX ............................................................... Chapter 1: Safety and Standard ································································· 1

1.1. Important Safety Information ··········································································· 1

1.2. Safety and Warning Symbols ·········································································· 1

1.3. Electromagnetic Compatibility Directives and Standard ········································· 2

1.4. Industry Guideline ························································································ 2

Chapter 2: Introduction ············································································· 3

2.1. Brief Statement ···························································································· 3

2.2. Key Feature ································································································ 4

Chapter 3: Specification ··········································································· 4

3.1. System Block Diagram ·················································································· 4

3.2. Electrical Specification ··················································································· 6

3.3. Ignition Capability ························································································· 7

3.4. Arc Suppression Specification ········································································14

3.5. Ignition Profile ····························································································15

3.6. Process and Monitor Function ········································································15

3.6. Mechanical Specification ···············································································16

3.6. Environment Specification ·············································································18

Chapter 4: System Protection Mechanism ················································ 19

4.1. Input Breaker ·····························································································19

4.2. Protection by MCU ······················································································19

Chapter 5: Installation ············································································ 20

5.1. Cooling Requirements ··················································································21

5.2. Cabinet Design ···························································································21

5.3. Grounding ·································································································22

Chapter 6: Interface ················································································ 23

6.1. Front Panel ································································································23

6.2. Rear Panel ································································································25

6.3. Main Menu Map……………………………………………………………………………….. 26

6.4. Digital Communication Port (Host) ···································································28

6.5. Analog Communication Port (User) ··································································32

Chapter 7: Operation ·············································································· 34

7.1. Panel Operating Steps··················································································34

7.2. D-SUB Operating Steps ················································································35

7.3. RS232 Operating Steps ················································································35

7.4. RS485 Operating Steps ················································································36

Chapter 8: Maintenance ·········································································· 37

1.

Chapter1: Safety and Standard

1.1. Important Safety Information

To keep your safety from hazardous and fatal circumstance, please read and realize the content

of this manual before installing and operating Delta “HPP-series” power supply.

1.2. Safety and Warning Symbols

The following advisory symbols as shown in Table 1.1 will be used in the manual for different

level of warning. The meanings of the advisory symbols are explained below.

Table 1.1 Safety and Warning Symbols (1)

This danger symbol advises that improper operation will cause serious personal injury or death.

This warning symbol advises that improper operation will cause serious personal injury, or catastrophic damage the generator or any electronic devices connected to the generator, or lose important data.

This caution symbol advises that improper operation will cause personal injury, or damage the power supply or any electronic devices connected to the power supply, or lose data.

The following advisory symbols as shown in Table 1.2 are used on safety warning labels, and/or

on printed circuit board (only provided with white paint), and/or other part of the generator. The

meanings of these symbols are explained as below.

Table 1.2 Safety and Warning Symbols (2)

Dangerous voltage symbol indicates the presence of high voltage. Access the high voltage will cause serious personal injury or death.

To protect against electrical shock in case of a fault. This symbol indicates that the terminal must be connected to ground before operation of equipment.

Residual voltage:

Wait 8 minutes at least for capacitor discharge after power cord is removed and before servicing.

2.

Heavy object: Two persons lifting are recommended to avoid muscle strain or back injuries.

1.3. Electromagnetic Compatibility Directives and Standard

Disturbance Characteristic: EN55011 - CRSP11 Class A, Group 1 (>20kVA)

General Immunity Standard for Industry: EN 61000-6-2

Safety Requirement: IEC-61010-1 (CE and UL certification)

1.4. Industry Guideline

Guideline for Semiconductor manufacturing equipment: SEMI S2 and F47

3.

Chapter 2: Introduction

2.1. Brief Statement

Delta “HPP-1K5A01KAT” is a high voltage pulsed DC generator that meets the exciting

requirement in physical vapor deposition technique with a wide range of applications in the

semiconductor, optical and industrial coating, particularly for Reactive Sputtering, like Alumina,

Titania and Silica with high deposition rates.

The reverse voltage here is adjustable from 50V to 100V, which is dependent from the applied

negative voltage and could be adjustable for different targets. Maximum 1.9KV adjustable ignition

voltage could help users to ignite plasma successfully every time for some specific targets, for

example, copper target.

Asymmetric pulsing output makes the arc happening reduced dramatically. With High-speed

MCU based arc detection, Delta power could achieve 1 micro-sec arc detection time. As soon as

the arc is detected, the output will be reversed to positive to reduce arc energy approximately 5

microseconds. When the micro ARC is cleared, normal pulsing resumes.

With Delta’s mutual power supply design technology, efficiency at rated load is higher than

competing products. High efficiency, less temperature stress and highly integrated circuit make it

more stable, reliable and longer product lifetime. DSP-based digital control provides user an

accurate, repeatable and quick pulsed output response. Active front panel, multiple serial and analog

interfaces facilitate user to get an easy and flexible control over power supply.

Figure 2.1 Delta “HPP-1K5A01KAT” Sputtering Power Supply

4.

2.2. Key Feature

Advanced SiC mosfets module implement:

The highest power level of pulse DC generator.

The widest frequency adjustment.

Lossless Snubber circuit.

Clamp voltage stress of pulse switch.

Less oscillation.

Ultra low arc energy (< 200uJ/KW)

Configurable reverse voltage (50V~100V)

Chapter 3: Specification

3.1. System Block Diagram

Taipei rectifier PFC ModuleBreakerThree phase

AC InputFull Bridge

moduleOutput

MeasurementPulsed DC

module

Pulsed DC Output

Housekeeping Supplies

Control Circuit

Front Panel Display Isolated Remote InterfacesAdaptable Fan

Configurable power supply

Figure 3.1 System Block Diagram of Delta “HPP-1K5A01KAT”

Table 3.1 Detail Description for Block Diagram

Taipei rectifier PFC Module

Three phase main voltage is applied while breaker is closed. After Taipei rectifier PFC, soft start mechanism suppresses inrush current to prevent any damage. A good power factor condition back to the mains then is modified through Taipei rectifier PFC and AC voltage is rectified to DC bus for DC-DC Section.

Full Bridge Module

The converter section converts DC voltage stored in the bulk capacitors to high-frequency voltage by alternating the current through switching power components. In the output side, an isolation transformer steps up the high-frequency voltage from the converter section and delivers it to a full-wave rectifier bridge. The rectified DC power is then passed through a measurement section to the output connector.

Pulse DC Module In the pulse section, an inductor and a controlled switch are responsible for generating pulse output from straight DC.

Output Measurement and Feedback

The output measurement section measures current and voltage, and feedback the voltage and current information to MCU for voltage, current and power control and related protection.

5.

Housekeeping supplies The AUX power provides low voltage source to supply the Vcc of analog OPA, main controller, MCU, fan and LCD display.

Control Circuit The MCU is responsible for controlling the power supply status and providing status information to the operator through all interfaces.

Front Panel Display

Control panel shows operating mode, command level, feedback values, set up Arc processing, process control, interface setup, communication set and system status during power supply working.

Remote Control Interface

The power supply supports three types of interfaces: a User port (analog), a Host port (RS-232, RS-485) and an active front panel. All three interfaces communicate operator-supplied inputs to MCU and provide the operator with status information.

Configurable power supply The power supply provide configurable reverse voltage to the output side in pulse mode and the voltage range is 50V to 100V.

6.

3.2. Electrical Specification

Table 3.2 Electrical Specification

Item Specification Condition

Input Voltage 208VAC ± 10% (Three Phase) 50 to 60Hz

Input Current (Per Phase) 5.5ARMS nominal per phase Rated output power

Maximum Output Power 1.5kW Measured at the DC output

Output Voltage Range 131VDC to 1000VDC Measured at the DC output

Output Current Range 0.01A to 4.62A Measured at the DC output

Power Supply Efficiency > 90% Rated output power at DC 1000V

Power Factor > 0.95 Rated output power

Output Voltage Ripple < 2% (VRMS) At DC Mode

Output Voltage Accuracy 1% of command setting or 0.25% of full scale voltage between output and command

Within operation range at 25 ˚C At DC Mode

Output Current Accuracy 1% of command setting or 0.25% of full scale current between output and command

Within operation range at 25 ˚C At DC Mode

D-sub Monitor/Command (Analog Interface) Accuracy

1% of full scale rating between output and D-sub

Operation range

Ignition Capability 1000Vdc to 1900Vdc 100Vdc increments

Temperature Coefficient < 50ppm/˚C 20˚C to 40˚C Variation in regulated output

Operation Mode CV, CC, and CP Mode -

Operation Temperature 0˚C to 40˚C -

Arc Energy < 200uJ per 1kW -

Main Protection OVP, OCP, OTP, SCP, ARC

Output Frequency 5K~400KHz, 5KHz increments

Reverse Time 0.4us to 10us, 0.1us increments Allowable reverse time is limited for a given frequency

Reverse Voltage 50V~100V, 10V increments

Repeatability

Output power repeatability of the DC inverter from run to run at a constant set-point is 0.1% from 10% to 100% of rated power.

7.

3.3. Reverse Time as a Function of Voltage Limit (V-Limit)

V-Limit(in Volts)

Corresponding Reverse Time

0-325 10 μs

330 9.8 μs

335 9.7 μs

340 9.5 μs

345 9.4 μs

350 9.2 μs

355 9.1 μs

360 9 μs

365 8.9 μs

370 8.7 μs

375 8.6 μs

380 8.5 μs

385 8.4 μs

390 8.3 μs

395 8.2 μs

400 8.1 μs

405 8 μs

410 7.9 μs

415 7.8 μs

420 7.7 μs

425 7.6 μs

430 7.5 μs

435 7.4 μs

440 7.3 μs

445 7.3 μs

450 7.2 μs

455 7.1 μs

460 7 μs

465 6.9 μs

470 6.9 μs

475 6.8 μs

480 6.7 μs

485 6.7 μs

490 6.6 μs

495 6.5 μs

500 6.5 μs

505 6.4 μs

510 6.3 μs

515 6.3 μs

520 6.2 μs

525 6.1 μs

8.

530 6.1 μs

535 6 μs

540 6 μs

545 5.9 μs

550 5.9 μs

555 5.8 μs

560 5.8 μs

565 5.7 μs

570 5.7 μs

575 5.6 μs

580 5.6 μs

585 5.5 μs

590 5.5 μs

595 5.4 μs

600 5.4 μs

605 5.3 μs

610 5.3 μs

615 5.2 μs

620 5.2 μs

625 5.2 μs

630 5.1 μs

635 5.1 μs

640 5 μs

645 5 μs

650 5 μs

655 4.9 μs

660 4.9 μs

665 4.8 μs

670 4.8 μs

675 4.8 μs

680 4.7 μs

685 4.7 μs

690 4.7 μs

695 4.6 μs

700 4.6 μs

705 4.6 μs

710 4.5 μs

715 4.5 μs

720 4.5 μs

725 4.4 μs

730 4.4 μs

735 4.4 μs

740 4.3 μs

745 4.3 μs

9.

750 4.3 μs

755 4.3 μs

760 4.2 μs

765 4.2 μs

770 4.2 μs

775 4.1 μs

780 4.1 μs

785 4.1 μs

790 4.1 μs

795 4.0 μs

800 4.0 μs

805 4.0 μs

810 4.0 μs

815 3.9 μs

820 3.9 μs

825 3.9 μs

830 3.9 μs

835 3.8 μs

840 3.8 μs

845 3.8 μs

850 3.8 μs

855 3.7 μs

860 3.7 μs

865 3.7 μs

870 3.7 μs

875 3.7 μs

880 3.6 μs

885 3.6 μs

890 3.6 μs

895 3.6 μs

900 3.6 μs

905 3.5 μs

910 3.5 μs

915 3.5 μs

920 3.5 μs

925 3.5 μs

930 3.4 μs

935 3.4 μs

940 3.4 μs

945 3.4 μs

950 3.4 μs

955 3.3 μs

960 3.3 μs

965 3.3 μs

970 3.3 μs

10.

975 3.3 μs

980 3.3 μs

985 3.2 μs

990 3.2 μs

995 3.2 μs

1000 3.2 μs

Reverse Time Given a Self-Run Frequency

Requested Frequency (kHz)

Actual Frequency (kHz)

Pulse Reversal Time Maximum (μs)

Duty Cycle (min%) Reverse/ Period

Duty Cycle (max%) Reverse/ Period

5 5 10 0.2 5

10 10 10 0.4 10

15 15.004 10 0.6 15

20 20 10 0.8 20

25 25 10 1 25

30 29.985 10 1.2 30

35 35.026 10 1.4 35

40 40 10 1.6 40

45 45.045 9.9 1.8 44.6

50 50 9 2 45

55 54.945 8.1 2.2 44.5

60 60.06 7.4 2.4 44.4

65 64.935 6.9 2.6 44.8

11.

70 69.93 6.4 2.8 44.8

75 74.906 6 3 44.9

80 80 5.6 3.2 44.8

85 85.106 5.2 3.4 44.3

90 90.09 4.9 3.6 44.1

95 94.787 4.7 3.79 44.5

100 100 4.5 4 45

105 105.263 4.2 4.21 44.2

110 109.89 4 4.4 44

115 114.943 3.9 4.6 44.8

120 119.76 3.7 4.79 44.3

125 125 3.6 5 45

130 129.87 3.4 5.19 44.2

135 135.135 3.3 5.41 44.6

140 139.86 3.2 5.59 44.8

145 144.928 3.1 5.8 44.9

150 150.376 2.9 6.02 43.6

155 155.039 2.9 6.2 45

160 160 2.8 6.4 44.8

165 165.289 2.7 6.61 44.6

170 169.492 2.6 6.78 44.1

175 175.439 2.5 7.02 43.9

180 180.18 2.4 7.21 43.2

185 183.486 2.4 7.41 44

190 190.476 2.3 7.62 43.8

195 194.175 2.3 7.77 44.7

200 200 2.2 8 44

205 204.082 2.2 8.16 44.9

210 210.526 2.1 8.42 44.2

215 215.054 2 8.6 43

220 219.78 2 8.79 44

225 224.719 2 8.99 44.9

230 229.885 1.9 9.2 43.7

235 235.294 1.9 9.41 44.7

240 240.964 1.8 9.64 43.4

245 243.902 1.8 9.76 43.9

250 250 1.6 10 40

255 256.41 1.5 10.26 38.5

260 259.74 1.5 10.39 39

265 266.667 1.5 10.67 40

270 270.27 1.4 10.81 37.8

275 273.973 1.4 10.96 38.4

280 281.69 1.4 11.27 39.4

285 285.714 1.4 11.43 40

12.

290 289.855 1.3 11.59 37.7

295 294.118 1.3 11.76 38.2

300 298.507 1.3 11.94 38.8

305 303.03 1.3 12.12 39.4

310 307.692 1.3 12.31 40

315 312.5 1.2 12.5 37.5

320 317.46 1.2 12.7 38.1

325 322.581 1.2 12.9 38.7

330 327.869 1.2 13.11 39.3

335 333.333 1.2 13.33 40

340 338.983 1.1 13.56 37.3

345 344.828 1.1 13.79 37.9

350 350.877 1.1 14.04 38.6

355 355.877 1 14.2 35.5

360 360.878 1 14.4 36

365 365.788 1 14.6 36.5

370 370.787 0.9 14.8 33.3

375 375.877 0.9 15 33.75

380 380.788 0.9 15.2 34.2

385 385.877 0.9 15.4 34.7

390 390.878 0.9 15.6 35.1

395 395.787 0.9 15.8 35.6

400 400.788 0.9 16 36.0

13.

1000V

200V

325V

4.62A

600V

1.2A 1.5A

Power Limit

Current Limit

Voltage Limit

1900V

Operation Range

Vout

Iout

131V

Figure 3.2 Curve of Output V-I Characteristic

1500W

750W

70Ω

Power Limit

Current Limit

Operation Range

Zout

666Ω 1333Ω

Pout

Voltage Limit

Figure 3.3 Curve of Output Impedance Characteristic

For Delta “HPP-1K5A01KAT” power supply, the maximum output voltage and current level are

1000 V and 4.62 A (Measured at the DC output). The output characteristic is as the figures above.

If the operation point is below 325V, the power supply can provide at most 4.62 A, if the operation

is more than 325V, the maximum output current will decrease to 1.5 A within the output voltage

reaching 1000V.

14.

3.4. Arc Suppression Specification

Figure 3.4 shows the waveforms and key parameters under arc condition, and Table 3.3

indicates the arc energy and adjustable parameters for user. As soon as the arc is detected by arc

voltage detection within 1 micro sec, power ON delay after a micro ARC will be approximately 5

microseconds. When the micro ARC is cleared normal pulsing resumes.

Hard Arcs (defined as those micro Arcs which cannot be extinguished with the standard micro

ARC algorithm of a 5 microsecond shutdown) will be detected within low impedance after the initial

micro ARC started. Number of detected arcs is displayed by the front panel display or from

communication interface. If hard arc inside vacuum chamber occur, the hard arc flag will be raised

and the power will shut down for a predetermined time.

Figure 3.4 Arc Suppression Mechanisms

Table 3.3 Arc Energy Specification and Adjustable Parameters for User

Item Specification Condition

Reverse Time 5u sec

Voltage Level Recognizing as Arc

10V to 250V, adjustable 10V Step, 100V Default

Hard Arc Shutdown time 200us to 10000us After Low Z output, power will shutdown

Arc Energy < 200uJ per 1kW With System

0V

0A

Arc Occurs

Detection Circuit Activated

Arc Detected

Switching on

Detection

TimeReverse

Time

Arc Voltage

Trip Level

t1 t2

Voltage

Current

signal of

switching

tt3 t4 t5 t6

Recovery

Time

10~250 V

-1~-2A

15.

3.5. Ignition Profile

Figure 3.5 shows the waveform of output voltage under Ignition condition. When power ON

with ignition function enabled, the output voltage will rise from 0V to ignition voltage within 10ms.

Then the voltage will stay on ignition voltage for 100ms and fall to 1000V for 900ms. This profile

will repeat every 1s. If the chamber is ignited within 10s, the output voltage will change to the set-

point directly. If not, the generator will latch.

The Ignition voltage can be set from 1000V to 1900V, 100V increment.

0V

t

Output

Voltage

-1900V

-1000V

10ms 100ms 900ms 900ms 900ms 900ms100ms 100ms 100ms

Figure 3.5 Ignition Profile

3.6. Process and Monitor Function

Table 3.4 Adjustable function parameters for User

Item Specification Description

Max. Power 20 to 1.5 kW Power will be constrained within the value of setting prior to the set point of regulation.

Max. Current 0.01 to 4.62 A Current will be constrained within the value of setting prior to the set point of regulation.

Max. Voltage 500 to 1000 V Voltage will be constrained within the value of setting prior to the set point of regulation.

Ignition Mechanism 1000 to 1900 V A voltage up to 1900 V is adjustable for igniting the system.

Ramp Time 50 to 2000 ms A ramp up to set point is adjustable for a soft start mechanism.

Set Point 1 to 10 s Monitoring if the output reaches the setting of regulation within the setting of period.

Energy Mode 1 to 99999 kJ Monitoring if the output energy reaches the setting of energy.

16.

Target Life Mode 1 to 15000 kWh Monitoring if the output energy reaches the setting of kWh.

3.7. Mechanical Specification

The outward appearance, cooling specification for minimum CFM Requirement, and I/O ports

of Delta “HPP-1K5A01KAT” sputtering power supply are described as below:

Table 3.4 Mechanical Specification

Item Description

Physical Dimension 482.6(W)x132.5(H)x560(L)mm 19"(W)x5.2"(H)x23.6"(L) (19" 3U)

Weight 32kg

Cooling Fan Cooling

AC Input Connector Harting Han Q/5 series p/n 09120052633

DC Output Connector 7/16 Connector, Female

User Port Analog I/O: 15-pin female D-sub

Host Port Digital I/O: 9-pin female RS232 and RS485 and RJ45

Mechanical Drawing

Unit: mm (inch)

Figure 3.6 Mechanical Drawing of Delta “HPP-1K5A01KAT” sputtering power supply

17.

Air cooling

Figure 3.7 Air Flow Schematic Diagram

Delta “HPP-1K5A01KAT” sputtering power supply is the forced air cooling type. Please keep enough

space for air flow cooling capability when it is installing to the cabinet. Air inlet on the front panel and

air outlet on the rear panel is shown in figure 3.7. Air outlet of rear panel is responsible for dissipating

the heat from inside of power supply to outside by internal two fans. The temperature of air inlet

should not exceed 40degree C.

18.

3.8. Environment Specification

Table 3.6 Climatic Specification

Item Temperature Relative Humidity Air Pressure

Operating 0˚C to 40˚C (32˚F to 104˚F)

10% to 90% RH (Non-condensing)

80kPa to 106kPa (approximately 2000m above sea level)

Storage -25˚C to 55˚C (-13˚F to 131˚F)

10% to 95% RH 80kPa to 106kPa (approximately 2000m above sea level)

Transportation -25˚C to 70˚C (-13˚F to 158˚F)

95% RH (Maximum)

66kPa to 106kPa (approximately 2000m above sea level)

Table 3.7 Environment Specification

Item Description

Operating Category II

Pollution Degree Pollution Degree 2

19.

Chapter 4: System Protection Mechanism

4.1. Input Breaker

The function of this switch is to prevent over current at input side from any malfunction

happening and simultaneously provide a manual switch for user to turn off the power supply.

4.2. Protection by MCU (A: Auto Recovery, L: Latch)

Table 4.1 Definition and description of MCU protection

Alarm Condition Code Description Mode

HW Fault M1 M1F Hardware error from the left module A

SW OVP OV Output over voltage A

SW OCP OC Output over current A

SW OPP OP Output over power A

Target Life Monitor 09 Power off while output reaches setting Energy L

Output Interlock 11 Uninstallation of output cover L

Contactor Interlock 12 Uninstallation of contactor pin in D-sub connector L

Communication Loss 15 Error from internal communication L

Fan1 Error 17 Error from the left fan L

Fan2 Error 18 Error from the right fan L

Bus UVP 20 Input voltage is under operation range L

Bus OVP 21 Input voltage is over operation range L

Set Point Monitor 23 Error while output fails to reach setting parameter within setting time

L

Energy Mode Monitor 24 Power off while output reaches setting energy L

Warning Condition Code Description Mode

Output Limit limit Output is over setting parameters of setting A

20.

Chapter 5: Installation

Delta “HPP-1K5A01KAT” power supply is a high voltage power supply. Please read this manual carefully and follow the instruction before installation and operation, otherwise an electric shock or a fatal accident might be caused.

Shielding

PE

PE

Chamber

Figure 5.1 Installation diagram

This power supply could only be placed horizontally and connect the protective grounding to prevent an electric shock before use.

Consideration must be taken not to impede the supply or flow of air to the unit.

Please switch off the power supply before touching the case.

Before applying power, please verify that the product is set to match with the line voltage.

The circumstance temperature should be managed under 40˚C

The installation and operation should be only in pollution degree 2 or better environment. Do not operate this device in a dusty area or in corrosive gas environment.

Proper grounding: For safe use, must connect ground cable (Yellow / Green wire) from ground stud on the power supply rear panel to the pure earth ground. Poor grounding may cause an electric shock or fatal accident.

Output connector must be connected with the attached output cable. (3KV/6AWG/200°C, with shielding). Do not use other output cables.

Before applying power, please verify that the product is set to match with the line voltage. When emergency, cut-off the circuit breaker, and then removing mains supply cord.

Operating personnel must not remove the cover of the instrument. Component replacement and internal adjustment can be done only by qualified service personnel.

Remove mains cord and output cable before exterior maintenance and service.

Use the carrying handle when dismantling it. Avoid drop resulting in hurt.

21.

5.1. Cooling Requirements

For the HPP-1K5A01KAT A supply to be sufficiently cooled, the cabinet must be set up to:.

1. Bring in coolant air of the correct temperature(40 ˚C maximum)

2. Distribute coolant air to the power supplies

3. Prevent air exhausted from the cabinet from circulating back and becoming input air

4. Exhaust the hot air from the cabinet with minimal airflow restriction.

5.2. Cabinet Design

The following is a synopsis of the HPP-1K5A01KAT A to follow when designing a cabinet

containing a stack of HPP-1K5A01KAT A power supplies.

Coolant air must be drawn easily into the cabinet; exhaust air must be able to pass

unrestricted out of the cabinet. If some physical constriant restricts the flow of exhaust air out of

the cabinet, we recommend that fans or blowers be mounted so that the hot air is removed from

the cabinet as quickly as possible.

Each HPP-1K5A01KAT A power supply dissipates up to 10% of its maximum power at full

rated output. The minimum air flows in cubic feet per minute(CFM) required by individual HPP-

1K5A01KAT A supplies are shown in table 5.1. The static pressure(inches of water) of the empty

cabinet should not exceed 0.1 inches of water at the CFM level obtained by adding together the

minimum CFM values for all the power supplies that will be placed in the cabinet. For example, if

three HPP-1K5A01KAT A supplies are mounted in a cabinet, the minimum CFM requirement

would be three times the CFM of cabinet air volume compared to an individual supply.

Approximations of this figure, the total power dissipation, and the temperature difference between

coolant air and exhaust air are shown as an example in table 5.2.

Table 5.1 Minimum CFM requirement for HPP-1K5A01KAT unit

Type of PSU CFM Required

1.5KW 260 CFM (122.7 liters/second)

22.

5.3. Grounding

For your convenience, the rear panel of the HPP-1K5A01KAT supply features three

equipotential ground screw: three M6 screw. These are indicated on the rear panel by a ground

symbol.See figure 6.2 for more information.

23.

Chapter 6: Interface

6.1. Front Panel

The functions for several buttons on the front panel are described on Table 6.1

Table 6.1 Function description of front panel

“Enter” Button 1. Press the button to change all of adaptive parameters. 2. Press the button to enter the next layer while in menu screen.

“Menu” Button 1. Press the button to menu screen from home screen. 2. Press the button to return to the previous layer while in menu screen.

“P” Button Press the button to set the output condition in constant power mode. In constant power mode user could adjust output power regulation level by “enter button” and “knob”.

“I” Button Press the button to set the output condition in constant current mode. In constant current mode user could adjust output current regulation level by “enter button” and “knob”.

“V” Button Press the button to set the output condition in constant voltage mode. In constant voltage mode user could adjust output voltage regulation level by “enter button” and “knob”.

“ON” Button Press the button to turn on the output power. While power on, user could adjust output regulation level by “enter button” and “knob”.

“OFF” Button Press the button to turn on the output power.

“LOCK” Button Press the button to lock “Enter”, “Menu”, “P”, “I”, “V”, “ON”, “OFF” button. This function could prevent any unexpected change from panel while PSU in operation.

Regulation Knob Rotate the knob to adjust the regulation level.

LCD Display

The display shows command of output regulation level according to control modes of Power/Current/Voltage. It also indicates feedback values of Power/Current/Voltage and system status, such as error conditions for all protect signals.

24.

Display Panel LEDs

POWER ON Lights green when input power is on

OUTPUT Lights green if output power is on

SETPOINT Lights green if the Pulsed DC power supply is operating within set point; accuracy

is within 0.4% of full scale or 2% of set point, whichever is greater

INTERLOCK Lights green if all interlock conditions have been met

BUS FAULT Lights green when a bus fault occurs

OVERTEMP Lights green if the Pulsed DC power supply has exceeded the maximum

operating temperature

ARC After the output has been turned off, this LED lights green for a predetermined

time if the hard arc count limit was reached during the previous run. You define

this limit. The ARC LED will be activated under two different conditions:

1. If the hard arc count limit is non-zero and the number of hard arcs seen

exceeded this limit during the last run, the pulse will occur when the output is

turned off.

2. If the hard arc count limit is set to zero, this signal will pulse for a

predetermined time for every hard arc seen by the unit. If another hard arc is seen

before the last pulse is complete, the pulse width will be refreshed to the full

width.

Figure 6.1 Front Panel

25.

6.2. Rear Panel

1. GND terminal is for chamber grounding, and earth grounding should be performed for

safety.

2. Connect output terminal to target and connect UHF to the chamber

3. Your pulsed DC power supply features a host port with a 9-pin, female, RS-232/RS-485

connector for interfacing with a host computer.

4. Your pulsed DC power supply features a user port with a 15-pin, female, D-sub connector

for interfacing with a computer.

5. The Contactor Intlk port, located on the rear panel of the pulsed DC power supply, is a 9-

pin, male, subminiature-D connector. To enable the pulsed DC power supply to function, pins

3 and 4 of this connector must be shorted together (through a cheater plug, external switch,

or relay).

Figure 6.2 Rear Panel

26.

6.3. Main Menu Map

Port Selection

Home Screen

Fault Screen

First Layer Second Layer Third Layer

Process Control

Interface Setup

System Information

Delta Service

Limit Setup

Monitor Setup

Arc Setup

Default

Max. Power

Default

1500W

Max. Voltage 1000V

Max. Current 4.62A

Ignition OFF

Ramp Time OFF

Set Point OFF

Energy Mode OFF

Target Life Cnt 1

Default

Default

Arc Function ON

Arc Trip Level 100V

Delay Time OFF

Pause Time 250us

Arc Density OFF

Arc Number OFF

Communication Setup

Local

Host: RS-485

User : D-sub

User Port Regulation

A / Ri Offset

Local

A / Vo Offset

A / Io Offset

+0.0%

+0.0%

+0.0%

Default

Parallel Mode Setup Unit State

Master

Parallel Number 01

Termination RES. OFF

Unit Address Depend on 8-Pin Switch

Function Screen

Host : R-S232

Master

Slave

Operation DataIntegral Power Run

Integral Time Run

Power On Count

Output Power Count

After Initializing System

Power On Count


Output Time Count


System LifeTotal Power Run

Output Power Count

Since Factory

Total Time RunOutput Time Count

After Manufacture

Total On CountPower On Count

After Manufacture

Software Ver. Panel MCU

System MCU

Arc MCU

S.00 (Depend on Update)



E r r o r O c c u r s

E - 0 0 0

1 OFF

Third Layer Fourth Layer

R E G : 1 5.

0 W O U T : O N

1 0 0 0 V 4 6. 2 A 1 5 0 WF : 4 0

M L T : 0 : 0 0 : 0 0S E 0 0

s

R

0 01 uT :0>

00 zHk

R E G : 1 0.

0 V O U T : O N

1 0 0 0 V 4 6. 2 A 1 5 0 WF : 4 0

M L T : 0 : 0 0 : 0 0S E 0 0

s

R

0 01 uT :0>

00 zHk

R E G : 4 ..

6 A O U T : O N

1 0 0 0 V 4 6. 2 A 1 5 0 WF : 4 0

M L T : 0 : 0 0 : 0 0S E 0 0

s

R

0 01 uT :2>

00 zHk

Reverse Voltage 100V

27.

R E G : 1 5.

0 W O U T : O N

1 0 0 0 V 4 6. 2 A 1 5 0 WF : 4 0

M L T : 0 : 0 0 : 0 0S E 0 0

s

R

Command Power On/OffVoltage/Current/Power Reader

Arc Number、Arc Density

Set Point、Energy、Target Life Mode

Run Time Hr/Min/SecMaster/Slave

0 01 uT :

Lock

0>

00 zHk

D : 9 9A9 99A N :

Arc DensityArc Number

Fig 6.3 Front Panel

28.

6.4. Digital Communication Port (Host)

The 9-pin female RS232 connector labeled “Host Port” on the rear of the power supply lets user

connect with computer to control the power supply. Definition of RS232 connector is as follows:

Figure 6.3 Host Port: 9-pin female RS232/RS485 connector

Table6.2 Definition of RS232 RS485 Connector

Pin 1 N/A

Pin 2 RS-232(Tx)

Pin 3 RS-232(Rx)

Pin 4 N/A

Pin 5 GND

Pin 6 RS-485 (+)

Pin 7 RS-485 (-)

Pin 8 N/A

Pin 9 N/A

29.

Table 6.3 Protocol of RS232 Definition (1)

Remote to PSU

Byte

0 1 2 3 4 5 6 7 8 9 10

IP Command Data1 Data2 Check Sum Termination

Byte H-Byte L-Byte H-Byte L-Byte H-Byte L-Byte 0x00 Byte 0x00 0x0D

CV Mode IP 0x11 0x00/01/02 0x00 0x00 Value 0x00 Value 0x00 0x0D

CC Mode IP 0x12 0x00/01/02 0x00 0x00 Value 0x00 Value 0x00 0x0D

CP Mode IP 0x13 0x00/01/02 0x00 0x00 Value 0x00 Value 0x00 0x0D

A/Ri Offset IP 0x15 0x00/01 0x00 0x00 00/01 Value 0x00 Value 0x00 0x0D

A/Vo Offset IP 0x16 0x00/01 0x00 0x00 00/01 Value 0x00 Value 0x00 0x0D

A/Io Offset IP 0x17 0x00/01 0x00 0x00 00/01 Value 0x00 Value 0x00 0x0D

Set Point IP 0x1A 0x00/01/02 0x00 0x00 Value 0x00 Value 0x00 0x0D

Pause Time IP 0x1C 0x00/01 0x00 0x00 Value 0x00 Value 0x00 0x0D

Energy Mode IP 0x1D 0x00/01/02 Value Value 0x00 Value 0x00 0x0D

Arc Function IP 0x1E 0x00/01 0x00 0x00 Value 0x00 Value 0x00 0x0D

Max Power IP 0x22 0x00/01 0x00 0x00 Value 0x00 Value 0x00 0x0D

Max Current IP 0x23 0x00/01 0x00 0x00 Value 0x00 Value 0x00 0x0D

Max Voltage IP 0x24 0x00/01 0x00 0x00 Value 0x00 Value 0x00 0x0D

Ramp Time IP 0x25 0x00/01 0x00 0x00 Value 0x00 Value 0x00 0x0D

Target Life IP 0x26 0x00/01/02 0x00 0x00 Value 0x00 Value 0x00 0x0D

Pulse reverse time

IP 0x29 0x00/01 0x00 0x00 Value 0x00 Value 0x00 0x0D

Pulse frequency

IP 0x2A 0x00/01 0x00 0x00 Value 0x00 Value 0x00 0x0D

Arc Voltage IP 0x30 0x00/01 0x00 0x00 Value 0x00 Value 0x00 0x0D

ARC Density IP 0x31 0x00/01/02 0x00 0x00 Value 0x00 Value 0x00 0x0D

ARC Number IP 0x32 0x00/01/02 0x00 0x00 Value 0x00 Value 0x00 0x0D

Ignition IP 0x33 0x00/01 0x00 0x00 Value 0x00 Value 0x00 0x0D

External On IP 0x41 0x00/01/02 0x00 0x00 0x00 0x00 0x00 Value 0x00 0x0D

External Off IP 0x42 0x00/01/02 0x00 0x00 0x00 0x00 0x00 Value 0x00 0x0D

Reset IP 0x45 0x00 0x00 0x00 0x00 0x00 0x00 Value 0x00 0x0D

Default 1 IP 0x60 0x00 0x00 0x00 0x00 0x00 0x00 Value 0x00 0x0D

Limit setup Default

IP 0x61 0x00 0x00 0x00 0x00 0x00 0x00 Value 0x00 0x0D

Monitor setup Default


ARC setup Default


User Regulation

Default IP 0x70 0x02 0x00 0x00 0x00 0x00 0x00 Value 0x00 0x0D

Error IP and Alarm Code

Return IP 0x71 0x02 0x00 0x00 0x00 0x00 0x00 Value 0x00 0x0D

PSU State Return


30.

Table 6.4 Protocol of RS232 Definition (2)

PSU to Remote

Byte

0 1 2 3 4 5 6 7 8 9 10



CV Mode IP 0x11 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

CC Mode IP 0x12 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

CP Mode IP 0x13 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

A/Ri Offset IP 0x15 0x0A 0x00 0x00 00/01 Value 0x00 Value 0x00 0x0D

A/Vo Offset IP 0x16 0x0A 0x00 0x00 00/01 Value 0x00 Value 0x00 0x0D

A/Io Offset IP 0x17 0x0A 0x00 0x00 00/01 Value 0x00 Value 0x00 0x0D

Set Point IP 0x1A 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

Pause Time IP 0x1C 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

Energy Mode IP 0x1D 0x0A Value Value 0x00 Value 0x00 0x0D

Arc Function IP 0x1E 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

Max Power IP 0x22 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

Max Current IP 0x23 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

Max Voltage IP 0x24 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

Ramp Time IP 0x25 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

Target Life IP 0x26 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

Pulse reverse time

IP 0x29 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

Pulse frequency

IP 0x2A 0x0A

0x00 0x00 Value 0x00 Value 0x00 0x0D

Arc Voltage IP 0x30 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

ARC Density IP 0x31 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

ARC Number IP 0x32 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

Ignition IP 0x33 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

External On IP 0x41 0x0A 0x00 0x00 0x00 0x00 0x00 Value 0x00 0x0D

External Off IP 0x42 0x0A 0x00 0x00 0x00 0x00 0x00 Value 0x00 0x0D

Reset IP 0x45 0x0A 0x00 0x00 0x00 0x00 0x00 Value 0x00 0x0D

Limit setup Default

IP 0x60 0x0A 0x00 0x00 0x00 0x00 0x00 Value 0x00 0x0D

Monitor setup Default


ARC setup Default


User Regulation

Default IP 0x63 0x0A 0x00 0x00 0x00 0x00 0x00 Value 0x00 0x0D

Version Return


Error IP and Alarm Code

Return IP 0x71 0x0A 0x00 0x00 0x00 0x00 0x00 Value 0x00 0x0D

31.

Byte 0 1 2 3 4 5 6 7 8 9 10 11

IP 0x90 Status1 Status2 Warning Alarm Voltage(V) Current(.0A) Power(.0Kw)

Byte 12 13 14 15 16 17 18 19 20 21 22 23

User

Command Arc Counter(/s) Arc Counter

0x00 Check Sum

0x00 0x0D

Note: Check Sum Value is the summation of “1” signal calculated by byte 0 to 6.

Note: Use 9600bps, 8 data bits, no parity, 1 stop bit (9600 8-N-1)

Bit 0 1 2 3 4 5 6 7 Status1 CV

MODE CC MODE

CP MODE

HV ON Setpoint MODE

Ignition MODE

System Warning

System Shutdown

Bit 0 1 2 3 4 5 6 7

Status2 System Ready

OVP OCP OTP OPP Interlock Arc Protect

AC Bus Protect

Table 6.5 Value definition (Translate decimal to hexadecimal for utilizing)

Command Byte3 Byte4 Byte5 Byte6

CV Mode 0 to 1000 for 0 to 1000V

CC Mode 0 to 462 for 0~4.62A

CP Mode 20 to 1500 for 10w to 1500W

A/Ri Offset Plus: 00, Minus: 01 0 to 99 for 0 to 9.9%

A/Vo Offset Plus: 00, Minus: 01 0 to 99 for 0 to 9.9%

A/Io Offset Plus: 00, Minus: 01 0 to 99 for 0 to 9.9%

Set Point 1 to 10 for 1 to 10s

pause Time 2 to 100 for 200 to 10000us, Scale: 100us

Pulse frequency 0 to 80 for DC to 400k Scale:5kHz

Pulse reverse time 4 to 100 for 0.4us to 10us Scale:0.1us

Energy Mode 1 to 99999 for 1 to 99999kJ, 0: OFF

Arc Function OFF: 0, ON: 1

Max Power 20 to 1500 for 20 to 1500W

Max Current 10 to 462 for 0.01 to 4.62A

Max Voltage 325 to 1000 for 325 to 1000V

Ramp Time 5 to 200 for 50 to 2000ms

Target Life 0 to 9999kWh for OFF to 9999kWh, 0: OFF

Arc Voltage 10 to 250 for 10 to 250

Arc Density 0 to 99 for 0 to 99 times/s

Arc Number 0 to 999 for 0 to 999 times

Ignition 10 to 19 for 1000V to 1900V

Note: Please use hexadecimal

32.

6.5. Analog Communication Port (User)

The 15-pin female subminiature-D connector labeled “User Port” on the rear of the power supply

lets you connect with control box to control the power supply in analog signal. Definition of 15-pin

female subminiature-D connector is as follows:

Figure 6.4 Connector of user port, 15pin female subminiature-D

Table 6.6 Definition of subminiature-D connector

Pin Define I/O Description

1 +24V I External 24V is connected to the collector of photo coupler

2 VOUT_A O Pin 2 shows the reader of output voltage 0 to 10 V for V = 0 to 1000 V

3 POUT_A O Pin 3 shows the reader of output Power 0 to 10 V for P = 0 to 1.5 kW

4 OUTPUT_ENABLE_D I Turn on the output power by pulling the pin low

5 XPROG_A I User could adjust regulation by Pin 5 0 to 10 V for P = 0 to 1.5 kW

6 COM_A - The return pin for VOUT_A, POUT_A, XPROG_A

7 PWRON_D O Pin 7 shows the on/off state of output

8 PWRON COM_D - The return pin for PWRON_D

9 OUTPUT_ENABLE_COM_D - The return pin for OUTPUT_ENABLE_D

PSU

Digital Signal Output

Digital Signal Input

Vcc

Vcc

+15V_ISO

Analog Signal Input

Vcc

+15V_ISO

Analog Signal Output

15-pin D-sub

+15V_ISO

33.

10 MOD GREEN O Pin 10 is connected to the emitter of photo coupler for MOD GREEN function

11 INTERLOCK_D I Pin 11 indicates the disconnection of interlock

12 INTLK COM_D - The return pin for INTERLOCK_D

13 NET GREEN O Pin 13 is connected to the emitter of photo coupler for NET GREEN function

14 MOD AMBER O Pin 14 is connected to the emitter of photo coupler for MOD AMBER function

15 NET AMBER O Pin 15 is connected to the emitter of photo coupler for NET AMBER function

Note 6.5: Precaution for external connection

Port of Digital Signal Input

To control the input signal, a switch is utilized between the ports and isolated ground.

Open → Floating

Close → Grounding

Port of digital Signal output

The internal resistance of the ports is 5.1 kohm, and a pull-up power supply Vpull-up is

required with a 5.1 kohm resistor.

Initial → > 0.9 * Vpull-up

Trigger → < 0.5 * Vpull-up + 1 V

If Vpull-up is connected to “+15V_ISO” supplied by pin18 with a 5.1 kohm resistor, initial state

would be high than 13.5 V and trigger state would be lower than 8.5 V.

Analog Signal Input Port

An isolated amplifier is utilized in the ports. The voltage level is 0 to 10 V for user to enter

the command and shall not greater than 12 V.

Analog Signal output Port

An isolated amplifier is utilized in the ports. The voltage level is 0 to 10 V for users to read

out the output values of voltage, current, and power.

34.

Chapter 7: Operation

7.1. Local Operating Steps

Step A

Import AC voltage to input connector on rear panel. The mains voltage level should be 208±

10% VAC.

Step B

Turn on the breaker to start the power supply. Now, you can see “LCD Display” is working and

shows the default setting of the power supply.

Step C

Choose one operating mode from “P”, “I”, “V” button, and “LCD Display” will show the mode you selected and change the command unit mode by mode.

Operating mode cannot be changed during power on period. It only can select while power off.

Step D

Rotate the knob to adjust the regulation level. The command (P, I or V) will change by different

mode selection in step B. The reverse time can be adjusted from 0.4us to 10.0us. The frequency

can be adjusted from 5kHz to 400kHz. When in Power mode, the command can be adjusted from 0

to 1.5 kW; when in Current mode, command can be adjusted from 0.01 to 4.62 A; when in Voltage

mode, and command can be adjusted from 131 to 1000 V

Step E

Press the “On” button to turn on the output power. While power on, user could adjust output

regulation level by “Enter” button and “knob”. “LCD Display” will show the feedback values once the

output is on.

After power on, the electric shock may lead to death or serious injury. Please read this manual

carefully and follow the instruction steps before installation and operation, otherwise an electric

shock or a fatal accident might be caused.

Step F

Press the “Off” button to turn off the output power.

35.

Step G

If the power supply is kept off for a while, please remove AC power cord.

Don’t touch the load before grounding it. And make sure the electricity is fully discharged by meter.

7.2. D-sub Operating Steps

Example : CP mode 1.5 kW output

Operating steps:

1. Set the front panel => Interface Setup => Communnication Setup => D-sub.

2. Command Level: Set +10 V input to pin 5 for 1.5 kW Command.

3. Enable On: Connect pin 4 to pin 9

4. Enable Off: Remove pin4 from pin 9.

7.3. RS-232 Operating Steps

1. Set the front panel => Interface Setup => Communnication Setup => RS-232.

2. Follow the protocol defined in chapter 6.4 to operating.

3. Set Pulse reverse time and Pulse frequency

Remote to PSU

Byte

0 1 2 3 4 5 6 7 8 9 10



Pulse reverse time


Pulse frequency


4. Set Operating mode

Remote to PSU

Byte

0 1 2 3 4 5 6 7 8 9 10






5. Power on and power off

36.

Remote to PSU

Byte

0 1 2 3 4 5 6 7 8 9 10





7.4. RS-485 Operating Steps

1. Set the front panel => Interface Setup => Communnication Setup => RS-485.

2. Follow the protocol defined in chapter 6.4 to operating.

3. Set Pulse reverse time and Pulse frequency

Remote to PSU

Byte

0 1 2 3 4 5 6 7 8 9 10



Pulse reverse time


Pulse frequency


4. Set Operating mode

Remote to PSU

Byte

0 1 2 3 4 5 6 7 8 9 10






5. Power on and power off

Remote to PSU

Byte

0 1 2 3 4 5 6 7 8 9 10





37.

Chapter 8: Maintenance

Alarm Condition Code Description Suggested Action

HW Fault M1 M1F Hardware error from the left module

Take all safety precaution, and then check if the mains voltage that is in specification. Turn on the output power with a dummy load to ensure if it is under normal operation.

HW Fault M2 M2F Hardware error from the right module


SW OVP OV Output over voltage


SW OCP OC Output over current

Take all safety precaution, and then check if the mains voltage that is in specification. Turn on the output power with a dummy load to ensure if it is under normal operation

SW OPP OP Output over power


Contactor Interlock 10 Uninstallation of contactor pin in D-sub connector

Check if contactor pin in D-sub connector is short.

Output Interlock 11 Uninstallation of output cover Check if output cover is correctly installed.

Communication Loss 15 Error from internal communication Check if the bus between panel and control card is correctly connected.

Fan1 Error 17 Error from the left fan Check if the cable between fan in the left module 1 and control card is correctly connected.

Fan2 Error 18 Error from the right fan Check if the cable between fan in the right module 2 and control card is correctly connected.

Bus UVP 20 Input voltage is under operation range

Take all safety precaution, and then check if the mains voltage that is in specification.

Bus OVP 21 Input voltage is over operation range Take all safety precaution, and then check if the mains voltage that is in specification.

Set Point Monitor 23 Error while output fails to reach setting parameter within setting time

Take all safety precaution, and then turn on the output power with a dummy load to ensure if it is under normal operation.

38.

Energy Mode Monitor 24 Power off while output reaches setting Energy

Monitor Setting is end. Press and hold “OFF” button with 10 second to clear error.

Warning Condition Code Description Suggested Action

Output Limit Limit Output is over setting parameter N/A

Documents

User Manual - Delta Electronics Manual... · 435 7.4 μs 440 7.3 μs 445 7.3 μs 450 7.2 μs 455 7.1 μs 460 7 μs 465 6.9 μs 470 6.9 μs 475 6.8 μs 480 6.7 μs 485 6.7 μs 490