3
C D 5 4 6 3 7 2 B 8 A SH OF E 5 4 6 3 7 2 8 1 REV DESCRIPTION DWN CHKR APVDDATE H H G G F F E E D C APPROVALS DEC TOLERANCES: FRACTIONS .XX DIMENSIONS ARE IN .XXX .XXXX BREAK EDGES .005-.015 INCHES. INTERNAL CORNERS R.015 MAX ALL SURF ENGR DWN CHKR DATE UNLESS OTHERWISE SPECIFIED NEXT ASSEMBLIES: SCALE: E CAD FILE NAME: DRAWING NUMBER REVISION NUMBER ANGLE ASME Y14.5M-1994 AND Y14.41-2003 DIMENSIONING AND TOLERANCING IS IAW ± ± ± ± ± DO NOT SCALE DRAWING THE DRAWINGS, SPECIFICATIONS AND OTHER DATA HEREIN PROVIDED SHALL NOT BE COPIED, PUBLISHED OR OTHERWISE FURTHER DISSEMINATED WITHOUT PRIOR WRITTEN PERMISSION OF STANFORD UNIVERSITY/SLAC SLAC FORMAT V3.0 CHECK-PRINT garyb 04-17-2014 04:42:45 PM ESTIMATED MASS 4808.035 lbm --- --- --- --- --- ID-257-500-56 1:10 --- --- --- --- 125 D. WALZ G. BOUCHARD 4-1-2014 D. WALZ D. WALZ C. IVERSON --- --- id25820017-0.dft FACET INTEGRATION SYSTEMS 20-6 EXPERIMENTAL AREA PLASMA LONG OVEN INSTL --- ID-258-200-17 0 ID-258-200-17 0 FACET 20-6 PLASMA LONG OVEN 1 1 --- 25 1 15 50 49 26 7 37 45 13 2 8 23 36 24 SC25860364 BELLOWS, 2491532EE 3 23 SC25001301 6" OD FLANGE, CF, NR BLANK, THRU HOLES, SST 1 22 SA25860401 VAC CONN SPOOL 83.00 L 1 21 SA25860399 VAC CONN SPOOL 69.38 L 1 20 SA25860358 VAC CONN SPOOL 15.90 L 1 19 SA25860357 VAC CONN SPOOL 9.78 L 1 18 SA25860359 VAC CONN SPOOL 4.51 L 1 17 SA25860387 VAC CONN SPOOL 1.50 L 1 16 SA25740291 OTR CUBE ASSY,2.75 IN EXP 2 15 SA25740296 OTR CUBE ASSY, 2.75 IN 2 14 SA25740256 MIRROR INSERTER, 3 INCH 1 13 SA25841006 PEDESTAL ASSEMBLY 6 IN 1 12 SA25841032 PEDESTAL ASSEMBLY 4.5 IN 1 11 SA38074620 BELLY BAND ASSY 1 10 SA25860397 Be WINDOW INSERTER VALVE 1 9 SA25841037 BPM SUPPORT, 2.00" ID 1 8 SA25860380 MAGNET CHAMBER 49.29 L 1 7 SA40513906 RESONANT CHARGE MONITOR 1 6 SA25841044 VALVE SPRT, SERIES 010 DN40 1 5 SA25841026 CHARGE MONITOR SPRT ASSY 1 4 SA25860282 NIPPLE, CF8 X 2X CF2.75 X 3LG 2 3 SA25860280 BELLOWS, WLD ASSY, 6.44 OD X 5.40 ID, 8.825 NOM LG, 9 SEG, STYLE E, SST 2 2 SA25841000 LONG OVEN SLIDE ASSEMBLY 1 1 SA25860260 IP INTEGRATION BOX ASSY 1 ITEM STOCK OR PART NO TITLE OR DESCRIPTION QTY 47 UCLA CONSTRUCT PLASMA OVEN CHAMBER, AS DELIVERED 1 46 STANDARD BELLOWS 2251502III FLANGED BELLOWS ASSY, 2.75 CF, 3.07 NOM LENGTH, SST 5 45 NORCAL 6C400CU 6 WAY CUBE CROSS, CF6 1 44 VARIAN FR04500275E REDUCING FLANGE, 4.5 X 2.75, 304 SST 1 43 VAT 54032GE02 ALL METAL ANGLE VALVE, 1 1/2, MANUAL 1 42 VAT 48132CE44 GATE VALVE, 40 MM BORE, PNEUMATIC ACTUATOR, ALL METAL 1 41* MDC 191017 GASKET, 8" OD FLANGE, OFHC COPPER 4 40* MDC 191013 GASKET, 6" OD FLANGE, OFHC COPPER 6 39* MDC 191009 GASKET, 4 1/2" OD FLANGE, OFHC COPPER 10 38* MDC 191004 GASKET, 2 3/4 OD FLANGE, OFHC COPPER 43 37 MDC 402014 REDUCING NIPPLE, 6.0 X 2.75 CF, 2.5 LG 1 36 MDC 402018 NIPPLE REDUCER, 8.0 CF X 6.0 CF X 2.5LG 1 35 MDC 405002 CROSS, 2.75 CF X 1.50 TUBE 2 34 MDC 406002 5WAY CROSS, 2.75 CF, 1.50 OD TUBE, 304 SST 1 33 MDC 450020 2.75 OD VIEWPORT, ZERO PROFILE QUARTZ 2 32 MDC 450024 VIEWPORT 6" QUARTZ 2 31 MDC 190070 PLATE NUT 1/428 6 30 MDC 408003 CUBE, 6 WAY, 4.50 CF FLANGE, SST 1 29 MDC 110018 FLANGE, 4.50 OD CF, BLANK, NONROTATABLE 4 28 MDC 150008 FLANGE, REDUCER, 4.50 X 2.75 CF, 1.50 ID, ZERO LG, 304 SST 4 26 ID25740310 TI FOIL VAC CHMB 1 25 SC25870032 BELLOWS 2.75 FLG 2.74.7 LG 2 ITEM STOCK OR PART NO TITLE OR DESCRIPTION QTY PRELIMINARY DESIGN garyb 04-17-2014 04:42:45 PM 48 16 47 15 51 52 24 3 4 18 3 42 9 24 68 NUT, HEX, 5/1624 UNF2B, STEEL 112 67 WASHER, FLAT NAR, .31 ID, SST 316 112 66 FLANGE BOLT 12 PT 5/1624 X 2.25, SST, SILVER PLD 80 65 FLANGE BOLT 12 PT 5/1624 X 2.00, SS, SILVER PLD 16 64 FLANGE BOLT 12 PT 5/1624 X 1.25, SS, SILVER PLD 81 63 FLANGE BOLT 12 PT 5/1624 X 1.00, SST, SILVER PLD 48 62 FLANGE STUD, 5/1624 X 1.75, SST, SILVER PLD 16 61 NUT, HEX, .25028 UNF2B, SST 316 234 60 WASHER, FLAT NAR, .25 ID, SS 316 234 59 FLANGE BOLT 12 PT 1/428 X 1.50, SST, SILVER PLD 72 58 FLANGE BOLT 12 PT 1/428 X .88, SST, SILVER PLD 13 57 FLANGE STUD, .25028 X 2.25, 316 SST, SILVER PLD 6 56 FLANGE STUD, .25028 X 2.00, 316 SST, SILVER PLD 12 55 FLANGE STUD, .25028 X 1.75, 316 SST, SILVER PLD 12 54 FLANGE STUD, .25028 X 1.5, 188 SST, SILVER PLD 12 53 FLANGE STUD, .25028 X 1.25, 316 SST, SILVER PLD 102 52 REF SMITH PURCELL 1 51 REF KRAKEN CHAMBER 1 50 REF 2.75 DBL SIDED Be FOIL FLANGE 2 49 REF LASER DUMP FLANGE 1 48 REF WIRE MONITOR 2 ITEM STOCK OR PART NO TITLE OR DESCRIPTION QTY 17 28 25 28 FABRICATE PER FP-202-631-14 ULTRA HIGH VAC PART BEAM DIRECTION 0 TABLE TOP LINAC COORDINATE: Y = -0.2289m A (SEE SH 2) A B E (SEE SH 3) F (SEE SH 3) 46 28 12 46 50 28 29 4X 30 6 10 46 44 46 5 48 DETAIL B SCALE 1:2.5 60 12X 61 12X 55 6X 6X 61 6X 60 6X 53 8X 68 8X 67 8X 65 48X 63 6X 60 6X 61 6X 53 12X 60 12X 61 57 6X H H 14 (SEE SH 3) 32 32 32 32 41 6X 41

ULTRA HIGH VAC PART - Stanford University

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C

D

5 46 37 2

B

8

A

SH

OF

E

5 46 37 28 1

REV DESCRIPTION DWN CHKR APVDDATE

H H

G G

F F

E E

D

C

APPROVALSDEC

TOLERANCES:

FRACTIONS

.XX

DIMENSIONS ARE IN

.XXX

.XXXX

BREAK EDGES .005-.015

INCHES.

INTERNAL CORNERS R.015 MAX

ALL SURF

ENGR

DWN

CHKR

DATE

UNLESS OTHERWISE SPECIFIED

NEXT ASSEMBLIES:

SCALE:

E

CAD FILE NAME:

DRAWING NUMBER REVISION NUMBER

ANGLE

ASME Y14.5M-1994 AND Y14.41-2003

DIMENSIONING AND TOLERANCING IS IAW

±

±

±±±

DO NOT SCALE DRAWING

THE DRAWINGS, SPECIFICATIONS AND OTHER DATA HEREIN PROVIDED SHALLNOT BE COPIED, PUBLISHED OR OTHERWISE FURTHER DISSEMINATED WITHOUT

PRIOR WRITTEN PERMISSION OF STANFORD UNIVERSITY/SLAC

SLAC FORMAT V3.0

CHECK-PRINTgaryb

04-17-2014 04:42:45 PMESTIMATED MASS

4808.035 lbm

---

---

---

---

---

ID-257-500-56

1:10

------------ 125

D. WALZG. BOUCHARD 4-1-2014D. WALZ

D. WALZC. IVERSON------

id25820017-0.dft

FACET INTEGRATION SYSTEMS20-6 EXPERIMENTAL AREAPLASMA LONG OVEN INSTL---

ID-258-200-17 0

ID-2

58-2

00-1

70

FACET 20-6 PLASMA LONG OVEN

11

---

25

1 15

50

49 26

7

37

45 132

8

23

36

24 SC�258�603�64 BELLOWS, 249�153�2�EE 3

23 SC�250�013�01 6" OD FLANGE, CF, NR BLANK, THRU HOLES, SST 1

22 SA�258�604�01 VAC CONN SPOOL 83.00 L 1

21 SA�258�603�99 VAC CONN SPOOL 69.38 L 1

20 SA�258�603�58 VAC CONN SPOOL 15.90 L 1

19 SA�258�603�57 VAC CONN SPOOL 9.78 L 1

18 SA�258�603�59 VAC CONN SPOOL 4.51 L 1

17 SA�258�603�87 VAC CONN SPOOL 1.50 L 1

16 SA�257�402�91 OTR CUBE ASSY,2.75 IN EXP 2

15 SA�257�402�96 OTR CUBE ASSY, 2.75 IN 2

14 SA�257�402�56 MIRROR INSERTER, 3 INCH 1

13 SA�258�410�06 PEDESTAL ASSEMBLY 6 IN 1

12 SA�258�410�32 PEDESTAL ASSEMBLY 4.5 IN 1

11 SA�380�746�20 BELLY BAND ASSY 1

10 SA�258�603�97 Be WINDOW INSERTER VALVE 1

9 SA�258�410�37 BPM SUPPORT, 2.00" ID 1

8 SA�258�603�80 MAGNET CHAMBER 49.29 L 1

7 SA�405�139�06 RESONANT CHARGE MONITOR 1

6 SA�258�410�44 VALVE SPRT, SERIES 010 DN40 1

5 SA�258�410�26 CHARGE MONITOR SPRT ASSY 1

4 SA�258�602�82 NIPPLE, CF8 X 2X CF2.75 X 3LG 2

3 SA�258�602�80 BELLOWS, WLD ASSY, 6.44 OD X 5.40 ID, 8.825 NOM LG, 9SEG, STYLE E, SST

2

2 SA�258�410�00 LONG OVEN SLIDE ASSEMBLY 1

1 SA�258�602�60 IP INTEGRATION BOX ASSY 1

ITEM STOCK OR PART NO TITLE OR DESCRIPTION QTY

47 UCLA CONSTRUCT PLASMA OVEN CHAMBER, AS DELIVERED 1

46 STANDARD BELLOWS225�150�2�III

FLANGED BELLOWS ASSY, 2.75 CF, 3.07 NOM LENGTH, SST 5

45 NOR�CAL 6C�400�CU 6 WAY CUBE CROSS, CF6 1

44 VARIAN FR04500275E REDUCING FLANGE, 4.5 X 2.75, 304 SST 1

43 VAT 54032�GE02 ALL METAL ANGLE VALVE, 1 1/2, MANUAL 1

42 VAT 48132�CE44 GATE VALVE, 40 MM BORE, PNEUMATIC ACTUATOR, ALLMETAL

1

41* MDC 191017 GASKET, 8" OD FLANGE, OFHC COPPER 4

40* MDC 191013 GASKET, 6" OD FLANGE, OFHC COPPER 6

39* MDC 191009 GASKET, 4 1/2" OD FLANGE, OFHC COPPER 10

38* MDC 191004 GASKET, 2 3/4 OD FLANGE, OFHC COPPER 43

37 MDC 402014 REDUCING NIPPLE, 6.0 X 2.75 CF, 2.5 LG 1

36 MDC 402018 NIPPLE REDUCER, 8.0 CF X 6.0 CF X 2.5LG 1

35 MDC 405002 CROSS, 2.75 CF X 1.50 TUBE 2

34 MDC 406002 5�WAY CROSS, 2.75 CF, 1.50 OD TUBE, 304 SST 1

33 MDC 450020 2.75 OD VIEWPORT, ZERO PROFILE QUARTZ 2

32 MDC 450024 VIEWPORT 6" QUARTZ 2

31 MDC 190070 PLATE NUT 1/4�28 6

30 MDC 408003 CUBE, 6 WAY, 4.50 CF FLANGE, SST 1

29 MDC 110018 FLANGE, 4.50 OD CF, BLANK, NON�ROTATABLE 4

28 MDC 150008 FLANGE, REDUCER, 4.50 X 2.75 CF, 1.50 ID, ZERO LG, 304SST

4

26 ID�257�403�10 TI FOIL VAC CHMB 1

25 SC�258�700�32 BELLOWS 2.75 FLG 2.7�4.7 LG 2

ITEM STOCK OR PART NO TITLE OR DESCRIPTION QTY

PRELIMINARY DESIGNgaryb

04-17-2014 04:42:45 PM

48 164715

51

52243 4

18

342

9

24

68 NUT, HEX, 5/16�24 UNF�2B, STEEL 112

67 WASHER, FLAT NAR, .31 ID, SST 316 112

66 FLANGE BOLT 12 PT 5/16�24 X 2.25, SST, SILVER PLD 80

65 FLANGE BOLT 12 PT 5/16�24 X 2.00, SS, SILVER PLD 16

64 FLANGE BOLT 12 PT 5/16�24 X 1.25, SS, SILVER PLD 81

63 ��� FLANGE BOLT 12 PT 5/16�24 X 1.00, SST, SILVER PLD 48

62 FLANGE STUD, 5/16�24 X 1.75, SST, SILVER PLD 16

61 NUT, HEX, .250�28 UNF�2B, SST 316 234

60 WASHER, FLAT NAR, .25 ID, SS 316 234

59 FLANGE BOLT 12 PT 1/4�28 X 1.50, SST, SILVER PLD 72

58 FLANGE BOLT 12 PT 1/4�28 X .88, SST, SILVER PLD 13

57 FLANGE STUD, .250�28 X 2.25, 316 SST, SILVER PLD 6

56 FLANGE STUD, .250�28 X 2.00, 316 SST, SILVER PLD 12

55 FLANGE STUD, .250�28 X 1.75, 316 SST, SILVER PLD 12

54 FLANGE STUD, .250�28 X 1.5, 18�8 SST, SILVER PLD 12

53 FLANGE STUD, .250�28 X 1.25, 316 SST, SILVER PLD 102

52 REF SMITH PURCELL 1

51 REF KRAKEN CHAMBER 1

50 REF 2.75 DBL SIDED Be FOIL FLANGE 2

49 REF LASER DUMP FLANGE 1

48 REF WIRE MONITOR 2

ITEM STOCK OR PART NO TITLE OR DESCRIPTION QTY

17

28

25

28

FABRICATE PERFP-202-631-14

ULTRA HIGHVAC PART

BEAM DIRECTION

0

TABLE TOPLINAC COORDINATE:Y = -0.2289m

A (SEE SH 2)A

BE

(SEE SH 3)

F(SEE SH 3)

4628

12

46

50

28

294X

30

610

46

44

46 5

48

DETAIL BSCALE 1:2.5

60 12X61 12X

55 6X

6X 616X 606X 53

8X 688X 678X 6548X 63

6X 606X 61

6X 53

12X 6012X 61

576X

H

H

14

(SEE SH 3)

32

32 32 32

416X

41

C

D

5 46 37 2

B

8

A

SH

OF

E

5 46 37 28 1

REV DESCRIPTION DWN CHKR APVDDATE

H H

G G

F F

E E

D

C

APPROVALSDEC

TOLERANCES:

FRACTIONS

.XX

DIMENSIONS ARE IN

.XXX

.XXXX

BREAK EDGES .005-.015

INCHES.

INTERNAL CORNERS R.015 MAX

ALL SURF

ENGR

DWN

CHKR

DATE

UNLESS OTHERWISE SPECIFIED

NEXT ASSEMBLIES:

SCALE:

E

CAD FILE NAME:

DRAWING NUMBER REVISION NUMBER

ANGLE

ASME Y14.5M-1994 AND Y14.41-2003

DIMENSIONING AND TOLERANCING IS IAW

±

±

±±±

DO NOT SCALE DRAWING

THE DRAWINGS, SPECIFICATIONS AND OTHER DATA HEREIN PROVIDED SHALLNOT BE COPIED, PUBLISHED OR OTHERWISE FURTHER DISSEMINATED WITHOUT

PRIOR WRITTEN PERMISSION OF STANFORD UNIVERSITY/SLAC

SLAC FORMAT V3.0

BEAM DIRECTION

15

50

49

51

52

26

16

37

7

15

2 36 32

3224 18 4

14

48 25 48

3

8

20

17

16

46

4424

42

46

0

28.9

4U

PS

TR

M F

AC

E B

e W

IND

OW

199.

883

UP

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RM

6"

CU

BE

FA

CE

205.

891

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6"

CU

BE

FA

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0

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46 28

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144.

583

91.5

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403

197.

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248.

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68.3

67

47

24

294X

21

1211

6

10

25VIEW A-A (FROM SH 1)

B

C

---

---

---

---

---

ID-257-500-56

1:10

------------ ---

D. WALZG. BOUCHARDD. WALZ

D. WALZC. IVERSON------

id25820017-0.dft

FACET INTEGRATION SYSTEMS20-6 EXPERIMENTAL AREAPLASMA LONG OVEN INSTL---

ID-258-200-17 0

ID-2

58-2

00-1

70

FACET 20-6 PLASMA LONG OVEN

22

---

G(SEE SH 3)

DETAIL CSCALE 1:2.5

(.250-20 UNC-2B)LINAC COORDINATES:X = -0.6102mY = -0.2289mZ = 1990.8819m

DETAIL B

0

0

50

9 1 3

4 19

22

6620X 20X 66

20X 6820X 67

59 6X 6X60 6X61

5312X 6012X 6112X

6X59 6X60 6X61

6X53 6X60 6X61

D

DETAIL DSCALE 1:2.5

12X53 12X60 12X61

5912X 12X 6012X 61

20X 6620X 6720X 68

20X 6620X 6720X 68

12X 6212X 6712X 68

59 12X60 12X61 12X

6X 536X 606X 61

42

42 32 322X

32 32

32 2X 322X

32 2X32

42 42 31

C

D

5 46 37 2

B

8

A

SH

OF

E

5 46 37 28 1

REV DESCRIPTION DWN CHKR APVDDATE

H H

G G

F F

E E

D

C

APPROVALSDEC

TOLERANCES:

FRACTIONS

.XX

DIMENSIONS ARE IN

.XXX

.XXXX

BREAK EDGES .005-.015

INCHES.

INTERNAL CORNERS R.015 MAX

ALL SURF

ENGR

DWN

CHKR

DATE

UNLESS OTHERWISE SPECIFIED

NEXT ASSEMBLIES:

SCALE:

E

CAD FILE NAME:

DRAWING NUMBER REVISION NUMBER

ANGLE

ASME Y14.5M-1994 AND Y14.41-2003

DIMENSIONING AND TOLERANCING IS IAW

±

±

±±±

DO NOT SCALE DRAWING

THE DRAWINGS, SPECIFICATIONS AND OTHER DATA HEREIN PROVIDED SHALLNOT BE COPIED, PUBLISHED OR OTHERWISE FURTHER DISSEMINATED WITHOUT

PRIOR WRITTEN PERMISSION OF STANFORD UNIVERSITY/SLAC

SLAC FORMAT V3.0

---

---

---

---

---

ID-257-500-56

1:10

------------ ---

D. WALZG. BOUCHARDD. WALZ

D. WALZC. IVERSON------

id25820017-0.dft

FACET INTEGRATION SYSTEMS20-6 EXPERIMENTAL AREAPLASMA LONG OVEN INSTL---

ID-258-200-17 0

ID-2

58-2

00-1

70

FACET 20-6 PLASMA LONG OVEN

33

---

DETAIL ESCALE 1:2.5(FROM SH1)

DETAIL FSCALE 1:2.5(FROM SH 1)

DETAIL GSCALE 1:2.5(FROM SH 2)

VIEW H-HSCALE 1:5

(FROM SH 1)

20X 64

58 6X

12X 5612X 6012X 61

12X 5312X 6012X 61

12X 5312X 6012X 61

64 8X

6X 616X 606X 53

8X 64

6X 596X 606X 61

6X 58 53 12X60 12X61 12X

41

32

32

32

32 2X

31

32

322X

322X

322X

41

546X 606X 616X 313X 32

53606132

53 6X60 6X61 6X32

55 6X60 12X61 12X32

53 6X60 6X61 6X32

65

6867

41 13

32 2X

14

23

45

43

33

34 35 35

596X 606X 616X 32

596X 606X 616X 32

596X 606X 616X 32

596X 606X 616X 32

596X

616X 606X

32