SUGAR• Tool for system-level MEMS simulation

• Goal: Be SPICE to the MEMS world

• Analyzes static, dynamic, and linearized steady-state behavior

• Challenges:– Be fast enough for design and optimization (not just

verification)– Handle coupled physical effects (electrical,

mechanical, thermal, optical, …)

SUGAR: Current work

• Broad set of component models

• Validation against optical measurements

• Deployment of Millennium-based web service (used in EE245 in Fall 2001)

• Analyze dependence on parameters (sensitivity analysis, bifurcation analysis)

• Design synthesis and optimization

• Integration of state-of-the-art solvers

Architecture

System Assembly

Device Models

Solvers

Netlist

uses mumps.net

param ox=0, oy=0, oz=0

gap3dV2 p1 [b c D E]

[l=100u w1=5u w2=5u

gap=2u t1=0u t2=500u

V1=5 V2=12

ox=ox oy=oy oz=oz]

Analysis Results

transient analysis

steady-state analysis

static analysis

sensitivity analysis

User Interfaces

MATLAB™ Web Library

Torsional micromirror. MEMS Design by: M. Last, K.S.J. Pister

• Complex system with ~1000 comb fingers and torsional springs

• Finite Element Analysis might use O(106) continuum elements

• Sugar: system reduces to 2,621 elements and 11,706 unknowns

• Device described using parameterized substructures

Cosine-shaped beams

Perforated beams

Mirror

Torsional hinge

Perforated comb drive array

Actuation direction

Moment arm

Recessedinner plate

M&MEMS: SUGAR on the Web• Hosted on Berkeley Millennium cluster

• Requires only a web browser (with Java for graphics)

• Used in Berkeley’s Fall 2001 introductory MEMS course