Guilhem Delpu -

SMART platform for flexible manufacturing

Collaborative programs manager

Brief profile of RECIF Technologies

Brief profile – Worldwide locations

KoreaLSTec

(Sales, Service)

ChinaBD Tech

(Sales, Service)

United-KingdomEMU Technologies

(200mm sales service)

JapanKMT

(Sales, Service)

Singapore, MalaysiaDOU YEE

(Sales, Service)

RECIF Tech France - HQ (Admin, R&D, Sales, service, training facility)

RECIF Tech U.S.A. (Sales, service, training facility)

RECIF Tech Taiwan(Sales, service, training facility)

IndiaIHE

(Sales, Service)

Brief profile – Over 30 years experience

1982

20021985 - 1990

1996 2005

Vacuum Handling Systems

Manual and

Automated tools

First 300mmWafer sorters

300mm wafer sorter World Leader

G5 generation 300mm sorter

2011

Project leader in NGC450 project

2013

300mm cleanliness breakthrough @ 26 nm particle size

2014

450mm EFEM for EU pilot line

2016

G5+ new 300mm wafer sorter

2015

Project leader inTSV-HANDY project

At

Acknowledged as a leader for 300mm wafer sorters

- Over 90% of turnover outside Europe

- 750++ units shipped worldwide

- Supports most advanced manufacturing sites and R&D centers

- Partnering in leading edge collaborative development programs

- Offers unsurpassed performance levels

Problem statement

Flexible manufacturing – Problem statement

Flexible manufacturing seen by RECIF is the ability for robotics to offer:

Flexibility for hardware challenges:

- Different substrate sizes (200mm, 300mm, 380mm, …)

- Different substrates shapes (round wafers, panels)

- Different substrate materials (Si, glass, molding compound, …)

Flexibility for software challenges:

- Different tool controller providers to interface with

- SMART manufacturing prerequisites (connectivity / security)

Data collection / internal exchange capability / secured external exchange / predictive maintenance …

Solution developed by RECIF Technologies

Modular approach for EFEM’s and Sorters

Common robotics core interfaced with all necessary loading stages and end effectors to support:

- Advanced cleanliness for node reduction on silicon wafers

- Hetegogeneous substrates in 3D IC, TSV, advanced packaging, etc…

Solution – SMART Platform – Hardware open platform

Solution – SMART Platform – Multi Software platform

Collaborate with major software solution providers

Involved in SMART manufacturing, INDUSTRY 4.0, « Factory of the future »…

Demonstrated software integration with:

A2CF frameworkLink

Tool commanderLink

PEER group Tool OrchestratorLink

RECIF 300mm EFEM integration with IBS implanter tool for 5nm

demonstration. Driven by AIS tool commander

(with ASML; imec; AMIL)

RECIF 300mm EFEM & Frame EFEM integrated with UNITY

metrology / inspection modules driven by PEER PTO.

To be demo at Amkor Technology Portugal

Solution – SMART Platform – Multi application platform

(Running CATRENE project)

Integration with:

inin

(Running ECSEL JU project)

Collaboration with major European OEM’s

To challenge the performance and the maturity of RECIF SMART Platform

- Heterogeneous wafer handling and inspection platform

Bonded wafers Warped FO-WLP wafers Glass wafers

Solution – SMART Platform – « More than Moore » applications

(Running CATRENE project)

One challenge is the multi substrates management

with SMART auto-tuning capability (robot) depending

on substrate detected

- Frame handling and metrology platform

Prototype 380 frame

with RFID tag

New 380 shipper New 380 FOUP

Solution – SMART Platform – « More than Moore » Application

(Running CATRENE project)

Innovative modules to improve the logistics of frames inside

and outside the Fab.

Solution – SMART Platform – « More Moore » application

(Running ECSEL JU project)

- European wafer handling platform

Demonstration of :

- Robotics superior cleanliness and throughput for 5nm implant

- Advanced software services

Predictive maintenance

SMART maintenance mode

Conclusion

Conclusion

• Automation equipment suppliers face new challenges with flexible manufacturing requirement

• RECIF issued its vision of the SMART platform concept in 2016

- Accomodate different substates size / material / shape with the platform

- Be compatible with key tool controlers

• Collaborative approach to speed-up learning cruve and demonstrate in positive ecosystem

• RECIF will deploy its SMART platform solution by 2018 to support industry

Visit us on www.reciftech.com

Thank you