SINGULUS TECHNOLOGIES · SINGULUS TECHNOLOGIES - Focus on CIGS & High Performance Solar Cells Crystalline Solar • High cell & module efficiency • Easy process • Advanced technology

SINGULUS TECHNOLOGIES

Eigenkapitalforum 2019 SINGULUS TECHNOLOGIES AG

SINGULUS TECHNOLOGIES AG EK-Forum 2019 - 2 -

Agenda

1 Overview

2

3

SINGULUS TECHNOLOGIES Segments

Financials

Solar Semiconductor Life Science


SINGULUS TECHNOLOGIES AG

Headquarter Kahl am Main

Production Facility Fürstenfeldbruck (Munich)


Taiwan Taipeih

China Shanghai

Worldwide Connected, Close to the Markets, Close to the Customer Base

Semiconductor: Over 180 systems installed

Energy: Over 6,000 MW production capacity

Optical Disc: Over 8,530 systems sold

Medical Technology: Market entry 2017 Over 5 systems sold

Consumer Goods: New POLYCOATER & DECOLINE II Over 10 systems sold

Headquarter Kahl am Main, Germany

Production Site Fürstenfeldbruck (Munich), Germany

France Sausheim

China Guangzhou

Asia Pacific Singapore

Legend: Headquarter Subsidiaries/Sales & Services Production Site Fürstenfeldbruck (Munich) Agents

SINGULUS TECHNOLOGIES Subsidiaries & Agents Worldwide

Latin America Sao Paulo

North America East & West Coast


Process Overview SINGULUS TECHNOLOGIES

Thin Film Deposition - Sputter deposition (DC, RF, MF, Bipolar, pulsed) - Evaporation (thermal evaporation) - CVD - PECVD (ICP, µ-Wave) - AACVD (aerosol assisted CVD) SURFACE ENGINEERING - Embossing, imprint nano lithography - Injection molding - Functionalization - Oxidation - Plasma cleaning & etching - Lacquering & bonding Thermal Processing - Rapid thermal processing - Conditioning - Annealing Wet Chemical - Cleaning/washing - Etching/polishing - Texturing - Conditioning - Chemical bath deposition - Developing

THIN FILM DEPOSITION

SURFACE ENGINEERING

THERMAL PROCESSING

WET CHEMICAL


Development and Market Introduction of New Systems

1996

Singular

Timaris I

Linea I

Semiconductor

PERC/PERT HJT TOPCon IBC

Thin-film CdTe CIGS

Solar

Life Science

TIMARIS III

CISARIS III

GENERIS PECVD Silex I

Skyline

Spaceline

Bluline I/Bluline II

Medical Technology Decorative Coating Optical Disc

2009 2010 2011 2012 2013 2015 2014 2016 2017 2018 2019 2020

GENERIS PVD

MEDLINE

Cisaris

Vistaris 900 Tenuis II Vitrum II

Helioscoater

Rotaris Timaris II

Vistaris1600 CIGS Pilot Line

Decoline II

Selenius

Silex II LINEX

Polycoater

Solare

Bluline III

WETBENCH Vacuum Deposition Wet Processing


SINGULUS TECHNOLOGIES – New Segment Structure

Solar • Crystalline Solar

_SILEX II _LINEX _GENERIS PVD _GENERIS PECVD

Solar

Life Science • 3D Coating POLYCOATER • 3D Production Line DECOLINE II • Medical Technology MEDLINE • Optical Coating BLULINE

Life Science

Semiconductor • Vacuum Deposition Systems

TIMARIS/ROTARIS • Wet Processing WETBENCH

Semi- conductor

• Thin film Solar _VITRUM _VISTARIS _HISTARIS _SELENIUS _CISARIS


Agenda

1 Overview

2

3


Financials



PV Learning Curve Further Decline in PV Selling Price

Source: VDMA/ITRPV Study No. 10, 2019


PV Heading in the Terrawatt Range

• Rapid introduction oft PV globally is fueled by availability of cost-competitive, distributed energy

• By 2018, about 500 GW have been installed

Source: Shell/Fraunhofer

54 TW

66 TW

22 TW

5 TW

Solar


PV Production Capacity Forecast Crystalline & Thin Film

106.468

130.547

152.360

175.013 186.733

0

20.000

40.000

60.000

80.000

100.000

120.000

140.000

160.000

180.000

200.000

2017 2018 2019 2020 2021

Annual in GW

Source: IHS 1/2019


PV Production Capacity Forecast Thin Film

3.189

4.246

4.950 5.670

6.757

0

5.000

10.000

15.000

20.000

25.000

2017 2018 2019 2020 2021

Annual in GW

Source: IHS 1/2019

CIGS


SINGULUS is Focusing on the Key Production Steps for PERC, Heterojunction & TOPCon

Key Production Steps • Wet Processing • PVD Sputtering • PECVD


Production Flow Heterojunction

SDR/Tex

PECVD

PVD

Print

GENERIS PVD SILEX II


SILEX II Wet Processing System for Heterojunction Solar Cells

Features • High throughput performance up to 8,000wph • High uptime up to 95 % • Low breakage rate down to 0.01 % • Individual, flexible process sequencing • Ozone-enhanced cleaning and etching processes • Short and stable IPA-free texturing process • Appropriate and effective rinsing and drying


GENERIS PVD Inline Sputtering System for Heterojunction and TOPCon Solar Cells

Features • For transparent conductive oxide layers • Parallel processing of several substrates • Low cost of ownership and high uptime • Top down and bottom up sputtering • Sputter sequence configurable • Rotatable cylindrical magnetrons • Highest utilization of target material • Single end and double end version


SINGULUS TECHNOLOGIES - Focus on CIGS & High Performance Solar Cells

Crystalline Solar • High cell & module efficiency

• Easy process

• Advanced technology

• Production split on different locations

CIGS Thin Film • Excellent stability

• Good low light performance

• Light soaking effect

• Reduced sensitivity to overheating

• Tolerance to shading & low intensity


SINGULUS TECHNOLOGIES Provides all Key Production Steps for a CIGS Fab

Si barrier layer & Mo Back Contact >Sputtering

Scribing P1 > Laser

CdS or. alt. buffer Deposition >Buffer Layer Deposition Interconnect and

Encapsulation >Lamination

Glass Washing > Wet cleaning

Scribing P2 >Mechanical >Laser

2

7 Scribing P3 >Mechanical > Laser

CIS/CIGS Substrate Inspection

Precursor > Sputtering

Front Contact > Sputtering

3

InS & iZnO > Evaporation, Sputtering Automation

5

1 6

6

Selenization/ Sulphurization > CISARIS Oven

4

Selen Evaporation > Thermal evaporation


CNBM Announced Steps of Investment

Each 300 MW Fab comprises the following Machines: 10 CISARIS 2 VISTARIS 2 SELENIUS

City of Bengbu, Province Anhui

City of Meishan, Province Sichuan

City of Qinhuangdao, Province Hebei

City Xuzhou, Province Jiangsu

1st step Order 300 MW

1st step Order 300 MW

1.5 GW 1.5 GW 1.5 GW

2nd step LOI 300 MW

1st step LOI 300 MW

1st step 300 MW

in discussion

1.5 GW

Existing LOI for 300 MW

CIIE 2019 Agreement for 150 MW signed

Existing LOI for 5 CISARIS


Signing Ceremony during the Chinese Trade Fair CIIE in Shanghai


Innovative Inline Sputtering Systems for CIGS Thin Film Solar and other Applications


Total Announcements for CIGS in China - SINGULUS is a Major Player in the CIGS Market

Investments for CIGS in China: + CNBM 4 Fabs:

Announcements from CNBM for investments for 6 GW CIGS-Solar

+ Hanergy 1.5 GW, further

projects of about 5 GW announced

+ Manz/Shanghai Electric 344 MW, new projects

expected

1.5 GW

1.5 GW

1.5 GW

1.5 GW

44 MW

300 MW

300 MW

300 MW

300 MW

600 MW


Agenda

1 Overview

2

3


Financials



ROTARIS Vacuum Deposition System for Advanced R & D and Pilot Production

Thin film deposition for MRAM & sensor technology for automotive • Rotating substrate deposition • 200 mm and 300 mm wafer • Up to 12 PVD cathodes, target Ø 100 mm • Co-sputtering & DC/RF sputtering • Base pressure < 10-8 Torr • Hot wafer deposition


Wet Processing System for Electronics

Advanced Applications • Manual Wet Process Stations

• Semi- and Fully Automated Wet Process

• Quartz Tube- and Parts-Cleaning

• Total Metal Free Working


Agenda

1 Overview

2

3


Financials



Production Systems for Medical Technology

Applications for Medical Technology • Washing and pre-cleaning

• Cleaning & Etching

• Ultra- or megasonic cleaning

• Surface conditioning & modification

• Vacuum Coating & Electrochemical etching


DECOLINE II 3-Dimensional Coating Further System Sold to Automotive Industry

Advanced Surface Coating • Brilliant layers on 3-dimensional parts &

individual design variety

• UV-curing for protection lacquer

• Inline spray coating & metallization

• Fully automated processing & high productivity and flexibility

• Low cost of ownership & environment-friendly


Decorative Coating with POLYCOATER Inline Sputtering System

Advanced Vacuum Coating Applications • Several systems sold

• Brilliant layers on 3-dimensional parts & individual design Inline metallization

• Fully automated processing & high productivity and flexibility

• Low cost of ownership & environment-friendly


Four BLULINE Sold for Data Storage


Agenda

1 Overview

2

3


Financials



Financial Overview 9 Months 2019

in million € 9 Months

2018 9 Months

2019

Revenues 91.0 61.5

Order Intake 74.6 33.9

Order Backlog (30.09.) 90.3 38.5

EBIT 4.0 0.3

EBITDA 5.7 3.3

Result before Tax 2.4 -1.3

Result for the Period 2.3 -1.9

Operating Cash Flow 13.9 -6.3


Profit & Loss Statement 9 Months 2019


2018 9 Months

2019 Gross Revenue 91.0 61.5

Net Revenue 89.8 60.5

Gross Profit (in % of Net Revenues)

27.0 (30.1 %)

19.0 (31.4 %)

OPEX (Total) -23.0 -18.7

- R & D - Sales & Customer Service - GM & A - Other Income/Expenses

-5.3 -10.4

-7.0 -0.3

-4.7 -7.6 -6.5 0.1

EBIT 4.0 0.3 Result for the Period 2.3 -1.9 EPS basic (in €) 0.26 -0.21


Cash Flow Development


2018 9 Months

2019

Cash Flow from Operating Activities 13.9 -6.3

Cash Flow from Investing Activities -3.3 -3.4

Cash Flow from Financing Activities -10.4 7.8 Total Cash Flow 0.2 -1.9

Cash and Cash Equivalents at the Beginning of the Period 27.2 13.5

Effect of Exchange Rate Changes 0.0 0.2

Cash and Cash Equivalents at the End of the Period 27.4 11.8


Balance Sheet

in million €

31.12.2018 30.09.2019 Cash and Cash Equivalents 13.5 11.8

Restricted Cash 14.3 7.9

Total Current Receivables and other Assets 35.5 25.2

Total Inventories 17.1 18.5

Total Non-Current Assets 23.7 29.9

Total Assets 104.1 93.3

Total Current Liabilities 50.2 37.6

Total Non-Current Liabilities 34.2 37.4

Total Equity 19.7 18.3

Equity and Liabilities 104.1 93.3


Employees

Dec. 2018 Sep. 2019 Δ

SINGULUS TECHNOLOGIES Group 343 358 +15

Domestic 293 303 +10

Abroad 50 55 +5


Sales Split by Segments

9M 2018 9M 2019

Semiconductor 5.4 %

Life Science 34.1 %

Solar 60.5 %

Life Science 20.5 %

Semiconductor 6.8 %

Solar 72.7 %


Sales Split by Region

9M 2018 9M 2019

Africa & Australia 0.3 %

Europe 22.1 %

Americas 17.4 %

Asia 60.2 %

Africa & Australia 0.8 %

Europe 23.1 %

Americas 8.5 %

Asia 67.6 %


Contact

SINGULUS TECHNOLOGIES AG Hanauer Landstrasse 103 D-63796 Kahl/Main Dr.-Ing. Stefan Rinck, President and CEO Tel: +49-6188-440-109 [email protected] Markus Ehret, CFO Tel: +49-6188-440-204 [email protected]

Maren Schuster, Head of Investor Relations Tel: +49-6188-440-612 [email protected] Bernhard Krause, Communications Worldwide Tel: +49-6181-9828020 [email protected]

Forward-Looking Statements

This presentation contains forward-looking statements based on current expectations, assumptions and forecasts of the executive board and on currently available information. Various known and unknown risks, unpredictable developments, changes in the economic and political environment and other presently not yet identifiable effects could result in the fact that the actual future results, financial situation or the outlook for the company differ from the estimates given here. We are not obligated to update the forward-looking statements made in this presentation unless there is a legal obligation.

Documents

SINGULUS TECHNOLOGIES · SINGULUS TECHNOLOGIES - Focus on CIGS & High Performance Solar Cells Crystalline Solar • High cell & module efficiency • Easy process • Advanced technology