17

Osaka Vacuum, Ltd.

Specifications

3

Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps Pumping System

Osaka Vacuum, Ltd.

STC70FR005 STC70FR013

95

283

346

338

269

198

355

TG70FRABInput Connector Input Connector

TC76ISO-R63

Diaphragm Pump

39

52.5 ISO-G1/8

Vent port

5 ［l/min］

95

283

346

338

373

269

198

161

TG70FRNB

TC76ISO-R63

Diaphragm PumpMain power switch

Main power switch

39

52

.5

〜145

Cooling fan

13 ［l/min］

ISO-G1/8Vent port

CF63ISO-R63 12

18A B C

144.5170D

φ114φ95

CF63ISO-R63 12

18A B C

144.5170D

50.576E

50.576E

115.5141

F

115.5141

Fφ114φ95

30°54φ102 68.5

54

Power/Control

ISO-G1/8

ISO-G1/8

φ102

70

103

(54)

109.5 10

0

4-M6 DP13 PCD92

(Purge Gas Inlet)

KF16

Purge Gas Inlet

Controller

Connector

Vent Port

□40

54

～92

30°54φ102 68.5

54

Power/Control

(54)

ISO-G1/8

ISO-G1/8

φ102

70

103

109.5 10

0 Fan

4-M6 DP13 PCD92

(Purge Gas Inlet)

KF16

Purge Gas Inlet

Controller

Connector

Vent Port

AB

C

DF

EF

AB

C

D F FE

Performance curve

[Pa･

L/s]

102

101

100

10-1

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[scc

m]

10-1

100

101

Thro

ughp

ut

[L/s

]

Volu

me

flow

rate

103

102

101

100

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

Sf = 25-100L/min Sf : Volume flow rate of backing pump

TG70F

Ar

H2

N2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

H2N2

N2

Sf > 25L/min Forced air cooling Sf > 25L/min Free convection air cooling Sf > 25L/min

Sf : Volume flow rate of backing pump

TG70F

1 18

Osaka Vacuum, Ltd.

T u r b oMolecularP u m p s

OSAKA VACUUM

Any orientationEasy operation

Compact size Light weight

Turbo Molecular Pumps

Characteristics ofCompound Molecular Pumps

Oil free pumpingEnergy-saving

Maintenance free Serial communicationRS232C Serial interface

Certificatedsafety standard NRTL SEMI-S2 CE

02-TG-E-10

Compound Molecular Pumps

Products Line-up

Series of Turbo Molecular Pumps

◎ Corrosive Resistant Type in 200～1300L/s.

◎ Standard Type & Corrosive Resistant Type in 　1800～5500L/s.

Compound Molecular Pumps（TG series）

◎ Standard Type & Corrosive Resistant Type in 300～3400L/s.

◎ Vibration Free with UFRC. (Unbalance Force Rejection Control )

◎ Model coupling free.

◎ Rotational speed control.　

◎ Thermal insulation structure is available. (Special version)　

Magnetically Levitated Compound Molecular Pumps（TG-M series）

Recommended O/H cycle 20,000～30,000 hrs

Motor cable

Fan cable

MC1/TC-**MC3/TC-**MC5/TC-**MC7/TC-**MC10/TC-**MC15/TC-**MC20/TC-**FC1/TC-FC3/TC-FC5/TC-FC7/TC-FC10/TC-FC15/TC-FC20/TC-

1m3m5m7m

10m15m20m1m3m5m7m

10m15m20m

length modelCable model（Standard length：※33m）

…TG50F / TG220F / TG350F / TG450F…TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F

**

※3 Please contact us about the cable which out of standard length.※4 Please contact us about TG70/240F.

S2AS2M2…TG50F / TG220F / TG350F / TG450F / TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F

S2M2

2

● Wide pressure range pumping● High throughput● Quick start up ● Durable design against air inrush and sudden pressure rise ● Long life

Compound Molecular Pumps (CMP) is Turbo Molecular Pumps (TMP) which combined turbine and helical grooves.CMP was first developed by Osaka Vacuum in the world.And now, this type becomes the most popular type of TMP.

Applications: • Manufacturing of semiconductor, FPD, electronic parts, and other • Analysis & examination device • Research and development, … etc.

e.g.) 1-1.2 min with TG220F

2017.04.PDF

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■High compression ratio■Built-in controller type■Certificated safety standard NRTL/SEMI-S2/CE ( for TG70F-20)

TG70FDrawing of Outside dimension

Air cooling

Natural air cooling

16

● More compact ST series has come out!

● Mounted with high compression turbo molecular pump　 TG70F!

● One of two kinds of backing pump (diaphragm pump)　 can be selected to match for exhausting chamber!

● Space saving design of A4 laptop size!

● Most suitable for use as easy operating and portable　 pumping units for R&D!

※1：A muffler is mounted on the exhaust port of the diaphragm (at the open-air side).

※1

Specifications

Drawing of outside dimension

Power supply modelISO-R63

G1/8

Diaphragm pump

70 L/s10-6 Pa order

Instruction manual:1 copy/Input cable(5m):1

STC70FR013

TG70FRNB

13L/min

19kgAC100V(-10%～+6%)

210VA

STC70FR005

TG70FRAB

4.2L/min

14kgAC100V(±10%)

200VA

ST-Compact

STC70FR005

STC70FR013

TG70F Pumping System

●The inlet flange bolt holes are symmetrical around the center line.

※This dimensional drawings correspond to TG70F (built-in controller type).In the case of TG70F-20, it is separated out its controller.

Built-in controller type

Standard set

●Ambient temperature for useThe ambient temperature range to assure reaching the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.

Pump + Connector for controller◆OptionAir-cooling fan unit, controller, Motor Cable(TG70F-20), Automatic slow leak valve, Purge gas inlet connector,Precision needle valve, Flanges and Fittings

●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.

※1：In case of the backing vacuum pump of 25L/min.※2：TC75 is a built-in controller,TC76 is rack controller.

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1

Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2

Input VoltageInput Power

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

ISO-R/CF L/sISO-R/CF L/sISO-R/CF L/s

ISO-R/CF PaISO-R/CF Torr

Free convection/Forced air cooling sccmmin

Pa（Torr）L/min

ISO-R/CF kg

ISO-R63、CF63KF16

70 / 7565 / 7040 / 451×108

1×105

＜ 5×10-7/＜ 1×10-7

＜ 3.8×10-9/＜ 7.5×10-10

10 / 202-2.5

1200（9）≧ 253 / 5

TG70F

TC75DC24V120W

TG70F-20

TC76AC100-230V（±10%）

160VA

Inlet FlangeOutlet FlangeTMP

Backing vacuum pump

Volume flow rate (N2)Ultimate pressureWeightVoltageInput PowerStandard accessories

TG220F※VAB1 2 3 4 5 6 7

※Please contact us for models other than the above.

※4

◎ For corrosive gas applications, please use the TG or TG-M series with the corrosive resistant type.

Compound Molecular Pumps

Osaka Head office　

JQA-QMA1902NABARI FACTORY

JQA-EMA5143

TG50F

TG70F

TG220F

TG240F

TG350F

TG450F

TG800F

TG1100F

TG1400F

TG2400F

TG2410F

ModelTypeTG50FCABTG50FRABTG50FVABTG50FCWBTG50FRWBTG50FVWBTG70FCNBTG70FCABTG70FRNBTG70FRABTG70FCNB-20TG70FCAB-20TG70FRNB-20TG70FRAB-20TG220FCABTG220FRABTG220FVABTG220FCWBTG220FRWBTG220FVWBTG240FCABTG240FRABTG240FCAB-20TG240FRAB-20TG350FCABTG350FRABTG350FVABTG350FCWBTG350FRWBTG350FVWBTG450FCABTG450FBABTG450FVABTG450FCWBTG450FBWBTG450FVWBTG800FCABTG800FBABTG800FVABTG800FCAB-60TG800FBAB-60TG800FVAB-60TG800FCWBTG800FBWBTG800FVWBTG1100FCABTG1100FBABTG1100FVABTG1100FCAB-60TG1100FBAB-60TG1100FVAB-60TG1100FCWBTG1100FBWBTG1100FVWBTG1400FCABTG1400FBABTG1400FVABTG1400FCWBTG1400FBWBTG1400FVWBTG2400FBABTG2400FVABTG2400FBWBTG2400FVWBTG2400FBWB-40TG2400FVWB-40TG2410FBABTG2410FVABTG2410FBWBTG2410FVWBTG2410FBWB-40TG2410FVWB-40

◎ Standard Type & Corrosive Resistant Type in 2200L/s, 3300L/s.◎ Integrated controller/power supply, very compact footprint. ◎ Wide pressure range applications, capable of pumping at high throughput. ◎ High compression ratio, low Base pressure.◎ Variable rotational speed control(110rps-450rps).

※1 Standard FlangeCF ： JVIS 003 Bakeable Flanges : Dimensions-Knife-edge sealed typeISO-B ： ISO1609:1986 Vacuum technology - Flange dimensions （Bolted type）ISO-R ： ISO1609:1986 Vacuum technology - Flange dimensions　　　　（Clamped or rotatable type）VG ： JISB2290 :1998 Vacuum technology-Flange :dimensions 　　　　（Vacuum flange with O-ring groove）KF ： ISO2861/1:1974 Vacuum technology - Quick-release couplings 　　　　- Dimensions - Part 1（Clamped type）

※2 Some models are not written

Model

Size

Bearingsystem

SpecialStructure

Inlet Flange※1

Coolingsystem

Specificationtype

Near Volume flow rate（N2）

FM

ILRUCBRVANWB※2

C

1

2

3

4

5

6

7

Notwritten( )

Notwritten( )

：Compound Molecular Pumps

：Ball bearing（oil lubrication）：Ball bearing（grease lubrication）：Magnetically levitated：Standard type：Corrosive resistant type：Reaction by-product prevention：Ultra low vibration type：Radiation hardened type：Ultra high vacuum type：CF：ISO-B：ISO-R：VG：Air cooling：Natural air cooling：Water cooling：Standard type：Corrosive resistant type

TGTGkine

Magnetically Levitated Compound Molecular Pumps with Integrated Control Unit（TG kine 2200M）

3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645

3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645

Korea/Seoul Office Shin Won Tech. Co., Ltd.

Taiwan/Cutes Corporation

China/Shanghai Osaka Vacuum, Ltd.

■ TMP service support center

UK/EBARA Precision Machinery Europe GmBH

France/Paris Liaison Office

U.S.A.

Korea

Tel：+82-32-814-6331 Fax：+82-32-814-7301

■Shin Won Tech. Co., Ltd.(maintenance)

Taiwan2-22 Nan Yuan Road, Chung Li City 32063 Taiwan, R.O.C.

Tel：+886-3-452-6161 Fax：+886-3-451-1347

■Cutes Corporation

ChinaSouth A,T52-4-1F,No.1510,Chuanqiao Rd.,Pudong,Shanghai 201206 P. R. China

Tel：+86-21-5031-1522 Fax：+86-21-5031-1523

Tel support Field support Maintenance Local stock

#12LT 36Bl Namdong Industry Area, Namdong-Ku, Inchon 450-100 Korea

■Shanghai Osaka Vacuum, Ltd.

48000 Fremont Blvd, Fremont, CA 94538 U.S.A.Tel：+1-510-770-0100 Fax：+1-510-770-0104

■Osaka Vacuum U.S.A., Inc.

Leaders Bldg., 274-4, Seohyun-Dong, Bundang-ku, Seongnam-Si, Gyeonggi-Do 463-824 KoreaTel：+82-31-707-0002 Fax：+82-31-707-3339

■Seoul office(sales)

51 Main Avenue, Sacramento, CA 95838 USATel：+1-916-920-5451 Fax：+1-916-830-1900

■Ebara Technologies Inc.

U.S.A./Osaka Vacuum U.S.A.,Inc. Ebara Technologies Inc.

Japan/Nabari FactoryTMP Service Group

JapanTel：+81-595-64-1162 Fax：+81-595-64-1163

■Nabari Factory TMP Service Group1300-81 Yabata, Nabari, Mie 518-0605, Japan

Europe2 Cochrane Square Brucefield Industrial Estate Livingston EH54 9DR, UK

Tel：+44(0)1506 460232 Fax：+44(0)1506 460222

■EBARA Precision Machinery Europe GmBH

17

Osaka Vacuum, Ltd.

Specifications

3

Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps Pumping System

Osaka Vacuum, Ltd.

STC70FR005 STC70FR013

95

283

346

338

269

198

355

TG70FRABInput Connector Input Connector

TC76ISO-R63

Diaphragm Pump

39

52.5 ISO-G1/8

Vent port

5 ［l/min］

95

283

346

338

373

269

198

161

TG70FRNB

TC76ISO-R63

Diaphragm PumpMain power switch

Main power switch

39

52

.5

〜145

Cooling fan

13 ［l/min］

ISO-G1/8Vent port

CF63ISO-R63 12

18A B C

144.5170D

φ114φ95

CF63ISO-R63 12

18A B C

144.5170D

50.576E

50.576E

115.5141

F

115.5141

Fφ114φ95

30°54φ102 68.5

54

Power/Control

ISO-G1/8

ISO-G1/8

φ102

70

103

(54)

109.5 10

0

4-M6 DP13 PCD92

(Purge Gas Inlet)

KF16

Purge Gas Inlet

Controller

Connector

Vent Port

□40

54

～92

30°54φ102 68.5

54

Power/Control

(54)

ISO-G1/8

ISO-G1/8

φ102

70

103

109.5 10

0 Fan

4-M6 DP13 PCD92

(Purge Gas Inlet)

KF16

Purge Gas Inlet

Controller

Connector

Vent Port

AB

C

DF

EF

AB

C

D F FE

Performance curve

[Pa･

L/s]

102

101

100

10-1

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[scc

m]

10-1

100

101

Thro

ughp

ut

[L/s

]

Volu

me

flow

rate

103

102

101

100

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

Sf = 25-100L/min Sf : Volume flow rate of backing pump

TG70F

Ar

H2

N2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

H2N2

N2

Sf > 25L/min Forced air cooling Sf > 25L/min Free convection air cooling Sf > 25L/min

Sf : Volume flow rate of backing pump

TG70F

1 18

Osaka Vacuum, Ltd.

T u r b oMolecularP u m p s

OSAKA VACUUM

Any orientationEasy operation

Compact size Light weight

Turbo Molecular Pumps

Characteristics ofCompound Molecular Pumps

Oil free pumpingEnergy-saving

Maintenance free Serial communicationRS232C Serial interface

Certificatedsafety standard NRTL SEMI-S2 CE

02-TG-E-10

Compound Molecular Pumps

Products Line-up

Series of Turbo Molecular Pumps

◎ Corrosive Resistant Type in 200～1300L/s.

◎ Standard Type & Corrosive Resistant Type in 　1800～5500L/s.

Compound Molecular Pumps（TG series）

◎ Standard Type & Corrosive Resistant Type in 300～3400L/s.

◎ Vibration Free with UFRC. (Unbalance Force Rejection Control )

◎ Model coupling free.

◎ Rotational speed control.　

◎ Thermal insulation structure is available. (Special version)　

Magnetically Levitated Compound Molecular Pumps（TG-M series）

Recommended O/H cycle 20,000～30,000 hrs

Motor cable

Fan cable

MC1/TC-**MC3/TC-**MC5/TC-**MC7/TC-**MC10/TC-**MC15/TC-**MC20/TC-**FC1/TC-FC3/TC-FC5/TC-FC7/TC-FC10/TC-FC15/TC-FC20/TC-

1m3m5m7m

10m15m20m1m3m5m7m

10m15m20m

length modelCable model（Standard length：※33m）

…TG50F / TG220F / TG350F / TG450F…TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F

**

※3 Please contact us about the cable which out of standard length.※4 Please contact us about TG70/240F.

S2AS2M2…TG50F / TG220F / TG350F / TG450F / TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F

S2M2

2

● Wide pressure range pumping● High throughput● Quick start up ● Durable design against air inrush and sudden pressure rise ● Long life

Compound Molecular Pumps (CMP) is Turbo Molecular Pumps (TMP) which combined turbine and helical grooves.CMP was first developed by Osaka Vacuum in the world.And now, this type becomes the most popular type of TMP.

Applications: • Manufacturing of semiconductor, FPD, electronic parts, and other • Analysis & examination device • Research and development, … etc.

e.g.) 1-1.2 min with TG220F

2017.04.PDF

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■High compression ratio■Built-in controller type■Certificated safety standard NRTL/SEMI-S2/CE ( for TG70F-20)

TG70FDrawing of Outside dimension

Air cooling

Natural air cooling

16

● More compact ST series has come out!

● Mounted with high compression turbo molecular pump　 TG70F!

● One of two kinds of backing pump (diaphragm pump)　 can be selected to match for exhausting chamber!

● Space saving design of A4 laptop size!

● Most suitable for use as easy operating and portable　 pumping units for R&D!

※1：A muffler is mounted on the exhaust port of the diaphragm (at the open-air side).

※1

Specifications

Drawing of outside dimension

Power supply modelISO-R63

G1/8

Diaphragm pump

70 L/s10-6 Pa order

Instruction manual:1 copy/Input cable(5m):1

STC70FR013

TG70FRNB

13L/min

19kgAC100V(-10%～+6%)

210VA

STC70FR005

TG70FRAB

4.2L/min

14kgAC100V(±10%)

200VA

ST-Compact

STC70FR005

STC70FR013

TG70F Pumping System

●The inlet flange bolt holes are symmetrical around the center line.

※This dimensional drawings correspond to TG70F (built-in controller type).In the case of TG70F-20, it is separated out its controller.

Built-in controller type

Standard set

●Ambient temperature for useThe ambient temperature range to assure reaching the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.

Pump + Connector for controller◆OptionAir-cooling fan unit, controller, Motor Cable(TG70F-20), Automatic slow leak valve, Purge gas inlet connector,Precision needle valve, Flanges and Fittings

●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.

※1：In case of the backing vacuum pump of 25L/min.※2：TC75 is a built-in controller,TC76 is rack controller.

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1

Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2

Input VoltageInput Power

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

ISO-R/CF L/sISO-R/CF L/sISO-R/CF L/s

ISO-R/CF PaISO-R/CF Torr

Free convection/Forced air cooling sccmmin

Pa（Torr）L/min

ISO-R/CF kg

ISO-R63、CF63KF16

70 / 7565 / 7040 / 451×108

1×105

＜ 5×10-7/＜ 1×10-7

＜ 3.8×10-9/＜ 7.5×10-10

10 / 202-2.5

1200（9）≧ 253 / 5

TG70F

TC75DC24V120W

TG70F-20

TC76AC100-230V（±10%）

160VA

Inlet FlangeOutlet FlangeTMP

Backing vacuum pump

Volume flow rate (N2)Ultimate pressureWeightVoltageInput PowerStandard accessories

TG220F※VAB1 2 3 4 5 6 7

※Please contact us for models other than the above.

※4

◎ For corrosive gas applications, please use the TG or TG-M series with the corrosive resistant type.

Compound Molecular Pumps

Osaka Head office　

JQA-QMA1902NABARI FACTORY

JQA-EMA5143

TG50F

TG70F

TG220F

TG240F

TG350F

TG450F

TG800F

TG1100F

TG1400F

TG2400F

TG2410F

ModelTypeTG50FCABTG50FRABTG50FVABTG50FCWBTG50FRWBTG50FVWBTG70FCNBTG70FCABTG70FRNBTG70FRABTG70FCNB-20TG70FCAB-20TG70FRNB-20TG70FRAB-20TG220FCABTG220FRABTG220FVABTG220FCWBTG220FRWBTG220FVWBTG240FCABTG240FRABTG240FCAB-20TG240FRAB-20TG350FCABTG350FRABTG350FVABTG350FCWBTG350FRWBTG350FVWBTG450FCABTG450FBABTG450FVABTG450FCWBTG450FBWBTG450FVWBTG800FCABTG800FBABTG800FVABTG800FCAB-60TG800FBAB-60TG800FVAB-60TG800FCWBTG800FBWBTG800FVWBTG1100FCABTG1100FBABTG1100FVABTG1100FCAB-60TG1100FBAB-60TG1100FVAB-60TG1100FCWBTG1100FBWBTG1100FVWBTG1400FCABTG1400FBABTG1400FVABTG1400FCWBTG1400FBWBTG1400FVWBTG2400FBABTG2400FVABTG2400FBWBTG2400FVWBTG2400FBWB-40TG2400FVWB-40TG2410FBABTG2410FVABTG2410FBWBTG2410FVWBTG2410FBWB-40TG2410FVWB-40

◎ Standard Type & Corrosive Resistant Type in 2200L/s, 3300L/s.◎ Integrated controller/power supply, very compact footprint. ◎ Wide pressure range applications, capable of pumping at high throughput. ◎ High compression ratio, low Base pressure.◎ Variable rotational speed control(110rps-450rps).

※1 Standard FlangeCF ： JVIS 003 Bakeable Flanges : Dimensions-Knife-edge sealed typeISO-B ： ISO1609:1986 Vacuum technology - Flange dimensions （Bolted type）ISO-R ： ISO1609:1986 Vacuum technology - Flange dimensions　　　　（Clamped or rotatable type）VG ： JISB2290 :1998 Vacuum technology-Flange :dimensions 　　　　（Vacuum flange with O-ring groove）KF ： ISO2861/1:1974 Vacuum technology - Quick-release couplings 　　　　- Dimensions - Part 1（Clamped type）

※2 Some models are not written

Model

Size

Bearingsystem

SpecialStructure

Inlet Flange※1

Coolingsystem

Specificationtype

Near Volume flow rate（N2）

FM

ILRUCBRVANWB※2

C

1

2

3

4

5

6

7

Notwritten( )

Notwritten( )

：Compound Molecular Pumps

：Ball bearing（oil lubrication）：Ball bearing（grease lubrication）：Magnetically levitated：Standard type：Corrosive resistant type：Reaction by-product prevention：Ultra low vibration type：Radiation hardened type：Ultra high vacuum type：CF：ISO-B：ISO-R：VG：Air cooling：Natural air cooling：Water cooling：Standard type：Corrosive resistant type

TGTGkine

Magnetically Levitated Compound Molecular Pumps with Integrated Control Unit（TG kine 2200M）

3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645

3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645

Korea/Seoul Office Shin Won Tech. Co., Ltd.

Taiwan/Cutes Corporation

China/Shanghai Osaka Vacuum, Ltd.

■ TMP service support center

UK/EBARA Precision Machinery Europe GmBH

France/Paris Liaison Office

U.S.A.

Korea

Tel：+82-32-814-6331 Fax：+82-32-814-7301

■Shin Won Tech. Co., Ltd.(maintenance)

Taiwan2-22 Nan Yuan Road, Chung Li City 32063 Taiwan, R.O.C.

Tel：+886-3-452-6161 Fax：+886-3-451-1347

■Cutes Corporation

ChinaSouth A,T52-4-1F,No.1510,Chuanqiao Rd.,Pudong,Shanghai 201206 P. R. China

Tel：+86-21-5031-1522 Fax：+86-21-5031-1523

Tel support Field support Maintenance Local stock

#12LT 36Bl Namdong Industry Area, Namdong-Ku, Inchon 450-100 Korea

■Shanghai Osaka Vacuum, Ltd.

48000 Fremont Blvd, Fremont, CA 94538 U.S.A.Tel：+1-510-770-0100 Fax：+1-510-770-0104

■Osaka Vacuum U.S.A., Inc.

Leaders Bldg., 274-4, Seohyun-Dong, Bundang-ku, Seongnam-Si, Gyeonggi-Do 463-824 KoreaTel：+82-31-707-0002 Fax：+82-31-707-3339

■Seoul office(sales)

51 Main Avenue, Sacramento, CA 95838 USATel：+1-916-920-5451 Fax：+1-916-830-1900

■Ebara Technologies Inc.

U.S.A./Osaka Vacuum U.S.A.,Inc. Ebara Technologies Inc.

Japan/Nabari FactoryTMP Service Group

JapanTel：+81-595-64-1162 Fax：+81-595-64-1163

■Nabari Factory TMP Service Group1300-81 Yabata, Nabari, Mie 518-0605, Japan

Europe2 Cochrane Square Brucefield Industrial Estate Livingston EH54 9DR, UK

Tel：+44(0)1506 460232 Fax：+44(0)1506 460222

■EBARA Precision Machinery Europe GmBH

17

Osaka Vacuum, Ltd.

Specifications

3

Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps Pumping System

Osaka Vacuum, Ltd.

STC70FR005 STC70FR013

95

283

346

338

269

198

355

TG70FRABInput Connector Input Connector

TC76ISO-R63

Diaphragm Pump

39

52.5 ISO-G1/8

Vent port

5 ［l/min］

95

283

346

338

373

269

198

161

TG70FRNB

TC76ISO-R63

Diaphragm PumpMain power switch

Main power switch

39

52

.5

〜145

Cooling fan

13 ［l/min］

ISO-G1/8Vent port

CF63ISO-R63 12

18A B C

144.5170D

φ114φ95

CF63ISO-R63 12

18A B C

144.5170D

50.576E

50.576E

115.5141

F

115.5141

Fφ114φ95

30°54φ102 68.5

54

Power/Control

ISO-G1/8

ISO-G1/8

φ102

70

103

(54)

109.5 10

0

4-M6 DP13 PCD92

(Purge Gas Inlet)

KF16

Purge Gas Inlet

Controller

Connector

Vent Port

□40

54

～92

30°54φ102 68.5

54

Power/Control

(54)

ISO-G1/8

ISO-G1/8

φ102

70

103

109.5 10

0 Fan

4-M6 DP13 PCD92

(Purge Gas Inlet)

KF16

Purge Gas Inlet

Controller

Connector

Vent Port

AB

C

DF

EF

AB

C

D F FE

Performance curve

[Pa･

L/s]

102

101

100

10-1

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[scc

m]

10-1

100

101

Thro

ughp

ut

[L/s

]

Volu

me

flow

rate

103

102

101

100

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

Sf = 25-100L/min Sf : Volume flow rate of backing pump

TG70F

Ar

H2

N2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

H2N2

N2

Sf > 25L/min Forced air cooling Sf > 25L/min Free convection air cooling Sf > 25L/min

Sf : Volume flow rate of backing pump

TG70F

1 18

Osaka Vacuum, Ltd.

T u r b oMolecularP u m p s

OSAKA VACUUM

Any orientationEasy operation

Compact size Light weight

Turbo Molecular Pumps

Characteristics ofCompound Molecular Pumps

Oil free pumpingEnergy-saving

Maintenance free Serial communicationRS232C Serial interface

Certificatedsafety standard NRTL SEMI-S2 CE

02-TG-E-10

Compound Molecular Pumps

Products Line-up

Series of Turbo Molecular Pumps

◎ Corrosive Resistant Type in 200～1300L/s.

◎ Standard Type & Corrosive Resistant Type in 　1800～5500L/s.

Compound Molecular Pumps（TG series）

◎ Standard Type & Corrosive Resistant Type in 300～3400L/s.

◎ Vibration Free with UFRC. (Unbalance Force Rejection Control )

◎ Model coupling free.

◎ Rotational speed control.　

◎ Thermal insulation structure is available. (Special version)　

Magnetically Levitated Compound Molecular Pumps（TG-M series）

Recommended O/H cycle 20,000～30,000 hrs

Motor cable

Fan cable

MC1/TC-**MC3/TC-**MC5/TC-**MC7/TC-**MC10/TC-**MC15/TC-**MC20/TC-**FC1/TC-FC3/TC-FC5/TC-FC7/TC-FC10/TC-FC15/TC-FC20/TC-

1m3m5m7m

10m15m20m1m3m5m7m

10m15m20m

length modelCable model（Standard length：※33m）

…TG50F / TG220F / TG350F / TG450F…TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F

**

※3 Please contact us about the cable which out of standard length.※4 Please contact us about TG70/240F.

S2AS2M2…TG50F / TG220F / TG350F / TG450F / TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F

S2M2

2

● Wide pressure range pumping● High throughput● Quick start up ● Durable design against air inrush and sudden pressure rise ● Long life

Compound Molecular Pumps (CMP) is Turbo Molecular Pumps (TMP) which combined turbine and helical grooves.CMP was first developed by Osaka Vacuum in the world.And now, this type becomes the most popular type of TMP.

Applications: • Manufacturing of semiconductor, FPD, electronic parts, and other • Analysis & examination device • Research and development, … etc.

e.g.) 1-1.2 min with TG220F

2017.04.PDF

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■High compression ratio■Built-in controller type■Certificated safety standard NRTL/SEMI-S2/CE ( for TG70F-20)

TG70FDrawing of Outside dimension

Air cooling

Natural air cooling

16

● More compact ST series has come out!

● Mounted with high compression turbo molecular pump　 TG70F!

● One of two kinds of backing pump (diaphragm pump)　 can be selected to match for exhausting chamber!

● Space saving design of A4 laptop size!

● Most suitable for use as easy operating and portable　 pumping units for R&D!

※1：A muffler is mounted on the exhaust port of the diaphragm (at the open-air side).

※1

Specifications

Drawing of outside dimension

Power supply modelISO-R63

G1/8

Diaphragm pump

70 L/s10-6 Pa order

Instruction manual:1 copy/Input cable(5m):1

STC70FR013

TG70FRNB

13L/min

19kgAC100V(-10%～+6%)

210VA

STC70FR005

TG70FRAB

4.2L/min

14kgAC100V(±10%)

200VA

ST-Compact

STC70FR005

STC70FR013

TG70F Pumping System

●The inlet flange bolt holes are symmetrical around the center line.

※This dimensional drawings correspond to TG70F (built-in controller type).In the case of TG70F-20, it is separated out its controller.

Built-in controller type

Standard set

●Ambient temperature for useThe ambient temperature range to assure reaching the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.

Pump + Connector for controller◆OptionAir-cooling fan unit, controller, Motor Cable(TG70F-20), Automatic slow leak valve, Purge gas inlet connector,Precision needle valve, Flanges and Fittings

●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.

※1：In case of the backing vacuum pump of 25L/min.※2：TC75 is a built-in controller,TC76 is rack controller.

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1

Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2

Input VoltageInput Power

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

ISO-R/CF L/sISO-R/CF L/sISO-R/CF L/s

ISO-R/CF PaISO-R/CF Torr

Free convection/Forced air cooling sccmmin

Pa（Torr）L/min

ISO-R/CF kg

ISO-R63、CF63KF16

70 / 7565 / 7040 / 451×108

1×105

＜ 5×10-7/＜ 1×10-7

＜ 3.8×10-9/＜ 7.5×10-10

10 / 202-2.5

1200（9）≧ 253 / 5

TG70F

TC75DC24V120W

TG70F-20

TC76AC100-230V（±10%）

160VA

Inlet FlangeOutlet FlangeTMP

Backing vacuum pump

Volume flow rate (N2)Ultimate pressureWeightVoltageInput PowerStandard accessories

TG220F※VAB1 2 3 4 5 6 7

※Please contact us for models other than the above.

※4

◎ For corrosive gas applications, please use the TG or TG-M series with the corrosive resistant type.

Compound Molecular Pumps

Osaka Head office　

JQA-QMA1902NABARI FACTORY

JQA-EMA5143

TG50F

TG70F

TG220F

TG240F

TG350F

TG450F

TG800F

TG1100F

TG1400F

TG2400F

TG2410F

ModelTypeTG50FCABTG50FRABTG50FVABTG50FCWBTG50FRWBTG50FVWBTG70FCNBTG70FCABTG70FRNBTG70FRABTG70FCNB-20TG70FCAB-20TG70FRNB-20TG70FRAB-20TG220FCABTG220FRABTG220FVABTG220FCWBTG220FRWBTG220FVWBTG240FCABTG240FRABTG240FCAB-20TG240FRAB-20TG350FCABTG350FRABTG350FVABTG350FCWBTG350FRWBTG350FVWBTG450FCABTG450FBABTG450FVABTG450FCWBTG450FBWBTG450FVWBTG800FCABTG800FBABTG800FVABTG800FCAB-60TG800FBAB-60TG800FVAB-60TG800FCWBTG800FBWBTG800FVWBTG1100FCABTG1100FBABTG1100FVABTG1100FCAB-60TG1100FBAB-60TG1100FVAB-60TG1100FCWBTG1100FBWBTG1100FVWBTG1400FCABTG1400FBABTG1400FVABTG1400FCWBTG1400FBWBTG1400FVWBTG2400FBABTG2400FVABTG2400FBWBTG2400FVWBTG2400FBWB-40TG2400FVWB-40TG2410FBABTG2410FVABTG2410FBWBTG2410FVWBTG2410FBWB-40TG2410FVWB-40

◎ Standard Type & Corrosive Resistant Type in 2200L/s, 3300L/s.◎ Integrated controller/power supply, very compact footprint. ◎ Wide pressure range applications, capable of pumping at high throughput. ◎ High compression ratio, low Base pressure.◎ Variable rotational speed control(110rps-450rps).

※1 Standard FlangeCF ： JVIS 003 Bakeable Flanges : Dimensions-Knife-edge sealed typeISO-B ： ISO1609:1986 Vacuum technology - Flange dimensions （Bolted type）ISO-R ： ISO1609:1986 Vacuum technology - Flange dimensions　　　　（Clamped or rotatable type）VG ： JISB2290 :1998 Vacuum technology-Flange :dimensions 　　　　（Vacuum flange with O-ring groove）KF ： ISO2861/1:1974 Vacuum technology - Quick-release couplings 　　　　- Dimensions - Part 1（Clamped type）

※2 Some models are not written

Model

Size

Bearingsystem

SpecialStructure

Inlet Flange※1

Coolingsystem

Specificationtype

Near Volume flow rate（N2）

FM

ILRUCBRVANWB※2

C

1

2

3

4

5

6

7

Notwritten( )

Notwritten( )

：Compound Molecular Pumps

：Ball bearing（oil lubrication）：Ball bearing（grease lubrication）：Magnetically levitated：Standard type：Corrosive resistant type：Reaction by-product prevention：Ultra low vibration type：Radiation hardened type：Ultra high vacuum type：CF：ISO-B：ISO-R：VG：Air cooling：Natural air cooling：Water cooling：Standard type：Corrosive resistant type

TGTGkine

Magnetically Levitated Compound Molecular Pumps with Integrated Control Unit（TG kine 2200M）

3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645

3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645

Korea/Seoul Office Shin Won Tech. Co., Ltd.

Taiwan/Cutes Corporation

China/Shanghai Osaka Vacuum, Ltd.

■ TMP service support center

UK/EBARA Precision Machinery Europe GmBH

France/Paris Liaison Office

U.S.A.

Korea

Tel：+82-32-814-6331 Fax：+82-32-814-7301

■Shin Won Tech. Co., Ltd.(maintenance)

Taiwan2-22 Nan Yuan Road, Chung Li City 32063 Taiwan, R.O.C.

Tel：+886-3-452-6161 Fax：+886-3-451-1347

■Cutes Corporation

ChinaSouth A,T52-4-1F,No.1510,Chuanqiao Rd.,Pudong,Shanghai 201206 P. R. China

Tel：+86-21-5031-1522 Fax：+86-21-5031-1523

Tel support Field support Maintenance Local stock

#12LT 36Bl Namdong Industry Area, Namdong-Ku, Inchon 450-100 Korea

■Shanghai Osaka Vacuum, Ltd.

48000 Fremont Blvd, Fremont, CA 94538 U.S.A.Tel：+1-510-770-0100 Fax：+1-510-770-0104

■Osaka Vacuum U.S.A., Inc.

Leaders Bldg., 274-4, Seohyun-Dong, Bundang-ku, Seongnam-Si, Gyeonggi-Do 463-824 KoreaTel：+82-31-707-0002 Fax：+82-31-707-3339

■Seoul office(sales)

51 Main Avenue, Sacramento, CA 95838 USATel：+1-916-920-5451 Fax：+1-916-830-1900

■Ebara Technologies Inc.

U.S.A./Osaka Vacuum U.S.A.,Inc. Ebara Technologies Inc.

Japan/Nabari FactoryTMP Service Group

JapanTel：+81-595-64-1162 Fax：+81-595-64-1163

■Nabari Factory TMP Service Group1300-81 Yabata, Nabari, Mie 518-0605, Japan

Europe2 Cochrane Square Brucefield Industrial Estate Livingston EH54 9DR, UK

Tel：+44(0)1506 460232 Fax：+44(0)1506 460222

■EBARA Precision Machinery Europe GmBH

17

Osaka Vacuum, Ltd.

Specifications

3

Osaka Vacuum, Ltd.Tu

rbo

Mol

ecul

ar P

umps Pum

ping System

Osaka Vacuum, Ltd.

STC70FR005 STC70FR013

95

28334

633

8

269

198

355

TG70FRABInput Connector Input Connector

TC76ISO-R63

Diaphragm Pump

39

52.5 ISO-G1/8

Vent port

5 ［l/min］

95

283

346

338

373

269

198

161

TG70FRNB

TC76ISO-R63

Diaphragm PumpMain power switch

Main power switch

39

52

.5

〜145

Cooling fan

13 ［l/min］

ISO-G1/8Vent port

CF63ISO-R63 12

18A B C

144.5170D

φ114φ95

CF63ISO-R63 12

18A B C

144.5170D

50.576E

50.576E

115.5141

F

115.5141

Fφ114φ95

30°54φ102 68.5

54

Power/Control

ISO-G1/8

ISO-G1/8

φ102

70

103

(54)

109.5 10

0

4-M6 DP13 PCD92

(Purge Gas Inlet)

KF16

Purge Gas Inlet

Controller

Connector

Vent Port

□40

54

～92

30°54φ102 68.5

54

Power/Control

(54)

ISO-G1/8

ISO-G1/8

φ102

70

103

109.5 10

0 Fan

4-M6 DP13 PCD92

(Purge Gas Inlet)

KF16

Purge Gas Inlet

Controller

Connector

Vent Port

AB

C

DF

EF

AB

C

D F FE

Performance curve

[Pa･

L/s]

102

101

100

10-1

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[scc

m]

10-1

100

101

Thro

ughp

ut

[L/s

]

Volu

me

flow

rate

103

102

101

100

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

Sf = 25-100L/min Sf : Volume flow rate of backing pump

TG70F

Ar

H2

N2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

H2N2

N2

Sf > 25L/min Forced air cooling Sf > 25L/min Free convection air cooling Sf > 25L/min

Sf : Volume flow rate of backing pump

TG70F

1 18

Osaka Vacuum, Ltd.

T u r b oMolecularP u m p s

OSAKA VACUUM

Any orientationEasy operation

Compact size Light weight

Turbo Molecular Pumps

Characteristics ofCompound Molecular Pumps

Oil free pumpingEnergy-saving

Maintenance free Serial communicationRS232C Serial interface

Certificatedsafety standard NRTL SEMI-S2 CE

02-TG-E-10

Compound Molecular Pumps

Products Line-up

Series of Turbo Molecular Pumps

◎ Corrosive Resistant Type in 200～1300L/s.

◎ Standard Type & Corrosive Resistant Type in 　1800～5500L/s.

Compound Molecular Pumps（TG series）

◎ Standard Type & Corrosive Resistant Type in 300～3400L/s.

◎ Vibration Free with UFRC. (Unbalance Force Rejection Control )

◎ Model coupling free.

◎ Rotational speed control.　

◎ Thermal insulation structure is available. (Special version)　

Magnetically Levitated Compound Molecular Pumps（TG-M series）

Recommended O/H cycle 20,000～30,000 hrs

Motor cable

Fan cable

MC1/TC-**MC3/TC-**MC5/TC-**MC7/TC-**MC10/TC-**MC15/TC-**MC20/TC-**FC1/TC-FC3/TC-FC5/TC-FC7/TC-FC10/TC-FC15/TC-FC20/TC-

1m3m5m7m

10m15m20m1m3m5m7m

10m15m20m

length modelCable model（Standard length：※33m）

…TG50F / TG220F / TG350F / TG450F…TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F

**

※3 Please contact us about the cable which out of standard length.※4 Please contact us about TG70/240F.

S2AS2M2…TG50F / TG220F / TG350F / TG450F / TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F

S2M2

2

● Wide pressure range pumping● High throughput● Quick start up ● Durable design against air inrush and sudden pressure rise ● Long life

Compound Molecular Pumps (CMP) is Turbo Molecular Pumps (TMP) which combined turbine and helical grooves.CMP was first developed by Osaka Vacuum in the world.And now, this type becomes the most popular type of TMP.

Applications: • Manufacturing of semiconductor, FPD, electronic parts, and other • Analysis & examination device • Research and development, … etc.

e.g.) 1-1.2 min with TG220F

2017.04.PDF

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■High compression ratio■Built-in controller type■Certificated safety standard NRTL/SEMI-S2/CE ( for TG70F-20)

TG70FDrawing of Outside dimension

Air cooling

Natural air cooling

16

● More compact ST series has come out!

● Mounted with high compression turbo molecular pump　 TG70F!

● One of two kinds of backing pump (diaphragm pump)　 can be selected to match for exhausting chamber!

● Space saving design of A4 laptop size!

● Most suitable for use as easy operating and portable　 pumping units for R&D!

※1：A muffler is mounted on the exhaust port of the diaphragm (at the open-air side).

※1

Specifications

Drawing of outside dimension

Power supply modelISO-R63

G1/8

Diaphragm pump

70 L/s10-6 Pa order

Instruction manual:1 copy/Input cable(5m):1

STC70FR013

TG70FRNB

13L/min

19kgAC100V(-10%～+6%)

210VA

STC70FR005

TG70FRAB

4.2L/min

14kgAC100V(±10%)

200VA

ST-Compact

STC70FR005

STC70FR013

TG70F Pumping System

●The inlet flange bolt holes are symmetrical around the center line.

※This dimensional drawings correspond to TG70F (built-in controller type).In the case of TG70F-20, it is separated out its controller.

Built-in controller type

Standard set

●Ambient temperature for useThe ambient temperature range to assure reaching the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.

Pump + Connector for controller◆OptionAir-cooling fan unit, controller, Motor Cable(TG70F-20), Automatic slow leak valve, Purge gas inlet connector,Precision needle valve, Flanges and Fittings

●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.

※1：In case of the backing vacuum pump of 25L/min.※2：TC75 is a built-in controller,TC76 is rack controller.

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1

Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2

Input VoltageInput Power

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

ISO-R/CF L/sISO-R/CF L/sISO-R/CF L/s

ISO-R/CF PaISO-R/CF Torr

Free convection/Forced air cooling sccmmin

Pa（Torr）L/min

ISO-R/CF kg

ISO-R63、CF63KF16

70 / 7565 / 7040 / 451×108

1×105

＜ 5×10-7/＜ 1×10-7

＜ 3.8×10-9/＜ 7.5×10-10

10 / 202-2.5

1200（9）≧ 253 / 5

TG70F

TC75DC24V120W

TG70F-20

TC76AC100-230V（±10%）

160VA

Inlet FlangeOutlet FlangeTMP

Backing vacuum pump

Volume flow rate (N2)Ultimate pressureWeightVoltageInput PowerStandard accessories

TG220F※VAB1 2 3 4 5 6 7

※Please contact us for models other than the above.

※4

◎ For corrosive gas applications, please use the TG or TG-M series with the corrosive resistant type.

Compound Molecular Pumps

Osaka Head office　

JQA-QMA1902NABARI FACTORY

JQA-EMA5143

TG50F

TG70F

TG220F

TG240F

TG350F

TG450F

TG800F

TG1100F

TG1400F

TG2400F

TG2410F

ModelTypeTG50FCABTG50FRABTG50FVABTG50FCWBTG50FRWBTG50FVWBTG70FCNBTG70FCABTG70FRNBTG70FRABTG70FCNB-20TG70FCAB-20TG70FRNB-20TG70FRAB-20TG220FCABTG220FRABTG220FVABTG220FCWBTG220FRWBTG220FVWBTG240FCABTG240FRABTG240FCAB-20TG240FRAB-20TG350FCABTG350FRABTG350FVABTG350FCWBTG350FRWBTG350FVWBTG450FCABTG450FBABTG450FVABTG450FCWBTG450FBWBTG450FVWBTG800FCABTG800FBABTG800FVABTG800FCAB-60TG800FBAB-60TG800FVAB-60TG800FCWBTG800FBWBTG800FVWBTG1100FCABTG1100FBABTG1100FVABTG1100FCAB-60TG1100FBAB-60TG1100FVAB-60TG1100FCWBTG1100FBWBTG1100FVWBTG1400FCABTG1400FBABTG1400FVABTG1400FCWBTG1400FBWBTG1400FVWBTG2400FBABTG2400FVABTG2400FBWBTG2400FVWBTG2400FBWB-40TG2400FVWB-40TG2410FBABTG2410FVABTG2410FBWBTG2410FVWBTG2410FBWB-40TG2410FVWB-40

◎ Standard Type & Corrosive Resistant Type in 2200L/s, 3300L/s.◎ Integrated controller/power supply, very compact footprint. ◎ Wide pressure range applications, capable of pumping at high throughput. ◎ High compression ratio, low Base pressure.◎ Variable rotational speed control(110rps-450rps).

※1 Standard FlangeCF ： JVIS 003 Bakeable Flanges : Dimensions-Knife-edge sealed typeISO-B ： ISO1609:1986 Vacuum technology - Flange dimensions （Bolted type）ISO-R ： ISO1609:1986 Vacuum technology - Flange dimensions　　　　（Clamped or rotatable type）VG ： JISB2290 :1998 Vacuum technology-Flange :dimensions 　　　　（Vacuum flange with O-ring groove）KF ： ISO2861/1:1974 Vacuum technology - Quick-release couplings 　　　　- Dimensions - Part 1（Clamped type）

※2 Some models are not written

Model

Size

Bearingsystem

SpecialStructure

Inlet Flange※1

Coolingsystem

Specificationtype

Near Volume flow rate（N2）

FM

ILRUCBRVANWB※2

C

1

2

3

4

5

6

7

Notwritten( )

Notwritten( )

：Compound Molecular Pumps

：Ball bearing（oil lubrication）：Ball bearing（grease lubrication）：Magnetically levitated：Standard type：Corrosive resistant type：Reaction by-product prevention：Ultra low vibration type：Radiation hardened type：Ultra high vacuum type：CF：ISO-B：ISO-R：VG：Air cooling：Natural air cooling：Water cooling：Standard type：Corrosive resistant type

TGTGkine

Magnetically Levitated Compound Molecular Pumps with Integrated Control Unit（TG kine 2200M）

3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645

3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645

Korea/Seoul Office Shin Won Tech. Co., Ltd.

Taiwan/Cutes Corporation

China/Shanghai Osaka Vacuum, Ltd.

■ TMP service support center

UK/EBARA Precision Machinery Europe GmBH

France/Paris Liaison Office

U.S.A.

Korea

Tel：+82-32-814-6331 Fax：+82-32-814-7301

■Shin Won Tech. Co., Ltd.(maintenance)

Taiwan2-22 Nan Yuan Road, Chung Li City 32063 Taiwan, R.O.C.

Tel：+886-3-452-6161 Fax：+886-3-451-1347

■Cutes Corporation

ChinaSouth A,T52-4-1F,No.1510,Chuanqiao Rd.,Pudong,Shanghai 201206 P. R. China

Tel：+86-21-5031-1522 Fax：+86-21-5031-1523

Tel support Field support Maintenance Local stock

#12LT 36Bl Namdong Industry Area, Namdong-Ku, Inchon 450-100 Korea

■Shanghai Osaka Vacuum, Ltd.

48000 Fremont Blvd, Fremont, CA 94538 U.S.A.Tel：+1-510-770-0100 Fax：+1-510-770-0104

■Osaka Vacuum U.S.A., Inc.

Leaders Bldg., 274-4, Seohyun-Dong, Bundang-ku, Seongnam-Si, Gyeonggi-Do 463-824 KoreaTel：+82-31-707-0002 Fax：+82-31-707-3339

■Seoul office(sales)

51 Main Avenue, Sacramento, CA 95838 USATel：+1-916-920-5451 Fax：+1-916-830-1900

■Ebara Technologies Inc.

U.S.A./Osaka Vacuum U.S.A.,Inc. Ebara Technologies Inc.

Japan/Nabari FactoryTMP Service Group

JapanTel：+81-595-64-1162 Fax：+81-595-64-1163

■Nabari Factory TMP Service Group1300-81 Yabata, Nabari, Mie 518-0605, Japan

Europe2 Cochrane Square Brucefield Industrial Estate Livingston EH54 9DR, UK

Tel：+44(0)1506 460232 Fax：+44(0)1506 460222

■EBARA Precision Machinery Europe GmBH

Compound Molecular Pumps

Specifications

Standard set

5

Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

7

Compound Molecular Pumps Compound Molecular Pumps

Compound Molecular Pumps Compound Molecular Pumps Compound Molecular Pumps

1213 6

Compound Molecular Pumps

Compound Molecular Pumps

9 1011 8

Osaka Vacuum, Ltd.

Turb

o Co

ntro

ller Turbo M

olecular Pumps

Compound Molecular Pumps

4

Osaka Vacuum, Ltd.Turbo M

olecular Pumps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd.

Compound Molecular Pumps

Osaka Vacuum, Ltd.

Water cooling

Air cooling

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-B200KF4014001300750

1×108

4.3×103

＜ 1×10-6（＜ 7.5×10-9）450

5.5-715-18

330（2.5）≧ 250

TC1103

VG200 CF200

29 30

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

VG250、ISO-B250KF40240023001100

1×108

1.4×103

＜ 1×10-6（＜ 7.5×10-9）

5-715-18

200（1.5）≧ 50045 / 47

900

TC2403

1500

TC2403-10

TG2400F TG2400F-40inletoutletN2

N2 (with protective screen)H2

N2

H2

N2

空冷 / 水冷

Inlet pressure

Performance curve

100

101

102

103

[Pa･

L/s]

N2

H2

TG240F

Inlet pressure[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

10-110-1

100

101

102

[scc

m]

Thro

ughp

ut

Gas throughputVolume flow rate

[L/s

]

103

102

101

100

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

Sf＞ 80L/min Sf : Volume flow rate of backing pump

TG240F

Inlet pressure

TG240F

ArN2

H2

Volu

me

flow

rate

Sf ＞ 80L/min Sf : Volume flow rate of backing pump

[Torr]

[Pa]10-1 100 101 102

10-3 10-2 10-1

[Pa･

L/s]

104

103

102

101

TG2410F N2 Standard

High gas throughput

Ultra high gas throughput

StandardHigh gas throughputUltra high gas throughput

*Backing vacuum pump speed:2,000L/min

StandardHigh gas throughput

[Pa･

L/s]

Volu

me

flow

rate

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG2410F N2

StandardHigh gas throughputUltra high gas throughput

*Backing vacuum pump speed:2,000L/min

Ultra high gas throughput

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[scc

m]

101

102

103

Thro

ughp

ut

Performance curve

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[L/s

]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 160L/min Sf : Volume flow rate of backing pump

TG220F

Ar

N2H2

Volu

me

flow

rate [P

a･L/

s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 160L/min Sf : Volume flow rate of backing pump

TG220FN2

Ar[scc

m]

100

101

102

Thro

ughp

ut

Performance curve

Performance curve

Ar

H2

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 500L/min Sf : Volume flow rate of backing pump

TG1400F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Ar

N2

Sf = 500L/min Sf : Volume flow rate of backing pump

TG1400F

N2

Performance curve

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

100

101

102

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 160L/min Sf : Volume flow rate of backing pump

TG450F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2H2

TG450F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Ar

N2

Sf = 160L/min Sf : Volume flow rate of backing pump

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG50F

[L/s

]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 50-100L/min Sf : Volume flow rate of backing pump

TG50F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Sf = 50-100L/min Sf : Volume flow rate of backing pump

Ar

N2

Volu

me

flow

rate

Ar

N2H2

[scc

m]

100

101

102

Thro

ughp

ut

Performance curve

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

104

103

102

101

100

[L/s

]

TG350F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Sf = 160L/min Sf : Volume flow rate of backing pump

N2 Ar

TG350F

Ar

N2

H2

Volu

me

flow

rate

Sf = 160L/min Sf : Volume flow rate of backing pump

[scc

m]

100

101

102

Thro

ughp

utPerformance curve Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 1000L/min Sf : Volume flow rate of backing pump

TG2400F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

ArN2

H2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Ar

Ar

N2

N2

TG2400F

Sf = 1000L/min Sf = 1000L/min

TG2400F TG2400F-40

Sf:Volume flow rate of backing pump

Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

TG800F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2

Ar

N2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

TG800F

Ar

Ar

N2

N2

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Ar N2

N2

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

TG1100F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2

Ar

N2

TG1100F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

TG50F

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Drawing of Outside dimension

AB

C

D

CF63ISO-R63

VG65 14

1218

A B C147

168182

Dφ145φ114φ95

CF63ISO-R63

VG65 14

1218

A B C147

168182

Dφ145φ114φ95

Water cooling

Air cooling

φ113

69.5

47.5

54

62

70

34.5

ISO-Rc1/8

22.5

15

Connector

4-M6 DP13 PCD78

KF16

32

φ11

3

Cooling water Inlet/Outlet

※1：In case of the backing vacuum pump of 100L/min.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush ※Air inrush test (continual 400 times)

■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

TG220F TG350F

TG450F TG800F TG1100FTG1400F

TG2400F

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard setPump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for gas inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL/SEMI-S2/CE

CF160ISO-B160

VG150 12

1222

A B C312.5

312.5327.5

Dφ235φ203φ225

CF160ISO-B160

VG150 12

1222

A B C312.5

312.5327.5

Dφ235φ203φ225

AB

C

D

136

PCD140

φ250

145

80

φ165

ISO-Rc1/4

68

KF40

4-M16 DP25

Connector Cooling water Inlet/Outlet

Vent portPurge gasInlet ISO-G1/4

ISO-G1/4

φ20

0

47.5

AB

C

D

CF100ISO-R100

VG100 15

1221

A B C200

200220

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C200

200220

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C230

214230

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C230

214230

Dφ185φ152φ130

AB

CF200ISO-B200

VG200 16

1625

A B C281

281306

Dφ300φ253φ285

CF200ISO-B200

VG200 16

1625

A B C281

281306

D

AB

C

D

φ300φ253φ285

□120

47.5

C

D

47.5

Air cooling fan

φ250

136

145

PCD140

~167

φ165

φ200

4-M16 DP25

Connector

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4

KF40

CF200ISO-B200

VG200 16

1625

A B C272

300319

Dφ300φ253φ285

CF200ISO-B200

VG200 16

1625

A B C272

300319

D

B

C

D

φ300φ253φ285

AB

AB

TG2400F-40

136

PCD140~167

145□120

φ250

φ165

φ2004-M16 DP25

Connector

KF40

Vent portPurge gas

Air cooling fanInlet ISO-G1/4

ISO-G1/4

47.5

47.5

φ310

186

φ28

6

181

□12

0

35ﾟ

PCD255202

95.5

47.5

6-M16 DP25

KF40

ConnectorAir cooling fan

Purge gasInlet ISO-G1/4

ISO-G1/4 Connector

φ310

186

181

47.5

95.5

35ﾟ

PCD255

54

200 6-M16 DP25

KF40

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4Cooling water Inlet/Outlet Connector

ISO-Rc1/4

CF160ISO-B160

VG150 16

1622

190

190190

A B Cφ235φ203φ225

D

CF160ISO-B160

VG150 16

1622

190

190190

A B Cφ235φ203φ225

D

47.5

φ250

136

145PCD140

68

47.5

ISO-Rc1/4

80φ165

KF40

Connector

4-M16 DP25

Cooling water Inlet/Outlet

Vent portPurge gasInlet ISO-G1/4

ISO-G1/4

φ200

47.5

AB

C

D

136

145

～16

7

φ165

47.5

PCD140

φ200

φ280φ245.5 KF40

4-M16 DP25

ConnectorVent port

Purge gas

Air cooling fan

Inlet ISO-G1/4

ISO-G1/4

□120

47.5

136

145

φ165

PCD140

φ200

φ280

80 ISO-Rc1/4

68

47.5

φ245.5KF40

4-M16 DP25

Connector

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4Cooling water Inlet/Outlet

A

47.5

C

D

φ28

6

ISO-B250VG250

A Bφ350φ335

1616

340340

C D

ISO-B250VG250

A Bφ350φ335

1616

340340

C D

C

D

250

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Specifications

Drawing of Outside dimensionPerformance curveDrawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

※1：In case of the backing vacuum pump of 160L/min. ※1：In case of the backing vacuum pump of 500L/min. ※2：Depends on the power supply model. (standard：TC1104)※3：△◇ cf. p17

※1：In case of the backing vacuum pump of 500L/min.

※1：In case of the backing vacuum pump of 1000L/min. ※2：Depends on the power supply model.

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

※1：In case of the backing vacuum pump of 500L/min. ※2：Depends on the power supply model. (standard：TC1104)※3：△◇ cf. p17

■Any orientation ■Compact size■Energy-saving■Quick shut down with gas vent■Durable structure for air inrush■Built-in controller type■High compression ratio

TG240FDrawing of Outside dimension

Built-in controller type

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.

Pump + Connector for controller◆OptionAir-cooling fan unit, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve,Flanges and Fittings

●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.

15

Pum

ping

Sys

tem

※1：In case of the backing vacuum pump of 80L/min. ※2：TC245 is a built-in controller,TC246 is rack controller.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

Power/Control

100

70

138

45ﾟISO-G1/8

ISO-G1/8

50.5

124

φ154

115

Vent Port

Purge Port

33

94

□60

34

194.

216

6.2

73.5

ConnectorController

φ1544×M8 DP12 PCD140

KF25

ISO-R100

Power/Control

100

21

70

138

45ﾟISO-G1/8

ISO-G1/8

50.5

124

φ152

φ154

115

Vent Port

Purge Port

33

94

□60

34

233.

716

6.2

113Connector

Controller

φ1544×M8 DP12 PCD140

KF25

CF100

CF flange

ISO-R flange

14

Pumping System

Osaka Vacuum, Ltd.

● The TMP pumping system where a number of pieces　 of equipment※1 necessary for high vacuum are　 compactly arranged. It can pump up to high vacuum　 with a simple operation!

● Since it has casters, it can be easily moved to the　 desired place for use.

● Mounted with a turbo molecular pump from the TG-F　 series which is resistant to disturbance! 　 (The pump can be moved while it is operating.)

◆ Line-up of basic sets (three models) in which a turbo　 molecular pump with pumping speed of 50 to 350 L/s is　 mounted.

※1: Turbo molecular pump, backing pump, vacuum piping,　 automatic slow leak valve, control unit(Optional devices and apparatuses are available to match your needs.)

※2：Figures in parentheses show the pumping speed of pumps with a screen.

ModelTMP

Inlet Flange

Backing pump

ST

CRV

：TMP pumping system

：CF：ISO-R：VG

ST220FV0501

12

3

4

2 3 4

Standard Specifications

TMPVolume flow rate N2（L/s）Base pressureInlet FlangeCooling typeVoltage

Model ST050FTG50F　51(49)※2

＜3×10-6Pa（＜2.3×10-8Torr）VG65 / ISO-R63 / CF63

TG220F　220(210)※2

Air CoolingSingle-phase、AC100V

TG350F　350(330)※2

ST220F ST350F

＜1×10-6Pa（＜7.5×10-9Torr）VG100 / ISO-R100 / CF100

ST Series

ST Series

◆ Most compact type among the ST Series! Further　 space saving is achieved with its desktop size!ST-Compact

Introduction of the TMP pumping system

AB

C

D

φ113

95 69.5

34.5

□92

47.5

Connector

Air cooling fan

4-M6 DP13 PCD78

KF16

32

φ11

3

VG65 CF63

64.2

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-R63KF16

514912

1.4×107

5×102

＜ 3×10-6（＜ 2.3×10-8）80

1-1.51-1.5

1330（10）≧ 50

TC64

AB

C

D

33ﾟ

76 57

ISO-G1/4

Inlet ISO-G1/4

φ130

Connector

Vent port

Purge gas

4-M8 DP12 PCD78

φ130

42.5

54.5

KF25

Air cooling fan

105

□92

AB

C

Dφ130

Inlet ISO-G1/4

5776

33ﾟ

60

Connector

4-M8 DP12 PCD78Cooling water Inlet/Outlet ISO-Rc1/8

Vent portISO-G1/4

Purge gas

φ130

42.5

54.5

KF25

AB

C

D

33ﾟ

φ168

76 57ISO-G1/4

Inlet ISO-G1/4

42.5

54.5Connector

Vent port

Purge gas

4-M8 DP12 PCD78

φ130

KF25

Air cooling fan

105

□92

AB

C

Dφ168

76 57

33ﾟ

ISO-G1/4

Inlet ISO-G1/4

ISO-Rc1/8

60

42.5

54.5

Connector

Vent port

Purge gas

4-M8 DP12 PCD78 φ130

Cooling water Inlet/Outlet

KF25

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-R100KF25

2101×108

2×103

＜ 1×10-6（＜ 7.5×10-9）500

2-2.55-6.5

260（2）≧ 80

TC353

VG100

350330

6

CF100

9

330310

※1：In case of the backing vacuum pump of 160L/min

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

AB

C

D

33ﾟ

φ168

76

□92

57ISO-G1/4

Inlet ISO-G1/4

KF25

42.5

54.5

Connector Vent port

Purge gas

4-M8 DP12 PCD78

φ130

Air cooling fan

76 57

33ﾟ

ISO-G1/4

Inlet ISO-G1/4

ISO-Rc1/8

60

φ168

ConnectorVent port

Purge gas

4-M8 DP12 PCD78 φ130

Cooling water Inlet/Outlet

KF25

42.5

54.5

AB

C

D

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-B160KF25450430240

1×108

2×103

＜ 1×10-6（＜ 7.5×10-9）500

2-2.55-6.5

260（2）≧ 80

TC353

VG150 CF160Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

7 10

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup time※2

Shutdown time※2

Max. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

VG,ISO-B/CF kg

VG150、ISO-B160、CF160KF40820750650

1×108

1×104

330（2.5）≧ 250

3307-9

27-32

TC1104

8605.5-712-15

TC1103

TG800F TG800F

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup time※2

Shutdown time※2

Max. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

VG,ISO-B/CF kg

VG200、ISO-B200、CF200KF4011001000720

1×108

1×104

330（2.5）≧ 25028/27

3307-9

27-32

TC1104

8605.5-712-15

TC1103

TG1100F TG1100FInletOutletN2

N2 (with protective screen)H2

N2

H2

N2

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

＜ 1×10-6（＜ 7.5×10-9）

△A◇-60△W◇

＜ 1×10-6（＜ 7.5×10-9）

△A◇-60△W◇

27/26

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

VG250、ISO-B250KF40240023001100

1×108

1.4×103

＜ 1×10-6（＜ 7.5×10-9）

5-715-18

200（1.5）≧ 50045 / 47

900

TC2403

1500

TC2403-10

TG2400F TG2400F-40InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Air / Water

※1 cf. P17※2 Input connecter:1/Remote connector:1/Instruction manual:1copy

TC64 / TC223 / TC353 / TC1104（Panel cut：128H×104W）

TC1103 / TC2403 / TC2403-10 / TC2413 / TC2414 / TC2415（Panel cut：124H×203W）

TC76 / TC246（Panel cut：128H×103.5W）

Power Supply

209

157.526

139

149

5

400

20

4-φ5

2.3

START

F2F1 F3

OSAKA VACUUM,LTD.

STOP/RESET

POWER SUPPLY

150Space for cable

connections

100

20

POWER SUPPLY

OSAKA VACUUM,LTD.

START

F2F1 F3

STOP/RESET

149

513

9

104.5 250

1.62-φ5Space for cable

connections

■Any orientation ■Compact size■Energy saveing ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■High gas throughput

TG2410F

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

ISO-B250VG250 16

16

A B C363363

Dφ350φ335

TG2410F

TG2410F-40

Drawing of Outside dimension

●The inlet flange bolt holes are symmetrical around the center line.

※1：Depends on the power supply model. Please contact us about the Air cooling type.※2：In case of the backing pump of 2000L/min.

ISO-B250VG250 16

16

A B C363363

Dφ350φ335

※This dimensional drawings corresrond to 　TG240F(built-in controller type). 　In the case of TG240F-20, its controller is separated out.

Specifications

※1：In case of the backing vacuum pump of 160L/min.

※Please contact us about the Air cooling type.

100-110/200-230(±10%)

2.7

750

220

800

TC64 TC223 TC353

Input connector: 1 / Remote connector: 1 / Serial communication connector: 1 / Instruction manual: 1 copy / Serial communication instruction manual: 1 copy ※2

TC1104 TC1103 TC2403 / TC2403-10 TC76TC2413 TC2414 TC2415 TC246

50/60

Single

560 520

8.2 2.4

200-230(±10%) 100-230(±10%)

590 610 1200 1400 1200

450

160

1500

120

800

810

Power supply model

Input Voltage

Input Frequency

Input Phases

Input Power

Rated Output Frequency

Weight

Standard accessories

Applicable pump models

（ACV）

（Hz）

（VA）

（Hz）

（kg）

TG50F TG220F TG70F-20TG2410F TG2410F-40 TG240F-20TG2400FTG2400F-40

TG350FTG450F

TG800FTG1100F

TG1400FTG800FTG1100F

△A◇-60△W◇△A◇-60△W◇

※1

Applicable pump models

※Standard backing pump is a Rotary vacuum pump of 50/60L/min. (50/60Hz)

85.5

ISO-R100KF25220210100

1×108

4×102

＜ 1×10-6（＜ 7.5×10-9）400

1-1.22.5-3.5

260（2）≧ 80

TC223

VG100 CF100

T7.3TC245DC24V

75W

T10.5TC246

AC100-230V （±10%）120VA

OSAKA VACUUM,LTD.

POWER

ACCELERATION

NORMAL

FAILURE

START STOP/RESETREMOTE

LOCAL

TURBO CONTROLLER

104.5

149

139

20

250

2×φ5

100Space for cable

connections

Specifications

L/sL/sL/s

ISO-R/CF PaISO-R/CF Torr

sccmmin

Pa（Torr）L/min

kg

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1

Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2

Input VoltageInput Power

TG240F

7.3TC245DC24V

75W

TG240F-20

10.5TC246

AC100-230V （±10%）120VA

ISO-R100/CF100KF25240230160

1×108

4×104

＜ 1×10-6 / ＜ 5×10-7

＜ 7.5×10-9 / ＜ 3.8×10-9

705.5-7.5

700（5.3）≧ 80

Specifications

High gasthroughput

TC2414VG250/ISO-B250

KF40

＜5×10-7

＜3.8×10-9

25005-7

≧ 1000

220020001700

1×108

9000

350(2.6)

TG2410F

normal

TC2413

1800

51

TG2410F-40

52

Ultra high gasthroughput

TC2415

200018001250

9×107

2000

3500

270(2.0)

L/sL/sL/s

PaTorr

sccmmin

Pa（Torr）L/min

kg

N2

N2 (with protective screen)H2

N2

H2

N2

InletOutlet

Model※1

Power Supply

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1※2

Startup timeMax.backing vacuum pumpRecommended backing vacuum pumpWeight

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

Compound Molecular Pumps

Specifications

Standard set

5

Osaka Vacuum, Ltd.Tu

rbo

Mol

ecul

ar P

umps

7

Compound Molecular Pumps Compound Molecular Pumps

Compound Molecular Pumps Compound Molecular Pumps Compound Molecular Pumps

1213 6

Compound Molecular Pumps

Compound Molecular Pumps

9 1011 8

Osaka Vacuum, Ltd.

Turb

o Co

ntro

ller Turbo M

olecular Pumps

Compound Molecular Pumps

4

Osaka Vacuum, Ltd.

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd.

Compound Molecular Pumps

Osaka Vacuum, Ltd.

Water cooling

Air cooling

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-B200KF4014001300750

1×108

4.3×103

＜ 1×10-6（＜ 7.5×10-9）450

5.5-715-18

330（2.5）≧ 250

TC1103

VG200 CF200

29 30

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

VG250、ISO-B250KF40240023001100

1×108

1.4×103

＜ 1×10-6（＜ 7.5×10-9）

5-715-18

200（1.5）≧ 50045 / 47

900

TC2403

1500

TC2403-10

TG2400F TG2400F-40inletoutletN2

N2 (with protective screen)H2

N2

H2

N2

空冷 / 水冷

Inlet pressure

Performance curve

100

101

102

103

[Pa･

L/s]

N2

H2

TG240F

Inlet pressure[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

10-110-1

100

101

102

[scc

m]

Thro

ughp

ut

Gas throughputVolume flow rate

[L/s

]

103

102

101

100

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

Sf＞ 80L/min Sf : Volume flow rate of backing pump

TG240F

Inlet pressure

TG240F

ArN2

H2

Volu

me

flow

rate

Sf ＞ 80L/min Sf : Volume flow rate of backing pump

[Torr]

[Pa]10-1 100 101 102

10-3 10-2 10-1

[Pa･

L/s]

104

103

102

101

TG2410F N2 Standard

High gas throughput

Ultra high gas throughput

StandardHigh gas throughputUltra high gas throughput

*Backing vacuum pump speed:2,000L/min

StandardHigh gas throughput

[Pa･

L/s]

Volu

me

flow

rate

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG2410F N2

StandardHigh gas throughputUltra high gas throughput

*Backing vacuum pump speed:2,000L/min

Ultra high gas throughput

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[scc

m]

101

102

103

Thro

ughp

ut

Performance curve

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[L/s

]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 160L/min Sf : Volume flow rate of backing pump

TG220F

Ar

N2H2

Volu

me

flow

rate [P

a･L/

s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 160L/min Sf : Volume flow rate of backing pump

TG220FN2

Ar[scc

m]

100

101

102

Thro

ughp

ut

Performance curve

Performance curve

Ar

H2

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 500L/min Sf : Volume flow rate of backing pump

TG1400F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Ar

N2

Sf = 500L/min Sf : Volume flow rate of backing pump

TG1400F

N2

Performance curve

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

100

101

102

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 160L/min Sf : Volume flow rate of backing pump

TG450F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2H2

TG450F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Ar

N2

Sf = 160L/min Sf : Volume flow rate of backing pump

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG50F

[L/s

]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 50-100L/min Sf : Volume flow rate of backing pump

TG50F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Sf = 50-100L/min Sf : Volume flow rate of backing pump

Ar

N2

Volu

me

flow

rate

Ar

N2H2

[scc

m]

100

101

102

Thro

ughp

ut

Performance curve

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

104

103

102

101

100

[L/s

]

TG350F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Sf = 160L/min Sf : Volume flow rate of backing pump

N2 Ar

TG350F

Ar

N2

H2

Volu

me

flow

rate

Sf = 160L/min Sf : Volume flow rate of backing pump

[scc

m]

100

101

102

Thro

ughp

ut

Performance curve Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 1000L/min Sf : Volume flow rate of backing pump

TG2400F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

ArN2

H2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Ar

Ar

N2

N2

TG2400F

Sf = 1000L/min Sf = 1000L/min

TG2400F TG2400F-40

Sf:Volume flow rate of backing pump

Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

TG800F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2

Ar

N2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

TG800F

Ar

Ar

N2

N2

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Ar N2

N2

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

TG1100F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2

Ar

N2

TG1100F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

TG50F

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Drawing of Outside dimension

AB

C

D

CF63ISO-R63

VG65 14

1218

A B C147

168182

Dφ145φ114φ95

CF63ISO-R63

VG65 14

1218

A B C147

168182

Dφ145φ114φ95

Water cooling

Air cooling

φ113

69.5

47.5

54

62

70

34.5

ISO-Rc1/8

22.5

15

Connector

4-M6 DP13 PCD78

KF16

32

φ11

3

Cooling water Inlet/Outlet

※1：In case of the backing vacuum pump of 100L/min.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush ※Air inrush test (continual 400 times)

■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

TG220F TG350F

TG450F TG800F TG1100FTG1400F

TG2400F

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard setPump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for gas inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL/SEMI-S2/CE

CF160ISO-B160

VG150 12

1222

A B C312.5

312.5327.5

Dφ235φ203φ225

CF160ISO-B160

VG150 12

1222

A B C312.5

312.5327.5

Dφ235φ203φ225

AB

C

D

136

PCD140

φ250

145

80

φ165

ISO-Rc1/4

68

KF40

4-M16 DP25

Connector Cooling water Inlet/Outlet

Vent portPurge gasInlet ISO-G1/4

ISO-G1/4

φ20

0

47.5

AB

C

D

CF100ISO-R100

VG100 15

1221

A B C200

200220

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C200

200220

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C230

214230

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C230

214230

Dφ185φ152φ130

AB

CF200ISO-B200

VG200 16

1625

A B C281

281306

Dφ300φ253φ285

CF200ISO-B200

VG200 16

1625

A B C281

281306

D

AB

C

D

φ300φ253φ285

□120

47.5

C

D

47.5

Air cooling fan

φ250

136

145

PCD140

~167

φ165

φ200

4-M16 DP25

Connector

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4

KF40

CF200ISO-B200

VG200 16

1625

A B C272

300319

Dφ300φ253φ285

CF200ISO-B200

VG200 16

1625

A B C272

300319

D

B

C

D

φ300φ253φ285

AB

AB

TG2400F-40

136

PCD140~167

145□120

φ250

φ165

φ2004-M16 DP25

Connector

KF40

Vent portPurge gas

Air cooling fanInlet ISO-G1/4

ISO-G1/4

47.5

47.5

φ310

186

φ28

6

181

□12

0

35ﾟ

PCD255202

95.5

47.5

6-M16 DP25

KF40

ConnectorAir cooling fan

Purge gasInlet ISO-G1/4

ISO-G1/4 Connector

φ310

186

181

47.5

95.5

35ﾟ

PCD255

54

200 6-M16 DP25

KF40

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4Cooling water Inlet/Outlet Connector

ISO-Rc1/4

CF160ISO-B160

VG150 16

1622

190

190190

A B Cφ235φ203φ225

D

CF160ISO-B160

VG150 16

1622

190

190190

A B Cφ235φ203φ225

D

47.5

φ250

136

145PCD140

68

47.5

ISO-Rc1/4

80φ165

KF40

Connector

4-M16 DP25

Cooling water Inlet/Outlet

Vent portPurge gasInlet ISO-G1/4

ISO-G1/4

φ200

47.5

AB

C

D

136

145

～16

7

φ165

47.5

PCD140

φ200

φ280φ245.5 KF40

4-M16 DP25

ConnectorVent port

Purge gas

Air cooling fan

Inlet ISO-G1/4

ISO-G1/4

□120

47.5

136

145

φ165

PCD140

φ200

φ280

80 ISO-Rc1/4

68

47.5

φ245.5KF40

4-M16 DP25

Connector

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4Cooling water Inlet/Outlet

A

47.5

C

D

φ28

6

ISO-B250VG250

A Bφ350φ335

1616

340340

C D

ISO-B250VG250

A Bφ350φ335

1616

340340

C D

C

D

250

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Specifications

Drawing of Outside dimensionPerformance curveDrawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

※1：In case of the backing vacuum pump of 160L/min. ※1：In case of the backing vacuum pump of 500L/min. ※2：Depends on the power supply model. (standard：TC1104)※3：△◇ cf. p17

※1：In case of the backing vacuum pump of 500L/min.

※1：In case of the backing vacuum pump of 1000L/min. ※2：Depends on the power supply model.

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

※1：In case of the backing vacuum pump of 500L/min. ※2：Depends on the power supply model. (standard：TC1104)※3：△◇ cf. p17

■Any orientation ■Compact size■Energy-saving■Quick shut down with gas vent■Durable structure for air inrush■Built-in controller type■High compression ratio

TG240FDrawing of Outside dimension

Built-in controller type

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.

Pump + Connector for controller◆OptionAir-cooling fan unit, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve,Flanges and Fittings

●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.

15

Pum

ping

Sys

tem

※1：In case of the backing vacuum pump of 80L/min. ※2：TC245 is a built-in controller,TC246 is rack controller.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

Power/Control

100

70

138

45ﾟISO-G1/8

ISO-G1/8

50.5

124

φ154

115

Vent Port

Purge Port

33

94

□60

34

194.

216

6.2

73.5

ConnectorController

φ1544×M8 DP12 PCD140

KF25

ISO-R100

Power/Control

100

21

70

138

45ﾟISO-G1/8

ISO-G1/8

50.5

124

φ152

φ154

115

Vent Port

Purge Port

33

94

□60

34

233.

716

6.2

113Connector

Controller

φ1544×M8 DP12 PCD140

KF25

CF100

CF flange

ISO-R flange

14

Pumping System

Osaka Vacuum, Ltd.

● The TMP pumping system where a number of pieces　 of equipment※1 necessary for high vacuum are　 compactly arranged. It can pump up to high vacuum　 with a simple operation!

● Since it has casters, it can be easily moved to the　 desired place for use.

● Mounted with a turbo molecular pump from the TG-F　 series which is resistant to disturbance! 　 (The pump can be moved while it is operating.)

◆ Line-up of basic sets (three models) in which a turbo　 molecular pump with pumping speed of 50 to 350 L/s is　 mounted.

※1: Turbo molecular pump, backing pump, vacuum piping,　 automatic slow leak valve, control unit(Optional devices and apparatuses are available to match your needs.)

※2：Figures in parentheses show the pumping speed of pumps with a screen.

ModelTMP

Inlet Flange

Backing pump

ST

CRV

：TMP pumping system

：CF：ISO-R：VG

ST220FV0501

12

3

4

2 3 4

Standard Specifications

TMPVolume flow rate N2（L/s）Base pressureInlet FlangeCooling typeVoltage

Model ST050FTG50F　51(49)※2

＜3×10-6Pa（＜2.3×10-8Torr）VG65 / ISO-R63 / CF63

TG220F　220(210)※2

Air CoolingSingle-phase、AC100V

TG350F　350(330)※2

ST220F ST350F

＜1×10-6Pa（＜7.5×10-9Torr）VG100 / ISO-R100 / CF100

ST Series

ST Series

◆ Most compact type among the ST Series! Further　 space saving is achieved with its desktop size!ST-Compact

Introduction of the TMP pumping system

AB

C

D

φ113

95 69.5

34.5

□92

47.5

Connector

Air cooling fan

4-M6 DP13 PCD78

KF16

32

φ11

3

VG65 CF63

64.2

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-R63KF16

514912

1.4×107

5×102

＜ 3×10-6（＜ 2.3×10-8）80

1-1.51-1.5

1330（10）≧ 50

TC64

AB

C

D

33ﾟ

76 57

ISO-G1/4

Inlet ISO-G1/4

φ130

Connector

Vent port

Purge gas

4-M8 DP12 PCD78

φ130

42.5

54.5

KF25

Air cooling fan

105

□92

AB

C

Dφ130

Inlet ISO-G1/4

5776

33ﾟ

60

Connector

4-M8 DP12 PCD78Cooling water Inlet/Outlet ISO-Rc1/8

Vent portISO-G1/4

Purge gas

φ130

42.5

54.5

KF25

AB

C

D

33ﾟ

φ168

76 57ISO-G1/4

Inlet ISO-G1/4

42.5

54.5Connector

Vent port

Purge gas

4-M8 DP12 PCD78

φ130

KF25

Air cooling fan

105

□92

AB

C

Dφ168

76 57

33ﾟ

ISO-G1/4

Inlet ISO-G1/4

ISO-Rc1/8

60

42.5

54.5

Connector

Vent port

Purge gas

4-M8 DP12 PCD78 φ130

Cooling water Inlet/Outlet

KF25

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-R100KF25

2101×108

2×103

＜ 1×10-6（＜ 7.5×10-9）500

2-2.55-6.5

260（2）≧ 80

TC353

VG100

350330

6

CF100

9

330310

※1：In case of the backing vacuum pump of 160L/min

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

AB

C

D

33ﾟ

φ168

76

□92

57ISO-G1/4

Inlet ISO-G1/4

KF25

42.5

54.5

Connector Vent port

Purge gas

4-M8 DP12 PCD78

φ130

Air cooling fan

76 57

33ﾟ

ISO-G1/4

Inlet ISO-G1/4

ISO-Rc1/8

60

φ168

ConnectorVent port

Purge gas

4-M8 DP12 PCD78 φ130

Cooling water Inlet/Outlet

KF25

42.5

54.5

AB

C

D

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-B160KF25450430240

1×108

2×103

＜ 1×10-6（＜ 7.5×10-9）500

2-2.55-6.5

260（2）≧ 80

TC353

VG150 CF160Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

7 10

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup time※2

Shutdown time※2

Max. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

VG,ISO-B/CF kg

VG150、ISO-B160、CF160KF40820750650

1×108

1×104

330（2.5）≧ 250

3307-9

27-32

TC1104

8605.5-712-15

TC1103

TG800F TG800F

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup time※2

Shutdown time※2

Max. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

VG,ISO-B/CF kg

VG200、ISO-B200、CF200KF4011001000720

1×108

1×104

330（2.5）≧ 25028/27

3307-9

27-32

TC1104

8605.5-712-15

TC1103

TG1100F TG1100FInletOutletN2

N2 (with protective screen)H2

N2

H2

N2

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

＜ 1×10-6（＜ 7.5×10-9）

△A◇-60△W◇

＜ 1×10-6（＜ 7.5×10-9）

△A◇-60△W◇

27/26

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

VG250、ISO-B250KF40240023001100

1×108

1.4×103

＜ 1×10-6（＜ 7.5×10-9）

5-715-18

200（1.5）≧ 50045 / 47

900

TC2403

1500

TC2403-10

TG2400F TG2400F-40InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Air / Water

※1 cf. P17※2 Input connecter:1/Remote connector:1/Instruction manual:1copy

TC64 / TC223 / TC353 / TC1104（Panel cut：128H×104W）

TC1103 / TC2403 / TC2403-10 / TC2413 / TC2414 / TC2415（Panel cut：124H×203W）

TC76 / TC246（Panel cut：128H×103.5W）

Power Supply

209

157.526

139

149

5

400

20

4-φ5

2.3

START

F2F1 F3

OSAKA VACUUM,LTD.

STOP/RESET

POWER SUPPLY

150Space for cable

connections

100

20

POWER SUPPLY

OSAKA VACUUM,LTD.

START

F2F1 F3

STOP/RESET

149

513

9

104.5 250

1.62-φ5Space for cable

connections

■Any orientation ■Compact size■Energy saveing ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■High gas throughput

TG2410F

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

ISO-B250VG250 16

16

A B C363363

Dφ350φ335

TG2410F

TG2410F-40

Drawing of Outside dimension

●The inlet flange bolt holes are symmetrical around the center line.

※1：Depends on the power supply model. Please contact us about the Air cooling type.※2：In case of the backing pump of 2000L/min.

ISO-B250VG250 16

16

A B C363363

Dφ350φ335

※This dimensional drawings corresrond to 　TG240F(built-in controller type). 　In the case of TG240F-20, its controller is separated out.

Specifications

※1：In case of the backing vacuum pump of 160L/min.

※Please contact us about the Air cooling type.

100-110/200-230(±10%)

2.7

750

220

800

TC64 TC223 TC353

Input connector: 1 / Remote connector: 1 / Serial communication connector: 1 / Instruction manual: 1 copy / Serial communication instruction manual: 1 copy ※2

TC1104 TC1103 TC2403 / TC2403-10 TC76TC2413 TC2414 TC2415 TC246

50/60

Single

560 520

8.2 2.4

200-230(±10%) 100-230(±10%)

590 610 1200 1400 1200

450

160

1500

120

800

810

Power supply model

Input Voltage

Input Frequency

Input Phases

Input Power

Rated Output Frequency

Weight

Standard accessories

Applicable pump models

（ACV）

（Hz）

（VA）

（Hz）

（kg）

TG50F TG220F TG70F-20TG2410F TG2410F-40 TG240F-20TG2400FTG2400F-40

TG350FTG450F

TG800FTG1100F

TG1400FTG800FTG1100F

△A◇-60△W◇△A◇-60△W◇

※1

Applicable pump models

※Standard backing pump is a Rotary vacuum pump of 50/60L/min. (50/60Hz)

85.5

ISO-R100KF25220210100

1×108

4×102

＜ 1×10-6（＜ 7.5×10-9）400

1-1.22.5-3.5

260（2）≧ 80

TC223

VG100 CF100

T7.3TC245DC24V

75W

T10.5TC246

AC100-230V （±10%）120VA

OSAKA VACUUM,LTD.

POWER

ACCELERATION

NORMAL

FAILURE

START STOP/RESETREMOTE

LOCAL

TURBO CONTROLLER

104.5

149

139

20

250

2×φ5

100Space for cable

connections

Specifications

L/sL/sL/s

ISO-R/CF PaISO-R/CF Torr

sccmmin

Pa（Torr）L/min

kg

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1

Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2

Input VoltageInput Power

TG240F

7.3TC245DC24V

75W

TG240F-20

10.5TC246

AC100-230V （±10%）120VA

ISO-R100/CF100KF25240230160

1×108

4×104

＜ 1×10-6 / ＜ 5×10-7

＜ 7.5×10-9 / ＜ 3.8×10-9

705.5-7.5

700（5.3）≧ 80

Specifications

High gasthroughput

TC2414VG250/ISO-B250

KF40

＜5×10-7

＜3.8×10-9

25005-7

≧ 1000

220020001700

1×108

9000

350(2.6)

TG2410F

normal

TC2413

1800

51

TG2410F-40

52

Ultra high gasthroughput

TC2415

200018001250

9×107

2000

3500

270(2.0)

L/sL/sL/s

PaTorr

sccmmin

Pa（Torr）L/min

kg

N2

N2 (with protective screen)H2

N2

H2

N2

InletOutlet

Model※1

Power Supply

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1※2

Startup timeMax.backing vacuum pumpRecommended backing vacuum pumpWeight

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

Compound Molecular Pumps

Specifications

Standard set

5

Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps7

Compound Molecular Pumps Compound Molecular Pumps

Compound Molecular Pumps Compound Molecular Pumps Compound Molecular Pumps

1213 6

Compound Molecular Pumps

Compound Molecular Pumps

9 1011 8

Osaka Vacuum, Ltd.

Turb

o Co

ntro

ller Turbo M

olecular Pumps

Compound Molecular Pumps

4

Osaka Vacuum, Ltd.

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

psOsaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd.

Compound Molecular Pumps

Osaka Vacuum, Ltd.

Water cooling

Air cooling

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-B200KF4014001300750

1×108

4.3×103

＜ 1×10-6（＜ 7.5×10-9）450

5.5-715-18

330（2.5）≧ 250

TC1103

VG200 CF200

29 30

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

VG250、ISO-B250KF40240023001100

1×108

1.4×103

＜ 1×10-6（＜ 7.5×10-9）

5-715-18

200（1.5）≧ 50045 / 47

900

TC2403

1500

TC2403-10

TG2400F TG2400F-40inletoutletN2

N2 (with protective screen)H2

N2

H2

N2

空冷 / 水冷

Inlet pressure

Performance curve

100

101

102

103

[Pa･

L/s]

N2

H2

TG240F

Inlet pressure[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

10-110-1

100

101

102

[scc

m]

Thro

ughp

ut

Gas throughputVolume flow rate

[L/s

]

103

102

101

100

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

Sf＞ 80L/min Sf : Volume flow rate of backing pump

TG240F

Inlet pressure

TG240F

ArN2

H2

Volu

me

flow

rate

Sf ＞ 80L/min Sf : Volume flow rate of backing pump

[Torr]

[Pa]10-1 100 101 102

10-3 10-2 10-1

[Pa･

L/s]

104

103

102

101

TG2410F N2 Standard

High gas throughput

Ultra high gas throughput

StandardHigh gas throughputUltra high gas throughput

*Backing vacuum pump speed:2,000L/min

StandardHigh gas throughput

[Pa･

L/s]

Volu

me

flow

rate

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG2410F N2

StandardHigh gas throughputUltra high gas throughput

*Backing vacuum pump speed:2,000L/min

Ultra high gas throughput

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[scc

m]

101

102

103

Thro

ughp

ut

Performance curve

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[L/s

]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 160L/min Sf : Volume flow rate of backing pump

TG220F

Ar

N2H2

Volu

me

flow

rate [P

a･L/

s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 160L/min Sf : Volume flow rate of backing pump

TG220FN2

Ar[scc

m]

100

101

102

Thro

ughp

ut

Performance curve

Performance curve

Ar

H2

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 500L/min Sf : Volume flow rate of backing pump

TG1400F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Ar

N2

Sf = 500L/min Sf : Volume flow rate of backing pump

TG1400F

N2

Performance curve

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

100

101

102

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 160L/min Sf : Volume flow rate of backing pump

TG450F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2H2

TG450F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Ar

N2

Sf = 160L/min Sf : Volume flow rate of backing pump

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG50F

[L/s

]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 50-100L/min Sf : Volume flow rate of backing pump

TG50F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Sf = 50-100L/min Sf : Volume flow rate of backing pump

Ar

N2

Volu

me

flow

rate

Ar

N2H2

[scc

m]

100

101

102

Thro

ughp

ut

Performance curve

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

104

103

102

101

100

[L/s

]

TG350F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Sf = 160L/min Sf : Volume flow rate of backing pump

N2 Ar

TG350F

Ar

N2

H2

Volu

me

flow

rate

Sf = 160L/min Sf : Volume flow rate of backing pump

[scc

m]

100

101

102

Thro

ughp

ut

Performance curve Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 1000L/min Sf : Volume flow rate of backing pump

TG2400F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

ArN2

H2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Ar

Ar

N2

N2

TG2400F

Sf = 1000L/min Sf = 1000L/min

TG2400F TG2400F-40

Sf:Volume flow rate of backing pump

Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

TG800F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2

Ar

N2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

TG800F

Ar

Ar

N2

N2

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Ar N2

N2

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

TG1100F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2

Ar

N2

TG1100F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

TG50F

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Drawing of Outside dimension

AB

C

D

CF63ISO-R63

VG65 14

1218

A B C147

168182

Dφ145φ114φ95

CF63ISO-R63

VG65 14

1218

A B C147

168182

Dφ145φ114φ95

Water cooling

Air cooling

φ113

69.5

47.5

54

62

70

34.5

ISO-Rc1/8

22.5

15

Connector

4-M6 DP13 PCD78

KF16

32

φ11

3

Cooling water Inlet/Outlet

※1：In case of the backing vacuum pump of 100L/min.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush ※Air inrush test (continual 400 times)

■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

TG220F TG350F

TG450F TG800F TG1100FTG1400F

TG2400F

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard setPump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for gas inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL/SEMI-S2/CE

CF160ISO-B160

VG150 12

1222

A B C312.5

312.5327.5

Dφ235φ203φ225

CF160ISO-B160

VG150 12

1222

A B C312.5

312.5327.5

Dφ235φ203φ225

AB

C

D

136

PCD140

φ250

145

80

φ165

ISO-Rc1/4

68

KF40

4-M16 DP25

Connector Cooling water Inlet/Outlet

Vent portPurge gasInlet ISO-G1/4

ISO-G1/4

φ20

0

47.5

AB

C

D

CF100ISO-R100

VG100 15

1221

A B C200

200220

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C200

200220

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C230

214230

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C230

214230

Dφ185φ152φ130

AB

CF200ISO-B200

VG200 16

1625

A B C281

281306

Dφ300φ253φ285

CF200ISO-B200

VG200 16

1625

A B C281

281306

D

AB

C

D

φ300φ253φ285

□120

47.5

C

D

47.5

Air cooling fan

φ250

136

145

PCD140

~167

φ165

φ200

4-M16 DP25

Connector

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4

KF40

CF200ISO-B200

VG200 16

1625

A B C272

300319

Dφ300φ253φ285

CF200ISO-B200

VG200 16

1625

A B C272

300319

D

B

C

D

φ300φ253φ285

AB

AB

TG2400F-40

136

PCD140~167

145□120

φ250

φ165

φ2004-M16 DP25

Connector

KF40

Vent portPurge gas

Air cooling fanInlet ISO-G1/4

ISO-G1/4

47.5

47.5

φ310

186

φ28

6

181

□12

0

35ﾟ

PCD255202

95.5

47.5

6-M16 DP25

KF40

ConnectorAir cooling fan

Purge gasInlet ISO-G1/4

ISO-G1/4 Connector

φ310

186

181

47.5

95.5

35ﾟ

PCD255

54

200 6-M16 DP25

KF40

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4Cooling water Inlet/Outlet Connector

ISO-Rc1/4

CF160ISO-B160

VG150 16

1622

190

190190

A B Cφ235φ203φ225

D

CF160ISO-B160

VG150 16

1622

190

190190

A B Cφ235φ203φ225

D

47.5

φ250

136

145PCD140

68

47.5

ISO-Rc1/4

80φ165

KF40

Connector

4-M16 DP25

Cooling water Inlet/Outlet

Vent portPurge gasInlet ISO-G1/4

ISO-G1/4

φ200

47.5

AB

C

D

136

145

～16

7

φ165

47.5

PCD140

φ200

φ280φ245.5 KF40

4-M16 DP25

ConnectorVent port

Purge gas

Air cooling fan

Inlet ISO-G1/4

ISO-G1/4

□120

47.5

136

145

φ165

PCD140

φ200

φ280

80 ISO-Rc1/4

68

47.5

φ245.5KF40

4-M16 DP25

Connector

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4Cooling water Inlet/Outlet

A

47.5

C

D

φ28

6

ISO-B250VG250

A Bφ350φ335

1616

340340

C D

ISO-B250VG250

A Bφ350φ335

1616

340340

C D

C

D

250

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Specifications

Drawing of Outside dimensionPerformance curveDrawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

※1：In case of the backing vacuum pump of 160L/min. ※1：In case of the backing vacuum pump of 500L/min. ※2：Depends on the power supply model. (standard：TC1104)※3：△◇ cf. p17

※1：In case of the backing vacuum pump of 500L/min.

※1：In case of the backing vacuum pump of 1000L/min. ※2：Depends on the power supply model.

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

※1：In case of the backing vacuum pump of 500L/min. ※2：Depends on the power supply model. (standard：TC1104)※3：△◇ cf. p17

■Any orientation ■Compact size■Energy-saving■Quick shut down with gas vent■Durable structure for air inrush■Built-in controller type■High compression ratio

TG240FDrawing of Outside dimension

Built-in controller type

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.

Pump + Connector for controller◆OptionAir-cooling fan unit, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve,Flanges and Fittings

●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.

15

Pum

ping

Sys

tem

※1：In case of the backing vacuum pump of 80L/min. ※2：TC245 is a built-in controller,TC246 is rack controller.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

Power/Control

100

70

138

45ﾟISO-G1/8

ISO-G1/8

50.5

124

φ154

115

Vent Port

Purge Port

33

94

□60

34

194.

216

6.2

73.5

ConnectorController

φ1544×M8 DP12 PCD140

KF25

ISO-R100

Power/Control

100

21

70

138

45ﾟISO-G1/8

ISO-G1/8

50.5

124

φ152

φ154

115

Vent Port

Purge Port

33

94

□60

34

233.

716

6.2

113Connector

Controller

φ1544×M8 DP12 PCD140

KF25

CF100

CF flange

ISO-R flange

14

Pumping System

Osaka Vacuum, Ltd.

● The TMP pumping system where a number of pieces　 of equipment※1 necessary for high vacuum are　 compactly arranged. It can pump up to high vacuum　 with a simple operation!

● Since it has casters, it can be easily moved to the　 desired place for use.

● Mounted with a turbo molecular pump from the TG-F　 series which is resistant to disturbance! 　 (The pump can be moved while it is operating.)

◆ Line-up of basic sets (three models) in which a turbo　 molecular pump with pumping speed of 50 to 350 L/s is　 mounted.

※1: Turbo molecular pump, backing pump, vacuum piping,　 automatic slow leak valve, control unit(Optional devices and apparatuses are available to match your needs.)

※2：Figures in parentheses show the pumping speed of pumps with a screen.

ModelTMP

Inlet Flange

Backing pump

ST

CRV

：TMP pumping system

：CF：ISO-R：VG

ST220FV0501

12

3

4

2 3 4

Standard Specifications

TMPVolume flow rate N2（L/s）Base pressureInlet FlangeCooling typeVoltage

Model ST050FTG50F　51(49)※2

＜3×10-6Pa（＜2.3×10-8Torr）VG65 / ISO-R63 / CF63

TG220F　220(210)※2

Air CoolingSingle-phase、AC100V

TG350F　350(330)※2

ST220F ST350F

＜1×10-6Pa（＜7.5×10-9Torr）VG100 / ISO-R100 / CF100

ST Series

ST Series

◆ Most compact type among the ST Series! Further　 space saving is achieved with its desktop size!ST-Compact

Introduction of the TMP pumping system

AB

C

D

φ113

95 69.5

34.5

□92

47.5

Connector

Air cooling fan

4-M6 DP13 PCD78

KF16

32

φ11

3

VG65 CF63

64.2

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-R63KF16

514912

1.4×107

5×102

＜ 3×10-6（＜ 2.3×10-8）80

1-1.51-1.5

1330（10）≧ 50

TC64

AB

C

D

33ﾟ

76 57

ISO-G1/4

Inlet ISO-G1/4

φ130

Connector

Vent port

Purge gas

4-M8 DP12 PCD78

φ130

42.5

54.5

KF25

Air cooling fan

105

□92

AB

C

Dφ130

Inlet ISO-G1/4

5776

33ﾟ

60

Connector

4-M8 DP12 PCD78Cooling water Inlet/Outlet ISO-Rc1/8

Vent portISO-G1/4

Purge gas

φ130

42.5

54.5

KF25

AB

C

D

33ﾟ

φ168

76 57ISO-G1/4

Inlet ISO-G1/4

42.5

54.5Connector

Vent port

Purge gas

4-M8 DP12 PCD78

φ130

KF25

Air cooling fan

105

□92

AB

C

Dφ168

76 57

33ﾟ

ISO-G1/4

Inlet ISO-G1/4

ISO-Rc1/8

60

42.5

54.5

Connector

Vent port

Purge gas

4-M8 DP12 PCD78 φ130

Cooling water Inlet/Outlet

KF25

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-R100KF25

2101×108

2×103

＜ 1×10-6（＜ 7.5×10-9）500

2-2.55-6.5

260（2）≧ 80

TC353

VG100

350330

6

CF100

9

330310

※1：In case of the backing vacuum pump of 160L/min

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

AB

C

D

33ﾟ

φ168

76

□92

57ISO-G1/4

Inlet ISO-G1/4

KF25

42.5

54.5

Connector Vent port

Purge gas

4-M8 DP12 PCD78

φ130

Air cooling fan

76 57

33ﾟ

ISO-G1/4

Inlet ISO-G1/4

ISO-Rc1/8

60

φ168

ConnectorVent port

Purge gas

4-M8 DP12 PCD78 φ130

Cooling water Inlet/Outlet

KF25

42.5

54.5

AB

C

D

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-B160KF25450430240

1×108

2×103

＜ 1×10-6（＜ 7.5×10-9）500

2-2.55-6.5

260（2）≧ 80

TC353

VG150 CF160Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

7 10

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup time※2

Shutdown time※2

Max. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

VG,ISO-B/CF kg

VG150、ISO-B160、CF160KF40820750650

1×108

1×104

330（2.5）≧ 250

3307-9

27-32

TC1104

8605.5-712-15

TC1103

TG800F TG800F

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup time※2

Shutdown time※2

Max. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

VG,ISO-B/CF kg

VG200、ISO-B200、CF200KF4011001000720

1×108

1×104

330（2.5）≧ 25028/27

3307-9

27-32

TC1104

8605.5-712-15

TC1103

TG1100F TG1100FInletOutletN2

N2 (with protective screen)H2

N2

H2

N2

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

＜ 1×10-6（＜ 7.5×10-9）

△A◇-60△W◇

＜ 1×10-6（＜ 7.5×10-9）

△A◇-60△W◇

27/26

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

VG250、ISO-B250KF40240023001100

1×108

1.4×103

＜ 1×10-6（＜ 7.5×10-9）

5-715-18

200（1.5）≧ 50045 / 47

900

TC2403

1500

TC2403-10

TG2400F TG2400F-40InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Air / Water

※1 cf. P17※2 Input connecter:1/Remote connector:1/Instruction manual:1copy

TC64 / TC223 / TC353 / TC1104（Panel cut：128H×104W）

TC1103 / TC2403 / TC2403-10 / TC2413 / TC2414 / TC2415（Panel cut：124H×203W）

TC76 / TC246（Panel cut：128H×103.5W）

Power Supply

209

157.526

139

149

5

400

20

4-φ5

2.3

START

F2F1 F3

OSAKA VACUUM,LTD.

STOP/RESET

POWER SUPPLY

150Space for cable

connections

100

20

POWER SUPPLY

OSAKA VACUUM,LTD.

START

F2F1 F3

STOP/RESET

149

513

9

104.5 250

1.62-φ5Space for cable

connections

■Any orientation ■Compact size■Energy saveing ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■High gas throughput

TG2410F

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

ISO-B250VG250 16

16

A B C363363

Dφ350φ335

TG2410F

TG2410F-40

Drawing of Outside dimension

●The inlet flange bolt holes are symmetrical around the center line.

※1：Depends on the power supply model. Please contact us about the Air cooling type.※2：In case of the backing pump of 2000L/min.

ISO-B250VG250 16

16

A B C363363

Dφ350φ335

※This dimensional drawings corresrond to 　TG240F(built-in controller type). 　In the case of TG240F-20, its controller is separated out.

Specifications

※1：In case of the backing vacuum pump of 160L/min.

※Please contact us about the Air cooling type.

100-110/200-230(±10%)

2.7

750

220

800

TC64 TC223 TC353

Input connector: 1 / Remote connector: 1 / Serial communication connector: 1 / Instruction manual: 1 copy / Serial communication instruction manual: 1 copy ※2

TC1104 TC1103 TC2403 / TC2403-10 TC76TC2413 TC2414 TC2415 TC246

50/60

Single

560 520

8.2 2.4

200-230(±10%) 100-230(±10%)

590 610 1200 1400 1200

450

160

1500

120

800

810

Power supply model

Input Voltage

Input Frequency

Input Phases

Input Power

Rated Output Frequency

Weight

Standard accessories

Applicable pump models

（ACV）

（Hz）

（VA）

（Hz）

（kg）

TG50F TG220F TG70F-20TG2410F TG2410F-40 TG240F-20TG2400FTG2400F-40

TG350FTG450F

TG800FTG1100F

TG1400FTG800FTG1100F

△A◇-60△W◇△A◇-60△W◇

※1

Applicable pump models

※Standard backing pump is a Rotary vacuum pump of 50/60L/min. (50/60Hz)

85.5

ISO-R100KF25220210100

1×108

4×102

＜ 1×10-6（＜ 7.5×10-9）400

1-1.22.5-3.5

260（2）≧ 80

TC223

VG100 CF100

T7.3TC245DC24V

75W

T10.5TC246

AC100-230V （±10%）120VA

OSAKA VACUUM,LTD.

POWER

ACCELERATION

NORMAL

FAILURE

START STOP/RESETREMOTE

LOCAL

TURBO CONTROLLER

104.5

149

139

20

250

2×φ5

100Space for cable

connections

Specifications

L/sL/sL/s

ISO-R/CF PaISO-R/CF Torr

sccmmin

Pa（Torr）L/min

kg

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1

Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2

Input VoltageInput Power

TG240F

7.3TC245DC24V

75W

TG240F-20

10.5TC246

AC100-230V （±10%）120VA

ISO-R100/CF100KF25240230160

1×108

4×104

＜ 1×10-6 / ＜ 5×10-7

＜ 7.5×10-9 / ＜ 3.8×10-9

705.5-7.5

700（5.3）≧ 80

Specifications

High gasthroughput

TC2414VG250/ISO-B250

KF40

＜5×10-7

＜3.8×10-9

25005-7

≧ 1000

220020001700

1×108

9000

350(2.6)

TG2410F

normal

TC2413

1800

51

TG2410F-40

52

Ultra high gasthroughput

TC2415

200018001250

9×107

2000

3500

270(2.0)

L/sL/sL/s

PaTorr

sccmmin

Pa（Torr）L/min

kg

N2

N2 (with protective screen)H2

N2

H2

N2

InletOutlet

Model※1

Power Supply

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1※2

Startup timeMax.backing vacuum pumpRecommended backing vacuum pumpWeight

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

Compound Molecular Pumps

Specifications

Standard set

5

Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

7

Compound Molecular Pumps Compound Molecular Pumps

Compound Molecular Pumps Compound Molecular Pumps Compound Molecular Pumps

1213 6

Compound Molecular Pumps

Compound Molecular Pumps

9 1011 8

Osaka Vacuum, Ltd.

Turb

o Co

ntro

ller Turbo M

olecular Pumps

Compound Molecular Pumps

4

Osaka Vacuum, Ltd.

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.Tu

rbo

Mol

ecul

ar P

umps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd.

Compound Molecular Pumps

Osaka Vacuum, Ltd.

Water cooling

Air cooling

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-B200KF4014001300750

1×108

4.3×103

＜ 1×10-6（＜ 7.5×10-9）450

5.5-715-18

330（2.5）≧ 250

TC1103

VG200 CF200

29 30

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

VG250、ISO-B250KF40240023001100

1×108

1.4×103

＜ 1×10-6（＜ 7.5×10-9）

5-715-18

200（1.5）≧ 50045 / 47

900

TC2403

1500

TC2403-10

TG2400F TG2400F-40inletoutletN2

N2 (with protective screen)H2

N2

H2

N2

空冷 / 水冷

Inlet pressure

Performance curve

100

101

102

103

[Pa･

L/s]

N2

H2

TG240F

Inlet pressure[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

10-110-1

100

101

102

[scc

m]

Thro

ughp

ut

Gas throughputVolume flow rate

[L/s

]

103

102

101

100

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

Sf＞ 80L/min Sf : Volume flow rate of backing pump

TG240F

Inlet pressure

TG240F

ArN2

H2

Volu

me

flow

rate

Sf ＞ 80L/min Sf : Volume flow rate of backing pump

[Torr]

[Pa]10-1 100 101 102

10-3 10-2 10-1

[Pa･

L/s]

104

103

102

101

TG2410F N2 Standard

High gas throughput

Ultra high gas throughput

StandardHigh gas throughputUltra high gas throughput

*Backing vacuum pump speed:2,000L/min

StandardHigh gas throughput

[Pa･

L/s]

Volu

me

flow

rate

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG2410F N2

StandardHigh gas throughputUltra high gas throughput

*Backing vacuum pump speed:2,000L/min

Ultra high gas throughput

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[scc

m]

101

102

103

Thro

ughp

ut

Performance curve

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[L/s

]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 160L/min Sf : Volume flow rate of backing pump

TG220F

Ar

N2H2

Volu

me

flow

rate [P

a･L/

s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 160L/min Sf : Volume flow rate of backing pump

TG220FN2

Ar[scc

m]

100

101

102

Thro

ughp

ut

Performance curve

Performance curve

Ar

H2

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 500L/min Sf : Volume flow rate of backing pump

TG1400F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Ar

N2

Sf = 500L/min Sf : Volume flow rate of backing pump

TG1400F

N2

Performance curve

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

100

101

102

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 160L/min Sf : Volume flow rate of backing pump

TG450F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2H2

TG450F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Ar

N2

Sf = 160L/min Sf : Volume flow rate of backing pump

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG50F

[L/s

]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 50-100L/min Sf : Volume flow rate of backing pump

TG50F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Sf = 50-100L/min Sf : Volume flow rate of backing pump

Ar

N2

Volu

me

flow

rate

Ar

N2H2

[scc

m]

100

101

102

Thro

ughp

ut

Performance curve

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

104

103

102

101

100

[L/s

]

TG350F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Sf = 160L/min Sf : Volume flow rate of backing pump

N2 Ar

TG350F

Ar

N2

H2

Volu

me

flow

rate

Sf = 160L/min Sf : Volume flow rate of backing pump

[scc

m]

100

101

102

Thro

ughp

ut

Performance curve Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 1000L/min Sf : Volume flow rate of backing pump

TG2400F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

ArN2

H2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Ar

Ar

N2

N2

TG2400F

Sf = 1000L/min Sf = 1000L/min

TG2400F TG2400F-40

Sf:Volume flow rate of backing pump

Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

TG800F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2

Ar

N2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

TG800F

Ar

Ar

N2

N2

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Ar N2

N2

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

TG1100F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2

Ar

N2

TG1100F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

TG50F

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Drawing of Outside dimension

AB

C

D

CF63ISO-R63

VG65 14

1218

A B C147

168182

Dφ145φ114φ95

CF63ISO-R63

VG65 14

1218

A B C147

168182

Dφ145φ114φ95

Water cooling

Air cooling

φ113

69.5

47.5

54

62

70

34.5

ISO-Rc1/8

22.5

15

Connector

4-M6 DP13 PCD78

KF16

32

φ11

3

Cooling water Inlet/Outlet

※1：In case of the backing vacuum pump of 100L/min.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush ※Air inrush test (continual 400 times)

■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

TG220F TG350F

TG450F TG800F TG1100FTG1400F

TG2400F

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard setPump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for gas inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL/SEMI-S2/CE

CF160ISO-B160

VG150 12

1222

A B C312.5

312.5327.5

Dφ235φ203φ225

CF160ISO-B160

VG150 12

1222

A B C312.5

312.5327.5

Dφ235φ203φ225

AB

C

D

136

PCD140

φ250

145

80

φ165

ISO-Rc1/4

68

KF40

4-M16 DP25

Connector Cooling water Inlet/Outlet

Vent portPurge gasInlet ISO-G1/4

ISO-G1/4

φ20

0

47.5

AB

C

D

CF100ISO-R100

VG100 15

1221

A B C200

200220

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C200

200220

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C230

214230

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C230

214230

Dφ185φ152φ130

AB

CF200ISO-B200

VG200 16

1625

A B C281

281306

Dφ300φ253φ285

CF200ISO-B200

VG200 16

1625

A B C281

281306

D

AB

C

D

φ300φ253φ285

□120

47.5

C

D

47.5

Air cooling fan

φ250

136

145

PCD140

~167

φ165

φ200

4-M16 DP25

Connector

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4

KF40

CF200ISO-B200

VG200 16

1625

A B C272

300319

Dφ300φ253φ285

CF200ISO-B200

VG200 16

1625

A B C272

300319

D

B

C

D

φ300φ253φ285

AB

AB

TG2400F-40

136

PCD140~167

145□120

φ250

φ165

φ2004-M16 DP25

Connector

KF40

Vent portPurge gas

Air cooling fanInlet ISO-G1/4

ISO-G1/4

47.5

47.5

φ310

186

φ28

6

181

□12

0

35ﾟ

PCD255202

95.5

47.5

6-M16 DP25

KF40

ConnectorAir cooling fan

Purge gasInlet ISO-G1/4

ISO-G1/4 Connector

φ310

186

181

47.5

95.5

35ﾟ

PCD255

54

200 6-M16 DP25

KF40

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4Cooling water Inlet/Outlet Connector

ISO-Rc1/4

CF160ISO-B160

VG150 16

1622

190

190190

A B Cφ235φ203φ225

D

CF160ISO-B160

VG150 16

1622

190

190190

A B Cφ235φ203φ225

D

47.5

φ250

136

145PCD140

68

47.5

ISO-Rc1/4

80φ165

KF40

Connector

4-M16 DP25

Cooling water Inlet/Outlet

Vent portPurge gasInlet ISO-G1/4

ISO-G1/4

φ200

47.5

AB

C

D

136

145

～16

7

φ165

47.5

PCD140

φ200

φ280φ245.5 KF40

4-M16 DP25

ConnectorVent port

Purge gas

Air cooling fan

Inlet ISO-G1/4

ISO-G1/4

□120

47.5

136

145

φ165

PCD140

φ200

φ280

80 ISO-Rc1/4

68

47.5

φ245.5KF40

4-M16 DP25

Connector

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4Cooling water Inlet/Outlet

A

47.5

C

D

φ28

6

ISO-B250VG250

A Bφ350φ335

1616

340340

C D

ISO-B250VG250

A Bφ350φ335

1616

340340

C D

C

D

250

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Specifications

Drawing of Outside dimensionPerformance curveDrawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

※1：In case of the backing vacuum pump of 160L/min. ※1：In case of the backing vacuum pump of 500L/min. ※2：Depends on the power supply model. (standard：TC1104)※3：△◇ cf. p17

※1：In case of the backing vacuum pump of 500L/min.

※1：In case of the backing vacuum pump of 1000L/min. ※2：Depends on the power supply model.

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

※1：In case of the backing vacuum pump of 500L/min. ※2：Depends on the power supply model. (standard：TC1104)※3：△◇ cf. p17

■Any orientation ■Compact size■Energy-saving■Quick shut down with gas vent■Durable structure for air inrush■Built-in controller type■High compression ratio

TG240FDrawing of Outside dimension

Built-in controller type

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.

Pump + Connector for controller◆OptionAir-cooling fan unit, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve,Flanges and Fittings

●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.

15

Pum

ping

Sys

tem

※1：In case of the backing vacuum pump of 80L/min. ※2：TC245 is a built-in controller,TC246 is rack controller.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

Power/Control

100

70

138

45ﾟISO-G1/8

ISO-G1/8

50.5

124

φ154

115

Vent Port

Purge Port

33

94

□60

34

194.

216

6.2

73.5

ConnectorController

φ1544×M8 DP12 PCD140

KF25

ISO-R100

Power/Control

100

21

70

138

45ﾟISO-G1/8

ISO-G1/8

50.5

124

φ152

φ154

115

Vent Port

Purge Port

33

94

□60

34

233.

716

6.2

113Connector

Controller

φ1544×M8 DP12 PCD140

KF25

CF100

CF flange

ISO-R flange

14

Pumping System

Osaka Vacuum, Ltd.

● The TMP pumping system where a number of pieces　 of equipment※1 necessary for high vacuum are　 compactly arranged. It can pump up to high vacuum　 with a simple operation!

● Since it has casters, it can be easily moved to the　 desired place for use.

● Mounted with a turbo molecular pump from the TG-F　 series which is resistant to disturbance! 　 (The pump can be moved while it is operating.)

◆ Line-up of basic sets (three models) in which a turbo　 molecular pump with pumping speed of 50 to 350 L/s is　 mounted.

※1: Turbo molecular pump, backing pump, vacuum piping,　 automatic slow leak valve, control unit(Optional devices and apparatuses are available to match your needs.)

※2：Figures in parentheses show the pumping speed of pumps with a screen.

ModelTMP

Inlet Flange

Backing pump

ST

CRV

：TMP pumping system

：CF：ISO-R：VG

ST220FV0501

12

3

4

2 3 4

Standard Specifications

TMPVolume flow rate N2（L/s）Base pressureInlet FlangeCooling typeVoltage

Model ST050FTG50F　51(49)※2

＜3×10-6Pa（＜2.3×10-8Torr）VG65 / ISO-R63 / CF63

TG220F　220(210)※2

Air CoolingSingle-phase、AC100V

TG350F　350(330)※2

ST220F ST350F

＜1×10-6Pa（＜7.5×10-9Torr）VG100 / ISO-R100 / CF100

ST Series

ST Series

◆ Most compact type among the ST Series! Further　 space saving is achieved with its desktop size!ST-Compact

Introduction of the TMP pumping system

AB

C

D

φ113

95 69.5

34.5

□92

47.5

Connector

Air cooling fan

4-M6 DP13 PCD78

KF16

32

φ11

3

VG65 CF63

64.2

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-R63KF16

514912

1.4×107

5×102

＜ 3×10-6（＜ 2.3×10-8）80

1-1.51-1.5

1330（10）≧ 50

TC64

AB

C

D

33ﾟ

76 57

ISO-G1/4

Inlet ISO-G1/4

φ130

Connector

Vent port

Purge gas

4-M8 DP12 PCD78

φ130

42.5

54.5

KF25

Air cooling fan

105

□92

AB

C

Dφ130

Inlet ISO-G1/4

5776

33ﾟ

60

Connector

4-M8 DP12 PCD78Cooling water Inlet/Outlet ISO-Rc1/8

Vent portISO-G1/4

Purge gas

φ130

42.5

54.5

KF25

AB

C

D

33ﾟ

φ168

76 57ISO-G1/4

Inlet ISO-G1/4

42.5

54.5Connector

Vent port

Purge gas

4-M8 DP12 PCD78

φ130

KF25

Air cooling fan

105

□92

AB

C

Dφ168

76 57

33ﾟ

ISO-G1/4

Inlet ISO-G1/4

ISO-Rc1/8

60

42.5

54.5

Connector

Vent port

Purge gas

4-M8 DP12 PCD78 φ130

Cooling water Inlet/Outlet

KF25

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-R100KF25

2101×108

2×103

＜ 1×10-6（＜ 7.5×10-9）500

2-2.55-6.5

260（2）≧ 80

TC353

VG100

350330

6

CF100

9

330310

※1：In case of the backing vacuum pump of 160L/min

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

AB

C

D

33ﾟ

φ168

76

□92

57ISO-G1/4

Inlet ISO-G1/4

KF25

42.5

54.5

Connector Vent port

Purge gas

4-M8 DP12 PCD78

φ130

Air cooling fan

76 57

33ﾟ

ISO-G1/4

Inlet ISO-G1/4

ISO-Rc1/8

60

φ168

ConnectorVent port

Purge gas

4-M8 DP12 PCD78 φ130

Cooling water Inlet/Outlet

KF25

42.5

54.5

AB

C

D

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-B160KF25450430240

1×108

2×103

＜ 1×10-6（＜ 7.5×10-9）500

2-2.55-6.5

260（2）≧ 80

TC353

VG150 CF160Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

7 10

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup time※2

Shutdown time※2

Max. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

VG,ISO-B/CF kg

VG150、ISO-B160、CF160KF40820750650

1×108

1×104

330（2.5）≧ 250

3307-9

27-32

TC1104

8605.5-712-15

TC1103

TG800F TG800F

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup time※2

Shutdown time※2

Max. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

VG,ISO-B/CF kg

VG200、ISO-B200、CF200KF4011001000720

1×108

1×104

330（2.5）≧ 25028/27

3307-9

27-32

TC1104

8605.5-712-15

TC1103

TG1100F TG1100FInletOutletN2

N2 (with protective screen)H2

N2

H2

N2

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

＜ 1×10-6（＜ 7.5×10-9）

△A◇-60△W◇

＜ 1×10-6（＜ 7.5×10-9）

△A◇-60△W◇

27/26

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

VG250、ISO-B250KF40240023001100

1×108

1.4×103

＜ 1×10-6（＜ 7.5×10-9）

5-715-18

200（1.5）≧ 50045 / 47

900

TC2403

1500

TC2403-10

TG2400F TG2400F-40InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Air / Water

※1 cf. P17※2 Input connecter:1/Remote connector:1/Instruction manual:1copy

TC64 / TC223 / TC353 / TC1104（Panel cut：128H×104W）

TC1103 / TC2403 / TC2403-10 / TC2413 / TC2414 / TC2415（Panel cut：124H×203W）

TC76 / TC246（Panel cut：128H×103.5W）

Power Supply

209

157.526

139

149

5

400

20

4-φ5

2.3

START

F2F1 F3

OSAKA VACUUM,LTD.

STOP/RESET

POWER SUPPLY

150Space for cable

connections

100

20

POWER SUPPLY

OSAKA VACUUM,LTD.

START

F2F1 F3

STOP/RESET

149

513

9

104.5 250

1.62-φ5Space for cable

connections

■Any orientation ■Compact size■Energy saveing ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■High gas throughput

TG2410F

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

ISO-B250VG250 16

16

A B C363363

Dφ350φ335

TG2410F

TG2410F-40

Drawing of Outside dimension

●The inlet flange bolt holes are symmetrical around the center line.

※1：Depends on the power supply model. Please contact us about the Air cooling type.※2：In case of the backing pump of 2000L/min.

ISO-B250VG250 16

16

A B C363363

Dφ350φ335

※This dimensional drawings corresrond to 　TG240F(built-in controller type). 　In the case of TG240F-20, its controller is separated out.

Specifications

※1：In case of the backing vacuum pump of 160L/min.

※Please contact us about the Air cooling type.

100-110/200-230(±10%)

2.7

750

220

800

TC64 TC223 TC353

Input connector: 1 / Remote connector: 1 / Serial communication connector: 1 / Instruction manual: 1 copy / Serial communication instruction manual: 1 copy ※2

TC1104 TC1103 TC2403 / TC2403-10 TC76TC2413 TC2414 TC2415 TC246

50/60

Single

560 520

8.2 2.4

200-230(±10%) 100-230(±10%)

590 610 1200 1400 1200

450

160

1500

120

800

810

Power supply model

Input Voltage

Input Frequency

Input Phases

Input Power

Rated Output Frequency

Weight

Standard accessories

Applicable pump models

（ACV）

（Hz）

（VA）

（Hz）

（kg）

TG50F TG220F TG70F-20TG2410F TG2410F-40 TG240F-20TG2400FTG2400F-40

TG350FTG450F

TG800FTG1100F

TG1400FTG800FTG1100F

△A◇-60△W◇△A◇-60△W◇

※1

Applicable pump models

※Standard backing pump is a Rotary vacuum pump of 50/60L/min. (50/60Hz)

85.5

ISO-R100KF25220210100

1×108

4×102

＜ 1×10-6（＜ 7.5×10-9）400

1-1.22.5-3.5

260（2）≧ 80

TC223

VG100 CF100

T7.3TC245DC24V

75W

T10.5TC246

AC100-230V （±10%）120VA

OSAKA VACUUM,LTD.

POWER

ACCELERATION

NORMAL

FAILURE

START STOP/RESETREMOTE

LOCAL

TURBO CONTROLLER

104.5

149

139

20

250

2×φ5

100Space for cable

connections

Specifications

L/sL/sL/s

ISO-R/CF PaISO-R/CF Torr

sccmmin

Pa（Torr）L/min

kg

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1

Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2

Input VoltageInput Power

TG240F

7.3TC245DC24V

75W

TG240F-20

10.5TC246

AC100-230V （±10%）120VA

ISO-R100/CF100KF25240230160

1×108

4×104

＜ 1×10-6 / ＜ 5×10-7

＜ 7.5×10-9 / ＜ 3.8×10-9

705.5-7.5

700（5.3）≧ 80

Specifications

High gasthroughput

TC2414VG250/ISO-B250

KF40

＜5×10-7

＜3.8×10-9

25005-7

≧ 1000

220020001700

1×108

9000

350(2.6)

TG2410F

normal

TC2413

1800

51

TG2410F-40

52

Ultra high gasthroughput

TC2415

200018001250

9×107

2000

3500

270(2.0)

L/sL/sL/s

PaTorr

sccmmin

Pa（Torr）L/min

kg

N2

N2 (with protective screen)H2

N2

H2

N2

InletOutlet

Model※1

Power Supply

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1※2

Startup timeMax.backing vacuum pumpRecommended backing vacuum pumpWeight

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

Compound Molecular Pumps

Specifications

Standard set

5

Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

7

Compound Molecular Pumps Compound Molecular Pumps

Compound Molecular Pumps Compound Molecular Pumps Compound Molecular Pumps

1213 6

Compound Molecular Pumps

Compound Molecular Pumps

9 1011 8

Osaka Vacuum, Ltd.

Turb

o Co

ntro

ller Turbo M

olecular Pumps

Compound Molecular Pumps

4

Osaka Vacuum, Ltd.

Turbo Molecular Pum

psOsaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd.

Compound Molecular Pumps

Osaka Vacuum, Ltd.

Water cooling

Air cooling

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-B200KF4014001300750

1×108

4.3×103

＜ 1×10-6（＜ 7.5×10-9）450

5.5-715-18

330（2.5）≧ 250

TC1103

VG200 CF200

29 30

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

VG250、ISO-B250KF40240023001100

1×108

1.4×103

＜ 1×10-6（＜ 7.5×10-9）

5-715-18

200（1.5）≧ 50045 / 47

900

TC2403

1500

TC2403-10

TG2400F TG2400F-40inletoutletN2

N2 (with protective screen)H2

N2

H2

N2

空冷 / 水冷

Inlet pressure

Performance curve

100

101

102

103

[Pa･

L/s]

N2

H2

TG240F

Inlet pressure[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

10-110-1

100

101

102

[scc

m]

Thro

ughp

ut

Gas throughputVolume flow rate

[L/s

]

103

102

101

100

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

Sf＞ 80L/min Sf : Volume flow rate of backing pump

TG240F

Inlet pressure

TG240F

ArN2

H2

Volu

me

flow

rate

Sf ＞ 80L/min Sf : Volume flow rate of backing pump

[Torr]

[Pa]10-1 100 101 102

10-3 10-2 10-1

[Pa･

L/s]

104

103

102

101

TG2410F N2 Standard

High gas throughput

Ultra high gas throughput

StandardHigh gas throughputUltra high gas throughput

*Backing vacuum pump speed:2,000L/min

StandardHigh gas throughput

[Pa･

L/s]

Volu

me

flow

rate

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG2410F N2

StandardHigh gas throughputUltra high gas throughput

*Backing vacuum pump speed:2,000L/min

Ultra high gas throughput

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[scc

m]

101

102

103

Thro

ughp

ut

Performance curve

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[L/s

]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 160L/min Sf : Volume flow rate of backing pump

TG220F

Ar

N2H2

Volu

me

flow

rate [P

a･L/

s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 160L/min Sf : Volume flow rate of backing pump

TG220FN2

Ar[scc

m]

100

101

102

Thro

ughp

ut

Performance curve

Performance curve

Ar

H2

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 500L/min Sf : Volume flow rate of backing pump

TG1400F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Ar

N2

Sf = 500L/min Sf : Volume flow rate of backing pump

TG1400F

N2

Performance curve

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

100

101

102

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 160L/min Sf : Volume flow rate of backing pump

TG450F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2H2

TG450F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Ar

N2

Sf = 160L/min Sf : Volume flow rate of backing pump

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG50F

[L/s

]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 50-100L/min Sf : Volume flow rate of backing pump

TG50F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Sf = 50-100L/min Sf : Volume flow rate of backing pump

Ar

N2

Volu

me

flow

rate

Ar

N2H2

[scc

m]

100

101

102

Thro

ughp

ut

Performance curve

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

104

103

102

101

100

[L/s

]

TG350F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Sf = 160L/min Sf : Volume flow rate of backing pump

N2 Ar

TG350F

Ar

N2

H2

Volu

me

flow

rate

Sf = 160L/min Sf : Volume flow rate of backing pump

[scc

m]

100

101

102

Thro

ughp

ut

Performance curve Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 1000L/min Sf : Volume flow rate of backing pump

TG2400F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

ArN2

H2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Ar

Ar

N2

N2

TG2400F

Sf = 1000L/min Sf = 1000L/min

TG2400F TG2400F-40

Sf:Volume flow rate of backing pump

Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

TG800F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2

Ar

N2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

TG800F

Ar

Ar

N2

N2

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Ar N2

N2

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

TG1100F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2

Ar

N2

TG1100F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

TG50F

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Drawing of Outside dimension

AB

C

D

CF63ISO-R63

VG65 14

1218

A B C147

168182

Dφ145φ114φ95

CF63ISO-R63

VG65 14

1218

A B C147

168182

Dφ145φ114φ95

Water cooling

Air cooling

φ113

69.5

47.5

54

62

70

34.5

ISO-Rc1/8

22.5

15

Connector

4-M6 DP13 PCD78

KF16

32

φ11

3

Cooling water Inlet/Outlet

※1：In case of the backing vacuum pump of 100L/min.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush ※Air inrush test (continual 400 times)

■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

TG220F TG350F

TG450F TG800F TG1100FTG1400F

TG2400F

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard setPump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for gas inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL/SEMI-S2/CE

CF160ISO-B160

VG150 12

1222

A B C312.5

312.5327.5

Dφ235φ203φ225

CF160ISO-B160

VG150 12

1222

A B C312.5

312.5327.5

Dφ235φ203φ225

AB

C

D

136

PCD140

φ250

145

80

φ165

ISO-Rc1/4

68

KF40

4-M16 DP25

Connector Cooling water Inlet/Outlet

Vent portPurge gasInlet ISO-G1/4

ISO-G1/4

φ20

0

47.5

AB

C

D

CF100ISO-R100

VG100 15

1221

A B C200

200220

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C200

200220

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C230

214230

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C230

214230

Dφ185φ152φ130

AB

CF200ISO-B200

VG200 16

1625

A B C281

281306

Dφ300φ253φ285

CF200ISO-B200

VG200 16

1625

A B C281

281306

D

AB

C

D

φ300φ253φ285

□120

47.5

C

D

47.5

Air cooling fan

φ250

136

145

PCD140

~167

φ165

φ200

4-M16 DP25

Connector

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4

KF40

CF200ISO-B200

VG200 16

1625

A B C272

300319

Dφ300φ253φ285

CF200ISO-B200

VG200 16

1625

A B C272

300319

D

B

C

D

φ300φ253φ285

AB

AB

TG2400F-40

136

PCD140~167

145□120

φ250

φ165

φ2004-M16 DP25

Connector

KF40

Vent portPurge gas

Air cooling fanInlet ISO-G1/4

ISO-G1/4

47.5

47.5

φ310

186

φ28

6

181

□12

0

35ﾟ

PCD255202

95.5

47.5

6-M16 DP25

KF40

ConnectorAir cooling fan

Purge gasInlet ISO-G1/4

ISO-G1/4 Connector

φ310

186

181

47.5

95.5

35ﾟ

PCD255

54

200 6-M16 DP25

KF40

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4Cooling water Inlet/Outlet Connector

ISO-Rc1/4

CF160ISO-B160

VG150 16

1622

190

190190

A B Cφ235φ203φ225

D

CF160ISO-B160

VG150 16

1622

190

190190

A B Cφ235φ203φ225

D

47.5

φ250

136

145PCD140

68

47.5

ISO-Rc1/4

80φ165

KF40

Connector

4-M16 DP25

Cooling water Inlet/Outlet

Vent portPurge gasInlet ISO-G1/4

ISO-G1/4

φ200

47.5

AB

C

D

136

145

～16

7

φ165

47.5

PCD140

φ200

φ280φ245.5 KF40

4-M16 DP25

ConnectorVent port

Purge gas

Air cooling fan

Inlet ISO-G1/4

ISO-G1/4

□120

47.5

136

145

φ165

PCD140

φ200

φ280

80 ISO-Rc1/4

68

47.5

φ245.5KF40

4-M16 DP25

Connector

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4Cooling water Inlet/Outlet

A

47.5

C

D

φ28

6

ISO-B250VG250

A Bφ350φ335

1616

340340

C D

ISO-B250VG250

A Bφ350φ335

1616

340340

C D

C

D

250

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Specifications

Drawing of Outside dimensionPerformance curveDrawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

※1：In case of the backing vacuum pump of 160L/min. ※1：In case of the backing vacuum pump of 500L/min. ※2：Depends on the power supply model. (standard：TC1104)※3：△◇ cf. p17

※1：In case of the backing vacuum pump of 500L/min.

※1：In case of the backing vacuum pump of 1000L/min. ※2：Depends on the power supply model.

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

※1：In case of the backing vacuum pump of 500L/min. ※2：Depends on the power supply model. (standard：TC1104)※3：△◇ cf. p17

■Any orientation ■Compact size■Energy-saving■Quick shut down with gas vent■Durable structure for air inrush■Built-in controller type■High compression ratio

TG240FDrawing of Outside dimension

Built-in controller type

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.

Pump + Connector for controller◆OptionAir-cooling fan unit, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve,Flanges and Fittings

●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.

15

Pum

ping

Sys

tem

※1：In case of the backing vacuum pump of 80L/min. ※2：TC245 is a built-in controller,TC246 is rack controller.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

Power/Control

100

70

138

45ﾟISO-G1/8

ISO-G1/8

50.5

124

φ154

115

Vent Port

Purge Port

33

94

□60

34

194.

216

6.2

73.5

ConnectorController

φ1544×M8 DP12 PCD140

KF25

ISO-R100

Power/Control

100

21

70

138

45ﾟISO-G1/8

ISO-G1/8

50.5

124

φ152

φ154

115

Vent Port

Purge Port

33

94

□60

34

233.

716

6.2

113Connector

Controller

φ1544×M8 DP12 PCD140

KF25

CF100

CF flange

ISO-R flange

14

Pumping System

Osaka Vacuum, Ltd.

● The TMP pumping system where a number of pieces　 of equipment※1 necessary for high vacuum are　 compactly arranged. It can pump up to high vacuum　 with a simple operation!

● Since it has casters, it can be easily moved to the　 desired place for use.

● Mounted with a turbo molecular pump from the TG-F　 series which is resistant to disturbance! 　 (The pump can be moved while it is operating.)

◆ Line-up of basic sets (three models) in which a turbo　 molecular pump with pumping speed of 50 to 350 L/s is　 mounted.

※1: Turbo molecular pump, backing pump, vacuum piping,　 automatic slow leak valve, control unit(Optional devices and apparatuses are available to match your needs.)

※2：Figures in parentheses show the pumping speed of pumps with a screen.

ModelTMP

Inlet Flange

Backing pump

ST

CRV

：TMP pumping system

：CF：ISO-R：VG

ST220FV0501

12

3

4

2 3 4

Standard Specifications

TMPVolume flow rate N2（L/s）Base pressureInlet FlangeCooling typeVoltage

Model ST050FTG50F　51(49)※2

＜3×10-6Pa（＜2.3×10-8Torr）VG65 / ISO-R63 / CF63

TG220F　220(210)※2

Air CoolingSingle-phase、AC100V

TG350F　350(330)※2

ST220F ST350F

＜1×10-6Pa（＜7.5×10-9Torr）VG100 / ISO-R100 / CF100

ST Series

ST Series

◆ Most compact type among the ST Series! Further　 space saving is achieved with its desktop size!ST-Compact

Introduction of the TMP pumping system

AB

C

D

φ113

95 69.5

34.5

□92

47.5

Connector

Air cooling fan

4-M6 DP13 PCD78

KF16

32

φ11

3

VG65 CF63

64.2

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-R63KF16

514912

1.4×107

5×102

＜ 3×10-6（＜ 2.3×10-8）80

1-1.51-1.5

1330（10）≧ 50

TC64

AB

C

D

33ﾟ

76 57

ISO-G1/4

Inlet ISO-G1/4

φ130

Connector

Vent port

Purge gas

4-M8 DP12 PCD78

φ130

42.5

54.5

KF25

Air cooling fan

105

□92

AB

C

Dφ130

Inlet ISO-G1/4

5776

33ﾟ

60

Connector

4-M8 DP12 PCD78Cooling water Inlet/Outlet ISO-Rc1/8

Vent portISO-G1/4

Purge gas

φ130

42.5

54.5

KF25

AB

C

D

33ﾟ

φ168

76 57ISO-G1/4

Inlet ISO-G1/4

42.5

54.5Connector

Vent port

Purge gas

4-M8 DP12 PCD78

φ130

KF25

Air cooling fan

105

□92

AB

C

Dφ168

76 57

33ﾟ

ISO-G1/4

Inlet ISO-G1/4

ISO-Rc1/8

60

42.5

54.5

Connector

Vent port

Purge gas

4-M8 DP12 PCD78 φ130

Cooling water Inlet/Outlet

KF25

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-R100KF25

2101×108

2×103

＜ 1×10-6（＜ 7.5×10-9）500

2-2.55-6.5

260（2）≧ 80

TC353

VG100

350330

6

CF100

9

330310

※1：In case of the backing vacuum pump of 160L/min

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

AB

C

D

33ﾟ

φ168

76

□92

57ISO-G1/4

Inlet ISO-G1/4

KF25

42.5

54.5

Connector Vent port

Purge gas

4-M8 DP12 PCD78

φ130

Air cooling fan

76 57

33ﾟ

ISO-G1/4

Inlet ISO-G1/4

ISO-Rc1/8

60

φ168

ConnectorVent port

Purge gas

4-M8 DP12 PCD78 φ130

Cooling water Inlet/Outlet

KF25

42.5

54.5

AB

C

D

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-B160KF25450430240

1×108

2×103

＜ 1×10-6（＜ 7.5×10-9）500

2-2.55-6.5

260（2）≧ 80

TC353

VG150 CF160Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

7 10

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup time※2

Shutdown time※2

Max. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

VG,ISO-B/CF kg

VG150、ISO-B160、CF160KF40820750650

1×108

1×104

330（2.5）≧ 250

3307-9

27-32

TC1104

8605.5-712-15

TC1103

TG800F TG800F

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup time※2

Shutdown time※2

Max. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

VG,ISO-B/CF kg

VG200、ISO-B200、CF200KF4011001000720

1×108

1×104

330（2.5）≧ 25028/27

3307-9

27-32

TC1104

8605.5-712-15

TC1103

TG1100F TG1100FInletOutletN2

N2 (with protective screen)H2

N2

H2

N2

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

＜ 1×10-6（＜ 7.5×10-9）

△A◇-60△W◇

＜ 1×10-6（＜ 7.5×10-9）

△A◇-60△W◇

27/26

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

VG250、ISO-B250KF40240023001100

1×108

1.4×103

＜ 1×10-6（＜ 7.5×10-9）

5-715-18

200（1.5）≧ 50045 / 47

900

TC2403

1500

TC2403-10

TG2400F TG2400F-40InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Air / Water

※1 cf. P17※2 Input connecter:1/Remote connector:1/Instruction manual:1copy

TC64 / TC223 / TC353 / TC1104（Panel cut：128H×104W）

TC1103 / TC2403 / TC2403-10 / TC2413 / TC2414 / TC2415（Panel cut：124H×203W）

TC76 / TC246（Panel cut：128H×103.5W）

Power Supply

209

157.526

139

149

5

400

20

4-φ5

2.3

START

F2F1 F3

OSAKA VACUUM,LTD.

STOP/RESET

POWER SUPPLY

150Space for cable

connections

100

20

POWER SUPPLY

OSAKA VACUUM,LTD.

START

F2F1 F3

STOP/RESET

149

513

9

104.5 250

1.62-φ5Space for cable

connections

■Any orientation ■Compact size■Energy saveing ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■High gas throughput

TG2410F

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

ISO-B250VG250 16

16

A B C363363

Dφ350φ335

TG2410F

TG2410F-40

Drawing of Outside dimension

●The inlet flange bolt holes are symmetrical around the center line.

※1：Depends on the power supply model. Please contact us about the Air cooling type.※2：In case of the backing pump of 2000L/min.

ISO-B250VG250 16

16

A B C363363

Dφ350φ335

※This dimensional drawings corresrond to 　TG240F(built-in controller type). 　In the case of TG240F-20, its controller is separated out.

Specifications

※1：In case of the backing vacuum pump of 160L/min.

※Please contact us about the Air cooling type.

100-110/200-230(±10%)

2.7

750

220

800

TC64 TC223 TC353

Input connector: 1 / Remote connector: 1 / Serial communication connector: 1 / Instruction manual: 1 copy / Serial communication instruction manual: 1 copy ※2

TC1104 TC1103 TC2403 / TC2403-10 TC76TC2413 TC2414 TC2415 TC246

50/60

Single

560 520

8.2 2.4

200-230(±10%) 100-230(±10%)

590 610 1200 1400 1200

450

160

1500

120

800

810

Power supply model

Input Voltage

Input Frequency

Input Phases

Input Power

Rated Output Frequency

Weight

Standard accessories

Applicable pump models

（ACV）

（Hz）

（VA）

（Hz）

（kg）

TG50F TG220F TG70F-20TG2410F TG2410F-40 TG240F-20TG2400FTG2400F-40

TG350FTG450F

TG800FTG1100F

TG1400FTG800FTG1100F

△A◇-60△W◇△A◇-60△W◇

※1

Applicable pump models

※Standard backing pump is a Rotary vacuum pump of 50/60L/min. (50/60Hz)

85.5

ISO-R100KF25220210100

1×108

4×102

＜ 1×10-6（＜ 7.5×10-9）400

1-1.22.5-3.5

260（2）≧ 80

TC223

VG100 CF100

T7.3TC245DC24V

75W

T10.5TC246

AC100-230V （±10%）120VA

OSAKA VACUUM,LTD.

POWER

ACCELERATION

NORMAL

FAILURE

START STOP/RESETREMOTE

LOCAL

TURBO CONTROLLER

104.5

149

139

20

250

2×φ5

100Space for cable

connections

Specifications

L/sL/sL/s

ISO-R/CF PaISO-R/CF Torr

sccmmin

Pa（Torr）L/min

kg

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1

Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2

Input VoltageInput Power

TG240F

7.3TC245DC24V

75W

TG240F-20

10.5TC246

AC100-230V （±10%）120VA

ISO-R100/CF100KF25240230160

1×108

4×104

＜ 1×10-6 / ＜ 5×10-7

＜ 7.5×10-9 / ＜ 3.8×10-9

705.5-7.5

700（5.3）≧ 80

Specifications

High gasthroughput

TC2414VG250/ISO-B250

KF40

＜5×10-7

＜3.8×10-9

25005-7

≧ 1000

220020001700

1×108

9000

350(2.6)

TG2410F

normal

TC2413

1800

51

TG2410F-40

52

Ultra high gasthroughput

TC2415

200018001250

9×107

2000

3500

270(2.0)

L/sL/sL/s

PaTorr

sccmmin

Pa（Torr）L/min

kg

N2

N2 (with protective screen)H2

N2

H2

N2

InletOutlet

Model※1

Power Supply

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1※2

Startup timeMax.backing vacuum pumpRecommended backing vacuum pumpWeight

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

Compound Molecular Pumps

Specifications

Standard set

5

Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

7

Compound Molecular Pumps Compound Molecular Pumps

Compound Molecular Pumps Compound Molecular Pumps Compound Molecular Pumps

1213 6

Compound Molecular Pumps

Compound Molecular Pumps

9 1011 8

Osaka Vacuum, Ltd.

Turb

o Co

ntro

ller Turbo M

olecular Pumps

Compound Molecular Pumps

4

Osaka Vacuum, Ltd.

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.Tu

rbo

Mol

ecul

ar P

umps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd.

Compound Molecular Pumps

Osaka Vacuum, Ltd.

Water cooling

Air cooling

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-B200KF4014001300750

1×108

4.3×103

＜ 1×10-6（＜ 7.5×10-9）450

5.5-715-18

330（2.5）≧ 250

TC1103

VG200 CF200

29 30

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

VG250、ISO-B250KF40240023001100

1×108

1.4×103

＜ 1×10-6（＜ 7.5×10-9）

5-715-18

200（1.5）≧ 50045 / 47

900

TC2403

1500

TC2403-10

TG2400F TG2400F-40inletoutletN2

N2 (with protective screen)H2

N2

H2

N2

空冷 / 水冷

Inlet pressure

Performance curve

100

101

102

103

[Pa･

L/s]

N2

H2

TG240F

Inlet pressure[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

10-110-1

100

101

102

[scc

m]

Thro

ughp

ut

Gas throughputVolume flow rate

[L/s

]

103

102

101

100

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

Sf＞ 80L/min Sf : Volume flow rate of backing pump

TG240F

Inlet pressure

TG240F

ArN2

H2

Volu

me

flow

rate

Sf ＞ 80L/min Sf : Volume flow rate of backing pump

[Torr]

[Pa]10-1 100 101 102

10-3 10-2 10-1

[Pa･

L/s]

104

103

102

101

TG2410F N2 Standard

High gas throughput

Ultra high gas throughput

StandardHigh gas throughputUltra high gas throughput

*Backing vacuum pump speed:2,000L/min

StandardHigh gas throughput

[Pa･

L/s]

Volu

me

flow

rate

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG2410F N2

StandardHigh gas throughputUltra high gas throughput

*Backing vacuum pump speed:2,000L/min

Ultra high gas throughput

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[scc

m]

101

102

103

Thro

ughp

ut

Performance curve

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[L/s

]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 160L/min Sf : Volume flow rate of backing pump

TG220F

Ar

N2H2

Volu

me

flow

rate [P

a･L/

s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 160L/min Sf : Volume flow rate of backing pump

TG220FN2

Ar[scc

m]

100

101

102

Thro

ughp

ut

Performance curve

Performance curve

Ar

H2

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 500L/min Sf : Volume flow rate of backing pump

TG1400F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Ar

N2

Sf = 500L/min Sf : Volume flow rate of backing pump

TG1400F

N2

Performance curve

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

100

101

102

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 160L/min Sf : Volume flow rate of backing pump

TG450F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2H2

TG450F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Ar

N2

Sf = 160L/min Sf : Volume flow rate of backing pump

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG50F

[L/s

]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 50-100L/min Sf : Volume flow rate of backing pump

TG50F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Sf = 50-100L/min Sf : Volume flow rate of backing pump

Ar

N2

Volu

me

flow

rate

Ar

N2H2

[scc

m]

100

101

102

Thro

ughp

ut

Performance curve

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

104

103

102

101

100

[L/s

]

TG350F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Sf = 160L/min Sf : Volume flow rate of backing pump

N2 Ar

TG350F

Ar

N2

H2

Volu

me

flow

rate

Sf = 160L/min Sf : Volume flow rate of backing pump

[scc

m]

100

101

102

Thro

ughp

ut

Performance curve Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 1000L/min Sf : Volume flow rate of backing pump

TG2400F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

ArN2

H2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Ar

Ar

N2

N2

TG2400F

Sf = 1000L/min Sf = 1000L/min

TG2400F TG2400F-40

Sf:Volume flow rate of backing pump

Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

TG800F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2

Ar

N2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

TG800F

Ar

Ar

N2

N2

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Ar N2

N2

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

TG1100F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2

Ar

N2

TG1100F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

TG50F

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Drawing of Outside dimension

AB

C

D

CF63ISO-R63

VG65 14

1218

A B C147

168182

Dφ145φ114φ95

CF63ISO-R63

VG65 14

1218

A B C147

168182

Dφ145φ114φ95

Water cooling

Air cooling

φ113

69.5

47.5

54

62

70

34.5

ISO-Rc1/8

22.5

15

Connector

4-M6 DP13 PCD78

KF16

32

φ11

3

Cooling water Inlet/Outlet

※1：In case of the backing vacuum pump of 100L/min.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush ※Air inrush test (continual 400 times)

■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

TG220F TG350F

TG450F TG800F TG1100FTG1400F

TG2400F

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard setPump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for gas inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL/SEMI-S2/CE

CF160ISO-B160

VG150 12

1222

A B C312.5

312.5327.5

Dφ235φ203φ225

CF160ISO-B160

VG150 12

1222

A B C312.5

312.5327.5

Dφ235φ203φ225

AB

C

D

136

PCD140

φ250

145

80

φ165

ISO-Rc1/4

68

KF40

4-M16 DP25

Connector Cooling water Inlet/Outlet

Vent portPurge gasInlet ISO-G1/4

ISO-G1/4

φ20

0

47.5

AB

C

D

CF100ISO-R100

VG100 15

1221

A B C200

200220

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C200

200220

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C230

214230

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C230

214230

Dφ185φ152φ130

AB

CF200ISO-B200

VG200 16

1625

A B C281

281306

Dφ300φ253φ285

CF200ISO-B200

VG200 16

1625

A B C281

281306

D

AB

C

D

φ300φ253φ285

□120

47.5

C

D

47.5

Air cooling fan

φ250

136

145

PCD140

~167

φ165

φ200

4-M16 DP25

Connector

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4

KF40

CF200ISO-B200

VG200 16

1625

A B C272

300319

Dφ300φ253φ285

CF200ISO-B200

VG200 16

1625

A B C272

300319

D

B

C

D

φ300φ253φ285

AB

AB

TG2400F-40

136

PCD140~167

145□120

φ250

φ165

φ2004-M16 DP25

Connector

KF40

Vent portPurge gas

Air cooling fanInlet ISO-G1/4

ISO-G1/4

47.5

47.5

φ310

186

φ28

6

181

□12

0

35ﾟ

PCD255202

95.5

47.5

6-M16 DP25

KF40

ConnectorAir cooling fan

Purge gasInlet ISO-G1/4

ISO-G1/4 Connector

φ310

186

181

47.5

95.5

35ﾟ

PCD255

54

200 6-M16 DP25

KF40

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4Cooling water Inlet/Outlet Connector

ISO-Rc1/4

CF160ISO-B160

VG150 16

1622

190

190190

A B Cφ235φ203φ225

D

CF160ISO-B160

VG150 16

1622

190

190190

A B Cφ235φ203φ225

D

47.5

φ250

136

145PCD140

68

47.5

ISO-Rc1/4

80φ165

KF40

Connector

4-M16 DP25

Cooling water Inlet/Outlet

Vent portPurge gasInlet ISO-G1/4

ISO-G1/4

φ200

47.5

AB

C

D

136

145

～16

7

φ165

47.5

PCD140

φ200

φ280φ245.5 KF40

4-M16 DP25

ConnectorVent port

Purge gas

Air cooling fan

Inlet ISO-G1/4

ISO-G1/4

□120

47.5

136

145

φ165

PCD140

φ200

φ280

80 ISO-Rc1/4

68

47.5

φ245.5KF40

4-M16 DP25

Connector

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4Cooling water Inlet/Outlet

A

47.5

C

D

φ28

6

ISO-B250VG250

A Bφ350φ335

1616

340340

C D

ISO-B250VG250

A Bφ350φ335

1616

340340

C D

C

D

250

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Specifications

Drawing of Outside dimensionPerformance curveDrawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

※1：In case of the backing vacuum pump of 160L/min. ※1：In case of the backing vacuum pump of 500L/min. ※2：Depends on the power supply model. (standard：TC1104)※3：△◇ cf. p17

※1：In case of the backing vacuum pump of 500L/min.

※1：In case of the backing vacuum pump of 1000L/min. ※2：Depends on the power supply model.

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

※1：In case of the backing vacuum pump of 500L/min. ※2：Depends on the power supply model. (standard：TC1104)※3：△◇ cf. p17

■Any orientation ■Compact size■Energy-saving■Quick shut down with gas vent■Durable structure for air inrush■Built-in controller type■High compression ratio

TG240FDrawing of Outside dimension

Built-in controller type

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.

Pump + Connector for controller◆OptionAir-cooling fan unit, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve,Flanges and Fittings

●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.

15

Pum

ping

Sys

tem

※1：In case of the backing vacuum pump of 80L/min. ※2：TC245 is a built-in controller,TC246 is rack controller.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

Power/Control

100

70

138

45ﾟISO-G1/8

ISO-G1/8

50.5

124

φ154

115

Vent Port

Purge Port

33

94

□60

34

194.

216

6.2

73.5

ConnectorController

φ1544×M8 DP12 PCD140

KF25

ISO-R100

Power/Control

100

21

70

138

45ﾟISO-G1/8

ISO-G1/8

50.5

124

φ152

φ154

115

Vent Port

Purge Port

33

94

□60

34

233.

716

6.2

113Connector

Controller

φ1544×M8 DP12 PCD140

KF25

CF100

CF flange

ISO-R flange

14

Pumping System

Osaka Vacuum, Ltd.

● The TMP pumping system where a number of pieces　 of equipment※1 necessary for high vacuum are　 compactly arranged. It can pump up to high vacuum　 with a simple operation!

● Since it has casters, it can be easily moved to the　 desired place for use.

● Mounted with a turbo molecular pump from the TG-F　 series which is resistant to disturbance! 　 (The pump can be moved while it is operating.)

◆ Line-up of basic sets (three models) in which a turbo　 molecular pump with pumping speed of 50 to 350 L/s is　 mounted.

※1: Turbo molecular pump, backing pump, vacuum piping,　 automatic slow leak valve, control unit(Optional devices and apparatuses are available to match your needs.)

※2：Figures in parentheses show the pumping speed of pumps with a screen.

ModelTMP

Inlet Flange

Backing pump

ST

CRV

：TMP pumping system

：CF：ISO-R：VG

ST220FV0501

12

3

4

2 3 4

Standard Specifications

TMPVolume flow rate N2（L/s）Base pressureInlet FlangeCooling typeVoltage

Model ST050FTG50F　51(49)※2

＜3×10-6Pa（＜2.3×10-8Torr）VG65 / ISO-R63 / CF63

TG220F　220(210)※2

Air CoolingSingle-phase、AC100V

TG350F　350(330)※2

ST220F ST350F

＜1×10-6Pa（＜7.5×10-9Torr）VG100 / ISO-R100 / CF100

ST Series

ST Series

◆ Most compact type among the ST Series! Further　 space saving is achieved with its desktop size!ST-Compact

Introduction of the TMP pumping system

AB

C

D

φ113

95 69.5

34.5

□92

47.5

Connector

Air cooling fan

4-M6 DP13 PCD78

KF16

32

φ11

3

VG65 CF63

64.2

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-R63KF16

514912

1.4×107

5×102

＜ 3×10-6（＜ 2.3×10-8）80

1-1.51-1.5

1330（10）≧ 50

TC64

AB

C

D

33ﾟ

76 57

ISO-G1/4

Inlet ISO-G1/4

φ130

Connector

Vent port

Purge gas

4-M8 DP12 PCD78

φ130

42.5

54.5

KF25

Air cooling fan

105

□92

AB

C

Dφ130

Inlet ISO-G1/4

5776

33ﾟ

60

Connector

4-M8 DP12 PCD78Cooling water Inlet/Outlet ISO-Rc1/8

Vent portISO-G1/4

Purge gas

φ130

42.5

54.5

KF25

AB

C

D

33ﾟ

φ168

76 57ISO-G1/4

Inlet ISO-G1/4

42.5

54.5Connector

Vent port

Purge gas

4-M8 DP12 PCD78

φ130

KF25

Air cooling fan

105

□92

AB

C

Dφ168

76 57

33ﾟ

ISO-G1/4

Inlet ISO-G1/4

ISO-Rc1/8

60

42.5

54.5

Connector

Vent port

Purge gas

4-M8 DP12 PCD78 φ130

Cooling water Inlet/Outlet

KF25

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-R100KF25

2101×108

2×103

＜ 1×10-6（＜ 7.5×10-9）500

2-2.55-6.5

260（2）≧ 80

TC353

VG100

350330

6

CF100

9

330310

※1：In case of the backing vacuum pump of 160L/min

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

AB

C

D

33ﾟ

φ168

76

□92

57ISO-G1/4

Inlet ISO-G1/4

KF25

42.5

54.5

Connector Vent port

Purge gas

4-M8 DP12 PCD78

φ130

Air cooling fan

76 57

33ﾟ

ISO-G1/4

Inlet ISO-G1/4

ISO-Rc1/8

60

φ168

ConnectorVent port

Purge gas

4-M8 DP12 PCD78 φ130

Cooling water Inlet/Outlet

KF25

42.5

54.5

AB

C

D

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-B160KF25450430240

1×108

2×103

＜ 1×10-6（＜ 7.5×10-9）500

2-2.55-6.5

260（2）≧ 80

TC353

VG150 CF160Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

7 10

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup time※2

Shutdown time※2

Max. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

VG,ISO-B/CF kg

VG150、ISO-B160、CF160KF40820750650

1×108

1×104

330（2.5）≧ 250

3307-9

27-32

TC1104

8605.5-712-15

TC1103

TG800F TG800F

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup time※2

Shutdown time※2

Max. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

VG,ISO-B/CF kg

VG200、ISO-B200、CF200KF4011001000720

1×108

1×104

330（2.5）≧ 25028/27

3307-9

27-32

TC1104

8605.5-712-15

TC1103

TG1100F TG1100FInletOutletN2

N2 (with protective screen)H2

N2

H2

N2

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

＜ 1×10-6（＜ 7.5×10-9）

△A◇-60△W◇

＜ 1×10-6（＜ 7.5×10-9）

△A◇-60△W◇

27/26

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

VG250、ISO-B250KF40240023001100

1×108

1.4×103

＜ 1×10-6（＜ 7.5×10-9）

5-715-18

200（1.5）≧ 50045 / 47

900

TC2403

1500

TC2403-10

TG2400F TG2400F-40InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Air / Water

※1 cf. P17※2 Input connecter:1/Remote connector:1/Instruction manual:1copy

TC64 / TC223 / TC353 / TC1104（Panel cut：128H×104W）

TC1103 / TC2403 / TC2403-10 / TC2413 / TC2414 / TC2415（Panel cut：124H×203W）

TC76 / TC246（Panel cut：128H×103.5W）

Power Supply

209

157.526

139

149

5

400

20

4-φ5

2.3

START

F2F1 F3

OSAKA VACUUM,LTD.

STOP/RESET

POWER SUPPLY

150Space for cable

connections

100

20

POWER SUPPLY

OSAKA VACUUM,LTD.

START

F2F1 F3

STOP/RESET

149

513

9

104.5 250

1.62-φ5Space for cable

connections

■Any orientation ■Compact size■Energy saveing ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■High gas throughput

TG2410F

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

ISO-B250VG250 16

16

A B C363363

Dφ350φ335

TG2410F

TG2410F-40

Drawing of Outside dimension

●The inlet flange bolt holes are symmetrical around the center line.

※1：Depends on the power supply model. Please contact us about the Air cooling type.※2：In case of the backing pump of 2000L/min.

ISO-B250VG250 16

16

A B C363363

Dφ350φ335

※This dimensional drawings corresrond to 　TG240F(built-in controller type). 　In the case of TG240F-20, its controller is separated out.

Specifications

※1：In case of the backing vacuum pump of 160L/min.

※Please contact us about the Air cooling type.

100-110/200-230(±10%)

2.7

750

220

800

TC64 TC223 TC353

Input connector: 1 / Remote connector: 1 / Serial communication connector: 1 / Instruction manual: 1 copy / Serial communication instruction manual: 1 copy ※2

TC1104 TC1103 TC2403 / TC2403-10 TC76TC2413 TC2414 TC2415 TC246

50/60

Single

560 520

8.2 2.4

200-230(±10%) 100-230(±10%)

590 610 1200 1400 1200

450

160

1500

120

800

810

Power supply model

Input Voltage

Input Frequency

Input Phases

Input Power

Rated Output Frequency

Weight

Standard accessories

Applicable pump models

（ACV）

（Hz）

（VA）

（Hz）

（kg）

TG50F TG220F TG70F-20TG2410F TG2410F-40 TG240F-20TG2400FTG2400F-40

TG350FTG450F

TG800FTG1100F

TG1400FTG800FTG1100F

△A◇-60△W◇△A◇-60△W◇

※1

Applicable pump models

※Standard backing pump is a Rotary vacuum pump of 50/60L/min. (50/60Hz)

85.5

ISO-R100KF25220210100

1×108

4×102

＜ 1×10-6（＜ 7.5×10-9）400

1-1.22.5-3.5

260（2）≧ 80

TC223

VG100 CF100

T7.3TC245DC24V

75W

T10.5TC246

AC100-230V （±10%）120VA

OSAKA VACUUM,LTD.

POWER

ACCELERATION

NORMAL

FAILURE

START STOP/RESETREMOTE

LOCAL

TURBO CONTROLLER

104.5

149

139

20

250

2×φ5

100Space for cable

connections

Specifications

L/sL/sL/s

ISO-R/CF PaISO-R/CF Torr

sccmmin

Pa（Torr）L/min

kg

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1

Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2

Input VoltageInput Power

TG240F

7.3TC245DC24V

75W

TG240F-20

10.5TC246

AC100-230V （±10%）120VA

ISO-R100/CF100KF25240230160

1×108

4×104

＜ 1×10-6 / ＜ 5×10-7

＜ 7.5×10-9 / ＜ 3.8×10-9

705.5-7.5

700（5.3）≧ 80

Specifications

High gasthroughput

TC2414VG250/ISO-B250

KF40

＜5×10-7

＜3.8×10-9

25005-7

≧ 1000

220020001700

1×108

9000

350(2.6)

TG2410F

normal

TC2413

1800

51

TG2410F-40

52

Ultra high gasthroughput

TC2415

200018001250

9×107

2000

3500

270(2.0)

L/sL/sL/s

PaTorr

sccmmin

Pa（Torr）L/min

kg

N2

N2 (with protective screen)H2

N2

H2

N2

InletOutlet

Model※1

Power Supply

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1※2

Startup timeMax.backing vacuum pumpRecommended backing vacuum pumpWeight

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

Compound Molecular Pumps

Specifications

Standard set

5

Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

7

Compound Molecular Pumps Compound Molecular Pumps

Compound Molecular Pumps Compound Molecular Pumps Compound Molecular Pumps

1213 6

Compound Molecular Pumps

Compound Molecular Pumps

9 1011 8

Osaka Vacuum, Ltd.

Turb

o Co

ntro

ller Turbo M

olecular Pumps

Compound Molecular Pumps

4

Osaka Vacuum, Ltd.

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

psOsaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd.

Compound Molecular Pumps

Osaka Vacuum, Ltd.

Water cooling

Air cooling

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-B200KF4014001300750

1×108

4.3×103

＜ 1×10-6（＜ 7.5×10-9）450

5.5-715-18

330（2.5）≧ 250

TC1103

VG200 CF200

29 30

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

VG250、ISO-B250KF40240023001100

1×108

1.4×103

＜ 1×10-6（＜ 7.5×10-9）

5-715-18

200（1.5）≧ 50045 / 47

900

TC2403

1500

TC2403-10

TG2400F TG2400F-40inletoutletN2

N2 (with protective screen)H2

N2

H2

N2

空冷 / 水冷

Inlet pressure

Performance curve

100

101

102

103

[Pa･

L/s]

N2

H2

TG240F

Inlet pressure[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

10-110-1

100

101

102

[scc

m]

Thro

ughp

ut

Gas throughputVolume flow rate

[L/s

]

103

102

101

100

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

Sf＞ 80L/min Sf : Volume flow rate of backing pump

TG240F

Inlet pressure

TG240F

ArN2

H2

Volu

me

flow

rate

Sf ＞ 80L/min Sf : Volume flow rate of backing pump

[Torr]

[Pa]10-1 100 101 102

10-3 10-2 10-1

[Pa･

L/s]

104

103

102

101

TG2410F N2 Standard

High gas throughput

Ultra high gas throughput

StandardHigh gas throughputUltra high gas throughput

*Backing vacuum pump speed:2,000L/min

StandardHigh gas throughput

[Pa･

L/s]

Volu

me

flow

rate

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG2410F N2

StandardHigh gas throughputUltra high gas throughput

*Backing vacuum pump speed:2,000L/min

Ultra high gas throughput

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[scc

m]

101

102

103

Thro

ughp

ut

Performance curve

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[L/s

]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 160L/min Sf : Volume flow rate of backing pump

TG220F

Ar

N2H2

Volu

me

flow

rate [P

a･L/

s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 160L/min Sf : Volume flow rate of backing pump

TG220FN2

Ar[scc

m]

100

101

102

Thro

ughp

ut

Performance curve

Performance curve

Ar

H2

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 500L/min Sf : Volume flow rate of backing pump

TG1400F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Ar

N2

Sf = 500L/min Sf : Volume flow rate of backing pump

TG1400F

N2

Performance curve

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

100

101

102

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 160L/min Sf : Volume flow rate of backing pump

TG450F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2H2

TG450F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Ar

N2

Sf = 160L/min Sf : Volume flow rate of backing pump

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG50F

[L/s

]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 50-100L/min Sf : Volume flow rate of backing pump

TG50F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Sf = 50-100L/min Sf : Volume flow rate of backing pump

Ar

N2

Volu

me

flow

rate

Ar

N2H2

[scc

m]

100

101

102

Thro

ughp

ut

Performance curve

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

104

103

102

101

100

[L/s

]

TG350F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Sf = 160L/min Sf : Volume flow rate of backing pump

N2 Ar

TG350F

Ar

N2

H2

Volu

me

flow

rate

Sf = 160L/min Sf : Volume flow rate of backing pump

[scc

m]

100

101

102

Thro

ughp

ut

Performance curve Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 1000L/min Sf : Volume flow rate of backing pump

TG2400F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

ArN2

H2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Ar

Ar

N2

N2

TG2400F

Sf = 1000L/min Sf = 1000L/min

TG2400F TG2400F-40

Sf:Volume flow rate of backing pump

Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

TG800F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2

Ar

N2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

TG800F

Ar

Ar

N2

N2

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Ar N2

N2

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

TG1100F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2

Ar

N2

TG1100F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

TG50F

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Drawing of Outside dimension

AB

C

D

CF63ISO-R63

VG65 14

1218

A B C147

168182

Dφ145φ114φ95

CF63ISO-R63

VG65 14

1218

A B C147

168182

Dφ145φ114φ95

Water cooling

Air cooling

φ113

69.5

47.5

54

62

70

34.5

ISO-Rc1/8

22.5

15

Connector

4-M6 DP13 PCD78

KF16

32

φ11

3

Cooling water Inlet/Outlet

※1：In case of the backing vacuum pump of 100L/min.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush ※Air inrush test (continual 400 times)

■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

TG220F TG350F

TG450F TG800F TG1100FTG1400F

TG2400F

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard setPump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for gas inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL/SEMI-S2/CE

CF160ISO-B160

VG150 12

1222

A B C312.5

312.5327.5

Dφ235φ203φ225

CF160ISO-B160

VG150 12

1222

A B C312.5

312.5327.5

Dφ235φ203φ225

AB

C

D

136

PCD140

φ250

145

80

φ165

ISO-Rc1/4

68

KF40

4-M16 DP25

Connector Cooling water Inlet/Outlet

Vent portPurge gasInlet ISO-G1/4

ISO-G1/4

φ20

0

47.5

AB

C

D

CF100ISO-R100

VG100 15

1221

A B C200

200220

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C200

200220

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C230

214230

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C230

214230

Dφ185φ152φ130

AB

CF200ISO-B200

VG200 16

1625

A B C281

281306

Dφ300φ253φ285

CF200ISO-B200

VG200 16

1625

A B C281

281306

D

AB

C

D

φ300φ253φ285

□120

47.5

C

D

47.5

Air cooling fan

φ250

136

145

PCD140

~167

φ165

φ200

4-M16 DP25

Connector

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4

KF40

CF200ISO-B200

VG200 16

1625

A B C272

300319

Dφ300φ253φ285

CF200ISO-B200

VG200 16

1625

A B C272

300319

D

B

C

D

φ300φ253φ285

AB

AB

TG2400F-40

136

PCD140~167

145□120

φ250

φ165

φ2004-M16 DP25

Connector

KF40

Vent portPurge gas

Air cooling fanInlet ISO-G1/4

ISO-G1/4

47.5

47.5

φ310

186

φ28

6

181

□12

0

35ﾟ

PCD255202

95.5

47.5

6-M16 DP25

KF40

ConnectorAir cooling fan

Purge gasInlet ISO-G1/4

ISO-G1/4 Connector

φ310

186

181

47.5

95.5

35ﾟ

PCD255

54

200 6-M16 DP25

KF40

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4Cooling water Inlet/Outlet Connector

ISO-Rc1/4

CF160ISO-B160

VG150 16

1622

190

190190

A B Cφ235φ203φ225

D

CF160ISO-B160

VG150 16

1622

190

190190

A B Cφ235φ203φ225

D

47.5

φ250

136

145PCD140

68

47.5

ISO-Rc1/4

80φ165

KF40

Connector

4-M16 DP25

Cooling water Inlet/Outlet

Vent portPurge gasInlet ISO-G1/4

ISO-G1/4

φ200

47.5

AB

C

D

136

145

～16

7

φ165

47.5

PCD140

φ200

φ280φ245.5 KF40

4-M16 DP25

ConnectorVent port

Purge gas

Air cooling fan

Inlet ISO-G1/4

ISO-G1/4

□120

47.5

136

145

φ165

PCD140

φ200

φ280

80 ISO-Rc1/4

68

47.5

φ245.5KF40

4-M16 DP25

Connector

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4Cooling water Inlet/Outlet

A

47.5

C

D

φ28

6

ISO-B250VG250

A Bφ350φ335

1616

340340

C D

ISO-B250VG250

A Bφ350φ335

1616

340340

C D

C

D

250

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Specifications

Drawing of Outside dimensionPerformance curveDrawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

※1：In case of the backing vacuum pump of 160L/min. ※1：In case of the backing vacuum pump of 500L/min. ※2：Depends on the power supply model. (standard：TC1104)※3：△◇ cf. p17

※1：In case of the backing vacuum pump of 500L/min.

※1：In case of the backing vacuum pump of 1000L/min. ※2：Depends on the power supply model.

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

※1：In case of the backing vacuum pump of 500L/min. ※2：Depends on the power supply model. (standard：TC1104)※3：△◇ cf. p17

■Any orientation ■Compact size■Energy-saving■Quick shut down with gas vent■Durable structure for air inrush■Built-in controller type■High compression ratio

TG240FDrawing of Outside dimension

Built-in controller type

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.

Pump + Connector for controller◆OptionAir-cooling fan unit, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve,Flanges and Fittings

●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.

15

Pum

ping

Sys

tem

※1：In case of the backing vacuum pump of 80L/min. ※2：TC245 is a built-in controller,TC246 is rack controller.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

Power/Control

100

70

138

45ﾟISO-G1/8

ISO-G1/8

50.5

124

φ154

115

Vent Port

Purge Port

33

94

□60

34

194.

216

6.2

73.5

ConnectorController

φ1544×M8 DP12 PCD140

KF25

ISO-R100

Power/Control

100

21

70

138

45ﾟISO-G1/8

ISO-G1/8

50.5

124

φ152

φ154

115

Vent Port

Purge Port

33

94

□60

34

233.

716

6.2

113Connector

Controller

φ1544×M8 DP12 PCD140

KF25

CF100

CF flange

ISO-R flange

14

Pumping System

Osaka Vacuum, Ltd.

● The TMP pumping system where a number of pieces　 of equipment※1 necessary for high vacuum are　 compactly arranged. It can pump up to high vacuum　 with a simple operation!

● Since it has casters, it can be easily moved to the　 desired place for use.

● Mounted with a turbo molecular pump from the TG-F　 series which is resistant to disturbance! 　 (The pump can be moved while it is operating.)

◆ Line-up of basic sets (three models) in which a turbo　 molecular pump with pumping speed of 50 to 350 L/s is　 mounted.

※1: Turbo molecular pump, backing pump, vacuum piping,　 automatic slow leak valve, control unit(Optional devices and apparatuses are available to match your needs.)

※2：Figures in parentheses show the pumping speed of pumps with a screen.

ModelTMP

Inlet Flange

Backing pump

ST

CRV

：TMP pumping system

：CF：ISO-R：VG

ST220FV0501

12

3

4

2 3 4

Standard Specifications

TMPVolume flow rate N2（L/s）Base pressureInlet FlangeCooling typeVoltage

Model ST050FTG50F　51(49)※2

＜3×10-6Pa（＜2.3×10-8Torr）VG65 / ISO-R63 / CF63

TG220F　220(210)※2

Air CoolingSingle-phase、AC100V

TG350F　350(330)※2

ST220F ST350F

＜1×10-6Pa（＜7.5×10-9Torr）VG100 / ISO-R100 / CF100

ST Series

ST Series

◆ Most compact type among the ST Series! Further　 space saving is achieved with its desktop size!ST-Compact

Introduction of the TMP pumping system

AB

C

D

φ113

95 69.5

34.5

□92

47.5

Connector

Air cooling fan

4-M6 DP13 PCD78

KF16

32

φ11

3

VG65 CF63

64.2

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-R63KF16

514912

1.4×107

5×102

＜ 3×10-6（＜ 2.3×10-8）80

1-1.51-1.5

1330（10）≧ 50

TC64

AB

C

D

33ﾟ

76 57

ISO-G1/4

Inlet ISO-G1/4

φ130

Connector

Vent port

Purge gas

4-M8 DP12 PCD78

φ130

42.5

54.5

KF25

Air cooling fan

105

□92

AB

C

Dφ130

Inlet ISO-G1/4

5776

33ﾟ

60

Connector

4-M8 DP12 PCD78Cooling water Inlet/Outlet ISO-Rc1/8

Vent portISO-G1/4

Purge gas

φ130

42.5

54.5

KF25

AB

C

D

33ﾟ

φ168

76 57ISO-G1/4

Inlet ISO-G1/4

42.5

54.5Connector

Vent port

Purge gas

4-M8 DP12 PCD78

φ130

KF25

Air cooling fan

105

□92

AB

C

Dφ168

76 57

33ﾟ

ISO-G1/4

Inlet ISO-G1/4

ISO-Rc1/8

60

42.5

54.5

Connector

Vent port

Purge gas

4-M8 DP12 PCD78 φ130

Cooling water Inlet/Outlet

KF25

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-R100KF25

2101×108

2×103

＜ 1×10-6（＜ 7.5×10-9）500

2-2.55-6.5

260（2）≧ 80

TC353

VG100

350330

6

CF100

9

330310

※1：In case of the backing vacuum pump of 160L/min

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

AB

C

D

33ﾟ

φ168

76

□92

57ISO-G1/4

Inlet ISO-G1/4

KF25

42.5

54.5

Connector Vent port

Purge gas

4-M8 DP12 PCD78

φ130

Air cooling fan

76 57

33ﾟ

ISO-G1/4

Inlet ISO-G1/4

ISO-Rc1/8

60

φ168

ConnectorVent port

Purge gas

4-M8 DP12 PCD78 φ130

Cooling water Inlet/Outlet

KF25

42.5

54.5

AB

C

D

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-B160KF25450430240

1×108

2×103

＜ 1×10-6（＜ 7.5×10-9）500

2-2.55-6.5

260（2）≧ 80

TC353

VG150 CF160Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

7 10

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup time※2

Shutdown time※2

Max. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

VG,ISO-B/CF kg

VG150、ISO-B160、CF160KF40820750650

1×108

1×104

330（2.5）≧ 250

3307-9

27-32

TC1104

8605.5-712-15

TC1103

TG800F TG800F

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup time※2

Shutdown time※2

Max. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

VG,ISO-B/CF kg

VG200、ISO-B200、CF200KF4011001000720

1×108

1×104

330（2.5）≧ 25028/27

3307-9

27-32

TC1104

8605.5-712-15

TC1103

TG1100F TG1100FInletOutletN2

N2 (with protective screen)H2

N2

H2

N2

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

＜ 1×10-6（＜ 7.5×10-9）

△A◇-60△W◇

＜ 1×10-6（＜ 7.5×10-9）

△A◇-60△W◇

27/26

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

VG250、ISO-B250KF40240023001100

1×108

1.4×103

＜ 1×10-6（＜ 7.5×10-9）

5-715-18

200（1.5）≧ 50045 / 47

900

TC2403

1500

TC2403-10

TG2400F TG2400F-40InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Air / Water

※1 cf. P17※2 Input connecter:1/Remote connector:1/Instruction manual:1copy

TC64 / TC223 / TC353 / TC1104（Panel cut：128H×104W）

TC1103 / TC2403 / TC2403-10 / TC2413 / TC2414 / TC2415（Panel cut：124H×203W）

TC76 / TC246（Panel cut：128H×103.5W）

Power Supply

209

157.526

139

149

5

400

20

4-φ5

2.3

START

F2F1 F3

OSAKA VACUUM,LTD.

STOP/RESET

POWER SUPPLY

150Space for cable

connections

100

20

POWER SUPPLY

OSAKA VACUUM,LTD.

START

F2F1 F3

STOP/RESET

149

513

9

104.5 250

1.62-φ5Space for cable

connections

■Any orientation ■Compact size■Energy saveing ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■High gas throughput

TG2410F

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

ISO-B250VG250 16

16

A B C363363

Dφ350φ335

TG2410F

TG2410F-40

Drawing of Outside dimension

●The inlet flange bolt holes are symmetrical around the center line.

※1：Depends on the power supply model. Please contact us about the Air cooling type.※2：In case of the backing pump of 2000L/min.

ISO-B250VG250 16

16

A B C363363

Dφ350φ335

※This dimensional drawings corresrond to 　TG240F(built-in controller type). 　In the case of TG240F-20, its controller is separated out.

Specifications

※1：In case of the backing vacuum pump of 160L/min.

※Please contact us about the Air cooling type.

100-110/200-230(±10%)

2.7

750

220

800

TC64 TC223 TC353

Input connector: 1 / Remote connector: 1 / Serial communication connector: 1 / Instruction manual: 1 copy / Serial communication instruction manual: 1 copy ※2

TC1104 TC1103 TC2403 / TC2403-10 TC76TC2413 TC2414 TC2415 TC246

50/60

Single

560 520

8.2 2.4

200-230(±10%) 100-230(±10%)

590 610 1200 1400 1200

450

160

1500

120

800

810

Power supply model

Input Voltage

Input Frequency

Input Phases

Input Power

Rated Output Frequency

Weight

Standard accessories

Applicable pump models

（ACV）

（Hz）

（VA）

（Hz）

（kg）

TG50F TG220F TG70F-20TG2410F TG2410F-40 TG240F-20TG2400FTG2400F-40

TG350FTG450F

TG800FTG1100F

TG1400FTG800FTG1100F

△A◇-60△W◇△A◇-60△W◇

※1

Applicable pump models

※Standard backing pump is a Rotary vacuum pump of 50/60L/min. (50/60Hz)

85.5

ISO-R100KF25220210100

1×108

4×102

＜ 1×10-6（＜ 7.5×10-9）400

1-1.22.5-3.5

260（2）≧ 80

TC223

VG100 CF100

T7.3TC245DC24V

75W

T10.5TC246

AC100-230V （±10%）120VA

OSAKA VACUUM,LTD.

POWER

ACCELERATION

NORMAL

FAILURE

START STOP/RESETREMOTE

LOCAL

TURBO CONTROLLER

104.5

149

139

20

250

2×φ5

100Space for cable

connections

Specifications

L/sL/sL/s

ISO-R/CF PaISO-R/CF Torr

sccmmin

Pa（Torr）L/min

kg

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1

Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2

Input VoltageInput Power

TG240F

7.3TC245DC24V

75W

TG240F-20

10.5TC246

AC100-230V （±10%）120VA

ISO-R100/CF100KF25240230160

1×108

4×104

＜ 1×10-6 / ＜ 5×10-7

＜ 7.5×10-9 / ＜ 3.8×10-9

705.5-7.5

700（5.3）≧ 80

Specifications

High gasthroughput

TC2414VG250/ISO-B250

KF40

＜5×10-7

＜3.8×10-9

25005-7

≧ 1000

220020001700

1×108

9000

350(2.6)

TG2410F

normal

TC2413

1800

51

TG2410F-40

52

Ultra high gasthroughput

TC2415

200018001250

9×107

2000

3500

270(2.0)

L/sL/sL/s

PaTorr

sccmmin

Pa（Torr）L/min

kg

N2

N2 (with protective screen)H2

N2

H2

N2

InletOutlet

Model※1

Power Supply

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1※2

Startup timeMax.backing vacuum pumpRecommended backing vacuum pumpWeight

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

Compound Molecular Pumps

Specifications

Standard set

5

Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

7

Compound Molecular Pumps Compound Molecular Pumps

Compound Molecular Pumps Compound Molecular Pumps Compound Molecular Pumps

1213 6

Compound Molecular Pumps

Compound Molecular Pumps

9 1011 8

Osaka Vacuum, Ltd.

Turb

o Co

ntro

ller Turbo M

olecular Pumps

Compound Molecular Pumps

4

Osaka Vacuum, Ltd.

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.Tu

rbo

Mol

ecul

ar P

umps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd.

Compound Molecular Pumps

Osaka Vacuum, Ltd.

Water cooling

Air cooling

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-B200KF4014001300750

1×108

4.3×103

＜ 1×10-6（＜ 7.5×10-9）450

5.5-715-18

330（2.5）≧ 250

TC1103

VG200 CF200

29 30

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

VG250、ISO-B250KF40240023001100

1×108

1.4×103

＜ 1×10-6（＜ 7.5×10-9）

5-715-18

200（1.5）≧ 50045 / 47

900

TC2403

1500

TC2403-10

TG2400F TG2400F-40inletoutletN2

N2 (with protective screen)H2

N2

H2

N2

空冷 / 水冷

Inlet pressure

Performance curve

100

101

102

103

[Pa･

L/s]

N2

H2

TG240F

Inlet pressure[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

10-110-1

100

101

102

[scc

m]

Thro

ughp

ut

Gas throughputVolume flow rate

[L/s

]

103

102

101

100

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

Sf＞ 80L/min Sf : Volume flow rate of backing pump

TG240F

Inlet pressure

TG240F

ArN2

H2

Volu

me

flow

rate

Sf ＞ 80L/min Sf : Volume flow rate of backing pump

[Torr]

[Pa]10-1 100 101 102

10-3 10-2 10-1

[Pa･

L/s]

104

103

102

101

TG2410F N2 Standard

High gas throughput

Ultra high gas throughput

StandardHigh gas throughputUltra high gas throughput

*Backing vacuum pump speed:2,000L/min

StandardHigh gas throughput

[Pa･

L/s]

Volu

me

flow

rate

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG2410F N2

StandardHigh gas throughputUltra high gas throughput

*Backing vacuum pump speed:2,000L/min

Ultra high gas throughput

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[scc

m]

101

102

103

Thro

ughp

ut

Performance curve

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[L/s

]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 160L/min Sf : Volume flow rate of backing pump

TG220F

Ar

N2H2

Volu

me

flow

rate [P

a･L/

s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 160L/min Sf : Volume flow rate of backing pump

TG220FN2

Ar[scc

m]

100

101

102

Thro

ughp

ut

Performance curve

Performance curve

Ar

H2

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 500L/min Sf : Volume flow rate of backing pump

TG1400F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

utAr

N2

Sf = 500L/min Sf : Volume flow rate of backing pump

TG1400F

N2

Performance curve

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

100

101

102

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 160L/min Sf : Volume flow rate of backing pump

TG450F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2H2

TG450F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Ar

N2

Sf = 160L/min Sf : Volume flow rate of backing pump

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG50F

[L/s

]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 50-100L/min Sf : Volume flow rate of backing pump

TG50F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Sf = 50-100L/min Sf : Volume flow rate of backing pump

Ar

N2

Volu

me

flow

rate

Ar

N2H2

[scc

m]

100

101

102

Thro

ughp

ut

Performance curve

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

104

103

102

101

100

[L/s

]

TG350F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Sf = 160L/min Sf : Volume flow rate of backing pump

N2 Ar

TG350F

Ar

N2

H2

Volu

me

flow

rate

Sf = 160L/min Sf : Volume flow rate of backing pump

[scc

m]

100

101

102

Thro

ughp

ut

Performance curve Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 1000L/min Sf : Volume flow rate of backing pump

TG2400F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

ArN2

H2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Ar

Ar

N2

N2

TG2400F

Sf = 1000L/min Sf = 1000L/min

TG2400F TG2400F-40

Sf:Volume flow rate of backing pump

Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

TG800F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2

Ar

N2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

TG800F

Ar

Ar

N2

N2

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Ar N2

N2

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

TG1100F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2

Ar

N2

TG1100F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

TG50F

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Drawing of Outside dimension

AB

C

D

CF63ISO-R63

VG65 14

1218

A B C147

168182

Dφ145φ114φ95

CF63ISO-R63

VG65 14

1218

A B C147

168182

Dφ145φ114φ95

Water cooling

Air cooling

φ113

69.5

47.5

54

62

70

34.5

ISO-Rc1/8

22.5

15

Connector

4-M6 DP13 PCD78

KF16

32

φ11

3

Cooling water Inlet/Outlet

※1：In case of the backing vacuum pump of 100L/min.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush ※Air inrush test (continual 400 times)

■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

TG220F TG350F

TG450F TG800F TG1100FTG1400F

TG2400F

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard setPump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for gas inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL/SEMI-S2/CE

CF160ISO-B160

VG150 12

1222

A B C312.5

312.5327.5

Dφ235φ203φ225

CF160ISO-B160

VG150 12

1222

A B C312.5

312.5327.5

Dφ235φ203φ225

AB

C

D

136

PCD140

φ250

145

80

φ165

ISO-Rc1/4

68

KF40

4-M16 DP25

Connector Cooling water Inlet/Outlet

Vent portPurge gasInlet ISO-G1/4

ISO-G1/4

φ20

0

47.5

AB

C

D

CF100ISO-R100

VG100 15

1221

A B C200

200220

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C200

200220

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C230

214230

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C230

214230

Dφ185φ152φ130

AB

CF200ISO-B200

VG200 16

1625

A B C281

281306

Dφ300φ253φ285

CF200ISO-B200

VG200 16

1625

A B C281

281306

D

AB

C

D

φ300φ253φ285

□120

47.5

C

D

47.5

Air cooling fan

φ250

136

145

PCD140

~167

φ165

φ200

4-M16 DP25

Connector

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4

KF40

CF200ISO-B200

VG200 16

1625

A B C272

300319

Dφ300φ253φ285

CF200ISO-B200

VG200 16

1625

A B C272

300319

D

B

C

D

φ300φ253φ285

AB

AB

TG2400F-40

136

PCD140~167

145□120

φ250

φ165

φ2004-M16 DP25

Connector

KF40

Vent portPurge gas

Air cooling fanInlet ISO-G1/4

ISO-G1/4

47.5

47.5

φ310

186

φ28

6

181

□12

0

35ﾟ

PCD255202

95.5

47.5

6-M16 DP25

KF40

ConnectorAir cooling fan

Purge gasInlet ISO-G1/4

ISO-G1/4 Connector

φ310

186

181

47.5

95.5

35ﾟ

PCD255

54

200 6-M16 DP25

KF40

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4Cooling water Inlet/Outlet Connector

ISO-Rc1/4

CF160ISO-B160

VG150 16

1622

190

190190

A B Cφ235φ203φ225

D

CF160ISO-B160

VG150 16

1622

190

190190

A B Cφ235φ203φ225

D

47.5

φ250

136

145PCD140

68

47.5

ISO-Rc1/4

80φ165

KF40

Connector

4-M16 DP25

Cooling water Inlet/Outlet

Vent portPurge gasInlet ISO-G1/4

ISO-G1/4

φ200

47.5

AB

C

D

136

145

～16

7

φ165

47.5

PCD140

φ200

φ280φ245.5 KF40

4-M16 DP25

ConnectorVent port

Purge gas

Air cooling fan

Inlet ISO-G1/4

ISO-G1/4

□120

47.5

136

145

φ165

PCD140

φ200

φ280

80 ISO-Rc1/4

68

47.5

φ245.5KF40

4-M16 DP25

Connector

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4Cooling water Inlet/Outlet

A

47.5

C

D

φ28

6

ISO-B250VG250

A Bφ350φ335

1616

340340

C D

ISO-B250VG250

A Bφ350φ335

1616

340340

C D

C

D

250

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Specifications

Drawing of Outside dimensionPerformance curveDrawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

※1：In case of the backing vacuum pump of 160L/min. ※1：In case of the backing vacuum pump of 500L/min. ※2：Depends on the power supply model. (standard：TC1104)※3：△◇ cf. p17

※1：In case of the backing vacuum pump of 500L/min.

※1：In case of the backing vacuum pump of 1000L/min. ※2：Depends on the power supply model.

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

※1：In case of the backing vacuum pump of 500L/min. ※2：Depends on the power supply model. (standard：TC1104)※3：△◇ cf. p17

■Any orientation ■Compact size■Energy-saving■Quick shut down with gas vent■Durable structure for air inrush■Built-in controller type■High compression ratio

TG240FDrawing of Outside dimension

Built-in controller type

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.

Pump + Connector for controller◆OptionAir-cooling fan unit, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve,Flanges and Fittings

●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.

15

Pum

ping

Sys

tem

※1：In case of the backing vacuum pump of 80L/min. ※2：TC245 is a built-in controller,TC246 is rack controller.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

Power/Control

100

70

138

45ﾟISO-G1/8

ISO-G1/8

50.5

124

φ154

115

Vent Port

Purge Port

33

94

□60

34

194.

216

6.2

73.5

ConnectorController

φ1544×M8 DP12 PCD140

KF25

ISO-R100

Power/Control

100

21

70

138

45ﾟISO-G1/8

ISO-G1/8

50.5

124

φ152

φ154

115

Vent Port

Purge Port

33

94

□60

34

233.

716

6.2

113Connector

Controller

φ1544×M8 DP12 PCD140

KF25

CF100

CF flange

ISO-R flange

14

Pumping System

Osaka Vacuum, Ltd.

● The TMP pumping system where a number of pieces　 of equipment※1 necessary for high vacuum are　 compactly arranged. It can pump up to high vacuum　 with a simple operation!

● Since it has casters, it can be easily moved to the　 desired place for use.

● Mounted with a turbo molecular pump from the TG-F　 series which is resistant to disturbance! 　 (The pump can be moved while it is operating.)

◆ Line-up of basic sets (three models) in which a turbo　 molecular pump with pumping speed of 50 to 350 L/s is　 mounted.

※1: Turbo molecular pump, backing pump, vacuum piping,　 automatic slow leak valve, control unit(Optional devices and apparatuses are available to match your needs.)

※2：Figures in parentheses show the pumping speed of pumps with a screen.

ModelTMP

Inlet Flange

Backing pump

ST

CRV

：TMP pumping system

：CF：ISO-R：VG

ST220FV0501

12

3

4

2 3 4

Standard Specifications

TMPVolume flow rate N2（L/s）Base pressureInlet FlangeCooling typeVoltage

Model ST050FTG50F　51(49)※2

＜3×10-6Pa（＜2.3×10-8Torr）VG65 / ISO-R63 / CF63

TG220F　220(210)※2

Air CoolingSingle-phase、AC100V

TG350F　350(330)※2

ST220F ST350F

＜1×10-6Pa（＜7.5×10-9Torr）VG100 / ISO-R100 / CF100

ST Series

ST Series

◆ Most compact type among the ST Series! Further　 space saving is achieved with its desktop size!ST-Compact

Introduction of the TMP pumping system

AB

C

D

φ113

95 69.5

34.5

□92

47.5

Connector

Air cooling fan

4-M6 DP13 PCD78

KF16

32

φ11

3

VG65 CF63

64.2

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-R63KF16

514912

1.4×107

5×102

＜ 3×10-6（＜ 2.3×10-8）80

1-1.51-1.5

1330（10）≧ 50

TC64

AB

C

D

33ﾟ

76 57

ISO-G1/4

Inlet ISO-G1/4

φ130

Connector

Vent port

Purge gas

4-M8 DP12 PCD78

φ130

42.5

54.5

KF25

Air cooling fan

105

□92

AB

C

Dφ130

Inlet ISO-G1/4

5776

33ﾟ

60

Connector

4-M8 DP12 PCD78Cooling water Inlet/Outlet ISO-Rc1/8

Vent portISO-G1/4

Purge gas

φ130

42.5

54.5

KF25

AB

C

D

33ﾟ

φ168

76 57ISO-G1/4

Inlet ISO-G1/4

42.5

54.5Connector

Vent port

Purge gas

4-M8 DP12 PCD78

φ130

KF25

Air cooling fan

105

□92

AB

C

Dφ168

76 57

33ﾟ

ISO-G1/4

Inlet ISO-G1/4

ISO-Rc1/8

60

42.5

54.5

Connector

Vent port

Purge gas

4-M8 DP12 PCD78 φ130

Cooling water Inlet/Outlet

KF25

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-R100KF25

2101×108

2×103

＜ 1×10-6（＜ 7.5×10-9）500

2-2.55-6.5

260（2）≧ 80

TC353

VG100

350330

6

CF100

9

330310

※1：In case of the backing vacuum pump of 160L/min

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

AB

C

D

33ﾟ

φ168

76

□92

57ISO-G1/4

Inlet ISO-G1/4

KF25

42.5

54.5

Connector Vent port

Purge gas

4-M8 DP12 PCD78

φ130

Air cooling fan

76 57

33ﾟ

ISO-G1/4

Inlet ISO-G1/4

ISO-Rc1/8

60

φ168

ConnectorVent port

Purge gas

4-M8 DP12 PCD78 φ130

Cooling water Inlet/Outlet

KF25

42.5

54.5

AB

C

D

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-B160KF25450430240

1×108

2×103

＜ 1×10-6（＜ 7.5×10-9）500

2-2.55-6.5

260（2）≧ 80

TC353

VG150 CF160Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

7 10

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup time※2

Shutdown time※2

Max. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

VG,ISO-B/CF kg

VG150、ISO-B160、CF160KF40820750650

1×108

1×104

330（2.5）≧ 250

3307-9

27-32

TC1104

8605.5-712-15

TC1103

TG800F TG800F

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup time※2

Shutdown time※2

Max. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

VG,ISO-B/CF kg

VG200、ISO-B200、CF200KF4011001000720

1×108

1×104

330（2.5）≧ 25028/27

3307-9

27-32

TC1104

8605.5-712-15

TC1103

TG1100F TG1100FInletOutletN2

N2 (with protective screen)H2

N2

H2

N2

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

＜ 1×10-6（＜ 7.5×10-9）

△A◇-60△W◇

＜ 1×10-6（＜ 7.5×10-9）

△A◇-60△W◇

27/26

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

VG250、ISO-B250KF40240023001100

1×108

1.4×103

＜ 1×10-6（＜ 7.5×10-9）

5-715-18

200（1.5）≧ 50045 / 47

900

TC2403

1500

TC2403-10

TG2400F TG2400F-40InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Air / Water

※1 cf. P17※2 Input connecter:1/Remote connector:1/Instruction manual:1copy

TC64 / TC223 / TC353 / TC1104（Panel cut：128H×104W）

TC1103 / TC2403 / TC2403-10 / TC2413 / TC2414 / TC2415（Panel cut：124H×203W）

TC76 / TC246（Panel cut：128H×103.5W）

Power Supply

209

157.526

139

149

5

400

20

4-φ5

2.3

START

F2F1 F3

OSAKA VACUUM,LTD.

STOP/RESET

POWER SUPPLY

150Space for cable

connections

100

20

POWER SUPPLY

OSAKA VACUUM,LTD.

START

F2F1 F3

STOP/RESET

149

513

9

104.5 250

1.62-φ5Space for cable

connections

■Any orientation ■Compact size■Energy saveing ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■High gas throughput

TG2410F

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

ISO-B250VG250 16

16

A B C363363

Dφ350φ335

TG2410F

TG2410F-40

Drawing of Outside dimension

●The inlet flange bolt holes are symmetrical around the center line.

※1：Depends on the power supply model. Please contact us about the Air cooling type.※2：In case of the backing pump of 2000L/min.

ISO-B250VG250 16

16

A B C363363

Dφ350φ335

※This dimensional drawings corresrond to 　TG240F(built-in controller type). 　In the case of TG240F-20, its controller is separated out.

Specifications

※1：In case of the backing vacuum pump of 160L/min.

※Please contact us about the Air cooling type.

100-110/200-230(±10%)

2.7

750

220

800

TC64 TC223 TC353

Input connector: 1 / Remote connector: 1 / Serial communication connector: 1 / Instruction manual: 1 copy / Serial communication instruction manual: 1 copy ※2

TC1104 TC1103 TC2403 / TC2403-10 TC76TC2413 TC2414 TC2415 TC246

50/60

Single

560 520

8.2 2.4

200-230(±10%) 100-230(±10%)

590 610 1200 1400 1200

450

160

1500

120

800

810

Power supply model

Input Voltage

Input Frequency

Input Phases

Input Power

Rated Output Frequency

Weight

Standard accessories

Applicable pump models

（ACV）

（Hz）

（VA）

（Hz）

（kg）

TG50F TG220F TG70F-20TG2410F TG2410F-40 TG240F-20TG2400FTG2400F-40

TG350FTG450F

TG800FTG1100F

TG1400FTG800FTG1100F

△A◇-60△W◇△A◇-60△W◇

※1

Applicable pump models

※Standard backing pump is a Rotary vacuum pump of 50/60L/min. (50/60Hz)

85.5

ISO-R100KF25220210100

1×108

4×102

＜ 1×10-6（＜ 7.5×10-9）400

1-1.22.5-3.5

260（2）≧ 80

TC223

VG100 CF100

T7.3TC245DC24V

75W

T10.5TC246

AC100-230V （±10%）120VA

OSAKA VACUUM,LTD.

POWER

ACCELERATION

NORMAL

FAILURE

START STOP/RESETREMOTE

LOCAL

TURBO CONTROLLER

104.5

149

139

20

250

2×φ5

100Space for cable

connections

Specifications

L/sL/sL/s

ISO-R/CF PaISO-R/CF Torr

sccmmin

Pa（Torr）L/min

kg

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1

Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2

Input VoltageInput Power

TG240F

7.3TC245DC24V

75W

TG240F-20

10.5TC246

AC100-230V （±10%）120VA

ISO-R100/CF100KF25240230160

1×108

4×104

＜ 1×10-6 / ＜ 5×10-7

＜ 7.5×10-9 / ＜ 3.8×10-9

705.5-7.5

700（5.3）≧ 80

Specifications

High gasthroughput

TC2414VG250/ISO-B250

KF40

＜5×10-7

＜3.8×10-9

25005-7

≧ 1000

220020001700

1×108

9000

350(2.6)

TG2410F

normal

TC2413

1800

51

TG2410F-40

52

Ultra high gasthroughput

TC2415

200018001250

9×107

2000

3500

270(2.0)

L/sL/sL/s

PaTorr

sccmmin

Pa（Torr）L/min

kg

N2

N2 (with protective screen)H2

N2

H2

N2

InletOutlet

Model※1

Power Supply

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1※2

Startup timeMax.backing vacuum pumpRecommended backing vacuum pumpWeight

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

Compound Molecular Pumps

Specifications

Standard set

5

Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

7

Compound Molecular Pumps Compound Molecular Pumps

Compound Molecular Pumps Compound Molecular Pumps Compound Molecular Pumps

1213 6

Compound Molecular Pumps

Compound Molecular Pumps

9 1011 8

Osaka Vacuum, Ltd.

Turb

o Co

ntro

ller Turbo M

olecular Pumps

Compound Molecular Pumps

4

Osaka Vacuum, Ltd.

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd.

Compound Molecular Pumps

Osaka Vacuum, Ltd.

Water cooling

Air cooling

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-B200KF4014001300750

1×108

4.3×103

＜ 1×10-6（＜ 7.5×10-9）450

5.5-715-18

330（2.5）≧ 250

TC1103

VG200 CF200

29 30

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

VG250、ISO-B250KF40240023001100

1×108

1.4×103

＜ 1×10-6（＜ 7.5×10-9）

5-715-18

200（1.5）≧ 50045 / 47

900

TC2403

1500

TC2403-10

TG2400F TG2400F-40inletoutletN2

N2 (with protective screen)H2

N2

H2

N2

空冷 / 水冷

Inlet pressure

Performance curve

100

101

102

103

[Pa･

L/s]

N2

H2

TG240F

Inlet pressure[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

10-110-1

100

101

102

[scc

m]

Thro

ughp

ut

Gas throughputVolume flow rate

[L/s

]

103

102

101

100

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

Sf＞ 80L/min Sf : Volume flow rate of backing pump

TG240F

Inlet pressure

TG240F

ArN2

H2

Volu

me

flow

rate

Sf ＞ 80L/min Sf : Volume flow rate of backing pump

[Torr]

[Pa]10-1 100 101 102

10-3 10-2 10-1

[Pa･

L/s]

104

103

102

101

TG2410F N2 Standard

High gas throughput

Ultra high gas throughput

StandardHigh gas throughputUltra high gas throughput

*Backing vacuum pump speed:2,000L/min

StandardHigh gas throughput

[Pa･

L/s]

Volu

me

flow

rate

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG2410F N2

StandardHigh gas throughputUltra high gas throughput

*Backing vacuum pump speed:2,000L/min

Ultra high gas throughput

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[scc

m]

101

102

103

Thro

ughp

ut

Performance curve

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[L/s

]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 160L/min Sf : Volume flow rate of backing pump

TG220F

Ar

N2H2

Volu

me

flow

rate [P

a･L/

s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 160L/min Sf : Volume flow rate of backing pump

TG220FN2

Ar[scc

m]

100

101

102

Thro

ughp

ut

Performance curve

Performance curve

Ar

H2

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 500L/min Sf : Volume flow rate of backing pump

TG1400F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Ar

N2

Sf = 500L/min Sf : Volume flow rate of backing pump

TG1400F

N2

Performance curve

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

100

101

102

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 160L/min Sf : Volume flow rate of backing pump

TG450F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2H2

TG450F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Ar

N2

Sf = 160L/min Sf : Volume flow rate of backing pump

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG50F

[L/s

]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 50-100L/min Sf : Volume flow rate of backing pump

TG50F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Sf = 50-100L/min Sf : Volume flow rate of backing pump

Ar

N2

Volu

me

flow

rate

Ar

N2H2

[scc

m]

100

101

102

Thro

ughp

ut

Performance curve

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

104

103

102

101

100

[L/s

]

TG350F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Sf = 160L/min Sf : Volume flow rate of backing pump

N2 Ar

TG350F

Ar

N2

H2

Volu

me

flow

rate

Sf = 160L/min Sf : Volume flow rate of backing pump

[scc

m]

100

101

102

Thro

ughp

ut

Performance curve Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 1000L/min Sf : Volume flow rate of backing pump

TG2400F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

ArN2

H2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Ar

Ar

N2

N2

TG2400F

Sf = 1000L/min Sf = 1000L/min

TG2400F TG2400F-40

Sf:Volume flow rate of backing pump

Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

TG800F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2

Ar

N2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

TG800F

Ar

Ar

N2

N2

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Ar N2

N2

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

TG1100F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2

Ar

N2

TG1100F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

TG50F

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Drawing of Outside dimension

AB

C

D

CF63ISO-R63

VG65 14

1218

A B C147

168182

Dφ145φ114φ95

CF63ISO-R63

VG65 14

1218

A B C147

168182

Dφ145φ114φ95

Water cooling

Air cooling

φ113

69.5

47.5

54

62

70

34.5

ISO-Rc1/8

22.5

15

Connector

4-M6 DP13 PCD78

KF16

32

φ11

3

Cooling water Inlet/Outlet

※1：In case of the backing vacuum pump of 100L/min.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush ※Air inrush test (continual 400 times)

■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

TG220F TG350F

TG450F TG800F TG1100FTG1400F

TG2400F

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard setPump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for gas inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL/SEMI-S2/CE

CF160ISO-B160

VG150 12

1222

A B C312.5

312.5327.5

Dφ235φ203φ225

CF160ISO-B160

VG150 12

1222

A B C312.5

312.5327.5

Dφ235φ203φ225

AB

C

D

136

PCD140

φ250

145

80

φ165

ISO-Rc1/4

68

KF40

4-M16 DP25

Connector Cooling water Inlet/Outlet

Vent portPurge gasInlet ISO-G1/4

ISO-G1/4

φ20

0

47.5

AB

C

D

CF100ISO-R100

VG100 15

1221

A B C200

200220

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C200

200220

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C230

214230

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C230

214230

Dφ185φ152φ130

AB

CF200ISO-B200

VG200 16

1625

A B C281

281306

Dφ300φ253φ285

CF200ISO-B200

VG200 16

1625

A B C281

281306

D

AB

C

D

φ300φ253φ285

□120

47.5

C

D

47.5

Air cooling fan

φ250

136

145

PCD140

~167

φ165

φ200

4-M16 DP25

Connector

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4

KF40

CF200ISO-B200

VG200 16

1625

A B C272

300319

Dφ300φ253φ285

CF200ISO-B200

VG200 16

1625

A B C272

300319

D

B

C

D

φ300φ253φ285

AB

AB

TG2400F-40

136

PCD140~167

145□120

φ250

φ165

φ2004-M16 DP25

Connector

KF40

Vent portPurge gas

Air cooling fanInlet ISO-G1/4

ISO-G1/4

47.5

47.5

φ310

186

φ28

6

181

□12

0

35ﾟ

PCD255202

95.5

47.5

6-M16 DP25

KF40

ConnectorAir cooling fan

Purge gasInlet ISO-G1/4

ISO-G1/4 Connector

φ310

186

181

47.5

95.5

35ﾟ

PCD255

54

200 6-M16 DP25

KF40

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4Cooling water Inlet/Outlet Connector

ISO-Rc1/4

CF160ISO-B160

VG150 16

1622

190

190190

A B Cφ235φ203φ225

D

CF160ISO-B160

VG150 16

1622

190

190190

A B Cφ235φ203φ225

D

47.5

φ250

136

145PCD140

68

47.5

ISO-Rc1/4

80φ165

KF40

Connector

4-M16 DP25

Cooling water Inlet/Outlet

Vent portPurge gasInlet ISO-G1/4

ISO-G1/4

φ200

47.5

AB

C

D

136

145

～16

7

φ165

47.5

PCD140

φ200

φ280φ245.5 KF40

4-M16 DP25

ConnectorVent port

Purge gas

Air cooling fan

Inlet ISO-G1/4

ISO-G1/4

□120

47.5

136

145

φ165

PCD140

φ200

φ280

80 ISO-Rc1/4

68

47.5

φ245.5KF40

4-M16 DP25

Connector

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4Cooling water Inlet/Outlet

A

47.5

C

D

φ28

6

ISO-B250VG250

A Bφ350φ335

1616

340340

C D

ISO-B250VG250

A Bφ350φ335

1616

340340

C D

C

D

250

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Specifications

Drawing of Outside dimensionPerformance curveDrawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

※1：In case of the backing vacuum pump of 160L/min. ※1：In case of the backing vacuum pump of 500L/min. ※2：Depends on the power supply model. (standard：TC1104)※3：△◇ cf. p17

※1：In case of the backing vacuum pump of 500L/min.

※1：In case of the backing vacuum pump of 1000L/min. ※2：Depends on the power supply model.

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

※1：In case of the backing vacuum pump of 500L/min. ※2：Depends on the power supply model. (standard：TC1104)※3：△◇ cf. p17

■Any orientation ■Compact size■Energy-saving■Quick shut down with gas vent■Durable structure for air inrush■Built-in controller type■High compression ratio

TG240FDrawing of Outside dimension

Built-in controller type

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.

Pump + Connector for controller◆OptionAir-cooling fan unit, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve,Flanges and Fittings

●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.

15

Pum

ping

Sys

tem

※1：In case of the backing vacuum pump of 80L/min. ※2：TC245 is a built-in controller,TC246 is rack controller.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

Power/Control

100

70

138

45ﾟISO-G1/8

ISO-G1/8

50.5

124

φ154

115

Vent Port

Purge Port

33

94

□60

34

194.

216

6.2

73.5

ConnectorController

φ1544×M8 DP12 PCD140

KF25

ISO-R100

Power/Control

100

21

70

138

45ﾟISO-G1/8

ISO-G1/8

50.5

124

φ152

φ154

115

Vent Port

Purge Port

33

94

□60

34

233.

716

6.2

113Connector

Controller

φ1544×M8 DP12 PCD140

KF25

CF100

CF flange

ISO-R flange

14

Pumping System

Osaka Vacuum, Ltd.

● The TMP pumping system where a number of pieces　 of equipment※1 necessary for high vacuum are　 compactly arranged. It can pump up to high vacuum　 with a simple operation!

● Since it has casters, it can be easily moved to the　 desired place for use.

● Mounted with a turbo molecular pump from the TG-F　 series which is resistant to disturbance! 　 (The pump can be moved while it is operating.)

◆ Line-up of basic sets (three models) in which a turbo　 molecular pump with pumping speed of 50 to 350 L/s is　 mounted.

※1: Turbo molecular pump, backing pump, vacuum piping,　 automatic slow leak valve, control unit(Optional devices and apparatuses are available to match your needs.)

※2：Figures in parentheses show the pumping speed of pumps with a screen.

ModelTMP

Inlet Flange

Backing pump

ST

CRV

：TMP pumping system

：CF：ISO-R：VG

ST220FV0501

12

3

4

2 3 4

Standard Specifications

TMPVolume flow rate N2（L/s）Base pressureInlet FlangeCooling typeVoltage

Model ST050FTG50F　51(49)※2

＜3×10-6Pa（＜2.3×10-8Torr）VG65 / ISO-R63 / CF63

TG220F　220(210)※2

Air CoolingSingle-phase、AC100V

TG350F　350(330)※2

ST220F ST350F

＜1×10-6Pa（＜7.5×10-9Torr）VG100 / ISO-R100 / CF100

ST Series

ST Series

◆ Most compact type among the ST Series! Further　 space saving is achieved with its desktop size!ST-Compact

Introduction of the TMP pumping system

AB

C

D

φ113

95 69.5

34.5

□92

47.5

Connector

Air cooling fan

4-M6 DP13 PCD78

KF16

32

φ11

3

VG65 CF63

64.2

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-R63KF16

514912

1.4×107

5×102

＜ 3×10-6（＜ 2.3×10-8）80

1-1.51-1.5

1330（10）≧ 50

TC64

AB

C

D

33ﾟ

76 57

ISO-G1/4

Inlet ISO-G1/4

φ130

Connector

Vent port

Purge gas

4-M8 DP12 PCD78

φ130

42.5

54.5

KF25

Air cooling fan

105

□92

AB

C

Dφ130

Inlet ISO-G1/4

5776

33ﾟ

60

Connector

4-M8 DP12 PCD78Cooling water Inlet/Outlet ISO-Rc1/8

Vent portISO-G1/4

Purge gas

φ130

42.5

54.5

KF25

AB

C

D

33ﾟ

φ168

76 57ISO-G1/4

Inlet ISO-G1/4

42.5

54.5Connector

Vent port

Purge gas

4-M8 DP12 PCD78

φ130

KF25

Air cooling fan

105

□92

AB

C

Dφ168

76 57

33ﾟ

ISO-G1/4

Inlet ISO-G1/4

ISO-Rc1/8

60

42.5

54.5

Connector

Vent port

Purge gas

4-M8 DP12 PCD78 φ130

Cooling water Inlet/Outlet

KF25

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-R100KF25

2101×108

2×103

＜ 1×10-6（＜ 7.5×10-9）500

2-2.55-6.5

260（2）≧ 80

TC353

VG100

350330

6

CF100

9

330310

※1：In case of the backing vacuum pump of 160L/min

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

AB

C

D

33ﾟ

φ168

76

□92

57ISO-G1/4

Inlet ISO-G1/4

KF25

42.5

54.5

Connector Vent port

Purge gas

4-M8 DP12 PCD78

φ130

Air cooling fan

76 57

33ﾟ

ISO-G1/4

Inlet ISO-G1/4

ISO-Rc1/8

60

φ168

ConnectorVent port

Purge gas

4-M8 DP12 PCD78 φ130

Cooling water Inlet/Outlet

KF25

42.5

54.5

AB

C

D

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-B160KF25450430240

1×108

2×103

＜ 1×10-6（＜ 7.5×10-9）500

2-2.55-6.5

260（2）≧ 80

TC353

VG150 CF160Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

7 10

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup time※2

Shutdown time※2

Max. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

VG,ISO-B/CF kg

VG150、ISO-B160、CF160KF40820750650

1×108

1×104

330（2.5）≧ 250

3307-9

27-32

TC1104

8605.5-712-15

TC1103

TG800F TG800F

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup time※2

Shutdown time※2

Max. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

VG,ISO-B/CF kg

VG200、ISO-B200、CF200KF4011001000720

1×108

1×104

330（2.5）≧ 25028/27

3307-9

27-32

TC1104

8605.5-712-15

TC1103

TG1100F TG1100FInletOutletN2

N2 (with protective screen)H2

N2

H2

N2

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

＜ 1×10-6（＜ 7.5×10-9）

△A◇-60△W◇

＜ 1×10-6（＜ 7.5×10-9）

△A◇-60△W◇

27/26

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

VG250、ISO-B250KF40240023001100

1×108

1.4×103

＜ 1×10-6（＜ 7.5×10-9）

5-715-18

200（1.5）≧ 50045 / 47

900

TC2403

1500

TC2403-10

TG2400F TG2400F-40InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Air / Water

※1 cf. P17※2 Input connecter:1/Remote connector:1/Instruction manual:1copy

TC64 / TC223 / TC353 / TC1104（Panel cut：128H×104W）

TC1103 / TC2403 / TC2403-10 / TC2413 / TC2414 / TC2415（Panel cut：124H×203W）

TC76 / TC246（Panel cut：128H×103.5W）

Power Supply

209

157.526

139

149

5

400

20

4-φ5

2.3

START

F2F1 F3

OSAKA VACUUM,LTD.

STOP/RESET

POWER SUPPLY

150Space for cable

connections

100

20

POWER SUPPLY

OSAKA VACUUM,LTD.

START

F2F1 F3

STOP/RESET

149

513

9

104.5 250

1.62-φ5Space for cable

connections

■Any orientation ■Compact size■Energy saveing ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■High gas throughput

TG2410F

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

ISO-B250VG250 16

16

A B C363363

Dφ350φ335

TG2410F

TG2410F-40

Drawing of Outside dimension

●The inlet flange bolt holes are symmetrical around the center line.

※1：Depends on the power supply model. Please contact us about the Air cooling type.※2：In case of the backing pump of 2000L/min.

ISO-B250VG250 16

16

A B C363363

Dφ350φ335

※This dimensional drawings corresrond to 　TG240F(built-in controller type). 　In the case of TG240F-20, its controller is separated out.

Specifications

※1：In case of the backing vacuum pump of 160L/min.

※Please contact us about the Air cooling type.

100-110/200-230(±10%)

2.7

750

220

800

TC64 TC223 TC353

Input connector: 1 / Remote connector: 1 / Serial communication connector: 1 / Instruction manual: 1 copy / Serial communication instruction manual: 1 copy ※2

TC1104 TC1103 TC2403 / TC2403-10 TC76TC2413 TC2414 TC2415 TC246

50/60

Single

560 520

8.2 2.4

200-230(±10%) 100-230(±10%)

590 610 1200 1400 1200

450

160

1500

120

800

810

Power supply model

Input Voltage

Input Frequency

Input Phases

Input Power

Rated Output Frequency

Weight

Standard accessories

Applicable pump models

（ACV）

（Hz）

（VA）

（Hz）

（kg）

TG50F TG220F TG70F-20TG2410F TG2410F-40 TG240F-20TG2400FTG2400F-40

TG350FTG450F

TG800FTG1100F

TG1400FTG800FTG1100F

△A◇-60△W◇△A◇-60△W◇

※1

Applicable pump models

※Standard backing pump is a Rotary vacuum pump of 50/60L/min. (50/60Hz)

85.5

ISO-R100KF25220210100

1×108

4×102

＜ 1×10-6（＜ 7.5×10-9）400

1-1.22.5-3.5

260（2）≧ 80

TC223

VG100 CF100

T7.3TC245DC24V

75W

T10.5TC246

AC100-230V （±10%）120VA

OSAKA VACUUM,LTD.

POWER

ACCELERATION

NORMAL

FAILURE

START STOP/RESETREMOTE

LOCAL

TURBO CONTROLLER

104.5

149

139

20

250

2×φ5

100Space for cable

connections

Specifications

L/sL/sL/s

ISO-R/CF PaISO-R/CF Torr

sccmmin

Pa（Torr）L/min

kg

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1

Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2

Input VoltageInput Power

TG240F

7.3TC245DC24V

75W

TG240F-20

10.5TC246

AC100-230V （±10%）120VA

ISO-R100/CF100KF25240230160

1×108

4×104

＜ 1×10-6 / ＜ 5×10-7

＜ 7.5×10-9 / ＜ 3.8×10-9

705.5-7.5

700（5.3）≧ 80

Specifications

High gasthroughput

TC2414VG250/ISO-B250

KF40

＜5×10-7

＜3.8×10-9

25005-7

≧ 1000

220020001700

1×108

9000

350(2.6)

TG2410F

normal

TC2413

1800

51

TG2410F-40

52

Ultra high gasthroughput

TC2415

200018001250

9×107

2000

3500

270(2.0)

L/sL/sL/s

PaTorr

sccmmin

Pa（Torr）L/min

kg

N2

N2 (with protective screen)H2

N2

H2

N2

InletOutlet

Model※1

Power Supply

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1※2

Startup timeMax.backing vacuum pumpRecommended backing vacuum pumpWeight

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

Compound Molecular Pumps

Specifications

Standard set

5

Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

7

Compound Molecular Pumps Compound Molecular Pumps

Compound Molecular Pumps Compound Molecular Pumps Compound Molecular Pumps

1213 6

Compound Molecular Pumps

Compound Molecular Pumps

9 1011 8

Osaka Vacuum, Ltd.Tu

rbo

Cont

rolle

r Turbo Molecular Pum

ps

Compound Molecular Pumps

4

Osaka Vacuum, Ltd.

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd.

Compound Molecular Pumps

Osaka Vacuum, Ltd.

Water cooling

Air cooling

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-B200KF4014001300750

1×108

4.3×103

＜ 1×10-6（＜ 7.5×10-9）450

5.5-715-18

330（2.5）≧ 250

TC1103

VG200 CF200

29 30

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

VG250、ISO-B250KF40240023001100

1×108

1.4×103

＜ 1×10-6（＜ 7.5×10-9）

5-715-18

200（1.5）≧ 50045 / 47

900

TC2403

1500

TC2403-10

TG2400F TG2400F-40inletoutletN2

N2 (with protective screen)H2

N2

H2

N2

空冷 / 水冷

Inlet pressure

Performance curve

100

101

102

103

[Pa･

L/s]

N2

H2

TG240F

Inlet pressure[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

10-110-1

100

101

102

[scc

m]

Thro

ughp

ut

Gas throughputVolume flow rate

[L/s

]

103

102

101

100

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

Sf＞ 80L/min Sf : Volume flow rate of backing pump

TG240F

Inlet pressure

TG240F

ArN2

H2

Volu

me

flow

rate

Sf ＞ 80L/min Sf : Volume flow rate of backing pump

[Torr]

[Pa]10-1 100 101 102

10-3 10-2 10-1

[Pa･

L/s]

104

103

102

101

TG2410F N2 Standard

High gas throughput

Ultra high gas throughput

StandardHigh gas throughputUltra high gas throughput

*Backing vacuum pump speed:2,000L/min

StandardHigh gas throughput

[Pa･

L/s]

Volu

me

flow

rate

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG2410F N2

StandardHigh gas throughputUltra high gas throughput

*Backing vacuum pump speed:2,000L/min

Ultra high gas throughput

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[scc

m]

101

102

103

Thro

ughp

ut

Performance curve

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[L/s

]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 160L/min Sf : Volume flow rate of backing pump

TG220F

Ar

N2H2

Volu

me

flow

rate [P

a･L/

s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 160L/min Sf : Volume flow rate of backing pump

TG220FN2

Ar[scc

m]

100

101

102

Thro

ughp

ut

Performance curve

Performance curve

Ar

H2

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 500L/min Sf : Volume flow rate of backing pump

TG1400F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Ar

N2

Sf = 500L/min Sf : Volume flow rate of backing pump

TG1400F

N2

Performance curve

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

100

101

102

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 160L/min Sf : Volume flow rate of backing pump

TG450F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2H2

TG450F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Ar

N2

Sf = 160L/min Sf : Volume flow rate of backing pump

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG50F

[L/s

]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 50-100L/min Sf : Volume flow rate of backing pump

TG50F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Sf = 50-100L/min Sf : Volume flow rate of backing pump

Ar

N2

Volu

me

flow

rate

Ar

N2H2

[scc

m]

100

101

102

Thro

ughp

ut

Performance curve

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

104

103

102

101

100

[L/s

]

TG350F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Sf = 160L/min Sf : Volume flow rate of backing pump

N2 Ar

TG350F

Ar

N2

H2

Volu

me

flow

rate

Sf = 160L/min Sf : Volume flow rate of backing pump

[scc

m]

100

101

102

Thro

ughp

ut

Performance curve Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 1000L/min Sf : Volume flow rate of backing pump

TG2400F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

ArN2

H2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Ar

Ar

N2

N2

TG2400F

Sf = 1000L/min Sf = 1000L/min

TG2400F TG2400F-40

Sf:Volume flow rate of backing pump

Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

TG800F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2

Ar

N2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

TG800F

Ar

Ar

N2

N2

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Ar N2

N2

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

TG1100F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2

Ar

N2

TG1100F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

TG50F

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Drawing of Outside dimension

AB

C

D

CF63ISO-R63

VG65 14

1218

A B C147

168182

Dφ145φ114φ95

CF63ISO-R63

VG65 14

1218

A B C147

168182

Dφ145φ114φ95

Water cooling

Air cooling

φ113

69.5

47.5

54

62

70

34.5

ISO-Rc1/8

22.5

15

Connector

4-M6 DP13 PCD78

KF16

32

φ11

3

Cooling water Inlet/Outlet

※1：In case of the backing vacuum pump of 100L/min.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush ※Air inrush test (continual 400 times)

■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

TG220F TG350F

TG450F TG800F TG1100FTG1400F

TG2400F

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard setPump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for gas inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL/SEMI-S2/CE

CF160ISO-B160

VG150 12

1222

A B C312.5

312.5327.5

Dφ235φ203φ225

CF160ISO-B160

VG150 12

1222

A B C312.5

312.5327.5

Dφ235φ203φ225

AB

C

D

136

PCD140

φ250

145

80

φ165

ISO-Rc1/4

68

KF40

4-M16 DP25

Connector Cooling water Inlet/Outlet

Vent portPurge gasInlet ISO-G1/4

ISO-G1/4

φ20

0

47.5

AB

C

D

CF100ISO-R100

VG100 15

1221

A B C200

200220

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C200

200220

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C230

214230

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C230

214230

Dφ185φ152φ130

AB

CF200ISO-B200

VG200 16

1625

A B C281

281306

Dφ300φ253φ285

CF200ISO-B200

VG200 16

1625

A B C281

281306

D

AB

C

D

φ300φ253φ285

□120

47.5

C

D

47.5

Air cooling fan

φ250

136

145

PCD140

~167

φ165

φ200

4-M16 DP25

Connector

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4

KF40

CF200ISO-B200

VG200 16

1625

A B C272

300319

Dφ300φ253φ285

CF200ISO-B200

VG200 16

1625

A B C272

300319

D

B

C

D

φ300φ253φ285

AB

AB

TG2400F-40

136

PCD140~167

145□120

φ250

φ165

φ2004-M16 DP25

Connector

KF40

Vent portPurge gas

Air cooling fanInlet ISO-G1/4

ISO-G1/4

47.5

47.5

φ310

186

φ28

6

181

□12

0

35ﾟ

PCD255202

95.5

47.5

6-M16 DP25

KF40

ConnectorAir cooling fan

Purge gasInlet ISO-G1/4

ISO-G1/4 Connector

φ310

186

181

47.5

95.5

35ﾟ

PCD255

54

200 6-M16 DP25

KF40

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4Cooling water Inlet/Outlet Connector

ISO-Rc1/4

CF160ISO-B160

VG150 16

1622

190

190190

A B Cφ235φ203φ225

D

CF160ISO-B160

VG150 16

1622

190

190190

A B Cφ235φ203φ225

D

47.5

φ250

136

145PCD140

68

47.5

ISO-Rc1/4

80φ165

KF40

Connector

4-M16 DP25

Cooling water Inlet/Outlet

Vent portPurge gasInlet ISO-G1/4

ISO-G1/4

φ200

47.5

AB

C

D

136

145

～16

7

φ165

47.5

PCD140

φ200

φ280φ245.5 KF40

4-M16 DP25

ConnectorVent port

Purge gas

Air cooling fan

Inlet ISO-G1/4

ISO-G1/4

□120

47.5

136

145

φ165

PCD140

φ200

φ280

80 ISO-Rc1/4

68

47.5

φ245.5KF40

4-M16 DP25

Connector

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4Cooling water Inlet/Outlet

A

47.5

C

D

φ28

6

ISO-B250VG250

A Bφ350φ335

1616

340340

C D

ISO-B250VG250

A Bφ350φ335

1616

340340

C D

C

D

250

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Specifications

Drawing of Outside dimensionPerformance curveDrawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

※1：In case of the backing vacuum pump of 160L/min. ※1：In case of the backing vacuum pump of 500L/min. ※2：Depends on the power supply model. (standard：TC1104)※3：△◇ cf. p17

※1：In case of the backing vacuum pump of 500L/min.

※1：In case of the backing vacuum pump of 1000L/min. ※2：Depends on the power supply model.

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

※1：In case of the backing vacuum pump of 500L/min. ※2：Depends on the power supply model. (standard：TC1104)※3：△◇ cf. p17

■Any orientation ■Compact size■Energy-saving■Quick shut down with gas vent■Durable structure for air inrush■Built-in controller type■High compression ratio

TG240FDrawing of Outside dimension

Built-in controller type

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.

Pump + Connector for controller◆OptionAir-cooling fan unit, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve,Flanges and Fittings

●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.

15

Pum

ping

Sys

tem

※1：In case of the backing vacuum pump of 80L/min. ※2：TC245 is a built-in controller,TC246 is rack controller.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

Power/Control

100

70

138

45ﾟISO-G1/8

ISO-G1/8

50.5

124

φ154

115

Vent Port

Purge Port

33

94

□60

34

194.

216

6.2

73.5

ConnectorController

φ1544×M8 DP12 PCD140

KF25

ISO-R100

Power/Control

100

21

70

138

45ﾟISO-G1/8

ISO-G1/8

50.5

124

φ152

φ154

115

Vent Port

Purge Port

33

94

□60

34

233.

716

6.2

113Connector

Controller

φ1544×M8 DP12 PCD140

KF25

CF100

CF flange

ISO-R flange

14

Pumping System

Osaka Vacuum, Ltd.

● The TMP pumping system where a number of pieces　 of equipment※1 necessary for high vacuum are　 compactly arranged. It can pump up to high vacuum　 with a simple operation!

● Since it has casters, it can be easily moved to the　 desired place for use.

● Mounted with a turbo molecular pump from the TG-F　 series which is resistant to disturbance! 　 (The pump can be moved while it is operating.)

◆ Line-up of basic sets (three models) in which a turbo　 molecular pump with pumping speed of 50 to 350 L/s is　 mounted.

※1: Turbo molecular pump, backing pump, vacuum piping,　 automatic slow leak valve, control unit(Optional devices and apparatuses are available to match your needs.)

※2：Figures in parentheses show the pumping speed of pumps with a screen.

ModelTMP

Inlet Flange

Backing pump

ST

CRV

：TMP pumping system

：CF：ISO-R：VG

ST220FV0501

12

3

4

2 3 4

Standard Specifications

TMPVolume flow rate N2（L/s）Base pressureInlet FlangeCooling typeVoltage

Model ST050FTG50F　51(49)※2

＜3×10-6Pa（＜2.3×10-8Torr）VG65 / ISO-R63 / CF63

TG220F　220(210)※2

Air CoolingSingle-phase、AC100V

TG350F　350(330)※2

ST220F ST350F

＜1×10-6Pa（＜7.5×10-9Torr）VG100 / ISO-R100 / CF100

ST Series

ST Series

◆ Most compact type among the ST Series! Further　 space saving is achieved with its desktop size!ST-Compact

Introduction of the TMP pumping system

AB

C

D

φ113

95 69.5

34.5

□92

47.5

Connector

Air cooling fan

4-M6 DP13 PCD78

KF16

32

φ11

3

VG65 CF63

64.2

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-R63KF16

514912

1.4×107

5×102

＜ 3×10-6（＜ 2.3×10-8）80

1-1.51-1.5

1330（10）≧ 50

TC64

AB

C

D

33ﾟ

76 57

ISO-G1/4

Inlet ISO-G1/4

φ130

Connector

Vent port

Purge gas

4-M8 DP12 PCD78

φ130

42.5

54.5

KF25

Air cooling fan

105

□92

AB

C

Dφ130

Inlet ISO-G1/4

5776

33ﾟ

60

Connector

4-M8 DP12 PCD78Cooling water Inlet/Outlet ISO-Rc1/8

Vent portISO-G1/4

Purge gas

φ130

42.5

54.5

KF25

AB

C

D

33ﾟ

φ168

76 57ISO-G1/4

Inlet ISO-G1/4

42.5

54.5Connector

Vent port

Purge gas

4-M8 DP12 PCD78

φ130

KF25

Air cooling fan

105

□92

AB

C

Dφ168

76 57

33ﾟ

ISO-G1/4

Inlet ISO-G1/4

ISO-Rc1/8

60

42.5

54.5

Connector

Vent port

Purge gas

4-M8 DP12 PCD78 φ130

Cooling water Inlet/Outlet

KF25

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-R100KF25

2101×108

2×103

＜ 1×10-6（＜ 7.5×10-9）500

2-2.55-6.5

260（2）≧ 80

TC353

VG100

350330

6

CF100

9

330310

※1：In case of the backing vacuum pump of 160L/min

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

AB

C

D

33ﾟ

φ168

76

□92

57ISO-G1/4

Inlet ISO-G1/4

KF25

42.5

54.5

Connector Vent port

Purge gas

4-M8 DP12 PCD78

φ130

Air cooling fan

76 57

33ﾟ

ISO-G1/4

Inlet ISO-G1/4

ISO-Rc1/8

60

φ168

ConnectorVent port

Purge gas

4-M8 DP12 PCD78 φ130

Cooling water Inlet/Outlet

KF25

42.5

54.5

AB

C

D

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-B160KF25450430240

1×108

2×103

＜ 1×10-6（＜ 7.5×10-9）500

2-2.55-6.5

260（2）≧ 80

TC353

VG150 CF160Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

7 10

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup time※2

Shutdown time※2

Max. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

VG,ISO-B/CF kg

VG150、ISO-B160、CF160KF40820750650

1×108

1×104

330（2.5）≧ 250

3307-9

27-32

TC1104

8605.5-712-15

TC1103

TG800F TG800F

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup time※2

Shutdown time※2

Max. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

VG,ISO-B/CF kg

VG200、ISO-B200、CF200KF4011001000720

1×108

1×104

330（2.5）≧ 25028/27

3307-9

27-32

TC1104

8605.5-712-15

TC1103

TG1100F TG1100FInletOutletN2

N2 (with protective screen)H2

N2

H2

N2

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

＜ 1×10-6（＜ 7.5×10-9）

△A◇-60△W◇

＜ 1×10-6（＜ 7.5×10-9）

△A◇-60△W◇

27/26

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

VG250、ISO-B250KF40240023001100

1×108

1.4×103

＜ 1×10-6（＜ 7.5×10-9）

5-715-18

200（1.5）≧ 50045 / 47

900

TC2403

1500

TC2403-10

TG2400F TG2400F-40InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Air / Water

※1 cf. P17※2 Input connecter:1/Remote connector:1/Instruction manual:1copy

TC64 / TC223 / TC353 / TC1104（Panel cut：128H×104W）

TC1103 / TC2403 / TC2403-10 / TC2413 / TC2414 / TC2415（Panel cut：124H×203W）

TC76 / TC246（Panel cut：128H×103.5W）

Power Supply

209

157.526

139

149

5

400

20

4-φ5

2.3

START

F2F1 F3

OSAKA VACUUM,LTD.

STOP/RESET

POWER SUPPLY

150Space for cable

connections

100

20

POWER SUPPLY

OSAKA VACUUM,LTD.

START

F2F1 F3

STOP/RESET

149

513

9

104.5 250

1.62-φ5Space for cable

connections

■Any orientation ■Compact size■Energy saveing ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■High gas throughput

TG2410F

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

ISO-B250VG250 16

16

A B C363363

Dφ350φ335

TG2410F

TG2410F-40

Drawing of Outside dimension

●The inlet flange bolt holes are symmetrical around the center line.

※1：Depends on the power supply model. Please contact us about the Air cooling type.※2：In case of the backing pump of 2000L/min.

ISO-B250VG250 16

16

A B C363363

Dφ350φ335

※This dimensional drawings corresrond to 　TG240F(built-in controller type). 　In the case of TG240F-20, its controller is separated out.

Specifications

※1：In case of the backing vacuum pump of 160L/min.

※Please contact us about the Air cooling type.

100-110/200-230(±10%)

2.7

750

220

800

TC64 TC223 TC353

Input connector: 1 / Remote connector: 1 / Serial communication connector: 1 / Instruction manual: 1 copy / Serial communication instruction manual: 1 copy ※2

TC1104 TC1103 TC2403 / TC2403-10 TC76TC2413 TC2414 TC2415 TC246

50/60

Single

560 520

8.2 2.4

200-230(±10%) 100-230(±10%)

590 610 1200 1400 1200

450

160

1500

120

800

810

Power supply model

Input Voltage

Input Frequency

Input Phases

Input Power

Rated Output Frequency

Weight

Standard accessories

Applicable pump models

（ACV）

（Hz）

（VA）

（Hz）

（kg）

TG50F TG220F TG70F-20TG2410F TG2410F-40 TG240F-20TG2400FTG2400F-40

TG350FTG450F

TG800FTG1100F

TG1400FTG800FTG1100F

△A◇-60△W◇△A◇-60△W◇

※1

Applicable pump models

※Standard backing pump is a Rotary vacuum pump of 50/60L/min. (50/60Hz)

85.5

ISO-R100KF25220210100

1×108

4×102

＜ 1×10-6（＜ 7.5×10-9）400

1-1.22.5-3.5

260（2）≧ 80

TC223

VG100 CF100

T7.3TC245DC24V

75W

T10.5TC246

AC100-230V （±10%）120VA

OSAKA VACUUM,LTD.

POWER

ACCELERATION

NORMAL

FAILURE

START STOP/RESETREMOTE

LOCAL

TURBO CONTROLLER

104.5

149

139

20

250

2×φ5

100Space for cable

connections

Specifications

L/sL/sL/s

ISO-R/CF PaISO-R/CF Torr

sccmmin

Pa（Torr）L/min

kg

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1

Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2

Input VoltageInput Power

TG240F

7.3TC245DC24V

75W

TG240F-20

10.5TC246

AC100-230V （±10%）120VA

ISO-R100/CF100KF25240230160

1×108

4×104

＜ 1×10-6 / ＜ 5×10-7

＜ 7.5×10-9 / ＜ 3.8×10-9

705.5-7.5

700（5.3）≧ 80

Specifications

High gasthroughput

TC2414VG250/ISO-B250

KF40

＜5×10-7

＜3.8×10-9

25005-7

≧ 1000

220020001700

1×108

9000

350(2.6)

TG2410F

normal

TC2413

1800

51

TG2410F-40

52

Ultra high gasthroughput

TC2415

200018001250

9×107

2000

3500

270(2.0)

L/sL/sL/s

PaTorr

sccmmin

Pa（Torr）L/min

kg

N2

N2 (with protective screen)H2

N2

H2

N2

InletOutlet

Model※1

Power Supply

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1※2

Startup timeMax.backing vacuum pumpRecommended backing vacuum pumpWeight

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

Compound Molecular Pumps

Specifications

Standard set

5

Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

7

Compound Molecular Pumps Compound Molecular Pumps

Compound Molecular Pumps Compound Molecular Pumps Compound Molecular Pumps

1213 6

Compound Molecular Pumps

Compound Molecular Pumps

9 1011 8

Osaka Vacuum, Ltd.

Turb

o Co

ntro

ller Turbo M

olecular Pumps

Compound Molecular Pumps

4

Osaka Vacuum, Ltd.

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

psOsaka Vacuum, Ltd.

Compound Molecular Pumps

Osaka Vacuum, Ltd.

Water cooling

Air cooling

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-B200KF4014001300750

1×108

4.3×103

＜ 1×10-6（＜ 7.5×10-9）450

5.5-715-18

330（2.5）≧ 250

TC1103

VG200 CF200

29 30

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

VG250、ISO-B250KF40240023001100

1×108

1.4×103

＜ 1×10-6（＜ 7.5×10-9）

5-715-18

200（1.5）≧ 50045 / 47

900

TC2403

1500

TC2403-10

TG2400F TG2400F-40inletoutletN2

N2 (with protective screen)H2

N2

H2

N2

空冷 / 水冷

Inlet pressure

Performance curve

100

101

102

103

[Pa･

L/s]

N2

H2

TG240F

Inlet pressure[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

10-110-1

100

101

102

[scc

m]

Thro

ughp

ut

Gas throughputVolume flow rate

[L/s

]

103

102

101

100

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

Sf＞ 80L/min Sf : Volume flow rate of backing pump

TG240F

Inlet pressure

TG240F

ArN2

H2

Volu

me

flow

rate

Sf ＞ 80L/min Sf : Volume flow rate of backing pump

[Torr]

[Pa]10-1 100 101 102

10-3 10-2 10-1

[Pa･

L/s]

104

103

102

101

TG2410F N2 Standard

High gas throughput

Ultra high gas throughput

StandardHigh gas throughputUltra high gas throughput

*Backing vacuum pump speed:2,000L/min

StandardHigh gas throughput

[Pa･

L/s]

Volu

me

flow

rate

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG2410F N2

StandardHigh gas throughputUltra high gas throughput

*Backing vacuum pump speed:2,000L/min

Ultra high gas throughput

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[scc

m]

101

102

103

Thro

ughp

ut

Performance curve

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[L/s

]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 160L/min Sf : Volume flow rate of backing pump

TG220F

Ar

N2H2

Volu

me

flow

rate [P

a･L/

s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 160L/min Sf : Volume flow rate of backing pump

TG220FN2

Ar[scc

m]

100

101

102

Thro

ughp

ut

Performance curve

Performance curve

Ar

H2

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 500L/min Sf : Volume flow rate of backing pump

TG1400F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Ar

N2

Sf = 500L/min Sf : Volume flow rate of backing pump

TG1400F

N2

Performance curve

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

100

101

102

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 160L/min Sf : Volume flow rate of backing pump

TG450F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2H2

TG450F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Ar

N2

Sf = 160L/min Sf : Volume flow rate of backing pump

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG50F

[L/s

]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 50-100L/min Sf : Volume flow rate of backing pump

TG50F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Sf = 50-100L/min Sf : Volume flow rate of backing pump

Ar

N2

Volu

me

flow

rate

Ar

N2H2

[scc

m]

100

101

102

Thro

ughp

ut

Performance curve

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

104

103

102

101

100

[L/s

]

TG350F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Sf = 160L/min Sf : Volume flow rate of backing pump

N2 Ar

TG350F

Ar

N2

H2

Volu

me

flow

rate

Sf = 160L/min Sf : Volume flow rate of backing pump

[scc

m]

100

101

102

Thro

ughp

ut

Performance curve Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 1000L/min Sf : Volume flow rate of backing pump

TG2400F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

ArN2

H2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Ar

Ar

N2

N2

TG2400F

Sf = 1000L/min Sf = 1000L/min

TG2400F TG2400F-40

Sf:Volume flow rate of backing pump

Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

TG800F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2

Ar

N2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

TG800F

Ar

Ar

N2

N2

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Ar N2

N2

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

TG1100F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2

Ar

N2

TG1100F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

TG50F

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Drawing of Outside dimension

AB

C

D

CF63ISO-R63

VG65 14

1218

A B C147

168182

Dφ145φ114φ95

CF63ISO-R63

VG65 14

1218

A B C147

168182

Dφ145φ114φ95

Water cooling

Air cooling

φ113

69.5

47.5

54

62

70

34.5

ISO-Rc1/8

22.5

15

Connector

4-M6 DP13 PCD78

KF16

32

φ11

3

Cooling water Inlet/Outlet

※1：In case of the backing vacuum pump of 100L/min.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush ※Air inrush test (continual 400 times)

■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

TG220F TG350F

TG450F TG800F TG1100FTG1400F

TG2400F

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard setPump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for gas inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL/SEMI-S2/CE

CF160ISO-B160

VG150 12

1222

A B C312.5

312.5327.5

Dφ235φ203φ225

CF160ISO-B160

VG150 12

1222

A B C312.5

312.5327.5

Dφ235φ203φ225

AB

C

D

136

PCD140

φ250

145

80

φ165

ISO-Rc1/4

68

KF40

4-M16 DP25

Connector Cooling water Inlet/Outlet

Vent portPurge gasInlet ISO-G1/4

ISO-G1/4

φ20

0

47.5

AB

C

D

CF100ISO-R100

VG100 15

1221

A B C200

200220

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C200

200220

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C230

214230

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C230

214230

Dφ185φ152φ130

AB

CF200ISO-B200

VG200 16

1625

A B C281

281306

Dφ300φ253φ285

CF200ISO-B200

VG200 16

1625

A B C281

281306

D

AB

C

D

φ300φ253φ285

□120

47.5

C

D

47.5

Air cooling fan

φ250

136

145

PCD140

~167

φ165

φ200

4-M16 DP25

Connector

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4

KF40

CF200ISO-B200

VG200 16

1625

A B C272

300319

Dφ300φ253φ285

CF200ISO-B200

VG200 16

1625

A B C272

300319

D

B

C

D

φ300φ253φ285

AB

AB

TG2400F-40

136

PCD140~167

145□120

φ250

φ165

φ2004-M16 DP25

Connector

KF40

Vent portPurge gas

Air cooling fanInlet ISO-G1/4

ISO-G1/4

47.5

47.5

φ310

186

φ28

6

181

□12

0

35ﾟ

PCD255202

95.5

47.5

6-M16 DP25

KF40

ConnectorAir cooling fan

Purge gasInlet ISO-G1/4

ISO-G1/4 Connector

φ310

186

181

47.5

95.5

35ﾟ

PCD255

54

200 6-M16 DP25

KF40

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4Cooling water Inlet/Outlet Connector

ISO-Rc1/4

CF160ISO-B160

VG150 16

1622

190

190190

A B Cφ235φ203φ225

D

CF160ISO-B160

VG150 16

1622

190

190190

A B Cφ235φ203φ225

D

47.5

φ250

136

145PCD140

68

47.5

ISO-Rc1/4

80φ165

KF40

Connector

4-M16 DP25

Cooling water Inlet/Outlet

Vent portPurge gasInlet ISO-G1/4

ISO-G1/4

φ200

47.5

AB

C

D

136

145

～16

7

φ165

47.5

PCD140

φ200

φ280φ245.5 KF40

4-M16 DP25

ConnectorVent port

Purge gas

Air cooling fan

Inlet ISO-G1/4

ISO-G1/4

□120

47.5

136

145

φ165

PCD140

φ200

φ280

80 ISO-Rc1/4

68

47.5

φ245.5KF40

4-M16 DP25

Connector

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4Cooling water Inlet/Outlet

A

47.5

C

D

φ28

6

ISO-B250VG250

A Bφ350φ335

1616

340340

C D

ISO-B250VG250

A Bφ350φ335

1616

340340

C D

C

D

250

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Specifications

Drawing of Outside dimensionPerformance curveDrawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

※1：In case of the backing vacuum pump of 160L/min. ※1：In case of the backing vacuum pump of 500L/min. ※2：Depends on the power supply model. (standard：TC1104)※3：△◇ cf. p17

※1：In case of the backing vacuum pump of 500L/min.

※1：In case of the backing vacuum pump of 1000L/min. ※2：Depends on the power supply model.

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

※1：In case of the backing vacuum pump of 500L/min. ※2：Depends on the power supply model. (standard：TC1104)※3：△◇ cf. p17

■Any orientation ■Compact size■Energy-saving■Quick shut down with gas vent■Durable structure for air inrush■Built-in controller type■High compression ratio

TG240FDrawing of Outside dimension

Built-in controller type

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.

Pump + Connector for controller◆OptionAir-cooling fan unit, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve,Flanges and Fittings

●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.

15

Pum

ping

Sys

tem

※1：In case of the backing vacuum pump of 80L/min. ※2：TC245 is a built-in controller,TC246 is rack controller.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

Power/Control

100

70

138

45ﾟISO-G1/8

ISO-G1/8

50.5

124

φ154

115

Vent Port

Purge Port

33

94

□60

34

194.

216

6.2

73.5

ConnectorController

φ1544×M8 DP12 PCD140

KF25

ISO-R100

Power/Control

100

21

70

138

45ﾟISO-G1/8

ISO-G1/8

50.5

124

φ152

φ154

115

Vent Port

Purge Port

33

94

□60

34

233.

716

6.2

113Connector

Controller

φ1544×M8 DP12 PCD140

KF25

CF100

CF flange

ISO-R flange

14

Pumping System

Osaka Vacuum, Ltd.

● The TMP pumping system where a number of pieces　 of equipment※1 necessary for high vacuum are　 compactly arranged. It can pump up to high vacuum　 with a simple operation!

● Since it has casters, it can be easily moved to the　 desired place for use.

● Mounted with a turbo molecular pump from the TG-F　 series which is resistant to disturbance! 　 (The pump can be moved while it is operating.)

◆ Line-up of basic sets (three models) in which a turbo　 molecular pump with pumping speed of 50 to 350 L/s is　 mounted.

※1: Turbo molecular pump, backing pump, vacuum piping,　 automatic slow leak valve, control unit(Optional devices and apparatuses are available to match your needs.)

※2：Figures in parentheses show the pumping speed of pumps with a screen.

ModelTMP

Inlet Flange

Backing pump

ST

CRV

：TMP pumping system

：CF：ISO-R：VG

ST220FV0501

12

3

4

2 3 4

Standard Specifications

TMPVolume flow rate N2（L/s）Base pressureInlet FlangeCooling typeVoltage

Model ST050FTG50F　51(49)※2

＜3×10-6Pa（＜2.3×10-8Torr）VG65 / ISO-R63 / CF63

TG220F　220(210)※2

Air CoolingSingle-phase、AC100V

TG350F　350(330)※2

ST220F ST350F

＜1×10-6Pa（＜7.5×10-9Torr）VG100 / ISO-R100 / CF100

ST Series

ST Series

◆ Most compact type among the ST Series! Further　 space saving is achieved with its desktop size!ST-Compact

Introduction of the TMP pumping system

AB

C

D

φ113

95 69.5

34.5

□92

47.5

Connector

Air cooling fan

4-M6 DP13 PCD78

KF16

32

φ11

3

VG65 CF63

64.2

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-R63KF16

514912

1.4×107

5×102

＜ 3×10-6（＜ 2.3×10-8）80

1-1.51-1.5

1330（10）≧ 50

TC64

AB

C

D

33ﾟ

76 57

ISO-G1/4

Inlet ISO-G1/4

φ130

Connector

Vent port

Purge gas

4-M8 DP12 PCD78

φ130

42.5

54.5

KF25

Air cooling fan

105

□92

AB

C

Dφ130

Inlet ISO-G1/4

5776

33ﾟ

60

Connector

4-M8 DP12 PCD78Cooling water Inlet/Outlet ISO-Rc1/8

Vent portISO-G1/4

Purge gas

φ130

42.5

54.5

KF25

AB

C

D

33ﾟ

φ168

76 57ISO-G1/4

Inlet ISO-G1/4

42.5

54.5Connector

Vent port

Purge gas

4-M8 DP12 PCD78

φ130

KF25

Air cooling fan

105

□92

AB

C

Dφ168

76 57

33ﾟ

ISO-G1/4

Inlet ISO-G1/4

ISO-Rc1/8

60

42.5

54.5

Connector

Vent port

Purge gas

4-M8 DP12 PCD78 φ130

Cooling water Inlet/Outlet

KF25

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-R100KF25

2101×108

2×103

＜ 1×10-6（＜ 7.5×10-9）500

2-2.55-6.5

260（2）≧ 80

TC353

VG100

350330

6

CF100

9

330310

※1：In case of the backing vacuum pump of 160L/min

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

AB

C

D

33ﾟ

φ168

76

□92

57ISO-G1/4

Inlet ISO-G1/4

KF25

42.5

54.5

Connector Vent port

Purge gas

4-M8 DP12 PCD78

φ130

Air cooling fan

76 57

33ﾟ

ISO-G1/4

Inlet ISO-G1/4

ISO-Rc1/8

60

φ168

ConnectorVent port

Purge gas

4-M8 DP12 PCD78 φ130

Cooling water Inlet/Outlet

KF25

42.5

54.5

AB

C

D

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-B160KF25450430240

1×108

2×103

＜ 1×10-6（＜ 7.5×10-9）500

2-2.55-6.5

260（2）≧ 80

TC353

VG150 CF160Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

7 10

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup time※2

Shutdown time※2

Max. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

VG,ISO-B/CF kg

VG150、ISO-B160、CF160KF40820750650

1×108

1×104

330（2.5）≧ 250

3307-9

27-32

TC1104

8605.5-712-15

TC1103

TG800F TG800F

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup time※2

Shutdown time※2

Max. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

VG,ISO-B/CF kg

VG200、ISO-B200、CF200KF4011001000720

1×108

1×104

330（2.5）≧ 25028/27

3307-9

27-32

TC1104

8605.5-712-15

TC1103

TG1100F TG1100FInletOutletN2

N2 (with protective screen)H2

N2

H2

N2

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

＜ 1×10-6（＜ 7.5×10-9）

△A◇-60△W◇

＜ 1×10-6（＜ 7.5×10-9）

△A◇-60△W◇

27/26

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

VG250、ISO-B250KF40240023001100

1×108

1.4×103

＜ 1×10-6（＜ 7.5×10-9）

5-715-18

200（1.5）≧ 50045 / 47

900

TC2403

1500

TC2403-10

TG2400F TG2400F-40InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Air / Water

※1 cf. P17※2 Input connecter:1/Remote connector:1/Instruction manual:1copy

TC64 / TC223 / TC353 / TC1104（Panel cut：128H×104W）

TC1103 / TC2403 / TC2403-10 / TC2413 / TC2414 / TC2415（Panel cut：124H×203W）

TC76 / TC246（Panel cut：128H×103.5W）

Power Supply

209

157.526

139

149

5

400

20

4-φ5

2.3

START

F2F1 F3

OSAKA VACUUM,LTD.

STOP/RESET

POWER SUPPLY

150Space for cable

connections

100

20

POWER SUPPLY

OSAKA VACUUM,LTD.

START

F2F1 F3

STOP/RESET

149

513

9

104.5 250

1.62-φ5Space for cable

connections

■Any orientation ■Compact size■Energy saveing ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■High gas throughput

TG2410F

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

ISO-B250VG250 16

16

A B C363363

Dφ350φ335

TG2410F

TG2410F-40

Drawing of Outside dimension

●The inlet flange bolt holes are symmetrical around the center line.

※1：Depends on the power supply model. Please contact us about the Air cooling type.※2：In case of the backing pump of 2000L/min.

ISO-B250VG250 16

16

A B C363363

Dφ350φ335

※This dimensional drawings corresrond to 　TG240F(built-in controller type). 　In the case of TG240F-20, its controller is separated out.

Specifications

※1：In case of the backing vacuum pump of 160L/min.

※Please contact us about the Air cooling type.

100-110/200-230(±10%)

2.7

750

220

800

TC64 TC223 TC353

Input connector: 1 / Remote connector: 1 / Serial communication connector: 1 / Instruction manual: 1 copy / Serial communication instruction manual: 1 copy ※2

TC1104 TC1103 TC2403 / TC2403-10 TC76TC2413 TC2414 TC2415 TC246

50/60

Single

560 520

8.2 2.4

200-230(±10%) 100-230(±10%)

590 610 1200 1400 1200

450

160

1500

120

800

810

Power supply model

Input Voltage

Input Frequency

Input Phases

Input Power

Rated Output Frequency

Weight

Standard accessories

Applicable pump models

（ACV）

（Hz）

（VA）

（Hz）

（kg）

TG50F TG220F TG70F-20TG2410F TG2410F-40 TG240F-20TG2400FTG2400F-40

TG350FTG450F

TG800FTG1100F

TG1400FTG800FTG1100F

△A◇-60△W◇△A◇-60△W◇

※1

Applicable pump models

※Standard backing pump is a Rotary vacuum pump of 50/60L/min. (50/60Hz)

85.5

ISO-R100KF25220210100

1×108

4×102

＜ 1×10-6（＜ 7.5×10-9）400

1-1.22.5-3.5

260（2）≧ 80

TC223

VG100 CF100

T7.3TC245DC24V

75W

T10.5TC246

AC100-230V （±10%）120VA

OSAKA VACUUM,LTD.

POWER

ACCELERATION

NORMAL

FAILURE

START STOP/RESETREMOTE

LOCAL

TURBO CONTROLLER

104.5

149

139

20

250

2×φ5

100Space for cable

connections

Specifications

L/sL/sL/s

ISO-R/CF PaISO-R/CF Torr

sccmmin

Pa（Torr）L/min

kg

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1

Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2

Input VoltageInput Power

TG240F

7.3TC245DC24V

75W

TG240F-20

10.5TC246

AC100-230V （±10%）120VA

ISO-R100/CF100KF25240230160

1×108

4×104

＜ 1×10-6 / ＜ 5×10-7

＜ 7.5×10-9 / ＜ 3.8×10-9

705.5-7.5

700（5.3）≧ 80

Specifications

High gasthroughput

TC2414VG250/ISO-B250

KF40

＜5×10-7

＜3.8×10-9

25005-7

≧ 1000

220020001700

1×108

9000

350(2.6)

TG2410F

normal

TC2413

1800

51

TG2410F-40

52

Ultra high gasthroughput

TC2415

200018001250

9×107

2000

3500

270(2.0)

L/sL/sL/s

PaTorr

sccmmin

Pa（Torr）L/min

kg

N2

N2 (with protective screen)H2

N2

H2

N2

InletOutlet

Model※1

Power Supply

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1※2

Startup timeMax.backing vacuum pumpRecommended backing vacuum pumpWeight

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

Compound Molecular Pumps

Specifications

Standard set

5

Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

7

Compound Molecular Pumps Compound Molecular Pumps

Compound Molecular Pumps Compound Molecular Pumps Compound Molecular Pumps

1213 6

Compound Molecular Pumps

Compound Molecular Pumps

9 1011 8

Osaka Vacuum, Ltd.

Turb

o Co

ntro

ller Turbo M

olecular Pumps

Compound Molecular Pumps

4

Osaka Vacuum, Ltd.

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd.

Compound Molecular Pumps

Osaka Vacuum, Ltd.

Water cooling

Air cooling

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-B200KF4014001300750

1×108

4.3×103

＜ 1×10-6（＜ 7.5×10-9）450

5.5-715-18

330（2.5）≧ 250

TC1103

VG200 CF200

29 30

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

VG250、ISO-B250KF40240023001100

1×108

1.4×103

＜ 1×10-6（＜ 7.5×10-9）

5-715-18

200（1.5）≧ 50045 / 47

900

TC2403

1500

TC2403-10

TG2400F TG2400F-40inletoutletN2

N2 (with protective screen)H2

N2

H2

N2

空冷 / 水冷

Inlet pressure

Performance curve

100

101

102

103

[Pa･

L/s]

N2

H2

TG240F

Inlet pressure[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

10-110-1

100

101

102

[scc

m]

Thro

ughp

ut

Gas throughputVolume flow rate

[L/s

]

103

102

101

100

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

Sf＞ 80L/min Sf : Volume flow rate of backing pump

TG240F

Inlet pressure

TG240F

ArN2

H2

Volu

me

flow

rate

Sf ＞ 80L/min Sf : Volume flow rate of backing pump

[Torr]

[Pa]10-1 100 101 102

10-3 10-2 10-1

[Pa･

L/s]

104

103

102

101

TG2410F N2 Standard

High gas throughput

Ultra high gas throughput

StandardHigh gas throughputUltra high gas throughput

*Backing vacuum pump speed:2,000L/min

StandardHigh gas throughput

[Pa･

L/s]

Volu

me

flow

rate

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG2410F N2

StandardHigh gas throughputUltra high gas throughput

*Backing vacuum pump speed:2,000L/min

Ultra high gas throughput

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[scc

m]

101

102

103

Thro

ughp

ut

Performance curve

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[L/s

]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 160L/min Sf : Volume flow rate of backing pump

TG220F

Ar

N2H2

Volu

me

flow

rate [P

a･L/

s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 160L/min Sf : Volume flow rate of backing pump

TG220FN2

Ar[scc

m]

100

101

102

Thro

ughp

ut

Performance curve

Performance curve

Ar

H2

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 500L/min Sf : Volume flow rate of backing pump

TG1400F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Ar

N2

Sf = 500L/min Sf : Volume flow rate of backing pump

TG1400F

N2

Performance curve

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

100

101

102

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 160L/min Sf : Volume flow rate of backing pump

TG450F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2H2

TG450F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Ar

N2

Sf = 160L/min Sf : Volume flow rate of backing pump

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG50F

[L/s

]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

Sf = 50-100L/min Sf : Volume flow rate of backing pump

TG50F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Sf = 50-100L/min Sf : Volume flow rate of backing pump

Ar

N2

Volu

me

flow

rate

Ar

N2H2

[scc

m]

100

101

102

Thro

ughp

ut

Performance curve

[Pa･

L/s]

103

102

101

100

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

104

103

102

101

100

[L/s

]

TG350F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Sf = 160L/min Sf : Volume flow rate of backing pump

N2 Ar

TG350F

Ar

N2

H2

Volu

me

flow

rate

Sf = 160L/min Sf : Volume flow rate of backing pump

[scc

m]

100

101

102

Thro

ughp

ut

Performance curve Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

Sf = 1000L/min Sf : Volume flow rate of backing pump

TG2400F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

ArN2

H2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

Ar

Ar

N2

N2

TG2400F

Sf = 1000L/min Sf = 1000L/min

TG2400F TG2400F-40

Sf:Volume flow rate of backing pump

Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

TG800F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2

Ar

N2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

TG800F

Ar

Ar

N2

N2

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

Performance curve

[Pa･

L/s]

104

103

102

101

[Torr]

[Pa]10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[scc

m]

101

102

103

Thro

ughp

ut

Ar N2

N2

Volu

me

flow

rate

104

103

102

101

100

[L/s

]

TG1100F

[Torr]

10-3 10-2 10-1 100 101 102[Pa]

10-5 10-4 10-3 10-2 10-1

Ar

N2

Ar

N2

TG1100F

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

TC1104 Sf = 500L/min TC1103 Sf = 500L/min

Sf:Volume flow rate of backing pump

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

TG50F

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Drawing of Outside dimension

AB

C

D

CF63ISO-R63

VG65 14

1218

A B C147

168182

Dφ145φ114φ95

CF63ISO-R63

VG65 14

1218

A B C147

168182

Dφ145φ114φ95

Water cooling

Air cooling

φ113

69.5

47.5

54

62

70

34.5

ISO-Rc1/8

22.5

15

Connector

4-M6 DP13 PCD78

KF16

32

φ11

3

Cooling water Inlet/Outlet

※1：In case of the backing vacuum pump of 100L/min.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush ※Air inrush test (continual 400 times)

■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

TG220F TG350F

TG450F TG800F TG1100FTG1400F

TG2400F

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard setPump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for gas inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL / SEMI-S2 / CE

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Any orientation ■Compact size■Energy-saving ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■Certificated safety standard NRTL/SEMI-S2/CE

CF160ISO-B160

VG150 12

1222

A B C312.5

312.5327.5

Dφ235φ203φ225

CF160ISO-B160

VG150 12

1222

A B C312.5

312.5327.5

Dφ235φ203φ225

AB

C

D

136

PCD140

φ250

145

80

φ165

ISO-Rc1/4

68

KF40

4-M16 DP25

Connector Cooling water Inlet/Outlet

Vent portPurge gasInlet ISO-G1/4

ISO-G1/4

φ20

0

47.5

AB

C

D

CF100ISO-R100

VG100 15

1221

A B C200

200220

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C200

200220

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C230

214230

Dφ185φ152φ130

CF100ISO-R100

VG100 15

1221

A B C230

214230

Dφ185φ152φ130

AB

CF200ISO-B200

VG200 16

1625

A B C281

281306

Dφ300φ253φ285

CF200ISO-B200

VG200 16

1625

A B C281

281306

D

AB

C

D

φ300φ253φ285

□120

47.5

C

D

47.5

Air cooling fan

φ250

136

145

PCD140

~167

φ165

φ200

4-M16 DP25

Connector

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4

KF40

CF200ISO-B200

VG200 16

1625

A B C272

300319

Dφ300φ253φ285

CF200ISO-B200

VG200 16

1625

A B C272

300319

D

B

C

D

φ300φ253φ285

AB

AB

TG2400F-40

136

PCD140~167

145□120

φ250

φ165

φ2004-M16 DP25

Connector

KF40

Vent portPurge gas

Air cooling fanInlet ISO-G1/4

ISO-G1/4

47.5

47.5

φ310

186

φ28

6

181

□12

0

35ﾟ

PCD255202

95.5

47.5

6-M16 DP25

KF40

ConnectorAir cooling fan

Purge gasInlet ISO-G1/4

ISO-G1/4 Connector

φ310

186

181

47.5

95.5

35ﾟ

PCD255

54

200 6-M16 DP25

KF40

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4Cooling water Inlet/Outlet Connector

ISO-Rc1/4

CF160ISO-B160

VG150 16

1622

190

190190

A B Cφ235φ203φ225

D

CF160ISO-B160

VG150 16

1622

190

190190

A B Cφ235φ203φ225

D

47.5

φ250

136

145PCD140

68

47.5

ISO-Rc1/4

80φ165

KF40

Connector

4-M16 DP25

Cooling water Inlet/Outlet

Vent portPurge gasInlet ISO-G1/4

ISO-G1/4

φ200

47.5

AB

C

D

136

145

～16

7

φ165

47.5

PCD140

φ200

φ280φ245.5 KF40

4-M16 DP25

ConnectorVent port

Purge gas

Air cooling fan

Inlet ISO-G1/4

ISO-G1/4

□120

47.5

136

145

φ165

PCD140

φ200

φ280

80 ISO-Rc1/4

68

47.5

φ245.5KF40

4-M16 DP25

Connector

Vent port

Purge gasInlet ISO-G1/4

ISO-G1/4Cooling water Inlet/Outlet

A

47.5

C

D

φ28

6

ISO-B250VG250

A Bφ350φ335

1616

340340

C D

ISO-B250VG250

A Bφ350φ335

1616

340340

C D

C

D

250

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Water cooling

Air cooling

Specifications

Drawing of Outside dimensionPerformance curveDrawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

Specifications

Drawing of Outside dimension

※1：In case of the backing vacuum pump of 160L/min. ※1：In case of the backing vacuum pump of 500L/min. ※2：Depends on the power supply model. (standard：TC1104)※3：△◇ cf. p17

※1：In case of the backing vacuum pump of 500L/min.

※1：In case of the backing vacuum pump of 1000L/min. ※2：Depends on the power supply model.

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

※1：In case of the backing vacuum pump of 500L/min. ※2：Depends on the power supply model. (standard：TC1104)※3：△◇ cf. p17

■Any orientation ■Compact size■Energy-saving■Quick shut down with gas vent■Durable structure for air inrush■Built-in controller type■High compression ratio

TG240FDrawing of Outside dimension

Built-in controller type

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.

Pump + Connector for controller◆OptionAir-cooling fan unit, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve,Flanges and Fittings

●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.

15

Pum

ping

Sys

tem

※1：In case of the backing vacuum pump of 80L/min. ※2：TC245 is a built-in controller,TC246 is rack controller.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

●The inlet flange bolt holes are symmetrical around the center line.

Power/Control

100

70

138

45ﾟISO-G1/8

ISO-G1/8

50.5

124

φ154

115

Vent Port

Purge Port

33

94

□60

34

194.

216

6.2

73.5

ConnectorController

φ1544×M8 DP12 PCD140

KF25

ISO-R100

Power/Control

100

21

70

138

45ﾟISO-G1/8

ISO-G1/8

50.5

124

φ152

φ154

115

Vent Port

Purge Port

33

94

□60

34

233.

716

6.2

113Connector

Controller

φ1544×M8 DP12 PCD140

KF25

CF100

CF flange

ISO-R flange

14

Pumping System

Osaka Vacuum, Ltd.

● The TMP pumping system where a number of pieces　 of equipment※1 necessary for high vacuum are　 compactly arranged. It can pump up to high vacuum　 with a simple operation!

● Since it has casters, it can be easily moved to the　 desired place for use.

● Mounted with a turbo molecular pump from the TG-F　 series which is resistant to disturbance! 　 (The pump can be moved while it is operating.)

◆ Line-up of basic sets (three models) in which a turbo　 molecular pump with pumping speed of 50 to 350 L/s is　 mounted.

※1: Turbo molecular pump, backing pump, vacuum piping,　 automatic slow leak valve, control unit(Optional devices and apparatuses are available to match your needs.)

※2：Figures in parentheses show the pumping speed of pumps with a screen.

ModelTMP

Inlet Flange

Backing pump

ST

CRV

：TMP pumping system

：CF：ISO-R：VG

ST220FV0501

12

3

4

2 3 4

Standard Specifications

TMPVolume flow rate N2（L/s）Base pressureInlet FlangeCooling typeVoltage

Model ST050FTG50F　51(49)※2

＜3×10-6Pa（＜2.3×10-8Torr）VG65 / ISO-R63 / CF63

TG220F　220(210)※2

Air CoolingSingle-phase、AC100V

TG350F　350(330)※2

ST220F ST350F

＜1×10-6Pa（＜7.5×10-9Torr）VG100 / ISO-R100 / CF100

ST Series

ST Series

◆ Most compact type among the ST Series! Further　 space saving is achieved with its desktop size!ST-Compact

Introduction of the TMP pumping system

AB

C

D

φ113

95 69.5

34.5

□92

47.5

Connector

Air cooling fan

4-M6 DP13 PCD78

KF16

32

φ11

3

VG65 CF63

64.2

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-R63KF16

514912

1.4×107

5×102

＜ 3×10-6（＜ 2.3×10-8）80

1-1.51-1.5

1330（10）≧ 50

TC64

AB

C

D

33ﾟ

76 57

ISO-G1/4

Inlet ISO-G1/4

φ130

Connector

Vent port

Purge gas

4-M8 DP12 PCD78

φ130

42.5

54.5

KF25

Air cooling fan

105

□92

AB

C

Dφ130

Inlet ISO-G1/4

5776

33ﾟ

60

Connector

4-M8 DP12 PCD78Cooling water Inlet/Outlet ISO-Rc1/8

Vent portISO-G1/4

Purge gas

φ130

42.5

54.5

KF25

AB

C

D

33ﾟ

φ168

76 57ISO-G1/4

Inlet ISO-G1/4

42.5

54.5Connector

Vent port

Purge gas

4-M8 DP12 PCD78

φ130

KF25

Air cooling fan

105

□92

AB

C

Dφ168

76 57

33ﾟ

ISO-G1/4

Inlet ISO-G1/4

ISO-Rc1/8

6042

.5

54.5

Connector

Vent port

Purge gas

4-M8 DP12 PCD78 φ130

Cooling water Inlet/Outlet

KF25

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-R100KF25

2101×108

2×103

＜ 1×10-6（＜ 7.5×10-9）500

2-2.55-6.5

260（2）≧ 80

TC353

VG100

350330

6

CF100

9

330310

※1：In case of the backing vacuum pump of 160L/min

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

AB

C

D

33ﾟ

φ168

76

□92

57ISO-G1/4

Inlet ISO-G1/4

KF25

42.5

54.5

Connector Vent port

Purge gas

4-M8 DP12 PCD78

φ130

Air cooling fan

76 57

33ﾟ

ISO-G1/4

Inlet ISO-G1/4

ISO-Rc1/8

60

φ168

ConnectorVent port

Purge gas

4-M8 DP12 PCD78 φ130

Cooling water Inlet/Outlet

KF25

42.5

54.5

AB

C

D

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

ISO-B160KF25450430240

1×108

2×103

＜ 1×10-6（＜ 7.5×10-9）500

2-2.55-6.5

260（2）≧ 80

TC353

VG150 CF160Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

7 10

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup time※2

Shutdown time※2

Max. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

VG,ISO-B/CF kg

VG150、ISO-B160、CF160KF40820750650

1×108

1×104

330（2.5）≧ 250

3307-9

27-32

TC1104

8605.5-712-15

TC1103

TG800F TG800F

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup time※2

Shutdown time※2

Max. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

VG,ISO-B/CF kg

VG200、ISO-B200、CF200KF4011001000720

1×108

1×104

330（2.5）≧ 25028/27

3307-9

27-32

TC1104

8605.5-712-15

TC1103

TG1100F TG1100FInletOutletN2

N2 (with protective screen)H2

N2

H2

N2

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

＜ 1×10-6（＜ 7.5×10-9）

△A◇-60△W◇

＜ 1×10-6（＜ 7.5×10-9）

△A◇-60△W◇

27/26

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1※2

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

VG250、ISO-B250KF40240023001100

1×108

1.4×103

＜ 1×10-6（＜ 7.5×10-9）

5-715-18

200（1.5）≧ 50045 / 47

900

TC2403

1500

TC2403-10

TG2400F TG2400F-40InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Air / Water

※1 cf. P17※2 Input connecter:1/Remote connector:1/Instruction manual:1copy

TC64 / TC223 / TC353 / TC1104（Panel cut：128H×104W）

TC1103 / TC2403 / TC2403-10 / TC2413 / TC2414 / TC2415（Panel cut：124H×203W）

TC76 / TC246（Panel cut：128H×103.5W）

Power Supply

209

157.526

139

149

5

400

20

4-φ5

2.3

START

F2F1 F3

OSAKA VACUUM,LTD.

STOP/RESET

POWER SUPPLY

150Space for cable

connections

100

20

POWER SUPPLY

OSAKA VACUUM,LTD.

START

F2F1 F3

STOP/RESET

149

513

9

104.5 250

1.62-φ5Space for cable

connections

■Any orientation ■Compact size■Energy saveing ■Quick start up■Durable structure for air inrush■Serial communication ※RS232C Serial interface

■High gas throughput

TG2410F

Standard set

●Ambient temperature for useThe ambient temperature range to assure of the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures of the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

ISO-B250VG250 16

16

A B C363363

Dφ350φ335

TG2410F

TG2410F-40

Drawing of Outside dimension

●The inlet flange bolt holes are symmetrical around the center line.

※1：Depends on the power supply model. Please contact us about the Air cooling type.※2：In case of the backing pump of 2000L/min.

ISO-B250VG250 16

16

A B C363363

Dφ350φ335

※This dimensional drawings corresrond to 　TG240F(built-in controller type). 　In the case of TG240F-20, its controller is separated out.

Specifications

※1：In case of the backing vacuum pump of 160L/min.

※Please contact us about the Air cooling type.

100-110/200-230(±10%)

2.7

750

220

800

TC64 TC223 TC353

Input connector: 1 / Remote connector: 1 / Serial communication connector: 1 / Instruction manual: 1 copy / Serial communication instruction manual: 1 copy ※2

TC1104 TC1103 TC2403 / TC2403-10 TC76TC2413 TC2414 TC2415 TC246

50/60

Single

560 520

8.2 2.4

200-230(±10%) 100-230(±10%)

590 610 1200 1400 1200

450

160

1500

120

800

810

Power supply model

Input Voltage

Input Frequency

Input Phases

Input Power

Rated Output Frequency

Weight

Standard accessories

Applicable pump models

（ACV）

（Hz）

（VA）

（Hz）

（kg）

TG50F TG220F TG70F-20TG2410F TG2410F-40 TG240F-20TG2400FTG2400F-40

TG350FTG450F

TG800FTG1100F

TG1400FTG800FTG1100F

△A◇-60△W◇△A◇-60△W◇

※1

Applicable pump models

※Standard backing pump is a Rotary vacuum pump of 50/60L/min. (50/60Hz)

85.5

ISO-R100KF25220210100

1×108

4×102

＜ 1×10-6（＜ 7.5×10-9）400

1-1.22.5-3.5

260（2）≧ 80

TC223

VG100 CF100

T7.3TC245DC24V

75W

T10.5TC246

AC100-230V （±10%）120VA

OSAKA VACUUM,LTD.

POWER

ACCELERATION

NORMAL

FAILURE

START STOP/RESETREMOTE

LOCAL

TURBO CONTROLLER

104.5

149

139

20

250

2×φ5

100Space for cable

connections

Specifications

L/sL/sL/s

ISO-R/CF PaISO-R/CF Torr

sccmmin

Pa（Torr）L/min

kg

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1

Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2

Input VoltageInput Power

TG240F

7.3TC245DC24V

75W

TG240F-20

10.5TC246

AC100-230V （±10%）120VA

ISO-R100/CF100KF25240230160

1×108

4×104

＜ 1×10-6 / ＜ 5×10-7

＜ 7.5×10-9 / ＜ 3.8×10-9

705.5-7.5

700（5.3）≧ 80

Specifications

High gasthroughput

TC2414VG250/ISO-B250

KF40

＜5×10-7

＜3.8×10-9

25005-7

≧ 1000

220020001700

1×108

9000

350(2.6)

TG2410F

normal

TC2413

1800

51

TG2410F-40

52

Ultra high gasthroughput

TC2415

200018001250

9×107

2000

3500

270(2.0)

L/sL/sL/s

PaTorr

sccmmin

Pa（Torr）L/min

kg

N2

N2 (with protective screen)H2

N2

H2

N2

InletOutlet

Model※1

Power Supply

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1※2

Startup timeMax.backing vacuum pumpRecommended backing vacuum pumpWeight

Flange

Volume flow rate

Max. compression ratio

Base pressureMax. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightPower Supply

17

Osaka Vacuum, Ltd.

Specifications

3

Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps Pumping System

Osaka Vacuum, Ltd.

STC70FR005 STC70FR013

95

283

346

338

269

198

355

TG70FRABInput Connector Input Connector

TC76ISO-R63

Diaphragm Pump

39

52.5 ISO-G1/8

Vent port

5 ［l/min］

95

283

346

338

373

269

198

161

TG70FRNB

TC76ISO-R63

Diaphragm PumpMain power switch

Main power switch

39

52

.5

〜145

Cooling fan

13 ［l/min］

ISO-G1/8Vent port

CF63ISO-R63 12

18A B C

144.5170D

φ114φ95

CF63ISO-R63 12

18A B C

144.5170D

50.576E

50.576E

115.5141

F

115.5141

Fφ114φ95

30°54φ102 68.5

54

Power/Control

ISO-G1/8

ISO-G1/8

φ102

70

103

(54)

109.5 10

0

4-M6 DP13 PCD92

(Purge Gas Inlet)

KF16

Purge Gas Inlet

Controller

Connector

Vent Port

□40

54

～92

30°54φ102 68.5

54

Power/Control

(54)

ISO-G1/8

ISO-G1/8

φ102

70

103

109.5 10

0 Fan

4-M6 DP13 PCD92

(Purge Gas Inlet)

KF16

Purge Gas Inlet

Controller

Connector

Vent Port

AB

C

DF

EF

AB

C

D F FE

Performance curve

[Pa･

L/s]

102

101

100

10-1

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[scc

m]

10-1

100

101

Thro

ughp

ut

[L/s

]

Volu

me

flow

rate

103

102

101

100

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

Sf = 25-100L/min Sf : Volume flow rate of backing pump

TG70F

Ar

H2

N2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

H2N2

N2

Sf > 25L/min Forced air cooling Sf > 25L/min Free convection air cooling Sf > 25L/min

Sf : Volume flow rate of backing pump

TG70F

1 18

Osaka Vacuum, Ltd.

T u r b oMolecularP u m p s

OSAKA VACUUM

Any orientationEasy operation

Compact size Light weight

Turbo Molecular Pumps

Characteristics ofCompound Molecular Pumps

Oil free pumpingEnergy-saving

Maintenance free Serial communicationRS232C Serial interface

Certificatedsafety standard NRTL SEMI-S2 CE

02-TG-E-10

Compound Molecular Pumps

Products Line-up

Series of Turbo Molecular Pumps

◎ Corrosive Resistant Type in 200～1300L/s.

◎ Standard Type & Corrosive Resistant Type in 　1800～5500L/s.

Compound Molecular Pumps（TG series）

◎ Standard Type & Corrosive Resistant Type in 300～3400L/s.

◎ Vibration Free with UFRC. (Unbalance Force Rejection Control )

◎ Model coupling free.

◎ Rotational speed control.　

◎ Thermal insulation structure is available. (Special version)　

Magnetically Levitated Compound Molecular Pumps（TG-M series）

Recommended O/H cycle 20,000～30,000 hrs

Motor cable

Fan cable

MC1/TC-**MC3/TC-**MC5/TC-**MC7/TC-**MC10/TC-**MC15/TC-**MC20/TC-**FC1/TC-FC3/TC-FC5/TC-FC7/TC-FC10/TC-FC15/TC-FC20/TC-

1m3m5m7m

10m15m20m1m3m5m7m

10m15m20m

length modelCable model（Standard length：※33m）

…TG50F / TG220F / TG350F / TG450F…TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F

**

※3 Please contact us about the cable which out of standard length.※4 Please contact us about TG70/240F.

S2AS2M2…TG50F / TG220F / TG350F / TG450F / TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F

S2M2

2

● Wide pressure range pumping● High throughput● Quick start up ● Durable design against air inrush and sudden pressure rise ● Long life

Compound Molecular Pumps (CMP) is Turbo Molecular Pumps (TMP) which combined turbine and helical grooves.CMP was first developed by Osaka Vacuum in the world.And now, this type becomes the most popular type of TMP.

Applications: • Manufacturing of semiconductor, FPD, electronic parts, and other • Analysis & examination device • Research and development, … etc.

e.g.) 1-1.2 min with TG220F

2017.04.PDF

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■High compression ratio■Built-in controller type■Certificated safety standard NRTL/SEMI-S2/CE ( for TG70F-20)

TG70FDrawing of Outside dimension

Air cooling

Natural air cooling

16

● More compact ST series has come out!

● Mounted with high compression turbo molecular pump　 TG70F!

● One of two kinds of backing pump (diaphragm pump)　 can be selected to match for exhausting chamber!

● Space saving design of A4 laptop size!

● Most suitable for use as easy operating and portable　 pumping units for R&D!

※1：A muffler is mounted on the exhaust port of the diaphragm (at the open-air side).

※1

Specifications

Drawing of outside dimension

Power supply modelISO-R63

G1/8

Diaphragm pump

70 L/s10-6 Pa order

Instruction manual:1 copy/Input cable(5m):1

STC70FR013

TG70FRNB

13L/min

19kgAC100V(-10%～+6%)

210VA

STC70FR005

TG70FRAB

4.2L/min

14kgAC100V(±10%)

200VA

ST-Compact

STC70FR005

STC70FR013

TG70F Pumping System

●The inlet flange bolt holes are symmetrical around the center line.

※This dimensional drawings correspond to TG70F (built-in controller type).In the case of TG70F-20, it is separated out its controller.

Built-in controller type

Standard set

●Ambient temperature for useThe ambient temperature range to assure reaching the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.

Pump + Connector for controller◆OptionAir-cooling fan unit, controller, Motor Cable(TG70F-20), Automatic slow leak valve, Purge gas inlet connector,Precision needle valve, Flanges and Fittings

●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.

※1：In case of the backing vacuum pump of 25L/min.※2：TC75 is a built-in controller,TC76 is rack controller.

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1

Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2

Input VoltageInput Power

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

ISO-R/CF L/sISO-R/CF L/sISO-R/CF L/s

ISO-R/CF PaISO-R/CF Torr

Free convection/Forced air cooling sccmmin

Pa（Torr）L/min

ISO-R/CF kg

ISO-R63、CF63KF16

70 / 7565 / 7040 / 451×108

1×105

＜ 5×10-7/＜ 1×10-7

＜ 3.8×10-9/＜ 7.5×10-10

10 / 202-2.5

1200（9）≧ 253 / 5

TG70F

TC75DC24V120W

TG70F-20

TC76AC100-230V（±10%）

160VA

Inlet FlangeOutlet FlangeTMP

Backing vacuum pump

Volume flow rate (N2)Base pressureWeightVoltageInput PowerStandard accessories

TG220F※VAB1 2 3 4 5 6 7

※Please contact us for models other than the above.

※4

◎ For corrosive gas applications, please use the TG or TG-M series with the corrosive resistant type.

Compound Molecular Pumps

Osaka Head office　

JQA-QMA1902NABARI FACTORY

JQA-EMA5143

TG50F

TG70F

TG220F

TG240F

TG350F

TG450F

TG800F

TG1100F

TG1400F

TG2400F

TG2410F

ModelTypeTG50FCABTG50FRABTG50FVABTG50FCWBTG50FRWBTG50FVWBTG70FCNBTG70FCABTG70FRNBTG70FRABTG70FCNB-20TG70FCAB-20TG70FRNB-20TG70FRAB-20TG220FCABTG220FRABTG220FVABTG220FCWBTG220FRWBTG220FVWBTG240FCABTG240FRABTG240FCAB-20TG240FRAB-20TG350FCABTG350FRABTG350FVABTG350FCWBTG350FRWBTG350FVWBTG450FCABTG450FBABTG450FVABTG450FCWBTG450FBWBTG450FVWBTG800FCABTG800FBABTG800FVABTG800FCAB-60TG800FBAB-60TG800FVAB-60TG800FCWBTG800FBWBTG800FVWBTG1100FCABTG1100FBABTG1100FVABTG1100FCAB-60TG1100FBAB-60TG1100FVAB-60TG1100FCWBTG1100FBWBTG1100FVWBTG1400FCABTG1400FBABTG1400FVABTG1400FCWBTG1400FBWBTG1400FVWBTG2400FBABTG2400FVABTG2400FBWBTG2400FVWBTG2400FBWB-40TG2400FVWB-40TG2410FBABTG2410FVABTG2410FBWBTG2410FVWBTG2410FBWB-40TG2410FVWB-40

◎ Standard Type & Corrosive Resistant Type in 2200L/s, 3300L/s, 4200L/s.◎ Integrated controller/power supply, very compact footprint. ◎ Wide pressure range applications, capable of pumping at high throughput. ◎ High compression ratio, low Base pressure.◎ Variable rotational speed control(110rps-450rps).

※1 Standard FlangeCF ： JVIS 003 Bakeable Flanges : Dimensions-Knife-edge sealed typeISO-B ： ISO1609:1986 Vacuum technology - Flange dimensions （Bolted type）ISO-R ： ISO1609:1986 Vacuum technology - Flange dimensions　　　　（Clamped or rotatable type）VG ： JISB2290 :1998 Vacuum technology-Flange :dimensions 　　　　（Vacuum flange with O-ring groove）KF ： ISO2861/1:1974 Vacuum technology - Quick-release couplings 　　　　- Dimensions - Part 1（Clamped type）

※2 Some models are not written

Model

Size

Bearingsystem

SpecialStructure

Inlet Flange※1

Coolingsystem

Specificationtype

Near Volume flow rate（N2）

FM

ILRUCBRVANWB※2

C

1

2

3

4

5

6

7

Notwritten( )

Notwritten( )

：Compound Molecular Pumps

：Ball bearing（oil lubrication）：Ball bearing（grease lubrication）：Magnetically levitated：Standard type：Corrosive resistant type：Reaction by-product prevention：Ultra low vibration type：Radiation hardened type：Ultra high vacuum type：CF：ISO-B：ISO-R：VG：Air cooling：Natural air cooling：Water cooling：Standard type：Corrosive resistant type

TGTGkine

Magnetically Levitated Compound Molecular Pumps with Integrated Control Unit（TG kine 2200M）

3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645

3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645

Korea/Seoul Office Shin Won Tech. Co., Ltd.

Taiwan/Cutes Corporation

China/Shanghai Osaka Vacuum, Ltd.

■ TMP service support center

UK/EBARA Precision Machinery Europe GmBH

France/Paris Liaison Office

U.S.A.

Korea

Tel：+82-32-814-6331 Fax：+82-32-814-7301

■Shin Won Tech. Co., Ltd.(maintenance)

Taiwan2-22 Nan Yuan Road, Chung Li City 32063 Taiwan, R.O.C.

Tel：+886-3-452-6161 Fax：+886-3-451-1347

■Cutes Corporation

ChinaSouth A,T52-4-1F,No.1510,Chuanqiao Rd.,Pudong,Shanghai 201206 P. R. China

Tel：+86-21-5031-1522 Fax：+86-21-5031-1523

Tel support Field support Maintenance Local stock

#12LT 36Bl Namdong Industry Area, Namdong-Ku, Inchon 450-100 Korea

■Shanghai Osaka Vacuum, Ltd.

48000 Fremont Blvd, Fremont, CA 94538 U.S.A.Tel：+1-510-770-0100 Fax：+1-510-770-0104

■Osaka Vacuum U.S.A., Inc.

Leaders Bldg., 274-4, Seohyun-Dong, Bundang-ku, Seongnam-Si, Gyeonggi-Do 463-824 KoreaTel：+82-31-707-0002 Fax：+82-31-707-3339

■Seoul office(sales)

51 Main Avenue, Sacramento, CA 95838 USATel：+1-916-920-5451 Fax：+1-916-830-1900

■Ebara Technologies Inc.

U.S.A./Osaka Vacuum U.S.A.,Inc. Ebara Technologies Inc.

Japan/Nabari FactoryTMP Service Group

JapanTel：+81-595-64-1162 Fax：+81-595-64-1163

■Nabari Factory TMP Service Group1300-81 Yabata, Nabari, Mie 518-0605, Japan

Europe2 Cochrane Square Brucefield Industrial Estate Livingston EH54 9DR, UK

Tel：+44(0)1506 460232 Fax：+44(0)1506 460222

■EBARA Precision Machinery Europe GmBH

17

Osaka Vacuum, Ltd.

Specifications

3

Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps Pumping System

Osaka Vacuum, Ltd.

STC70FR005 STC70FR013

95

283

346

338

269

198

355

TG70FRABInput Connector Input Connector

TC76ISO-R63

Diaphragm Pump

39

52.5 ISO-G1/8

Vent port

5 ［l/min］

95

283

346

338

373

269

198

161

TG70FRNB

TC76ISO-R63

Diaphragm PumpMain power switch

Main power switch

39

52

.5

〜145

Cooling fan

13 ［l/min］

ISO-G1/8Vent port

CF63ISO-R63 12

18A B C

144.5170D

φ114φ95

CF63ISO-R63 12

18A B C

144.5170D

50.576E

50.576E

115.5141

F

115.5141

Fφ114φ95

30°54φ102 68.5

54

Power/Control

ISO-G1/8

ISO-G1/8

φ102

70

103

(54)

109.5 10

0

4-M6 DP13 PCD92

(Purge Gas Inlet)

KF16

Purge Gas Inlet

Controller

Connector

Vent Port

□40

54

～92

30°54φ102 68.5

54

Power/Control

(54)

ISO-G1/8

ISO-G1/8

φ102

70

103

109.5 10

0 Fan

4-M6 DP13 PCD92

(Purge Gas Inlet)

KF16

Purge Gas Inlet

Controller

Connector

Vent Port

AB

C

DF

EF

AB

C

D F FE

Performance curve

[Pa･

L/s]

102

101

100

10-1

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[scc

m]

10-1

100

101

Thro

ughp

ut

[L/s

]

Volu

me

flow

rate

103

102

101

100

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

Sf = 25-100L/min Sf : Volume flow rate of backing pump

TG70F

Ar

H2

N2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

H2N2

N2

Sf > 25L/min Forced air cooling Sf > 25L/min Free convection air cooling Sf > 25L/min

Sf : Volume flow rate of backing pump

TG70F

1 18

Osaka Vacuum, Ltd.

T u r b oMolecularP u m p s

OSAKA VACUUM

Any orientationEasy operation

Compact size Light weight

Turbo Molecular Pumps

Characteristics ofCompound Molecular Pumps

Oil free pumpingEnergy-saving

Maintenance free Serial communicationRS232C Serial interface

Certificatedsafety standard NRTL SEMI-S2 CE

02-TG-E-10

Compound Molecular Pumps

Products Line-up

Series of Turbo Molecular Pumps

◎ Corrosive Resistant Type in 200～1300L/s.

◎ Standard Type & Corrosive Resistant Type in 　1800～5500L/s.

Compound Molecular Pumps（TG series）

◎ Standard Type & Corrosive Resistant Type in 300～3400L/s.

◎ Vibration Free with UFRC. (Unbalance Force Rejection Control )

◎ Model coupling free.

◎ Rotational speed control.　

◎ Thermal insulation structure is available. (Special version)　

Magnetically Levitated Compound Molecular Pumps（TG-M series）

Recommended O/H cycle 20,000～30,000 hrs

Motor cable

Fan cable

MC1/TC-**MC3/TC-**MC5/TC-**MC7/TC-**MC10/TC-**MC15/TC-**MC20/TC-**FC1/TC-FC3/TC-FC5/TC-FC7/TC-FC10/TC-FC15/TC-FC20/TC-

1m3m5m7m

10m15m20m1m3m5m7m

10m15m20m

length modelCable model（Standard length：※33m）

…TG50F / TG220F / TG350F / TG450F…TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F

**

※3 Please contact us about the cable which out of standard length.※4 Please contact us about TG70/240F.

S2AS2M2…TG50F / TG220F / TG350F / TG450F / TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F

S2M2

2

● Wide pressure range pumping● High throughput● Quick start up ● Durable design against air inrush and sudden pressure rise ● Long life

Compound Molecular Pumps (CMP) is Turbo Molecular Pumps (TMP) which combined turbine and helical grooves.CMP was first developed by Osaka Vacuum in the world.And now, this type becomes the most popular type of TMP.

Applications: • Manufacturing of semiconductor, FPD, electronic parts, and other • Analysis & examination device • Research and development, … etc.

e.g.) 1-1.2 min with TG220F

2017.04.PDF

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■High compression ratio■Built-in controller type■Certificated safety standard NRTL/SEMI-S2/CE ( for TG70F-20)

TG70FDrawing of Outside dimension

Air cooling

Natural air cooling

16

● More compact ST series has come out!

● Mounted with high compression turbo molecular pump　 TG70F!

● One of two kinds of backing pump (diaphragm pump)　 can be selected to match for exhausting chamber!

● Space saving design of A4 laptop size!

● Most suitable for use as easy operating and portable　 pumping units for R&D!

※1：A muffler is mounted on the exhaust port of the diaphragm (at the open-air side).

※1

Specifications

Drawing of outside dimension

Power supply modelISO-R63

G1/8

Diaphragm pump

70 L/s10-6 Pa order

Instruction manual:1 copy/Input cable(5m):1

STC70FR013

TG70FRNB

13L/min

19kgAC100V(-10%～+6%)

210VA

STC70FR005

TG70FRAB

4.2L/min

14kgAC100V(±10%)

200VA

ST-Compact

STC70FR005

STC70FR013

TG70F Pumping System

●The inlet flange bolt holes are symmetrical around the center line.

※This dimensional drawings correspond to TG70F (built-in controller type).In the case of TG70F-20, it is separated out its controller.

Built-in controller type

Standard set

●Ambient temperature for useThe ambient temperature range to assure reaching the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.

Pump + Connector for controller◆OptionAir-cooling fan unit, controller, Motor Cable(TG70F-20), Automatic slow leak valve, Purge gas inlet connector,Precision needle valve, Flanges and Fittings

●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.

※1：In case of the backing vacuum pump of 25L/min.※2：TC75 is a built-in controller,TC76 is rack controller.

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1

Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2

Input VoltageInput Power

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

ISO-R/CF L/sISO-R/CF L/sISO-R/CF L/s

ISO-R/CF PaISO-R/CF Torr

Free convection/Forced air cooling sccmmin

Pa（Torr）L/min

ISO-R/CF kg

ISO-R63、CF63KF16

70 / 7565 / 7040 / 451×108

1×105

＜ 5×10-7/＜ 1×10-7

＜ 3.8×10-9/＜ 7.5×10-10

10 / 202-2.5

1200（9）≧ 253 / 5

TG70F

TC75DC24V120W

TG70F-20

TC76AC100-230V（±10%）

160VA

Inlet FlangeOutlet FlangeTMP

Backing vacuum pump

Volume flow rate (N2)Ultimate pressureWeightVoltageInput PowerStandard accessories

TG220F※VAB1 2 3 4 5 6 7

※Please contact us for models other than the above.

※4

◎ For corrosive gas applications, please use the TG or TG-M series with the corrosive resistant type.

Compound Molecular Pumps

Osaka Head office　

JQA-QMA1902NABARI FACTORY

JQA-EMA5143

TG50F

TG70F

TG220F

TG240F

TG350F

TG450F

TG800F

TG1100F

TG1400F

TG2400F

TG2410F

ModelTypeTG50FCABTG50FRABTG50FVABTG50FCWBTG50FRWBTG50FVWBTG70FCNBTG70FCABTG70FRNBTG70FRABTG70FCNB-20TG70FCAB-20TG70FRNB-20TG70FRAB-20TG220FCABTG220FRABTG220FVABTG220FCWBTG220FRWBTG220FVWBTG240FCABTG240FRABTG240FCAB-20TG240FRAB-20TG350FCABTG350FRABTG350FVABTG350FCWBTG350FRWBTG350FVWBTG450FCABTG450FBABTG450FVABTG450FCWBTG450FBWBTG450FVWBTG800FCABTG800FBABTG800FVABTG800FCAB-60TG800FBAB-60TG800FVAB-60TG800FCWBTG800FBWBTG800FVWBTG1100FCABTG1100FBABTG1100FVABTG1100FCAB-60TG1100FBAB-60TG1100FVAB-60TG1100FCWBTG1100FBWBTG1100FVWBTG1400FCABTG1400FBABTG1400FVABTG1400FCWBTG1400FBWBTG1400FVWBTG2400FBABTG2400FVABTG2400FBWBTG2400FVWBTG2400FBWB-40TG2400FVWB-40TG2410FBABTG2410FVABTG2410FBWBTG2410FVWBTG2410FBWB-40TG2410FVWB-40

◎ Standard Type & Corrosive Resistant Type in 2200L/s, 3300L/s.◎ Integrated controller/power supply, very compact footprint. ◎ Wide pressure range applications, capable of pumping at high throughput. ◎ High compression ratio, low Base pressure.◎ Variable rotational speed control(110rps-450rps).

※1 Standard FlangeCF ： JVIS 003 Bakeable Flanges : Dimensions-Knife-edge sealed typeISO-B ： ISO1609:1986 Vacuum technology - Flange dimensions （Bolted type）ISO-R ： ISO1609:1986 Vacuum technology - Flange dimensions　　　　（Clamped or rotatable type）VG ： JISB2290 :1998 Vacuum technology-Flange :dimensions 　　　　（Vacuum flange with O-ring groove）KF ： ISO2861/1:1974 Vacuum technology - Quick-release couplings 　　　　- Dimensions - Part 1（Clamped type）

※2 Some models are not written

Model

Size

Bearingsystem

SpecialStructure

Inlet Flange※1

Coolingsystem

Specificationtype

Near Volume flow rate（N2）

FM

ILRUCBRVANWB※2

C

1

2

3

4

5

6

7

Notwritten( )

Notwritten( )

：Compound Molecular Pumps

：Ball bearing（oil lubrication）：Ball bearing（grease lubrication）：Magnetically levitated：Standard type：Corrosive resistant type：Reaction by-product prevention：Ultra low vibration type：Radiation hardened type：Ultra high vacuum type：CF：ISO-B：ISO-R：VG：Air cooling：Natural air cooling：Water cooling：Standard type：Corrosive resistant type

TGTGkine

Magnetically Levitated Compound Molecular Pumps with Integrated Control Unit（TG kine 2200M）

3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645

3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645

Korea/Seoul Office Shin Won Tech. Co., Ltd.

Taiwan/Cutes Corporation

China/Shanghai Osaka Vacuum, Ltd.

■ TMP service support center

UK/EBARA Precision Machinery Europe GmBH

France/Paris Liaison Office

U.S.A.

Korea

Tel：+82-32-814-6331 Fax：+82-32-814-7301

■Shin Won Tech. Co., Ltd.(maintenance)

Taiwan2-22 Nan Yuan Road, Chung Li City 32063 Taiwan, R.O.C.

Tel：+886-3-452-6161 Fax：+886-3-451-1347

■Cutes Corporation

ChinaSouth A,T52-4-1F,No.1510,Chuanqiao Rd.,Pudong,Shanghai 201206 P. R. China

Tel：+86-21-5031-1522 Fax：+86-21-5031-1523

Tel support Field support Maintenance Local stock

#12LT 36Bl Namdong Industry Area, Namdong-Ku, Inchon 450-100 Korea

■Shanghai Osaka Vacuum, Ltd.

48000 Fremont Blvd, Fremont, CA 94538 U.S.A.Tel：+1-510-770-0100 Fax：+1-510-770-0104

■Osaka Vacuum U.S.A., Inc.

Leaders Bldg., 274-4, Seohyun-Dong, Bundang-ku, Seongnam-Si, Gyeonggi-Do 463-824 KoreaTel：+82-31-707-0002 Fax：+82-31-707-3339

■Seoul office(sales)

51 Main Avenue, Sacramento, CA 95838 USATel：+1-916-920-5451 Fax：+1-916-830-1900

■Ebara Technologies Inc.

U.S.A./Osaka Vacuum U.S.A.,Inc. Ebara Technologies Inc.

Japan/Nabari FactoryTMP Service Group

JapanTel：+81-595-64-1162 Fax：+81-595-64-1163

■Nabari Factory TMP Service Group1300-81 Yabata, Nabari, Mie 518-0605, Japan

Europe2 Cochrane Square Brucefield Industrial Estate Livingston EH54 9DR, UK

Tel：+44(0)1506 460232 Fax：+44(0)1506 460222

■EBARA Precision Machinery Europe GmBH

17

Osaka Vacuum, Ltd.

Specifications

3

Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps Pumping System

Osaka Vacuum, Ltd.

STC70FR005 STC70FR013

95

283

346

338

269

198

355

TG70FRABInput Connector Input Connector

TC76ISO-R63

Diaphragm Pump

39

52.5 ISO-G1/8

Vent port

5 ［l/min］

95

283

346

338

373

269

198

161

TG70FRNB

TC76ISO-R63

Diaphragm PumpMain power switch

Main power switch

39

52

.5

〜145

Cooling fan

13 ［l/min］

ISO-G1/8Vent port

CF63ISO-R63 12

18A B C

144.5170D

φ114φ95

CF63ISO-R63 12

18A B C

144.5170D

50.576E

50.576E

115.5141

F

115.5141

Fφ114φ95

30°54φ102 68.5

54

Power/Control

ISO-G1/8

ISO-G1/8

φ102

70

103

(54)

109.5 10

0

4-M6 DP13 PCD92

(Purge Gas Inlet)

KF16

Purge Gas Inlet

Controller

Connector

Vent Port

□40

54

～92

30°54φ102 68.5

54

Power/Control

(54)

ISO-G1/8

ISO-G1/8

φ102

70

103

109.5 10

0 Fan

4-M6 DP13 PCD92

(Purge Gas Inlet)

KF16

Purge Gas Inlet

Controller

Connector

Vent Port

AB

C

DF

EF

AB

C

D F FE

Performance curve

[Pa･

L/s]

102

101

100

10-1

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[scc

m]

10-1

100

101

Thro

ughp

ut

[L/s

]

Volu

me

flow

rate

103

102

101

100

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

Sf = 25-100L/min Sf : Volume flow rate of backing pump

TG70F

Ar

H2

N2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

H2N2

N2

Sf > 25L/min Forced air cooling Sf > 25L/min Free convection air cooling Sf > 25L/min

Sf : Volume flow rate of backing pump

TG70F

1 18

Osaka Vacuum, Ltd.

T u r b oMolecularP u m p s

OSAKA VACUUM

Any orientationEasy operation

Compact size Light weight

Turbo Molecular Pumps

Characteristics ofCompound Molecular Pumps

Oil free pumpingEnergy-saving

Maintenance free Serial communicationRS232C Serial interface

Certificatedsafety standard NRTL SEMI-S2 CE

02-TG-E-10

Compound Molecular Pumps

Products Line-up

Series of Turbo Molecular Pumps

◎ Corrosive Resistant Type in 200～1300L/s.

◎ Standard Type & Corrosive Resistant Type in 　1800～5500L/s.

Compound Molecular Pumps（TG series）

◎ Standard Type & Corrosive Resistant Type in 300～3400L/s.

◎ Vibration Free with UFRC. (Unbalance Force Rejection Control )

◎ Model coupling free.

◎ Rotational speed control.　

◎ Thermal insulation structure is available. (Special version)　

Magnetically Levitated Compound Molecular Pumps（TG-M series）

Recommended O/H cycle 20,000～30,000 hrs

Motor cable

Fan cable

MC1/TC-**MC3/TC-**MC5/TC-**MC7/TC-**MC10/TC-**MC15/TC-**MC20/TC-**FC1/TC-FC3/TC-FC5/TC-FC7/TC-FC10/TC-FC15/TC-FC20/TC-

1m3m5m7m

10m15m20m1m3m5m7m

10m15m20m

length modelCable model（Standard length：※33m）

…TG50F / TG220F / TG350F / TG450F…TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F

**

※3 Please contact us about the cable which out of standard length.※4 Please contact us about TG70/240F.

S2AS2M2…TG50F / TG220F / TG350F / TG450F / TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F

S2M2

2

● Wide pressure range pumping● High throughput● Quick start up ● Durable design against air inrush and sudden pressure rise ● Long life

Compound Molecular Pumps (CMP) is Turbo Molecular Pumps (TMP) which combined turbine and helical grooves.CMP was first developed by Osaka Vacuum in the world.And now, this type becomes the most popular type of TMP.

Applications: • Manufacturing of semiconductor, FPD, electronic parts, and other • Analysis & examination device • Research and development, … etc.

e.g.) 1-1.2 min with TG220F

2017.04.PDF

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■High compression ratio■Built-in controller type■Certificated safety standard NRTL/SEMI-S2/CE ( for TG70F-20)

TG70FDrawing of Outside dimension

Air cooling

Natural air cooling

16

● More compact ST series has come out!

● Mounted with high compression turbo molecular pump　 TG70F!

● One of two kinds of backing pump (diaphragm pump)　 can be selected to match for exhausting chamber!

● Space saving design of A4 laptop size!

● Most suitable for use as easy operating and portable　 pumping units for R&D!

※1：A muffler is mounted on the exhaust port of the diaphragm (at the open-air side).

※1

Specifications

Drawing of outside dimension

Power supply modelISO-R63

G1/8

Diaphragm pump

70 L/s10-6 Pa order

Instruction manual:1 copy/Input cable(5m):1

STC70FR013

TG70FRNB

13L/min

19kgAC100V(-10%～+6%)

210VA

STC70FR005

TG70FRAB

4.2L/min

14kgAC100V(±10%)

200VA

ST-Compact

STC70FR005

STC70FR013

TG70F Pumping System

●The inlet flange bolt holes are symmetrical around the center line.

※This dimensional drawings correspond to TG70F (built-in controller type).In the case of TG70F-20, it is separated out its controller.

Built-in controller type

Standard set

●Ambient temperature for useThe ambient temperature range to assure reaching the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.

Pump + Connector for controller◆OptionAir-cooling fan unit, controller, Motor Cable(TG70F-20), Automatic slow leak valve, Purge gas inlet connector,Precision needle valve, Flanges and Fittings

●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.

※1：In case of the backing vacuum pump of 25L/min.※2：TC75 is a built-in controller,TC76 is rack controller.

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1

Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2

Input VoltageInput Power

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

ISO-R/CF L/sISO-R/CF L/sISO-R/CF L/s

ISO-R/CF PaISO-R/CF Torr

Free convection/Forced air cooling sccmmin

Pa（Torr）L/min

ISO-R/CF kg

ISO-R63、CF63KF16

70 / 7565 / 7040 / 451×108

1×105

＜ 5×10-7/＜ 1×10-7

＜ 3.8×10-9/＜ 7.5×10-10

10 / 202-2.5

1200（9）≧ 253 / 5

TG70F

TC75DC24V120W

TG70F-20

TC76AC100-230V（±10%）

160VA

Inlet FlangeOutlet FlangeTMP

Backing vacuum pump

Volume flow rate (N2)Base pressureWeightVoltageInput PowerStandard accessories

TG220F※VAB1 2 3 4 5 6 7

※Please contact us for models other than the above.

※4

◎ For corrosive gas applications, please use the TG or TG-M series with the corrosive resistant type.

Compound Molecular Pumps

Osaka Head office　

JQA-QMA1902NABARI FACTORY

JQA-EMA5143

TG50F

TG70F

TG220F

TG240F

TG350F

TG450F

TG800F

TG1100F

TG1400F

TG2400F

TG2410F

ModelTypeTG50FCABTG50FRABTG50FVABTG50FCWBTG50FRWBTG50FVWBTG70FCNBTG70FCABTG70FRNBTG70FRABTG70FCNB-20TG70FCAB-20TG70FRNB-20TG70FRAB-20TG220FCABTG220FRABTG220FVABTG220FCWBTG220FRWBTG220FVWBTG240FCABTG240FRABTG240FCAB-20TG240FRAB-20TG350FCABTG350FRABTG350FVABTG350FCWBTG350FRWBTG350FVWBTG450FCABTG450FBABTG450FVABTG450FCWBTG450FBWBTG450FVWBTG800FCABTG800FBABTG800FVABTG800FCAB-60TG800FBAB-60TG800FVAB-60TG800FCWBTG800FBWBTG800FVWBTG1100FCABTG1100FBABTG1100FVABTG1100FCAB-60TG1100FBAB-60TG1100FVAB-60TG1100FCWBTG1100FBWBTG1100FVWBTG1400FCABTG1400FBABTG1400FVABTG1400FCWBTG1400FBWBTG1400FVWBTG2400FBABTG2400FVABTG2400FBWBTG2400FVWBTG2400FBWB-40TG2400FVWB-40TG2410FBABTG2410FVABTG2410FBWBTG2410FVWBTG2410FBWB-40TG2410FVWB-40

◎ Standard Type & Corrosive Resistant Type in 2200L/s, 3300L/s, 4200L/s.◎ Integrated controller/power supply, very compact footprint. ◎ Wide pressure range applications, capable of pumping at high throughput. ◎ High compression ratio, low Base pressure.◎ Variable rotational speed control(110rps-450rps).

※1 Standard FlangeCF ： JVIS 003 Bakeable Flanges : Dimensions-Knife-edge sealed typeISO-B ： ISO1609:1986 Vacuum technology - Flange dimensions （Bolted type）ISO-R ： ISO1609:1986 Vacuum technology - Flange dimensions　　　　（Clamped or rotatable type）VG ： JISB2290 :1998 Vacuum technology-Flange :dimensions 　　　　（Vacuum flange with O-ring groove）KF ： ISO2861/1:1974 Vacuum technology - Quick-release couplings 　　　　- Dimensions - Part 1（Clamped type）

※2 Some models are not written

Model

Size

Bearingsystem

SpecialStructure

Inlet Flange※1

Coolingsystem

Specificationtype

Near Volume flow rate（N2）

FM

ILRUCBRVANWB※2

C

1

2

3

4

5

6

7

Notwritten( )

Notwritten( )

：Compound Molecular Pumps

：Ball bearing（oil lubrication）：Ball bearing（grease lubrication）：Magnetically levitated：Standard type：Corrosive resistant type：Reaction by-product prevention：Ultra low vibration type：Radiation hardened type：Ultra high vacuum type：CF：ISO-B：ISO-R：VG：Air cooling：Natural air cooling：Water cooling：Standard type：Corrosive resistant type

TGTGkine

Magnetically Levitated Compound Molecular Pumps with Integrated Control Unit（TG kine 2200M）

3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645

3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645

Korea/Seoul Office Shin Won Tech. Co., Ltd.

Taiwan/Cutes Corporation

China/Shanghai Osaka Vacuum, Ltd.

■ TMP service support center

UK/EBARA Precision Machinery Europe GmBH

France/Paris Liaison Office

U.S.A.

Korea

Tel：+82-32-814-6331 Fax：+82-32-814-7301

■Shin Won Tech. Co., Ltd.(maintenance)

Taiwan2-22 Nan Yuan Road, Chung Li City 32063 Taiwan, R.O.C.

Tel：+886-3-452-6161 Fax：+886-3-451-1347

■Cutes Corporation

ChinaSouth A,T52-4-1F,No.1510,Chuanqiao Rd.,Pudong,Shanghai 201206 P. R. China

Tel：+86-21-5031-1522 Fax：+86-21-5031-1523

Tel support Field support Maintenance Local stock

#12LT 36Bl Namdong Industry Area, Namdong-Ku, Inchon 450-100 Korea

■Shanghai Osaka Vacuum, Ltd.

48000 Fremont Blvd, Fremont, CA 94538 U.S.A.Tel：+1-510-770-0100 Fax：+1-510-770-0104

■Osaka Vacuum U.S.A., Inc.

Leaders Bldg., 274-4, Seohyun-Dong, Bundang-ku, Seongnam-Si, Gyeonggi-Do 463-824 KoreaTel：+82-31-707-0002 Fax：+82-31-707-3339

■Seoul office(sales)

51 Main Avenue, Sacramento, CA 95838 USATel：+1-916-920-5451 Fax：+1-916-830-1900

■Ebara Technologies Inc.

U.S.A./Osaka Vacuum U.S.A.,Inc. Ebara Technologies Inc.

Japan/Nabari FactoryTMP Service Group

JapanTel：+81-595-64-1162 Fax：+81-595-64-1163

■Nabari Factory TMP Service Group1300-81 Yabata, Nabari, Mie 518-0605, Japan

Europe2 Cochrane Square Brucefield Industrial Estate Livingston EH54 9DR, UK

Tel：+44(0)1506 460232 Fax：+44(0)1506 460222

■EBARA Precision Machinery Europe GmBH

17

Osaka Vacuum, Ltd.

Specifications

3

Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps Pumping System

Osaka Vacuum, Ltd.

STC70FR005 STC70FR013

95

283

346

338

269

198

355

TG70FRABInput Connector Input Connector

TC76ISO-R63

Diaphragm Pump

39

52.5 ISO-G1/8

Vent port

5 ［l/min］

95

283

346

338

373

269

198

161

TG70FRNB

TC76ISO-R63

Diaphragm PumpMain power switch

Main power switch

39

52

.5

〜145

Cooling fan

13 ［l/min］

ISO-G1/8Vent port

CF63ISO-R63 12

18A B C

144.5170D

φ114φ95

CF63ISO-R63 12

18A B C

144.5170D

50.576E

50.576E

115.5141

F

115.5141

Fφ114φ95

30°54φ102 68.5

54

Power/Control

ISO-G1/8

ISO-G1/8

φ102

70

103

(54)

109.5 10

0

4-M6 DP13 PCD92

(Purge Gas Inlet)

KF16

Purge Gas Inlet

Controller

Connector

Vent Port

□40

54

～92

30°54φ102 68.5

54

Power/Control

(54)

ISO-G1/8

ISO-G1/8

φ102

70

103

109.5 10

0 Fan

4-M6 DP13 PCD92

(Purge Gas Inlet)

KF16

Purge Gas Inlet

Controller

Connector

Vent Port

AB

C

DF

EF

AB

C

D F FE

Performance curve

[Pa･

L/s]

102

101

100

10-1

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[scc

m]

10-1

100

101

Thro

ughp

ut

[L/s

]

Volu

me

flow

rate

103

102

101

100

[Torr]

[Pa]10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

Sf = 25-100L/min Sf : Volume flow rate of backing pump

TG70F

Ar

H2

N2

Inlet pressure

Gas throughputVolume flow rate

Inlet pressure

H2N2

N2

Sf > 25L/min Forced air cooling Sf > 25L/min Free convection air cooling Sf > 25L/min

Sf : Volume flow rate of backing pump

TG70F

1 18

Osaka Vacuum, Ltd.

T u r b oMolecularP u m p s

OSAKA VACUUM

Any orientationEasy operation

Compact size Light weight

Turbo Molecular Pumps

Characteristics ofCompound Molecular Pumps

Oil free pumpingEnergy-saving

Maintenance free Serial communicationRS232C Serial interface

Certificatedsafety standard NRTL SEMI-S2 CE

02-TG-E-10

Compound Molecular Pumps

Products Line-up

Series of Turbo Molecular Pumps

◎ Corrosive Resistant Type in 200～1300L/s.

◎ Standard Type & Corrosive Resistant Type in 　1800～5500L/s.

Compound Molecular Pumps（TG series）

◎ Standard Type & Corrosive Resistant Type in 300～3400L/s.

◎ Vibration Free with UFRC. (Unbalance Force Rejection Control )

◎ Model coupling free.

◎ Rotational speed control.　

◎ Thermal insulation structure is available. (Special version)　

Magnetically Levitated Compound Molecular Pumps（TG-M series）

Recommended O/H cycle 20,000～30,000 hrs

Motor cable

Fan cable

MC1/TC-**MC3/TC-**MC5/TC-**MC7/TC-**MC10/TC-**MC15/TC-**MC20/TC-**FC1/TC-FC3/TC-FC5/TC-FC7/TC-FC10/TC-FC15/TC-FC20/TC-

1m3m5m7m

10m15m20m1m3m5m7m

10m15m20m

length modelCable model（Standard length：※33m）

…TG50F / TG220F / TG350F / TG450F…TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F

**

※3 Please contact us about the cable which out of standard length.※4 Please contact us about TG70/240F.

S2AS2M2…TG50F / TG220F / TG350F / TG450F / TG800F / TG1100F…TG800F-60 / TG1100F-60 / TG1400F / TG2400F / TG2410F

S2M2

2

● Wide pressure range pumping● High throughput● Quick start up ● Durable design against air inrush and sudden pressure rise ● Long life

Compound Molecular Pumps (CMP) is Turbo Molecular Pumps (TMP) which combined turbine and helical grooves.CMP was first developed by Osaka Vacuum in the world.And now, this type becomes the most popular type of TMP.

Applications: • Manufacturing of semiconductor, FPD, electronic parts, and other • Analysis & examination device • Research and development, … etc.

e.g.) 1-1.2 min with TG220F

2017.04.PDF

■Any orientation ■Compact size■Energy-saving ■Quick start up■Quick shut down with gas vent■Durable structure for air inrush■High compression ratio■Built-in controller type■Certificated safety standard NRTL/SEMI-S2/CE ( for TG70F-20)

TG70FDrawing of Outside dimension

Air cooling

Natural air cooling

16

● More compact ST series has come out!

● Mounted with high compression turbo molecular pump　 TG70F!

● One of two kinds of backing pump (diaphragm pump)　 can be selected to match for exhausting chamber!

● Space saving design of A4 laptop size!

● Most suitable for use as easy operating and portable　 pumping units for R&D!

※1：A muffler is mounted on the exhaust port of the diaphragm (at the open-air side).

※1

Specifications

Drawing of outside dimension

Power supply modelISO-R63

G1/8

Diaphragm pump

70 L/s10-6 Pa order

Instruction manual:1 copy/Input cable(5m):1

STC70FR013

TG70FRNB

13L/min

19kgAC100V(-10%～+6%)

210VA

STC70FR005

TG70FRAB

4.2L/min

14kgAC100V(±10%)

200VA

ST-Compact

STC70FR005

STC70FR013

TG70F Pumping System

●The inlet flange bolt holes are symmetrical around the center line.

※This dimensional drawings correspond to TG70F (built-in controller type).In the case of TG70F-20, it is separated out its controller.

Built-in controller type

Standard set

●Ambient temperature for useThe ambient temperature range to assure reaching the ultimate pressure is 10 to 23°C. The permissible ambient temperature range is from 8 to 38°C.

Pump + Connector for controller◆OptionAir-cooling fan unit, controller, Motor Cable(TG70F-20), Automatic slow leak valve, Purge gas inlet connector,Precision needle valve, Flanges and Fittings

●Corresponding gasesDepending on the gas to be evacuated, some may damage the pump. Please contact us for details on corresponding gases.

※1：In case of the backing vacuum pump of 25L/min.※2：TC75 is a built-in controller,TC76 is rack controller.

Flange

Volume flow rate

Max. compression ratio

Base pressure

Max. throughput※1

Startup timeMax. backing pressureRecommended backing vacuum pumpWeightController Type※2

Input VoltageInput Power

InletOutletN2

N2 (with protective screen)H2

N2

H2

N2

ISO-R/CF L/sISO-R/CF L/sISO-R/CF L/s

ISO-R/CF PaISO-R/CF Torr

Free convection/Forced air cooling sccmmin

Pa（Torr）L/min

ISO-R/CF kg

ISO-R63、CF63KF16

70 / 7565 / 7040 / 451×108

1×105

＜ 5×10-7/＜ 1×10-7

＜ 3.8×10-9/＜ 7.5×10-10

10 / 202-2.5

1200（9）≧ 253 / 5

TG70F

TC75DC24V120W

TG70F-20

TC76AC100-230V（±10%）

160VA

Inlet FlangeOutlet FlangeTMP

Backing vacuum pump

Volume flow rate (N2)Ultimate pressureWeightVoltageInput PowerStandard accessories

TG220F※VAB1 2 3 4 5 6 7

※Please contact us for models other than the above.

※4

◎ For corrosive gas applications, please use the TG or TG-M series with the corrosive resistant type.

Compound Molecular Pumps

Osaka Head office　

JQA-QMA1902NABARI FACTORY

JQA-EMA5143

TG50F

TG70F

TG220F

TG240F

TG350F

TG450F

TG800F

TG1100F

TG1400F

TG2400F

TG2410F

ModelTypeTG50FCABTG50FRABTG50FVABTG50FCWBTG50FRWBTG50FVWBTG70FCNBTG70FCABTG70FRNBTG70FRABTG70FCNB-20TG70FCAB-20TG70FRNB-20TG70FRAB-20TG220FCABTG220FRABTG220FVABTG220FCWBTG220FRWBTG220FVWBTG240FCABTG240FRABTG240FCAB-20TG240FRAB-20TG350FCABTG350FRABTG350FVABTG350FCWBTG350FRWBTG350FVWBTG450FCABTG450FBABTG450FVABTG450FCWBTG450FBWBTG450FVWBTG800FCABTG800FBABTG800FVABTG800FCAB-60TG800FBAB-60TG800FVAB-60TG800FCWBTG800FBWBTG800FVWBTG1100FCABTG1100FBABTG1100FVABTG1100FCAB-60TG1100FBAB-60TG1100FVAB-60TG1100FCWBTG1100FBWBTG1100FVWBTG1400FCABTG1400FBABTG1400FVABTG1400FCWBTG1400FBWBTG1400FVWBTG2400FBABTG2400FVABTG2400FBWBTG2400FVWBTG2400FBWB-40TG2400FVWB-40TG2410FBABTG2410FVABTG2410FBWBTG2410FVWBTG2410FBWB-40TG2410FVWB-40

◎ Standard Type & Corrosive Resistant Type in 2200L/s, 3300L/s.◎ Integrated controller/power supply, very compact footprint. ◎ Wide pressure range applications, capable of pumping at high throughput. ◎ High compression ratio, low Base pressure.◎ Variable rotational speed control(110rps-450rps).

※1 Standard FlangeCF ： JVIS 003 Bakeable Flanges : Dimensions-Knife-edge sealed typeISO-B ： ISO1609:1986 Vacuum technology - Flange dimensions （Bolted type）ISO-R ： ISO1609:1986 Vacuum technology - Flange dimensions　　　　（Clamped or rotatable type）VG ： JISB2290 :1998 Vacuum technology-Flange :dimensions 　　　　（Vacuum flange with O-ring groove）KF ： ISO2861/1:1974 Vacuum technology - Quick-release couplings 　　　　- Dimensions - Part 1（Clamped type）

※2 Some models are not written

Model

Size

Bearingsystem

SpecialStructure

Inlet Flange※1

Coolingsystem

Specificationtype

Near Volume flow rate（N2）

FM

ILRUCBRVANWB※2

C

1

2

3

4

5

6

7

Notwritten( )

Notwritten( )

：Compound Molecular Pumps

：Ball bearing（oil lubrication）：Ball bearing（grease lubrication）：Magnetically levitated：Standard type：Corrosive resistant type：Reaction by-product prevention：Ultra low vibration type：Radiation hardened type：Ultra high vacuum type：CF：ISO-B：ISO-R：VG：Air cooling：Natural air cooling：Water cooling：Standard type：Corrosive resistant type

TGTGkine

Magnetically Levitated Compound Molecular Pumps with Integrated Control Unit（TG kine 2200M）

3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645

3-3-13 Imabashi, Chuo-ku, Osaka 541-0042, JapanTel +81-6-6203-3981 Fax +81-6-6222-3645

Korea/Seoul Office Shin Won Tech. Co., Ltd.

Taiwan/Cutes Corporation

China/Shanghai Osaka Vacuum, Ltd.

■ TMP service support center

UK/EBARA Precision Machinery Europe GmBH

France/Paris Liaison Office

U.S.A.

Korea

Tel：+82-32-814-6331 Fax：+82-32-814-7301

■Shin Won Tech. Co., Ltd.(maintenance)

Taiwan2-22 Nan Yuan Road, Chung Li City 32063 Taiwan, R.O.C.

Tel：+886-3-452-6161 Fax：+886-3-451-1347

■Cutes Corporation

ChinaSouth A,T52-4-1F,No.1510,Chuanqiao Rd.,Pudong,Shanghai 201206 P. R. China

Tel：+86-21-5031-1522 Fax：+86-21-5031-1523

Tel support Field support Maintenance Local stock

#12LT 36Bl Namdong Industry Area, Namdong-Ku, Inchon 450-100 Korea

■Shanghai Osaka Vacuum, Ltd.

48000 Fremont Blvd, Fremont, CA 94538 U.S.A.Tel：+1-510-770-0100 Fax：+1-510-770-0104

■Osaka Vacuum U.S.A., Inc.

Leaders Bldg., 274-4, Seohyun-Dong, Bundang-ku, Seongnam-Si, Gyeonggi-Do 463-824 KoreaTel：+82-31-707-0002 Fax：+82-31-707-3339

■Seoul office(sales)

51 Main Avenue, Sacramento, CA 95838 USATel：+1-916-920-5451 Fax：+1-916-830-1900

■Ebara Technologies Inc.

U.S.A./Osaka Vacuum U.S.A.,Inc. Ebara Technologies Inc.

Japan/Nabari FactoryTMP Service Group

JapanTel：+81-595-64-1162 Fax：+81-595-64-1163

■Nabari Factory TMP Service Group1300-81 Yabata, Nabari, Mie 518-0605, Japan

Europe2 Cochrane Square Brucefield Industrial Estate Livingston EH54 9DR, UK

Tel：+44(0)1506 460232 Fax：+44(0)1506 460222

■EBARA Precision Machinery Europe GmBH