OSAKA VACUUM Turbo Molecular Pumpscdn033.yun-img.com/static/upload/ribovac/download/202006201432… · 3 Turbo Molecular Pumps Osaka Vacuum, Ltd. The inlet flange bolt holes are symmetrical

T u r b oMolecularP u m p s

OSAKA VACUUM

02-TGM-E-05

Magnetically Suspended Compound Molecular Pumps

Osaka Vacuum, Ltd.

1

Magnetically Suspended Turbo Molecular Pumps

Characteristics of Magnetically SuspendedCompound Molecular Pumps● Wide pressure range pumping● High throughput● Durable structure for air inrush ● Rotational speed control Permits proper pump performance for each process● Model coupling free Common digital controller compatible in all models.

● Maintenance call Gives advance warning for preventive maintenance when a failure is likely to happen.

● Variety of special specifications You can choose from various special specifications to match your applications.

※ Equipped with automatic calibration (automatically adjusting sensor)

※ Continues operating. If a failure does occur, the pump displays an alert and shuts down.

Energy-saving Vibration free (Featuring UFRC) ※Unbalance Force Rejection Control

Maintenance free Oil free pumping

Self-diagnostic function Failure history memory

Serial communicationConforms to recognized

safety standard NRTL SEMI-S2 CE

Any orientationCompact size

e.g. By-product resistant, Ultra-low vibration, Ultra high vacuum, Radiation-hardened

2

Japan/Hachioji Work shop

Korea/Seoul office Shin Won Tech. Co., Ltd.

Taiwan/Cutes Corporation

China/Shanghai Osaka Vacuum, Ltd.U.S.A./Osaka Vacuum U.S.A.,Inc.

■ TMP service support center

Japan

Tel：+81-42-664-5301 Fax：+81-42-664-6420

■Hachioji Workshop

U.S.A.

Korea

Tel：+82-32-814-8441 Fax：+82-32-814-7301

■Shin Won Tech. Co., Ltd.(maintenance)

Taiwan2-22 Nan Yuan Road, Chung Li City 32063 Taiwan, R.O.C.

Tel：+886-3-452-6161 Fax：+886-3-451-1347

■Cutes Corporation

ChinaSouth A,T52-4-1F,No.1510,Chuanqiao Rd.,Pudong,Shanghai 201206 P. R. China

Tel：+86-21-5031-1522 Fax：+86-21-5031-1523

Tel support Field support Maintenance Local stock Liaison Service

1221 Kunugida-cho, Hachioji 193-0942 Japan

#12LT 36Bl Namdong Industry Area, Namdong-Ku, Inchon 450-100 Korea

■Shanghai Osaka Vacuum, Ltd.

48000 Fremont Blvd, Fremont, CA 94538 U.S.A.

Tel：+1-510-770-0100 Fax：+1-510-770-0104

■Osaka Vacuum U.S.A., Inc.

Leaders Bldg., 274-4, Seohyun-Dong, Bundang-ku, Seongnam-Si, Gyeonggi-Do 463-824 KoreaTel：+82-31-707-0002 Fax：+82-31-707-3339

■Seoul office(sales)

3

Turb

o M

olec

ular

Pum

ps Osaka Vacuum, Ltd.

●The inlet flange bolt holes are symmetrical around the center line.

InletOutletN2

N2 (with protective screen)H2

N2

H2

VG・ISO-B / CF

N2

VG・ISO-B / CF・Corrosive resistant type

L/sL/sL/s

Pa（Torr）

sccmminmin

Pa（Torr）L/min

kg

ISO-B100KF25340320290

1×108

4.5×103

＜ 1×10-6 / ＜ 1×10-7

（＜ 7.5×10-9 / ＜ 7.5×10-10）20002-34-5

400(3)≧16014 / 17

TC011M

CF100VG100

10-2 10-1 100 101 102101

102

103

104

Ar N2

[Torr]

[Pa]

[Pa･

L/s]

[scc

m]

TG390M

Sf = 320L/min Sf : Volume flow rate of backing pump

Thro

ughp

ut

Inlet pressure10-4 10-3 10-2 10-1

101

102

103


CF100ISO-B100

VG100 15

1221

263

260269

A B C Dφ185φ152φ165

■Any orientation　　　 ■Compact size　　■Energy-saving■Quick starts and stops ■Maintenance call ■Vibration free ※Featuring UFRC

■Model coupling free 　■Automatic calibration■High throughput ■Rotational speed control■Serial communication ■Safety standards certification for NRTL SEMI-S2 CE

TG390M

CF100ISO-B100

VG100 15

1221

263

260269

A B C Dφ185φ152φ165

BA

D

C

φ180

φ180

86

104

45ﾟ

φ16

0

□80

41.5

131

103

Purge gas InletISO-G1/4

Connector

4-M8 DP18

KF25

Air cooling fan

φ180

86

11

125 104

41.5

45ﾟ

89

103

φ160

φ180

KF25

Cooling water Inlet/OutletISO-Rc 1/4


Connector

4-M8 DP18

B A

D

C

Specifications

Performance curveDrawing of Outside dimension

Standard set

Water cooling

Air cooling

●Ambient temperature for useThe ambient temperature range to assure reaching the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Turbo Controller+Output Cable （5 meters）+Fan Connector（only for water-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

※1：In case of the backing vacuum pump of 320L/min.

※Dimensions are standard.

Flange

Volume flow rate

Max. compression ratio

Ultimate pressure

Max. throughput※1

Startup timeShutdown timeMax. backing pressureRecommended backing vacuum pumpWeightTurbo Controller

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

4


Turbo Molecular Pum

psOsaka Vacuum, Ltd.

CF160ISO-B160

VG150 16

1622

225

230230

A B C Dφ235φ203φ225







10-2 10-1 100 101 102101

102

103

104

ArN2

[Torr]

[Pa]

[Pa･

L/s]

[scc

m]

TG420M


Thro

ughp

ut

Inlet pressure10-4 10-3 10-2 10-1

101

102

103


CF160ISO-B160

VG150 16

1622

225

230230

A B C Dφ235φ203φ225

TG420M

BA

D

Cφ180

φ180

86

104

45ﾟ

φ16

0

□80

41.5

131

103


Connector

4-M8 DP18

KF25

Air cooling fan

φ180

86

11

125 104

41.5

45ﾟ

89

103

φ160

φ180

KF25

Cooling water Inlet/OutletISO-Rc 1/4


Connector

4-M8 DP18

BA

D

C

Specifications


Standard set


Water cooling

Air cooling


Flange

Volume flow rate


Ultimate pressure

Max. throughput※1


InletOutletN2


N2

H2

VG・ISO-B / CF

N2


L/sL/sL/s

Pa（Torr）

sccmminmin

Pa（Torr）L/min

kg

ISO-B160KF25400370300

1×108

4.5×103

＜ 1×10-6 / ＜ 1×10-7

（＜ 7.5×10-9 / ＜ 7.5×10-10）20002-34-5

400(3)≧16014 / 17

TC011M

CF160VG150


Water cooling

Air cooling

5




10-2 10-1 100 101 102101

102

103

104

ArN2

[Torr]

[Pa]

[Pa･

L/s]

[scc

m]

TG900M


Thro

ughp

ut

Inlet pressure10-4 10-3 10-2 10-1

101

102

103

CF160ISO-B160

VG150 16

1622

376

390382

A B C Dφ235φ203φ225

CF160ISO-B160

VG150 16

1622

376

390382

A B C Dφ235φ203φ225

B A

C

D

φ245

134 30ﾟ

5411

φ220

φ264

168

Purge gas Inlet

Connector

Cooling water Inlet/Outlet

8-M12 DP23

ISO-Rc1/4

ISO-G1/4

KF40

165

53 51

B A

C

D

φ220

134 30ﾟ

φ264

□12

0

φ245

Purge gas Inlet

Connector

Air cooling fan

8-M12 DP23 ISO-G1/4

180

KF40

165

53 51

TG900M

Specifications


Standard set


Turb

o M

olec

ular

Pum


Flange

Volume flow rate


Ultimate pressure

Max. throughput※1


InletOutletN2


N2

H2

VG・ISO-B / CF

N2


L/sL/sL/s

Pa（Torr）

sccmminmin

Pa（Torr）L/min

kg

ISO-B160KF409008601050

1×108

1.5×104

＜ 1×10-6 / ＜ 1×10-7

（＜ 7.5×10-9 / ＜ 7.5×10-10）30004-54-5

500(3.8)≧25034 / 42

TC011M

CF160VG150










Water cooling

Air cooling





CF200ISO-B200

VG200 16

1625

324

359385

A B C Dφ300φ253φ285

CF200ISO-B200

VG200 16

1625

324

359385

A B C Dφ300φ253φ285

TG1300M Magnetically Suspended Compound Molecular Pumps

B A

C

D

φ245

134 30ﾟ

5411

φ264

φ220

φ264

168

Purge gas Inlet

Connector


8-M12 DP23

ISO-Rc1/4

ISO-G1/4

KF40

165

53 51

BA

C

D

φ220

134 30ﾟ

φ264

□12

0

φ245

Purge gas Inlet

Connector

Air cooling fan

8-M12 DP23 ISO-G1/4

180

KF40

165

53 51

6

Specifications


Standard set


Turbo Molecular Pum


[Torr]Inlet pressure

10 10 10 10

10-2 10-1 100 101 102101

102

103

104

ArN2

[Pa]

[Pa･

L/s]

[scc

m] TG1300M


Thro

ughp

ut

-4 -3 -2 -1

101

102

103

L/sL/sL/s

Pa（Torr）

sccmminmin

Pa（Torr）L/min

kg

ISO-B200KF40130012301200

1×108

1.5×104

＜ 1×10-6 / ＜ 1×10-7

（＜ 7.5×10-9 / ＜ 7.5×10-10）30004-54-5

500(3.8)≧25034 / 42

TC011M

CF200VG200Flange

Volume flow rate


Ultimate pressure

Max. throughput※1


InletOutletN2


N2

H2

VG・ISO-B / CF

N2


7


Water cooling

Air cooling

Turb

o M

olec

ular

Pum


ISO-B250VG250 16

16340340

A B C Dφ350φ335




ISO-B250VG250 16

16340340

A B C Dφ350φ335

TG2400M

BA

D

C

□12

0 154.

5

202

φ25535

185.5

φ286


Connector

6-M16 DP25

KF40


96

47.5

φ310

BA

D

C

54

154.

5

φ25535

φ286


ISO-Rc1/4

Connector

6-M16 DP25

KF40


9612

47.5

φ310

200 185.5

Specifications


Standard set







10-2 10-1 100 101 102101

102

103

104

ArN2

[Torr]

[Pa]

[Pa･

L/s]

[scc

m] TG2400M


Thro

ughp

ut

Inlet pressure10-4 10-3 10-2 10-1

101

102

103

L/sL/sL/s

Pa（Torr）

sccmminmin

Pa（Torr）L/min

kg

KF40240023001100

1×108

1.4×103 /8.3×102 ＜ 1×10-6

＜ 7.5×10-9

30004-54-5

200/150(1.5/1.1)≧50045/54

TC011M

ISO-B250VG250Flange

Volume flow rate


Ultimate pressure

Max. throughput※1


InletOutletN2


N2

H2 Standard type / Corrosive resistant type

VG・ISO-B

N2

Standard type / Corrosive resistant type



ISO-B320 Flange

VG300 Flange

Drawing of Outside dimension

Specifications

Performance curve

Osaka Vacuum, Ltd.

TG3260M

●Ambient temperature for use　The ambient temperature range to assure reaching the ultimate pressure is 10 ~ 23℃. The permissible

ambient temperature is 10 ~ 40℃. The maximum temperature for the cooling water which assures the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10 ~ 35℃.




■Model coupling free 　■Automatic calibration■High throughput ■Rotational speed control ■High compression ratio■Serial communication ■Confirming to recognized safety standard NRTL SEMI-S2 CE



193

25° 45

°

φ230

384.

5

437.

5

150

φ230

3

127

VG300

4×2-M16　DP25

Cooling waterinlet/outletISO-Rc3/8

Purge gas inlet

ExhaustKF40

PCD342

ISO-G1/4

φ395

27 27

φ292

φ411φ380

φ400

193

25ﾟ

45°

φ230

150

φ230

3

127

φ425ISO-B320

4×2-M16　DP25

Cooling water inlet/outletISO-Rc3/8

Purge gas inlet

ExhaustKF40

PCD342

ISO-G1/4

φ395

27 27

379.

5

432.

5

φ292

φ411φ380

200

16

242.

550

.5

Cooling waterinlet/outlet

MS connectorMotor connector

ISO-Rc3/8

392.

535

3.5

450

433.

5

422

200

20

237.

550

.5

Cooling water inlet/outlet

MS connector

Motor connectorISO-Rc3/8

387.

534

8.5

445

428.

5

417


10-2 10-1 100 101 102101

102

103

104

Ar N2

H2

[Torr]

[Pa]

[Pa･

L/s]

[scc

m]

TG3260M


Thro

ughp

ut

Inlet pressure10-4

10-3

10-5 10-3 10-2 10-1

101

102

103

Standard setPump + Turbo Controller + Motor Cable (5 meters) + MS Cable (5 meters)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

Turbo Molecular Pum

ps

8

L/sL/sL/s

Pa（Torr）

sccmminmin

Pa（Torr）L/min

kg

KF40320030002700

1×108

3×104 ＜ 1×10-7

＜ 7.5×10-10

20001314

400(3)≧150080/96

TC021M

ISO-B320VG300Flange

Volume flow rate


Ultimate pressure

Max. throughput※1


InletOutletN2


N2

H2

VG・ISO-B

N2



10-2 10-1 100 101 102101

102

103

104

[Torr]

[Pa]

[Pa･

L/s]

[scc

m]

TG3460M


Thro

ughp

ut

Inlet pressure10-4

10-3

10-5 10-3 10-2 10-1

101

102

103Ar

H2

N2

9



Specifications

Performance curve

Turb

o M

olec

ular

Pum


TG3460M

Standard set

●Ambient temperature for use　The ambient temperature range to assure reaching the ultimate pressure is 10 ~ 23℃. The permissible

ambient temperature is 10 ~ 40℃. The maximum temperature for the cooling water which assures the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10 ~ 35℃.

Pump + Turbo Controller + Motor Cable (5 meters) + MS Cable (5 meters)◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings




■Model coupling free 　■Automatic calibration■High throughput ■Rotational speed control ■High compression ratio■Serial communication ■Confirming to recognized safety standard NRTL SEMI-S2 CE



VG350 Flange

L/sL/sL/s

Pa（Torr）

sccmminmin

Pa（Torr）L/min

kg

VG350KF40340032002700

1×108

3×104 ＜ 1×10-7

＜ 7.5×10-10

20001314

400(3)≧150073/85

TC021M

200

20

178.

550

.5


MS connectorMotor connector

ISO-Rc3/8

328.

528

9.5

386

369.

5

358

193

25° 45

°

φ230

150

φ230

3

127

VG350

4×2-M16　DP25


Purge gas inlet

ExhaustKF40

PCD342

ISO-G1/4

φ450

φ395

27 27

320.

5

373.

5

φ292

φ411

φ380

Flange

Volume flow rate


Ultimate pressure

Max. throughput※1


InletOutletN2


N2

H2

VG

N2


Turbo ControllerOsaka Vacuum, Ltd.

129 420

10

～75

MOTOR

RS232C

MS

REMOTE

INPUT

15.5

27

AC180-264V

C.B.15A ～1902

208

165

365

149

213

157.

5

139

REM

OTE

STO

P

NO

RM

AL

ALARM

MO

DE

ENTER

UP

DO

WN

START

LOC

AL

REM

OTE

BRAKE

ACC

ELERATIO

N

FAILUR

E

PO

WE

R

RESET

4-φ5

(Max. connector size)

(Min. cable bending radius)

(Screw hole for rubber legs)

132

213

198.

1

122.5 4×φ5

POWER

ALARM

REMOTE

NORMAL

FAILURE

BRAKE

ACCELERATION

TURBO CONTROLLER

OSAKA VACUUM

, LTD.

UP

START

RESETSTOP

(Max. connector size)～80

200～(Min. cable bending radius)

(Screw hole for rubber legs)

3.2

11

50.2 286

17

4×M4 Depth5

RS485

MOTOR

C.B.15A

HEATER

REMOTE

MAG.BRG.

196

124

110

RS485

MOTOR

C.B.15A

REMOTE

MAG.BRG.

196

124

T.M.S.

POWER

FUSE

F1(3A)

F2(3A)FUSE

1.6

111.6 110

8.5

50.2 286

17

18540.2

80

386.2

3.2 17410.5

90.8

13

132

213

198.

1

122.5

TURBO CONTROLLER

OSAKA VACUUM

, LTD.

UP

START

RESETSTOP

POWER

ALARM

REMOTE

NORMAL

FAILURE

BRAKE

ACCELERATION

4×φ5

4×M4 Depth5

～80(Max. connector size)(Screw hole for rubber legs)

200～(Min. cable bending radius)

10

Turbo Controller

TC011MT（Panel cut：113H×199W）※build in T.M.S.

TC011M（Panel cut：113H×199W）

TC021M（Panel cut：131H×210W）

※1 ： The figure in ( ) is the case of TC011MT. The controler for TG-MI series is TC011MT TC011M･･･standerd,TG-MLseries、TG-MUseries,TG-MRseries TC011MT･･･ TG-MIseries

Power supply model

Application pump

Input Voltage

Input Frequency

Input Phases

Input Powe※1

Rated Output Frequency

Weight※1

Standard accessories

Serial interface

（ACV）

（Hz）

（VA）

（Hz）

（kg）

TC011M ( TC011MT)

TG3260M/3460M

1200

360

9

RS232C

TG2400M

1300 (1700)

520

TG900M/1300M

1300 (1700)

560

9 (11)

RS485

TG390M/420M

700 (1000)

680

TC021M

Input cable（5meters）: 1 / Remote connector: 1 / Instruction manual: 1 copy / Serial communication instruction manual: 1 copy

200-240±10％

50/60

Single

11

Ultra High Vacuum(UHV) Magnetically Suspended Turbo Molecular Pump series

Turb

o M

olec

ular

Pum


Osaka's TG-MU series - a pump of choice for all UHV applications!

Specifications

TG-MUApplication：■Analytical instruments, surface Analysis ＆ UHV R＆Ds■UHV Semiconductor thin film process ＆ MEMS R＆Ds■Energy Research , Accelerators , Nuclear fusion.., etc.

The TG-MU series is designed to efficiently evacuate light gasses from High Vacuum up to Ultra High Vacuum region by reducing the materials’ outgassing and improving the efficiency of the Hydrogen compression: 60000.Ultimate vacuum can be realized 10-9Pa order (in the 10-11 torr) region within a short bake-out period.

Applying Osaka's proprietary know-how, the inner working of the UHV turbo pump is treated specifically to suppress the inner materials' outgassing in the UHV region via an enhanced heat transfer method.

※1：In case of the backing vacuum pump of 1000L/min. ※2：Dimension is same as standard.Please refer to the pages of standards(P5～6).

TG1300MU pumpdown curve

Figure 1 shows an actual bake-out pumpdown cycle example of a TG1300MU UHV series. Ultimate vacuum was measured by an extractor gauge at 10-9 Pa (10-11 torr) after a 48 hours bake-out, followed by a natural cool down degassing cycle.

TG1300MUCF200

130012301200

TG900MUCF160

9008601050

KF40

1×108

6.0×104

＜1×10-8（＜ 7.5×10-11）30004-54-5

500(3.8)≧250

42TC011M

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

InletOutletN2


N2

H2

N2

Flange

Volume flow rate


Ultimate pressureMax. throughput※1


10-3

10-4

10-5

10-6

10-7

10-8

10-9

10-6

10-7

10-8

10-9

10-10

10-11

100 101Time（hours） Figure 1

Inlet Pressure（Pa）

Inlet Pressure（Torr）

102 103

baking（48 hrs.）

degassing

baking（48 hrs.）

degassing

(900 L/s - 1300 L/s 2 models)

12

Turbo Molecular Pum


Ultra low vibration type Magnetically Suspended Turbo Molecular Pumps Series

Features

Specifications

TG-MLApplications：■Next-generation semiconductor production equipment.■Ultra High Resolution Electron Microscopy, Analytical Instruments, R &Ds■E-Beam Lithography, EUV, XPS, CD linewidth tool, SEM/TEM

●Less than 1 nm(o-p) measured by Radial & Axial acceleration

●Advanced vibration cancellation algorithm eliminates the unwanted vibration amplitude resulted from the constant acceleration of the fast speed rotor

●Coupled with external dampers, SUPER Ultra Low at less than 0.1 nm(o-p) can be realized with the TG-ML series

The TG-ML series with its exceptional ultra low vibration was developed specifically to meet today's cutting edge challenge in EUV Lithography, Micro-machining(MEMS), CD linewidth measurement. SEM/TEM Electron Microscopy, XPS and the emerging Nano-tech analytical tools. Osaka's TG-ML Magnetically Suspended Turbo Molecular pump series, with a multiple order of magnitude in reduction of vibration, is the preferred solution and a key to the next generation tool design.

※1 ： In case of the backing pump of 320L/min（TG390/420MI）, 1000L/min（TG900/1300MI） ※2 ： Dimension is same as a standard.Please refer to the pages of standards（P3～7）.

(340L/s - 1300L/s 4 Models)

TG1300MLISO-B200

130012301200

TG900MLISO-B160

9008601050

TG420MLISO-B160

400370300

1×108

＜ 1×10-6 / ＜ 1×10-7（＜ 7.5×10-9 / ＜ 7.5×10-10）

4-5

TC011M

TG390MLISO-B100

340320290

VG100 VG200CF100 VG150 CF160 VG150 CF160 CF200KF40

1.5×104

30004-5

500(3.8)≧25034/42

KF25

4.5×103

20002-3

400(3)≧16014/17

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

Flange

Volume flow rate




InletOutletN2


N2

H2

VG・ISO-B / CFN2

VG・ISO-B / CF

Acceleration

Acceleration

Vibration frequency ［Hz］

Radial Axial

0 100 200 300 400 500 600 700 8000 100 200 300 400 500 600 700 800

Osaka's Energy Efficient solution to the process by-product built up inside the turbopump

13

Energy Efficient Heated Magnetically Suspended Turbo Molecular Pump series

Turb

o M

olec

ular

Pum


Osaka's TG-MI breakthrough - ENERGY EFFICIENT Thermal Insulated Structure

TG-M IThe TG-MI series is designed to reduce the condensation rate of the by-product and process effluent build-up commonly inside a turbo molecular pump. This series is also rated "First" in Energy Efficiency by incorporating Osaka's patented Thermal Insulation Structure with an integrated TMS, Temperature Management System.

●Combining the heat generated by the fast speed turbopump rotor and built-in TMS, temperature inside pump can be controlled efficiently up to 90℃ without the risk of an accelerated material failure - improved system up time & elongated MTBS(mean time between service)!

●Osaka's patented Energy Efficient Thermal Insulation Structure enhances the overall heat transfer while maintaining hot spots inside the turbopump where process by product condensation is likely to occur, resulting a dramatic reduction of by-product build-up.

●Improved pump life cycle & reduced frequency of pump maintenance requirement - Increased system uptime

●Lower COO and higher system MTBF

Application：■Semiconductor processes, LCD/TFT/MEMS manufacturing tools.■Etching equipment in which by-products are generated.

Thermal insulation structureThermal insulator

Heater

Outlet flange

Thermal insulator

Heater

Heat generatedHeat transferred

●Osaka's patented Thermal Insulated Structure preserves and redistributes the heat of compression generated by the fast speed rotor to the specific hot spots inside the turbopump, preventing by-product condensation during process operation.

●Combining with the built-in TMS, Energy Conservation is achieved comparing to the standard method of direct TMS.

●Improved heat transfer allowing users to efficiently to maintain the pump 'inside' temperature up to 90℃ - a dramatic process versatility improvement.

(340 L/s - 2400 L/s 5 models)

※COO = Cost of Operation

Osaka Vacuum, Ltd.

B B

B

AA

A

CC

C

D

BB

AA

C C

D D

D

D

11189

φ180

125 104

86

φ186KF25

41.5

Temp. sensor connector

ISO-G1/4

45ﾟ49

89

119

Purge gas inlet ConnectorHeater connector

103

4-M8 DP18

100


φ160

φ180

11

125

41.5

104

86

189

φ186KF25

ConnectorHeater connector


ISO-G1/4

45ﾟ49

89

100

103

φ160

119


Purge gas inlet

ISO-Rc1/4

4-M8 DP18

Heater connector


KF40φ272

165168

180

30ﾟ

Purge gas inlet ISO-G1/4

φ245

51

134

φ220

8-M12 DP23

Connector

Outlet heaterconnector

51

53

54

240

11

54



Heater connector


KF40φ272

165168

180

30ﾟ

Purge gas inlet ISO-G1/4

φ245

51

134

φ220

8-M12 DP23

Connector

Outlet heaterconnector

51

5354

240

11

54



96

KF40φ324

233.5

250Cooling waterinlet/outletISO-Rc1/4

154.5 connector

sensorconnector

Heater

Temp.

12

52.5

inlet/outletISO-Rc1/4

Cooling water

Purge gas inletISO-G1/4

φ286

47.5

185.5

200

Connector

54

φ255

6-M16 DP25

35ﾟ

TG390MI TG420MI TG900MI

TG1300MI TG2400MI

Flange

Volume flow rate




TG2400MI

240023001100

8.3×102

150(1.1)≧500

56

TG1300MI

KF40130012301200

30004-5

TG900MI

9008601050

1×108

＜ 1×10-6（＜ 7.5×10-9）

4-5

TC011MT

TG420MI

400370300

TG390MI

340320290

VG100 VG150ISO-B100 ISO-B160 VG150 ISO-B160 VG200 ISO-B200 VG250 ISO-B250

1.5×104

500(3.8)≧250

42

KF25

4.5×103

10002-3

350(2.6)≧160

18

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

InletOutletN2


N2

H2

N2

ISO-B100VG100 15

12263260

A B C Dφ185φ165 ISO-B160

VG150 1616

225230


VG150 1616

376390

A B C Dφ235φ225

ISO-B200VG200 16

16324359


VG250 1616

340340

A B C Dφ350φ335

※1：In case of the backing pump of 320L/min（TG390/420MI）, 1000L/min（TG900/1300/2400MI） ※2：The dimension is same as a standard specification.Please refer to the pages of standards（P3～7）.

14


Specifications

Osaka Vacuum, Ltd.

φ240

φ208

ISO R200(Special)

φ293

φ269

φ240

φ245

7710

023

125

28.5

19128

440

3440 KF40

159.5

159.51852-M4 DP8

8-M12 DP23

MS

Motor

Connector

Connector

P.C.D.220

Specification (reference)

Flange

Volume flow rate




TG1300MR

130012301200

TG900MR

9008601050

1×108

1.5×104

＜1×10-6（＜ 7.5×10-9）30004-54-5

500(3.8)≧250

34TC011M

L/sL/sL/s

Pa（Torr）sccm

minmin

Pa（Torr）L/min

kg

InletOutletN2


N2

H2

N2


Please contact us for details

Durability test

Drawing of outside dimension (reference)

The gamma ray irradiation test with a cumulative absorbed dose of 50 MGy has beenalready conducted.

TG-MR Series that can perform well even in a severe environment

Radiation-hardened Magnetically Suspended Turbo Molecular Pump series

TG-MRApplication:■Accelerator, Research of nuclear fusion and other equipment .

The TG-MR series was developed for use under a radiation environment. They are hardened of endurance against radioactive rays.

Turb

o M

olec

ular

Pum

ps

15

16

Pumping System

Osaka Vacuum, Ltd.

● More compact ST series has come out!

● Mounted with high compression turbo molecular pump　 TG70F!

● One of two kinds of backing pump (diaphragm pump)　 can be selected to match for exhausting chamber!

● Space saving design of A4 laptop size!

● Most suitable for use as easy operating and portable　 pumping units for R&D!

ST-Compact

STC70FR005

STC70FR013

TG70F Pumping System

● The TMP pumping system where a number of pieces 　of equipment※2necessary for high vacuum are 　compactly arranged. It can pump up to high vacuum 　with a simple operation!

● Since it has casters, it can be easily moved.● Mounted with a turbo molecular pump from the TG-F 　series which is resistant to disturbance! 　(The pump can be moved while it is operating.)

◆ Line-up of basic sets (three models) in which a turbo 　molecular pump with a pumping speed of 50 to 350 L/s※１is 　mounted.

※2：Turbo molecular pump, backing pump, vacuum piping, automatic　　 slow leak valve, control unit　　(Optional devices and apparatuses are available to match your needs.)

※1：Grease lubrication TMP, TG-F Series

ST Series

ST Series

◆ Most compact type among the ST Series! 　Further space saving is achieved with its desktop size!ST-Compact

Introduction of the TMP pumping system

17

Osaka Vacuum, Ltd.

Output cable※2

M3/TC010M/SS/CM5/TC010M/SS/CM7/TC010M/SS/CM10/TC010M/SS/CM15/TC010M/SS/CM20/TC010M/SS/CM25/TC010M/SS/C

3m5m7m

10m15m20m25m30m

length modelCable model（Standard length：※15m）

Cable for controller/TC011M(TG390M/420M/900M/1300M/2400M)

ModelStandard Corrosive resistantType

※1 Please contact us with the exception of standard length.※2 Both of the controller side and the pump side are bifurcated, and the magnet bearing cable,　　 motor cable and fan cable are integrated into one.　　 A optional cable is necessary for TG-MI. Please contact our staff for details.※3 Non-standard item.

MO1/TC021M/SS/CMO3/TC021M/SS/CMO5/TC021M/SS/CMO7/TC021M/SS/CMO10/TC021M/SS/CMO15/TC021M/SS/CMO20/TC021M/SS/CMO25/TC021M/SS/C

1m3m

7m10m15m20m25m30m

lengthmotor cable

Cable for controller/TC021M※4(TG3260M/3460M)

※4 With TC021M, the motor cable and the magnetic bearing cable are independent of each other.※5 Non-standard item.

Model

Size

Bearingsystem

SpecialStructure

Inlet Flange※1

Coolingsystem

Specificationtype

TGTSNear Volume flow rate（N2）BFM

ILRUCBRVANWBC

：Compound Molecular Pumps：Helicai Grooved Vacuum Pumps

：Ball bearing（oil lubrication）：Ball bearing（grease lubrication）：Magnetically suspended：Normal：Thermal insulation：ultra low vibration：Against radiation：ultra high vacuum：CF：ISO-B：ISO-R：VG：Air cooling：Natural air cooling：Water cooling：Standard type：Corrosive resistant type

TG420M※BAB1

1

2

3

4

5

6

7

2 3 4 5 6 7

CF ： JVIS 003 Bakeable Flanges : Dimensions-Knife-edge sealed typeISO-B ： ISO1609:1986 Vacuum technology - Flange dimensions （Bolted type）ISO-R ： ISO1609:1986 Vacuum technology - Flange dimensions　　　　（Clamped or rotatable type）VG ： JISB2290 :1968 Vacuum technology-Flange :dimensions 　　　　（Vacuum flange with O-ring groove）KF ： ISO2861/1:1974 Vacuum technology - Quick-release couplings 　　　　- Dimensions - Part 1（Clamped type）

※1 Standard Flange

Products Line-up

TG390MCABTG390MBABTG390MVABTG390MCWBTG390MBWBTG390MVWBTG390MLCABTG390MLBABTG390MLVABTG390MLCWBTG390MLBWBTG390MLVWB

TG420MCABTG420MBABTG420MVABTG420MCWBTG420MBWBTG420MVWBTG420MLCABTG420MLBABTG420MLVABTG420MLCWBTG420MLBWBTG420MLVWB

TG900MCABTG900MBABTG900MVABTG900MCWBTG900MBWBTG900MVWBTG900MLCABTG900MLBABTG900MLVABTG900MLCWBTG900MLBWBTG900MLVWBTG900MUCABTG900MUCWBTG900MIBWBTG900MIVWBTG1300MCABTG1300MBABTG1300MVABTG1300MCWBTG1300MBWBTG1300MVWBTG1300MLCABTG1300MLBABTG1300MLVABTG1300MLCWBTG1300MLBWBTG1300MLVWBTG1300MUCABTG1300MUCWBTG1300MIBWBTG1300MIVWBTG2400MBABTG2400MVABTG2400MBWBTG2400MVWB

TG3260MBWBTG3260MVWBTG3460MVWB

TG390MCACTG390MBACTG390MVACTG390MCWCTG390MBWCTG390MVWCTG390MLCACTG390MLBACTG390MLVACTG390MLCWCTG390MLBWCTG390MLVWCTG390MIBWCTG390MIVWCTG420MCACTG420MBACTG420MVACTG420MCWCTG420MBWCTG420MVWCTG420MLCACTG420MLBACTG420MLVACTG420MLCWCTG420MLBWCTG420MLVWCTG420MIBWCTG420MIVWCTG900MCACTG900MBACTG900MVACTG900MCWCTG900MBWCTG900MVWCTG900MLCACTG900MLBACTG900MLVACTG900MLCWCTG900MLBWCTG900MLVWC

TG900MIBWCTG900MIVWCTG1300MCACTG1300MBACTG1300MVACTG1300MCWCTG1300MBWCTG1300MVWCTG1300MLCACTG1300MLBACTG1300MLVACTG1300MLCWCTG1300MLBWCTG1300MLVWC

TG1300MIBWCTG1300MIVWCTG2400MBACTG2400MVACTG2400MBWCTG2400MVWCTG2400MIBWCTG2400MIVWCTG3260MBWCTG3260MVWCTG3460MVWC

TG390M

TG390ML

TG390MI

TG420M

TG420ML

TG420MI

TG900M

TG900ML

TG900MU

TG900MI

TG1300M

TG1300ML

TG1300MU

TG1300MI

TG2400M

TG2400MI

TG3260M

TG3460M※Please contact us for models other than the above.

modelMS1/TC021M/SS/CMS3/TC021M/SS/CMS5/TC021M/SS/CMS7/TC021M/SS/CMS10/TC021M/SS/CMS15/TC021M/SS/CMS20/TC021M/SS/CMS25/TC021M/SS/C

MS cablemodel

5m（standerd）

※3

※5※5

Notwritten( )

18

Series of Turbo Molecular Pumps

◎ Corrosive Resistant Type in 200～1300L/s.

◎ Standard Type & Corrosive Resistant Type in 　1800～5500L/s.

Compound Molecular Pumps（TG series）

◎ Grease-lubricated types with pumping speeds of 　50～2400L/s.

◎ Any orientation and easy operation.

◎ Maintenance free. 　 (O/H cycle:20,000 to 30,000 hours.)

◎ Durable, compact, light-weight design.

◎ Models impervious to air inrush, quick shut down　 on venting are available.

Compound Molecular Pumps（TG-F series）

◎ Pumping speeds of 230L/min or 500L/min is available.◎ Small size, lightweight. ◎ High pumping speed around atmospheric pressure.◎ Lubrication oil is not used, making the device completely oil-free.◎ For use as a backing pump for TMP.◎ Most suitable for applications with light processes.

Compact Dry Vacuum Pump（DSP series）

2010.05.1000

Osaka Head office　

JQA-QMA1902NABARI FACTORY

JQA-EMA5143

Documents

OSAKA VACUUM Turbo Molecular Pumpscdn033.yun-img.com/static/upload/ribovac/download/202006201432… · 3 Turbo Molecular Pumps Osaka Vacuum, Ltd. The inlet flange bolt holes are symmetrical