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Semicon europa08. – 10. October 2013
hall 2 | booth 2.050
2 3
Accretech (Europe) GmbH 08
acp-IT AG 10
ADENSO GmbH 11
ADZ NAGANO GmbH 12
Allresist GmbH 13
aps Solutions GmbH 14
ATT Systems GmbH 15
camLine GmbH 16
Camstar Systems, Inc 17
Cleanpart GmbH 18
Compugraphics Jena GmbH 19
Cool Silicon e. V. / Silicon Saxony Management GmbH 20
CS CLEAN SYSTEMS AG 21
DERU Planungsgesellschaft für Energie-,
Reinraum- und Umwelttechnik mbH 22
DMS Dynamic Micro Systems GmbH 23
Dresden, Department of Economic Affairs 24
Dresden Fraunhofer Cluster Nanoanalysis 29
EBARA Precision Machinery Europe GmbH 26
Entegris GmbH 25
Fraunhofer-Institut für Produktionstechnik und
Automatisierung IPA 28
Fraunhofer IZM-ASSID 30
Hager + Elsässer GmbH 31
HAP GmbH Dresden 32
HORIBA Europe GmbH 33
HSEB Dresden GmbH 36
Infineon Technologies Dresden GmbH 34
InnoLas Semiconductor GmbH 37
MCRT GmbH 38
MSG Lithoglas GmbH 39
NANIUM S.A. 40
Roth & Rau – Ortner GmbH 41
Rudolph Technologies Europe BV 42
Saxony Economic Development Corporation 43
SEMPA SYSTEMS GmbH 44
SPEA GmbH 46
SYSTEMA System entwicklung Dipl.-Inf. M. Austen GmbH 45
znt Zentren für Neue Technologien GmbH 48
4
NaNoelectroNics
applicatioNs
smart systems
software
450 mm techNology5
Silicon Saxony e. V. is Europe’s most successful trade association for the micro- and nanoelec-tronic, smart system, application and energy system industries. We are connecting 300 manufacturers, suppliers, research institutes, universities and public institutions in a network. As a continuously growing and vital high- tech network, we understand ourselves as a communication and cooperation platform for our members. This promotes and stabilizes the economic development of our member companies. Intelligent partnerships among them enable knowledge transfer, synergies, business relationships and promote innovative power. At our joint booth, you can meet us and 36 companies from Silicon Saxony, presenting their state-of-the-art expertise in the field of microelectronics – a business sector Saxony has a European leadership role in!
www.silicon-saxony.de
SILICON saXoNy – The high-tech NeTwOrk
“Silicon Saxony” is Europe’s leading and the world’s fifth largest cluster for microelectronics/ICT. Saxony’s firms are active along all steps of the ICT value creation chain. A unique concen-tration of approx. 2,100 companies with more than 51,000 employees providing extensive knowledge and expertise in the sectors micro-electronics and nanoelectronics, nanotechno-logy, organic & printed electronics, energy- efficient systems, telecommunications techno-logy, and integrated sensor technology is found in the region between Dresden, Leipzig and Chemnitz.
www.invest-in-saxony.com
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1 EBARA Precision
Machinery Europe GmbH
2 Allresist GmbH
3 MCRT GmbH
4 ADZ Nagano GmbH
5 HORIBA Europe GmbH
6 DERU Planungsgesellschaft
für Energie-, Reinraum- und
Umwelttechnik mbH
7 Compugraphics Jena GmbH
8a znt Zentren für
Neue Technologien GmbH
8b Camstar Systems, Inc
9 Infineon Technologies
Dresden GmbH
10 Roth & Rau – Ortner GmbH
11 HAP GmbH Dresden
12 SYSTEMA
System entwicklung
Dipl.-Inf. M. Austen GmbH
13 SEMPA SYSTEMS GmbH
14 MSG Lithoglas GmbH
15 Hager+Elsässer GmbH
16 HSEB Dresden GmbH
17 InnoLas Semiconductor
GmbH
18 acp-IT AG
29 ATT Systems GmbH
30 aps Solutions GmbH
31 Accretech (Europe) GmbH
32 Fraunhofer IZM-ASSID
33 Dresden Fraunhofer
Cluster Nanoanalysis
34 Fraunhofer-Institut für
Produktionstechnik und
Automatisierung iPA
35 NANIUM S.A.
36 Saxony Economic
Development Corporation
19 Entegris GmbH
20 Cool Silicon e. V. / Silicon
Saxony Management GmbH
21 Dresden, Department of
Economic Affairs
22 SPEA GmbH
23 camLine GmbH
24 Cleanpart GmbH
25 ADENSO GmbH
26 CS CLEAN SYSTEMS AG
27 Rudolph Technologies
Europe BV
28 DMS Dynamic Micro
Systems GmbH
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33Bar Exhibitor
Lounge
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www.accretech.jp/english
ACCRETECH’sLeading Products Overview
Contact:
Accretech (Europe) GmbH
Landsberger Str. 396
D-81241 Munich
+49 (0)89 546 788 0
Probing: High Accuracy and Speed, Ultra Thin Wafer,
Frame Handling, High Voltage, Cold Probing etc.
Dicing: World’s Smallest Footprint Dicing Systems,
Fully Dry and Dust-Free Laser Dicer, Packaging Dicing
Dicing Blades: Diamond cutting blades for high
quality and cost cutting
Thinning: Grinding & Polishing down to 15 m,
Integrated Mounting and B/G Peeling, Capable for
DAF and TSV Applications
Grinding: High Rigid Grinder for Sapphire,
SiC materials, Wafer Edge Grinding
Dicing Service: Blade and Laser Dicing in Munich
Demo Center
Dicing Service
Sample Dicing for R&D
Dicing Service for Small Productions
Dicing Process Optimization
Dicing Blade Evaluation
MAHOH Laser Dicing of MEMS Devices
ACCRETECH’sMunich Demo Center
1110
WHR-VAC
Wafer Handling Robot
Specification standard options
Working
range
Repeat-
ability
Max. speed
X
Z
R
X
Z
R
X
Z
R
Clean room classEN ISO 14644
Payload
Power supply
Interfaces
500 mm
100 mm
360°
200...1000mm
50...250mm
–
–
–
–
± 0,08 mm
± 0,05 mm
± 0,05°
0,2 m/sec.
0,1 m/sec.
90°/sec.
...0,5 m/sec.
...0,2 m/sec.
...360°/sec.
ISO 6
2,5 kg
ISO 5 ... 3
> 10,0 kg
95 ... 255 VAC
RS - 232Profibus DP,Ethernet, ...
Vacuum / Leakage rate
5x10E-6 mbar x l / s
5x10E-7 mbar x l / s
Bildmotiv83x65cm_Layout 1 12.08.13 15:57 Seite 1
Contact:
advanced control products
Information Technology AG (acp-IT AG)
Moritzburger Weg 67
D-01109 Dresden
+49 (0)351 207 818 0
www.acp-it.com
InFrame SynapseAdvanced Factory Control
Contact:
ADENSO GmbH
Zur Wetterwarte 27
D-01109 Dresden
+49 (0)351 795 9797 0
www.adenso.de
Low Risk Migration
Factory simulation & emulation ensuring
least-impact migration scenario
Equipment Integration
Plug & Play SECS/GEM Adapter starting
from 2.999 €
APS – Advanced Planning & Scheduling
Finding the sweet spot between resource
utilization, throughput, cycle time and on-time
order fulfi llment
Manufacturing Optimization
Process Analysis & Control with powerful
SPC, FDC, APC (R2R) and MSA modules
WHR-VAC (Top view): High vacuum model with end-effector for 200 mm
wafer carrier
high load
high precision
high vacuum
low price
Let´s start now to lower your production costs
and maximize the return of your assets!
NEW product: Wafer Handling Robothigh vacuum type
1312
Contact:
ADZ NAGANO GmbH
Bergener Ring 43
D-01458 Ottendorf-Okrilla
+49 (0)35205 5969 30
www.adz.de
InFrame SynapseAdvanced Factory Control
Contact:
Allresist GmbH
Am Biotop 14
D-15344 Strausberg
+49 (0)3341 3593 0
www.allresist.de
E- Beamresists
The new CSAR 62 positive e- beam resist
AR- P 6200, high sensitivity, plasma etch stable,
highest resolution (7 nm), similar ZEP 520
Photoresists
Negative resists AR- N 4340 and AR- N 4400
(CAR 44) for galvanic- and lift- off- processes
Experimental Samples
Thermo stable resists (> 300°C) and two-layer-
systems, conductive layer
Process chemicals
Developer, thinner, remover (also for ZEP- resists)
Innovation, Creativity,Customer Specifi c Resists
Special application in the fields of industry,
Hydraulic, Pneumatic, Railway, Aerospace, Racing
Flexible production capacity, more than
4.000 different products
Wide pressure range 1 mbar up to 5000 bar
Certifications – DIN EN 9100, ISO 16949,
German Lloyd, ATEX
Europa-Distributor of NAGANO KEIKI Co., Ltd.,
Japan
1514
www.aps-munich.com
Technology forBetter Contacts
www.att-systems.com
Meeting today‘s andtomorrow‘s requirements
Best performance for wafer testing at most
extreme temperatures and conditions
-75°C – 600°C
Air cooled and liquid cooled wafer chucks
for 150 / 200 / 300 / 450 mm wafer diameters
Accuracy better than ±0.5°C
Temperature uniformity better than ±0.5K
Planarity better than ±5μm
Test Equipments:
- LED Probing and Sorting Equipment by
MPI Corp., TW
- Analytical Probe Stations by SIGNATONE, USA
- Test Handlers for Packaged Devices by
Microtec Fertigungs GmbH
- Wafer and Jig Saws by ZenVoce, TW
Test Sockets:
- A Wide Range of High Quality and High
Performance Contactor Solutions for all Device
Test Applications
- Winway Technology, the no. 1 of Test Socket
Designer & Manufacturer in Taiwan
Probe Cards:
A Selection of the Best Probe Card Technologies
for all Wafer Test Applications from MPI Corp, TW
and SEDICONTECH, Korea.
Contact:
aps Solutions GmbH
Gutenbergstraße 1
D-82178 Puchheim / Munich
+49 (0)89 841 027 0
Contact:
ATT Systems GmbH
Fraunhoferstraße 11
D-82152 Planegg-Martinsried
+49 (0)89 899 482 0
ZEN VOCE
16 17
Contact:
camLine GmbH
Industriering 4a
D-85238 Petershausen
+49 (0)8137 935 0
www.camLine.com
Software Solutions forManufacturing
Contact:
Camstar Systems, Inc
13024 Ballantyne
Corporate Place, Suite 300
Charlotte, NC 28277
+1 (704) 227 6600
www.camstar.com
One MES for GlobalSemiconductor Manufacturing
STATE-OF-THE-ART MES
Chosen, Proven, and Accepted at Demanding
Customers Worldwide
SCALABLE
Built to Scale for High Volume, R&D, Globally
Distributed Plants and Diverse Products
LOW RISK MIGRATION
Implement without Disrupting Production
RAPID ROI
Fast implementation and Knowledge Transfer
Global partner for more than 20 years
Semi, solar, mechatronics & medical industries
LineWorks product suite
Cornerstone
Integration & startup projects
Global services
Solutions & Applications
Manufacturing quality
Process security
Monitoring & reporting
Performance & OEE efficiency
Executive logistics
Design of Experiments (DoE)
Explorative Data Analysis (EDA)
camLineagile • efficient • reliable
Add-ons extend the
functionality of LineWorks
SPACE, plug-ins will
provide additional analyses
capabilities.
LineWorks RM offers
enterprise-wide process
security by ensuring that a
product is manufactured
with the right Recipe
Object.
Cornerstone combines
its power as an analysis
software with a complete
environment for explora-
tory data analysis, model
building, and experimental
design.
18 19
Contact:
Cleanpart GmbH
Siemensstraße 1
D-71679 Asperg
+49 (0)7141 681 160
www.cleanpart.de
Market leader in precisioncleaning & coating
Contact:
Compugraphics Jena GmbH
Im Steinfeld 5
D-07751 Jena
+49 (0)3641 633 88 0
www.compugraphics-photomasks.com
Photomasks for all yourlithography needs
Compugraphics is a leading manufacturer of
photomasks for the electronics industry with
more than 40 years experience in high precision
lithographic structuring
Our products:
- 1X Reticles & Reduction Reticles
- Master photomasks – 3” to 16”
- Copies – 4” to 7”
- Wafer direct write
- OPC and Phaseshift masks
Our service:
- Mask cleaning and repell service
- Design support
- MPT coating of photomasks
- Mask cutting
ISO 9001 and ISO 14001 certified
Thermal Spray Coatings
Plasma Spray Coating, HVOF, Twin Wire
Arc Spray, Flame Spray
Thin Film Coatings
PECVD (DLC), PVD
Analytical Services
Material & surface analysis
Precision Cleaning
Abrasive Blasting
Dry & Wet, CO2, Polar
Spare parts manufacturing & supply
2120
Contact:
Cool Silicon e. V. / Silicon Saxony
Management GmbH
Manfred-von-Ardenne-Ring 20
D-01099 Dresden
+49 (0)351 8925 800
www.cool-silicon.org
Fit For A Cool Future
Contact:
CS CLEAN SYSTEMS AG
Fraunhoferstraße 4
D-85737 Ismaning
+49 (0)89 9624 000
www.cscleansystems.com
Exhaust Gas Abatement –Safe and eco-friendly solutionswhere you need them
Safe, dry chemical conversion of toxic gases
to stable solids
Proprietary CLEANSORB® media
No handling of toxic waste
Practically maintenance-free
Local refill service worldwide
Over 25 years of experience
More than 5000 installations worldwide
Future Experts – NanoScout
Cool education tool for the upcoming technologists
laying the ground for future ICT expertise.
Future Partners – Silicon Europe
Expanding the Cool idea to Europe with a strong
alliance for European microelectronics.
www.silicon-europe.eu
Future Projects – fast and EEAS
Future R&D-projects initiated in Saxony.
www.fast-zwanzig20.de | www.eeas-zwanzig20.de
www.spitzencluster.de | www.cool-silicon.org
CS CLEANSYSTEMS
®
®
CS CLEANSYSTEMS
®
®
2322
Contact:
DERU Planungsgesellschaft für Energie-,
Reinraum- und Umwelttechnik mbH
Hermann-Reichelt-Straße 3a
D-01109 Dresden
+49 (0)351 884 46 0
www.deru-reinraum.de
Consulting, Engineering,Construction Supervision
Contact:
DMS Dynamic Micro
Systems GmbH
Im Wiesengrund 17
D-78315 Radolfzell
+49 (0)7732 9409 244
www.dms-semi.de
DERU designs clean rooms, special laboratories
as well as production sites with very high level
requirements.
For more than 20 years high technology
companies and research facilities trust in the
competency of presently about 60 members
of staff.
The business activities comprise the conceptual
design of building services as well as planning
of utility supply, consulting service and complete
project management.
Dynamic Micro SystemsSemiconductor Equipment GmbH
M 1990 Reticle
Stocker
M 1000 EUV Pod
Cleaner
M 800 FOUP
Cleaner
DMS – an innovativ andreliable Partner
FOUP Cleaner
Reticle Stocker
Bare Wafer Stocker
Wafer Sorter and EFEM
EUV Equipment
24 25
Contact:
Dresden, Department of Economic Affairs
Ammonstraße 74
D-01067 Dresden
+49 (0)351 4888 700
www.dresden.de/business
Contact:
Entegris GmbH
Hugo-Junkers-Ring 5
Gebäude 107/W
D-01109 Dresden
+49 (0)351 795 97 0
www.entegris.com
Creating a material advantage
Industries served
semiconductor, flat panel display, energy,
aerospace, life sciences
Your goals
productivity, performance and competitive edge
Our expertise
material science
Our solutions
purification, process control and material protection
= Dresden
MicroelectronicsMicroélectroniqueMikroelektronik الالكترونيات الدقيقة
Competencies: Research & Development,
IC Design, Photomasks, Chip Manufacturing,
Packaging, Equipment, Software
The Economic Development Offi ce of the City
of Dresden is your contact and partner as
enterpreneur or investor. Our service ensures
that your investment in Dresden can be realised
without delay.
Welcome to Dresden!
2726
Next Generation Vacuum Solutionsfor the Semiconductor Industry
EBARA is a leading supplier for the Semiconductor
Industry with a broad portfolio. Key products and
services are
Energy-saving Dry Vacuum Pumps
High-efficient Waste Gas Treatment Systems
Fast responsiveness, complete service
coverage and full commitment to quality
and customer satisfaction
Contact:
EBARA Precision Machinery Europe GmbH
Rodenbacher Chaussee 6
D-63457 Hanau
+49 (0)6181 18760
Next Generation Vacuum Solutionsfor the Semiconductor Industry
EBARA Precision Machinery is a global supplier of
leading edge wafer processing tools from 150 to
300 mm fulfilling existing and future Technologies.
Its portfolio includes
Chemical Mechanical Polishing
Model F-REX200, Model F-REX300S2
Electroplating
Model F-REX200, Model F-REX300S2
Bevel Polishing
Model EAC200bi, Model EAC300bi
Refurbishment Center UK
Cleaning and Refurbishment, Upgrading,
Functional Testing, Training
www.ebara-pm.eu
EV-S Series pumps are energy efficient
vacuum pumps for clean to light duty
processes such as Load Lock, SEM,
PVD, Ashing, Ion Implant and Etch.
The EV-M series is a new energy saving
dry vacuum pump generation particularly
suitable for harsh processes.
The EBARA G5 is a highly efficient gas
abatement system for a large number of
waste gases including CFCs.
The F-REX series is offering
both for 200 and 300 mm
high flexibility and productiv-
ity combined with superior
processing capabilities.
2928
Dresden Fraunhofer ClusterNanoanalysis
Contact:
Dresden Fraunhofer Cluster Nanoanalysis
c/o Fraunhofer IZFP Dresden
Maria-Reiche-Str. 2
D-01109 Dresden
+49 (0)351 888 15 609
www.nanoanalysis.fraunhofer.de
Advancement of analysis methods
Consultation and accomplishment of services in
the field of nanoanalysis
Development of components and systems for
new analysis techniques
Development of application strategies for
advanced analysis methods
Application areas: micro-, nano-, and opto-
electronics; renewable energy sources; lightweight
construction and functional materials
Contact:
Fraunhofer-Institut für Produktionstechnik und
Automatisierung IPA
Nobelstrasse 12
D-70569 Stuttgart
+49 (0)711 970 1633
www.ipa.fraunhofer.de
Intelligence and Quality −R&D by Fraunhofer
Equipment and Processes
Clean, highly precise handling. Intelligent tools.
Data and IT
System intelligence. Cloud-based IT.
Manufacturing Planning and Logistics
Material flow simulation. Value stream.
Quality Assurance
Fraunhofer TESTED DEVICE®. Analytics.
Local cleaning. Personnel training.
Products
New materials. Intelligence within products.
Modulus mapping of On-chip interconnects
3130
Contact:
Fraunhofer IZM-ASSID
Ringstraße 12
D-01468 Moritzburg
+49 (0)351 795572 12
Contact:
Hager + Elsässer GmbH
Ruppmannstraße 33b
D-70565 Stuttgart
+49 (0)711 7866 0
www.izm.fraunhofer.de/assid
3D Wafer Level System Integration atAll Silicon System Integration Dresden – ASSID
www.hager-elsaesser.de
Wordwide technology leadership made in Stuttgart.Nothing left to chance.
Extensive experience in state-of-the-art
UPW Generation.
Technologies for Pretreatment, Make-Up and Polishing.
Extensive experience in waste water
recycling and reuse.
Technologies for CMP, wet-etch, rinsing and
backgrind water.
From Stuttgart to Siberia to Singapore.
We meet all standards and regulations in all
nations of the world.
Expert advice and professional assistance.
You buy water quality and availability and not a system.
Advanced 3D Wafer Level System in Package –
300 mm TSV Process Line
Interposer with Cu-TSV multi-layer RDL front and
back side
Qualified high-yield Cu-TSV via-middle/via-last
process integration
High-density and fine pitch bumping
Thin wafer handling and processing
Die-to-wafer assembly for 3D stack formation
and assembly
Customer-specific prototyping, low-volume
manufacturing
3D Heterogeneous System Integration
Semiconductor fabs rely upon the supply
of large volumes of extremly high quality
UPW. At HAGER + ELSÄSSER all needed
treatment technology are are based on
a long and successfull history: from pre-
treatment to make-up to polishing.
Waste water treatment plants are complex
systems. No matter if standardized or
individual, HAGER + ELSÄSSER will
always deliver the most economical
solution.
With HAGER + ELSÄSSER you buy water
quality and availability. With response
times of 24h and less will guarantee full
availability throughout the whole lifecycle
of your water treatment plant.
3332
Contact:
HAP GmbH Dresden
Gostritzer Str. 63
D-01217 Dresden
+49 (0)351 871 806 0
Contact:
HORIBA Europe GmbH
Hans-Mess-Str. 6
D-61440 Oberursel
+49 (0)6172 1396 0
www.hap.de
Carrierhandling, Reticlehandling,Waferhandling
www.horiba.com
SMOOTH HANDLING HAPPENS
Handling an Robotics for microelectronics
and nanoelectronics
GAPLESS AUTOMATION HAPPENS
Automation and control technology for microelectronics
and nanoelectronics
CLEANROOM APPLICATION HAPPENS
Robotic Systems and Automation for cleanroom
applications
NANOTECH UTILIZATION HAPPENS
Clean Robotic Systems for spezialised environment
HAP-HERO® Carrierhandling and EUV Reticlehandling
Your Partner forMeasurement and Control
Wet Process Monitoring SC-1, SC-2, SPM, HF,
Ozone
Fluid Control (Gas & Liquid) Massflow, Vaporizer,
Pressurecontrol
Dry Process Monitoring OES & Interferrometric
Etching Real time Monitoring
Particle Inspection for Photomasks, CMP-Slurry
Ambient Air Monitoring SO2, Nox, NH3, H2S, THC
Wet Process Monitor
Particle Interspection
Systems
Massflow Controller
Vaponizer
Contact:
Infineon Technologies
Dresden GmbH
Königsbrücker Straße 180
D-01099 Dresden
+49 (0)351 886 110 0
3534
Innovative Semiconductor Solutions
We are the semiconductor innovation leader for
energy efficiency, mobility and security. Our solutions
help modern society to grow while preserving our
environment.
Infineon Technologies Dresden
First high-volume production of power
semiconductors on 300mm wafers worldwide
Highly automated high-mix fab for 200mm wafers for
More-than-Moore technologies
Infineon Technologies Dresden
www.infineon.com
Contact:
HSEB Dresden GmbH
Manfred-von-Ardenne-Ring 4
D-01099 Dresden
+49 (0)351 20758 0
Contact:
InnoLas Semiconductor GmbH
Justus-von-Liebig-Ring 8
D-82152 Krailling
+49 (0)89 899 360 0
3736
www.hseb-dresden.de
All Side Wafer Inspection and Review
www.innolas-semiconductor.com
WAFERMARKING +SORTING EQUIPMENT (2” – 450mm)
InnoLas Semiconductor GmbH is a leading manufacturer
of high quality laser marking and sorting equipment
for the semiconductor and LED industry.
Materials: Silicon (Si), Germanium (Ge),
Quartz (SiO2), Sapphire (Al2O3),
Gallium Arsenide (GaAs), Gallium Nitride (GaN),
Silicon Carbide (SiC), Indium Phosphide (InP),
Lithium Tantalate (LiTaO3), Lithium Niobate (LiNbO3)
Glass, Ceramics and much more
Surfaces: sliced, grinded, etched, lapped,
polished, coated
Fonts: Semi OCR, T7 Data Matrix, BC 412,
Engrave Mode
Products
AOI, semi-auto inspection and review systems,
microscopes and OEM.
Features
All-side inspection (front/back side and edge).
Low recipe set-up effort, multiple inspection steps
in one tool.
Advanced metrology for CD, VIA and THK
measurement, using VIS, NIR and UV
Benefits
Competitive CapEx and best of breed throughput
guarantee high productivity.
Long-term upgradeability secures your investments.
HSEB Dresden is a leading supplier of optical inspection systems.
Contact:
MCRT GmbH
Ludwig-Rinn-Straße 14–16
D-35452 Heuchelheim
+49 (0)641 948 86 0
Contact:
MSG Lithoglas GmbH
Maria-Reiche-Str. 1
D-01109 Dresden
+49 (0)30 46403 618
3938
www.mcrt.de
MCRT – Flexible solutionsfor your cleanroom
www.lithoglas.de
Hermetic Packaging usingGlass Thin Films
enables plastic molded packages where
high reliability is needed
reduction of package size and packaging costs
wafer-level hermetic sealing of surfaces against
moisture or aggressive media
wafer-level-capping for advanced optical applications
proven and widely compatible technology,
excellent material properties
Filter-Fan-Units and Cleanroom Cabins:
standard and customized
Minienvironments: adapted and integrated for ISO 1
Clean-Air-Management-Systems: EUV compatible,
nitrogen purged, temperature and humidity controlled
Clean-Air-Control-Unit: smart and intelligent
parameter management
Airborne-Molecular-Filtration: efficient and
cost effective
Rent a Tent: temporary and flexible Hermetic Glass Thin Film:
high freedom of design, excel-
lent adhesion, matched CTE to
silicon, long-term stable, low-
temperature deposition
Wafer-Level-Capping: several
thousand devices are encap-
sulated simultaneously, highly
precise in a cleanroom environ-
ment securing high yield
Packaged devices using
Lithoglas technology: small,
cheap and reliable packages
due to hermetic glass sealing
directly on the chip surface.
Contact:
Roth & Rau – Ortner GmbH
Manfred-von-Ardenne-Ring 7
D-01099 Dresden
+49 (0)351 888 61 0
40 41
www.nanium.com
Your Packaging &Test Solution in Europe
www.rr-ortner.com
The missing Link:Automation by Ortner.
SCOUT® – Mobile Robot for Efficient
& Flexible Use in Cleanrooms:
Cost-Saving Alternative to Permanently
Installed Transport Systems
Diverse Transport and
Handling Applications
Wafer Level Packaging and Wafer Test Service
- Fan-out an Fan-in up to 300 mm Wafer
Packaging, Assembly and Test Services
- Complex Multichip and System-in-Package
Solutions
Flexible Pilot Line
- Fast Quality Prototyping from Wafer Processing
to SMT
Turnkey Engineering Services
- Design, Development, Reliability Tests and
Failure Analysis
Contact us: [email protected]
NANIUM S.A. –
Branch Office Dresden
+49 (0)351 889 69 854
Contact:
NANIUM S.A.
Avenida 1º de Maio 801,
4485-629
Vila do Conde, Portugal
+351 252 246 000
Visit SCOUT®
@ Via Mobile 4
Contact:
Rudolph Technologies Europe BV
Suite 7 Stuart House
Eskmills Business Park
Musselburgh EH21 7PB
Scotland, UK
+44 131 273 4321
Contact:
Saxony Economic
Development Corporation –
Wirtschaftsförderung Sachsen GmbH
Bertolt-Brecht-Allee 22
D-01309 Dresden
+49 (0)351 21 38 0
4342
www.rudolphtech.com
Leader in 3D PackagingInspection & Metrology
www.wfs.saxony.de, www.invest-in-saxony.com
Saxony Economic Development Corp.(Wirtschaftsförderung Sachsen GmbH)
Founded by the State of Saxony, the Saxony Economic
Development Corporation builds bridges for Saxony’s
companies on their way to the world’s markets and for
investors on their way to Saxony.
Since 1991 we have been lending a helping hand in the
search for cooperation partners, for suitable business
locations and qualified suppliers. our services include
procurement of the latest data on Saxony’s economy,
customized business site location services, contacts with
regional decision makers, information on opportunities
for subsidy programs, as well as assistance in initiating
cooperative partnerships.
All Surface Inspection
Front Side; Edge; Backside
Thin Film Metrology
Transparent Films; Metal Films
Advanced Packaging Lithography
Software Solutions for
Yield Management;
Equipment and Process Control
Probe Card Test and Analysis
Mask Blank Inspection
Bare Wafer Inspection
Contact:
SEMPA SYSTEMS GmbH
Zur Wetterwarte 50, Haus 301
D-01109 Dresden
+49 (0)351 88810 0
Contact:
SYSTEMA Systementwicklung
Dipl.-Inf. Manfred Austen GmbH
Manfred-von-Ardenne-Ring 6
D-01099 Dresden
+49 (0)351 8824 60
4544
www.sempa.de
SEMPA SYSTEMS GmbH
www.systemaGmbH.de
Manufacturing Excellencethrough Software Solutions
Specialist in business process automation
MES consulting and migration
Equipment integration with SYSTEMA EI Suite
SECS, Semi PV02, XML, S7, OPC, etc.
End-to-end system integration
from tool control to the ERP
Full traceability and control capabilities
for all manufacturing areas
SEMPA SYSTEMS GmbH develops, manufactures and
distributes globally highest purity media supply systems
and turn-key solutions for bulk gases, speciality gases and
special chemicals. Within our R&D department we focus
on innovative solutions for our customer base, such as the
development of a water vapor permeation measurement
system. (HiBarSens)
768 channels in a hand-carryable size tester
Contact:
SPEA GmbH
Ruhberg 2
D-35463 Fernwald-Steinbach
+49 (0)6404 697 0
46 47
SPEA – The answer for yourtest challenges
SPEA’s semiconductor product range offers the
modular Turn-Key solution concept
MEMS Test Cell – stimulation & test of MEMS
and sensors at defined temperature
Smart Card Test Cell – High Productivity LF, HF &
UHF test solution for Smart Card & RFID modules
Power Module Test Cell – test of IGBT, Power,
HV and LV MOSFET modules
Comptest MX series – Mixed Signal Testers
www.spea.com
Device-oriented tester
48 49
znt SOLUTIONS and SERVICES lead to TOTAL PRODUCTION
CONTROL
All-In-One IT-Solutions for FabAutomation & Process Control
Your Benefits – An Agile IT System that:
Increases effectiveness
Reduces costs
Ensures total transparency
Makes total production control easy
Important Solutions & Services to increase
your success:
MES, EES, RTS/RTD and APC Solutions
Equipment Integration
FAB IT Consulting & Support
www.znt-richter.com
Contact:
znt Zentren für Neue Technologien GmbH
Institut Dresden
Am Brauhaus 12
D-01099 Dresden
+49 (0)351 652 480 10
Silicon Saxony e. V.
Manfred-von-Ardenne-Ring 20
D-01099 Dresden
Phone: +49 (0)351 8925 888
Fax: +49 (0)351 8925 889
Internet: www.silicon-saxony.de
Learn more about SILICON saXoNy! Visit our new website:
www.silicon-saxony.de
SILICON saXoNy booth partyPlease feel free to visit our booth party enjoying fine food, live music and networking.
Date: 9th october 2013 | 5 pmLocation: hall 2 | booth 2.050
We look forWard to welcoming you!
