Entegris ® and the Entegris Rings Design ® are trademarks of Entegris, Inc. ©2019 Entegris, Inc. | All rights reserved. | 9000-10383FRA-0219 Learn More www.entegris.com/specialty-gases Entegris SDS ® gas cylinders introduced a new paradigm of safety and performance by storing and delivering gas at sub-atmospheric pressures. While SDS2 improved upon the original design, the SDS3 offers significantly more gas capacity, setting the standard for safety and performance. Now, with Spectrum Materials, SDS3 cylinders are widely available in China. SDS ® 3 Safe Delivery Source ® : An evolutionary leap in safe gas delivery 3 1994 SDS1 Introduced 2005 SDS3 Introduced 1996 SDS2 Introduced TIMELINE WHY SDS3 SYSTEMS? MORE CAPACITY WHY SPECTRUM MATERIALS? WHY ENTEGRIS? Arsine (AsH 3 ) Phosphine (PH 3 ) Enriched 11 Boron Trifluoride ( 11 BF 3 ) While SDS2 has led the industry against similar competitive technology, SDS3 sets the new standard in safe gas storage. Longer-lasting cylinders mean fewer changeouts, reduced safety risk, and less inventory. Longer-lasting cylinders lead to greater consistency in finished chips from lot-to-lot. Local Manufacturing in China Fewer Changeouts Less Lot-to-Lot Variation 25+ Years of R&D Experience Choice in Safety Entegris- qualified Quality and Supply Chain Entegris leads the industry in advanced gas safety standards and is certified as DOT SP and ISO article 11513. AS H H H AVAILABLE GASES P H H H 11 B F F F 2017 SDS3 in China via Spectrum Materials SDS2 SDS3 0 100 200 300 400 500 600 700 800 900 AsH³ (+49%) 11 BF³ (+114%) PH³(+94%)

SDS®3 Safe Delivery Source®: An evolutionary leap in safe gas … · 2019. 3. 7. · Title: SDS®3 Safe Delivery Source®: An evolutionary leap in safe gas delivery Author: Entegris

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Entegris® and the Entegris Rings Design® are trademarks of Entegris, Inc.

©2019 Entegris, Inc. | All rights reserved. | 9000-10383FRA-0219

Learn Morewww.entegris.com/specialty-gases

Entegris SDS® gas cylinders introduced a new

paradigm of safety and performance by storing

and delivering gas at sub-atmospheric pressures.

While SDS2 improved upon the original design,

the SDS3 o�ers significantly more gas capacity,

setting the standard for safety and performance.

Now, with Spectrum Materials, SDS3 cylinders

are widely available in China.

SDS®3 Safe Delivery Source®: An evolutionary leapin safe gas delivery

3

1994SDS1

Introduced

2005SDS3

Introduced1996SDS2

Introduced

TIMELINE

WHY SDS3 SYSTEMS?

MORE CAPACITY

WHY SPECTRUM MATERIALS?

WHY ENTEGRIS?

Arsine(AsH

3)

Phosphine(PH

3)

Enriched 11BoronTrifluoride (11BF

3)

While SDS2 has led the industry against similar competitive technology, SDS3 sets the new standard in safe gas storage.

Longer-lasting cylinders mean fewer changeouts, reduced safety risk, and less inventory.

Longer-lasting cylinders lead to greater consistency in finished chips from lot-to-lot.

Local Manufacturing in China

Fewer Changeouts Less Lot-to-Lot Variation

25+ Years of R&DExperienceChoicein Safety

Entegris-qualified Quality and Supply Chain

Entegris leads the industry in advanced gas safety standards and is certified as DOT SP and ISO article 11513.

AS

H

H H

AVAILABLE GASES

P

H

H H

11B

F

F F

2017SDS3 in Chinavia Spectrum

Materials

SDS2 SDS3

0 100 200 300 400 500 600 700 800 900

AsH³ (+49%)

11BF³ (+114%)

PH³(+94%)