Sandia NINE: Intel Expectations

C. Michael GarnerTechnology Strategy

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Intel Challenges (Sandia NINE)• Continuing to increase integrated circuit density every 2 years• Assembling nanostructured materials in predefined locations and directions• High speed delivery of power to integrated circuits• High reliability packaging for complex integrated circuits• Package polymers need different properties

through the assembly process and use

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Nanotechnology ChallengeDemonstrate proof of concept that nanomaterials and nanotechnology could provide solutions to difficult challenges•Ability to enable desired functions at the macrolevel•Resolve critical issues that could limit use•Provide fundamental understanding of how nanomaterial properties and integration affect macroproperties

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Sandia NINE Projects•Imprint & Directed Self Assembly for Lithography• High density lithography•Scalable Assembly of Patterned Ordered Functional Micelle Arrays • High density capacitors for power delivery•Enabling Self-Powered Ferroelectric Nano-Sensors: Fundamental Science of Interfacial Effects Under Extreme Conditions • High dielectric constant capacitors with reliable properties•Responsive Nanocomposites • Package polymers with designer properties in process and

application

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Sandia NINE Challenge•Bridge the Gap Between University Research and Industrial Needs•Optimize Interactions and Access to Sandia National Labs Resources•Establish Effective Communications Mechanisms with Industry Mentors

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Imprint & Directed Self Assembly for LithographyIssues that could limit use•Defects•Required Flexibility of Features•Alignment of features between levels•Total Cost of Integration

– Imprint tools vs. mask cost– Throughput– Materials Cost– Yield

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Scalable Assembly of Patterned Ordered Functional Micelle ArraysAssembly of ultra high charge storage capacitors

– GHz speed capacitors– Metal-Insulator-Metal with ultra high density• 3D structures

– Low inductance• Control dimensions and separation

Low contact resistanceAbility to deposit a high κ dielectric and top electrode material

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Enabling Self-Powered Ferroelectric Nano-Sensors:•Ability to minimize interface electrical and dielectric degradation of perovskite dielectrics in integrated structures• What factors could cause environmental degradation?

– Oxygen vacancy generation..– Hydrogen…– Bias– Electrode Interactions• How how could these be minimized?

– Electrode choice– Interfacial structure & composition between electrode and

dielectric– Dopants– Gettering Centers

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Responsive Nanocomposites•Thermoset Polymer •Modulate mechanical properties independently•Tune Adhesion•Crack Modulation (arrest or modulate)•Moisture Absorption

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Summary•Demonstrate proof of concept that nanomaterials and nanotechnology could provide solutions to difficult challenges•Bridge the Gap Between University Research and Industrial Needs•Optimize Interactions and Access to Sandia National Labs Resources•Establish Effective Communications Mechanisms with Industry Mentors

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Back-up

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MentorsSandia NINE Project Intel Mentor

Imprint & Directed Self Assembly for Lithography

Todd Younkin

Responsive Nanocomposites Rahul Manepalli

Scalable Assembly of Patterned Ordered Functional Micelle Arrays

Larry Mosley

Enabling Self-Powered Ferroelectric Nano-Sensors: Fundamental Science of Interfacial Effects Under Extreme Conditions

Larry Mosley