Microsoft Word - S-3000N.docA(SEI Resolution)3.0nm B(BEI Resolution)4.0nm C(Magnification)5~300,000 (Acc.V.)
(W.D) D(Accelerating Voltage)0.5~30kV E(Probe Current)10-12~10-8A F(1~270 Pa
) GChamber 6 IX80mm Y40mm Z5 to 35mm T-20° to
90° R 360°
(A) .......................................................................................................6
(B) ………………………………………………………………...8
(B) …………………………………………………….13
2
X K1
Y K2
X
Y
5 MAGNIFICATION 6 CONTRAST 7 BRIGHTNESS 8 FOCUS
3

RP
EVAC
LOW
(6) PC Windows 2000 (profession. Workstation Version)
(7) Press Ctrl+Alt+Delete to log on
CtrlAlt Delete
7

PC-SEM
B

()
“Shut down the computer
YES) “It is now
safe to turn off your computer

high()



(3)
X=30mm Y=20mm T=0 Z=EX R=as desired
(4)
EVAC/ AIR EVAC
Z () 15~35mm
T 0
(6) 3~4 HIGH
(7)

BSE
BSE
BSE

BSE
composition image
topographic image
3 Vacuum Mode SEMHigh Vacuum Mode
11Vacuum Mode


VP-SEM
BSE
High vacuum Mode
HV
() ON OFF

3


ABC Image Setup ABC

CONTRAST






IMAGE SHIFT
XY
15mm +/-20μ
m X,Y






2

17
4

B


Alignment STIGMATOR/ALIGNMENT XY
A Aperture



C XStig X YStig Y


ASF
E AGA
AGA




2 HV 3 HV Control AFS
High

4