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NCTU NFC
Tool expert: Prof. Shun-Tun Yen
Technician : Ms. Lien-Chu Chen
高解析度場發射掃描電子顯微鏡暨能量散佈分析儀 Scanning Electron Microscope (S-4700I)
Tool name
Chinese name: 高解析度場發射掃描式電子顯微鏡暨能量散佈分析儀
English name: High-Resolution Scanning Electron Microscope
& Energy Dispersive Spectrometer Acronym:
SEM & EDS
NCTU NFC Yue-Ting Chen
Tool info
manufacturer : Hitachi
model : S-4700I
Date of purchase : May 1st, 1999.
NCTU NFC Yue-Ting Chen
Features
SEM: High-resolution inspection of devices, thin films,
and cross-sections.
EDS: Energy-dispersive spectroscopic analysis of
material or contamination composition on a desired spot.
NCTU NFC Yue-Ting Chen
Tool spec
E-gun source : Cold cathodic E-gun
Operation voltage : 0.5kV~30kV
Sample size : 25mm diameter x 25mm(t)
Working distance : current setting at 12mm
resolution : 1.5nm (at 15kV) or 2.5nm (at 1kV)
Highest mag: 500K(depending on the sample )Resolution of secondary electrons:1.5nm(below 15kV)
EDS could provide qualitative/quantitative atomic ( B5~U92 ) and elemental distribution analysis across the whole energy spectrum .
NCTU NFC Yue-Ting Chen
Principles of SEM (Scanning Electron Microscope)
Tool introduction E-gun: electron source
Electromagnetic lens: for altering electron path direction
Optical focus system
Principles Electron migration path
Interactions between electrons and matters
Vacuum necessity and specimen chamber structure.
NCTU NFC Yue-Ting Chen
Vacuum system
Good vacuum is prerequisite for obtaining high quality images in SEM
The vacuum is maintained by the following pumps :
Electron chamber and electromagnetic lens: 3 ion pumps
S.C.-Specimen Chamber: cycled-water chilled diffusion pump and rough pumping by a rotary pump
S.E.C.- Specimen Exchange Chamber: Rotary pump
NCTU NFC Yue-Ting Chen
Operation procedures
Procedures : SEM basic SOP( please click)
NCTU NFC Yue-Ting Chen
Tips
Good sample conductivity:The sample should be highly conductive to ensure sufficient
detection of secondary electrons and clear images. Pt or Au capping can help improve the conductivity. However, too thin the capping does not help a lot and too thick of it might cover the inspected area.
For less conductive samples such as Si or SiO2, it is
recommended to attach the carbon tape on the sample front side after Au deposition. This way, electrons are attracted toward the stage and only a slit is available for secondary electrons.
NCTU NFC Yue-Ting Chen
Tips
Avoid vibration:For high-mag inspection, make sure the sample is firmly
attached and the stage is well fastened. Stage lock feature can be enabled to reduce the vibration caused by external factors.
(Once stage lock is enabled, tilt cannot be adjusted)
NCTU NFC Yue-Ting Chen
Tips
Vacuum : the lower the better
Accelerating voltage: higher voltage can lead to better images. The maximum voltage a sample can withstand depends on its own properties. Too high the voltage might damage the sample and result in pollutant generation.
Discretion, attention, and patience are highly appreciated.
NCTU NFC Yue-Ting Chen
SEM Pictures—taken by Ms. Yue-Ting Chen
Gold particles with 10K mag
500nm for each spacingmagNCTU NFC Yue-Ting Chen
SEM Pictures—taken by Ms. Yue-Ting Chen
Surface of gold particles is clear with 150 K mag
30nm for each spacing
magNCTU NFC Yue-Ting Chen
Surface of gold particles with 250 K mag
20nm for each spacingmag
SEM Pictures—taken by Ms. Yue-Ting Chen
NCTU NFC Yue-Ting Chen
Surface of gold particles with 300 K mag
10nm for each spacingmag
SEM Pictures—taken by Ms. Yue-Ting Chen
NCTU NFC Yue-Ting Chen
Surface of gold particles with 400 K mag
10nm for each spacingmag
SEM Pictures—taken by Ms. Yue-Ting Chen
NCTU NFC Yue-Ting Chen
Surface of gold particles with 450 K mag
10nm for each spacing
mag
SEM Pictures—taken by Ms. Yue-Ting Chen
NCTU NFC Yue-Ting Chen
Surface of gold particles with 500 K mag
10nm for each spacing
mag
mag
SEM Pictures—taken by Ms. Yue-Ting Chen
10nm for each spacingNCTU NFC Yue-Ting Chen
The following pictures are taken by students from various affiliations.
Through SEM, we can share our own skills and excellent pictures.
SEM Pictures—taken by Ms. Yue-Ting Chen
NCTU NFC Yue-Ting Chen
Carbon nano tube
SEM Pictures—taken by a student
NCTU NFC Yue-Ting Chen
Zno nanowire
SEM Pictures—taken by a student
NCTU NFC Yue-Ting Chen
MOSFET device
SEM Pictures—taken by a student
NCTU NFC Yue-Ting Chen
High-K material
SEM Pictures—taken by a student
NCTU NFC Yue-Ting Chen
Material for high-frequency devices
SEM Pictures—taken by a student
NCTU NFC Yue-Ting Chen
High-speed device
SEM Pictures—taken by a student
NCTU NFC Yue-Ting Chen
SiO2 nanoparticle-fixing substrate
SEM Pictures—taken by a student
NCTU NFC Yue-Ting Chen
polymer micelles
SEM Pictures—taken by a student
NCTU NFC Yue-Ting Chen
Carbon nano tube
SEM Pictures—taken by a student
NCTU NFC Yue-Ting Chen
CeO nano cube
SEM Pictures—taken by a student
NCTU NFC Yue-Ting Chen
Cu
SEM Pictures—taken by a student
NCTU NFC Yue-Ting Chen
photonic crystal
SEM Pictures—taken by a student
NCTU NFC Yue-Ting Chen
Nanoscale linewidth
SEM Pictures—taken by a student
NCTU NFC Yue-Ting Chen
Surface analysis
SEM Pictures—taken by a student
NCTU NFC Yue-Ting Chen
Surface analysis of Ti
SEM Pictures—taken by a student
NCTU NFC Yue-Ting Chen
GaN surface roughening for blue light LED
SEM Pictures—taken by a student
NCTU NFC Yue-Ting Chen
Oxide-based nanowire
SEM Pictures—taken by a student
NCTU NFC Yue-Ting Chen
Nylon film
SEM Pictures—taken by a student
NCTU NFC Yue-Ting Chen
Blocking layer deposited via PECVD on Pet film
SEM Pictures—taken by a student
NCTU NFC Yue-Ting Chen
fiber
SEM Pictures—taken by a student
NCTU NFC Yue-Ting Chen
Conclusion
Please cherish this multi-functional SEM !!
NCTU NFC Yue-Ting Chen