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Présentation. CONCLUSION ON THE PRE-ALIGNMENT SYSTEM AND ACTUATOR TEST. RUDE Vivien With the help of Hélène MAINAUD-DURAND, Mateusz SOSIN, Sylvain GRIFFET and Michail ANASTASOPOULOS BE/ABP/SU N°EDMS : 1158386 November 28 , 2011. Summary Alignment Systems Test –Actuators - PowerPoint PPT Presentation
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RUDE VivienWith the help of Hélène MAINAUD-DURAND,
Mateusz SOSIN, Sylvain GRIFFET and Michail ANASTASOPOULOS
BE/ABP/SU
N°EDMS : 1158386
November 28 , 2011
Présentation
CONCLUSION ON THE PRE-ALIGNMENT SYSTEM
AND ACTUATOR TEST
RUDE Vivien
Summary
Alignment Systems
Test –Actuators
Articulation-Point
Alignment Systems
Test –Actuators
Articulation-Point
Conclusion of Alignment Systems
Noise
Standard deviation with 10 measures (15 seconds)
Repeatability
Reproductibility
Interchangeability
Linearity (Relative Precision)
WPS
1 micron
0.6 micron
1 micron
2-3 microns
2-3 microns
1 micron
INCLINOMETER
3 micro-radians
1 micro-radian
2-3 micro-radians
5 micro-radians
Soon
2 micro-radians
ΔX=7µmΔZ=4µm
ΔX=10µmΔZ=5µm
ΔX=5µmΔZ=13µm
ΔX=7µmΔZ=5µm
Pseudo-Absolute Measurement
Alignment Systems
Test –Actuators
Articulation-Point
Conclusion of Test Actuator
Vertical Horizontal
+/- 1 mm +/- 1 mm
+/- 1 micron +/- 1 micron
50 cycles without problem
50 cycles without problem
3 microns 2 microns
+/- 1 micron +/- 1 micron
<0.1 micron <0.1 micron
Vertical Horizontal
+/- 2 mm +/- 3 mm
+/- 1 micron+/- 2 microns
Backlash of 10-15 microns for RLA003 for big displacement
(>0.5mm)
2H30 (10 cycles) 40 cycles without problem
1 micron1 micron pour RLA0013 microns pour RLA0029 microns pour RLA003
+/- 1 micron +/- 1 micronSome problems with RLA003
0.17647 micron 0.2 micron
Range accepted
Backlash
Long-term operation
Linearity
Hysteresis
Resolution
BOOSTEC
Micro-Controle Alignment
Systems
Test –Actuators
Articulation-Point
By Mateusz SOSIN
Conclusion of Test Actuator
Alignment Systems
Test –Actuators
Articulation-Point
Vertical Horizontal
20 microns 18 microns
Vertical Horizontal
16 microns 9 microns
BOOSTEC
Micro-Controle
Shift
Shift
By Michail ANASTASOPOULOS
Alignment Systems
Test –Actuators
Articulation-Point
Conclusion of Articulation-Point
Conclusion of Articulation-Point
3 DOF linkage (Slave versus Master)
Vertical Translation
Horizontal Translation
Roll
Boostec
1-2 microns
1-2 microns
1 micro-radian
Micro-Contrôle
3-5 microns
2-3 microns
2 micro-radians
MASTER
SLAVE
Translation Roll
Alignment Systems
Test –Actuators
Articulation-Point
RUDE Vivien
THANK YOU FOR YOUR ATTENTION
Présentation
