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2019.03.18
RenoNix Company Profile
RENONIX
Contents
Company Compendium1
OEM / 2nd NEW Parts33
RenoNix Major Customer
Contact Point35
Refurbishment Business32
34
RENONIX
1-1. Company Profile
Established 04th November 2010
Business
Semiconductor tools marketing, Refurbishment,
Installation, Relocation, Conversion & Modification,
Parts outsourcing, Technical Service, On call
service & Technical Development & manufacturing
Capital 330K USD
Employee 16 Persons
Address272, Naehyangan-gil, Jeongnam-myeon,
Hwaseong-city, Gyeonggi-do, Korea (445-962)
Tel +82 31 354 9494
Fax +82 31 354 9323
E-Mail [email protected]
Web Site www.irenonix.com
ISO9001
QAIC/KR/4291-B
ISO14001
QAIC/KR/4292-B
Research Institute
2012151144
Enterprise Risk
Management
13-22-B-50
Clean Industry
67,684
RENONIX
1-2. Project Recode (The Most Recent 3 Years)
Customer Project Name Brief Description Q'TY Year
O Korea AMAT Centura TPCC DPN Refurbishment/Start up 1 2017
S Singapore AMAT Endura5500 Ai Cu Refurbishment/Start up 1 2017
O USA AMAT Centura Refurbishment 1 2017
D Korea AMAT Producer-S 200mm Refurbishment 1 2017
O Korea AMAT Endura5500 MOCVD Retrofit & Start up 1 2017
D Korea AMAT Centura WCVD Refurbishment/Start up 1 2017
O Singapore AMAT Producer-S 200mm Refurbishment 1 2016
S China DNS SS-3000-AR Scrubber Refurbish & Install 1 2016
S China TEL Telius SCCM Used Tool Refurbishment/Start up 1 2016
S China AMAT Emax (200mm) Refurbishment/Start up 1 2016
S China SCCM SE+ Chamber 1&SCCM SE Upgrade & Refurbishment 1 2016
D Korea AMAT Endura5500 Refurbishment/Start up 1 2016
D Korea CVD TIN Retrofit & Start up 1 2016
H China Endura 5500 Relocation & Additional 1 2015
H Taiwan Endura5500 Al,Cu System 8inch Refurbishment/Start up 1 2015
D Korea AMAT Endura 5500 Chamber Add Refurbishment/Start up 1 2015
S Singapore KLA RS75 SYSTEM Refurbishment/Start up 1 2015
S Singapore Labor support for RS55 Refurbishment 1 2015
H Korea AMAT Endura5500 Refurbishment/Start up 1 2015
D Korea AMAT Endura5500 MO-CVD Refurbishment/Start up 1 2015
S China 200mm Producer-S Refurbishment/Start up 1 2015
RENONIX
1-3. Project Recode (The Most Recent 6 Years)
Summary list for project
Summary list for country
Country Q'TY Rate
Korea 43 48%
China 18 20%
Singapore 17 19%
Taiwan 8 9%
Other 4 4%
TOTAL 90 100%
Project Name Endura Centura Producer TEL SCCM DNS LAM / Novellus Other TOTAL
Refurbishment/
Start up17 6 2 1 1 2 5 34
Retrofit / Start up 19 5 - - - - 3 27
Relocation/
Start up1 10 - - - - 4 15
Refurbishment 6 2 2 1(Upgrade) - - 3 14
TOTAL (90) 43 23 4 2 1 2 15 90
RENONIX
1-4. Business Detail
Customer Satisfaction
Equipment
RefurbishSpare Parts
2nd / OPM NEW
Overhaul Items
AMAT PVD / CVD / ETCH,
LAM / Novellus ETCH / CVD,
PSK TERA / SUPRA,
TEL ETCH / TRACK,
DNS Scrubber, etc.
System Refurbishment,
Modification, Relocation,
Upgrade & Conversion
Start-up.
OEM / OPM / 2nd New Parts
OEM : Heater, Magnet, RFG,
RFM, Gate Valve, etc.
Provide process kits for PVD,
CVD, ETCH process chamber.
AMAT / LAM / NOVELLUS
WJ / DNS / TEL, etc. system
parts.
Heater Block 2nd NEW & Overhaul
(150mm / 200mm)
Magnet 2nd NEW & Overhaul
(150mm / 200mm / 300mm )
Ceramic Heater 2nd NEW
(200mm)
ESC 2nd NEW
(150mm / 200mm)
WJ Equipment Parts 2nd NEW
(150mm / 200mm)
RENONIX
1-5. Business Area
Refurbished Equipment / System Relocation / Installation / Engineering Support
THINFILM / ETCH PROCESS
TRACK PROCESS
AMAT
ENDURA
SYSTEM
TEL TRACK
SYSTEM
AMAT
PRODUCER
SYSTEM
LAM /
Novellus
SYSTEM
RENONIX
2-1. Refurbishment Business (AMAT, LAM, NOVELLUS)
Summary list for Refurbishment, Modification, Relocation & Upgrade.AMAT
PRECISION-5000 : DLH / DxZ, PE-CVD / SA CVD / SiON / TEOS, WCVD, etc. Chamber
ENDURA 5500 : STD HTHU, Aluminum, TiN, PCII/RPC, IMP/Encore, TxZ(STD,
HP, HP+), MOCVD, etc. Chamber
CENTURA : WxZ , PE CVD, CxZ, Gigafill : SACVD, DxZ Top Mount RPS, etc. Chamber
Ultima : HDP, Ultima Plus / TE, Uitima-X;
CENTURA 5200 RTP : MOD I, XE (MOD II), XE Plus, ISSG, RPN, etc. Chamber
CENTURA (ETCH) : MXP Ploy, DPS R1 Metal, Super E, DPS + Poly, DPS + Metal, DPS II Metal, etc. Chamber
PRODUCER : APF, SA CVD / BPSG, PE CVD, etc. Chamber
LAM / NOVELLUS
Concept 1 PE-CVD Nitride, PSN-CVD, BPSG, P-SiON, CVD, etc. Chamber
Concept 2 Single / Dual / Triple Speed : Shrink HDP, CVD etc. Chamber
Single / Dual ALTUS : Shrink WCVD Chamber
Dual Sequel / Sequel Express : CVD, PE CVD, etc. Chamber
RENONIX
2-2. Refurbishment Business (LAM, DNS, TEL(Track / Dry ETCH)
Summary list for Refurbishment, Modification, Relocation & Upgrade.
LAM
Rainbow 4400 /4420 /4520
TCP9400 /9600 Series
DNS SPIN-SCRUBBER System
DNS SSW-60/80A
DNS 60/80A/B
TEL
Mark 7, Mark 8
ACT 8, ACT-12
TEL
UNITY ME Series
UNITY 2 Series
TE 8500 Series
RENONIX
2-3. AMAT PVD / ETCH System
AMAT Endura 5500 PVD AMAT Centura 5200 CVD
CHAMBER SOLUTION
Aluminum Chamber
Ti/TiN Chamber
PCII/RPC / IMP / Encore Chamber
TxZ Chamber (STD, HP & HP+)
IMP Pre-Clean
STD & HTHUTxZ
CHAMBER SOLUTION
HDP / WxZ Chamber
DxZ / CxZ Chamber
PE CVD (TEOS & SION)
Ultima Ultima Plus/TE
WxZ DxZ Top Mount RPS
RENONIX
2-4. AMAT / Novellus CVD System
AMAT Producer LAM / Novellus CVD (C1, C2)
CHAMBER SOLUTION
APF (200mm)
SA CVD (200mm)
PE CVD (200mm)
PE CVD HARP USG
CHAMBER SOLUTION
C1 : PE-CVD, Nitride, PSN-CVD (150mm)
C1 : P-SiON, BPSG, TEOS, CVD (150mm)
C2 Speed : Shrink HDP Chamber (200mm)
C2 ALTUS : W CVD Chamber (200mm)
C2 Sequel : CVD, PE CVD Chamber (200mm)
C2 Express : TEOS, CVD Chamber (200mm)
PE TEOS Max HDP
RENONIX
2-5. TEL Track / LAM ETCH System
TEL MARK Series LAM 9400 Series
MARK-V, VZ MARK-7, 8
ACT-8 ACT-12
TCP-9400 SE
9600 Alliance A6
TEL ACT8, 12 LAM 9600 Series
RENONIX
2-6. Upgrade & Conversion
PVD CVD
RF Cleaning => RPC, RPS
Std W => Sprint W
MTR5 Robot => MAG7 Robot
Std Cooling => 4 Cooling Slot
Ultima => Ultima+, TE
Any type of CVD Chamber
Std TxZ => HP/HP+ TxZ
IMP => SIP & Encore
HP Robot => HP+/VHP Robot
Std Heater => E-Chuck
Shutter
RF match Upgrade
Cryo Pump Upgrade
Any type of PVD Chamber
RENONIX
2-7. The Way to Refurbished Equipment
In Factory Disassembly
AssemblyIntegration & Final Test
Production Fab and refurbishment company
trained engineers
Standardized refurbishment procedures
Remanufacturing based on the original
factory specification
Detailed inspection & installation report
Can be support process issues
High Quality Refurbishment
◈ Each peace of equipment goes through
our superior refurbishment process
RENONIX
3-1. OEM Spare Parts
More products information , Please refer to www.irenonix.com / [email protected]☞
ASS’Y, ELECT, SBC,
SYNERGY CPU WITH1
0090-76133 (15ea)
Good Working Condition
GAS DETECTOR
02-109457-01
AE MDX-L12M-650
RF GENERATOR
0010-21844/20225
8" Hi TEMP HEATER
W/WELDED LUGS
0010-22012
Producer
Ceramic Heater
0040-84051
MITSUBISHI
ALL MOTOR &
MOTOR DRIVER
AMAT ENDURA
ALL NEW MAGNET
PEDESTAL LIFT ASSY
2 STOP, SPEED
02-113291-00
CERAMIC, TC
15-00567-00
INSULATOR PINLESS
8" SNNF PRECLEAN II
0200-20426
RENONIX
3-1. OEM Spare Parts
More products information , Please refer to www.irenonix.com / [email protected]☞
ENDURA
Preclean Chamber
Good Working Condition
Edward Dry Pump2 PHASE DRIVER
0870-01003
MAGNET ASSY
DURASOURCE TTN
(Overhaul)
0010-21844
Vexta Stepper Motor
PH265-05B-C12
0090-70002
HARNESS ASSY,
5-PHASE DRIVER
TRANSFER(0140-20092)
HARNESS CABLE
0140-20054
STEC ALL Model
(NEW/Overhaul)
MKS ALL Model
GE-50A Series
(NEW/Overhaul)
UNIT ALL Model
(NEW/Overhaul)
RENONIX
3-2. 2nd NEW Parts List
More products information , Please refer to www.irenonix.com / [email protected]☞
NO. P/N Description Parts List
1 715-130081-008 HOLDER WAFER 8"
2 714-330982-001 E2-CMP
3 715-018991-208B CATHODE (E) 8"
4 810-424110-2 BAFFLE A 8K
5 32005S-42713 WINDOW PORT
6 715-140125-001-B FACING ELECTRODE
7 715-011913-083 PLATE LOWER BAFFLE
8 715-130080-008 HOLDER WAFER 8"(ELL)
9 715-030136-004 POLY EDGE RING
NO. P/N Description Parts List
1 1D10-201429-15 UPPER ELECTRODE
2 1D10-101475-12 TAPER BAFFLE PLATE
3 1D10-303124-14 SHIELD DEPO 85-2
4 1D10-200733-11 RING SHIELD
5 1D10-202204-12 UPPER ELECTRODE
6 1D10-100854-15 BAFFLE PLATE
7 ID10-303124-21 SHIELD DEPO 85-2
8 1D10-201588-12 UPPER ELECTRODE
9 1D10-202177-12 UPPER ELECTRODE
NO. P/N Description Parts List
1 0040-09136 CHAMBER 200MM BW
2 0020-09999 PLATE, FRONT, THROTTLE DRIVE
3 0020-30335 QUARTZ TUBE HOUSING
4 0020-10135 MANIFOLD-WETER SUPPLY
5 0020-30102 OUTPUT MANIFOLD
6 0190-13175 Centura 5200 EPI - Light Pen
7 0190-75073 LOAD LOCK LEAD SCREW
8 0020-20488 CLAMP BAKEOUT LAMP
9 0021-09758 MAINFOLD, OUTPUT,DXZ
NO. P/N Description Parts List
1 16-137686-00 DOOR GATE
2 16-126663-01 SHIELD STAGE ESC SPRAYED
3 17-123793-02 ADAPTER SHIELD HCM
4 16-137688-00 SHIELD BTM CLAMPLESS SPRAYED
5 17-157344-00 L BRACKET
6 16-122744-00 ASSY ANODE HCM ESC
7 16-033931-01 SHOWER HEAD
8 16-033932-00 SHOWER HEAD
9 16-271392-00 SHOWER HEAD
RENONIX
RenoNix Major Customer
RENONIX
RenoNix China (Wuxi) Office
53-602 Meiman Garden, New District,
Wuxi, Jiangsu Province, China
HP : +86 137 7115 2844
Email : [email protected]
Website : www.irenonix.com
RenoNix Co., Ltd
272, Naehyangan-gil, Jeongnam-myeon,
Hwaseong-city, Gyeonggi-do, Korea (445-962)
Tel : +82 31 354 9494
Fax : +82 31 354 9323
Email : [email protected]
Website : www.irenonix.com
Contact Point
We’re Capable of Most of service for PVD,CVD, ETCH areas.
If you have any inquiry or interest , please feel free to contact us.
