PUMP A2CH3 F16 - E & S TechnologiesA2CH3 F16 – OPERATING INSTRUCTIONS INDEX DATE N° 00 06/02/09 DC69020 2/16 I – General I.1 – Introduction The Model A2CH3 F16 of the AstiPure

A2CH3 F16 – OPERATING INSTRUCTIONS

INDEX DATE N°

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PUMP

A2CH3 F16

OPERATING INSTRUCTIONS

SAINT-GOBAIN PERFORMANCE PLASTICS FRANCE 41, boulevard des Bouvets E.A.D.A.C. des Berthilliers F-92741 NANTERRE CEDEX F-71850 CHARNAY LES MACON Tel: 33.(0)1.55.68.59.59 Tel: 33.(0)3.85.20.27.00 Fax:33.(0)1.55.68.59.68 Fax: 33.(0)3.85.29.18.48

SAINT-GOBAIN PERFORMANCE PLASTICS 7301 Orangewood Avenue

GARDEN GROVE, CA 92841 Phone: 1 (714) 630 5818

Fax: 1 (714) 688 2614 www.microelectronics.saint-gobain.com


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INDEX Page I – General 2 I.1 – Introduction I.2 – Materials I.3 – Operation description I.4 – Pump Data II – Quick checklist 2 II.1 – Shipment II.2 – Reception III – Installation and operation 3 III.1 – Testing III.2 – Set up III.3 – Connections III.3.1 – Air/nitrogen connections III.3.2 – Fluid connections III.4 – Initial tests and Adjustments IV – Applications 5 IV.1 – Chemical compatibility IV.2 – Temperature range IV.3 – Limitations of use V – Maintenance 5 V.1 – Initial checking steps V.2 – Comments VI –Dismantling and Repair 6 VI.1 – How to dismantle VI.2 – Pump maintenance and repair procedures VII – Troubleshooting 6 VIII – Warranty 10 Appendix 11


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I – General

I.1 – Introduction The Model A2CH3 F16 of the AstiPure II pump range is a pneumatically operated TEFLON® pump. There are no internal or external metal parts. The pump is designed for handling corrosive or high purity fluids. It meets the requirements of the semiconductor, photovoltaic, pharmaceutical and chemical industries.

I.2 – Materials All wetted parts are manufactured in TEFLON® PFA HP and PTFE. Other parts are made of high-tech plastics such as ETFE, PEEK etc. There are no metal parts.

I.3 – Operation The pump is pneumatically operated; two bellows joined by a central shaft reciprocate horizontally. The suction and delivery strokes alternate from one side of the pump to the other. The pump is self-priming and has four balls, which seat on lip seals (check valves). Pulsation dampers with no metal parts are available as an option. They reduce the flow and pressure variations of the pump.

I.4 – Pump Data Flow rate 16 gpm or 60 lpm – 3600l/h Discharge pressure 65 PSI max. or 4.5 bar – please contact us for higher values Suction head 14 feet water column or 4 meters Max. air consumption 225 Nl/min Connections 3/4”X1" or 22x25 mm TEFLON® flared tube Air connection 3/8 NPT ID female thread Tubing Ø 5/16"x3/8" or 08x10 mm 10 feet or 3 m (starting from pressure regulator) Weight 16 lbs or 8 kg II – Quick checklist

II.1 – Shipment Pumps are cleaned and assembled in our clean room, then double sealed in plastic bags to ensure they are not contaminated in transit. They are then packed in cartons with Polyethylene protection. Note: we take a maximum of precautions so that our pumps are delivered completely dry. Nevertheless, it may be that residual traces are present due to final tests with DI water.

II.2 – Reception Upon receipt of the pump, please check that: • The carton has not been damaged in transit. If there is any visible damage, immediately contact

the carrier. • The pump is not damaged. If there are signs of damage, you should report this immediately to

SGPPL FRANCE or your local distributor. • An operating instruction manual has been included in each package. Please request another copy

if it has not been included.


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III – Installation and Operation

III.1 – Testing All pumps are tested with DI water at the factory in our clean room for: • Maximum flow rate with no back pressure, • Minimum flow rate with no back pressure, • Flow rate with 58 PSI (4 bar) discharge pressure, • Checked for leakage.

III.2 – Set up The pump must be installed horizontally as shown on general arrangement drawing (see appendix). This drawing also shows the overall dimensions of the pump etc. The pump must be positioned on its feet. If not, the check valves will not seat correctly and the pump may malfunction.

III.3 – Connections

III.3.1 – Air/Nitrogen connection The pump must be connected to a clean dry air or nitrogen supply (in compliance with ISO 8573-1). On no account should the air/nitrogen supply be lubricated, oil or water droplets will cause the shuttle valve to malfunction. Minimum and maximum supply pressure must be between 29 and 72.5 PSI or 2 and 5 bar (please contact us for different values). The ID of the tube supplying the dry air/nitrogen should not exceed 5/16"x3/8" or 8x10 mm. The tube length between the pump and the air pressure regulator should not exceed 10 feet or 3 meters maximum. When in aggressive conditions (acid vapors), it is advised to canalize outlet with a tube of minimum ID 3/8"x1/2" or 10x13 mm, and a length of maximum 3 meters (do not add any muffler at the tube end). The pneumatic on/off valve must be 3-way to ensure the shuttle valve on the pump resets itself when the pump is switched off. The flow control valve must be positioned before the 3-way on/off valve and you must preserve the values of flow air which you can find on the flowrate curve in appendix.


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Various information relating to air connection is gathered in diagram 1. Diagram 1

Index Designation 1 Air supply

1.1 Static working pressure: 2-5 Bar or 29-72.5 PSI. Please contact us for different air setting Air supply quality according to ISO 8573-1 (dry air or nitrogen) Dust: Class 2 Dew point: Class 2

1.2

Oil quality: Class 0 (No oil) 2 Pressure regulator 3 Pneumatic valves 3/2/2 4 Tap 3/8 – 18 NPT 5 Tube dimension: Ø 08x10mm (5/16"x3/8") – Max. length between pump and pressure regulator: 10 feet or 3

meters 6 Optic fiber (optional, please contact us) 7 Exhaust tap: G3/8" (standard muffler) 8 Exhaust tube (optional, please contact us)

8.1 Minimum inlet diameter: Ø 3/8"x1/2" or 10x13 mm. Max length: 10 feet or 3 meters 9 Temperatures

9.1 Environment: 50 to 140°F or 10 to 60°C 9.2 Maximum fluid temperature: 185°F or 85°C. Please contact us for higher temperature 10 No muffler

III.3.2 – Fluid connections The pump is self-priming. The inlet is at the bottom and the outlet at the top. The reference of your pump is A2CH3 F16. It is supplied with flared fittings (at inlet and outlet) suitable for 3/4"x1" or 22x25 mm tube.

III.4 – Initial Tests and Adjustments Before commissioning the pump, we recommend to test it dry with a supply pressure of 50 PSI or 3.5 bar to ensure the system works correctly (See III.3.1 for the correct connections). Before using the pump with chemicals please check: • The 4 manifolds (P/N 9366-100) are tight, • The air/nitrogen supply is dry, clean and between 29 and 72.5 PSI or 2 and 5 bar (please contact

us for different values) • The inlet and outlet fluid connections are correctly fitted and tight.


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IV – Applications

IV.1 – Chemical compatibility All pump wetted parts are manufactured in TEFLON® and are suitable for pumping even the most corrosive concentrated chemicals: H2SO4, HNO3, HF, H3PO4, HCl, NH4OH, KOH, NaOH, CH3COOH, TMAH, H2O2... The viscosity of the liquids must be less than 100 cpo. Please contact us for higher values. Very abrasive liquids are not recommended. Please call either the factory or your local distributor if you require information on chemical compatibility.

IV.2 – Temperature range The pump can handle liquids from 32°F (0°C) up to +185°F (+85°C). When the fluid temperature is greater than 140°F (60°C) you must adjust the supply pressure (see attached scheme) and you must frequently check that the 4 manifolds (P/N 9366-100) are fully tight. For special applications call SGPPL FRANCE or your local distributor. For higher temperature range, a "high temperature" version of the pump is also available. Please contact us to help you define which product fits your requirement.

IV.3 – Limitations of use For a correct use of the pump, you MUST not: • Connect the pump inlet or outlet with air, nitrogen or liquid under pressure, • Use lubricated and/or wet air/ nitrogen, • Have an air line length between the pump and air pressure regulator higher than 10 feet or

3 meters, • Use the pump with air pressure less than 29 PSI or 2 bar, or greater than 72.5 PSI or 5 bar

(except with technical agreement), • Restrict suction side (valves, filters...), • Exceed the recommended liquid temperatures (please contact us), • Pump too viscous or abrasive liquids. • Run the pump dry for more than 10 minutes. You must follow your local Health and Safety Regulations with regard to particular chemicals, and act in conformity with the internal safety procedures of your own company. Any of the above may be detrimental to the normal operation and life expectancy of the pump and may invalidate the warranty. If the pump is being used with very corrosive chemicals or if it is left for extended periods not in use, we recommend the system is emptied and flushed. V – Maintenance

V.1 – Initial checking steps If the pump stops for any reason check: • The air/nitrogen supply, • That all valves in the chemical lines are open. If the pump starts, check that the following was not the cause: • The air/nitrogen connections (See Diagram 1), • The air/nitrogen quality, • When was the pump maintained for the last time?


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Before dismantling the pump check the following: • The air/nitrogen supply is “OFF”, • There is no residual pressure in the air circuit, • There is no residual pressure in the fluid circuit, • You follow your local Health and Safety Regulations with regard to particular chemicals.

V.2 – Comments If the pump is used to pump hot chemicals in excess of 140°F or 60°C the air pressure of the pump needs to be adjusted (see curve in appendix documents). The above is based on our experience. SGPPL FRANCE cannot be held responsible for premature failures if the pump is misused or damaged due to an incorrect application. VI – Dismantling and Repair

VI.1 – How to dismantle A tools kit for the whole maintenance P/N KA2T3 is available, as well as a preventive maintenance box P/N PM A2CH3. For more details on these kits, please report to appendix documents.

VI.2 – Maintenance and repair procedures These procedures are to be found in the manual " A2CH3 F16 - MAINTENANCE AND REPAIR PROCEDURES". Please request another copy if it has not been supplied with the pump. VII – Troubleshooting

The pump does not run, or runs erratically

Possible cause How to check Solution

Low level of liquid in the tank Visually inspect the tank for proper liquid level Add fluid to bring level up to required level

Plugged liquid filter Bypass filter, and see if normal pump operation resumes Replace filter with a new one

Dried out liquid filter Bypass filter, and see if normal pump operation resumes Replace filter with a new one

Kink in inlet or outlet liquid lines Visually inspect lines for kinks Replace kinked line(s) if the kink was in the inlet lines, and check that no damage has been done to the bellow

Defective liquid valve upstream of the pump

Check upstream valve and/or put a direct line from the pump to the tank, and see if normal operation resumes

Replace the defective liquid valve, and check that no damage has been done to the bellow


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Defective liquid valve downstream of the pump

Check downstream valve, put a direct line from the pump to the tank, and see if normal operation resumes

Replace the defective liquid valve

Chemical solidified in the pump Check for chemical solidification in inlet or outlet lines or manifold Return the pump to SGPPL FRANCE, site of Charnay

Kink in air supply line Visually inspect lines for kinks Replace kinked line(s)

Defective air supply 3/2 valve Supply the pump with air from a source other than the one from the 3/2 valve

Replace the 3/2 valve

Air pressure to pump too low Inspect settings on regulators and gauge level Set air pressure supply in agreement with SGPPL FRANCE pumps data sheet

Air undersupply Physically check that the air tubing size fits the pump size (see data in pump manual)

Install proper tubing size

Try to activate the pin on the top on the shuttle valve and see if normal operation resumes

If this happens too often, change the shuttle valve (the pump probably needs a PM kit maintenance)

Replace shuttle valve and see if normal pump operation resumes

Change the shuttle valve (the pump probably needs a PM kit maintenance)

Visually check the tightening of the shuttle valve, check for air leaks

Tighten back the shuttle valve Shuttle valve failure

Check if the shuttle can move in the shuttle valve

Change the shuttle valve (the pump probably needs a PM kit maintenance). Check the air is not lubrificated. Check that no liquid is dripping on the pump or shuttle valve

Damaged bellows Check to see if mist or dripping is coming from the muffler or PP core

Return the pump to SGPPL FRANCE, site of Charnay

Damaged check valves Visually check if they are moving properly

Return the pump to SGPPL FRANCE, site of Charnay (warranty), or authorized service center for PM kit maintenance

Internal pump failure Replace the pump with a new pump (same model), and see if normal operation resumes



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Manifold nut improperly/not enough tightened

Check if the manifold nuts are properly tightened

Check that the thread is not damaged. Retighten the manifold nuts

Connection nut improperly/not enough tightened

Check if the connection nuts are properly tightened

Check that the thread is not damaged. Retighten the connection nuts

Pump will not prime


Kink in the air supply line Visually inspect lines for kinks Replace kinked line(s)

Defective air supply 3/2 valve Supply the pump with air from a source other than the one from the 3/2 valve

Replace the 3/2 valve

Air pressure to pump too low Inspect settings on regulators and gauge level Set air pressure supply in accordance with SGPPL FRANCE pumps data sheet

Air undersupply Physically check that the air tubing fits the size of the pump (see data in the pump manual)

Install proper tubing size

Try to activate the small piston on the top on the pump, and see if normal operation resumes

If this happens to often, change the shuttle valve (the pump probably needs a PM kit maintenance)

Replace shuttle valve, and see if normal pump operation resumes

Change the shuttle valve (the pump probably needs a PM kit maintenance)

Visually check the tightening of the shuttle valve, and check for air leaks

Tighten back the shuttle valve Shuttle valve failure

Check if the shuttle can move in the shuttle valve

Change the shuttle valve (the pump probably needs a PM kit maintenance). Verify that the air is not lubrificated. Check that there is no liquid drip on the pump/shuttle valve

Defective liquid valve upstream of the pump

Check upstream valve and/or put a direct line from the pump to the tank, and see if normal operation resumes

Replace defective liquid valve, and check that no damage has been done to the bellow

Kink in inlet or outlet liquid lines Visually inspect lines for kinks Replace kinked line(s). If the kink was in the inlet lines, check that no damage has been done to the bellow


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Internal pump failure Replace pump with compatible pump and see if normal operation resumes




Worn/damaged seat valves Visually check if the check valves are moving properly

Return the pump to SGPPL FRANCE, site of Charnay (warranty) or authorized service center for PM kit maintenance

Worn/damaged check valves Visually check if they are moving properly

Return the pump to SGPPL FRANCE, site of Charnay (warranty) or authorized service center for PM kit maintenance


Check if the manifold nuts are properly tightened

Verify that the thread is not damaged. Retighten the manifold nuts


Check if the connection nuts are properly tightened

Verify that the thread is not damaged. Retighten the connection nuts

Air bubbles in outlet line


Bad chemistry mix

Check chemistry content. Some mixtures cause boiling when the chemistry is submitted to the vacuum that is experienced as the liquid is drawn into the pump

Adapt conditions, modify the suction height

Temperature too hot

Make sure that chemistry temperature is below its boiling point. Take into account that the chemistry will boil at a lower temperature as it experiences the vacuum due to the fact it is sucked into the pump

Adapt conditions, modify the suction height

Loose tubing connection at the pump inlet

Check the tightening of the connection

Retighten the connection, and check that threads have not been damaged

Loose manifold nut at the inlet manifold

Check the tightening of the manifold nut

Retighten the manifold nut, and check that threads have not been damaged


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Loose tubing, or hole in tubing upstream of the pump

Replace inlet tubing with testing tube running directly from inlet on the pump to the tank, and see if normal operation resumes

Replace defective tubing

Damaged bellows Check to see if mist or dripping is coming from the muffler or from the PP core


Liquid is dripping from the pump



Check if manifold nuts are properly tightened

Check that thread is not damaged. Retighten manifold nuts


Check if connection nuts are properly tightened

Check that thread is not damaged. Retighten connection nuts

Internal pump failure Replace the pump with a new pump (same model) and see if normal operation resumes




VIII – Warranty Our pumps and accessories are warranted for all parts and labor against faulty workmanship (return to factory) for 2 years from delivery date. During the 6 following years, this warranty period of 2 years can be renewed if the maintenance of the pump is made using our PM kit and following the instructions included in "A2CH3 F16 – MAINTENANCE AND REPAIR PROCEDURES". SGPPL FRANCE is not responsible for damage to its products through improper installation, maintenance, use or attempts to operate them beyond their mechanical capacity, intentionally or otherwise, or for unauthorized repair. SGPPL FRANCE shall not be liable for any indirect, special, incidental or consequential damages resulting from the use, failure or malfunction of any product.

® Teflon Du Pont's registered trademarks

A2CH3 F16 – APPENDIX FLOW RATE

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Inlet air pressure (Bar) and air comsumption (NL/min) according tofluid flow rate (l/h) and back pressure (Bar)

0

0,5

1

1,5

2

2,5

3

3,5

4

4,5

5

0 500 1000 1500 2000 2500 3000 3500 4000

Flow Rate l/h

Back

pre

ssur

e (B

ar)

Inlet air pressure 2 barInlet air pressure 2.5 barInlet air pressure 3barInlet air pressure 3.5 barInlet air pressure 4 barInlet air pressure 4.5 barInlet air pressure 5 barAir consumption 50 Nl/minAir consumption 100 Nl/minAir consumption 150 Nl/minAir consumption 200 Nl/min

Please contact us

A2CH3 F16 – APPENDIX SECTION VIEW OF THE PUMP

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A2CH3 F16 – APPENDIX SECTION VIEW OF THE SHUTTLE VALVE

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A2CH3 F16 – SPARE PARTS LIST & MAINTENANCE KIT

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SPARE PARTS LIST - PUMPS A2CH3 F16 MARK PART

NUMBER DESIGNATION QUANTITY

D2 9468 SHUTTLE VALVE 1 F1 9426-0 PFA BODY 2 F2 9429 V SHAPE T&G BELLOW 2 F3 2792 BELLOW VITON ORING 2 F4 9439 CHECK VALVE SEAT 4 F6 9366-100 A2XX3 TUBE 1" HORIZONTAL MANIFOLD 2 M1 9446 PP CORE 1 M2 9437 3/8" G MUFFLER 2 M3 9385 A2 PP PUMP FOOT 2 M4* 9400 M5 PEEK NUT 2 M5 9402 M5 PEEK NUT SUPPORT 2 M6 2793F SHAFT COMPOSITE ORING 4 M7 9474 PTFE GUIDING RING 2 M8 9381 CENTRAL SHAFT 1 M9 9434 BELLOW INSERT 2 M10 2782 C PEEK TIE ROD 8 M11 2783 C PEEK NUT 16 *: M4 included in D2 MAINTENANCE KIT PM A2CH3 FOR PUMPS A2CH3 F16 MARK PART

NUMBER DESIGNATION QUANTITY

D2 9468 SHUTTLE VALVE 1 F2 9429 V SHAPE T&G BELLOW 2 F3 2792 BELLOW VITON ORING 2 F4 9394 CHECK VALVE SEAT 4 M2 9437 3/8" G MUFFLER 2 M4* 9400 M5 PEEK NUT 2 M6 2793F SHAFT COMPOSITE ORING 4 M7 9474 PTFE GUIDING RING 2 M8 9386 CENTRAL SHAFT 1 M9 9435 BELLOW INSERT 2 M10 2782 C PEEK TIE ROD 4 M11 2783 C PEEK NUT 8 *: M4 included in D2

A2CH3 F16 – APPENDIX PUMP SIZES

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PART NUMBER INDEX

A2XX3 00

A2CH3 F16 – APPENDIX INLET AIR PRESSURE / FLUID TEMPERATURE

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Max. static inlet air pressure according to fluid temperature

0

1

2

3

4

5

6

0 20 40 60 80 100 120

Fluid Temperature (°C)

Stat

ic in

let a

ir pr

essu

re (B

ar)

Documents

PUMP A2CH3 F16 - E & S TechnologiesA2CH3 F16 – OPERATING INSTRUCTIONS INDEX DATE N° 00 06/02/09 DC69020 2/16 I – General I.1 – Introduction The Model A2CH3 F16 of the AstiPure